TW202332897A - 多波長臭氧濃度感測器及使用方法 - Google Patents

多波長臭氧濃度感測器及使用方法 Download PDF

Info

Publication number
TW202332897A
TW202332897A TW111135500A TW111135500A TW202332897A TW 202332897 A TW202332897 A TW 202332897A TW 111135500 A TW111135500 A TW 111135500A TW 111135500 A TW111135500 A TW 111135500A TW 202332897 A TW202332897 A TW 202332897A
Authority
TW
Taiwan
Prior art keywords
light signal
wavelength
signal
conduit
light
Prior art date
Application number
TW111135500A
Other languages
English (en)
Chinese (zh)
Inventor
海恩利希 約翰尼斯 賽威特
菲立克斯 葛羅特
克里斯提恩 勒提克
烏爾利希 阿弗烈德 布拉莫
Original Assignee
美商Mks儀器公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商Mks儀器公司 filed Critical 美商Mks儀器公司
Publication of TW202332897A publication Critical patent/TW202332897A/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/031Multipass arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N21/3151Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using two sources of radiation of different wavelengths
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/85Investigating moving fluids or granular solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0039O3
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/18Water
    • G01N33/1893Water using flow cells
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/05Flow-through cuvettes
    • G01N2021/052Tubular type; cavity type; multireflective
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3155Measuring in two spectral ranges, e.g. UV and visible
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/066Modifiable path; multiple paths in one sample
    • G01N2201/0662Comparing measurements on two or more paths in one sample
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/066Modifiable path; multiple paths in one sample
    • G01N2201/0668Multiple paths; optimisable path length
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/20Oxygen containing
    • Y10T436/206664Ozone or peroxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
TW111135500A 2021-09-27 2022-09-20 多波長臭氧濃度感測器及使用方法 TW202332897A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/486,139 2021-09-27
US17/486,139 US12480869B2 (en) 2021-09-27 2021-09-27 Multi-wavelength ozone concentration sensor and method of use

Publications (1)

Publication Number Publication Date
TW202332897A true TW202332897A (zh) 2023-08-16

Family

ID=85718618

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111135500A TW202332897A (zh) 2021-09-27 2022-09-20 多波長臭氧濃度感測器及使用方法

Country Status (7)

Country Link
US (1) US12480869B2 (enExample)
EP (1) EP4409266A4 (enExample)
JP (1) JP2024533727A (enExample)
KR (1) KR20240072224A (enExample)
CN (1) CN118159829A (enExample)
TW (1) TW202332897A (enExample)
WO (1) WO2023048974A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI880724B (zh) * 2023-08-24 2025-04-11 日商三菱電機股份有限公司 臭氧濃度量測裝置、臭氧濃度量測方法、以及臭氧產生系統

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4538679A1 (en) * 2023-10-12 2025-04-16 Sensus Spectrum LLC. Measurement of optical properties of a fluid

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE521061C2 (sv) 1998-12-01 2003-09-30 Tetra Laval Holdings & Finance Förfarande och anordning för koncentrationsmätning av ett ämne i ett vätske-eller gasformigt steriliseringsmedium
US7502114B2 (en) 2004-03-12 2009-03-10 Mks Instruments, Inc. Ozone concentration sensor
JP2012013573A (ja) 2010-07-01 2012-01-19 Ibaraki Univ オゾン濃度計及び該オゾン濃度計を備えたオゾン濃度監視用キット
US9625372B2 (en) * 2012-04-16 2017-04-18 Sensor Electronic Technology, Inc. Ultraviolet-based ozone sensor
KR101487226B1 (ko) 2013-04-18 2015-02-02 한국표준과학연구원 대기중 오존 측정을 위한 표준 교정 방법 및 표준 교정 장치
US9568465B2 (en) 2014-08-21 2017-02-14 Sharp Kabushiki Kaisha Breath analyser and detection methods
US10180395B2 (en) 2015-07-10 2019-01-15 Panasonic Intellectual Property Management Co., Ltd. Functional water concentration sensor
JP6197093B1 (ja) 2016-12-13 2017-09-13 日科ミクロン株式会社 オゾン濃度測定装置
WO2019147220A1 (en) 2018-01-23 2019-08-01 Ows Agri Limited System and method for ozone concentration measurement in ice

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI880724B (zh) * 2023-08-24 2025-04-11 日商三菱電機股份有限公司 臭氧濃度量測裝置、臭氧濃度量測方法、以及臭氧產生系統

Also Published As

Publication number Publication date
JP2024533727A (ja) 2024-09-12
KR20240072224A (ko) 2024-05-23
US12480869B2 (en) 2025-11-25
US20230098744A1 (en) 2023-03-30
CN118159829A (zh) 2024-06-07
EP4409266A4 (en) 2025-07-16
EP4409266A1 (en) 2024-08-07
WO2023048974A1 (en) 2023-03-30

Similar Documents

Publication Publication Date Title
CN1930464B (zh) 臭氧浓度传感器
US9625372B2 (en) Ultraviolet-based ozone sensor
US20170219479A1 (en) Ultraviolet-Based Gas Sensor
US7242001B1 (en) Device for measuring water quality
JPWO2002101337A1 (ja) 液面レベル検出装置
KR20240072224A (ko) 다파장 오존 농도 센서 및 사용 방법
JP2024533727A5 (enExample)
CN107533004B (zh) 透射光强度测定单元
US11686671B2 (en) Concentration measurement device
US10610610B2 (en) Hydrogen peroxide sterilizer with multiple UV sensors
EP4513171A1 (en) Fluid concentration measuring device
JP7462859B1 (ja) オゾン濃度測定装置、オゾン濃度測定方法、および、オゾン発生システム
CN118130406A (zh) 一种水质分析方法、装置及设备
WO2015111207A1 (ja) 流体濃度測定装置
CZ300795A3 (en) Method of measuring ozone concentration in a gaseous medium and apparatus for making the same