JP2024533727A - 多波長オゾン濃度センサ及びその使用法 - Google Patents

多波長オゾン濃度センサ及びその使用法 Download PDF

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Publication number
JP2024533727A
JP2024533727A JP2024518824A JP2024518824A JP2024533727A JP 2024533727 A JP2024533727 A JP 2024533727A JP 2024518824 A JP2024518824 A JP 2024518824A JP 2024518824 A JP2024518824 A JP 2024518824A JP 2024533727 A JP2024533727 A JP 2024533727A
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Japan
Prior art keywords
optical signal
wavelength
signal
light
detector
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Pending
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JP2024518824A
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English (en)
Japanese (ja)
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JP2024533727A5 (enExample
Inventor
ザイヴェルト,ハインリヒ,ヨハネス
グロイティル,フェリックス
ティク,クリスティアーヌ レ
ブラマー,ウルリヒ,アルフレート
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MKS Inc
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MKS Inc
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Publication of JP2024533727A publication Critical patent/JP2024533727A/ja
Publication of JP2024533727A5 publication Critical patent/JP2024533727A5/ja
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/031Multipass arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N21/3151Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using two sources of radiation of different wavelengths
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/85Investigating moving fluids or granular solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0039O3
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/18Water
    • G01N33/1893Water using flow cells
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/05Flow-through cuvettes
    • G01N2021/052Tubular type; cavity type; multireflective
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3155Measuring in two spectral ranges, e.g. UV and visible
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/066Modifiable path; multiple paths in one sample
    • G01N2201/0662Comparing measurements on two or more paths in one sample
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/066Modifiable path; multiple paths in one sample
    • G01N2201/0668Multiple paths; optimisable path length
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/20Oxygen containing
    • Y10T436/206664Ozone or peroxide

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2024518824A 2021-09-27 2022-09-12 多波長オゾン濃度センサ及びその使用法 Pending JP2024533727A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/486,139 2021-09-27
US17/486,139 US12480869B2 (en) 2021-09-27 2021-09-27 Multi-wavelength ozone concentration sensor and method of use
PCT/US2022/043179 WO2023048974A1 (en) 2021-09-27 2022-09-12 Multi-wavelength ozone concentration sensor and method of use

Publications (2)

Publication Number Publication Date
JP2024533727A true JP2024533727A (ja) 2024-09-12
JP2024533727A5 JP2024533727A5 (enExample) 2025-07-14

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ID=85718618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024518824A Pending JP2024533727A (ja) 2021-09-27 2022-09-12 多波長オゾン濃度センサ及びその使用法

Country Status (7)

Country Link
US (1) US12480869B2 (enExample)
EP (1) EP4409266A4 (enExample)
JP (1) JP2024533727A (enExample)
KR (1) KR20240072224A (enExample)
CN (1) CN118159829A (enExample)
TW (1) TW202332897A (enExample)
WO (1) WO2023048974A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121666529A (zh) * 2023-08-24 2026-03-13 三菱电机株式会社 臭氧浓度测定装置、臭氧浓度测定方法以及臭氧产生系统
EP4538679A1 (en) * 2023-10-12 2025-04-16 Sensus Spectrum LLC. Measurement of optical properties of a fluid

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE521061C2 (sv) 1998-12-01 2003-09-30 Tetra Laval Holdings & Finance Förfarande och anordning för koncentrationsmätning av ett ämne i ett vätske-eller gasformigt steriliseringsmedium
US7502114B2 (en) 2004-03-12 2009-03-10 Mks Instruments, Inc. Ozone concentration sensor
JP2012013573A (ja) 2010-07-01 2012-01-19 Ibaraki Univ オゾン濃度計及び該オゾン濃度計を備えたオゾン濃度監視用キット
US9625372B2 (en) * 2012-04-16 2017-04-18 Sensor Electronic Technology, Inc. Ultraviolet-based ozone sensor
KR101487226B1 (ko) 2013-04-18 2015-02-02 한국표준과학연구원 대기중 오존 측정을 위한 표준 교정 방법 및 표준 교정 장치
US9568465B2 (en) 2014-08-21 2017-02-14 Sharp Kabushiki Kaisha Breath analyser and detection methods
US10180395B2 (en) 2015-07-10 2019-01-15 Panasonic Intellectual Property Management Co., Ltd. Functional water concentration sensor
JP6197093B1 (ja) 2016-12-13 2017-09-13 日科ミクロン株式会社 オゾン濃度測定装置
WO2019147220A1 (en) 2018-01-23 2019-08-01 Ows Agri Limited System and method for ozone concentration measurement in ice

Also Published As

Publication number Publication date
TW202332897A (zh) 2023-08-16
KR20240072224A (ko) 2024-05-23
US12480869B2 (en) 2025-11-25
US20230098744A1 (en) 2023-03-30
CN118159829A (zh) 2024-06-07
EP4409266A4 (en) 2025-07-16
EP4409266A1 (en) 2024-08-07
WO2023048974A1 (en) 2023-03-30

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