TW202331267A - Probe capable of improving the inspection accuracy of a connector - Google Patents

Probe capable of improving the inspection accuracy of a connector Download PDF

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Publication number
TW202331267A
TW202331267A TW111148657A TW111148657A TW202331267A TW 202331267 A TW202331267 A TW 202331267A TW 111148657 A TW111148657 A TW 111148657A TW 111148657 A TW111148657 A TW 111148657A TW 202331267 A TW202331267 A TW 202331267A
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Taiwan
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probe
connector
inner bottom
conductive
contact
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TW111148657A
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Chinese (zh)
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本村一生
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日商愛伯股份有限公司
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Abstract

The present disclosure provides a probe 1 for testing a connector 100 having a plurality of contacts 1001, which includes a conductive plunger 4 having a tip portion 42 provided therein a plurality of probe pins 3 to correspond to the plurality of contacts 1001; a conductive housing 8 arranged in such a way that the tip portion 42 is included therein, configured to extend in opposite to the tip surface 423 of the tip portion 42 at the inner bottom surface 823 of an end portion 84, and provided with a bottom portion 82 with a plurality of openings 82H for exposing the plurality of probe pins 3 to the outside; and a conductive abutting auxiliary portion arranged between the tip surface 423 of the tip portion 42 and the inner bottom surface 823 of the bottom portion 82, and capable of being in contact with both the tip surface 423 and the inner bottom surface 823 between at least the plurality of probe pins 3.

Description

探針probe

本揭示係關於一種用於檢查連接器之探針。The disclosure relates to a probe for inspecting connectors.

於專利文獻1揭示有一種於檢查連接器時,使固定柱塞與連接器之導電性殼抵接並接地連接,使複數個探針銷接觸於連接器之各接點之探針。 [先前技術文獻] Patent Document 1 discloses a probe in which a fixed plunger is brought into contact with a conductive shell of the connector and grounded to connect a plurality of probe pins to each contact point of the connector when inspecting the connector. [Prior Art Literature]

專利文獻1:國際公開第2019/069576號Patent Document 1: International Publication No. 2019/069576

如專利文獻1所例示之探針中,因未於探針銷彼此之間之區域確保接地,故於探針銷彼此之間彼此之信號可能產生干涉。其結果,於先前之探針中,阻礙連接器之高精度之檢查。In the probe as exemplified in Patent Document 1, since grounding is not ensured in the area between the probe pins, signals between the probe pins may interfere with each other. As a result, in the conventional probe, high-precision inspection of the connector is hindered.

因此本揭示提供一種提高連接器之檢查精度之探針。Therefore, the present disclosure provides a probe that improves the inspection accuracy of the connector.

本揭示之一態樣之探針係用於檢查具備複數個接點之連接器之探針,且具備:導電性之柱塞,其具有內包以對應於複數個接點方式設置之複數個探針銷之前端部;導電性之殼體,其以內包前端部之方式設置,且具有:底部,其於端部中以與前端部之前端面對向之方式使內底面延伸,形成用以使複數個探針銷露出於外部之複數個開口;及導電性之抵接輔助部,其設置於前端部之前端面及底部之內底面之間,構成為於至少複數個探針銷彼此之間,可與前端面及內底面之雙方接觸。A probe according to an aspect of the present disclosure is a probe for inspecting a connector having a plurality of contacts, and includes: a conductive plunger having a plurality of inner packages corresponding to the plurality of contacts. The front end of the probe pin; the conductive shell, which is arranged to enclose the front end, and has: the bottom, which extends the inner bottom surface in the end to face the front end of the front end, forming a A plurality of openings for exposing a plurality of probe pins to the outside; and a conductive contact auxiliary part, which is provided between the front end surface of the front end and the inner bottom surface of the bottom, and is formed between at least a plurality of probe pins It can be in contact with both the front end surface and the inner bottom surface.

於本揭示之一態樣之探針中,於複數個探針銷彼此之間,抵接輔助部構成為可與前端部之前端面及底部之內底面之雙方接觸(接地接觸)。藉此,可防止於至少複數個探針彼此之間,於前端部與底部之間產生間隙(間隔),成為無法確保接地之狀態。藉此,可抑制於複數個探針銷彼此間無法確保接地之情形時成問題之複數個探針銷彼此間之相互之信號之干涉。其結果,可提高連接器之檢查精度。In the probe according to one aspect of the present disclosure, between the plurality of probe pins, the abutting auxiliary portion is configured to be in contact with both the front end surface of the front end portion and the inner bottom surface of the bottom portion (ground contact). This prevents a gap (interval) from being generated between at least a plurality of probes, between the front end and the bottom, and a state where grounding cannot be ensured. Thereby, it is possible to suppress the interference of signals between the plurality of probe pins which is a problem when the grounding cannot be ensured among the plurality of probe pins. As a result, the inspection accuracy of the connector can be improved.

根據本揭示,可提供一種提高連接器之檢查精度之探針。According to the present disclosure, it is possible to provide a probe that improves the inspection accuracy of a connector.

以下,對於實施形態,一面參照圖式一面進行詳細說明。於說明中,對同一要件或具有同一功能之要件標註同一符號,省略重複之說明。Hereinafter, the embodiment will be described in detail with reference to the drawings. In the description, the same symbol is marked for the same element or the element with the same function, and repeated explanations are omitted.

[第一實施形態] 圖1係顯示第一實施形態之探針1之外觀之圖。圖1(a)係平面圖,圖1(b)係立體圖,圖1(c)係側視圖,圖1(d)係仰視圖。俯視探針1之形狀(參照圖1(a))、及仰視探針1之形狀(參照圖1(d))皆近似於長方形。以下,將沿著該長方形之長邊之方向稱為X軸方向,將沿著該長方形之短邊之方向稱為Y軸方向。將與X軸及Y軸正交之方向即高度方向稱為Z軸方向。X軸、Y軸、及Z軸彼此正交。探針1作為整體具有於Z軸方向延伸之大致柱狀之形狀。 [First Embodiment] Fig. 1 is a diagram showing the appearance of a probe 1 according to the first embodiment. Fig. 1 (a) is a plan view, Fig. 1 (b) is a perspective view, Fig. 1 (c) is a side view, and Fig. 1 (d) is a bottom view. The shape of the probe 1 in a top view (see FIG. 1( a )) and the shape of the probe 1 in a bottom view (see FIG. 1( d )) are both approximately rectangular. Hereinafter, the direction along the long sides of the rectangle is referred to as the X-axis direction, and the direction along the short sides of the rectangle is referred to as the Y-axis direction. The direction perpendicular to the X-axis and the Y-axis, that is, the height direction is referred to as the Z-axis direction. The X axis, the Y axis, and the Z axis are orthogonal to each other. The probe 1 has a substantially columnar shape extending in the Z-axis direction as a whole.

圖2係顯示探針1及連接器100之外觀之圖。圖2(a)係側視圖,圖2(b)係立體圖。探針1係用於檢查連接器100之器具。連接器100係具備複數個接點1001、1001(參照圖3)之多芯連接器。複數個接點1001、1001例如沿著複數行配置。於本實施形態中,連接器100具備:2個接點1001、1001,其等以2行配置;及絕緣殼體1003,其固定接點1001、1001。又,連接器100具有包圍絕緣殼體1003之外周,且劃分複數個接點1001、1001之間之殼1002(參照圖3)。殼1002作為接地連接部發揮功能。連接器100配置於印刷基板(未圖示),連接器100與印刷基板電性連接。又,連接器100於檢查時,電性連接於探針1。於印刷基板,於連接器100以外亦可配置各種零件。FIG. 2 is a diagram showing the appearance of the probe 1 and the connector 100 . Fig. 2(a) is a side view, and Fig. 2(b) is a perspective view. The probe 1 is a tool for inspecting the connector 100 . The connector 100 is a multi-core connector provided with a plurality of contacts 1001, 1001 (see FIG. 3). A plurality of contacts 1001, 1001 are arranged along a plurality of rows, for example. In the present embodiment, the connector 100 includes: two contacts 1001, 1001 arranged in two rows; and an insulating case 1003 which fixes the contacts 1001, 1001. Also, the connector 100 has a shell 1002 surrounding the outer periphery of an insulating shell 1003 and dividing a plurality of contacts 1001, 1001 (see FIG. 3 ). Case 1002 functions as a ground connection. The connector 100 is disposed on a printed substrate (not shown), and the connector 100 is electrically connected to the printed substrate. Moreover, the connector 100 is electrically connected to the probe 1 during inspection. Various components other than the connector 100 may be arranged on the printed circuit board.

探針1與連接器100藉由探針1於Z軸方向動作而電性連接。以下,於Z軸方向中,將自探針1觀察之連接器100位於之方向稱為「下」,將自連接器100觀察之探針1位於之方向稱為「上」。探針1自連接器100觀察配置於上方向。於探針1與連接器100連接時,作為對於將探針1向下方向按壓之力之反作用,對探針1施加朝上方向按壓之力(以下,稱為「按壓力」。)。將未對探針1施加按壓力之狀態稱為初始狀態,將已施加按壓力之狀態稱為行程狀態。The probe 1 and the connector 100 are electrically connected by the probe 1 moving in the Z-axis direction. Hereinafter, in the Z-axis direction, the direction in which the connector 100 is located viewed from the probe 1 is referred to as "down", and the direction in which the probe 1 is located viewed from the connector 100 is referred to as "up". The probe 1 is arranged upwardly as viewed from the connector 100 . When the probe 1 is connected to the connector 100 , an upward pressing force (hereinafter referred to as “pressing force”) is applied to the probe 1 as a reaction to the downward pressing force on the probe 1 . The state where no pressing force is applied to the probe 1 is called an initial state, and the state where a pressing force is applied is called a stroke state.

參照圖3,說明探針1之構成。圖3係顯示於探針1抵接於連接器100前之狀態下,沿著圖1(a)之A-A線之剖面之剖視圖。探針1具備導電部2、探針銷3、柱塞4、基板5、凸緣6、彈簧7、殼體8、帽蓋9、及間隔件10(抵接輔助部)。Referring to FIG. 3 , the structure of the probe 1 will be described. FIG. 3 is a cross-sectional view along line A-A of FIG. The probe 1 includes a conductive part 2, a probe pin 3, a plunger 4, a substrate 5, a flange 6, a spring 7, a case 8, a cap 9, and a spacer 10 (abutting auxiliary part).

導電部2與探針銷3電性連接。此處之「電性連接」意指除藉由使導電部2與探針銷3物理性直接連接而將導電部2與探針銷3電性連接之情形外,包含經由配置於導電部2與探針銷3之間之導電性零件(例如基板5),將導電部2與探針銷3間接性連接,藉此使導電部2與探針銷3電性連接之情形。又,導電部2例如與外部之檢查設備等電性連接。The conductive part 2 is electrically connected to the probe pin 3 . "Electrical connection" here refers to the case of electrically connecting the conductive part 2 and the probe pin 3 by physically directly connecting the conductive part 2 to the probe pin 3, including the case of disposing the conductive part 2 on the conductive part 2. The conductive part (such as the substrate 5 ) between the probe pins 3 indirectly connects the conductive part 2 to the probe pins 3 , thereby electrically connecting the conductive part 2 to the probe pins 3 . In addition, the conductive part 2 is electrically connected to external inspection equipment and the like, for example.

例如,導電部2具有複數(例如2根)同軸電纜21、與複數(例如2根)導電構件22。同軸電纜21係由沿Z軸方向延伸之絕緣體被覆之導體。導電構件22係於Z軸方向延伸之導電性之零件(例如含有金屬之導體或配線等)。同軸電纜21與導電構件22電性連接。導電部2亦可僅由同軸電纜21及導電構件22之至少一者構成。For example, the conductive part 2 has a plurality (for example, two) of coaxial cables 21 and a plurality of (for example, two) of conductive members 22 . The coaxial cable 21 is a conductor covered with an insulator extending in the Z-axis direction. The conductive member 22 is a conductive part (such as a metal-containing conductor or wiring) extending in the Z-axis direction. The coaxial cable 21 is electrically connected to the conductive member 22 . The conductive part 2 may also consist of only at least one of the coaxial cable 21 and the conductive member 22 .

探針銷3係針狀之導電性之零件,即例如彈簧針。探針銷3以一對一對應於連接器100之複數個接點1001、1001之方式設置複數根(例如2根),且沿著Z軸方向延伸。探針銷3之前端於Z軸方向與連接器100對向。於本實施形態中,「對向」意指亦包含對向之物品彼此之間存在其他構件等之情形。The probe pin 3 is a needle-shaped conductive part, such as a pogo pin. The probe pins 3 are provided in a plurality (for example, two) corresponding to the plurality of contact points 1001, 1001 of the connector 100 one-to-one, and extend along the Z-axis direction. The front end of the probe pin 3 faces the connector 100 in the Z-axis direction. In the present embodiment, "facing" means also including the case where there are other members or the like between objects facing each other.

基板5係將導電部2、與複數個探針銷3相互電性連接之大致圓柱狀之零件。基板5具有第1主面51、及與第1主面51對向之第2主面52。基板5於第1主面51與導電部2電性連接。基板5於第2主面52與複數個探針銷3電性連接。基板5之細節予以後述。The substrate 5 is a roughly cylindrical part that electrically connects the conductive part 2 and the plurality of probe pins 3 to each other. The substrate 5 has a first main surface 51 and a second main surface 52 facing the first main surface 51 . The substrate 5 is electrically connected to the conductive portion 2 on the first main surface 51 . The substrate 5 is electrically connected to the plurality of probe pins 3 on the second main surface 52 . Details of the substrate 5 will be described later.

柱塞4係具有本體部41、及前端部42之導電性零件。本體部41形成為大致圓柱狀,內包導電部2之至少一部分。具體而言,本體部41內包複數根同軸電纜21之一部分、及複數根導電構件22,沿著該等之構成於Z軸方向延伸。本體部41具有上表面411、底面412、及自上表面411跨及底面412於Z軸方向設置之側面413,構成圓柱形狀。於本體部41自上表面411跨及底面412,形成沿著Z軸方向之複數個貫通孔41H。於複數個貫通孔41H配置分別內包構成導管部2之導電構件22等之絕緣體D。例如,於複數個貫通孔41H,同軸電纜21自上表面411沿著Z軸方向插入,藉由套環C填埋同軸電纜21之插入部位之間隙。底面412於Z軸方向上與基板5對向。導電部2(例如導電構件22)之前端自底面412露出。The plunger 4 is a conductive part having a main body 41 and a front end 42 . The main body portion 41 is formed in a substantially cylindrical shape and includes at least a part of the conductive portion 2 . Specifically, the main body portion 41 includes a part of the plurality of coaxial cables 21 and the plurality of conductive members 22, and extends in the Z-axis direction along these configurations. The main body 41 has an upper surface 411 , a bottom surface 412 , and a side surface 413 disposed in the Z-axis direction across the upper surface 411 and the bottom surface 412 , forming a cylindrical shape. A plurality of through-holes 41H along the Z-axis direction are formed in the body portion 41 from the upper surface 411 to the bottom surface 412 . The insulators D each enclosing the conductive member 22 and the like constituting the duct portion 2 are arranged in the plurality of through holes 41H. For example, in the plurality of through-holes 41H, the coaxial cable 21 is inserted from the upper surface 411 along the Z-axis direction, and the gap of the insertion part of the coaxial cable 21 is filled by the collar C. The bottom surface 412 faces the substrate 5 in the Z-axis direction. The front end of the conductive part 2 (for example, the conductive member 22 ) is exposed from the bottom surface 412 .

於本體部41之下部415形成有圓環板狀之突出部416。另,此處之下部415除指本體部41之下端外,還包含下端之附近(靠近下端之區域)。突出部416以側面413為基端,朝X軸方向之外側突出。圓環板狀之突出部416之上表面4161於Z方向與後述之圓環部62之下表面622對向。突出部416之下表面4162於Z軸方向與後述之底部82之上表面821對向。A protruding portion 416 in the shape of an annular plate is formed on the lower portion 415 of the main body portion 41 . In addition, the lower part 415 here refers not only to the lower end of the main body part 41, but also includes the vicinity of the lower end (the region near the lower end). The protruding portion 416 protrudes outward in the X-axis direction with the side surface 413 as a base end. The upper surface 4161 of the annular plate-shaped protruding portion 416 faces the lower surface 622 of the annular portion 62 described later in the Z direction. The lower surface 4162 of the protruding portion 416 faces the upper surface 821 of the bottom 82 described later in the Z-axis direction.

前端部42形成為柱狀,配置於本體部41之下部415,固定於本體部41。前端部42內包複數個探針銷3,且收納基板5,沿著複數個探針銷3於Z軸方向延伸。基板5以夾入本體部41與前端部42之間之方式配置。The front end portion 42 is formed in a columnar shape, is disposed on the lower portion 415 of the main body portion 41 , and is fixed to the main body portion 41 . The front end portion 42 includes a plurality of probe pins 3 , accommodates the substrate 5 , and extends in the Z-axis direction along the plurality of probe pins 3 . The substrate 5 is disposed so as to be sandwiched between the main body portion 41 and the front end portion 42 .

一面參照圖4~圖6,一面對前端部42、基板5及探針銷3進行說明。圖4係顯示基板5收納於前端部42之狀態之外觀之圖。圖4(a)係平面圖,圖4(b)係立體圖,圖4(c)係側視圖。前端部42具有支持部421、與保持部422。支持部421形成為有底圓筒狀,收納基板5。保持部422形成為柱狀,將連接於支持部421之部位作為基端(上端)於Z軸方向(下方)延伸,內包複數個探針銷3。又,前端部42具有為Z軸方向之下端面之前端面423。又,保持部422以複數個探針銷3之前端(下端)分別自前端面423露出之方式保持複數個探針銷3。The front end portion 42 , the substrate 5 and the probe pins 3 will be described with reference to FIGS. 4 to 6 . FIG. 4 is a diagram showing the appearance of a state where the substrate 5 is housed in the front end portion 42 . Figure 4(a) is a plan view, Figure 4(b) is a perspective view, and Figure 4(c) is a side view. The front end portion 42 has a support portion 421 and a holding portion 422 . The support portion 421 is formed in a bottomed cylindrical shape, and accommodates the substrate 5 . The holding part 422 is formed in a columnar shape, extends in the Z-axis direction (downward) with a portion connected to the supporting part 421 as a base end (upper end), and encloses a plurality of probe pins 3 therein. In addition, the front end portion 42 has a front end surface 423 which is a lower end surface in the Z-axis direction. Furthermore, the holding portion 422 holds the plurality of probe pins 3 so that the front ends (lower ends) of the plurality of probe pins 3 are exposed from the front end surface 423 , respectively.

圖5係顯示基板5收納於前端部42前之狀態之外觀之分解立體圖。基板5具有信號導電部53、接地導電部54。信號導電部53自第1主面51跨及第2主面設置。信號導電部53藉由於第1主面51接觸於複數根導電構件22,且於第2主面52接觸於複數個探針銷3,將導電部2與複數個探針銷3電性連接。接地導電部54係設置於第1主面51及第2主面52之各者之導電性之層狀體。FIG. 5 is an exploded perspective view showing the appearance of the state before the substrate 5 is accommodated in the front end portion 42 . The substrate 5 has a signal conductive portion 53 and a ground conductive portion 54 . The signal conductive portion 53 is provided across from the first main surface 51 to the second main surface. The signal conductive part 53 is electrically connected to the conductive part 2 and the plurality of probe pins 3 by contacting the plurality of conductive members 22 on the first main surface 51 and contacting the plurality of probe pins 3 on the second main surface 52 . The ground conductive portion 54 is a conductive layered body provided on each of the first main surface 51 and the second main surface 52 .

支持部421具有:上表面4211;凹部4212,其以上表面4211凹陷之方式形成;及內底面4213,其係凹部4212之底面。凹部4212收納基板5。換言之,凹部4212作為基板5之托盤發揮功能。內底面4213與基板5之第2主面對向。於內底面4213,複數個探針銷3之上端(另一端部)露出。The supporting portion 421 has: an upper surface 4211 ; a concave portion 4212 formed in such a manner that the upper surface 4211 is depressed; and an inner bottom surface 4213 which is the bottom surface of the concave portion 4212 . The recess 4212 accommodates the substrate 5 . In other words, the concave portion 4212 functions as a tray for the substrate 5 . The inner bottom surface 4213 faces the second main surface of the substrate 5 . On the inner bottom surface 4213, the upper ends (other ends) of the plurality of probe pins 3 are exposed.

圖6係顯示沿著圖4(a)之B-B線之剖面之剖視圖。本實施形態之基板5係堆積基板。例如,基板5藉由基底層BL、與夾著基底層BL而形成第1主面51及第2主面52之複數個堆積層UL構成。Fig. 6 is a sectional view showing a section along line B-B of Fig. 4(a). The substrate 5 of this embodiment is a buildup substrate. For example, the substrate 5 is composed of a base layer BL and a plurality of buildup layers UL forming the first main surface 51 and the second main surface 52 with the base layer BL interposed therebetween.

信號導電部53具有設置於堆積層UL之第1信號導電部531、與設置於基底層BL之第2信號導電部532。設置於形成第1主面51之堆積層UL之第1信號導電部531與導電構件22電性連接。設置於形成第2主面52之堆積層UL之第1信號導電部531與探針銷3電性連接。第2信號導電部532於設置於形成第1主面51之堆積層UL之第1信號導電部531、與設置於形成第2主面52之堆積層UL之第1信號導電部531之間中繼電性連接。The signal conduction part 53 has the 1st signal conduction part 531 provided in the buildup layer UL, and the 2nd signal conduction part 532 provided in the base layer BL. The first signal conductive portion 531 provided on the buildup layer UL forming the first main surface 51 is electrically connected to the conductive member 22 . The first signal conductive portion 531 provided on the buildup layer UL forming the second main surface 52 is electrically connected to the probe pins 3 . The second signal conductive part 532 is between the first signal conductive part 531 provided on the buildup layer UL forming the first main surface 51 and the first signal conductive part 531 provided on the buildup layer UL forming the second main surface 52 Relay connection.

基板5變換導電部2之間距與複數個探針銷3之間距。例如,複數根導電構件22之間距大於複數個探針銷3之間距。對應於該間距之不同,第1主面51之第1信號導電部531之間距大於第2主面52之第1信號導電部531之間距。即,第1信號導電部531對應於第1主面51之位置與第2主面52之位置,變換導電部2之間距、與複數個探針銷3之間距。The substrate 5 converts the distance between the conductive parts 2 and the distance between the plurality of probe pins 3 . For example, the distance between the plurality of conductive members 22 is greater than the distance between the plurality of probe pins 3 . Corresponding to the difference in pitch, the distance between the first signal conductive portions 531 on the first main surface 51 is greater than the distance between the first signal conductive portions 531 on the second main surface 52 . That is, the first signal conducting part 531 corresponds to the position of the first main surface 51 and the position of the second main surface 52 , and changes the distance between the conducting parts 2 and the distance between the plurality of probe pins 3 .

第1信號導電部531之徑小於第2信號導電部532之徑。例如,基底層BL之第2信號導電部532之徑藉由貫通通孔形成。且,堆積層UL之第1信號導電部531之徑藉由雷射導孔形成。雷射導孔可將孔之徑形成得小於貫通通孔。The diameter of the first signal conducting portion 531 is smaller than the diameter of the second signal conducting portion 532 . For example, the diameter of the second signal conductive portion 532 of the base layer BL is formed by a through hole. Moreover, the diameter of the first signal conductive portion 531 of the buildup layer UL is formed by a laser via. The laser guide hole can be formed with a smaller diameter than the through hole.

作為比較例,說明僅藉由貫通通孔形成之基板。於該情形時,於基板之各面形成相同間距之孔。其後,因於基板之一面設置變換間距之配線等,致使一面產生無需之部分(殘餘部分)。與此相對,因本實施形態之基板5係堆積基板,故可以不產生殘餘部分之方式製造。例如,如圖6所示,雖於本實施形態之基板5中,未於範圍S之位置產生殘餘部分,但於比較例之基板中,於對應於範圍S之位置產生殘餘部分。本實施形態之基板5較比較例之基板提高高頻(例如5 GHz以上)區域之信號之反射特性(Return Loss:電路損耗)。As a comparative example, a substrate formed only with through-holes will be described. In this case, holes with the same pitch are formed on each surface of the substrate. Afterwards, since wiring with a variable pitch is provided on one side of the substrate, unnecessary parts (remaining parts) are generated on one side. On the other hand, since the substrate 5 of the present embodiment is a stacked substrate, it can be manufactured without generating any residue. For example, as shown in FIG. 6 , in the substrate 5 of the present embodiment, residual portions are not generated at the positions of the range S, but residual portions are generated at positions corresponding to the range S in the substrate of the comparative example. The substrate 5 of this embodiment improves the reflection characteristics (Return Loss: circuit loss) of signals in a high-frequency (for example, 5 GHz or higher) region than the substrate of the comparative example.

接地導電部54具有於第1主面51上露出之第1接地導電部541、與於第2主面52上露出之第2接地導電部542。第1接地導電部541及第2接地導電部542具有例如藉由電鍍形成之多層構造。第1接地導電部541包圍第1主面51之信號導電部53(第1信號導電部531)。例如,於如圖5所示般俯視基板5時,於第1主面51,複數個(例如2個)第1信號導電部531設置於X軸方向之兩端附近,第1接地導電部541以包圍第1信號導電部531之周圍之方式設置。又,第2接地導電部542包圍第2主面52之信號導電部53(第1信號導電部531)。例如,於仰視基板5時亦同樣,於第2主面52,複數個(例如2個)第1信號導電部531設置於X軸方向之兩端附近,第2接地導電部542以包圍第1信號導電部531之周圍之方式設置(未圖示)。The ground conductive part 54 has a first ground conductive part 541 exposed on the first main surface 51 and a second ground conductive part 542 exposed on the second main surface 52 . The first ground conductive part 541 and the second ground conductive part 542 have a multilayer structure formed by, for example, plating. The first ground conductive portion 541 surrounds the signal conductive portion 53 (the first signal conductive portion 531 ) of the first main surface 51 . For example, when the substrate 5 is viewed from above as shown in FIG. It is provided so as to surround the periphery of the first signal conductive portion 531 . Also, the second ground conductive portion 542 surrounds the signal conductive portion 53 (first signal conductive portion 531 ) of the second main surface 52 . For example, when the substrate 5 is viewed from above, on the second main surface 52, a plurality of (for example, two) first signal conductive parts 531 are arranged near both ends in the X-axis direction, and the second ground conductive part 542 surrounds the first signal conductive part 542. The signal conducting portion 531 is arranged around the periphery (not shown).

如圖6所示基板5之高度大於支持部421之凹部4212之深度。更詳細而言,基板5之第1主面51與第2主面52之間之距離H1大於支持部421之上表面4211與內底面4213之間之距離H2。因此,若基板5收納於凹部4212,則基板5之第1主面5較支持部421之上表面4211更露出。As shown in FIG. 6 , the height of the substrate 5 is greater than the depth of the concave portion 4212 of the supporting portion 421 . More specifically, the distance H1 between the first main surface 51 and the second main surface 52 of the substrate 5 is greater than the distance H2 between the upper surface 4211 and the inner bottom surface 4213 of the supporting portion 421 . Therefore, if the substrate 5 is accommodated in the concave portion 4212 , the first main surface 5 of the substrate 5 is exposed more than the upper surface 4211 of the supporting portion 421 .

返回至圖3,凸緣6具有板狀構件61、及與板狀構件61個別形成之圓環部62。板狀構件61係用以將探針1固定於檢查設備之板狀之零件。俯視板狀構件61之形狀為大致長方形。板狀構件61具有上表面611、與下表面612。於板狀構件61自上表面611之中央跨及下表面612之中央形成有貫通孔61H。於俯視上表面611時、或仰視下表面612時,形成貫通孔61H之區域以圓形貫穿。又,於板狀構件61,於沿著X軸方向之兩端部,以自上表面611跨及下表面612,夾著貫通孔61H之方式形成有一對孔61W。凸緣6藉由經由孔61W進行緊固,而將探針1固定於檢查設備。另,孔61W亦可為所謂之螺紋孔(參照圖1(a)、(d))。Returning to FIG. 3 , the flange 6 has a plate-shaped member 61 and an annular portion 62 formed separately from the plate-shaped member 61 . The plate-shaped member 61 is a plate-shaped part for fixing the probe 1 to the inspection equipment. The shape of the planar member 61 is substantially rectangular. The plate member 61 has an upper surface 611 and a lower surface 612 . A through hole 61H is formed in the plate member 61 from the center of the upper surface 611 to the center of the lower surface 612 . When the upper surface 611 is viewed from above or the lower surface 612 is viewed from below, the region where the through hole 61H is formed penetrates in a circular shape. In addition, a pair of holes 61W are formed in the plate-shaped member 61 so as to sandwich the through-hole 61H from the upper surface 611 to the lower surface 612 at both end portions along the X-axis direction. The flange 6 fixes the probe 1 to the inspection equipment by fastening through the hole 61W. In addition, the hole 61W may be a so-called threaded hole (see FIG. 1( a ), ( d )).

板狀構件61之上表面611固定與板狀構件61分開形成之棒狀之銷P。銷P具有上端部P1、與固定於上表面611之下端部P2。A bar-shaped pin P formed separately from the plate-like member 61 is fixed to the upper surface 611 of the plate-like member 61 . The pin P has an upper end P1 and a lower end P2 fixed on the upper surface 611 .

圓環部62係圓環板狀之零件,例如藉由聚縮醛樹脂等之滑動性較高之構件構成。圓環部62具有上表面621、與下表面622。圓環部62沿著板狀構件61之貫通孔61H之外周,配置於板狀構件61之下表面612。又,圓環部62於本體部41之上部414,包圍側面413。The annular portion 62 is an annular plate-shaped part, and is made of, for example, a highly slidable member such as polyacetal resin. The ring portion 62 has an upper surface 621 and a lower surface 622 . The annular portion 62 is disposed on the lower surface 612 of the plate member 61 along the outer periphery of the through hole 61H of the plate member 61 . In addition, the ring portion 62 surrounds the side surface 413 on the upper portion 414 of the main body portion 41 .

於圓環部62自上表面621跨及下表面622形成有貫通孔62H。貫通孔62H沿著圓環部62之周向以特定之間隔形成複數個(例如4個)(參照圖2(b))。後述之殼體8之肋部83自下表面622插入貫通孔62H。A through hole 62H is formed in the annular portion 62 from the upper surface 621 to the lower surface 622 . The through holes 62H are formed in plural (for example, four) at predetermined intervals along the circumferential direction of the annular portion 62 (see FIG. 2( b )). A rib 83 of the case 8 described later is inserted into the through hole 62H from the lower surface 622 .

彈簧7具有第一彈簧71、與第二彈簧72。第一彈簧71係線圈彈簧。第一彈簧71配置於凸緣6之圓環部62與柱塞4之突出部416之間。具體而言,第一彈簧71以夾入圓環部62之下表面622與突出部416之上表面4161之間之方式配置。第一彈簧71藉由將突出部416向自圓環部62離開之方向賦能,而將柱塞4向自凸緣6離開之方向賦能。於初始狀態下,第一彈簧71自圓環部62之下表面622,對柱塞4施加朝下方之賦能力。藉由第一彈簧71,柱塞4保持於自凸緣6空出特定間隔之初始位置。於行程狀態下,第一彈簧71成為於Z軸方向收縮之狀態。The spring 7 has a first spring 71 and a second spring 72 . The first spring 71 is a coil spring. The first spring 71 is disposed between the annular portion 62 of the flange 6 and the protruding portion 416 of the plunger 4 . Specifically, the first spring 71 is disposed so as to be sandwiched between the lower surface 622 of the annular portion 62 and the upper surface 4161 of the protruding portion 416 . The first spring 71 energizes the plunger 4 in the direction away from the flange 6 by energizing the protruding portion 416 in the direction away from the annular portion 62 . In the initial state, the first spring 71 exerts downward force on the plunger 4 from the lower surface 622 of the annular portion 62 . By means of the first spring 71 , the plunger 4 is held at the initial position with a certain distance from the flange 6 . In the stroke state, the first spring 71 is contracted in the Z-axis direction.

第二彈簧72係線圈彈簧。第二彈簧72配置於柱塞4之突出部416、與後述之殼體8之底部82之間。具體而言,第二彈簧72以夾入突出部416之下表面4162、與後述之底部82之上表面821之間之方式配置。第二彈簧72藉由將底部82向自突出部416離開之方向賦能,而將殼體8向自柱塞4離開之方向賦能。於初始狀態下,第二彈簧72自突出部416之下表面4162,對底部82施加朝下方之賦能力。藉由第二彈簧72,殼體8保持於自柱塞4空出特定之間隔之初始位置。於行程狀態下,第二彈簧72成為於Z軸方向收縮之狀態。The second spring 72 is a coil spring. The second spring 72 is disposed between the protruding portion 416 of the plunger 4 and the bottom portion 82 of the housing 8 which will be described later. Specifically, the second spring 72 is arranged to be sandwiched between the lower surface 4162 of the protruding portion 416 and the upper surface 821 of the bottom portion 82 which will be described later. The second spring 72 energizes the housing 8 in a direction away from the plunger 4 by energizing the bottom 82 in a direction away from the protrusion 416 . In the initial state, the second spring 72 exerts downward force on the bottom 82 from the lower surface 4162 of the protruding portion 416 . By means of the second spring 72 , the housing 8 is held in the initial position with a certain distance from the plunger 4 . In the stroke state, the second spring 72 is contracted in the Z-axis direction.

第一彈簧71及第二彈簧72包圍本體部41之側面413,配置於同心軸上。此處之「同心軸上」意指第一彈簧71之徑向之中心與第二彈簧72之徑向之中心處於同一軸直線上。軸直線意指沿著Z軸方向之直線。The first spring 71 and the second spring 72 surround the side surface 413 of the main body 41 and are disposed on a concentric shaft. Here, "on the concentric axis" means that the radial center of the first spring 71 and the radial center of the second spring 72 are on the same axial line. Axis straight line means a straight line along the Z-axis direction.

殼體8係形成為大致筒狀,沿著Z軸方向延伸之導電性構件。殼體8收納柱塞4、第一彈簧71及第二彈簧72。殼體8具有基部81、底部82、及肋部83。The case 8 is a substantially cylindrical conductive member extending along the Z-axis direction. The case 8 accommodates the plunger 4 , the first spring 71 and the second spring 72 . The housing 8 has a base 81 , a bottom 82 , and ribs 83 .

基部81形成為大致有底圓筒狀,於延伸方向之一方向(下方)具有底部811。於底面811之中央附近形成有孔81H。底部82設置為,於殼體8之延伸方向之一方向(下方)之端部84(一端),自沿著基部81之底面811延伸之板狀構件822,經由基部81之孔81H,沿著Z軸方向朝下方向使角筒延伸。底部82具有設置角筒之面之相反側之面即上表面821。上表面821與突出部416之下表面4162對向,夾入第二彈簧72。底部82具有以於一端部84中與前端部42之前端面423對向之方式延伸之內底面823。又,於底部82形成有用以分別將複數個探針銷3之前端露出於外部之複數個開口82H。底部82之複數個開口82H之間之部分與劃分連接器100之複數個接點1001、1001之間之殼1002接觸。藉由該接觸,進行連接器100與殼體8之接地接觸。The base 81 is formed in a substantially bottomed cylindrical shape, and has a bottom 811 in one direction (downward) of the extending direction. A hole 81H is formed near the center of the bottom surface 811 . The bottom 82 is provided so that the end 84 (one end) in one direction (downward) of the extending direction of the housing 8 passes through the hole 81H of the base 81 from the plate-like member 822 extending along the bottom surface 811 of the base 81 , along the The Z-axis direction extends the corner tube downward. The bottom 82 has an upper surface 821 which is an opposite side to the surface on which the corner cylinder is disposed. The upper surface 821 is opposite to the lower surface 4162 of the protruding portion 416 and sandwiches the second spring 72 . The bottom portion 82 has an inner bottom surface 823 extending in the one end portion 84 so as to face the front end surface 423 of the front end portion 42 . Also, a plurality of openings 82H for exposing the front ends of the plurality of probe pins 3 to the outside are formed in the bottom portion 82 . The portion between the plurality of openings 82H of the bottom 82 is in contact with the housing 1002 that divides the plurality of contacts 1001 , 1001 of the connector 100 . Through this contact, the ground contact of the connector 100 and the housing 8 is made.

殼體8以內包前端部42之方式設置,進而具有於端部84中進行對於連接器100之定位之引導部86。引導部86與連接器100嵌合。引導部86之前端(下端)部分以越前端厚度變得越薄(開口形狀變大)之方式設為錐形形狀。例如,引導部86於X軸方向設置一對錐形形狀,且於Y軸方向設置一對錐形形狀。引導部86於Z軸方向接近連接器100時,沿著錐形形狀之傾斜調整連接器100之位置。The housing 8 is provided so as to enclose the front end portion 42 , and further has a guide portion 86 for positioning the connector 100 at the end portion 84 . The guide portion 86 fits into the connector 100 . The front end (lower end) portion of the guide portion 86 has a tapered shape so that the thickness becomes thinner (the opening shape becomes larger) as the front end becomes thinner. For example, the guide portion 86 has a pair of tapered shapes in the X-axis direction, and a pair of tapered shapes in the Y-axis direction. When the guide portion 86 approaches the connector 100 in the Z-axis direction, the position of the connector 100 is adjusted along the inclination of the tapered shape.

肋部83於殼體8之延伸方向之另一方向(上方)之端部85,連續設置於基板81。例如,肋部83係以將基部81作為基端沿著Z軸方向於上方向延伸之方式設置之板狀之突起。肋部83沿著基部81之周向以特定之間隔設置複數個(例如4個)(參照圖2(b))。肋部83自圓環部62之下表面622,插入至貫通孔62H。The end portion 85 of the rib portion 83 in the other direction (upper direction) of the extending direction of the casing 8 is continuously provided on the base plate 81 . For example, the rib 83 is a plate-shaped protrusion provided so as to extend upward along the Z-axis direction with the base 81 as a base end. A plurality of ribs 83 (for example, four) are provided at predetermined intervals along the circumferential direction of the base 81 (see FIG. 2( b )). The rib 83 is inserted into the through hole 62H from the lower surface 622 of the annular portion 62 .

帽蓋9係大致正方體狀之零件。帽蓋9以包圍殼體8之肋部83之周圍之方式配置。帽蓋9具有上表面91、與底面92。於帽蓋9自上表面91之中央跨及底面92之中央,形成沿著Z軸方向之孔9H。於俯視上表面91時或仰視底面92時,形成孔9H之區域以圓形貫穿。上表面91之孔9H之徑小於底面92之孔9H之徑。底面92與板狀構件61之上表面611對向。底面92之孔9H連通於板狀構件61之上表面611之貫通孔61H。於孔9H,自底面92插入殼體8之肋部83,與上表面91之下端部93相接。亦可藉由使安裝於肋部83之絕緣體E與下端部93相接,而間接地與肋部83相接。Cap 9 is a roughly cube-shaped part. The cap 9 is disposed so as to surround the periphery of the rib 83 of the case 8 . The cap 9 has an upper surface 91 and a bottom surface 92 . A hole 9H along the Z-axis direction is formed in the cap 9 from the center of the upper surface 91 to the center of the bottom surface 92 . When the top surface 91 is viewed from above or the bottom surface 92 is viewed from below, the region where the hole 9H is formed penetrates in a circular shape. The diameter of the hole 9H of the upper surface 91 is smaller than the diameter of the hole 9H of the bottom surface 92 . The bottom surface 92 faces the upper surface 611 of the plate member 61 . The hole 9H of the bottom surface 92 communicates with the through hole 61H of the upper surface 611 of the plate member 61 . In the hole 9H, the rib 83 of the casing 8 is inserted from the bottom surface 92, and is in contact with the lower end 93 of the upper surface 91. The insulator E attached to the rib 83 may also be in contact with the rib 83 indirectly by contacting the lower end 93 .

於帽蓋9之底面92,於X軸方向之兩端部形成有複數個(例如2個)銷孔92H。銷孔92H自底面92於上表面91方向(上方向)形成,但未到達上表面91(未貫通)。於銷孔92H之最深部形成有孔底94。銷P以對應於銷孔92H之方式配置於板狀構件61之上表面611。於行程狀態下,銷P之上端部P1自孔底94離開。On the bottom surface 92 of the cap 9 , a plurality of (for example, two) pin holes 92H are formed at both ends in the X-axis direction. The pin hole 92H is formed from the bottom surface 92 in the upper surface 91 direction (upward direction), but does not reach the upper surface 91 (does not penetrate). A hole bottom 94 is formed at the deepest portion of the pin hole 92H. The pin P is arranged on the upper surface 611 of the plate member 61 so as to correspond to the pin hole 92H. In the stroke state, the upper end P1 of the pin P leaves the hole bottom 94 .

設置於探針1之下方之間隔件10係藉由可彈性變形之板狀構件構成之導電性零件。間隔件10係與柱塞4及殼體8不同(獨立)之構件。間隔件10設置於前端部42之前端面423及底部82之內底面823之間。間隔件10構成為於至少複數個探針銷3彼此之間(於X軸方向夾於探針銷3彼此之區域),可接觸前端面423及內底面823之雙方。例如,間隔件10於探針1之行程狀態下使前端面423與內底面823電性接觸。換言之,間隔件10係輔助前端面423與內底面823之抵接之抵接輔助部。The spacer 10 disposed below the probe 1 is a conductive part made of an elastically deformable plate-shaped member. The spacer 10 is a member different (independent) from the plunger 4 and the housing 8 . The spacer 10 is disposed between the front end surface 423 of the front end portion 42 and the inner bottom surface 823 of the bottom portion 82 . The spacer 10 is configured to be able to contact both the front end surface 423 and the inner bottom surface 823 between at least a plurality of probe pins 3 (a region sandwiched between the probe pins 3 in the X-axis direction). For example, the front end surface 423 of the spacer 10 is in electrical contact with the inner bottom surface 823 in the stroke state of the probe 1 . In other words, the spacer 10 is an abutment assisting portion that assists the abutment between the front end surface 423 and the inner bottom surface 823 .

圖7係顯示間隔件10之外觀之圖。圖7(a)係平面圖,圖7(b)係立體圖,圖7(c)係側視圖。俯視間隔件10之形狀(參照圖7(a))近似於長方形。於間隔件10設置有用以插通複數個探針銷3之複數個開口10H。間隔件10具有上表面101、與下表面102。上表面101與前端部42之前端面423對向。下表面102與底部82之內底面823對向。上表面101於探針1之行程狀態下與前端面423接觸。上表面101於探針1之初始狀態下不與前端面423接觸。下表面102於探針1之初始狀態及行程狀態下與內底面823接觸。FIG. 7 is a diagram showing the appearance of the spacer 10 . Figure 7(a) is a plan view, Figure 7(b) is a perspective view, and Figure 7(c) is a side view. The shape (see FIG. 7( a )) of the spacer 10 in plan view is approximately rectangular. A plurality of openings 10H through which a plurality of probe pins 3 are inserted are provided in the spacer 10 . The spacer 10 has an upper surface 101 and a lower surface 102 . The upper surface 101 faces the front end surface 423 of the front end portion 42 . The lower surface 102 is opposite to the inner bottom surface 823 of the bottom 82 . The upper surface 101 is in contact with the front end surface 423 in the stroke state of the probe 1 . The upper surface 101 is not in contact with the front end surface 423 in the initial state of the probe 1 . The lower surface 102 is in contact with the inner bottom surface 823 in the initial state and stroke state of the probe 1 .

[行程] 接著,參照圖8及圖9,對探針1之初始狀態及行程狀態進行說明。圖8係顯示於連接器100抵接於探針1之狀態下,沿著圖1(a)之A-A線之剖面之剖視圖。於圖8中,探針1不按壓於連接器100。即,圖8顯示探針1之初始狀態。 [journey] Next, the initial state and stroke state of the probe 1 will be described with reference to FIGS. 8 and 9 . FIG. 8 is a cross-sectional view along the line A-A of FIG. 1( a ) in the state where the connector 100 abuts against the probe 1 . In FIG. 8 , the probe 1 is not pressed against the connector 100 . That is, FIG. 8 shows the initial state of the probe 1 .

柱塞4構成為可根據第二彈簧72之彈性力,於不將探針銷3之前端自殼體8之底部82之開口82H露出之第一位置、與使探針銷3之前端自殼體8之底部82之開口82H露出之第二位置之間移動。於初始狀態下,柱塞4配置於第一位置。The plunger 4 is configured so that the front end of the probe pin 3 is not exposed from the opening 82H of the bottom 82 of the housing 8 at the first position according to the elastic force of the second spring 72, and the front end of the probe pin 3 is lifted from the housing. Between the second position where the opening 82H of the bottom 82 of the body 8 is exposed. In the initial state, the plunger 4 is configured at the first position.

於初始狀態下,銷P之上端部P1抵接於孔底94。藉此,凸緣6與帽蓋9扣合。因探針1於X軸、Y軸、及Z軸方向之移動被固定,故確定探針1之初始位置。具體而言,於探針1之初始位置,確定帽蓋9相對於凸緣6之位置。又,因限制與帽蓋9之下端部93直接性或間接性相接之殼體8之肋部83之移動,故確定殼體8之初始位置。In the initial state, the upper end P1 of the pin P abuts against the hole bottom 94 . Thereby, the flange 6 is fastened with the cap 9 . Since the movement of the probe 1 in the X-axis, Y-axis, and Z-axis directions is fixed, the initial position of the probe 1 is determined. Specifically, at the initial position of the probe 1, the position of the cap 9 relative to the flange 6 is determined. Also, the initial position of the housing 8 is determined because the movement of the rib 83 of the housing 8 directly or indirectly connected to the lower end 93 of the cap 9 is restricted.

圖9係顯示於行程狀態下,沿著圖1(a)之A-A線之剖面之剖視圖。圖9顯示以自圖8所示之狀態,探針1按壓於連接器100之方式施加按壓力之狀態。Fig. 9 is a sectional view showing a section along line A-A of Fig. 1(a) in a stroke state. FIG. 9 shows a state in which a pressing force is applied so that the probe 1 is pressed against the connector 100 from the state shown in FIG. 8 .

於行程狀態下,彈簧4於Z軸方向之下方向移動。於該狀態下,柱塞4自殼體8之底部82之開口82H移動至使探針銷3之前端露出之第二位置。換言之,藉由柱塞4移動至第二位置,探針銷3之前端自開口部82H露出於外部。且,探針銷3連接於連接器100。In the stroke state, the spring 4 moves downward in the Z-axis direction. In this state, the plunger 4 moves from the opening 82H of the bottom 82 of the housing 8 to the second position where the front end of the probe pin 3 is exposed. In other words, when the plunger 4 moves to the second position, the front end of the probe pin 3 is exposed to the outside through the opening 82H. And, the probe pin 3 is connected to the connector 100 .

於行程狀態下,殼體8於上方向移動。因殼體8之肋部83不與帽蓋9之下端部93直接性或間接性相接,故帽蓋9被按壓於肋部83,帽蓋9亦於上方向移動。又,銷P之上端部P1自孔底94離開,於銷孔92H之內部產生空隙。藉此,探針1於X軸、Y軸、及Z軸方向成為可動狀態。藉此,探針1可調整探針1與連接器100之軸偏移。In the stroke state, the casing 8 moves upward. Because the rib 83 of the housing 8 is not in direct or indirect contact with the lower end 93 of the cap 9, the cap 9 is pressed against the rib 83, and the cap 9 moves upward. In addition, the upper end P1 of the pin P is separated from the hole bottom 94, and a space is formed inside the pin hole 92H. Thereby, the probe 1 becomes movable in the X-axis, Y-axis, and Z-axis directions. Thereby, the probe 1 can adjust the axis offset between the probe 1 and the connector 100 .

於本實施形態中,第一彈簧71之彈簧常數小於第二彈簧72之彈簧常數。若對探針1施加按壓力,則第一彈簧71較第二彈簧72更早彈性變形。換言之,第一彈簧71較第二彈簧72更早於Z軸方向收縮。於第一彈簧71彈性變形,且第二彈簧72未彈性變形之情形時,柱塞4處於不使探針銷3之前端自殼體8之底部82之開口82H露出之第一位置。第一彈簧71於於Z軸方向收縮之狀態下,調整探針1與連接器100之軸偏移。其後,若對探針1進而施加按壓力,則第二彈簧72於Z軸方向收縮。此時,柱塞4移動至第二位置,探針銷3之前端露出於外部。可藉由以此種順序將第一彈簧71及第二彈簧72彈性變形,於探針銷3之前端被保護之狀態下進行軸偏移之調整。In this embodiment, the spring constant of the first spring 71 is smaller than that of the second spring 72 . When a pressing force is applied to the probe 1 , the first spring 71 elastically deforms earlier than the second spring 72 . In other words, the first spring 71 contracts in the Z-axis direction earlier than the second spring 72 . When the first spring 71 is elastically deformed and the second spring 72 is not elastically deformed, the plunger 4 is in the first position where the front end of the probe pin 3 is not exposed from the opening 82H of the bottom 82 of the housing 8 . The first spring 71 adjusts the axis offset between the probe 1 and the connector 100 in the state of shrinking in the Z-axis direction. Thereafter, when a pressing force is further applied to the probe 1 , the second spring 72 contracts in the Z-axis direction. At this time, the plunger 4 moves to the second position, and the front end of the probe pin 3 is exposed to the outside. By elastically deforming the first spring 71 and the second spring 72 in this order, the axial deviation can be adjusted in a state where the front end of the probe pin 3 is protected.

[接地接觸] 圖10係對於探針1之構造,放大顯示圖9所示之範圍F之剖視圖。 [ground contact] FIG. 10 is an enlarged cross-sectional view of the range F shown in FIG. 9 with respect to the structure of the probe 1 .

間隔件10設置於前端面423與內底面823對向之區域之大致整域。間隔件10構成為除複數個探針銷3彼此之間外,於包圍複數個探針銷3之位置,亦可接觸於前端面423及內底面823之雙方。例如,間隔件10於行程狀態下被前端面423與內底面823夾著,沿著各者之面彈性變形。藉由間隔件10,於前端面423上及內底面823上之複數個探針銷3彼此之間之區域A1進行接地連接。又,藉由間隔件10,於包圍前端面423上及內底面823上之複數個探針銷3之區域A2進行接地連接。The spacer 10 is disposed on substantially the entire area where the front end surface 423 and the inner bottom surface 823 face each other. The spacer 10 is configured to be in contact with both the front end surface 423 and the inner bottom surface 823 at positions surrounding the plurality of probe pins 3 in addition to between the plurality of probe pins 3 . For example, the spacer 10 is clamped by the front end surface 423 and the inner bottom surface 823 in the stroke state, and elastically deforms along the respective surfaces. Through the spacer 10 , the area A1 between the plurality of probe pins 3 on the front end surface 423 and the inner bottom surface 823 is grounded. In addition, the spacer 10 is used to connect the ground to the area A2 surrounding the plurality of probe pins 3 on the front end surface 423 and the inner bottom surface 823 .

移至上方,本體部41進而具有位於導電部2彼此之間,且接觸於第1接地導電部541之第1接地接觸部417。第1接地接觸部417與本體部41一體構成。藉由第1接地接觸部417,於第1接地導電部541之導電部2彼此之間之區域A3進行接地連接。Moving upward, the body portion 41 further has a first ground contact portion 417 located between the conductive portions 2 and in contact with the first ground conductive portion 541 . The first ground contact portion 417 is formed integrally with the main body portion 41 . Through the first ground contact portion 417 , the ground connection is performed in the region A3 between the conductive portions 2 of the first ground conductive portion 541 .

前端部42進而具有位於複數個探針銷3彼此之間,且接觸於第2接地導電部542之第2接地接觸部424。第2接地接觸部424與前端部42一體構成。例如,第2接地接觸部424亦可為內底面4213之一部分之區域。藉由第2接地接觸部424,於第2接地導電部542之複數個探針銷3彼此之間之區域A4進行接地連接。又,藉由內底面4213,於包圍第2接地導電部542之複數個探針銷3之區域A5進行接地接觸。The front end portion 42 further has a second ground contact portion 424 located between the plurality of probe pins 3 and in contact with the second ground conductive portion 542 . The second ground contact portion 424 is formed integrally with the front end portion 42 . For example, the second ground contact portion 424 can also be a part of the inner bottom surface 4213 . Through the second ground contact portion 424 , the ground connection is performed in the area A4 between the plurality of probe pins 3 of the second ground conductive portion 542 . In addition, through the inner bottom surface 4213 , the ground contact is made in the area A5 surrounding the plurality of probe pins 3 of the second ground conductive portion 542 .

第1接地接觸部417及第2接地接觸部424於探針1之初始狀態及行程狀態下分別與第1接地導電部541及第2接地導電部542相接。The first ground contact portion 417 and the second ground contact portion 424 are in contact with the first ground conductive portion 541 and the second ground conductive portion 542 respectively in the initial state and the stroke state of the probe 1 .

[本實施形態之效果] 本實施形態之一態樣之探針1係用於檢查具備複數個接點1001、1001之連接器100之探針1,且具備:導電性之柱塞4,其具有內包以對應於複數個接點1001、1001之方式設置之複數個探針銷3之前端部42;導電性之殼體8,其以內包前端部42之方式設置,且具有:引導部86,其於端部84進行對於連接器100之定位;及底部82,其於端部84中以與前端部42之前端面423對向之方式使內底面823延伸,並形成有用以使複數個探針銷3露出於外部之複數個開口82H;及導電性之間隔件10,其設置於前端部42之前端面423及底部82之內底面823之間,構成為於至少複數個探針銷3彼此之間,可與前端面423及內底面823之雙方接觸。 [Effects of this embodiment] The probe 1 of one aspect of this embodiment is a probe 1 for inspecting a connector 100 with a plurality of contacts 1001, 1001, and has: a conductive plunger 4, which has an inner package corresponding to the plural The front end 42 of a plurality of probe pins 3 arranged in a manner of contact points 1001, 1001; the conductive housing 8 is arranged in a manner of enclosing the front end 42, and has: a guide portion 86 at the end 84 The positioning of the connector 100 is carried out; and the bottom 82 extends the inner bottom surface 823 in the end portion 84 so as to face the front end surface 423 of the front end portion 42, and is formed to expose a plurality of probe pins 3 to the outside. A plurality of openings 82H; and a conductive spacer 10, which is arranged between the front end surface 423 of the front end portion 42 and the inner bottom surface 823 of the bottom 82, and is configured to be between at least a plurality of probe pins 3 and can be connected to the front end. Both the surface 423 and the inner bottom surface 823 are in contact.

於本實施形態之一態樣之探針1中,於複數個探針銷3彼此之間,間隔件10構成為可與前端部42之前端面423及底部82之內底面823之雙方接觸(接地接觸)。藉此,可防止於至少複數個探針銷3彼此之間,於前端部42與底部82之間產生間隙(間隔),成為未確保接地之狀態。藉此,可抑制未於複數個探針銷3彼此之間確保接地之情形時成為問題之複數個探針銷3彼此之間之相互之信號之干涉。其結果,可提高連接器100之檢查精度。In the probe 1 according to one aspect of the present embodiment, the spacer 10 is configured to be in contact with both the front end surface 423 of the front end portion 42 and the inner bottom surface 823 of the bottom portion 82 between the plurality of probe pins 3 (grounded). touch). Thereby, a gap (interval) is prevented from being generated between at least a plurality of probe pins 3 between the front end portion 42 and the bottom portion 82 , and a state in which grounding is not ensured can be prevented. Thereby, the interference of the mutual signal between several probe pins 3 which becomes a problem when grounding is not ensured among several probe pins 3 can be suppressed. As a result, the inspection accuracy of the connector 100 can be improved.

於上述探針1,間隔件10藉由可彈性變形之構件構成。根據此種構成,即使於構成探針1之各零件彼此之平行度偏移之情形時,間隔件10亦能夠可撓性地改變形狀,且可進行穩定之接地接觸。藉此,可進而提高連接器100之檢查精度。In the probe 1 described above, the spacer 10 is composed of an elastically deformable member. According to such a structure, even when the parallelism of each component which comprises the probe 1 deviates, the spacer 10 can change shape flexibly, and can make stable ground contact. Thereby, the inspection accuracy of the connector 100 can be further improved.

於上述探針1,間隔件10設置於前端面423與內底面823對向之區域之大致整域,於包圍複數個探針銷3之位置,亦可與前端面423及內底面823之雙方接觸,使前端面423與內底面823接觸。根據此種構成,以包圍探針銷3之方式進而進行接地接觸。因可確實地以多點接觸接地,故可進而提高連接器之檢查精度。In the above-mentioned probe 1, the spacer 10 is provided in substantially the entire area where the front end surface 423 and the inner bottom surface 823 face each other. In contact, the front end surface 423 is in contact with the inner bottom surface 823 . According to such a configuration, ground contact is further performed so as to surround the probe pin 3 . Since the multi-point contact can be reliably grounded, the inspection accuracy of the connector can be further improved.

於上述探針1中,間隔件10係與柱塞4及殼體8不同之構件。根據此種構成,因間隔件10成為自柱塞4及殼體8獨立之構件,故間隔件10之設計變得容易。In the probe 1 described above, the spacer 10 is a member different from the plunger 4 and the housing 8 . According to this structure, since the spacer 10 becomes a member independent from the plunger 4 and the case 8, the design of the spacer 10 becomes easy.

於上述探針1中,底部82之複數個開口82H之間之部分與劃分連接器100之複數個接點1001、1001之間之殼1002接觸。根據此種構成,因進行連接器100與殼體8之接地接觸,故可進而提高連接器之檢查精度。In the probe 1 described above, the portion between the plurality of openings 82H of the bottom 82 is in contact with the shell 1002 that divides the plurality of contacts 1001 , 1001 of the connector 100 . According to such a configuration, since the ground contact between the connector 100 and the housing 8 is performed, the inspection accuracy of the connector can be further improved.

[第二實施形態] 圖11係顯示第二實施形態之探針1A之剖面之剖視圖。以下,主要就與第一實施形態之探針1不同之點進行說明。探針1A具有突起10A(抵接輔助部),替代探針1中之間隔件10。 [Second Embodiment] Fig. 11 is a sectional view showing a section of a probe 1A of the second embodiment. Hereinafter, points different from the probe 1 of the first embodiment will be mainly described. The probe 1A has a protrusion 10A (abutment auxiliary portion) in place of the spacer 10 in the probe 1 .

突起10A與前端部42一體形成,以自前端面423朝內底面823突出之方式形成。例如,突起10A構成為於至少複數個探針銷3彼此之間,自前端面423朝內底面823突出,於行程狀態下可與內底面823接觸。突起10A亦可構成為可彈性變形。突起10A亦可設置於前端面423與內底面823對向之區域之大致整域。突起10A亦可構成為於包圍複數個探針銷3之位置,亦自前端面423朝內底面823突出,於行程狀態下可與內底面823接觸。The protrusion 10A is integrally formed with the front end portion 42 and protrudes from the front end surface 423 toward the inner bottom surface 823 . For example, the protrusion 10A is configured to protrude from the front end surface 423 toward the inner bottom surface 823 between at least a plurality of probe pins 3 , and can contact the inner bottom surface 823 in a stroke state. The protrusion 10A may be elastically deformable. The protrusion 10A can also be provided substantially over the entire area where the front end surface 423 and the inner bottom surface 823 are opposed to each other. The protrusion 10A can also be configured to protrude from the front end surface 423 toward the inner bottom surface 823 at a position surrounding a plurality of probe pins 3 , and can contact the inner bottom surface 823 in a stroke state.

根據探針1A,藉由於複數個探針銷3彼此之間突出之部位進行接地接觸。因可穩定之接地接觸,故可進而提高連接器之檢查精度。又,因零件件數減少,成為簡易之構成。According to the probe 1A, the ground contact is made by the portion where the plurality of probe pins 3 protrude from each other. Due to the stable ground contact, the inspection accuracy of the connector can be further improved. Also, since the number of parts is reduced, it becomes a simple structure.

[第三實施形態] 圖12係顯示第三實施形態之探針1B之剖面之剖視圖。以下,主要就與第一實施形態之探針1不同之點進行說明。探針1A具有突起10B(抵接輔助部),替代探針1中之間隔件10。 [Third Embodiment] Fig. 12 is a sectional view showing a section of a probe 1B according to the third embodiment. Hereinafter, points different from the probe 1 of the first embodiment will be mainly described. The probe 1A has a protrusion 10B (abutment auxiliary portion) in place of the spacer 10 in the probe 1 .

突起10B與底部82一體形成,以自內底面823朝前端面423突出之方式形成。例如,突起10B構成為於至少複數個探針銷3彼此之間,自內底面823朝前端面423突出,於行程狀態下可與前端面423接觸。突起10B亦可構成為可彈性變形。突起10B亦可設置於前端面423與內底面823對向之區域之大致整域。突起10B亦可構成為於包圍複數個探針銷3之位置,亦自內底面823朝前端面423突出,於行程狀態下可與前端面423接觸。The protrusion 10B is integrally formed with the bottom 82 and protrudes from the inner bottom surface 823 toward the front end surface 423 . For example, the protrusion 10B is configured to protrude from the inner bottom surface 823 toward the front end surface 423 between at least a plurality of probe pins 3 , and can contact the front end surface 423 in a stroke state. The protrusion 10B may also be elastically deformable. The protrusion 10B can also be provided substantially over the entire area where the front end surface 423 and the inner bottom surface 823 are opposed to each other. The protrusion 10B can also be configured to protrude from the inner bottom surface 823 toward the front end surface 423 at a position surrounding a plurality of probe pins 3 , and can contact the front end surface 423 in a stroke state.

根據探針1B,藉由於複數個探針銷3彼此之間突出之部位進行接地接觸。因可穩定之接地接觸,故可進而提高連接器之檢查精度。又,因零件件數減少,成為簡易之構成。According to the probe 1B, the ground contact is made by the portion where the plurality of probe pins 3 protrude from each other. Due to the stable ground contact, the inspection accuracy of the connector can be further improved. Also, since the number of parts is reduced, it becomes a simple structure.

[變化例] 以上,雖對實施形態進行說明,但本揭示並非限定於上述實施形態者,於不脫離其主旨之範圍內可進行各種變更。 [variation example] As mentioned above, although embodiment was described, this indication is not limited to the said embodiment, Various changes are possible in the range which does not deviate from the summary.

於本實施形態中,雖連接器100係具備以2行配置之2個接點1001、1001者,但亦可於X軸方向與Y軸方向分別設置複數行接點。又,劃分複數個接點1001、1001之間之殼1002亦可為劃分複數行接點間者。In this embodiment, although the connector 100 is provided with two contacts 1001, 1001 arranged in two rows, multiple rows of contacts may be provided in the X-axis direction and the Y-axis direction respectively. In addition, the case 1002 that divides between a plurality of contacts 1001 and 1001 may also be used to divide between a plurality of rows of contacts.

於上述實施形態中,雖說明銷P固定於凸緣6之上表面611,但銷P亦可設置於帽蓋9。In the above-mentioned embodiment, although it is described that the pin P is fixed on the upper surface 611 of the flange 6 , the pin P may also be provided on the cap 9 .

於上述實施形態中,雖說明基板5收納於前端部42,但基板5亦可收納於本體部41。例如,收納基板5之凹部4212亦可以本體部41之下部415凹陷之方式設置。In the above-mentioned embodiment, although it was described that the substrate 5 is accommodated in the front end portion 42 , the substrate 5 may also be accommodated in the main body portion 41 . For example, the recessed portion 4212 for accommodating the substrate 5 may also be provided in such a manner that the lower portion 415 of the main body portion 41 is recessed.

於探針銷3露出於殼體8之外部之狀態下,前端面423與內底面823亦可藉由抵接輔助部接觸。因於探針銷3露出於殼體8之外部之狀態(可檢查連接器100之狀態)下進行接地接觸即可,故可將抵接輔助部構成為可小型化。In the state where the probe pin 3 is exposed to the outside of the housing 8, the front end surface 423 and the inner bottom surface 823 can also be contacted by the abutting auxiliary part. Since it is only necessary to make ground contact in a state where the probe pins 3 are exposed to the outside of the housing 8 (the state in which the connector 100 can be inspected), the abutment assisting portion can be configured to be miniaturized.

1:探針 1A:探針 1B:探針 2:導電部 3:探針銷 4:柱塞 5:基板 6:凸緣 7:彈簧 8:殼體 9:帽蓋 9H:孔 10:間隔件 10A:突起 10B:突起 10H:開口 21:同軸電纜 22:導電構件 41:本體部 41H:貫通孔 42:前端部 51:第1主面 52:第2主面 53:信號導電部 54:接地導電部 61:上表面 61H:貫通孔 61W:孔 62:下表面 62H:貫通孔 71:第一彈簧 72:第二彈簧 81:基部 81H:孔 82:底部 82H:開口 83:肋部 84:端部 85:端部 86:引導部 91:上表面 92:下表面 92H:銷孔 93:下端部 94:孔底 100:連接器 101:上表面 102:下表面 411:上表面 412:底面 413:側面 414:上部 415:下部 416:突出部 417:第1接地接觸部 421:支持部 422:保持部 423:前端面 424:第2接地接觸部 531:第1信號導電部 532:第2信號導電部 541:第1接地導電部 542:第2接地導電部 611:上表面 612:下表面 621:上表面 622:下表面 811:底面 821:板狀構件 822:前端部 823:內底面 1001:接點 1002:殼 1003:絕緣殼體 4161:上表面 4162:下表面 4211:上表面 4212:凹部 4213:內底面 A1~A5:區域 BL:基底層 C:套環 D:絕緣體 E:絕緣體 F:範圍 H1:距離 H2:距離 P:銷 P1:上端部 P2:下端部 S:範圍 UL:堆積層 1: Probe 1A: Probe 1B: Probe 2: Conductive part 3: Probe pin 4: plunger 5: Substrate 6: Flange 7: Spring 8: Housing 9: cap 9H: hole 10: spacer 10A: Protrusion 10B: Protrusion 10H: opening 21: coaxial cable 22: Conductive member 41: Body Department 41H: through hole 42: front end 51: The first main surface 52: The second main side 53: Signal conduction part 54: Grounding conductive part 61: upper surface 61H: through hole 61W: hole 62: lower surface 62H: through hole 71: First spring 72:Second spring 81: base 81H: hole 82: bottom 82H: opening 83: Rib 84: end 85: end 86: Guidance department 91: upper surface 92: lower surface 92H: pin hole 93: lower end 94: hole bottom 100: Connector 101: upper surface 102: lower surface 411: upper surface 412: Bottom 413: side 414: upper part 415: lower part 416: protrusion 417: 1st ground contact part 421: Support Department 422: Keeping Department 423: front face 424: 2nd ground contact part 531: The first signal conduction part 532: The second signal conduction part 541: The first grounding conductive part 542: The second grounding conductive part 611: upper surface 612: lower surface 621: upper surface 622: lower surface 811: Bottom 821: Plate member 822: front end 823: inner bottom surface 1001: Contact 1002: Shell 1003: insulating shell 4161: upper surface 4162: lower surface 4211: upper surface 4212: Concave 4213: inner bottom surface A1~A5: area BL: basal layer C: Collar D: insulator E: insulator F: range H1: Distance H2: Distance P: pin P1: upper end P2: lower end S: range UL: Buildup layer

圖1係顯示第一實施形態之探針之外觀之圖。圖1(a)係平面圖,圖1(b)係立體圖,圖1(c)係側視面,圖1(d)係仰視圖。 圖2係顯示探針及連接器之外觀之圖。圖2(a)係側視圖,圖2(b)係立體圖。 圖3係顯示探針抵接於連接器前之狀態下,沿著圖1(a)之A-A線之剖面之剖視圖。 圖4係顯示基板收納於前端部狀態之外觀之圖。圖4(a)係平面圖,圖4(b)係立體圖,圖4(c)係側視圖。 圖5係顯示基板收納於前端部前之狀態之外觀之分解立體圖。 圖6係顯示沿著圖4(a)之B-B線之剖面之剖視圖。 圖7係顯示間隔件(抵接輔助部)之外觀之圖。圖7(a)係平面圖,圖7(b)係立體圖,圖7(c)係側視圖。 圖8係顯示於探針抵接於連接器之狀態下,沿著圖1(a)之A-A線之剖面之剖視圖。 圖9係顯示於行程狀態下,沿著圖1(a)之A-A線之剖面之剖視圖。 圖10係放大顯示圖9之範圍F之剖視圖。 圖11係顯示第二實施形態之探針之剖面之剖視圖。 圖12係顯示第三實施形態之探針之剖面之剖視圖。 Fig. 1 is a diagram showing the appearance of a probe according to the first embodiment. Fig. 1 (a) is a plane view, Fig. 1 (b) is a perspective view, Fig. 1 (c) is a side view, and Fig. 1 (d) is a bottom view. Fig. 2 is a diagram showing the appearance of probes and connectors. Fig. 2(a) is a side view, and Fig. 2(b) is a perspective view. Fig. 3 is a cross-sectional view along line A-A of Fig. 1(a) showing the state where the probe is abutted against the connector. Fig. 4 is a diagram showing the appearance of a state where the substrate is housed in the front end. Figure 4(a) is a plan view, Figure 4(b) is a perspective view, and Figure 4(c) is a side view. Fig. 5 is an exploded perspective view showing the appearance of a state in which the substrate is stored in front of the front end. Fig. 6 is a sectional view showing a section along line B-B of Fig. 4(a). Fig. 7 is a diagram showing the appearance of a spacer (abutting auxiliary part). Figure 7(a) is a plan view, Figure 7(b) is a perspective view, and Figure 7(c) is a side view. FIG. 8 is a cross-sectional view along the line A-A of FIG. 1( a ) showing a state where the probes are abutted against the connector. Fig. 9 is a sectional view showing a section along line A-A of Fig. 1(a) in a stroke state. FIG. 10 is an enlarged cross-sectional view showing the range F in FIG. 9 . Fig. 11 is a sectional view showing a section of a probe of the second embodiment. Fig. 12 is a sectional view showing a section of a probe of a third embodiment.

1:探針 1: Probe

2:導電部 2: Conductive part

3:探針銷 3: Probe pin

4:柱塞 4: plunger

5:基板 5: Substrate

6:凸緣 6: Flange

7:彈簧 7: Spring

8:殼體 8: Housing

9:帽蓋 9: cap

9H:孔 9H: hole

10:間隔件 10: spacer

21:同軸電纜 21: coaxial cable

22:導電構件 22: Conductive member

41:本體部 41: Body Department

41H:貫通孔 41H: through hole

42:前端部 42: front end

51:第1主面 51: The first main surface

52:第2主面 52: The second main side

61:上表面 61: upper surface

61H:貫通孔 61H: through hole

61W:孔 61W: hole

62:下表面 62: lower surface

62H:貫通孔 62H: through hole

71:第一彈簧 71: First spring

72:第二彈簧 72:Second spring

81:基部 81: base

81H:孔 81H: hole

82:底部 82: bottom

82H:開口 82H: opening

83:肋部 83: Rib

84:端部 84: end

85:端部 85: end

86:引導部 86: Guidance department

91:上表面 91: upper surface

92:下表面 92: lower surface

92H:銷孔 92H: pin hole

93:下端部 93: lower end

94:孔底 94: hole bottom

100:連接器 100: Connector

411:上表面 411: upper surface

412:底面 412: Bottom

413:側面 413: side

414:上部 414: upper part

415:下部 415: lower part

416:突出部 416: protrusion

423:前端面 423: front face

611:上表面 611: upper surface

612:下表面 612: lower surface

621:上表面 621: upper surface

622:下表面 622: lower surface

811:底面 811: Bottom

821:板狀構件 821: Plate member

822:前端部 822: front end

823:內底面 823: inner bottom surface

1001:接點 1001: Contact

1002:殼 1002: Shell

1003:絕緣殼體 1003: insulating shell

4161:上表面 4161: upper surface

4162:下表面 4162: lower surface

C:套環 C: Collar

D:絕緣體 D: insulator

E:絕緣體 E: insulator

P:銷 P: pin

P1:上端部 P1: upper end

P2:下端部 P2: lower end

Claims (7)

一種探針,其係用於檢查具備複數個接點之連接器者,且具備: 導電性之柱塞,其具有內包以對應於上述複數個接點之方式設置之複數個探針銷之前端部; 導電性之殼體,其以內包前端部之方式設置,於端部中以與上述前端部之前端面對向之方式使內底面延伸,且具有形成用以使上述複數個探針銷露出於外部之複數個開口之底部;及 導電性之抵接輔助部,其設置於上述前端部之上述前端面及上述底部之上述內底面之間,構成為於至少上述複數個探針銷彼此之間,可與上述前端面及上述內底面之雙方接觸。 A probe, which is used to inspect a connector with a plurality of contacts, and has: A conductive plunger having a front end portion containing a plurality of probe pins arranged in a manner corresponding to the plurality of contacts; The conductive case is provided in such a way as to enclose the front end, and the inner bottom surface of the end extends so as to face the front end of the front end, and has a shape for exposing the plurality of probe pins the bottom of the exterior plurality of openings; and The conductive contact auxiliary part is provided between the front end surface of the front end part and the inner bottom surface of the bottom part, and is configured to be able to contact the front end surface and the inner bottom surface between at least the plurality of probe pins. The two sides of the bottom surface are in contact. 如請求項1之探針,其中上述抵接輔助部藉由可彈性變形之構件構成。The probe according to claim 1, wherein the abutting auxiliary part is formed of an elastically deformable member. 如請求項1之探針,其中上述抵接輔助部設置於上述前端面與上述內底面對向之區域之大致整域,構成為於包圍上述複數個探針銷之位置,亦可與上述前端面及上述內底面之雙方接觸。The probe according to claim 1, wherein the above-mentioned abutting auxiliary part is provided in substantially the entire area where the above-mentioned front end surface and the above-mentioned inner bottom face face, and is configured to surround the above-mentioned plurality of probe pins, and can also be connected to the above-mentioned The two sides of the front end surface and the above-mentioned inner bottom surface are in contact. 如請求項1之探針,其中上述抵接輔助部係與上述柱塞及上述殼體不同之構件。The probe according to claim 1, wherein the abutting auxiliary part is a member different from the plunger and the housing. 如請求項1之探針,其中上述抵接輔助部與上述前端部一體形成,以自上述前端面朝上述內底面突出之方式形成。The probe according to claim 1, wherein the abutment auxiliary part is integrally formed with the front end part, and protrudes from the front end surface toward the inner bottom surface. 如請求項1之探針,其中上述抵接輔助部與上述底部一體形成,以自上述內底面朝上述前端面突出之方式形成。The probe according to claim 1, wherein the abutting auxiliary part is integrally formed with the bottom, protruding from the inner bottom surface toward the front end surface. 如請求項1之探針,其中上述底部之複數個開口之間之部分與劃分上述連接器之上述複數個接點之間之殼接觸。The probe according to claim 1, wherein the portion between the plurality of openings at the bottom is in contact with the shell that divides the plurality of contacts of the connector.
TW111148657A 2022-01-05 2022-12-19 Probe capable of improving the inspection accuracy of a connector TW202331267A (en)

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