TW202323867A - Polarization grating films for curved surfaces, its manufacturing method and the metallic grating mold thereof - Google Patents
Polarization grating films for curved surfaces, its manufacturing method and the metallic grating mold thereof Download PDFInfo
- Publication number
- TW202323867A TW202323867A TW110147284A TW110147284A TW202323867A TW 202323867 A TW202323867 A TW 202323867A TW 110147284 A TW110147284 A TW 110147284A TW 110147284 A TW110147284 A TW 110147284A TW 202323867 A TW202323867 A TW 202323867A
- Authority
- TW
- Taiwan
- Prior art keywords
- curved surface
- polarizing film
- manufacturing
- metal grid
- grating polarizing
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/44—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Thermal Sciences (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Polarising Elements (AREA)
Abstract
Description
本發明係有關光柵偏振膜片技術領域,特別是指一種貼合於曲面之光柵偏振膜片及其製造方法與相關金屬柵模具。The invention relates to the technical field of grating polarizing film, in particular to a grating polarizing film attached to a curved surface, a manufacturing method thereof and related metal grid moulds.
偏光膜片為液晶顯示器中不可獲缺的原驗,其主要係將液晶分子封裝於兩個偏光膜之間,配合兩端電壓的控制得以正常作動,顯示出所需的圖案;偏光膜片主要由高分子化合物聚乙烯醇的薄膜作為基料,再浸染於碘溶液使碘離子擴散滲入聚乙烯醇中,並經硼酸水溶液還原穩定後進行拉伸並烘乾而成。隨著相關技術進步以及對於產品微小化與輕量化的需求,金屬柵偏振膜片成為相當有潛力取代既有的偏光膜片。The polarizing film is an indispensable test in the liquid crystal display. It mainly encapsulates the liquid crystal molecules between two polarizing films, and cooperates with the control of the voltage at both ends to operate normally and display the desired pattern; the polarizing film is mainly The polymer compound polyvinyl alcohol film is used as the base material, and then impregnated with iodine solution to diffuse iodine ions into the polyvinyl alcohol, and then stretched and dried after being reduced and stabilized by boric acid aqueous solution. With the advancement of related technologies and the demand for miniaturization and light weight of products, metal grid polarizing films have great potential to replace existing polarizing films.
金屬柵偏振膜片10主要具有複數個概略平行的柵體11,請參閱第1A圖,藉由柵體11不同的高度、寬度、間距等數值,產生不同的偏振效果;當其密度週期小於光波長時,即可展現出偏振的特性,同時,能於垂直於柵體11與平行於柵體11分別產生不同的偏振態。然而,隨著曲面顯示模組的廣泛應用,金屬柵偏振膜片10也面臨需要貼合於曲面12的狀況,如第1B圖,當金屬柵偏振膜片10貼合於此曲面12時,受到貼合於曲面12所產生的表面張力影響,柵體11會產生傾斜的現象,傾斜的程度與分佈,則取決於曲面12的型態;如此一來,傾斜的柵體11會導致入射光的部份反射,進而使得透射率以及偏振對比度的下降。The metal
故,如何對於曲面貼合光柵偏振膜片進行改良,以解決上述習知技術的不足,即為從事此行業相關業者所亟欲研發的課題。Therefore, how to improve the curved surface lamination grating polarizing film to solve the above-mentioned deficiencies of the conventional technology is a topic that is urgently desired to be researched and developed by those engaged in this industry.
有鑑於此,本發明的主要目的在提供一種曲面貼合光柵偏振膜片及其製造方法與金屬柵模具,利用轉印製程來製作相關金屬柵模具,使其成型之曲面貼合光柵偏振膜片於貼合曲面後,不會產生傾斜的狀況,來解決曲面貼合光柵偏振膜片的光反射及降低消光比問題的問題。In view of this, the main purpose of the present invention is to provide a curved surface lamination grating polarizing film and its manufacturing method and a metal grid mold, using the transfer process to make the relevant metal grid mold, so that the formed curved surface lamination grating polarizing film After the curved surface is pasted, there will be no inclination, so as to solve the problems of light reflection and lower extinction ratio of the curved surface pasted grating polarizing film.
為達上述之目的,本發明提供一種曲面貼合光柵偏振膜片的製造方法,其可適用於貼於曲面的待貼物上,其步驟包含有下列步驟: 提供金屬柵模具,此金屬柵模具上具有複數個溝槽,每一溝槽與金屬柵模具之表面形成夾角,且此些夾角係至少具有兩種以上不同的數值; 依據溝槽之夾角,依序於些溝槽內形成複數個柵體; 於金屬柵模具之表面形成連接柵體的基板;及 將基板連同此些柵體自金屬柵模具剝離,而可以獲得曲面貼合光柵偏振膜片。 In order to achieve the above-mentioned purpose, the present invention provides a method for manufacturing a curved surface laminating grating polarizing film, which can be applied to objects to be pasted on a curved surface, and its steps include the following steps: Provide a metal grid mold, the metal grid mold has a plurality of grooves, each groove forms an angle with the surface of the metal grid mold, and these angles have at least two or more different values; According to the included angle of the trenches, a plurality of grid bodies are sequentially formed in the trenches; forming a substrate connecting the grid body on the surface of the metal grid mold; and The substrate and the grid bodies are peeled off from the metal grid mold to obtain a polarizing film with a curved surface attached to the grid.
根據本發明之實施例,前述提供金屬柵模具的步驟包含有: 提供一基材,並於其一表面上塗佈光阻材料; 藉由曝光顯影方式於光阻材料上定義出柵體之位置、寬度與長度; 以夾角依序蝕刻基材以形成此些溝槽;及 去除光阻材料形成金屬柵模具。 According to an embodiment of the present invention, the aforementioned step of providing a metal grid mold includes: providing a base material and coating a photoresist material on one surface thereof; Define the position, width and length of the grid body on the photoresist material by exposure and development; sequentially etching the substrate at an included angle to form the trenches; and The photoresist material is removed to form a metal gate mold.
根據本發明之實施例,前述夾角是藉由下列步驟取得: 取得曲面之輪廓; 藉由輪廓上對應於此些柵體之位置的法線,來計算此些法線與一入射光之夾角;及 轉換入射光之夾角而獲取溝槽之夾角。 According to an embodiment of the present invention, the aforementioned included angle is obtained through the following steps: Get the contour of the surface; calculating the angle between the normals and an incident light from the normals corresponding to the positions of the grids on the profile; and The included angle of the groove is obtained by converting the included angle of the incident light.
根據本發明之實施例,前述基材是以離子蝕刻的方式來形成此些溝槽。According to an embodiment of the present invention, the substrate is ion-etched to form the grooves.
根據本發明之實施例,前述基材之材質為矽、化合物半導體、玻璃或塑料。According to an embodiment of the present invention, the aforementioned substrate is made of silicon, compound semiconductor, glass or plastic.
根據本發明之實施例,前述依據此些溝槽之夾角,於此些溝槽內形成複數個柵體的步驟中,是採用電鍍或是沉積的方式來形成此些柵體。According to an embodiment of the present invention, in the step of forming a plurality of gate bodies in the trenches according to the included angle of the trenches, the gate bodies are formed by electroplating or deposition.
根據本發明之實施例,前述電鍍是藉由蒸鍍或濺鍍的方式來進行。According to an embodiment of the present invention, the aforementioned electroplating is performed by evaporation or sputtering.
根據本發明之實施例,前述沉積的方式是藉由電化學沉積的方式來進行。According to an embodiment of the present invention, the aforementioned deposition is performed by electrochemical deposition.
根據本發明之實施例,前述柵體之材質為鋁、鐵、金或銀。According to an embodiment of the present invention, the aforementioned grid body is made of aluminum, iron, gold or silver.
根據本發明之實施例,前述柵體內係具有奈米材料或量子點。According to an embodiment of the present invention, the aforementioned gate system has nanometer materials or quantum dots.
根據本發明之實施例,前述柵體末端更形成有一抗反射材料。According to an embodiment of the present invention, an anti-reflection material is further formed at the end of the grid body.
根據本發明之實施例,前述抗反射材料為一介電材料。According to an embodiment of the present invention, the aforementioned anti-reflection material is a dielectric material.
根據本發明之實施例,前述於金屬柵模具之表面形成基板的步驟前,更包含有以光微影蝕刻來定義出此些柵體的步驟。According to an embodiment of the present invention, before the step of forming the substrate on the surface of the metal grid mold, a step of defining the grid bodies by photolithography is further included.
根據本發明之實施例,前述基板為一光硬化高分子材料所構成。According to an embodiment of the present invention, the aforementioned substrate is made of a photohardening polymer material.
根據本發明之實施例,前述於將基板連同此些柵體自金屬柵模具剝離的步驟前,更包含將基板經過紫外光硬化。According to an embodiment of the present invention, before the step of peeling off the substrate and the grid bodies from the metal grid mold, further includes curing the substrate by ultraviolet light.
根據本發明之實施例,前述將基板連同此些柵體自金屬柵模具剝離,以獲得曲面貼合光柵偏振膜片的步驟中,是採用真空吸引的方式將基板連同此些柵體取出。According to an embodiment of the present invention, in the step of peeling the substrate and the grids from the metal grid mold to obtain the curved surface laminating grating polarizing film, the substrate and the grids are taken out by vacuum suction.
為達上述之目的,本發明提供一種曲面貼合光柵偏振膜片,其利用所述實施例之製造方法所製造。To achieve the above purpose, the present invention provides a curved surface bonded grating polarizing film, which is manufactured by the manufacturing method of the above embodiment.
為達上述之目的,本發明提供一種曲面貼合光柵偏振膜片的金屬柵模具,藉以製造適用於貼於曲面的曲面貼合光柵偏振膜片,其特徵在於: 金屬柵模具上具有複數個溝槽,每一溝槽與金屬柵模具之表面形成一夾角,此些夾角係至少具有兩種以上不同的數值。 In order to achieve the above-mentioned purpose, the present invention provides a metal grid mold for bonding a grating polarizing film with a curved surface, so as to manufacture a curved surface bonding grating polarizing film suitable for being attached to a curved surface, characterized in that: There are a plurality of grooves on the metal grid mold, and each groove forms an included angle with the surface of the metal grid mold, and these included angles have at least two or more different values.
根據本發明之實施例,前述夾角為藉由曲面之輪廓對應於此些溝槽之位置的法線,來計算此些法線與一入射光之夾角,並利用此與入射光之夾角來轉換取得前述溝槽之夾角。According to an embodiment of the present invention, the aforementioned included angle is the angle between these normals and an incident light calculated by using the normals of the contours of the curved surface corresponding to the positions of the grooves, and the conversion is performed using the angle between the normals and the incident light Obtain the included angle of the aforementioned groove.
根據本發明之實施例,前述金屬柵模具之表面更具有圓角、導角或凹槽。According to an embodiment of the present invention, the surface of the aforementioned metal grid mold further has rounded corners, chamfered corners or grooves.
為達上述之目的,本發明提供一種曲面貼合光柵偏振膜片,適用於貼於一曲面,其利用所述實施例之金屬柵模具所製造。In order to achieve the above purpose, the present invention provides a grating polarizing film attached to a curved surface, which is suitable for affixing to a curved surface, which is manufactured by using the metal grid mold of the above-mentioned embodiment.
與先前技術相比,本發明具有以下優勢: (1) 本發明突破現有曲面貼合金屬柵偏振膜片於貼合於曲面之傾斜現象,所造成光反射及降低消光比問題。 (2) 本發明利用轉印製程來製作相關金屬柵模具,使其成型之曲面貼合光柵偏振膜片於貼合曲面後,不會產生傾斜的狀況,進而提升消光比。 Compared with the prior art, the present invention has the following advantages: (1) The present invention breaks through the problem of light reflection and lower extinction ratio caused by the inclination phenomenon of the existing curved surface bonding metal grid polarizing film on the curved surface. (2) The present invention utilizes the transfer printing process to make related metal grid molds, so that the formed curved surface is pasted with the grating polarizing film after the curved surface is pasted, and there will be no inclination, thereby improving the extinction ratio.
底下藉由具體實施例詳加說明,當更容易瞭解本發明之目的、技術內容、特點及其所達成之功效。In the following detailed description by means of specific embodiments, it will be easier to understand the purpose, technical content, characteristics and effects of the present invention.
為使本發明實施例的目的、技術方案和優點更加清楚,下面將對本發明實施例中的技術方案進行清楚、完整地描述,顯然,所描述的實施例是本發明的一部分實施例,而不是全部的實施例。基於本發明中的實施例,本技術領域中具有通常知識者在沒有做出創造性勞動前提下所獲得的所有其他實施例,都屬於本發明保護的範圍。需要說明的是,在不衝突的情況下,本發明中的實施例及實施例中的特徵可以相互任意組合。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, rather than Full examples. Based on the embodiments of the present invention, all other embodiments obtained by persons with ordinary knowledge in the technical field without making creative efforts belong to the scope of protection of the present invention. It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined arbitrarily with each other.
在實施方式的描述中,當一個結構被描述為位於另一結構"之上或上方"或者"之下或下方"時,則該描述應當解釋為包括所述結構相互接觸的情況以及在所述結構之間設置了第三結構的情況。以下將參考圖式詳細描述實施方式。In the description of the embodiments, when a structure is described as being located "on or above" or "below or below" another structure, the description should be construed to include the case where the structures are in contact with each other and the A case where a third structure is provided between structures. Embodiments will be described in detail below with reference to the drawings.
正如先前技術所描述的,目前習知的金屬柵偏振膜片在貼合於曲面時,會產生柵體傾斜的現象,而發生透射率以及偏振對比度下降的問題。為了解決上述技術問題,本發明的基本思想是提供一種曲面貼合光柵偏振膜片的製造方法,藉由轉印的製程來成型具有預傾斜角度的曲面貼合光柵偏振膜片,而可於貼合至曲面時,使得柵體呈現概略等向的配置,而可解決習知結構所產生光反射及降低消光比問題。因此,當應用於譬如感測裝置、光學鏡頭、眼鏡、電子裝置等具有曲面的產品時,不會產生傾斜的狀況,進而提升消光比。As described in the previous technology, when the conventional metal grid polarizing film is attached to a curved surface, the grid body will be tilted, and the transmittance and polarization contrast will decrease. In order to solve the above-mentioned technical problems, the basic idea of the present invention is to provide a method of manufacturing a curved surface lamination grating polarizing film, which can be used to form a curved surface lamination grating polarizing film with a pre-tilt angle through a transfer printing process. When combined to the curved surface, the grid body presents a roughly isotropic configuration, which can solve the problems of light reflection and lower extinction ratio caused by conventional structures. Therefore, when it is applied to products with curved surfaces such as sensing devices, optical lenses, glasses, electronic devices, etc., there will be no inclination, thereby improving the extinction ratio.
請參照第2A-2E圖,其繪示本發明之實施例所提供的曲面貼合光柵偏振膜片的製造方法之製作流程示意圖。Please refer to FIGS. 2A-2E , which are schematic diagrams illustrating the manufacturing process of the manufacturing method of the curved surface lamination grating polarizing film provided by the embodiment of the present invention.
首先提供金屬柵模具20,如第2A圖所示,此金屬柵模具20上具有複數個溝槽21,每一溝槽21與金屬柵模具20之表面201形成夾角θ,且此些夾角θ係至少具有兩種以上不同的數值,換句話說,也就是溝槽21相對於金屬柵模具20之表面201具有至少兩種以上的斜度。接著,請參閱第2B圖,依據每一溝槽21之夾角θ,依序於金屬柵模具20得此些溝槽21內形成複數個柵體31,其中形成的方式可以採用電鍍或是沉積等方式,而其中電鍍可以採用蒸鍍或濺鍍的方式來進行,沉積可以採用譬如電化學沈積的方式來進行。然後,以光微影蝕刻清除金屬柵模具20之表面201,並且定義出此些柵體31,如第2C圖所示,並且於金屬柵模具20之表面201形成連接柵體31的基板32(見第2D圖),舉例來說,基板32可藉由光硬化高分子材料所構成,並接續採用紫外光硬化的方式,來將基板32進行硬化。最後將基板32連同此些柵體31自金屬柵模具20剝離,而可以獲得曲面貼合光柵偏振膜片30,請參閱第2E圖,而其中可以藉由真空吸引的方式將曲面貼合光柵偏振膜片30取出。就前述圖式來看,溝槽21以及所形成柵體31的夾角θ與預傾斜角度、數量、位置、大小、配置等,僅是示意,並非用以限定僅能採用如圖式中的態樣與模式,基於前述相同原理,可依據實際使用狀態來調整。再者,柵體31的材質可為鋁、鐵、金、銀等各種金屬材質,且其內部不必然為同一材質或是均勻材質所構成,其內部可包含有奈米粒子或是量子點、或是於末端沈積有譬如介電材料之抗反射材料;同時,圖中所繪示型態之橫截面為長方形,並非用以限定其形狀,其可以為方形、錐形(角錐、圓錐等)或是其他任意幾何形狀,此形狀與材質等同樣可依據實際使用狀態來予以變化。First, a
因此,所取得的曲面貼合光柵偏振膜片30應用於貼合至具有曲面表面41的待貼物40時,因曲面貼合光柵偏振膜片30的柵體31為配合此曲面表面41的輪廓型態,而設計成具有預傾斜的型態,請參閱第3A、3B圖,因此貼合至待貼物40的曲面表面41後,經過拉伸而服貼於待貼物40之曲面表面41,預傾斜的柵體31受到其張力影響,呈現出概略相互平行的狀態(見第3B圖),因而可解決習知結構所產生光反射及降低消光比問題;其中,待貼物40可譬如感測裝置、光學鏡頭、眼鏡、電子裝置等具有曲面的產品。Therefore, when the obtained curved surface lamination grating polarizing
接續,針對前述提供金屬柵模具20的部份進行說明,金屬柵模具20的製作(提供)方式如下;首先提供一基材23,並於其基材23之一側表面上塗佈光阻材料24,如第4A圖所示,其中基材23常見者為矽基板,也可以是其他化合物半導體或是玻璃、塑料等各種材質,而光阻材料可以是有機材料或無機材料;接著藉由曝光顯影方式於光阻材料24上定義出柵體之位置、寬度與長度(見第4B圖),換句話說,也就是依據所需要的柵體型態來將其所設定的位置,進行曝光出所需的寬度與長度,然後再針對以柵體所需要的夾角依序蝕刻基材23以形成此些溝槽21,請參閱第4C圖,因為溝槽21所需要的夾角θ不盡相同(如前面所定義,至少具有兩種不同的數值),因此為了確保蝕刻的完整度,可以採用分段蝕刻的方式,也就是說,每次蝕刻僅進行單一角度(夾角θ)之溝槽21的蝕刻,而其餘不同角度、暫時尚未進行蝕刻或是已經蝕刻完成的部份,則可以藉由光阻材料予以保護,然後依序完成各個角度(夾角θ)之溝槽21的蝕刻,此部份蝕刻的部份可譬如為離子蝕刻的方式;再者,溝槽21所需要設定的夾角θ容後詳述。最後,如第4D圖所示,藉由利用譬如光阻液來去除光阻材料24形成金屬柵模具20,所形成的金屬柵模具20則具有至少具有兩種以上不同的數值之夾角θ之溝槽21,也就是說其所具有的複數個溝槽21中,每一溝槽21與金屬柵模具20之表面201會形成一個夾角θ,這些夾角θ係至少具有兩種以上不同的數值,也就是說,藉由此金屬柵模具20所形成的柵體會是不規則的(也就是不是全部都會呈現概略平行的狀態),以供後續貼合於曲面時,配合曲面的拉伸而呈現出成品為概略平行的狀態(柵體),此部份如同前述,在此不重述贅述。Next, for the aforementioned part of providing the
另一方面,為了日後使用上曲面貼合光柵偏振膜片30能順利脫離金屬柵模具20,可於金屬柵模具20的周緣設計有圓角(見第4E圖)或是導角、凹槽,使其更易於剝離(不論是採用真空吸引或是其他物理性方式的剝離),另外,除了前述設計外,也可以於其他位置(譬如溝槽21的末端、開口周緣等)也具有同樣或類似的設計,此部份並非本案重點,熟悉此項技術之人士可輕易變化或置換,在此僅舉例說明,不予以贅述。On the other hand, in order to smoothly detach from the
再來,針對取得夾角θ部份予以說明,此些夾角θ即為日後柵體會呈現的傾斜狀態,因為是要匹配於所需要的曲面上,使其貼合後能呈現概略平行的狀態,因此需要藉由轉印或是還原的製作方式,來取得此些夾角θ的數值。請參閱第5A圖,首先取得待貼物40的曲面表面41的曲面之輪廓,並藉由輪廓上對應於此些柵體31之位置的法線501,來依序計算此些法線501與入射光60之夾角α,然後再轉換入射光60之夾角α而獲取溝槽21之夾角θ(見第5B圖),而根據曲面之輪廓與柵體31之設置位置的不同,每一個法線501與入射光60之夾角α也可能會有所不同,但因為是曲面表面41的曲面之輪廓,因此,其至少會具有兩種以上不同的夾角α,也因此夾角θ係至少具有兩種以上不同的數值。具體來說,其轉換方式可譬如夾角α對等於夾角θ的數值來取得。如同前述,圖式中所繪示待貼物40的曲面表面41僅是示意,用以配合此段落予以說明,並非用以限定僅能適用於這樣輪廓的表面,任何曲面(換句話說非完全平面的型態)皆可利用本發明所提供的方式來予以轉換為所需要的溝槽21配置;再者,夾角θ的數值也不僅限定於僅能對等於夾角α,依據使用的型態,包含材質、曲面複雜度、貼合後使用狀態等,也可適當加入其他補償或是參數值來加以轉換,來取得最佳的溝槽21配置角度。Next, let’s explain the part of obtaining the included angle θ. These included angles θ are the inclined state of the grid body in the future, because it is to match the required curved surface, so that it can be roughly parallel after bonding, so It is necessary to obtain the values of these included angles θ by means of transfer printing or restoration. Please refer to Fig. 5A, first obtain the contour of the curved surface of the
接續,提出具體實施例來說明金屬柵模具20的製作方式。首先,將矽基板利用光阻材料均勻旋塗在表面,藉由旋塗機兩階段的塗佈來使其均勻分佈,譬如為第一階段750rmp,時間15秒、第二階段3500rmp,時間40s秒的兩階段旋塗。然後,放置於100℃烤盤軟烤1分鐘來將光阻材料進行硬化;接續,利用光罩對準儀的紫外光對矽基板進行硬式接觸曝光,曝光時間為1.6秒、或是以之光罩圖形以硬式曝光,曝光時間為1.6秒。然後,將曝完光的矽基板放置於烤盤進行1分鐘120℃做正負阻反轉烤並將矽基板做全面曝光40秒。然後,以顯影液搖晃顯影約40秒,再以去離子水沖洗1分鐘洗淨,再將矽基板置於125℃軟烤30分鐘來將光阻硬化。接續,利用硝酸(HNO
3):氫氟酸(HF):去離子水以1:1:2來構成蝕刻溶液,並進行蝕刻約180秒後,再以去離子水沖洗1分鐘洗淨,並利用氮氣吹乾,而定義出柵體之位置、寬度與長度。接續,將矽基板以設定的傾斜角度並進行斜向離子束蝕刻,依序完全所有溝槽的蝕刻後,將矽基板浸泡在裝有丙酮中,加熱至65℃,浸泡時間10分鐘。之後,再以超音波震盪機進行間斷式震盪,直到光阻完全掀離,而可取得具有兩種以上不同的數值之夾角的溝槽之金屬柵模具。
Next, a specific embodiment is proposed to illustrate the manufacturing method of the
而針對製作曲面貼合光柵偏振膜片的部份,以下也舉一個具體的實施例來說明。首先,將前述的金屬柵模具放入電子束蒸鍍機腔體中,進行抽真空,等到真空度到達3x10 -6Torr時,以蒸鍍速率3.5~4.5Å/sec開始進行鋁薄膜的蒸鍍,此處厚度設定為300奈米。接續,以光微影蝕刻來定義出柵體,也就是將其表面蝕刻以露出柵體。然後,塗佈光固化性樹脂後,利用紫外光照射固化樹脂後,即可將薄膜撕離並完成具有傾斜角度的曲面貼合光柵偏振膜片。以上僅是舉例說明具體的實施方案,並非限定僅能採用前述數值或材料來予以進行。 As for the part of making the polarizing film laminated with a curved surface, a specific embodiment will be given below to illustrate. Firstly, put the aforementioned metal grid mold into the cavity of the electron beam evaporation machine, and vacuumize it. When the vacuum degree reaches 3x10 -6 Torr, start the evaporation of the aluminum film at the evaporation rate of 3.5~4.5Å/sec. , where the thickness is set to 300 nm. Next, the gate body is defined by photolithography, that is, the surface is etched to expose the gate body. Then, after coating the photocurable resin and irradiating the resin with ultraviolet light to cure the resin, the film can be torn off and the curved surface with an inclined angle is attached to the grating polarizing film. The above is only an example to illustrate a specific implementation, and it is not limited to only use the aforementioned numerical values or materials for implementation.
以下結合光學模擬試驗的內容對本發明作進一步詳細說明及功效之驗證,但不應將其理解為對本發明保護範圍的限制。In the following, the present invention will be further described in detail and its efficacy verified in combination with the content of the optical simulation test, but it should not be interpreted as limiting the protection scope of the present invention.
請參照第6A圖和第6B圖,其本發明之實施例所提供的曲面貼合光柵偏振膜片之光學模擬試驗之功效對照示意圖。其利用具有曲面的玻璃透鏡,並於貼合具鋁金屬線寬為100nm厚度100nm線距150nm的金屬光柵偏振片,並利用模擬軟體Comsol進行在白光照射下時的偏振數據。經由模擬計算分析,結果發現P偏振光由93.4%提升至95.4%,也就是總提升2%的P偏振光;而總消光比是由30dB提升至36dB(提升20%)。Please refer to Fig. 6A and Fig. 6B, which are schematic diagrams showing the effect comparison of the optical simulation test of the curved surface laminating grating polarizing film provided by the embodiment of the present invention. It uses a glass lens with a curved surface, and is attached to a metal grating polarizer with an aluminum metal line width of 100nm, a thickness of 100nm, and a line spacing of 150nm, and uses the simulation software Comsol to obtain polarization data under white light irradiation. Through simulation analysis, it was found that the P-polarized light was increased from 93.4% to 95.4%, that is, the P-polarized light was increased by 2% in total; and the total extinction ratio was increased from 30dB to 36dB (increased by 20%).
綜上所述,根據本發明所提供的曲面貼合光柵偏振膜片及其製造方法與金屬柵模具,利用轉印製程來製作相關金屬柵模具,使金屬柵模具之複數個溝槽與其表面會形成一個夾角,且夾角的數值具有至少兩種以上不同的數值,且此溝槽的夾角係藉由待貼合的曲面的輪廓以轉印製程來設計。因此,藉由此金屬柵模具所成型之曲面貼合光柵偏振膜片,就會具有預傾斜的柵體,且相同地,柵體傾斜的角度也就會具有兩種以上的斜度,且其也係配合待貼合的曲面之輪廓。因此,在貼合曲面後,受到曲面表面張力拉伸下,柵體不會產生傾斜的狀況,而是會呈現概略相互平行的狀態,來解決曲面貼合光柵偏振膜片的光反射及降低消光比問題的問題。當應用於譬如感測裝置、光學鏡頭、眼鏡、電子裝置等具有曲面的產品時,不會產生傾斜的狀況,進而提升消光比。To sum up, according to the curved surface laminated grating polarizing film and its manufacturing method and the metal grid mold provided by the present invention, the related metal grid mold is made by using the transfer printing process, so that the plurality of grooves of the metal grid mold and the surface of the metal grid mold can be aligned. An included angle is formed, and the value of the included angle has at least two or more different values, and the included angle of the groove is designed by the transfer printing process according to the outline of the curved surface to be bonded. Therefore, the curved surface formed by the metal grid mold is attached to the grating polarizing film, and there will be a pre-tilted grid body, and similarly, the tilt angle of the grid body will have more than two kinds of slopes, and its It also matches the contour of the surface to be bonded. Therefore, after laminating the curved surface, under the tension of the surface tension of the curved surface, the grating body will not be tilted, but will be roughly parallel to each other, so as to solve the light reflection and reduce extinction of the grating polarizing film bonded to the curved surface than the problem of the problem. When applied to products with curved surfaces such as sensing devices, optical lenses, glasses, and electronic devices, there will be no inclination, thereby improving the extinction ratio.
唯以上所述者,僅為本發明之較佳實施例而已,並非用來限定本發明實施之範圍。故即凡依本發明申請範圍所述之特徵及精神所為之均等變化或修飾,均應包括於本發明之申請專利範圍內。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Therefore, all equivalent changes or modifications based on the features and spirit described in the scope of the application of the present invention shall be included in the scope of the patent application of the present invention.
10:金屬柵偏振膜片 11:柵體 12:曲面 20:金屬柵模具 201:表面 21:溝槽 23:基材 24:光阻材料 30:曲面貼合光柵偏振膜片 31:柵體 32:基板 40:待貼物 41:曲面表面 501:法線 60:入射光 θ:夾角 α:夾角 10: Metal grid polarizing film 11: grid body 12: Surface 20: Metal grid mold 201: surface 21: Groove 23: Substrate 24: Photoresist material 30: Curved surface bonded grating polarizing film 31: grid body 32: Substrate 40: Items to be posted 41: curved surface 501: Normal 60: incident light θ: included angle α: included angle
第1A圖為習知金屬柵偏振膜片的結構示意圖。 第1B圖為習知金屬柵偏振膜片貼合於曲面的示意圖。 第2A〜2E圖為本發明之實施例所提供的曲面貼合光柵偏振膜片的製造方法之製作流程示意圖。 第3A〜3B圖為本發明之實施例所提供的曲面貼合光柵偏振膜片貼合於一曲面表面的示意圖。 第4A〜4E圖本發明之實施例所提供的金屬柵模具之製作流程示意圖。 第5A圖和第5B圖為本發明實施例所提供的金屬柵模具之取得溝槽夾角的示意圖。 第6A〜6B圖為本發明之實施例所提供的曲面貼合光柵偏振膜片之光學模擬試驗之功效對照示意圖。 FIG. 1A is a schematic structural view of a conventional metal grid polarizing film. FIG. 1B is a schematic diagram of a conventional metal grid polarizer attached to a curved surface. 2A-2E are schematic diagrams of the manufacturing process of the method for manufacturing the curved surface lamination grating polarizing film provided by the embodiment of the present invention. Figures 3A-3B are schematic diagrams of a curved surface-bonded grating polarizing film provided by an embodiment of the present invention bonded to a curved surface. 4A-4E are schematic diagrams of the manufacturing process of the metal grid mold provided by the embodiment of the present invention. FIG. 5A and FIG. 5B are schematic diagrams of the groove angle obtained by the metal grid mold provided by the embodiment of the present invention. Figures 6A-6B are schematic diagrams showing the effect comparison of the optical simulation test of the curved surface laminating grating polarizing film provided by the embodiment of the present invention.
30:曲面貼合光柵偏振膜片 30: Curved surface bonded grating polarizing film
31:柵體 31: grid body
32:基板 32: Substrate
40:待貼物 40: Items to be posted
41:曲面表面 41: curved surface
Claims (21)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111516178.8 | 2021-12-07 | ||
CN202111516178.8A CN114200564B (en) | 2021-12-07 | 2021-12-07 | Curved surface-bonded grating polarization diaphragm, manufacturing method thereof and metal grating mold |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI786998B TWI786998B (en) | 2022-12-11 |
TW202323867A true TW202323867A (en) | 2023-06-16 |
Family
ID=80652852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW110147284A TWI786998B (en) | 2021-12-07 | 2021-12-16 | Polarization grating films for curved surfaces, its manufacturing method and the metallic grating mold thereof |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN114200564B (en) |
TW (1) | TWI786998B (en) |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4250906B2 (en) * | 2002-04-23 | 2009-04-08 | コニカミノルタホールディングス株式会社 | Optical element |
JP2004344994A (en) * | 2003-05-20 | 2004-12-09 | Sankyo Seiki Mfg Co Ltd | Step forming method, lens molding die, and lens |
WO2010005059A1 (en) * | 2008-07-10 | 2010-01-14 | 旭硝子株式会社 | Wire grid type polarizer, and method for manufacturing the polarizer |
JP5273248B2 (en) * | 2009-07-01 | 2013-08-28 | 旭硝子株式会社 | Method for manufacturing article having fine concavo-convex structure on surface and method for manufacturing wire grid type polarizer |
JP6058402B2 (en) * | 2012-06-08 | 2017-01-11 | 株式会社日立ハイテクノロジーズ | Method of manufacturing curved diffraction grating, and mold of curved diffraction grating |
CN102866445A (en) * | 2012-10-15 | 2013-01-09 | 上海理工大学 | Design method of grating with glaring concave surface |
JP6436089B2 (en) * | 2013-10-25 | 2018-12-12 | コニカミノルタ株式会社 | Method for manufacturing curved grating |
CN103645532B (en) * | 2013-11-29 | 2016-02-17 | 东莞市金达照明有限公司 | A kind of matrix structure for making concave surface blazed grating and concave surface blazed grating method for making |
JP6729396B2 (en) * | 2015-01-19 | 2020-07-22 | Agc株式会社 | Optical device and optical member |
CN106482832B (en) * | 2015-08-24 | 2021-05-25 | 台湾超微光学股份有限公司 | Spectrometer, monochromator, diffraction grating, manufacturing method of diffraction grating and manufacturing method of master die |
CN105388546B (en) * | 2015-12-21 | 2017-09-05 | 中国工程物理研究院流体物理研究所 | A kind of concave surface volume holographic grating |
TWI627449B (en) * | 2016-04-15 | 2018-06-21 | 中央研究院 | Curved diffraction grating, spectrometer and curved diffraction grating manufacturing method |
CN109212655B (en) * | 2017-06-30 | 2020-01-24 | 京东方科技集团股份有限公司 | Backlight source, manufacturing method thereof and display device |
CN109709636A (en) * | 2018-12-12 | 2019-05-03 | 深圳先进技术研究院 | A kind of processing unit (plant) and processing method of curved surface grating |
CN111564119B (en) * | 2020-05-12 | 2023-03-28 | Oppo广东移动通信有限公司 | Display screen assembly, manufacturing method thereof and electronic device |
-
2021
- 2021-12-07 CN CN202111516178.8A patent/CN114200564B/en active Active
- 2021-12-16 TW TW110147284A patent/TWI786998B/en active
Also Published As
Publication number | Publication date |
---|---|
TWI786998B (en) | 2022-12-11 |
CN114200564B (en) | 2023-05-05 |
CN114200564A (en) | 2022-03-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3821069B2 (en) | Method for forming structure by transfer pattern | |
US20040174596A1 (en) | Polarization optical device and manufacturing method therefor | |
KR101020634B1 (en) | Manufacturing method of lens having nanopattern | |
JP2004304097A (en) | Pattern forming method, and manufacturing method for semiconductor device | |
US9927692B2 (en) | Reflective photomask and production method therefor | |
WO2016107041A1 (en) | Wire-grid polarizer, manufacturing method therefor, and display device | |
WO2016058314A1 (en) | Wire grating polarizing film and manufacturing method therefor, and display apparatus | |
US20200166683A1 (en) | Metal wire grid and its manufacturing method, and display panel | |
JP2000231011A (en) | Optical device and stamper used for its production | |
TWI786998B (en) | Polarization grating films for curved surfaces, its manufacturing method and the metallic grating mold thereof | |
JP4280567B2 (en) | Polarizing optical element and manufacturing method thereof | |
KR100871812B1 (en) | Nano imprint mask and method for manufacturing thereof | |
JP3859473B2 (en) | Stamper manufacturing method | |
JP4280518B2 (en) | Polarizing optical element and manufacturing method thereof | |
JP4105919B2 (en) | Pattern transfer method in semiconductor device manufacturing | |
CN109782383B (en) | Device manufacturing method suitable for low-heat-conductivity and electric-conductivity material substrate | |
US11926113B2 (en) | Optical element and method for manufacturing optical element | |
JPH06104171A (en) | Manufacture of semiconductor device | |
CN114815025B (en) | Preparation method of large-duty-ratio sub-wavelength period grating | |
CN117518303A (en) | Optical element and method for manufacturing optical element | |
TWI610804B (en) | Energy-saving Glass and Method of Manufacturing the Same | |
JPH05134247A (en) | Production of liquid crystal display element | |
CN116299789A (en) | Manufacturing process of nano velvet microstructure with anti-reflection effect | |
KR101104208B1 (en) | Method for selective patterning of polyurethane and a semiconductor device manufactured by using the same | |
CN116130355A (en) | Process for manufacturing positive trapezoid glue shape by dry etching |