CN102866445A - Design method of grating with glaring concave surface - Google Patents
Design method of grating with glaring concave surface Download PDFInfo
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- CN102866445A CN102866445A CN2012103882828A CN201210388282A CN102866445A CN 102866445 A CN102866445 A CN 102866445A CN 2012103882828 A CN2012103882828 A CN 2012103882828A CN 201210388282 A CN201210388282 A CN 201210388282A CN 102866445 A CN102866445 A CN 102866445A
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- concave surface
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- concave
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Abstract
The invention relates to design method of a grating with a glaring concave surface. For a concave substrate with the preset radius R, carving grooves with preset angles and intervals are carved on the substrate so as to obtain the grating with the glaring concave surface. Incident light is spherical wave sent out by a point light source, the point light source is located on a Rowland circle, angles of curving groove surfaces are designed so as to enable the incident light to be perpendicular to the carving groove surfaces, the interval of the carving grooves is designed so as to enable optical path difference of adjacent carving grooves to be integral multiple of preset wavelength, carving grooves with corresponding angles and interval are carved one by one on the concave substrate by using a free curved-surface processing instrument, and the required grating with the glaring concave surface is obtained. The designed concave grating has remarkable glaring enhancement effect on the preset wavelength lambda, the design method is convenient to implement, only relates to calculation of elementary mathematics, dose not need professional optical design software, and the designed grating with the glaring concave surface can be widely applied to the technical field of a spectrum analysis instrument, optical detection, optical measurement and the like.
Description
Technical field
The present invention relates to a kind of design of optical instrument, particularly a kind of method for designing of concave surface blazed grating.
Background technology
Diffraction grating is as the beam splitter of superior performance and be widely used in the fields such as spectral analysis, laser instrument, integrated optical circuit, optical communication and Industry Control and metering, for example in spectral instrument, grating is the high key element of accuracy requirement, in recent years, grating has almost completely replaced prism and as the dispersion element of spectral instrument, the development of precise grating manufacturing technology directly has influence on the development of other science and technology field such as geology, metallurgy, astronomy, medicine, space flight, and its effect is inestimable.Most of energy of common grating incident light all concentrates on not to be had on the Zero-order diffractive of the dispersion level time, and light intensity is very little on more senior time, research is found, the geometric configuration of cutting is depended in the distribution of luminous energy on grating spectrum is at the same level time, as long as the section shape of grating cutting is done engrail, most of energy of diffraction light is transferred on needed grade time from zero level, and the grating with this specific character is blazed grating.On the other hand, spectral instrument is integrated in order to adapt to, the development trend of miniaturization and lightness, research to concave grating is also more and more extensive, because it has the characteristic of dispersion element and concentrating element simultaneously, thereby can be used as optical element unique in the spectrometer and need not collimating mirror and focus lamp, this not only makes the structure of spectrometer greatly simplify, and for being operated in vacuum ultraviolet and far ultraviolet spectrometer, owing to not existing transmission material to the absorption of ultraviolet light wave, can improve significantly the efficient of instrument.But in concave grating, because grating interview sphere, and the inclined-plane of cutting is parallel to each other, thereby the blazing angle of cutting gradually changes, for this reason, the intensity distributions of concave surface blazed grating is smooth than plane grating, that is is not clearly to the glints effect of specific wavelength, thereby has limited its range of application.
Summary of the invention
The present invention be directed to the concave surface blazed grating is not clearly problem to the glints effect of specific wavelength, has proposed a kind of method for designing of concave surface blazed grating.Utilize simple method for designing to determine angle and the spacing of concave grating cutting face, thereby make it reach the humidification of glittering to specific wavelength λ.
Technical scheme of the present invention is: a kind of method for designing of concave surface blazed grating, be the concave surface substrate of R for given radius, by the cutting in substrate delineation set angle and spacing, obtain the concave surface blazed grating, described incident light is the spherical wave that pointolite sends, and pointolite is positioned on the Rowland circle; The angle of design cutting face is so that incident ray is vertical with all cutting face maintenances; The spacing of design cutting is so that the optical path difference of adjacent cutting is the integral multiple of specified wavelength; Utilize the Free-Form Surface Machining instrument on the concave surface substrate, to depict one by one the cutting of respective angles and spacing, obtain required concave surface blazed grating.
The wavelength of described specified wavelength for needing realization to glitter and strengthen.
The angle of described cutting face is:
Wherein (x, y, z) is the on-chip any point of concave surface, (x
1, y
1, 0) and for being positioned at the upper incidence point coordinate of principal section xOy.
The position of described n bar cutting is:
D wherein
nFor being positioned at incidence point (x on the xOy face of principal section
1, y
1, 0) and to the distance of n bar cutting, (x
n, y
n, 0) and be the intersection point of the cutting of n bar and principal section xOy.
Beneficial effect of the present invention is: the method for designing of concave surface blazed grating of the present invention, the concave grating of designing can have the enhancing effect of glittering significantly to specified wavelength λ, the invention process is convenient, only relate to the calculating of elementary mathematics, do not need the optical design software of specialty, the concave surface blazed grating of design can be widely used in the technical fields such as spectrometric instrument, optical detection and optical measurement.
Description of drawings
Fig. 1 is the use index path of concave surface blazed grating of the present invention;
Fig. 2 is the partial enlarged drawing of concave surface blazed grating cutting face of the present invention.
Embodiment
Shown in Figure 1 is the use index path of concave surface blazed grating.11 is the concave surface blazed grating, and its radius-of-curvature is R, and 12 is its center of curvature C(R, 0,0), 13 is Rowland circle, and it is that a diameter equals the concave spherical surface radius and is tangential on O point (0,0 with concave spherical surface, 0) circle, meanwhile, this circle is positioned at principal section xOy face, and 14 is incidence point A(x
1, y
1, 0), the central ray incident angle is θ, 15 is any point B(x on the concave spherical surface, y, z), x, y, z satisfy equation (x-R)
2+ y
2+ z
2=R
2
Fig. 2 is the partial enlarged drawing of concave surface blazed grating cutting face, and for any point B on the concave spherical surface, its normal n is through the center of curvature of concave surface, i.e. BC among Fig. 1; On the other hand, in order to improve the efficient of grating, require any light AB that sends from the A point to return on former road, namely AB will be perpendicular to grating facet 21, therefore the angle (angle in grating facet and this Dian Chu section) of the grating facet at B point place should equal the angle of AB and BC, namely
, wherein
Be (x-x
1, y-y
1, z),
Be (x-R, y, z), therefore have:
Design parameter is: the radius of curvature R=120mm of concave spherical surface, incidence angle θ=-10 °, then x
1=Rcos
2θ=116.4mm, y
1=Rcos θ sin θ=-20.5mm, like this for any point B on the concave spherical surface, suppose that its coordinate is (10,10,110.5), the angle that can draw rapidly this some place grating facet is 9.86 °.
Wavelength X=the 1um that will realize among the embodiment glittering and strengthen, in order to determine the position of each cutting, need to the light path of light in the principal section that incidence point A sends be calculated, for the light that adjacent cutting is reflected has the relevant effect that strengthens to wavelength X, its optical path difference must equal the integral multiple of λ, consider the convenience of calculating, make optical path difference between adjacent cutting equate and be λ.Suppose that the cutting through initial point O is the 0th cutting, its light path is 2AO because the light that sends from A point is to the light path of n bar cutting and the optical path difference Δ of ordering to O=n λ, therefore A o'clock to the cutting of n bar apart from d
n=AO+n λ/2.If the intersection point of the cutting of n bar and principal section is B
n(x
n, y
n, 0), just can obtain the position of n bar cutting by finding the solution following system of equations:
Take the 1000th cutting as example,
118.74mm bringing following formula into has:
Thereby obtain
So far, the position of grating cutting and the angle of cutting face are determined, have successfully realized specified wavelength λ is had the design of the humidification concave grating 11 that glitters.
Claims (4)
1. the method for designing of a concave surface blazed grating is the concave surface substrate of R for given radius, by the cutting in substrate delineation set angle and spacing, obtain the concave surface blazed grating, it is characterized in that, described incident light is the spherical wave that pointolite sends, and pointolite is positioned on the Rowland circle; The angle of design cutting face is so that incident ray is vertical with all cutting face maintenances; The spacing of design cutting is so that the optical path difference of adjacent cutting is the integral multiple of specified wavelength; Utilize the Free-Form Surface Machining instrument on the concave surface substrate, to depict one by one the cutting of respective angles and spacing, obtain required concave surface blazed grating.
2. the method for designing of described concave surface blazed grating according to claim 1 is characterized in that, the wavelength of described specified wavelength for needing to realize to glitter and strengthen.
3. the method for designing of described concave surface blazed grating according to claim 1 is characterized in that, the angle of described cutting face is:
Wherein (x, y, z) is the on-chip any point of concave surface, (x
1, y
1, 0) and for being positioned at the upper incidence point coordinate of principal section xOy.
4. the method for designing of described concave surface blazed grating according to claim 1 is characterized in that, the position of described n bar cutting is:
D wherein
nFor being positioned at incidence point (x on the xOy face of principal section
1, y
1, 0) and to the distance of n bar cutting, (x
n, y
n, 0) and be the intersection point of the cutting of n bar and principal section xOy.
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| CN2012103882828A CN102866445A (en) | 2012-10-15 | 2012-10-15 | Design method of grating with glaring concave surface |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103439762A (en) * | 2013-08-28 | 2013-12-11 | 上海理工大学 | Method for ruling and manufacturing concave blazed gratings |
| CN103645530A (en) * | 2013-11-06 | 2014-03-19 | 中国科学院物理研究所 | Reflective optical element, design method thereof and applications in solar cells |
| CN105068166A (en) * | 2014-05-27 | 2015-11-18 | 中国科学院上海微系统与信息技术研究所 | Manufacturing method for high linear density EUV multilayer blazed grating |
| CN108711728A (en) * | 2018-05-04 | 2018-10-26 | 中国科学院福建物质结构研究所 | Without hysteroscope optical parametric oscillator and preparation method thereof, mid and far infrared laser |
| CN112313548A (en) * | 2018-08-29 | 2021-02-02 | 株式会社日立高新技术 | Concave diffraction grating, method for manufacturing same, and optical device |
| CN114200564A (en) * | 2021-12-07 | 2022-03-18 | 业成科技（成都）有限公司 | Curved surface laminated grating polarization membrane, manufacturing method thereof and metal grating mold |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101246229A (en) * | 2008-03-25 | 2008-08-20 | 清华大学 | Method for directly producing photo resist prototype grating on convex surface substrate |
-
2012
- 2012-10-15 CN CN2012103882828A patent/CN102866445A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101246229A (en) * | 2008-03-25 | 2008-08-20 | 清华大学 | Method for directly producing photo resist prototype grating on convex surface substrate |
Non-Patent Citations (1)
| Title |
|---|
| CHENG-HAO KO，ET.AL: "Double reflection in the concave reflective blazed grating", 《OPTICS EXPRESS》, vol. 15, no. 17, 20 August 2007 (2007-08-20), pages 10498 - 10503 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103439762A (en) * | 2013-08-28 | 2013-12-11 | 上海理工大学 | Method for ruling and manufacturing concave blazed gratings |
| CN103439762B (en) * | 2013-08-28 | 2016-04-13 | 上海理工大学 | The delineation method for making of concave surface blazed grating |
| CN103645530A (en) * | 2013-11-06 | 2014-03-19 | 中国科学院物理研究所 | Reflective optical element, design method thereof and applications in solar cells |
| CN103645530B (en) * | 2013-11-06 | 2016-03-02 | 中国科学院物理研究所 | Reflection type optical element and method for designing thereof and application in solar cells |
| CN105068166A (en) * | 2014-05-27 | 2015-11-18 | 中国科学院上海微系统与信息技术研究所 | Manufacturing method for high linear density EUV multilayer blazed grating |
| CN105068166B (en) * | 2014-05-27 | 2017-12-29 | 中国科学院上海微系统与信息技术研究所 | A kind of preparation method of high linear density multiplayer films in EUV balzed grating, |
| CN108711728A (en) * | 2018-05-04 | 2018-10-26 | 中国科学院福建物质结构研究所 | Without hysteroscope optical parametric oscillator and preparation method thereof, mid and far infrared laser |
| CN112313548A (en) * | 2018-08-29 | 2021-02-02 | 株式会社日立高新技术 | Concave diffraction grating, method for manufacturing same, and optical device |
| CN114200564A (en) * | 2021-12-07 | 2022-03-18 | 业成科技（成都）有限公司 | Curved surface laminated grating polarization membrane, manufacturing method thereof and metal grating mold |
| CN114200564B (en) * | 2021-12-07 | 2023-05-05 | 业成科技（成都）有限公司 | Curved surface-bonded grating polarization diaphragm, manufacturing method thereof and metal grating mold |
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Application publication date: 20130109 |