CN107271038A - A kind of high resolution spectrometer system - Google Patents

A kind of high resolution spectrometer system Download PDF

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Publication number
CN107271038A
CN107271038A CN201710534058.8A CN201710534058A CN107271038A CN 107271038 A CN107271038 A CN 107271038A CN 201710534058 A CN201710534058 A CN 201710534058A CN 107271038 A CN107271038 A CN 107271038A
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CN
China
Prior art keywords
light
mirror assembly
optical lens
grating
high resolution
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Pending
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CN201710534058.8A
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Chinese (zh)
Inventor
纪振华
郑玉权
蔺超
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN201710534058.8A priority Critical patent/CN107271038A/en
Publication of CN107271038A publication Critical patent/CN107271038A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The embodiment of the invention discloses a kind of high resolution spectrometer system, including slit, collimation mirror assembly, imaging mirror assembly and photo-detector, system also includes plane grating, and the wherein light beam of object emission is transmitted to collimation mirror assembly through slit;Collimation mirror assembly will obtain directional light after beam collimation, and make directional light with incidence angle θ0Directive plane grating;Directional light is converged on photo-detector after diffraction light, the imaged mirror assembly of diffraction light are obtained after plane grating diffraction;The grating constant of plane grating is d, θ0The first relational expression and the second relational expression are met simultaneously with d, and λ is the wavelength of directional light.Light beam has to 0 order diffraction light and+1 order diffraction light to the embodiment of the present invention after plane grating diffraction in use, reduces the veiling glare of inoperative level, improves capacity usage ratio, improves the performance of whole system.

Description

A kind of high resolution spectrometer system
Technical field
The present embodiments relate to high-resolution spectroscopy technical field, more particularly to a kind of high resolution spectrometer system System.
Background technology
High-resolution spectroscopy technology is the important means for obtaining target optical spectrum information, and the spectral technique of grating beam splitting is spaceborne One of technology of comparative maturity in high resolution spectrometer.Compared to the spectral instrument using other types light splitting technology, grating Spectrometer has the advantages that the linear distribution of spectrum, high spectral resolution, high ground resolution and easily calibrated.But, it is right In traditional grating spectrograph, light beam has multiple order spectrum (0 grade ,+1 grade, the even more senior light such as+2 grades after optical grating diffraction Compose area), so as to cause capacity usage ratio to reduce, and inoperative level diffraction light enter optical system after easily form spuious Light, reduces the performance of whole system.
Therefore, how to provide a kind of high resolution spectrometer system for solving above-mentioned technical problem turns into the technology of this area The problem of personnel need to solve at present.
The content of the invention
The purpose of the embodiment of the present invention is to provide a kind of high resolution spectrometer system, and light beam is through plane in use 0 order diffraction light and+1 order diffraction light are had to after optical grating diffraction, the veiling glare of inoperative level is reduced, improves energy utilization Rate, improves the performance of whole system.
In order to solve the above technical problems, the embodiments of the invention provide a kind of high resolution spectrometer system, including slit, Mirror assembly, imaging mirror assembly and photo-detector are collimated, the system also includes plane grating, wherein:
The light beam of object emission is transmitted to the collimation mirror assembly through the slit;The mirror assembly that collimates is by the light beam Directional light is obtained after collimation, and makes the directional light with incidence angle θ0Plane grating described in directive;The directional light is through described flat Diffraction light is obtained after concave grating diffraction, the diffraction light is converged on the photo-detector after the imaging mirror assembly;
The grating constant of the plane grating is d, the θ0< d (the 1+sin of the first relational expression 1 are met simultaneously with the d θ0)/λ < 2 and the second relational expression d (sin θs0- 1)/λ > -1, wherein, λ is the wavelength of directional light.
Optionally, the θ0For 45 °.
Optionally, the collimation mirror assembly includes the first optical lens and the second optical lens, first optical lens First surface to be aspherical, its second surface is sphere;The first surface of second optical lens is aspherical, and it second Surface is sphere.
Optionally, the imaging mirror assembly includes the 3rd optical lens and the 4th optical lens, the 3rd optical lens First surface to be aspherical, its second surface is sphere;The first surface of 4th optical lens is aspherical, and it second Surface is sphere.
Optionally, the span of the λ is 758nm~778nm.
Optionally, the length of the slit is 8mm.
The present invention is that embodiment provides a kind of high resolution spectrometer system, including slit, collimation mirror assembly, imaging lens Component and photo-detector, system also include plane grating, wherein:The light beam of object emission is transmitted to collimation microscope group through slit Part;Collimation mirror assembly will obtain directional light after beam collimation, and directional light is penetrated θ with incidence angle0To plane grating;Directional light is passed through Converged to after diffraction light, the imaged mirror assembly of diffraction light are obtained after plane grating diffraction on photo-detector;The grating of plane grating Constant is d, θ0< d (the 1+sin θ of the first relational expression 1 are met simultaneously with d0)/λ < 2 and the second relational expression d (sin θs0- 1)/λ > -1, Wherein, λ is the wavelength of directional light.
The grating constant and incidence angle θ of plane grating in the embodiment of the present invention0< d (the 1+ of a relational expression 1 should be met sinθ0)/λ < 2, and the second relational expression d (sin θs0- 1)/λ > -1, you can make to only exist 0 order diffraction light in diffracted ray to realize With+1 order diffraction light, and directional light and+1 order diffraction light are located at the homonymy of grating normal, and 0 order diffraction light and+1 order diffraction light are located at The both sides of grating normal, make+1 order diffraction light of work level time be imaged in by being imaged mirror assembly in the image planes of photo-detector.Cause This, light beam has to 0 order diffraction light and+1 order diffraction light to the embodiment of the present invention after plane grating diffraction in use, subtracts Lack the veiling glare of inoperative level, improved capacity usage ratio, improve the performance of whole system.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, below will be to institute in prior art and embodiment The accompanying drawing needed to use is briefly described, it should be apparent that, drawings in the following description are only some implementations of the present invention Example, for those of ordinary skill in the art, on the premise of not paying creative work, can also be obtained according to these accompanying drawings Obtain other accompanying drawings.
Fig. 1 is a kind of structural representation of high resolution spectrometer system provided in an embodiment of the present invention;
Fig. 2 is plane grating diffraction schematic diagram;
Fig. 3 is the structural representation of another high resolution spectrometer system provided in an embodiment of the present invention.
Embodiment
The embodiments of the invention provide a kind of high resolution spectrometer system, light beam spreads out through plane grating in use 0 order diffraction light and+1 order diffraction light are had to after penetrating, the veiling glare of inoperative level is reduced, improves capacity usage ratio, carry The performance of whole system is risen.
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is A part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
Fig. 1 is refer to, Fig. 1 is a kind of structural representation of high resolution spectrometer system provided in an embodiment of the present invention. The system includes slit 1, collimation mirror assembly 2, imaging mirror assembly 3 and photo-detector 4, and system also includes plane grating 5, its In:
The light beam of object emission is transmitted to collimation mirror assembly 2 through slit;Collimation mirror assembly 2 will obtain parallel after beam collimation Light, and make directional light with incidence angle θ0Directive plane grating 5;Directional light obtains diffraction light, diffraction light after the diffraction of plane grating 5 Converged to after imaged mirror assembly 3 on photo-detector 4;
The grating constant of plane grating 5 is d, θ0< d (the 1+sin θ of the first relational expression 1 are met simultaneously with d0)/λ < 2 and second Relational expression d (sin θs0- 1)/λ > -1, wherein, λ is the wavelength of directional light.
It should be noted that in the high resolution spectrometer system provided in this application, the light beam that object is launched Collimation mirror assembly 2 is injected after slit 1, collimated mirror assembly 2 obtains directional light after collimating, makes directional light with incident angles To plane grating 5, you can so that directional light is with large angle incidence, and make incidence angle be θ0Grating with plane grating 5 is normal Number meets < d (the 1+sin θ of the first relational expression 1 simultaneously for d0)/λ < 2 and the second relational expression d (sin θs0- 1)/λ > -1, so as to Diffraction light there was only 0 order diffraction light and+1 diffraction light, without the diffraction light of other levels, further reduce inoperative level The veiling glare that diffraction light is formed, improves capacity usage ratio.
Specifically, as shown in Fig. 2 Fig. 2 is the diffraction schematic diagram of plane grating 5.For incident light and diffraction light in raster method During line the same side, grating equation is:
d(sinθ+sinθ0)=m λ
Wherein θ is the angle of diffraction, and m is diffraction light level, and d is the grating constant of plane grating 5, and θ 0 is incidence angle and λ is The wavelength of directional light.Then, diffraction light level m=d (sin θs+sin θ0)/λ, and because d>0, m is integer, and θ<It is 90 °, all to work as During m=0, i.e., when diffraction light is 0 order diffraction light, θ=- θ0, that is, 0 order diffraction light is located at the two of grating normal with directional light Side, and+1 order diffraction light and directional light are located at the homonymy of grating normal.
As shown in Figure 2, θ0The smaller angle of diffraction is closer to grating normal, namely 0 order diffraction light is closer to grating normal;θ0 The bigger angle of diffraction more deviates grating normal further away from grating normal, namely 0 order diffraction light, so as to adjust incidence angle θ0Size 0 order diffraction light can be made not enter in work system.Work as θ0At=45 °, 0 order diffraction angle and incidence angle are in 90 °, and because It should be met for the angle of diffraction:- 1≤sin θ≤+ 1, it is all to obtain:
d(sinθ0-1)/λ<m<d(sinθ0+1)/λ
Further, if making diffraction light only exist 0 grade and+1 order diffraction light, the first relational expression 1 can be obtained according to above formula < d (1+sin θ0)/λ < 2 and the second relational expression d (sin θs0- 1)/λ > -1, so that avoid the diffraction light of other levels therefore, Make that corresponding plane grating 5 can be designed in actual applications, make its grating constant and incident light θ0Meet the first relational expression and Second relational expression can make to only exist 0 grade and+1 order diffraction light in diffraction light, and can be by outside 0 order diffraction light-output to system Portion, the diffraction light of work level time is only existed+1 order diffraction light is used to be imaged.
The present invention is that embodiment provides a kind of high resolution spectrometer system, including slit, collimation mirror assembly, imaging lens Component and photo-detector, system also include plane grating, wherein:The light beam of object emission is transmitted to collimation microscope group through slit Part;Collimation mirror assembly will obtain directional light after beam collimation, and make directional light with incidence angle θ0Directive plane grating;Directional light is passed through Converged to after diffraction light, the imaged mirror assembly of diffraction light are obtained after plane grating diffraction on photo-detector;The grating of plane grating Constant is d, θ0< d (the 1+sin θ of the first relational expression 1 are met simultaneously with d0)/λ < 2 and the second relational expression d (sin θs0- 1)/λ > -1, Wherein, λ is the wavelength of directional light.
The grating constant and incidence angle θ of plane grating in the embodiment of the present invention0< d (the 1+ of a relational expression 1 should be met sinθ0)/λ < 2, and the second relational expression d (sin θs0- 1)/λ > -1, you can make to only exist 0 order diffraction light in diffracted ray to realize With+1 order diffraction light, and directional light and+1 order diffraction light are located at the homonymy of grating normal, and 0 order diffraction light and+1 order diffraction light are located at The both sides of grating normal, make+1 order diffraction light of work level time be imaged in by being imaged mirror assembly in the image planes of photo-detector.Cause This, the light beam in the embodiment of the present invention has to 0 order diffraction light and+1 order diffraction light after plane grating diffraction, reduces non-work Make the veiling glare of level, improve capacity usage ratio, improve the performance of whole system.
Fig. 3 is refer to, Fig. 3 is the structural representation of another high resolution spectrometer system provided in an embodiment of the present invention Figure.On the basis of above-described embodiment:
Optionally, θ0For 45 °.
Certainly, for incidence angle θ0Specific value can be according to actual conditions depending on, the embodiment of the present invention is not made to this Special restriction, can realize the purpose of the embodiment of the present invention.
Optionally, collimation mirror assembly 2 includes the first optical lens L21 and the second optical lens L22, the first optical lens L21 first surface S1 is aspherical, and its second surface S2 is sphere;Second optical lens L22 first surface S3 is aspheric Face, its second surface S4 is sphere.
It should be noted that the first optical lens L21 and the second optical lens L22 groups can be used in the embodiment of the present invention Into lens group as collimator lens assembly, and the first optical lens L21 first surface S1 and second surface S2 be respectively Aspherical and sphere, wherein, the first optical lens L21 first surface S1 is first passed through by the light beam of slit 1, is then passed through again First optical lens L21 second surface S2.In addition, the second optical lens L22 first surface S3 and second surface S4 also may be used To be respectively aspherical and sphere, the second optical lens L22, and light are incident to by the first optical lens L21 light First pass through after the second optical lens L22 first surface S3 again by the second surface S4 of optical lens, it is parallel to make transmitted light Light, further to make the directional light be incident on the plane grating 55 of plane grating 5.
Certainly, the embodiment of the present invention is not limited only to constitute collimation mirror assembly 2 using the combination of two optical lenses, also may be used Using using optical lens as collimation mirror assembly 2, specifically can be according to actual conditions depending on, the embodiment of the present invention is to this Do not make special restriction, the purpose of the embodiment of the present invention can be realized.
In addition, for the first optical lens L21 and the radius of curvature and relevant parameter on second each surface of optical lens L22 Specific value can be according to actual conditions depending on.
Optionally, imaging mirror assembly 3 includes the 3rd optical lens L31 and the 4th optical lens L32, the 3rd optical lens L31 first surface is aspherical, and its second surface is sphere;4th optical lens L32 first surface is aspherical, and it the Two surfaces are sphere.
It should be noted that the 3rd optical lens L31 and the 4th optical lens L32 groups can be used in the embodiment of the present invention Into lens group as imaging mirror assembly 3, and the 3rd optical lens L31 first surface S7 and second surface S6 are respectively non- Sphere and sphere, wherein, the 3rd optical lens L31 second surface is first passed through by the diffracted ray after the diffraction of plane grating 5 S6, then passes through the 3rd optical lens L31 first surface S7 again.In addition, the 4th optical lens L32 first surface S9 and Two surface S8 can also be respectively aspherical and sphere, pass through the 3rd optical lens by the 3rd optical lens L31 diffracted ray The 4th optical lens L32 is incident to after mirror L31 convergence, and diffracted ray first passes through the 4th optical lens L32 the second table It is imaged again by the first surface S9 of optical lens so that diffracted ray is converged on photo-detector 4 after the S8 of face.
Certainly, the embodiment of the present invention is not limited only to constitute imaging mirror assembly 3 using the combination of two optical lenses, also may be used Using using optical lens as imaging mirror assembly 3, specifically can be according to actual conditions depending on, the embodiment of the present invention is to this Do not make special restriction, the purpose of the embodiment of the present invention can be realized.
In addition, for the 3rd optical lens L31 and the radius of curvature and relevant parameter on the 4th each surface of optical lens L32 Specific value can be according to actual conditions depending on.
In addition, the first optical lens, the second optical lens, the 3rd optical lens and the 4th optical lens can be used The fused quartz material of high transmittance is made, certainly, is also not limited to use above-mentioned material, can also be using other materials Material, the embodiment of the present invention does not make special restriction to this, can realize the purpose of the embodiment of the present invention.
Optionally, λ span is:758nm~778nm.
Optionally, the length of slit is 8mm.
Specifically, can make in the embodiment of the present invention service band of high resolution spectrometer system for 758nm~ 778nm, that is, the wave-length coverage of incident light can be 758nm~778nm, certainly, be not limited only to this scope, can also set For other scopes, specifically can be according to actual conditions depending on, the embodiment of the present invention does not make special restriction to this, can realize The purpose of the embodiment of the present invention.
In addition, the length of the slit 1 in the system that the embodiment of the present invention is provided could be arranged to 8mm, pixel dimension can To be set to 360 μm of 30 μ m, Physical space NA could be arranged to NA=0.277.Particularly relevant parameter refer to table above-mentioned 1, Table 1 is a kind of structural parameters of high resolution spectrometer system provided in an embodiment of the present invention.Certainly, in actual applications each Depending on the specific value of parameter should be according to actual conditions, the application does not make special restriction to this, can realize the embodiment of the present invention Purpose.
Table 1
Surface number Radius of curvature Asphericity coefficient Interval Angle
Object plane 29.98
S1 -51.877 30
S2 -46.56 -0.41 193.85
S3 -858 40
S4 -120.5 -0.468 430
Grating It is infinitely great -410 -46.47
S6 -106.5 -0.532 -45
S7 It is infinitely great -138.63
S8 -100.5 -5.589 -40
S9 -62.18 -27.13
It should also be noted that, in this manual, such as first and second or the like relational terms be used merely to by One entity or operation make a distinction with another entity or operation, and not necessarily require or imply these entities or operation Between there is any this actual relation or order.Moreover, term " comprising ", "comprising" or its any other variant meaning Covering including for nonexcludability, so that process, method, article or equipment including a series of key elements not only include that A little key elements, but also other key elements including being not expressly set out, or also include be this process, method, article or The intrinsic key element of equipment.In the absence of more restrictions, the key element limited by sentence "including a ...", is not arranged Except also there is other identical element in the process including the key element, method, article or equipment.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or using the present invention. A variety of modifications to these embodiments will be apparent for those skilled in the art, as defined herein General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention The embodiments shown herein is not intended to be limited to, and is to fit to and principles disclosed herein and features of novelty phase one The most wide scope caused.

Claims (6)

1. a kind of high resolution spectrometer system, including slit, collimation mirror assembly, imaging mirror assembly and photo-detector, it is special Levy and be, the system also includes plane grating, wherein:
The light beam of object emission is transmitted to the collimation mirror assembly through the slit;The mirror assembly that collimates is by the beam collimation After obtain directional light, and make the directional light with incidence angle θ0Plane grating described in directive;The directional light is through the planar light Diffraction light is obtained after grid diffraction, the diffraction light is converged on the photo-detector after the imaging mirror assembly;
The grating constant of the plane grating is d, the θ0< d (the 1+sin θ of the first relational expression 1 are met simultaneously with the d0)/λ < 2 and the second relational expression d (sin θ0- 1)/λ > -1, wherein, λ is the wavelength of directional light.
2. high resolution spectrometer system according to claim 1, it is characterised in that the θ0For 45 °.
3. high resolution spectrometer system according to claim 2, it is characterised in that the collimation mirror assembly includes first Optical lens and the second optical lens, the first surface of first optical lens is aspherical, and its second surface is sphere;Institute The first surface for stating the second optical lens is aspherical, and its second surface is sphere.
4. high resolution spectrometer system according to claim 2, it is characterised in that the imaging mirror assembly includes the 3rd Optical lens and the 4th optical lens, the first surface of the 3rd optical lens is aspherical, and its second surface is sphere;Institute The first surface for stating the 4th optical lens is aspherical, and its second surface is sphere.
5. the high resolution spectrometer system according to claim 2-4 any one, it is characterised in that the value of the λ Scope is 758nm~778nm.
6. high resolution spectrometer system according to claim 5, it is characterised in that the length of the slit is 8mm。
CN201710534058.8A 2017-07-03 2017-07-03 A kind of high resolution spectrometer system Pending CN107271038A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108007570A (en) * 2017-11-28 2018-05-08 北京云端光科技术有限公司 Spectrometer and spectral detection system
CN110375854A (en) * 2019-07-10 2019-10-25 中国科学院上海技术物理研究所 A kind of compact refraction-reflection plane grating hyperspectral imager optical system
CN110736721A (en) * 2018-07-18 2020-01-31 西安工业大学 Glass plate refractive index uniformity detection device and detection method based on diffraction grating
CN113091905A (en) * 2021-04-12 2021-07-09 中国科学院地质与地球物理研究所 High-resolution meteor spectrum observer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108007570A (en) * 2017-11-28 2018-05-08 北京云端光科技术有限公司 Spectrometer and spectral detection system
WO2019105245A1 (en) * 2017-11-28 2019-06-06 北京云端光科技术有限公司 Spectrometer and spectrum detection system
CN110736721A (en) * 2018-07-18 2020-01-31 西安工业大学 Glass plate refractive index uniformity detection device and detection method based on diffraction grating
CN110375854A (en) * 2019-07-10 2019-10-25 中国科学院上海技术物理研究所 A kind of compact refraction-reflection plane grating hyperspectral imager optical system
CN113091905A (en) * 2021-04-12 2021-07-09 中国科学院地质与地球物理研究所 High-resolution meteor spectrum observer
CN113091905B (en) * 2021-04-12 2021-08-20 中国科学院地质与地球物理研究所 High-resolution meteor spectrum observer

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Application publication date: 20171020