TW202323489A - 膜狀接著劑、切割晶粒接合一體型膜、以及半導體裝置及其製造方法 - Google Patents
膜狀接著劑、切割晶粒接合一體型膜、以及半導體裝置及其製造方法 Download PDFInfo
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Adhesives Or Adhesive Processes (AREA)
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Applications Claiming Priority (2)
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WOPCT/JP2021/035421 | 2021-09-27 | ||
PCT/JP2021/035421 WO2023047594A1 (ja) | 2021-09-27 | 2021-09-27 | フィルム状接着剤、ダイシング・ダイボンディング一体型フィルム、並びに半導体装置及びその製造方法 |
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TW202323489A true TW202323489A (zh) | 2023-06-16 |
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TW111136098A TW202323489A (zh) | 2021-09-27 | 2022-09-23 | 膜狀接著劑、切割晶粒接合一體型膜、以及半導體裝置及其製造方法 |
Country Status (3)
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CN (1) | CN117999641A (ja) |
TW (1) | TW202323489A (ja) |
WO (2) | WO2023047594A1 (ja) |
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JP5556070B2 (ja) * | 2008-08-20 | 2014-07-23 | 日立化成株式会社 | ダイシングテープ一体型接着シートを用いた半導体装置の製造方法 |
JP6733394B2 (ja) * | 2016-07-25 | 2020-07-29 | 日立化成株式会社 | 接着シート、及び半導体装置の製造方法。 |
JP7298613B2 (ja) * | 2018-07-11 | 2023-06-27 | 株式会社レゾナック | 半導体装置の製造方法、熱硬化性樹脂組成物及びダイシング・ダイボンディング一体型フィルム |
WO2020183581A1 (ja) * | 2019-03-11 | 2020-09-17 | 日立化成株式会社 | 接着剤組成物、フィルム状接着剤、接着シート、及び半導体装置の製造方法 |
JP7409029B2 (ja) * | 2019-11-15 | 2024-01-09 | 株式会社レゾナック | 半導体装置の製造方法、並びにダイシング・ダイボンディング一体型フィルム及びその製造方法 |
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2021
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2022
- 2022-09-21 WO PCT/JP2022/035193 patent/WO2023048188A1/ja active Application Filing
- 2022-09-21 CN CN202280062217.8A patent/CN117999641A/zh active Pending
- 2022-09-23 TW TW111136098A patent/TW202323489A/zh unknown
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WO2023047594A1 (ja) | 2023-03-30 |
CN117999641A (zh) | 2024-05-07 |
WO2023048188A1 (ja) | 2023-03-30 |
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