TW202318590A - Semiconductor process equipment, tray and cassette - Google Patents

Abstract

A semiconductor process equipment includes a process chamber, a transmission chamber and a loading chamber, wherein the loading chamber is used for holding a cassette, the cassette is used for carrying a tray, and the transmission chamber is provided with a transmission device for transmitting a tray between the process chamber and the loading chamber; An image recognition device is arranged at the junction of the loading chamber and the transmission chamber. The image recognition device is used to recognize the characteristic image preset on the tray and determine the characteristic information of the tray during the movement of the tray carried by the transmission device; The semiconductor process equipment also includes a controller for acquiring feature information, searching the transmission parameters corresponding to the feature information from the preset tray information database, and controlling the transmission device to transmit the tray according to the transmission parameters. A tray applied to semiconductor process equipment and a cassette used for carrying a tray.

Description

Semiconductor process equipment, trays and cassettes

The application belongs to the technical field of semiconductor equipment, and in particular relates to a semiconductor process equipment, a tray and a cassette.

Enhanced plasma vapor deposition (Plasma Enhanced Chemical Vapor Deposition, PECVD) equipment is a thin film deposition equipment commonly used in LED, IC and micro electromechanical systems (Micro Electro Mechanical System, MEMS) and other related fields, mainly used in 2-inch The process of depositing SiO2, SiNx or SiON thin films on the surface of wafers with specifications such as , 4 inches and 6 inches. At present, this kind of equipment has been widely used in related semiconductor fields.

When PECVD equipment is depositing thin films, the wafer needs to be loaded in the loading chamber, taken out from the loading chamber by the robot, transferred in the transfer chamber, and then transferred to the process chamber for process reaction. Due to the process requirements of wafers of different sizes in the same reaction chamber, wafers are generally placed on trays for transport. In order to ensure that the position of the wafer in the reaction chamber is relatively accurate, so as to ensure the repeatability of the process, it is very important to accurately transport the trays of different sizes during the transport process.

However, some transmission equipment cannot accurately position the trays of different specifications in the loading chamber, resulting in low transmission accuracy; the parameters of different trays need to be manually input, and when switching trays of different sizes, it is necessary to open the cavity for each station calibration and dynamic wafer Centering (Active Wefer Centering, AWC) calibration, resulting in time-consuming and labor-intensive and prone to human error, affecting transmission accuracy.

The purpose of the embodiments of the present application is to provide a semiconductor process equipment, a tray, and a cassette, which can solve the problems of low transmission accuracy, time-consuming and labor-consuming, and the like.

In order to solve the above-mentioned technical problems, the application is implemented as follows:

An embodiment of the present application provides a semiconductor process equipment, including a process chamber, a transport chamber, and a loading chamber, the process chamber is used to execute semiconductor processes, the loading chamber is used to accommodate a chip box, and the chip box is used for Carrying the tray, the transport chamber is provided with a transport device for transporting the tray between the process chamber and the loading chamber; an image recognition device is provided at the junction of the loading chamber and the transport chamber, The image recognition device is used to identify the preset characteristic image on the tray and determine the characteristic information of the tray during the process of the transfer device carrying the tray from the loading chamber to the transfer chamber; The process equipment also includes a controller, which is used to obtain the characteristic information, search the transmission parameter corresponding to the characteristic information from the preset tray information database, and control the transmission device to transmit the tray according to the transmission parameter.

The embodiment of the present application also provides a tray, which is applied to the above-mentioned semiconductor manufacturing equipment. A characteristic image is set on the top surface of the tray, and the characteristic image can be recognized by an image recognition device. The characteristic image includes the tray's feature information.

The embodiment of the present application also provides a chip box, which is used to carry the above-mentioned tray. The block and the second support block are respectively provided with at least one positioning pin, which is used to cooperate with at least two positioning holes on the tray to limit the position of the tray in the cassette, so that the tray can be transported along the outline of the tray. A point farthest in direction from the transfer chamber is located at a predetermined position.

In the embodiment of the present application, the preset characteristic image on the pallet can be recognized by the image recognition device, so as to determine the characteristic information of the pallet. After obtaining the characteristic information, the controller searches the preset pallet information database for the The transmission parameters, and then control the transmission device to move according to the transmission parameters, so as to realize the transmission of the pallet. Based on the above settings, pallets of different specifications can be automatically identified, which can effectively solve the problems of time-consuming, labor-intensive, and prone to errors caused by manual input of pallet feature information and transmission parameters, thus ensuring the accuracy of different feature information. The transmission accuracy of the pallet; in addition, the controller can look up the corresponding transmission parameters from the preset pallet information database, and make the transmission device transmit the pallet according to the transmission parameters, so that there is no need to open the cavity for calibration of the transmission device station, which effectively solves the problem caused by the cavity opening. time-consuming problem. Therefore, the embodiment of the present application can realize automatic and intelligent transmission while ensuring transmission accuracy, reduce manual labor, and improve transmission efficiency.

The following disclosure provides many different embodiments, or examples, of different means for implementing the disclosure. Specific examples of components and configurations are described below to simplify the present disclosure. Of course, these are examples only and are not intended to be limiting. For example, in the following description a first member is formed over or on a second member may include embodiments in which the first member and the second member are formed in direct contact, and may also include embodiments in which additional members An embodiment may be formed between the first member and the second member so that the first member and the second member may not be in direct contact. Additionally, the present disclosure may repeat reference numerals and/or letters in various instances. This repetition is for simplicity and clarity and does not in itself indicate a relationship between the various embodiments and/or configurations discussed.

In addition, for ease of description, spatially relative terms such as "below", "below", "under", "above", "upper" and the like may be used herein to describe the relationship between one element or member and another(s) The relationship between elements or components, as illustrated in the figure. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and thus the spatially relative descriptors used herein should be interpreted similarly.

Notwithstanding that the numerical ranges and parameters setting forth the broad scope of the disclosure are approximations, the numerical values set forth in the specific examples are reported as precisely as possible. Any numerical value, however, inherently contains certain errors necessarily resulting from the standard deviation found in their respective testing measurements. Furthermore, as used herein, the term "about" generally means within 10%, 5%, 1%, or 0.5% of a given value or range. Alternatively, the term "about" means within an acceptable standard error of the mean when considered by one of ordinary skill in the art. Except in operating/working examples, or unless expressly specified otherwise, all numerical ranges such as for amounts of materials disclosed herein, durations of time, temperatures, operating conditions, ratios of amounts, and the like, Amounts, values and percentages should be understood as being modified by the term "about" in all instances. Accordingly, unless indicated to the contrary, the numerical parameters set forth in this disclosure and the accompanying claims are approximations that may vary as desired. At a minimum, each numerical parameter should at least be construed in light of the number of reported significant digits and by applying ordinary rounding techniques. Ranges can be expressed herein as from one endpoint to the other or as between two endpoints. All ranges disclosed herein are inclusive of endpoints unless otherwise specified.

Referring to FIG. 1 to FIG. 5 , the embodiment of the present application discloses a semiconductor manufacturing equipment. As shown in FIG. 1 , the disclosed semiconductor processing equipment includes a load chamber 100 , a transfer chamber 200 and a process chamber 300 . Wherein, the process chamber 300 is used for performing semiconductor process, for example, etching the wafer, forming a film layer on the surface of the wafer and other processes. The loading chamber 100 is used to accommodate the cassette 400, the cassette 400 is used to carry the tray 500, and the tray 500 is used to carry the wafer. In this way, before the wafer is processed, the tray 500 and the cassette 400 are placed in the loading chamber 100 for storage, and when the wafer needs to be processed, the tray 500 carrying the wafer can pass through the loading chamber 100 The transfer chamber 200 is transferred to the process chamber 300 to process the wafer in the process chamber 300 .

In some embodiments, the loading chamber 100 , the transfer chamber 200 and the process chamber 300 are arranged in sequence. In order to transfer the wafers in the loading chamber 100 to the process chamber 300, a transfer device 600 is provided in the transfer chamber 200. Optionally, the transfer device 600 may include a manipulator, and the transfer device 600 can be used in the process chamber. The tray 500 is transferred between the loading chamber 300 and the loading chamber 100, and the wafer is carried by the tray 500 for transfer.

In order to identify pallets 500 of various specifications, an image recognition device 700 is provided at the junction of the loading chamber 100 and the transfer chamber 200, and the transfer device 600 carries the pallet 500 and moves from the loading chamber 100 to the transfer chamber 200. During the process, the preset characteristic image on the tray 500 can be recognized by the image recognition device 700 , so as to determine the characteristic information (such as number, serial number, logo, etc.) of the tray 500 according to the characteristic image.

Based on this, by setting the image recognition device 700 at the junction of the loading chamber 100 and the transfer chamber 200, the area near the junction of the loading chamber 100 and the transfer chamber 200 forms an image recognition area, so that in the transfer device When 600 carries the tray 500 through the image recognition area, since there are different characteristic images on the tray 500 of different specifications, the characteristic image on the currently transported tray 500 can be recognized by the image recognition device 700, and according to The identified characteristic image of the pallet 500 acquires the characteristic information of the pallet 500 , so as to prepare for adjusting the transmission mode of the transmission device 600 .

The semiconductor process equipment also includes a controller, which can be connected to the image recognition device 700 and the transmission device 600 respectively to realize signal transmission. Specifically, the image recognition device 700 can send the feature information of the tray 500 to the controller, The controller performs analysis and processing, and then controls the transmission device 600 to perform corresponding transmission actions according to the analysis and processing results.

Wherein, the controller can acquire the feature information of the currently transmitted tray 500. At the same time, the tray information database can also be stored in the controller. Trays 500 respectively correspond to transmission parameters. In this way, after the controller obtains the feature information of the currently transported tray 500, it searches the tray information database for the corresponding transport parameters according to the feature information. After finding the corresponding transmission parameters, the control transmission device 600 transmits the tray 500 according to the transmission parameters.

The specific process of the semiconductor process equipment transport tray 500 provided in the embodiment of the present application is as follows:

Place the cassette 400 carrying a plurality of trays 500 in the loading chamber 100, each tray 500 can carry wafers; the controller controls the transfer device 600 to move from the transfer chamber 200 to the loading chamber 100, pick up the tray 500, And control the transfer device 600 to carry the tray 500 to move from the loading chamber 100 towards the transfer chamber 200; 500 on the preset characteristic image, and determine the characteristic information of the tray 500 according to the characteristic image, and at the same time, transmit the determined characteristic information to the controller; Search the corresponding transmission parameters in the library, and then control the transmission device 600 to transmit the pallet 500 according to the transmission parameters.

Based on the above settings, the image recognition device 700 can automatically recognize pallets 500 of different specifications, thereby effectively solving the problems of time-consuming, labor-intensive, and error-prone problems caused by manual input of pallet feature information and transmission parameters. The transmission accuracy and transmission efficiency of pallets 500 of different specifications are guaranteed; in addition, the controller can search the corresponding transmission parameters from the preset pallet information database, and make the transmission device 600 transmit the pallets 500 according to the corresponding transmission parameters, so that there is no need to open the cavity Calibrating the transmission device 600 positions effectively solves the time-consuming and labor-intensive problem caused by opening the cavity. Therefore, the embodiment of the present application can realize automatic and intelligent transmission while ensuring transmission accuracy, reduce manual labor, and improve transmission efficiency.

In order to be able to find the characteristic information of the currently transmitted pallet 500 from the pallet information database, and the transmission parameters corresponding to the characteristic information, in the embodiment of the present application, the acquired characteristic information is combined with the pre-stored characteristics in the pallet information database through the controller. The information is compared, so that it can be determined whether there is the same characteristic information as the characteristic information of the currently transmitted tray 500 and the corresponding transmission parameters in the pallet information database.

In the first case, the pallet information database stores the same feature information as the currently transmitted pallet 500. In this case, during transmission, the corresponding transmission parameters can be found from the pallet information database, so that the transmission The device 600 may transport the tray 500 according to the transport parameters.

In the second case, there is no characteristic information of the currently transmitted pallet 500 in the pallet information database. In this case, to realize the transmission of the pallet 500, it is necessary to first create an information file of the pallet 500 in the pallet information database, which includes The characteristic information of the pallet and the corresponding transmission parameters, so as to lay the foundation for the subsequent search.

It is considered that the characteristic information of the pallets 500 transmitted twice adjacently may be the same or different. When they are the same, the transmission parameters corresponding to the pallets 500 transmitted twice adjacently are the same, so that when the current pallet 500 is transmitted, the transmission parameters of the pallet 500 transmitted last time can be used, so that the current pallet can be realized without switching the transmission parameters. 500 transmission; when different, the transmission parameters corresponding to the pallets 500 that are transmitted twice adjacently are different, so when the current pallet 500 is transmitted, it is necessary to switch to the transmission parameters corresponding to the current pallet 500 first.

Based on the above situation, in the above first case, it is necessary to further determine whether the feature information of the currently transmitted tray 500 is consistent with the feature information of the last transmitted tray 500 . When the characteristic information of the pallets 500 transmitted twice is consistent, it indicates that the pallets 500 transmitted twice belong to the pallet 500 of the same specification. At this time, there is no need to switch the transmission parameters, so that the transmission parameters of the last time can be directly used, that is, the current control Based on the transmission parameters stored in the device, the transmission efficiency can be greatly improved, and the accuracy of the transmission parameters can be guaranteed, thereby ensuring the transmission accuracy. On the contrary, when the characteristic information of the pallet 500 transmitted twice is inconsistent, it indicates that the specification of the pallet 500 transmitted currently is different from that of the pallet 500 transmitted last time, and the transmission parameter needs to be switched to the transmission parameter corresponding to the pallet 500 currently transmitted. In this way, the transmission parameters corresponding to the characteristic information of the currently transmitted pallet 500 can be searched from the pallet information database pre-stored in the controller. After the corresponding transmission parameters are found, the transmission device 600 can be controlled to transmit the pallet 500 according to the transmission parameters. . Based on this, automatic searching and switching of transmission parameters can be realized to ensure the accuracy of transmission parameters and further ensure transmission accuracy.

In the above second case, an information file of the pallet 500 can be created in the pallet database. As shown in Figure 5, the specific process is as follows:

First, check the transmission conditions. When the transmission test conditions are met, place the tray 500 on the cassette 400 and perform precise positioning. If there is no problem with the placement of the tray 500, record the characteristic information of the current tray 500, such as size, etc. ; After the recording is completed, calibrate each station of the process chamber 300 according to the station calibration method of the transmission device 600 ; record the station value after the calibration is completed. After the calibration is completed, the transport device 600 carries the tray 500 through the process chamber 300, and the AWC sensor records the teaching center (that is, the center of the circle of the tray 500 after calibration) when the transport device 600 carries the tray 500 through the process chamber 300. The AWC is calibrated to form an information file of the currently transported pallet 500 . The commissioning process covers multiple pallets 500 of different specifications that need to be used, so that a pallet information database for transmission is established for multiple pallets 500 of different specifications.

It can be understood that when the feature information of the currently transmitted pallet 500 does not exist in the pallet information database, it may be prompted that the pallet 500 cannot be transmitted, and the feature information and transmission parameters of the pallet 500 need to be opened for debugging. In some embodiments, station calibration and AWC calibration can be performed according to the above-mentioned debugging process of the transmission device 600. After the calibration is completed, the corresponding transmission parameters can be stored in the pallet information database, including station parameters and AWC sensing Therefore, an information file of the currently transmitted pallet 500 is formed in the pallet information database, so as to be called when the pallet 500 of this specification is subsequently transmitted.

Based on the above settings, the feature information of the pallet 500 is stored in the pallet information database, that is, the information file of the pallet 500 is established in the pallet information database, so that when the pallet 500 of this specification needs to be transmitted in the future, it can be directly obtained from the pallet. It can be called from the information base, so that there is no need to open the cavity to perform calibration of each station and AWC calibration, thereby improving the transmission efficiency of the pallet 500.

Optionally, the transmission parameters may include the size of the pallet 500 and the station parameters corresponding to the pallet 500 of this size. Based on this, when a pallet 500 of a certain size is transmitted, the pallet 500 of the size can be called from the pallet information library. Corresponding station parameters, so that the tray 500 can be transferred to the corresponding station according to the station parameters.

Wherein, the station parameters may include station stretching value, station rotation value, station high station value and station low station value, according to these parameter values, the specific transmission position of the pallet 500 can be determined, thereby ensuring the transmission accuracy of the pallet 500 .

It should be noted here that the above-mentioned station expansion and contraction value, station rotation value, station high position value and station low position value can all be understood as parameters related to the transmission station of the pallet 500, based on these parameter values, the pallet 500 can be determined the transmission method.

Optionally, two automatic wafer centering AWC (Active Wafer Centering, wafer automatic centering) sensors are provided at the junction of the transfer chamber 200 and the process chamber 300, that is, the first AWC sensor 810 and the second AWC sensor 820 , the connection line of the two AWC sensors is perpendicular to the transmission path of the tray 500 , and the distances between the two AWC sensors and the vertical feet are different. It is easy to understand that the transmission path of the tray 500 is regarded as a straight line, which is located between two AWC sensors and is perpendicular to the connection line of the two AWC sensors. The connection line of the two AWC sensors includes The first line segment and the second line segment, wherein, the first line segment is a vertical line where one AWC sensor intersects the line, the second line segment is a vertical line where the other AWC sensor intersects the line, and the two perpendicular lines are The point of intersection of these lines is the vertical foot. Moreover, the lengths of the first line segment and the second line segment are different, that is, the distances between the two AWC sensors and the vertical feet are different.

Optionally, the transmission parameters also include: AWC sensor parameters corresponding to the pallet 500 of this size, wherein the AWC sensor parameters include: the front-end trigger delay time of the first AWC sensor 810, the first AWC sensor 810 The back-end trigger delay time, the front-end trigger delay time of the second AWC sensor 820 and the second AWC sensor 820 back-end trigger delay time.

Based on the above settings, in the process of the transport device 600 transporting the tray 500, it will pass each AWC sensor twice, a total of four times, and the position of the transport device 600 when passing the AWC sensor four times can calculate the current transport tray 500, so as to realize the AWC calibration of the transmission device 600. Based on this, the transfer station in the process chamber 300 can be taught according to the above-mentioned AWC calibration method of the transfer device 600 , and the teaching center of the transfer device 600 can be determined. During the actual movement, when the actual center of the transfer device 600 carrying the tray 500 passes the AWC sensor, there is a deviation from the teaching center. compensation to ensure the consistency of the position of the tray 500 in the process chamber 300 .

In the embodiment of the present application, the transmission parameters of the pallet 500 may include pallet number, pallet size, corresponding station parameters and corresponding AWC sensor parameters, see the following table for details. pallet number N Pallet number, used to identify the serial number of the pallet pallet size R Confirm pallet size by serial number PM1 station R PM1 station stretch value T PM1 station rotation value BTO PM1 station high value Lower Low value of PM1 station PM1 AWC Left Sensor DEL-EX LD Delay time for front-end trigger sensor when extending DEL-EX TRL Delay time for backend to trigger sensor when stretching PM1 AWC Right Sensor DEL-EX LD Delay time for front-end trigger sensor when extending DEL-EX TRL Delay time for backend to trigger sensor when stretching

Optionally, the image recognition device 700 may be a barcode recognition sensor, and correspondingly, the characteristic image may be the barcode 510 . In this way, when the transfer device 600 carries the tray 500 and moves from the loading chamber 100 to the transfer chamber 200 , the barcode recognition sensor can recognize the barcode 510 on the tray 500 to determine the characteristic information of the tray 500 . Of course, the image recognition device 700 can also use other components, and the corresponding feature images can also take other forms, and the specific forms of the image recognition device 700 and feature images are not specifically limited in this embodiment of the application.

In order to be able to call the feature information and corresponding transmission parameters of pallets 500 of different specifications, and apply the transmission parameters to the transmission device 600, so that the transmission device 600 can accurately and quickly transmit the pallet 500, in the embodiment of the present application, in the pallet information database The feature information and corresponding transmission parameters of pallets 500 of various specifications are stored in the storage.

For example, a pallet 500 of a certain specification has a corresponding size of the pallet 500 and a corresponding transmission parameter. When it is necessary to transmit the pallet 500 of this type, the characteristic information of the pallet 500 and the transmission parameters corresponding to the characteristic information can be directly called from the pallet information database, including the size of the pallet 500 and the station parameters corresponding to the size, And the AWC sensor parameters corresponding to the size, so as to control the transfer device 600 to transfer the tray 500 according to the above-mentioned various transfer parameters, without re-inputting the transfer parameters, improving the transfer efficiency and ensuring the transfer accuracy.

The embodiment of the present application also discloses a tray 500, which is applied to the above-mentioned semiconductor manufacturing equipment, wherein a characteristic image is set on the top surface of the tray 500, the characteristic image can be recognized by the image recognition device 700, and the characteristic The image includes characteristic information of the tray 500 .

Optionally, the feature image may be a barcode 510, and accordingly, the image recognition device 700 may use a barcode recognition sensor. Pallets 500 of different specifications have barcodes 510 in different forms, as shown in FIG. 3 .

In order to realize the positioning of the tray 500, in some embodiments, at least two positioning holes are provided on the tray 500, and the at least two positioning holes are used to cooperate with at least two positioning pins 410 provided on the cassette 400 one by one. , restricting the position of the tray 500 in the cassette 400 so that the point on the outline of the tray 500 along the transport direction of the tray 500 that is farthest from the transport chamber 200 is located at a preset position.

When placing the tray 500, the positioning hole on the tray 500 is matched with the positioning pin 410 on the film box 400, so that the tray 500 can be loaded by the film box 400, and the cooperation of the positioning pin 410 and the positioning hole can Accurate positioning of the tray 500 is achieved, thereby ensuring the accuracy of the position of the tray 500 on the cassette 400 , thereby ensuring the accuracy of the initial position of the tray 500 in the loading chamber 100 .

Optionally, two positioning holes are set on the tray 500, correspondingly, two positioning pins 410 are set on the cassette 400, and the two positioning holes on the tray 500 are symmetrically set on both sides of the transport direction, that is, two The connection line of the positioning holes is perpendicular to the conveying direction, so that the trays 500 of various sizes required by the manufacturing process can be covered. The positions of the two positioning holes on the trays 500 of different sizes are different, and the setting method of the positions of the two positioning holes needs to satisfy the regular placement of the trays 500 of different sizes so that the transfer device 600 can pick them up, for example, based on the different sizes of the positioning holes After the trays 500 of different sizes are placed on the cassette 400, the points on the contours of the trays 500 of different sizes along the conveying direction of the trays 500 that are farthest from the transfer chamber 200 are located at a preset position, that is, the contours of the trays 500 of different sizes are located at a preset position. The preset position is tangent, and the preset position can be flexibly set according to the structure and size of the cassette 400 .

Optionally, the thickness of the tray 500 may be 4mm-6mm, and the height of the positioning pin 410 is designed to be 1.5mm, and the diameter is designed to be 4mm. Correspondingly, the positioning hole provided on the tray 500 may have a depth of 2mm and a diameter of 6mm, so as to ensure that the positioning pin 410 can penetrate into the positioning hole. Based on the above-mentioned settings, through the one-to-one matching of at least two positioning holes with at least two positioning pins 410, the uniqueness of the position where the tray 500 is placed on the cassette 400 can be ensured, so that trays 500 of different sizes can be placed in the loading chamber. Positional accuracy in 100's.

Referring to FIG. 2 , the embodiment of the present application also discloses a chip box 400 for carrying a tray 500 . Wherein, the chip box 400 includes a plurality of bearing positions, and each bearing position includes a first supporting block 420 and a second supporting block 430 which are arranged oppositely, and at least one positioning bracket is respectively arranged on the first supporting block 420 and the second supporting block 430. The pins 410 are used to cooperate with at least two positioning holes on the tray 500 one by one, to limit the position of the tray 500 in the cassette 400, so that the outline of the tray 500 is farthest from the transfer chamber 200 along the transfer direction of the tray 500 The point is located at a preset position.

Optionally, the chip box 400 may include a top board, a bottom board, a first side board and a second side board, wherein the top board and the bottom board are arranged in parallel with a certain distance between them, and the first side board and the second side board are connected between the top board and the second side board. Between the base plates, the first side plate and the second side plate are spaced apart. In order to carry multiple trays 500, a plurality of first support blocks 420 are provided on the side of the first side plate facing the second side plate, and the plurality of first support blocks 420 are arranged at intervals along the direction perpendicular to the top plate, so that two adjacent A first slot for accommodating a part of the tray 500 is formed between the first support blocks 420. Similarly, a second slot for accommodating a part of the tray 500 is formed between two adjacent second support blocks 430, and a plurality of The first card slot is provided in one-to-one correspondence with the plurality of second card slots, so that the correspondingly provided first card slot and the second card slot form a bearing position for carrying the tray 500 .

In addition, the same cassette 400 can be compatible with multiple pallets 500 of different sizes. When designing the cassette 400 , the size of the cassette 400 is designed according to the size of the largest pallet 500 . Based on this, after the tray 500 is placed in the film box 400, the edge of the tray 500 is pressed against the edge of one side of the film box 400, so that the trays 500 of different sizes can be accurately positioned by the film box 400 to ensure that the tray 500 Positional accuracy in the load chamber 100 .

In order to realize the positioning of the tray 500 , positioning structures may be provided on the cassette 400 and the tray 500 respectively. In some embodiments, at least one positioning pin 410 is provided on the corresponding first support block 420 , at least one positioning pin 410 is provided on the second support block 430 , and at least two positioning holes are provided on the tray 500 . In this way, when the tray 500 is loaded on the cassette 400, the positioning holes and the positioning pins 410 are in one-to-one correspondence. At this time, the position of the point on the outline of the tray 500 along the transport direction farthest from the transport chamber 200 can be determined, so that Precise positioning of the tray 500 in the cassette 400 is performed.

In the semiconductor process equipment provided in the embodiment of the present application, the transmission mode of the tray is shown in Figure 4, which specifically includes:

The tray 500 carried on the film box 400 is positioned by the positioning pin 410 and the positioning hole that cooperate with each other; the transfer device 600 carries the tray 500 to move from the loading chamber 100 to the transfer chamber 200; during the movement, the image recognition device 700 identifies the image features on the tray 500, and determines the feature information of the tray 500 according to the image features; the controller obtains the feature information of the tray 500, compares the feature information with the feature information stored in the tray information database, and judges Whether there is the same characteristic information as the characteristic information of the currently transmitted pallet 500 in the pallet information database; if there is the same characteristic information as the currently transmitted pallet 500 in the pallet information database, determine the currently transmitted pallet Whether the characteristic information of the pallet 500 is consistent with the characteristic information of the pallet 500 transmitted last time; when the characteristic information of the pallet 500 transmitted currently is consistent with the characteristic information of the pallet 500 transmitted last time, the current transmission parameter is directly used to transmit the pallet 500; when When the characteristic information of the currently transmitted tray 500 is inconsistent with the characteristic information of the last transmitted tray 500, the transmission parameter corresponding to the characteristic information of the currently transmitted tray 500 is searched from the tray information database, and the transmission device 600 is controlled according to the characteristic information. Transmission parameter transmission tray 500; In the case that there is no characteristic information of the currently transmitted tray 500 in the tray information database, an information file of the current tray 500 is established in the tray information database, so as to call the characteristic information of the tray 500 of this specification and Transfer parameters.

In summary, in the embodiment of the present application, the precise positioning of trays 500 of different specifications is realized, and the automatic identification of trays 500 is realized. When switching trays 500 of different specifications, the characteristic information and corresponding information of the transmission device 600 are automatically called transfer parameters, and transfer the pallet 500 according to the corresponding transfer parameter, so as to ensure the accurate and efficient transfer of the pallet 500 of different specifications.

The foregoing content summarizes the features of several embodiments, so that those skilled in the art can better understand aspects of the present disclosure. Those skilled in the art should appreciate that they can readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments described herein. Those skilled in the art should also understand that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they can make various changes, substitutions and alterations herein without departing from the spirit and scope of the present disclosure.

100: loading chamber 200: transfer chamber 300: process chamber 400: film box 410: positioning pin 420: The first support block 430: the second support block 500: tray 510: barcode 600: transmission device 700: Image recognition device 810: First AWC sensor 820:Second AWC sensor

Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying drawings. It should be noted that, in accordance with the standard practice in the industry, various components are not drawn to scale. In fact, the dimensions of the various components may be arbitrarily increased or decreased for clarity of discussion. FIG. 1 is a schematic structural diagram of semiconductor manufacturing equipment disclosed in an embodiment of the present application; Fig. 2 is a structural schematic diagram of the cassette disclosed in the embodiment of the present application; Fig. 3 is a schematic diagram of barcodes in different forms (a)-(h) disclosed in the embodiment of the present application; FIG. 4 is a schematic diagram of the pallet transport disclosed in the embodiment of the present application; FIG. 5 is a schematic diagram of establishing a pallet information database disclosed in the embodiment of the present application.

100: loading chamber

200: transfer chamber

300: process chamber

400: film box

410: positioning pin

500: tray

510: barcode

600: transmission device

700: Image recognition device

810: First AWC sensor

820:Second AWC sensor

Claims (10)

A semiconductor process equipment, comprising a process chamber, a transfer chamber and a loading chamber, the process chamber is used to perform semiconductor process, the loading chamber is used to accommodate a cassette, the cassette is used to carry a tray, A transport device is disposed in the transport chamber, and the transport device is used to transport the tray between the process chamber and the loading chamber, wherein, An image recognition device is provided at the junction of the loading chamber and the transfer chamber, and the image recognition device is used to identify the tray when the transfer device carries the tray and moves from the loading chamber to the transfer chamber. A preset characteristic image on the pallet, to determine a characteristic information of the pallet; The semiconductor manufacturing equipment also includes a controller, the controller is used to obtain the characteristic information, search for a transmission parameter corresponding to the characteristic information from a preset tray information database, and control the transmission device to transmit the tray according to the transmission parameter. The semiconductor manufacturing equipment as described in claim 1, wherein the controller is further used to obtain the characteristic information, compare it with the pre-stored characteristic information in the tray information database, and determine whether the obtained and obtained information is stored in the tray information database The characteristic information that is the same as the characteristic information; if the characteristic information that is the same as the obtained characteristic information is stored in the pallet information database, determine whether the characteristic information is consistent with the characteristic information of the last transmitted pallet; when the characteristic information When the characteristic information of the pallet transmitted last time is consistent, the current transmission parameters are directly used to transmit the pallet; when the characteristic information is inconsistent with the characteristic information of the pallet transmitted last time, the characteristic information is searched from the pallet information database The corresponding transmission parameter is used to control the transmission device to transmit the tray according to the transmission parameter. The semiconductor manufacturing equipment as described in claim 1 or 2, wherein the transmission parameters include: the size of the tray and a station parameter corresponding to the tray of the size, and the station parameter includes a station expansion and contraction value, a work station bit rotation value, one bit high bit value and one bit low bit value. The semiconductor processing equipment as described in claim 3, wherein, the junction of the transfer chamber and the process chamber is provided with two AWC sensors for automatic wafer centering, and the connection lines of the two AWC sensors It is perpendicular to the conveying path of the pallet, and the distances between the two AWC sensors and the vertical feet are different. The semiconductor manufacturing equipment as described in claim 4, wherein the transmission parameter further includes: an AWC sensor parameter corresponding to the tray of the size, and the AWC sensor parameter includes a front-end trigger delay of a first AWC sensor time, a first AWC sensor back-end trigger delay time, a second AWC sensor front-end trigger delay time, and a second AWC sensor back-end trigger delay time. The semiconductor manufacturing equipment according to claim 1, wherein the image recognition device is a barcode recognition sensor, and the characteristic image is a barcode. A tray used in the semiconductor processing equipment described in any one of claims 1-6, wherein a characteristic image is provided on the top surface of the tray, and the characteristic image can be recognized by an image recognition device, the characteristic The image contains information about the characteristics of the pallet. The tray according to claim 7, wherein the characteristic image is a barcode. The tray according to claim 7, wherein at least two positioning holes are provided on the tray, and at least two positioning holes are used to match with at least two positioning pins provided on the cassette one by one, limiting The position of the tray in the cassette is such that the point on the outline of the tray that is farthest from the transfer chamber along the transfer direction of the tray is located at a predetermined position. A film box for carrying the tray as described in any one of claim items 7-9, wherein the film box includes a plurality of bearing positions, each of which includes a first supporting block and a first supporting block oppositely arranged. Two support blocks, the first support block and the second support block are respectively provided with at least one positioning pin, which is used to match with at least two positioning holes on the tray one by one, so as to limit the tray in the cassette position, so that the point on the outline of the tray that is farthest from the transfer chamber along the transfer direction of the tray is located at a preset position.

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