KR20130123952A - Teaching apparatus and substrate processing apparatus having the same and teaching method - Google Patents
Teaching apparatus and substrate processing apparatus having the same and teaching method Download PDFInfo
- Publication number
- KR20130123952A KR20130123952A KR1020120047499A KR20120047499A KR20130123952A KR 20130123952 A KR20130123952 A KR 20130123952A KR 1020120047499 A KR1020120047499 A KR 1020120047499A KR 20120047499 A KR20120047499 A KR 20120047499A KR 20130123952 A KR20130123952 A KR 20130123952A
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- South Korea
- Prior art keywords
- substrate
- reflecting means
- distance
- distance measuring
- unit
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1628—Programme controls characterised by the control loop
- B25J9/1633—Programme controls characterised by the control loop compliant, force, torque control, e.g. combined with position control
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1679—Programme controls characterised by the tasks executed
- B25J9/1692—Calibration of manipulator
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to a teaching apparatus and method, comprising: a test substrate provided with a plurality of reflecting means, a transfer robot for transporting the test substrate, and a plurality of reflecting means irradiating light and receiving light reflected therefrom A teaching apparatus and method are provided that include a distance measurer for measuring the distance of an area.
Description
The present invention relates to a teaching apparatus and method, and more particularly, to a teaching apparatus and a teaching method using the same, which identify a position of a substrate and use the same to correct a transfer position of a transfer robot.
In general, automation equipment including various industrial robots, such as robots for transferring substrates for semiconductors, robots for assembly lines, robots for transport of logistics, robots for inspection, robots for clean rooms, robots for LCD manufacturing, and the like, can be used for a long time in advance. It is programmed to repeat the same operation. In addition, it was confirmed whether the movement path and the working position of the robot were correctly performed, and if an error of the working position was found, the position was corrected by using the position correcting device.
The case where such a position correction apparatus is used in a semiconductor manufacturing process is as follows. For example, in order to form a thin film of a predetermined pattern on the substrate, the substrate is transferred to a process chamber which performs thin film deposition and etching processes using a substrate transfer unit, respectively. The substrate transfer unit includes a transfer robot for accurately transferring the substrate to the process chamber, and the substrate is repeatedly transferred to the plurality of process chambers for performing each process. At this time, it is very important that the substrate is placed exactly at the set position in the process chamber. Thus, a teaching process is performed to detect the position of the substrate at regular time intervals before the transfer of the substrate begins or during the transfer of the substrate. That is, the position of the substrate is detected by teaching and then the position of the substrate is corrected. In addition, when the moving position of the transfer robot is out of the initial setting position while colliding with the input window of the process chamber, the substrate support, etc. during the transfer of the substrate, or when the initial setting position is released due to the accumulated stress in a continuous repetitive operation The process is carried out.
The teaching method of the transfer robot is a so-called direct teaching method in which a user directly grabs a robot arm or a robot hand and corrects the delivery position of a substrate, or a robot is operated by a teaching box to perform a transfer operation. The so-called remote teaching method of sequentially designating a position to be a starting point is generally known. In addition, Japanese Unexamined Patent Publication No. 7-027953 and Japanese Unexamined Patent Publication No. 6-0224284 disclose teaching using a plurality of sensors.
However, since the conventional teaching method is performed while the operator visually confirms the movement of the transfer robot, the precision tends to fluctuate among the operators, thereby lowering the calibration reliability of the transfer operation.
In addition, in view of the fact that the transport robot actually operates in a vacuum state, the teaching is preferably performed in a vacuum state. However, in most cases, the teaching operation is performed while checking with the naked eye or using a separate tool. It will proceed at atmospheric pressure. Therefore, there is a problem that productivity is lowered because a considerable time is delayed in adjusting the pressure in the process chamber and the transfer chamber.
The present invention provides a teaching apparatus and a teaching method which can improve the calibration reliability of the transfer operation of the transfer robot.
The present invention provides a teaching apparatus and a teaching method which can be carried out under the same vacuum and high temperature conditions as the conditions under which the process is performed, and can be carried out during the substrate processing process to improve productivity.
A teaching apparatus of one embodiment of the present invention includes a test substrate provided with a plurality of reflecting means; A transfer robot for transferring the test substrate; And a distance measuring unit for irradiating light to the plurality of reflecting means and receiving light reflected therefrom to measure a distance of an arbitrary region of the test substrate.
The distance measuring unit is provided in one region of the transfer robot.
Further comprising a through hole formed in the test substrate.
The plurality of reflecting means reflects the light to at least one of an outer side, an upper side, and a lower side, and reflects the light reflected therefrom to the distance measuring unit.
The plurality of reflecting means may include at least one first reflecting means for reflecting the light back to the distance measuring part; At least one second reflecting means for reflecting the light between the distance measuring part and the sidewall of the substrate processing chamber; At least one third reflecting means for reflecting the light between the distance measuring part and the gas injector; And at least one fourth reflecting means for reflecting the light between the distance measuring unit and the substrate mounting unit.
The fourth reflecting means reflects the light through the through hole between the distance measuring part and the substrate settled part.
The distance measuring unit irradiates light onto one sidewall of the substrate processing chamber and receives the light reflected therefrom.
According to another aspect of the present invention, there is provided a substrate processing apparatus including a transfer unit configured to transfer a substrate; At least one substrate processing unit connected to the transfer unit to process a substrate; A load lock part connected to the transfer part to receive the substrate; And a teaching apparatus for teaching a position of the substrate, wherein the teaching apparatus comprises: a test substrate provided with a plurality of reflecting means and a through hole; A transfer robot provided in the transfer unit to transfer the test substrate; And a distance measurer provided to the transfer robot and configured to measure the distance of any region of the test substrate by irradiating light onto the plurality of reflecting means and receiving light reflected therefrom.
The substrate processing unit includes a substrate processing chamber that provides a reaction space; A substrate placing part provided in the substrate processing chamber to hold the substrate; And a gas supply part provided in the substrate processing chamber to supply source gas.
The plurality of reflecting means may include at least one first reflecting means for reflecting the light back to the distance measuring part; At least one second reflecting means for reflecting the light between the distance measuring part and the sidewall of the substrate processing chamber; At least one third reflecting means for reflecting the light between the distance measuring unit and the gas injector; And at least one fourth reflecting means for reflecting the light between the distance measuring unit and the substrate mounting unit.
The test substrate is transferred into the substrate processing part before starting processing of the processing substrate or during processing of the processing substrate.
The test substrate is transferred into the substrate processing unit under the same conditions as the processing conditions of the process substrate.
Setting a transfer coordinate of the test substrate placed on the substrate setter, measuring a distance reflected by the plurality of reflecting means and incident to the distance measuring unit, and comparing the measured reflection distance with the transfer coordinate Accordingly, the control unit further includes a control unit for calibrating the transport coordinates.
Teaching method according to another aspect of the present invention comprises the steps of providing a test substrate provided with a plurality of reflecting means thereon; Transferring the test substrate into a substrate processing unit; Irradiating light onto the plurality of reflecting means of the test substrate; And measuring a distance between the test substrate and each region of the substrate processing unit by using the light incident again by being reflected back from the plurality of reflecting means.
The test substrate is transferred into the substrate processing unit before starting processing of the processing substrate or during processing of the processing substrate.
The test substrate is transferred into the substrate processing unit under the same conditions as the processing conditions of the process substrate.
And using the measured distance to calibrate the transport coordinates of the transport robot.
In the teaching apparatus according to the embodiments of the present invention, a test substrate provided with a plurality of reflecting means and a through hole is positioned on a substrate settlement unit in a substrate processing unit, and then each angle in the substrate processing unit of the test substrate is adjusted using a distance meter provided on the transfer robot. The distance in the area is measured to detect the position of the test substrate and then reset the transfer coordinates of the transfer robot accordingly.
According to the embodiments of the present disclosure, the transfer robot may be taught while the substrate processing unit and the transfer unit maintain vacuum and process temperatures. Therefore, it is not necessary to adjust the substrate processing unit and the transfer unit to atmospheric pressure or room temperature, thereby preventing the delay of the process time, thereby improving productivity.
In addition, it is not necessary to correct the existing position, it is possible to simply measure the position in the substrate processing portion of the substrate, and the teaching operation can be easily performed.
Since a plurality of sensors are not used, an increase in peripheral devices can be prevented.
1 and 2 are a block diagram and a plan view of a substrate processing apparatus including a teaching apparatus according to an embodiment of the present invention.
3 is a schematic cross-sectional view of a substrate processing unit according to an embodiment of the present invention.
4 is a schematic view of a transfer robot according to an embodiment of the present invention.
5 and 6 are a plan view and a cross-sectional view of a test substrate according to an embodiment of the present invention.
7 to 10 is an open view for explaining the distance measurement of each position of the test substrate according to an embodiment of the present invention.
11 is a flowchart illustrating a teaching method according to an embodiment of the present invention.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms, and only the embodiments are intended to complete the disclosure of the present invention and to those skilled in the art. It is provided for complete information.
1 and 2 are a block diagram and a plan view of a substrate processing apparatus including a teaching apparatus according to an embodiment of the present invention. 3 is a schematic cross-sectional view of a substrate processing unit according to an embodiment of the present invention, and FIG. 4 is a schematic view of a transfer robot. 5 and 6 are schematic plan views and cross-sectional views of a test substrate for detecting a position of a substrate in a substrate processing unit according to an exemplary embodiment of the present invention. 7 to 10 are schematic diagrams for describing distance measurement of respective positions of a test substrate according to an exemplary embodiment. 7 to 10 schematically show only reflecting means of the same purpose.
1 and 2, a substrate processing apparatus according to an embodiment of the present invention includes a
As shown in FIG. 3, the
The
The
The
The
As shown in FIG. 4, the
The
The
The reflecting means 4100 reflects the laser emitted from the
In this case, the plurality of reflecting means 4100 is divided into four regions A, B, C, and D, for example, at an angle of 90 ° clockwise from the region irradiated with the laser from the
The first reflecting
The second reflecting means 4120 may be provided in at least two areas, and may be provided in the B area and the D area. The second reflecting
The third reflecting means 4130 may be provided in at least three regions, and may be provided between the A region, the B region and the C region, and the C region and the D region. The third reflecting means 4130 reflects the laser emitted from the
The fourth reflecting means 4140 may be provided in at least three regions, and may be provided between the A region, the B region and the C region, and the C region and the D region. The fourth reflecting means 4140 reflects the laser emitted from the
As described above, the teaching apparatus according to the exemplary embodiment of the present disclosure may include a
The teaching method using the teaching apparatus according to an embodiment of the present invention will be described with reference to FIG. 11 as follows.
Referring to FIG. 11, in the teaching method according to an exemplary embodiment, a step (S110) of providing a
S110: A plurality of reflecting means 4100 and a plurality of through
S120: The
S130: After the
S140: The
S150: The teaching control module 1310 of the
S160: When the newly measured distance is different from the previously set distance, the measured distance is stored in the transfer coordinate storage unit 1320. That is, the transfer coordinate storage unit 1320 may modify the previously set coordinates to newly measured coordinates. The
Although the technical idea of the present invention has been specifically described according to the above embodiments, it should be noted that the above embodiments are for explanation purposes only and not for the purpose of limitation. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention.
1000: transfer unit 1100: transfer chamber
1200: transfer robot 1300: control unit
2000: substrate processing unit 2100: substrate processing chamber
2200
3000: load lock unit 3100: load lock chamber
3200: substrate storage part 3300: substrate entrance part
Claims (17)
A transfer robot for transferring the test substrate; And
And a distance measuring unit for irradiating light to the plurality of reflecting means and receiving light reflected therefrom to measure a distance of an arbitrary region of the test substrate.
At least one first reflecting means for reflecting the light back to the distance measuring unit;
At least one second reflecting means for reflecting the light between the distance measuring part and the sidewall of the substrate processing chamber;
At least one third reflecting means for reflecting the light between the distance measuring part and the gas injector; And
And at least one of at least one fourth reflecting means for reflecting the light between the distance measuring portion and the substrate settlement portion.
At least one substrate processing unit connected to the transfer unit to process a substrate;
A load lock part connected to the transfer part to receive the substrate; And
Teaching device for teaching the position of the substrate,
The teaching device,
A test substrate provided with a plurality of reflecting means and a through hole;
A transfer robot provided in the transfer unit to transfer the test substrate; And
And a distance measuring unit provided in the transfer robot and configured to measure the distance of any region of the test substrate by irradiating light onto the plurality of reflecting means and receiving light reflected therefrom.
A substrate processing chamber providing a reaction space;
A substrate placing part provided in the substrate processing chamber to hold the substrate; And
And a gas supply unit provided in the substrate processing chamber to supply raw material gas.
At least one first reflecting means for reflecting the light back to the distance measuring unit;
At least one second reflecting means for reflecting the light between the distance measuring part and the sidewall of the substrate processing chamber;
At least one third reflecting means for reflecting the light between the distance measuring unit and the gas injector; And
And at least one of at least one fourth reflecting means for reflecting the light between the distance measuring part and the substrate mounting part.
Transferring the test substrate into a substrate processing unit;
Irradiating light onto the plurality of reflecting means of the test substrate; And
And measuring a distance between the test substrate and each region of the substrate processing unit by using the light incident back from the plurality of reflecting means.
Priority Applications (1)
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KR1020120047499A KR20130123952A (en) | 2012-05-04 | 2012-05-04 | Teaching apparatus and substrate processing apparatus having the same and teaching method |
Applications Claiming Priority (1)
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KR1020120047499A KR20130123952A (en) | 2012-05-04 | 2012-05-04 | Teaching apparatus and substrate processing apparatus having the same and teaching method |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102394037B1 (en) * | 2021-04-01 | 2022-05-06 | 주식회사 써치앤델브 | Method for determining the location of the process wafer entering the wafer cassette using the testing wafer |
-
2012
- 2012-05-04 KR KR1020120047499A patent/KR20130123952A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102394037B1 (en) * | 2021-04-01 | 2022-05-06 | 주식회사 써치앤델브 | Method for determining the location of the process wafer entering the wafer cassette using the testing wafer |
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