TW202314642A - 塵埃測量裝置、塵埃測量方法及程式 - Google Patents
塵埃測量裝置、塵埃測量方法及程式 Download PDFInfo
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- TW202314642A TW202314642A TW111130929A TW111130929A TW202314642A TW 202314642 A TW202314642 A TW 202314642A TW 111130929 A TW111130929 A TW 111130929A TW 111130929 A TW111130929 A TW 111130929A TW 202314642 A TW202314642 A TW 202314642A
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- 239000000428 dust Substances 0.000 title claims abstract description 312
- 238000000034 method Methods 0.000 title description 15
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 238000003384 imaging method Methods 0.000 claims description 136
- 239000002245 particle Substances 0.000 claims description 70
- 238000010191 image analysis Methods 0.000 claims description 59
- 238000005259 measurement Methods 0.000 claims description 30
- 230000003287 optical effect Effects 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000000691 measurement method Methods 0.000 claims description 3
- 238000004891 communication Methods 0.000 description 15
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- 238000004458 analytical method Methods 0.000 description 10
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021-133344 | 2021-08-18 | ||
| JP2021133344 | 2021-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202314642A true TW202314642A (zh) | 2023-04-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111130929A TW202314642A (zh) | 2021-08-18 | 2022-08-17 | 塵埃測量裝置、塵埃測量方法及程式 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2023022117A1 (https=) |
| TW (1) | TW202314642A (https=) |
| WO (1) | WO2023022117A1 (https=) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0637750U (ja) * | 1992-10-21 | 1994-05-20 | 日新製鋼株式会社 | 粉塵分布計測装置 |
| JP3605579B2 (ja) * | 2001-06-29 | 2004-12-22 | インターナショナル・ビジネス・マシーンズ・コーポレーション | クリーンルーム用の塵埃検出装置、塵埃検出システム、微粒子測定器および塵埃検出方法 |
| JP2003075353A (ja) * | 2001-09-03 | 2003-03-12 | Moritex Corp | ダストカウンタとその部品 |
| CN201724881U (zh) * | 2010-06-08 | 2011-01-26 | 王旗 | 煮糖罐晶粒形态在线监测装置 |
| JP2014048100A (ja) * | 2012-08-30 | 2014-03-17 | Sharp Corp | 粒子検出装置 |
| JP2015190958A (ja) * | 2014-03-28 | 2015-11-02 | 大日本印刷株式会社 | 異物測定方法及び異物測定装置 |
| JP6486643B2 (ja) * | 2014-10-16 | 2019-03-20 | 国立大学法人電気通信大学 | 粉粒体の流量計測方法とそのプログラム |
| CN110383038B (zh) * | 2016-10-21 | 2022-09-23 | 第一前沿有限公司 | 用于对空气样本进行自动分析的系统和方法 |
| JP6549747B2 (ja) * | 2017-04-14 | 2019-07-24 | リオン株式会社 | 粒子測定装置および粒子測定方法 |
| US12326391B2 (en) * | 2019-07-29 | 2025-06-10 | Hitachi High-Tech Corporation | Particle quantifying device |
-
2022
- 2022-08-12 WO PCT/JP2022/030831 patent/WO2023022117A1/ja not_active Ceased
- 2022-08-12 JP JP2023542390A patent/JPWO2023022117A1/ja active Pending
- 2022-08-17 TW TW111130929A patent/TW202314642A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023022117A1 (ja) | 2023-02-23 |
| JPWO2023022117A1 (https=) | 2023-02-23 |
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