TW202312332A - Transporting mechanism, transporting device having the same, and processing apparatus having the same - Google Patents
Transporting mechanism, transporting device having the same, and processing apparatus having the same Download PDFInfo
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本發明提供一種薄型化且利於在空間有限之作業裝置執行載送電子元件作業之載送機構。The invention provides a carrying mechanism which is thinner and is beneficial to carry out the operation of carrying electronic components in an operating device with limited space.
在現今,電子元件測試作業機以載送機構於供料裝置與測試裝置間載送電子元件;業者為增加測試產能,遂於機台之第一側及第二側相對應配置複數個具測試座之測試裝置,由於載送機構以皮帶輪組帶動一載台沿平行於複數個測試裝置之Y方向載送路徑位移,因此,業者必須於機台第一側之複數個測試裝置前方配置一具第一載台之第一載送機構,以及於機台第二側之複數個測試裝置前方配置另一具第二載台之第二載送機構,不僅第一載送機構及第二載送機構相當佔用機台空間,更增加機構成本。Nowadays, the electronic component testing machine uses a carrying mechanism to carry electronic components between the feeding device and the testing device; in order to increase the testing capacity, the industry has arranged a plurality of test tools on the first side and the second side of the machine correspondingly. For the test device of the seat, since the carrying mechanism uses the pulley set to drive a stage to displace along the Y-direction carrying path parallel to the multiple test devices, the operator must arrange a test device in front of the multiple test devices on the first side of the machine. The first carrying mechanism of the first stage, and the second carrying mechanism with another second stage arranged in front of the plurality of test devices on the second side of the machine, not only the first carrying mechanism and the second carrying mechanism The mechanism takes up a lot of machine space and increases the cost of the mechanism.
由於第一載送機構之第一載台及第二載送機構之第二載台沿平行於複數個測試裝置之Y方向載送路徑位移,第一載台及第二載台並未移入第一側複數個測試裝置及第二側複數個測試裝置,導致業者必須另外於第一側複數個測試裝置之前方增設第一拾取機構,以及於第二側複數個測試裝置之前方增設第二拾取機構,利用第一拾取機構於第一側之複數個測試裝置與第一載台間移載電子元件,以及利用第二拾取機構於第二側之複數個測試裝置與第二載台間移載電子元件,第一拾取機構及第二拾取機構不僅相當佔用機台空間,更增加機構成本。Since the first stage of the first carrying mechanism and the second stage of the second carrying mechanism are displaced along the carrying path parallel to the Y direction of the plurality of test devices, the first stage and the second stage have not moved into the second stage. A plurality of test devices on one side and a plurality of test devices on the second side cause the industry to add a first pick-up mechanism in front of the plurality of test devices on the first side and a second pick-up mechanism in front of the plurality of test devices on the second side The mechanism uses the first pick-up mechanism to transfer electronic components between the plurality of test devices on the first side and the first stage, and uses the second pick-up mechanism to transfer electronic components between the plurality of test devices on the second side and the second stage Electronic components, the first pick-up mechanism and the second pick-up mechanism not only take up a lot of machine space, but also increase the cost of the mechanism.
再者,業者為迴避第一載送機構之作業高度,必須拉高第一拾取機構之架置高度,相對地,必須增高測試裝置之門板作Z方向位移的開啟高度 ,方可供第一拾取機構將電子元件移入測試裝置,導致測試裝置之上方必須騰出更大空間以供門板作Z方向向上開啟及裝配更長的直立式驅動壓缸,以致測試裝置相當佔用空間,尤其對於上方空間有限之測試裝置而言,著實不利空間配置。 Furthermore, in order to avoid the working height of the first carrying mechanism, the operator must increase the installation height of the first pick-up mechanism. Correspondingly, the opening height of the door panel of the testing device for Z-direction displacement must be increased. , to allow the first pick-up mechanism to move the electronic components into the test device, resulting in a larger space above the test device for the door panel to be opened upward in the Z direction and to assemble a longer vertical drive cylinder, so that the test device is quite occupied Space, especially for test devices with limited upper space, is really unfavorable for space allocation.
本發明之目的一,提供一種載送機構,包含承載單元、驅動單元及至少一承載治具,承載單元設有呈Z方向疊置之第一平台、第二平台及第三平台,第三平台供裝配可承載電子元件之承載治具,驅動單元於第一平台設有第一載送驅動源,第一載送驅動源驅動一沿第一載送路徑配置之第一傳動組,第一傳動組連結第二平台,另於第二平台之側面配置第二傳動組,第二傳動組之第二軸線方向異於第一傳動組之第一軸線方向,第二傳動組連結第一平台及第三平台,以供傳動第三平台沿第一載送路徑位移;藉以使載送機構薄型化,利於在空間有限之作業裝置執行載送電子元件作業,進而提高使用效能。The first object of the present invention is to provide a carrying mechanism, including a carrying unit, a driving unit and at least one carrying jig, the carrying unit is provided with a first platform, a second platform and a third platform stacked in the Z direction, and the third platform It is used to assemble the carrying jig that can carry electronic components. The drive unit is provided with a first carrying drive source on the first platform. The first carrying drive source drives a first transmission group arranged along the first carrying path. The first transmission The second transmission group is connected to the second platform, and the second transmission group is arranged on the side of the second platform. The second axis direction of the second transmission group is different from the first axis direction of the first transmission group. The second transmission group connects the first platform and the second transmission group. Three platforms are used to drive the displacement of the third platform along the first conveying path; in order to reduce the thickness of the conveying mechanism, it is beneficial to carry out the operation of carrying electronic components in the operation device with limited space, thereby improving the use efficiency.
本發明之目的二,提供一種載送機構,其驅動單元之第一傳動組之第一連結件位於第一裝配位置,第一裝配位置至第二平台之第一端及第二端的距離相等或不相等,第一連結件帶動第二平台沿第一載送路徑位移,又第二傳動組之第二連結件及第三連結件分別位於第二裝配位置及第三裝配位置,第二、三裝配位置至第二平台之第一端及第二端的距離相等或不相等,第三連結件帶動第三平台沿第一載送路徑位移,使得第二、三平台可作雙向位移向外延伸作動,進而提高使用效能。The second object of the present invention is to provide a carrying mechanism in which the first link of the first transmission group of the drive unit is located at the first assembly position, and the distance from the first assembly position to the first end and the second end of the second platform is equal or Not equal, the first connecting piece drives the second platform to displace along the first carrying path, and the second connecting piece and the third connecting piece of the second transmission group are respectively located at the second assembly position and the third assembly position, the second and third The distances from the assembly position to the first end and the second end of the second platform are equal or unequal, and the third link drives the third platform to move along the first delivery path, so that the second and third platforms can move outwards in two directions. , thereby improving the use efficiency.
本發明之目的三,提供一種載送機構,其承載單元於第一平台與第二平台間設有至少一第一保持器,並於第二平台與第三平台間設有至少一第二保持器,第一保持器接觸頂撐第二平台保持平穩位移,第二保持器接觸頂撐第三平台保持平穩位移,進而提高載送使用效能。The third object of the present invention is to provide a carrying mechanism, the carrying unit of which is provided with at least one first holder between the first platform and the second platform, and at least one second holder is provided between the second platform and the third platform The first retainer contacts the supporting second platform to maintain a stable displacement, and the second retainer contacts the supporting third platform to maintain a stable displacement, thereby improving the carrying efficiency.
本發明之目的四,提供一種輸送裝置,包含至少一移料器及本發明之載送機構,至少一移料器以供移載取放電子元件,本發明之載送機構以供移料器移入或移出電子元件,並載送電子元件;藉以有效縮減輸送裝置之成本及利於空間配置。The fourth object of the present invention is to provide a conveying device, including at least one material transfer device and the carrying mechanism of the present invention, at least one material transfer device for loading and unloading electronic components, and the carrying mechanism of the present invention for the material transfer device Move in or out electronic components, and carry electronic components; in order to effectively reduce the cost of the conveying device and facilitate space allocation.
本發明之目的五,提供一種作業機,包含機台、供料裝置、收料裝置、作業裝置、具本發明載送機構之輸送裝置及中央控制裝置,供料裝置配置於機台,並設有至少一供料容置器,以供容置至少一待作業電子元件;收料裝置配置於機台,並設有至少一收料容置器,以供容置至少一已作業電子元件 ;作業裝置配置於機台,並設有至少一作業器,以供對電子元件執行預設作業 ;輸送裝置配置於機台,並設有至少一移料器及本發明之載送機構,以供移載電子元件;中央控制裝置以控制及整合各裝置作動而執行自動化作業。 The fifth object of the present invention is to provide a working machine, which includes a machine platform, a feeding device, a material receiving device, an operating device, a conveying device with a carrying mechanism of the present invention, and a central control device. The feeding device is arranged on the machine platform, and is equipped with There is at least one material supply container for accommodating at least one electronic component to be operated; the material receiving device is arranged on the machine table, and at least one material receiving container is provided for accommodating at least one electronic component that has been operated ;The operating device is arranged on the machine platform, and at least one operating device is provided for performing preset operations on the electronic components The conveying device is arranged on the machine table, and is equipped with at least one material transfer device and the carrying mechanism of the present invention for transferring electronic components; the central control device controls and integrates the actions of each device to perform automatic operations.
為使 貴審查委員對本發明作更進一步之瞭解,茲舉一較佳實施例並配合圖式,詳述如後:In order to make your review committee members have a further understanding of the present invention, hereby give a preferred embodiment and cooperate with the drawings, as follows in detail:
請參閱圖1~7,本發明作業機包含機台10、供料裝置20、收料裝置30、作業裝置40、具本發明載送機構之輸送裝置50及中央控制裝置(圖未示出
);中央控制裝置用以控制及整合各裝置作動,以執行自動化作業; 於本實施例,本發明作業機為一測試作業機,以供對電子元件執行測試作業。
Please refer to Figs. 1 to 7, the working machine of the present invention comprises
供料裝置20配置於機台10,並設有至少一供料容置器21,以供容置至少一待作業電子元件;收料裝置30配置於機台10,並設有至少一收料容置器31,以供容置至少一已作業電子元件。The
作業裝置40配置於機台10,並設有至少一作業器,以供對電子元件執行預設作業;於本實施例,作業裝置40包含作業室41、至少一作業器、至少一壓接機構及門具機構。作業室41具有至少一作業空間411,並於一側架412開設相通作業空間411之通口413;作業器位於作業室41之作業空間411,以供對電子元件執行預設作業,於本實施例,作業器為測試器,測試器包含電性連接之電路板421及測試座422,測試座422具有探針,以供對電子元件執行測試作業
;壓接機構配置於作業室41之作業空間411,並位於測試座422之上方,壓接機構設有一作Z方向位移之移動臂431,移動臂431裝配至少一壓接器432,壓接器432以供壓接測試座422之電子元件;依作業需求,壓接器432具有吸嘴,以供執行壓接及取放電子元件之作業。
The
依作業需求,作業室41設有至少一輸送管(圖未示出),以供輸送乾燥空氣至作業空間411。According to operation requirements, the
依作業需求,作業裝置40更包含溫控機構(圖未示出),溫控機構於壓接器432設有至少一溫控件,以供溫控電子元件,使電子元件於模擬日後使用環境溫度下執行測試作業,更進一步,溫控件可為加熱件、致冷晶片或具流體之座體。According to the operation requirements, the
依作業需求,於熱測作業時,作業室41之作業空間411可配置鼓風機(圖未示出),以供吹送熱風,使作業空間411升溫,亦無不可。According to the operation requirements, during the heat measurement operation, the
門具機構裝配於作業室41之側架412,並包含門框44、門板45及門控單元,門框44裝配於作業室41之側架412,並設有一相通通口413之門口部441,門口部441之兩側設有滑槽442,滑槽442相通於門框44之頂面,另於門框44之前面設有支撐架443,支撐架443概呈ㄇ型,並與門框44具有適當間距;一門板45位於門框44與支撐架443之間,其兩側並滑置於門框44之滑槽442,而於滑槽442作Z方向位移,以開啟或關閉門框44之門口部441;作依業需求,可直接以作業室41之側架412作為門框44,並以側架412之通口413作為門框44之門口部441,亦無不可。The door mechanism is assembled on the
門控單元於門框44裝配一呈水平配置之門控驅動源,門控驅動源驅動一第一連動具,第一連動具與門板45間裝配第二連動具,以第二連動具帶動門板45作升降位移而開啟或關閉;藉以有效縮減門控單元之裝配高度,而可擴增作業裝置40之上方空間以利空間配置。The door control unit is equipped with a door control driving source arranged horizontally on the
於本實施例,門控單元於門框44之支撐架443設置一呈水平配置之門控驅動源,門控驅動源可為壓缸或線性馬達等,於本實施例,門控驅動源為一呈Y方向配置之壓缸461,壓缸461之活塞桿連結一第一連動具,第一連動具為皮帶輪組462,另於皮帶輪組462之一皮帶輪4621與門板45間裝配第二連動具,第二連動具為齒輪齒條組,齒輪齒條組之齒輪471裝配於皮帶輪4621之軸桿4622,使得皮帶輪4621之軸桿4622帶動齒輪471同步轉動;齒輪齒條組之齒條472呈Z方向配置於門板45,齒條472受齒輪471之嚙合傳動,而帶動門板45作Z方向位移,以控制開啟或關閉門板45。In this embodiment, the gate control unit is provided with a gate control drive source that is horizontally arranged on the
依作業需求,齒輪471之軸桿(圖未示出)以聯軸器(圖未示出)聯結皮帶輪4621之軸桿4622而同步轉動,亦無不可。According to the operation requirements, the shaft (not shown) of the
另門控單元於門板45與支撐架443間設有至少一滑軌組,於本實施例,滑軌組於門板45設有呈Z方向配置之滑軌481,並於支撐架443設有一滑置於滑軌481上之滑座482,利用滑軌組輔助門板45平穩作Z方向位移。In addition, the door control unit is provided with at least one slide rail set between the
輸送裝置50配置於機台10,並設有至少一移料器及本發明之載送機構,以供移載電子元件;於本實施例,輸送裝置50包含移料器51及載送機構
,移料器51作X-Y-Z方向位移,以於供料裝置20、收料裝置30及載送機構間移載取放待測電子元件及已測電子元件。
The
請參閱圖2~4,載送機構包含承載單元、驅動單元及至少一承載治具,承載單元於第一平台之上方沿Z方向依序疊置第二平台及第三平台,第三平台供裝配至少一承載治具,承載治具供承載電子元件,驅動單元於第一平台設有第一載送驅動源,第一載送驅動源驅動一沿第一載送路徑配置之第一傳動組,第一傳動組連結第二平台,另於第二平台之側面配置第二傳動組,第二傳動組之第二軸線方向異於第一傳動組之第一軸線方向,第二傳動組連結第一平台及第三平台,以傳動第三平台沿第一載送路徑位移;藉以使載送機構薄型化,利於在空間有限之作業裝置執行載送電子元件作業,進而提高使用效能。Please refer to Figures 2 to 4. The carrying mechanism includes a carrying unit, a driving unit and at least one carrying fixture. The carrying unit stacks the second platform and the third platform in sequence along the Z direction above the first platform. The third platform provides Assembling at least one carrying jig, the carrying jig is used to carry electronic components, the driving unit is provided with a first carrying driving source on the first platform, and the first carrying driving source drives a first transmission group arranged along the first carrying path , the first transmission group is connected to the second platform, and the second transmission group is arranged on the side of the second platform, the second axis direction of the second transmission group is different from the first axis direction of the first transmission group, and the second transmission group is connected to the first The first platform and the third platform are used to drive the third platform to move along the first conveying path; in order to make the conveying mechanism thinner, it is beneficial to carry out the operation of carrying electronic components in the operation device with limited space, thereby improving the use efficiency.
於本實施例,承載單元包含第一平台521、第二平台522及第三平台523,第一平台521之上方沿Z方向疊置第二平台522,第二平台522之上方沿Z方向疊置第三平台523,第三平台523供裝配複數個承載治具53,承載治具53開設複數個容置槽,以供承置電子元件。In this embodiment, the carrying unit includes a
驅動單元於第一平台521設有第一載送驅動源,第一載送驅動源為馬達54,以供驅動一沿第一載送路徑A1配置之第一傳動組,第一傳動組為第一皮帶輪組,第一皮帶輪組之二第一皮帶輪551呈Z方向之第一軸線方向B1配置於第一平台521,二第一皮帶輪551圈套一呈X方向配置之第一皮帶552,並以一第一皮帶輪551連結馬達54。The driving unit is provided with a first carrying drive source on the
又,驅動單元之第一傳動組以第一連結件553連結第二平台522,第一連結件553位於第一裝配位置C1,第一裝配位置C1至第一平台521之第一端及第二端的距離相等或不相等,第一連結件553帶動第二平台522沿第一載送路徑A1朝向第一平台521之第一端或第二端位移;驅動單元可定義第一平台521靠近作業裝置40之一端為第一端,而遠離第一端之另一端為第二端;於本實施例
,第一皮帶552於第一裝配位置C1(即中間位置)設置第一連結件553,第一連結件553連結第二平台522,由於第一裝配位置C1至第一平台521之第一端及第二端的距離相等,使得第一連結件553帶動第二平台522沿第一載送路徑A1朝向第一平台521之第一端或第二端作等距位移。
Also, the first transmission group of the drive unit is connected to the
驅動單元另於第二平台522之側面配置第二傳動組,第二傳動組為第二皮帶輪組,第二皮帶輪組之二第二皮帶輪561呈Y方向之第二軸線方向B2配置於第二平台522之側面,第二軸線方向B2異於第一傳動組之第一軸線方向B1,二第二皮帶輪561圈套一呈X方向配置之第二皮帶562。The drive unit is also equipped with a second transmission group on the side of the
驅動單元之第二傳動組以第二連結件563及第三連結件564分別連結第一平台521及第三平台523,第二連結件563及第三連結件564分別位於第二裝配位置C2及第三裝配位置C3,第二、三裝配位置C2、C3至第二平台522之第一端及第二端的距離相等或不相等,第三連結件564帶動第三平台523沿第一載送路徑A1朝向第二平台522之第一端或第二端位移;於本實施例,第二皮帶輪組之第二皮帶562於下皮帶段的第二裝配位置C2(即中間位置)設有第二連結件563,第二裝配位置C2至第二平台522之第一端及第二端的距離相等,第二連結件563連結固設於第一平台521,第二皮帶562於上皮帶段的第三裝配位置C3(即中間位置)設有第三連結件564,第三裝配位置C3至第二平台522之第一端及第二端的距離相等,第三連結件564連結第三平台523,使得第三連結件564帶動第三平台522及其上之承載治具53沿第一載送路徑A1朝向第二平台522之第一端或第二端作等距位移;因此,驅動單元可使第二、三平台522、523作雙向(即朝第一端方向或第二端方向)位移向外延伸作動,進而提高使用效能。The second transmission group of the drive unit connects the
承載單元於第一平台521與第二平台522間設有至少一第一保持器
,並於第二平台522與第三平台523間設有至少一第二保持器,第一保持器接觸頂撐第二平台522保持平穩位移,第二保持器接觸頂撐第三平台523保持平穩位移,進而提高載送使用效能。於本實施例,第一保持器於第一平台521之頂面架置第一滾輪571,第一滾輪571接觸且支撐第二平台522之底面,以供第二平台522沿第一滾輪571保持平穩位移;第二保持器於第二平台522之頂面架置第二滾輪572,第二滾輪572接觸且支撐第三平台523之底面,以供第三平台523沿第二滾輪572保持平穩位移。
The carrying unit is provided with at least one first holder between the
承載單元於第一平台521與第二平台522間設有至少一第一導移器581,第一導移器581為滑軌組,其滑座裝配於第一平台521,滑軌裝配於第二平台522,第二平台522利用滑軌沿滑座而作線性位移;另於第二平台522與第三平台523間設有至少一第二導移器582,第二導移器582為滑軌組,其滑座裝配於第二平台522,滑軌裝配於第三平台523,第三平台523利用滑軌沿滑座而作線性位移。The carrying unit is provided with at least one
依作業需求,驅動單元更包含第二載送驅動源59,第二載送驅動源59以連結驅動第一平台521沿第二載送路徑A2位移,第二載送路徑A2之方向異於第一載送路徑A1之方向,於本實施例,第二載送路徑A2之方向為Y方向,第二載送驅動源59載送第一平台521、第二平台522、第三平台523及承載治具53沿第二載送路徑A2位移至複數個作業裝置40。According to the operation requirements, the drive unit further includes a second
請參閱圖1~9,輸送裝置50之移料器51作X-Y-Z方向位移於供料裝置20取出待測之電子元件,並移載至載送機構之承載治具53,第二載送驅動源59載送承載治具53及其上之待測電子元件沿第二載送路徑A2位移至作業裝置40之前方;作業裝置40之門控單元以壓缸461之活塞桿作Y方向伸出位移,由於活塞桿連結皮帶輪組462之皮帶,而可驅動皮帶輪組462,皮帶輪組462之皮帶輪4621以軸桿4622帶動齒輪471同步轉動,齒輪471傳動相嚙合之齒條472作Z方向向上位移,齒條472帶動門板45同步向上位移,進而開啟作業裝置40之門框44的門口部441。Please refer to Figures 1 to 9, the
於開啟門板45後,載送機構之馬達54驅動第一皮帶輪組,第一皮帶輪組之二第一皮帶輪551帶動呈X方向配置之第一皮帶552作動,第一皮帶552之第一連結件553帶動第二平台522沿第一載送路徑A1朝作業裝置40作X方向第一段延伸位移,由於第二皮帶輪組裝配於第二平台522之側面,以及第二連結件563固設於第一平台521,第二平台522帶動第二皮帶輪組之第二皮帶輪561及第二皮帶562沿第一載送路徑A1位移,可使第二皮帶562利用第三連結件564帶動第三平台523沿第一載送路徑A1作X方向第二段延伸位移,使得第三平台523載送承載治具53及下一待測電子元件位於作業裝置40之作業室41的作業空間411,移動臂431帶動壓接器432作Z方向位移將測試座422內之已測電子元件移入承載治具53,並於承載治具53取出下一待測之電子元件;載送機構之馬達54驅動第一皮帶輪組反向作動,並搭配第二皮帶輪組帶動第二平台522、第三平台523、承載治具53及已測電子元件沿第一載送路徑A1作反向位移,令第二平台522、第三平台523及承載治具53依層疊置排列,使承載治具53離開作業裝置40;作業裝置40之門控單元即控制門板45作Z方向下方位移,而關閉門框44之門口部441,移動臂431帶動壓接器432作Z方向位移將下一待測電子元件移入測試座422而執行測試作業;第二載送驅動源59載送承載治具53及其上之已測電子元件沿第二載送路徑A2作反向位移,以供移料器51取出已測電子元件,依測試結果,而移載至收料裝置30分類收置。After the
10:機台 20:供料裝置 21:供料容置器 30:收料裝置 31:收料容置器 40:作業裝置 41:作業室 411:作業空間 412:側架 413:通口 421:電路板 422:測試座 431:移動臂 432:壓接器 44:門框 441:門口部 442:滑槽 443:支撐架 45:門板 461:壓缸 462:皮帶輪組 4621:皮帶輪 4622:軸桿 471:齒輪 472:齒條 481:滑軌 482:滑座 50:輸送裝置 51:移料器 521:第一平台 522:第二平台 523:第三平台 53:承載治具 54:馬達 551:第一皮帶輪 552:第一皮帶 553:第一連結件 561:第二皮帶輪 562:第二皮帶 563:第二連結件 564:第三連結件 571:第一滾輪 572:第二滾輪 581:第一導移器 582:第二導移器 59:第二載送驅動源 A1:第一載送路徑 A2:第二載送路徑 B1:第一軸線方向 B2:第二軸線方向 C1:第一裝配位置 C2:第二裝配位置 C3:第三裝配位置 10: machine 20: Feeding device 21: Feed container 30: Receiving device 31: Receiving container 40: operating device 41: Office 411: Workspace 412: side frame 413: port 421: circuit board 422: Test seat 431: mobile arm 432:Crimper 44: door frame 441: entrance 442: chute 443: support frame 45: door panel 461: Cylinder 462: pulley set 4621: pulley 4622: Shaft 471: gear 472: Rack 481: slide rail 482: sliding seat 50: Conveyor 51: Shifter 521: The first platform 522: second platform 523: The third platform 53: Bearing fixture 54: motor 551: The first pulley 552: first belt 553: The first link 561: Second pulley 562: second belt 563: The second link 564: The third link 571: The first roller 572: Second roller 581:First diverter 582:Second diverter 59: The second carrying drive source A1: The first delivery path A2: Second delivery path B1: The direction of the first axis B2: Second axis direction C1: First assembly position C2: second assembly position C3: The third assembly position
圖1:本發明作業機之配置圖。 圖2:本發明載送機構之前視圖。 圖3:本發明載送機構之後視圖。 圖4:本發明載送機構之側視圖。 圖5:本發明作業裝置與載送機構之示意圖。 圖6:本發明門具機構之前視圖。 圖7:本發明門具機構之側視圖。 圖8:本發明門具機構之使用示意圖。 圖9:本發明載送機構之使用示意圖。 Fig. 1: Configuration diagram of the working machine of the present invention. Figure 2: Front view of the carrying mechanism of the present invention. Figure 3: The rear view of the carrying mechanism of the present invention. Figure 4: A side view of the carrying mechanism of the present invention. Figure 5: A schematic diagram of the operating device and the carrying mechanism of the present invention. Figure 6: Front view of the door mechanism of the present invention. Figure 7: A side view of the door mechanism of the present invention. Figure 8: Schematic diagram of the use of the door mechanism of the present invention. Figure 9: Schematic diagram of the use of the carrying mechanism of the present invention.
521:第一平台 521: The first platform
522:第二平台 522: second platform
523:第三平台 523: The third platform
53:承載治具 53: Bearing fixture
54:馬達 54: motor
551:第一皮帶輪 551: The first pulley
552:第一皮帶 552: first belt
553:第一連結件 553: The first link
582:第二導移器 582:Second diverter
59:第二載送驅動源 59: The second carrying drive source
A1:第一載送路徑 A1: The first delivery path
B1:第一軸線方向 B1: The direction of the first axis
C1:第一裝配位置 C1: First assembly position
Claims (16)
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TW110133816A TWI834061B (en) | 2021-09-10 | Transporting mechanism, transporting device having the same, and processing apparatus having the same |
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TW110133816A TWI834061B (en) | 2021-09-10 | Transporting mechanism, transporting device having the same, and processing apparatus having the same |
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TWI834061B TWI834061B (en) | 2024-03-01 |
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