TW202309351A - Workpiece holding jig and surface processing device - Google Patents

Abstract

A workpiece holding jig (30) comprises: a holding unit (320) that holds a workpiece such that the front surface and rear surface thereof are vertical; two power supply receiving units (340A, 340B) that are insulated from each other, and that are provided for setting the workpiece to be a negative pole; and two conductive units (370A, 370B) that allow conduction between the two power supply receiving units and the holding unit, and that are insulated from each other. The holding unit includes: two conductive plates (321A, 321B) that are arranged parallel to one side of the workpiece, and that are insulated from each other; and a clamper (325) that clamps and holds the workpiece. The clamper includes a conductive first clamp piece (325A) that contacts the front surface of the workpiece and a conductive second clamp piece (325B) that contacts the rear surface of the workpiece. The first clamp piece is electrically connected to one of the two power supply receiving units, one of the two conductive units, and one of the two plates, and the second clamp piece is electrically connected to the other of the two power supply receiving units, the other of the two conductive units, and the other of the two plates.

Description

Workpiece holding jig and surface treatment device

The present invention relates to a workpiece holding jig, a surface treatment device, and the like.

The inventors of the present invention propose a workpiece holding jig including N (N is plural) power-receiving parts and N conduction paths insulated from each other (Patent Document 1). N conductive paths insulated from each other are connected to different N cathode setting locations including the workpiece, and one example thereof includes the front and back of the workpiece (two cathode setting locations). The inventors of this application further proposed a surface treatment device including this workpiece holding jig (Patent Document 2).

On the other hand, the applicant of this application proposes a surface treatment device, which is connected to different rectifiers ( In FIG. 1, there are 5 rectifiers; in FIG. 7, there are 5 rectifiers on the front and back of the workpiece, a total of 10 rectifiers) The power supply rails in 5 rows contact and supply power to the surface treatment device (Patent Document 3). [Prior Art Literature] [Patent Document]

[Patent Document 1] Japanese Patent No. 6820626 [Patent Document 2] Japanese Patent No. 6744646 [Patent Document 3] Japanese Patent No. 5457010

[Problem to be solved by the invention]

However, Patent Documents 1 to 3 do not disclose specific structures of a workpiece holding jig having two mutually insulated conduction paths connected to the front and back of the workpiece and a surface treatment device using the jig.

The object of the present invention is to provide a workpiece holding jig with a structure of a necessary holding portion of a workpiece holding jig, a workpiece holding jig having a conduction path connected to the front and back of the workpiece with low impedance and insulated from each other, and a surface treatment device using the jig . Another object of the present invention is to provide a surface treatment device that can individually adjust the amount of current directed to the front and back of a workpiece, while maintaining throughput and avoiding excessive enlargement. [Technical means to solve the problem]

(1) The workpiece holding jig of an aspect of the present invention has: a holding unit that holds a rectangular workpiece immersed in the treatment liquid such that the surface and back of the workpiece are perpendicular; 2 powered parts, which are insulated from each other, for setting the aforementioned workpiece as a cathode; and two conduction parts, which are insulated from each other, and conduct conduction between the two power-supplied parts and the holding part, The aforementioned holding part includes: 2 electrically conductive plates insulated from each other and extending parallel to one side of the aforementioned workpiece; and a clamper, which clamps and holds the workpiece, and includes a conductive first clamping piece in contact with the surface of the workpiece, and a conductive second clamping piece in contact with the back surface of the workpiece, The aforementioned first clamping piece is in conduction with each of the aforementioned 2 powered parts, the aforementioned 2 conduction portions, and the aforementioned 2 plates, The second clamping piece is electrically connected to the other of the two power-supplied parts, the two conduction parts, and the two boards.

According to one aspect of the present invention, the necessary structure of the workpiece holding jig, that is, the holding part, includes: two conductive plates; and a clamper, which includes conductive first and second clamping pieces . Each of the two powered parts, the two conduction parts, and the two plate members is electrically connected to the surface of the workpiece via the first clamping piece of the clamper. The other ones of the two power-supplied parts, the two conduction parts, and the two plate members are electrically connected to the back surface of the workpiece through the second clamping piece of the clamper. Thereby, the work holding jig having the conduction paths connected to the front and back of the work with low impedance and insulated from each other can be provided by using the required structure of the work holding jig.

(2) According to aspect (1) of this invention, the said holding|maintenance part contains an upper frame, a lower frame, and two vertical frames. In this case, the upper frame, the lower frame, and the two vertical frames each include the two panels, and a total of eight panels are provided. The aforementioned holders are respectively provided on the aforementioned upper frame and the aforementioned lower frame. One of the above-mentioned two boards provided on the above-mentioned two vertical frames is connected to one of the above-mentioned two boards provided on the above-mentioned lower frame, and one of the above-mentioned two boards respectively provided on the above-mentioned two vertical frames The other side of the part is conducted with the other side of the aforementioned 2 plate parts located at the aforementioned lower frame. Each of the two powered parts, the two conduction parts, and the two plates of the upper frame is electrically connected to the surface of the workpiece through the first clamping piece provided on the upper frame. The other ones of the two powered parts, the two conductive parts, and the two plate members provided on the upper frame are electrically connected to the back surface of the workpiece through the second clamping piece provided on the upper frame. One of each of the two plates of the two powered parts, the two conduction parts, the two vertical frames, and the lower frame is electrically connected to the surface of the workpiece through the first clamping piece provided on the lower frame. The other of each of the two plate members of the two powered parts, the two conduction parts, the two vertical frames and the lower frame is electrically connected to the back surface of the workpiece through the second clamping piece provided on the lower frame. Thereby, using the structure necessary for the workpiece holding jig of the upper frame, the lower frame, and two vertical frames, it is possible to provide conduction paths that are connected to the front and back of the workpiece with low impedance and are insulated from each other.

(3) According to an aspect (2) of the present invention, wherein the two vertical frames can be supported by the upper frame via an insulating member, and one of the two boards provided on the upper frame is connected to the The two panels of the two vertical frames are insulated, and the other side of the two panels provided on the upper frame is insulated from the two panels respectively provided on the two vertical frames. Thereby, in the holding part, one conductive path connected to the front and back of the workpiece through the upper frame and the other conductive path connected to the front and back of the workpiece through the two vertical frames and the lower frame can be electrically insulated from each other. .

(4) According to one aspect (3) of the present invention, the aforementioned two conducting parts may include the first to eighth conducting parts. In this case, the aforementioned first conduction part conducts between one of the aforementioned two powered parts and one end of one of the aforementioned two boards provided on the aforementioned upper frame, and the aforementioned second conduction part connects One of the aforementioned 2 powered parts is connected to the other end of one of the aforementioned 2 plates arranged on the aforementioned upper frame, and the aforementioned 3rd conduction part connects the other side of the aforementioned 2 powered parts with the Conduction between one end of the other side of the aforementioned two boards of the aforementioned upper frame, and the aforementioned fourth conduction part connects the other side of the aforementioned two powered parts to the other end of the aforementioned two boards of the aforementioned upper frame. Conduction between the other end of one side, the fifth conduction part is to conduct conduction between one of the two powered parts and one of the two boards provided on one of the two vertical frames , the aforementioned 6th conduction part conducts between one of the aforementioned 2 powered parts and one of the aforementioned 2 plate parts provided on the other side of the aforementioned 2 vertical frames, and the aforementioned 7th conduction part connects The other of the two power-supplied parts is electrically connected to the other of the two boards provided on one of the two vertical frames, and the eighth conduction part connects the other of the two power-supplied parts Conduction with the other of the two plate members provided on the other of the two vertical frames. Thereby, the two power-receiving parts can be electrically connected to the two ends (four ends in total) of the two plates provided on the upper frame through the first to the fourth conducting parts. In addition, the 2 to-be-supplied parts can be electrically connected to each one end (total 4 other ends) of each 2 plate members provided in 2 vertical frames by the 5th to 8th conduction part.

(5) According to the aspect (4) of the present invention, the respective resistances of the first to fourth vias are made larger than the respective resistances of the fifth to eighth vias. Thereby, the resistance of the path conducting from the first to the fourth conduction parts to the front and back of the workpiece through the upper frame, and the resistance of the path from the fifth to the eighth conduction parts to the workpiece through the two vertical frames and the lower frame can be connected. The resistance of the path on the front and back is set to be approximately equal.

(6) The surface treatment device of another aspect of the present invention includes: a treatment tank, which dips a rectangular workpiece in a treatment liquid; an anode disposed in the treatment tank, and comprising a first anode facing the surface of the workpiece and a second anode facing the back of the workpiece; 8 rows of supply rails, which are insulated from each other; A total of 8 rectifiers, including 4 rectifiers respectively connected between 4 power supply rails of the aforementioned 8 rows of power supply rails and the aforementioned first anode, and respectively connected to the other 4 power supply rails of the aforementioned 8 rows of power supply rails 4 other rectifiers between the track and the aforementioned 2nd anode; and 4 movable workpiece holding fixtures, each of which holds the aforementioned workpieces, is electrically connected to 2 of the aforementioned 8 rows of power supply rails, The aforementioned four workpiece holding jigs are respectively the workpiece holding jigs described in any one of aspects (1) to (5) of the present invention.

According to other aspects of the present invention, using the workpiece holding jig as described in any one of aspects (1) to (5) of the present invention, the amount of current to the front and back of the workpiece can be adjusted individually and the Surface treatment is carried out on the front and back of the workpiece. In order to individually adjust the amount of current to the front and back of the workpiece, by setting the maximum number of workpiece holding jigs that can pass through the processing tank at the same time to 4, the number of power supply rails and rectifiers can be made to 8, thereby , which can maintain the output and avoid excessive enlargement of the surface treatment device.

(7) As in other aspects (6) of the present invention, wherein the aforementioned 4 rectifiers are respectively connected to the aforementioned 4 power supply rails of the odd-numbered columns in the aforementioned 8 columns of power supply rails, and the aforementioned other 4 rectifiers are respectively connected to the aforementioned 8 columns of power supply rails. The other 4 power supply rails mentioned above are connected to the even-numbered columns of the power supply rails. Thereby, the interval between the two power supply receiving parts provided on the workpiece holding jig can be made wider than the interval between adjacent power supply rails. Thereby, it becomes easy to ensure the space which connects two conduction parts to two power-supplied parts.

(8) According to other aspect (6) of the present invention, wherein, the aforementioned 4 rectifiers are respectively connected to the aforementioned 4 power supply rails of the 1st to 4th rows adjacent to each other among the aforementioned 8 rows of power supply rails, and the aforementioned other 4 The rectifiers are respectively connected to the other four power supply rails in the 5th to 8th rows adjacent to each other among the 8 rows of power supply rails. Thereby, the distance between the two power-supplied parts provided on the workpiece holding jig can be narrowed in accordance with the distance between the adjacent power-supply rails.

Hereinafter, preferred embodiments of the present invention will be described in detail. Furthermore, the following description of the present embodiment is not intended to limit the content of the present invention described in the claims, and all the structures described in the present embodiment are not essential means for solving the problems of the present invention.

1. Surface treatment device Fig. 1 is a plan view schematically showing a surface treatment device 1 according to an embodiment of the present invention. In Fig. 1, the surface treatment device 1 has: a treatment tank 10; an anode 20 disposed in the treatment tank 10; a workpiece holding jig 30 for carrying a workpiece (not shown in Fig. 1); a rectifier 40; and Power rail 50. The processing tank 10 accommodates a processing solution such as a plating solution for immersing a rectangular workpiece. A plurality of processing tanks 10 may also be connected and installed. In this case, openings 11 and 12 for allowing workpieces to pass between adjacent processing tanks 10 are provided at both ends in the longitudinal direction of the processing tanks 10 .

The anode 20 provided in the processing tank 10 includes the 1st anode 21 which faces the surface of a workpiece|work, and the 2nd anode 22 which faces the back surface of a workpiece. Outside the processing tank 10, eight rectifiers 40 (41-48) are provided. Outside the treatment tank 10 , eight rows of power supply rails 50 ( 51 to 58 ) insulated from each other are arranged along the length direction of the treatment tank 10 , for example, on one side of the treatment tank 10 . The four rectifiers 41 to 44 are respectively connected between, for example, the four power supply rails 51 to 54 of the eight rows of power supply rails 50 ( 51 to 58 ) and the first anode 21 . The other four rectifiers 45 to 48 are respectively connected between the four power supply rails 55 to 58 and the second anode 22 .

In the processing tank 10, there are at most 4 workpiece holding jigs 31-34 as the workpiece holding jig 30, which can move along the length direction of the processing tank 10, and hold workpieces respectively and connect with the power supply rails of 8 rows respectively. 2 of each of 50 are electrically connected. These workpiece holding jigs 31 to 34 are sequentially carried into the processing tank 10 from the upstream side of the conveying direction A (for example, an upstream processing tank not shown), and after the processing tank 10 is continuously moved, for example, they are moved toward the conveying direction. The downstream side of A (for example, a downstream processing tank not shown) is carried out sequentially.

Here, a maximum of four workpiece holding jigs 31 to 34 are connected to different two rows of power supply rails among the eight rows of power supply rails 50 ( 51 to 58 ). In the state shown in FIG. 1 , the most downstream workpiece holding jig 31 is connected to, for example, odd-numbered first and fifth power supply rails 51 and 55 . The workpiece holding jig 32 is connected to, for example, even-numbered second and sixth row power supply rails 52 and 56 . The workpiece holding jig 33 is connected to, for example, odd-numbered third and seventh row power supply rails 53 and 57 . The workpiece holding jig 34 is connected to, for example, the power supply rails 54 and 58 of the even-numbered 4th and 8th rows. At this time, the rectifier 41 is connected to the first anode 21 facing the surface of the workpiece held on the workpiece holding jig 31 and the power supply rail 51 of the first row, and adjusts the flow on the surface of the workpiece held by the workpiece holding jig 31 the current. The rectifier 45 is connected to the second anode 22 facing the back of the workpiece held by the workpiece holding jig 31 and the power supply rail 55 of the fifth row, and adjusts the current flowing to the back of the workpiece held by the workpiece holding jig 31 . Similarly, the current flowing on the front surface and the back surface of the workpiece held by the workpiece holding jig 32 is individually adjusted by the rectifier 42 and the rectifier 46 . The current flowing on the front surface and the back surface of the workpiece held by the workpiece holding jig 33 is individually adjusted by the rectifier 43 and the rectifier 47 . The current flowing on the front surface and the back surface of the workpiece held by the workpiece holding jig 34 is adjusted individually by the rectifier 44 and the rectifier 48 .

Here, the workpiece held by at least one of the most upstream workpiece holding jig 31 and the most downstream workpiece holding jig 34 among the maximum 4 workpiece holding jigs 31 to 34 that can pass through the processing tank 10 at the same time is partially The processing liquid in the processing tank 10 is immersed in the processing liquid in the processing tank 10, and the maximum 3 workpieces held by the workpiece holding jigs 31-33 or 32-34 at most are all immersed in the processing liquid in the processing tank 10. In FIG. 1 , two workpieces held on both the most upstream workpiece holding jig 31 and the most downstream workpiece holding jig 34 are partially immersed in the processing liquid in the processing tank 10, and are held by the remaining workpiece holding jigs 32, The two workpieces of 33 are completely immersed in the treatment liquid in the treatment tank 10 . Partial immersion refers to a state where a part of the treatment surface of the workpiece is immersed in the treatment liquid in the treatment tank 10 . The overall immersion refers to a state where the entire treatment surface of the workpiece is immersed in the treatment liquid in the treatment tank 10 . That is, the length in the longitudinal direction of the treatment tank 10 is set to be sufficient to fully immerse a maximum of three workpieces held by a maximum of three workpiece holding jigs 30 .

When the number of workpieces that can be transported in the treatment tank 10 under the simultaneous full-immersion state is set as N, the respective numbers of rectifiers 40 and power supply rails 50 are 2×(N+1), and the present embodiment is N=3 example. In order to achieve the desired throughput while individually adjusting the amount of current toward the front and back of the workpiece, if N is set to 2 or less, the number of connection of the processing tanks 10 will increase, and if N is set to 4 or more, the number of processing tanks 10 will be included. The width of the surface treatment device 1 of the groove 10 and the supply track 50 is increased. In this embodiment, where N=3, it is possible to individually adjust the amount of current to the front and back of the workpiece and to maintain the throughput, while avoiding excessive enlargement of the surface treatment device 1 . Furthermore, when the rectifiers 41-48 are carried in and out of the treatment tank 10, the method described in Patent Document 3 can be used to gradually increase the current flowing in the workpiece (when moving in) or gradually decrease (when moving out) according to the processing area. .

2. Workpiece holding jig 2.1. Basic structure The basic structure of the workpiece holding jig 30 is substantially the same as that shown in FIG. 4 of Patent Documents 1 and 2, and the basic structure is shown in FIG. 2 . The workpiece holding jig 30 has: a horizontal arm portion 300 ; a vertical arm portion 310 ; a holding portion 320 for holding a workpiece; a guided portion 330 ; a powered portion 340 ; a pushed piece 350 ; The horizontal arm portion 300 extends along a direction B perpendicular to the conveyance direction A. As shown in FIG. The vertical arm portion 310 hangs down from the horizontal arm portion 300 and holds the holding portion 320 fixed to the vertical arm portion 310 via the supporting frame 311 . The holding part 320 includes: an upper frame 321 ; for example, two vertical frames 322 and 323 supported by the upper frame 321 so as to be able to move up and down; and a lower frame 324 fixed to the two vertical frames 322 and 323 . On the upper frame 321, a plurality of upper clampers 325 for clamping the upper edge of the workpiece are provided. In the lower frame 324, a plurality of lower grippers 326 for gripping the lower edge of the workpiece are provided. On the workpiece, downward tension is applied by the lower gripper 326 . However, the two vertical frames 322, 323, the lower frame 324, and the lower clamper 326 may be omitted when the workpiece is thick and/or when power is not supplied from the lower part of the workpiece.

The guided part 330 is guided by a guide rail (not shown) provided in the surface treatment apparatus 1, and guides the workpiece holding jig 30 linearly. The guided part 330 may include: a roller 331 that is in rotational contact with the top surface of the guide track; and a roller 332 that is in rotational contact with both sides of the guide track (in FIG. roller).

As the first and second powered parts 340A and 340B of the powered part 340, they are in contact with two different rows of the powered rails 50 (51 to 58) of the eight rows shown in FIG. The front and back are individually set as cathodes. The first and second power receiving parts 340A and 340B respectively include two contacts 342 and 343 which are supported on the upstream side and downstream side of the first and second support arms 341A and 341B respectively extending along the conveying direction A. side. The contacts 342 and 343 are supported by the support arm 341 via a parallel link mechanism, and are pushed by springs so as to be in pressure contact with the eight rows of power supply rails 50 shown in FIG. 1 . The four workpiece holding fixtures 31-34 shown in FIG. 1 can be made different from those shown in FIG. Two different rows of power supply rails among the eight rows of power supply rails 50 (51-58) are in contact with each other. Therefore, it is preferable that the workpiece holding jig 30 can adjust the positions where the first and second support arms 341A, 341B are fixed to the horizontal arm portion 300 in the B direction as shown in FIG. 2 . Thereby, four types of workpiece holding jigs 31 to 34 as shown in FIG. 1 can be prepared by adjusting one type of workpiece holding jig 30 .

The workpiece holding jig 30 may have both the pushed piece 350 and the engaged portion 360 . The engaged portion 360 can continuously transport the workpiece holding jig 30 by engaging with, for example, a continuously moving chain. The pushed piece 350 is pushed in the direction of arrow C by the intermittent conveying device, and transmits the intermittent conveying force to the workpiece holding jig 30 . Thereby, the workpiece holding jig 30 can be used for both intermittent conveyance and continuous conveyance. However, the workpiece holding jig 30 may be used for only one of intermittent conveyance and continuous conveyance.

2.2. The structure used to individually adjust the current flowing on the front and back of the workpiece In FIG. 2 , the two conduction portions for conducting and insulating the first and second powered portions 340A, 340B and the holding portion 320 of the workpiece holding jig 30 , the conduction path provided in the holding portion 320 , and the like are omitted. 3 and 6 show the conduction path for setting the workpiece as the cathode through the upper frame 321 in the holding part 320 .

In FIG. 3, the upper frame 321 of the holding part 320 of the workpiece holding jig 30, as shown in FIG. 6, has two conductive plates 321A and 321B, which are insulated from each other. The clamper 325 supported on the upper frame 321 of the workpiece holding jig 30 has a conductive first clamping piece 325A and a second clamping piece 325B, which are insulated from each other. The workpiece holding jig 30 further includes two conduction portions 370A and 370B that are insulated from each other and conduct conduction between the two power supply receiving portions 340A and 340B and the upper frame 321 (holding portion 320 ). The negative terminal of the rectifier 41 is electrically connected to the surface of the workpiece via the power supply rail 51 , the first powered portion 340A, the conduction portion 370A, the plate 321A, and the first clamping piece 325A. On the other hand, the negative terminal of the rectifier 45 is electrically connected to the back surface of the workpiece via the power supply rail 55 , the second powered portion 340B, the conduction portion 370B, the plate 321B, and the second clamping piece 325B. Accordingly, the current flowing from the rectifier 41 to the surface of the workpiece and the current flowing from the rectifier 45 to the back surface of the workpiece can be independently adjusted by the rectifiers 41 and 45 .

Fig. 4 and Fig. 5 show more specifically: make the electric current pass through the upper frame 321 of the workpiece holding jig 30 and flow from the upper edge of the workpiece to the path of the front and back of the workpiece; The frames 322, 323 and the lower frame 324 flow from the lower edge of the workpiece to the front and back of the workpiece. The two conduction parts 370A and 370B shown in FIG. 3 are configured including members 371 to 376 and first to eighth conduction parts 381 to 388 as shown in FIGS. 4 and 5 .

The two contacts 342 and 343 provided on the first power supply receiving part 340A are electrically connected to the common connection part 373 via, for example, cables 371 and 372 . Similarly, the two contacts 342 and 343 provided on the second power receiving portion 340B are electrically connected to the common connection portion 376 via, for example, cables 374 and 375 . The cables 371, 372, 374, 375 are drawn and wound to, for example, the vertical arm 310 of the workpiece holding jig 30 or the support frame 311 supported by the first and second support arms 341A and 341B as shown in FIG. 2 . Common connection parts 373 and 376 . At this time, as shown in FIG. 1 , if the workpiece holding jig 31 contacts the power supply rail 51 of the first row and the power supply rail 55 of the fifth row, for example, the distance between the first and second support arms 341A, 341B The cables 371 , 372 , 374 , and 375 become easy to stretch out.

Here, as shown in FIG. 5 , the vertical frame 322 is configured by arranging two parallel conductive plate members 322A and 322B in parallel with an interval therebetween. The vertical frame 323 is configured by arranging two parallel conductive plate members 323A and 323B in parallel with an interval therebetween. The lower frame 324 is configured by arranging two parallel conductive plate members 324A and 324B in parallel with an interval therebetween. One end of the plate 324A is connected to the lower end of the plate 322A, and the other end of the plate 324A is connected to the lower end of the plate 323A. Similarly, one end of the plate 324B is connected to the lower end of the plate 322B, and the other end of the plate 324B is connected to the lower end of the plate 323B. The upper frame 321 is also configured by arranging two parallel conductive plate members 321A and 321B in parallel with an interval therebetween, as shown in FIGS. 5 and 6 . In order to ensure the strength of the upper frame 321, an insulating material 321C may also be disposed between the plate members 321A and 321B (FIG. 6). Furthermore, the plate 321A of the upper frame 321 is connected to a conductive member 391 extending in the longitudinal direction, as shown in FIG. 5 . The plate 321B of the upper frame 321 is connected to the conductive member 392 extending in the longitudinal direction. The conductive members 391, 392 extend in parallel in the longitudinal direction. Also, the two vertical frames 322 and 323 may be electrically insulated from the upper frame 321 and supported by the upper frame 321 . In this embodiment, the plates 322A and 323A in the vertical frames 322 and 323 are supported with the conductive member 391 via an insulator (not shown), and the plates 322B and 323B in the vertical frames 322 and 323 are supported with the conductive member 391 via An insulator (not shown) is supported. Also, the two vertical frames 322 and 323 may be electrically insulated from the upper frame 321 and supported on the upper frame 321 so as to be movable up and down. Thereby, tension can be applied to the lower end of the workpiece.

The first conducting portion 381 is provided between the common connection portion 373 connected to the first power receiving portion 340A and one end (for example, the left end) of the plate 321A of the upper frame 321 via the conductive member 391 connected to one end of the plate 321A. conduction. The second conduction portion 382 connects the common connection portion 373 connected to the first power-supplied portion 340A and the plate provided on the upper frame 321 via a conductive member 391 (not shown in FIG. 5 ) connected to one end of the plate 321A. The other end (for example, the right end) of 321A is conducted. In this way, the first powered portion 340A can be electrically connected to both ends of the plate 321A provided on the upper frame 321 through the first and second conducting portions 381 and 382 .

The third conduction portion 383 connects the common connection portion 376 connected to the second powered portion 340B with the conductive member 392 connected to one end of the plate 321B (in FIG. One end (for example, the left end) of the plate 321B of the upper frame 321 is electrically connected. The fourth conduction portion 384 connects the common connection portion 376 connected to the second powered portion 340B and the other end (for example, the right end) of the plate 321B of the upper frame 321 via the conductive member 392 connected to one end of the plate 321B. conduction between. In this way, the second power receiving portion 340B can be electrically connected to both ends of the plate 321B provided on the upper frame 321 through the third and fourth conducting portions 383 and 384 .

The fifth conduction portion 385 conducts conduction between the common connection portion 373 connected to the first power-supplied portion 340A and the plate 322A provided on the vertical frame 322 . The sixth conduction portion 386 conducts conduction between the common connection portion 373 connected to the first power-supplied portion 340A and the plate 323A provided on the vertical frame 323 . Thereby, the first power receiving portion 340A can be electrically connected to the respective upper ends of the plate members 322A, 323A provided on the two vertical frames 322, 323 through the fifth and sixth conducting portions 385, 386. Since the plates 322A, 323A are connected to both ends of the plate 324A of the lower frame 324 , the first power receiving portion 340A can be electrically connected to the plate 324A of the lower frame 324 .

The seventh conduction portion 387 conducts conduction between the common connection portion 376 connected to the second power supply receiving portion 340B and the plate 322B provided on the vertical frame 322 . The eighth conduction portion 388 conducts conduction between the common connection portion 376 connected to the second power supply receiving portion 340B and the plate 323B provided on the vertical frame 323 . Thereby, the second power receiving portion 340B can be electrically connected to the respective upper ends of the plates 322B, 323B provided on the two vertical frames 322, 323 through the seventh and eighth conducting portions 387, 388. Since the plates 322B, 323B are connected to both ends of the plate 324B of the lower frame 324 , the second power receiving portion 340B can be electrically connected to the plate 324B of the lower frame 324 .

Here, the respective resistances of the first to fourth conduction portions 381 to 384 are made larger than the respective resistances of the fifth to eighth conduction portions 385 to 388 . The first to fourth conduction portions 381 to 384 are electrically connected to the upper frame 321 which is relatively close to each other, while the fifth to eighth conduction portions 385 to 388 are electrically connected to the lower frame 324 via the two vertical frames 322 and 323 . Therefore, in order to make the resistance of the conduction path from the common connection portions 373, 376 to the upper frame 321 equal to the resistance of the conduction path from the common connection portions 373, 376 to the lower frame 324, the first to fourth conduction portions 381 are enlarged. ~384 individual resistors. Specifically, as shown in FIG. 5 , the first to fourth conducting portions 381 to 384 are formed of metal plates bent into, for example, an L-shape. constitute.

FIG. 6 shows a gripper such as upper gripper 325 . The lower holder 326 is also configured in the same manner. The upper holder 325 is supported by a pair of plates 321A, 321B of the upper frame 321 . The upper clamper 325 may include: a first clamping piece 325A supported, for example, fixed to the plate 321A; and a second clamping piece 325B movably supported on the plate 321B. The second holding piece 325B is rotatably pushed in the arrow D direction by, for example, a coil spring 325C, and is rotatably supported around a fulcrum 325D provided on the plate 321B. In FIG. 6 , since there is no workpiece, the first and second holding pieces 325A and 325B are pressed together. After the second clamping piece 325B is rotated in the direction opposite to the arrow D direction by external force, the workpiece is arranged between the first and second clamping pieces 325A and 325B. between the second clamping pieces 325A and 325B. Thereby, the 1st, 2nd clamping piece 325A, 325B is electrically insulated by a workpiece|work. Thereby, the current flowing on the surface of the workpiece through the plate 321A and the first clamping piece 325A can be electrically separated from the current flowing on the back surface of the workpiece through the plate 321B and the second clamping piece 325B.

3. Modification Different from FIG. 1 , as shown in FIG. 7 , the electrical connection between the workpiece holding jig 30 and the power supply rail 50 can also be made. In Fig. 7, the four rectifiers 41-44 are respectively connected to the four power supply rails 51-54 of the first to fourth rows adjacent to each other among the eight-row power supply rails 51-58, and the other four rectifiers 45-48 They are respectively connected to the four power supply rails 55 to 58 of the 5th to 8th rows that are adjacent to each other among the power supply rails 51 to 58 of the 8 rows. Thereby, the distance between the two power supply receiving parts 340A, 340B provided on the workpiece holding jig 30 can be narrowed in accordance with the distance between the adjacent power supply rails.

Also, for example, the same as Japanese Patent No. 6909526 of the applicant of the present case, a conductive dummy plate can be provided, and it can be positioned at the edge of the workpiece between two adjacent grippers among a plurality of grippers 325,326. Department close to the configuration. In this case, two dummy plates may be provided corresponding to the front and back of the workpiece. The conduction path toward the two dummy boards can also be used as the conduction path toward the first and second clamping pieces of the holder located on both sides of the two dummy boards.

1: Surface treatment device 10: Processing tank 11,12: opening 20: anode 21: 1st anode 22: The second anode 30 (31~34): workpiece holding fixture 40(41~48): rectifier 50(51~58): Power rail 320: Keeping Department 321: upper frame 321A, 321B: plate 322,323: vertical frame 322A, 322B: plate 323A, 323B: plate 324: Lower frame 324A, 324B: plate 325: Holder 326: Holder 325A: The first clamping piece 325B: The second clamping piece 340A, 340B: No. 1 and No. 2 powered parts 370A, 370B: conduction part 381~388: 1st~8th conduction part

[ Fig. 1 ] is a schematic plan view showing a surface treatment device according to an embodiment of the present invention. [ Fig. 2 ] is a schematic perspective view showing a basic structure of a workpiece holding jig according to an embodiment of the present invention. [FIG. 3] It is a figure for explaining the conduction path which makes the electric current flow to the front and back of a workpiece|work through an upper frame. [FIG. 4] It is a figure for explaining the conduction path which makes a current flow to the front and back of a workpiece via an upper frame and a lower frame. [ FIG. 5 ] is a diagram showing the structure of the conduction path shown in FIG. 4 . [ Fig. 6 ] is a diagram showing the structure of a holder. [ Fig. 7 ] is a schematic plan view showing a surface treatment device according to another embodiment of the present invention.

21: 1st anode

22: The second anode

30: Workpiece holding fixture

41: rectifier

45: rectifier

51: Power rail

55: Power rail

321: upper frame

321A: plate

321B: plate

325: Holder

325A: The first clamping piece

325B: The second clamping piece

340A: The first powered part

340B: The second power supply department

370A: conduction part

370B: conduction part

Claims (8)

A workpiece holding jig comprising: a holding portion for holding a rectangular workpiece immersed in a treatment liquid such that the surface and back of the workpiece are perpendicular; 2 powered parts, which are insulated from each other, for setting the aforementioned workpiece as a cathode; and two conduction parts, which are insulated from each other, and conduct conduction between the two power-supplied parts and the holding part, The aforementioned holding part includes: 2 electrically conductive plates insulated from each other and extending parallel to one side of the aforementioned workpiece; and a clamper, which clamps and holds the workpiece, and includes a conductive first clamping piece in contact with the surface of the workpiece, and a conductive second clamping piece in contact with the back surface of the workpiece, The aforementioned first clamping piece is in conduction with each of the aforementioned 2 powered parts, the aforementioned 2 conduction portions, and the aforementioned 2 plates, The second clamping piece is electrically connected to the other of the two power-supplied parts, the two conduction parts, and the two boards. Such as the workpiece holding fixture of request item 1, wherein, The aforementioned holding portion includes an upper frame, a lower frame, and two vertical frames, The aforementioned upper frame, the aforementioned lower frame and the aforementioned 2 vertical frames each include the aforementioned 2 panels, and there are a total of 8 panels, The aforementioned upper frame and the aforementioned lower frame are respectively provided with the aforementioned holders, One of the above-mentioned two plate parts respectively provided on the above-mentioned two vertical frames is connected to one of the above-mentioned two plate parts provided on the above-mentioned lower frame, The other one of the aforementioned two plate components respectively provided on the aforementioned two vertical frames is electrically connected to the other one of the aforementioned two panel components provided on the aforementioned lower frame. Such as the workpiece holding fixture of request item 2, wherein, The two vertical frames are supported by the upper frame via insulating members, One of the above-mentioned two boards provided on the above-mentioned upper frame is electrically insulated from the above-mentioned two boards respectively provided on the above-mentioned two vertical frames, The other of the two boards provided on the upper frame is electrically insulated from the two boards respectively provided on the two vertical frames. Such as the workpiece holding fixture of claim item 3, wherein, The aforementioned two conduction portions include first to eighth conduction portions, The aforementioned first conduction portion conducts conduction between one of the aforementioned two powered portions and one end of one of the aforementioned two plate members provided on the aforementioned upper frame, The second conduction part conducts conduction between one of the two powered parts and the other end of one of the two boards of the upper frame, The aforementioned third conduction portion conducts conduction between the other of the aforementioned two powered parts and one end of the other of the aforementioned two plate members of the aforementioned upper frame, The fourth conductive part conducts the other of the two powered parts with the other end of the other of the two boards of the upper frame, The fifth conduction part conducts conduction between one of the two powered parts and one of the two boards provided on one of the two vertical frames, The sixth conduction part conducts conduction between one of the two powered parts and one of the two boards provided on the other side of the two vertical frames, The seventh conduction part conducts conduction between the other of the two powered parts and the other of the two boards provided on one of the two vertical frames, The eighth conducting portion conducts conduction between the other of the two power-supplied portions and the other of the two plate members provided on the other of the two vertical frames. Such as the workpiece holding fixture of claim item 4, wherein, The respective resistances of the first to fourth vias are larger than the respective resistances of the fifth to eighth vias. A surface treatment device includes: a treatment tank, which dips a rectangular workpiece in a treatment liquid; an anode disposed in the treatment tank, and comprising a first anode facing the surface of the workpiece and a second anode facing the back of the workpiece; 8 rows of supply rails insulated from each other and arranged in parallel; A total of 8 rectifiers, including 4 rectifiers respectively connected between 4 power supply rails of the aforementioned 8 rows of power supply rails and the aforementioned first anode, and respectively connected to the other 4 power supply rails of the aforementioned 8 rows of power supply rails 4 other rectifiers between the track and the aforementioned 2nd anode; and 4 movable workpiece holding fixtures, each of which holds the aforementioned workpieces, is electrically connected to 2 of the aforementioned 8 rows of power supply rails, The aforementioned four workpiece holding jigs are respectively the workpiece holding jigs according to any one of claim items 1 to 5. The surface treatment device as claimed in claim 6, wherein, The aforementioned 4 rectifiers are respectively connected to the aforementioned 4 power supply rails of odd-numbered columns among the aforementioned 8 columns of power supply rails, The aforementioned other 4 rectifiers are respectively connected to the aforementioned other 4 power supply rails of the even-numbered rows among the aforementioned 8 rows of power supply rails. The surface treatment device as claimed in claim 6, wherein, The aforementioned four rectifiers are respectively connected to the aforementioned four power supply rails of the first to fourth rows adjacent to each other among the aforementioned eight rows of power supply rails, The other four rectifiers are respectively connected to the other four power supply rails in the 5th to 8th rows that are adjacent to each other in the 8th row of power supply rails.

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