CN117795136A

CN117795136A - Workpiece holding jig and surface treatment device

Info

Publication number: CN117795136A
Application number: CN202280053458.6A
Authority: CN
Inventors: 石井胜己
Original assignee: Almex Technologies Inc
Current assignee: Almex Technologies Inc
Priority date: 2021-08-04
Filing date: 2022-07-11
Publication date: 2024-03-29
Also published as: WO2023013363A1; TW202309351A; JP2023023068A

Abstract

The work holding jig (30) has: a holding part (320) for vertically holding the front and back surfaces of the workpiece; 2 power-supplied portions (340A, 340B) insulated from each other for setting the workpiece as a cathode; and 2 conductive portions (370A, 370B) insulated from each other, which conduct between the 2 power-supplied portions and the holding portion. The holding part comprises: conductive 2 plates (321A, 321B) extending parallel to one side of the workpiece and insulated from each other; and a holder (325) for holding the workpiece by sandwiching the workpiece. The holder includes a conductive 1 st holding piece (325A) in contact with the front surface of the workpiece and a conductive 2 nd holding piece (325B) in contact with the back surface of the workpiece. The 1 st clamping piece is conducted with one of the 2 power-supplied parts, the 2 conducting parts and the 2 plates, and the 2 nd clamping piece is conducted with the other of the 2 power-supplied parts, the 2 conducting parts and the 2 plates.

Description

Workpiece holding jig and surface treatment device

Technical Field

The present invention relates to a workpiece holding jig, a surface treatment apparatus, and the like.

Background

The present inventors have proposed a work holding jig including N (N is a plurality of) power-supplied portions and N conductive paths insulated from each other (patent document 1). The N conductive paths insulated from each other are conductive to different N cathode setting portions including the workpiece, and as one embodiment thereof, the front and back surfaces (2 cathode setting portions) of the workpiece are exemplified. The present inventors have also proposed a surface treatment apparatus including the workpiece holding jig (patent document 2).

On the other hand, the applicant of the present application has proposed a surface treatment apparatus in which 5 work holding jigs for holding a maximum of 5 works which can be immersed in a treatment liquid in one surface treatment tank at the same time are brought into contact with 5 rows of power supply rails connected to different rectifiers (5 rectifiers in fig. 1, and a total of 10 rectifiers in fig. 7, respectively) to supply power to the front and rear surfaces of the works (patent document 3).

Prior art literature

Patent literature

Patent document 1: japanese patent No. 6820626

Patent document 2: japanese patent No. 6744646

Patent document 3: japanese patent No. 5457010

Disclosure of Invention

Problems to be solved by the invention

However, patent documents 1 to 3 do not disclose specific configurations of a workpiece holding jig having 2 conductive paths insulated from each other and conductive to the front and rear surfaces of a workpiece, and a surface treatment apparatus using the workpiece holding jig.

The object of the present invention is to provide a work holding jig having a conductive path which is connected to the front and rear surfaces of a work with low resistance and is insulated from each other, by a structure of a holding portion necessary for the work holding jig, and a surface treatment apparatus using the work holding jig.

Another object of the present invention is to provide a surface treatment apparatus capable of individually adjusting the amount of current flowing to the front and back surfaces of a workpiece and avoiding excessive enlargement while maintaining productivity.

Means for solving the problems

(1) One aspect of the present invention relates to a workpiece holding jig, wherein,

the work holding jig has:

a holding unit that vertically holds a front surface and a rear surface of a rectangular workpiece immersed in a processing liquid;

2 mutually insulated power-supplied parts for setting the workpiece as a cathode; and

and 2 conductive parts insulated from each other, which conduct between the 2 power-supplied parts and the holding part,

the holding portion includes:

mutually insulated conductive 2 plates extending parallel to one side of the workpiece; and

a holder holding the workpiece by sandwiching the workpiece, comprising a conductive 1 st holding piece in contact with the front surface of the workpiece and a conductive 2 nd holding piece in contact with the back surface of the workpiece,

the 1 st clamping piece is conducted with one of the 2 power supplied parts, the 2 conducting parts and the 2 plates,

the 2 nd clamping piece is conducted with the other one of the 2 supplied power parts, the 2 conducting parts and the 2 plates.

According to one aspect of the present invention, a holding portion as a structure necessary for a workpiece holding jig includes: 2 plates of conductivity; and a holder including a 1 st holding piece and a 2 nd holding piece which are conductive. One of the 2 power-supplied parts, the 2 conducting parts and the 2 plates is conducted with the front surface of the workpiece through the 1 st clamping piece of the clamp. The other of the 2 power-supplied parts, the 2 conduction parts and the 2 plates is conducted with the back surface of the workpiece through the 2 nd clamping piece of the clamp. Thus, with the structure required for the work holding jig, the following work holding jig is provided: which has conductive paths connected to the front and back surfaces of the workpiece with low resistance and insulated from each other.

(2) In one embodiment (1) of the present invention, the holding portion may include an upper frame, a lower frame, and 2 vertical frames. In this case, the upper frame, the lower frame, and the 2 vertical frames each include the 2 plates, and 8 plates are provided in total. The upper frame and the lower frame are respectively provided with the clamp holder. One of the 2 plates provided to the 2 vertical frames is in conduction with one of the 2 plates provided to the lower frame, and the other of the 2 plates provided to the 2 vertical frames is in conduction with the other of the 2 plates provided to the lower frame. One of the 2 power-supplied portions, the 2 conduction portions, and the 2 plates of the upper frame is conducted with the front surface of the workpiece via the 1 st clamping piece provided on the upper frame. The other of the 2 power-supplied parts, the 2 conduction parts and the 2 plates arranged on the upper frame are conducted with the back surface of the workpiece through the 2 nd clamping piece arranged on the upper frame. One of the 2 power-supplied parts, the 2 conduction parts, the 2 vertical frames and the 2 plates of the lower frame is conducted with the front surface of the workpiece through a 1 st clamping piece arranged on the lower frame. The other of the 2 power-supplied parts, the 2 conduction parts, and the 2 plates respectively provided on the 2 vertical frames and the lower frame is conducted with the back surface of the workpiece via the 2 nd clamping piece provided on the lower frame. In this way, by using the structure necessary for the work holding jig such as the upper frame, the lower frame, and the 2 vertical frames, it is possible to provide conduction paths which are connected to the front and rear surfaces of the work with low resistance and are insulated from each other.

(3) In one aspect (2) of the present invention, the 2 vertical frames may be supported by the upper frame via an insulating member, one of the 2 plates provided on the upper frame may be insulated from the 2 plates provided on the 2 vertical frames, and the other of the 2 plates provided on the upper frame may be insulated from the 2 plates provided on the 2 vertical frames. In this way, in the holding portion, one conductive path that is conductive to the front and rear surfaces of the workpiece via the upper frame and the other conductive path that is conductive to the front and rear surfaces of the workpiece via the 2 vertical frames and the lower frame can be electrically insulated from each other.

(4) In one embodiment (3) of the present invention, the 2 conductive portions may include 1 st to 8 th conductive portions. In this case, the first 1 conduction portion conducts between one of the 2 power-supplied portions and one end of one of the 2 plates provided on the upper frame, the second 2 conduction portion conducts between one of the 2 power-supplied portions and one end of one of the 2 plates provided on the upper frame, the third 3 conduction portion conducts between the other of the 2 power-supplied portions and one end of the other of the 2 plates provided on the upper frame, the first 4 conduction portion conducts between the other of the 2 power-supplied portions and the other end of the other of the 2 plates provided on the upper frame, the first 5 conduction portion conducts between one of the 2 power-supplied portions and one of the 2 plates provided on one of the 2 vertical frames, the first 6 conduction portion conducts between one of the 2 power-supplied portions and one end of the other of the 2 plates provided on the 2 vertical frames, and the second 5 conduction portion conducts between the one of the 2 power-supplied portions and the other of the 2 plates provided on the 2 vertical frames. In this way, the 2 power-supplied portions can be electrically connected to both ends (4 ends in total) of the 2 plates provided in the upper frame by the 1 st to 4 th conductive portions. The 2 power receiving portions can be electrically connected to one ends (total of 4 other ends) of the 2 plates provided in the 2 vertical frames by the 5 th to 8 th conductive portions.

(5) In one embodiment (4) of the present invention, the resistances of the 1 st to 4 th conductive portions may be made larger than the resistances of the 5 th to 8 th conductive portions. In this way, the resistance of the path from the 1 st to 4 th conductive portions to the front and rear surfaces of the workpiece via the upper frame and the resistance of the path from the 5 th to 8 th conductive portions to the front and rear surfaces of the workpiece via the 2 vertical frames and the lower frame can be set to be substantially equal.

(6) Another aspect of the present invention relates to a surface treatment apparatus, wherein,

the surface treatment device includes:

a treatment tank in which a rectangular workpiece is immersed in a treatment liquid;

an anode disposed in the processing bath, the anode including a 1 st anode facing a front surface of the workpiece and a 2 nd anode facing a back surface of the workpiece;

8 rows of power supply rails, which are insulated from each other;

a total of 8 rectifiers including 4 rectifiers connected between 4 of the 8 column supply rails and the 1 st anode, respectively, and other 4 rectifiers connected between other 4 of the 8 column supply rails and the 2 nd anode, respectively; and

4 movable workpiece holding jigs which hold the workpieces respectively and are electrically connected with 2 columns of the 8 columns of power supply rails respectively,

the 4 work holding jigs are each the work holding jigs according to any one of the modes (1) to (5) of the present invention.

According to another aspect of the present invention, the front and back surfaces of the workpiece can be surface-treated by individually adjusting the amount of current flowing to the front and back surfaces of the workpiece using the workpiece holding jig according to any one of aspects (1) to (5) of the present invention. In order to individually adjust the amount of current flowing to the front and rear surfaces of the workpiece, the maximum number of workpiece holding jigs that can simultaneously pass through the processing bath is set to 4, whereby the number of power supply rails and rectifiers can be set to 8, respectively, whereby it is possible to avoid excessive enlargement of the surface treatment apparatus while maintaining productivity.

(7) In another aspect (6) of the present invention, the 4 rectifiers may be connected to the 4-column power supply rails of the odd-numbered columns of the 8-column power supply rails, and the other 4 rectifiers may be connected to the other 4-column power supply rails of the even-numbered columns of the 8-column power supply rails. In this way, the intervals between the 2 power receiving portions provided in the work holding jig can be made wider than the intervals between the adjacent power feeding rails. This makes it easy to secure a space for connecting 2 conductive portions to 2 power-supplied portions.

(8) In another aspect (6) of the present invention, the 4 rectifiers may be connected to the 4-column power supply rails of the 1 st to 4 th columns adjacent to each other among the 8-column power supply rails, and the other 4 rectifiers may be connected to the other 4-column power supply rails of the 5 th to 8 th columns adjacent to each other among the 8-column power supply rails. In this way, the intervals of the 2 power receiving portions provided in the work holding jig can be narrowed correspondingly to the intervals between the adjacent power feeding rails.

Drawings

Fig. 1 is a schematic plan view of a surface treatment apparatus according to an embodiment of the present invention.

Fig. 2 is a schematic perspective view showing a basic structure of a work holding jig according to an embodiment of the present invention.

Fig. 3 is a diagram for explaining a conduction path through which a current flows to the front and back surfaces of a workpiece via an upper frame.

Fig. 4 is a diagram for explaining a conduction path through which current flows to the front and rear surfaces of the workpiece via the upper frame and the lower frame.

Fig. 5 is a diagram showing the structure of the conduction path shown in fig. 4.

Fig. 6 is a diagram showing the structure of the clamper.

Fig. 7 is a schematic plan view of a surface treatment apparatus according to another embodiment of the present invention.

Detailed Description

Hereinafter, preferred embodiments of the present invention will be described in detail. The present embodiment described below does not unduly limit the content of the present invention described in the claims, and the structures described in the present embodiment are not necessarily all necessary as a means for solving the present invention.

1. Surface treatment device

Fig. 1 is a plan view schematically showing a surface treatment apparatus 1 as an embodiment of the present invention. In fig. 1, the surface treatment apparatus 1 includes a treatment tank 10, an anode 20 provided in the treatment tank 10, a workpiece holding jig 30 for conveying a workpiece (not shown in fig. 1), a rectifier 40, and a power supply rail 50. The processing tank 10 accommodates a processing liquid, such as a plating liquid, for immersing a rectangular workpiece. A plurality of processing tanks 10 may be connected to each other, and in this case, openings 11 and 12 allowing the passage of the workpiece between adjacent processing tanks 10 may be provided at both ends in the longitudinal direction of the processing tanks 10.

The anode 20 provided in the processing bath 10 includes a 1 st anode 21 facing the front surface of the workpiece and a 2 nd anode 22 facing the back surface of the workpiece. 8 rectifiers 40 (41 to 48) are provided outside the processing tank 10. Outside the processing tank 10, 8 rows of power supply rails 50 (51 to 58) insulated from each other are provided on, for example, one side portion of the processing tank 10 along the longitudinal direction of the processing tank 10. The 4 rectifiers 41 to 44 are connected between, for example, the 4-column power supply rails 51 to 54 and the 1 st anode 21 among the 8-column power supply rails 50 (51 to 58), respectively. The other 4 rectifiers 45-48 are connected between the 4-column power supply rails 55-58 and the 2 nd anode 22, respectively.

In the processing bath 10, as the workpiece holding jigs 30 that hold the workpieces and are electrically connected to 2 rows of the 8 rows of the power supply rails 50, a maximum of 4 workpiece holding jigs 31 to 34 are provided so as to be movable in the longitudinal direction of the processing bath 10. The work holding jigs 31 to 34 are sequentially carried into the processing tank 10 from the upstream side in the conveying direction a (for example, a processing tank upstream not shown), continuously moved in the processing tank 10, and sequentially carried out to the downstream side in the conveying direction a (for example, a processing tank downstream not shown).

Here, the maximum 4 work holding jigs 31 to 34 are connected to different 2 rows of power supply rails among the 8 rows of power supply rails 50 (51 to 58), respectively. In the state shown in fig. 1, the most downstream work holding jig 31 is connected to, for example, the power supply rails 51, 55 of the 1 st and 5 th columns of the odd-numbered columns. The workpiece holding fixture 32 is connected, for example, to the power supply rails 52, 56 of the 2 nd and 6 th columns of the even numbered columns. The work holding jig 33 is connected to, for example, the power supply rails 53, 57 of the 3 rd and 7 th columns of the odd numbered columns. The workpiece holding fixture 34 is connected, for example, to the power supply rails 54, 58 of the 4 th and 8 th columns of the even numbered columns. At this time, the rectifier 41 is connected to the 1 st anode 21 facing the front surface of the workpiece held by the workpiece holding jig 31 and the 1 st power supply rail 51, and adjusts the current flowing through the front surface of the workpiece held by the workpiece holding jig 31. The rectifier 45 is connected to the 2 nd anode 22 facing the back surface of the workpiece held by the workpiece holding jig 31 and the 5 th row power supply rail 55, and adjusts the current flowing through the back surface of the workpiece held by the workpiece holding jig 31. Likewise, the currents flowing on the front and rear surfaces of the workpiece held by the workpiece holding jig 32 are individually adjusted by the rectifiers 42 and 46. The currents flowing on the front and rear surfaces of the workpiece held by the workpiece holding jig 33 are individually adjusted by the rectifiers 43 and 47. The currents flowing on the front and rear surfaces of the workpiece held by the workpiece holding jig 34 are individually adjusted by the rectifiers 44 and 48.

Here, the processing liquid in the processing tank 10 is immersed in the workpiece portion held by at least one of the uppermost workpiece holding jig 31 and the lowermost workpiece holding jig 34 among the maximum 4 workpiece holding jigs 31 to 34 of the processing tank 10, and the processing liquid in the processing tank 10 is immersed in the entire surface of the maximum 3 workpieces held by the maximum 3 workpiece holding jigs 31 to 33 or 32 to 34. In fig. 1, 2 pieces of work held by both the most upstream work holding jig 31 and the most downstream work holding jig 34 are partially immersed in the processing liquid in the processing bath 10, and the entire surfaces of 2 pieces of work held by the remaining work holding jigs 32, 33 are immersed in the processing liquid in the processing bath 10. The partial immersion means a state in which a part of the treatment surface of the workpiece is immersed in the treatment liquid in the treatment tank 10. The entire surface immersion means a state in which the entire surface of the processing surface of the workpiece is completely immersed in the processing liquid in the processing tank 10. That is, the length in the longitudinal direction of the processing bath 10 is a length sufficient for impregnating the entire surface of the maximum 3 workpieces held by the maximum 3 workpiece holding jigs 30.

When the number of workpieces that can be transported in the processing bath 10 in the immersed state at the same time is N, the number of rectifiers 40 and power supply rails 50 is 2× (n+1), and this embodiment is an example of n=3. In order to achieve a desired productivity by adjusting the amount of current flowing to the front and rear surfaces of the workpiece independently, the number of connections of the processing bath 10 is increased when N is 2 or less, and the width of the surface treatment apparatus 1 including the processing bath 10 and the power supply rail 50 is increased when N is 4 or more. When n=3 in the present embodiment, it is possible to avoid excessive increase in size of the surface treatment apparatus 1 while maintaining individual adjustment and productivity of the amount of current flowing to the front and rear surfaces of the workpiece. Further, when the work is carried into and out of the processing tank 10, the rectifiers 41 to 48 can be adapted to the current flowing through the work in accordance with the gradual increase (during carrying in) or gradual decrease (during carrying out) of the processing area by the method described in patent document 3.

2. Workpiece holding jig

2.1. Basic structure

The basic structure of the work holding jig 30 is substantially the same as that shown in fig. 4 of patent document 1 and patent document 2, and the basic structure thereof is shown in fig. 2. The work holding jig 30 includes a horizontal arm 300, a vertical arm 310, a holding portion 320 for holding a work, a guided portion 330, a power-supplied portion 340, a pushed piece 350, and an engaged portion 360. The horizontal arm 300 extends along a direction B orthogonal to the conveying direction a. The vertical arm 310 is suspended from the horizontal arm 300. The holding portion 320 is fixed to the vertical arm portion 310 via a support frame 311. The holding portion 320 includes an upper frame 321, 2 vertical frames 322 and 323 supported to the upper frame 321 so as to be movable up and down, and a lower frame 324 fixed to the 2 vertical frames 322 and 323. A plurality of upper grippers 325 are provided on the upper frame 321 for gripping the upper edge of the workpiece. A plurality of lower grippers 326 are provided on the lower frame 324 for gripping the lower edge of the workpiece. A downward tension is imparted to the workpiece by the lower clamp 326. However, in the case where the workpiece is thick and/or power is not supplied from the lower portion of the workpiece, the 2 vertical frames 322, 323, the lower frame 324, and the lower holder 326 may be omitted.

The guided portion 330 is guided by a guide rail (not shown) provided in the surface treatment apparatus 1, and guides the workpiece holding jig 30 linearly. The guided portion 330 may include: a roller 331 in rolling contact with the top surface of the guide rail; and rollers 332 (only one roller in rolling contact with one side is illustrated in fig. 2) in rolling contact with both side surfaces of the guide rail.

The 1 st and 2 nd power feeding sections 340A and 340B as the power feeding sections 340 are in contact with the different 2 nd power feeding rails among the 8 th power feeding rails 50 (51 to 58) shown in fig. 1, and the front and back surfaces of the workpiece are set as cathodes, respectively, independently. The 1 st and 2 nd power-supplied portions 340A and 340B include 2 contacts 342 and 343 supported on the upstream side and the downstream side of the 1 st and 2 nd support arms 341A and 341B extending in the conveying direction a, respectively. The contacts 342, 343 are supported by the supporting arm 341 via a parallel link mechanism, and are spring-biased so as to be pressed against the 8-row power supply rail 50 shown in fig. 1. The 4 work holding jigs 31 to 34 shown in fig. 1 can be brought into contact with different 2 row power supply rails of the 8 row power supply rails 50 (51 to 58) shown in fig. 1 by making the positions of the 1 st and 2 nd power supply sections 340A, 340B different in the B direction shown in fig. 2. Therefore, the work holding jig 30 is preferably capable of adjusting the positions at which the 1 st and 2 nd support arms 341A and 341B are fixed with respect to the horizontal arm 300 in the B direction shown in fig. 2. Thus, by adjusting one type of the work holding jig 30, four types of the work holding jigs 31 to 34 shown in fig. 1 can be prepared.

The work holding jig 30 may have both the pushed piece 350 and the engaged portion 360. The engaged portion 360 can continuously convey the workpiece holding jig 30 by engaging with a continuously moving chain, for example. The pushed piece 350 is pushed in the arrow C direction by the intermittent feeding device, thereby transmitting the intermittent feeding force to the work holding jig 30. In this way, the work holding jig 30 can be used for both intermittent conveyance and continuous conveyance. However, the work holding jig 30 may be used for only one of intermittent conveyance and continuous conveyance.

2.2. Structure for individually adjusting current flowing through front and back surfaces of workpiece

In fig. 2, 2 conductive portions that electrically conduct and insulate the 1 st and 2 nd power-supplied portions 340A and 340B of the workpiece holding jig 30 from the holding portion 320, and conductive paths provided in the holding portion 320 are omitted. Fig. 3 and 6 show a conductive path for setting the workpiece as a cathode via the upper frame 321 in the holding portion 320.

In fig. 3, as shown in fig. 6, the holding portion 320 of the work holding jig 30 has 2 plates 321A, 321B of conductivity insulated from each other, such as the upper frame 321. The holder 325 supported by the upper frame 321 of the workpiece holding jig 30 has a 1 st holding piece 325A and a 2 nd holding piece 325B which are insulated from each other in conductivity. The work holding jig 30 further includes 2 conductive portions 370A and 370B that electrically conduct and insulate the 2 power-supplied portions 340A and 340B from the upper frame 321 (the holding portion 320). The negative terminal of the rectifier 41 is electrically connected to the front surface of the workpiece via the power supply rail 51, the 1 st power-supplied portion 340A, the conductive portion 370A, the plate 321A, and the 1 st clip 325A. On the other hand, the negative terminal of the rectifier 45 is electrically connected to the back surface of the workpiece via the power supply rail 55, the 2 nd power-supplied portion 340B, the conductive portion 370B, the plate 321B, and the 2 nd clip 325B. In this way, the current flowing from the rectifier 41 to the front surface of the workpiece and the current flowing from the rectifier 45 to the back surface of the workpiece can be adjusted independently by the rectifiers 41 and 45, respectively.

Fig. 4 and 5 more specifically show a path of current flowing from the upper edge of the workpiece to the front and rear sides of the workpiece via the upper frame 321 of the workpiece holding jig 30, and a path of current flowing from the lower edge of the workpiece to the front and rear sides of the workpiece via the 2 vertical frames 322, 323 and the lower frame 324 of the workpiece holding jig 30. The 2 conductive portions 370A and 370B shown in fig. 3 are configured to include the members 371 to 376 and the 1 st to 8 th conductive portions 381 to 388 shown in fig. 4 and 5.

The 2 contacts 342 and 343 provided in the 1 st power-supplied portion 340A are electrically connected to the common connection portion 373 via, for example, cables 371 and 372. Similarly, the 2 contacts 342 and 343 provided in the 2 nd power-supplied portion 340B are electrically connected to the common connection portion 376 via cables 374 and 375, for example. The cables 371, 372, 374, 375 can be led to the common connection portions 373, 376 supported by the vertical arm portion 310 of the work holding jig 30 or the support frame 311, for example, via between the 1 st and 2 nd support arms 341A, 341B shown in fig. 2. At this time, as shown in fig. 1, for example, when the work holding jig 31 is brought into contact with the power supply rail 51 of the 1 st row and the power supply rail 55 of the 5 th row, the spacing between the 1 st and 2 nd supporting arms 341A, 341B is enlarged, and the cables 371, 372, 374, 375 are easily led around.

As shown in fig. 5, the vertical frame 322 is formed by arranging 2 parallel conductive plates 322A and 322B in parallel with a gap therebetween. The vertical frame 323 is formed by arranging 2 parallel conductive plates 323A and 323B in parallel with a gap therebetween. The lower frame 324 is formed by arranging 2 parallel conductive plates 324A and 324B in parallel with a gap therebetween. One end of plate 324A is connected to the lower end of plate 322A, and the other end of plate 324A is connected to the lower end of plate 323A. Similarly, one end of plate 324B is connected to the lower end of plate 322B, and the other end of plate 324B is connected to the lower end of plate 323B. As shown in fig. 5 and 6, the upper frame 321 is also configured by arranging 2 parallel conductive plates 321A and 321B in parallel with a gap therebetween. In order to secure the strength of the upper frame 321, an insulating member 321C (fig. 6) may be disposed between the plates 321A and 321B. Further, as shown in fig. 5, the plate 321A of the upper frame 321 is coupled to a conductive member 391 extending in the longitudinal direction. The plate 321B of the upper frame 321 is coupled to the conductive member 392 extending in the longitudinal direction. The conductive members 391, 392 extend in parallel in the longitudinal direction. The 2 vertical frames 322 and 323 may be supported by the upper frame 321 so as to be electrically insulated from the upper frame 321. In the present embodiment, the plates 322A and 323A in the vertical frames 322 and 323 are supported via the conductive member 391 and an insulator (not shown), and the plates 322B and 323B in the vertical frames 322 and 323 are supported via the conductive member 391 and the insulator (not shown). The 2 vertical frames 322 and 323 may be electrically insulated from the upper frame 321 and supported to be vertically movable on the upper frame 321. In this way, tension can be applied to the lower end of the workpiece.

The 1 st conductive portion 381 conducts between the common connection portion 373 connected to the 1 st power-supplied portion 340A and one end (for example, the left end) of the plate 321A provided in the upper frame 321 via a conductive member 391 connected to one end of the plate 321A. The 2 nd conduction unit 382 conducts between the common connection unit 373 connected to the 1 st power-supplied unit 340A and the other end (for example, the right end) of the plate 321A provided in the upper frame 321 via a conductive member 391 (not shown in fig. 5) connected to the other end of the plate 321A. In this way, the 1 st power-supplied portion 340A can be electrically connected to both ends of the board 321A provided in the upper frame 321 by the 1 st conductive portion 381 and the 2 nd conductive portion 382.

The 3 rd conduction unit 383 conducts between the common connection unit 376 connected to the 2 nd power-supplied unit 340B and one end (for example, the left end) of the plate 321B provided in the upper frame 321 via a conductive member 392 (not visible in fig. 5, overlapping the conductive member 391) connected to one end of the plate 321B. The 4 th conduction part 384 conducts between the common connection part 376 connected to the 2 nd power-supplied part 340B and the other end (for example, the right end) of the plate 321B provided in the upper frame 321 via the conductive member 392 connected to the other end of the plate 321B. In this way, the 2 nd power-supplied portion 340B can be electrically connected to both ends of the board 321B provided in the upper frame 321 by the 3 rd conductive portion 383 and the 4 th conductive portion 384.

The 5 th conduction portion 385 conducts between the common connection portion 373 connected to the 1 st power-supplied portion 340A and the plate 322A provided in the vertical frame 322. The 6 th conduction unit 386 conducts between the common connection unit 373 connected to the 1 st power-supplied unit 340A and the plate 323A provided on the vertical frame 323. In this way, the 1 st power-supplied portion 340A can be electrically connected to the upper ends of the boards 322A, 323A provided in the 2 vertical frames 322, 323 by the 5 th conductive portion 385 and the 6 th conductive portion 386. The plates 322A, 323A are connected to both ends of the plate 324A of the lower frame 324, and therefore the 1 st power-supplied portion 340A can be electrically connected to the plate 324A of the lower frame 324.

The 7 th conduction part 387 conducts between the common connection part 376 connected to the 2 nd power-supplied part 340B and the plate 322B provided on the vertical frame 322. The 8 th conducting portion 388 conducts between the common connection portion 376 connected to the 2 nd power-supplied portion 340B and the plate 323B provided on the vertical frame 323. In this way, the power feeding 2 unit 340B can be electrically connected to the upper ends of the plates 322B and 323B provided in the 2 vertical frames 322 and 323 by the 7 th and 8 th conductive parts 387 and 388. The plates 322B and 323B are connected to both ends of the plate 324B of the lower frame 324, and therefore the 2 nd power-supplied portion 340B can be electrically connected to the plate 324B of the lower frame 324.

Here, the resistances of the 1 st to 4 th conductive portions 381 to 384 can be made larger than the resistances of the 5 th to 8 th conductive portions 385 to 388. The 1 st to 4 th conductive portions 381 to 384 are respectively conductive to the upper frame 321 which is closer to the upper frame, whereas the 5 th to 8 th conductive portions 385 to 388 are conductive to the lower frame 324 via the 2 vertical frames 322, 323. Therefore, in order to equalize the resistances of the conduction paths from the common connection portions 373, 376 to the upper frame 321 and the resistances of the conduction paths from the common connection portions 373, 376 to the lower frame 324, the resistances of the 1 st to 4 th conduction portions 381 to 384 are increased, respectively. Specifically, as shown in fig. 5, the 1 st to 4 th conductive portions 381 to 384 are each formed of, for example, a metal plate bent in an L-shape, while the 5 th to 8 th conductive portions 385 to 388 are each formed of a cable.

Fig. 6 shows a holder, such as upper holder 325. The lower gripper 326 can also be configured in the same way. The upper holder 325 is supported by a pair of plates 321A, 321B of the upper frame 321. The upper clamp 325 may include a 1 st clamp piece 325A supported (e.g., fixed) to the plate 321A, and a 2 nd clamp piece 325B movably supported to the plate 321B. The 2 nd clip 325B is rotatably supported by a coil spring 325C in the direction of arrow D so as to be rotatable about a fulcrum 325D provided in the plate 321B, for example. In fig. 6, since no workpiece is present, the 1 st and 2 nd holding pieces 325A, 325B are crimped. After the 2 nd clamp piece 325B is rotated in the direction opposite to the arrow D direction by an external force, a workpiece is placed between the 1 st and 2 nd clamp pieces 325A, 325B, and when the external force is released, the workpiece is clamped between the 1 st and 2 nd clamp pieces 325A, 325B. Thus, the 1 st and 2 nd clamp pieces 325A, 325B are electrically insulated by the work piece. In this way, the current flowing through the plate 321A and the 1 st clamp piece 325A on the front surface of the workpiece and the current flowing through the plate 321B and the 2 nd clamp piece 325B on the back surface of the workpiece can be electrically separated.

3. Modification examples

The electrical connection between the work holding jig 30 and the power supply rail 50 may be as shown in fig. 7, unlike in fig. 1. In fig. 7, 4 rectifiers 41 to 44 are connected to 4 column power supply rails 51 to 54 of 1 st to 4 th columns adjacent to each other out of 8 column power supply rails 51 to 58, and other 4 rectifiers 45 to 48 are connected to 4 column power supply rails 55 to 58 of 5 th to 8 th columns adjacent to each other out of 8 column power supply rails 51 to 58, respectively. In this way, the intervals between the 2 power feeding portions 340A and 340B provided in the workpiece holding jig 30 can be narrowed uniformly with the intervals between the adjacent power feeding rails.

Further, for example, as in japanese patent No. 6909526 of the present applicant, a conductive separator may be provided, which is disposed so as to be close to an edge portion of the work between 2 adjacent grippers among the plurality of grippers 325, 326. In this case, 2 separators can be provided corresponding to the front and back surfaces of the workpiece. The conduction paths for the 2 spacers may also serve as conduction paths for conduction to the 1 st and 2 nd holding pieces of the holders located on both sides of the 2 spacers.

Description of the reference numerals

1: a surface treatment device; 10: a treatment tank; 11. 12: an opening; 20: an anode; 21: anode 1; 22: anode 2; 30 (31-38): eight rows of power supply rails; 40 (41-48): a rectifier; 50 (51-54): a workpiece holding jig; 320: a holding section; 321: an upper frame; 321A, 321B:2 plates; 322. 323:2 longitudinal frames; 322A, 322B:2 plates; 323A, 323B:2 plates; 324: a lower frame; 324A, 324B:2 plates; 325: a holder; 326: a holder; 325A: a 1 st clamping piece; 325B: a 2 nd clamping piece; 340A, 340B: the 1 st and the 2 nd power supply parts; 370A, 370B:2 conducting parts; 381-388: 1 st to 8 th conductive portions.

Claims

1. A workpiece holding jig, wherein,

the work holding jig has:

the holding portion includes:

2. The workpiece holding fixture of claim 1, wherein,

the holding part comprises an upper frame, a lower frame and 2 longitudinal frames,

the upper frame, the lower frame, and the 2 vertical frames each include the 2 plates and are provided with 8 plates in total,

the upper frame and the lower frame are respectively provided with the clamp holder,

one of the 2 plates respectively provided to the 2 vertical frames is conducted with one of the 2 plates provided to the lower frame,

the other of the 2 plates provided to the 2 vertical frames is in conduction with the other of the 2 plates provided to the lower frame.

3. The workpiece holding jig according to claim 2, wherein,

the 2 vertical frames are supported by the upper frame via insulating members,

one of the 2 plates provided to the upper frame is electrically insulated from the 2 plates provided to the 2 vertical frames, respectively,

the other of the 2 plates provided to the upper frame is electrically insulated from the 2 plates provided to the 2 vertical frames, respectively.

4. The workpiece holding jig according to claim 3, wherein,

the 2 conducting parts comprise 1 st conducting part to 8 th conducting part,

the 1 st conduction part conducts between one of the 2 power-supplied parts and one end of one of the 2 plates provided on the upper frame,

the 2 nd conduction part conducts between one of the 2 power-supplied parts and the other end of one of the 2 boards provided on the upper frame,

the 3 rd conduction part conducts between the other one of the 2 power-supplied parts and one end of the other one of the 2 boards provided to the upper frame,

the 4 th conduction part conducts between the other of the 2 power-supplied parts and the other of the 2 boards provided on the upper frame,

the 5 th conduction part conducts between one of the 2 power-supplied parts and one of the 2 boards provided on one of the 2 vertical frames,

the 6 th conduction part conducts between one of the 2 power-supplied parts and one of the 2 boards provided on the other of the 2 vertical frames,

the 7 th conduction part conducts between the other one of the 2 power-supplied parts and the other one of the 2 boards provided on one of the 2 vertical frames,

the 8 th conduction part conducts between the other one of the 2 power-supplied parts and the other one of the 2 boards provided on the other one of the 2 vertical frames.

5. The workpiece holding fixture of claim 4, wherein,

the resistances of the 1 st to 4 th conductive portions are larger than the resistances of the 5 th to 8 th conductive portions.

6. A surface treatment apparatus, wherein,

the surface treatment device includes:

8 rows of power supply rails which are insulated from each other and are arranged in parallel;

the 4 work holding jigs are the work holding jigs according to any one of claims 1 to 5, respectively.

7. The surface treatment apparatus according to claim 6, wherein,

the 4 rectifiers are respectively connected with the 4 column power supply rails of the odd columns of the 8 column power supply rails,

the other 4 rectifiers are respectively connected with the other 4 column power supply rails of the even numbered column of the 8 column power supply rails.

8. The surface treatment apparatus according to claim 6, wherein,

the 4 rectifiers are respectively connected with the 4 row power supply rails of the 1 st to 4 th rows adjacent to each other in the 8 row power supply rails,

the other 4 rectifiers are respectively connected with the other 4-column power supply rails of the 5 th to 8 th columns adjacent to each other in the 8-column power supply rails.