TW202306947A - 感光化射線性或感放射線性樹脂組成物、光阻膜、圖案形成方法、電子元件之製造方法及化合物 - Google Patents

感光化射線性或感放射線性樹脂組成物、光阻膜、圖案形成方法、電子元件之製造方法及化合物 Download PDF

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TW202306947A
TW202306947A TW111114315A TW111114315A TW202306947A TW 202306947 A TW202306947 A TW 202306947A TW 111114315 A TW111114315 A TW 111114315A TW 111114315 A TW111114315 A TW 111114315A TW 202306947 A TW202306947 A TW 202306947A
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group
radiation
general formula
sensitive
formula
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戸次洋佑
小島雅史
後藤研由
藤巻錦
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日商富士軟片股份有限公司
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KR102537251B1 (ko) 2018-06-28 2023-05-26 후지필름 가부시키가이샤 감활성광선성 또는 감방사선성 수지 조성물, 패턴 형성 방법, 전자 디바이스의 제조 방법, 수지
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KR102634581B1 (ko) 2019-01-28 2024-02-08 후지필름 가부시키가이샤 감활성광선성 또는 감방사선성 수지 조성물, 레지스트막, 패턴 형성 방법, 전자 디바이스의 제조 방법
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