TW202304018A - Power generation element, power generation device, electronic device, and method for manufacturing power generation element - Google Patents

Abstract

To provide a power generation element, a power generation device, an electronic device, and a method for manufacturing a power generation element, which can suppress a decrease in power generation efficiency due to the adhesion of nanoparticles. A power generation element 1 for converting thermal energy into electrical energy comprises: a first substrate 15 and a second substrate 16 spaced apart from each other along a first direction Z; a first electrode 11 provided on the main surface of the first substrate 15; a second electrode 12 spaced apart from the first electrode 11 and provided on the main surface of the second substrate 16, and having a higher work function than the first electrode 11; an intermediate part 14 provided between the first electrode 11 and the second electrode 12 and containing a solvent 142 in which nanoparticles 141 are dispersed; a support part 17 provided in contact with and between the first substrate 15 and the second substrate 16 and spaced apart from the immediate part 14, and containing metal; and a protective part 22 that is provided between the intermediate part 14 and the support part 17, is in contact with the intermediate part 14, and has insulating properties.

Description

Power generating element, power generating device, electronic device and method for manufacturing power generating element

This invention relates to a power generating element for converting thermal energy into electrical energy, a power generating device, an electronic device and a method for manufacturing the power generating element.

In recent years, the development of power generating elements that utilize thermal energy to generate electrical energy has been flourishing. In particular, regarding a power generating element that does not require a temperature difference, for example, the power generating element disclosed in Patent Document 1 has been proposed. Such a power generating element is expected to be used in various applications as compared with a configuration in which electrical energy is generated by applying a temperature difference to electrodes.

A thermoelectric element is disclosed in Patent Document 1, which has: a first substrate having a first major surface; a second substrate having a second main surface facing the first main surface; a first electrode portion isolated from a second substrate; a second electrode portion having a work function different from that of the first electrode portion; a metal-containing support portion disposed between the first substrate and the second substrate, isolated from the first electrode portion and the second electrode portion; and An intermediate portion containing nanoparticles is provided between the first electrode portion and the second electrode portion. [Prior Art Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2020-47631

(Problem to be solved by the invention)

Here, in the case of a power generating element that does not require a temperature difference, uninterrupted power generation is expected, but there is a risk of nanoparticles adhering to the side surfaces of the metal-containing support. In this case, as a problem, since the amount of nanoparticles dispersed between the electrodes decreases, the power generation efficiency decreases over time. In this regard, Patent Document 1 makes it difficult to solve the above-mentioned problems.

Therefore, the present invention was developed in view of the above-mentioned problems, and an object of the present invention is to provide a power generation element, a power generation device, an electronic device, and a method of manufacturing a power generation element that can suppress a decrease in power generation efficiency. (means to solve the problem)

The power generating element of the first invention is a power generating element that converts thermal energy into electrical energy, and is characterized in that it has: a first substrate and a second substrate arranged in isolation from each other along the first direction; a first electrode provided on the main surface of the first substrate; A second electrode having a higher work function than the first electrode, provided on the main surface of the second substrate separated from the first electrode; An intermediate part that is provided between the first electrode and the second electrode and contains a medium for dispersing the nanoparticles; a metal-containing support portion provided in contact with the first substrate and the second substrate, and isolated from the intermediate portion; and An insulating protective portion provided between the intermediate portion and the support portion, in contact with the intermediate portion.

A power generating element according to a second invention is characterized in that in the first invention, the protective portion is provided separately from the supporting portion.

A power generating element according to a third invention is characterized in that in the second invention, the protective portion is provided in contact between the first electrode and the second electrode.

A power generating element according to a fourth invention is characterized in that in the first invention, the support portion is separated from the first electrode and the second electrode.

A power generating element according to a fifth invention is characterized in that in the first invention, it further includes a penetrating portion provided on at least one of the first substrate and the second substrate.

A power generating element according to a sixth invention is characterized in that in the fifth invention, the penetrating portion is isolated from the first electrode and the second electrode when viewed from the first direction.

The power generating device of the seventh invention is characterized in that it has: The power generating element of the first invention; a first wiring electrically connected to the aforementioned first electrode; and A second wiring electrically connected to the second electrode.

The electronic device of the eighth invention is characterized in that it has: the power generating element of the first invention; and An electronic component that is driven by using the aforementioned power generating element as a power source.

The method of manufacturing a power generating element according to the ninth invention is characterized by comprising: An electrode forming step of forming a first electrode on the main surface of the first substrate, and forming a second electrode having a higher work function than the first electrode on the main surface of the second substrate; a support portion forming step of forming a metal-containing support portion on at least one of above the main surface of the first substrate and above the main surface of the second substrate; A protective portion forming step of forming an insulating protective portion on at least one of the upper surface of the first substrate and the upper surface of the second substrate; a bonding step of bonding the first substrate and the second substrate through the supporting portion in such a manner that the first electrode and the second electrode face each other in a first direction; and The intermediate part forming step is to form the intermediate part containing the medium in which the nanoparticles are dispersed in such a manner that it is in contact with the protective part and separated from the support part. [Effect of the invention]

According to the first invention to the eighth invention, it includes: a metal-containing support part isolated from the middle part; and an insulating protective part provided between the middle part and the support part and in contact with the middle part. Therefore, reduction in the amount of nanoparticles dispersed between the electrodes can be suppressed. Thereby, reduction in power generation efficiency can be suppressed.

According to 2nd invention especially, a protection part is provided separately from a support part. Therefore, when the first substrate and the second substrate are bonded via the support portion, it is possible to prevent, for example, a decrease in bonding force caused by the contact of the protective portion with the support portion. Thereby, the first substrate and the second substrate can be firmly bonded by the support portion.

In particular, according to the third invention, the protective portion is provided in contact between the first electrode and the second electrode. Therefore, the protective portion can be fixed more firmly to the first electrode and the second electrode than in the case of fixing the protective portion to the first substrate and the second substrate. Thereby, fluctuation|variation of a protection part can be suppressed.

In particular, according to the fourth invention, the supporting portion is separated from the first electrode and the second electrode. Therefore, it is possible to prevent the electrodes from being short-circuited via the support portion.

In particular, according to the fifth invention, the penetrating portion provided on at least one of the first substrate and the second substrate is further provided. Therefore, the intermediate portion can be filled between the first electrode and the second electrode via the penetrating portion. Thereby, the simplification of the manufacturing process of a power generating element can be aimed at. Also, when the intermediate portion needs to be replaced as the power generating element is used, the intermediate portion can be easily replaced.

In particular, according to the sixth invention, the penetrating portion is isolated from the first electrode and the second electrode when viewed from the first direction. Therefore, when foreign matter is mixed into the intermediate portion between the first electrode and the second electrode through the penetrating portion, it is possible to suppress foreign matter from adhering to the first electrode and the second electrode. Thereby, deterioration of the quality of a power generating element can be suppressed.

According to the ninth invention, in the intermediate portion forming step, the intermediate portion containing the medium in which the nanoparticles are dispersed is formed so as to be in contact with the protective portion and separated from the support portion. Therefore, reduction in the amount of nanoparticles dispersed between the electrodes can be suppressed. Thereby, reduction in power generation efficiency can be suppressed.

Hereinafter, an example of a power generation element, a power generation device, an electronic device, a power generation method, and a method of manufacturing a power generation element according to an embodiment of the present invention will be described with reference to the drawings. In addition, in each figure, let the height direction of stacking each electrode be the first direction Z, let a plane direction intersecting with the first direction Z, for example, be perpendicular to the second direction X, and let the first direction Z Another planar direction intersecting, for example, perpendicular to each of the second direction X is referred to as a third direction Y. In addition, the structure of each figure is shown schematically for description, For example, the size of each structure, the comparison of the size of each structure, etc. may differ from a figure.

(First embodiment: power generating element 1, power generating device 100) FIG. 1 is a schematic diagram showing an example of a power generating element 1 and a power generating device 100 according to the present embodiment. Fig. 1(a) is a schematic sectional view showing an example of a power generating element 1 and a power generating device 100 according to the present embodiment, and Fig. 1(b) is a schematic plan view along line A-A of Fig. 1(a).

(power generation device 100) As shown in FIG. 1( a ), the power generating device 100 includes a power generating element 1 , a first wiring 101 , and a second wiring 102 . The power generating element 1 converts thermal energy into electrical energy. The power generating device 100 including such a power generating element 1 is, for example, mounted or installed on a heat source (not shown), and uses the thermal energy of the heat source as a source to transmit electrical energy generated from the power generating element 1 through the first wiring 101 and the second wiring 102. to output to load R. One end of the load R is electrically connected to the first wiring 101 , and the other end is electrically connected to the second wiring 102 . The load R is, for example, an electrical device. The load R is driven, for example, by using the power generator 100 as a main power source or an auxiliary power source.

As the heat source of the power generating element 1, for example, an electronic device or electronic component such as a CPU (Central Processing Unit), a light emitting element such as an LED (Light Emitting Diode), an engine such as an automobile, production equipment in a factory, the human body, sunlight, and ambient temperature, etc. For example, electronic devices, electronic parts, light-emitting elements, engines, and production equipment are artificial heat sources. The human body, sunlight and ambient temperature are natural heat sources. The power generating device 100 including the power generating element 1 can be installed inside portable devices such as IoT (Internet of Things) devices and wearable devices, or self-supporting sensor terminal devices, and can be used as a battery replacement or auxiliary device. use. Furthermore, it is also possible to apply the power generation device 100 to a larger power generation device such as photovoltaic power generation.

(generating element 1) The power generating element 1 converts, for example, the thermal energy emitted by the artificial heat source or the thermal energy held by the natural heat source into electrical energy to generate electric current. The power generating element 1 is not only installed in the power generating device 100, but the power generating element 1 itself may be installed inside the above-mentioned portable device or the above-mentioned self-supporting sensor terminal device. In this case, the power generating element 1 itself can be used as a replacement part or an auxiliary part of a battery of the above-mentioned portable device or the above-mentioned self-supporting sensor terminal device.

The power generating element 1 is, for example, as shown in FIG. The power generating element 1 may further include a penetration portion 18 and a sealing portion 21 .

The first substrate 15 and the second substrate 16 are separated from each other along the first direction Z. The first electrode 11 is provided on the main surface of the first substrate 15 . The second electrode 12 is provided on the main surface of the second substrate 16 in isolation from the first electrode 11 , and has a higher work function than that of the first electrode 11 . The first electrode 11 and the second electrode 12 are provided to face each other. The intermediate portion 14 is provided, for example, in a space 140 including a space (gap G) between the first electrode 11 and the second electrode 12 as shown in FIG. 2 . The middle part 14 contains nanoparticles 141 and a solvent 142 . The nanoparticles 141 are dispersed in the solvent 142 and promote the supply of electrons to the respective electrodes 11 and 12 .

The supporting portion 17 is provided in contact with the first substrate 15 and the second substrate 16 , is separated from the intermediate portion 14 , and contains metal. The protection part 22 is provided between the intermediate part 14 and the support part 17, contacts the intermediate part 14, and has insulation. Therefore, the nanoparticles 141 are not in contact with the support portion 17 , so the nanoparticles 141 can be prevented from adhering to the support portion 17 .

Here, the inventors found that the nanoparticles 141 used in the power generating element 1 tend to adhere more easily to metal materials than to insulator materials. In consideration of this point, the protection portion 22 of the power generating element 1 of the present embodiment has insulating properties. Therefore, the amount of nanoparticles 141 attached to the protection part 22 can be greatly reduced compared with the support part 17 . Thereby, the decrease of the amount of the nanoparticles 141 dispersed between the electrodes can be suppressed. Therefore, reduction in power generation efficiency can be suppressed.

Hereinafter, details about each configuration will be described.

<First electrode 11, second electrode 12> The first electrode 11 and the second electrode 12 are spaced apart as shown in FIG. 1( a ), for example. The first electrode 11 and the second electrode 12 are separated in the first direction Z, for example. The first electrode 11 and the second electrode 12 may be spaced apart in the second direction X or the third direction Y, for example.

Each of the electrodes 11 and 12 extends in, for example, the second direction X and the third direction Y, and a plurality of them may be provided. For example, one second electrode 12 may be provided to face each of the plurality of first electrodes 11 at different positions. Also, for example, one first electrode 11 may be provided to face each of the plurality of second electrodes 12 at different positions.

The first electrode 11 and the second electrode 12 have different work functions, for example. As the material of the first electrode 11 and the second electrode 12, a material having conductivity can be used. As the material of the first electrode 11 and the second electrode 12 , for example, the same material may be used as the electrodes 11 and 12 , and in this case, each may have a different work function.

As a material of each electrode 11, 12, for example, a material composed of a single element such as iron, aluminum, copper or the like may be used, for example, an alloy material composed of two or more types of elements may be used. As a material of each electrode 11, 12, for example, a non-metallic conductor can also be used. Examples of non-metallic conductors include carbon-based materials such as silicon (Si: eg, p-type Si or n-type Si) and graphene.

The thickness along the first direction Z of the first electrode 11 and the second electrode 12 is, for example, not less than 4 nm and not more than 1 μm. The thickness along the first direction Z of the first electrode 11 and the second electrode 12 is, for example, not less than 4 nm and not more than 50 nm.

The gap G indicating the distance between the first electrode 11 and the second electrode 12 is, for example, the length along the first direction Z as shown in FIG. 2 . For example, by shortening the gap G, the power generation efficiency of the power generating element 1 can be increased. Also, for example, by shortening the gap G, the thickness of the power generating element 1 along the first direction Z can be reduced. For this purpose, the gap G is preferably short.

The gap G is, for example, a limited value of 10 μm or less. When the gap G is, for example, 1 μm or more and 5 μm or less, it is possible to suppress the influence of the variation of the gap G on the power generation efficiency. When the gap G is, for example, not less than 10 nm and not more than 100 nm, power generation efficiency can be improved. The gap G is determined not only by the thickness of the supporting portion 17 but also by the arrangement conditions of the electrodes 11 and 12 when the electrodes 11 and 12 are provided on the same substrate, for example.

＜Middle part 14＞ The intermediate portion 14 is provided in a space 140 formed between the electrodes 11 , 12 . The intermediate portion 14 is in contact with, for example, the side surfaces of the electrodes 11 and 12 in addition to the opposing main surfaces of the electrodes 11 and 12 . The middle part 14 also contains, for example, a plurality of types of nanoparticles 141 .

The particle diameter of the nanoparticles 141 is a finite value smaller than the gap G. The particle diameter of the nanoparticles 141 is, for example, a finite value of 1/10 or less of the gap G. If the particle size of the nanoparticles 141 is set to be 1/10 or less of the gap G, the intermediate portion 14 including the nanoparticles 141 in the space 140 can be easily formed. Thereby, workability can be improved when generating the power generating element 1 .

Here, the term "nanoparticles" means those containing plural particles. The nanoparticles 141 are, for example, particles having a particle diameter of 2 nm to 100 nm. Nanoparticles 141 may contain, for example, particles with a median diameter (central diameter: D50) of 3 nm to 8 nm, and particles with an average particle diameter of 3 nm to 8 nm. The median diameter or average particle diameter can be measured by using, for example, a particle size distribution analyzer. As the particle size distribution measuring device, for example, a particle size distribution measuring device using a dynamic light scattering method (for example, Zetasizer Ultra manufactured by Malvern Panalytical, etc.) may be used.

The nanoparticles 141 contain, for example, a conductive material. The value of the work function of the nanoparticles 141 is, for example, between the value of the work function of the first electrode 11 and the value of the work function of the second electrode 12, and can also be, for example, between the value of the work function of the first electrode 11 and the value of the work function of the second electrode 12. Any value other than the value of the work function of the 2 electrodes 12 is between.

As an example of the material of the nanoparticles 141, at least one of gold and silver can be selected. In addition, the nanoparticles 141 may also contain metal oxides, for example. As nanoparticles 141 containing metal oxides, for example, zirconia (ZrO ₂ ), titanium dioxide (TiO ₂ ), silicon dioxide (SiO ₂ ), aluminum oxide (Al ₂ O ₃ ), iron oxide (Fe ₂ O _3. Fe ₂ O ₅ ), copper oxide (CuO), zinc oxide (ZnO), yttrium oxide (Y ₂ O3), niobium oxide (Nb ₂ O ₅ ), molybdenum oxide (MoO ₃ ), indium oxide (In ₂ O ₃ ), tin oxide (SnO ₂ ), tantalum oxide (Ta ₂ O ₅ ), tungsten oxide (WO ₃ ), lead oxide (PbO), bismuth oxide (Bi ₂ O ₃ ), cerium oxide (CeO ₂ ), antimony oxide A metal oxide of at least any one element selected from the group consisting of metal and Si such as (Sb ₂ O ₅ , Sb ₂ O ₃ ).

In addition, when the nanoparticles 141 contain metal oxides, the dispersibility to the solvent 142 can be improved, and the reduction in power generation efficiency due to the aggregation of the nanoparticles 141 can be suppressed. In addition, since the nanoparticles 141 contain metal oxides, not only the options of materials can be increased, but also the cost of materials can be reduced.

In addition, materials other than magnetic substances may also be used as the nanoparticles 141 . For example, when a magnetic substance is used as the nanoparticles 141 , the movement of the nanoparticles 141 is restricted by a magnetic field generated due to the environment in which the power generating element 1 is installed. Therefore, by using a material other than a magnetic substance as the nanoparticle 141, it is possible to suppress a decrease in power generation efficiency over time without being affected by a magnetic field caused by the external environment.

The nanoparticles 141 include, for example, a coating 141a on the surface. The thickness of the coating film 141a is, for example, a limited value of 20 nm or less. By providing such a film 141 a on the surface of the nanoparticles 141 , for example, aggregation of the nanoparticles 141 in the space 140 can be suppressed. In addition, for example, the possibility of electrons moving between the first electrode 11 and the nanoparticles 141 and between the second electrode 12 and the nanoparticles 141 can be increased by utilizing the tunneling effect or the like.

For example, a material having a thiol group or a disulfide group can be used as the coating film 141a. For example, alkanethiol such as dodecanethiol can be used as the material having a thiol group. For example, alkane disulfide or the like can be used as the material having a disulfide group.

The solvent 142 is, for example, an organic solvent. As the organic solvent, for example, aromatic hydrocarbon compounds, aromatic ester compounds, aromatic ether compounds, aromatic ketone compounds, aliphatic hydrocarbon compounds, aliphatic ester compounds, aliphatic ether compounds, aliphatic ketone compounds, and ethanol compounds can be used , amide compound, thiol compound, other compounds, etc., instead of one type, two or more types may be used. Since the solvent 142 contains an organic solvent, material cost can be reduced.

In addition, other than the above-mentioned materials, for example, dimethylsulfone, acetone, chloroform, dichloromethane, etc. can also be used as the solvent 142 .

The solvent 142 is, for example, a liquid having a boiling point of 60° C. or higher. Therefore, even when the power generating element 1 is used in an environment above room temperature (for example, 15° C. to 35° C.), vaporization of the solvent 142 can be suppressed. Thereby, deterioration of the power generating element 1 due to vaporization of the solvent 142 can be suppressed.

<First substrate 15, second substrate 16> The first substrate 15 is, for example, as shown in FIG. 1( a ), is in contact with the first electrode 11 and is separated from the second electrode 12 . The first substrate 15 fixes the first electrode 11 . The second substrate 16 is in contact with the second electrode 12 and is separated from the first electrode 11 . The second substrate 16 fixes the second electrode 12 . The first substrate 15 and the second substrate 16 are spaced apart in the first direction Z between the electrodes 11 , 12 and the intermediate portion 14 , for example. The power generating element 1 may further include a penetrating portion 18 provided on at least one of the first substrate 15 and the second substrate 16 . The power generating element 1 may further include a sealing portion 21 that seals the penetration portion 18 .

The thickness of each of the substrates 15 and 16 along the first direction Z is, for example, not less than 10 μm and not more than 2 mm. The thickness of each substrate 15, 16 can be set arbitrarily. The shape of each substrate 15 , 16 is, for example, not a square or a rectangular quadrangle, but also a disc shape, etc., and can be arbitrarily set according to the application.

For example, an insulating plate-shaped member, for example, a well-known member such as silicon, quartz, and Pyrex (registered trademark), can be used as the respective substrates 15 and 16 . For each of the substrates 15 and 16 , for example, film-like members can be used, and well-known film-like members such as PET (polyethylene terephthalate), PC (polycarbonate), and polyimide can also be used.

For example, a conductive member such as iron, aluminum, copper, or an alloy of aluminum and copper can be used as the substrates 15 and 16 . In addition, as the respective substrates 15 and 16 , other than conductive semiconductors such as Si and GaN, members such as conductive polymers may be used. When a conductive member is used for each of the substrates 15 , 16 , wiring for connecting to each of the electrodes 11 , 12 is unnecessary.

＜Support part 17＞ The supporting portion 17 supports the first substrate 15 and the second substrate 16 , and bonds the first substrate 15 and the second substrate 16 . By providing the supporting portion 17, the gap G can be formed with high precision. In particular, when the support portion 17 contains metal, the joint strength can be improved, and the variation of the gap G can be suppressed.

The supporting portion 17 is formed in a hollow quadrangular shape when viewed from the first direction Z, as shown in FIG. The shape of the supporting portion 17 is arbitrary as long as it surrounds the protecting portion 22 and supports the first substrate 15 and the second substrate 16 .

The support part 17 has the 1st support part 17a and the 2nd support part 17b. The first support portion 17 a is provided on the first substrate 15 . The second support portion 17 b is provided on the second substrate 16 . The 1st support part 17a and the 2nd support part 17b are in contact.

For example, an insulating material can be used as the supporting portion 17 . For example, silicon oxide, polymer, etc. can be used as the supporting portion 17 . Examples of the polymer include polyimide, PMMA (polymethyl methacrylate), and polystyrene. When using an insulating material as the support part 17, you may contain metal, for example in the contact surface of each support part 17a, 17b. In this case, bonding strength can be improved.

Moreover, it is more preferable to use metal as the support part 17, for example. Examples of the metal include, for example, gold, nickel, tungsten, tantalum, molybdenum, lead, platinum, silver, or tin, and a laminate of gold and chromium or a laminate of gold and nickel can be used. Since each supporting portion 17a, 17b contains metal, the thickness when forming each supporting portion 17a, 17b can be easily controlled, for example, deformation caused by pressing from each substrate 15, 16 is suppressed, and each supporting portion 17a can be prevented from being deformed. , The variation of the thickness of 17b. Thereby, the gap G can be formed with high precision.

For example, when gold is used on the surface of each support part 17a, 17b, gold exposed on the surface of each support part 17a, 17b can be bonded easily, for example using a thermocompression bonding method. Thereby, the inter-electrode gap can be formed with higher precision.

In addition, the supporting portion 17 may be provided by oxidizing at least one part of, for example, the first substrate 15 and the second substrate 16 . In this case, the support portion 17 can be easily provided. In addition, in this case, for example, metal may be contained in the surfaces of the respective supporting parts 17a and 17b that are in contact with each other. In this case, bonding strength can be improved.

By isolating the electrodes 11 , 12 from the support portion 17 , it is possible to prevent the electrodes 11 , 12 from being short-circuited via the support portion 17 .

＜Protection 22＞ The protection part 22 is provided separately from the support part 17, for example. In this case, it is possible to prevent the protection portion 22 from penetrating into the bonding surface when the supporting portion 17 is bonded. In addition, it is possible to prevent heat from being transmitted from the intermediate portion 14 to the support portion 17 via the protective portion 22, and to suppress the consumption of thermal energy.

The protection part 22 is provided, for example, in contact between the first electrode 11 and the second electrode 12 . Since the protective portion 22 is provided in contact with, for example, between the first electrode 11 and the second electrode 12 , the intermediate portion 14 can be easily sealed. Furthermore, since the protective portion 22 is provided in contact with, for example, between the first electrode 11 and the second electrode 12 , the protective portion 22 can be easily formed when the power generating element 1 is manufactured.

In addition, the protection part 22 may be provided, for example, in contact between the first substrate 15 and the second substrate 16 . In this case, compared with the case where the protective portion 22 is provided between the electrodes 11, 12, the facing area of the electrodes 11, 12 can be enlarged. Thereby, the amount of electric current generated between the electrodes 11 and 12 can be improved.

The protective portion 22 is formed in a hollow quadrangular shape when viewed from the first direction Z, and surrounds the respective electrodes 11 , 12 and the intermediate portion 14 . The inner surface of the protective portion 22 is in contact with the intermediate portion 14 . The protection part 22 is provided to prevent the nanoparticles 141 from adhering to the support part 17 and can seal the middle part 14 .

As the protection part 22, an insulating material is mentioned, for example. Furthermore, as the protection part 22, a fluororesin, such as CYTOP (registered trademark) and Teflon (registered trademark), etc. are mentioned, for example.

＜＜Penetration part 18＞＞ The penetrating portion 18 penetrates the first substrate 15 in the first direction Z, as shown in FIG. 1( a ), for example. The penetration portion 18 may penetrate at least one of the first substrate 15 and the second substrate 16 in the first direction Z, for example.

The penetrating portion 18 penetrates the first substrate 15 in the first direction Z, for example, penetrates the first electrode 11 . For example, one or more penetration portions 18 are provided. The penetrating portion 18 is isolated from the first electrode 11 and the second electrode 12 as viewed in the first direction Z, for example.

The penetrating portion 18 may be formed, for example, in an oval shape or a groove shape instead of a circular shape when viewed in the first direction Z. The penetrating portion 18 may be formed in an inverted tapered shape, an arcuate shape, or a straight shape, for example, instead of being tapered from the outer side toward the inner side of the power generating element 1 .

＜＜Sealing part 21＞＞ The sealing portion 21 is to seal the penetration portion 18 . The sealing portion 21 covers the outer side of the penetration portion 18 and is provided on the first substrate 15 penetrated therethrough. For example, at least a part of the sealing portion 21 may be provided in the penetration portion 18 . The sealing portion 21 is provided according to the number of the through portions 18 .

The material of the sealing portion 21 may be, for example, an insulating resin, and an example of the insulating resin may be a fluorine-based insulating resin.

<Operation of power generation element 1> When thermal energy is given to the power generating element 1, an electric current is generated between the first electrode 11 and the second electrode 12, and the thermal energy is converted into electrical energy. The amount of current generated between the first electrode 11 and the second electrode 12 depends not only on thermal energy but also on the difference between the work function of the second electrode 12 and the work function of the first electrode 11 .

The amount of generated current can be increased, for example, by increasing the difference in work function between the first electrode 11 and the second electrode 12 and reducing the gap between the electrodes. For example, the amount of electrical energy generated by the power generating element 1 can be increased by at least one of enlarging the above-mentioned work function difference and narrowing the above-mentioned inter-electrode gap.

In addition, the term "work function" means the minimum energy necessary to extract electrons in a solid into a vacuum. For example, other than the Kelvin method, UV photoelectron spectroscopy (UPS: Ultraviolet Photoelectron Spectroscopy), X-ray photoelectron spectroscopy (XPS: X-ray Photoelectron Spectroscopy), or AES: Auger Electron Spectroscopy) etc. to determine.

(Embodiment: Manufacturing method of power generating element 1) Next, an example of a method of manufacturing the power generating element 1 of the present embodiment will be described. FIG. 3 is a flowchart showing an example of a method of manufacturing the power generating element 1 of the present embodiment. 4(a) to 6(d) are schematic diagrams showing an example of the method of manufacturing the power generating element according to the first embodiment.

＜<Electrode Formation Step S110>> First, for example, as shown in FIG. 4(a), the first electrode 11 is formed on the main surface of the first substrate 15, and the second electrode 11 is formed on the main surface of the second substrate 16, for example, as shown in FIG. 4(b). 12 (electrode forming step S110). The electrodes 11 and 12 form a quadrangular shape when viewed in the first direction Z.

In the electrode forming step S110 , the electrodes 11 and 12 may be formed using, for example, a sputtering method or a vapor deposition method, but may also be formed using, for example, a screen printing method, an inkjet method, or a spray printing method. For example, instead of using aluminum as the first electrode 11 and platinum as the second electrode 12 , the above-mentioned materials may be used respectively.

In the electrode forming step S110, a part of each electrode 11, 12 may be removed, for example, using a known etching method or the like. In this case, a layer (support layer) having the same thickness as the respective electrodes 11 and 12 is formed at a place isolated from the layer that functions as the respective electrodes 11 and 12 .

<<Support portion forming process S120>> Next, as shown in Figure 4 (c), for example, form the first supporting portion 17a above the principal surface of the first substrate 15, and form the second supporting portion 17a above the principal surface of the second substrate 16, such as shown in Figure 4 (d). The support part 17b (support part forming process S120). Each support part 17a, 17b is seen from the 1st direction Z, and forms a hollow quadrangular shape. Each supporting part 17a, 17b is isolated from each electrode 11, 12.

In the support portion forming step S120, the support portions 17a, 17b may be formed in a vacuum environment such as sputtering or vapor deposition, for example, by screen printing, inkjet, or spray printing. The support portions 17a, 17b are formed under normal pressure environment such as the method. Metal, such as gold, can be used as the respective support portions 17a, 17b. For example, when a laminate of gold and chromium or a laminate of gold and nickel is used as the support portions 17a, 17b, chromium or nickel is formed on each substrate 15, 16, and gold is formed thereon. Thereby, gold is exposed on the upper surface of each support part 17a, 17b.

For example, in the supporting portion forming step S120 , the aforementioned materials may be formed on the supporting layer formed in the electrode forming step S110 to form the supporting portion 17 including the supporting layer. In this case, compared with the case where the support portion 17 is directly formed on each substrate 15 , 16 , the accuracy of the position where the support portion 17 is formed can be improved. In addition, by including a support layer of the same material as that of the electrodes 11 and 12 in the support portion 17, the load acting on the substrates 15 and 16 due to thermal expansion, for example, can be reduced.

In addition, in the support portion forming step S120 , the support portion 17 may be formed on at least any one of the upper surface of the first substrate 15 and the upper surface of the second substrate 16 . The supporting portion 17 may or may not be in contact with the first substrate 15 as long as it is above the main surface of the first substrate 15 . The supporting portion 17 may or may not be in contact with the second substrate 16 as long as it is above the main surface of the second substrate 16 .

＜<Protection part forming process S130>> Next, for example, as shown in FIG. 5( a ), the protective portion 22 is formed on the main surface of the first electrode 11 (protective portion forming step S130 ). The protection portion 22 is, for example, as shown in FIG. 5( b ), and is formed in a hollow quadrangular shape when viewed from the first direction Z. As shown in FIG. The protective part 22 has insulating properties, for example, CYTOP (registered trademark) can be used.

In the protective portion forming step S130, for example, the protective portion 22 may be formed in a vacuum environment using, for example, sputtering or vapor deposition, or may be formed using, for example, a screen printing method, an inkjet method, or a spray printing method. The protective portion 22 is formed under normal pressure environment.

In addition, in the protective portion forming step S130 , the protective portion 22 may be formed on at least any one of the upper surface of the first substrate 15 and the upper surface of the second substrate 16 . The protection portion 22 may or may not be in contact with the first substrate 15 as long as it is above the main surface of the first substrate 15 . The protection portion 22 may be in contact with the second substrate 16 or not, as long as it is above the main surface of the second substrate 16 .

<<Penetration part forming process S140>> Next, for example, as shown in FIG. 5( c ), the penetrating portion 18 is formed on the first substrate 15 (penetrating portion forming step S140 ). The penetrating portion 18 is formed in a circular shape when viewed from the first direction Z, for example, as shown in FIG. 5( d ). The penetrating portion 18 penetrates the first substrate 15 in the first direction Z, for example, penetrates the first electrode 11 . For example, one or more penetration portions 18 are provided. The penetrating portion 18 is isolated from the first electrode 11 as viewed from the first direction Z.

In the through portion forming step S140 , for example, the through portion 18 may be formed by using an anisotropic etching such as reactive ion etching instead of forming the through portion 18 on the first substrate 15 using a drill. In addition, in the penetrating portion forming step S140 , the penetrating portion 18 may be formed on the second substrate 16 , for example.

＜＜Joining process S150＞＞ Next, as shown in FIG. 6(a) and FIG. 6(b), for example, the first substrate 11 and the second electrode 12 are separated and opposed in the first direction Z, and the first substrate is bonded via the support portion 17. 15 and the second substrate 16 (bonding step S150). In the bonding step S150, for example, as shown in FIG. 22 is provided on the second electrode 12 . When the protection portion 22 is provided on the second electrode 12 , the first support portion 17 a and the second support portion 17 b are separated in the first direction Z.

Furthermore, in the joining step S150, as shown in FIG. 6(b), for example, the protection part 22 is decompressed in the first direction Z, and the upper surface of the first support part 17a and the upper surface of the second support part 17b are joined. By the protection part 22 being squeezed, it is easier to seal the middle part 14 . Moreover, since the protection part 22 is provided in contact with the first electrode 11 and the second electrode 12, the protection part 22 can be fixed more firmly to the first substrate 15 and the second substrate 16 than when the protection part 22 is fixed to the first substrate 15 and the second substrate 16. 1st electrode 11 and 2nd electrode 12. Thereby, fluctuation|variation of the protection part 22 can be suppressed.

Moreover, when the protection part 22 is separated from the support part 17, for example, in a state where the pressed protection part 22 is sandwiched between the first support part 17a and the second support part 17b, each support part 17a, 17b can be prevented from being joined. . Therefore, when the first substrate 15 and the second substrate 16 are bonded via the support portion 17 , it is possible to prevent a decrease in bonding force.

In the bonding step S150, for example, the upper surfaces of the supporting parts 17a, 17b are brought into contact with each other and heated by thermocompression bonding, thereby bonding the supporting parts 17a, 17b. In this case, the gap G between the electrodes 11 and 12 depends on the thickness of the supporting parts 17a and 17b. Each support part 17a, 17b is sandwiched between each board|substrate 15, 16, and the gap G is formed.

＜<Middle part forming process S160>> Next, for example, as shown in FIG. 6( c ), an intermediate portion 14 is formed between the first electrode 11 and the second electrode 12 (intermediate portion forming step S160 ). The middle portion 14 is isolated from the support portion 17 and contacts the protection portion 22 . The protection part 22 is provided between the middle part 14 and the supporting part 17 . The protection portion 22 surrounds the first electrode 11 , the second electrode 12 and the intermediate portion 14 .

In the intermediate portion forming step S160 , the intermediate portion 14 is filled from at least one penetrating portion 18 , and the intermediate portion 14 is formed by suction (evacuation) from the other penetrating portions 18 . Since the protective portion 22 is formed by pressing in the first direction Z, it is easy to seal the intermediate portion 14 .

Also, the penetrating portion 18 is isolated from the first electrode 11 and the second electrode 12 . Therefore, when foreign matter enters between the first electrode 11 and the second electrode 12 when filling the intermediate portion 14 via the penetrating portion 18 , it is possible to suppress foreign matter from adhering to the first electrode 11 and the second electrode 12 . Thereby, deterioration of the quality of a power generating element can be suppressed.

<<Sealing part forming process S170>> Next, for example, as shown in FIG. 6( d ), the sealing portion 21 for sealing the penetration portion 18 is formed (seal portion forming step S170 ). In addition, the sealing portion forming step S170 may also be omitted.

The power generating element 1 of this embodiment is formed through the above-mentioned steps. In addition, the power generating device 100 of this embodiment can be formed by connecting the first terminal 111, the second terminal 112, the first wiring 101, the second wiring 102, etc. shown in FIG. .

In addition, the order of the electrode forming step S110 , the supporting part forming step S120 , and the protecting part forming step S130 is arbitrary as long as it is, for example, before the bonding step S150 is performed.

In addition, for example, the through portion forming step S140 may also be omitted. In this case, for example, after the protective portion 22 is formed on the main surface of the first substrate 15 , the intermediate portion 14 is formed on the portion of the first electrode 11 surrounded by the protective portion 22 . Then, the first substrate 15 and the second substrate 16 are bonded via the support portion 17 so that the first electrode 11 and the second electrode 12 face each other while being spaced apart in the first direction Z. Thereby, an intermediate portion 14 is formed between the first electrode 11 and the second electrode 12 .

According to the present embodiment, there are provided: a metal-containing support portion 17 isolated from the intermediate portion 14; and an insulating protective portion 22 provided between the intermediate portion 14 and the support portion 17 and in contact with the intermediate portion 14. Therefore, reduction in the amount of nanoparticles 141 dispersed between the electrodes 11 and 12 can be suppressed. Thereby, reduction in power generation efficiency can be suppressed.

According to the present embodiment, the supporting portion 17 contains metal. Therefore, variation in the thickness of the support portion 13 along the first direction Z can be suppressed. Thereby, the gap G can be formed with high precision, and the amount of electric energy generated can be stabilized.

According to this embodiment, the protection part 22 is provided separately from the support part 17 . Therefore, when the first substrate 15 and the second substrate 16 are bonded via the support portion 17 , it is possible to prevent, for example, a decrease in bonding force caused by the protection portion 22 coming into contact with the support portion 17 . Thereby, the first substrate 15 and the second substrate 16 can be firmly bonded by the support portion 17 .

According to this embodiment, the protection part 22 is provided in contact between the first electrode 11 and the second electrode 12 . Therefore, the protection portion 22 can be fixed more firmly to the first electrode 11 and the second electrode 12 than in the case of fixing the protection portion 22 to the first substrate 15 and the second substrate 16 . Thereby, fluctuation|variation of the protection part 22 can be suppressed.

According to the present embodiment, the supporting portion 17 is separated from the first electrode 11 and the second electrode 12 . Therefore, it is possible to prevent the electrodes 11 , 12 from being short-circuited via the support portion 17 .

According to this embodiment, the penetration part 18 provided in at least any one of the 1st board|substrate 15 and the 2nd board|substrate 16 is further provided. Therefore, the intermediate portion 14 can be filled between the first electrode 11 and the second electrode 12 via the penetrating portion 18 . Thereby, the manufacturing process of the power generating element 1 can be simplified. Also, when the intermediate portion 14 needs to be replaced as the power generating element 1 is used, the intermediate portion 14 can be easily replaced.

According to the present embodiment, when viewed in the first direction Z, the penetrating portion 18 is separated from the first electrode 11 and the second electrode 12 . Therefore, when foreign matter enters between the first electrode 11 and the second electrode 12 when filling the intermediate portion 14 via the penetrating portion 18 , it is possible to suppress foreign matter from adhering to the first electrode 11 and the second electrode 12 . Thereby, deterioration of the quality of a power generating element can be suppressed.

(Second embodiment: power generating element 1, power generating device 100) Next, the power generating device 100 and the power generating element 1 according to the second embodiment will be described. FIG. 7 is a schematic diagram showing an example of a power generating device 100 and a power generating element 1 according to the second embodiment. 7( a ) is a schematic cross-sectional view showing an example of the power generating device 100 and the power generating element 1 according to the second embodiment, and FIG. 7( b ) is a schematic cross-sectional view along line B-B in FIG. 7( a ).

The difference from the first embodiment and the second embodiment described above is that the opening 19 is provided. In addition, the description of the same structure as the above-mentioned embodiment is omitted.

＜＜Opening part 19＞＞ The opening 19 penetrates the first substrate 15 in the first direction Z, as shown in FIG. 7( a ), for example. The opening 19 may pass through at least one of the first substrate 15 and the second substrate 16 in the first direction Z, for example.

The opening 19 penetrates the first substrate 15 in the first direction Z and is connected to a space between the supporting portion 17 and the protecting portion 22 . For example, one or more openings 19 are provided. The opening 19 is separated from the first electrode 11 and the second electrode 12 as viewed in the first direction Z, for example.

The opening 19 may be formed in, for example, an ellipse or a groove instead of a circle as viewed from the first direction Z. The opening 19 may be formed in an inverted tapered shape, an arcuate shape, or a straight shape, for example, instead of being tapered from the outer side toward the inner side of the power generating element 1 .

In addition, although illustration is omitted, a sealing portion 21 for sealing the opening portion 19 may be provided. The sealing portion 21 covers the outer side of the opening portion 19 and is provided on the first substrate 15 penetrated therethrough. For example, at least a part of the sealing portion 21 may be provided in the opening portion 19 . The sealing portion 21 is provided according to the number of openings 19 . The material of the sealing portion 21 is, for example, an insulating resin, and an example of the insulating resin is a fluorine-based insulating resin.

By having the opening 19, for example, when the first substrate 15 and the second substrate 16 are bonded through the support portion 17 in the bonding step S150 of the above-mentioned manufacturing method of the power generating element 1, the gap between the support portion 17 and the protection portion 22 can be separated. Gases such as air in the space between them are discharged from the opening 19 to the outside of the power generating element 1 . Thereby, the bonding of the first substrate 15 and the second substrate 16 via the support portion 17 can be easily performed.

<Second Embodiment: Manufacturing Method of Power Generating Element 1> Next, an example of a method of manufacturing the power generating element 1 will be described. FIG. 8 is a flowchart showing an example of a method of manufacturing the power generating element 1 according to this embodiment. 9( a ) to 9( d ) are schematic cross-sectional views showing an example of a method of manufacturing the power generating element 1 of the present embodiment.

As shown in FIG. 8 , the electrode forming step S110 , the supporting portion forming step S120 , the protecting portion forming step S130 , and the penetrating portion forming step S140 are performed similarly to the above-mentioned embodiment.

<<Opening part forming process S210>> Next, for example, as shown in FIG. 9( a ), an opening 19 is formed in the first electrode 11 (opening forming step S210 ). The opening 19 is formed in a circular shape when viewed from the first direction Z, for example, as shown in FIG. 9( b ). The opening 19 penetrates the first substrate 15 in the first direction Z and is connected to a space between the supporting portion 17 and the protecting portion 22 . For example, one or more openings 19 are provided.

In the opening forming step S210 , for example, the opening 19 may be formed in the first substrate 15 using a drill, or anisotropic etching such as reactive ion etching may be used to form the opening 19 . In addition, in the opening forming step S210 , for example, the opening 19 may be formed in the second substrate 16 .

＜＜Joining process S150＞＞ Next, as shown in FIG. 9(c) and FIG. 9(d), for example, the first electrode 11 and the second electrode 12 are separated and opposed in the first direction Z, and the first substrate is bonded via the support portion 17. 15 and the second substrate 16 (bonding step S150). In the bonding step S150, for example, as shown in FIG. The portion 22 is provided on the second electrode 12 . When the protection portion 22 is provided on the second electrode 12 , the first support portion 17 a and the second support portion 17 b are separated in the first direction Z.

In addition, in the bonding step S150 , as shown in FIG. 9( d ), for example, the protection portion 22 is pressed in the first direction Z, and the upper surface of the first support portion 17 a and the upper surface of the second support portion 17 b are joined. By the protection part 22 being squeezed, it is easier to seal the middle part 14 . Moreover, since the protection part 22 is provided in contact with the first electrode 11 and the second electrode 12, the protection part 22 can be fixed more firmly to the first substrate 15 and the second substrate 16 than when the protection part 22 is fixed to the first substrate 15 and the second substrate 16. 1st electrode 11 and 2nd electrode 12. Thereby, the protection part 22 can be suppressed from coming off.

In the bonding step S150, when the first substrate 15 and the second substrate 16 are bonded via the support portion 17, gas such as air in the space between the support portion 17 and the protection portion 22 can be discharged from the opening 19 to the The outer side of the power generating element 1. This facilitates bonding of the first substrate 15 and the support portion 17 of the second substrate 16 .

Thereafter, the intermediate portion forming step S160 and the sealing portion forming step S170 are performed similarly to the above-mentioned embodiment.

According to the present embodiment, it is the same as the above-mentioned embodiment, and it is equipped with: a support portion 17 that is isolated from the middle portion 14 and contains metal; Insulative protective portion 22 . Therefore, reduction in the amount of nanoparticles 141 dispersed between the electrodes 11 and 12 can be suppressed. Thereby, reduction in power generation efficiency can be suppressed.

Moreover, according to the present embodiment, at least one of the first substrate 15 and the second substrate 16 has an opening 19 penetrating in the first direction Z, and the opening 19 is connected to the support portion 17 and the protection portion 22. space between. Therefore, when the first substrate 15 and the second substrate 16 are bonded via the support portion 17 , gas such as air in the space between the support portion 17 and the protective portion 22 can be discharged to the outside of the power generating element 1 through the opening 19 . Thereby, the bonding of the first substrate 15 and the second substrate 16 via the support portion 17 can be easily performed.

(Third embodiment: power generating element 1, power generating device 100) Next, the power generating device 100 and the power generating element 1 according to the third embodiment will be described. Fig. 10 is a schematic diagram showing an example of a power generating device 100 and a power generating element 1 according to a third embodiment. Fig. 10(a) is a schematic sectional view showing an example of the power generating device 100 and the power generating element 1 according to the third embodiment, and Fig. 10(b) is a schematic plan view along line C-C in Fig. 10(a).

The above-mentioned first embodiment differs from the third embodiment in that it has the wiring layer 23 and the connection wiring 24 . In addition, the description of the same structure as the above-mentioned embodiment is abbreviate|omitted.

＜＜Wiring layer 23＞＞ The wiring layer 23 is provided, for example, on the outer side (surface) of the power generating element 1 as shown in FIG. 10 .

The wiring layer 23 has, for example, at least any one of the first wiring layer 23a and the second wiring layer 23b. The first wiring layer 23 a is provided on the main surface of the first substrate 15 facing the main surface on which the first electrode 11 is provided. That is, the first substrate 15 is sandwiched between the first wiring layer 23 a and the first electrode 11 . The second wiring layer 23b is provided on the main surface of the second substrate 16 that faces the main surface on which the second electrode 12 is provided. That is, the second substrate 16 is sandwiched between the second wiring layer 23 b and the second electrode 12 .

The thickness of the wiring layer 23 along the first direction Z is, for example, not less than 100 nm and not more than 10 μm. As the material of the wiring layer 23, a conductive material can be used, for example, instead of gold, a laminated body of gold and chromium or a laminated body of gold and nickel can be used.

＜＜Connection wiring 24＞＞ The connection wiring 24 is, for example, a through-hole 25 provided in each substrate 15 , 16 penetrating in the first direction Z, and is electrically connected to each electrode 11 , 12 and the wiring layer 23 . The connection wiring 24 is provided, for example, to be filled in each through-hole 25 . In addition, the connection wiring 24 may be provided, for example, on the inner peripheral surface of each through hole 25 . The connection wiring 24 may also be in contact with the intermediate portion 14 . The through hole 25 has a first through hole 25 a penetrating the first substrate 15 and a second through hole 25 b penetrating the second substrate 16 .

The connection wiring 24 has, for example, at least any one of the first connection wiring 24a and the second connection wiring 24b. The first connection wiring 24 a is electrically connected to the first electrode 11 and the first wiring layer 23 a through the first through hole 25 a penetrating the first substrate 15 . Therefore, the connection point between the first connection wiring 24 a and the first electrode 11 is provided inside the power generating element 1 . The second connection wiring 24 b is electrically connected to the second electrode 12 and the second wiring layer 23 b through the second through hole 25 b penetrating the second substrate 16 . Therefore, the connection point between the second connection wiring 24 b and the second electrode 12 is provided inside the power generating element 1 . The above connection is a portion that is particularly prone to deterioration among the connecting wires 24a, 24b, and by providing the connection on the inner side of the power generating element 1, the durability of the power generating element 1 can be improved.

The connection wiring 24 is provided, for example, to be filled in each through-hole 25 . In addition, the connection wiring 24 may be provided, for example, on the inner peripheral surface of each through-hole 25, and may be formed with a thickness of not less than 100 nm and not more than 10 μm. As a material of the connection wiring 24, a conductive material can be used, for example, gold can be used.

Although illustration is omitted, for example, the sealing portion 21 may cover at least a part of the first through hole 25a, the first connection wiring 24a, and the first wiring layer 23a. At this time, the joint between the first wiring layer 23 a and the first connection wiring 24 a can be covered by the sealing portion 21 . For example, the sealing part 21 may cover at least a part of the 2nd through-hole 25b, the 2nd connection wiring 24b, and the 2nd wiring layer 23b. At this time, the joint between the second wiring layer 23 b and the second connection wiring 24 b can be covered by the sealing portion 21 . The connection is a part that is particularly susceptible to deterioration among the connection wires 24a, 24b, and is provided on the outside of the power generating element 1. Therefore, the durability of the power generating element 1 can be improved by covering the connection with the sealing portion 21.

<Third Embodiment: Manufacturing Method of Power Generating Element 1> Next, an example of a method of manufacturing the power generating element 1 will be described. FIG. 11 is a flowchart showing an example of a method of manufacturing the power generating element 1 according to this embodiment. 12(a) to 13(b) are schematic diagrams showing an example of a method of manufacturing the power generating element 1 of the present embodiment.

<<Connection wiring forming process S310>> First, as shown in FIG. 12(a), a first through hole 25a is formed in the first substrate 15, and a first connection wiring 24a is formed in the first through hole 25a. As shown in FIG. The substrate 16 is formed with the second through hole 25b, and the second connection wiring 24b is formed in the second through hole 25b (connection wiring forming step S310). One or more of each through-hole 25a, 25b and each connection wiring 24a, 24b are provided.

In connection wiring formation process S310, each connection wiring 24a, 24b is formed using a sputtering method, for example. Gold can be used for each connection wiring 24a, 24b, for example.

<<Wiring layer forming step S320>> Next, as shown in FIG. 12(c), a first wiring layer 23a is formed on one main surface of the first substrate 15, and a first wiring layer 23a is formed on one main surface of the second substrate 16, as shown in FIG. 12(d). The second wiring layer 23b (wiring layer forming step S320). Each wiring layer 23a, 23b is formed in a quadrangular shape when viewed from the first direction Z, for example.

In the wiring layer forming step S320, the wiring layers 23a, 23b may be formed using, for example, a sputtering method or a vapor deposition method, or may be formed using, for example, a screen printing method, an inkjet method, or a spray printing method.

＜<Electrode Formation Step S110>> Next, as shown in FIG. 13(a), for example, the first electrode 11 is formed on the main surface of the first substrate 15 opposite to the main surface on which the first wiring layer 23a is formed, as shown in FIG. 13(b), for example. Then, the second electrode 12 is formed on the main surface of the second substrate 16 opposite to the main surface on which the second wiring layer 23 b is formed (electrode forming step S110 ). At this time, the first electrode 11 is electrically connected to the first wiring layer 23a via the first connection wiring 24a. In addition, the second electrode 12 is electrically connected to the second wiring layer 23b via the second connection wiring 24b.

Then, as shown in FIG. 11, similarly to the above-mentioned embodiment, the supporting portion forming step S120, the protecting portion forming step S130, the through portion forming step S140, the joining step S150, the intermediate portion forming step S160, and the sealing portion forming step S170 are performed. .

According to the present embodiment, it is the same as the above-mentioned embodiment, and it is equipped with: a support portion 17 that is isolated from the middle portion 14 and contains metal; Insulative protective portion 22 . Therefore, reduction in the amount of nanoparticles 141 dispersed between the electrodes 11 and 12 can be suppressed. Thereby, reduction in power generation efficiency can be suppressed.

Moreover, according to the present embodiment, the first connection wiring 24a is electrically connected to the first electrode 11 and the first wiring layer 23a through the first through hole 25a. Therefore, the first connection wiring 24 a can be connected to the first electrode 11 inside the power generating element 1 . Thereby, the deterioration of the 1st connection wiring 24a connected to the 1st electrode 11 can be suppressed.

Moreover, according to the present embodiment, the second connection wiring 24b is electrically connected to the second electrode 12 and the second wiring layer 23b through the second through hole 25b. Therefore, the second connection wiring 24 b can be connected to the second electrode 12 inside the power generating element 1 . Thereby, deterioration of each connection wiring 24a, 24b connected to each electrode 11, 12 can be suppressed. Also, the second connection wiring 24b can be formed with the same structure as the first connection wiring 24a, so the manufacturing process can be simplified.

In addition, according to the present embodiment, the electrode forming step S110 is to form the first connection wiring 24a electrically connected to the first electrode 11 and the first wiring layer 23a through the first through hole 25a. Therefore, the first connection wiring 24 a can be connected to the first electrode 11 inside the power generating element 1 . Thereby, the deterioration of the 1st connection wiring 24a connected to the 1st electrode 11 can be suppressed.

Moreover, according to the present embodiment, the electrode forming step S110 is to form the second connection wiring 24b electrically connected to the second electrode 12 and the second wiring layer 23b through the second through hole 25b. Therefore, the second connection wiring 24 b can be connected to the second electrode 12 inside the power generating element 1 . Thereby, deterioration of each connection wiring 24a, 24b connected to each electrode 11, 12 can be suppressed. Also, the second connection wiring 24b can be formed with the same structure as the first connection wiring 24a, so the manufacturing process can be simplified.

(Embodiment: electronic device 500) ＜Electronic Equipment 500＞ The power generating element 1 and the power generating device 100 described above can be mounted on, for example, electronic equipment. Hereinafter, some embodiments of the electronic equipment will be described.

FIGS. 14( a ) to 14 ( d ) are schematic block diagrams showing an example of an electronic device 500 including the power generating element 1 . FIGS. 14( e ) to 14 ( h ) are schematic block diagrams showing an example of an electronic device 500 including the power generating device 100 including the power generating element 1 .

As shown in FIG. 14( a ), an electronic device 500 (Electric Product) includes electronic components 501 (Electronic Components), a main power supply 502 , and an auxiliary power supply 503 . Each of the electronic device 500 and the electronic component 501 is an electrical device (Electrical device).

The electronic component 501 is driven by using the main power supply 502 as a power supply. As an example of the electronic component 501, a CPU, a motor, a sensor terminal device, lighting, etc. are mentioned, for example. When the electronic component 501 is, for example, a CPU, the electronic device 500 includes an electronic device that can be controlled by a built-in master control station (Master) (CPU). When the electronic component 501 includes, for example, at least one of a motor, a sensor terminal device, and a lighting, the electronic device 500 includes an electronic device that can be controlled by an external master control station or a person.

The main power source 502 is, for example, a battery. The batteries also include rechargeable batteries. The positive terminal (+) of the main power supply 502 is electrically connected to the Vcc terminal (Vcc) of the electronic component 501 . The negative terminal (−) of the main power supply 502 is electrically connected to the GND terminal (GND) of the electronic component 501 .

The auxiliary power supply 503 is the power generating element 1 . The power generating element 1 includes at least one of the power generating elements 1 described above. In the electronic device 500 , the auxiliary power supply 503 is used together with the main power supply 502 , and can be used as a power supply for assisting the main power supply 502 or as a power supply for supporting the main power supply 502 when the capacity of the main power supply 502 is exhausted. When the main power source 502 is a rechargeable battery, the auxiliary power source 503 can also be used as a power source for charging the battery.

As shown in FIG. 14( b ), the main power source 502 can also be used as the power generating element 1 . An electronic device 500 shown in FIG. 14( b ) includes: a power generating element 1 used as a main power supply 502 ; and an electronic component 501 that can be driven using the power generating element 1 . The power generating element 1 is an independent power source (for example, an off-grid power source). Therefore, the electronic device 500 can be formed into a self-supporting type (stand alone type), for example. Furthermore, the power generating element 1 is an environmental power generation type (Energy harvesting type). The electronic device 500 shown in FIG. 14(b) does not require battery replacement.

As shown in FIG. 14( c ), the electronic component 501 may include the power generating element 1 . The anode of the power generating element 1 is electrically connected to, for example, a GND wiring of a circuit board (not shown). The cathode of the power generating element 1 is electrically connected to, for example, a Vcc wiring of a circuit board (not shown). In this case, the power generating element 1 can be used as, for example, the auxiliary power supply 503 of the electronic component 501 .

As shown in FIG. 14( d ), when the electronic component 501 includes the power generating element 1 , the power generating element 1 can be used as, for example, the main power supply 502 of the electronic component 501 .

As shown in each of FIG. 14( e ) to FIG. 14( h ), the electronic device 500 may also include the power generating device 100 . The power generating device 100 includes the power generating element 1 as a source of electrical energy.

In the embodiment shown in FIG. 14( d ), an electronic component 501 includes a power generating element 1 used as a main power supply 502 . Similarly, in the embodiment shown in FIG. 14( h ), the electronic component 501 includes the power generator 100 used as the main power source. In these embodiments, the electronic component 501 has an independent power supply. Therefore, the electronic component 501 can be made into a self-supporting type, for example. The self-supporting electronic component 501 can be effectively used, for example, in an electronic device including a plurality of electronic components, and at least one electronic component is separated from other electronic components. An example of such an electronic device 500 is a sensor. The sensor is a controller (master) provided with a sensor terminal device (slave) and a remote sensor terminal device. Each of the sensor terminal device and the controller is an electronic component 501 . If the sensor terminal device includes the power generating element 1 or the power generating device 100, it becomes an independent sensor terminal device and does not require wired power supply. Since the power generating element 1 or the power generating device 100 is an environmental power generation type, battery replacement is also unnecessary. The sensor terminal device can also be regarded as one of the electronic devices 500 . The sensor terminal device regarded as the electronic device 500 is a sensor terminal device other than a sensor, and includes, for example, IoT WIRELESS-TAG and the like.

In the embodiments shown in each of Fig. 14(a) to Fig. 14(h), what is common is that the electronic equipment 500 includes: a power generating element 1 that converts thermal energy into electrical energy, and the power generating element 1 can be used to An electronic component 501 driven by a power source.

The electronic device 500 may be an autonomous type (autonomous type) provided with an independent power supply. Examples of autonomous electronic devices include, for example, robots. Furthermore, the electronic component 501 provided with the power generating element 1 or the power generating device 100 may be an autonomous type provided with an independent power supply. Examples of autonomous electronic components are, for example, movable sensor terminal devices and the like.

Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in other various forms, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope or gist of the invention, and are included in the inventions described in the claims and their equivalent scopes.

1: Generating components 11: 1st electrode 12: 2nd electrode 13: Support part 14: middle part 15: 1st substrate 16: Second substrate 17: Support part 18: Penetrating part 19: Opening 21: sealing part 22: Ministry of Protection 23: Wiring layer 24: Connect wiring 25: Through hole 100: Generator 101: 1st wiring 102: 2nd wiring 111: 1st terminal 112: 2nd terminal 140: space 141:Nanoparticles 141a: film 142:Solvent 500: electronic equipment 501: Electronic parts 502: Main power supply 503: Auxiliary power supply G: Gap S110: Electrode forming process S120: Support portion forming process S130: Protection portion forming process S140: Penetration portion forming process S150: Joining process S160: Middle part forming process S170: Sealing part forming process S210: Opening part forming process S310: Connection wiring forming process S320: Wiring layer forming process X: 2nd direction Y: 3rd direction Z: 1st direction

[FIG. 1(a)] is a schematic sectional view showing an example of a power generating element and a power generating device according to the first embodiment, and [FIG. 1(b)] is a schematic plan view along line A-A of FIG. 1(a). [ Fig. 2 ] is a schematic cross-sectional view showing an example of an intermediate portion. [ Fig. 3 ] is a flow chart showing an example of the method of manufacturing the power generating element according to the first embodiment. [FIG. 4(a)-FIG. 4(d)] are schematic diagrams showing an example of the method of manufacturing the power generating element according to the first embodiment. [FIG. 5(a) to FIG. 5(d)] are schematic diagrams showing an example of the method of manufacturing the power generating element according to the first embodiment. [FIG. 6(a) to FIG. 6(d)] are schematic diagrams showing an example of the method of manufacturing the power generating element according to the first embodiment. [FIG. 7(a)] is a schematic sectional view showing an example of a power generating element and a power generating device according to the second embodiment, and FIG. 7(b) is a schematic plan view along line B-B of FIG. 7(a). [ Fig. 8] Fig. 8 is a flowchart showing an example of a method of manufacturing a power generating element according to a second embodiment. [FIG. 9(a)-FIG. 9(d)] are schematic diagrams showing an example of the method of manufacturing the power generating element according to the second embodiment. [FIG. 10(a)] is a schematic sectional view showing an example of a power generating element and a power generating device according to a third embodiment, and FIG. 10(b) is a schematic plan view along line C-C of FIG. 10(a). [ Fig. 11 ] is a flowchart showing an example of a method of manufacturing a power generating element according to a third embodiment. [FIG. 12(a) to FIG. 12(d)] are schematic diagrams showing an example of a method of manufacturing a power generating element according to the third embodiment. [FIG. 13(a) and FIG. 13(b)] are schematic diagrams showing an example of the method of manufacturing the power generating element according to the third embodiment. [FIG. 14(a) to FIG. 14(d)] are schematic block diagrams showing examples of electronic equipment equipped with power generating elements, and FIG. 14(e) to FIG. 14(h) are electronic equipment showing power generating devices including power generating elements An example of a schema block diagram.

1: Generating components

11: 1st electrode

12: 2nd electrode

14: middle part

15: 1st substrate

16: Second substrate

17: Support part

17a: the first support part

17b: The second support part

18: Penetrating part

21: sealing part

22: Ministry of Protection

100: Generator

101: 1st wiring

102: 2nd wiring

111: 1st terminal

112: 2nd terminal

R: load

Claims (9)

A power generation element, which is a power generation element that converts thermal energy into electrical energy, is characterized by: a first substrate and a second substrate arranged in isolation from each other along the first direction; a first electrode provided on the main surface of the first substrate; A second electrode having a higher work function than the first electrode, provided on the main surface of the second substrate separated from the first electrode; An intermediate part that is provided between the first electrode and the second electrode and contains a medium for dispersing the nanoparticles; a metal-containing support portion provided in contact with the first substrate and the second substrate, and isolated from the intermediate portion; and An insulating protective portion provided between the intermediate portion and the support portion, in contact with the intermediate portion. The power generating element according to claim 1, wherein the protection part is provided in isolation from the support part. The power generating element according to claim 2, wherein the protection portion is provided in contact between the first electrode and the second electrode. The power generating element according to claim 1, wherein the support portion is separated from the first electrode and the second electrode. The power generating element according to claim 1, further comprising a penetrating portion provided on at least one of the first substrate and the second substrate. The power generating element according to claim 5, wherein the penetrating portion is isolated from the first electrode and the second electrode when viewed from the first direction. A power generating device, characterized in that it has: The power generation element described in Claim 1; a first wiring electrically connected to the aforementioned first electrode; and A second wiring electrically connected to the second electrode. An electronic machine characterized by: The power generating element described in Claim 1; and An electronic component that is driven by using the aforementioned power generating element as a power source. A method of manufacturing a power generating element, which is a method of manufacturing a power generating element that converts thermal energy into electrical energy, and is characterized by: An electrode forming step of forming a first electrode on the main surface of the first substrate, and forming a second electrode having a higher work function than the first electrode on the main surface of the second substrate; a support portion forming step of forming a metal-containing support portion on at least one of above the main surface of the first substrate and above the main surface of the second substrate; A protective portion forming step of forming an insulating protective portion on at least one of the upper surface of the first substrate and the upper surface of the second substrate; a bonding step of bonding the first substrate and the second substrate through the supporting portion in such a manner that the first electrode and the second electrode face each other in a first direction; and The intermediate part forming step is to form the intermediate part containing the medium in which the nanoparticles are dispersed in such a manner that it is in contact with the protective part and separated from the support part.

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