WO2023286363A1 - Power generation element, power generation device, electronic device, and method for manufacturing power generation element - Google Patents

Abstract

[Problem] To provide a power generation element, a power generation device, an electronic device, and a method for manufacturing a power generation element, which can suppress a decrease in power generation efficiency due to the adhesion of nanoparticles. [Solution] A power generation element 1 for converting thermal energy into electrical energy comprises: a first substrate 15 and a second substrate 16 spaced apart from each other along a first direction Z; a first electrode 11 provided on the main surface of the first substrate 15; a second electrode 12 spaced apart from the first electrode 11 and provided on the main surface of the second substrate 16, and having a higher work function than the first electrode 11; an intermediate part 14 provided between the first electrode 11 and the second electrode 12 and containing a solvent 142 in which nanoparticles 141 are dispersed; a support part 17 provided in contact with and between the first substrate 15 and the second substrate 16 and spaced apart from the immediate part 14, and containing metal; and a protective part 22 that is provided between the intermediate part 14 and the support part 17, is in contact with the intermediate part 14, and has insulating properties.

Description

Power generation element, power generation device, electronic device, and method for manufacturing power generation element

The present invention relates to a power generation element that converts thermal energy into electrical energy, a power generation device, an electronic device, and a method of manufacturing a power generation element.

In recent years, the development of power generation elements that generate electrical energy using thermal energy has been actively carried out. In particular, regarding a power generation element that does not require a temperature difference, for example, the power generation element disclosed in Patent Document 1 has been proposed. Such a power generation element is expected to be used in various applications as compared with a configuration in which electric energy is generated by utilizing a temperature difference given to electrodes.

Patent Document 1 discloses a first substrate having a first main surface, a second substrate having a second main surface facing the first main surface, and a first electrode section and a first electrode section spaced apart from the second substrate. a support portion provided between the second electrode portion having a work function different from that of the first substrate, the first substrate, and the second substrate, separated from the first electrode portion and the second electrode portion, and containing a metal; A thermoelectric element is disclosed that includes an electrode portion and an intermediate portion that is disposed between the second electrode portion and that includes nanoparticles.

JP 2020-47631 A

Here, in a power generation element that does not require a temperature difference, continuous power generation is expected, but there is a risk that nanoparticles will adhere to the side surface of the support part containing metal. At this time, since the amount of nanoparticles dispersed between the electrodes is reduced, the problem is that the power generation efficiency decreases over time. In this regard, it is difficult for Patent Document 1 to solve the above-described problems.

Accordingly, the present invention has been devised in view of the above-described problems, and its object is to provide a power generating element, a power generating device, an electronic device, and a power generating element capable of suppressing a decrease in power generation efficiency. It is to provide a manufacturing method.

A power generation element according to a first aspect of the invention is a power generation element that converts thermal energy into electrical energy, and includes a first substrate and a second substrate provided apart from each other along a first direction, and the first substrate. a first electrode provided on the main surface; a second electrode provided on the main surface of the second substrate spaced from the first electrode and having a work function higher than that of the first electrode; an intermediate portion provided between the first electrode and the second electrode and containing a solvent in which nanoparticles are dispersed; and an intermediate portion provided between the first substrate and the second substrate and separated from the intermediate portion and a support portion containing metal, and a protection portion provided between the intermediate portion and the support portion, in contact with the intermediate portion, and having insulating properties.

A power generation element according to a second invention is characterized in that, in the first invention, the protection portion is provided apart from the support portion.

A power generation element according to a third aspect of the invention is characterized in that, in the second aspect of the invention, the protective portion is provided in contact between the first electrode and the second electrode.

A power generation element according to a fourth invention is characterized in that, in the first invention, the support portion is separated from the first electrode and the second electrode.

A power generation element according to a fifth aspect of the invention is characterized in that, in the first aspect of the invention, a penetrating portion is provided in at least one of the first substrate and the second substrate.

A power generation element according to a sixth aspect of the invention is characterized in that, in the fifth aspect of the invention, the penetrating portion is separated from the first electrode and the second electrode when viewed from the first direction.

A power generating device according to a seventh aspect of the invention includes the power generating element according to the first aspect of the invention, a first wiring electrically connected to the first electrode, and a second wiring electrically connected to the second electrode. It is characterized by having

An electronic device according to an eighth invention is characterized by comprising the power generation element according to the first invention and an electronic component driven by using the power generation element as a power supply.

A method for manufacturing a power generation element according to a ninth aspect of the present invention includes forming a first electrode on the main surface of a first substrate, and forming a second electrode having a work function higher than that of the first electrode on the main surface of a second substrate. a supporting portion forming step of forming a supporting portion containing a metal on at least one of above the main surface of the first substrate and above the main surface of the second substrate; forming an electrode on the first substrate; a protective portion forming step of forming a protective portion having insulating properties on at least one of the upper main surface and the upper main surface of the second substrate; separating the first electrode and the second electrode in a first direction; a bonding step of bonding the first substrate and the second substrate via the support portion so as to face each other, and nanoparticles are dispersed so as to be in contact with the protection portion and separated from the support portion and an intermediate portion forming step of forming an intermediate portion containing the solvent.

According to the first to eighth inventions, the supporting portion containing metal and separated from the intermediate portion, and the protective portion provided between the intermediate portion and the supporting portion and in contact with the intermediate portion and having insulating properties are provided. Prepare. Therefore, it is possible to suppress a decrease in the amount of nanoparticles dispersed between the electrodes. As a result, a decrease in power generation efficiency can be suppressed.

In particular, according to the second invention, the protection section is provided apart from the support section. Therefore, when the first substrate and the second substrate are bonded via the supporting portion, it is possible to prevent the bonding strength from being lowered due to, for example, the protective portion coming into contact with the supporting portion. Thereby, the first substrate and the second substrate can be firmly bonded by the supporting portion.

In particular, according to the third invention, the protective portion is provided in contact between the first electrode and the second electrode. Therefore, it is possible to fix the protective portion to the first electrode and the second electrode more firmly than in the case where the protective portion is fixed to the first substrate and the second substrate. As a result, it is possible to suppress the fluctuation of the protective portion.

In particular, according to the fourth invention, the supporting portion is separated from the first electrode and the second electrode. Therefore, it is possible to prevent short-circuiting of the electrodes through the supporting portion.

In particular, according to the fifth invention, the penetrating portion provided in at least one of the first substrate and the second substrate is further provided. Therefore, the intermediate portion can be filled and provided between the first electrode and the second electrode through the through portion. As a result, the manufacturing process of the power generation element can be simplified. Further, when it becomes necessary to replace the intermediate portion due to the use of the power generating element, it is possible to easily replace the intermediate portion.

In particular, according to the sixth invention, the penetrating portion is separated from the first electrode and the second electrode when viewed from the first direction. Therefore, when foreign matter enters between the first electrode and the second electrode through the through portion when filling the intermediate portion, adhesion of the foreign matter to the first electrode and the second electrode is suppressed. be able to. As a result, deterioration of the quality of the power generation element can be suppressed.

According to the ninth invention, in the intermediate portion forming step, the intermediate portion containing the solvent in which the nanoparticles are dispersed is formed so as to be in contact with the protective portion and separated from the support portion. Therefore, it is possible to suppress a decrease in the amount of nanoparticles dispersed between the electrodes. As a result, a decrease in power generation efficiency can be suppressed.

FIG. 1(a) is a schematic cross-sectional view showing an example of a power generation element and a power generation device in the first embodiment, and FIG. 1(b) is a schematic plan view along AA in FIG. 1(a). be. FIG. 2 is a schematic cross-sectional view showing an example of the intermediate portion. FIG. 3 is a flow chart showing an example of a method for manufacturing a power generation element according to the first embodiment. FIGS. 4(a) to 4(d) are schematic diagrams showing an example of the method for manufacturing the power generation element according to the first embodiment. 5(a) to 5(d) are schematic diagrams showing an example of the method for manufacturing the power generating element according to the first embodiment. FIGS. 6(a) to 6(d) are schematic diagrams showing an example of the method for manufacturing the power generation element according to the first embodiment. FIG. 7(a) is a schematic cross-sectional view showing an example of the power generation element and the power generation device in the second embodiment, and FIG. 7(b) is a schematic plan view along BB in FIG. 7(a). be. FIG. 8 is a flow chart showing an example of a method for manufacturing a power generation element according to the second embodiment. 9(a) to 9(d) are schematic diagrams showing an example of a method for manufacturing a power generation element according to the second embodiment. FIG. 10(a) is a schematic cross-sectional view showing an example of the power generation element and the power generation device in the third embodiment, and FIG. 10(b) is a schematic plan view along CC in FIG. 10(a). be. FIG. 11 is a flow chart showing an example of a method for manufacturing a power generation element according to the third embodiment. 12(a) to 12(d) are schematic diagrams showing an example of a method for manufacturing a power generation element according to the third embodiment. 13(a) and 13(b) are schematic diagrams showing an example of a method for manufacturing a power generation element according to the third embodiment. FIGS. 14(a) to 14(d) are schematic block diagrams showing examples of electronic devices provided with power generation elements, and FIGS. 14(e) to 14(h) show power generators including power generation elements. It is a schematic block diagram which shows the example of the electronic device provided.

An example of a power generation element, a power generation device, an electronic device, a power generation method, and a method of manufacturing a power generation element as embodiments of the present invention will be described below with reference to the drawings. In each figure, the height direction in which each electrode is stacked is defined as a first direction Z, and one planar direction that intersects, for example, is orthogonal to the first direction Z is defined as a second direction X. A third direction Y is another planar direction that intersects, for example, is orthogonal to each of the directions X. As shown in FIG. Also, the configuration in each drawing is schematically described for explanation, and for example, the size of each configuration and the comparison of the size of each configuration may differ from those in the drawings.

(First Embodiment: Power Generation Element 1, Power Generation Device 100)
FIG. 1 is a schematic diagram showing an example of a power generation element 1 and a power generation device 100 in this embodiment. FIG. 1(a) is a schematic cross-sectional view showing an example of a power generation element 1 and a power generation device 100 in the present embodiment, and FIG. 1(b) is a schematic plane along AA in FIG. 1(a). It is a diagram.

(Power generator 100)
As shown in FIG. 1( a ), the power generation device 100 includes a power generation element 1 , first wiring 101 and second wiring 102 . The power generation element 1 converts thermal energy into electrical energy. For example, the power generation device 100 including such a power generation element 1 is mounted or installed on a heat source (not shown), and based on the thermal energy of the heat source, the electrical energy generated from the power generation element 1 is transferred to the first wiring 101 and the second wiring 101. 2 output to the load R via the wiring 102 . One end of the load R is electrically connected to the first wiring 101 and the other end is electrically connected to the second wiring 102 . A load R indicates, for example, an electrical device. The load R is driven, for example, using the generator 100 as a main power source or an auxiliary power source.

Examples of heat sources for the power generation element 1 include electronic devices or electronic parts such as CPUs (Central Processing Units), light emitting elements such as LEDs (Light Emitting Diodes), engines such as automobiles, production equipment in factories, human bodies, sunlight, and environmental temperature. For example, electronic devices, electronic parts, light-emitting elements, engines, production equipment, etc. are artificial heat sources. The human body, sunlight, ambient temperature, etc. are natural heat sources. The power generation device 100 including the power generation element 1 can be provided inside mobile devices such as IoT (Internet of Things) devices and wearable devices and self-supporting sensor terminals, and can be used as an alternative or supplement to batteries. Furthermore, the power generation device 100 can also be applied to larger power generation devices such as solar power generation.

(Power generation element 1)
The power generation element 1 converts, for example, thermal energy generated by the artificial heat source or thermal energy possessed by the natural heat source into electrical energy to generate current. The power generation element 1 can be provided not only inside the power generation device 100, but also inside the mobile device, the self-contained sensor terminal, or the like. In this case, the power generation element 1 itself can serve as an alternative or auxiliary part of the battery, such as the mobile device or the self-contained sensor terminal.

For example, as shown in FIG. 1A, the power generation element 1 includes a first electrode 11, a second electrode 12, an intermediate portion 14, a first substrate 15, a second substrate 16, a support portion 17, and a protection unit 22 . The power generating element 1 may further include a penetrating portion 18 and a sealing portion 21 .

The first substrate 15 and the second substrate 16 are provided apart from each other along the first direction Z. The first electrode 11 is provided on the main surface of the first substrate 15 . The second electrode 12 is spaced apart from the first electrode 11 and provided on the main surface of the second substrate 16 and has a work function higher than that of the first electrode 11 . The first electrode 11 and the second electrode 12 are provided facing each other. The intermediate portion 14 is provided in a space 140 including a gap G between the first electrode 11 and the second electrode 12, as shown in FIG. 2, for example. Middle portion 14 includes nanoparticles 141 and solvent 142 . Nanoparticles 141 are dispersed in a solvent 142 to facilitate electron reception to each electrode 11,12.

The supporting portion 17 is provided in contact between the first substrate 15 and the second substrate 16, is separated from the intermediate portion 14, and contains metal. The protective portion 22 is provided between the intermediate portion 14 and the support portion 17, is in contact with the intermediate portion 14, and has insulating properties. Therefore, the nanoparticles 141 do not come into contact with the supporting portion 17 , so that the nanoparticles 141 can be prevented from adhering to the supporting portion 17 .

Here, the inventors have discovered that the nanoparticles 141 used in the power generation element 1 tend to adhere more easily to metal materials than to insulator materials. Based on this point, the protection part 22 of the power generating element 1 in this embodiment has insulating properties. Therefore, the amount of nanoparticles 141 adhering to the protective portion 22 can be significantly reduced compared to the support portion 17 . This can suppress a decrease in the amount of nanoparticles 141 dispersed between the electrodes. Therefore, it is possible to suppress a decrease in power generation efficiency.

The details of each configuration are described below.

<First Electrode 11, Second Electrode 12>
The 1st electrode 11 and the 2nd electrode 12 are spaced apart, for example, as shown to Fig.1 (a). The first electrode 11 and the second electrode 12 are spaced apart in the first direction Z, for example. The first electrode 11 and the second electrode 12 may be spaced apart in the second direction X or the third direction Y, for example.

Each of the electrodes 11 and 12 may extend in the second direction X and the third direction Y, for example, and may be provided in plurality. For example, one second electrode 12 may be provided facing the plurality of first electrodes 11 at different positions. Also, for example, one first electrode 11 may be provided facing the plurality of second electrodes 12 at different positions.

The first electrode 11 and the second electrode 12 have different work functions, for example. A conductive material is used as the material of the first electrode 11 and the second electrode 12 . As materials for the first electrode 11 and the second electrode 12, for example, the same material may be used as the electrodes 11 and 12, and in this case, they may have different work functions.

As the material of the electrodes 11 and 12, for example, a material composed of a single element such as iron, aluminum, or copper may be used, or an alloy material composed of, for example, two or more elements may be used. A non-metallic conductor, for example, may be used as the material of the electrodes 11 and 12 . Examples of nonmetallic conductors include silicon (Si: for example, p-type Si or n-type Si) and carbon-based materials such as graphene.

The thickness of the first electrode 11 and the second electrode 12 along the first direction Z is, for example, 4 nm or more and 1 μm or less. The thickness of the first electrode 11 and the second electrode 12 along the first direction Z may be, for example, 4 nm or more and 50 nm or less.

The gap G, which indicates the distance between the first electrode 11 and the second electrode 12, indicates the length along the first direction Z, as shown in FIG. 2, for example. For example, by shortening the gap G, the power generation efficiency of the power generation element 1 can be improved. Further, for example, by shortening the gap G, the thickness of the power generation element 1 along the first direction Z can be reduced. For these reasons, it is desirable that the gap G be as short as possible.

The gap G is a finite value of 10 μm or less, for example. When the gap G is, for example, 1 μm or more and 5 μm or less, it is possible to suppress the influence of the variation in the gap G on the power generation efficiency. When the gap G is, for example, 10 nm or more and 100 nm or less, the power generation efficiency can be improved. The gap G depends on, for example, the thickness of the support portion 17, and also depends on the arrangement conditions of the electrodes 11 and 12 when the electrodes 11 and 12 are provided on the same substrate.

<Intermediate part 14>
The intermediate portion 14 is provided within a space 140 formed between the electrodes 11 , 12 . The intermediate portion 14 may be in contact with the main surfaces of the electrodes 11 and 12 facing each other, and may also be in contact with the side surfaces of the electrodes 11 and 12, for example. The intermediate portion 14 may contain, for example, multiple types of nanoparticles 141 .

The particle diameter of the nanoparticles 141 is a finite value smaller than the gap G. The particle diameter of the nanoparticles 141 is a finite value of 1/10 or less of the gap G, for example. When the particle diameter of the nanoparticles 141 is 1/10 or less of the gap G, the intermediate portion 14 containing the nanoparticles 141 can be easily formed in the space 140 . This makes it possible to improve the workability when generating the power generation element 1 .

Here, "nanoparticles" refer to those containing multiple particles. The nanoparticles 141 include particles having a particle diameter of, for example, 2 nm or more and 100 nm or less. The nanoparticles 141 may include, for example, particles having a median diameter (median diameter: D50) of 3 nm or more and 8 nm or less, or particles having an average particle diameter of 3 nm or more and 8 nm or less. good. The median diameter or average particle diameter can be measured, for example, by using a particle size distribution analyzer. As the particle size distribution measuring instrument, for example, a particle size distribution measuring instrument using a dynamic light scattering method (eg, Zetasizer Ultra manufactured by Malvern Panalytical, etc.) may be used.

The nanoparticles 141 contain, for example, a conductor. The value of the work function of the nanoparticles 141 is, for example, between the value of the work function of the first electrode 11 and the value of the work function of the second electrode 12, and for example, the value of the work function of the first electrode 11. , and the value of the work function of the second electrode 12, and is optional.

At least one of gold and silver can be selected as an example of the material of the nanoparticles 141 . Additionally, nanoparticles 141 may include, for example, metal oxides. Examples of nanoparticles 141 containing metal oxides include zirconia (ZrO ₂ ), titania (TiO ₂ ), silica (SiO ₂ ), alumina (Al ₂ O ₃ ), iron oxides (Fe ₂ O ₃ , Fe ₂ O ₅ ). , copper oxide (CuO), zinc oxide (ZnO), yttria (Y2O3), niobium oxide _{( Nb2O5} ), molybdenum oxide _{( MoO3} ), indium oxide _{( In2O3} ), tin oxide ₍ SnO2 ), tantalum oxide (Ta ₂ O ₅ ), tungsten oxide (WO ₃ ), lead oxide (PbO), bismuth oxide (Bi ₂ O ₃ ), ceria (CeO ₂ ), antimony oxide (Sb ₂ O ₅ , Sb ₂ O ₃ ), a metal oxide of at least one element selected from the group consisting of metals and Si is used.

In addition, since the nanoparticles 141 contain a metal oxide, the dispersibility in the solvent 142 can be improved, and the deterioration of the power generation efficiency due to aggregation of the nanoparticles 141 can be suppressed. In addition, when the nanoparticles 141 contain a metal oxide, the choice of materials can be increased, and the material cost can be reduced.

Materials other than magnetic substances may also be used as the nanoparticles 141 . For example, when a magnetic material is used as the nanoparticles 141, movement of the nanoparticles 141 may be restricted by a magnetic field generated due to the environment in which the power generation element 1 is installed. Therefore, by using a material other than a magnetic material as the nanoparticles 141, it is possible to suppress deterioration in power generation efficiency over time without being affected by the magnetic field caused by the external environment.

The nanoparticles 141 include, for example, a coating 141a on the surface. The thickness of the coating 141a is, for example, a finite value of 20 nm or less. By providing such a film 141a on the surfaces of the nanoparticles 141, aggregation of the nanoparticles 141 in the space 140 can be suppressed, for example. In addition, for example, it is possible to increase the possibility of electrons moving between the first electrode 11 and the nanoparticles 141 and between the second electrode 12 and the nanoparticles 141 using the tunnel effect or the like. .

A material having, for example, a thiol group or a disulfide group is used as the coating 141a. Alkanethiol such as dodecanethiol is used as the material having a thiol group. As a material having a disulfide group, for example, an alkane disulfide or the like is used.

The solvent 142 contains, for example, an organic solvent. Examples of organic solvents include aromatic hydrocarbon compounds, aromatic ester compounds, aromatic ether compounds, aromatic ketone compounds, aliphatic hydrocarbon compounds, aliphatic ester compounds, aliphatic ether compounds, aliphatic ketone compounds, alcohol compounds, Amide compounds, thiol compounds, other compounds, and the like are used, and one or two or more of them may be used. Since the solvent 142 contains an organic solvent, it is possible to reduce the material cost.

In addition to the materials described above, for example, dimethylsulfoxide, acetone, chloroform, methylene chloride, etc. may be used as the solvent 142 .

For the solvent 142, for example, a liquid with a boiling point of 60°C or higher can be used. Therefore, vaporization of the solvent 142 can be suppressed even when the power generation element 1 is used in an environment of room temperature (for example, 15° C. to 35° C.) or higher. As a result, deterioration of the power generating element 1 due to evaporation of the solvent 142 can be suppressed.

<First Substrate 15, Second Substrate 16>
The first substrate 15 is in contact with the first electrode 11 and separated from the second electrode 12, as shown in FIG. 1(a), for example. The first substrate 15 fixes the first electrode 11 . The second substrate 16 is in contact with the second electrode 12 and separated from the first electrode 11 . A second substrate 16 fixes the second electrode 12 . The first substrate 15 and the second substrate 16 are spaced apart in the first direction Z with the electrodes 11 and 12 and the intermediate portion 14 therebetween, for example. The power generation element 1 may further include a penetrating portion 18 provided in at least one of the first substrate 15 and the second substrate 16 . The power generation element 1 may further include a sealing portion 21 that seals the penetrating portion 18 .

The thickness of each of the substrates 15 and 16 along the first direction Z is, for example, 10 μm or more and 2 mm or less. The thickness of each substrate 15, 16 can be set arbitrarily. The shape of each of the substrates 15 and 16 may be, for example, square, rectangular, or disk-like, and can be arbitrarily set according to the application.

As the substrates 15 and 16, for example, plate-shaped members having insulation properties can be used, and known members such as silicon, quartz, and Pyrex (registered trademark) can be used. For each of the substrates 15 and 16, for example, a film-like member may be used, and for example, a known film-like member such as PET (polyethylene terephthalate), PC (polycarbonate), polyimide, or the like may be used.

For the substrates 15 and 16, for example, a member having conductivity can be used, such as iron, aluminum, copper, or an alloy of aluminum and copper. As the substrates 15 and 16, for example, a member such as a conductive polymer may be used in addition to a conductive semiconductor such as Si or GaN. If conductive members are used for the substrates 15 and 16, wiring for connecting to the electrodes 11 and 12 becomes unnecessary.

<Support portion 17>
The support portion 17 supports the first substrate 15 and the second substrate 16 and bonds the first substrate 15 and the second substrate 16 together. By providing the support portion 17, the gap G can be formed with high accuracy. In particular, when the supporting portion 17 contains a metal, it is possible to improve the bonding strength and suppress variations in the gap G. FIG.

For example, as shown in FIG. 1(b), the support part 17 is formed in a hollow rectangular shape when viewed from the first direction Z, and surrounds the electrodes 11 and 12, the intermediate part 14 and the protection part 22. The shape of the support portion 17 is arbitrary as long as it surrounds the protection portion 22 and supports the first substrate 15 and the second substrate 16 .

The support portion 17 has a first support portion 17a and a second support portion 17b. The first support portion 17 a is provided on the first substrate 15 . The second support portion 17 b is provided on the second substrate 16 . The first support portion 17a and the second support portion 17b are in contact with each other.

A material having insulating properties, for example, is used as the support portion 17 . Examples of the supporting portion 17 include silicon oxide and polymer. Examples of polymers include polyimide, PMMA (polymethyl methacrylate), and polystyrene. When a material having insulating properties is used for the support portion 17, metal may be included in, for example, surfaces of the support portions 17a and 17b that are in contact with each other. In this case, it is possible to improve the bonding strength.

Further, it is more preferable to use, for example, metal as the support portion 17 . Examples of metals are gold, nickel, tungsten, tantalum, molybdenum, lead, platinum, silver or tin, as well as gold and chromium laminates or gold and nickel laminates. Since the support portions 17a and 17b contain metal, the thickness when forming the support portions 17a and 17b can be easily controlled. Thickness variations in the portions 17a and 17b can be prevented. Thereby, the gap G can be formed with high accuracy.

For example, when gold is used for the surfaces of the support portions 17a and 17b, the gold portions exposed on the surfaces of the support portions 17a and 17b can be easily bonded using, for example, a thermocompression bonding method. Thereby, the inter-electrode gap can be formed with higher accuracy.

Note that the supporting portion 17 may be provided by oxidizing at least a portion of at least one of the first substrate 15 and the second substrate 16, for example. In this case, the support portion 17 can be easily provided. Further, in this case, for example, metal may be included in the mutually contacting surfaces of the support portions 17a and 17b. In this case, it is possible to improve the bonding strength.

By separating the electrodes 11 and 12 from the support portion 17 , it is possible to prevent short circuits between the electrodes 11 and 12 via the support portion 17 .

<Protective part 22>
The protection portion 22 is provided, for example, apart from the support portion 17 . In this case, it is possible to prevent the protection portion 22 from entering the joint surface when the support portion 17 is formed. In addition, it is possible to prevent heat from being transferred from the intermediate portion 14 to the support portion 17 via the protective portion 22, thereby suppressing consumption of thermal energy.

The protection part 22 is provided in contact with, for example, between the first electrode 11 and the second electrode 12 . The protective portion 22 is provided in contact with, for example, between the first electrode 11 and the second electrode 12, so that the intermediate portion 14 can be easily sealed. In addition, the protective portion 22 is provided in contact with, for example, between the first electrode 11 and the second electrode 12 , thereby facilitating the formation of the protective portion 22 when manufacturing the power generating element 1 .

Note that the protective portion 22 may be provided in contact between the first substrate 15 and the second substrate 16, for example. In this case, compared to the case where the protective portion 22 is provided between the electrodes 11 and 12, the facing areas of the electrodes 11 and 12 can be increased. This makes it possible to improve the amount of current generated between the electrodes 11 and 12 .

The protection part 22 is formed in a hollow rectangular shape when viewed from the first direction Z, and surrounds the electrodes 11 and 12 and the intermediate part 14 . The protective portion 22 has an inner surface in contact with the intermediate portion 14 . The protective portion 22 is provided to prevent the nanoparticles 141 from adhering to the support portion 17 and can seal the intermediate portion 14 .

As the protective part 22, for example, a material having insulating properties can be used. Furthermore, as the protective part 22, for example, a fluororesin such as CYTOP (registered trademark) or Teflon (registered trademark) can be used.

<<Penetration part 18>>
The penetrating portion 18 penetrates the first substrate 15 in the first direction Z, as shown in FIG. 1A, for example. The penetrating part 18 may penetrate at least one of the first substrate 15 and the second substrate 16 in the first direction Z, for example.

The penetrating part 18 penetrates the first substrate 15 in the first direction Z, and penetrates the first electrode 11, for example. For example, one or more penetrating portions 18 are provided. The penetrating portion 18 is separated from the first electrode 11 and the second electrode 12 when viewed from the first direction Z, for example.

When viewed from the first direction Z, the penetrating portion 18 may be formed in a circular shape, or may be formed in an elliptical shape or a groove shape, for example. The penetrating portion 18 may be formed in a tapered shape that narrows from the outside to the inside of the power generation element 1, or may be formed in a reverse tapered shape, a bowing shape, or a straight shape, for example.

<<sealing portion 21>>
The sealing portion 21 seals the penetrating portion 18 . The sealing portion 21 covers the outer side of the penetrating portion 18 and is provided on the penetrated first substrate 15 . The sealing portion 21 may be provided, for example, at least partially inside the through portion 18 . The sealing portions 21 are provided according to the number of the through portions 18 .

For example, an insulating resin is used as the material of the sealing portion 21, and an example of the insulating resin is a fluorine-based insulating resin.

<Operation of Power Generation Element 1>
When thermal energy is applied to the power generation element 1, a current is generated between the first electrode 11 and the second electrode 12, and the thermal energy is converted into electrical energy. The amount of current generated between the first electrode 11 and the second electrode 12 depends on thermal energy and also depends on the difference between the work function of the second electrode 12 and the work function of the first electrode 11 .

The amount of current generated can be increased, for example, by increasing the work function difference between the first electrode 11 and the second electrode 12 and by decreasing the gap between the electrodes. For example, the amount of electrical energy generated by the power generation element 1 can be increased by considering at least one of increasing the work function difference and decreasing the inter-electrode gap.

　The "work function" indicates the minimum energy required to extract electrons in a solid into a vacuum. The work function can be determined by, for example, the Kelvin method, ultraviolet photoelectron spectroscopy (UPS), X-ray photoelectron spectroscopy (XPS), and Auger electron spectroscopy (AES). can be measured using

(Embodiment: Method for manufacturing power generation element 1)
Next, an example of a method for manufacturing the power generating element 1 according to this embodiment will be described. FIG. 3 is a flow chart showing an example of a method for manufacturing the power generating element 1 according to this embodiment. 4(a) to 6(d) are schematic diagrams showing an example of the method of manufacturing the power generating element according to the first embodiment.

<<Electrode Forming Step S110>>
First, as shown in FIG. 4A, for example, the first electrode 11 is formed on the main surface of the first substrate 15, and as shown in FIG. 4B, for example, on the main surface of the second substrate 16. A second electrode 12 is formed (electrode forming step S110). Each of the electrodes 11 and 12 is formed in a square shape when viewed from the first direction Z. As shown in FIG.

In the electrode forming step S110, the electrodes 11 and 12 may be formed using, for example, a sputtering method or a vapor deposition method, or may be formed using, for example, a screen printing method, an inkjet method, a spray printing method, or the like. For example, aluminum may be used as the first electrode 11 and platinum may be used as the second electrode 12, or the materials described above may be used.

In the electrode forming step S110, a part of each of the electrodes 11 and 12 may be removed using, for example, a known etching method or the like. In this case, a layer (supporting layer) having the same thickness as the electrodes 11 and 12 is formed at a location spaced apart from the layers functioning as the electrodes 11 and 12 .

<<Support portion forming step S120>>
Next, as shown in FIG. 4C, for example, a first supporting portion 17a is formed above the main surface of the first substrate 15, and as shown in FIG. 4D, for example, the main surface of the second substrate 16 is formed. The second support portion 17b is formed above (support portion forming step S120). Each support part 17a, 17b is formed in a hollow quadrangular shape when viewed from the first direction Z. As shown in FIG. Each support portion 17a, 17b is spaced apart from each electrode 11, 12. As shown in FIG.

In the supporting portion forming step S120, the supporting portions 17a and 17b are formed in a vacuum environment using, for example, a sputtering method or a vapor deposition method. Each support 17a, 17b may be formed below. A metal, such as gold, is used for each of the support portions 17a and 17b. For example, when a laminate of gold and chromium or a laminate of gold and nickel is used as each of the supports 17a and 17b, chromium or nickel is formed on each substrate 15 and 16, and gold is formed thereon. be. As a result, the gold is exposed on the upper surfaces of the support portions 17a and 17b.

For example, the support portion forming step S120 may form the support portion 17 including the support layer by forming the material described above on the support layer formed in the electrode formation step S110. In this case, compared to the case where the support portions 17 are formed directly on the respective substrates 15 and 16, the accuracy of the position of forming the support portions 17 can be improved. In addition, since the support portion 17 includes a support layer similar to the material of the electrodes 11 and 12, it is possible to reduce the load acting on the substrates 15 and 16 due to thermal expansion, for example.

In addition, in the supporting portion forming step S120, the supporting portion 17 may be formed on at least one of the main surface of the first substrate 15 and the main surface of the second substrate 16 . The supporting portion 17 may or may not be in contact with the first substrate 15 as long as it is above the main surface of the first substrate 15 . The supporting portion 17 may or may not be in contact with the second substrate 16 as long as it is above the main surface of the second substrate 16 .

<<protection portion forming step S130>>
Next, for example, as shown in FIG. 5A, the protective portion 22 is formed above the main surface of the first electrode 11 (protective portion forming step S130). The protection part 22 is formed in a hollow rectangular shape when viewed from the first direction Z, as shown in FIG. 5B, for example. The protective part 22 has insulating properties, and Cytop (registered trademark) is used, for example.

In the protection portion forming step S130, the protection portion 22 is formed in a vacuum environment using, for example, a sputtering method or a vapor deposition method. A portion 22 may be formed.

In addition, in the protective portion forming step S130, the protective portion 22 may be formed on at least one of the main surface of the first substrate 15 and the main surface of the second substrate 16. FIG. The protective portion 22 may or may not be in contact with the first substrate 15 as long as it is above the main surface of the first substrate 15 . The protective portion 22 may or may not be in contact with the second substrate 16 as long as it is above the main surface of the second substrate 16 .

<<Penetration Portion Forming Step S140>>
Next, for example, as shown in FIG. 5C, the through portion 18 is formed in the first substrate 15 (through portion forming step S140). The penetrating portion 18 is formed in a circular shape when viewed from the first direction Z, as shown in FIG. 5D, for example. The penetrating portion 18 penetrates the first substrate 15 in the first direction Z, and penetrates the first electrode 11, for example. For example, one or more penetrating portions 18 are provided. The penetrating portion 18 is separated from the first electrode 11 when viewed from the first direction Z. As shown in FIG.

In the penetrating portion forming step S140, the penetrating portion 18 may be formed in the first substrate 15 using, for example, a drill, or may be formed using anisotropic etching such as reactive ion etching. In addition, the penetrating portion forming step S140 may form the penetrating portion 18 in the second substrate 16, for example.

<<Joining step S150>>
Next, as shown in FIGS. 6A and 6B, for example, the first electrode 11 and the second electrode 12 are separated from each other in the first direction Z and face each other with the support portion 17 interposed therebetween. to bond the first substrate 15 and the second substrate 16 (bonding step S150). In the bonding step S150, for example, as shown in FIG. 6A, the first electrode 11 and the second electrode 12 are separated from each other in the first direction Z so as to face each other. 22 is provided on the second electrode 12 . When the protective portion 22 is provided on the second electrode 12, the first support portion 17a and the second support portion 17b are separated in the first direction Z. As shown in FIG.

Then, in the joining step S150, for example, as shown in FIG. 6B, the protection portion 22 is crushed in the first direction Z, and the upper surface of the first support portion 17a and the upper surface of the second support portion 17b are joined. do. By crushing the protective portion 22, the intermediate portion 14 can be more easily sealed. In addition, by providing the protection portion 22 in contact with the first electrode 11 and the second electrode 12 , the first electrode 11 and the second electrode 11 can be separated from each other more than when the protection portion 22 is fixed to the first substrate 15 and the second substrate 16 . The protective portion 22 can be firmly fixed to the two electrodes 12 . As a result, fluctuations in the protective portion 22 can be suppressed.

Further, when the protection portion 22 is separated from the support portion 17, for example, in a state where the crushed protection portion 22 is sandwiched between the first support portion 17a and the second support portion 17b, the support portions 17a and 17b are separated from each other. You can prevent it from joining. Therefore, when the first substrate 15 and the second substrate 16 are bonded via the supporting portion 17, the bonding strength can be prevented from being lowered.

In the bonding step S150, the upper surfaces of the support portions 17a and 17b are brought into contact with each other and heated by, for example, a thermocompression bonding method, thereby bonding the support portions 17a and 17b. In this case, the gap G at each electrode 11, 12 depends on the thickness of each support 17a, 17b. Each supporting part 17a, 17b is sandwiched between each substrate 15, 16, and a gap G is formed.

<<Intermediate portion forming step S160>>
Next, for example, as shown in FIG. 6C, an intermediate portion 14 is formed between the first electrode 11 and the second electrode 12 (intermediate portion forming step S160). The intermediate portion 14 is separated from the support portion 17 and contacts the protection portion 22 . The protection portion 22 is provided between the intermediate portion 14 and the support portion 17 . The protective portion 22 surrounds the first electrode 11 , the second electrode 12 and the intermediate portion 14 .

In the intermediate portion forming step S160, the intermediate portion 14 is filled from at least one through portion 18, and the other through portion 18 is sucked (evacuated) to form the intermediate portion 14. Since the protective portion 22 is formed by being crushed in the first direction Z, it becomes easier to seal the intermediate portion 14 .

Also, the penetrating portion 18 is separated from the first electrode 11 and the second electrode 12 . Therefore, when foreign matter enters between the first electrode 11 and the second electrode 12 through the penetrating portion 18 when the intermediate portion 14 is filled, the foreign matter may enter the first electrode 11 and the second electrode 12 . Adhesion can be suppressed. As a result, deterioration of the quality of the power generation element can be suppressed.

<<sealing portion forming step S170>>
Next, as shown in FIG. 6D, for example, a sealing portion 21 for sealing the through portion 18 is formed (sealing portion forming step S170). Note that the sealing portion forming step S170 can be omitted.

The power generation element 1 in this embodiment is formed through the above-described steps. By connecting the first terminal 111, the second terminal 112, the first wiring 101, the second wiring 102, etc. shown in FIG. 100 can be formed.

Note that the order of the electrode formation step S110, the support portion formation step S120, and the protection portion formation step S130 is arbitrary, for example, before the bonding step S150 is performed.

Also, for example, the penetrating portion forming step S140 can be omitted. In this case, for example, after forming the protective portion 22 above the main surface of the first substrate 15 , the intermediate portion 14 is formed in a portion of the first electrode 11 surrounded by the protective portion 22 . Then, the first substrate 15 and the second substrate 16 are joined via the supporting portion 17 so that the first electrode 11 and the second electrode 12 are opposed to each other in the first direction Z while being separated from each other. Thereby, an intermediate portion 14 is formed between the first electrode 11 and the second electrode 12 .

According to the present embodiment, the supporting portion 17 containing metal is separated from the intermediate portion 14, and the protective portion 22 is provided between the intermediate portion 14 and the supporting portion 17, is in contact with the intermediate portion 14, and has insulating properties. , provided. Therefore, the decrease in the amount of nanoparticles 141 dispersed between the electrodes 11 and 12 can be suppressed. As a result, a decrease in power generation efficiency can be suppressed.

According to this embodiment, the support portion 17 contains metal. Therefore, variations in the thickness of the support portion 13 along the first direction Z can be suppressed. As a result, the gap G can be formed with high accuracy, and the amount of electrical energy generated can be stabilized.

According to this embodiment, the protection section 22 is provided apart from the support section 17 . Therefore, when the first substrate 15 and the second substrate 16 are bonded via the support portion 17, it is possible to prevent the bonding strength from being lowered due to the protection portion 22 coming into contact with the support portion 17, for example. Thereby, the first substrate 15 and the second substrate 16 can be firmly bonded by the supporting portion 17 .

According to the present embodiment, the protective portion 22 is provided in contact between the first electrode 11 and the second electrode 12 . Therefore, the protective portion 22 can be more firmly fixed to the first electrode 11 and the second electrode 12 than when the protective portion 22 is fixed to the first substrate 15 and the second substrate 16 . As a result, fluctuations in the protective portion 22 can be suppressed.

According to this embodiment, the support portion 17 is separated from the first electrode 11 and the second electrode 12 . Therefore, it is possible to prevent the electrodes 11 and 12 from being short-circuited via the supporting portion 17 .

According to this embodiment, the penetrating portion 18 provided in at least one of the first substrate 15 and the second substrate 16 is further provided. Therefore, the intermediate portion 14 can be filled and provided between the first electrode 11 and the second electrode 12 via the penetrating portion 18 . Thereby, simplification of the manufacturing process of the power generation element 1 can be achieved. Further, when it becomes necessary to replace the intermediate portion 14 due to the use of the power generating element 1, the intermediate portion 14 can be easily replaced.

According to the present embodiment, the penetrating portion 18 is separated from the first electrode 11 and the second electrode 12 when viewed from the first direction Z. Therefore, when foreign matter enters between the first electrode 11 and the second electrode 12 through the penetrating portion 18 when the intermediate portion 14 is filled, the foreign matter may enter the first electrode 11 and the second electrode 12 . Adhesion can be suppressed. As a result, deterioration of the quality of the power generation element can be suppressed.

(Second Embodiment: Power Generation Element 1, Power Generation Device 100)
Next, the power generation device 100 and the power generation element 1 according to the second embodiment will be described. FIG. 7 is a schematic diagram showing an example of the power generation device 100 and the power generation element 1 according to the second embodiment. FIG. 7A is a schematic cross-sectional view showing an example of the power generation device 100 and the power generation element 1 according to the second embodiment, and FIG. It is a schematic cross-sectional view.

The difference between the above-described first embodiment and the second embodiment is that openings 19 are provided. In addition, description is abbreviate|omitted about the structure similar to embodiment mentioned above.

<<opening 19>>
The opening 19 penetrates the first substrate 15 in the first direction Z, as shown in FIG. 7A, for example. The opening 19 may penetrate at least one of the first substrate 15 and the second substrate 16 in the first direction Z, for example.

The opening 19 penetrates the first substrate 15 in the first direction Z and connects to the space between the supporting portion 17 and the protecting portion 22 . For example, one or more openings 19 are provided. The opening 19 is separated from the first electrode 11 and the second electrode 12 when viewed from the first direction Z, for example.

When viewed from the first direction Z, the opening 19 may be circular, or may be elliptical or groove-shaped, for example. The opening 19 may be formed in a tapered shape that narrows from the outside to the inside of the power generation element 1, or may be formed in a reverse tapered shape, a bowing shape, or a straight shape, for example.

Although not shown, a sealing portion 21 for sealing the opening 19 may be provided. The sealing portion 21 covers the outside of the opening 19 and is provided on the penetrated first substrate 15 . The sealing portion 21 may be provided, for example, at least partially within the opening portion 19 . The sealing portions 21 are provided according to the number of openings 19 . For example, an insulating resin is used as the material of the sealing portion 21, and an example of the insulating resin is a fluorine-based insulating resin.

By having the opening 19, for example, in the bonding step S150 of the method for manufacturing the power generation element 1 described above, when the first substrate 15 and the second substrate 16 are bonded via the support 17, the support 17 and the protection are protected. Gas such as air in the space between the portion 22 and the portion 22 can be discharged to the outside of the power generation element 1 through the opening portion 19 . Thereby, the bonding between the first substrate 15 and the second substrate 16 via the supporting portion 17 can be easily performed.

<Second Embodiment: Method for Manufacturing Power Generation Element 1>
Next, an example of a method for manufacturing the power generation element 1 will be described. FIG. 8 is a flow chart showing an example of a method for manufacturing the power generating element 1 according to this embodiment. 9(a) to 9(d) are schematic cross-sectional views showing an example of a method for manufacturing the power generating element 1 according to this embodiment.

As shown in FIG. 8, an electrode forming step S110, a supporting portion forming step S120, a protective portion forming step S130, and a penetrating portion forming step S140 are performed in the same manner as in the above-described embodiment.

<<opening forming step S210>>
Next, as shown in FIG. 9A, for example, an opening 19 is formed in the first electrode 11 (opening forming step S210). The opening 19 is formed in a circular shape when viewed from the first direction Z, as shown in FIG. 9B, for example. The opening 19 penetrates the first substrate 15 in the first direction Z and connects to the space between the support portion 17 and the protection portion 22 . For example, one or more openings 19 are provided.

In the opening forming step S210, for example, in addition to forming the opening 19 in the first substrate 15 using a drill, the opening 19 may be formed using anisotropic etching such as reactive ion etching. The opening forming step S210 may form the opening 19 in the second substrate 16, for example.

<<Joining step S150>>
Next, as shown in FIGS. 9(c) and 9(d), the first electrode 11 and the second electrode 12 are separated from each other in the first direction Z so as to face each other with the supporting portion 17 interposed therebetween. to bond the first substrate 15 and the second substrate 16 (bonding step S150). In the joining step S150, for example, as shown in FIG. 22 is provided on the second electrode 12 . When the protective portion 22 is provided on the second electrode 12, the first support portion 17a and the second support portion 17b are separated in the first direction Z. As shown in FIG.

Then, in the bonding step S150, for example, as shown in FIG. do. By crushing the protective portion 22, the intermediate portion 14 can be more easily sealed. In addition, by providing the protection portion 22 in contact with the first electrode 11 and the second electrode 12 , the first electrode 11 and the second electrode 11 can be separated from each other more than when the protection portion 22 is fixed to the first substrate 15 and the second substrate 16 . The protective portion 22 can be firmly fixed to the two electrodes 12 . As a result, it is possible to prevent the protective portion 22 from coming off.

In the bonding step S<b>150 , when the first substrate 15 and the second substrate 16 are bonded via the support portion 17 , gas such as air in the space between the support portion 17 and the protection portion 22 is discharged from the opening portion 19 . It can be discharged to the outside of the power generation element 1 . This makes it possible to easily bond the first substrate 15 and the second substrate 16 by the supporting portion 17 .

After that, similarly to the embodiment described above, the intermediate portion forming step S160 and the sealing portion forming step S170 are performed.

According to the present embodiment, as in the above-described embodiment, a support portion 17 that is separated from the intermediate portion 14 and contains metal, is provided between the intermediate portion 14 and the support portion 17, is in contact with the intermediate portion 14, and a protective portion 22 having insulating properties. Therefore, the decrease in the amount of nanoparticles 141 dispersed between the electrodes 11 and 12 can be suppressed. As a result, a decrease in power generation efficiency can be suppressed.

Further, according to the present embodiment, at least one of the first substrate 15 and the second substrate 16 has an opening 19 penetrating in the first direction Z, and the opening 19 includes the support portion 17 and the protection portion 22 . It leads to the space between Therefore, when the first substrate 15 and the second substrate 16 are bonded via the support portion 17, gas such as air in the space between the support portion 17 and the protection portion 22 is discharged from the opening portion 19 to the power generation element. 1 can be discharged outside. Thereby, the first substrate 15 and the second substrate 16 can be easily bonded via the supporting portion 17 .

(Third Embodiment: Power Generation Element 1, Power Generation Device 100)
Next, the power generation device 100 and power generation element 1 according to the third embodiment will be described. FIG. 10 is a schematic diagram showing an example of the power generation device 100 and the power generation element 1 according to the third embodiment. FIG. 10(a) is a schematic cross-sectional view showing an example of the power generation device 100 and the power generation element 1 according to the third embodiment, and FIG. 10(b) is a cross-sectional view taken along line CC in FIG. It is a schematic plan view.

The difference between the above-described first embodiment and the third embodiment is that wiring layers 23 and connection wirings 24 are provided. In addition, description is abbreviate|omitted about the structure similar to embodiment mentioned above.

<<wiring layer 23>>
The wiring layer 23 is provided on the outer side (surface) of the power generating element 1, as shown in FIG. 10, for example.

The wiring layer 23 has, for example, at least one of a first wiring layer 23a and a second wiring layer 23b. The first wiring layer 23a is provided on the main surface of the first substrate 15 that faces the main surface on which the first electrode 11 is provided. That is, the first substrate 15 is sandwiched between the first wiring layer 23 a and the first electrode 11 . The second wiring layer 23b is provided on the main surface of the second substrate 16 that faces the main surface on which the second electrode 12 is provided. That is, the second substrate 16 is sandwiched between the second wiring layer 23 b and the second electrode 12 .

The thickness of the wiring layer 23 along the first direction Z is, for example, 100 nm or more and 10 μm or less. As a material of the wiring layer 23, a conductive material is used, for example, gold is used, and a layered body of gold and chromium or a layered body of gold and nickel is used.

<<connection wiring 24>>
The connection wiring 24 is provided, for example, in a through hole 25 penetrating through the substrates 15 and 16 in the first direction Z, and electrically connected to the electrodes 11 and 12 and the wiring layer 23 . The connection wiring 24 is provided, for example, by filling each through hole 25 . Moreover, the connection wiring 24 may be provided, for example, on the inner peripheral surface of each through hole 25 . The connection wiring 24 may be in contact with the intermediate portion 14 . The through hole 25 has a first through hole 25 a penetrating through the first substrate 15 and a second through hole 25 b penetrating through the second substrate 16 .

The connection wiring 24 has, for example, at least one of the first connection wiring 24a and the second connection wiring 24b. The first connection wiring 24a is electrically connected to the first electrode 11 and the first wiring layer 23a through a first through hole 25a passing through the first substrate 15 . Therefore, the connection point between the first connection wiring 24 a and the first electrode 11 is provided inside the power generation element 1 . The second connection wiring 24b is electrically connected to the second electrode 12 and the second wiring layer 23b via a second through hole 25b penetrating through the second substrate 16 . Therefore, the connection point between the second connection wiring 24 b and the second electrode 12 is provided inside the power generation element 1 . The connection points are portions of the connection wirings 24a and 24b that are particularly susceptible to deterioration.

The connection wiring 24 is provided, for example, by filling each through hole 25 . The connection wiring 24 may be provided on the inner peripheral surface of each through-hole 25, for example, and may be formed with a thickness of 100 nm or more and 10 μm or less. A conductive material such as gold is used as the material of the connection wiring 24 .

Although illustration is omitted, for example, the sealing portion 21 may cover at least a portion of the first through hole 25a, the first connection wiring 24a, and the first wiring layer 23a. At this time, the connection portion between the first wiring layer 23 a and the first connection wiring 24 a can be covered with the sealing portion 21 . For example, the sealing portion 21 may cover at least a portion of the second through hole 25b, the second connection wiring 24b, and the second wiring layer 23b. At this time, the connection portion between the second wiring layer 23b and the second connection wiring 24b can be covered with the sealing portion 21 . The connection points are portions of the connection wirings 24a and 24b that are particularly susceptible to deterioration, and are provided outside the power generation element 1. Therefore, by covering the connection points with the sealing portion 21, the power generation element 1 can be It becomes possible to improve durability.

<Third Embodiment: Manufacturing Method of Power Generation Element 1>
Next, an example of a method for manufacturing the power generation element 1 will be described. FIG. 11 is a flow chart showing an example of a method for manufacturing the power generating element 1 according to this embodiment. 12(a) to 13(b) are schematic diagrams showing an example of a method for manufacturing the power generating element 1 according to this embodiment.

<<connection wiring forming step S310>>
First, as shown in FIG. 12(a), a first through-hole 25a is formed in the first substrate 15, a first connection wiring 24a is formed in the first through-hole 25a, and as shown in FIG. 12(b). A second through hole 25b is formed in the second substrate 16, and a second connection wiring 24b is formed in the second through hole 25b (connection wiring forming step S310). One or more of the through holes 25a, 25b and the connection wirings 24a, 24b are provided.

In the connection wiring forming step S310, the connection wirings 24a and 24b are formed using, for example, a sputtering method. Gold, for example, is used for the connection wirings 24a and 24b.

<<wiring layer forming step S320>>
Next, as shown in FIG. 12C, a first wiring layer 23a is formed on one main surface of the first substrate 15, and as shown in FIG. 12D, one main surface of the second substrate 16 is formed. A second wiring layer 23b is formed on the surface (wiring layer forming step S320). Each wiring layer 23a, 23b is formed in a quadrangular shape when viewed from the first direction Z, for example.

In the wiring layer forming step S320, the wiring layers 23a and 23b may be formed using, for example, a sputtering method or a vapor deposition method, or may be formed using, for example, a screen printing method, an inkjet method, a spray printing method, or the like.

<<Electrode Forming Step S110>>
Next, as shown in FIG. 13A, for example, the first electrode 11 is formed on the main surface of the first substrate 15 opposite to the main surface on which the first wiring layer 23a is formed. As shown in (b), the second electrode 12 is formed on the main surface of the second substrate 16 opposite to the main surface on which the second wiring layer 23b is formed (electrode forming step S110). At this time, the first electrode 11 is electrically connected to the first wiring layer 23a through the first connection wiring 24a. Also, the second electrode 12 is electrically connected to the second wiring layer 23b through the second connection wiring 24b.

After that, as shown in FIG. 11, similarly to the embodiment described above, a support portion forming step S120, a protection portion forming step S130, a penetrating portion forming step S140, a bonding step S150, an intermediate portion forming step S160, and a sealing portion forming step are performed. S170 is implemented.

According to the present embodiment, as in the above-described embodiment, a support portion 17 that is separated from the intermediate portion 14 and contains metal, is provided between the intermediate portion 14 and the support portion 17, is in contact with the intermediate portion 14, and a protective portion 22 having insulating properties. Therefore, the decrease in the amount of nanoparticles 141 dispersed between the electrodes 11 and 12 can be suppressed. As a result, a decrease in power generation efficiency can be suppressed.

Further, according to the present embodiment, the first connection wiring 24a is electrically connected to the first electrode 11 and the first wiring layer 23a through the first through holes 25a. Therefore, the first connection wiring 24 a can be connected to the first electrode 11 inside the power generating element 1 . This makes it possible to suppress deterioration of the first connection wiring 24 a connected to the first electrode 11 .

Also, according to the present embodiment, the second connection wiring 24b is electrically connected to the second electrode 12 and the second wiring layer 23b via the second through hole 25b. Therefore, the second connection wiring 24b can be connected to the second electrode 12 inside the power generation element 1 . This makes it possible to suppress deterioration of the connection wirings 24 a and 24 b connected to the electrodes 11 and 12 . Moreover, since the second connection wiring 24b can be formed with the same structure as the first connection wiring 24a, the manufacturing process can be simplified.

Also, according to the present embodiment, the electrode forming step S110 forms the first connection wiring 24a electrically connected to the first electrode 11 and the first wiring layer 23a through the first through hole 25a. Therefore, the first connection wiring 24 a can be connected to the first electrode 11 inside the power generating element 1 . This makes it possible to suppress deterioration of the first connection wiring 24 a connected to the first electrode 11 .

Also, according to the present embodiment, the electrode forming step S110 forms the second connection wiring 24b electrically connected to the second electrode 12 and the second wiring layer 23b through the second through hole 25b. Therefore, the second connection wiring 24b can be connected to the second electrode 12 inside the power generation element 1 . This makes it possible to suppress deterioration of the connection wirings 24 a and 24 b connected to the electrodes 11 and 12 . Moreover, since the second connection wiring 24b can be formed with the same structure as the first connection wiring 24a, the manufacturing process can be simplified.

(Embodiment: electronic device 500)
<Electronic device 500>
The power generation element 1 and the power generation device 100 described above can be mounted on, for example, an electronic device. Some embodiments of the electronic device are described below.

14(a) to 14(d) are schematic block diagrams showing an example of an electronic device 500 including the power generation element 1. FIG. 14(e) to 14(h) are schematic block diagrams showing an example of an electronic device 500 having a power generation device 100 including the power generation element 1. FIG.

As shown in FIG. 14( a ), an electronic device 500 (electric product) includes an electronic component 501 (electronic component), a main power supply 502 and an auxiliary power supply 503 . Each of the electronic device 500 and the electronic component 501 is an electrical device.

The electronic component 501 is driven using the main power supply 502 as a power supply. Examples of the electronic component 501 include, for example, a CPU, motors, sensor terminals, lighting, and the like. If electronic component 501 is, for example, a CPU, electronic device 500 includes an electronic device that can be controlled by a built-in master (CPU). If the electronic components 501 include at least one of, for example, motors, sensor terminals, and lighting, the electronic device 500 includes electronic devices that can be controlled by an external master or person.

The main power supply 502 is, for example, a battery. Batteries also include rechargeable batteries. A plus terminal (+) of the main power supply 502 is electrically connected to a Vcc terminal (Vcc) of the electronic component 501 . A negative terminal (−) of the main power supply 502 is electrically connected to a GND terminal (GND) of the electronic component 501 .

The auxiliary power supply 503 is the power generation element 1. The power generation element 1 includes at least one power generation element 1 described above. In the electronic device 500, the auxiliary power supply 503 is used, for example, together with the main power supply 502, and is used as a power supply for assisting the main power supply 502 or as a power supply for backing up the main power supply 502 when the capacity of the main power supply 502 runs out. be able to. If the main power source 502 is a rechargeable battery, the auxiliary power source 503 can also be used as a power source for charging the battery.

As shown in FIG. 14(b), the main power source 502 may be the power generation element 1. An electronic device 500 shown in FIG. 14B includes a power generation element 1 used as a main power source 502 and an electronic component 501 that can be driven using the power generation element 1 . The power generation element 1 is an independent power supply (for example, an off-grid power supply). Therefore, the electronic device 500 can be, for example, an independent type (standalone type). Moreover, the power generating element 1 is of the energy harvesting type. The electronic device 500 shown in FIG. 14(b) does not require battery replacement.

The electronic component 501 may include the power generation element 1 as shown in FIG. 14(c). The anode of the power generation element 1 is electrically connected to, for example, a GND wiring of a circuit board (not shown). The cathode of the power generation element 1 is electrically connected to, for example, Vcc wiring of a circuit board (not shown). In this case, the power generating element 1 can be used as, for example, an auxiliary power source 503 for the electronic component 501 .

As shown in FIG. 14(d), when the electronic component 501 includes the power generation element 1, the power generation element 1 can be used as the main power source 502 of the electronic component 501, for example.

As shown in each of FIGS. 14(e) to 14(h), the electronic device 500 may include the power generator 100. FIG. The power generation device 100 includes a power generation element 1 as a source of electrical energy.

The embodiment shown in FIG. 14(d) comprises a power generation element 1 in which an electronic component 501 is used as a main power supply 502. Similarly, the embodiment shown in FIG. 14(h) comprises a generator 100 in which an electronic component 501 is used as the main power source. In these embodiments, electronic component 501 has an independent power source. Therefore, the electronic component 501 can be made self-supporting, for example. Free-standing electronic component 501 can be effectively used, for example, in an electronic device that includes multiple electronic components and in which at least one electronic component is separate from another electronic component. An example of such electronics 500 is a sensor. The sensor has a sensor terminal (slave) and a controller (master) remote from the sensor terminal. Each of the sensor terminals and controller is an electronic component 501 . If the sensor terminal is provided with the power generation element 1 or the power generation device 100, it becomes a self-supporting sensor terminal and does not require a wired power supply. Since the power generation element 1 or the power generation device 100 is of the energy harvesting type, it is unnecessary to replace the battery. A sensor terminal can also be regarded as one of the electronic devices 500 . The sensor terminals considered electronic equipment 500 further include, for example, IoT wireless tags, etc., in addition to sensor terminals of sensors.

Common to the embodiments shown in FIGS. 14(a) to 14(h) is that the electronic device 500 includes a power generation element 1 that converts thermal energy into electrical energy, and uses the power generation element 1 as a power source. and an electronic component 501 that can be driven.

The electronic device 500 may be an autonomous type with an independent power supply. Examples of autonomous electronic devices include, for example, robots. Furthermore, the electronic component 501 with the power generation element 1 or the power generation device 100 may be autonomous with an independent power supply. Examples of autonomous electronic components include, for example, movable sensor terminals.

Although several embodiments of the invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and modifications can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the scope of the invention described in the claims and equivalents thereof.

Reference Signs List 1: power generating element 11 : first electrode 12 : second electrode 13 : support portion 14 : intermediate portion 15 : first substrate 16 : second substrate 17 : support portion 18 : through portion 19 : opening portion 21 : sealing portion 22 : Protection part 23 : Wiring layer 24 : Connection wiring 25 : Through hole 100 : Power generation device 101 : First wiring 102 : Second wiring 111 : First terminal 112 : Second terminal 140 : Space 141 : Nanoparticles 141a : Coating 142 : Solvent 500 : Electronic device 501 : Electronic component 502 : Main power source 503 : Auxiliary power source G : Gap S110 : Electrode forming step S120 : Supporting portion forming step S130 : Protective portion forming step S140 : Through portion forming step S150 : Bonding step S160 : Intermediate portion forming step S170: Sealing portion forming step S210: Opening portion forming step S310: Connection wiring forming step S320: Wiring layer forming step X: Second direction Y: Third direction Z: First direction

Claims (9)

1. A power generation element that converts thermal energy into electrical energy,
   a first substrate and a second substrate spaced apart from each other along a first direction;
   a first electrode provided on the main surface of the first substrate;
   a second electrode provided on the main surface of the second substrate spaced apart from the first electrode and having a work function higher than that of the first electrode;
   an intermediate portion provided between the first electrode and the second electrode and containing a solvent in which nanoparticles are dispersed;
   a supporting portion provided in contact between the first substrate and the second substrate, spaced apart from the intermediate portion, and containing a metal;
   a protective portion provided between the intermediate portion and the support portion, in contact with the intermediate portion, and having insulating properties;
   A power generation element comprising:
2. The power generation element according to claim 1, wherein the protection portion is provided apart from the support portion.
3. 3. The power generation element according to claim 2, wherein the protection portion is provided in contact between the first electrode and the second electrode.
4. The power generating element according to claim 1, wherein the supporting portion is separated from the first electrode and the second electrode.
5. 2. The power generation element according to claim 1, further comprising a penetrating portion provided in at least one of the first substrate and the second substrate.
6. 6. The power generating element according to claim 5, wherein the through portion is separated from the first electrode and the second electrode when viewed from the first direction.
7. The power generation element according to claim 1;
   a first wiring electrically connected to the first electrode;
   a second wiring electrically connected to the second electrode;
   A power generation device comprising:
8. The power generation element according to claim 1;
   an electronic component driven by using the power generation element as a power supply;
   An electronic device comprising:
9. A method for manufacturing a power generation element that converts thermal energy into electrical energy,
   an electrode forming step of forming a first electrode on the main surface of a first substrate and forming a second electrode having a work function higher than that of the first electrode on the main surface of a second substrate;
   a supporting portion forming step of forming a supporting portion containing metal on at least one of above the main surface of the first substrate and above the main surface of the second substrate;
   a protective portion forming step of forming a protective portion having insulating properties above at least one of the main surface of the first substrate and the main surface of the second substrate;
   a bonding step of bonding the first substrate and the second substrate via the support portion such that the first electrode and the second electrode are opposed to each other in a first direction;
   and an intermediate portion forming step of forming an intermediate portion containing a solvent in which nanoparticles are dispersed so as to be in contact with the protective portion and separate from the support portion.

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