JP2022060936A - Method for manufacturing power generation element, power generation element member, power generation device, and electronic apparatus - Google Patents

Abstract

To provide a method for manufacturing a power generation element and a power generation element member capable of suppressing reduction in the amount of generation of hot electrons.SOLUTION: A method for manufacturing a power generation element 2 for converting heat energy to electric energy includes: element formation step S110 for forming an element 1 having a pair of electrode units 11 and 12 that are separated from each other in a first direction Z and have a different work function from each other and a space 16 closed by a support unit 13; dividing step S120 for dividing at least any of the support unit 13 and the electrode units 11 and 12 along a second direction Y intersecting the first direction Z to form an opening section 15 connected to the space 16; intermediate section formation step S130 for forming an intermediate section 14 having nanoparticles 141 in the space 16 through the opening section 15; and sealing step S140 for forming a sealing section 17 along the opening section 15.SELECTED DRAWING: Figure 1

Description

The present invention relates to a method for manufacturing a power generation element, a member for a power generation element, a power generation device, and an electronic device.

In recent years, power generation elements that generate electric energy using thermal energy have been actively developed. In particular, regarding the generation of electric energy using the difference in the work function of the electrodes, for example, a thermoelectric element disclosed in Patent Document 1 has been proposed. Such a thermoelectric element is expected to be used for various purposes as compared with a configuration in which electric energy is generated by utilizing a temperature difference given to an electrode.

In Patent Document 1, the emitter electrode layer, the collector electrode layer, the emitter electrode layer, and the collector electrode layer are dispersedly arranged on the surface of the emitter electrode layer and the collector electrode layer, and the emitter electrode layer and the collector electrode layer are separated from each other at submicron intervals. A thermoelectric element is disclosed which comprises electrically insulating spherical nanobeads, the work function of the emitter electrode layer is smaller than the work function of the collector electrode layer, and the particle size of the spherical nanobeads is 100 nm or less.

Japanese Patent No. 6147901

By the way, in the manufacturing process described in Patent Document 1, a metal nanoparticle dispersion liquid is formed after sequentially laminating the emitter electrode layer and the collector electrode layer in an exposed state. That is, the thermoelectric element is manufactured while each electrode layer is exposed to the outside air for a long period of time from the formation of the electrode layer to the formation of the metal nanoparticle dispersion liquid. Therefore, there is a concern that the electrode layer may be oxidized due to contact with the outside air, causing a reduction in the amount of thermions generated.

Therefore, the present invention has been devised in view of the above-mentioned problems, and an object thereof is a method for manufacturing a power generation element and a member for a power generation element capable of suppressing a reduction in the amount of thermions generated. To provide.

The method for manufacturing a power generation element in the first invention is a method for manufacturing a power generation element that converts thermal energy into electrical energy, and is separated in the first direction and closed by a pair of electrode portions and support portions having different work functions. At least one of the support portion and the electrode portion is divided along the second direction intersecting with the first direction, and the element forming step of forming the element having the space is formed to form an opening connected to the space. A division step, an intermediate portion forming step of forming an intermediate portion having nanoparticles in the space through the opening portion, and a sealing step of forming a sealing portion along the opening portion are provided. It is characterized by.

In the method for manufacturing a power generation element in the second invention, in the first invention, the support portion is formed in the space and has a sacrificial support portion extending in the first direction, and the division step is described in the first aspect. It is characterized in that the opening is formed by removing at least a part of the sacrificial support along two directions.

In the first invention or the second invention, the method for manufacturing a power generation element according to a third invention includes the element forming step of forming a plurality of the elements on one substrate, and the dividing step includes the second invention. It is characterized by comprising dividing the substrate along a direction and separating a plurality of the elements from each other.

The method for manufacturing a power generation element according to the fourth invention is characterized in that, in any one of the first invention to the third invention, the division step includes forming a pair of the openings with the electrode portion interposed therebetween. ..

The method for manufacturing a power generation element according to the fifth invention is characterized in that, in any one of the first to fourth inventions, the element formed in the element forming step contains an inert gas in the space.

The power generation element member in the sixth invention is a power generation element member used as a part of a power generation element that converts thermal energy into electric energy, and includes a substrate and a plurality of elements provided on the substrate. The element is separated in a first direction and has a pair of electrode portions having different work functions, a space including between the pair of electrodes, and a support portion surrounding the space. , It is characterized in that it is closed by the pair of the electrode portions and the support portion.

The power generation device according to the seventh invention is characterized by including a power generation element formed by the method for manufacturing a power generation element according to any one of the first to fifth inventions.

The electronic device in the eighth invention includes a power generation element formed by the method for manufacturing a power generation element according to any one of the first to fifth inventions, an electronic component capable of driving the power generation element by using the power generation element, and the like. It is characterized by including.

According to the first to fifth inventions, the element forming step forms an element having a space enclosed by a pair of electrode portions having different work functions and a support portion, which are separated from each other in the first direction. That is, the time during which the electrode portion is exposed to the outside air is shortened from the formation of the element to the formation of the intermediate portion in the space. Therefore, it is possible to suppress the oxidation of the electrode portion due to the contact with the outside air, and it is possible to prevent the work function of the electrode portion from fluctuating. This makes it possible to suppress the reduction of the amount of thermions generated when the power generation element is used.

In particular, according to the second invention, the splitting step forms an opening by removing at least a portion of the sacrificial support along the second direction. Therefore, the load acting on the opening due to the division of the support or the electrode can be reduced by the sacrificial support, and the deformation of the opening can be suppressed. As a result, it is possible to suppress poor formation of the intermediate portion due to deformation of the opening portion and improve the yield.

In particular, according to the third invention, in the dividing step, the substrate is divided along the second direction, and the plurality of elements are separated from each other. Therefore, the division of the element and the formation of the opening for forming the intermediate portion can be performed at one time. This makes it possible to simplify the manufacturing process.

In particular, according to the fourth invention, the dividing step forms a pair of openings with the electrode portion interposed therebetween. Therefore, when forming the intermediate portion, it is possible to facilitate uniform formation up to the end portion of the space. This makes it possible to suppress variations in power generation efficiency due to poor uniformity in the intermediate portion.

In particular, according to the fifth invention, the device contains an inert gas in space. Therefore, the oxidation of the electrode portion can be further suppressed. This makes it possible to further suppress the reduction in the amount of thermions generated when the power generation element is used.

In particular, according to the sixth invention, the space is closed by a pair of electrode portions and a support portion. That is, when the power generation element is formed by using the power generation element member, the time for the electrode portion to be exposed to the outside air is shortened until the intermediate portion is formed in the space. Therefore, it is possible to suppress the oxidation of the electrode portion due to the contact with the outside air, and it is possible to prevent the work function of the electrode portion from fluctuating. This makes it possible to suppress the reduction of the amount of thermions generated when the power generation element is used.

In particular, according to the seventh invention, it is a power generation device including the power generation element manufactured by the methods for manufacturing the power generation element of the first to fifth inventions. According to this power generation device, it is possible to suppress the reduction of the amount of thermions generated.

In particular, according to the eighth invention, an electronic device including a power generation element manufactured by the method for manufacturing a power generation element according to the first to fifth inventions and an electronic component capable of driving the power generation element by using the power generation element. Is. According to this electronic device, it is possible to suppress a reduction in the amount of thermions generated.

1 (a) is a schematic cross-sectional view showing an example of a power generation element and a power generation device according to the first embodiment, and FIG. 1 (b) is a schematic cross-sectional view taken along the line AA in FIG. 1 (a). Is. FIG. 2 is a schematic cross-sectional view showing an example of the intermediate portion. FIG. 3 is a flowchart showing an example of a method for manufacturing a power generation element according to the first embodiment. 4 (a) to 4 (d) are schematic cross-sectional views showing an example of a method for manufacturing a power generation element according to the first embodiment. 5 (a) is a schematic cross-sectional view showing an example of the element in the second embodiment, and FIG. 5 (b) is a schematic cross-sectional view taken along the line BB in FIG. 5 (a). 5 (c) is a schematic diagram showing a state after the element is divided, and FIG. 5 (d) is a schematic cross-sectional view taken along the line CC in FIG. 5 (c). 6 (a) to 6 (d) are schematic views showing a first modification of the method for manufacturing a power generation element according to the second embodiment. FIG. 7A is a schematic cross-sectional view showing an example of a power generation element member according to the third embodiment, and FIG. 7B is a schematic cross-sectional view showing an example of the element according to the third embodiment. FIG. 8A is a schematic cross-sectional view showing a first modification of the power generation element member according to the third embodiment, and FIG. 8B is a schematic view showing the first modification of the element according to the third embodiment. It is a cross-sectional view. FIG. 9 is a flowchart showing a first modification of the method for manufacturing a power generation element according to the third embodiment. 10 (a) to 10 (c) are schematic cross-sectional views showing a first modification of the element in the third embodiment. FIG. 11A is a schematic cross-sectional view showing a second modification of the power generation element member in the third embodiment, and FIG. 11B is a schematic view showing a second modification of the element in the third embodiment. It is a cross-sectional view. 12 (a) and 12 (b) are schematic views showing an example of a power generation element member and a power generation element according to the fourth embodiment. 13 (a) to 13 (d) are schematic block diagrams showing an example of an electronic device provided with a power generation element, and FIGS. 13 (e) to 13 (h) show a power generation device including the power generation element. It is a schematic block diagram which shows the example of the electronic device provided.

Hereinafter, an example of each of the power generation element and the method for manufacturing the power generation element as an embodiment of the present invention will be described with reference to the drawings. In each figure, the height direction is defined as the first direction Z and intersects with the first direction Z, for example, one orthogonal plane direction is defined as the second direction Y and intersects with each of the first direction Z and the second direction Y. For example, another plane direction orthogonal to each other is referred to as a third direction X. Further, in each figure, common reference numerals are given to common parts, and duplicate explanations are omitted.

(First Embodiment)
<Power generation device 200>
FIG. 1 is a schematic diagram showing an example of a power generation device 200 and a power generation element 2 according to the first embodiment. As shown in FIG. 1A, the power generation device 200 includes a power generation element 2, a first wiring 201, and a second wiring 202. The power generation element 2 converts thermal energy into electrical energy. The power generation device 200 provided with such a power generation element 2 is, for example, mounted or installed on a heat source (not shown), and the electric energy generated by the power generation element 2 based on the heat energy of the heat source is used in the first wiring 201 and the first wiring 201. 2 Output to the load R via the wiring 202. One end of the load R is electrically connected to the first wiring 201, and the other end is electrically connected to the second wiring 202. The load R indicates, for example, an electrical device. The load R is driven by using the power generation device 200 as a main power source or an auxiliary power source.

Examples of the heat source of the power generation element 2 include electronic devices or electronic components such as CPUs (Central Processing Units), light emitting elements such as LEDs (Light Emitting Diodes), engines such as automobiles, factory production equipment, human bodies, and sunlight. And the ambient temperature etc. can be used. For example, electronic devices, electronic components, light emitting elements, engines, production equipment, and the like are artificial heat sources. The human body, sunlight, environmental temperature, etc. are natural heat sources. The power generation device 200 provided with the power generation element 2 can be provided inside a mobile device such as an IoT (Internet of Things) device and a wearable device, or a self-supporting sensor terminal, and can be used as a substitute for or an auxiliary of a battery. Further, the power generation device 200 can also be applied to a larger power generation device such as solar power generation.

<Power generation element 2>
The power generation element 2 converts, for example, the heat energy generated by the artificial heat source or the heat energy of the natural heat source into electric energy to generate an electric current. The power generation element 2 is not only provided inside the power generation device 200, but the power generation element 2 itself can be provided inside the mobile device, the self-supporting sensor terminal, or the like. In this case, the power generation element 2 itself becomes a substitute part or an auxiliary part of the battery such as the mobile device or the self-supporting sensor terminal.

The power generation element 2 includes an element 1 and a substrate 18. The element 1 has a first electrode portion 11, a second electrode portion 12, a support portion 13, and an intermediate portion 14.

<1st electrode part 11, 2nd electrode part 12>
The first electrode portion 11 and the second electrode portion 12 are provided apart from each other in the first direction Z, and each has a different work function. As the material of the first electrode portion 11 and the second electrode portion 12, a conductive metal material can be selected. Examples of the metal material include iron, aluminum, copper, or an alloy of aluminum and copper. Further, as the material of the first electrode portion 11 and the second electrode portion 12, a conductive polymer material may be used in addition to a semiconductor having conductivity such as Si and GaN. The shapes of the first electrode portion 11 and the second electrode portion 12 may be square, rectangular, or other disc-shaped.

The first electrode portion 11 is electrically connected to the first wiring 201 via, for example, a wiring (not shown) inserted through the support portion 13 and a first terminal 211. The second electrode portion 12 is electrically connected to the second wiring 202 via, for example, a wiring inserted through a substrate 18 (not shown) and a second terminal 212. The first terminal 211 and the second terminal 212 may be omitted. Further, the arrangement location of the first terminal 211 and the second terminal 212, the arrangement location of the wiring (not shown), and the like are arbitrary.

In the power generation element 2, an electron emission phenomenon due to absolute temperature generated between the first electrode portion 11 and the second electrode portion 12 having a work function difference can be used. Therefore, the power generation element 2 can convert thermal energy into electrical energy even when the temperature difference between the first electrode portion 11 and the second electrode portion 12 is small. Further, the power generation element 2 converts heat energy into electrical energy even when there is no temperature difference between the first electrode portion 11 and the second electrode portion 12, or even when a single heat source is used. Can be done.

The material of the first electrode portion 11 and the material of the second electrode portion 12 can be selected from, for example, the metals shown below.
Platinum (Pt)
Tungsten (W)
Aluminum (Al)
Titanium (Ti)
Niobium (Nb)
Molybdenum (Mo)
Tantalum (Ta)
Rhenium (Re)
In the power generation element 2, it is sufficient that a work function difference occurs between the first electrode portion 11 and the second electrode portion 12. Therefore, it is possible to select a metal other than the above as the material of the first electrode portion 11 and the second electrode portion 12. As the material of the first electrode portion 11 and the second electrode portion 12, in addition to the metal, an alloy, an intermetallic compound, and a metal compound can be selected. A metallic compound is a combination of a metallic element and a non-metallic element. Examples of such metal compounds include, for example, lanthanum hexaboride (LaB ₆ ).

<Support part 13>
The support portion 13 has a plate-shaped member (board) 13a and an outer peripheral portion 13b extending from the plate-shaped member 13a toward the board 18. The support portion 13 is formed in a U-shaped cross section as shown in FIG. 1 (a).

The plate-shaped member 13a is a portion that forms a pair with the substrate 18 and fixes the first electrode portion 11, and is a thin plate-shaped member, but may be in the form of a flexible film, for example. When the plate-shaped member 13a is formed into a flexible film, for example, PET (polyethylene terephthalate), PC (polycarbonate), polyimide, or the like can be used.

The thickness of the plate-shaped member 13a along the first direction Z is, for example, 10 μm or more and 2 mm or less. As the material of the plate-shaped member 13a, a plate-shaped material having an insulating property can be selected. Examples of the insulating material include silicon, quartz, glass such as Pyrex (registered trademark), and an insulating resin.

Further, the plate-shaped member 13a is a semiconductor and may have a degenerate portion or a non-degenerate portion. According to such a configuration, the contact resistance between the first electrode portion 11 and the like and another configuration such as wiring can be reduced. This makes it possible to suppress an increase in the resistance of the entire power generation element 2. The plate-shaped member 13a may have a structure in which an insulating material, a semiconductor material, and a metal material are mixed.

The outer peripheral portion 13b surrounds each of the electrode portions 11 and 12 and the intermediate portion 14 as shown in FIG. 1 (b), for example. The outer peripheral portion 13b is arranged apart from the first electrode portion 11 and the second electrode portion 12, but may be in contact with the outer peripheral portion 13b.

The outer peripheral portion 13b may be provided integrally with the plate-shaped member 13a, or may be provided separately. When integrally provided, the material of the outer peripheral portion 13b is the same material as that of the plate-shaped member 13a. When provided separately, examples of the material of the outer peripheral portion 13b include silicon oxide, a polymer, and the like. Examples of the polymer include polyimide, PMMA (Polymethylcrylic), polystyrene and the like.

The outer peripheral portion 13b may be a partially oxidized plate-shaped member 13a. Specifically, a part of the silicon oxide film formed by oxidizing the plate-shaped member 13a made of silicon may be used as the outer peripheral portion 13b. In this case, the height of the outer peripheral portion 13b can be controlled with higher accuracy and the size of the gap G between the electrodes can be set with higher accuracy than in the case of newly forming the outer peripheral portion 13b. This makes it possible to stabilize the power generation efficiency.

<Middle part 14>
FIG. 2 is a schematic cross-sectional view showing an example of the intermediate portion 14. As shown in FIG. 2, the intermediate portion 14 is provided in the space 16 surrounded by the first electrode portion 11, the second electrode portion 12, and the support portion 13. The intermediate portion 14 contains nanoparticles 141. The intermediate portion 14 is held in the power generation element 2 by, for example, a support portion 13 and a sealing portion 17.

An inter-electrode gap G is set between the first electrode portion 11 and the second electrode portion 12 along the first direction Z. In the power generation element 2, the gap G between the electrodes is set by the thickness of the outer peripheral portion 13b along the first direction Z. An example of the width of the gap G between electrodes is, for example, a finite value of 10 μm or less. The narrower the width of the gap G between the electrodes, the higher the power generation efficiency of the power generation element 2. Further, the narrower the width of the gap G between the electrodes is, the thinner the thickness of the power generation element 2 along the first direction Z can be. Therefore, for example, the width of the gap G between the electrodes should be narrow. The width of the gap G between the electrodes is more preferably, for example, 10 nm or more and 100 nm or less. The width of the gap G between the electrodes and the thickness of the outer peripheral portion 13b along the first direction Z are substantially equivalent.

The intermediate portion 14 contains, for example, a plurality of nanoparticles 141 and a solvent 142. The plurality of nanoparticles 141 are dispersed in the solvent 142. The intermediate portion 14 is obtained, for example, by filling the gap portion 140 with a solvent 142 in which nanoparticles 141 are dispersed. The particle size of the nanoparticles 141 is smaller than the gap G between the electrodes. The particle diameter of the nanoparticles 141 is, for example, a finite value of 1/10 or less of the gap G between electrodes. When the particle size of the nanoparticles 141 is 1/10 or less of the gap G between the electrodes, it becomes easy to form the intermediate portion 14 including the nanoparticles 141 in the gap portion 140. As a result, workability is improved in the production of the power generation element 2.

The nanoparticles 141 contain, for example, a conductive material. The value of the work function of the nanoparticles 141 may be, for example, between the value of the work function of the first electrode unit 11 and the value of the work function of the second electrode unit 12, but the work function of the first electrode unit 11 It may be other than the value between the value of and the value of the work function of the second electrode unit 12. The value of the work function of the nanoparticles 141 is, for example, in the range of 3.0 eV or more and 5.5 eV or less. This makes it possible to further increase the amount of electrical energy generated as compared with the case where the nanoparticles 141 are not present in the intermediate portion 14. The value of the work function of the nanoparticles 141 may be, for example, a value other than the range of 3.0 eV or more and 5.5 eV or less.

As an example of the material of the nanoparticles 141, at least one of gold and silver can be selected, but conductive materials other than gold and silver can also be selected.

The particle size of the nanoparticles 141 is, for example, 2 nm or more and 10 nm or less. Further, the nanoparticles 141 may have, for example, an average particle size (for example, D50) of 3 nm or more and 8 nm or less. The average particle size can be measured, for example, by using a particle size distribution measuring instrument. As the particle size distribution measuring instrument, for example, a particle size distribution measuring instrument using a laser diffraction / scattering method (for example, Nanotrac Wave II-EX150 manufactured by Microtrac BEL) may be used.

The nanoparticles 141 have, for example, an insulating film 141a on the surface thereof. As an example of the material of the insulating film 141a, at least one of an insulating metal compound and an insulating organic compound can be selected. Examples of the insulating metal compound include silicon oxide and alumina. Examples of the insulating organic compound include alkanethiol (for example, dodecanethiol) and the like. The thickness of the insulating film 141a is, for example, a finite value of 20 nm or less. When such an insulating film 141a is provided on the surface of the nanoparticles 141, the electrons e are, for example, between the first electrode portion 11 and the nanoparticles 141, and between the nanoparticles 141 and the second electrode portion 12. Can be moved using the tunnel effect. Therefore, for example, improvement in the power generation efficiency of the power generation element 2 can be expected.

As the solvent 142, for example, a liquid having a boiling point of 100 ° C. or higher can be used. Therefore, it is possible to suppress the vaporization of the solvent 142 even when the power generation element 2 is used in an environment of room temperature (for example, 15 ° C. to 35 ° C.) or higher. As a result, deterioration of the power generation element 2 due to the vaporization of the solvent 142 can be suppressed. As an example of the liquid, at least one of an organic solvent and water can be selected. Examples of the organic solvent include methanol, ethanol, toluene, xylene, tetradecane, alkanethiol and the like. The solvent 142 is preferably a liquid having a high electrical resistance value and an insulating property.

The intermediate portion 14 may contain only the nanoparticles 141 without containing the solvent 142. Since the intermediate portion 14 contains only the nanoparticles 141, for example, even when the power generation element 2 is used in a high temperature environment, it is not necessary to consider the vaporization of the solvent 142. This makes it possible to suppress deterioration of the power generation element 2 in a high temperature environment.

<Sealing part 17>
As shown in FIG. 1B, the sealing portion 17 seals the opening 15 of the element 1 and seals the intermediate portion 14. For example, an insulating resin is used as the material of the sealing portion 17, and examples of the insulating resin include a fluorine-based insulating resin. The space 16 provided with the intermediate portion 14 is closed by, for example, the first electrode portion 11, the second electrode portion 12, the support portion 13, and the sealing portion 17.

<Board 18>
The substrate 18 is a portion that forms a pair with the plate-shaped member 13a and fixes the second electrode portion 12. The substrate 18 is a thin plate-shaped member, but may be, for example, a flexible film-shaped member. For example, when the substrate 18 is in the form of a flexible film, for example, PET (polyethylene terephthalate), PC (polycarbonate), polyimide, or the like can be used.

The thickness of the substrate 18 along the first direction Z is, for example, 10 μm or more and 2 mm or less. As the material of the substrate 18, a plate-shaped material having an insulating property can be selected. Examples of the insulating material include silicon, quartz, glass such as Pyrex (registered trademark), and an insulating resin.

Further, the substrate 18 is a semiconductor and may have a degenerate portion or a non-degenerate portion. According to such a configuration, the contact resistance between the second electrode portion 12 and the like and another configuration such as wiring can be reduced. This makes it possible to suppress an increase in the resistance of the entire power generation element 2. The substrate 18 may have a structure in which an insulating material, a semiconductor material, and a metal material are mixed.

<Operation of power generation element 2>
When thermal energy is applied to the power generation element 2, a current is generated between the first electrode portion 11 and the second electrode portion 12, and the thermal energy is converted into electrical energy. The amount of current generated between the first electrode portion 11 and the second electrode portion 12 depends on the thermal energy, and also depends on the difference between the work function of the first electrode portion 11 and the work function of the second electrode portion 12. Dependent. The amount of generated current can be increased, for example, by increasing the work function difference between the first electrode portion 11 and the second electrode portion 12.

<< Manufacturing method of power generation element 2 >>
Next, an example of a method for manufacturing the power generation element 2 will be described. FIG. 3 is a flowchart showing an example of the manufacturing method of the power generation element 2 in the first embodiment. 4 (a) to 4 (d) are schematic cross-sectional views showing an example of a method for manufacturing the power generation element 2 according to the first embodiment.

<Element forming process: S110>
First, an element 1 having a space 16 separated by a pair of electrode portions 11 and 12 having different work functions and a support portion 13 separated from each other in the first direction Z is formed (element forming step S110). In the element forming step S110, for example, as shown in FIG. 4A, the plate-shaped member 13a on which the first electrode portion 11 is formed is placed on the substrate 18 on which the second electrode portion 12 is formed, and the outer peripheral portion 13b is placed. Laminate via. At the time of laminating, the upper surface of the substrate 18 and the lower surface of the support portion 13 (outer peripheral portion 13b) are joined. At this time, a space 16 closed by the pair of electrode portions 11 and 12 and the support portion 13 is formed.

In the element forming step S110, the support portion 13 and the substrate 18 are joined by abutting the support portion 13 and the substrate 18 and heating them, for example, by a thermocompression bonding method. In this case, the gap G between the electrodes (see FIG. 2) between the first electrode portion 11 and the second electrode portion 12 depends on the thickness of the outer peripheral portion 13b.

In the element forming step S110, for example, the element 1 may be formed in a state where the space 16 is filled with an inert gas. In this case, the element 1 contains an inert gas in the space 16. The inert gas may be any gas that is inert to the chemical reaction, and examples thereof include nitrogen, helium, neon, and argon.

<Division process: S120>
Next, at least one of the support portion 13 and the electrode portions 11 and 12 is divided along the second direction Y intersecting the first direction Z to form an opening 15 connected to the space 16 (division step S120). In the dividing step S120, for example, as shown in FIG. 4B, the element 1 is located at a substantially central portion in the width direction (third direction X in the figure) of the support portion 13 and the electrode portions 11 and 12 along the second direction Y. Is divided to form elements 1a and 1b. An opening 15 is formed in each of the formed elements 1a and 1b.

The position for dividing the support portion 13 and the electrode portions 11 and 12 is not necessarily limited to the central portion of the support portion 13 and the substrate 18, and may be appropriately set in consideration of the sizes of the elements 1a and 1b.

<Intermediate part forming step: S130>
Next, the intermediate portion 14 having the nanoparticles 141 in the space 16 is formed through the opening 15 (intermediate portion forming step S130). In the intermediate portion forming step S130, for example, as shown in FIG. 4C, nanoparticles 141 are injected into the spaces 16 of the elements 1a and 1b, respectively. Specifically, the element 1 may be immersed in the stock solution of the intermediate portion 14 to form the intermediate portion 14 by a capillary phenomenon (capillary force).

<Sealing process: S140>
Next, the sealing portion 17 is formed along the opening 15 (sealing step S140). By the sealing step S140, for example, as shown in FIG. 4D, the sealing portion 17 covers the opening portion 15 to prevent the intermediate portion 14 from flowing out from the space 16.

As described above, the power generation element 2 is formed by performing the processes of each of the steps S110 to S140. The above-mentioned processes S110 to S140 may be performed a plurality of times.

For example, the power generation device 200 is formed by connecting the wirings 201 and 202 shown in FIG. 1A to the power generation element 2 thus formed.

According to the present embodiment, the element forming step S110 forms an element 1 having a space 16 separated by a first direction Z and closed by a pair of electrode portions 11 and 12 having different work functions and a support portion 13. do. That is, the time during which the electrode portions 11 and 12 are exposed to the outside air is shortened from the formation of the element 1 to the formation of the intermediate portion 14 in the space 16. Therefore, it is possible to suppress the oxidation of the electrode portions 11 and 12 due to the contact with the outside air, and it is possible to prevent the work function of the electrode portions 11 and 12 from fluctuating. This makes it possible to suppress a reduction in the amount of thermions generated when the power generation element 2 is used.

Further, according to the present embodiment, the element 1 contains an inert gas in the space 16. Therefore, the oxidation of the electrode portions 11 and 12 can be further suppressed. This makes it possible to further suppress the reduction in the amount of thermions generated when the power generation element 2 is used.

(Second Embodiment)
Next, the power generation element 2 and the power generation device 200 in the second embodiment will be described. The difference from the first embodiment described above is that the support portion 13 has the sacrificial support portion 13c, and other points are common. Therefore, in the following description, the points different from those of the first embodiment will be mainly described, and the common parts will be designated by the same reference numerals and the description thereof will be omitted.

5 (a) and 5 (b) are schematic views showing an example of the element 20 in the second embodiment. 5 (a) is a schematic cross-sectional view showing an example of the element 20, and FIG. 5 (b) is a schematic cross-sectional view taken along the line BB in FIG. 5 (a).

The sacrificial support portion 13c is formed in the space 16 and extends in the first direction Z. The sacrificial support portion 13c is, for example, a uniform linear rod-shaped member extending in the second direction Y. The sacrificial support portion 13c is located approximately in the central portion of the space 16 in, for example, in the third direction X. The sacrificial support portion 13c has substantially the same height as the outer peripheral portion 13b in the first direction Z and is in contact with the substrate 18. Further, both ends of the sacrificial support portion 13c are in contact with the outer peripheral portion 13b. There may be a gap between the sacrificial support portion 13c and the outer peripheral portion 13b.

The sacrificial support portion 13c may have any shape and size as long as it can prevent deformation of the element 20 in the vertical direction (first direction Z) when the element 20 is divided in the division step S120. .. For example, the sacrificial support portion 13c may be composed of members divided into two or more. Further, the sacrificial support portion 13c may have a shape other than a straight line. However, considering the process of dividing the support portion 13, it is desirable that the sacrificial support portion 13c is linear.

Further, the sacrificial support portion 13c may be integrally formed with the plate-shaped member 13a, or may be formed as a separate body. When the sacrificial support portion 13c is integrally formed with the plate-shaped member 13a, the strength of the entire support portion 13 can be increased.

5 (c) and 5 (d) are views showing a state after the element 20 is divided. FIG. 5 (c) is a schematic view showing a state after the element 20 is divided, and FIG. 5 (d) is a schematic cross-sectional view taken along the line CC in FIG. 5 (c). The element 20 is divided by dicing along the sacrificial support portion 13c in the second direction Y. When dividing the element 20, the support portion 13 is divided so as not to leave the sacrificial support portion 13c. As the dicing method, in addition to the method using a dicing blade, dicing with plasma, dicing with a chemical solution, or the like may be used.

An opening 15 is formed in each of the divided elements 20a and 20b. At the time of division, a cutting force is applied in the direction of compressing the space 16 (vertical direction) in the first direction Z. Even when a cutting force is applied in the direction of compressing the space, the sacrificial support portion 13c can prevent deformation in the vertical direction, so that the first direction of the openings 15 formed in the elements 20a and 20b. The height of Z substantially coincides with the height of the space 16 before division.

According to the present embodiment, the division step (S120) forms the opening 15 by removing the sacrificial support 13c along the second direction Y. Therefore, the load acting on the opening 15 due to the division of the support 13 or the electrodes 11 and 12 can be reduced by the sacrificial support 13c, and the deformation of the opening 15 can be suppressed. As a result, it is possible to suppress the poor formation of the intermediate portion 14 due to the deformation of the opening portion 15 and improve the yield.

(Modified example of the second embodiment)
Next, a modification of the power generation element 2 and the power generation device 200 in the second embodiment will be described. In the modified example, the support portion 13 has the first sacrifice support portion 13d and the second sacrifice support portion 13e instead of the sacrifice support portion 13c, and other points are common. Therefore, in the following description, the points different from those of the second embodiment will be mainly described, and the common parts will be designated by the same reference numerals and the description thereof will be omitted.

6 (a) to 6 (d) are schematic views showing a modified example of the element 20 in the second embodiment. FIG. 6A is a schematic cross-sectional view showing the element 21, and FIG. 6B is a schematic cross-sectional view taken along the line DD in FIG. 6A. FIG. 6 (c) is a diagram showing a state after the element 21 is divided, and FIG. 6 (d) is a schematic cross-sectional view taken along the line EE in FIG. 6 (c).

The support portion 13 has a first sacrifice support portion 13d having substantially the same width as the sacrifice support portion 13c, and a second sacrifice support portion 13e having a width wider than that of the first sacrifice support portion 13d. The first sacrificial support 13d is located on both sides of the second sacrifice support 13e in the second direction Y. The first sacrificial support portion 13d and the second sacrificial support portion 13e are located substantially in the central portion of the space 16 in the third direction X. The first sacrificial support portion 13d and the second sacrificial support portion 13e extend in the first direction Z, are formed in the first direction Z at substantially the same height as the outer peripheral portion 13b, and are in contact with the substrate 18. The first sacrificial support portion 13d is in contact with the outer peripheral portion 13b. There may be a gap between the first sacrificial support portion 13d and the outer peripheral portion 13b.

The first sacrificial support portion 13d and the second sacrificial support portion 13e may have any shape and size as long as they can prevent deformation of the element 20 in the vertical direction (first direction Z). .. Further, the first sacrificial support portion 13d and the second sacrificial support portion 13e may be integrally formed with the plate-shaped member 13a, or may be formed separately. When the sacrificial support portion 13c is integrally formed with the plate-shaped member 13a, the strength of the entire support portion 13 can be increased.

The element 21 is divided by dicing along the first sacrificial support portion 13d and the second sacrificial support portion 13e in the second direction Y. When the element 21 is divided, at least one of the support portion 13 and the electrode portions 11 and 12 so that the first sacrificial support portion 13d is not left and at least a part of the second sacrificial support portion 13e remains. Divide.

In each of the divided elements 21a and 21b, openings 15 are formed on both sides of the second sacrificial support portion 13e in the second direction Y. That is, the opening 15 is formed between the second sacrificial support portion 13e and the outer peripheral portion 13b. At the time of division, a cutting force is applied in the direction of compressing the space 16 (vertical direction) in the first direction Z. Since a part of the second sacrificial support portion 13e is left in each of the elements 21a and 21b after cutting, the height of the opening 15 in the first direction Z is maintained before and after the division of the element 21.

According to the present embodiment, the dividing step (S120) removes the first sacrificial support portion 13d along the second direction Y and leaves a part of the second sacrificial support portion 13e to leave the opening portion 15. To form. Therefore, the load acting on the opening 15 due to the division of the support portion 13 or the electrode portions 11 and 12 can be reduced by the first sacrificial support portion 13d and the second sacrificial support portion 13e, and the opening portion 15 can be reduced. Deformation can be suppressed. As a result, it is possible to suppress the poor formation of the intermediate portion 14 due to the deformation of the opening portion 15 and improve the yield.

(Third Embodiment)
Next, the power generation element 2, the power generation element member 100, and the power generation device 200 in the third embodiment will be described. The difference from the first embodiment described above is that the power generation element member 100 has a plurality of elements 30, and other points are common. Therefore, in the following description, the points different from those of the first embodiment will be mainly described, and the common parts will be designated by the same reference numerals and the description thereof will be omitted.

FIG. 7A is a schematic cross-sectional view showing an example of the power generation element member 100 according to the third embodiment. As shown in FIG. 7A, the power generation element member 100 includes a substrate 18 and a plurality of elements 30 (30a, 30b, 30c) on the substrate 18. Here, an example is shown in which the power generation element member 100 has three elements 30a, 30b, and 30c. The number of elements provided on the substrate 18 may be 4 or more in each of the second direction Y and the third direction X.

The elements 30 are separated from each other in the first direction Z, and surround the space 16 including the first electrode portion 11 and the second electrode portion 12 having different work functions, the pair of electrode portions 11 and 12, and the space 16. It has a support portion 13. The space 16 is closed by a pair of electrode portions 11 and 12 and a support portion 13. The outer peripheral portion 13b is arranged in contact with the plate-shaped member 13a and the substrate 18 in the first direction Z. The outer peripheral portion 13b is arranged between the first electrode portions 11 and separated from the second electrode portion 12 in the third direction X. Each element 30 may have an outer peripheral portion 13b, or adjacent elements 30 may share the outer peripheral portion 13b.

FIG. 7B is a schematic cross-sectional view showing an example of the element 30 in the third embodiment. As shown in FIG. 7B, the element 30 and the substrate 18 are divided along the second direction Y at the outer peripheral portion 13b which is the boundary between the elements 30, and the element 30 is a plurality of elements 30a, the element 30b, and the element. Separated from 30c. An opening 15 is formed on one end side of the divided element 30a. A pair of openings 15a and 15b are formed at both ends of the divided element 30b. An opening 15 is formed on one end side of the divided element 30c.

In the third embodiment, the first sacrificial support portion 13d and the second sacrificial support portion 13e may be provided between the outer peripheral portions 13b.

According to the present embodiment, in the dividing step, the substrate 18 is divided along the second direction Y, and the plurality of elements 30 (30a, 30b, 30c) are separated from each other. Therefore, the division of the element 30 and the formation of the opening 15 for forming the intermediate portion 14 can be performed at the same time. This makes it possible to simplify the manufacturing process.

Further, in the dividing step, a pair of openings 15a and 15b are formed by sandwiching the electrode portions 11 and 12. Therefore, when forming the intermediate portion 14, it is possible to facilitate uniform formation up to the end portion of the space 16. This makes it possible to suppress variations in power generation efficiency due to poor uniformity of the intermediate portion 14.

(First modification of the third embodiment)
Next, the power generation element 2, the power generation element member 101, and the power generation device 200 in the first modification of the third embodiment will be described. In the first modification, the outer peripheral portion 23b is arranged between the electrode portions 11 and 12 in the first direction Z, and other points are common. Therefore, in the following description, the points different from those of the first embodiment will be mainly described, and the common parts will be designated by the same reference numerals and the description thereof will be omitted.

FIG. 8A is a schematic cross-sectional view showing a first modification of the power generation element member 100 in the third embodiment. As shown in FIG. 8A, the power generation element member 101 includes a substrate 18 and a plurality of elements 31 (31a, 31b, 31c) on the substrate 18. Here, as an example, an example in which three elements 31a, 31b, and 31c are formed is shown. The number of elements 31 provided on the substrate 18 may be 4 or more in each of the second direction Y and the third direction X.

Each element 31 has a first electrode portion 11, a second electrode portion 12, and an outer peripheral portion 23b. The space 16 is closed by the first electrode portion 11, the second electrode portion 12, and the outer peripheral portion 23b. The outer peripheral portion 23b is arranged between the first electrode portion 11 and the second electrode portion 12 in the first direction Z. Each element 31 may have an outer peripheral portion 23b, or adjacent elements 31 may share the outer peripheral portion 23b.

FIG. 8B is a schematic cross-sectional view showing a first modification of the element 31 in the third embodiment. As shown in FIG. 8B, the element 31 and the substrate 18 are divided along the second direction Y at the outer peripheral portion 23b which is the boundary between the elements 31. An opening 15 is formed on one end side of the divided element 31a. A pair of openings 15a and 15b are formed at both ends of the divided element 31b. An opening 15 is formed on one end side of the divided element 31c.

By obtaining the element 31b in which the openings 15 (15a, 15b) are formed at both ends, for example, the nanoparticles 141 flow into the space 16 from the opening 15a side toward the opening 15b side, so that the electrode portion Foreign matter can be removed from 11 and 12.

<< Manufacturing method of member 101 for power generation element (first modification of the third embodiment) >>
Next, an example of a method for manufacturing the power generation element member 101 in the first modification of the third embodiment will be described. FIG. 9 is a flowchart showing a first modification of the method for manufacturing the power generation element member 100 according to the third embodiment. 10 (a) to 10 (c) are schematic cross-sectional views showing a first modification of the method for manufacturing the power generation element member 100 according to the third embodiment.

<Complex formation step: S210>
First, the second electrode portion 12 is arranged on the substrate 18 to form the first complex 51 (complex forming step S210). In the complex forming step S210, for example, as shown in FIG. 10A, the upper surface of the substrate 18 and the lower surface of the second electrode portion 12 are joined.

<Outer peripheral part forming step: S220>
Next, the outer peripheral portion 23b is formed on the second electrode portion 12 (outer peripheral portion forming step S220). In the outer peripheral portion forming step S220, as shown in FIG. 10B, the outer peripheral portion 23b is arranged at four locations as an example.

<Space formation process: S230>
Next, a second complex 52 composed of the first electrode portion 11 and the plate-shaped member 13a is arranged on the outer peripheral portion 23b so that the first electrode portion 11 faces the second electrode portion 12 to create a space. 16 is formed (space forming step S230). In the space forming step S230, as shown in FIG. 10C, the space 16 is closed by the first electrode portion 11, the second electrode portion 12, and the outer peripheral portion 23b.

As described above, by performing the processes of each step S210 to S230, the power generation element member 101 in the first modification of the third embodiment is formed. The above-mentioned processes S210 to S230 may be performed a plurality of times.

According to the present embodiment, the outer peripheral portion 23b is formed by the first complex 51 composed of the second electrode portion 12 and the substrate 18, and the second complex 52 composed of the first electrode portion 11 and the plate-shaped member 13a. Sandwich. Thereby, the element 31 can be formed with a simple configuration. By sandwiching the outer peripheral portion 23b between the pair of first complexes 51, the element 31 can be formed with a simpler configuration.

(Second variant of the third embodiment)
Next, the power generation element member 102 and the power generation device 200 in the second modification of the third embodiment will be described. The difference from the third embodiment described above is that the sealing member 60 is inserted into the power generation element member 102 in the second modification, and other points are common. Therefore, in the following description, the points different from those of the third embodiment will be mainly described, and the common parts will be designated by the same reference numerals and the description thereof will be omitted.

FIG. 11A is a schematic cross-sectional view showing a second modification of the power generation element member 100 in the third embodiment. As shown in FIG. 11A, the power generation element member 102 has three elements 32 (32a, 32b, 32c), and openings are provided on one side of the element 32a and the element 32c and on both sides of the element 32b. 15 is formed. A sealing member 60 is arranged between the element 32a and the element 32b and between the element 32b and the element 32c so as to seal the opening 15. In addition to the sealing member 60, an outer peripheral portion 23b is arranged between the element 32a and the element 32b.

FIG. 11B is a schematic cross-sectional view showing a second modification of the element 32 in the third embodiment. As shown in FIG. 11B, the element 32 and the substrate 18 are divided along the second direction Y at the position where the sealing member 60 is arranged. An opening 15 is formed on one end side of the divided element 32a. A pair of openings 15a and 15b are formed at both ends of the divided element 32b. An opening 15 is formed on one end side of the divided element 32c.

(Fourth Embodiment)
Next, the power generation element 2, the power generation element member 103, and the power generation device 200 in the fourth embodiment will be described. 12 (a) and 12 (b) are schematic views showing an example of the power generation element member 103 and the power generation element 2 in the fourth embodiment. As shown in FIG. 12A, the power generation element member 103 may be covered with a pair of protective members 70 from the vertical direction (first direction Z). In FIG. 12A, the illustration of the substrate and the like is omitted. The protective member 70 may be a packing material formed of, for example, a resin member such as plastic. By covering the power generation element 2 with the protective member 70, it is possible to prevent the protective member 70 from absorbing the impact during transportation and damaging the power generation element 2.

Further, as shown in FIG. 12B, the power generation element member 103 has a grid-shaped outer peripheral portion 23c (support portion) and a pair of electrode portions (not shown) provided so as to sandwich the outer peripheral portion 23c. And a pair of substrates 18a that sandwich the outer peripheral portion 23c and the pair of electrode portions from the vertical direction (first direction Z).

(Fifth Embodiment: electronic device 500)
<Electronic device 500>
The power generation element 2 and the power generation device 200 described above can be mounted on, for example, an electronic device. Hereinafter, some embodiments of the electronic device will be described.

13 (a) to 13 (d) are schematic block diagrams showing an example of an electronic device 500 provided with a power generation element 2. 13 (e) to 13 (h) are schematic block diagrams showing an example of an electronic device 500 provided with a power generation device 200 including a power generation element 2.

As shown in FIG. 13A, the electronic device 500 (electric product) includes an electronic component 501 (electronic component), a main power supply 502, and an auxiliary power supply 503. Each of the electronic device 500 and the electronic component 501 is an electrical device (electrical device).

The electronic component 501 is driven by using the main power source 502 as a power source. Examples of the electronic component 501 include a CPU, a motor, a sensor terminal, lighting, and the like. When the electronic component 501 is, for example, a CPU, the electronic device 500 includes an electronic device that can be controlled by a built-in master (CPU). When the electronic component 501 includes, for example, at least one such as a motor, a sensor terminal, and lighting, the electronic device 500 includes an external master or a human-controllable electronic device.

The main power source 502 is, for example, a battery. Batteries also include rechargeable batteries. The positive terminal (+) of the main power supply 502 is electrically connected to the Vcc terminal (Vcc) of the electronic component 501. The negative terminal (-) of the main power supply 502 is electrically connected to the GND terminal (GND) of the electronic component 501.

The auxiliary power source 503 is a power generation element 2. The power generation element 2 includes at least one of the above-mentioned power generation elements 2. The anode of the power generation element 2 (for example, the first electrode portion 11) has a GND terminal (GND) of the electronic component 501, a negative terminal (-) of the main power supply 502, or a GND terminal (GND) and a negative terminal (-). It is electrically connected to the wiring to be connected. The cathode of the power generation element 2 (for example, the second electrode portion 12) has a Vcc terminal (Vcc) of the electronic component 501, a positive terminal (+) of the main power supply 502, or a Vcc terminal (Vcc) and a positive terminal (+). It is electrically connected to the wiring to be connected. In the electronic device 500, the auxiliary power supply 503 is used in combination with the main power supply 502, for example, as a power source for assisting the main power supply 502 or as a power source for backing up the main power supply 502 when the capacity of the main power supply 502 is exhausted. be able to. When the main power source 502 is a rechargeable battery, the auxiliary power source 503 can also be used as a power source for charging the battery.

As shown in FIG. 13B, the main power source 502 may be the power generation element 2. The anode of the power generation element 2 is electrically connected to the GND terminal (GND) of the electronic component 501. The cathode of the power generation element 2 is electrically connected to the Vcc terminal (Vcc) of the electronic component 501. The electronic device 500 shown in FIG. 13B includes a power generation element 2 used as a main power source 502 and an electronic component 501 that can be driven by the power generation element 2. The power generation element 2 is an independent power source (for example, an off-grid power source). Therefore, the electronic device 500 can be made, for example, a self-standing type (stand-alone type). Moreover, the power generation element 2 is an energy harvesting type (energy harvesting type). The electronic device 500 shown in FIG. 13B does not require battery replacement.

As shown in FIG. 13 (c), the electronic component 501 may include the power generation element 2. The anode of the power generation element 2 is electrically connected to, for example, the GND wiring of the circuit board (not shown). The cathode of the power generation element 2 is electrically connected to, for example, a Vcc wiring of a circuit board (not shown). In this case, the power generation element 2 can be used as an electronic component 501, for example, an auxiliary power supply 503.

As shown in FIG. 13D, when the electronic component 501 includes the power generation element 2, the power generation element 2 can be used as, for example, the main power source 502 of the electronic component 501.

As shown in each of FIGS. 13 (e) to 13 (h), the electronic device 500 may include a power generation device 200. The power generation device 200 includes a power generation element 2 as a source of electric energy.

The embodiment shown in FIG. 13D includes a power generation element 2 in which the electronic component 501 is used as the main power source 502. Similarly, the embodiment shown in FIG. 13 (h) includes a power generation device 200 in which the electronic component 501 is used as a main power source. In these embodiments, the electronic component 501 has an independent power source. Therefore, the electronic component 501 can be made, for example, a self-standing type. The self-supporting electronic component 501 can be effectively used, for example, in an electronic device including a plurality of electronic components and in which at least one electronic component is separated from another electronic component. An example of such an electronic device 500 is a sensor. The sensor includes a sensor terminal (slave) and a controller (master) away from the sensor terminal. Each of the sensor terminal and the controller is an electronic component 501. If the sensor terminal includes the power generation element 2 or the power generation device 200, it becomes a self-supporting sensor terminal and does not need to be supplied with electric power by wire. Since the power generation element 2 or the power generation device 200 is an energy harvesting type, it is not necessary to replace the battery. The sensor terminal can also be regarded as one of the electronic devices 500. In addition to the sensor terminal of the sensor, the sensor terminal regarded as the electronic device 500 further includes, for example, an IoT wireless tag and the like.

What is common to the embodiments shown in FIGS. 13 (a) to 13 (h) is that the electronic device 500 uses a power generation element 2 that converts thermal energy into electrical energy and a power generation element 2 as a power source. It includes an electronic component 501 that can be driven.

The electronic device 500 may be an autonomous type (autonomous type) having an independent power supply. Examples of autonomous electronic devices include robots and the like. Further, the electronic component 501 provided with the power generation element 2 or the power generation device 200 may be autonomous with an independent power source. Examples of autonomous electronic components include movable sensor terminals and the like.

Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other embodiments, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the scope of the invention described in the claims and the equivalent scope thereof.

1: Element 1a: Element 1b: Element 2: Power generation element 11: First electrode portion 12: Second electrode portion 13: Support portion 13a: Plate-shaped member 13b: Outer peripheral portion 13c: Sacrificial support portion 14: Intermediate portion 140: Gap Part 141: Nanoparticles 141a: Insulating film 142: Solvent 15: Opening 15a: Opening 15b: Opening 16: Space 17: Sealing part 18: Substrate 18a: Substrate 20: Element 23b: Outer peripheral portion 23c: Outer peripheral portion 30 : Element 100: Power generation element member 200: Power generation device 201: First wiring 202: Second wiring 211: First terminal 212: Second terminal 500: Electronic device G: Gap R: Load S110: Element forming process S120: Division Step S130: Intermediate portion forming step S140: Sealing step Z: First direction Y: Second direction X: Third direction

Claims (8)

It is a method of manufacturing a power generation element that converts thermal energy into electrical energy.
An element forming step of forming an element having a space enclosed by a pair of electrode portions having different work functions and a support portion separated from each other in the first direction.
A division step of dividing at least one of the support portion and the electrode portion along a second direction intersecting with the first direction to form an opening connected to the space.
An intermediate portion forming step of forming an intermediate portion having nanoparticles in the space through the opening,
A sealing step of forming a sealing portion along the opening, and a sealing step.
A method for manufacturing a power generation element, which comprises. The support portion has a sacrificial support portion formed in the space and extending in the first direction.
The method for manufacturing a power generation element according to claim 1, wherein the dividing step includes forming the opening by removing at least a part of the sacrificial support along the second direction. .. The element forming step includes forming a plurality of the elements on one substrate.
The method for manufacturing a power generation element according to claim 1 or 2, wherein the division step includes dividing the substrate along the second direction and separating the plurality of elements from each other. The method for manufacturing a power generation element according to any one of claims 1 to 3, wherein the dividing step includes forming a pair of the openings so as to sandwich the electrode portion. The method for manufacturing a power generation element according to any one of claims 1 to 4, wherein the element formed in the element forming step contains an inert gas in the space. A member for a power generation element used as a part of a power generation element that converts thermal energy into electric energy.
With the board
With a plurality of elements provided on the substrate,
Equipped with
The element is
A pair of electrodes separated in the first direction and having different work functions,
The space including between the pair of electrodes and
The support portion that surrounds the space and
Have,
A member for a power generation element, wherein the space is closed by a pair of the electrode portions and the support portion. A power generation device including a power generation element formed by the method for manufacturing a power generation element according to any one of claims 1 to 5. An electronic device including a power generation element formed by the method for manufacturing a power generation element according to any one of claims 1 to 5, and an electronic component capable of driving the power generation element by using the power generation element as a power source.

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