TW202248533A - Miniature blower - Google Patents

Abstract

A miniature blower is disclosed and includes a gas-injection plate, a chamber frame, an actuator, an insulation frame and a conductive frame. The gas-injection plate includes a suspension part. The chamber frame is disposed on the gas-injection plate. The actuator includes a piezoelectric carrying plate, an adjusting resonance plate and a piezoelectric plate. The actuator is disposed on the chamber frame. The insulation frame is disposed on the actuator. The conductive frame is disposed on the insulation frame. A soft thin plate, the gas-injection plate, the chamber frame, the actuator, the insulation frame and the conductive frame are produced as a modular structure having a length, a width and a height.

Description

micro blower

This case is about a micro-blower, especially a thin, portable, noise-reducing micro-blower.

When many blowers are driven, the gas is pushed out by vibration. Due to the rapid and high-frequency vibration of this type of blower, it is often accompanied by the noise of the air flow. The noise generated by this type of blower due to physical phenomena cannot achieve the purpose of being portable and comfortable. Therefore, how to develop a kind of air blower that can improve above-mentioned prior art deficiency, can make the equipment small in size, miniaturized and silent, and then realize the miniaturization of lightness and comfort, is a problem that needs to be solved urgently at present.

The main purpose of this case is to provide a way to improve the airflow noise generated by the operation of the micro blower. The improved micro blower designed in this case can further make the micro blower miniaturized and quiet.

A broad implementation of this case is a micro blower, comprising: an air jet hole sheet, including a suspension part, the suspension part has a hollow hole, and the suspension part can bend and vibrate; a cavity frame is arranged on the air jet hole On-chip; an actuating body is composed of a piezoelectric carrier plate, an adjusting resonant plate and a piezoelectric plate stacked from bottom to top in sequence, the actuating body is arranged on the cavity frame, and the piezoelectric carrier The plate is used to receive a first voltage and a second voltage to cause the piezoelectric plate to generate reciprocating bending vibration, wherein the first voltage and the second voltage are alternately applied to the piezoelectric carrier plate at a frequency; an insulating frame, arranged on the actuating body; and a conductive frame, arranged on the insulating frame; wherein, the flexible thin sheet, the blowhole sheet, the cavity frame, the actuating body, the insulating frame and the conductive The frame is manufactured as a module structure, and the module structure has a length, a width and a height.

A micro-blower, comprising: an air jet hole sheet, including a suspension part, the suspension part has a hollow hole, and the suspension part can bend and vibrate; a cavity frame is arranged on the air jet hole sheet; an actuating body is A piezoelectric carrier plate, an adjustment resonant plate and a piezoelectric plate are sequentially stacked from bottom to top. The actuating body is arranged on the cavity frame. The piezoelectric carrier plate is used to accept a first voltage and a second voltage, causing the piezoelectric plate to produce reciprocating bending vibrations, wherein the first voltage and the second voltage are alternately applied to the piezoelectric carrier plate at a frequency; an insulating frame is arranged on the actuator body; and a conductive frame, arranged on the insulating frame; the blow hole sheet, the cavity frame, the actuating body, the insulating frame and the conductive frame are made into a module structure, and the module structure Having a length, a width and a height, wherein the length of the modular structure is between 1 nm and 999 nm, the width is between 1 nm and 999 nm and the height is between 1 nm and 999 nm The volume made up of meters.

Embodiments embodying the features and advantages of this case will be described in detail in the description of the latter paragraph. It should be understood that the present case can have various changes in different aspects without departing from the scope of the present case, and the descriptions and diagrams therein are used for illustration in nature rather than limiting the present case.

Please refer to FIG. 1A to FIG. 3A. This case provides a micro blower 10, which includes a flexible sheet 101, an air jet hole sheet 102, a cavity frame 103, an actuating body 104, an insulating frame 105 and a conductive frame 106. The flexible sheet 101 is a thin sound-absorbing sheet, and the center of the flexible sheet 101 has a central hole 101b. The air jet hole sheet 102 includes a suspension part 102a, and the flexible sheet 101 is disposed on the air jet hole sheet 102 . The center of the suspension part 102a has a hollow hole 102b, and the suspension part 102a can bend and vibrate. Wherein, the central point of the central hole 101b of the flexible thin sheet 101 and the central point of the hollow hole 102b of the air jet hole sheet 102 are located on the same axis. The cavity frame 103 is disposed on the air jet hole sheet 102 . The actuating body 104 is composed of a piezoelectric carrier plate 104 a , an adjusting resonant plate 104 b and a piezoelectric plate 104 c sequentially stacked from bottom to top, and the actuating body 104 is disposed on the cavity frame 103 . The piezoelectric carrier plate 104a is used to receive a first voltage and a second voltage to cause the piezoelectric plate 104c to generate reciprocating bending vibration, and the first voltage and the second voltage are alternately applied to the piezoelectric carrier plate 104a at a frequency ; Wherein, the first voltage and the second voltage may respectively be the positive pole and the negative pole of the same power system (not shown), but not limited thereto. In other embodiments, the power system of the first voltage or the second voltage can also be adjusted according to design requirements (such as sine wave, pulse wave, square wave, sawtooth wave, etc.). In this embodiment, the first voltage is a square wave of +5V, and the second voltage is a square wave of -5V. The alternating frequency of the first voltage and the second voltage is 25Hz-29KHz, but not limited thereto. In other embodiments of the present application, the power supply system, the voltage value, and the alternating frequency of the first voltage and the second voltage can also be adjusted according to design requirements. The insulating frame 105 is disposed on the actuating body 104 . The conductive frame 106 is disposed on the insulating frame 105 .

Please refer to Fig. 2 and Fig. 3A, the micro blower 10 is made into a modular structure by a flexible thin sheet 101, an air jet hole sheet 102, a cavity frame 103, an actuating body 104, an insulating frame 105 and a conductive frame 106, and The module structure has a length L, a width W and a height H, wherein the module structure has a length ranging from 1 millimeter (mm) to 999 millimeters (mm), and a width ranging from 1 millimeter (mm) to 999 millimeters (mm) ) and a volume formed by a height ranging from 1 millimeter (mm) to 999 millimeters (mm), but not limited thereto, the module structure can also have a length ranging from 1 micrometer (μm) to 999 micrometers (μm), a width A volume between 1 micrometer (μm) and 999 micrometers (μm) and a height between 1 micrometer (μm) and 999 micrometers (μm), or a length between 1 nanometer (nm) and 999 nanometers (nm) ), a volume with a width ranging from 1 nanometer (nm) to 999 nanometers (nm) and a height ranging from 1 nanometer (nm) to 999 nanometers (nm). This case is for simplification. The following explanations will not be limited to nano-process level, micron process level or millimeter process level technology. The process level can also be replaced by nano-process level, micron process level or mm process grade.

It should be noted that, in this embodiment, when the piezoelectric carrier plate 104a receives the first voltage and the conductive frame 106 receives the second voltage, the piezoelectric plate 104c generates bending vibration in a first direction. When the piezoelectric carrier plate 104a receives the second voltage and the conductive frame 106 receives the first voltage, the piezoelectric plate 104c generates bending vibration in a second direction opposite to the first direction. In this embodiment, the first direction may be upwards, and the second direction opposite to the first direction may be downwards, but not limited thereto. In other embodiments of the present application, the first direction and the second direction may also be expressed as other relative directional relationships (for example: up and down, left and right, or front and back).

It is worth noting that, in this embodiment, a resonant chamber 107 is formed between the actuating body 104, the cavity frame 103, and the suspension part 102a, and the first voltage and the second voltage are alternately applied to the actuating body at a frequency. body 104, driving the actuating body 104 to drive the air injection hole sheet 102 to resonate, so that the suspension part 102a of the air injection hole sheet 102 produces a reciprocating bending vibration, so that the gas passes through the center hole 101b of the flexible sheet 101 and the air injection hole sheet 102 The hollow hole 102b enters the resonance chamber 107 and then exits to realize the transmission flow of the gas.

Please refer to Fig. 2B and Fig. 3A, in the embodiment of this case, the central hole 101b of the soft sheet 101 has a central hole diameter R1, and the hollow hole 102b of the gas injection hole sheet 102 has a hollow hole diameter R2, and the central hole diameter R1 is less than The hollow hole has a diameter R2. It is worth mentioning that, in the schematic diagram of the reverse side of the micro blower of this case shown in Figure 2B, it should not be possible to see the periphery of the hollow hole 102b from the reverse side, that is, the periphery surrounded by the diameter R2 of the hollow hole. The relationship between the hole diameters R1 is especially indicated by a dotted line. More specifically, as shown in FIG. 3A, an axis Y is provided, and the axis Y passes through the central hole 101b. When the flexible sheet 101 and the floating part 102a are assembled, the central hole 101b of the flexible sheet 101 is aligned with the hollow hole 102b of the floating part 102a and stacked along the axis Y direction. Accordingly, after the flexible sheet 101 and the suspension part 102a are stacked, the central point of the central hole 101b and the central point of the hollow hole 102b are both located on the same axis (ie, on the axis Y). In some embodiments, the central hole 101b is located at the center of the flexible sheet 101; the hollow hole 102b is located at the center of the suspension part 102a; and the central point of the central hole 101b and the central point of the hollow hole 102b are both located on the same axis. In some embodiments, the central hole 101b is not located at the center of the flexible sheet 101; the hollow hole 102b is located at the center of the suspension part 102a; and the central point of the central hole 101b and the central point of the hollow hole 102b are both located on the same axis. In some embodiments, the central hole 101b is located at the center of the flexible sheet 101; the hollow hole 102b is not located at the center of the suspension part 102a; and the central point of the central hole 101b and the central point of the hollow hole 102b are both located on the same axis. In some embodiments, the central hole 101b is not located at the center of the flexible sheet 101; the hollow hole 102b is not located at the center of the suspension part 102a; and the center point of the center hole 101b and the center point of the hollow hole 102b are both located on the same axis. . In addition, the central hole 101b is surrounded by a side wall 101c, and the hollow hole 102b is surrounded by a side wall 102c. Since the diameter R2 of the hollow hole is greater than the diameter R1 of the central hole, the sidewall 101c extends toward the center of the central hole 101b and covers part of the central hole 102b. In one embodiment, the sidewall 101c is substantially parallel to the sidewall 102c.

It should be noted that in other embodiments of this case, as long as the hardness of the flexible sheet 101 is relatively smaller than the hardness of the suspension part 102a, that is, the hardness of the flexible sheet 101 is less than the hardness of the suspension part 102a, it is within the scope disclosed in this case .

It is worth noting that, in other embodiments of the present case, as long as the degree of deflection of the flexible sheet 101 is relatively greater than the degree of deflection of the suspension part 102a, that is, the degree of deflection of the flexible sheet 101 is greater than the degree of deflection of the suspension part 102a within the scope disclosed in this case.

It should be noted that, in other embodiments of this case, as long as the elasticity of the flexible sheet 101 is relatively greater than that of the floating portion 102a, that is, the elasticity of the flexible sheet 101 is greater than that of the floating portion 102a, it is within the scope disclosed in this case .

In addition, it is worth noting that in the embodiment of this case (indicated by the millimeter process level), the central hole 101b of the flexible sheet 101 has a central hole diameter R1, and the central hole diameter R1 is between 0.1~0.14mm; the gas injection hole The hollow hole 102b in the sheet 102 has a hollow hole diameter R2, and the hollow hole diameter R2 is between 0.4mm~2mm.

In addition, it is worth noting that, in the embodiment of this case (indicated by the millimeter process level), the central hole 101b of the flexible sheet 101 is a circle; the central hole 101b of the flexible sheet 101 can also be a square, a rhombus or a Parallelogram, the width of the central hole 101b is between 0.1 mm and 0.14 mm, but not limited thereto. The shape and width of the central hole 101b of the flexible sheet 101 can be changed according to design requirements.

In addition, it is worth noting that in the embodiment of this case (indicated by the millimeter process level), the hollow hole 102b in the air jet hole sheet 102 is a circle; the hollow hole 102b in the air jet hole sheet 102 can also be a square, a Rhombus or a parallelogram, the width of the hollow hole 102b is between 0.4mm~2mm, but not limited thereto, the shape and width of the hollow hole 102b in the jet hole sheet 102 can be changed according to design requirements.

Another noteworthy is that the central hole 101b of the flexible sheet 101 and the flexible sheet 101, the hollow hole 102b and the air injection hole sheet 102 of the flexible sheet 102, the central hole diameter R1, the hollow hole diameter R2, the cavity frame 103, the actuating The body 104 , the insulating frame 105 and the conductive frame 106 all maintain the same process level, which can be millimeter level, micron level or nanometer level.

Then please refer to Fig. 3B to Fig. 3D, which are schematic diagrams of a micro-blower 10 in this case. Firstly, when the actuating body 104 receives the first voltage and the conductive frame 106 receives the second voltage, the piezoelectric plate 104c will generate bending vibration in a first direction, because the actuating body 104 is the piezoelectric carrier plate 104a, The adjustment resonance plate 104b and the piezoelectric plate 104c are sequentially stacked from bottom to top. As shown in FIG. 3B, when the actuating body 104 generates bending vibration in a first direction, the resonant chamber 107 will generate a negative pressure, allowing the gas to pass through the central hole 101b of the flexible sheet 101 and the hollow hole 102b in the gas injection hole sheet 102. into the resonance chamber 107.

Then, due to the momentary negative pressure in the resonance chamber 107, the air-jet hole plate 102 is driven by the actuating body 104, so that the air-jet hole plate 102 and the actuating body 104 resonate (as shown in FIG. 3C ). When the actuating body 104 receives the second voltage and the conductive frame 106 receives the first voltage, the piezoelectric plate 104c generates bending vibration in a second direction opposite to the first direction (as shown in FIG. 3D ). At this time, the resonance chamber 107 will generate a positive pressure, so that the gas will flow out from the resonance chamber 107 to the gas flow chamber 108 through the hollow hole 102b of the gas injection hole sheet 102 and the central hole 101b of the flexible sheet 101.

When the piezoelectric carrier 104a and the conductive frame 106 of the actuating body 104 respectively receive the first voltage and the second voltage alternately at a high frequency, the gas continuously flows from the resonant chamber 107 through the hollow hole 102b of the jet hole sheet 102 and the flexible When the central hole 101b of the sheet 101 sucks in and flows out, the discharged gas follows Bernoulli's principle, so that the gas in the airflow chamber 108 flows in the direction indicated by the arrow in FIG. 3D .

Also, this case has the micro blower 10 of soft sheet 101 compared with the micro blower without soft sheet, taking the millimeter process as an example, the flow rate of the micro blower 10 of this case is raised from 150ml per second of the micro blower without soft sheet to 200ml per second, the noise of the physical phenomenon caused by the gas flow is reduced from 50dB of the micro blower without soft sheet to below 30dB.

To sum up, in addition to miniaturization, the micro blower provided in this case can effectively reduce the noise of the physical phenomena caused by the gas flow. It utilizes the matching of the hardness, deflection and elasticity of the soft sheet and the suspension part, and The difference between the diameter of the central hole and the diameter of the hollow hole is designed to produce a quiet micro-blower and produce a stronger Bernoulli effect, which is extremely industrially applicable.

This case can be modified in various ways by a person who is familiar with this technology, but it does not deviate from the intended protection of the scope of the attached patent application.

10: Micro blower 101: Soft flakes 101b: Center Hole 101c: side wall 102: Fumarole 102a: suspension part 102b: hollow hole 102c: side wall 103: cavity frame 104: Actuating body 104a: Piezoelectric carrier plate 104b: Adjust the resonance plate 104c: piezoelectric plate 105: Insulation frame 106: Conductive frame 107: Resonance chamber 108: Air flow chamber H: height L: Length R1: Center hole diameter R2: Hollow hole diameter W: width Y: axis

Figure 1 is an exploded schematic diagram of the components of the micro blower in this case. Fig. 2A is the front schematic diagram of the miniature blower of this case. Fig. 2B is a schematic diagram of the reverse side of the micro blower of this case. Figures 3A to 3D are schematic diagrams of the operation of the micro blower in this case.

10: Micro blower

101: Soft flakes

101b: Center Hole

102: Fumarole

102a: suspension part

102b: hollow hole

103: cavity frame

104: Actuating body

104a: Piezoelectric carrier plate

104b: Adjust the resonance plate

104c: piezoelectric plate

105: Insulation frame

106: Conductive frame

Claims (15)

A micro blower comprising: An air jet orifice sheet, comprising a suspending part, the suspending part has a hollow hole, and the suspending part can bend and vibrate; A cavity frame is arranged on the jet orifice sheet; An actuation body is composed of a piezoelectric carrier plate, an adjustment resonant plate and a piezoelectric plate sequentially stacked from bottom to top, the actuation body is arranged on the cavity frame, and the piezoelectric carrier plate is used for To accept a first voltage and a second voltage to cause the piezoelectric plate to generate reciprocating bending vibrations, wherein the first voltage and the second voltage are alternately applied to the piezoelectric carrier plate at a frequency; an insulating frame disposed on the actuating body; and a conductive frame arranged on the insulating frame; Wherein, the jet hole sheet, the cavity frame, the actuating body, the insulating frame and the conductive frame are made into a module structure, and the module structure has a length, a width and a height. The micro blower described in item 1 of the scope of the patent application, wherein the modular structure has the length ranging from 1 mm to 999 mm, the width ranging from 1 mm to 999 mm, and the height ranging from 1 mm to 999 mm. volume of. The micro blower described in item 1 of the scope of the patent application, wherein the module structure has the length ranging from 1 micron to 999 microns, the width ranging from 1 micron to 999 microns, and the height ranging from 1 micron to 999 microns. volume of. The micro blower as described in item 1 of the scope of the patent application, wherein the module structure has the length between 1 nm and 999 nm, the width between 1 nm and 999 nm, and the height between 1 nm to 999 nanometers constituted volume. The micro-blower as described in item 1 of the scope of the patent application further comprises a flexible thin sheet, which is arranged under the air-jet hole sheet. The center points of the hollow holes of the suspension part are located on the same axis. The micro-blower described in item 5 of the scope of the patent application, wherein when the piezoelectric carrier board receives the first voltage and the conductive frame receives the second voltage, the piezoelectric board generates bending vibration in a first direction; When the piezoelectric carrier plate receives the second voltage and the conductive frame receives the first voltage, the piezoelectric plate generates bending vibration in a second direction opposite to the first direction; and the actuating body, the A resonant chamber is formed between the cavity frame and the suspension part, through which the first voltage and the second voltage are alternately applied to the actuating body at the frequency, and the actuating body is driven to drive the air jet orifice to resonate , so that the floating part of the gas injection hole plate produces a reciprocating bending vibration displacement, so that the gas enters the resonance chamber through the central hole of the flexible sheet and the hollow hole of the floating part, and then is discharged to realize the gas flow Transmission flow. The micro blower described in item 6 of the scope of the patent application, wherein the central hole of the flexible sheet has a central hole diameter, the hollow hole of the suspension part has a hollow hole diameter, and the central hole diameter is smaller than the hollow hole diameter. The micro-blower described in item 6 of the scope of the patent application, wherein the hardness of the soft sheet is smaller than the hardness of the suspension part. The micro blower described in item 6 of the scope of the patent application, wherein the deflection of the flexible sheet is greater than the deflection of the suspending part. As the micro blower described in item 6 of the scope of the patent application, the elasticity of the soft sheet is greater than that of the suspending part. As the micro blower described in item 6 of the scope of the patent application, the central hole of the flexible sheet is a circle. As the micro blower described in item 6 of the scope of the patent application, the central hole of the flexible sheet is a square, a rhombus or a parallelogram. As the micro blower described in item 6 of the scope of the patent application, the hollow hole of the suspension part is a circle. As the micro blower described in item 6 of the scope of the patent application, wherein the hollow hole of the suspension part is a square, a rhombus or a parallelogram. A micro blower comprising: An air jet orifice sheet, comprising a suspending part, the suspending part has a hollow hole, and the suspending part can bend and vibrate; A cavity frame is arranged on the jet orifice sheet; An actuation body is composed of a piezoelectric carrier plate, an adjustment resonant plate and a piezoelectric plate sequentially stacked from bottom to top, the actuation body is arranged on the cavity frame, and the piezoelectric carrier plate is used for To accept a first voltage and a second voltage to cause the piezoelectric plate to generate reciprocating bending vibrations, wherein the first voltage and the second voltage are alternately applied to the piezoelectric carrier plate at a frequency; an insulating frame disposed on the actuating body; and a conductive frame arranged on the insulating frame; The jet orifice sheet, the cavity frame, the actuating body, the insulating frame and the conductive frame are made into a module structure, and the module structure has a length ranging from 1 nm to 999 nm, and a width A volume between 1 nm and 999 nm and a height between 1 nm and 999 nm.

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