TW202246923A - Device and method for monitoring - Google Patents

Abstract

The present invention discloses a monitoring device, which is adapted to detect the operating state of a device under test. The device under test is disposed in a testing space. The monitoring device includes a distance sensor, a processing module and an alarm module. The distance sensor detects the distance between it and a detection point on the device under test at each interval time and sends a distance signal. The processing module is electrically connected to the distance sensor and receives the distance signal. The processing module generates an operating state information according to the interval time and the distance signal. The processing module determines whether the operation state information is in accordance with a predetermined operation mode. When the operation state information is not in accordance with the predetermined operation mode, the processing module sends a warning signal. The alarm module is electrically connected to the processing module. The alarm module sends a warning message according to the warning signal.

Description

Monitoring device and method

The present invention relates to a monitoring device and method, in particular to a monitoring device and method for monitoring the running state of a device to be tested.

For some processes that require a highly clean environment, or in a high-humidity, high-temperature, or high-pressure environment, it is difficult to monitor the operation of the mechanical equipment used in the process. For example, in a highly clean, high humidity, high temperature, or high pressure environment, a closed space or even a vacuum space is usually separated by a housing, and the mechanical equipment required for the process is installed in the closed space or vacuum space.

However, it is also difficult to install instruments for monitoring the operation of mechanical equipment in a confined space or a vacuum space. Therefore, it is necessary to check whether the mechanical equipment is in normal operation by man-made methods such as patrolling by operators or watching surveillance images. Or, according to the characteristics of each mechanical device, a specific sensing element is provided on the mechanical device. In other words, currently there is no monitoring device that can be installed on the outside of highly clean, high humidity, high temperature, high pressure, or vacuum spaces that are difficult to enter, and used to monitor the operating status of mechanical equipment inside the aforementioned environments.

In view of the above-mentioned problems, the main purpose of the present invention is to provide a monitoring device and a monitoring method, by measuring the distance of the device under test arranged in the test space by the distance sensing module, and the processing module according to the distance Change to judge the operating status of the device under test to solve the conventional problem that it is difficult to monitor the operating status of mechanical equipment installed in highly clean, high humidity, high temperature, high pressure, or vacuum environments.

To achieve the above object, the present invention provides a monitoring device for detecting the running state of a device under test. The device to be tested is arranged in a test space. The monitoring device includes a distance sensing module, a processing module and a notification module. The distance sensing module detects the distance between itself and a detection point on the device under test at each interval, and sends a distance signal. The processing module is electrically connected with the distance sensing module and receives distance signals. The processing module generates a running state information according to the interval time and the distance signal. The processing module judges whether the operation status information conforms to a predetermined operation mode. When the operation status information does not conform to the predetermined operation mode, the processing module sends out a warning signal. The notification module is electrically connected with the processing module. The notification module sends a warning message according to the warning signal.

To achieve the above object, the present invention provides another monitoring method, which is applied to a monitoring device to detect the operation status of a device under test. The device to be tested is arranged in a test space. The monitoring device includes a distance sensing module, a processing module and a notification module. The monitoring method includes the following steps: the distance sensing module detects the distance between it and a detection point located in the device under test at each interval time, and transmits a distance signal; the processing module receives the distance signal, and according to the interval time and The distance signal generates a running status information; the processing module judges whether the running status information conforms to a predetermined running mode; when the running status information does not meet the predetermined running mode, the processing module sends out a warning signal; and the notification module sends out a warning according to the warning signal message.

According to an embodiment of the present invention, the operation status information includes a distance change, a rotational speed, or a moving speed of the device under test.

According to an embodiment of the present invention, the device under test is a rotatable device, and the device under test includes an uneven surface. The detection point is located on the surface of the device under test, and the operation status information generated by the processing module is a periodic distance change.

According to an embodiment of the present invention, the processing module calculates and generates a rotational speed according to periodic distance changes.

According to an embodiment of the present invention, the predetermined operation mode is a predetermined speed range. When the rotational speed calculated by the processing module is greater than or less than a predetermined rotational speed range, the processing module sends out a warning signal.

According to an embodiment of the present invention, after the processing module determines that the operation status information does not conform to the predetermined operation mode, the processing module further includes: the processing module records an abnormal time that does not conform to the predetermined operation mode.

According to an embodiment of the present invention, when the processing module determines that the abnormal time is greater than a predetermined abnormal time, the processing module sends a warning signal.

According to an embodiment of the present invention, the monitoring device is arranged outside the testing space.

According to an embodiment of the present invention, the testing space includes a closed space separated by a casing.

As mentioned above, the monitoring device according to the present invention includes a distance sensing module, a processing module and a notification module. The distance sensing module can detect the distance between it and a detection point located on a device under test, and send a distance signal to the processing module. The processing module can generate a running state information according to the distance signal, and judge whether the running state information conforms to a predetermined running mode. If not, it means that the device under test may be in an abnormal state, and the notification module sends a warning message. The detection is performed by the distance sensing module, so that the monitoring device can be installed outside the test space to detect and monitor the operating status of the device under test in a remote manner. Therefore, the monitoring device of the present invention can be applied to monitor the operation status of mechanical equipment installed in highly clean, high humidity, high temperature, high pressure, or vacuum environments, so as to achieve the effect of convenient installation and monitoring. .

In order to allow your review committee members to better understand the technical content of the present invention, the preferred specific embodiments are described as follows.

Fig. 1 is a schematic block diagram of a monitoring device according to an embodiment of the present invention; Fig. 2 is a schematic flow chart of a monitoring method according to an embodiment executed by the monitoring device shown in Fig. 1; Fig. 3 is a side-by-side device shown in Fig. 1 Please refer to Figure 1, Figure 2 and Figure 3 for the schematic diagram of its operation. Firstly, the monitoring device 1 of this embodiment is used to detect the running status of a device under test 9 . Wherein, the device under test 9 is arranged in a test space S. As shown in FIG. The test space S can be, for example but not limited to, an environment where it is difficult to install detection instruments such as high cleanliness, high humidity, high temperature, high pressure, or vacuum, and the test space S can be an open or closed space, which is not limited by the present invention. In this embodiment, the test space S is illustrated as an enclosed space separated by a casing 8 , and the test space S may also be a vacuum space. The monitoring device 1 is arranged outside the testing space S, which can avoid affecting the highly clean environment of the testing space S, or avoid damage to the monitoring device 1 due to factors such as high humidity, high temperature, or high pressure in the testing space S.

In this embodiment, the monitoring device 1 includes a distance sensing module 10 , a processing module 20 and a notification module 30 . The processing module 20 is electrically connected with the distance sensing module 10 and the notification module 30 for data transmission with the distance sensing module 10 and the notification module 30 . It should be noted that, besides being configured as a hardware device, or a combination of a hardware device and a software program or firmware, each of the above-mentioned modules can also be configured by means of a circuit loop or other appropriate types; and each module can be configured independently In addition to the type configuration, it can also be combined with the type configuration. The various modules can be directly or indirectly connected to each other in a wired or wireless manner to form a coupling. In addition, this embodiment is only an example of a preferred embodiment of the invention, and all possible combinations of changes are not described in detail in order to avoid redundant description. However, those skilled in the art should understand that not all the above-mentioned modules or components are necessary. And in order to implement this creation, it may also include other more detailed conventional modules or components. Each module or component may be omitted or modified as required, and there may not be other modules or components between any two modules.

With the monitoring device 1 of this embodiment, the monitoring method shown in FIG. 2 is executed. In the following, the operation of the monitoring device 1 will be further described according to the steps of the monitoring method.

Step S10: The distance sensing module 10 detects the distance between itself and a detection point P located on the device under test 9 at each interval, and sends a distance signal.

In this embodiment, the distance sensing module 10 may be an optical distance sensor. The distance sensing module 10 can emit light to the device under test 9 , and the position where the light hits the device under test 9 is referred to as a detection point P herein. Preferably, the detection point P can be located on the surface of the device 9 to be tested. That is, the distance sensing module 10 emits light toward the surface of the device under test 9 .

It should be noted that the detection point P can be at a fixed position or an unfixed position of the device under test 9 . Specifically, if the monitoring device 1 is used to detect whether the device under test 9 remains at a specific position during operation, the detection point P can be located at a fixed position of the device under test 9 . Also, if the monitoring device 1 is used to detect whether the device under test 9 continues to operate, then the detection point P can be located at an unfixed position of the device under test 9 in response to the operation of the device under test 9 (refer to FIG. 3 ). Other details are further explained in the subsequent steps.

The distance sensing module 10 emits light, such as laser light, to the detection point P located on the device under test 9, and transmits a distance signal after receiving the light reflected from the detection point. The distance signal carries the distance information between the distance sensing module 10 and the detection point P. In this embodiment, the distance sensing module 10 detects the distance from the detection point P at each interval, and transmits a distance signal.

Step S20: The processing module 20 receives the distance signal, and generates a running status information according to the interval time and the distance signal.

After receiving the distance signal from the distance sensing module 10, the processing module 20 can record the change of the distance signal and its time, and generate a running status information accordingly. In other words, the processing module 20 generates a piece of running status information according to the interval time and distance signals. Wherein, the operation state information may be, for example but not limited to, a distance change, a rotational speed, or a moving speed of the device under test 9 . The operating status information in this embodiment is described by taking distance change or rotational speed as an example.

In this embodiment, the device under test 9 is illustrated by taking a rotatable device as an example. Specifically, the device under test 9 in this embodiment is a roller cleaning device, which is used to clean the wafer. Moreover, the device under test 9 (roller cleaning device) includes an uneven surface, for example, the device under test 9 includes at least one convex portion 91 . Since the detection point P is located on the surface of the device to be tested 9, when the device to be tested 9 is in operation (roller rotation), the detection point P will be on the convex portion 91 or the flat place between the two convex portions 91 in sequence, and then Make the distance sensing module 10 generate different distance signals.

The processing module 20 can calculate a specific distance value according to the distance signal. For example, when the detection point P is located at the convex portion 91, the distance value is D1; when the detection point P is located at the flat between two convex portions 91, the distance value is D2. It can be seen from FIG. 3 that the distance value D2 is greater than the distance value D1. The processing module 20 can record the distance values D1 and D2 at different time points as the operation state information. Therefore, the operating status information in this embodiment is the distance change, which is a periodic distance change. Because the distance change is the same every time the device under test 9 rotates, it is a periodic distance change. Preferably, the processing module 20 can also calculate and generate a rotational speed of the device under test 9 according to the periodic distance variation.

In other embodiments, if the device under test 9 moves linearly or non-linearly during operation, the processing module 20 can also calculate and generate a moving speed of the device under test 9 according to the distance change, which can also be used as operating status information.

Step S30: The processing module 20 judges whether the operation status information matches a predetermined operation mode.

Then, the processing module 20 can further determine whether the operation status information conforms to a predetermined operation mode. Wherein, the predetermined operation mode is the distance change, rotational speed, or moving speed that can be measured when the device under test 9 is in normal operation. Specifically, if the device under test 9 is operated in a rotating manner, the predetermined operation mode can be a periodic distance change during normal operation, or a speed range during normal operation (referred to as a predetermined speed range in this embodiment) . If the device under test 9 operates in a linear or non-linear manner, its predetermined operation mode can be the range of movement speed or the change of movement speed during normal operation.

The processing module 20 can preset a predetermined operation mode according to the type of the device under test 9 . After the processing module 20 calculates and obtains the operation state information according to the distance signal received from the distance sensing module 10 (step S20 ), it further compares whether the operation state information conforms to the predetermined operation mode. If the operation state information conforms to the predetermined operation mode, it means that the device under test 9 is operating normally, and returns to step S10 to continuously detect the distance to the detection point P. On the contrary, if the operation status information does not conform to the predetermined operation mode, it means that the device under test 9 may be abnormal, and step S40 is executed.

In this embodiment, the predetermined operation mode may be a predetermined speed range. After the processing module 20 calculates and obtains the rotational speed (that is, the operation state information, step S20 ) according to the distance signal, it further compares whether the rotational speed falls within a predetermined rotational speed range. If the rotational speed falls within the predetermined rotational speed range, it means that the operating state information conforms to the predetermined operating mode, and the device under test 9 operates normally, and returns to step S10. On the contrary, if the rotational speed is greater than or less than the predetermined rotational speed range, it means that the operating state information does not conform to the predetermined operating mode, and the device under test 9 may be abnormal, and step S40 is executed.

In other embodiments, if the monitoring device 1 is used to detect whether the device under test 9 is kept at a specific position during operation, the predetermined operation mode can be a fixed distance or a distance range. After the processing module 20 calculates and obtains the specific distance value (that is, the operation status information, step S20 ) according to the distance signal, it further compares whether the distance value is equal to the fixed value of the distance or falls within the range of the distance. If the distance value is equal to the fixed distance value or falls within the distance range, it means that the operation status information conforms to the predetermined operation mode, and the device under test 9 remains at the specific position, and returns to step S10. On the contrary, if the distance value is not equal to the fixed distance value or not within the distance range, it means that the operation status information does not conform to the predetermined operation mode, and the device under test 9 may fall or deviate, and step S40 is executed.

Step S40: The processing module 20 sends out a warning signal.

As mentioned above, when the operation state information does not conform to the predetermined operation mode, it indicates that the device under test 9 may be in an abnormal state, so the processing module 20 can send a warning signal. In this embodiment, when the rotational speed calculated by the processing module 20 is greater than or less than a predetermined rotational speed range, the processing module 20 sends a warning signal to the notification module 30 .

Step S50: The notification module 30 sends out a warning message according to the warning signal.

After the notification module 30 receives the warning signal from the processing module 20, it can send a warning message according to the warning signal. Regarding the presentation manner of the warning message, the present invention is not limited. In one embodiment, the monitoring device 1 may have a display screen, and the warning message may be displayed on the display screen of the monitoring device 1 . In one embodiment, the monitoring device 1 can be electrically connected with the monitoring system, and the warning message can be displayed on the display screen of the monitoring system. In one embodiment, the notification module 30 can directly send the warning message to the communication device of the relevant organizer, so as to directly notify the relevant organizer.

FIG. 4 is a schematic flow chart of another embodiment of a monitoring method executed by the monitoring device shown in FIG. 1 , please refer to FIG. 1 and FIG. 4 . Preferably, the monitoring method of this embodiment further includes steps S31 and

Step S31: The processing module 20 records an abnormal time that does not meet the predetermined operation mode.

In this embodiment, after the processing module 20 determines that the operation status information does not conform to the predetermined operation mode (step S20 ), the processing module 20 further records an abnormal time that does not conform to the predetermined operation mode. In other words, the processing module 20 records the time when the device under test 9 may be in an abnormal state.

Step S32: The processing module 20 determines whether the abnormal time is greater than a predetermined abnormal time.

The processing module 20 of this embodiment can also preset a predetermined abnormal time, which can be the reaction time for the device under test 9 to automatically eliminate obstacles. If the processing module 20 judges that the above-mentioned abnormal time that does not conform to the predetermined operation mode is greater than a predetermined abnormal time, it means that the device under test 9 has eliminated the obstacle, or the determination of the abnormality (not conforming to the predetermined operation mode) in step S30 is not a misjudgment, and then executes step S40, The processing module 20 sends out a warning signal.

In summary, according to the monitoring device of the present invention, it includes a distance sensing module, a processing module and a notification module. The distance sensing module can detect the distance between it and a detection point located on a device under test, and send a distance signal to the processing module. The processing module can generate a running state information according to the distance signal, and judge whether the running state information conforms to a predetermined running mode. If not, it means that the device under test may be in an abnormal state, and the notification module sends a warning message. The detection is performed by the distance sensing module, so that the monitoring device can be installed outside the test space to detect and monitor the operating status of the device under test in a remote manner. Therefore, the monitoring device of the present invention can be applied to monitor the operation status of mechanical equipment installed in highly clean, high humidity, high temperature, high pressure, or vacuum environments, so as to achieve the effect of convenient installation and monitoring.

It should be noted that the above-mentioned embodiments are examples for the convenience of description, and the scope of rights claimed by the present invention should be determined by the scope of the patent application, rather than limited to the above-mentioned embodiments.

1: Monitoring device 10: Distance sensing module 20: Processing modules 30:Notification module 8: Housing 9: Device under test 91: convex part D1, D2: distance value P: detection point S: test space

FIG. 1 is a schematic block diagram of a monitoring device according to an embodiment of the present invention. FIG. 2 is a schematic flowchart of a monitoring method of an embodiment executed by the monitoring device shown in FIG. 1 . FIG. 3 is a schematic diagram of the operation of the standby device shown in FIG. 1 . FIG. 4 is a schematic flowchart of another embodiment of a monitoring method executed by the monitoring device shown in FIG. 1 .

1: Monitoring device

10: Distance sensing module

20: Processing modules

30:Notification module

8: Housing

9: Device under test

P: detection point

S: test space

Claims (16)

A monitoring device is used to detect the operating state of a device under test, the device under test is arranged in a test space, the monitoring device includes: A distance sensing module detects the distance between it and a detection point located on the device under test at each interval, and transmits a distance signal; A processing module is electrically connected with the distance sensing module and receives the distance signal. The processing module generates a running status information according to the interval time and the distance signal. The processing module judges whether the running status information is conforming to a predetermined operation mode, when the operation state information does not conform to the predetermined operation mode, the processing module sends out a warning signal; and A notification module is electrically connected with the processing module, and the notification module sends a warning message according to the warning signal. The monitoring device as described in Claim 1, wherein the operating status information includes a distance change, a rotational speed, or a moving speed of the device under test. The monitoring device as described in claim 1, wherein the device under test is a rotatable device, and the device under test includes an uneven surface, the detection point is located on the surface of the device under test, and the processing module The generated operating state information is a periodic distance change. The monitoring device as claimed in claim 3, wherein the processing module calculates and generates a rotational speed according to the periodic distance variation. The monitoring device according to claim 4, wherein the predetermined operation mode is a predetermined speed range, and when the speed calculated by the processing module is greater than or smaller than the predetermined speed range, the processing module sends out the warning signal. The monitoring device as described in claim 1, wherein when the processing module judges that the operation state information does not conform to the predetermined operation mode, the processing module records an abnormal time when the predetermined operation mode does not comply. The monitoring device as described in claim 6, wherein when the processing module judges that the abnormal time is greater than a predetermined abnormal time, the processing module sends out the warning signal. The monitoring device according to claim 1, wherein the monitoring device is arranged outside the testing space. The monitoring device as claimed in claim 1, wherein the testing space includes a closed space separated by a casing. A monitoring method, applied to a monitoring device for detecting the running state of a device under test, the device under test is set in a test space, the monitoring device includes a distance sensing module, a processing module and a Informing the module, the monitoring method includes the following steps: The distance sensing module detects the distance between itself and a detection point located on the device under test at each interval, and transmits a distance signal; The processing module receives the distance signal, and generates a running status information according to the interval time and the distance signal; The processing module judges whether the operation state information conforms to a predetermined operation mode; When the operation status information does not conform to the predetermined operation mode, the processing module sends a warning signal; and The notification module sends a warning message according to the warning signal. The monitoring method according to claim 10, wherein the operating status information includes a distance change, a rotational speed, or a moving speed of the device under test. The monitoring method as described in claim 10, wherein the device under test is a rotatable device, and the device under test includes an uneven surface, the detection point is located on the surface of the device under test, and the processing module The generated operating state information is a periodic distance change. The monitoring method as described in claim 11, wherein the operation state information generated by the processing module further includes calculating and generating a rotational speed by the processing module according to the periodic distance variation. The monitoring method according to claim 13, wherein the predetermined operation mode is a predetermined speed range, and when the speed calculated by the processing module is greater than or smaller than the predetermined speed range, the processing module sends out the warning signal. The monitoring method as described in Claim 9, wherein after the processing module judges that the operation status information does not conform to the predetermined operation mode, it further includes the following steps: The processing module records an abnormal time that does not conform to the predetermined operation mode. The monitoring method as described in Claim 15 further includes the following steps: When the processing module judges that the abnormal time is greater than a predetermined abnormal time, the processing module sends out the warning signal.

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