TWM619413U - Monitoring system - Google Patents

Abstract

This creation discloses a monitoring device for detecting the operating state of a device to be tested. The device to be tested is arranged in a test space. The monitoring device includes a distance sensing module, a processing module, and a notification module. The distance sensing module detects the distance between it and a detection point on the device under test at every interval, and transmits a distance signal. The processing module is electrically connected to the distance sensing module, and receives the distance signal. The processing module generates a running status information according to the interval time and the distance signal. The processing module determines whether the operation status information conforms to a predetermined operation mode. When the operation status information does not conform to the predetermined operation mode, the processing module sends out a warning signal. The notification module is electrically connected to the processing module. The notification module sends out a warning message according to the warning signal.

Description

Monitoring device

This creation is about a monitoring device, especially a monitoring device for monitoring the operating status of a device under test.

For some processes that require a high degree of cleanliness, or under high humidity, high temperature, or high pressure, it is difficult to monitor the operation of mechanical equipment used in the process. For example, in a highly clean, high humidity, high temperature, or high pressure environment, a closed space or even a vacuum space is usually separated by a shell, and the mechanical equipment required for the process is installed in the closed space or the vacuum space.

However, it is also difficult to install instruments for monitoring the operation of mechanical equipment in confined spaces or vacuum spaces. Therefore, it is necessary to check whether the mechanical equipment is operating normally by means of patrolling by the operator or watching surveillance images. Or, according to the characteristics of each mechanical device, a unique sensing element is provided on the mechanical device. In other words, there is currently no monitoring device that can be installed outside of an inaccessible environment such as highly clean, high humidity, high temperature, high pressure, or vacuum space, and used to monitor the operating status of the mechanical equipment inside the aforementioned environment.

In view of the above issues, the main purpose of this creation is to provide a monitoring device that uses a distance sensing module to measure the distance of the device under test installed in the test space, and the processing module determines the device to be tested based on the change in distance. The operating status of the device is measured to solve the conventional problem that it is difficult to monitor the operating status of mechanical equipment installed in a highly clean, high humidity, high temperature, high pressure, or vacuum environment.

In order to achieve the above-mentioned purpose, this creation provides a monitoring device to detect the operating status of a device under test. The device to be tested is arranged in a test space. The monitoring device includes a distance sensing module, a processing module, and a notification module. The distance sensing module detects the distance between it and a detection point on the device under test at every interval, and transmits a distance signal. The processing module is electrically connected to the distance sensing module, and receives the distance signal. The processing module generates a running status information according to the interval time and the distance signal. The processing module determines whether the operation status information conforms to a predetermined operation mode. When the operation status information does not conform to the predetermined operation mode, the processing module sends out a warning signal. The notification module is electrically connected to the processing module. The notification module sends out a warning message according to the warning signal.

According to an embodiment of the present invention, the operating status information includes a distance change, a rotation speed, or a moving speed of the device under test.

According to an embodiment of the present invention, the device under test is a rotatable device, and the device under test includes an uneven surface. The detection point is located on the surface of the device under test, and the operating status information generated by the processing module is a periodic distance change.

According to an embodiment of the present invention, the processing module calculates and generates a rotation speed according to the periodic distance change.

According to an embodiment of the invention, the predetermined operating mode is a predetermined speed range. When the rotation speed calculated by the processing module is greater or less than the predetermined rotation speed range, the processing module sends out a warning signal.

According to an embodiment of the present invention, after the processing module determines that the operation status information does not conform to the predetermined operation mode, it further includes: the processing module records an abnormal time that does not conform to the predetermined operation mode.

According to an embodiment of this creation, when the processing module determines that the abnormal time is greater than a predetermined abnormal time, the processing module issues a warning signal.

According to an embodiment of this creation, the monitoring device is arranged outside the test space.

According to an embodiment of the present invention, the test space includes a closed space divided by a shell.

In summary, the monitoring device according to this creation includes a distance sensing module, a processing module, and a notification module. The distance sensing module can detect the distance between it and a detection point on a device under test, and send a distance signal to the processing module. The processing module can generate a running state information according to the distance signal, and determine whether the running state information conforms to a predetermined operation mode. If it does not match, it means that the device under test may be in an abnormal state, and a warning message will be sent out by the notification module. The detection is carried out by the distance sensing module, so that the monitoring device can be installed outside the test space to detect and monitor the running status of the device under test in a remote manner. Therefore, the monitoring device of this creation can be used to monitor the operating status of mechanical equipment installed in a highly clean, high humidity, high temperature, high pressure, or vacuum environment, so as to achieve the effect of convenient installation and monitoring.

In order to let your review committee know more about the technical content of this creation, a preferred specific embodiment is described as follows.

Fig. 1 is a block diagram of a monitoring device according to an embodiment of the creation, Fig. 2 is a flowchart of a monitoring method executed by the monitoring device shown in Fig. 1, and Fig. 3 is the standby device shown in Fig. 1 Please refer to Figure 1, Figure 2 and Figure 3 for the schematic diagram of the operation. First, the monitoring device 1 of this embodiment is used to detect the operating state of a device 9 under test. Among them, the device under test 9 is arranged in a test space S. The test space S can be, for example, but not limited to, environments where it is difficult to install detection instruments such as high cleanliness, high humidity, high temperature, high pressure, or vacuum, and the test space S can be an open or closed space, which is not limited by this creation. In this embodiment, the test space S is illustrated by taking a closed space partitioned by a shell 8 as an example, and the test space S may also be a vacuum space. The monitoring device 1 is arranged on the outside of the test space S, which can avoid the highly clean environment that affects the test space S, or can prevent the high humidity, high temperature, or high pressure in the test space S from damaging the monitoring device 1.

In this embodiment, the monitoring device 1 includes a distance sensing module 10, a processing module 20, and a notification module 30. The processing module 20 is electrically connected to the distance sensing module 10 and the notification module 30 to perform data transmission with the distance sensing module 10 and the notification module 30. It should be noted that each of the aforementioned modules can be configured as a hardware device, or a combination of a hardware device, software program, and firmware, and can also be configured by circuit loops or other appropriate types; and, each module can be configured separately In addition to the type configuration, it can also be combined with the type configuration. The modules can be directly or indirectly connected to each other in a wired or wireless manner to form a coupling. In addition, this embodiment only exemplifies a preferred embodiment of the creation, and in order to avoid redundant description, it does not describe all possible variations and combinations in detail. However, those skilled in the art should understand that not all the above-mentioned modules or components are necessary. In order to implement this creation, other more detailed conventional modules or components may also be included. Each module or component may be omitted or modified as required, and there may not be other modules or components between any two modules.

With the monitoring device 1 of this embodiment, the monitoring method shown in FIG. 2 is executed. The following further describes the actions of the monitoring device 1 according to the step flow of the monitoring method.

Step S10: The distance sensing module 10 detects the distance between it and a detection point P located on the device under test 9 at each interval, and transmits a distance signal.

In this embodiment, the distance sensing module 10 may be an optical distance sensor. The distance sensing module 10 can emit light from the device 9 to be measured, and the position irradiating the device 9 to be measured is referred to as a detection point P here. Preferably, the detection point P can be located on the surface of the device 9 under test. That is, the distance sensing module 10 emits light toward the surface of the device under test 9.

It should be noted that the detection point P can be at a fixed position of the device under test 9 or an unfixed position. Specifically, if the monitoring device 1 is used to detect whether the device under test 9 is kept at a specific position during operation, the detection point P can be located at a fixed position of the device under test 9. Moreover, if the monitoring device 1 is used to detect whether the device under test 9 is continuously running, the detection point P can be located at an unfixed position of the device under test 9 according to the operation of the device under test 9 (refer to Figure 3 ). Other details are further explained in the next steps.

The distance sensing module 10 emits light, such as laser light, to the detection point P of the device under test 9, and after receiving the light reflected from the detection point, it can transmit a distance signal. The distance signal carries information about the distance between the distance sensing module 10 and the detection point P. In this embodiment, the distance sensing module 10 detects its distance from the detection point P at every interval, and transmits a distance signal.

Step S20: The processing module 20 receives the distance signal, and generates a running state information according to the interval time and the distance signal.

After receiving the distance signal from the distance sensing module 10, the processing module 20 can record the change of the distance signal and its time, and generate a running state information accordingly. In other words, the processing module 20 generates operation status information according to the interval time and distance signal. Among them, the operating status information can be, for example, but not limited to, a distance change, a rotation speed, or a moving speed of the device 9 under test. The operating status information of this embodiment is explained by taking the distance change or the rotation speed as an example.

In this embodiment, the device under test 9 is described as an example of a rotatable device. Specifically, the device under test 9 of this embodiment is a roller cleaning device for cleaning wafers. In addition, the device under test 9 (roller cleaning device) includes an uneven surface, for example, the device under test 9 includes at least one convex portion 91. Since the detection point P is located on the surface of the device under test 9, when the device under test 9 is running (roller rotation), the detection point P will be on the convex portion 91 or the flat place between the two convex portions 91 in sequence, and then The distance sensing module 10 generates different distance signals.

The processing module 20 can calculate a specific distance value according to the distance signal. For example, when the detection point P is located on the convex portion 91, the distance value is D1; when the detection point P is located on the flat place between the two convex portions 91, the distance value is D2. It can be seen from Fig. 3 that the distance value D2 is greater than the distance value D1. The processing module 20 can record the distance values D1 and D2 at different time points as operating state information. Therefore, the operating state information of this embodiment is a distance change, and it is a periodic distance change. Since the distance change of the device 9 to be measured is the same every one revolution, it is a periodic distance change. Preferably, the processing module 20 can also calculate and generate a rotation speed of the device under test 9 according to the periodic distance change.

In other embodiments, if the device under test 9 moves linearly or non-linearly during operation, the processing module 20 can also calculate a moving speed of the device under test 9 based on the distance change, which can also be used as operating state information.

Step S30: The processing module 20 determines whether the operation status information conforms to a predetermined operation mode.

Then, the processing module 20 can further determine whether the operation status information conforms to a predetermined operation mode. Among them, the predetermined operation mode is the distance change, rotation speed, or movement speed that can be measured by the device 9 under test during normal operation. Specifically, if the device under test 9 is operated in a rotating manner, the predetermined operation mode may be a periodic distance change during normal operation, or a rotation speed range during normal operation (referred to as a predetermined rotation speed range in this embodiment) . If the device under test 9 operates in a linear or non-linear manner, its predetermined operation mode may be the range of the moving speed during normal operation, or the change of the moving speed.

The processing module 20 can preset a predetermined operation mode according to the type of the device 9 under test. The processing module 20 calculates and obtains the operating state information according to the distance signal received from the distance sensing module 10 (step S20), and then further compares whether the operating state information meets the predetermined operating mode. If the operating status information matches the predetermined operating mode, it means that the device under test 9 is operating normally, and step S10 is returned to continuously detect the distance from the detection point P. Conversely, if the operating status information does not match the predetermined operating mode, it means that the device under test 9 may be abnormal, and step S40 is executed.

In this embodiment, the predetermined operation mode may be a predetermined rotation speed range. After the processing module 20 calculates and obtains the rotation speed (that is, the operating state information, step S20) according to the distance signal, it further compares whether the rotation speed falls within a predetermined rotation speed range. If the rotation speed falls within the predetermined rotation speed range, it indicates that the operation status information conforms to the predetermined operation mode, and the device under test 9 is operating normally, and step S10 is returned. Conversely, if the rotation speed is greater than or less than the predetermined rotation speed range, it means that the operation status information does not conform to the predetermined operation mode, and the device under test 9 may be abnormal, and step S40 is executed.

In other embodiments, if the monitoring device 1 is used to detect whether the device under test 9 is maintained at a specific position during operation, the predetermined operation mode may be a fixed distance value or a distance range. The processing module 20 calculates and obtains a specific distance value (that is, operating state information, step S20) according to the distance signal, and then further compares whether the distance value is equal to the fixed value of the distance or falls within the range of the distance. If the distance value is equal to the fixed value of the distance or falls within the range of the distance, it indicates that the operating state information conforms to the predetermined operating mode, the device under test 9 is still maintained at the specific position, and step S10 is returned. Conversely, if the distance value is not equal to the fixed distance value or is not within the distance range, it means that the operating state information does not conform to the predetermined operating mode, and the device under test 9 may fall or shift, and step S40 is executed.

Step S40: The processing module 20 sends out a warning signal.

As mentioned above, when the operating state information does not conform to the predetermined operating mode, it indicates that the device under test 9 may be in an abnormal state, so the processing module 20 can issue a warning signal. In this embodiment, when the rotation speed calculated by the processing module 20 is greater than or less than the predetermined rotation speed range, the processing module 20 sends a warning signal to the notification module 30.

Step S50: The notification module 30 sends out a warning message according to the warning signal.

After the notification module 30 receives the warning signal from the processing module 20, it can send a warning message according to the warning signal. Regarding the presentation of warning messages, this creation is not limited. In one embodiment, the monitoring device 1 may have a display screen, and the warning message may be displayed on the display screen of the monitoring device 1. In one embodiment, the monitoring device 1 may be electrically connected to the monitoring system, and the warning message may be displayed on the display screen of the monitoring system. In one embodiment, the notification module 30 can directly send the warning message to the communication device of the relevant contractor to directly notify the relevant contractor.

FIG. 4 is a flowchart of another embodiment of the monitoring method executed by the monitoring device shown in FIG. 1. Please refer to FIG. 1 and FIG. 4. Preferably, the monitoring method of this embodiment further includes steps S31 and

Step S31: The processing module 20 records an abnormal time that does not meet the predetermined operation mode.

In this embodiment, after the processing module 20 determines that the operation status information does not conform to the predetermined operation mode (step S20), the processing module 20 further records an abnormal time that does not conform to the predetermined operation mode. In other words, the processing module 20 records the time when the device under test 9 may be in an abnormal state.

Step S32: The processing module 20 determines whether the abnormal time is greater than a predetermined abnormal time.

The processing module 20 of this embodiment can also preset a predetermined abnormal time, which can be the reaction time for the device under test 9 to automatically eliminate obstacles. If the processing module 20 determines that the aforementioned abnormal time that does not conform to the predetermined operation mode is greater than a predetermined abnormal time, it means that the device under test 9 removes the obstacle, or that the abnormality (not conforming to the predetermined operation mode) is judged in step S30 is not a misjudgment, and then step S40 is executed. The processing module 20 issues a warning signal.

In summary, the monitoring device according to this creation includes a distance sensing module, a processing module, and a notification module. The distance sensing module can detect the distance between it and a detection point on a device under test, and send a distance signal to the processing module. The processing module can generate a running state information according to the distance signal, and determine whether the running state information conforms to a predetermined operation mode. If it does not match, it means that the device under test may be in an abnormal state, and a warning message will be sent out by the notification module. The detection is carried out by the distance sensing module, so that the monitoring device can be installed outside the test space to detect and monitor the running status of the device under test in a remote manner. Therefore, the monitoring device of this creation can be used to monitor the operating status of mechanical equipment installed in a highly clean, high humidity, high temperature, high pressure, or vacuum environment, so as to achieve the effect of convenient installation and monitoring.

It should be noted that many of the above-mentioned embodiments are given as examples for the convenience of description, and the scope of rights claimed in this creation should be subject to the scope of the patent application, and not limited to the above-mentioned embodiments.

1: Monitoring device 10: Distance sensing module 20: Processing module 30: Notification module 8: shell 9: Device to be tested 91: Convex D1, D2: distance value P: detection point S: test space

Figure 1 is a block diagram of a monitoring device according to an embodiment of the creation. FIG. 2 is a schematic flowchart of an embodiment of the monitoring method executed by the monitoring device shown in FIG. 1. Fig. 3 is a schematic diagram of the operation of the standby device shown in Fig. 1. 4 is a schematic flowchart of another embodiment of the monitoring method executed by the monitoring device shown in FIG. 1.

1: Monitoring device

10: Distance sensing module

20: Processing module

30: Notification module

8: shell

9: Device to be tested

P: detection point

S: test space

Claims (9)

A monitoring device is used to detect the operating state of a device to be tested, the device to be tested is arranged in a test space, and the monitoring device includes: A distance sensing module detects the distance between it and a detection point on the device under test at every interval, and transmits a distance signal; A processing module is electrically connected to the distance sensing module and receives the distance signal. The processing module generates operation status information according to the interval time and the distance signal, and the processing module determines whether the operation status information is It conforms to a predetermined operation mode, and when the operation status information does not conform to the predetermined operation mode, the processing module sends out a warning signal; and A notification module is electrically connected to the processing module, and the notification module sends out a warning message according to the warning signal. The monitoring device according to claim 1, wherein the operating status information includes a distance change, a rotation speed, or a moving speed of the device under test. The monitoring device according to claim 1, wherein the device under test is a rotatable device, and the device under test includes an uneven surface, the detection point is located on the surface of the device under test, and the processing module The generated operating state information is a periodic distance change. The monitoring device according to claim 3, wherein the processing module calculates and generates a rotation speed according to the periodic distance change. The monitoring device according to claim 4, wherein the predetermined operation mode is a predetermined rotation speed range, and when the rotation speed calculated by the processing module is greater than or less than the predetermined rotation speed range, the processing module issues the warning signal. The monitoring device according to claim 1, wherein after the processing module determines that the operation status information does not conform to the predetermined operation mode, the processing module records an abnormal time that does not conform to the predetermined operation mode. The monitoring device according to claim 6, wherein when the processing module determines that the abnormal time is greater than a predetermined abnormal time, the processing module issues the warning signal. The monitoring device according to claim 1, wherein the monitoring device is arranged outside the test space. The monitoring device according to claim 1, wherein the test space includes a closed space divided by a shell.

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