TW202235801A - Vapor chamber, vapor chamber wick sheet, and electronic apparatus - Google Patents

Abstract

A vapor chamber (1) comprises: a first sheet (10); a second sheet (20); and a wick sheet (30). The wick sheet (30) includes: a first body surface (31a); a second body surface (31b); a vapor flowpath section (50) which extends from the first body surface (31a) to the second body surface (31b), and through which vapor (2a) of a working fluid passes; and a liquid flowpath section (60) which is provided in the second body surface (31b), and is communicated with the vapor flow path section (50) so as to allow a liquid-state working fluid (2b) to pass. The liquid flow path section (60) includes a plurality of fluid path main flow grooves (61a-61f) through which the liquid-state working fluid (2b) passes, and among the plurality of fluid path main flow grooves (61a-61f), the fluid path main flow grooves (61a, 61f) closest to the steam path section (50) have a width (w3a, w3f) greater than the width (w3b-w3e) of the other fluid path main flow grooves (61b-61e).

Description

Steam chamber, capillary structure sheet for steam chamber and electronic equipment

The invention relates to a steam chamber, a capillary structure sheet for the steam chamber and an electronic machine.

Central processing units (Central Processing Unit, central processing unit) or light-emitting diodes (LEDs), power semiconductors, etc. used in mobile terminals such as mobile terminals and tablet terminals are devices that generate heat. Devices that generate heat are cooled by cooling components such as heat pipes. In recent years, in order to reduce the thickness of mobile terminals and the like, thinning of heat dissipation members is also required. Therefore, the development of a steam chamber that can be thinner than a heat pipe is being promoted. An operating fluid is sealed in the steam cavity. Cooling of the device is performed by the operating fluid absorbing the heat of the device and dissipating it. For example, Patent Document 1 discloses a sheet-type heat pipe in which two or more metal foil sheets are stacked.

More specifically, the actuating fluid in the vapor chamber receives heat from the device at a portion close to the device (the evaporating portion), evaporates, and becomes vapor (actuating vapor). The operating steam diffuses in the steam flow path in a direction away from the evaporator, is cooled, and becomes liquid after being condensed. A liquid channel portion having a capillary structure (capillary structure) is provided in the vapor chamber. The condensed working fluid (working fluid) that becomes liquid enters the liquid flow path from the vapor flow path, flows in the liquid flow path, and is transported toward the evaporation portion. Then, the working fluid again receives heat in the evaporation unit and evaporates. In this way, the actuating fluid repeats the phase change, that is, evaporation and condensation, and flows back in the steam cavity, thereby moving the heat of the device and improving the heat dissipation efficiency. [Prior Art Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2016-017702

An object of this embodiment is to provide a steam chamber excellent in cooling capability, a capillary structure sheet for the steam chamber, and an electronic device equipped with the same.

The steam chamber of this embodiment is sealed with a working fluid, and includes: a first sheet; a second sheet: and a capillary structure sheet interposed between the first sheet and the second sheet; The above-mentioned capillary structure sheet has: a first body surface; a second body surface, which is located on the opposite side of the first body surface; a steam flow path extending from the first body surface to the second body surface, for the The vapor of the operating fluid passes through; and the liquid channel part is provided on the second body surface, communicates with the vapor channel part and allows the operating fluid in liquid form to pass through; the liquid channel part has the above-mentioned operating fluid in liquid form. A plurality of liquid flow path main grooves through which the fluid passes and are arranged in parallel with each other, and among the plurality of liquid flow path main grooves, the width of the liquid flow path main groove closest to the above-mentioned steam flow path is wider than that of other liquid flow path main grooves Wide width.

In the steam chamber of this embodiment, the width of the main groove of the liquid flow path closest to the steam flow path portion may be at least 1.1 times and not more than 1.6 times the width of the main grooves of the other liquid flow paths.

In the steam chamber of this embodiment, the depth of the main groove of the liquid flow path closest to the steam flow path portion may also be deeper than the depth of the main grooves of the other liquid flow paths mentioned above.

In the vapor chamber of the present embodiment, the distances between the centers of the plurality of liquid channel main grooves in the width direction may also be equal to each other.

In the vapor chamber of the present embodiment, rows of protrusions may be provided between adjacent main channels of the liquid flow path, each row of protrusions has a plurality of protrusions, and the main channels of the liquid flow channel The arrangement pitch of each protrusion in the length direction is equal between each protrusion.

In the steam chamber of this embodiment, the width of the plurality of main grooves of the liquid flow path can also be from the main groove of the liquid flow path closest to the above-mentioned steam flow path portion to the liquid flow path located on the inner side of the liquid flow path portion in the width direction. The main channel gradually narrows.

The capillary structure sheet of this embodiment is a capillary structure sheet for the steam cavity, and has: a first body surface; a second body surface, which is located on the opposite side of the first body surface; The first main body surface extends to the second main body surface for the vapor of the working fluid to pass through; and the liquid flow path part is provided on the second main body surface, communicates with the steam flow path part and allows the liquid state of the above-mentioned working fluid to pass through The above-mentioned liquid flow path part has a plurality of main flow grooves of the liquid flow path arranged in parallel for the above-mentioned operating fluid in liquid state to pass through, and among the plurality of main flow grooves of the liquid flow path, the liquid flow path closest to the above-mentioned vapor flow path part The width of the channel main channel is wider than that of other liquid channel main channels.

In the capillary structure sheet according to this embodiment, the width of the main groove of the liquid flow path closest to the steam flow path portion may be 1.1 to 1.6 times the width of the other liquid flow path main grooves.

In the capillary structure sheet according to this embodiment, the depth of the main groove of the liquid flow path closest to the steam flow path portion may be deeper than the depth of the main grooves of the other liquid flow paths described above.

In the capillary structure sheet of the present embodiment, the distances between the centers of the plurality of liquid channel main grooves in the width direction may be equal to each other.

In the capillary structure sheet of the present embodiment, rows of protrusions may be provided between adjacent main grooves of the liquid flow path, each of the rows of protrusions has a plurality of protrusions, and the main flow of the liquid flow path may have a plurality of protrusions. The arrangement pitch of each protrusion in the longitudinal direction of the groove is equal among each protrusion.

In the capillary structure sheet of this embodiment, the width of the plurality of liquid flow path main grooves may also be from the liquid flow path main groove closest to the above-mentioned vapor flow path portion to the liquid located on the inner side of the liquid flow path portion in the width direction. The flow path becomes narrower gradually as the mainstream groove.

The electronic device of the present embodiment includes: a case; a device accommodated in the case; and a steam chamber of the present embodiment, which is in thermal contact with the device.

According to the embodiments of the present invention, it is possible to provide a vapor chamber excellent in cooling capability.

The steam chamber of this embodiment is sealed with a working fluid, and includes: a first sheet; a second sheet; and a capillary structure sheet interposed between the first sheet and the second sheet; The above-mentioned capillary structure sheet has: a first body surface; a second body surface, which is located on the opposite side of the first body surface; a steam flow path extending from the first body surface to the second body surface, for the The vapor of the operating fluid passes through; and the liquid channel part is provided on the second body surface, communicates with the vapor channel part and allows the operating fluid in liquid form to pass through; the liquid channel part has the above-mentioned operating fluid in liquid form. A plurality of liquid flow path main grooves through which the fluid passes and are arranged in parallel with each other, and a row of convex parts is provided between the above-mentioned liquid flow path main grooves adjacent to each other, and each convex part row has a plurality of convex parts, and is closest to the above-mentioned The width of the convex part of the convex part row of the steam flow path part is narrower than the width of the convex part of other convex part rows.

In the steam chamber of this embodiment, the width of the convex part of the convex part row closest to the steam flow path part may be not less than 0.3 times and not more than 0.95 times the width of the convex parts of the other convex part rows mentioned above.

In the steam chamber of this embodiment, the arrangement pitch of the convex portion closest to the convex portion row of the steam flow path portion and the convex portion of the convex portion row adjacent to the convex portion row may also be higher than that of the other convex portion rows mentioned above. The spacing between the parts is narrow.

In the steam chamber of the present embodiment, the widths of the main channels of the plurality of liquid channels may also be equal to each other.

In the steam chamber of this embodiment, among the plurality of main channels of the liquid flow channel, the width of the main channel of the liquid flow channel closest to the steam channel part may be wider than the width of the main channel of the other liquid channels.

In the steam chamber of this embodiment, the width of the plurality of protrusions may also be from the protrusion closest to the protrusion row of the steam flow path part to the protrusion row located on the inner side of the liquid flow path part in the width direction. and gradually widens.

The capillary structure sheet of this embodiment is a capillary structure sheet for the steam cavity, and has: a first body surface; a second body surface, which is located on the opposite side of the first body surface; The first main body surface extends to the second main body surface for the vapor of the working fluid to pass through; and the liquid flow path part is provided on the second main body surface, communicates with the steam flow path part and allows the liquid state of the above-mentioned working fluid to pass through The above-mentioned liquid flow path part has a plurality of main flow grooves of the liquid flow path arranged in parallel for the above-mentioned operating fluid in a liquid state to pass through, and a row of protrusions is arranged between the main flow grooves of the above-mentioned liquid flow path adjacent to each other, and each protrusion Each row has a plurality of convex parts, and the width of the convex part of the convex part row closest to the above-mentioned steam flow path part is narrower than the width of the convex part of other convex part rows.

In the capillary structure sheet of this embodiment, the width of the convex portion of the convex portion row closest to the steam flow path portion may be 0.3 times to 0.95 times the width of the convex portion of the other convex portion row.

In the capillary structure sheet of this embodiment, the arrangement pitch of the convex portion closest to the convex portion row of the above-mentioned steam flow path portion and the convex portion of the convex portion row adjacent to the convex portion row may be larger than that of the other convex portion rows mentioned above. The spacing between the protrusions is narrow.

In the capillary structure sheet of the present embodiment, the widths of the plurality of main channels of the liquid flow path may also be equal to each other.

In the capillary structure sheet of this embodiment, among the plurality of liquid flow channel main grooves, the width of the liquid flow channel main groove closest to the vapor flow channel portion may be wider than the width of other liquid flow channel main grooves.

In the capillary structure sheet of this embodiment, the width of the plurality of protrusions may also be from the protrusion closest to the protrusion row of the vapor flow path portion toward the protrusion row located on the inner side in the width direction of the liquid flow path portion. The convex part gradually widens.

The electronic device of the present embodiment includes: a case; a device accommodated in the case; and a steam chamber of the present embodiment, which is in thermal contact with the device.

According to the embodiments of the present invention, the cooling capacity of the vapor chamber can be improved.

(first embodiment) Hereinafter, a first embodiment will be described with reference to FIGS. 1 to 17 . In addition, in the drawings accompanying this specification, for convenience of illustration and easy understanding, the scale, the dimension ratio of length and width, etc. are changed and exaggerated suitably compared with the real thing.

In addition, terms such as "parallel", "orthogonal" and "same", or lengths or angles and values of physical properties used in this specification specify shapes, geometrical conditions and physical properties, and their degrees. is not limited in a strict sense. These terms or numerical values should be interpreted within the range to which the same function can be expected. Furthermore, in the drawings, for the sake of clarity, the shapes of a plurality of parts in which the same function can be expected are regularly described. In addition, it is not limited to the strict meaning, and the shapes of the parts may be different from each other as long as the function can be expected. In addition, in the drawings, for the sake of convenience, the boundary lines showing the joint surfaces of the members are only shown as straight lines. The boundary line is not limited to a strict straight line. The shape of the borderline is arbitrary within the range where desired bonding performance can be expected.

1 to 10, the steam chamber, the capillary structure sheet for the steam chamber, and the electronic device in this embodiment will be described. The steam chamber 1 in this embodiment is a device mounted on the electronic device E for cooling the device D as a heat generating body accommodated in the electronic device E. As shown in FIG. Examples of the device D include electronic devices (device to be cooled) that generate heat and are used in mobile terminals such as mobile terminals and tablet terminals. Examples of electronic devices that generate heat include central processing units (CPUs), light emitting diodes (LEDs), and power semiconductors that generate heat (device to be cooled).

Here, first, taking a tablet terminal as an example, an electronic device E equipped with the steam chamber 1 of the present embodiment will be described. As shown in FIG. 1 , an electronic device E (for example, a tablet terminal) includes a housing H, a device D accommodated in the housing H, and a steam chamber 1 . In the electronic device E shown in FIG. 1 , a touch panel display TD is provided on the front surface of the casing H. As shown in FIG. The steam chamber 1 is accommodated in the housing H and is arranged in thermal contact with the device D. As shown in FIG. Thereby, the steam chamber 1 can receive the heat generated in the device D when the electronic device E is used. The heat received by the steam chamber 1 is released to the outside of the steam chamber 1 through the following working fluids 2a, 2b. In this way, the device D is effectively cooled. When the electronic equipment E is a tablet terminal, the device D corresponds to a central processing unit or the like.

Next, the steam chamber 1 of this embodiment will be described. As shown in FIGS. 2 and 3 , the steam chamber 1 has a sealed space 3 in which working fluids 2a, 2b are sealed. The steam chamber 1 is configured to effectively cool the device D of the above-mentioned electronic device E by repeating the phase change of the working fluid 2a, 2b in the sealed space 3 . Examples of the working fluids 2a and 2b include pure water, ethanol, methanol, acetone, and a mixture thereof. Furthermore, the working fluids 2a and 2b may also have freeze-expandability. That is, the working fluids 2a and 2b may expand when frozen. Examples of the working fluids 2a and 2b having freeze-swellability include pure water, or an aqueous solution obtained by adding additives such as alcohol to pure water, and the like.

As shown in Figures 2 and 3, the steam chamber 1 is provided with a lower sheet 10 (the first sheet), an upper sheet 20 (the second sheet), and a capillary structure sheet for the steam chamber (hereinafter, only referred to as as capillary structure sheet 30). The capillary structure sheet 30 is interposed between the lower sheet 10 and the upper sheet 20 . In the steam chamber 1 of this embodiment, the lower sheet 10, the capillary structure sheet 30, and the upper sheet 20 are laminated in this order.

The steam chamber 1 is roughly formed in a thin flat plate shape. The planar shape of the steam chamber 1 is arbitrary, and can also be rectangular as shown in FIG. 2 . The planar shape of the steam chamber 1 can be, for example, a rectangle with one side of 50 mm to 200 mm and the other side of 60 mm to 150 mm, or a square with a side of 70 mm to 300 mm. The steam chamber 1 The plane size is arbitrary. In this embodiment, as an example, an example in which the planar shape of the steam chamber 1 is a rectangular shape with the X direction described below as the longitudinal direction will be described. In this case, as shown in FIGS. 4 to 7 , the lower sheet 10 , the upper sheet 20 and the capillary structure sheet 30 may have the same planar shape as the steam chamber 1 . Also, the planar shape of the steam chamber 1 is not limited to a rectangular shape, and may be any shape such as a circle, an ellipse, an L shape, or a T shape.

As shown in FIG. 2 , the steam chamber 1 has an evaporation region SR for evaporating the working fluids 2a, 2b, and a condensation region CR for condensing the working fluids 2a, 2b.

The evaporation region SR is a region overlapping with the device D in a plan view, and is a region for mounting the device D. The evaporation region SR can be arranged anywhere in the steam chamber 1 . In the present embodiment, evaporation region SR is formed on one side (left side in FIG. 2 ) of steam chamber 1 in the X direction. Heat from the device D is transferred to the evaporation region SR by which the hot liquid working fluid (suitably denoted as working fluid 2b) evaporates in the evaporation region SR. The heat from device D is not only transmitted to the area overlapping with device D in top view, but also possibly to the periphery of this area. Therefore, the evaporation region SR includes the region overlapping with the device D and the surrounding region in plan view. Here, the top view refers to the surface that receives heat from the device D (the second upper sheet surface 20b of the upper sheet 20) and the surface that releases the received heat (the lower sheet 10) from the steam chamber 1. The state viewed in the direction perpendicular to the first lower sheet surface 10a) described below. That is, the top view corresponds to, for example, a state in which the steam chamber 1 is viewed from above or a state in which the steam chamber 1 is viewed from below as shown in FIG. 2 .

The condensation region CR is a region that does not overlap with the device D in a plan view, and is a region mainly used for the kinetic steam 2a to release heat and condense. The condensation region CR may also refer to the region around the evaporation region SR. In the condensation region CR, the heat from the working steam 2a is released to the lower sheet 10, and the working steam 2a is cooled and condensed in the condensation region CR.

Furthermore, when the steam chamber 1 is installed in the mobile terminal, depending on the posture of the mobile terminal, the upper-lower relationship may be broken. However, in this embodiment, for convenience, the sheet receiving heat from the device D is referred to as the upper sheet 20 , and the sheet releasing the received heat is referred to as the lower sheet 10 . Therefore, hereinafter, the state in which the lower sheet 10 is arranged on the lower side and the upper side sheet 20 is arranged on the upper side will be described.

As shown in Figure 3, the lower side sheet 10 has the first lower side sheet surface 10a located on the opposite side of the capillary structure sheet 30, and the opposite side of the first lower side sheet surface 10a (that is, the capillary structure sheet). 30 side) of the second lower side sheet surface 10b. The lower sheet 10 may be formed flat as a whole, and the lower sheet 10 may have a constant thickness as a whole. A housing member Ha constituting a part of the housing of a mobile terminal or the like is attached to the first lower sheet surface 10a. The entirety of the first lower sheet surface 10a may be covered with the shell member Ha. As shown in FIG. 4 , alignment holes 12 may also be provided at the four corners of the lower sheet 10 .

As shown in FIG. 3 , the upper sheet 20 has a first upper sheet surface 20a provided on the capillary structure sheet 30 side, and a second upper sheet surface 20b provided on the opposite side to the first upper sheet surface 20a. The upper sheet 20 may be formed flat as a whole, and the upper sheet 20 may have a constant thickness as a whole. The above-mentioned device D is mounted on the second upper sheet surface 20b. As shown in FIG. 5 , alignment holes 22 may also be provided at the four corners of the upper sheet 20 .

As shown in FIG. 3 , the capillary structure sheet 30 includes a vapor flow path portion 50 and a liquid flow path portion 60 arranged adjacent to the vapor flow path portion 50 . Furthermore, the capillary structure sheet 30 has a first main body surface 31a and a second main body surface 31b located on the opposite side of the first main body surface 31a. The first main body surface 31 a is arranged on the lower sheet 10 side, and the second main body surface 31 b is arranged on the upper sheet 20 side.

The second lower sheet surface 10b of the lower sheet 10 and the first main body surface 31a of the capillary structure sheet 30 may also be permanently bonded to each other by diffusion bonding. Similarly, the first upper sheet surface 20a of the upper sheet 20 and the second main body surface 31b of the capillary structure sheet 30 can also be permanently bonded to each other by diffusion bonding. Furthermore, as long as the lower sheet 10 , the upper sheet 20 , and the capillary structure sheet 30 can be permanently bonded, they may be bonded by other means such as brazing instead of diffusion bonding. Furthermore, the term "permanently joined" is not limited in a strict sense. "Permanently bonded" means that when the steam chamber 1 is in motion, the bond between the lower sheet 10 and the capillary structure sheet 30 can be maintained to the extent that the airtightness of the sealed space 3 can be maintained, and the bond to the upper sheet can be maintained. Material 20 and capillary structure sheet 30 bonding degree.

As shown in FIGS. 3 , 6 and 7 , the capillary structure sheet 30 of this embodiment has a frame portion 32 formed in a rectangular frame shape in plan view, and an island portion 33 provided in the frame portion 32 . The frame portion 32 and the island portion 33 are portions where the material of the capillary structure sheet 30 remains without being etched in the following etching step. In this embodiment, the frame body portion 32 is formed in a rectangular frame shape in plan view. A steam flow path portion 50 is defined inside the frame portion 32 . That is, the working steam 2 a flows inside the frame portion 32 and around the island portion 33 .

In the present embodiment, the island portion 33 may extend in an elongated shape with the X direction (the first direction, the left-right direction in FIG. 6 ) as the longitudinal direction in plan view. The planar shape of the island portion 33 may also be an elongated rectangular shape. Moreover, each island part 33 may be spaced apart at equal intervals in the Y direction (2nd direction, the up-down direction in FIG. 6), and may arrange|position mutually parallel. The operating steam 2a is configured to flow around each island portion 33, and is sent toward the condensation region CR. This prevents the flow of the working steam 2a from being hindered. The width w1 (see FIG. 8 ) of the island portion 33 may be, for example, not less than 30 μm and not more than 3000 μm. Here, the width w1 of the island portion 33 is the dimension of the island portion 33 in the Y direction, and refers to the dimension at the thickest position of the island portion 33 (for example, the position where the protrusion 55 described below is located).

The frame body portion 32 and each island portion 33 are diffusion bonded to the lower sheet 10 and also to the upper sheet 20 . Thereby, the mechanical strength of the steam chamber 1 is improved. The first wall surface 53 a and the second wall surface 54 a of the steam passage 51 described later constitute side walls of the island portion 33 . The first body surface 31 a and the second body surface 31 b of the capillary structure sheet 30 may be formed flat over the frame portion 32 and each island portion 33 .

The steam flow path portion 50 is a flow path mainly through which the steam of the working fluid (referred to as the moving steam 2a as appropriate) passes. The steam channel portion 50 extends from the first body surface 31 a to the second body surface 31 b, and penetrates through the capillary structure sheet 30 .

As shown in FIGS. 6 and 7 , the steam channel portion 50 in this embodiment has a plurality of steam channels 51 . Each steam passage 51 is formed inside the frame portion 32 and outside the island portion 33 . That is, the steam passage 51 is formed between the frame body portion 32 and the island portion 33 and between the island portions 33 adjacent to each other. The planar shape of each steam passage 51 is an elongated rectangular shape. The steam flow path portion 50 is divided into a plurality of steam passages 51 by the plurality of island portions 33 .

As shown in FIG. 3 , the steam passage 51 is formed to extend from the first main body surface 31a of the capillary structure sheet 30 to the second main body surface 31b.

The vapor passage 51 can also be formed by etching from the first main body surface 31 a and the second main body surface 31 b of the capillary structure sheet 30 in the following etching step. In this case, as shown in FIG. 8 , the steam passage 51 has a curved first wall surface 53 a and a curved second wall surface 54 a. The first wall surface 53a is located on the side of the first body surface 31a, and is curved in a shape that bulges toward the second body surface 31b. The second wall surface 54a is located on the side of the second body surface 31b, and is curved in a shape that bulges toward the first body surface 31a. The first wall surface 53 a and the second wall surface 54 a meet at a protrusion 55 formed to protrude toward the inside of the steam passage 51 . The protruding portion 55 may also be formed at an acute angle when viewed in cross section. At the position where the protrusion 55 is located, the planar area of the steam passage 51 is the smallest. The width w2 (see FIG. 8 ) of the vapor passage 51 may be, for example, 100 μm or more, or may be 400 μm or more. The width w2 of the vapor passage 51 may be 5000 μm or less, or may be 1600 μm or less. Here, the width w2 of the steam passage 51 is the width of the narrowest part of the steam passage 51 , and in this case, refers to the distance measured in the width direction (Y direction) at the position where the protrusion 55 is located. Also, the width w2 of the steam passage 51 corresponds to the gap between the island portions 33 adjacent to each other in the width direction (Y direction).

The position of the protrusion 55 in the thickness direction (Z direction) of the capillary structure sheet 30 is shifted toward the second body surface 31b from the middle position between the first body surface 31a and the second body surface 31b. When the distance between the protrusion 55 and the second main body surface 31b is t5, the distance t5 may be 5%, 10% or 20% of the thickness t4 of the following capillary structure sheet 30, or may be a capillary structure sheet The thickness t4 of the material 30 is less than 50%, less than 40%, or less than 30%. Moreover, it is not limited to this, the position of the protruding portion 55 in the thickness direction (Z direction) of the capillary structure sheet 30 may also be the middle position between the first body surface 31a and the second body surface 31b, and may also be a comparative position. The middle position is a position shifted toward the side of the first body surface 31a. The positions of the protrusions 55 are arbitrary as long as the vapor passages 51 pass through in the thickness direction (Z direction) of the capillary structure sheet 30 .

Also, in this embodiment, the cross-sectional shape of the steam passage 51 is defined by the protrusion 55 formed to protrude inward, but the present invention is not limited thereto. For example, the cross-sectional shape of the steam passage 51 may also be trapezoidal or rectangular, or may also be barrel-shaped.

The steam channel portion 50 including the steam channel 51 configured in this way constitutes a part of the above-mentioned sealed space 3 . As shown in FIG. 3 , the steam channel portion 50 of this embodiment is mainly defined by the lower sheet 10 , the upper sheet 20 , and the frame portion 32 and the island portion 33 of the aforementioned capillary structure sheet 30 . Each steam passage 51 has a relatively large cross-sectional area for the passage of the actuating steam 2a.

Here, FIG. 3 shows enlarged steam passages 51 and the like for clarity, and the number and arrangement of these steam passages 51 and the like are different from those in FIG. 2 , FIG. 6 and FIG. 7 .

In addition, as shown in FIGS. 6 and 7 , a supporting portion 39 for supporting the island portion 33 on the frame portion 32 is provided in the steam flow path portion 50 . The supporting portion 39 supports the mutually adjacent island portions 33 . The supporting portion 39 is provided on both sides of the island portion 33 in the longitudinal direction (X direction). The support portion 39 is preferably formed so as not to hinder the flow of the operating steam 2 a diffused in the steam flow path portion 50 . In this case, the support portion 39 is disposed on the first body surface 31 a side of the capillary structure sheet 30 , and a space communicating with the steam flow path portion 50 is formed on the second body surface 31 b side. Thereby, the thickness of the support part 39 can be made thinner than the thickness of the capillary structure sheet 30, and it can prevent that the vapor|steam passage 51 is cut|disconnected in the X direction and the Y direction. However, it is not limited thereto, and the support portion 39 may be arranged on the second body surface 31b side. In addition, a space communicating with the steam flow path portion 50 may be formed on both of the surface on the first body surface 31 a side and the surface on the second body surface 31 b side of the support portion 39 .

As shown in FIGS. 6 and 7 , alignment holes 35 may also be provided at the four corners of the capillary structure sheet 30 .

In addition, as shown in FIG. 2 , the steam chamber 1 may further include an injection portion 4 for injecting the working fluid 2b into the sealed space 3 at one side edge in the X direction. In the form shown in FIG. 2, the injection part 4 is arrange|positioned at the evaporation region SR side. The injection part 4 has an injection channel 37 formed in the capillary structure sheet 30 . The injection channel 37 is formed on the second main body surface 31b side of the capillary structure sheet 30, and is formed in a concave shape from the second main body surface 31b side. After the steam chamber 1 is completed, the injection channel 37 is sealed. In addition, the injection flow path 37 communicates with the steam flow path portion 50 , and the working fluid 2 b is injected into the sealed space 3 through the injection flow path 37 . Furthermore, depending on the configuration of the liquid flow path 60 , the injection flow path 37 may also communicate with the liquid flow path 60 .

Furthermore, in the present embodiment, an example is shown in which the injection part 4 is provided on one of the pair of end edges in the X direction of the steam chamber 1 , but it is not limited thereto and may be provided at any position. Furthermore, the injection part 4 may also be formed in advance so as to protrude from one side edge of the steam chamber 1 in the X direction.

As shown in FIGS. 3 , 6 and 8 , the liquid channel portion 60 is provided on the second body surface 31 b of the capillary structure sheet 30 . The liquid channel portion 60 mainly passes the working fluid 2b. The liquid flow path portion 60 constitutes a part of the sealed space 3 and communicates with the vapor flow path portion 50 . The liquid channel portion 60 has a capillary structure (capillary structure) for sending the working fluid 2b to the evaporation region SR. In this embodiment, the liquid channel portion 60 is provided on the second body surface 31 b of each island portion 33 of the capillary structure sheet 30 . The liquid channel portion 60 may also be formed over the entire second body surface 31 b of each island portion 33 .

As shown in FIG. 9 , the liquid flow path portion 60 has a plurality of liquid flow path main grooves 61a to 61f arranged in parallel to each other through which the working fluid 2b passes, and a plurality of liquid flow path main grooves 61a to 61f communicating with the liquid flow path main grooves 61a to 61f. Road coupling groove 65. In addition, in the example shown in FIG. 9, six main flow grooves 61a-61f of the liquid passage are included in each island part 33, but it is not limited to this. The number of liquid channel main grooves included in each island portion 33 is arbitrary, for example, may be 3 or more and 20 or less.

As shown in FIG. 9 , the respective liquid channel main grooves 61 a to 61 f are formed to extend along the longitudinal direction (X direction) of the land portion 33 . The plurality of liquid channel main grooves 61a to 61f are arranged in parallel to each other. Furthermore, when the island portion 33 is curved in a plan view, each of the liquid channel main grooves 61 a to 61 f may also extend in a curved shape along the bending direction of the island portion 33 . That is, each liquid channel main groove 61a-61f does not necessarily have to be formed in a straight line, and it does not need to extend parallel to the X direction.

The liquid channel main grooves 61a-61f have a flow channel cross-sectional area smaller than that of the steam channel 51 of the steam channel part 50, and are mainly used for the flow of the working fluid 2b by capillary action. The main grooves 61a to 61f of the liquid passage are configured to send the working fluid 2b condensed from the working steam 2a to the evaporation region SR. The respective liquid channel main grooves 61a to 61f are arranged at intervals from each other in the width direction (Y direction).

The liquid channel main grooves 61a to 61f are formed by etching from the second body surface 31b of the capillary structure sheet 30 in an etching step described below. As shown in FIG. 8 , the main flow grooves 61a to 61f of the liquid passages have curved wall surfaces 62 . The wall surface 62 defines the liquid channel main grooves 61a to 61f, and is curved in a shape that bulges toward the first main body surface 31a. Furthermore, in the section shown in FIG. 8 , the radius of curvature of each wall surface 62 is preferably smaller than the radius of curvature of the second wall surface 54 a of the steam passage 51 .

As shown in FIG. 9 , the widths of the liquid flow path main grooves 61 a to 61 f are not all equal among the respective liquid flow path main grooves 61 a to 61 f. The width of the two main liquid channel grooves 61a and 61f (hereinafter, also referred to as liquid channel main channel grooves 61a and 61f ) closest to the steam channel part 50 (steam channel 51 ) is wider than that of the other liquid channel main channel grooves 61b to 61e. (Hereinbelow, also referred to as the main flow grooves 61b to 61e of the liquid passage) have a wide width. That is, when the widths of the liquid passage main grooves 61a to 61f are w3a to w3f respectively, the widths w3a and w3f of the liquid passage main grooves 61a and 61f are wider than the widths w3b to w3e of the liquid passage main grooves 61b to 61e ( w3a, w3f > w3b ~ w3e).

In FIG. 9 , the widths w3a and w3f of the liquid flow path main grooves 61a and 61f located on the outside of each liquid flow path portion 60 in the width direction are equal to each other, and the liquid flow path main grooves located on the inside of each liquid flow path portion 60 in the width direction Widths w3b to w3e of 61b to 61e are equal to each other. That is, the relationship of w3a=w3f>w3b=w3c=w3d=w3e holds true. In this case, the cross-sectional shapes (depth, width, etc.) of the plurality of liquid channel main grooves 61 a to 61 f may be symmetrical with respect to the center line in the width direction (Y direction) of the island portion 33 . However, it is not limited thereto, and the widths w3a, w3f of the main grooves 61a, 61f of the liquid passages may also be different from each other. Also, the widths w3b to w3e of the main grooves 61b to 61e of the liquid flow path may be different from each other. However, it is preferable that the narrower one of the widths w3a, w3f of the main grooves 61a, 61f of the liquid flow path is wider than the widest one of the widths w3b-w3e of the main grooves 61b-61e of the liquid flow path.

The width w3a, w3f of the liquid channel main grooves 61a, 61f is preferably not less than 1.1 times and not more than 1.6 times the widths w3b-w3e of the liquid channel main grooves 61b-61e. When the above magnification is set to 1.1 times or more, the capillary force in the main flow grooves 61b to 61e of the liquid channels located in the center can be increased, and the working fluid 2b can be easily transported toward the evaporation region SR. Also, by making the liquid flow channel main grooves 61a, 61f located on the outside in the width direction of each liquid flow channel portion 60 wider, a large amount of working fluid 2b can be sent toward the evaporation region SR. Also, when the flow of the working fluid 2b to the liquid flow channel main grooves 61b to 61e located inside the width direction of each liquid flow channel portion 60 stagnates, the condensation of the working fluid 2b from the vapor flow channel portion 50 is less likely to be hindered. On the other hand, by setting the above magnification to 1.6 or less, it is possible to suppress a decrease in the transfer rate of the working fluid 2b in the liquid channel main grooves 61b to 61e located inside the width direction of each liquid channel portion 60 . In addition, it is possible to suppress a decrease in the capillary force of the liquid flow channel main grooves 61a, 61f located on the outer sides in the width direction of each liquid flow channel portion 60 . Furthermore, the working fluid 2b can easily flow from the liquid flow channel main grooves 61a and 61f located on the widthwise outer side of each liquid channel portion 60 to the liquid flow channel main grooves 61b to 61e located on the widthwise inner side.

Furthermore, the widths w3a-w3f of the liquid channel main grooves 61a-61f refer to the lengths in the direction perpendicular to the longitudinal direction of the island portion 33, and in this case, refer to the dimensions in the Y direction. In addition, the widths w3a to w3f of the liquid channel main grooves 61a to 61f refer to the dimensions in the second main body surface 31b. In addition, the width w3a, w3f of the liquid flow channel main grooves 61a, 61f located outside the width direction of each liquid flow channel portion 60 may be, for example, not less than 5.5 μm and not more than 320 μm. The widths w3b to w3e of the liquid flow channel main grooves 61b to 61e located on the inside in the width direction of each liquid flow channel portion 60 may be, for example, not less than 2.2 μm and not more than 290 μm.

Also, as shown in FIG. 8, the depths h1a, h1b of the liquid flow path main grooves 61a-61f may not all be equal among the liquid flow path main grooves 61a-61f. Specifically, the depth h1a of the liquid flow path main grooves 61a and 61f located on the widthwise outer side of each liquid flow path portion 60 may also be deeper than the depth h1b of the liquid flow path main grooves 61b-61e located on the width direction inner side (h1a> h1b). In this case, the depths h1a of the liquid passage main grooves 61a and 61f are equal to each other, and the depths h1b of the liquid passage main grooves 61b to 61e are mutually equal. However, it is not limited thereto, and the depth h1a of the main grooves 61a and 61f of the liquid passage may be different from each other. In addition, the depth h1b of the main grooves 61b to 61e of the liquid passage may be different from each other. The depth h1a of the main grooves 61a and 61f of the liquid channel can be, for example, not less than 3.5 μm and not more than 240 μm. The depth h1b of the main grooves 61b to 61e of the liquid channel can be, for example, not less than 3 μm and not more than 200 μm.

Furthermore, the depths h1a and h1b of the main grooves 61a to 61f of the liquid flow path are distances measured from the second body surface 31b in a direction perpendicular to the second body surface 31b, and in this case, they are the distances in the Z direction. size. In addition, the depths h1a and h1b refer to the depths of the deepest parts of the liquid passage main grooves 61a to 61f.

As shown in FIG. 9 , each liquid channel connection groove 65 extends in a direction different from the X direction. In the present embodiment, each liquid flow channel connecting groove 65 is formed to extend in the Y direction, and is formed to be perpendicular to the liquid flow channel main grooves 61a to 61f. The plurality of liquid flow channel coupling grooves 65 are arranged so that the adjacent liquid flow channel main grooves 61a to 61f communicate with each other. The other liquid channel connection grooves 65 are arranged so that the vapor channel part 50 (steam channel 51 ) communicates with the liquid channel main grooves 61 a and 61 f closest to the vapor channel part 50 . That is, the liquid channel connection groove 65 extends from the end side of the island portion 33 in the Y direction to the liquid channel main grooves 61a and 61f adjacent to the end. In this manner, the vapor passage 51 of the vapor passage portion 50 communicates with the liquid passage main grooves 61a to 61f.

The liquid channel connection groove 65 has a channel cross-sectional area smaller than that of the steam channel 51 of the steam channel part 50, and is mainly used for the flow of the working fluid 2b by capillary action. The liquid channel connection grooves 65 may also be arranged at equal intervals in the longitudinal direction (X direction) of the island portion 33 .

The liquid channel connection groove 65 is also formed by etching similarly to the liquid channel main grooves 61a to 61f, and has curved wall surfaces (not shown) similar to the liquid channel main grooves 61a to 61f. As shown in FIG. 9 , the width w4 (dimension in the X direction) of the liquid channel connection groove 65 can be set to not less than 5 μm and not more than 300 μm. The depth of the liquid channel connection groove 65 can be set to not less than 3 μm and not more than 240 μm.

The liquid flow path main grooves 61 a to 61 f include a liquid flow path crossing portion 66 communicating with the liquid flow path coupling groove 65 . At the liquid flow path intersection 66 , the liquid flow path main grooves 61 a to 61 f communicate with the liquid flow path connection groove 65 in a T-shape. In this case, at the liquid channel intersection 66, one liquid channel main groove 61a-61f communicates with the liquid channel connecting groove 65 on one side (for example, the upper side in FIG. 9). Thereby, it is possible to prevent the liquid flow connecting groove 65 on the other side (for example, the lower side in FIG. 9 ) from communicating with the liquid flow main grooves 61 a - 61 f at the liquid flow intersection 66 . Thereby, at the liquid flow path intersection portion 66, the wall surfaces 62 of the liquid flow path main grooves 61a to 61f are not cut on both sides in the Y direction, and one side of the wall surface 62 remains. Therefore, capillary action can also be given to the working liquid 2b in the liquid flow channel main grooves 61a to 61f at the liquid flow path intersection portion 66, thereby suppressing the propulsive force of the working liquid 2b toward the evaporation region SR from intersecting the liquid flow path. The portion 66 is lowered.

As shown in FIG. 9 , the row of convex parts 63 is provided between the liquid channel main grooves 61 a to 61 f adjacent to each other. Each convex portion row 63 includes a plurality of convex portions 64 (liquid channel protrusions) arranged along the X direction. The convex portion 64 is provided in the liquid channel portion 60 , protrudes from the liquid channel main grooves 61 a to 61 f and the liquid channel connection groove 65 , and contacts the upper sheet 20 . Each convex part 64 is formed in rectangular shape so that X direction may become a longitudinal direction in planar view. The liquid channel main grooves 61a-61f are arrange|positioned between the convex part 64 mutually adjacent to a Y direction. The liquid channel connecting groove 65 is arranged between the protrusions 64 adjacent to each other in the X direction. The liquid channel connection groove 65 is formed to extend in the Y direction, and the liquid channel main grooves 61 a to 61 f adjacent to each other in the Y direction communicate with each other. Thereby, the working fluid 2b can come and go between the main grooves 61a-61f of the liquid flow paths.

The convex portion 64 is a portion where the material of the capillary structure sheet 30 remains without being etched in the etching step described below. In this embodiment, as shown in FIG. 9 , the planar shape of the convex portion 64 (shape at the position of the second main body surface 31b of the capillary structure sheet 30 ) is rectangular.

The arrangement pitch of the protrusions 64 in the width direction (Y direction) of the main grooves 61 a and 61 f of the liquid flow path is not equal among the protrusions 64 . That is, the arrangement pitch P1 of the protrusions 64 located on both sides of the main grooves 61a, 61f in the liquid flow path in the width direction (Y direction) may also be two times wider than the protrusions 64 located in the width direction (Y direction) of the main grooves 61b-61e in the liquid flow paths. The arrangement pitch P2 of the side protrusions 64 is wide (P1>P2). The arrangement pitches P1 and P2 of the protrusions 64 refer to the distance between the centers of the protrusions 64 in the Y direction and the centers of the protrusions 64 adjacent in the X direction in the Y direction, and refer to the distances measured in the Y direction. The arrangement pitch P1 of the protrusions 64 located on both sides of the main grooves 61 a and 61 f of the liquid channel in the Y direction can be, for example, not less than 10 μm and not more than 820 μm. The arrangement pitch P2 of the protrusions 64 located on both sides in the Y direction of the main grooves 61 b to 61 e of the liquid channel may be, for example, not less than 9 μm and not more than 790 μm.

In this embodiment, the protrusions 64 are arranged in a shifted shape (staggered). More specifically, the convex portions 64 of the convex portion rows 63 adjacent to each other in the Y direction are arranged offset from each other in the X direction. The offset amount can be half of the arrangement pitch P4 of the protrusions 64 in the longitudinal direction (X direction) of the main grooves 61 a - 61 f of the liquid flow path. The width w5 (dimension in the Y direction) of the protrusion 64 may be, for example, not less than 5 μm and not more than 500 μm. In addition, the width w5 of the protrusions 64 may be equal among the protrusions 64 . In addition, the width w5 of the convex part 64 refers to the dimension in the 2nd main body surface 31b. The arrangement pitch P4 of the protrusions 64 can also be equal among the protrusions 64 . The arrangement pitch P4 of the protrusions 64 refers to the distance between the centers of the protrusions 64 in the X direction and the centers of the protrusions 64 adjacent in the X direction in the X direction. Furthermore, the arrangement of the protrusions 64 is not limited to a dislocation shape, and can also be arranged side by side. In this case, the protrusions 64 of the protrusion rows 63 adjacent to each other in the Y direction are also aligned in the X direction (see FIG. 17 ).

The length L1 (dimension in the X direction) of the protrusions 64 may also be equal among the protrusions 64 . Also, the length L1 of the convex portion 64 is longer than the width w4 of the liquid channel connection groove 65 (L1>w4). In addition, the length L1 of the convex part 64 means the maximum dimension of the X direction in the 2nd main body surface 31b.

In addition, the materials constituting the lower sheet 10, the upper sheet 20, and the capillary structure sheet 30 are not particularly limited as long as they are materials with good thermal conductivity. The lower sheet 10, the upper sheet 20, and the capillary structure sheet The material 30 may also include copper or a copper alloy, for example. In this case, the thermal conductivity of each sheet 10 , 20 , 30 can be increased, thereby improving the heat dissipation efficiency of the steam chamber 1 . Also, when pure water is used as the working fluid 2a, 2b, corrosion can be prevented. Furthermore, as long as the desired heat dissipation efficiency can be obtained and corrosion can be prevented, the sheets 10 , 20 , 30 can also use other metal materials such as aluminum or titanium or other metal alloy materials such as stainless steel.

Also, the thickness t1 of the steam chamber 1 shown in FIG. 3 may be, for example, not less than 100 μm and not more than 2000 μm. By setting the thickness t1 of the steam chamber 1 to 100 μm or more, the steam flow path portion 50 is properly secured, and thus the steam chamber 1 can function appropriately. On the other hand, by setting the thickness t1 to be 2000 μm or less, it is possible to suppress the thickness t1 of the vapor chamber 1 from increasing.

The thickness t2 of the lower sheet 10 may be, for example, not less than 25 μm and not more than 500 μm. By setting the thickness t2 of the lower sheet 10 to be 25 μm or more, the mechanical strength of the lower sheet 10 can be ensured. On the other hand, by setting the thickness t2 of the lower sheet 10 to be 500 μm or less, it is possible to suppress the thickness t1 of the steam chamber 1 from increasing. Similarly, the thickness t3 of the upper sheet 20 can also be set in the same manner as the thickness t2 of the lower sheet 10 . The thickness t3 of the upper sheet 20 and the thickness t2 of the lower sheet 10 may also be different.

The thickness t4 of the capillary structure sheet 30 may be, for example, not less than 50 μm and not more than 1000 μm. By setting the thickness t4 of the capillary structure sheet 30 to 50 μm or more, the steam flow path portion 50 is properly secured, and thus the steam chamber 1 can be properly operated. On the other hand, by setting it to 1000 μm or less, the thickness t1 of the vapor chamber 1 can be suppressed from becoming thicker.

Next, the manufacturing method of the steam chamber 1 of this embodiment including such a structure is demonstrated using FIG.10(a)-(c). In addition, in FIG.10(a)-(c), the same cross-section as the cross-sectional view of FIG. 3 is shown.

Here, the manufacturing steps of the capillary structure sheet 30 will be described first.

First, as shown in FIG. 10( a ), as a preparatory step, a flat metal material sheet M including the first material surface Ma and the second material surface Mb is prepared.

After the preparatory step, as an etching step, as shown in FIG. 60.

More specifically, a patterned resist film (not shown) is formed on the first material surface Ma and the second material surface Mb of the metal material sheet M by photolithography. Next, the first material surface Ma and the second material surface Mb of the metal material sheet M are etched through the openings of the patterned resist film. Thereby, the first material surface Ma and the second material surface Mb of the metal material sheet M are etched into patterns to form the vapor flow path portion 50 and the liquid flow path portion 60 as shown in FIG. 10( b ). In addition, as the etchant, for example, a ferric chloride-based etchant such as an aqueous ferric chloride solution, or a copper chloride-based etchant such as an aqueous copper chloride solution can be used.

Regarding etching, the first material surface Ma and the second material surface Mb of the metal material sheet M may be etched simultaneously. However, it is not limited thereto, and the etching of the first material surface Ma and the second material surface Mb may also be performed as different steps. In addition, the vapor channel part 50 and the liquid channel part 60 may be formed by etching at the same time, or may be formed by different steps.

In addition, in the etching step, the first material surface Ma and the second material surface Mb of the metal material sheet M are etched, thereby obtaining a specific contour shape as shown in FIGS. 6 and 7 . That is, the edge of the capillary structure sheet 30 is formed.

In this way, the capillary structure sheet 30 of this embodiment can be obtained.

After the production step of the capillary structure sheet 30, as a joining step, as shown in FIG. 10(c), the lower sheet 10, the upper side sheet 20, and the capillary structure sheet 30 are joined. Furthermore, the lower sheet 10 and the upper sheet 20 may also be formed of a rolled material having a desired thickness.

More specifically, first, the lower sheet 10, the capillary structure sheet 30, and the upper sheet 20 are laminated in this order. In this case, the first body surface 31a of the capillary structure sheet 30 is overlapped with the second lower sheet surface 10b of the lower sheet 10, and the first upper sheet surface 20a of the upper sheet 20 is aligned with the capillary structure. The second body surface 31b of the sheet 30 overlaps. At this time, use the alignment holes 12 of the lower sheet 10 (see FIG. 4 ), the alignment holes 35 of the capillary structure sheet 30 (see FIGS. 6 and 7 ), and the alignment holes 22 of the upper sheet 20 (see FIG. 4 ). Referring to FIG. 5 ), the sheets 10, 20, 30 are aligned.

Next, the lower sheet 10, the capillary structure sheet 30, and the upper sheet 20 are temporarily fixed. For example, these sheet materials 10 , 20 , 30 may be temporarily fixed by resistance welding in a spot shape, or these sheet materials 10 , 20 , 30 may be temporarily fixed by laser welding.

Next, the lower sheet 10, the capillary structure sheet 30, and the upper sheet 20 are permanently bonded by diffusion bonding. Diffusion bonding refers to the following bonding methods. That is, first, the bonded lower sheet 10 is brought into close contact with the capillary structure sheet 30 , and the capillary structure sheet 30 is brought into close contact with the upper sheet 20 . Then, in a controlled atmosphere such as vacuum or inert gas, the lower sheet 10, the capillary structure sheet 30, and the upper sheet 20 are pressurized and heated in the stacking direction, and the diffusion of atoms generated on the joint surface is utilized. And join. Diffusion bonding is to heat the material of each sheet 10, 20, 30 to a temperature close to the melting point, but since it is lower than the melting point, it can avoid deformation of each sheet 10, 20, 30 due to melting. More specifically, the frame portion 32 of the capillary structure sheet 30 and the first body surface 31 a of each island portion 33 are diffusely bonded to the second lower sheet surface 10 b of the lower sheet 10 . Moreover, the second main body surface 31b of the frame portion 32 and each island portion 33 of the capillary structure sheet 30 is diffusely bonded to the first upper sheet surface 20a of the upper sheet 20 surface. In this way, the sheets 10 , 20 , and 30 are diffusion-bonded, and the sealed space 3 having the vapor flow path 50 and the liquid flow path 60 is formed between the lower sheet 10 and the upper sheet 20 .

After the bonding step, the working fluid 2 b is injected into the sealed space 3 from the injection part 4 .

Thereafter, the above-mentioned injection channel 37 is sealed. For example, the injection channel 37 may be sealed by partially melting the injection part 4 . Thereby, the communication between the sealed space 3 and the outside is blocked, and the working fluid 2b is sealed in the sealed space 3, thereby preventing the working fluid 2b in the sealed space 3 from leaking to the outside.

In the above manner, the steam chamber 1 of this embodiment can be obtained.

Next, the operation method of the vapor chamber 1, that is, the cooling method of the device D will be described.

The steam chamber 1 obtained in the above manner is set in the casing H of the electronic equipment E such as mobile terminals. Also, a device D such as a CPU as a device to be cooled is mounted on the second upper sheet surface 20b of the upper sheet 20 (or the vapor chamber 1 is mounted on the device D). The working fluid 2b in the sealed space 3 adheres to the walls of the sealed space 3 due to its surface tension, that is, the first wall 53a and the second wall 54a of the vapor passage 51, and the liquid flow path main groove 61a- The wall surface 62 of 61f, and the wall surface of the liquid channel connection groove 65. Also, the working fluid 2b may adhere to the portion of the second lower sheet surface 10b of the lower sheet 10 exposed to the vapor passage 51 . Furthermore, the working fluid 2b may also adhere to the portion of the first upper sheet surface 20a of the upper sheet 20 exposed to the vapor passage 51, the liquid flow main grooves 61a to 61f, and the liquid flow connection groove 65.

When the device D generates heat in this state, the working fluid 2 b existing in the evaporation region SR (see FIGS. 6 and 7 ) receives heat from the device D. As shown in FIG. The received heat is absorbed as latent heat to vaporize (vaporize) the working fluid 2b to generate working vapor 2a. Most of the generated operating steam 2a diffuses in the steam passage 51 constituting the sealed space 3 (refer to the solid arrow in FIG. 6 ). The operating steam 2a in each steam passage 51 leaves the evaporation region SR, and most of the operating steam 2a is transported to the relatively low temperature condensation area CR (the right part in FIG. 6 and FIG. 7 ). In the condensation region CR, the working steam 2a is cooled mainly by dissipating heat from the lower sheet 10 . The heat received by the lower sheet 10 from the working steam 2a is transferred to the outside atmosphere via the casing member Ha (see FIG. 3 ).

The actuating vapor 2a loses the latent heat absorbed in the evaporation region SR by dissipating heat to the lower sheet 10 in the condensation region CR, and condenses to generate the actuating fluid 2b. The generated working fluid 2b adheres to the first wall surface 53a and the second wall surface 54a of each steam passage 51, the second lower sheet surface 10b of the lower sheet 10, and the first upper sheet surface of the upper sheet 20. 20a. Here, in the evaporation region SR, the working fluid 2b continues to evaporate. Therefore, the working fluid 2b in the region other than the evaporation region SR (that is, the condensation region CR) in the liquid flow path portion 60 is transported toward the evaporation region SR by the capillary action of the main grooves 61a to 61f of the liquid flow paths (see FIG. 6 ). dashed arrow). Thereby, the working liquid 2b adhering to each vapor passage 51, the second lower sheet surface 10b, and the first upper sheet surface 20a moves to the liquid flow path portion 60, passes through the liquid flow path connection groove 65, and enters the liquid flow path. Main flow grooves 61a-61f. In this way, the working fluid 2 b is filled into the respective liquid flow channel main grooves 61 a to 61 f and the respective liquid flow channel connection grooves 65 . Therefore, the filled working fluid 2b obtains a propulsion force toward the evaporation region SR through the capillary action of the mainstream grooves 61a to 61f of the respective liquid channels, and thus is smoothly transported toward the evaporation region SR.

In the liquid flow path portion 60 , each liquid flow path main groove 61 a to 61 f communicates with other adjacent liquid flow path main grooves 61 a to 61 f through the corresponding liquid flow path connecting groove 65 . Thereby, the working fluid 2b flows back and forth between the adjacent liquid flow path main grooves 61a to 61f, and dry-out in the liquid flow path main grooves 61a to 61f can be suppressed. Therefore, capillary action is given to the working fluid 2b in the main grooves 61a to 61f of the respective liquid channels, and the working fluid 2b is smoothly transported toward the evaporation region SR.

The working fluid 2b that has reached the evaporation region SR receives heat from the device D again and evaporates. The actuating steam 2a evaporated from the actuating fluid 2b passes through the liquid channel connection groove 65 in the evaporation region SR, moves to the steam channel 51 with a larger flow channel cross-sectional area, and diffuses in each steam channel 51. In this way, the actuating fluids 2a, 2b repeat phase transitions, that is, evaporation and condensation, and flow back in the sealed space 3 to transport and release the heat of the device D. As a result, the device D is cooled.

In other words, there may be cases where the working fluid 2b is transported from the liquid flow path main grooves 61a, 61f closest to the vapor flow path portion 50 (steam path 51) toward the other while the working fluid 2b is transported to the evaporation region SR through the liquid flow path portion 60. The flow of the working fluid 2b in the main grooves 61b-61e of the liquid flow path stagnates. On the other hand, in this embodiment, the width w3a, w3f of the main flow grooves 61a, 61f of the liquid flow path is made wider than the widths w3b-w3e of the main flow grooves 61b-61e of the liquid flow path. Thereby, when the flow of the working fluid 2b from the liquid flow channel main grooves 61a and 61f located on the widthwise outer side of the liquid flow channel portion 60 toward the liquid flow channel main grooves 61b to 61e located on the width direction inside is stagnant, the The condensed working fluid 2b from the vapor flow path portion 50 is stored in the wide liquid flow path main grooves 61a, 61f. Therefore, the working fluid 2b can be smoothly condensed from the vapor flow path portion 50 toward the liquid flow path portion 60 . As a result, the air pressure difference between the vicinity of the evaporation region SR and the condensation region CR can be maintained, thereby suppressing a decrease in the cooling capacity of the vapor chamber 1 .

Also, the width w3a, w3f of the liquid flow channel main grooves 61a, 61f located on the widthwise outer side of each liquid channel portion 60 is made wider than the widths w3b-w3e of the liquid flow channel main channel grooves 61b-61e located on the widthwise inner side. Therefore, the capillary force in the main grooves 61b to 61e of the liquid flow path located inside in the width direction can be increased. Thereby, the working fluid 2b can be easily transported toward the evaporation region SR. On the other hand, by making the width w3a, w3f of the liquid channel main grooves 61a, 61f located on the widthwise outer side of each liquid channel part 60 wider, a large amount of working fluid 2b can be sent toward the evaporation region SR.

Thus, according to the present embodiment, the widths w3a, w3f of the liquid channel main grooves 61a, 61f closest to the steam channel portion 50 (steam passage 51) are wider than the widths w3b-w3e of the other liquid channel main grooves 61b-61e. Thereby, when the flow of the working fluid 2b from the liquid flow channel main grooves 61a and 61f located on the widthwise outer side of each liquid channel portion 60 toward the liquid flow channel main grooves 61b to 61e located on the width direction inside is stagnant, the The working fluid 2b is stored in the main grooves 61a, 61f of the wide liquid flow path. As a result, the working fluid 2b can be smoothly condensed from the steam flow path portion 50 toward the liquid flow path portion 60, thereby improving the cooling capacity of the steam chamber 1.

Also, according to the present embodiment, the depth h1a of the main liquid channel grooves 61a and 61f closest to the steam channel portion 50 (steam passage 51) is deeper than the depth h1b of the other liquid channel main channel grooves 61b to 61e. Thereby, when the flow of the working fluid 2b from the liquid flow channel main grooves 61a and 61f located on the widthwise outer side of each liquid channel portion 60 toward the liquid flow channel main grooves 61b to 61e located on the width direction inside is stagnant, the The working fluid 2b is stored in the main grooves 61a and 61f of the relatively deep liquid flow path. Therefore, the working fluid 2b can be smoothly condensed from the steam flow path portion 50 toward the liquid flow path portion 60, thereby improving the cooling capacity of the steam chamber 1.

Also, according to this embodiment, the arrangement pitch P1 of the protrusions 64 located on both sides in the width direction of the liquid flow channel main grooves 61a and 61f closest to the steam flow channel portion 50 (steam passage 51) is smaller than that of the other liquid flow channel main grooves. The arrangement pitch P2 of the protrusions 64 on both sides in the width direction of 61b to 61e is wide. Thereby, the width w5 of the convex part 64 adjacent to the main grooves 61a and 61f of the liquid flow path is not excessively narrowed, and therefore, the decrease in the bonding strength between the convex part 64 and the upper sheet 20 can be suppressed.

(variation example) Next, various modification examples of this embodiment will be described with reference to FIGS. 11 to 17 . FIG. 11 to FIG. 17 are diagrams showing capillary structure sheets 30 of modified examples, respectively. In FIGS. 11 to 17 , the same symbols are assigned to the same parts as those shown in FIGS. 1 to 10 , and detailed description thereof will be omitted.

(1st modification example) In the said embodiment, the example in which the width w5 of the convex part 64 was equal among each convex part 64 was demonstrated. However, it is not limited thereto, and the widths of the protrusions 64 may also be uneven among the protrusions 64 .

For example, as in the first variation shown in FIGS. 11 and 12 , the widths w5a to w5c of the protrusions 64 may be uneven among the protrusions 64 . For example, the width w5a of the convex portion 64a located on the inner side of the liquid flow path main grooves 61a, 61f in the Y direction (on the side of the liquid flow path main grooves 61b, 61e) may also be located closer to each liquid flow path than the above convex portion 64a. The width w5b of the convex portion 64b on the inner side in the width direction of the portion 60 is narrow (w5a<w5b). In this case, the width w5a of the convex portion 64a may be, for example, not less than 5 μm and not more than 380 μm, and the width w5b of the convex portion 64b may be, for example, not less than 10 μm and not more than 400 μm. Furthermore, the width w5c of the convex portion 64c located outside in the Y direction (on the steam flow path portion 50 side) relative to the main grooves 61a and 61f of the liquid flow path may be the same as the width w5a of the convex portion 64a or the width w5b of the convex portion 64b, or , can also be different from w5a or w5b.

In addition, the center-to-center distances P3 in the width direction (Y direction) of the respective liquid channel main grooves 61a to 61f may be equal to each other. That is, the distance between the main flow grooves 61a and 61b of the liquid flow path, the distance between the main flow grooves 61b and 61c of the liquid flow path, the distance between the main flow grooves 61d and 61e of the liquid flow path, and the distance between the main flow grooves 61e and 61f of the liquid flow path equal to each other. In this case, the center-to-center distance P3 may be, for example, not less than 5 μm and not more than 500 μm. The center-to-center distance P3 is the shortest distance between the center positions in the width direction (Y direction) of the adjacent liquid channel main grooves 61a to 61f, and refers to the distance measured in the Y direction.

In this variation example, the widths w3a, w3f of the liquid flow path main grooves 61a, 61f located on the outside in the width direction of each liquid flow path portion 60 are wider than the widths w3b˜w3e of the liquid flow path main grooves 61b˜61e located on the inside in the width direction. width. Thereby, when the flow of the working fluid 2b from the liquid flow channel main grooves 61a and 61f located on the widthwise outer side of each liquid channel portion 60 toward the liquid flow channel main grooves 61b to 61e located on the width direction inside is stagnant, the The working fluid 2b is stored in the main grooves 61a, 61f of the wide liquid flow path. As a result, the working fluid 2b can be smoothly condensed from the steam flow path portion 50 toward the liquid flow path portion 60, thereby improving the cooling capacity of the steam chamber 1.

(the second modification example) In the above embodiment, an example has been described in which the widths w3a, w3f of the liquid flow channel main grooves 61a, 61f located on the widthwise outer side of each liquid channel portion 60 are equal to each other, and the liquid flow channel located on the widthwise inner side The widths w3b-w3e of the channel main grooves 61b-61e are equal to each other. However, it is not limited thereto, and the width of the liquid flow path main grooves 61a to 61f can also be from the liquid flow path main grooves 61a, 61f closest to the vapor flow path portion 50 (steam path 51) toward the center of each liquid flow path portion 60. The way in which the main flow grooves 61c and 61d of the liquid passage on the inner side in the width direction are gradually narrowed is changed.

For example, in the second variation example shown in FIGS. 13 and 14 , among the plurality of liquid flow channel main grooves 61 a to 61 f, the liquid flow channel main grooves 61 a and 61 f closest to the vapor flow channel portion 50 (steam channel 51 ) The widths w3a and w3f are the widest. Moreover, the width w3c, w3d of the main flow grooves 61c, 61d of the liquid flow path located on the innermost side is the narrowest. The widths w3b, w3e of the main channels 61b, 61e of other liquid channels are the lengths between the widths w3a, w3f of the main channels 61a, 61f of the liquid channels and the widths w3c, w3d of the main channels 61c, 61d of the liquid channels. That is, the relationships of w3a, w3f>w3b, w3e>w3c, and w3d are established.

In FIG. 13 and FIG. 14 , the widths w3a and w3f of the liquid flow channel main grooves 61a and 61f located outside the width direction of each liquid channel part 60 are equal to each other, and the liquid located inside the width direction of each liquid channel part 60 The widths w3c, w3d of the flow path main grooves 61c, 61d are equal to each other. Also, the widths w3b, w3e of the main flow grooves 61b, 61e of the liquid passages located therebetween are equal to each other. That is, the relationship of w3a=w3f>w3b=w3e>w3c=w3d is established. However, it is not limited thereto, and the widths w3a, w3f of the main grooves 61a, 61f of the liquid passages may be different from each other. In addition, the widths w3c and w3d of the main grooves 61c and 61d of the liquid passage may be different from each other. In addition, the widths w3b, w3e of the main grooves 61b, 61e of the liquid passage may be different from each other.

The width w3a, w3f of the liquid channel main grooves 61a, 61f is preferably not less than 1.1 times and not more than 1.6 times the width w3b, w3e of the liquid channel main grooves 61b, 61e adjacent to the inner side in the width direction. Also, the width w3b, w3e of the liquid channel main grooves 61b, 61e is preferably at least 1.1 times and not more than 1.6 times the width w3c, w3d of the liquid channel main grooves 61c, 61d adjacent to the inside in the width direction. The width w3a, w3f of the main grooves 61a, 61f of the liquid flow path may be, for example, not less than 5.5 μm and not more than 320 μm. The widths w3b, w3e of the main grooves 61b, 61e of the liquid channel may be, for example, not less than 3.5 μm and not more than 290 μm. The widths w3c, w3d of the main grooves 61c, 61d of the liquid channel may be, for example, not less than 2.2 μm and not more than 260 μm.

In FIG. 13, the depths h1a, h1b, and h1c of the main grooves 61a-61f of the liquid flow path may not all be equal among the main grooves 61a-61f of the liquid flow path. Specifically, the depth h1a of the liquid channel main grooves 61a, 61f located on the widthwise outer side of each liquid channel part 60 may also be deeper than the depth h1b of the liquid channel main grooves 61b, 61e adjacent to the widthwise inner side. In addition, the depth h1b of the liquid flow path main grooves 61b, 61e may be deeper than the depth h1c of the liquid flow path main grooves 61c, 61d adjacent to the inside in the width direction (h1a>h1b>h1c). In this case, the depths h1a of the liquid passage main grooves 61a and 61f are equal to each other, and the depths h1b of the liquid passage main grooves 61b and 61e are mutually equal. Also, the depths h1c of the liquid channel main grooves 61c and 61d are equal to each other. The depth h1a of the main grooves 61a and 61f of the liquid channel can be, for example, not less than 3.5 μm and not more than 240 μm. The depth h1b of the main grooves 61b and 61e of the liquid passage can be, for example, 3.3 μm or more and 200 μm or less. The depth h1c of the main grooves 61c and 61d of the liquid channel can be, for example, not less than 3 μm and not more than 150 μm. However, it is not limited thereto, and the depth h1a of the liquid channel main grooves 61a and 61f may be different from each other, and the depth h1b of the liquid channel main grooves 61b and 61e may also be different from each other. In addition, the depth h1c of the main grooves 61c and 61d of the liquid passage may be different from each other.

Thus, according to the second modification, the width of the liquid flow path main grooves 61a to 61f is from the liquid flow path main grooves 61a, 61f closest to the vapor flow path portion 50 toward the liquid flow path located inside the width direction of each liquid flow path portion 60 . The road main grooves 61c, 61d gradually become narrower. Thereby, when the flow of the working fluid 2b from the liquid flow channel main grooves 61a, 61f located on the widthwise outer side of each liquid channel portion 60 toward the liquid flow channel main grooves 61c, 61d located on the widthwise inner side is stagnant, the The working fluid 2b condensed from the vapor flow path portion 50 is stored in the wide liquid flow path main grooves 61a, 61f. Therefore, the working fluid 2b can be smoothly condensed from the vapor flow path portion 50 toward the liquid flow path portion 60 .

(3rd modification example) In the above-mentioned present embodiment, an example has been described in which the widths w3a, w3f of the liquid flow channel main grooves 61a, 61f located outside the width direction of each liquid flow channel section 60 are equal to each other, and the widths w3a, w3f of each liquid channel section The widths w3b to w3e of the liquid flow path main grooves 61b to 61e inside the width direction of 60 are equal to each other. However, it is not limited thereto, the width of the liquid flow channel main grooves 61a, 61f closest to the steam flow channel portion 50 (steam passage 51) is the same as the width of the second liquid flow channel main grooves close to the steam flow channel portion 50 (steam passage 51). The widths of 61b and 61c may also be equal to each other.

For example, in the third variation example shown in FIGS. 15 and 16 , among the plurality of liquid flow channel main grooves 61 a to 61 f, the liquid flow channel main grooves 61 a and 61 f closest to the vapor flow channel portion 50 (steam channel 51 ) The widths w3a, w3f are the widest with the widths w3b, w3e of the liquid flow path main grooves 61b, 61e of the second liquid flow path close to the vapor flow path portion 50 (steam path 51). Moreover, the width w3c, w3d of the main flow grooves 61c, 61d of the liquid flow path located at the innermost side in the width direction is the narrowest. That is, the relationship of w3a, w3b, w3e, w3f>w3c, w3d is established.

In Fig. 15 and Fig. 16, the widths w3a, w3b, w3e, w3f of the liquid passage main grooves 61a, 61b, 61e, 61f are equal to each other, and the widths w3c, w3d of the liquid passage main grooves 61c, 61d are mutually equal. That is, the relationship of w3a=w3b=w3e=w3f>w3c=w3d holds true. However, it is not limited thereto, and the widths w3a, w3b, w3e, w3f of the liquid channel main grooves 61a, 61b, 61e, 61f may be different from each other. In addition, the widths w3c and w3d of the main grooves 61c and 61d of the liquid passage may be different from each other. In addition, in this variation example, the following case has been described as an example, that is, among the plurality of liquid flow channel main grooves, two pairs (four pieces) The widths w3a , w3b , w3e , and w3f of the main grooves 61a , 61b , 61e , and 61f of the liquid passage are the same as each other and the widest, but they are not limited thereto. It is also possible that among the plurality of liquid flow channel main grooves, the widths of more than three pairs (six) of the liquid flow main grooves from the side close to the vapor flow channel portion 50 (steam passage 51) are the same and the widest. For example, when there are 8 main grooves of the liquid flow path, the width of the main grooves of 3 pairs (6) of the liquid flow path from the side close to the vapor flow path portion 50 (steam path 51) may be the same and the most width.

Thus, according to the third modification example, two pairs (four) of wide liquid channel main grooves 61a, 61b, 61e, 61f are provided, so the area for storing the working fluid 2b is particularly large. Thereby, when the flow of the working fluid 2b from the liquid flow channel main grooves 61a, 61b, 61e, 61f located on the widthwise outer side of each liquid channel portion 60 toward the liquid flow channel main grooves 61c, 61d located on the width direction inner side is stagnant. At this time, more of the condensed working fluid 2b from the vapor flow path portion 50 can be stored in the wider liquid flow path main grooves 61a, 61b, 61e, and 61f.

(4th modification example) In the above-mentioned embodiment, the example in which the protrusions 64 are arranged in a shifted shape has been described. However, it is not limited to this, and as shown in FIG. 17, the convex part 64 may be arrange|positioned in grid dot shape. Specifically, when a point located at the center of the convex portion 64 in the X direction and the Y direction is defined as the center point Pc, the center points Pc of the plurality of convex portions 64 are arranged in a grid pattern. That is, the center point Pc of several convex part 64 is arrange|positioned in parallel in X direction and Y direction, respectively. In this case, when the flow of the working fluid 2b from the liquid flow channel main grooves 61a, 61f located on the widthwise outer side of each liquid channel portion 60 toward the liquid flow channel main grooves 61c, 61d located on the widthwise inner side stagnates, It is also possible to store more of the condensed working fluid 2b from the vapor flow path portion 50 in the wider liquid flow path coupling groove 65 .

(second embodiment) Next, a second embodiment will be described with reference to FIGS. 18 to 26 . 18 to 26 are diagrams showing the second embodiment. In FIGS. 18 to 26 , the same symbols are assigned to the same parts as those shown in FIGS. 1 to 17 , and detailed description thereof will be omitted.

As shown in FIG. 18 , the capillary structure sheet 30 of this embodiment has a first main body surface 31 a , a second main body surface 31 b , a vapor flow path portion 50 , and a liquid flow path portion 60 . The liquid channel portion 60 is provided on the second body surface 31 b of the capillary structure sheet 30 . The liquid channel portion 60 mainly passes the working fluid 2b. The liquid flow path portion 60 constitutes a part of the sealed space 3 and communicates with the vapor flow path portion 50 . The liquid channel portion 60 has a capillary structure (capillary structure) for sending the working fluid 2b to the evaporation region SR. In this embodiment, the liquid channel portion 60 is provided on the second body surface 31 b of each island portion 33 of the capillary structure sheet 30 . The liquid channel portion 60 may also be formed over the entire second body surface 31 b of each island portion 33 .

As shown in FIG. 19 , the liquid flow path part 60 has a plurality of liquid flow path main grooves 61 arranged parallel to each other for the passage of the working fluid 2b, and a plurality of liquid flow path coupling grooves 65 communicating with the liquid flow path main flow grooves 61. . In addition, in the example shown in FIG. 19, six liquid channel main grooves 61 are included in each island part 33, but it is not limited to this. The number of liquid channel main grooves 61 included in each island portion 33 is arbitrary, for example, it can be set to 3 or more and 20 or less.

As shown in FIG. 19 , each liquid channel main groove 61 is formed to extend along the longitudinal direction (X direction) of the land portion 33 . The plurality of liquid channel main grooves 61 are arranged in parallel to each other. Furthermore, when the island portion 33 is curved in a plan view, each liquid channel main groove 61 may also extend in a curved shape along the bending direction of the island portion 33 . That is, each liquid channel main groove 61 does not necessarily have to be formed in a straight line, and also does not need to extend parallel to the X direction.

The liquid channel main channel 61 has a smaller flow channel cross-sectional area than the steam channel 51 of the steam channel part 50, and is mainly used for the flow of the working fluid 2b by capillary action. The main channel 61 of the liquid channel is configured to send the working fluid 2b condensed from the working steam 2a to the evaporation region SR. The respective liquid channel main grooves 61 are arranged at intervals from each other in the width direction (Y direction).

The liquid channel main channel 61 is formed by etching from the second body surface 31b of the capillary structure sheet 30 in the etching step of manufacturing the capillary structure sheet 30 . As shown in FIG. 18 , the liquid channel main channel 61 has a curved wall surface 62 . The wall surface 62 defines the main channel 61 of the liquid flow path, and is curved in a shape that bulges toward the first body surface 31a. Furthermore, in the section shown in FIG. 18 , the radius of curvature of each wall surface 62 is preferably smaller than the radius of curvature of the second wall surface 54 a of the steam passage 51 .

In FIG. 19, the width w3 of the main flow groove 61 of the liquid flow path is all equal to each other. In this case, the cross-sectional shape (depth, width, etc.) of the plurality of liquid channel main grooves 61 may be symmetrical with respect to the center line in the width direction (Y direction) of the island portion 33 . However, it is not limited thereto, and the width w3 of the main groove 61 of the liquid flow path may also be different from each other. Furthermore, the width w3 of the liquid channel main groove 61 refers to the length in the direction perpendicular to the longitudinal direction of the island portion 33, and in this case, refers to the dimension in the Y direction. In addition, the width w3 of the main flow groove 61 of the liquid flow path refers to the dimension in the second main body surface 31b. In addition, the width w3 of the main groove 61 of the liquid channel may be, for example, not less than 2.2 μm and not more than 320 μm.

Moreover, as shown in FIG. 18, the depth h1 of the main flow channel 61 of the liquid flow path is all equal to each other among the main flow grooves 61 of the liquid flow path. However, it is not limited thereto, and the depth h1 of the main grooves 61 of the liquid flow path may also be different among the main grooves 61 of the liquid flow path. The depth h1 of the main groove 61 of the liquid channel can be, for example, not less than 3 μm and not more than 240 μm. Furthermore, the depth h1 of the main channel 61 of the liquid channel is a distance measured from the second main body surface 31b in a direction perpendicular to the second main body surface 31b, and in this case, it is a dimension in the Z direction. Also, the depth h1 refers to the depth of the deepest part of the main groove 61 of the liquid flow path.

As shown in FIG. 19, each liquid channel connecting groove 65 extends in a direction different from the X direction. In the present embodiment, each liquid flow channel connecting groove 65 is formed to extend in the Y direction, and is formed to be perpendicular to the liquid flow channel main groove 61 . The plurality of liquid flow channel coupling grooves 65 are arranged so that the adjacent liquid flow channel main grooves 61 communicate with each other. The other liquid channel connecting groove 65 is arranged so that the vapor channel part 50 (steam channel 51 ) communicates with the liquid channel main channel 61 closest to the vapor channel part 50 . That is, the liquid channel connection groove 65 extends from the end side of the island portion 33 in the Y direction to the liquid channel main channel 61 adjacent to the end. In this way, the vapor passage 51 of the vapor passage portion 50 communicates with the liquid passage main groove 61 .

The liquid channel connection groove 65 has a channel cross-sectional area smaller than that of the steam channel 51 of the steam channel part 50, and is mainly used for the flow of the working fluid 2b by capillary action. The liquid channel connection grooves 65 may also be arranged at equal intervals in the longitudinal direction (X direction) of the island portion 33 .

The liquid channel coupling groove 65 is also formed by etching similarly to the liquid channel main channel 61 , and has a curved wall surface (not shown) similar to the liquid channel main channel 61 . As shown in FIG. 19, the width w4 (dimension in the X direction) of the liquid channel connecting groove 65 can be set to be 5 μm or more and 300 μm or less. The depth of the liquid channel connection groove 65 can be set to not less than 3 μm and not more than 240 μm.

The liquid flow main channel 61 includes a liquid flow intersection 66 communicating with the liquid flow connection groove 65 . At the intersection portion 66 of the liquid flow path, the liquid flow path main groove 61 communicates with the liquid flow path connecting groove 65 in a T-shape. In this case, one liquid flow channel main channel 61 communicates with the liquid channel connecting groove 65 on one side (for example, the upper side in FIG. 19 ) at the liquid channel intersection portion 66 . Thereby, it is possible to prevent the liquid flow channel coupling groove 65 on the other side (for example, the lower side in FIG. 19 ) from communicating with the liquid flow channel main groove 61 at the liquid flow channel crossing portion 66 . Thereby, at the liquid flow path intersection portion 66 , the wall surface 62 of the liquid flow path main channel 61 is not cut on both sides in the Y direction, and one side of the wall surface 62 remains. Therefore, capillary action can also be given to the working fluid 2b in the liquid flow channel main groove 61 at the liquid flow path intersection 66, thereby suppressing the propulsive force of the working fluid 2b toward the evaporation region SR on the liquid flow path intersection 66. down.

As shown in FIG. 19 , rows of convex portions 63 are provided between adjacent liquid flow channel main grooves 61 of the liquid flow channel portion 60 . In addition, in the example shown in FIG. 19, the case where seven convex part rows 63 are included in each island part 33 was mentioned as an example, but it is not limited to this. The number of convex portion rows 63 included in each island portion 33 is arbitrary, for example, it can be set to 3 or more and 20 or less.

As shown in FIG. 19 , each convex portion row 63 is formed to extend along the longitudinal direction (X direction) of the island portion 33 . The plurality of convex portion rows 63 are arranged in parallel to each other. Furthermore, when the island portion 33 is curved in a plan view, each convex portion row 63 may also extend in a curved shape along the bending direction of the island portion 33 . That is, each protrusion row 63 does not necessarily have to be formed in a straight line, and it does not need to extend parallel to the X direction. The respective protrusion rows 63 are arranged at intervals from each other in the width direction (Y direction).

Each convex portion row 63 includes a plurality of convex portions 64a to 64g (liquid channel protrusions) arranged along the X direction, respectively. The protrusions 64a to 64g are arranged in the order of protrusion 64a, protrusion 64b, protrusion 64c, protrusion 64d, protrusion 64e, protrusion 64f, and protrusion 64g from the positive side in the Y direction toward the negative side in the Y direction. Among them, the convex portions 64a and 64g are located closest to the vapor flow path portion 50 (steam passage 51 ), and are located on the outermost side of the liquid flow path portion 60 in the Y direction. Moreover, the convex part 64d is located in the position farthest from the steam flow path part 50 (steam passage 51), and is located in the innermost side of the liquid flow path part 60 in the Y direction.

The protrusions 64 a to 64 g are provided in the liquid channel portion 60 , protrude from the liquid channel main groove 61 and the liquid channel connection groove 65 , and come into contact with the upper sheet 20 . Each convex part 64a-64g is formed in rectangular shape so that X direction may become a longitudinal direction in planar view. The liquid channel main groove 61 is respectively arrange|positioned between convex parts 64a-64g mutually adjacent to a Y direction. The liquid channel connection groove 65 is respectively arrange|positioned between the convex parts 64a-64g mutually adjacent to a X direction. The liquid flow channel coupling groove 65 is formed to extend in the Y direction, so that the liquid flow channel main grooves 61 adjacent to each other in the Y direction communicate with each other. Thereby, the working fluid 2b can travel between the main grooves 61 of the liquid flow path.

The protrusions 64 a to 64 g are parts where the material of the capillary structure sheet 30 remains without being etched in the etching step of manufacturing the capillary structure sheet 30 . In this embodiment, as shown in FIG. 19 , the planar shape of the protrusions 64 a to 64 g (the shape at the position of the second main body surface 31 b of the capillary structure sheet 30 ) is rectangular.

As shown in FIG. 19 , the widths of the convex portions 64a to 64g are not all equal among the respective convex portions 64a to 64g. Specifically, the convex portions 64a, 64g (hereinafter, also referred to as convex portions 64a, 64g) of the convex portion row 63 closest to the steam flow path portion 50 (steam passage 51) are wider than the convex portions of the other convex portion rows 63. The widths of 64b to 64f (hereinafter also referred to as convex portions 64b to 64f) are narrow. That is, when the widths of the convex portions 64a to 64g are w5a to w5g, respectively, the widths w5a and w5g of the convex portions 64a and 64g are narrower than the widths w5b to w5f of the convex portions 64b to 64f (w5a, w5g<w5b to w5f). Furthermore, in this embodiment, the widths of the plurality of convex portions included in the same convex portion row 63 are equal to each other.

In FIG. 19, the widths w5a, w5g of the convex portions 64a, 64g of the convex portion rows 63 positioned outside the width direction of each liquid flow path portion 60 are equal to each other, and the convex portion rows positioned inside the width direction of each liquid flow path portion 60 are equal to each other. The widths w5b to w5f of the protrusions 64b to 64f of 63 are equal to each other. That is, the relationship of w5a=w5g<w5b=w5c=w5d=w5e=w5f holds true. However, it is not limited thereto, and the widths w5a, w5g of the convex portions 64a, 64g may be different from each other. In addition, the widths w5b to w5f of the protrusions 64b to 64f may be different from each other. However, it is preferable that the wider one of the widths w5a, w5g of the convex parts 64a, 64g is narrower than the narrowest one of the widths w5b-w5f of the convex parts 64b-64f.

The widths w5a, w5g of the convex parts 64a, 64g are preferably 0.3 times to 0.95 times the widths w5b-w5f of the convex parts 64b-64f. By setting the above magnification to 0.3 times or more, the shapes of the convex portions 64a and 64g can be produced stably. On the other hand, when the above magnification is 0.95 or less, the working fluid 2b can be evaporated and condensed smoothly between the vapor passage 51 and the main groove 61 of the liquid flow passage. In addition, the working fluid 2b can easily flow from the liquid flow channel main groove 61 located on the widthwise outer side of each liquid channel portion 60 to the liquid flow channel main groove 61 located on the widthwise inner side.

In addition, the width w5a-w5g of the convex parts 64a-64g means the length of the direction perpendicular|vertical to the longitudinal direction of the island part 33, and in this case, it means the dimension in the Y direction. Moreover, the width w5a-w5g of the convex parts 64a-64g means the dimension in the 2nd main body surface 31b. Furthermore, the widths w5a, w5g of the protrusions 64a, 64g located outside the width direction of each liquid channel portion 60 may be, for example, not less than 1.5 μm and not more than 475 μm. The widths w5b to w5f of the protrusions 64b to 64f located on the inner side in the width direction of each liquid channel portion 60 may be, for example, not less than 5 μm and not more than 500 μm.

The arrangement pitch of the convex parts 64a-64g in the width direction (Y direction) of the convex parts 64a-64g is uneven among each convex part 64a-64g. That is, the arrangement pitch P1 of the convex portion 64a (64g) closest to the steam flow path portion 50 (steam passage 51) and the convex portion 64b (64f) adjacent to the convex portion 64a in the Y direction is larger than that of the other convex portions 64b to 64f. The arrangement pitch P2 is narrow (P1<P2). Here, the arrangement pitch of the protrusions 64a to 64g is the distance between the center of the protrusions 64a to 64g in the Y direction and the center of the adjacent protrusions 64a to 64g in the Y direction, and refers to the distance measured in the Y direction. The arrangement pitch P1 of the protrusions 64a ( 64g ) and the protrusions 64b ( 64f ) may be, for example, not less than 30 μm and not more than 800 μm. The arrangement pitch P2 between the other protrusions 64b to 64f may be, for example, not less than 35 μm and not more than 1000 μm. Furthermore, it is not limited thereto, and the arrangement pitches in the width direction of the protrusions 64 a to 64 g may be uniform among all the protrusions 64 a to 64 g.

In this embodiment, the convex parts 64a-64g are arrange|positioned in a shift shape (staggered). More specifically, the convex parts 64a-64g of the convex part row 63 mutually adjacent to a Y direction are mutually shifted and arrange|positioned in a X direction. The offset can be half of the arrangement pitch of the protrusions 64 a - 64 g in the X direction. Furthermore, the arrangement of the protrusions 64a to 64g is not limited to the offset shape, and they may be arranged side by side. In this case, the convex parts 64a-64g of the convex part row 63 adjacent to each other in the Y direction are aligned also in the X direction (refer FIG. 26).

The length L1 (dimension in the X direction) of the protrusions 64a to 64g may be equal to each other among the protrusions 64a to 64g. In addition, the length L1 of the protrusions 64a to 64g is longer than the width w4 of the liquid channel connection groove 65 (L1>w4). In addition, the length L1 of the convex parts 64a-64g means the maximum dimension of the X direction in the 2nd main body surface 31b.

The steam chamber 1 and capillary structure sheet 30 of this embodiment can be produced in the same manner as in the first embodiment (see FIG. 10 ).

Next, the action of this embodiment including such a configuration will be described.

In the evaporation region SR, the actuating vapor 2 a generated from the actuating fluid 2 b moves from the liquid flow path portion 60 toward the vapor passage 51 . At this time, the operating vapor 2a flows out from the liquid channel main groove 61 to the steam channel 51 through the liquid channel connection groove 65 adjacent to the widthwise outer protrusions 64a and 64g of each liquid channel portion 60 . On the other hand, in the condensation region CR, the working fluid 2 b generated from the working steam 2 a moves from the steam passage 51 toward the liquid flow path portion 60 . At this time, the working fluid 2b enters the liquid flow path main flow groove 61 through the liquid flow path connection groove 65 adjacent to the widthwise outer convex portions 64a, 64g of each liquid flow path portion 60 .

In this embodiment, among the plurality of convex portions 64a-64g, the width w5a, w5g of the convex portions 64a, 64g of the convex portion row 63 closest to the steam passage 51 is larger than the width of the convex portion 64b-64f of the other convex portion rows 63 w5b～w5f are narrow. Therefore, the length (distance in the Y direction) of the liquid channel connection groove 65 adjacent to the convex parts 64a and 64g becomes short, and the flow channel resistance of the liquid channel connection groove 65 becomes low. Thereby, the flow path resistance outside the width direction (Y direction) of the liquid flow path portion 60 can be suppressed, so that the working steam 2a or the working liquid 2b can smoothly flow out or flow in between the steam path 51 and the liquid flow path portion 60 . As a result, the condensation of the working steam 2a and the evaporation of the working fluid 2b between the steam passage 51 and the liquid channel portion 60 can proceed smoothly, thereby improving the cooling capacity of the steam chamber 1 .

Also, according to the present embodiment, the difference between the convex portions 64a, 64g of the convex portion row 63 closest to the steam flow path portion 50 (steam passage 51) and the convex portion row 63 adjacent to the convex portion row 64a, 64g of the convex portion row 63 The arrangement pitch P1 of the protrusions 64 b and 64 f is narrower than the arrangement pitch P2 between the protrusions 64 b to 64 f of the other protrusion rows 63 . Thereby, capillary force can be easily generated on the working fluid 2b in the liquid flow channel main groove 61 close to the steam flow channel portion 50 (steam channel 51).

In addition, according to the present embodiment, the width w3 of the plurality of liquid channel main grooves 61 is equal to each other. Thereby, the capillary force exerted on the working fluid 2 b can be equalized in the width direction of the liquid channel portion 60 .

(variation example) Next, various modification examples of this embodiment will be described with reference to FIGS. 20 to 26 . 20 to 26 are diagrams showing capillary structure sheets 30 of modified examples, respectively. In FIGS. 20 to 26 , the same reference numerals are assigned to the same parts as those shown in FIGS. 1 to 19 , and detailed description thereof will be omitted.

(1st modification example) In the above-mentioned embodiment, the example in which the width w3 of the plurality of liquid flow channel main grooves 61 is equal to each other among the respective liquid flow channel main grooves 61 has been described. However, it is not limited thereto, and the widths of the main channels 61 of the liquid channels may also be uneven among the main channels 61 of the liquid channels.

For example, as shown in Fig. 20 and Fig. 21 in the first modification example, the width w3a of the main channel 61a of the liquid channel closest to the vapor channel part 50 (steam channel 51) is wider than that of the main channel 61b of the other liquid channels. Width w3b wide. In this case, the width w3a of the two liquid passage main grooves 61a closest to the vapor passage portion 50 (steam passage 51) is equal to each other, and the width w3b of the other four liquid passage main grooves 61b is equal to each other. The width w3a of the main channel groove 61a of the liquid channel is preferably at least 1.1 times and not more than 1.6 times the width w3b of the main channel channel 61b of the liquid channel. By setting the magnification above 1.1, the capillary force in the main flow groove 61b of the liquid channel in the center can be increased, and the working fluid 2b can be easily transported toward the evaporation region SR. By setting the magnification to 1.6 or less, it is possible to suppress a reduction in the delivery amount of the working fluid 2b in the liquid flow channel main groove 61b located inside the width direction of each liquid flow channel portion 60 .

Also, as shown in FIG. 20 , the depth h1a of the main channel groove 61a of the liquid channel closest to the steam channel portion 50 (steam passage 51 ) may be deeper than the depth h1b of the main channel grooves 61b of the other liquid channels.

In this variation example, among the plurality of convex portions 64a-64g, the width w5a, w5g of the convex portions 64a, 64g of the convex portion row 63 closest to the steam passage 51 is also wider than that of the convex portion 64b-64f of the other convex portion rows 63. The width w5b to w5f is narrow. Therefore, the length (distance in the Y direction) of the liquid channel connection groove 65 adjacent to the convex parts 64a and 64g becomes short, and the flow channel resistance of the liquid channel connection groove 65 becomes low. Thereby, the flow path resistance outside the width direction (Y direction) of the liquid flow path portion 60 can be suppressed, and the working steam 2 a or the working fluid 2 b can flow out or flow smoothly between the steam path 51 and the liquid flow path portion 60 . As a result, the condensation of the working steam 2a and the evaporation of the working fluid 2b between the steam passage 51 and the liquid channel portion 60 can proceed smoothly, thereby improving the cooling capacity of the steam chamber 1 .

Thus, according to the first modification example, the width w3a of the main flow groove 61a of the liquid flow path located on the outer side in the width direction of each liquid flow path portion 60 is wider than the width w3b of the main flow groove 61b of the other liquid flow path. Thereby, even when the flow of the working fluid 2b from the liquid flow channel main groove 61a positioned on the widthwise outer side of each liquid flow path portion 60 toward the liquid flow path main groove 61b positioned on the widthwise inner side stagnates, the flow from the vapor flow can be transferred. The condensed working fluid 2b of the passage portion 50 is stored in the main groove 61a of the wide liquid flow passage. Therefore, the working fluid 2b can be smoothly condensed from the vapor flow path portion 50 toward the liquid flow path portion 60 . As a result, the air pressure difference between the vicinity of the evaporation region SR and the condensation region CR can be maintained, thereby suppressing a decrease in the cooling capacity of the vapor chamber 1 .

(the second modification example) In the above-mentioned embodiment, an example was described in which the widths w5a, w5g of the convex portions 64a, 64g of the convex portion row 63 positioned outside the width direction of each liquid flow path portion 60 are equal to each other, and the widths w5a, w5g of the convex portion rows 63 located outside each liquid flow path portion 60 are described. The widths w5b to w5f of the convex portions 64b to 64f of the convex portion row 63 on the inner side in the width direction of the portion 60 are equal to each other. However, the present invention is not limited thereto, and the widths of the convex portions 64a to 64g may also be gradually changed from the convex portion 64a, 64g closest to the steam flow path portion 50 (steam passage 51) toward the convex portion 64d located on the inside in the width direction. .

For example, in the second variation shown in FIGS. 22 and 23 , among the plurality of convex portions 64 a to 64 g, the convex portions 64 a and 64 g of the convex portion row 63 closest to the steam flow path portion 50 (steam passage 51 ) The widths w5a, w5g are the narrowest. Moreover, the width w5d of the convex part 64d of the convex part row 63 located in the innermost side in the width direction is the widest. The width w5b, w5f of the protrusions 64b, 64f is wider than the width w5a, w5g of the protrusions 64a, 64g, and the width w5c, w5e of the protrusions 64c, 64e is wider than the width w5b, w5f of the protrusions 64b, 64f. That is, the relationships of w5a, w5g<w5b, w5f<w5c, and w5e<w5d are established.

In Fig. 22 and Fig. 23, the widths w5a, w5g of the protrusions 64a, 64g located outside the width direction of each liquid channel part 60 are equal to each other, and the widths w5b, w5f of the protrusions 64b, 64f are equal to each other. Moreover, width w5c, w5e of convex part 64c, 64e is mutually equal. That is, the relationship of w5a=w5g<w5b=w5f<w5c=w5e<w5d holds true. However, it is not limited thereto, and the widths w5a, w5g of the convex parts 64a, 64g may be different from each other. Moreover, width w5b, w5f of convex part 64b, 64f may mutually differ from each other. In addition, the widths w5c and w5e of the convex parts 64c and 64e may be different from each other.

The widths w5b to w5f of the respective convex portions 64b to 64f are preferably 1.1 to the widths w5a to w5c and w5e to w5g of the convex portions 64a to 64c and 64e to 64g adjacent to the widthwise outer sides of the liquid channel portion 60 . Times more than 1.5 times. That is, it is preferable that the width w5b, w5f of the convex part 64b, 64f is 1.1 times or more and 1.5 times or less of the width w5a, w5g of the convex part 64a, 64g. Moreover, it is preferable that the width w5c, w5e of the convex part 64c, 64e is 1.1 times or more and 1.5 times or less of the width w5b, w5f of the convex part 64b, 64f. Moreover, it is preferable that the width w5d of the convex part 64d is 1.1 times or more and 1.5 times or less of the width w5c of the convex part 64c, 64e, and w5e.

Specifically, the widths w5a, w5g of the protrusions 64a, 64g may be, for example, not less than 1.5 μm and not more than 430 μm. The width w5b, w5f of the protrusions 64b, 64f may be, for example, not less than 1.5 μm and not more than 450 μm. The width w5c, w5e of the protrusions 64c, 64e may be, for example, not less than 1.5 μm and not more than 475 μm. The width w5d of the convex portion 64d may be, for example, not less than 5 μm and not more than 500 μm.

In Fig. 22 and Fig. 23, the width w3 of the main channel 61 of the liquid flow path is all equal to each other. However, it is not limited thereto, and the widths of the main channels 61 of the liquid channels may also be uneven among the main channels 61 of the liquid channels.

Thus, according to the second modification, the width of the convex portions 64a to 64g is from the convex portions 64a, 64g of the convex portion row 63 closest to the steam flow path portion 50 (steam passage 51) toward the convex portion row located on the innermost side in the width direction. The convex portion 64d of 63 becomes wider gradually. Thereby, the flow path resistance of the liquid flow path connection groove 65 outside the width direction (Y direction) of the liquid flow path portion 60 can be suppressed compared with the flow path resistance of the liquid flow path connection groove 65 positioned inside the width direction. Therefore, the working steam 2a or the working fluid 2b can be smoothly flowed out or in between the steam passage 51 and the liquid flow passage portion 60 . As a result, the condensation of the working steam 2a and the evaporation of the working fluid 2b between the steam passage 51 and the liquid channel portion 60 can proceed smoothly, thereby improving the cooling capacity of the steam chamber 1 .

Also, when the working fluid 2b is water, the water freezes and expands when the temperature of the steam chamber 1 reaches below freezing point. Since the pressure of water expansion is relatively high, it is feared that the housing H will bulge when subjected to pressure bulging in the thickness direction of the steam chamber 1 . At the same time, there is a concern that the convex portions 64 a to 64 g are peeled off, stretched or torn from the land portion 33 . According to this modification, the width of the plurality of convex portions 64a to 64g is from the convex portion 64a, 64g closest to the convex portion row 63 of the vapor flow path portion 50 toward the convex portion row 63 located on the inner side of the liquid flow path portion 60 in the width direction. The convex portion 64d gradually becomes wider. Thereby, the pressure when the water expands in the inner liquid channel portion 60 (for example, the periphery of the convex portion 64d) is released relatively easily toward the direction of the steam passage 51, thereby suppressing the swelling of the convex portions 64a to 64g during freezing and expansion. out of shape.

(3rd modification example) In the above-mentioned present embodiment, an example has been described in which the widths w5a, w5g of the convex portions 64a, 64g of the convex portion row 63 positioned outside the width direction of each liquid channel portion 60 are equal to each other and positioned inside the width direction. The widths w5b to w5f of the convex portions 64b to 64f of the convex portion row 63 are equal to each other. However, it is not limited to this, and the width of the convex portions 64a, 64g of the convex portion row 63 closest to the steam flow path portion 50 (steam passage 51) may be the same as the width of the second closest to the steam flow path portion 50 (steam passage 51). The widths of the protrusions 64b, 64f of the protrusion row 63 are equal to each other.

For example, in the third modification example shown in FIGS. 24 and 25 , among the plurality of convex portions 64 a to 64 g, the convex portions 64 a and 64 g of the convex portion row 63 closest to the steam flow path portion 50 (steam passage 51 ) The widths w5a, w5g and the widths w5b, w5f of the convex portions 64b, 64f of the convex portion row 63 of the second proximate steam flow path portion 50 (steam passage 51) are narrowed. In addition, the widths w5c to w5e of the convex portions 64c to 64e of the convex portion row 63 positioned on the inner side in the width direction become wider. That is, the relationship of w5a, w5b, w5f, and w5g>w5c to w5e is established.

In FIG. 24 and FIG. 25 , the widths w5a, w5b, w5f, and w5g of the protrusions 64a, 64b, 64f, and 64g are equal to each other, and the widths w5c-w5e of the protrusions 64c-64e are equal to each other. That is, the relationship of w5a=w5b=w5f=w5g<w5c=w5d=w5e holds true. However, it is not limited thereto, and the widths w5a, w5b, w5f, and w5g of the convex portions 64a, 64b, 64f, and 64g may be different from each other. In addition, the widths w5c to w5e of the convex parts 64c to 64e may be different from each other.

In this manner, according to the third modification, two pairs (four) of narrower convex portions 64a, 64b, 64f, and 64g are provided. In this way, especially the flow path resistance outside the width direction (Y direction) of the liquid flow path portion 60 can be suppressed, so that the working steam 2a or the working liquid 2b can smoothly flow out or flow between the steam path 51 and the liquid flow path portion 60 . inflow. As a result, the condensation of the working steam 2a and the evaporation of the working fluid 2b between the steam passage 51 and the liquid channel portion 60 can proceed smoothly, thereby improving the cooling capacity of the steam chamber 1 .

(4th modification example) In the above-mentioned embodiment, the example in which the protrusions 64a to 64g are arranged in a shifted shape has been described. However, it is not limited to this, and as shown in FIG. 26, the convex parts 64a-64g may be arrange|positioned in grid dot shape. Specifically, when a point located at the center of the convex portions 64a to 64g in the X direction and the Y direction is defined as the center point Pc, the center points Pc of the plurality of convex portions 64a to 64g are arranged in a grid pattern. That is, the center point Pc of several convex parts 64a-64g is arrange|positioned in parallel to X direction and Y direction, respectively. In this case, the flow path resistance of the liquid flow path connecting groove 65 on the outside of the liquid flow path portion 60 in the width direction (Y direction) can be suppressed, so that the working steam 2a or the working fluid 2b can smoothly flow between the steam path 51 and the liquid. Flow out or flow in between the flow path parts 60 .

The present invention is not limited to the above-mentioned embodiments and modifications themselves, and the constituent elements can be changed and realized in a range that does not deviate from the gist at the stage of implementation. In addition, various inventions can be formed by appropriate combinations of a plurality of constituent elements disclosed in the above-described embodiments and modifications. It is also possible to delete some constituent elements from all the constituent elements shown in each embodiment and each variation.

1: steam chamber 2a: Actuating fluid 2b: Actuating fluid 3: sealed space 4: Injection part 10: Lower side sheet 10a: 1st lower side sheet surface 10b: Second lower sheet surface 12: Alignment hole 20: Upper sheet 20a: 1st upper sheet surface 20b: the second upper sheet surface 22: Alignment hole 30: capillary structure sheet 31a: 1st Body Plane 31b: 2nd Body Face 32: frame part 33: Island Department 35: Alignment hole 37: Injection flow path 39: Support Department 50:Steam flow path 51: Vapor passage 53a: the first wall 54a: Second wall 55: protrusion 60: Liquid flow path 61: Main channel of liquid flow path 61a～61f: Main channel of liquid flow path 62: wall 63: Convex row 64: Convex 64a～64g: convex part 65: liquid flow path connection groove 66: Intersection of liquid flow path CR: condensation area D: device E: electronic equipment H: shell Ha: shell member h1: depth h1a: Depth h1b: depth h1c: depth L1: Length M: metal material sheet Ma: 1st material side Mb: Second material side P1: Arrangement pitch P2: Arrangement pitch P3: Distance between centers P4: Arrangement spacing Pc: center point SR: evaporation area TD: Touch Panel Display t1: Thickness t2: Thickness t3: Thickness t4: Thickness t5: distance w1: width w2: width w3: width w3a～w3f: width w4: width w5: width w5a～w5g: width X: direction Y: Direction Z: Direction

FIG. 1 is a schematic perspective view illustrating an electronic device according to a first embodiment. Fig. 2 is a plan view showing the steam chamber of the first embodiment. Fig. 3 is a sectional view showing the line III-III of the steam chamber in Fig. 2 . Fig. 4 is a top view of the lower side sheet of Fig. 3 . Fig. 5 is a bottom view of the upper side sheet in Fig. 3 . FIG. 6 is a top view of the capillary structure sheet in FIG. 3 . Fig. 7 is a bottom view of the capillary structure sheet of Fig. 3 . FIG. 8 is a partially enlarged cross-sectional view of FIG. 3 . Fig. 9 is a partially enlarged plan view of the liquid flow path shown in Fig. 6 . 10( a )-( c ) are diagrams for explaining the manufacturing method of the steam chamber of the first embodiment. Fig. 11 is a partially enlarged cross-sectional view showing a liquid channel portion of a first modification example of the first embodiment. Fig. 12 is a partially enlarged plan view showing a liquid channel portion of a first modification example of the first embodiment. Fig. 13 is a partially enlarged cross-sectional view showing a liquid channel portion of a second modification example of the first embodiment. Fig. 14 is a partially enlarged plan view showing a liquid channel portion of a second modified example of the first embodiment. Fig. 15 is a partially enlarged cross-sectional view showing a liquid channel portion of a third modification example of the first embodiment. Fig. 16 is a partially enlarged plan view showing a liquid channel portion of a third modification example of the first embodiment. Fig. 17 is a partially enlarged plan view showing a liquid channel portion of a fourth modification example of the first embodiment. Fig. 18 is a partially enlarged cross-sectional view of the steam chamber of the second embodiment. Fig. 19 is a partial enlarged plan view of the liquid channel portion of the capillary structure sheet according to the second embodiment. Fig. 20 is a partially enlarged cross-sectional view showing a liquid channel portion of a first modification example of the second embodiment. Fig. 21 is a partially enlarged plan view showing a liquid channel portion of a first modification example of the second embodiment. Fig. 22 is a partially enlarged cross-sectional view showing a liquid channel portion of a second modified example of the second embodiment. Fig. 23 is a partially enlarged plan view showing a liquid channel portion of a second modification example of the second embodiment. Fig. 24 is a partially enlarged cross-sectional view showing a liquid channel portion of a third modification example of the second embodiment. Fig. 25 is a partially enlarged plan view showing a liquid channel portion of a third modification example of the second embodiment. Fig. 26 is a partially enlarged plan view showing a liquid channel portion of a fourth modification example of the second embodiment.

1: steam chamber

10: Lower side sheet

10a: 1st lower side sheet surface

10b: Second lower sheet surface

20: Upper sheet

20a: 1st upper sheet surface

20b: the second upper sheet surface

30: capillary structure sheet

31a: 1st Body Plane

31b: 2nd Body Face

33: Island Department

50:Steam flow path

51: Vapor passage

53a: the first wall

54a: Second wall

55: protrusion

60: Liquid flow path

61a~61f: Main channel of liquid flow path

62: wall

64: Convex

h1a: Depth

h1b: depth

t4: Thickness

t5: distance

w1: width

w2: width

Y: Direction

Z: Direction

Claims (22)

A steam chamber, which is sealed with an operating fluid, and has: 1st sheet; the second sheet; and a capillary structure sheet interposed between the first sheet and the second sheet; The above capillary structure sheet has: 1st Body Face; The second body surface, which is located on the opposite side of the above-mentioned first body surface; a steam flow path extending from the surface of the first body to the surface of the second body, through which the steam of the working fluid passes; and A liquid flow path part, which is provided on the surface of the second body, communicates with the vapor flow path part, and allows the above-mentioned operating fluid in liquid form to pass through; The liquid flow path portion has a plurality of liquid flow path main grooves arranged in parallel to each other through which the liquid working fluid passes, and Among the plurality of liquid flow path main grooves, the width of the liquid flow path main groove closest to the vapor flow path portion is wider than that of other liquid flow path main grooves. The steam chamber according to claim 1, wherein the width of the main groove of the liquid flow path closest to the steam flow path is at least 1.1 times and at least 1.6 times the width of the main grooves of the other liquid flow paths. The steam chamber according to claim 1 or 2, wherein the depth of the main groove of the liquid flow path closest to the above-mentioned steam flow path is deeper than the depth of the main grooves of the other liquid flow paths. The vapor chamber according to any one of Claims 1 to 3, wherein the distances between the centers of the plurality of main grooves in the liquid flow path in the width direction are equal to each other. The vapor chamber according to any one of Claims 1 to 4, wherein rows of protrusions are provided between the main grooves of the above-mentioned liquid flow paths adjacent to each other, and each row of protrusions has a plurality of protrusions, and The arrangement pitch of each convex portion in the longitudinal direction of the main channel of the liquid flow path is equal between each convex portion. The steam chamber according to claim 1, wherein the width of the plurality of liquid flow path main grooves is from the liquid flow path main groove closest to the above-mentioned steam flow path portion to the liquid flow path main groove located on the inner side of the liquid flow path portion in the width direction and gradually narrowed. A capillary structure sheet, which is a capillary structure sheet for a steam chamber, and has: 1st Body Face; The second body surface, which is located on the opposite side of the above-mentioned first body surface; a steam flow path extending from the surface of the first body to the surface of the second body for the steam of the working fluid to pass through; and A liquid flow path part, which is provided on the surface of the second body, communicates with the vapor flow path part, and allows the above-mentioned operating fluid in liquid form to pass through; The liquid flow path portion has a plurality of liquid flow path main grooves arranged in parallel to each other through which the liquid working fluid passes, and Among the plurality of liquid flow path main grooves, the width of the liquid flow path main groove closest to the vapor flow path portion is wider than that of other liquid flow path main grooves. The capillary structure sheet according to claim 7, wherein the width of the main channel of the liquid channel closest to the vapor channel part is at least 1.1 times and not more than 1.6 times the width of the main channels of the other liquid channels. The capillary structure sheet according to claim 7 or 8, wherein the depth of the main groove of the liquid flow path closest to the vapor flow path portion is deeper than the depth of the main grooves of the other liquid flow paths. The capillary structure sheet according to any one of claims 7 to 9, wherein the center-to-center distances in the width direction of the plurality of liquid channel main grooves are equal to each other. The capillary structure sheet according to any one of Claims 7 to 10, wherein rows of protrusions are provided between the adjacent main channels of the liquid flow path, and each row of protrusions has a plurality of protrusions, and The arrangement pitch of each convex portion in the longitudinal direction of the main channel of the liquid flow path is equal between each convex portion. The capillary structure sheet according to claim 7, wherein the width of the plurality of main channels of the liquid flow channel is from the main channel of the liquid flow channel closest to the vapor flow channel to the liquid channel located on the inner side of the liquid channel in the width direction The main channel gradually narrows. An electronic machine having: shell; a device housed within said housing; and The vapor chamber according to any one of claims 1 to 6, which is in thermal contact with the above-mentioned device. A steam chamber, which is sealed with an operating fluid, and has: 1st sheet; the second sheet; and a capillary structure sheet interposed between the first sheet and the second sheet; The above capillary structure sheet has: 1st Body Face; The second body surface, which is located on the opposite side of the above-mentioned first body surface; a steam flow path extending from the surface of the first body to the surface of the second body, through which the steam of the working fluid passes; and A liquid flow path part, which is provided on the surface of the second body, communicates with the vapor flow path part, and allows the above-mentioned operating fluid in liquid form to pass through; The liquid flow path portion has a plurality of liquid flow path main grooves arranged in parallel to each other through which the liquid-like working fluid passes, Rows of protrusions are provided between the main grooves of the liquid flow path adjacent to each other, and each row of protrusions has a plurality of protrusions, and The width of the convex portion of the convex portion row closest to the steam flow path portion is narrower than the width of the convex portion of the other convex portion rows. The steam chamber according to claim 14, wherein the arrangement pitch of the convex portion of the convex portion row closest to the above-mentioned steam flow path portion and the convex portion of the convex portion row adjacent to the convex portion row is smaller than that of the convex portion of the other convex portion row. The arrangement spacing is narrow. The steam chamber according to claim 14 or 15, wherein among the plurality of liquid flow channel main channels, the width of the liquid flow channel main channel closest to the steam flow channel part is wider than the width of other liquid flow channel main channel. The steam chamber according to claim 14, wherein the width of the plurality of protrusions increases from the protrusion in the row of protrusions closest to the steam flow path toward the protrusion in the row of protrusions located on the inner side of the liquid flow path in the width direction. Gradually widens. A capillary structure sheet, which is a capillary structure sheet for a steam chamber, and has: 1st Body Face; The second body surface, which is located on the opposite side of the above-mentioned first body surface; a steam flow path extending from the surface of the first body to the surface of the second body for the steam of the working fluid to pass through; and A liquid flow path part, which is provided on the surface of the second body, communicates with the vapor flow path part, and allows the above-mentioned operating fluid in liquid form to pass through; The liquid flow path portion has a plurality of liquid flow path main grooves arranged in parallel to each other through which the liquid-like working fluid passes, Rows of protrusions are provided between the main grooves of the liquid flow path adjacent to each other, and each row of protrusions has a plurality of protrusions, and The width of the convex portion of the convex portion row closest to the steam flow path portion is narrower than the width of the convex portion of the other convex portion rows. The capillary structure sheet according to claim 18, wherein the arrangement distance between the convex portion of the convex portion row closest to the above-mentioned steam flow path portion and the convex portion of the convex portion row adjacent to the convex portion row is higher than that of the other convex portion rows mentioned above The spacing between the parts is narrow. The capillary structure sheet according to claim 18 or 19, wherein among the plurality of liquid flow channel main channels, the width of the liquid flow channel main channel closest to the vapor flow channel part is wider than the other liquid flow channel main channel widths. The capillary structure sheet according to claim 18, wherein the width of the plurality of convex portions is from the convex portion closest to the convex portion row of the above-mentioned vapor flow path portion to the convex portion of the convex portion row located on the inner side of the liquid flow path portion in the width direction. and gradually widens. An electronic machine having: shell; a device housed within said housing; and A vapor chamber according to any one of claims 14 to 17, which is in thermal contact with the above-mentioned device.

Images