JP7041445B2 - A heat pipe that uses a refrigerant liquid conduction column and a refrigerant liquid conduction column - Google Patents

Description

The present invention comprises a refrigerant liquid conduction column that communicates with a refrigerant vapor conduction cavity that conducts the refrigerant vapor vaporized by the heat generated by the heat generating element, and a heat pipe that includes the refrigerant vapor conduction cavity and the refrigerant liquid conduction column. Is targeted.

A configuration of a heat pipe in which a wick, which is a porous metal plate, is fixed in a refrigerant liquid conduction pipe has been proposed. In such a heat pipe, the wick is communicated with the refrigerant liquid conduction pipe and the refrigerant liquid conduction pipe. When a configuration is adopted in which one end of the refrigerant steam conduction pipe is connected to a heat generating element fixed to a metal plate via a wick, the refrigerant liquid held in the wick is quickly vaporized. be able to.

In the heat pipe of Patent Document 1, in the refrigerant liquid conduction pipe (liquid pipe 26) communicating with the refrigerant steam conduction pipe (steam pipe 25), a metal wick (porous) in a porous state due to the distribution of through holes. The material 36) is arranged in the refrigerant liquid conduction pipe, and the flow paths 34y of the refrigerant liquid are formed on both sides thereof (FIG. 7 and paragraphs [0051] to [0054]).

However, in such a refrigerant liquid conduction pipe, the refrigerant liquid mainly conducts the flow path 34y, and as a result, it is impossible to sufficiently exhibit the capillary phenomenon in the wick in a porous state.
Even if attention is paid to the capillary phenomenon between the flow paths 34y, as shown in FIG. 7 of Patent Document 1, the state of the wick forms a flow path, not the direction in which the through holes face the flow paths on both sides. It is set in the direction facing the inner wall that is not.

In such a direction, it is not always guaranteed that the flow paths 34y on both sides communicate with each other through the through holes (holes 34a) that are sequentially laminated, and in the case of the above direction, it is not always guaranteed. Even the capillary phenomenon between the flow paths 34y cannot be sufficiently exhibited.

In the heat pipe of Patent Document 2, a porous state is formed by the distribution of through holes that are adjacent to the refrigerant vapor conduction cavity that conducts the refrigerant vapor vaporized by the heat generated by the heat generating element and that conduct the refrigerant liquid that is liquefied by the refrigerant vapor. A refrigerant liquid conduction column is adopted in which wicks made of metal plates are laminated and the refrigerant liquid conducts through holes by a capillary phenomenon along the stacking direction.

In such a configuration of Patent Document 2, efficient cooling can be sequentially realized through the through hole of the wick in which all the refrigerant liquid forms the capillary flow path.

However, the wick of Patent Document 2 has a configuration in which rectangular through holes formed by orthogonal flat frames intersect (FIGS. 7 (C) and 8 (A), (B)). For the flow along the stacking direction of the refrigerant liquid, effective cooling can be realized by the collision between the refrigerant liquid and each frame, but the flow direction of the refrigerant liquid is never limited to the stacking direction only. Not a little, it flows in the direction intersecting the stacking direction, that is, in the diagonal or orthogonal direction.

However, in the case of the configuration of Patent Document 2, the configuration that exerts an effective cooling effect is not performed due to the barrier against the flow in the direction intersecting the stacking direction.

As described above, in the prior art, in cooling the refrigerant liquid using the capillary phenomenon in the through hole along the stacking direction of the wick, an effective cooling effect is obtained after paying attention to the flow in the direction intersecting the stacking direction. The configuration of the refrigerant liquid conduction column and the heat pipe using the column has not been proposed.

International Publication No. 2015/087451 Japanese Patent No. 4119944

The present invention relates to a refrigerant liquid conduction configuration that forms a barrier against flow in a direction intersecting the stacking direction in a refrigerant liquid conduction configuration based on a capillary phenomenon through a through hole along the stacking direction of the wick. An object of the present invention is to provide a configuration of a heat pipe that employs this configuration.

In order to solve the above problems, the configuration of the present invention is based on the following basic configuration (1) refrigerant liquid conduction column and basic configuration (2) heat pipe.
(1) Due to a metal plate that is adjacent to the refrigerant vapor conduction cavity that conducts the refrigerant vapor vaporized by the heat generated by the heat generating element and forms a porous state by the distribution of through holes that conduct the liquefied refrigerant liquid. In the refrigerant liquid conduction column in which the wicks are laminated and the refrigerant liquid conducts the through holes by the capillary phenomenon along the stacking direction, each through hole is divided and each through hole is surrounded by the frame of the wick. A refrigerant liquid conduction column in which a protrusion in a direction intersecting the surface direction is projected and the protrusion is fitted into each through hole of an adjacent wick in the stacking direction.
(2) The refrigerant vapor conduction cavities surround the plurality of refrigerant liquid conduction columns of (1) above, and both ends of the plurality of refrigerant liquid conduction columns are formed on two metal plates on both sides. On the other hand, the refrigerant steam conduction cavity is in contact with the metal plates on both sides via one or a plurality of wicks connected to the wicks in the adjacent refrigerant liquid conduction columns, and is in contact with the metal plates on both sides. A heat pipe in which one or more heat generating elements are planned to be arranged on one side of a metal plate.

In the refrigerant liquid conduction column of the basic configuration (1), not only the collision with the frame in the flow due to the capillary phenomenon of the refrigerant liquid along the stacking direction, but also the protrusions protruding from each frame are the stacking of the refrigerant liquid. A state of collision with a direction intersecting the direction can be realized, and as a result, an efficient cooling effect can be exhibited in the heat pipe of the basic configuration (2).

The arrangement relationship in the stacking of wicks is shown, and as shown in an Example, it is a perspective view which shows the arrangement relationship of two wicks manufactured from one metal plate. The arrangement relationship in the stacking of the wicks is shown, and as in the case of FIG. 1 (a), the wicks in the embodiment of the laminated state in which the protrusions of the wicks adjacent to each other in the stacking direction form the opposite directions. It is a side sectional view of the refrigerant liquid conduction column with respect to the AA direction in the plan view and the plan view. It shows the arrangement relationship in the stacking of wicks, and is based on the plan view of the wicks and the AA direction in the plan view in the embodiment of the laminated state in which the protrusions of the wicks adjacent to each other in the stacking direction form the same direction. It is a side sectional view of the refrigerant liquid conduction column. It is a side sectional view of the embodiment which shows the cross-sectional shape of each protrusion along the plane direction of each wick, (a) shows the case of a circular cross section, (b) shows the case of a square cross section, ( c) shows the case of a rectangular cross section, and (d) shows the case of a cross-shaped cross section. A typical embodiment of the heat pipe of the basic configuration (2) is shown, and (a) is a sketch showing a part of the entire configuration by a section of a metal plate on both sides by a square (provided that it is a section). , A state in which the metal plate on the other side is excluded from the two metal plates on both sides.), (B) is a cross-sectional view in the stacking direction in a part of the region along the AA direction of (a). Yes, (c) is a cross-sectional view of the stacking direction in a partial region along the BB direction of (a), and (d) is a stacking in a partial region along the CC direction of (a). It is a direction sectional view. It is a plan view along the entire plane direction of the heat pipe along the plane direction of the wick according to the division between the region where the refrigerant liquid conduction columns are arranged and the region formed only by the refrigerant steam conduction cavity portion. A) shows an embodiment in which two rows of refrigerant liquid conduction columns are arranged on both sides of the heat pipe in the longitudinal direction in a direction orthogonal to the longitudinal direction, and (b) shows the longitudinal direction of the heat pipe. An embodiment in which a row of refrigerant liquid conduction columns are arranged in a direction orthogonal to the direction is shown. It is sectional drawing which shows the process of Example 1 which manufactures two wicks from one metal plate, (a) shows the step of sticking each resist to the back surface and the front surface of a metal plate, (b). ), (C), and (d) form through holes based on the repeated etching to sequentially remove the region other than the portion to which each resist is attached, and the outer end of each resist and the position in the vicinity thereof. The steps to be performed are shown, and (e) shows the steps to remove each resist. 2A is a side sectional view showing a process of manufacturing a heat pipe based on the embodiment of FIG. 4B and with reference to the direction AA, and FIG. 4A is a side showing the following steps. It is a sectional view. (1). A plurality of refrigerant liquid conduction columns in which a refrigerant liquid injection pipe is fixed to at least one refrigerant liquid conduction column, metal plates on both sides having protrusions for contacting the wick, and the plurality of refrigerants. Arrangement of the wall part surrounding each refrigerant steam conduction cavity surrounding each refrigerant liquid conduction column of the liquid conduction column, and each wall part surrounding each metal plate on both sides. (2). The wall portion surrounding the refrigerant vapor conduction cavity surrounded by the plurality of refrigerant liquid conduction columns and each refrigerant liquid conduction column and the wall portions surrounding the metal plates on both sides are fixed, and the metal plates on both sides are convex. A heat pipe is formed by contacting the wicks located at both ends. (B) is a side sectional view showing the following steps. (1). Insertion of the heat pipe formed in (2) into the chamber, degassing of the chamber, and degassing of the heat pipe accompanying the degassing. (2). Injection of refrigerant from the injection needle inserted from outside the chamber to the refrigerant liquid injection pipe in the chamber. (3). After the injection of (2) above, the inlet end of the refrigerant liquid injection pipe in the chamber is sealed with a sealing material.

First, the refrigerant liquid conduction column 1 of the basic configuration (1) will be described.
The basic configuration (1) is adjacent to the refrigerant vapor conduction cavity 10 that conducts the refrigerant vapor vaporized by the heat generated by the heat generating element H, and the porous state is maintained by the distribution of the through holes 3 that conduct the refrigerant liquid liquefied by the refrigerant vapor. The refrigerant liquid conduction column described in Patent Document 2 is a refrigerant liquid conduction column 1 in which the wick 2 made of the formed metal plate is laminated and the refrigerant liquid conducts the through hole 3 along the stacking direction by a capillary phenomenon. Is common with.

However, in the basic configuration (1), each through hole 3 is divided, and a protrusion 22 in a direction intersecting the surface direction of the wick 2 is projected from each frame 21 surrounding each through hole 3. It is different from the case described in Patent Document 2 in that the protrusion 22 is fitted into each through hole 3 of the wick 2 adjacent to each other in the stacking direction.

With such a configuration, the flow component in the direction intersecting the stacking direction in the refrigerant liquid flowing through each through hole 3 by the capillary phenomenon improves the capillary force for each wick 2 by colliding with the protrusion 22. The cooling effect can be sufficiently promoted.

In the basic configuration (1) relating to the protrusion of the protrusion 22, normally, as shown in FIG. 1A, the shape of the through hole 3 formed by each frame 21 is rectangular, and the protrusion 22 is a frame. An embodiment is adopted in which the projection 22 is formed at an intersecting position of the sides constituting the body 21 and the position where the protrusion 22 is fitted is the center position of the other frame 21 adjacent to each other in the stacking direction. ..

FIG. 1 (a) is based on the manufacturing process of the embodiment described later, but based on such a manufacturing process, in the above-described embodiment, as shown in FIG. 1 (b), they are adjacent to each other in the stacking direction. It is possible to obtain a configuration in which the projecting directions of the protrusions 22 in each of the wicks 2 that meet each other are in opposite directions.

However, in the above-described embodiment, as shown in FIG. 1 (c), a configuration characterized in that the protrusions 22 of the wicks 2 adjacent to each other in the stacking direction are in the same direction is also adopted. Can be done.

In the configuration of FIG. 1 (b), the end portion of the frame 21 is cut along the plane direction of the wick 2 and the facing directions of the protrusions 22 are arranged in the same direction. Can be realized by.

Various shapes can be adopted for the shape of the protrusion 22 along the plane direction of the wick 2 in the basic configuration (1), but as a typical example, a circle as shown in FIG. 2A, (b). A square as shown in (c), a rectangle as shown in (c), and a cross shape as shown in (d) are adopted.

The cooling is performed in any of the arrangement states of the wicks 2 of FIGS. 1 (b) and 1 (c) and the protrusions 22 having the shapes of FIGS. 2 (a), (b), (c) and (d). It is possible to sufficiently realize the promotion of the effect.

As shown in FIG. 1A, the actual design dimension of the wick 2 having the square through hole 3 is that when the thickness of the frame 21 is designed to be 0.05 mm, the width of the frame 21 is 0. It is 1 mm, the width of the through hole 3 is 0.1 mm, the maximum diameter of the protrusion 22 is 0.1 mm, and the thickness of the protrusion 22 is also 0.05 mm. Further, when the thickness of the frame body 21 is halved to 0.025 mm, the width of the frame body 21 is 0.05 mm, the width of the through hole 3 is 0.05 mm, and the maximum diameter of the protrusion 22 is It can be 0.05 mm. Further, when the thickness of the frame body 21 is set to about 1/3 and 0.015 mm, the width of the frame body 21 is 0.03 mm, the width of the through hole 3 is 0.03 mm, and the maximum diameter of the protrusion 22. Can be 0.03 mm.

On the premise of such a design, when the final cooling effect is used as a reference, when the protrusion 22 is adopted, the plane direction of the wick 2 is compared with the case where the protrusion 22 is not adopted. The width and the width in the side cross-sectional direction orthogonal to the plane direction can be reduced to 1/3, and as a result, the capillary force can be further increased.

Next, the heat pipe of the basic configuration (2) will be described.

In the basic configuration (2), as shown in FIGS. 3 (a), (b), (c), and (d), the refrigerant vapor is formed around the plurality of refrigerant liquid conduction columns 1 of the basic configuration (1). The conduction cavity 10 is surrounded, and both ends of the plurality of refrigerant liquid conduction columns 1 are in contact with the two metal plates 4 on both sides, while the refrigerant steam conduction cavity 10 is adjacent to the refrigerant liquid. It is in contact with the metal plates 4 on both sides of the conduction column 1 via one or a plurality of wicks 2 connected to the wick 2.

Under the above connection, in the heat pipe of the basic configuration (2), one or a plurality of heat generating elements H are planned to be arranged on one side of the metal plates 4 on both sides.

In the basic configuration (2), the refrigerant steam conduction cavity 10 is connected to the metal plates 4 on both sides via one or a plurality of wicks 2 because of the communication through the wicks 2 to connect the refrigerant liquid. The purpose is to realize injection into the refrigerant liquid conduction column 1 and extraction from the refrigerant liquid conduction column 1.

Specifically, in the case of the wick 2 in contact with the metal plate 4 on which the heat generating element H is arranged, the refrigerant liquid is held, and the refrigerant liquid is sequentially supplied to the refrigerant steam conduction cavity 10 by the heat generation. In the case of the wick 2 which is evaporating and is in contact with the metal plate 4 on which the heat generating element H is not arranged, the refrigerant liquid liquefied by cooling is retained, and the refrigerant liquid is conducted by the capillary phenomenon. It is transmitted to the pillar 1 side.

In the heat pipe of the basic configuration (2), by adopting the refrigerant liquid conduction column 1 of the basic configuration (1), the heat generated by the heat generating element H can be efficiently cooled.

In FIG. 3A, four refrigerant liquid conduction columns 1 are arranged in a row on one side of the metal plates 4 on both sides by a square, and such a row is further arranged in a parallel state of three rows. Although the arranged state is shown, the section of the metal plate 4 by the square does not show the entire area of the heat pipe along the plane direction of the wick 2, but the whole plane direction of the wick 2 along the plane direction. The area is as shown in the plan view of FIGS. 4A and 4B.
Incidentally, in FIGS. 4 (a) and 4 (b), a state in which the entire circumference of the heat pipe is surrounded by the wall portion 7 is shown, but in FIG. 3 (a), the illustration of the wall portion 7 is omitted. Has been done.

Specifically, the state in which the four wicks 2 shown in FIG. 3 (a) are arranged in a row is one of the elongated lines in the left-right direction (horizontal direction) due to the hatching in FIGS. 4 (a) and 4 (b). It corresponds to a partial region, and in the hatched region, the illustration of each region of the individual refrigerant liquid conduction column 1 in FIG. 3A is omitted.

In FIG. 3A, the refrigerant vapor conduction cavities 10 forming the flow path of the refrigerant vapor are arranged in a row in the left-right direction in FIGS. 4A and 4B. It is illustrated by an elongated white portion sandwiched by the hatched regions.

In FIGS. 4A and 4B, the wicks 2 along the vertical direction are arranged in two rows as shown in FIG. 4A at both end portions in the left-right direction, and FIG. 4; As shown in (b), an embodiment in which the arrays are arranged in a single row is shown, but one side of the arrangement region in the vertical direction includes the refrigerant liquid injection pipe 24, and is elongated in the vertical direction. The white region of is also shown by the refrigerant steam conduction cavity 10.
The position where the refrigerant liquid injection pipe 24 is arranged is not limited to the position on one side thereof.

The square spot region in FIGS. 4A and 4B shows a state in which one heat generating element H is arranged, but a plurality of the heat generating elements H may be arranged.

In the heat pipe of the basic configuration (2), the refrigerant liquid flows through the refrigerant liquid conduction column 1 due to the capillary phenomenon, while in the case of an element having a large calorific value, the heat generated by the heat generating element H causes the refrigerant steam temperature to become high, and further. When the temperature reaches 260 ° C. when the elements are bonded by soldering or the like, the water vapor pressure rises to 4 M pascal or more, and by pressing the metal plates 4 on both sides, the refrigerant liquid conduction column 1 and An accident may occur in which the wick 2 at the end of the refrigerant steam conduction cavity 10 and the metal plates 4 on both sides are separated from each other.

In such a case, when the embodiment characterized in that pillars 5 for preventing separation from the plurality of wicks 2 are erected between the metal plates 4 on both sides, the above-mentioned accident occurs. Can be prevented.

In the above embodiment, as shown in FIGS. 3A, 3B, and 3D, the pillar 5 forms the refrigerant liquid conduction column 1 at or near the surface direction end portion of the wick 2, and the surface thereof. The design is adopted so that it is erected at the center position in the direction.

In the case of the above design, the detachment of the wick 2 and the metal plates 4 on both sides at both end portions of each refrigerant liquid conduction column 1 can be sufficiently prevented by the coupling with the pillar 5. The size, number, and placement location of the pillars 5 can be arbitrarily designed and selected according to the amount of heat generated by the element.

In the heat pipe of the basic configuration (2), as shown in FIGS. 3 (b), (c), and (d), a plurality of convex portions 41 are projected from the inside of the metal plates 4 on both sides. In many cases, an embodiment is adopted in which the convex portion 41 is in contact with the wicks 2 at both ends of the refrigerant liquid conduction column 1 and the refrigerant vapor conduction cavity 10.

In the above embodiment, the recess 42 formed between the convex portions 41 of the metal plate 4 is formed by the wick 2 at both ends of the refrigerant liquid conduction column 1 and the refrigerant steam conduction cavity 10 and in the vicinity thereof. By storing the refrigerant liquid sequentially infiltrated through the refrigerant liquid injection pipe 24, the function of holding the refrigerant liquid of the wick 2 at both ends can be promoted.

The state in which the refrigerant liquid conducting columns 1 are arranged in a row is actually a state in which the refrigerant liquid conducting columns 1 are not classified and are arranged in a row along the hatching directions in the left-right directions of FIGS. 4 (a) and 4 (b). After creating a laminated state in the longitudinal direction of the wick 2, all of the metal plates forming the wick 2 are not removed, but a part thereof remains.

As a result, in the heat pipe of the actual basic configuration (2), as shown in FIGS. 3A and 3C, the refrigerant liquid conduction columns 1 adjacent to each other in the plane direction of the wick 2 are laminated. In many cases, an embodiment characterized in that the wick 2 is joined via a metal plate 23 extending from at least a part thereof is adopted.

In the case of the above embodiment, the refrigerant liquid conduction columns 1 adjacent to each other in the plane direction of the wick 2 are connected to each other via the metal plate 23, and each refrigerant liquid conduction column 1 is stable on both sides. It becomes possible to connect to the metal plate 4.
In FIGS. 3 (a) and 3 (c), the metal plate 23 is connected to the refrigerant liquid conducting column 1 in the direction forming the longitudinal direction in FIGS. 4 (a) and 4 (b). It is also possible to connect adjacent refrigerant liquid conduction columns 1 in a direction orthogonal to the longitudinal direction.

The width of the wick 2 in the plane direction in the actual design stage of each of the square-shaped refrigerant liquid conduction columns 1 in FIG. 3A is 3.0 mm, and the wick of the pillar 5 for preventing the wick 2 from being separated from the wick 2. The width of 2 in the plane direction is 0.6 mm, and the length of the metal plate 23 for joining the adjoining refrigerant liquid conduction columns 1 in the plane direction of the wick 2 is about 1 to 3 mm in the longitudinal direction. If the heat diffusion of the above is prioritized, the case of 0 mm can also be adopted.
The width of the refrigerant vapor conduction cavity 10 surrounded by the refrigerant liquid conduction columns 1 arranged in a row is about 1 to 3 mm.

The number of laminated wicks 2 shown in FIGS. 3A, 3B, and 3D is usually 2 to 40, and the thickness of each wick 2 is about 0.025 to 0.25 mm. In many cases, the thickness of the metal plate 4 shown in FIGS. 3 (a), (b), (c), and (d) is often set to about 0.1 to 0.8 mm.

The wicks 2 and the metal plates 4 on both sides of the basic configurations (1) and (2), and the metal plates 23 connecting the refrigerant liquid conduction columns 1 adjacent to each other in the surface direction of the wick 2 all have good heat conduction. Metals are used, copper and copper alloys are typically used, and aluminum and stainless steel are the next best materials.

Hereinafter, the description will be given according to an embodiment.

In the first embodiment, as shown in FIG. 5, in order to realize the laminated state in the refrigerant liquid conduction column 1 shown in FIG. 1 (a), two wicks from one metal plate 23 are performed by the following steps. 2 is manufactured.
1 On the surface of the metal plate, the lattice-shaped frame-forming resist 61 is attached to the region where the frame 21 for dividing each through hole 3 is planned to be formed, and one of the back surfaces corresponding to the front surface. Attaching an isolated spot-shaped protrusion-forming resist 62 to a region where protrusions 22 are planned to be formed in a partial region, and forming a frame 21 for dividing each through hole 3 on the back surface of the metal plate. The resist 61 for forming a grid-like frame is attached to the planned region, and the isolated spot-shaped protrusions are formed on the region where the protrusions 22 are planned to be formed in a part of the surface corresponding to the back surface. Attaching of the resist 62 (FIG. 5A).
2 Of the regions other than the lattice-shaped frame-forming resist 61 and the spot-shaped protrusion-forming resist 62, and the regions covered by the resists 61 and 62, the resists 61 and 62 are repeatedly etched. Formation of a through hole 3 based on sequentially removing the outer end and its vicinity (FIGS. 5 (b), (c), (d)).
3 Removal of the resists 61 and 62 on the front surface and the back surface of the metal plate (FIG. 5 (e)).

In the first embodiment, by adopting etching, two wicks 2 can be efficiently manufactured from one metal plate.

In the second embodiment, the injection of the refrigerant liquid into the heat pipe is completed by the following steps based on the embodiment of FIG. 4B and with reference to the direction AA.
1 (1). A plurality of refrigerant liquid conduction columns 1 in which the refrigerant liquid injection pipe 24 is fixed to at least one refrigerant liquid conduction column 1, and metal plates 4 on both sides provided with convex portions 41 for contacting the wick 2. And the wall 7 surrounding each refrigerant steam conduction cavity 10 surrounding each of the refrigerant liquid conduction columns 1 of the plurality of refrigerant liquid conduction columns 1, and each wall portion 7 surrounding each of the metal plates 4 on both sides. Placement,
(2). The wall portion 7 surrounding the refrigerant vapor conduction cavity 10 surrounded by the plurality of refrigerant liquid conduction columns 1 and each refrigerant liquid conduction column 1 and the wall portions 7 surrounding the metal plates 4 on both sides are fixed to each other. By abutting the convex portions 41 of the metal plates 4 on both sides with the wicks 2 located at both ends, a heat pipe is formed (above, FIG. 6A).
2 (1). Insertion of the heat pipe formed in (2) into the chamber 8, degassing of the chamber 8, and degassing of the heat pipe accompanying the degassing.
(2). Injection of refrigerant into the refrigerant liquid injection pipe 24 in the chamber 8 from an injection needle inserted from outside the chamber 8.
(3). After the injection of (2), the inlet end of the refrigerant liquid injection pipe 24 in the chamber 8 is sealed with a sealing material (above, FIG. 6B).

In the second embodiment based on each of the above steps, the overall configuration of the heat pipe is efficiently secured by the process shown in FIG. 6 (a), and then the vacuum state is shown in FIG. 6 (b). It is possible to quickly and easily inject a certain amount of refrigerant liquid into the heat pipe quickly and easily by using the pressure difference from the atmospheric pressure to the heat pipe in the above. It is taken out from the chamber 8.
In the degassing of the chamber 8, decompression of about 10 to 50 pascals is performed.

The heat pipe of the basic configuration (2), which is based on the refrigerant liquid conduction column of the basic configuration (1), realizes efficient and rapid cooling of the refrigerant liquid, and is a field of a cooling device for heat dissipation by a heat generating element. The range of use in is enormous.

1 Refrigerant liquid conduction pillar 10 Refrigerant steam conduction cavity 2 Wick 21 Frame 22 Projection in frame 23 Metal plate connecting wicks 24 Refrigerant liquid injection pipe 3 Through hole 4 Metal plate on both sides 41 Convex part 42 in metal plate Recessed portion sandwiched between portions 41 Pillar 61 Frame forming resist 62 Protrusion forming resist 7 Wall 8 Chamber H Heat generating element

Claims (13)

A wick made of a metal plate that is adjacent to the refrigerant vapor conduction cavity that conducts the refrigerant vapor vaporized by the heat generated by the heating element and forms a porous state by the distribution of through holes that conduct the liquefied refrigerant liquid is laminated. In addition, in the refrigerant liquid conduction column in which the refrigerant liquid conducts through holes by the capillary phenomenon along the stacking direction, each through hole is divided, and each frame surrounding each through hole is connected to the surface direction of the wick. A refrigerant liquid conduction column in which protrusions in the intersecting directions are projected and the protrusions are fitted into the through holes of the wicks adjacent to each other in the stacking direction. The shape of the through hole formed by each frame is rectangular, the protrusion is formed at the intersection of the sides constituting the frame, and the position where the protrusion is fitted is the center of the through hole adjacent to each other in the stacking direction. The refrigerant liquid conduction column according to claim 1, wherein the position is a position. The refrigerant liquid conduction column according to any one of claims 1 and 2, wherein the projection directions of the protrusions in the wicks adjacent to each other in the stacking direction are opposite to each other. The refrigerant liquid conduction column according to any one of claims 1 and 2, wherein the projection directions of the protrusions in the wicks adjacent to each other in the stacking direction are the same direction. The refrigerant liquid conduction column according to any one of claims 1, 2, 3, and 4, wherein the cross-sectional shape of the protrusion along the surface direction of the wick is rectangular, circular, or cross-shaped. .. The refrigerant liquid conduction column according to claim 1, wherein two wicks are manufactured from one metal plate by the following steps.
1 On the surface of the metal plate, the resist for forming a grid-like frame is attached to the area where the frame for dividing each through hole is planned to be formed, and the part of the back surface corresponding to the front surface is covered. Attaching an isolated spot-shaped resist for forming protrusions to a region where protrusions are planned to be formed, and to a region where a frame body for dividing each through hole is planned to be formed on the back surface of the metal plate. Adhesion of a lattice-shaped frame-forming resist, and attachment of an isolated spot-shaped protrusion-forming resist to a region where protrusions are planned to be formed in a part of the surface corresponding to the back surface.
2 By repeating etching, the outer end of each resist and its vicinity are sequentially removed from the regions other than the lattice-shaped frame-forming resist and the spot-shaped protrusion-forming resist, and the region covered by each of the resists. Formation of through holes based on the resist.
3 Removal of each resist on the front and back surfaces of the metal plate. A plurality of refrigerant liquid conduction columns according to claim 1 are surrounded by a refrigerant vapor conduction cavity, and both ends of the plurality of refrigerant liquid conduction columns are in contact with two metal plates on both sides. , The refrigerant vapor conduction cavity is brought into contact with the metal plates on both sides via one or a plurality of wicks connected to the wicks in the adjacent refrigerant liquid conduction columns, and then the refrigerant liquid conduction columns. A heat pipe in which the refrigerant vapor conduction cavity is surrounded by a wall and one or a plurality of heat generating elements are planned to be arranged on one side of the metal plates on both sides. The heat pipe according to claim 7, wherein pillars are erected between the metal plates on both sides to prevent disconnection from the plurality of wicks. The heat pipe according to claim 8, wherein the pillar is installed at or near the surface direction end portion of the wick forming the refrigerant liquid conduction column and at the center position in the surface direction. 7. The heat pipe according to any one of 8 and 9. Claims 7 and 8, wherein the refrigerant liquid conduction columns adjacent to each other in the plane direction of the wick are joined to each other via a metal plate extending from at least a part of the wick to be laminated. The heat pipe according to any one of 9 and 10. The heat according to any one of claims 7, 8, 9, 10 and 11, wherein the shape of the wick in the surface direction of the plurality of refrigerant liquid conducting columns is either rectangular or circular. pipe. The heat pipe according to claim 7, wherein the injection of the refrigerant liquid is completed by the following steps.
1 (1). A plurality of refrigerant liquid conduction columns in which a refrigerant liquid injection pipe is fixed to at least one refrigerant liquid conduction column, metal plates on both sides having protrusions for contacting the wick, and the plurality of refrigerants. Each refrigerant of the liquid conduction column The wall portion surrounding each refrigerant steam conduction cavity surrounding the liquid conduction column, and the arrangement of each wall portion surrounding each metal plate on both sides, respectively.
(2). The wall portion surrounding the refrigerant vapor conduction cavity surrounded by the plurality of refrigerant liquid conduction columns and each refrigerant liquid conduction column and the wall portions surrounding the metal plates on both sides are fixed, and the metal plates on both sides are convex. By contacting the wicks located at both ends, the heat pipe is formed.
2 (1). Insertion of the heat pipe formed in (2) into the chamber, degassing of the chamber, and degassing of the heat pipe accompanying the degassing.
(2). Injection of refrigerant from the injection needle inserted from outside the chamber to the refrigerant liquid injection pipe in the chamber,
(3). After the injection of (2) above, the inlet end of the refrigerant liquid injection pipe in the chamber is sealed with a sealing material.

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