JP2021110476A - Wick sheet for vapor chamber, vapor chamber, and electronic device - Google Patents

Abstract

To inhibit deterioration of performance of a vapor chamber.SOLUTION: A wick sheet for a vapor chamber according to the invention is a wick sheet for a vapor chamber which is disposed between a first sheet and a second sheet of a vapor chamber in which a working fluid having freezing expansibility is enclosed. The wick sheet for the vapor chamber includes: a frame body part; a land part provided in the frame body part; a steam flow passage part which is provided between the frame body part and the land part and in which steam of the working fluid passes; and a liquid flow passage part which is provided at the land part and communicates with the steam flow passage part and in which a liquid working fluid passes. The frame body part has frame body protruding parts formed protruding toward the steam flow passage part.SELECTED DRAWING: Figure 6

Description

The present invention relates to a wick sheet for a vapor chamber, a vapor chamber and an electronic device.

Devices that generate heat, such as central processing units (CPUs), light-emitting diodes (LEDs), and power semiconductors used in mobile terminals such as mobile terminals and tablet terminals, are cooled by heat-dissipating members such as heat pipes (heat pipes and other heat-dissipating members). For example, see Patent Document 1). In recent years, in order to make mobile terminals and the like thinner, it has been required to make the heat radiating member thinner, and the development of a vapor chamber that can be made thinner than a heat pipe is being promoted. A working fluid is sealed in the vapor chamber, and the working fluid absorbs and diffuses the heat of the device to cool the device.

More specifically, the working fluid in the vapor chamber receives heat from the device at a portion close to the device (evaporation part) and evaporates to become steam (working steam). The working vapor diffuses in the steam flow path in the direction away from the evaporation section, is cooled, and condenses into a liquid. A liquid flow path portion as a capillary structure (wick) is provided in the vapor chamber, and the condensed and liquefied working fluid (working fluid) enters the liquid flow path portion from the vapor flow path portion and enters the liquid flow path portion. It flows through the liquid flow path and is transported toward the evaporation section. Then, the working liquid receives heat again in the evaporation section and evaporates. In this way, the working fluid transfers heat of the device by recirculating in the vapor chamber while repeating phase change, that is, evaporation and condensation, and enhances heat dissipation efficiency.

Japanese Unexamined Patent Publication No. 2008-82298

However, the working fluid may freeze in a temperature environment lower than the freezing point of the working fluid enclosed in the vapor chamber. In this case, the frozen working fluid may block a part of the steam flow path in the vapor chamber, and the performance of the vapor chamber may deteriorate.

The present invention has been made in consideration of such a point, and an object of the present invention is to provide a wick sheet, a vapor chamber, and an electronic device for a vapor chamber, which can suppress a deterioration in the performance of the vapor chamber.

The present invention
A wick sheet for the vapor chamber interposed between the first sheet and the second sheet of the vapor chamber in which the working fluid is sealed.
Frame body and
The land portion provided in the frame body portion and the land portion
A steam flow path portion through which the steam of the working fluid passes, which is provided between the frame body portion and the land portion, and
A liquid flow path portion provided in the land portion, which communicates with the vapor flow path portion and allows the liquid working fluid to pass through, is provided.
A wick sheet for a vapor chamber, wherein the frame body portion has a plurality of frame body convex parts formed in a convex shape toward the inside of the steam flow path portion in a plan view.
I will provide a.

In the wick sheet for the vapor chamber described above,
The plurality of frame body convex portions include a first convex portion provided at at least one of a pair of inner end portions extending in the first direction of the frame body portion.
You may do so.

In the wick sheet for the vapor chamber described above,
The land portion has a longitudinal direction along the first direction.
You may do so.

Further, in the wick sheet for the vapor chamber described above,
The plurality of frame body convex portions include a second convex portion provided at at least one of a pair of inner end portions extending in a second direction orthogonal to the first direction of the frame body portion.
You may do so.

Further, in the wick sheet for the vapor chamber described above,
The frame convex portion has a rectangular shape, a triangular shape, or a curved shape in a plan view.
You may do so.

Further, in the wick sheet for the vapor chamber described above,
When viewed in a cross section along the thickness direction of the wick sheet, the frame convex portion is provided on one side in the thickness direction and on the other side in the thickness direction. It has a second curved surface, a protrusion where the first curved surface and the second curved surface merge, and a protrusion protruding into the steam flow path portion.
You may do so.

Further, in the wick sheet for the vapor chamber described above,
When viewed in a cross section along the thickness direction, the protrusion is positioned inside the steam flow path portion of the first end of the first curved surface provided on the side opposite to the protrusion. In addition, it is positioned inside the steam flow path portion from the second end portion of the second curved surface provided on the side opposite to the protrusion portion.
You may do so.

Further, in the wick sheet for the vapor chamber described above,
When viewed in a cross section along the thickness direction, the protrusion is positioned inside the steam flow path portion of the first end of the first curved surface provided on the side opposite to the protrusion. The second end portion of the second curved surface provided on the side opposite to the protrusion portion is positioned inside the steam flow path portion with respect to the protrusion portion.
You may do so.

Further, in the wick sheet for the vapor chamber described above,
The plurality of frame body convex portions include a first end side convex portion and a second end side convex portion provided alternately side by side in a plan view.
In the first end side convex portion, when viewed in a cross section along the thickness direction, the protrusion is from the second end of the second curved surface provided on the side opposite to the protrusion. Is also positioned inside the steam flow path portion, and the first end portion of the first curved surface provided on the side opposite to the protrusion portion is inside the steam flow path portion with respect to the protrusion portion. Positioned in
In the second end side convex portion, when viewed in a cross section along the thickness direction, the protrusion is positioned inside the steam flow path portion with respect to the first end portion, and the above. The second end is positioned inside the steam flow path rather than the protrusion.
You may do so.

In addition, the present invention
A wick sheet for the vapor chamber interposed between the first sheet and the second sheet of the vapor chamber in which the working fluid is sealed.
Frame body and
The land portion provided in the frame body portion and the land portion
A seat space provided between the frame body portion and the land portion, and
A groove portion provided in the land portion and communicating with the seat space is provided.
The frame body portion is a wick sheet for a vapor chamber, which has a plurality of frame body convex portions formed in a convex shape toward the inside of the seat space in a plan view.
I will provide a.

In addition, the present invention
The first sheet and
The second sheet and
A vapor chamber, comprising a wick sheet for the vapor chamber described above, interposed between the first sheet and the second sheet.
I will provide a.

In the vapor chamber described above
The condensing region where the working fluid condenses and
It comprises an evaporation region where the working fluid evaporates.
The frame convex portion is provided in the condensed region.
You may do so.

Further, in the above-mentioned vapor chamber,
The working fluid having freeze-expandability is enclosed.
You may do so.

In addition, the present invention
With the housing
With the device housed in the housing
An electronic device comprising the vapor chamber described above, which is in thermal contact with the device.
I will provide a.

According to the present invention, deterioration of the performance of the vapor chamber can be suppressed.

FIG. 1 is a schematic perspective view illustrating an electronic device according to an embodiment. FIG. 2 is a top view showing a vapor chamber according to an embodiment. FIG. 3 is a cross-sectional view taken along the line AA of FIG. FIG. 4 is a top view of the lower sheet of FIG. FIG. 5 is a bottom view of the upper sheet of FIG. FIG. 6 is a top view of the wick sheet of FIG. FIG. 7 is a partially enlarged cross-sectional view of FIG. FIG. 8 is a partially enlarged top view of the liquid flow path portion shown in FIG. 7. FIG. 9 is a partially enlarged top view showing the first convex portion provided on the frame body portion shown in FIG. FIG. 10 is a partially enlarged top view showing a second convex portion provided on the frame body portion shown in FIG. FIG. 11 is a cross-sectional view taken along the line BB of FIG. FIG. 12 is a diagram for explaining a wick sheet preparation step in the method for manufacturing a vapor chamber according to an embodiment. FIG. 13 is a diagram for explaining an etching process in the method for manufacturing a vapor chamber according to an embodiment. FIG. 14 is a diagram for explaining a joining step in the method for manufacturing a vapor chamber according to an embodiment. FIG. 15 is a partially enlarged top view showing a modification of FIG. 9. FIG. 16 is a partially enlarged top view showing a modification of FIG. 9. FIG. 17 is a cross-sectional view showing a modified example of FIG. FIG. 18 is a cross-sectional view showing a modified example of FIG. FIG. 19 is a top view showing a modified example of FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings attached to the present specification, the scale, the aspect ratio, etc. are appropriately changed from those of the actual product and exaggerated for the convenience of illustration and comprehension.

In addition, as used in the present specification, the terms such as "parallel", "orthogonal", and "identical", and the length, angle, and physical characteristics that specify the shape, geometric conditions, and physical characteristics and their degrees are specified. The value of, etc. shall be interpreted including the range in which the same function can be expected without being bound by the strict meaning. Furthermore, in the drawings, for the sake of clarity, the shapes of a plurality of parts that can be expected to have the same function are regularly described, but the function should be expected without being bound by a strict meaning. The shapes of the portions may be different from each other as long as they can be formed. Further, in the drawings, the boundary line indicating the joint surface between members is shown by a simple straight line for convenience, but it is not limited to a strict straight line, and a desired joining performance can be expected. The shape of the boundary line is arbitrary as long as it is possible.

A wick sheet for a vapor chamber, a vapor chamber, and an electronic device according to an embodiment of the present invention will be described with reference to FIGS. 1 to 14. The vapor chamber 1 according to the present embodiment is a device mounted on the electronic device E in order to cool the device D as a heating element housed in the electronic device E. Examples of device D include central processing units (CPUs), light emitting diodes (LEDs), electronic devices (cooled devices) that generate heat, such as power semiconductors, which are used in mobile terminals such as mobile terminals and tablet terminals. Be done.

Here, first, the electronic device E on which the vapor chamber 1 according to the present embodiment is mounted will be described by taking a tablet terminal as an example. As shown in FIG. 1, the electronic device E (tablet terminal) includes a housing H, a device D housed in the housing H, and a vapor chamber 1. In the electronic device E shown in FIG. 1, a touch panel display TD is provided on the front surface of the housing H. The vapor chamber 1 is housed in the housing H and is arranged so as to be in thermal contact with the device D. As a result, the vapor chamber 1 can receive the heat generated in the device D when the electronic device E is used. The heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 via the working fluids 2a and 2b described later. In this way, device D is effectively cooled. When the electronic device E is a tablet terminal, the device D corresponds to a central processing unit or the like.

Next, the vapor chamber 1 according to the present embodiment will be described. As shown in FIGS. 2 and 3, the vapor chamber 1 has a sealed space 3 in which working fluids 2a and 2b are sealed, and the working fluids 2a and 2b in the sealed space 3 repeatedly undergo phase changes. , The device D of the electronic device E described above is configured to be effectively cooled. Examples of the working fluids 2a and 2b include pure water, ethanol, methanol, acetone and the like, and a mixed solution thereof. The working fluids 2a and 2b may have freeze-expandability. That is, the working fluids 2a and 2b may be fluids that expand during freezing. Examples of the freeze-expandable working fluids 2a and 2b include pure water, an aqueous solution obtained by adding an additive such as alcohol to pure water, and the like.

As shown in FIGS. 2 and 3, the vapor chamber 1 is interposed between the lower sheet 10 (first sheet), the upper sheet 20 (second sheet), and the lower sheet 10 and the upper sheet 20. It is provided with a wick sheet for a vapor chamber (hereinafter, simply referred to as a wick sheet 30). In the vapor chamber 1 according to the present embodiment, the lower sheet 10, the wick sheet 30, and the upper sheet 20 are laminated in this order.

The vapor chamber 1 is formed in a substantially thin flat plate shape. The planar shape of the vapor chamber 1 is arbitrary, but it may be rectangular as shown in FIG. The planar shape of the vapor chamber 1 may be, for example, a rectangle having one side of 1 cm and another side of 3 cm, or a square having one side of 15 cm, and the planar dimension of the vapor chamber 1 is arbitrary. .. In the present embodiment, as an example, an example in which the planar shape of the vapor chamber 1 is a rectangular shape with the X direction as the longitudinal direction will be described. In this case, as shown in FIGS. 4 to 6, the lower sheet 10, the upper sheet 20, and the wick sheet 30 may have the same planar shape as the vapor chamber 1. Further, the planar shape of the vapor chamber 1 is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L-shape, and a T-shape.

As shown in FIG. 2, the vapor chamber 1 has an evaporation region SR in which the working fluids 2a and 2b evaporate, and a condensation region CR in which the working fluids 2a and 2b condense.

The evaporation region SR is a region that overlaps with the device D in a plan view, and is a region to which the device D is attached. The evaporation region SR can be arranged at any location in the vapor chamber 1. In the present embodiment, the evaporation region SR is formed on one side (left side in FIG. 2) of the vapor chamber 1 in the X direction. Heat from the device D is transferred to the evaporation region SR, and the heat causes the liquid working fluid (appropriately referred to as working fluid 2b) to evaporate in the evaporation region SR. The heat from the device D can be transferred not only to the region overlapping the device D in a plan view but also to the periphery of the region. Therefore, the evaporation region SR includes a region overlapping the device D and a region around the device D in a plan view. Here, the plan view means a surface on which the vapor chamber 1 receives heat from the device D (second upper sheet surface 20b described later on the upper sheet 20) and a surface on which the received heat is released (first surface described later on the lower sheet 10). It is a state viewed from a direction orthogonal to the lower seat surface 10a), and corresponds to, for example, a state in which the vapor chamber 1 is viewed from above or a state in which it is viewed from below, as shown in FIG.

The condensation region CR is a region that does not overlap with the device D in a plan view, and is a region in which vapor of the working fluid (appropriately referred to as working steam 2a) releases heat and condenses. The condensed region CR can also be said to be a region around the evaporation region SR. In the present embodiment, the condensed region CR is formed on the other side (right side in FIG. 2) of the vapor chamber 1 in the X direction. The heat from the working steam 2a is released to the lower sheet 10 in the condensing region CR, and the working steam 2a is cooled and condensed in the condensing region CR.

When the vapor chamber 1 is installed in the mobile terminal, the hierarchical relationship may be broken depending on the posture of the mobile terminal. However, in the present embodiment, for convenience, the sheet that receives heat from the device D is referred to as the above-mentioned upper sheet 20, and the sheet that releases the received heat is referred to as the above-mentioned lower sheet 10. Therefore, a state in which the lower sheet 10 is arranged on the lower side and the upper sheet 20 is arranged on the upper side will be described below.

As shown in FIG. 3, the lower sheet 10 has a first lower seat surface 10a provided on the opposite side of the wick sheet 30 and a side opposite to the first lower seat surface 10a (that is, the wick sheet 30). It has a second lower seat surface 10b provided on the side). The lower sheet 10 may be formed to be flat as a whole, and the lower sheet 10 may have a constant thickness as a whole. A housing member Ha that forms a part of the housing H of a mobile terminal or the like is attached to the first lower seat surface 10a. The entire first lower seat surface 10a may be covered with the housing member Ha. As shown in FIG. 4, alignment holes 12 may be provided at the four corners of the lower sheet 10.

As shown in FIG. 3, the upper sheet 20 includes a first upper sheet surface 20a provided on the side of the wick sheet 30 and a second upper sheet surface 20b provided on the side opposite to the first upper sheet surface 20a. ,have. The upper sheet 20 may be formed to be flat as a whole, and the upper sheet 20 may have a constant thickness as a whole. The device D described above is attached to the second upper seat surface 20b. As shown in FIG. 5, alignment holes 22 may be provided at the four corners of the upper sheet 20.

As shown in FIG. 3, the wick seat 30 includes a seat main body 31 and a steam flow path portion 50 (seat space) provided in the seat main body 31. The seat body 31 has a first body surface 31a and a second body surface 31b provided on the side opposite to the first body surface 31a. The first main body surface 31a is arranged on the side of the lower sheet 10, and the second main body surface 31b is arranged on the side of the upper sheet 20.

The second lower seat surface 10b of the lower seat 10 and the first main body surface 31a of the seat main body 31 may be permanently joined to each other by diffusion joining. Similarly, the first upper seat surface 20a of the upper seat 20 and the second main body surface 31b of the seat main body 31 may be permanently joined to each other by diffusion joining. The lower sheet 10, the upper sheet 20, and the wick sheet 30 may be joined by other methods such as brazing as long as they can be permanently joined instead of diffusion joining. The term "permanently joined" is not bound by a strict meaning, and the lower sheet 10 and the wick sheet 30 can maintain the sealing property of the sealing space 3 during the operation of the vapor chamber 1. It is used as a term meaning that the upper sheet 20 and the wick sheet 30 are joined to the extent that they can be maintained and the bond between the upper sheet 20 and the wick sheet 30 can be maintained.

As shown in FIGS. 3 and 6, the seat body 31 of the wick sheet 30 according to the present embodiment has a frame body portion 32 formed in a rectangular frame shape in a plan view and a land provided in the frame body portion 32. It has a unit 33 and. The frame body portion 32 and the land portion 33 are portions where the material of the wick sheet 30 remains without being etched in the etching step described later.

In the present embodiment, the frame body portion 32 is formed in a rectangular frame shape in a plan view. A steam flow path portion 50 is defined inside the frame body portion 32. That is, the working steam 2a flows inside the frame body portion 32 and around the land portion 33. Further, the frame body portion 32 has a pair of inner end portions 32a extending in the X direction and a pair of inner end portions 32b extending in the Y direction orthogonal to the X direction. A plurality of frame body convex portions 70, which will be described later, are provided on the inner end portions 32a and 32b of the frame body portion 32.

In the present embodiment, the land portion 33 may extend in an elongated shape with the X direction (first direction, left-right direction in FIG. 6) as the longitudinal direction in a plan view, and the planar shape of the land portion 33 is elongated. It may have a rectangular shape of. Further, the land portions 33 may be arranged in parallel with each other at equal intervals in the Y direction (second direction, vertical direction in FIG. 6). The working steam 2a flows around each land portion 33 and is transported toward the condensed region CR. This prevents the flow of the working steam 2a from being obstructed. The width w1 (see FIG. 7) of the land portion 33 may be, for example, 100 μm to 1500 μm. Here, the width w1 of the land portion 33 is the dimension of the land portion 33 in the Y direction, and means the dimension at the position where the penetration portion 34 described later exists in the Z direction (thickness direction of the wick sheet 30). There is.

The frame body portion 32 and each land portion 33 are diffusion-bonded to the lower sheet 10 and diffusion-bonded to the upper sheet 20. This improves the mechanical strength of the vapor chamber 1. The wall surface 53a of the lower steam flow path recess 53 and the wall surface 54a of the upper steam flow path recess 54, which will be described later, form a side wall of the land portion 33. The first main body surface 31a and the second main body surface 31b of the seat main body 31 may be formed flat over the frame body portion 32 and each land portion 33.

The steam flow path portion 50 is mainly a flow path through which the working steam 2a passes. The steam flow path portion 50 extends from the first main body surface 31a to the second main body surface 31b and penetrates the sheet main body 31 of the wick sheet 30.

As shown in FIG. 6, the steam passage portion 50 in the present embodiment has a first steam passage 51 and a plurality of second steam passages 52. The first steam passage 51 is formed between the frame body portion 32 and the land portion 33. The first steam passage 51 is continuously formed inside the frame body portion 32 and outside the land portion 33. The plane shape of the first steam passage 51 is a rectangular frame shape. The second steam passage 52 is formed between the land portions 33 adjacent to each other. The planar shape of the second steam passage 52 is an elongated rectangular shape. The steam flow path portion 50 is divided into a first steam passage 51 and a plurality of second steam passages 52 by a plurality of land portions 33.

As shown in FIG. 3, the first steam passage 51 and the second steam passage 52 extend from the first main body surface 31a of the seat main body 31 to the second main body surface 31b. The first steam passage 51 and the second steam passage 52 are each composed of a lower steam flow path recess 53 provided on the first main body surface 31a and an upper steam flow path recess 54 provided on the second main body surface 31b. Has been done. The lower steam flow path recess 53 and the upper steam flow path recess 54 communicate with each other, and the first steam passage 51 and the second steam passage 52 of the steam flow path portion 50 communicate with each other from the first main body surface 31a to the second main body surface 31b. It is formed so as to extend over.

The lower steam flow path recess 53 is formed in a concave shape on the first main body surface 31a by being etched from the first main body surface 31a of the wick sheet 30 in the etching step described later. As a result, the lower steam flow path recess 53 has a curved wall surface 53a as shown in FIG. 7. The wall surface 53a defines the lower steam flow path recess 53 and is curved so as to bulge toward the second main body surface 31b. Such a lower steam passage recess 53 constitutes a part (lower half) of the first steam passage 51 and a part (lower half) of the second steam passage 52.

The upper steam flow path recess 54 is formed in a concave shape on the second main body surface 31b by being etched from the second main body surface 31b of the wick sheet 30 in the etching step described later. As a result, the upper steam flow path recess 54 has a curved wall surface 54a as shown in FIG. 7. The wall surface 54a defines the upper steam flow path recess 54 and is curved so as to bulge toward the first main body surface 31a. Such an upper steam passage recess 54 constitutes a part (upper half) of the first steam passage 51 and a part (upper half) of the second steam passage 52.

As shown in FIG. 7, the wall surface 53a of the lower steam flow path recess 53 and the wall surface 54a of the upper steam flow path recess 54 are connected to each other to form a penetrating portion 34. The wall surface 53a and the wall surface 54a are curved toward the penetrating portion 34, respectively. As a result, the lower steam flow path recess 53 and the upper steam flow path recess 54 communicate with each other. In the present embodiment, the planar shape of the penetrating portion 34 in the first steam passage 51 has a rectangular frame shape similar to that of the first steam passage 51, and the planar shape of the penetrating portion 34 in the second steam passage 52 is Similar to the second steam passage 52, it has an elongated rectangular shape. The penetrating portion 34 may be defined by a ridge line formed so that the wall surface 53a of the lower steam flow path recess 53 and the wall surface 54a of the upper steam flow path recess 54 meet and project inward. In this penetrating portion 34, the plane area of the steam flow path portion 50 is minimized. The widths w2 and w2'(see FIG. 7) of such a penetrating portion 34 may be, for example, 400 μm to 1600 μm. Here, the width w2 of the penetrating portion 34 corresponds to the gap between the land portions 33 adjacent to each other in the Y direction. Further, the width w2'of the penetrating portion 34 includes the frame body portion 32 (more specifically, the inner end portions 32a and 32b of the frame body portion 32 not provided with the frame body convex portion 70 described later) and the land portion 33. Corresponds to the gap between.

The position of the penetrating portion 34 in the Z direction (thickness direction of the wick sheet 30, vertical direction in FIG. 7) may be an intermediate position between the first lower sheet surface 10a and the upper sheet 20 surface 20b, and may be an intermediate position from the intermediate position to the lower side. Alternatively, the position may be shifted upward. As long as the lower steam flow path recess 53 and the upper steam flow path recess 54 communicate with each other, the position of the penetrating portion 34 is arbitrary.

Further, in the present embodiment, the cross-sectional shapes of the first steam passage 51 and the second steam passage 52 are formed so as to include the penetrating portion 34 defined by the ridge line formed so as to project inward. , Not limited to this. For example, the cross-sectional shape of the first steam passage 51 and the cross-sectional shape of the second steam passage 52 may be a trapezoidal shape, a rectangular shape, or a barrel shape.

The steam passage portion 50 including the first steam passage 51 and the second steam passage 52 configured in this way constitutes a part of the sealed space 3 described above. As shown in FIG. 3, the steam flow path portion 50 in the present embodiment is mainly defined by the lower sheet 10, the upper sheet 20, the frame body portion 32 and the land portion 33 of the sheet body 31 described above. There is. Each of the steam passages 51 and 52 has a relatively large flow path cross-sectional area through which the working steam 2a passes.

Here, FIG. 3 shows an enlarged view of the first steam passage 51, the second steam passage 52, and the like in order to clarify the drawing, and the number and arrangement of these steam passages 51, 52, etc. are shown in FIG. It is different from 2 and FIG.

By the way, although not shown, a plurality of support portions for supporting the land portion 33 on the frame body portion 32 may be provided in the steam flow path portion 50. Further, a support portion for supporting the land portions 33 adjacent to each other may be provided. These support portions may be provided on both sides of the land portion 33 in the X direction, or may be provided on both sides of the land portion 33 in the Y direction. The support portion is preferably formed so as not to obstruct the flow of the working steam 2a diffusing the steam flow path portion 50. For example, it is arranged on one side of the first main body surface 31a and the second main body surface 31b of the sheet main body 31 of the wick sheet 30, and a space forming a steam flow path recess is formed on the other side. It may be. As a result, the thickness of the support portion can be made thinner than the thickness of the seat body 31, and the first steam passage 51 and the second steam passage 52 can be prevented from being divided in the X direction and the Y direction.

As shown in FIG. 6, alignment holes 35 may be provided at the four corners of the seat body 31 of the wick sheet 30.

Further, as shown in FIG. 2, the vapor chamber 1 may further include an injection portion 4 for injecting the working liquid 2b into the sealed space 3 at one end edge in the X direction. In the form shown in FIG. 2, the injection unit 4 is arranged on the side of the evaporation region SR, and protrudes outward from the edge on the side of the evaporation region SR.

More specifically, the injection unit 4 includes a lower injection protrusion 11 (see FIG. 4) constituting the lower sheet 10, an upper injection protrusion 21 (see FIG. 5) constituting the upper sheet 20, and a wick. It may be configured to have a wick sheet injection protrusion 36 (see FIG. 6) that constitutes the sheet body 31 of the sheet 30. Of these, an injection flow path 37 is formed in the wick sheet injection protrusion 36. The injection flow path 37 extends from the first main body surface 31a of the seat main body 31 to the second main body surface 31b, and penetrates the seat main body 31 (wick sheet injection protrusion 36) in the Z direction. Further, the injection flow path 37 communicates with the vapor flow path portion 50, and the working liquid 2b passes through the injection flow path 37 and is injected into the sealed space 3. Depending on the arrangement of the liquid flow path portion 60, the injection flow path 37 may communicate with the liquid flow path portion 60. The upper surface and the lower surface of the wick sheet injection protrusion 36 are formed flat, and the upper surface of the lower injection protrusion 11 and the lower surface of the upper injection protrusion 21 are also formed flat. The planar shapes of the injection protrusions 11, 21, and 36 may be the same.

In the present embodiment, an example is shown in which the injection unit 4 is provided on one end edge of the pair of end edges in the X direction of the vapor chamber 1, but the present invention is limited to this. It can be installed at any position. Further, the injection flow path 37 provided in the wick sheet injection protrusion 36 does not have to penetrate the seat body 31 as long as the hydraulic fluid 2b can be injected. In this case, the injection flow path 37 communicating with the steam flow path portion 50 can be formed by etching only from one of the first main body surface 31a and the second main body surface 31b of the sheet main body 31.

As shown in FIGS. 3, 6 and 7, a liquid flow path portion 60 (groove portion) through which the hydraulic fluid 2b mainly passes is provided on the second main body surface 31b of the seat main body 31 of the wick sheet 30. The liquid flow path portion 60 constitutes a part of the sealed space 3 described above, and communicates with the vapor flow path portion 50. The liquid flow path portion 60 is configured as a capillary structure (wick) for transporting the working liquid 2b to the evaporation region SR. In the present embodiment, the liquid flow path portion 60 is provided on the second main body surface 31b of each land portion 33 of the wick sheet 30. The liquid flow path portion 60 may be formed over the entire second main body surface 31b of each land portion 33. The liquid flow path portion 60 may not be provided on the first main body surface 31a of each land portion 33.

The liquid flow path portion 60 is composed of a plurality of grooves provided on the second main body surface 31b. In the present embodiment, as shown in FIG. 8, the liquid flow path portion 60 includes a plurality of liquid flow path main flow grooves 61 through which the working liquid 2b passes, and a plurality of liquid flow paths communicating with the liquid flow path main flow groove 61. It has a communication groove 65 and.

As shown in FIG. 8, each liquid flow path mainstream groove 61 is formed so as to extend in the X direction. The liquid flow path main flow groove 61 mainly has a flow path cross-sectional area smaller than that of the first vapor passage 51 or the second steam passage 52 of the vapor flow path portion 50 so that the hydraulic fluid 2b flows by capillary action. .. As a result, the liquid flow path main flow groove 61 is configured to transport the working liquid 2b condensed from the working vapor 2a to the evaporation region SR. The main flow grooves 61 of each liquid flow path may be arranged at equal intervals in the Y direction.

The liquid flow path main flow groove 61 is formed by etching from the second main body surface 31b of the sheet main body 31 of the wick sheet 30 in the etching step described later. As a result, the liquid flow path mainstream groove 61 has a curved wall surface 62 as shown in FIG. 7. The wall surface 62 defines the liquid flow path main flow groove 61 and is curved so as to bulge toward the first main body surface 31a.

As shown in FIGS. 7 and 8, the width w3 (dimension in the Y direction) of the liquid flow path mainstream groove 61 may be, for example, 5 μm to 150 μm. The width w3 of the main flow groove 61 of the liquid flow path means the dimension on the second main body surface 31b. Further, as shown in FIG. 7, the depth h1 (dimension in the Z direction) of the liquid flow path mainstream groove 61 may be, for example, 3 μm to 150 μm.

As shown in FIG. 8, each liquid flow path connecting groove 65 extends in a direction different from the X direction. In the present embodiment, each liquid flow path connecting groove 65 is formed so as to extend in the Y direction, and is formed perpendicular to the liquid flow path main flow groove 61. Some liquid flow path connecting grooves 65 are arranged so as to communicate with each other adjacent liquid flow path main flow grooves 61. The other liquid flow path connecting groove 65 is arranged so as to communicate the steam flow path portion 50 (first steam passage 51 or second steam passage 52) and the liquid flow path main flow groove 61. That is, the liquid flow path connecting groove 65 extends from the edge of the land portion 33 in the Y direction to the liquid flow path main flow groove 61 adjacent to the edge. In this way, the first steam passage 51 or the second steam passage 52 of the steam flow path portion 50 and the liquid flow path main flow groove 61 communicate with each other.

The liquid flow path connecting groove 65 mainly has a flow path cross-sectional area smaller than that of the first vapor passage 51 or the second steam passage 52 of the vapor flow path portion 50 so that the hydraulic fluid 2b flows by capillary action. .. The liquid flow path connecting grooves 65 may be arranged at equal intervals in the X direction.

The liquid flow path connecting groove 65 also has a wall surface (not shown) formed by etching like the liquid flow path main flow groove 61 and formed in a curved shape similar to the liquid flow path main flow groove 61. As shown in FIG. 8, the width w4 (dimension in the X direction) of the liquid flow path connecting groove 65 may be equal to the width w3 of the liquid flow path mainstream groove 61, but may be larger or smaller than the width w3. May be good. The depth of the liquid flow path connecting groove 65 may be equal to the depth h1 of the liquid flow path main flow groove 61, but may be deeper or shallower than the depth h1.

As shown in FIG. 8, a liquid flow path convex row 63 is provided between the liquid flow path main flow grooves 61 adjacent to each other. Each liquid flow path convex row 63 includes a plurality of liquid flow path protrusions 64 (liquid flow path protrusions) arranged in the X direction. The liquid flow path convex portion 64 is provided in the liquid flow path portion 60, protrudes from the sheet main body 31, and is in contact with the upper sheet 20. Each liquid flow path convex portion 64 is formed in a rectangular shape so that the X direction is the longitudinal direction in a plan view. A liquid flow path main flow groove 61 is interposed between the liquid flow path convex portions 64 adjacent to each other in the Y direction, and a liquid flow path connecting groove 65 is interposed between the liquid flow path convex portions 64 adjacent to each other in the X direction. Intervened. The liquid flow path connecting groove 65 is formed so as to extend in the Y direction, and communicates the liquid flow path main flow grooves 61 adjacent to each other in the Y direction. As a result, the hydraulic fluid 2b can flow between the main flow grooves 61 of the liquid flow path.

The liquid flow path convex portion 64 is a portion where the material of the wick sheet 30 remains without being etched in the etching step described later. In the present embodiment, as shown in FIG. 8, the planar shape of the liquid flow path convex portion 64 (the shape at the position of the second main body surface 31b of the sheet main body 31 of the wick sheet 30) is rectangular.

In the present embodiment, the liquid flow path convex portions 64 are arranged in a staggered pattern. More specifically, the liquid flow path convex portions 64 of the liquid flow path convex portion rows 63 adjacent to each other in the Y direction are arranged so as to be offset from each other in the X direction. This amount of deviation may be half of the arrangement pitch of the liquid flow path convex portion 64 in the X direction. The width w5 (dimension in the Y direction) of the liquid flow path convex portion 64 may be, for example, 5 μm to 500 μm. The width w5 of the liquid flow path convex portion 64 means the dimension on the second main body surface 31b. The arrangement of the liquid flow path convex portions 64 is not limited to the staggered shape, and may be arranged in parallel. In this case, the liquid flow path convex portions 64 of the liquid flow path convex portion rows 63 adjacent to each other in the Y direction are also aligned in the X direction.

The liquid flow path main flow groove 61 includes a liquid flow path intersection 66 that communicates with the liquid flow path communication groove 65. At the liquid flow path intersection 66, the liquid flow path main flow groove 61 and the liquid flow path connecting groove 65 communicate with each other in a T shape. As a result, at the liquid flow path intersection 66 in which one liquid flow path main flow groove 61 and one side (for example, the upper side in FIG. 8) liquid flow path connecting groove 65 communicate with each other, the other side (for example). For example, it is possible to prevent the liquid flow path connecting groove 65 (lower side in FIG. 8) from communicating with the liquid flow path main flow groove 61. As a result, at the liquid flow path intersection 66, the wall surface 62 of the liquid flow path main flow groove 61 is prevented from being cut out on both sides (upper side and lower side in FIG. 8), and one side of the wall surface 62 remains. Can be made to. Therefore, even at the liquid flow path intersection 66, the hydraulic fluid in the liquid flow path main flow groove 61 can be imparted with a capillary action, and the propulsive force of the hydraulic fluid 2b toward the evaporation region SR is the liquid flow path intersection 66. It is possible to suppress the decrease in.

Next, the frame body convex portion 70 provided on the frame body portion 32 will be described. The frame body portion 32 has a plurality of frame body convex portions 70 formed in a convex shape toward the inside of the steam flow path portion 50 when viewed from the Z direction (thickness direction of the wick sheet 30) (in a plan view). have. That is, the frame body portion 32 is a plurality of frame body convex portions 70 formed in a convex shape toward the inside of the steam flow path portion 50 in a plan view, and a plurality of frames provided at different positions in a plan view. It has a body convex portion 70.

As shown in FIGS. 9 and 10, the frame body convex portion 70 is formed to be convex toward the first steam passage 51 of the steam flow path portion 50 in a plan view. In the present embodiment, the frame body convex portion 70 has a rectangular shape in a plan view. Further, the frame body convex portion 70 is provided at different positions on the inner end portions 32a and 32b of the frame body portion 32 in a plan view. In the present embodiment, the frame body convex portions 70 are arranged at equal intervals over the entire circumference of the inner end portions 32a and 32b of the frame body portion 32 in a plan view.

The plurality of frame body convex portions 70 include a first convex portion 71 provided on a pair of inner end portions 32a extending in the X direction of the frame body portion 32 and a pair of inner end portions 32b extending in the Y direction of the frame body portion 32. It includes a second convex portion 72 provided on the inner end portion 32b.

As shown in FIG. 9, the first convex portion 71 projects in the Y direction toward the first steam passage 51 in a plan view, and is arranged side by side in the X direction. The first convex portions 71 may be arranged at equal intervals in the X direction. Further, as shown in FIG. 10, the second convex portions 72 project in the X direction toward the first steam passage 51 in a plan view, and are arranged side by side in the Y direction. The second convex portions 72 may be arranged at equal intervals in the Y direction.

The frame body convex portion 70 (first convex portion 71 and second convex portion 72) is formed by being etched from the first main body surface 31a and the second main body surface 31b of the wick sheet 30 in the etching step described later. ing. More specifically, as shown in FIG. 11, when viewed in a cross section along the Z direction (cross section when viewed in the X direction in FIG. 9), the frame body convex portion 70 is unilaterally (in the Z direction). A lower curved surface 70d (first curved surface) provided on the lower side in FIG. 11 and an upper curved surface 70e (second curved surface) provided on the other side (upper side in FIG. 11) in the Z direction. have. The wall surface 53a of the lower steam flow path recess 53 described above includes the lower curved surface 70d, and the wall surface 54a of the upper steam flow path recess 54 described above includes the upper curved surface 70e. As shown by the broken line in FIG. 11, the inner end portions 32a and 32b of the frame body portion 32 also have the lower curved surface 32d and the upper curved surface 32e. The wall surface 53a of the lower steam flow path recess 53 described above also includes the lower curved surface 32d, and the wall surface 54a of the upper steam flow path recess 54 described above also includes the upper curved surface 32e. The lower curved surface 70d of the frame body convex portion 70 is formed so as to project from the lower curved surface 32d of the inner end portions 32a and 32b toward the first steam passage 51. The upper curved surface 70e of the frame body convex portion 70 is formed so as to project from the upper curved surface 32e of the inner end portions 32a and 32b toward the first steam passage 51.

The lower curved surface 70d is formed in a concave shape on the first main body surface 31a by being etched from the first main body surface 31a of the wick sheet 30 in the etching step described later. As a result, the lower curved surface 70d is formed in a curved shape as shown in FIG. The lower curved surface 70d is curved so as to bulge toward the second main body surface 31b. Such a lower curved surface 70d defines a part (lower half) of the frame body convex portion 70.

The upper curved surface 70e is formed in a concave shape on the second main body surface 31b by being etched from the second main body surface 31b of the wick sheet 30. As a result, the upper curved surface 70e is formed in a curved shape as shown in FIG. The upper curved surface 70e is curved so as to bulge toward the first main body surface 31a. Such an upper curved surface 70e defines a part (upper half) of the frame body convex portion 70.

As shown in FIG. 11, a protrusion 70c is formed at a portion where the lower curved surface 70d and the upper curved surface 70e meet. The protrusion 70c protrudes into the first steam passage 51. When viewed in a cross section along the Z direction, the frame body convex portion 70 is located on the lower end portion 70a of the lower curved surface 70d provided on the side opposite to the protrusion 70c and on the side opposite to the protrusion 70c. It has an upper end portion 70b of the provided upper curved surface 70e. When viewed in a cross section along the Z direction, the lower end portion 70a is the intersection of the lower curved surface 70d and the first main body surface 31a, and the upper end portion 70b is the upper curved surface 70e and the second main body surface. This is the intersection with 31b. In the present embodiment, the protrusion 70c is positioned inside the first steam passage 51 (right side in FIG. 11) with respect to the lower end portion 70a, and the first steam passage 51 is positioned with respect to the upper end portion 70b. It is positioned inside the. The contour line of the frame body convex portion 70 (first convex portion 71) drawn in FIG. 9 corresponds to the contour line of the protrusion 70c in a plan view.

Although not shown, the cross section of the frame body convex portion 70 (first convex portion 71) when viewed from the Y direction in FIG. 9 also has a lower curved surface, an upper curved surface, and a protruding portion, as in FIG. Have. Further, the cross section of the frame body convex portion 70 (second convex portion 72) of FIG. 10 is the same as that of FIG.

As shown in FIG. 9, the height h2 (dimension in the Y direction) of the first convex portion 71 is the surface roughness of the inner end portions 32a and 32b (arithmetic mean height Ra defined by JIS B 0601-2001). May be larger than. A scanning white interferometer VertScan manufactured by Ryoka Systems Co., Ltd. may be used for measuring the arithmetic mean height Ra. The arithmetic mean height Ra of the inner end portions 32a and 32b may be, for example, 0.1 μm to 5 μm, and the height h2 of the first convex portion 71 may be, for example, 10 μm to 200 μm. As shown in FIG. 11, the height h2 of the first convex portion 71 is the dimension of the first convex portion 71 in the Y direction, and means the dimension at the position where the penetrating portion 34 exists in the Z direction. There is. Further, as shown in FIG. 9, the width w6 (dimension in the X direction) of the first convex portion 71 may be, for example, 100 μm to 1000 μm. Each first convex portion 71 may have the same shape and the same dimensions as each other. Further, as shown in FIG. 9, the distance p1 between one first convex portion 71 and the other first convex portion 71 adjacent thereto may be, for example, 100 μm to 1000 μm. That is, the first convex portions 71 may be arranged side by side in the X direction at an arrangement pitch of the interval p1.

Further, as shown in FIG. 10, the height h3 (dimension in the X direction) of the second convex portion 72 may be equal to the height h2 of the first convex portion 71. As shown in FIG. 10, the width w7 (dimension in the Y direction) of the second convex portion 72 may be equal to the width w6 of the first convex portion 71. Each second convex portion 72 may have the same shape and the same dimensions as each other. Further, as shown in FIG. 10, the distance p2 between one second convex portion 72 and the second convex portion 72 adjacent thereto may be equal to the distance p1 between the first convex portions 71. That is, the second convex portion 72 may be arranged side by side in the second direction Y at the same arrangement pitch as the arrangement pitch of the first convex portion 71. As described above, each of the first convex portion 71 and each second convex portion 72 has the same shape and the same dimensions as each other, and in a plan view, the inner end portions 32a and 32b of the frame body portion 32 are covered over the entire circumference and the like. They may be arranged at intervals. However, the present invention is not limited to this, and each first convex portion 71 and each second convex portion 72 may have different shapes and different dimensions from each other. Further, the first convex portion 71 and the second convex portion 72 may be arranged so as to have different intervals from each other.

By the way, the materials constituting the lower sheet 10, the upper sheet 20 and the wick sheet 30 are not particularly limited as long as they are materials having good thermal conductivity, but the lower sheet 10, the upper sheet 20 and the wick sheet 30 are not particularly limited. May include, for example, copper or a copper alloy. In this case, the thermal conductivity of each of the sheets 10, 20, and 30 can be increased, and the heat dissipation efficiency of the vapor chamber 1 can be increased. Further, when pure water is used as the working fluids 2a and 2b, corrosion can be prevented. If desired heat dissipation efficiency can be obtained and corrosion can be prevented, other metal materials such as aluminum and titanium, and other metal alloy materials such as stainless steel should be used for these sheets 10, 20 and 30. You can also.

Further, the thickness t1 of the vapor chamber 1 shown in FIG. 3 may be, for example, 100 μm to 1000 μm. By setting the thickness t1 of the vapor chamber 1 to 100 μm or more, the steam flow path portion 50 can be appropriately secured, so that the vapor chamber 1 can function appropriately. On the other hand, by setting the thickness t1 to 1000 μm or less, it is possible to prevent the vapor chamber 1 from becoming thicker.

The thickness t2 of the lower sheet 10 may be, for example, 6 μm to 100 μm. By setting the thickness t2 of the lower sheet 10 to 6 μm or more, the mechanical strength of the lower sheet 10 can be ensured. On the other hand, by setting the thickness t2 of the lower sheet 10 to 100 μm or less, it is possible to prevent the thickness t1 of the vapor chamber 1 from becoming thick. Similarly, the thickness t3 of the upper sheet 20 may be set in the same manner as the thickness t2 of the lower sheet 10. The thickness t3 of the upper sheet 20 and the thickness t2 of the lower sheet 10 may be different.

The thickness t4 of the wick sheet 30 may be, for example, 50 μm to 400 μm. By setting the thickness t4 of the wick sheet 30 to 50 μm or more and appropriately securing the steam flow path portion 50, the vapor chamber 1 can be appropriately operated. On the other hand, by setting the thickness to 400 μm or less, it is possible to prevent the thickness t1 of the vapor chamber 1 from becoming thick.

Next, a method of manufacturing the vapor chamber 1 of the present embodiment having such a configuration will be described with reference to FIGS. 12 to 14. In addition, in FIGS. 12 to 14, the cross section similar to the cross section of FIG. 3 is shown.

Here, first, the manufacturing process of the wick sheet 30 will be described.

First, as shown in FIG. 12, as a preparatory step, a flat metal material sheet M including a first material surface Ma and a second material surface Mb is prepared.

After the preparatory step, as an etching step, as shown in FIG. 13, the metal material sheet M is etched from the first material surface Ma and the second material surface Mb to form the vapor flow path portion 50 and the liquid flow path portion 60. Form.

More specifically, a patterned resist film (not shown) is formed on the first material surface Ma and the second material surface Mb of the metal material sheet M by the photolithography technique. The pattern of this resist film includes the pattern of the frame body convex portion 70 described above. Subsequently, the first material surface Ma and the second material surface Mb of the metal material sheet M are etched through the openings of the patterned resist film. As a result, the first material surface Ma and the second material surface Mb of the metal material sheet M are etched in a pattern to form the vapor flow path portion 50 and the liquid flow path portion 60 as shown in FIG. Further, the frame convex portion 70 is also formed by this etching. As the etching solution, for example, an iron chloride-based etching solution such as a ferric chloride aqueous solution or a copper chloride-based etching solution such as a copper chloride aqueous solution can be used.

For etching, the first material surface Ma and the second material surface Mb of the metal material sheet M may be etched at the same time. However, the present invention is not limited to this, and the etching of the first material surface Ma and the second material surface Mb may be performed as separate steps. Further, the vapor flow path portion 50 and the liquid flow path portion 60 may be formed by etching at the same time, or may be formed by separate steps.

Further, in the etching step, by etching the first material surface Ma and the second material surface Mb of the metal material sheet M, a predetermined outer contour shape as shown in FIG. 6 can be obtained. That is, the edge of the wick sheet 30 is formed.

In this way, the wick sheet 30 according to the present embodiment is obtained.

After the manufacturing step of the wick sheet 30, as a joining step, the lower sheet 10, the upper sheet 20, and the wick sheet 30 are joined as shown in FIG. The lower sheet 10 and the upper sheet 20 may be made of a rolled material having a desired thickness.

More specifically, first, the lower sheet 10, the wick sheet 30, and the upper sheet 20 are laminated in this order. In this case, the first main body surface 31a of the wick sheet 30 is overlapped with the second lower seat surface 10b of the lower sheet 10, and the first upper seat surface 20a of the upper sheet 20 is overlapped with the second main body surface 31b of the wick sheet 30. Are superimposed. At this time, the alignment holes 12 of the lower sheet 10, the alignment holes 35 of the wick sheet 30, and the alignment holes 22 of the upper sheet 20 are used to align the sheets 10, 20, and 30 respectively.

Subsequently, the lower sheet 10, the wick sheet 30, and the upper sheet 20 are temporarily fixed. For example, these sheets 10, 20, and 30 may be temporarily fixed by spot resistance welding, or these sheets 10, 20, and 30 may be temporarily fixed by laser welding.

Next, the lower sheet 10, the wick sheet 30, and the upper sheet 20 are permanently joined by diffusion joining. Diffusion bonding means that the lower sheet 10 and the wick sheet 30 to be joined are brought into close contact with each other, and the wick sheet 30 and the upper sheet 20 are brought into close contact with each other in a controlled atmosphere such as in a vacuum or an inert gas. It is a method of joining by utilizing the diffusion of atoms generated on the joining surface by pressing and heating. Diffusion bonding heats the materials of the sheets 10, 20, and 30 to a temperature close to the melting point, but since it is lower than the melting point, it is possible to prevent the sheets 10, 20, and 30 from melting and deforming. More specifically, the frame body portion 32 of the wick sheet 30 and the first main body surface 31a of each land portion 33 are diffusively joined to the second lower sheet surface 10b of the lower sheet 10. Further, the frame body portion 32 of the wick sheet 30 and the second main body surface 31b of each land portion 33 are diffusion-bonded to the first upper sheet surface 20a of the upper sheet 20 surface. In this way, the sheets 10, 20, and 30 are diffusion-bonded to form a sealed space 3 having a vapor flow path portion 50 and a liquid flow path portion 60 between the lower sheet 10 and the upper sheet 20. Will be done. In the injection portion 4 described above, the lower injection protrusion 11 of the lower sheet 10 and the wick sheet injection protrusion 36 of the wick sheet 30 are diffusion-bonded, and the wick sheet injection protrusion 36 and the upper sheet 20 are joined. The upper injection protrusion 21 is diffusion-bonded, and the injection flow path 37 becomes a closed space.

After the joining step, the working liquid 2b is injected from the injection portion 4 into the sealed space 3. At this time, the working liquid 2b may be injected in an injection amount larger than the total volume of the space composed of each liquid flow path main flow groove 61 and each liquid flow path connecting groove 65 of the liquid flow path portion 60.

After that, the injection flow path 37 described above is sealed. For example, the injection unit 4 may be irradiated with a laser beam to partially melt the injection unit 4 to seal the injection flow path 37. As a result, the communication between the sealed space 3 and the outside is cut off, the hydraulic fluid 2b is sealed in the sealed space 3, and the hydraulic fluid 2b in the sealed space 3 is prevented from leaking to the outside. For sealing the injection flow path 37, the injection portion 4 may be crimped (pressed to be plastically deformed) or brazed.

As described above, the vapor chamber 1 according to the present embodiment is obtained.

Next, a method of operating the vapor chamber 1, that is, a method of cooling the device D will be described.

The vapor chamber 1 obtained as described above is installed in the housing H of a mobile terminal or the like, and a device D such as a CPU, which is a cooling device, is attached to the second upper seat surface 20b of the upper seat 20. (Or, the vapor chamber 1 is attached to the device D). Due to the surface tension of the hydraulic fluid 2b in the sealed space 3, the wall surface of the sealed space 3, that is, the wall surface 53a of the lower vapor flow path recess 53, the wall surface 54a of the upper vapor flow path recess 54, and the liquid flow path portion 60. It adheres to the wall surface 62 of the liquid flow path main flow groove 61 and the wall surface of the liquid flow path connecting groove 65. Further, the working liquid 2b may also adhere to the portion of the second lower sheet surface 10b of the lower sheet 10 exposed to the lower vapor flow path recess 53. Further, the working liquid 2b may also adhere to the portion of the first upper sheet surface 20a of the upper sheet 20 that is exposed to the upper vapor flow path recess 54, the liquid flow path main flow groove 61, and the liquid flow path connecting groove 65.

When the device D generates heat in this state, the working fluid 2b existing in the evaporation region SR (see FIG. 6) receives heat from the device D. The received heat is absorbed as latent heat, the working liquid 2b evaporates (vaporizes), and the working vapor 2a is generated. Most of the generated working steam 2a diffuses in the lower steam flow path recess 53 and the upper steam flow path recess 54 constituting the sealed space 3 (see the solid line arrow in FIG. 6). The working steam 2a in each of the steam flow path recesses 53 and 54 is separated from the evaporation region SR, and most of the working steam 2a is transported to the condensing region CR (the right portion in FIG. 6) having a relatively low temperature. In the condensed region CR, the working steam 2a mainly dissipates heat to the lower sheet 10 and is cooled. The heat received by the lower sheet 10 from the working steam 2a is transferred to the outside air via the housing member Ha (see FIG. 3).

The working vapor 2a dissipates heat to the lower sheet 10 in the condensing region CR, thereby losing the latent heat absorbed in the evaporation region SR and condensing, and the working liquid 2b is generated. The generated hydraulic solution 2b adheres to the wall surfaces 53a and 54a of the vapor flow path recesses 53 and 54, the second lower sheet surface 10b of the lower sheet 10, and the first upper sheet surface 20a of the upper sheet 20. Here, since the working liquid 2b continues to evaporate in the evaporation region SR, the working liquid 2b in the region other than the evaporation region SR (that is, the condensing region CR) in the liquid flow path portion 60 is the main flow groove of each liquid flow path. By the capillary action of 61, it is transported toward the evaporation region SR (see the dashed arrow in FIG. 6). As a result, the working liquid 2b adhering to the respective wall surfaces 53a and 54a, the second lower seat surface 10b and the first upper seat surface 20a moves to the liquid flow path portion 60 and passes through the liquid flow path connecting groove 65. It enters the liquid flow path mainstream groove 61. In this way, the working liquid 2b is filled in each liquid flow path main flow groove 61 and each liquid flow path connecting groove 65. Therefore, the filled working liquid 2b obtains a propulsive force toward the evaporation region SR by the capillary action of each liquid flow path mainstream groove 61, and is smoothly transported toward the evaporation region SR.

In the liquid flow path portion 60, each liquid flow path main flow groove 61 communicates with another adjacent liquid flow path main flow groove 61 via a corresponding liquid flow path connecting groove 65. As a result, it is possible to prevent the hydraulic fluid 2b from coming and going between the liquid flow path main flow grooves 61 adjacent to each other and causing dryout to occur in the liquid flow path main flow groove 61. Therefore, the working liquid 2b in each liquid flow path main flow groove 61 is imparted with a capillary action, and the working liquid 2b is smoothly transported toward the evaporation region SR.

The working fluid 2b that has reached the evaporation region SR receives heat again from the device D and evaporates. The working vapor 2a evaporated from the working liquid 2b moves through the liquid flow path connecting groove 65 in the evaporation region SR to the lower steam flow path recess 53 and the upper steam flow path recess 54 having a large flow path cross-sectional area. It diffuses in each of the steam flow path recesses 53 and 54. In this way, the working fluids 2a and 2b return in the sealed space 3 while repeating phase changes, that is, evaporation and condensation, to transport and release the heat of the device D. As a result, the device D is cooled.

By the way, the working liquid 2b generated by condensing the working vapor 2a is filled and stays in the liquid flow path main flow groove 61 and the liquid flow path connecting groove 65 of the liquid flow path portion 60. However, in general, a part of the working fluid 2b may adhere to the wall surface 53a of the lower vapor flow path recess 53 or the wall surface 54a of the upper vapor flow path recess 54 due to surface tension without being filled with them. That is, a part of the working fluid 2b may adhere to the inner end portions 32a and 32b of the frame body portion 32.

On the other hand, in the present embodiment, the frame body convex portions 70 are provided on the inner end portions 32a and 32b of the frame body portion 32. As a result, the contact area between the hydraulic fluid 2b and the frame body portion 32 can be increased. Therefore, the working liquid 2b can be wetted and spread in the frame body portion 32. As a result, the working liquid 2b can be wetted and spread at the inner end portions 32a and 32b of the frame body portion 32, and can be prevented from remaining unevenly in a specific portion.

When the electronic device E equipped with the vapor chamber 1 is placed in a temperature environment lower than the freezing point of the working fluids 2a and 2b, the working fluid 2b adhering to the inner end portions 32a and 32b of the frame body portion 32 may freeze. be. Even in such a case, since the hydraulic fluid 2b is dispersed at the inner end portions 32a and 32b of the frame body portion 32, the first vapor passage 51 of the vapor passage portion 50 is caused by the frozen hydraulic fluid 2b. Blockage is suppressed. Therefore, it is possible to prevent the flow of the working steam 2a in the first steam passage 51 from being obstructed by the freezing of the working liquid 2b, and it is possible to suppress the deterioration of the performance of the vapor chamber 1.

As described above, according to the present embodiment, the frame body portion 32 has a plurality of frame body convex portions 70 formed in a convex shape toward the inside of the steam flow path portion 50 in a plan view. As a result, the contact area between the hydraulic fluid 2b and the frame body portion 32 can be increased. As a result, the hydraulic fluid 2b can be wetted and spread in the frame body portion 32. Therefore, the working liquid 2b can be wetted and spread at the inner end portions 32a and 32b of the frame body portion 32 to be dispersed and can be prevented from remaining unevenly in a specific portion. As a result, the electronic device E equipped with the vapor chamber 1 was placed in a temperature environment lower than the freezing point of the working fluids 2a and 2b, and the working fluid 2b adhering to the inner end portions 32a and 32b of the frame body portion 32 was frozen. Even in this case, it is possible to prevent the vapor flow path portion 50 from being blocked by the frozen working fluid 2b. As a result, deterioration of the performance of the vapor chamber 1 can be suppressed.

Further, according to the present embodiment, the plurality of frame body convex portions 70 include first convex portions 71 provided on a pair of inner end portions 32a extending in the X direction. As a result, the working liquid 2b can be wetted and spread and dispersed in the direction in which the land portion 33 extends, that is, in the direction in which the working vapor 2a flows. Therefore, it is possible to prevent the frozen working liquid 2b from blocking the steam passage extending in the direction in which the working steam 2a flows in the steam flow path portion 50. Further, in the present embodiment, the evaporation region SR is provided on one side in the direction in which the land portion 33 extends, and the condensation region CR is provided on the other side. As a result, the working liquid 2b adhering to the side of the condensed region CR can be wetted and spread to the side of the evaporation region SR to be dispersed. Therefore, it is possible to prevent the working fluid 2b from freezing in a biased manner toward the condensed region CR, and it is possible to prevent the vapor flow path portion 50 from being blocked by the frozen working liquid 2b. In this way, the deterioration of the performance of the vapor chamber 1 can be effectively suppressed.

Further, according to the present embodiment, the plurality of frame body convex portions 70 include second convex portions 72 provided on a pair of inner end portions 32b extending in the Y direction. As a result, the working liquid 2b can be wetted and spread and dispersed even in the Y direction. Therefore, it is possible to further prevent the vapor flow path portion 50 from being blocked by the frozen working fluid 2b.

Further, according to the present embodiment, when viewed in a cross section along the Z direction, the frame body convex portion 70 is located on one side of the lower curved surface 70d in the Z direction and on the other side in the Z direction. It has an upper curved surface 70e provided. As described above, since the frame body convex portion 70 has a plurality of curved surfaces, the contact area between the hydraulic fluid 2b and the frame body portion 32 can be further increased, and the hydraulic fluid 2b can be transferred to the frame body portion 32. Can be further wetted and spread in. Therefore, it is possible to further prevent the vapor flow path portion 50 from being blocked by the frozen working fluid 2b.

Further, according to the present embodiment, when viewed in a cross section along the Z direction, the protrusion 70c is positioned inside the first steam passage 51 with respect to the lower end portion 70a, and the upper end portion. It is positioned inside the first steam passage 51 with respect to 70b. Such a protrusion 70c can be formed by etching from the first main body surface 31a and the second main body surface 31b in the etching step. Etching from the first main body surface 31a and etching from the second main body surface 31b can be performed at the same time. Therefore, the number of etching steps can be reduced, and the manufacturing efficiency of the vapor chamber 1 can be improved.

Further, according to the present embodiment, the working fluids 2a and 2b having freeze-expandability are sealed in the vapor chamber 1. When the working fluids 2a and 2b having freeze-expandability are frozen in the steam flow path portion 50, it is conceivable that the lower sheet 10 and the upper sheet 20 receive the force due to the expansion and the vapor chamber 1 is deformed. .. On the other hand, according to the present embodiment, the working liquid 2b can be wetted and spread and dispersed at the inner end portions 32a and 32b of the frame body portion 32. As a result, even if the working fluid 2b expands due to freezing, it is possible to suppress the force due to the expansion from acting on the lower sheet 10 and the upper sheet 20. Therefore, the deformation of the vapor chamber 1 can be suppressed.

(First modification)
In the above-described embodiment, an example in which the frame body convex portion 70 has a rectangular shape in a plan view has been described (see FIGS. 9 and 10). However, the present invention is not limited to this, and the frame body convex portion 70 may have any shape as long as it is formed to be convex toward the inside of the steam flow path 50. For example, as shown in FIG. 15, the frame body convex portion 70 may have a triangular shape in a plan view. Further, for example, the frame body convex portion 70 may have a curved shape such as a semicircular shape, a semi-elliptical shape, or a wavy line shape in a plan view. FIG. 16 shows an example in which the convex portion 70 of the frame has a semicircular shape. In such a case, each dimension of the frame body convex portion 70 may be about the same as each dimension of the frame body convex portion 70 in the above-described embodiment. Further, the arrangement pitch of the frame body convex portions 70 may be about the same as the arrangement pitch of the frame body convex portions 70 in the above-described embodiment.

Even in such a first modification, the contact area between the hydraulic fluid 2b and the frame body portion 32 can be increased by the frame body convex portion 70, and the hydraulic fluid 2b can be wetted and spread on the frame body portion 32. can. Therefore, even when the hydraulic fluid 2b is frozen, it is possible to prevent the vapor flow path portion 50 from being blocked by the frozen hydraulic fluid 2b, and it is possible to suppress deterioration in the performance of the vapor chamber 1. ..

(Second modification)
Further, in the above-described embodiment, the protrusion 70c of the frame body convex portion 70 is positioned inside the first steam passage 51 (right side in FIG. 11) with respect to the lower end portion 70a, and is located at the upper end. An example in which the first steam passage 51 is positioned inside the first steam passage 51 with respect to the portion 70b has been described (see FIG. 11). However, the present invention is not limited to this, and the lower end portion 70a or the upper end portion 70b may be positioned inside the first steam passage 51 with respect to the protrusion 70c.

For example, as shown in FIG. 17, the protrusion 70c protrudes toward the first steam passage 51 from the lower end 70a, and the upper end 70b is closer to the first steam passage 51 than the protrusion 70c. It may be located in. In this case, the frame body convex portion 70 may be formed by etching only from the first main body surface 31a of the wick sheet 30. For example, the frame body convex portion 70 can be formed by performing two etching steps from the first main body surface 31a of the wick sheet 30. That is, in the first etching step, the resist film on the first main body surface 31a is patterned so as to have a shape corresponding to the lower steam flow path recess 53, and the metal material sheet is formed through the opening of the resist film. The first material surface Ma of M is etched. In the second etching step, a resist film is newly formed on the first main body surface 31a and the wall surface 53a of the lower steam flow path recess 53, and the resist film has a shape corresponding to the upper steam flow path recess 54. In this way, the wall surface 53a of the lower steam flow path recess 53 is etched through the opening of the resist film. In this case, the wall surface 53a of the lower steam flow path recess 53 and the wall surface 54a of the upper steam flow path recess 54 are connected to form the penetrating portion 34, but the plane area of the steam flow path portion 50 is minimized. The position is not the position of the penetrating portion 34, but the position where the upper end portion 70b exists in the Z direction. Further, in this case, the contour line of the frame body convex portion 70 drawn in FIGS. 9 and 10 corresponds to the contour line of the upper end portion 70b in a plan view.

Further, for example, as shown in FIG. 18, the protrusion 70c is positioned inside the first steam passage 51 with respect to the upper end 70b, and the lower end 70a is the first steam with respect to the protrusion 70c. It may be positioned in the passage 51. In this case, the frame body convex portion 70 may be formed by etching only from the second main body surface 31b of the wick sheet 30. For example, the frame body convex portion 70 can be formed by performing two etching steps from the second main body surface 31b of the wick sheet 30 as in the example shown in FIG. In this case, the position where the plane area of the steam flow path portion 50 is minimized is not the position of the penetrating portion 34 but the position where the lower end portion 70a exists in the Z direction. Further, in this case, the contour line of the frame body convex portion 70 drawn in FIGS. 9 and 10 corresponds to the contour line of the lower end portion 70a in a plan view.

When the frame body convex portion 70 having the shape as shown in FIGS. 17 and 18 is formed by the etching step described above, the wall surface 53a of the lower steam flow path recess 53 in the portion other than the frame body convex portion 70 and The wall surface 54a of the upper steam flow path recess 54 may also be formed to have a similar shape.

Even in such a second modification, the contact area between the hydraulic fluid 2b and the frame body portion 32 can be increased by the frame body convex portion 70, and the hydraulic fluid 2b can be wetted and spread on the frame body portion 32. can. Further, according to the second modification, the amount of protrusion of the protrusion 70c inward of the first steam passage 51 can be reduced. As a result, the width of the first steam passage 51 in the protrusion 70c can be widened, and the space of the first steam passage 51 can be increased. Therefore, even when the hydraulic fluid 2b is frozen, it is possible to further suppress the vapor flow path portion 50 from being blocked by the frozen hydraulic fluid 2b, and further suppress the deterioration of the performance of the vapor chamber 1. can do.

Further, the plurality of frame body convex portions 70 may include the frame body convex portion 70 as shown in FIG. 17 described above and the frame body convex portion 70 as shown in FIG. 18 described above. Here, the frame body convex portion 70 as shown in FIG. 17 is referred to as an upper end side convex portion 74 (second end side convex portion), and the frame body convex portion 70 as shown in FIG. 18 is referred to as a lower side. It will be referred to as an end side convex portion 73 (first end side convex portion) and will be described. In this case, in the lower end side convex portion 73, as shown in FIG. 18, the protrusion 70c is positioned inside the first steam passage 51 with respect to the upper end portion 70b, and the lower end portion. The 70a is positioned inside the first steam passage 51 with respect to the protrusion 70c. In the upper end side convex portion 74, as shown in FIG. 17, the protrusion 70c is positioned inside the first steam passage 51 with respect to the lower end 70a, and the upper end 70b is a protrusion. It is positioned inside the first steam passage 51 with respect to the portion 70c. Then, in a plan view, such a lower end side convex portion 73 and an upper end side convex portion 74 may be provided alternately side by side. For example, as shown in FIG. 9, in each inner end portion 32a extending in the X direction, the lower end side convex portion 73 and the upper end side convex portion 74 are alternately arranged in the X direction in a plan view. It may have been done. That is, the plurality of first convex portions 71 may include lower end side convex portions 73 and upper end side convex portions 74 alternately arranged in the X direction. Further, as shown in FIG. 10, in each inner end portion 32b extending in the Y direction, the lower end side convex portion 73 and the upper end side convex portion 74 are alternately arranged in the Y direction in a plan view. It may have been done. That is, the plurality of second convex portions 72 may include lower end side convex portions 73 and upper end side convex portions 74 alternately arranged in the Y direction.

In this way, by alternately arranging the frame body convex portions 70 having different shapes in the Z direction, the hydraulic fluid 2b can be more easily wetted and spread in the frame body portion 32. Therefore, even when the hydraulic fluid 2b is frozen, it is possible to further suppress the vapor flow path portion 50 from being blocked by the frozen hydraulic fluid 2b, and further suppress the deterioration of the performance of the vapor chamber 1. can do.

(Third modification example)
Further, in the above-described embodiment, an example has been described in which the frame body convex portions 70 are provided on the pair of inner end portions 32a extending in the X direction and the pair of inner end portions 32b extending in the Y direction, respectively (FIG. 6). 6). However, the present invention is not limited to this, and the frame body convex portion 70 may be provided on any one or more of the inner end portions 32a and 32b of the frame body portion 32.

For example, the frame body convex portion 70 may be provided on any one of the pair of inner end portions 32a extending in the X direction, and may not be provided on any of the pair of inner end portions 32b extending in the Y direction. .. Further, for example, the frame body convex portions 70 may be provided on the pair of inner end portions 32a extending in the X direction, and may not be provided on the pair of inner end portions 32b extending in the Y direction. Further, for example, the frame body convex portion 70 may be provided on each of the pair of inner end portions 32a extending in the X direction, and may be provided on any one of the pair of inner end portions 32b extending in the Y direction.

Even in such a third modification, the contact area between the hydraulic fluid 2b and the frame body portion 32 can be increased by the frame body convex portion 70, and the hydraulic fluid 2b can be wetted and spread on the frame body portion 32. can. Therefore, even when the hydraulic fluid 2b is frozen, it is possible to prevent the vapor flow path portion 50 from being blocked by the frozen hydraulic fluid 2b, and it is possible to suppress deterioration in the performance of the vapor chamber 1. ..

(Fourth modification)
Further, in the above-described embodiment, an example in which the frame body convex portion 70 is arranged over the entire circumference of the inner end portions 32a and 32b of the frame body portion 32 in a plan view has been described (see FIG. 6). .. However, the present invention is not limited to this, and the frame body convex portion 70 may be arranged only in a part of the inner end portions 32a and 32b of the frame body portion 32. The frame body convex portion 70 may not be arranged in the other region.

For example, as shown in FIG. 19, the frame body convex portion 70 may be provided in the condensed region CR. That is, when the evaporation region SR is provided on one side of the vapor chamber 1 in the X direction (left side in FIG. 19), the frame convex portion is provided only on the other side (right side in FIG. 19) of the vapor chamber 1 in the X direction. 70 may be provided. More specifically, the frame convex portion 70 is the portion of the inner end portion 32a on the side of the condensed region CR (the portion on the right half in FIG. 19) and the side of the paired inner end portions 32b on the side of the condensed region CR (the portion on the right half). It is provided on the right side in FIG. 19 and is provided on the side of the evaporation region SR of the inner end portion 32a (the left half portion in FIG. 19) and the side of the evaporation region SR of the pair of inner end portions 32b (the left side in FIG. 19). ) May not be provided.

As described above, the working fluid 2b is generated in the condensation region CR and evaporates in the evaporation region SR. Therefore, the working liquid 2b is likely to adhere to the inner end portions 32a and 32b of the frame body portion 32, in particular, on the side of the condensed region CR rather than the evaporation region SR. By providing the frame convex portion 70 on the side of the condensation region CR with respect to the evaporation region SR as in the fourth modification, the working liquid 2b adhering to the side of the condensation region CR is wetted and spread on the side of the evaporation region SR. be able to. Therefore, it is possible to prevent the working fluid 2b from freezing in a biased manner toward the condensed region CR, and it is possible to prevent the vapor flow path portion 50 from being blocked by the frozen working liquid 2b. As a result, the deterioration of the performance of the vapor chamber 1 can be effectively suppressed. Further, by limiting the provision of the frame body convex portion 70 on the side of the evaporation region SR, the flow of the working steam 2a on the side of the evaporation region SR can be made smooth. That is, the working steam 2a can be smoothly transported from the evaporation region SR to the condensation region CR. Therefore, deterioration of the performance of the vapor chamber 1 can be suppressed. Further, by limiting the provision of the frame body convex portion 70, the production of the vapor chamber 1 can be facilitated. Therefore, it is possible to suppress an increase in the manufacturing cost of the vapor chamber 1.

The present invention is not limited to the above-described embodiment and each modification as it is, and at the implementation stage, the components can be modified and embodied within a range that does not deviate from the gist thereof. In addition, various inventions can be formed by an appropriate combination of the plurality of components disclosed in the above-described embodiment and each modification. Some components may be deleted from all the components shown in the above embodiment and each modification.

1 Vapor chamber 2a Working steam 2b Working liquid 10 Lower sheet 20 Upper sheet 30 Wick sheet 32 Frame part 33 Land part 50 Steam flow path part 60 Liquid flow path part 70 Frame body convex part 70a Lower end part 70b Upper end part 70c Projection 70d Lower curved surface 70e Upper curved surface 71 First convex part 72 Second convex part 73 Lower end side convex part 74 Upper end side convex part SR Evaporation area CR Condensation area D Device E Electronic device H housing

Claims (14)

A wick sheet for the vapor chamber interposed between the first sheet and the second sheet of the vapor chamber in which the working fluid is sealed.
Frame body and
The land portion provided in the frame body portion and the land portion
A steam flow path portion through which the steam of the working fluid passes, which is provided between the frame body portion and the land portion, and
A liquid flow path portion provided in the land portion, which communicates with the vapor flow path portion and allows the liquid working fluid to pass through, is provided.
The frame body portion is a wick sheet for a vapor chamber having a plurality of frame body convex portions formed in a convex shape toward the inside of the steam flow path portion in a plan view. The vapor chamber according to claim 1, wherein the plurality of convex portions of the frame body include a first convex portion provided at at least one of a pair of inner end portions extending in a first direction of the frame body portion. Wick sheet. The wick sheet for a vapor chamber according to claim 2, wherein the land portion has a longitudinal direction along the first direction. 2. The frame body convex portion includes a second convex portion provided on at least one of a pair of inner end portions extending in a second direction orthogonal to the first direction of the frame body portion. Or the wick sheet for the vapor chamber according to 3. The wick sheet for a vapor chamber according to any one of claims 1 to 4, wherein the convex portion of the frame has a rectangular shape, a triangular shape, or a curved shape in a plan view. When viewed in a cross section along the thickness direction of the wick sheet, the frame convex portion is provided on one side in the thickness direction and on the other side in the thickness direction. The second curved surface, the first curved surface and the second curved surface merge, and the protrusion portion protruding into the steam flow path portion is provided. Wick sheet for vapor chamber. When viewed in a cross section along the thickness direction, the protrusion is positioned inside the steam flow path portion of the first end of the first curved surface provided on the side opposite to the protrusion. The vapor chamber according to claim 6, which is positioned inside the steam flow path portion with respect to the second end portion of the second curved surface provided on the side opposite to the protrusion portion. Wick sheet. When viewed in a cross section along the thickness direction, the protrusion is positioned inside the steam flow path portion of the first end of the first curved surface provided on the side opposite to the protrusion. 6. The second end portion of the second curved surface provided on the side opposite to the protrusion portion is positioned inside the steam flow path portion with respect to the protrusion portion, according to claim 6. Wick sheet for the described vapor chamber. The plurality of frame body convex portions include a first end side convex portion and a second end side convex portion provided alternately side by side in a plan view.
In the first end side convex portion, when viewed in a cross section along the thickness direction, the protrusion is from the second end of the second curved surface provided on the side opposite to the protrusion. Is also positioned inside the steam flow path portion, and the first end portion of the first curved surface provided on the side opposite to the protrusion portion is inside the steam flow path portion with respect to the protrusion portion. Positioned in
In the second end side convex portion, when viewed in a cross section along the thickness direction, the protrusion is positioned inside the steam flow path portion with respect to the first end portion, and the above. The wick sheet for a vapor chamber according to claim 6, wherein the second end portion is positioned inside the steam flow path portion with respect to the protrusion portion. A wick sheet for the vapor chamber interposed between the first sheet and the second sheet of the vapor chamber in which the working fluid is sealed.
Frame body and
The land portion provided in the frame body portion and the land portion
A seat space provided between the frame body portion and the land portion, and
A groove portion provided in the land portion and communicating with the seat space is provided.
The frame body portion is a wick sheet for a vapor chamber having a plurality of frame body convex portions formed in a convex shape toward the inside of the seat space in a plan view. The first sheet and
The second sheet and
A vapor chamber comprising a wick sheet for a vapor chamber according to any one of claims 1 to 10, which is interposed between the first sheet and the second sheet. The condensing region where the working fluid condenses and
It comprises an evaporation region where the working fluid evaporates.
The vapor chamber according to claim 11, wherein the convex portion of the frame is provided in the condensed region. The vapor chamber according to claim 11 or 12, wherein the working fluid having freeze-expandability is sealed. With the housing
With the device housed in the housing
An electronic device comprising the vapor chamber according to any one of claims 11 to 13, which is in thermal contact with the device.

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