TW202231811A - adhesive sheet - Google Patents

Abstract

Provided is an adhesive sheet which has a narrow range of delamination, which is capable of temporarily securing an adherend in a detachable manner, with which delamination can be carried out using low-power laser light, thus obviating the need for a step of rinsing the adherend after delamination. This adhesive sheet is an adhesive sheet that comprises an adhesive layer, and a transfer layer disposed on one side of the adhesive layer, wherein: the transfer layer is cured by active energy ray irradiation; the adhesive layer of the adhesive sheet has an adhesive strength I at 23 DEG C, when attached to glass, of 2N/20 mm or more; and the ratio of the adhesive strength I at 23 DEG C, when the adhesive layer of the adhesive sheet is attached to glass, to an adhesive strength B at 23 DEG C after the transfer layer is irradiated with 300 mJ/cm2 UV rays, is 5 or more.

Description

adhesive sheet

The present invention relates to an adhesive sheet.

When processing various components such as electronic parts, the following operations are usually performed: the components are temporarily fixed to the support body with an adhesive sheet, and after transportation, processing, etc., the processed components are peeled off from the support body. For example, Patent Document 1 describes a method in which a substrate (member to be processed) is processed in a state where an adhesive layer and a separation layer are temporarily fixed on a support, and after processing, the separation is destroyed by irradiation with laser light. layer, the substrate is peeled off from the support together with the adhesive layer, and then the adhesive layer is removed from the substrate. However, the above method requires the steps of removing the adhesive layer from the component and cleaning the non-adhesive surface of the component, which has problems in terms of production cost. In addition, there is also a problem that the member is damaged when the laser beam is irradiated with a high output.

In addition, Patent Document 2 describes a method in which a plurality of workpieces are temporarily fixed on a carrier via an adhesive layer, and a laser beam is focused on the adhesive layer to foam it, thereby to process the workpiece. A portion of the member is selectively separated from the carrier and transferred. However, this method has the following problem: foaming generated after laser irradiation spreads over time, resulting in peeling of the carrier and unnecessary peeling of the processed member that does not require transfer. prior art literature Patent Literature

Patent Document 1: Japanese Patent No. 5875850 Patent Document 2: Japanese Patent No. 6053756

[Problems to be Solved by Invention]

The present invention has been accomplished in order to solve the above-mentioned problems, and its object is to provide an adhesive sheet that can temporarily fix the adherend in a releasable manner, and can exhibit releasability with low-output laser light, which can The step of cleaning the adherend after peeling is not required, and the range of the peeling-appearing part is narrow. [Technical means to solve problems]

The adhesive sheet of the present invention is provided with an adhesive layer and a transfer layer arranged on one side of the adhesive layer, and the transfer layer is a layer hardened by irradiation with active energy rays, and the adhesive of the adhesive sheet is The adhesive force I at 23°C when the layer is attached to the glass plate is 2 N/20 mm or more, and the adhesive force I at 23°C when the adhesive layer of the adhesive sheet is attached to the glass plate is relative to the The ratio of the adhesive force B at 23° C. after the transfer layer was irradiated with ultraviolet rays of 300 mJ/cm ² was 5 or more. In one Embodiment, the said adhesive sheet is further provided with the base material between the said adhesive bond layer and the said transfer layer. In one embodiment, after irradiating ultraviolet rays of 300 mJ/cm ² , the indentation modulus B of the transfer layer at 23° C. is 5 times the indentation modulus I of the adhesive layer at 23° C. above. In one embodiment, the transfer layer contains an active energy ray curable adhesive, and the active energy ray curable adhesive contains an acrylic polymer as a base polymer. In one embodiment, the above-mentioned adhesive sheet can be used for the following purposes: using the adhesive sheet to temporarily fix the member on the support, and after transportation and/or processing, etc., the member is peeled off from the support by laser irradiation. [Effect of invention]

According to the present invention, an adhesive sheet can be provided, which can temporarily fix the adherend in a releasable manner, and can exhibit releasability with low-output laser light, and can eliminate the need for the step of cleaning the adherend after peeling, Furthermore, the range of the exfoliation site is narrow.

A. Outline of the adhesive sheet Fig. 1(a) is a schematic cross-sectional view of an adhesive sheet according to an embodiment of the present invention. The adhesive sheet 100 of this embodiment includes an adhesive layer 10 and a transfer layer 20 disposed on one side of the adhesive layer 10 . Fig. 1(b) is a schematic cross-sectional view of an adhesive sheet according to another embodiment of the present invention. The adhesive sheet 200 of this embodiment further includes a base material 30 between the adhesive layer 10 and the transfer layer 20 . The adhesive sheet of the present invention may also be provided with a release liner on the outside of the adhesive layer and the transfer layer for the purpose of protecting the adhesive surface before being used, but it is not shown. Moreover, as long as the effect of this invention can be acquired, an adhesive sheet may further contain any appropriate other layer.

The adhesive sheet of the present invention can be used for the following purposes: using the adhesive sheet to temporarily fix a member on a support (eg, a glass substrate), and peeling the member from the support after transportation, processing, and the like. When peeling off, only the components at the desired position can be peeled off precisely by irradiating laser light.

The said transfer layer is a layer hardened by irradiating an active energy ray. In more detail, the said transfer layer is comprised so that it has adhesiveness for fixing a to-be-adhered body, and it hardens|cures by irradiating an active energy ray, and this adhesiveness will fall. Preferably, after hardening, the adhesive force to the extent that the adherend can be fixed (for example, the adhesive force to the extent that the adherend does not fall naturally) remains. In one embodiment, by irradiating active energy rays, the adhesive force of the entire transfer layer is reduced. Examples of active energy rays include gamma rays, ultraviolet rays, visible rays, infrared rays (heat rays), radio frequency waves, alpha rays, beta rays, electron beams, plasma currents, ionizing radiation, and particle beams. Ultraviolet rays are preferred.

The above-mentioned adhesive layer may have any appropriate constitution as long as the effects of the present invention can be obtained. In one embodiment, the above-mentioned adhesive layer contains a pressure-sensitive adhesive. The above-mentioned adhesive sheet can be used by attaching the adhesive layer to a support (eg, a glass substrate). The above-mentioned pressure-sensitive adhesive sheet can be peeled off from the adherend disposed at the site by the following operation: The above-mentioned pressure-sensitive adhesive layer (in the configuration having the base material, the base material is also included) is locally produced by irradiation with laser light. The strain propagates to the transfer layer and temporarily changes the shape of the surface of the transfer layer (bonding surface). In the present invention, by adjusting the components of the adhesive layer (for example, the type of base polymer; the types of additives such as adhesion-imparting agents, cross-linking agents, etc.; Laser light, as a result, tends to produce strain in the adhesive layer. Moreover, about a base material, the base material which is easy to generate|occur|produce a strain can also be made into the base material which is easy to generate|occur|produce by selecting the constituent material suitably. In addition, as described above, by irradiating the transfer layer with laser light after curing, the peelability due to strain propagation can be preferably expressed. In the present invention, the peelability is exhibited by the above-mentioned action, so that high-output laser light is not required, and the step of cleaning the adherend after peeling is not required, and the range of the peeling-appearing site can be narrowed. In addition, the change of the surface shape of the transfer layer after peeling does not continue (that is, the range does not widen over time, but it can return to the shape before the change), so it can prevent the adhered body from occurring at the part that does not need to be peeled off. Abnormalities such as necessary falling off.

The adhesive force I at 23° C. when the adhesive layer of the above-mentioned adhesive sheet is attached to the glass plate is 2 N/20 mm or more. By increasing the adhesive force I, the deformation of each layer caused by the irradiation of laser light can be adapted, the range of the peeling-appearing part can be narrowed, and the adherend can be prevented from unnecessary peeling at the part that does not need to be peeled off. abnormal. The above-mentioned adhesive force I is preferably 2 N/20 mm to 25 N/20 mm, and more preferably 5 N/20 mm to 20 N/20 mm. Within such a range, the effect of the present invention described above becomes remarkable. The adhesive force was measured according to JIS Z 0237:2000. Specifically, the adhesive layer of the adhesive sheet was attached to a glass plate (arithmetic mean surface roughness Ra: 50±25 nm) by reciprocating a 2 kg roller once, and left to stand at 23° C. for 30 minutes. The pressure-sensitive adhesive sheet was peeled off under the conditions of a peeling angle of 180° and a peeling speed (tensile speed) of 300 mm/min, and the measurement was performed.

The initial adhesive force A at 23°C immediately after the transfer layer of the above-mentioned adhesive sheet is attached to the stainless steel plate is preferably 1 N/20 mm～20 N/20 mm, more preferably 1.5 N/20 mm～15 N /20 mm, more preferably 2 N/20 mm to 10 N/20 mm. Within such a range, an adhesive sheet capable of holding the adherend well can be obtained. In addition, the adhesive force on the transfer layer side was also measured according to JIS Z 0237:2000. Specifically, the transfer layer of the adhesive sheet was attached to a stainless steel plate (arithmetic mean surface roughness Ra: 50±25 nm) by reciprocating a 2 kg roller once, and after standing at 23°C for 30 minutes, The pressure-sensitive adhesive sheet was peeled off under the conditions of a peeling angle of 180° and a peeling speed (tensile speed) of 300 mm/min, and the measurement was performed. The adhesive force of the transfer layer changes due to active energy ray irradiation and laser light irradiation. In this specification, "initial adhesive force" means the adhesive force before active energy ray irradiation and laser light irradiation.

In one embodiment, the adhesive force B (also referred to as the adhesive force B after hardening) of the above-mentioned adhesive sheet is preferably 1 N/20 mm or less, more preferably 0.5 N/20 mm or less, and more preferably 0.2 N/ 20 mm or less, particularly preferably 0.1 N/20 mm or less, the above-mentioned adhesive force B is the adhesive force at 23°C after attaching the adhesive sheet to the above-mentioned stainless steel plate and irradiating the transfer layer with ultraviolet rays of 300 mJ/cm ² . . Within such a range, an adhesive sheet excellent in releasability and less paste residue can be obtained. The lower limit of the adhesive force B after hardening is, for example, 0.01 N/20 mm (preferably 0.001 N/20 mm). The above-mentioned ultraviolet irradiation is performed, for example, by using an ultraviolet irradiation apparatus (manufactured by Nitto Seiki Co., Ltd., trade name "UM-810") to irradiate the transfer layer with ultraviolet rays (characteristic wavelength: 365 nm, cumulative light intensity: 300 mJ/cm ² ) of a high-pressure mercury lamp . The ultraviolet irradiation can be performed from the adhesive layer side.

The ratio of the adhesive force I at 23° C. to the adhesive force B after hardening of the transfer layer (adhesion force I/adhesion force B after hardening) when the adhesive layer is attached to the glass is 5 or more. In other words, in the above-mentioned adhesive sheet, the adhesive force B after curing is 0.2 times or less of the adhesive force I (preferably 0.1 times or less, more preferably 0.05 times or less, and still more preferably 0.005 times or less). By specifying (adhesion force I/adhesion force after curing B) in the above-mentioned manner, the deformation of each layer by laser light irradiation can be adapted, and an adhesive sheet excellent in releasability by laser light irradiation can be obtained. Such an adhesive sheet can achieve reliable releasability within a narrow range. (Adhesion I/Adhesion B after hardening) is preferably 10 or more, more preferably 20 or more, and still more preferably 200 or more. Within such a range, the effect of the present invention described above becomes remarkable. The upper limit of (adhesion I/adhesion B after hardening) is, for example, 1,000, preferably 5,000, and more preferably 10,000. That is, in the above-mentioned adhesive sheet, the adhesive force B after hardening may be 0.0001 times or more of the adhesive force I.

The ratio of the initial adhesion force A of the transfer layer to the hardened adhesion force B of the transfer layer (initial adhesion force A/hardened adhesion force B) is preferably 5 or more, more preferably 10 or more, more preferably 10～ 100, and more preferably 30 to 80. Within such a range, an adhesive sheet excellent in the balance between the fixability of the adherend and the releasability can be obtained.

In the above-mentioned adhesive sheet, the layer (such as the transfer layer, the base material, other layers) and the adhesive layer arranged in contact with the above-mentioned adhesive layer preferably have a gripping force of 2 N/20 mm or more at 23°C , more preferably 4 N/20 mm or more, still more preferably 6 N/20 mm or more, and particularly preferably 8 N/20 mm or more. The upper limit of the gripping force is, for example, 30 N/20 mm (preferably 50 N/20 mm). The grip strength was measured by peeling the adhesive layer from the adjacent layer at 23° C., peeling angle of 180°, and peeling speed (stretching speed) of 300 mm/min.

In the above-mentioned adhesive sheet, the layers (such as the adhesive layer, the base material, other layers) and the transfer layer arranged in contact with the above-mentioned transfer layer preferably have a gripping force of 2 N/20 mm or more at 23°C , more preferably 4 N/20 mm or more, still more preferably 6 N/20 mm or more, and particularly preferably 8 N/20 mm or more. The upper limit of the gripping force is, for example, 30 N/20 mm (preferably 50 N/20 mm). The gripping force was measured by peeling off the transfer layer from the adjacent layer at 23° C., peeling angle of 180°, and peeling speed (stretching speed) of 300 mm/min.

The light transmittance of the adhesive sheet of the present invention at a wavelength of 248 nm is preferably 50% or less, more preferably 30% or less, further preferably 10% or less, and particularly preferably 5% or less. In one embodiment, the light transmittance of the adhesive sheet at a wavelength of 248 nm can be controlled by the light transmittance of the adhesive layer and/or the substrate. Specifically, by adjusting the composition of the adhesive layer (such as the type of base polymer; the type of additives such as adhesion imparting agent and crosslinking agent; the amount of these additives, etc.), the thickness of the adhesive layer, and the composition of the substrate The above-mentioned transmittance is controlled by the material and the thickness of the substrate. In the present invention, by reducing the light transmittance, the adhesive layer and/or the substrate can be promoted to produce strain, and the laser output during peeling can be reduced. Since the adhesive sheet of the present invention exhibits peelability with low-output laser light, if the adhesive sheet is used, damage to the adherend during peeling can be reduced and damage to the adherend can be prevented. The lower the transmittance at the wavelength of 248 nm, the better, and the lower limit thereof is, for example, 0.5% (preferably 0%).

The light transmittance at a wavelength of 365 nm of the adhesive sheet of the present invention is preferably 50% or more, more preferably 60% or more, and still more preferably 70% or more. Within this range, it is possible to obtain a pressure-sensitive adhesive sheet in which hardening of the transfer layer by irradiating active energy rays is favorably produced. The higher the light transmittance of the adhesive sheet at a wavelength of 365 nm, the better, and the upper limit thereof is, for example, 95% (preferably 100%).

The haze value of the adhesive sheet of the present invention is preferably 70% or less, more preferably 65% or less. Within such a range, a pressure-sensitive adhesive sheet in which hardening of the transfer layer is preferably generated by irradiation with active energy rays can be obtained. In one embodiment, the haze value of the above-mentioned adhesive sheet is 20% or less. The lower the haze value of the adhesive sheet, the better, and the lower limit thereof is, for example, 0.1%.

The thickness of the adhesive sheet is preferably 1 μm to 300 μm, more preferably 5 μm to 200 μm. In one embodiment, the thickness of the above-mentioned adhesive sheet is 30 μm or less. If the adhesive sheet is thin, the strain generated on the adhesive layer can be easily propagated to the transfer layer, and an adhesive sheet excellent in peelability can be obtained.

When the above-mentioned adhesive sheet further contains a base material and/or any other appropriate layer, the distance between the adhesive layer and the transfer layer is preferably less than 50 μm, more preferably 30 μm or less, and more preferably 25 μm Below, it is especially preferable that it is 10 micrometers or less. Within such a range, the strain generated in the adhesive layer can be easily propagated to the transfer layer, and an adhesive sheet excellent in releasability can be obtained.

B. Transfer layer The thickness of the transfer layer is preferably 1 μm to 30 μm, more preferably 2 μm to 20 μm, and still more preferably 3 μm to 10 μm. Within such a range, the above-mentioned effects become remarkable.

The initial indentation elastic modulus A of the transfer layer at 23°C is preferably 0.1 MPa or more and less than 14 MPa, more preferably 0.1 MPa to 10 MPa, and still more preferably 0.2 MPa to 8 MPa. Within such a range, an adhesive sheet excellent in fixability can be obtained. The indentation elastic modulus can be measured by a single indentation method at 23° C. with an indentation speed of 10 nm/s and an indentation depth of 100 nm. The adhesive force of the transfer layer changes due to active energy ray irradiation and laser light irradiation, but in this specification, "initial indentation elastic modulus A" means the adhesive force before active energy ray irradiation and laser light irradiation.

The above-mentioned transfer layer is preferably a layer whose indentation elastic modulus B (also referred to as post-hardening elastic modulus B) reaches 14 MPa or more at 23° C. after irradiating ultraviolet rays of 300 mJ/cm ² , more preferably reaching A layer of 15 MPa or more, more preferably a layer of 20 MPa or more, and particularly preferably a layer of 50 MPa or more. Within such a range, an adhesive sheet excellent in releasability can be obtained. In addition, contamination of the adherend during peeling can be prevented. The upper limit of the elastic modulus B after hardening at 23° C. is, for example, 500 MPa (preferably 300 MPa).

The above-mentioned transfer layer is preferably irradiated with ultraviolet rays of 300 mJ/cm ² , and the indentation elastic modulus B at 23° C. is more than 20 times the initial indentation elastic modulus A of the transfer layer at 23° C. More Preferably it is 30 times or more, more preferably 30 times to 1000 times, and particularly preferably 50 times to 200 times. Within such a range, an adhesive sheet excellent in the balance between the fixability of the adherend and the releasability can be obtained.

The above-mentioned transfer layer is preferably irradiated with ultraviolet rays of 300 mJ/cm ² , and the indentation elastic modulus B at 23 ° C is more than 5 times the indentation elastic modulus I of the adhesive layer at 23 ° C, more preferably In order to achieve 10 times or more, more preferably 50 times to 5000 times, and particularly preferably 100 times to 3000 times. Within such a range, the deformability of each layer by laser light irradiation can be improved, and an adhesive sheet excellent in peelability by laser light irradiation can be obtained. Such an adhesive sheet can achieve reliable releasability within a narrow range.

In one embodiment, the transfer layer includes an active energy ray curable adhesive. The active energy ray-curable adhesive may further contain an ultraviolet absorber and/or a photopolymerization initiator.

(active energy ray hardening adhesive) In one embodiment, the active energy ray-curable adhesive uses active energy containing a base polymer as a base polymer and an active energy ray-reactive compound (monomer or oligomer) capable of bonding with the base polymer Line hardening adhesive (A1). In another embodiment, an active energy ray curable adhesive (A2) containing an active energy ray reactive polymer as a base polymer is used. It is preferable that the above-mentioned base polymer has a functional group which can react with a photopolymerization initiator. As this functional group, a hydroxyl group, a carboxyl group, etc. are mentioned, for example.

As the base polymer that can be used for the above-mentioned adhesive (A1), for example, natural rubber, polyisobutylene rubber, styrene-butadiene rubber, styrene-isoprene-styrene block copolymer rubber, Rubber-based polymers such as recycled rubber, butyl rubber, polyisobutylene rubber, and nitrile rubber (NBR); silicone-based polymers; and acrylic-based polymers, etc. These polymers may be used alone or in combination of two or more. Among them, acrylic polymers are preferred.

Examples of the acrylic polymer include all hydrocarbon group-containing (meth)acrylates such as alkyl (meth)acrylate, cycloalkyl (meth)acrylate, and aryl (meth)acrylate. polymers or copolymers; and the copolymers of the hydrocarbon group-containing (meth)acrylates and other copolymerizable monomers, etc. Examples of alkyl (meth)acrylates include methyl (meth)acrylate, ethyl, propyl, isopropyl, butyl, isobutyl, 2-butyl, and 3-butyl , amyl ester, isoamyl ester, hexyl ester, heptyl ester, octyl ester, 2-ethylhexyl ester, isooctyl ester, nonyl ester, decyl ester, isodecyl ester, undecyl ester, dodecyl ester Lauryl, tridecyl, tetradecyl, cetyl, octadecyl, and eicosyl esters. As (meth)acrylic-acid cycloalkyl ester, the cyclopentyl ester of (meth)acrylic acid and cyclohexyl ester are mentioned, for example. As aryl (meth)acrylate, phenyl (meth)acrylate and benzyl (meth)acrylate are mentioned, for example. The content ratio of the structural unit derived from the above-mentioned hydrocarbon group-containing (meth)acrylate is preferably 40 parts by weight or more, and more preferably 60 parts by weight or more with respect to 100 parts by weight of the base polymer.

Examples of the above-mentioned other copolymerizable monomers include carboxyl group-containing monomers, acid anhydride monomers, hydroxyl group-containing monomers, glycidyl group-containing monomers, sulfonic acid group-containing monomers, and phosphoric acid group-containing monomers. Monomers, functional group-containing monomers such as acrylamide, and acrylonitrile, etc. Examples of the carboxyl group-containing monomer include acrylic acid, methacrylic acid, carboxyethyl (meth)acrylate, carboxypentyl (meth)acrylate, itonic acid, maleic acid, fumaric acid, and butyl alkenoic acid. As an acid anhydride monomer, maleic anhydride and itonic anhydride are mentioned, for example. Examples of the hydroxyl group-containing monomer include 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, and (meth)acrylic acid. 6-Hydroxyhexyl, 8-hydroxyoctyl (meth)acrylate, 10-hydroxydecyl (meth)acrylate, 12-hydroxylauryl (meth)acrylate, and (4-hydroxymethyl) (meth)acrylate cyclohexyl) methyl ester. As a glycidyl group-containing monomer, glycidyl (meth)acrylate and methyl glycidyl (meth)acrylate are mentioned, for example. Examples of the sulfonic acid group-containing monomer include styrenesulfonic acid, allylsulfonic acid, 2-(meth)acrylamide-2-methylpropanesulfonic acid, and (meth)acrylamide Propanesulfonic acid, sulfopropyl (meth)acrylate, and (meth)acrylooxynaphthalenesulfonic acid. Examples of the phosphoric acid group-containing monomer include 2-hydroxyethylacryloyl phosphate. As acrylamide, for example, N-acrylamide is exemplified. These etc. may be used individually by 1 type, and may be used in combination of 2 or more types. The content ratio of the structural unit derived from the above-mentioned copolymerizable monomer is preferably 60 parts by weight or less, more preferably 40 parts by weight or less, with respect to 100 parts by weight of the base polymer.

Acrylic polymers may contain structural units derived from multifunctional monomers to form cross-linked structures in the polymer backbone. As the polyfunctional monomer, for example, hexanediol di(meth)acrylate, (poly)ethylene glycol di(meth)acrylate, (poly)propylene glycol di(meth)acrylate, neopentyl Glycol di(meth)acrylate, pentaerythritol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, dipentaerythritol hexa(meth)acrylate , epoxy (meth)acrylates (ie, polyglycidyl (meth)acrylates), (meth)acrylic polyesters, and urethane (meth)acrylates. These etc. may be used individually by 1 type, and may be used in combination of 2 or more types. The content ratio of the structural unit derived from the above-mentioned polyfunctional monomer is preferably 40 parts by weight or less, more preferably 30 parts by weight or less, with respect to 100 parts by weight of the base polymer.

The weight average molecular weight of the above-mentioned acrylic polymer is preferably 100,000 to 3,000,000, more preferably 200,000 to 2,000,000. The weight average molecular weight can be measured by GPC (Gel Permeation Chromatography) (solvent: THF (Tetrahydrofuran)).

As the above-mentioned active energy ray-reactive compound that can be used as the above-mentioned adhesive (A1), for example, a polymerizable carbon-carbon having an acryl group, a methacryl group, a vinyl group, an allyl group, and an ethynyl group can be mentioned. Photoreactive monomers or oligomers with functional groups of multiple bonds. Specific examples of the photoreactive monomer include trimethylolpropane tri(meth)acrylate, tetramethylolmethane tetra(meth)acrylate, and pentaerythritol tri(meth)acrylate. , Pentaerythritol tetra(meth)acrylate, dipentaerythritol monohydroxypenta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, 1,4-butanediol di(meth)acrylate, 1,6 -Esterates of (meth)acrylic acid and polyhydric alcohols such as hexanediol di(meth)acrylate and polyethylene glycol di(meth)acrylate; polyfunctional urethane (meth)acrylate ; epoxy (meth) acrylate; and oligoester (meth) acrylate, etc. In addition, methacryloyl isocyanate, 2-methacryloyloxyethyl isocyanate (2-isocyanatoethyl methacrylate), and m-isopropenyl-α,α-dimethylbenzyl can also be used Monomers such as isocyanates. Specific examples of the photoreactive oligomer include dimers to pentamers of the above-mentioned monomers. The molecular weight of the photoreactive oligomer is preferably 100-3000.

In addition, monomers such as epoxidized butadiene, glycidyl methacrylate, acrylamide, vinyl siloxane, etc., or oligomers containing the monomers may be used as the active energy ray-reactive compound.

Furthermore, a mixture of an organic salt such as an onium salt and a compound having a plurality of heterocycles in the molecule can also be used as the active energy ray-reactive compound. In the mixture, the organic salt will be cleaved by the irradiation of active energy rays (such as ultraviolet rays, electron beams) to generate ions, and the ions will cause the ring-opening reaction of the heterocyclic ring as a starting species, thereby forming a three-dimensional network structure. As said organic salt, an iodonium salt, a phosphonium salt, an antimony salt, a pernium salt, a borate, etc. are mentioned, for example. As a heterocyclic ring in the compound which has a plurality of heterocyclic rings in the said molecule|numerator, ethylene oxide, oxetane, oxolane, thiirane, and aziridine etc. are mentioned.

In the above-mentioned adhesive (A1), the content ratio of the active energy ray reactive compound is preferably 0.1 parts by weight to 500 parts by weight, more preferably 5 parts by weight to 300 parts by weight with respect to 100 parts by weight of the base polymer, and further It is preferably 40 to 150 parts by weight.

Examples of the active energy ray-reactive polymer (base polymer) contained in the adhesive (A2) include those having acryl group, methacryl group, vinyl group, allyl group, and ethynyl group. A polymer of functional groups with carbon-carbon multiple bonds. Specific examples of active energy ray-reactive polymers include: polymers containing polyfunctional (meth)acrylates; cationic photopolymerizable polymers; polymers containing cinnamonyl groups such as polyvinyl cinnamate; Diazotized amino phenolic resin; and polyacrylamide, etc.

In one embodiment, an active energy ray-reactive polymer formed by introducing an active energy ray polymerizable carbon-carbon multiple bond into the side chain, main chain and/or main chain terminal of the above-mentioned acrylic polymer can be used. As a method of introducing a radiation-polymerizable carbon-carbon double bond into an acrylic polymer, for example, a method of copolymerizing a raw material monomer containing a monomer having a predetermined functional group (first functional group) to obtain an acrylic polymer can be exemplified. After polymerizing, a compound having a predetermined functional group (second functional group) that can react and bond with the first functional group and a radiation polymerizable carbon-carbon double bond is maintained in the carbon-carbon double bond. In the state of radiation polymerizability, it undergoes condensation reaction or addition reaction with acrylic polymer.

Examples of the combination of the first functional group and the second functional group include a carboxyl group and an epoxy group, an epoxy group and a carboxyl group, a carboxyl group and an aziridine group, an aziridine group and a carboxyl group, and a hydroxyl group and an isocyanate group. , and isocyanate groups and hydroxyl groups. Among these combinations, a combination of a hydroxyl group and an isocyanato group or a combination of an isocyanato group and a hydroxyl group is preferable from the viewpoint of the easiness of tracing the reaction. In addition, it is technically difficult to produce a polymer having a highly reactive isocyanate group, and from the viewpoint of the ease of production or acquisition of the acrylic polymer, the above-mentioned No. 1 on the acrylic polymer side is more preferable. The case where the monofunctional group is a hydroxyl group and the second functional group is an isocyanate group. In this case, as an isocyanate compound having both a radiation polymerizable carbon-carbon double bond and an isocyanate group as the second functional group, for example, methacryloyl isocyanate, 2-methacryloyloxyethyl isocyanate, and m-isopropenyl-α,α-dimethylbenzyl isocyanate. In addition, the acrylic polymer having the first functional group preferably contains the structural unit derived from the above-mentioned hydroxyl group-containing monomer, and also preferably contains 2-hydroxyethyl vinyl ether and 4-hydroxybutyl vinyl ether. , or the structural unit of ether-based compounds such as diethylene glycol monovinyl ether.

The said adhesive agent (A2) may further contain the said active energy ray reactive compound (monomer or oligomer).

The above-mentioned active energy ray-curable adhesive may contain an ultraviolet absorber and/or a photopolymerization initiator. Details of the ultraviolet absorber and photopolymerization initiator used are as follows.

、二苯甲酮、9-氧硫𠮿

衍生物、及4,4'-雙(二甲胺基)二苯甲酮等。作為9-氧硫𠮿

衍生物，例如可例舉乙氧羰基9-氧硫𠮿

、異丙基9-氧硫𠮿

等。In one embodiment, the active energy ray-curable adhesive may contain a photosensitizer. Examples of the photosensitizer include: Kawasaki Chemical Industry Co., Ltd. trade name "UVS-581", 9,10-diethoxyanthracene (for example, Kawasaki Chemical Industry Co., Ltd. trade name "UVS-1101"), etc. . As other examples of the above-mentioned photosensitizer, 9,10-dibutoxyanthracene (for example, manufactured by Kawasaki Chemical Industry Co., Ltd., trade name "UVS-1331"), 2-isopropyl 9-oxythiocyanate

, benzophenone, 9-oxysulfur 𠮿

Derivatives, and 4,4'-bis(dimethylamino)benzophenone, etc. as 9-oxysulfur 𠮿

Derivatives, for example, ethoxycarbonyl 9-oxythiocyanate

, isopropyl 9-oxothioate

Wait.

The content ratio of the above-mentioned photosensitizer is preferably 0.01 to 2 parts by weight, more preferably 0.5 to 2 parts by weight, relative to 100 parts by weight of the base polymer.

It is preferable that the said active energy ray hardening type adhesive contains a crosslinking agent. As a cross-linking agent, for example, an isocyanate-based cross-linking agent, an epoxy-based cross-linking agent, an oxazoline-based cross-linking agent, an aziridine-based cross-linking agent, a melamine-based cross-linking agent, and a peroxide-based cross-linking agent may, for example, be mentioned. Linking agents, urea-based cross-linking agents, metal alkoxide-based cross-linking agents, metal chelate-based cross-linking agents, metal salt-based cross-linking agents, carbodiimide-based cross-linking agents, and amine-based cross-linking agents Wait.

The content ratio of the crosslinking agent is preferably 0.5 to 10 parts by weight, more preferably 1 to 8 parts by weight, relative to 100 parts by weight of the base polymer of the adhesive.

In one embodiment, an isocyanate-based crosslinking agent can be preferably used. The isocyanate-based crosslinking agent is preferable in that it can react with various functional groups. Specific examples of the above-mentioned isocyanate-based crosslinking agent include lower aliphatic polyisocyanates such as butylene diisocyanate and hexamethylene diisocyanate; cyclopentylene diisocyanate, cyclohexylene diisocyanate, isophor Alicyclic isocyanates such as Erone diisocyanate; Aromatic isocyanates such as 2,4-toluene diisocyanate, 4,4'-diphenylmethane diisocyanate, xylylene diisocyanate; Trimethylolpropane/toluene Diisocyanate trimer adduct (manufactured by Dongsuo Corporation, trade name "Coronate L"), trimethylolpropane/hexamethylene diisocyanate trimer adduct (manufactured by Dongsuo Corporation, trade name "Coronate L") HL"), and isocyanate adducts such as the isocyanurate body of hexamethylene diisocyanate (manufactured by Tosso Corporation, trade name "Coronate HX"). A crosslinking agent having three or more isocyanate groups can be preferably used.

The active energy ray-curable adhesive may further contain any appropriate additives as needed. Examples of additives include active energy ray polymerization accelerators, radical scavengers, coupling agents (for example, silane coupling agents), adhesion imparting agents, plasticizers (for example, trimellitate-based plasticizers, homobenzene Tetracarboxylate plasticizers, etc.), pigments, dyes, fillers, antiaging agents, conductive materials, antistatic agents, light stabilizers, peeling regulators, softeners, surfactants, flame retardants, antioxidants , particles, and UV absorbers.

、2-氯9-氧硫𠮿

、2-甲基9-氧硫𠮿

、2,4-二甲基9-氧硫𠮿

、異丙基9-氧硫𠮿

、2,4-二氯9-氧硫𠮿

、2,4-二乙基9-氧硫𠮿

、及2,4-二異丙基9-氧硫𠮿

等9-氧硫𠮿

系化合物；樟腦醌；鹵代酮；醯基膦氧化物；及醯基膦酸酯等。光聚合起始劑之使用量可設定為任意適當之量。 (Photopolymerization Initiator) As the photopolymerization initiator, any appropriate initiator can be used. As a photopolymerization initiator, for example, 4-(2-hydroxyethoxy)phenyl(2-hydroxy-2-propyl)ketone, α-hydroxy-α,α'-dimethylstyrene Ketones, α-keto alcohol compounds such as 2-methyl-2-hydroxypropiophenone, and 1-hydroxycyclohexyl phenyl ketone; Methoxyacetophenone, 2,2-dimethoxy-2-phenyl Acetophenone, 2,2-diethoxyacetophenone, and phenethyl groups such as 2-methyl-1-[4-(methylthio)-phenyl]-2-𠰌olinylpropan-1-one Ketone series compounds; Benzoin ether series compounds such as benzoin ether, benzoin isopropyl ether, and anisin methyl ether; Ketal series compounds such as benzoin dimethyl ketal; Aromatic sulfonyl chloride such as 2-naphthalenesulfonyl chloride series compounds; 1-benzophenone-1,1-propanedione-2-(o-ethoxycarbonyl) oxime and other photoactive oxime series compounds; benzophenone, benzyl benzoic acid, and 3,3'-bis Benzophenone-based compounds such as methyl-4-methoxybenzophenone; 9-oxosulfan

, 2-chloro-9-oxysulfur

, 2-methyl 9-oxothio

, 2,4-dimethyl 9-oxothio

, isopropyl 9-oxothioate

, 2,4-dichloro-9-oxosulfur

, 2,4-diethyl 9-oxothio

, and 2,4-diisopropyl 9-oxothiol

Wait for 9-oxysulfur 𠮿

series compounds; camphorquinone; halogenated ketones; acylphosphine oxides; and acylphosphonates, etc. The use amount of the photopolymerization initiator can be set to any appropriate amount.

In one embodiment, it can be used as a photopolymerization initiator having a maximum absorption wavelength within a range of 400 nm or less (preferably 380 nm or less, more preferably 340 nm or less).

The usage-amount of the above-mentioned photopolymerization initiator can be set to any appropriate amount.

A commercial item can also be used for the said photoinitiator. For example, as the photopolymerization initiator having the maximum absorption wavelength in the range of 400 nm or less, the trade names "Irgacure 127", "Irgacure 369", "Irgacure 369E", "Irgacure 379", "Irgacure 379EG", "Irgacure 819", "Irgacure TOP", "Irgacure 784", and "Irgacure OXE01", etc.

C. Adhesive layer The thickness of the above-mentioned adhesive layer is preferably 30 μm or less, more preferably 20 μm or less, and still more preferably 10 μm or less. Within such a range, the above-mentioned effects become remarkable. The lower limit of the thickness of the adhesive layer is, for example, 1 μm (preferably 0.5 μm).

The indentation elastic modulus I of the adhesive layer at 23° C. is preferably 0.05 MPa to 20 MPa, more preferably 0.08 MPa to 10 MPa, and still more preferably 0.08 MPa to 5 MPa. Within such a range, the deformation suitability of each layer by laser light irradiation can be improved, and an adhesive sheet excellent in releasability by laser light irradiation can be obtained. Such an adhesive sheet can realize reliable peelability within a narrow range.

The light transmittance of the above-mentioned adhesive layer at a wavelength of 248 nm is preferably 50% or less, more preferably 30% or less, further preferably 10% or less, and particularly preferably 5% or less. The light transmittance of the above-mentioned adhesive layer at a wavelength of 248 nm is preferably as low as possible, and the lower limit thereof is, for example, 0.5% (preferably 0%).

The light transmittance of the above-mentioned adhesive layer at a wavelength of 365 nm is preferably 50% or more, more preferably 60% or more, and still more preferably 70% or more. The light transmittance of the above-mentioned adhesive layer at a wavelength of 365 nm is preferably as high as possible, and the upper limit thereof is, for example, 95% (preferably 100%).

The haze value of the adhesive sheet of the above-mentioned adhesive layer is preferably 70% or less, more preferably 65% or less. In one embodiment, the haze value of the adhesive layer is 20% or less. The lower the haze value of the adhesive layer, the better, and the lower limit thereof is, for example, 0.1%.

The above-mentioned adhesive layer contains any appropriate adhesive. As the adhesive, any appropriate adhesive can be used as long as the effect of the present invention can be obtained. As the above-mentioned adhesive, for example, a pressure-sensitive adhesive can be used.

(Pressure Sensitive Adhesive) Examples of pressure-sensitive adhesives include acrylic adhesives, rubber-based adhesives, vinyl alkyl ether-based adhesives, silicone-based adhesives, polyester-based adhesives, polyamide-based adhesives, amines Carbamate-based adhesives, and styrene-diene block copolymer-based adhesives, etc. Among them, an acrylic adhesive or a rubber-based adhesive is preferable, and an acrylic adhesive is more preferable. In addition, the above-mentioned adhesives may be used alone, or two or more of them may be used in combination. In one embodiment, from the viewpoint of ultraviolet absorption, an adhesive containing a base polymer having an aromatic ring and/or a double bond may be used. In this regard, an acrylic adhesive can be preferably used.

As the above-mentioned acrylic adhesive, for example, an acrylic adhesive using an acrylic polymer (homopolymer or copolymer) as a base polymer, etc. can be mentioned, and the acrylic polymer uses one or more (methyl) base) alkyl acrylate as a monomer component. Specific examples of alkyl (meth)acrylates include methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, isopropyl (meth)acrylate, Butyl (meth)acrylate, isobutyl (meth)acrylate, 2nd butyl (meth)acrylate, 3rd butyl (meth)acrylate, amyl (meth)acrylate, (meth)acrylic acid Hexyl ester, heptyl (meth)acrylate, octyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, isooctyl (meth)acrylate, nonyl (meth)acrylate, (meth)acrylate Base) isononyl acrylate, decyl (meth)acrylate, isodecyl (meth)acrylate, undecyl (meth)acrylate, dodecyl (meth)acrylate, (meth)acrylate Tridecyl acrylate, tetradecyl (meth)acrylate, pentadecyl (meth)acrylate, cetyl (meth)acrylate, heptadecyl (meth)acrylate , C1-20 alkyl (meth)acrylates such as octadecyl (meth)acrylate, nonadecyl (meth)acrylate, and eicosyl (meth)acrylate. Among them, alkyl (meth)acrylates having a linear or branched alkyl group having 4 to 18 carbon atoms can be preferably used.

The said acrylic polymer may also contain the unit corresponding to the other monomer component which can be copolymerized with the said alkyl (meth)acrylate, as needed, in order to improve cohesion, heat resistance, crosslinking property, etc.,. Examples of such monomer components include carboxyl group-containing monomers such as acrylic acid, methacrylic acid, carboxyethyl acrylate, carboxypentyl acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid. ; Acid anhydride monomers such as maleic anhydride and itaconic anhydride; hydroxyethyl (meth)acrylate, hydroxypropyl (meth)acrylate, hydroxybutyl (meth)acrylate, hydroxyhexyl (meth)acrylate, ( Monomers containing hydroxyl groups such as hydroxyoctyl meth)acrylate, hydroxydecyl (meth)acrylate, hydroxylauryl (meth)acrylate, and (4-hydroxymethylcyclohexyl)methyl methacrylate; styrene sulfonic acid, allylsulfonic acid, 2-(meth)acrylamido-2-methylpropanesulfonic acid, (meth)acrylamidopropanesulfonic acid, sulfopropyl (meth)acrylate, and (meth)acrylamidopropanesulfonic acid sulfonic acid group) monomers containing sulfonic acid groups such as acryloxynaphthalenesulfonic acid; (meth)acrylamide, N,N-dimethyl (meth)acrylamide, N-butyl (meth)propylene (N-substituted) amide-based monomers such as amide, N-methylol (meth)acrylamide, and N-methylolpropane (meth)acrylamide; (meth)acrylate aminoethyl (meth)acrylic acid aminoalkyl ester monomers such as N,N-dimethylaminoethyl (meth)acrylate, and (meth)acrylic acid tert-butylaminoethyl ester; (methyl) ) (meth)acrylic acid alkoxyalkyl ester monomers such as methoxyethyl acrylate, (meth) ethoxyethyl acrylate; N-cyclohexylmaleimide, N-isopropyl Maleimide monomers such as lyimide, N-laurylmaleimide, and N-phenylmaleimide; N-methyliconimide, N-ethylimide Conimide, N-butyliconimine, N-octyliconimine, N-2-ethylhexyliconimine, N-cyclohexyliconimine, and N- -Iconimide monomers such as lauryl iconimide; N-(meth)acryloyloxymethylene butadiimide, N-(meth)acryloyl-6-oxygen Butadiimide monomers such as hexamethylene butadiimide and N-(meth)acryloyl-8-oxyoctamethylene butadiimide; vinyl acetate, propylene Vinyl Acetate, N-Vinylpyrrolidone, Methylvinylpyrrolidone, Vinylpyridine, Vinylpiperidone, Vinylpyrimidine, Vinylpiperidone, Vinylpyrrolidone, Vinylpyrrole, Vinyl Vinyl-based monomers such as imidazole, vinyloxazole, vinyloxoline, N-vinylcarboxyamide, styrene, α-methylstyrene, and N-vinylcaprolactamide; acrylonitrile, Cyanoacrylate monomers such as methacrylonitrile; acrylic monomers containing epoxy groups such as glycidyl (meth)acrylate; polyethylene glycol (meth)acrylate, polypropylene glycol (meth)acrylate , methoxyethylene glycol (meth)acrylate, and ethylene glycol acrylate monomers such as methoxypolypropylene glycol (meth)acrylate; tetrahydrofurfuryl (meth)acrylate, fluorine-containing (methyl) Acrylate monomers with heterocyclic ring, halogen atom, silicon atom, etc., such as acrylic acid ester and (meth)acrylic acid silicone ester; hexanediol di(meth)acrylate, (poly)ethylene glycol dimethacrylate (Methacrylate Esters, (poly)propylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, pentaerythritol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tris (meth)acrylate, dipentaerythritol hexa(meth)acrylate, epoxy acrylate, polyester acrylate, and urethane acrylate and other multifunctional monomers; isoprene, butadiene, And olefin monomers such as isobutylene; and vinyl ether monomers such as vinyl ether, etc. These monomer components may be used alone or in combination of two or more.

As the above-mentioned rubber-based adhesive, for example, rubber-based adhesives using the following rubbers as base polymers can be exemplified: natural rubber; polyisoprene rubber, styrene-butadiene (SB) rubber, styrene-isoprene Diene (SI) rubber, styrene-isoprene-styrene block copolymer (SIS) rubber, styrene-butadiene-styrene block copolymer (SBS) rubber, styrene-ethylene-butylene Styrene-styrene block copolymer (SEBS) rubber, styrene-ethylene-propylene-styrene block copolymer (SEPS) rubber, styrene-ethylene-propylene block copolymer (SEP) rubber, recycled rubber, butyl Synthetic rubber such as base rubber, polyisobutylene, and its modifications.

The above-mentioned pressure-sensitive adhesive may contain any appropriate additives as required. Examples of such additives include crosslinking agents, adhesion imparting agents (for example, rosin-based adhesion imparting agents, terpene-based adhesion imparting agents, hydrocarbon-based adhesion imparting agents, etc.), plasticizers (for example, trimellitic acid ester) plasticizers, pyromellitic acid ester plasticizers), pigments, dyes, antiaging agents, conductive materials, antistatic agents, light stabilizers, peeling regulators, softeners, surfactants, flame retardants , antioxidants, UV absorbers, and particles.

As the above-mentioned crosslinking agent, for example, an isocyanate-based crosslinking agent, an epoxy-based crosslinking agent, a melamine-based crosslinking agent, and a peroxide-based crosslinking agent may, for example, be mentioned, and a urea-based crosslinking agent may also be mentioned. , metal alkoxide series crosslinking agent, metal chelate series crosslinking agent, metal salt series crosslinking agent, carbodiimide series crosslinking agent, oxazoline series crosslinking agent, aziridine series crosslinking agent agents, and amine-based crosslinking agents. Among them, an isocyanate-based crosslinking agent or an epoxy-based crosslinking agent is preferred. In one embodiment, from the viewpoint of ultraviolet absorption, a crosslinking agent having an aromatic ring and/or a double bond (eg, an aromatic isocyanate-based crosslinking agent) can be used.

Specific examples of the above-mentioned isocyanate-based crosslinking agent include lower aliphatic polyisocyanates such as butylene diisocyanate and hexamethylene diisocyanate; cyclopentylene diisocyanate, cyclohexylene diisocyanate, and isocyanide Alicyclic isocyanates such as phorone diisocyanate; 2,4-toluene diisocyanate, 4,4'-diphenylmethane diisocyanate, and aromatic isocyanates such as xylylene diisocyanate; trimethylolpropane / Toluene diisocyanate trimer adduct (manufactured by Dongsuo Corporation, trade name "Coronate L"), trimethylolpropane/hexamethylene diisocyanate trimer adduct (manufactured by Dongsuo Corporation, trade name "Coronate HL") and isocyanate adducts such as the isocyanurate body of hexamethylene diisocyanate (manufactured by Tosso Corporation, trade name "Coronate HX"). The content of the isocyanate-based crosslinking agent can be set to any appropriate amount according to the required adhesive force, and relative to 100 parts by weight of the base polymer, it is typically 0.1 parts by weight to 20 parts by weight, more preferably 0.5 parts by weight to 0.5 parts by weight. 10 parts by weight.

As said epoxy type crosslinking agent, for example, N,N,N',N'-tetraglycidyl m-xylylenediamine, diglycidylaniline, 1,3-bis(N,N- Glycidylaminomethyl)cyclohexane (manufactured by Mitsubishi Gas Chemical Co., Ltd., trade name "Tetrad C"), 1,6-hexanediol diglycidyl ether (manufactured by Kyeisha Chemical Co., Ltd., trade name "Epolight 1600" ”), neopentyl glycol diglycidyl ether (manufactured by Kyeisha Chemical Co., Ltd., trade name “Epolight 1500NP”), ethylene glycol diglycidyl ether (manufactured by Kyeisha Chemical Co., Ltd., trade name “Epolight 40E”), Propylene glycol diglycidyl ether (manufactured by Kyeisha Chemical Co., Ltd., trade name "Epolight 70P"), polypropylene glycol diglycidyl ether (manufactured by NOF Corporation, trade name "EPIOL E-400"), polypropylene glycol diglycidyl ether ( Nippon Oil Co., Ltd., trade name "EPIOL P-200"), sorbitol polyglycidyl ether (manufactured by Nagase Chemical Co., Ltd., trade name "DENACOL EX-611"), glycerol polyglycidyl ether (Nagase Chemical Co., Ltd. manufactured, trade name "DENACOL EX-314"), pentaerythritol polyglycidyl ether, polyglycerol polyglycidyl ether (manufactured by Nagase Chemical Co., Ltd., trade name "DENACOL EX-512"), sorbitan polyglycidyl ether, Trimethylolpropane polyglycidyl ether, diglycidyl adipate, diglycidyl phthalate, triglycidyl-tris(2-hydroxyethyl)isocyanurate, resorcinol Diglycidyl ether, bisphenol-S-diglycidyl ether, epoxy resins having two or more epoxy groups in the molecule, and the like. The content of the epoxy-based cross-linking agent can be set to any appropriate amount according to the required adhesive force, with respect to 100 parts by weight of the base polymer, typically 0.01 parts by weight to 10 parts by weight, more preferably 0.03 parts by weight ~ 5 parts by weight.

Examples of the aforementioned adhesion imparting agent include rosin-based resins (eg, rosin ester resins, etc.), terpene-based resins (eg, terpene phenol copolymers (terpene-modified phenol resins), hydrogenated terpene resins, etc.), benzene resins, and the like. Furan-indene-based resins, alicyclic saturated hydrocarbon-based resins, petroleum-based resins (eg, aliphatic/aromatic copolymer-based petroleum resins, hydrocarbon-based petroleum resins such as aromatic petroleum resins, etc.), phenol-based resins, and the like. In one embodiment, from the viewpoint of ultraviolet absorption, a crosslinking agent having an aromatic ring and/or a double bond (eg, a rosin-based resin) can be used. The content of the adhesion-imparting agent can be set to any appropriate amount according to the required adhesive force, with respect to 100 parts by weight of the base polymer, typically 1 part by weight to 50 parts by weight, more preferably 10 parts by weight to 30 parts by weight share.

D. Substrate The above-mentioned base material may contain any appropriate resin. Examples of the resin include polyolefin-based resins such as polyethylene-based resins, polypropylene-based resins, polybutene-based resins, and polymethylpentene-based resins, polyurethane-based resins, and polyesters. resins, polyimide-based resins, polyetherketone-based resins, polystyrene-based resins, polyvinyl chloride-based resins, polyvinylidene chloride-based resins, fluorine-based resins, silicone-based resins, cellulose-based resins, and Ionic polymer resin, etc. Among them, polyolefin-based resins are preferred.

In one embodiment, the base material contains at least one selected from the group consisting of polyethylene terephthalate-based resins, polyimide-based resins, polystyrene-based resins, and polycarbonate-based resins. 1 type. The substrate containing these resins is advantageous from the viewpoint of low light transmittance at a wavelength of 248 nm.

The thickness of the base material is preferably 2 μm to 300 μm, more preferably 2 μm to 100 μm, and still more preferably 2 μm to 50 μm. In one embodiment, the thickness of the substrate is less than 50 μm, more preferably 30 μm or less, further preferably 20 μm or less, particularly preferably 10 μm or less, and most preferably 5 μm or less. By making the thickness of the base material thinner, an adhesive sheet excellent in releasability can be obtained because the strain generated in the adhesive layer is easily propagated to the transfer layer.

The indentation elastic modulus of the base material at 23° C. is preferably 5000 MPa or less, more preferably 3000 MPa or less, and still more preferably 1000 MPa or less. Within such a range, it is possible to obtain a base material that does not easily absorb the strain generated by the adhesive layer and easily propagates the strain to the transfer layer. The lower limit of the indentation elastic modulus of the substrate at 23° C. is preferably 1 MPa, more preferably 5 MPa, and still more preferably 10 MPa. Within such a range, an adhesive sheet having moderate rigidity and excellent handleability can be obtained.

The total light transmittance of the base material is preferably 70% or more, more preferably 80% or more, still more preferably 90% or more, and particularly preferably 95% or more. The upper limit of the total light transmittance of the substrate is, for example, 98% (preferably 99%).

E. Manufacturing method of adhesive sheet The above-mentioned adhesive sheet can be produced by any appropriate method. The adhesive sheet can be obtained by, for example, applying the above-mentioned adhesives to form an adhesive layer and a transfer layer on a substrate or a release liner, respectively. As the coating method, bar coater coating, air knife coating, gravure coating, reverse gravure coating, reverse roll coating, die lip coating, die coating, dip coating, offset coating can be used Various methods such as printing, flexographic printing, and screen printing. Moreover, it is also possible to form an adhesive sheet by forming an adhesive layer on a release liner, forming a transfer layer on another release liner, and bonding these or the like to a base material.

F. How to use the adhesive sheet The adhesive sheet of the present invention can be used to temporarily fix the processed member when processing and/or transporting any suitable member (eg, electronic part). As a method of using the adhesive sheet of the present invention, for example, the following methods can be exemplified: (i) attaching the adhesive layer to the support; (ii) attaching the processed member to the transfer layer of the adhesive sheet for fixing (ii) processing or conveying the processed member; (iii) irradiating the adhesive sheet with active energy rays (such as ultraviolet rays) to reduce the adhesive force on the transfer layer side of the adhesive sheet; (iv) for the part that needs to be peeled It is used by irradiating laser light to strain the adhesive layer. According to this method, the workpiece can be peeled off by natural falling. Moreover, in the case of temporarily fixing a plurality of workpieces, only a part of them can be peeled off. If the adhesive sheet of the present invention is used, the adhesive force can be reduced to such an extent that it naturally falls, so even very small (eg, 50 μm square) workpieces can be peeled off one by one.

As the support in the above (i), for example, a glass plate can be used. The support preferably has translucency. The total light transmittance of the support is, for example, 50% or more, preferably 80% or more.

In one embodiment, the active energy rays in the above (iii) are irradiated from the adhesive layer side (substantially the support side) of the adhesive sheet.

In one embodiment, the laser light in the above (iv) is irradiated from the adhesive layer side (substantially the support side) of the adhesive sheet.

In one embodiment, the wavelength of the laser light is 200 nm˜300 nm. [Example]

Hereinafter, although an Example demonstrates this invention concretely, this invention is not limited to these Examples. The test and evaluation methods of the examples are as follows. In addition, unless otherwise indicated, "parts" and "%" are weight standards.

(1) Adhesion I of the adhesive layer to the glass After peeling off the PET (Polyethylene terephthalate, polyethylene terephthalate) release film on the transfer layer side of the adhesive sheet, it was attached to PET (Lumirror S10, manufactured by Toray Industries) with a thickness of 25 μm. After that, the PET release film on the other side was peeled off, and the 2 kg roller was reciprocated once, and it was attached to a glass plate (manufactured by Songnami Glass Industry Co., Ltd., trade name "S200423"), using the method according to JIS Z 0237:2000 ( The peeling angle was 180°, the peeling speed (stretching speed) was 300 mm/min, and the measurement temperature: 23° C.) was used to measure the adhesive force.

(2) Adhesion of the transfer layer to the stainless steel plate After peeling off the PET separator on the side of the adhesive layer of the adhesive sheet (a PET separator attached to the transfer layer in Comparative Example 2), it was attached to a thickness of 25 mm. μm PET (manufactured by Toray, Lumirror S10). After that, the PET separator on the other side was peeled off, and the 2 kg roller was reciprocated once to be attached to SUS304 (Steel Use Stainless 304, 304 stainless steel), using the method according to JIS Z 0237:2000 (peeling angle 180°, The peeling speed (stretching speed) 300 mm/min, measurement temperature: 23° C.) was used to measure the adhesive force, and it was used as the initial adhesive force A. In the same way, after the adhesive sheet was attached to SUS304, an ultraviolet ray irradiation device (manufactured by Nitto Seiki, trade name "UM-810") was used to irradiate the entire surface of the adhesive layer with ultraviolet rays from a high-pressure mercury lamp (specific wavelength: 365 nm, cumulative light intensity: 300 mJ/cm ² ), the adhesive force was measured in the same manner, and it was set as the adhesive force B after hardening.

(3) Press-fit elastic modulus (before hardening) The indentation elastic modulus of the adhesive layer and the transfer layer was obtained by measuring the indentation elastic modulus using a TriboIndenter TI-950 manufactured by Hysitron Corporation. The measurement was performed by a single indentation method at 23° C. with an indentation speed of 10 nm/s and an indentation depth of 100 nm.

(4) Press-fit elastic modulus (after hardening) After peeling off the PET separator on the adhesive layer side of the adhesive sheet (in Comparative Example 2, the PET separator attached to the transfer layer), it was pasted using a manual roller. On a large glass slide (manufactured by Songnang Glass, trade name "S9111"). Using an ultraviolet irradiation device (manufactured by Nitto Seiki, trade name "UM-810"), ultraviolet rays of a high pressure mercury lamp (specific wavelength: 365 nm, cumulative light intensity: 300 mJ/ ^cm2 ) were irradiated from the entire surface of the slide glass surface of the obtained sample. ). Then, another PET separator was peeled off to expose the transfer layer, and the indentation elastic modulus was measured using a TriboIndenter TI-950 manufactured by Hysitron. The measurement was performed by a single indentation method at 23° C. with an indentation speed of 10 nm/s and an indentation depth of 100 nm.

(5) Haze value The haze value of the adhesive sheet was measured using a haze meter (manufactured by Murakami Color Institute, trade name "HAZE METER HM-150").

(6) Light transmittance Using a spectrophotometer (manufactured by Hitachi High-Tech Science, trade name "Spectrophotometer U-4100"), the light transmittance at a wavelength of 365 nm and the light transmittance at 248 nm of the adhesive sheet were measured.

(7) Peelability (transferability) After peeling off the PET separator on the adhesive layer side of the adhesive sheet (in Comparative Example 2, the PET separator attached to the transfer layer), it was pasted on a hand roller using a manual roller. Quartz plate (manufactured by AS ONE). After that, after peeling off the PET separator on the other side, a silicon wafer of 125 μm×100 μm is attached to the adhesive side of the transfer layer. Using an ultraviolet irradiation device (manufactured by Nitto Seiki, trade name "UM-810"), ultraviolet rays from a high-pressure mercury lamp (specific wavelength: 365 nm, cumulative light intensity: 300 mJ/cm ² ) were irradiated from the entire surface of the quartz plate. Then, from the quartz plate side, only the target member position was irradiated (1 plus per chip) with laser light with a wavelength of 248 nm (irradiation area: 130 μm×105 μm, output 100 mJ/cm ² ), and the situation of natural falling was evaluated as Passed (○), the situation that did not fall naturally was evaluated as unqualified (×).

(8) Whether there is deformation The deformation of the surface of the transfer layer after laser irradiation was observed by a microscope. The case where a significant color difference was observed between the laser-irradiated part and other parts was evaluated as unacceptable (x), and the case where this was not the case was evaluated as pass (◯). In addition, the photomicrograph of the surface of the transfer layer of Example 1 (evaluation of presence or absence of deformation: pass) is shown in Fig. 2(a), and the microscope of the surface of the transfer layer of Comparative Example 1 (evaluation of presence or absence of deformation: unacceptable) The photogram is shown in Figure 2(b).

(9) Paste residue The glass plate after the evaluation of the above-mentioned "(1) Adhesion of the adhesive layer to glass" was visually observed. The case where the adhesive layer remained on the glass was evaluated as unacceptable (x), and the case where this was not the case was evaluated as acceptable (◯).

[Production Example 1] Adjustment of Acrylic Polymer I A monomer composition was prepared by mixing 30 parts by weight of 2-ethylhexyl acrylate, 70 parts by weight of butyl acrylate, 3 parts by weight of acrylic acid, and 1 part by weight of 4-hydroxybutyl acrylate. Next, nitrogen gas was introduced into a reaction vessel equipped with a nitrogen gas introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 103.1 parts by weight of the above-mentioned monomer composition, 0.2 parts by weight of benzyl peroxide (BPO), and toluene were added. 150 parts by weight were stirred at 60° C. for 6 hours to obtain an acrylic polymer solution I containing the acrylic polymer I.

[Production Example 2] Adjustment of Acrylic Polymer II 70 parts by weight of ethyl acrylate, 30 parts by weight of 2-hydroxyethyl acrylate, 5 parts by weight of methyl methacrylate, and 4 parts by weight of hydroxyethyl acrylate were mixed to prepare a monomer composition. Next, nitrogen gas was introduced into a reaction vessel equipped with a nitrogen gas introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 295 parts by weight of toluene, 109 parts by weight of the above-mentioned monomer composition, and benzyl peroxide (BPO) were added. 0.2 parts by weight was stirred at 60° C. for 6 hours to obtain an acrylic polymer solution II containing an acrylic polymer II having a weight average molecular weight of 500,000.

[Production Example 3] Adjustment of Acrylic Polymer III A monomer composition was prepared by mixing 100 parts by weight of 2-ethylhexyl acrylate, 2 parts by weight of acrylic acid, and 0.01 parts by weight of trimethylolpropane triacrylate. Next, nitrogen gas was introduced into a reaction vessel equipped with a nitrogen gas introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 102.01 parts by weight of the above-mentioned monomer composition, 0.2 parts by weight of benzyl peroxide (BPO), and toluene were added. 189 parts by weight were stirred at 60° C. for 7 hours to obtain an acrylic polymer solution III containing the acrylic polymer III.

[Production Example 4] Adjustment of Acrylic Polymer IV A monomer composition was prepared by mixing 100 parts by weight of butyl acrylate, 78 parts by weight of ethyl acrylate, and 40 parts by weight of hydroxyethyl acrylate. Next, nitrogen gas was introduced into a reaction vessel equipped with a nitrogen gas introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 507 parts by weight of toluene, 218 parts by weight of the above-mentioned monomer composition, and benzyl peroxide (BPO) were added. 1.2 parts by weight, stirred at 60° C. for 5 hours. After that, it was cooled to room temperature, 42.6 parts by weight of 2-methacryloyloxyethyl isocyanate was added and reacted, and an NCO group was added to the OH group of the side chain end of 2-hydroxyethyl acrylate in the copolymer, An acrylic polymer solution IV containing an acrylic polymer IV having a carbon-carbon double bond at the terminal was obtained.

[Production Example 5] Adjustment of Acrylic Polymer V A monomer composition was prepared by mixing 100 parts by weight of 2-ethylhexyl acrylate, 25.5 parts by weight of acrylofenac, and 18.5 parts by weight of hydroxyethyl acrylate. Next, nitrogen gas was introduced into a reaction vessel equipped with a nitrogen gas introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 60 parts by weight of toluene, 144 parts by weight of the above-mentioned monomer composition, and benzyl peroxide (BPO) were added. 0.3 parts by weight, stirred at 60° C. for 4 hours. After that, it was cooled to room temperature, 12 parts by weight of 2-methacryloyloxyethyl isocyanate was added and reacted, and an NCO group was added to the OH group at the end of the side chain of 2-hydroxyethyl acrylate in the copolymer, An acrylic polymer solution V containing an acrylic polymer V having a carbon-carbon double bond at the terminal was obtained.

[Production Example 6] Adjustment of Acrylic Polymer VI 100 parts by weight of 2-methoxyethyl acrylate, 27 parts by weight of acrylofenac, and 22 parts by weight of 2-hydroxyethyl acrylate were mixed to prepare a monomer composition. Next, nitrogen gas was introduced into a reaction vessel equipped with a nitrogen gas introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 500 parts by weight of toluene, 149 parts by weight of the above-mentioned monomer composition, and benzyl peroxide (BPO) were added. 0.3 parts by weight was stirred at 60° C. for 5 hours. After that, it was cooled to room temperature, 24 parts by weight of 2-methacryloyloxyethyl isocyanate was added and reacted, and an NCO group was added to the OH group at the end of the side chain of 2-hydroxyethyl acrylate in the copolymer, An acrylic polymer solution VI containing an acrylic polymer VI having a carbon-carbon double bond at the terminal was obtained.

[Example 1] (Preparation of adhesive) In the acrylic polymer solution I containing 100 parts by weight of the acrylic polymer I, 2 parts by weight of a crosslinking agent (manufactured by Tosho Corporation, trade name "Coronate L"), an adhesion imparting resin (manufactured by Arakawa Chemical Industry Co., Ltd., trade name "D-125") 30 parts by weight to obtain an adhesive (1) for forming an adhesive layer. In the acrylic polymer solution IV containing 100 parts by weight of the acrylic polymer IV, 3 parts by weight of a crosslinking agent (manufactured by Dongsuo Corporation, trade name "Coronate L"), a photopolymerization initiator (manufactured by BASF, trade name "Coronate L") were added. name "Irgacure 127") 10 parts by weight to obtain an adhesive (A) for forming a transfer layer. (adhesive sheet) The above-mentioned adhesive (1) was coated on the silicone-treated surface of a PET separator (thickness: 38 μm), and then heated at 120° C. for 2 minutes to form an adhesive layer with a thickness of 4 μm. In addition, the above-mentioned adhesive (A) was coated on the silicone-treated surface of a PET separator (thickness: 75 μm), and then heated at 120° C. for 2 minutes to form a transfer layer with a thickness of 5 μm. A PET base material (manufactured by Toray Corporation, trade name "Lumirror 2DC61", thickness: 2 μm) was pasted with an adhesive layer with a PET separator on one side, and a PET separator on the other side. The printing layer is obtained, and the adhesive sheet containing the PET release film/adhesive layer/substrate/transfer layer/PET release film is obtained. The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Example 2] An adhesive sheet was obtained in the same manner as in Example 1, except that the acrylic polymer solution V containing 100 parts by weight of the acrylic polymer V was used instead of the acrylic polymer solution IV. The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Example 3] In the acrylic polymer solution VI containing 100 parts by weight of the acrylic polymer VI, 5 parts by weight of a crosslinking agent (manufactured by Dongsuo Corporation, trade name "Coronate L"), a photopolymerization initiator (manufactured by BASF, trade name "Coronate L") were added. name "Irgacure 127") 10 parts by weight to obtain an adhesive (C) for forming a transfer layer. An adhesive sheet was obtained in the same manner as in Example 1 except that the transfer layer was formed by using the adhesive (C) instead of the adhesive (A). The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Example 4] In the acrylic polymer solution VI containing 100 parts by weight of the acrylic polymer VI, 5 parts by weight of a crosslinking agent (manufactured by Dongsuo Corporation, trade name "Coronate L"), a photopolymerization initiator (manufactured by BASF, trade name "Coronate L") were added. name "Irgacure 127") 10 parts by weight, and 5 parts by weight of silica fine particles (manufactured by Yamato Corporation, trade name "YA050C") to obtain an adhesive (D) for forming a transfer layer. An adhesive sheet was obtained in the same manner as in Example 1, except that the adhesive (D) was used instead of the adhesive (A) to form the transfer layer. The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Example 5] An adhesive sheet was obtained in the same manner as in Example 3 except that the thickness of the adhesive layer was 20 μm. The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Example 6] (Preparation of adhesive) In the same manner as in Example 1, an adhesive (1) for forming an adhesive layer was obtained. In the acrylic polymer solution VI containing 100 parts by weight of the acrylic polymer VI, 5 parts by weight of a crosslinking agent (manufactured by Dongsuo Corporation, trade name "Coronate L"), a photopolymerization initiator (manufactured by BASF, trade name "Coronate L") were added. Name "Irgacure 127") 10 weight parts, and ultraviolet absorber (manufactured by BASF, trade name "Tinuvin 405", molecular weight: 583.8) 5 weight parts, and obtain the adhesive (E) for transfer layer formation. (adhesive sheet) The above-mentioned adhesive (1) was coated on the silicone-treated surface of a PET separator (thickness: 38 μm), and then heated at 120° C. for 2 minutes to form an adhesive layer with a thickness of 4 μm. In addition, the above-mentioned adhesive (E) was coated on the silicone-treated surface of a PET separator (thickness: 75 μm), and then heated at 120° C. for 2 minutes to form a transfer layer with a thickness of 5 μm. A PET substrate (manufactured by Toray Corporation, trade name "Lumirror S10", thickness: 25 μm) was pasted with an adhesive layer with a PET separator on one side, and a transfer layer with a PET separator on the other side. , to obtain an adhesive sheet containing PET release film/adhesive layer/substrate/transfer layer/PET release film. The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Example 7] An adhesive sheet was obtained in the same manner as in Example 3 except that the thickness of the transfer layer was set to 25 μm. The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Example 8] (Preparation of adhesive) To the acrylic polymer solution II containing 100 parts by weight of the acrylic polymer II, 8.5 parts by weight of a crosslinking agent (manufactured by Dongsuo Corporation, trade name "Coronate L") was added to obtain an adhesive for forming an adhesive layer ( 2). In the same manner as in Example 3, an adhesive (C) for forming a transfer layer was obtained. (adhesive sheet) The above-mentioned adhesive (2) was coated on the silicone-treated surface of a PET separator (thickness: 38 μm), and then heated at 120° C. for 2 minutes to form an adhesive layer with a thickness of 4 μm. In addition, the above-mentioned adhesive (C) was coated on the silicone-treated surface of a PET separator (thickness: 75 μm), and then heated at 120° C. for 2 minutes to form a transfer layer with a thickness of 5 μm. A PET substrate (manufactured by Toray Corporation, trade name "Lumirror 2DC61", thickness: 2 μm) was pasted with an adhesive layer with a PET separator on one side, and a transfer layer with a PET separator on the other side , to obtain an adhesive sheet containing PET release film/adhesive layer/substrate/transfer layer/PET release film. The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Comparative Example 1] (Preparation of adhesive) To the acrylic polymer solution III containing 100 parts by weight of the acrylic polymer III, 2 parts by weight of a crosslinking agent (manufactured by Dongsuo Corporation, trade name "Coronate L") was added to obtain an adhesive for forming an adhesive layer. (3). In the same manner as in Example 3, an adhesive (C) for forming a transfer layer was obtained. (adhesive sheet) The above-mentioned adhesive (3) was coated on the silicone-treated surface of the PET separator (thickness: 38 μm), and then heated at 120° C. for 2 minutes to form an adhesive layer with a thickness of 4 μm. In addition, the above-mentioned adhesive (C) was coated on the silicone-treated surface of a PET separator (thickness: 75 μm), and then heated at 120° C. for 2 minutes to form a transfer layer with a thickness of 5 μm. A PET substrate (manufactured by Toray Corporation, trade name "Lumirror 2DC61", thickness: 2 μm) was pasted with an adhesive layer with a PET separator on one side, and a transfer layer with a PET separator on the other side , an adhesive sheet containing PET release film/adhesive layer/substrate/transfer layer/PET release film was obtained. The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Comparative Example 2] (Preparation of adhesive) In the same manner as in Example 3, an adhesive (C) for forming a transfer layer was obtained. (adhesive sheet) The above-mentioned adhesive (C) was coated on the silicone-treated surface of a PET separator (thickness: 75 μm), and then heated at 120° C. for 2 minutes to form a transfer layer with a thickness of 5 μm. On the transfer layer, another PET separator (thickness: 38 μm) was laminated to obtain an adhesive sheet comprising a PET separator/transfer layer/PET separator.

[Comparative Example 3] To the acrylic polymer solution I containing 100 parts by weight of the acrylic polymer I, 2 parts by weight of a crosslinking agent (manufactured by Tosho Corporation, trade name "Coronate L"), an adhesion imparting resin (manufactured by Arakawa Chemical Industry Co., Ltd., trade name) was added. name "D-125") 30 parts by weight to obtain an adhesive (F) for forming a transfer layer. An adhesive sheet was obtained in the same manner as in Example 1 except that the transfer layer was formed using the adhesive (F) instead of the adhesive (A). The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Comparative Example 4] In the acrylic polymer solution V containing 100 parts by weight of the acrylic polymer V, 3 parts by weight of a crosslinking agent (manufactured by Dongsuo Corporation, trade name "Coronate L"), a photopolymerization initiator (manufactured by BASF, trade name "Coronate L") were added. name "Irgacure 127") 0.5 parts by weight to obtain an adhesive (G) for forming a transfer layer. An adhesive sheet was obtained in the same manner as in Example 8, except that the transfer layer was formed by using the adhesive (G) instead of the adhesive (C). The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Comparative Example 5] (Preparation of adhesive) In the same manner as in Example 1, an adhesive (1) for forming an adhesive layer was obtained. In the same manner as in Comparative Example 3, an adhesive (F) for forming a transfer layer was obtained. (adhesive sheet) The above-mentioned adhesive (1) was coated on the silicone-treated surface of a PET separator (thickness: 38 μm), and then heated at 120° C. for 2 minutes to form an adhesive layer with a thickness of 4 μm. In addition, the above-mentioned adhesive (F) was coated on the silicone-treated surface of a PET separator (thickness: 75 μm), and then heated at 120° C. for 2 minutes to form a transfer layer with a thickness of 5 μm. The adhesive layer with the PET separator was attached to one side of the PET substrate (manufactured by Toray Corporation, trade name "Lumirror S27", thickness: 75 μm), and the transfer layer with the PET separator was attached to the other side. On one side, an adhesive sheet containing PET release film/adhesive layer/substrate/transfer layer/PET release film is obtained. The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Comparative Example 6] In addition to using PP (Polypropylene, polypropylene) substrate (manufactured by Toray Corporation, trade name "Torayfan BO 12D-KW37", thickness: 12 μm) instead of PET substrate (manufactured by Toray Corporation, trade name "Lumirror S27", Except thickness: 75 μm), it carried out similarly to the comparative example 5, and obtained the adhesive sheet. The above-mentioned evaluation was performed on the obtained adhesive sheet. The results are shown in Table 1.

[Table 1] Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Comparative Example 5 Comparative Example 6 adhesive layer Acrylic polymer type I I I I I I I II III - I II I I number of copies 100 100 100 100 100 100 100 100 100 100 100 100 100 cross-linking agent type C/L C/L C/L C/L C/L C/L C/L C/L C/L C/L C/L C/L C/L number of copies 2 2 2 2 2 2 2 8.5 2 2 8.5 2 2 Additives (adhesion imparting agents) type D-125 D-125 D-125 D-125 D-125 D-125 D-125 - - D-125 - D-125 D-125 number of copies 30 30 30 30 30 30 30 30 30 30 Thickness (μm) 4 4 4 4 20 4 4 4 4 4 4 4 4 substrate type PET PET PET PET PET PET PET PET PET PET PET PET PET PP Thickness (μm) 2 2 2 2 2 25 2 2 2 2 2 2 75 12 transfer layer Acrylic polymer type IV V VI VI VI VI VI VI VI VI I V I I number of copies 100 100 100 100 100 100 100 100 100 100 100 100 100 100 cross-linking agent type C/L C/L C/L C/L C/L C/L C/L C/L C/L C/L C/L C/L C/L C/L number of copies 3 3 5 5 5 5 5 5 5 5 2 3 2 2 photopolymerization initiator type Irg127 Irg127 Irg127 Irg127 Irg127 Irg127 Irg127 Irg127 Irg127 Irg127 - Irg127 - - number of copies 10 10 10 10 10 10 10 10 10 10 0.5 additive type - - - YA050C - Tinuvin405 - - - - D-125 - D-125 D-125 number of copies 5 5 30 30 30 thickness 5 5 5 5 5 5 25 5 5 5 5 5 5 5 Evaluate adhesive layer Adhesion to Glass I (N/20mm) 8.1 8.1 8.1 8.1 11.5 8.1 8.1 2.3 0.3 0.07 8.1 2.3 8.1 8.1 Elastic modulus I (MPa) 0.08 0.08 0.08 0.08 0.08 0.08 0.08 2.2 0.03 156 0.08 2.2 0.08 0.08 transfer layer Initial Adhesion A to SUS (N/20mm) 1.8 3.9 3.3 2.5 3.3 1.3 3.3 3.3 3.3 3.3 6.8 3.92 6.8 6.8 Adhesion B for SUS after hardening (N/20mm) 0.09 0.44 0.07 0.06 0.07 0.09 0.07 0.07 0.07 0.07 6.8 0.59 6.8 6.8 Elastic modulus before hardening (Initial press-in elastic modulus A) (MPa) 0.37 0.35 0.89 0.25 0.89 0.72 0.89 0.89 0.89 0.89 0.08 0.53 0.08 0.08 Elastic modulus B after hardening (MPa) 14 66 156 192 156 95 192 156 156 156 0.08 10 0.08 0.08 Adhesion I/Adhesion B after hardening 90 18 116 135 165 90 116 33 4 1 1 4 1 1 Modulus of elasticity I / Modulus of elasticity after hardening B 0.0054 0.0012 0.0005 0.0004 0.0005 0.0008 0.0004 0.0141 0.0002 1.0000 1.0000 0.2192 1.0000 1.0000 With or without deformation 〇 〇 〇 〇 〇 〇 〇 〇 × × 〇 〇 〇 〇 transferability 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 × × × × paste residue 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 × Adhesion ratio of transfer layer before and after hardening 20 9 47 41 47 14 47 47 47 47 1 7 1 1 The ratio of elastic modulus before and after the hardening of the transfer layer 0.026 0.005 0.006 0.001 0.006 0.008 0.005 0.006 0.006 0.006 1.000 0.053 1.000 1.000 haze (%) 1.0 0.8 4.7 6.0 3.0 2.6 0.4 0.8 1.9 4.6 1.0 4.4 9.1 1.2 365 nm transmittance (%) 88.1 88.0 87.1 85.6 87.1 52.6 81.2 88.8 88.5 97.1 88.6 87.8 81.37 90.93 248 nm transmittance (%) 1.3 0.0 1.6 0.0 1.3 0.7 1.0 1.1 0.6 5.6 1.2 1.4 1.58 3.45

10: Adhesive layer 20: transfer layer 30: Substrate 100: Adhesive Sheet 200: Adhesive Sheet

Fig. 1(a) is a schematic cross-sectional view of an adhesive sheet according to an embodiment of the present invention. Fig. 1(b) is a schematic cross-sectional view of an adhesive sheet according to another embodiment of the present invention. FIG. 2(a) is a photomicrograph of the surface of the transfer layer of Example 1. FIG. FIG. 2(b) is a photomicrograph of the surface of the transfer layer of Comparative Example 1. FIG.

10: Adhesive layer

20: transfer layer

30: Substrate

100: Adhesive Sheet

200: Adhesive Sheet

Claims (5)

An adhesive sheet comprising an adhesive layer and a transfer layer disposed on one side of the adhesive layer, and the transfer layer is a layer hardened by irradiating active energy rays, the adhesive layer of the adhesive sheet The adhesive force I at 23°C when it is attached to the glass plate is more than 2 N/20 mm, and the adhesive force I at 23°C of the adhesive layer of the adhesive sheet when it is attached to the glass plate is relative to the The ratio of the adhesive force B at 23° C. after the transfer layer was irradiated with ultraviolet rays of 300 mJ/cm ² was 5 or more. The adhesive sheet according to claim 1, further comprising a base material between the adhesive layer and the transfer layer. The adhesive sheet of claim 1 or 2, wherein after irradiating ultraviolet rays of 300 mJ/cm ² , the press-fit elastic modulus B of the transfer layer at 23°C is the press-fit elastic modulus of the adhesive layer at 23°C More than 5 times the number I. The adhesive sheet of any one of claims 1 to 3, wherein The above-mentioned transfer layer contains an active energy ray hardening type adhesive, The active energy ray-curable adhesive contains an acrylic polymer as a base polymer. The adhesive sheet according to any one of Claims 1 to 4, which can be used for the following purposes: using the above-mentioned adhesive sheet to temporarily fix a member on a support, and then irradiating the member with laser light after transportation and/or processing, etc. Peel from support.

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