TW202225557A - Shape memory alloy actuators and methods thereof - Google Patents

Abstract

SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.

Description

Shape memory alloy actuator and method therefor

Embodiments of the present invention relate to the field of shape memory alloy systems. More particularly, embodiments of the present invention relate to the field of shape memory alloy actuators and related methods.

Shape memory alloy ("SMA") systems have, for example, a moving assembly or structure that can be used in conjunction with a camera lens element as an autofocus drive. Such systems may be enclosed by a structure such as a shielded enclosure. The moving assembly is supported by a bearing, such as a plurality of balls, for movement on a support assembly. A flexure element formed of a metal such as phosphor bronze or stainless steel has a moving plate and flexure. A flexure extends between the moving plate and the fixed support assembly and acts as a spring to enable the moving assembly to move relative to the fixed support assembly. The balls allow the moving assembly to move with little resistance. The moving and support assemblies are coupled by four shape memory alloy (SMA) wires extending between the assemblies. Each of the SMA wires has one end attached to the support assembly and an opposite end attached to the moving assembly. The suspension is actuated by applying an electrical drive signal to the SMA wire. However, these types of systems suffer from system complexity, which results in bulky systems requiring a large footprint and a large headroom. Furthermore, the present system cannot provide a high Z travel range with a compact, low profile footprint.

The present disclosure describes SMA actuators and related methods. One embodiment of an actuator includes: a base; a plurality of buckle arms; and at least one first shape memory alloy wire coupled to a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes: a substrate; and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator is attached to the substrate.

Other features and advantages of embodiments of the invention will be apparent from the accompanying drawings and the following detailed description.

Cross-references to related applications This application claims the rights and priority of US Provisional Application No. 63/090,569, filed on October 12, 2020, and US Patent Application No. 17/207,530, filed on March 19, 2021, in full Incorporated herein by reference.

Described herein are embodiments of an SMA actuator that include a compact footprint and provide a high actuation height, eg, moving in the positive z-axis direction (z-direction), referred to herein as z-travel. Embodiments of SMA actuators include an SMA fastener actuator and an SMA bimorph actuator. SMA actuators can be used in many applications including (but not limited to) as an autofocus actuator a lens assembly, a microfluidic pump, a sensor shift, optical image stabilization, optical zoom assemblies , Mechanical impact on two surfaces to create the vibratory sensation commonly found in haptic feedback sensors and devices and other systems in which an actuator is used. For example, embodiments of the actuator described herein can be used as a haptic feedback actuator for a cell phone or a cell phone that is configured to provide a user with an alarm, notification, alert, touch area or button response. in wearable devices. Additionally, more than one SMA actuator can be used in a system to achieve a larger stroke.

For various embodiments, the SMA actuator has a z-travel greater than 0.4 millimeters. Furthermore, for various embodiments, the SMA actuator has a height in the z-direction of 2.2 millimeters or less when the SMA actuator is in its initial de-actuated position. Various embodiments of an SMA actuator configured as an autofocus actuator in a lens assembly can have a footprint as small as 3 mm larger than the inner diameter ("ID") of the lens. According to various embodiments, SMA actuators may have a footprint that is wider in one direction to accommodate components including, but not limited to, sensors, wires, traces, and connectors. According to some embodiments, the footprint of an SMA actuator is 0.5 mm larger in one direction, eg, the length of the SMA actuator is 0.5 mm larger than the width.

1a illustrates a lens assembly including an SMA actuator configured as a fastener actuator, according to one embodiment. Figure lb illustrates an SMA actuator configured as a fastener actuator according to an embodiment. The fastener actuator 102 is coupled to a base 101 . As depicted in Figure lb, the SMA wire 100 is attached to the fastener actuator 102 such that when the SMA wire 100 is actuated and retracted, this causes the fastener actuator 102 to buckle, which causes each fastener to actuate At least the central portion 104 of the actuator 102 moves in the z travel direction (eg, the positive z direction), as indicated by arrow 108 . According to some embodiments, the wire is actuated when current is supplied to one end of the SMA wire 100 through a wire retainer, such as a jaw structure 106 . Current flows through the SMA wire 100 to heat the SMA wire 100 due to the resistance inherent in the SMA material from which the SMA wire 100 is made. The other side of the SMA wire 100 has a wire retainer, such as a clamp structure 106, which connects the SMA wire 100 to complete the circuit ground. Heating the SMA wire 100 to a sufficient temperature causes the unique material properties to change from a martensite to austenitic crystalline structure, which causes a change in length of the wire. Changing the current changes the temperature and thus the length of the wire, which is used to activate and de-actuate the actuator to control movement of the actuator in at least the z-direction. Those skilled in the art will appreciate that other techniques can be used to provide current to an SMA wire.

2 illustrates an SMA actuator configured as an SMA bimorph actuator according to an embodiment. As shown in FIG. 2 , the SMA actuator includes a bimorph actuator 202 coupled to a substrate 204 . The bimorph actuator 202 includes an SMA tape 206 . The bimorph actuator 202 is configured to move at least the unsecured end of the bimorph actuator 202 in the z-travel direction 208 as the SMA tape 206 contracts.

3 illustrates an exploded view of an autofocus assembly including an SMA actuator, according to one embodiment. As depicted, an SMA actuator 302 is configured as a fastener actuator 302 according to embodiments described herein. The autofocus assembly also includes an optical image stabilizer ("OIS") 304, a lens bracket 306 configured to hold one or more optical lenses using techniques including those known in the art, a return spring 308 , a vertical sliding bearing 310 and a guide cover 312 . When the SMA wire is actuated and pulls and fastens the fastener actuator 302 using techniques including the techniques described herein, the lens holder 306 is configured to follow the fastener actuator 302 in the z-travel direction ( For example, in the positive z direction), it slides against the vertical sliding bearing 310 . Return spring 308 is configured to apply a force to lens carrier 306 in a direction opposite the z-travel direction using techniques including those known in the art. According to various embodiments, the return spring 308 is configured to move the lens holder 306 in the opposite direction of the z-travel direction when the tension of the SMA wire decreases as the SMA wire is de-actuated. When the tension of the SMA wire is reduced to the initial value, the lens holder 306 moves to the lowest height in the z-travel direction. FIG. 4 shows an autofocus assembly including an SMA wire actuator according to one embodiment shown in FIG. 3 .

5 illustrates an SMA wire actuator according to an embodiment including a sensor. For various embodiments, sensor 502 is configured to measure movement of the SMA actuator in the z-direction or movement of a component of SMA actuator movement using techniques including those known in the art. The SMA actuators include one or more fastener actuators 506 that are configured to actuate using one or more SMA wires 508 similar to those described herein. For example, in the autofocus assembly described with reference to FIG. 4, the sensor is configured to determine movement of the lens carrier 306 in the z-direction 504 from an initial position using techniques including those known in the art quantity. According to some embodiments, the sensor is a tunneling magnetoresistive ("TMR") sensor.

6 shows a top view and a side view of an SMA actuator 602 configured as a fastener actuator with a lens holder 604 assembled, according to one embodiment. FIG. 7 shows a side view of a section of an SMA actuator 602 according to the embodiment depicted in FIG. 6 . According to the embodiment shown in FIG. 7 , the SMA actuator 602 includes a sliding base 702 . According to one embodiment, the sliding base 702 is formed from a metal such as stainless steel using techniques including those known in the art. However, those skilled in the art will appreciate that other materials may be used to form sliding base 702 . Additionally, the sliding base 702 has a spring arm 612 coupled to the SMA actuator 602 according to some embodiments. According to various embodiments, the spring arm 612 is configured to provide two functions. The first function is to help push an object, such as a lens holder 604, into the vertical sliding surface of a guide cover. For this example, the spring arm 612 preloads the lens holder 604 up against this surface to ensure that the lens does not tilt during actuation. For some embodiments, the vertical sliding surface 708 is configured to mate with the guide cover. A second function of the spring arm 612 is to help pull the SMA actuator 602 back down in the negative z-direction, for example, after the SMA wire 608 has moved the SMA actuator 602 in the z-travel direction (positive z-direction). Thus, when the SMA wire 608 is actuated, it contracts to move the SMA actuator 602 in the z-travel direction, and when the SMA wire 608 is de-actuated, the spring arm 612 is configured to move in the opposite direction of the z-travel direction SMA actuator 602 is moved.

The SMA actuator 602 also includes a fastener actuator 710 . For various embodiments, the fastener actuator 710 is formed from a metal such as stainless steel. Additionally, the buckle actuator 710 includes a buckle arm 610 and one or more wire retainers 606 . According to the embodiment depicted in FIGS. 6 and 7 , the fastener actuator 710 includes four wire retainers 606 . The four wire retainers 606 are each configured to receive one end of an SMA wire 608 and hold an end of the SMA wire 608 such that the SMA wire 608 is attached to the fastener actuator 710 . For various embodiments, the four wire retainers 606 are configured to grip a portion of the SMA wire 608 to attach the wire to the jaws of the jaws. Those skilled in the art will appreciate that an SMA wire 608 can be attached to the wire retainer 606 using techniques known in the art including, but not limited to, gluing, welding, and mechanical attachment. A smart memory alloy ("SMA") wire 608 extends between a pair of wire retainers 606 such that the buckle arm 610 of the buckle actuator 710 is configured to move when the SMA wire 608 is actuated, which causes the pair of wires The retainers 606 are drawn together. According to various embodiments, when a current is applied to the SMA wire 608, the SMA wire 608 is electrically actuated to move and control the position of the buckle arm 610. The SMA wire 608 is deactivated when the current is removed or below a threshold value. This causes the pair of wire holders 606 to separate and the clasp arms 610 to move in the opposite direction to the direction in which the SMA wire 608 is actuated. According to various embodiments, the buckle arm 610 is configured to have an initial angle of 5 degrees relative to the sliding base 702 when the SMA wire is de-actuated in its initial position. And according to various embodiments, at full stroke or when the SMA wire is fully actuated, the buckle arm 610 is configured to have an angle of 10 degrees to 12 degrees relative to the sliding base 702 .

According to the embodiment depicted in FIGS. 6 and 7 , the SMA actuator 602 also includes a sliding bearing 706 configured between the sliding base 702 and the wire holder 606 . Slide bearing 706 is configured to minimize any friction between slide base 702 and a snap arm 610 and/or wire retainer 606 . For some embodiments, a plain bearing is attached to plain bearing 706 . According to various embodiments, the sliding bearing is formed of polyoxymethylene ("POM"). Those skilled in the art will appreciate that other structures may be used to reduce any friction between the fastener actuator and the substrate.

According to various embodiments, the sliding base 702 is configured to couple with an assembly base 704, such as an autofocus base of an autofocus assembly. According to some embodiments, the actuator substrate 704 includes an etched spacer. When the SMA actuator 602 is part of an assembly such as an autofocus assembly, this etched spacer can be used to provide clearance for the wire and jaws.

FIG. 8 shows views of one embodiment of a fastener actuator 802 relative to an x-axis, a y-axis, and a z-axis. Oriented in Figure 8, the buckle arm 804 is configured to move in the z-axis when the SMA wire is actuated and de-actuated as described herein. According to the embodiment shown in FIG. 8 , the buckle arms 804 are coupled to each other through a central portion such as a suspension portion 806 . According to various embodiments, a hanger portion 806 is configured to hang an object that is acted upon by the fastener actuator (eg, a lens moved by the fastener actuator using techniques including the techniques described herein) part of the bracket). According to some embodiments, a suspension portion 806 is configured to provide lateral stiffness to the fastener actuator during actuation. For other embodiments, a fastener actuator does not include a suspension portion 806 . According to these embodiments, the buckle arm is configured to apply an action to an object to move it. For example, the snap arm is configured to apply directly to a feature of a lens holder to push it up.

9 illustrates an SMA actuator configured as an SMA bimorph actuator according to an embodiment. The SMA bimorph actuator includes bimorph actuator 902, which includes the bimorph actuator described herein. According to the embodiment depicted in FIG. 9 , one end 906 of each of the bimorph actuators 902 is attached to a substrate 908 . According to some embodiments, the one end 906 is welded to the base 908 . However, those skilled in the art will appreciate that other techniques may be used to attach the end 906 to the substrate 908 . 9 also depicts a lens carrier 904 configured such that the bimorph actuator 902 is configured to crimp in the z-direction and lift the carrier 904 in the z-axis direction when actuated. For some embodiments, a return spring is used to push the bimorph actuator 902 back to an initial position. A return spring can be configured as described herein to assist in pushing down the bimorph actuator to its initial de-actuated position. Due to the small footprint of bimorph actuators, SMA actuators can be fabricated with a reduced footprint than current actuator technology.

10 illustrates a cross-sectional view of an autofocus assembly including an SMA actuator including a position sensor such as a TMR sensor, according to an embodiment. Autofocus assembly 1002 includes a position sensor 1004 attached to a moving spring 1006 and one of an autofocus assembly that includes an SMA actuator, such as the SMA actuator described herein A magnet 1008 of the lens holder 1010. The position sensor 1004 is configured to determine the amount of movement of the lens holder 1010 in the z-direction 1005 from an initial position based on a distance of the magnet 1008 from the position sensor 1004 using techniques including techniques known in the art . According to some embodiments, position sensor 1004 uses electrical traces on a spring arm of a moving spring 1006 of an optical image stabilization assembly to electrically communicate with a controller or a processor (such as a central processing unit) coupling.

11a-11c illustrate views of bimorph actuators according to some embodiments. According to various embodiments, a bimorph actuator 1102 includes a crossbar 1104 and one or more SMA materials, such as an SMA tape 1106b (eg, a bimorph including an SMA tape as in the embodiment according to FIG. 11b ) Piezoelectric actuator as depicted in a perspective view) or SMA wire 1106a (eg, as depicted in a cross-section of a bimorph actuator including an SMA wire according to the embodiment of FIG. 11a ) Show). The SMA material 1106 is attached to the crossbar 1104 using techniques including those described herein. According to some embodiments, the SMA material 1106 is attached to a rail 1104 using an adhesive film material 1108. For various embodiments, the ends of the SMA material 1106 are electrically and mechanically coupled with contacts 1110 that are configured to supply current to the SMA material 1106 using techniques including those known in the art. According to various embodiments, the contacts 1110 (eg, as shown in FIGS. 11a and 11b ) are gold-plated copper pads. According to an embodiment, a bimorph actuator 1102 having a length of about 1 millimeter is configured to generate a large stroke and a thrust of 50 millinewtons ("mN") as part of a lens assembly, such as , as shown in Figure 11c. According to some embodiments, the use of a bimorph actuator 1102 with a length greater than 1 millimeter will result in greater travel but less force than a bimorph actuator with a length of 1 millimeter. For one embodiment, a bimorph actuator 1102 includes a 20 micron thick SMA material 1106, a 20 micron thick insulator 1112 (such as a polyimide insulator) and a 30 micron thick stainless steel rail 1104 or base metal. Various embodiments include a second insulator 1114 disposed between a contact layer including contacts 1110 and the SMA material 1106 . According to some embodiments, the second insulator 1114 is configured to insulate the SMA material 1106 from portions of the contact layer that are not used as contacts 1110 . For some embodiments, the second insulator 1114 is a one-side coating, such as a polyimide insulator. Those skilled in the art will appreciate that other dimensions and materials may be used to meet the desired design characteristics.

Figure 12 shows a view of an embodiment of a bimorph actuator according to an embodiment. The embodiment shown in Figure 12 includes a center feed 1204 for applying power. Power is supplied at the center of SMA material 1202 (wire or ribbon), such as the SMA material described herein. The end of the SMA material 1202 is grounded at the end pad 1203 as a return path to the rail 1206 or the base metal. The terminal pad 1203 is electrically isolated from the remainder of the contact layer 1214 . According to embodiments, a crossbar 1206 or base metal in close proximity to the SMA material 1202 (such as an SMA wire) along the entire length of the SMA material 1202 provides more power when the current is turned off (ie, the bimorph actuator is de-actuated). Fast line cooling. The result is a faster wire deactivation and actuator response time. Improved heat distribution of SMA wire or tape. For example, the heat distribution is more uniform so that a higher total current can be reliably delivered to the wire. Without a uniform heat sink, portions of the wire, such as a central area, may overheat and be damaged, thus requiring a reduced current and reduced motion for reliable operation. Center feed 1204 provides the benefits of faster wire start/actuation (faster heating) and reduced power consumption (lower resistive path length) of SMA material 1202 with faster response time. This allows for a faster actuator movement and the ability to operate at a higher frequency of movement.

As shown in FIG. 12 , the rail 1206 includes a center metal 1208 that is isolated from the remainder of the rail 1206 to form the center feed 1204 . An insulator 1210 , such as the insulator described herein, is disposed over the rail 1206 . The insulator 1210 is configured to have one or more openings or vias 1212 to provide electrical access to the crossbar 1206 (eg, a ground segment 1214b of the coupling contact layer 1214) and to provide contact with the center metal 1208 to form a center feed Electric 1204. According to some embodiments, a contact layer 1214 (such as those described herein) includes a power segment 1214a and a ground segment 1214b to be actuated by a power supply contact 1216 and a ground contact 1218 /Control signals are provided to the bimorph actuator. A topcoat 1220, such as a topcoat described herein, is disposed over the contact layer 1214 to electrically isolate the contact layer except for the portion of the contact layer 1214 where electrical coupling is desired (eg, one or more contacts).

13 shows a cross-section of an end pad of the bimorph actuator shown in FIG. 12 according to an embodiment. As described above, the end pad 1203 is electrically isolated from the remainder of the contact layer 1214 by a gap 1222 formed between the end pad 1203 and the contact layer 1214 . According to some embodiments, the gaps are formed using etching techniques including etching techniques known in the art. The end pad 1203 includes a through hole section 1224 configured to electrically couple the end pad 1203 and the rail 1206 . Via section 1224 is formed in one of vias 1212 formed in insulator 1210 . SMA material 1202 is electrically coupled to end pads 1203 . The SMA material 1202 can be electrically coupled to the end pads 1203 using techniques including, but not limited to, welding, resistance welding, laser welding, and direct plating.

14 illustrates a center feed cross-section of the bimorph actuator illustrated in FIG. 12 according to an embodiment. Center feed 1204 is electrically coupled to a power supply through contact layer 1214 and electrically and thermally coupled to center metal 1208 through a via section 1224 in center feed 1204 formed in insulator 1210 a through hole 1212.

The actuators described herein can be used to form an actuator assembly using multiple fasteners and/or multiple bimorph actuators. According to an embodiment, the actuators can be stacked on top of each other to increase a travel distance that can be achieved.

15 shows an exploded view of an SMA actuator including one of two fastener actuators, according to one embodiment. According to the embodiments described herein, the two fastener actuators 1302, 1304 are configured relative to each other to oppose each other using their equal motion. For various embodiments, the two fastener actuators 1302 , 1304 are configured to move in an out-of-phase relationship with each other to position a lens carrier 1306 . For example, the first fastener actuator 1302 is configured to receive an inverse power signal of the power signal sent to the second fastener actuator 1304 .

16 illustrates an SMA actuator including two fastener actuators, according to one embodiment. The fastener actuators 1302, 1304 are configured such that the fastener arms 1310, 1312 of each fastener actuator 1302, 1304 face each other and the sliding bases 1314, 1316 of each fastener actuator 1302, 1304 are two fasteners an outer surface of one of the actuators. According to various embodiments, a suspension portion 1308 of each SMA actuator 1302, 1304 is configured to hang an item (eg, actuated by a fastener) that is acted upon by one or more fastener actuators 1302, 1304 The camera moves a portion of a lens carrier 1306) using techniques including the techniques described herein.

17 shows a side view of an SMA actuator including one of two fastener actuators, shown causing movement in a positive z-direction or in an upward direction, such as a lens holder, according to an embodiment The orientation of the SMA wire 1318 of an object.

18 shows a side view of an SMA actuator including one of two fastener actuators, shown causing movement in a negative z-direction or in a downward direction, such as a lens holder, according to an embodiment The orientation of the SMA wire 1318 of an object.

19 shows an exploded view of an assembly including an SMA actuator including two fastener actuators, according to an embodiment. The fastener actuators 1902, 1904 are configured such that the fastener arms 1910, 1912 of each fastener actuator 1902, 1904 are an outer surface of one of the two fastener actuators and the fastener actuators 1902, 1904 are The sliding bases 1914, 1916 face each other. According to various embodiments, a suspension portion 1908 of each SMA actuator 1902, 1904 is configured to hang an item (eg, actuated by a fastener) that is acted upon by one or more fastener actuators 1902, 1904 The camera moves a portion of a lens carrier 1906) using techniques including the techniques described herein. For some embodiments, the SMA actuator includes a base portion 1918 configured to receive the second fastener actuator 1904. The SMA actuator may also include a cover portion 1920. 20 illustrates an SMA actuator including two fastener actuators including a base portion and a cover portion, according to an embodiment.

21 illustrates an SMA actuator including two fastener actuators, according to one embodiment. For some embodiments, the fastener actuators 1902, 1904 are configured relative to each other such that the suspended portion 1908 of the first fastener actuator 1902 is rotated approximately 90 degrees from the suspended portion of the second fastener actuator 1904. The 90 degree configuration enables pitch and roll rotation of an object such as a lens holder 1906. This provides better control over the movement of the lens carrier 1906. For various embodiments, differential power signals are applied to the SMA wires of each pair of fastener actuators, which provide pitch and roll rotation of the lens carrier for tilt OIS motion.

Embodiments of SMA actuators that include two fastener actuators do not require a return spring. The use of two fastener actuators can improve/reduce hysteresis when using SMA wire resistors for position feedback. The reaction force of an SMA actuator that includes two fastener actuators facilitates more accurate position control due to lower hysteresis than an SMA actuator that includes a return spring. For some embodiments, such as the embodiment depicted in Figure 22, an SMA actuator comprising two fastener actuators 2202, 2204 uses differential power to the left SMA wire of each fastener actuator 2202, 2204 2218a and right SMA wire 2218b provide 2-axis tilt. For example, a left SMA wire 2218a is actuated with a higher power than a right SMA wire 2218b. This causes the left side of the lens holder 2206 to move down and the right side up (tilt). For some embodiments, the SMA wires of the first fastener actuator 2202 are kept at equal power to act as a fulcrum for differentially pushing the SMA wires 2218a, 2218b to cause tilting motion. Inverting the power signal applied to the SMA wires (eg, applying equal power to the SMA wires of the second fastener actuator 2204 and applying differential power to the left SMA wires 2218a and right of the second fastener actuator 2204 SMA wire 2218b) causes lens holder 2206 to tilt in the other direction. This provides the ability to tilt an object such as a lens holder in either axis of motion, or can ignore any tilt between the lens and the sensor for good dynamic tilt, which results in better picture quality across all pixels.

23 illustrates an SMA actuator including two fastener actuators and a coupler, according to one embodiment. The SMA actuator includes two fastener actuators, such as the fastener actuators described herein. A first fastener actuator 2302 is configured to couple with a second fastener actuator 2304 using a coupler such as a coupler ring 2305. The buckle actuators 2302, 2304 are arranged relative to each other such that the suspension portion 2308 of the first buckle actuator 2302 is rotated approximately 90 degrees from the suspension portion 2309 of the second buckle actuator 2304. A payload for moving, such as a lens or lens assembly, is attached to a lens carrier 2306 that is configured to rest on a sliding base of the first fastener actuator 2302.

For various embodiments, equal power may be applied to the SMA wires of the first fastener actuator 2302 and the second fastener actuator 2304. This can result in maximizing the z-travel of the SMA actuator in the positive z-direction. For some embodiments, the travel of the SMA actuator may have a z-travel equal to or greater than twice the travel of other SMA actuators including two fastener actuators. For some embodiments, when the power signal is removed from the SMA actuator, an additional spring may be added to push the two catches to assist in pushing the actuator assembly and payload back down. The same and opposite power signals can be applied to the SMA wires of the first fastener actuator 2302 and the second fastener actuator 2304. This enables the SMA actuator to be moved in the positive z-direction by a snap actuator and in the negative z-direction by a snap actuator, which enables accurate control of the position of the SMA actuator. In addition, equal and opposite power signals (differential power signals) can be applied to the left and right SMA wires of the first and second fastener actuators 2302 and 2304 to enable, for example, a lens mount 2306 An object is inclined in the direction of at least one of the two axes.

Embodiments of SMA actuators including two fastener actuators and a coupler, such as the SMA actuator depicted in Figure 23, can be paired with an additional fastener actuator and fastener actuator Coupling to achieve a desired stroke greater than that of a single SMA actuator.

24 shows an exploded view of an SMA system including an SMA actuator including a fastener actuator with a laminated suspension, according to an embodiment. As described herein, for some embodiments, the SMA system is configured to function as an autofocus drive with one or more camera lens elements. As shown in FIG. 24, the SMA system includes a return spring 2403 configured according to various embodiments to move in the opposite direction of the z-travel direction as the tension of the SMA wire 2408 decreases as the SMA wire is de-actuated Lens Holder 2405. For some embodiments, the SMA system includes a housing 2409 configured to receive return spring 2403 and act on a sliding bearing to guide the lens carrier in the z-travel direction. Housing 2409 is also configured to seat over fastener actuator 2402. The fastener actuator 2402 includes a sliding base 2401 that is similar to the sliding base described herein. Buckle actuator 2402 includes a buckle arm 2404 coupled to a suspension portion, such as a laminate suspension 2406 formed from a laminate. Fastener actuator 2402 also includes an SMA wire attachment structure, such as a laminated jaw connection 2412.

As shown in FIG. 24 , the sliding base 2401 is disposed on an optional adapter plate 2414 . The adapter plate is configured to mate the SMA system or fastener actuator 2402 with another system, such as an OIS, additional SMA system, or other components. 25 illustrates an SMA system 2501 including an SMA actuator including a fastener actuator 2402 with a laminated suspension, according to one embodiment.

26 illustrates a fastener actuator including a laminate suspension, according to one embodiment. Buckle actuator 2402 includes buckle arms 2404 . Buckle arm 2404 is configured to move in the z-axis when SMA wire 2408 is actuated and de-actuated as described herein. The SMA wire 2408 is attached to the fastener actuator using a laminate-molded jaw connection 2412. According to the embodiment shown in FIG. 26, the buckle arms 2404 are coupled to each other through a central portion such as a laminate suspension 2406. According to various embodiments, a laminate hanger 2406 is configured to hang an item that is acted upon by a fastener actuator (eg, by the fastener actuator to move a lens using techniques including those described herein) part of the bracket).

27 illustrates a laminated suspension of an SMA actuator according to an embodiment. For some embodiments, the laminate suspension 2406 material is a low stiffness material so it cannot resist actuation motion. For example, the laminate suspension 2406 is formed using a copper layer disposed on a first polyimide layer and a second polyimide layer disposed on the copper. For some embodiments, the laminated suspension 2406 is formed on the buckle arms 2404 using deposition and etching techniques including deposition and etching techniques known in the art. For other embodiments, the laminate suspension 2406 is formed separately from the buckle arms 2404 and attached to the buckle arms 2404 using techniques including welding, adhesives, and other techniques known in the art. For various embodiments, glue or other adhesive is used on the lamination hanger 2406 to ensure that the buckle arms 2404 remain in a position relative to a lens holder.

Figure 28 illustrates a lamination-molded jaw connection of an SMA actuator according to an embodiment. Laminated jaw connection 2412 is configured to attach an SMA wire 2408 to the fastener actuator and create a circuit joint with the SMA wire 2408. For various embodiments, the lamination-molded jaw connection 2412 includes a laminate formed from one or more layers of an insulator and one or more layers of a conductive layer formed on a jaw.

For example, a polyimide layer is disposed over at least a portion of the stainless steel portion forming a jaw 2413. Next, a conductive layer, such as copper, is disposed over the polyimide layer, which is electrically coupled to one or more signal traces 2415 disposed over the fastener actuator. Deforming the jaws to contact the SMA wire therein also brings the SMA wire into electrical contact with the conductive layer. Accordingly, a conductive layer coupled with one or more signal traces is used to apply power signals to the SMA wires using techniques including the techniques described herein. For some embodiments, a second polyimide layer is formed over the conductive layer in areas where the conductive layer does not contact the SMA wires. For some embodiments, lamination-molded jaw connections 2412 are formed on a jaw 2413 using deposition and etching techniques including deposition and etching techniques known in the art. For other embodiments, the laminate-molded jaw connections 2412 and one or more electrical traces are formed separately from the jaws 2413 and fastener actuators and attached using techniques including soldering, gluing, and other techniques known in the art Connected to jaw 2413 and fastener actuator.

Figure 29 shows an SMA actuator including a fastener actuator with a laminated suspension. As shown in Figure 29, when a power signal is applied, the SMA wire contracts or shortens to move the buckle arms and laminate suspension in the positive z-direction. The laminated suspension in contact with an object, such as a lens holder, then moves the object in the positive z-direction. When the power signal is reduced or removed, the SMA wire stretches and moves the buckle arms and laminate suspension in a negative z-direction.

30 illustrates an exploded view of an SMA system including an SMA actuator including a fastener actuator, according to an embodiment. As described herein, for some embodiments, the SMA system is configured to function as an autofocus drive with one or more camera lens elements. As depicted in FIG. 30, the SMA system includes a return spring 3003 configured according to various embodiments to move in the opposite direction of the z-travel direction as the tension of the SMA wire 3008 decreases as the SMA wire is de-actuated Lens holder 3005. For some embodiments, the SMA system includes a stiffener 3000 disposed on return spring 3003. For some embodiments, the SMA system includes a housing 3009 formed of two parts that is configured to receive return spring 3003 and act on a sliding bearing to guide the lens carrier in the z-travel direction. Housing 3009 is also configured to seat over fastener actuator 3002. The fastener actuator 3002 includes a sliding base 3001 similar to the sliding base described herein, formed of two parts. The sliding base 3001 is split to electrically isolate the two sides (eg, ground on one side and power on the other) because, according to some embodiments, current flows partially through the sliding base 3001 to the wires.

Buckle actuator 3002 includes buckle arm 3004 . Each pair of fastener actuators 3002 is formed on a separate portion of the fastener actuators 3002 . The fastener actuator 3002 also includes an SMA wire attachment structure, such as a resistance wire clamp 3012. The SMA system optionally includes a flex circuit 3020 for electrically coupling the SMA wire 3008 to one or more control circuits.

As shown in FIG. 30 , the sliding base 3001 is disposed on an optional adapter plate 3014 . The adapter plate is configured to mate the SMA system or fastener actuator 3002 with another system, such as an OIS, additional SMA system, or other components. 31 illustrates an SMA system 3101 including an SMA actuator including a fastener actuator 3002, according to one embodiment.

32 illustrates an SMA actuator including a fastener actuator, according to one embodiment. Buckle actuator 3002 includes buckle arm 3004 . Buckle arm 3004 is configured to move in the z-axis when SMA wire 3008 is actuated and de-actuated as described herein. SMA wire 3008 is attached to resistance wire clamp 3012. According to the embodiment depicted in Figure 32, the buckle arm 3004 is configured to mate with an item such as a lens holder without the use of a double yoke to capture a central portion of the joint.

33 illustrates a double yoke capture joint of a pair of snap arms of an SMA actuator according to an embodiment. Figure 33 also shows the electroplating pads used to attach the optional flex circuit to the sliding substrate. For some embodiments, the electroplating pads are formed using gold. 34 illustrates a resistance welding jaw of an SMA actuator for attaching an SMA wire to a fastener actuator, according to an embodiment. For some embodiments, glue or adhesive may also be placed on top of the weld to assist with mechanical strength and to relieve fatigue strain during handling and shock loading.

Figure 35 shows an SMA actuator including a fastener actuator with a double yoke capture tab. As shown in Figure 35, when a power signal is applied, the SMA wire contracts or shortens to move the buckle arm in the positive z-direction. The double yoke capture joint contacts an object, which in turn moves the object in the positive z direction, such as a lens holder. When the power signal is reduced or removed, the SMA wire stretches and moves the buckle arm in a negative z-direction. The yoke capture feature ensures that the clasp arms remain in the correct position relative to the lens holder.

36 illustrates an SMA bimorph liquid lens according to an embodiment. The SMA bimorph liquid lens 3501 includes a liquid lens sub-assembly 3502, a housing 3504, and a circuit with an SMA actuator 3506. For various embodiments, the SMA actuator includes 4 bimorph actuators 3508, such as the embodiments described herein. The bimorph actuator 3508 is configured to push a forming ring 3510 positioned on a flexible diaphragm 3512. The ring warps the diaphragm 3512/liquid 3514 to change the light path through the diaphragm 3512/liquid 3514. A liquid containment ring 3516 is used to contain the liquid 3514 between the diaphragm 3512 and the lens 3518. The equal force from the bimorph actuator changes the focus of the image in the Z direction (normal to the lens), which allows it to function as an autofocus. According to some embodiments, the differential force from the bimorph actuator 3508 can move the light in the X, Y axis directions, which allows it to function as an optical image stabilizer. Both OIS and AF functions can be achieved simultaneously using appropriate control of each actuator. For some embodiments, 3 actuators are used. The circuit with the SMA actuator 3506 includes one or more contacts 3520 for control signals to actuate the SMA actuator. According to some embodiments including 4 SMA actuators, the circuit with SMA actuator 3506 includes 4 power circuit control contacts and a common reset contact for each SMA actuator.

37 illustrates a see-through SMA bimorph liquid lens according to an embodiment. 38 illustrates a cross-section and a bottom view of an SMA bimorph liquid lens according to an embodiment.

39 illustrates an SMA system including an SMA actuator 3902 with a bimorph actuator, according to an embodiment. SMA actuator 3902 includes 4 bimorph actuators using the techniques described herein. Both of the bimorph actuators are configured as positive z-stroke actuators 3904 and both are configured as negative z-stroke actuators 3906, as depicted in FIG. 40, which depicts according to a SMA actuator 3902 with bimorph actuator of an embodiment. The opposing actuators 3906, 3904 are configured to control movement in both directions over the entire range of travel. This provides the ability to tune the control code to compensate for tilt. For various embodiments, two SMA wires 3908 attached to the top of the assembly achieve a positive z-stroke displacement. Two SMA wires attached to the bottom of one of the components achieve negative z-travel displacement. For some embodiments, each bimorph actuator is attached to an object using a tab that engages an object such as a lens mount 3910. The SMA system includes a top spring 3912 configured to provide stability of the lens holder 3910 on an axis perpendicular to the z-travel axis (eg, in the directions of the x- and y-axes). Additionally, a top spacer 3914 is configured to be disposed between the top spring 3912 and the SMA actuator 3902. A bottom spacer 3916 is disposed between the SMA actuator 3902 and a bottom spring 3918. Bottom spring 3918 is configured to provide stability of lens holder 3910 on an axis perpendicular to the z-travel axis (eg, in the directions of the x- and y-axes). Bottom spring 3918 is configured to be disposed on a substrate 3920, such as the substrate described herein.

Figure 41 shows the length 4102 of a bimorph actuator 4103 and the position where an SMA wire 4106 extends the wire length beyond a bond pad 4104 of the bimorph actuator. Wires longer than bimorph actuators are used to increase stroke and force. Thus, the SMA wire 4106 extends beyond the extension 4108 of the bimorph actuator 4103 for setting the stroke and force of the bimorph actuator 4103.

42 shows an exploded view of an SMA system including an SMA bimorph actuator 4202, according to an embodiment. According to various embodiments, the SMA system is configured to use separate metallic materials and a non-conductive adhesive to create one or more circuits to independently power the SMA wires. Some embodiments have no AF size effect and include 4 bimorph actuators, such as the bimorph actuators described herein. Both of the bimorph actuators are configured as positive z-stroke actuators and both are configured as negative z-stroke actuators. 43 shows an exploded view of a subsection of an SMA actuator according to an embodiment. The subsection includes a negative actuator signal connection 4302, a substrate 4304 with a bimorph actuator 4306. Negative actuator signal connection 4302 includes a wire bond pad 4308 for connecting an SMA wire of a bimorph actuator 4306 using techniques including the techniques described herein. Negative actuator signal connection 4302 is attached to substrate 4304 using an adhesive layer 4310. The subsection also includes a positive actuator signal connection 4314 with wire bond pads 4316 for connecting a bimorph actuator 4306 to an SMA using techniques including those described herein Line 4312. Positive actuator signal connection 4314 is attached to substrate 4304 using an adhesive layer 4318. Each of the base 4304, the negative actuator signal connection 4302, and the positive actuator signal connection 4314 are formed of metal, such as stainless steel. Connection pads 4322 on each of substrate 4304, negative actuator signal connection 4302, and positive actuator signal connection 4314 are configured to electrically couple control signals and ground for actuation using techniques including those described herein Bimorph actuator 4306. For some embodiments, the connection pads 4322 are gold plated. 44 illustrates a subsection of an SMA actuator according to an embodiment. For some embodiments, gold-plated pads are formed on the stainless steel layer for solder bonding or other known electrical termination methods. Additionally, wire bond pads are used for signal contacts to electrically couple SMA wires for power signals.

45 illustrates a 5-axis sensor displacement system according to an embodiment. A 5-axis sensor shift system is configured to move an object, such as an image sensor, in 5-axis relative to one or more lenses. This includes X/Y/Z axis translation and pitch/roll tilt. The system is optionally configured to use only 4 axes with X/Y axis translation and pitch/roll tilt for Z motion along with a single AF on top. Other embodiments include a 5-axis sensor shift system configured to move one or more lenses relative to an image sensor. For some embodiments, the still lens stack is mounted on the top cover and inserted inside the ID (without touching the orange moving bracket inside).

46 shows an exploded view of a 5-axis sensor displacement system according to an embodiment. The 5-axis sensor displacement system includes 2 circuit components: a flex sensor circuit 4602, a bimorph actuator circuit 4604; and 8 to 12 bimorph actuators 4606, etc. used Techniques including the techniques described herein are built onto bimorph circuit components. The 5-axis sensor shift system includes a moving bracket 4608 and a housing 4610 that are configured to hold one or more lenses. According to one embodiment, bimorph actuator circuit 4604 includes 8 to 12 SMA actuators, such as the SMA actuators described herein. The SMA actuators are configured to move the mobile carriage 4608 in 5 axes similar to other 5-axis systems described herein, such as in the x-direction, y-direction, z-direction, pitch, and roll.

47 illustrates an SMA actuator including a bimorph actuator integrated into this circuit for all motions, according to one embodiment. Embodiments of an SMA actuator may include 8 to 12 bimorph actuators 4606 . However, other embodiments may contain more or less. 48 shows an SMA actuator 4802 including a bimorph actuator integrated into this circuit for all motions partially formed to fit inside a corresponding housing 4804, according to one embodiment. 49 illustrates a cross-section of a 5-axis sensor displacement system according to an embodiment.

FIG. 50 illustrates an SMA actuator 5002 according to an embodiment including a bimorph actuator. The SMA actuator 5002 is configured to move an image sensor, lens or other various payloads in the x and y directions using the 4 side mounted SMA bimorph actuator 5004. 51 shows a top view of an SMA actuator including a bimorph actuator that moves an image sensor, lens, or other various payloads in different x and y positions.

Figure 52 illustrates an SMA actuator including a bimorph actuator 5202 according to one embodiment configured as a bimorph autofocus in a cassette. Four top- and bottom-mounted SMA bimorph actuators, such as the SMA bimorph actuators described herein, are configured to move together to produce movement in the z-travel direction for autofocus motion . 53 illustrates an SMA actuator including a bimorph actuator with two top mounted bimorph actuators 5302 configured to push down one or more lenses, according to an embodiment. 54 illustrates an SMA actuator including a bimorph actuator with two bottom mounted bimorph actuators 5402 configured to push one or more lenses above, according to one embodiment. 55 illustrates an SMA actuator including a bimorph actuator to demonstrate four top- and bottom-mounted SMA bimorph actuators 5502 (such as the SMA bimorph actuators described herein, according to one embodiment) Piezoelectric wafer actuators) are used to move one or more lenses to create a tilting motion.

56 illustrates an SMA system including an SMA actuator including a bimorph actuator configured as a 2-axis lens shift OIS, according to one embodiment. For some embodiments, the 2-axis lens shift OIS is configured to move a lens in the X/Y axis. For some embodiments, the Z-axis movement is from a separate AF, such as the AF described herein. 4 bimorph actuators push the autofocus side for OIS motion. 57 shows an exploded view of an SMA system including an SMA actuator 5802 including a bimorph actuator 5806 configured as a 2-axis lens shift OIS, according to one embodiment . 58 shows a cross-section of an SMA system including an SMA actuator 5802 including a bimorph actuator 5806 configured as a 2-axis lens shift OIS, according to one embodiment . Figure 59 shows a cassette bimorph actuator 5802 according to an embodiment for use in an SMA system configured to manufacture a 2-axis lens shift before it is shaped for assembly in the system Bit OIS. Such a system can be configured to have a high OIS stroke OIS (eg, +/- 200 um or more). Furthermore, these embodiments are configured to have a wide range of motion and good OIS dynamic tilt using one of 4 plain bearings such as POM plain bearings. Embodiments are configured for easy integration with AF designs such as VCM or SMA.

60 illustrates an SMA system including an SMA actuator including a bimorph actuator configured as a 5-axis lens shift OIS and autofocus, according to one embodiment. For some embodiments, 5-axis lens shift OIS and autofocus are configured to move a lens in the X/Y/Z axis. For some embodiments, pitch and yaw axis motion is used for dynamic tilt tuning capabilities. Eight bimorph actuators were used to provide motion for autofocus and OIS using the techniques described herein. 61 depicts an exploded view of an SMA system including an SMA actuator 6202 including a dual according to an embodiment configured as a 5-axis lens shift OIS and autofocus, according to an embodiment Piezo wafer actuator 6204. 62 illustrates a cross-section of an SMA system including an SMA actuator 6202 including a bimorph actuator configured for a 5-axis lens shift OIS and autofocus, according to one embodiment Actuator 6204. Figure 63 shows a cassette bimorph actuator 6202 according to an embodiment for use in an SMA system configured to manufacture a 5-axis lens shift before it is shaped for assembly in the system Bit OIS and auto focus. Such a system can be configured to have a high OIS travel OIS (eg, +/- 200 um or greater) and a high autofocus travel (eg, 400 um or greater). Furthermore, these embodiments can ignore any tilt and do not require a separate autofocus assembly.

64 illustrates an SMA system including an SMA actuator including a bimorph actuator configured as an outsert box, according to one embodiment. For some embodiments, the bimorph actuator assembly is configured to wrap around an item such as a lens holder. Since the circuit assembly moves with the lens holder, a flexure is used for low X/Y/Z stiffness. The rear pads of the circuit are static. The push-out box can be configured for both 4 or 8 bimorph actuators. Thus, the push-out box can be configured as a 4 bimorph actuator on the side that moves the OIS in the X and Y axes. The push-out box can be configured with one 4 bimorph actuators on the top and bottom to move the autofocus in the z-axis. The push-out box can be configured to move the OIS and autofocus in the x, y, and z axes and be capable of 3-axis tilt (pitch/roll/yaw) on top, bottom, and sides with one of 8 bimorph actuators. actuator. 65 shows an exploded view of an SMA system including an SMA actuator 6602 including a bimorph actuator 6604 configured as an outsert box, according to one embodiment. Accordingly, the SMA actuator is configured such that a bimorph actuator is applied to the housing 6504 to move the lens carrier 6506 using the techniques described herein. 66 illustrates an SMA system including an SMA actuator 6602 that includes a bi-piezo configured to be partially shaped to receive an push-out box of a lens holder 6603, according to one embodiment wafer actuator. 67 illustrates an SMA system including an SMA actuator 6602 including a bimorph actuator 6604 configured to An outsert box that was fabricated prior to being shaped to fit in the system.

68 illustrates an SMA system including an SMA actuator 6802 including a bimorph actuator configured as a 3-axis sensor displacement OIS, according to one embodiment. For some embodiments, the z-axis movement is from a separate autofocus system. Four bimorph actuators are configured to push the sides of a sensor carrier 6804 to provide movement of the OIS using the techniques described herein. 69 shows an exploded view of an SMA including an SMA actuator 6802 including a bimorph actuator configured as a 3-axis sensor displacement OIS, according to one embodiment . 70 depicts a cross-section of an SMA system including an SMA actuator 6802 including a bimorph actuation configured as a 3-axis sensor displacement OIS, according to one embodiment device 6806. Figure 71 shows a cassette bimorph actuator 6802 assembly according to an embodiment for use in an SMA system configured to manufacture a 3-axis before it is shaped for assembly in the system The sensor shifts OIS. 72 illustrates a flex sensor circuit for use in an SMA system configured as a 3-axis sensor shift OIS, according to an embodiment. Such a system can be configured to have a high OIS travel OIS (eg, +/- 200 um or greater) and a high autofocus travel (eg, 400 um or greater). Furthermore, these embodiments are configured to have a wide 2-axis range of motion and good OIS dynamic tilt using one of 4 plain bearings such as POM plain bearings. Embodiments are configured for easy integration with AF designs such as VCM or SMA.

73 illustrates an SMA system including an SMA actuator 7302 including bimorph actuation configured as a 6-axis sensor shift OIS and autofocus, according to one embodiment device 7304. For some embodiments, the 6-axis sensor shift OIS and autofocus are configured to move a lens in the X/Y/Z/pitch/yaw/roll axes. For some embodiments, pitch and yaw axis motion is used for dynamic tilt tuning capabilities. Eight bimorph actuators were used to provide motion for autofocus and OIS using the techniques described herein. 74 shows an exploded view of an SMA system including an SMA actuator 7402 including bi-piezo configured as a 6-axis sensor displacement OIS and autofocus, according to one embodiment Wafer Actuator 7404. 75 depicts a cross-section of an SMA system including an SMA actuator 7402 including bi-piezo configured as a 6-axis sensor displacement OIS and autofocus, according to one embodiment wafer actuator. Figure 76 shows a cassette bimorph actuator 7402 according to an embodiment for use in an SMA system configured to manufacture a 6-axis sensing before it is shaped for assembly in the system Shifter shift OIS and auto focus. 77 illustrates a flex sensor circuit for use in an SMA system configured as a 3-axis sensor displacement OIS, according to an embodiment. Such a system can be configured with a high OIS travel OIS (eg, +/- 200 um or greater) and a high autofocus travel (eg, 400 um or greater). Furthermore, these embodiments can ignore any tilt and do not require a separate autofocus assembly.

78 illustrates an SMA system including an SMA actuator including a bimorph actuator configured as a 2-axis camera tilt OIS, according to one embodiment. For some embodiments, the 2-axis camera tilt OIS is configured to move a camera in the pitch/yaw axis. Four bimorph actuators were used to drive the top and bottom of the autofocus for the entire camera motion of the OIS pitch and yaw motion using the techniques described herein. 79 shows an exploded view of an SMA system including an SMA actuator 7902 including a bimorph actuator 7904 configured as a 2-axis camera tilt OIS, according to one embodiment. 80 illustrates a cross-section of an SMA system including an SMA actuator including a bimorph actuator configured as a 2-axis camera tilt OIS, according to one embodiment. 81 depicts a cassette bimorph actuator according to an embodiment for use in an SMA system configured to manufacture a 2-axis camera tilt OIS before it is shaped for assembly in the system . 82 illustrates a flex sensor circuit for use in an SMA system configured for a 2-axis camera tilt OIS, according to one embodiment. Such a system can be configured to have high OIS travel OIS (eg, +/- 3 degrees or more). Embodiments are configured for easy integration with autofocus ("AF") designs such as VCM or SMA.

83 illustrates an SMA system including an SMA actuator including a bimorph actuator configured as a 3-axis camera tilt OIS, according to one embodiment. For some embodiments, the 2-axis camera tilt OIS is configured to move a camera in the pitch/yaw/roll axis. 4 bimorph actuators were used to drive the top and bottom of the autofocus for the entire camera motion of the OIS pitch and yaw motion using the techniques described herein, and 4 bimorph actuators were used to use The techniques described herein drive the entire camera motion on the side of autofocus for the OIS tumbling motion. 84 shows an exploded view of an SMA system including an SMA actuator 8402 including a bimorph actuator 8404 configured as a 3-axis camera tilt OIS, according to one embodiment. 85 illustrates a cross-section of an SMA system including an SMA actuator including a bimorph actuator configured as a 3-axis camera tilt OIS, according to one embodiment. 86 illustrates a cassette bimorph actuator for use in an SMA system configured to manufacture a 3-axis camera tilt OIS before it is shaped for assembly in the system, according to an embodiment . 87 illustrates a flex sensor circuit for use in an SMA system configured for a 3-axis camera tilt OIS, according to an embodiment. Such a system can be configured to have high OIS travel OIS (eg, +/- 3 degrees or more). Embodiments are configured for easy integration with AF designs such as VCM or SMA.

88 shows exemplary dimensions of a bimorph actuator for an SMA actuator according to an embodiment. Dimensions are the preferred embodiment, but those skilled in the art will appreciate that other dimensions may be used based on the desired characteristics of an SMA actuator.

89 shows a first view of a bimorph actuator 8980 according to an embodiment. The bimorph actuator 8980 includes a conductive metal base layer 8934 (eg, a stainless steel layer) and a dielectric layer 8939. The bimorph actuator 8980 shown achieves a layer count configuration that is reduced by one over conventional designs. This reduction in layer count increases manufacturing efficiency and reduces the cost of raw materials.

For the purposes of the present invention, the first view is one of the dielectric side of the bimorph actuator 8980. The bimorph actuator 8980 includes at least one free end (also referred to herein as an "unsecured end"); two free ends 8908, 8910 are depicted herein. The bimorph actuator 8980 includes a fixed end 8930. The free end 8910 is connected to the fixed end 8930 by a bimorph arm 8921. The free end 8908 is connected to the fixed end 8930 by a bimorph arm 8923.

According to some embodiments, the free end 8908 includes a load point including a contact member 8912 extending from a tongue 8907. According to some embodiments, the tongue 8907 consists essentially of stainless steel. Similarly, according to some embodiments, the free end 8910 includes a load point including a contact member 8909 extending from a tongue 8911. Contact member 8912 may also comprise a contact material such as stainless steel. Contact member 8912 is configured to engage with any component, such as a lens mount or other item. In this configuration, the bimorph actuator 8980 is configured to move in a z-direction and lift an object (such as a lens holder) in the z-direction when actuated.

According to some embodiments, the bimorph arm 8921 includes one or more SMA materials, such as an SMA tape or SMA wire (eg, as described herein). According to some embodiments, the SMA material is attached to the bimorph arm 8921 using techniques including those described herein. According to some embodiments, the SMA material is attached to the rail 8921 using an adhesive film material, epoxy, or other attachment techniques. The bimorph arm 8921 also includes a conductive metal base material 8934 and optionally a dielectric layer 8926. Similarly, the second bimorph arm 8923 includes a conductive metal base layer and optionally a dielectric layer 8924. The conductive metal base layer 8934 may be formed of conductive metals including, but not limited to, stainless steel, copper, copper alloys, gold, nickel, other conductive materials, and combinations thereof.

For some embodiments, the bimorph arm is configured as a crossbar, such as the one described herein. For example, the conductive metal base layer 8934 takes the form of a stainless steel base in the shape of a rail, including the rails described herein, extending from the fixed end 8930 to form the free ends 8908, 8910. The dielectric layer 8926 extends along the conductive metal base layer 8934 of the first bimorph arm 8921. According to some embodiments, the SMA material extends over the dielectric layer 8926 from a first SMA contact 8987 to the tongue 8907. The SMA material is attached to the first SMA contact 8987 and tongue 8911 using techniques including those described herein. And the SMA material extends from a second SMA contact 8988 to the tongue 8907 on the dielectric layer 8924. The SMA material is attached to the second SMA contact 8988 and tongue 8907 using techniques including those described herein. For some embodiments, a dielectric layer may also be disposed on the SMA material. The dielectric layer electrically isolates the SMA material from the conductive metal base layer and other conductive components.

The fixed end 8930 includes a first contact pad 8935 and a second contact pad 8932 . The first contact pad 8935 is electrically and mechanically coupled to the SMA material of the first bimorph arm 8921 through a first SMA contact 8987. The first contact pad 8935 is configured to couple with a current supply of SMA material to actuate the first bimorph arm 8921, as described herein. Similarly, the second contact pad 8932 is electrically and mechanically coupled to the SMA material of the second bimorph arm 8923 through a second SMA contact 8988. The second contact pad 8932 is configured to couple with a current supply of SMA material to actuate the second bimorph arm 8923, as described herein. According to various examples of the present invention, the first contact pad 8935 and the second contact pad 8932 are gold plated stainless steel pads. The securing end 8930 also includes an aperture 8936 configured to receive a securing element for mounting the bimorph actuator 8980 to a substrate. The fixed end 8930 of the bimorph actuator 8980 includes a dielectric layer 8939 and a conductive metal base layer 8934.

90 illustrates a second view of a bimorph actuator 8980 according to an embodiment. The bimorph actuator 8980 includes a conductive metal base layer 8934. The bimorph actuator 8980 includes two free ends 8910, 8908 extending from the fixed end 8930 by bimorph arms 8921, 8923, respectively. According to some embodiments, the two free ends 8910 , 8908 , the bimorph arms 8921 , 8923 and a portion of the fixed end 8930 are composed of a single conductive metal base layer 8906 .

The fixed end 8930 also includes a first conductive metal base element 8931 , a second conductive metal base element 8933 and a common conductive metal base layer 8906 . The first conductive metal base element 8931 , the second conductive metal base element 8933 , and the common conductive metal base layer 8906 may be separated on the fixed end 8930 by a gap defined by the dielectric layer 8939 . In some embodiments, the gap may be a partially or fully etched gap that exposes the dielectric layer 8939 mounted to the first conductive metal base element 8931, the second conductive metal base element 8933, and the common conductive metal base layer 8906. A solder tongue or a portion of the etched feature can be applied to the fixed end 8930 or the free ends 8910, 8908.

The first conductive metal base element 8931 and the second conductive metal base element 8933 are electrically isolated to create an electrical path to the SMA material. This will be described in more detail below. Common conductive metal base layer 8906 is configured to achieve rigidity for a bimorph actuator 8980 assembly and application. In some examples, the first contact pad (shown in FIG. 89 as reference element symbol 8935 ) can be a gold pad plated on the first conductive metal base element 8931. Similarly, the second contact pad (shown in FIG. 89 as reference element 8932 ) may be a gold pad plated on the second conductive metal base element 8933 .

91 shows a perspective view of a bimorph actuator 8990 according to an embodiment. The first conductive metal base element 8931 and the second conductive metal base element 8933 are electrically separated by a dielectric gap of the dielectric layer 8939.

The first contact pad 8935 is configured to be electrically coupled with a power supply. The first contact pad 8935 is electrically and mechanically connected to the first conductive metal base element 8931. The first conductive metal base element 8931 is electrically and mechanically connected to a first contact 8937 that is configured to connect to the SMA material 8925 of the first bimorph arm 8921. In other words, the first conductive metal base element 8931 is configured to act as an electrical path to the SMA material 8925 of the first bimorph arm 8921.

The SMA material 8925 heats up due to an electrical current and a length of the SMA material 8925 shrinks accordingly. The contraction of the SMA material 8925 lifts the free end 8910 to a plane above the fixed end 8930 to effectively lift the first bimorph arm 8921 during the procedure.

Similarly, the second contact pad 8932 is configured to be electrically coupled with a power supply. The second contact pad 8932 is electrically and mechanically connected to the second conductive metal base element 8933. The second conductive metal base element 8933 is also electrically and mechanically connected to a second contact element 8938 which is connected to the SMA material 8922 of the second bimorph arm 8923. In other words, the second conductive metal base element 8933 is configured to act as an electrical path to the SMA material 8922 of the second bimorph arm 8923.

The SMA material 8922 heats up due to an electrical current and a length of the SMA material 8922 shrinks accordingly. The contraction of the SMA material 8922 lifts the free end 8908 to a plane above the fixed end 8930 to effectively lift the first bimorph arm 8921 during the procedure.

92 depicts SMA materials 8925 and 8922 in an exemplary bimorph actuator 8990, according to an embodiment.

The SMA material 8925 is electrically coupled to the first conductive metal base element 8931 of the fixed end 8930. The SMA material 8925 is also electrically coupled to the conductive metal base layer of the tongue 8907 of the free end 8910. According to some embodiments, the SMA material 8922 and the SMA material 8925 are connected in series. Current flows into the common conductive metal base layer 8906 at the fixed end, through the first bimorph arm 8921 in direction 8995 to the conductive metal base of the tongue 8911. Current flows through the SMA material 8925 to the first conductive metal base element 8931 in direction 8997 and toward the first contact pad 8935 in direction 8993.

The SMA material 8922 is electrically coupled to the second conductive metal base element 8933 of the fixed end 8930. The SMA material 8922 is also electrically coupled to the conductive metal base of the tongue 8907 of the free end 8908. Current flows into the second contact pad 8932 at the fixed end in direction 8991 and through the second conductive metal base element 8933 to the SMA material 8922. Current flows through the SMA material 8922 to the conductive metal base of the tongue 8911. Current flows in direction 8994 from tongue 8911 through second bimorph arm 8923 to common conductive metal base layer 8906. Current flows in direction 8992 through SMA material 8922 to the conductive metal base of tongue 8911 and in direction 8991 towards second contact pad 8932.

According to an embodiment, the common conductive metal base layer 8906 is in close proximity to the SMA materials 8922 and 8925 (such as an SMA wire) along the entire length of the SMA material to provide greater stability when the current is turned off (ie, the bimorph actuator is deactivated). Fast line cooling. The result is a faster wire deactivation and actuator response time. Improved heat distribution of SMA wire or tape. For example, the heat distribution is more uniform so that a higher total current can be reliably delivered to the wire.

93 depicts the current flow path of an exemplary bimorph actuator 9310 according to an embodiment. The bimorph actuator 9310 includes a first bimorph arm 9321 that includes one or more SMA materials 9325, such as an SMA tape or SMA wire. The SMA material 9325 can be attached to one of the crossbars of the first bimorph arm 9321. The first bimorph arm 9321 may also include a conductive metal base layer and optionally a dielectric layer.

The SMA material 9325 is electrically coupled to a first conductive metal base element 9337 at a fixed end 9330. The SMA material 9325 is also electrically coupled to a conductive metal base layer of the tongue 9311 of the free end 9312. Current flows in the direction 9301 into the first conductive metal base element 9337 at the fixed end. The SMA material 9325 is electrically coupled to the conductive metal base of the tongue 9311 to provide a return path for the circuit in direction 9303. Current flows in direction 9305 from the first bimorph arm 9321 into the single conductive metal base layer.

The bimorph actuator 9310 includes a second bimorph arm 9323 that includes one or more SMA materials 9327, such as an SMA tape or SMA wire. SMA material 9327 can be attached to one of the crossbars of the second bimorph arm 9323. The second bimorph arm 9323 may also include a conductive metal base layer and optionally a dielectric layer.

The SMA material 9327 is electrically coupled to a second conductive metal base element 9338 of the fixed end 9330. The SMA material 9327 is also electrically coupled to a conductive metal base layer of the tongue 9313 of the free end 9312. Current flows from the common conductive metal base layer 9338 into the SMA material 9327 at the fixed end in the direction 9307. The SMA material 9327 is electrically coupled to the conductive metal base of the tongue 9313 to provide a return path for the circuit in direction 9309. While some examples show two unfixed load point terminals, each point terminal is connected to a respective bimorph arm. The present invention also provides a single unsecured point-of-load end attached to more than one bimorph arm.

94 shows an exemplary bimorph actuator 9400 including a single unsecured point-of-load end 9410, according to an embodiment. The single unsecured point-of-load end 9410 may include contact members 9408 and 9409 extending from a conductive metal base layer of the tongue 9411 . Contact members 9408 and 9409 are configured to engage with a component, such as a lens holder. The bimorph actuator 9400 includes a first bimorph arm 9421 that includes one or more SMA materials 9425, such as an SMA tape or SMA wire. SMA material 9425 can be attached to one of the crossbars of the first bimorph arm 9421. The first bimorph arm 9421 may also include a conductive metal base layer and optionally a dielectric layer.

The SMA material 9425 can be electrically coupled to a conductive metal base element at a fixed end, as discussed with respect to FIG. 93 . The SMA material 9425 is also electrically coupled to a conductive metal base layer of the tongue 9411 of the single unsecured point-of-load terminal 9410. The bimorph actuator 9400 may also include a second bimorph arm 9423 that includes one or more SMA materials 9422, such as an SMA tape or SMA wire. The SMA material 9422 can be attached to one of the crossbars of the second bimorph arm 9423. The second bimorph arm 9423 may also include a conductive metal base layer and optionally a dielectric layer.

The SMA material 9425 and the SMA material 9422 can be electrically coupled to the conductive metal base element 9411 of the single unsecured point-of-load terminal 9410. Current flows in direction 9401 into the SMA material 9425 from a common conductive metal base layer at the fixed end. The SMA material 9425 is electrically coupled to the conductive metal base element 9411 of the single unsecured point-of-load terminal 9410 to provide a return path for the circuit in direction 9402 into the SMA material 9422. Current flows in direction 9403 from conductive base element 9411 through SMA material 9422 to a common conductive metal base layer at the fixed end.

In this example, a single unfixed point-of-load terminal 9410 eliminates concerns about an alternate current flow path with a conductive metal base element 9411. The single unfixed point-of-load terminal 9410 also enables a larger footprint for the conductive metal base element 9411 to provide a flatter surface post-etch. The exemplary bimorph actuator 9400 draws one less power than the previous example because the shorter electrical path improves the resistive path. A single unsecured point-of-load end 9410 also enables designs that incorporate point-of-load structures of different sizes and shapes.

95 shows an exemplary bimorph actuator 9500 including a single unsecured point-of-load end 9510, according to an embodiment. The single unsecured point-of-load end 9510 may include a point-of-load element 9512 extending from a conductive metal base layer of the tongue 9511. The point-of-load element 9512 is configured to engage with a component, such as a lens mount. The point of load element 9512 may be composed of any material combined with the conductive metal base layer of the tongue 9511 to achieve a low friction interface between the point of load element 9512 and the engaged payload of a component. In some instances, the load point may consist primarily of stainless steel.

The bimorph actuator 9500 includes a first bimorph arm 9521 that includes one or more SMA materials 9525, such as an SMA tape or SMA wire. SMA material 9525 can be attached to one of the crossbars of the first bimorph arm 9521. The first bimorph arm 9521 may also include a conductive metal base layer and optionally a dielectric layer.

The SMA material 9525 is electrically coupled to a conductive metal base element at a fixed end, as discussed with respect to FIG. 93 . The SMA material 9525 is also electrically coupled to a conductive metal base layer of the tongue 9511 of the single unsecured point-of-load terminal 9510. The bimorph actuator 9500 may also include a second bimorph arm 9523 comprising one or more SMA materials 9522, such as an SMA tape or SMA wire. The SMA material 9522 can be attached to one of the crossbars of the second bimorph arm 9523. The second bimorph arm 9523 may also include a conductive metal base layer and optionally a dielectric layer.

SMA material 9525 and SMA material 9522 are electrically coupled to a conductive metal base element 9511 of a single unsecured point-of-load terminal 9510. Current flows in direction 9501 into SMA material 9425 from a common conductive metal base layer at the fixed end. The SMA material 9525 is electrically grounded to the conductive metal base element 9511 of the single unsecured point-of-load terminal 9510 to provide a return path for the circuit in direction 9502 into the SMA material 9522. Current flows in direction 9503 from conductive base element 9511 through SMA material 9522 to a common conductive metal base layer at the fixed end.

In some examples of the invention, point-of-load elements 9512 may be fabricated in different sizes and shapes. In some examples of the invention, the point-of-load element 9512 may be attached to the unsecured point-of-load end 9510 using any method including, but not limited to, glue, welding, adhesion, and the like. Again, the point-of-load element 9512 may be one or more separate pieces. Point-of-load element 9512 is shown on a single unsecured point-of-load end 9510. Additional examples of the invention may include, for example, a point-of-load element located on each of the unsecured point-of-load ends of FIGS. 88-93.

It should be understood that terms such as "top," "bottom," "above," "below," and the x, y, and z directions are used herein for convenience to denote components relative to each other and not relative to any particular space or The spatial relationship of gravity orientation. Thus, the term is intended to encompass an assembly of components, whether oriented in the particular orientation shown in the drawings and described in the specification, reversed from that orientation, or any other rotational variation.

It is to be understood that the term "invention" as used herein should not be construed to mean merely presenting a single invention having a single basic element or group of elements. Similarly, it should also be understood that the term "invention" encompasses several separate innovations, which may each be considered separate inventions. Although the present invention has been described in detail with respect to the preferred embodiment and its drawings, it will be apparent to those skilled in the art that various adaptations and modifications of the embodiments of the invention can be made without departing from the spirit and scope of the invention. Additionally, the techniques described herein can be used to fabricate a device having two, three, four, five, six, or more generally, n bimorph actuators and fastener actuators . Therefore, it should be understood that the detailed description and drawings set forth above are not intended to limit the breadth of the invention, which should be inferred only from the following claims and their properly interpreted legal equivalents.

100: Shape memory alloy (SMA) wire 101: Substrate 102: Fastener Actuator 104: Center Section 106: Clamp structure 108: positive z direction 202: Bimorph actuators 204: Substrate 206: SMA belt 208: z travel direction 302: SMA Actuator / Fastener Actuator 304: Optical Image Stabilizer (OIS) 306: Lens Holder 308: return spring 310: Vertical sliding bearing 312: Guide cover 502: Sensor 504: z direction 506: Fastener Actuator 508:SMA wire 602: SMA Actuator 604: Lens Holder 606: Wire Holder 608:SMA wire 610: Buckle Arm 612: Spring Arm 702: Sliding base 704: Assembly Base/Actuator Base 706: Plain bearings 708: Vertical sliding surface 710: Fastener Actuator 802: Fastener Actuator 804: Buckle Arm 806: Suspension part 902: Bimorph Actuator 904: Lens Holder 906: End 908: Base 1002: Auto focus assembly 1004: Position Sensor 1005: z direction 1006: Moving Spring 1008: Magnet 1010: Lens Holder 1102: Bimorph Actuator 1104: Crossbar 1106: SMA material 1106a:SMA wire 1106b: SMA tape 1108: Adhesive film material 1110: Contact 1112: Insulator 1114: Second insulator 1202: SMA material 1203: End pad 1204: Center Feed 1206: Crossbar 1208: Center Metal 1210: Insulator 1212: Through hole 1214: Contact Layer 1214a: Power Section 1214b: Ground Section 1216: Power supply contact 1218: Ground Contact 1220: Topcoat 1222: Clearance 1224: Through hole section 1302: Fastener Actuator 1304: Fastener Actuator 1306: Lens Holder 1308: Suspension part 1310: Buckle Arm 1312: Buckle Arm 1314: Sliding base 1316: Sliding base 1318:SMA wire 1902: Fastener Actuator 1904: Fastener Actuator 1906: Lens Holder 1908: Suspension section 1910: Buckle Arm 1912: Buckle Arm 1914: Sliding base 1916: Sliding base 1918: The base part 1920: Cover part 2202: Fastener Actuator 2204: Fastener Actuator 2206: Lens Holder 2218a: Left SMA wire 2218b: Right SMA wire 2302: First Fastener Actuator 2304: Second Fastener Actuator 2305: Coupler Ring 2306: Lens Holder 2308: Suspension part 2309: Suspension part 2401: Sliding base 2402: Fastener Actuator 2403: Return Spring 2404: Buckle Arm 2405: Lens Holder 2406: Laminated Suspension 2408:SMA wire 2409: Shell 2412: Laminated Clamp Connections 2413: Clamp 2414: Adapter Plate 2415: Signal traces 2501: SMA System 3000: Reinforcement 3001: Sliding base 3002: Fastener Actuator 3003: Return Spring 3004: Buckle Arm 3005: Lens Holder 3008:SMA wire 3009: Shell 3012: Resistance Welding Wire Clamps 3014: Adapter Board 3020: Flexible Circuits 3101: SMA System 3501: SMA Bimorph Liquid Lens 3502: Liquid lens sub-assembly 3504: Shell 3506: SMA Actuator 3508: Bimorph Actuator 3510: Forming Ring 3512: Diaphragm 3514: Liquid 3516: Liquid Containment Ring 3518: Lens 3520: Contact 3902: SMA Actuator 3904: Positive z-stroke actuator 3906: Negative z-stroke actuator 3908:SMA wire 3910: Lens Holder 3912: Top Spring 3914: Top Spacer 3916: Bottom Spacer 3918: Bottom Spring 3920: Base 4102:Length 4103: Bimorph Actuator 4104: Bond pads 4108: Extended Length 4202: SMA Bimorph Actuator 4206:SMA wire 4302: Negative Actuator Signal Connection 4304: Base 4306: Bimorph Actuator 4308: Wire bond pads 4310: Adhesive layer 4312: SMA wire 4314: Positive Actuator Signal Connection 4316: Wire bond pads 4318: Adhesive layer 4322: Connection pad 4602: Flex Sensor Circuit 4604: Bimorph Actuator Circuit 4606: Bimorph Actuator 4608: Mobile Bracket 4610: Shell 4802: SMA Actuator 4804: Corresponding shell 5002: SMA Actuator 5004: SMA Bimorph Actuator 5202: Bimorph Actuator 5302: Bimorph Actuator 5402: Bimorph Actuator 5502: SMA Bimorph Actuator 5802: SMA Actuator 5806: Bimorph Actuator 6202: SMA Actuator 6204: Bimorph Actuator 6504: Shell 6506: Lens Holder 6602: SMA Actuator 6603: Lens Holder 6604: Bimorph Actuator 6802: SMA Actuator 6804: Sensor Bracket 6806: Bimorph Actuator 7302: SMA Actuator 7304: Bimorph Actuator 7402: SMA Actuator 7404: Bimorph Actuator 7902: SMA Actuator 7904: Bimorph Actuator 8402: SMA Actuator 8404: Bimorph Actuator 8906: Common Conductive Metal Base Layer 8907: Tongue 8908: Free end 8909: Contact member 8910: Free end 8911: Tongue 8912: Contact member 8921: Bimorph Arm/Bar 8922: SMA material 8923: Bimorph Arm 8924: Dielectric Layer 8925: SMA material 8926: Dielectric Layer 8930: Fixed end 8931: First conductive metal base element 8932: Second Contact Pad 8933: Second Conductive Metal Base Element 8934: Conductive Metal Base Layer 8935: First Contact Pad 8936: Pore 8937: First Contact 8938: Second Contact Element 8939: Dielectric Layer 8980: Bimorph Actuator 8987: First SMA Contact 8988: Second SMA contact 8990: Bimorph Actuator 8991: Direction 8992: Direction 8993: Direction 8994: Direction 8995: Direction 8997: Direction 9301: Direction 9303: Direction 9305: Direction 9307: Direction 9309: Direction 9310: Bimorph Actuator/Free End 9311: Tongue 9312: Free end 9313: Tongue 9321: First bimorph arm 9323: Second Bimorph Arm 9325: SMA material 9327: SMA material 9330: Fixed end 9337: First conductive metal base element 9338: Second Conductive Metal Base Element 9400: Bimorph Actuator 9401: Direction 9402: Direction 9403: Direction 9408: Contact member 9409: Contact member 9410: Single Unfixed Point-of-Load Terminal 9411: Conductive Metal Base Components 9421: First bimorph arm 9422: SMA material 9423: Second Bimorph Arm 9425: SMA material 9500: Bimorph Actuator 9501: Direction 9502: Direction 9503: Direction 9510: Single Unfixed Point-of-Load Terminal 9511: Tongue/Conductive Metal Base Element 9512: Point of Load Components 9521: First bimorph arm 9522: SMA material 9523: Second Bimorph Arm 9525: SMA material

Embodiments of the invention are illustrated by way of example and not limitation in the figures of the accompanying drawings, wherein like reference numerals indicate similar elements, and wherein:

1a illustrates a lens assembly including an SMA actuator configured as a fastener actuator, according to one embodiment;

Figure 1b illustrates an SMA actuator according to an embodiment;

2 illustrates an SMA actuator according to an embodiment;

3 shows an exploded view of an autofocus assembly including an SMA wire actuator, according to one embodiment;

4 illustrates an autofocus assembly including an SMA actuator according to one embodiment;

5 illustrates an SMA actuator according to an embodiment including a sensor;

6 shows a top view and a side view of an SMA actuator configured as a fastener actuator according to an embodiment equipped with a lens holder;

7 depicts a side view of a section of an SMA actuator according to an embodiment;

Figure 8 depicts various views of one embodiment of a fastener actuator;

9 illustrates a bimorph actuator according to an embodiment with a lens holder;

10 illustrates a cross-sectional view of an autofocus assembly including an SMA actuator, according to an embodiment;

11a-11c illustrate views of bimorph actuators according to some embodiments;

12 shows a view of an embodiment of a bimorph actuator according to an embodiment;

13 illustrates a cross-section of an end pad of a bimorph actuator according to an embodiment;

14 illustrates a cross-section of a center supply pad of a bimorph actuator according to an embodiment;

15 shows an exploded view of an SMA actuator including one of two fastener actuators, according to one embodiment;

16 illustrates an SMA actuator including two fastener actuators, according to an embodiment;

17 shows a side view of an SMA actuator including one of two fastener actuators, according to one embodiment;

18 shows a side view of an SMA actuator including one of two fastener actuators, according to one embodiment;

19 depicts an exploded view of an assembly including an SMA actuator including two fastener actuators, according to an embodiment;

20 illustrates an SMA actuator including two fastener actuators, according to an embodiment;

21 illustrates an SMA actuator including two fastener actuators, according to an embodiment;

22 illustrates an SMA actuator including two fastener actuators, according to an embodiment;

23 illustrates an SMA actuator including two fastener actuators and a coupler, according to an embodiment;

24 depicts an exploded view of an SMA system including an SMA actuator including a fastener actuator with a laminated suspension, according to an embodiment;

25 illustrates an SMA system including an SMA actuator including a fastener actuator 2402 with a laminated suspension, according to one embodiment;

Figure 26 illustrates a fastener actuator including a laminated suspension according to one embodiment;

27 illustrates a laminated suspension of an SMA actuator according to an embodiment;

FIG. 28 illustrates a lamination-molded jaw connection of an SMA actuator according to an embodiment;

Figure 29 depicts an SMA actuator including a fastener actuator with a laminated suspension;

30 depicts an exploded view of an SMA system including an SMA actuator including a fastener actuator, according to an embodiment;

31 illustrates an SMA system including an SMA actuator including a fastener actuator, according to an embodiment;

32 illustrates an SMA actuator including a fastener actuator, according to an embodiment;

33 illustrates a double yoke capture joint of a pair of snap arms of an SMA actuator according to an embodiment;

FIG. 34 depicts a resistance welding jaw of an SMA actuator according to an embodiment for attaching an SMA wire to the fastener actuator;

Figure 35 depicts an SMA actuator including a fastener actuator with a double yoke capture joint;

36 illustrates an SMA bimorph liquid lens according to an embodiment;

37 illustrates a see-through SMA bimorph liquid lens according to an embodiment;

38 illustrates a cross-section and a bottom view of an SMA bimorph liquid lens according to an embodiment;

39 illustrates an SMA system including an SMA actuator with a bimorph actuator, according to an embodiment;

40 illustrates an SMA actuator with a bimorph actuator according to an embodiment;

Figure 41 illustrates the length of a bimorph actuator and the position where an SMA wire extends the wire length beyond a bond pad of the bimorph actuator;

42 shows an exploded view of an SMA system including a bimorph actuator according to an embodiment;

43 depicts an exploded view of a subsection of an SMA actuator according to an embodiment;

44 depicts a subsection of an SMA actuator according to an embodiment;

45 illustrates a 5-axis sensor displacement system according to an embodiment;

46 shows an exploded view of a 5-axis sensor displacement system according to an embodiment;

47 illustrates an SMA actuator including a bimorph actuator integrated into this circuit for all motions, according to an embodiment;

48 illustrates an SMA actuator including a bimorph actuator integrated into this circuit for all motions, according to an embodiment;

49 illustrates a cross-section of a 5-axis sensor displacement system according to an embodiment;

50 illustrates an SMA actuator according to an embodiment including a bimorph actuator;

51 illustrates a top view of an SMA actuator according to an embodiment including a bimorph actuator that moves an image sensor in different x and y positions;

52 depicts an SMA actuator including a bimorph actuator configured as a cassette bimorph autofocus according to one embodiment;

53 illustrates an SMA actuator including a bimorph actuator according to an embodiment;

54 illustrates an SMA actuator including a bimorph actuator according to an embodiment;

55 illustrates an SMA actuator including a bimorph actuator according to an embodiment;

56 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

57 depicts an exploded view of an SMA system including an SMA actuator including a bimorph actuator configured as a 2-axis lens shift OIS, according to one embodiment;

58 depicts a cross-section of an SMA system including an SMA actuator including a bimorph actuator configured as a 2-axis lens shift OIS, according to one embodiment;

Figure 59 illustrates a cassette bimorph actuator according to an embodiment;

60 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

61 depicts an exploded view of an SMA system including an SMA actuator including a bimorph actuator, according to one embodiment;

62 depicts a cross-section of an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 63 illustrates a cassette bimorph actuator according to an embodiment;

64 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

65 depicts an exploded view of an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

66 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

67 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

68 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

69 depicts an exploded view of an SMA including an SMA actuator including a bimorph actuator, according to one embodiment;

70 depicts a cross-section of an SMA system including an SMA actuator including a bimorph actuator configured as a 3-axis sensor displacement OIS, according to one embodiment;

Figure 71 illustrates a cassette bimorph actuator assembly according to an embodiment;

72 illustrates a flex sensor circuit for use in an SMA system, according to an embodiment;

73 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

74 depicts an exploded view of an SMA system including an SMA actuator including a bimorph actuator, according to one embodiment;

75 depicts a cross-section of an SMA system including an SMA actuator, according to an embodiment;

Figure 76 illustrates a cassette bimorph actuator according to an embodiment;

77 illustrates a flex sensor circuit for use in an SMA system, according to an embodiment;

78 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

79 depicts an exploded view of an SMA system including an SMA actuator including a bimorph actuator, according to one embodiment;

80 depicts a cross-section of an SMA system including an SMA actuator, according to an embodiment;

Figure 81 illustrates a cassette bimorph actuator according to an embodiment;

82 illustrates a flex sensor circuit for use in an SMA system, according to an embodiment;

83 illustrates an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

84 depicts an exploded view of an SMA system including an SMA actuator, according to an embodiment;

85 depicts a cross-section of an SMA system including an SMA actuator including a bimorph actuator, according to an embodiment;

Figure 86 illustrates a cassette bimorph actuator for use in an SMA system, according to an embodiment;

87 illustrates a flex sensor circuit for use in an SMA system, according to an embodiment;

88 depicts exemplary dimensions of a bimorph actuator of an SMA actuator according to an embodiment;

Figure 89 shows a first view of a bimorph actuator according to an embodiment;

90 shows a second view of an exemplary bimorph actuator according to an embodiment;

91 depicts a perspective view of an exemplary bimorph actuator according to an embodiment;

92 depicts SMA wires in an exemplary bimorph actuator according to an embodiment;

93 depicts the current flow path of an exemplary bimorph actuator 9310 according to an embodiment;

94 depicts an exemplary bimorph actuator including a single unfixed point-of-load end, according to an embodiment; and

95 shows an exemplary bimorph actuator including a single unfixed point-of-load end, according to an embodiment.

100: Shape memory alloy (SMA) wire

101: Substrate

102: Fastener Actuator

104: Center Section

106: Clamp structure

108: positive z direction

Claims (20)

A bimorph actuator comprising: a fixed end, which includes a dielectric layer and a conductive metal base layer; at least one bimorph arm extending from the fixed end, the at least one bimorph arm consisting of the conductive metal base layer; at least one free end, each of the at least one free end extending from the at least one bimorph arm; and One or more SMA materials, etc., extend between the fixed end and the at least one free end, the one or more SMA materials being isolated from the conductive metal base layer. The piezoelectric bimorph actuator of claim 1, wherein the conductive metal base layer is separated into a first conductive metal base element, a second conductive metal base element and a common conductive metal base layer by a gap defined by the dielectric layer . The piezoelectric bimorph actuator of claim 2, wherein the gaps expose portions of the dielectric layer mounted to the first conductive metal base element, the second conductive metal base element, and the common conductive metal base layer Or fully etch the gap. The bimorph actuator of claim 2, wherein the at least one bimorph arm consists of the common conductive metal base layer and the dielectric layer. The bimorph actuator of claim 2, wherein the first conductive metal base element and the second conductive metal base element are electrically isolated. The bimorph actuator of claim 2, wherein one of the one or more SMA materials is electrically coupled to the first conductive metal base element of the fixed end and to a conductive one of the at least one free end Metal base layer. The bimorph actuator of claim 2, wherein one of the one or more SMA materials is electrically coupled to the second conductive metal base element of the fixed end and to a conductive one of the at least one free end Metal base layer. The bimorph actuator of claim 1, wherein the at least one free end includes a tongue composed of the conductive metal base layer and a contact member extending from a tongue. The bimorph actuator of claim 1, wherein the at least one free end comprises a single unsecured point-of-load end connected to the two bimorph arms. The bimorph actuator of claim 9, wherein the single unfixed point of load comprises a point of load element. The bimorph actuator of claim 1, wherein the one or more SMA materials comprise an SMA tape or an SMA wire. The bimorph actuator of claim 1, wherein the one or more SMA materials are attached to the at least one bimorph arm using an adhesive film material. The bimorph actuator of claim 1, wherein the conductive metal base layer is composed of at least one of stainless steel, copper, copper alloys, gold and nickel. The bimorph actuator of claim 1, wherein the fixed end comprises a first contact pad of the SMA material electrically and mechanically coupled to a first bimorph arm, the first contact pad being a gold plated Stainless steel pad. The bimorph actuator of claim 1, wherein the fixed end comprises a second contact pad of the SMA material electrically and mechanically coupled to a second bimorph arm, the second contact pad being a gold plated Stainless steel pad. An actuator, which is composed of a dielectric layer and a conductive metal base layer; the actuator comprises: a fixed end, wherein the conductive metal base layer at the fixed end is separated into a first conductive metal base element, a second conductive metal base element and a common conductive metal base layer by a gap defined by the dielectric layer; at least one bimorph arm extending from the fixed end, the at least one bimorph arm consisting of the common conductive metal base layer and the dielectric layer; at least one free end, each of the at least one free end extending from the at least one bimorph arm; and One or more SMA materials extending between the fixed end and the at least one free end, the one or more SMA materials being isolated from the conductive metal base layer by the dielectric layer. The actuator of claim 16, wherein the first conductive metal base element and the second conductive metal base element are electrically isolated. The actuator of claim 16, wherein one of the one or more SMA materials is electrically coupled to the first conductive metal base element of the fixed end and to a conductive metal base layer of the at least one free end. The actuator of claim 16, wherein one of the one or more SMA materials is electrically coupled to the second conductive metal base element of the fixed end and to a conductive metal base layer of the at least one free end. 16. The actuator of claim 16, wherein the at least one free end includes a tongue comprised of the conductive metal base layer and a contact member extending from a tongue.

Images