JP2022527469A - Shape memory alloy actuator and its method - Google Patents

Abstract

The SMA actuator and its related methods will be described. One embodiment of the actuator includes a base, a plurality of buckle arms, and at least a first shape memory alloy wire coupled to a pair of buckle arms of the plurality of buckle arms. Another embodiment of the actuator comprises a base and at least one bimorph actuator comprising a shape memory alloy material. The bimorph actuator is attached to the base.

Description

Embodiments of the present invention relate to the field of shape memory alloy systems. More specifically, embodiments of the present invention relate to the field of shape memory alloy actuators and methods relating thereto.

The shape memory alloy (“SMA”) system has a movable assembly or structure that can be used with the camera lens element, for example, as an autofocus drive mechanism. These systems can be sealed by a structure such as a shield can. The movable assembly is supported to move on the support assembly by bearings such as a plurality of balls. A flexible element made of a metal such as phosphor bronze or stainless steel has a movable plate and a flexible portion. The deflection extends between the movable plate and the fixed support assembly and acts as a spring to allow the movable assembly to move relative to the fixed support assembly. The ball allows the movable assembly to move with little resistance. Movable and supportive assemblies are joined by four shape memory alloy (SMA) wires that extend between them. Each of the SMA wires has one end attached to the support assembly and the opposite end attached to the movable assembly. The suspension is operated by applying an electric drive signal to the SMA wire. However, these types of systems have the problem of system complexity resulting in bulky systems that require large footprints and large height clearances. Moreover, current systems are unable to provide a high Z-stroke range with a small, thin footprint.

The SMA actuator and related methods will be described. One embodiment of the actuator includes a base, a plurality of buckle arms, and at least a first shape memory alloy wire coupled to a pair of buckle arms of the plurality of buckle arms. Another embodiment of the actuator comprises a base and at least one bimorph actuator comprising a shape memory alloy material. The bimorph actuator is attached to the base.

Other features and advantages of embodiments of the invention will be apparent from the accompanying drawings and from the detailed description below.
Embodiments of the present invention are illustrated as examples, but not limited to, in the accompanying drawings, in which similar reference numerals indicate similar elements.

It is a figure which shows the lens assembly which includes the SMA actuator configured as a buckle actuator by one Embodiment. It is a figure which shows the SMA actuator by one Embodiment. It is a figure which shows the SMA actuator by one Embodiment. FIG. 6 is an exploded view of an autofocus assembly comprising an SMA wire actuator according to an embodiment. It is a figure which shows the autofocus assembly which includes the SMA actuator by one Embodiment. It is a figure which shows the SMA actuator by one Embodiment which includes a sensor. It is a top view and a side view of the SMA actuator configured as a buckle actuator according to one embodiment to which a lens carriage is attached. It is a side view of one section of the SMA actuator by one embodiment. It is a plurality of figures of one Embodiment of a buckle actuator. It is a figure which shows the bimorph actuator by one Embodiment which provided with a lens carriage. FIG. 6 is a cut-out view of an autofocus assembly comprising an SMA actuator according to an embodiment. It is a figure of the bimorph actuator by some embodiments. It is a figure of the bimorph actuator by some embodiments. It is a figure of the bimorph actuator by some embodiments. It is a figure of one Embodiment of the bimorph actuator by one Embodiment. It is a figure which shows the end pad cross section of the bimorph actuator by one Embodiment. It is a figure which shows the cross section of the central power pad of the bimorph actuator by one Embodiment. It is an exploded view of the SMA actuator including two buckle actuators by one Embodiment. It is a figure which shows the SMA actuator which includes two buckle actuators by one Embodiment. It is a side view of the SMA actuator including two buckle actuators according to one embodiment. It is a side view of the SMA actuator including two buckle actuators according to one embodiment. FIG. 6 is an exploded view of an assembly comprising an SMA actuator including two buckle actuators according to one embodiment. It is a figure which shows the SMA actuator which includes two buckle actuators by one Embodiment. It is a figure which shows the SMA actuator which includes two buckle actuators by one Embodiment. It is a figure which shows the SMA actuator which includes two buckle actuators by one Embodiment. It is a figure which shows the SMA actuator which includes two buckle actuators and a coupler by one Embodiment. FIG. 6 is an exploded view of an SMA system comprising a SMA actuator including a buckle actuator with a laminated hammock according to one embodiment. FIG. 5 shows an SMA system comprising a SMA actuator including a buckle actuator 2402 with a laminated hammock, according to one embodiment. It is a figure which shows the buckle actuator including the laminated hammock by one Embodiment. It is a figure which shows the laminated hammock of the SMA actuator by one Embodiment. It is a figure which shows the laminated molding crimp connection part of the SMA actuator by one Embodiment. It is a figure which shows the SMA actuator which includes the buckle actuator equipped with the laminated hammock. FIG. 6 is an exploded view of an SMA system including an SMA actuator including a buckle actuator according to an embodiment. It is a figure which shows the SMA system which includes the SMA actuator which includes the buckle actuator by one Embodiment. It is a figure which shows the SMA actuator which includes the buckle actuator by one Embodiment. It is a figure which shows the 2 yoke catching joint part of the pair of buckle arms of the SMA actuator by one Embodiment. It is a figure which shows the resistance welding crimping part for the SMA actuator by one Embodiment used for attaching an SMA wire to a buckle actuator. 2 is a diagram showing an SMA actuator including a buckle actuator with a yoke capture joint. It is a figure which shows the SMA bimorph liquid lens by one Embodiment. It is a figure which shows the SMA bimorph liquid lens seen from diagonally above by one Embodiment. It is sectional drawing and the bottom view of the SMA bimorph liquid lens by one Embodiment. It is a figure which shows the SMA system which includes the SMA actuator which provided with the bimorph actuator by one Embodiment. It is a figure which shows the SMA actuator provided with the bimorph actuator by one Embodiment. It is a figure which shows the length of the bimorph actuator and the position of the bonding pad which extends the wire length over the bimorph actuator by the SMA wire. FIG. 6 is an exploded view of an SMA system including a bimorph actuator according to an embodiment. It is an exploded view of the small section of the SMA actuator by one Embodiment. It is a figure which shows the small section of the SMA actuator by one Embodiment. It is a figure which shows the 5-axis sensor shift system by one Embodiment. It is an exploded view of the 5-axis sensor shift system by one Embodiment. FIG. 5 shows an SMA actuator including a bimorph actuator incorporated in this circuit for all motions according to one embodiment. FIG. 6 shows an SMA actuator according to an embodiment, including a bimorph actuator incorporated in this circuit for all movements. It is a figure which shows the cross section of the 5-axis sensor shift system by one Embodiment. It is a figure which shows the SMA actuator by one Embodiment which includes a bimorph actuator. FIG. 3 is a top view of an SMA actuator according to an embodiment, comprising a bimorph actuator in which an image sensor is moved at different x and y positions. It is a figure which shows the SMA actuator which includes the bimorph actuator by one Embodiment which was configured as a box bimorph autofocus. It is a figure which shows the SMA actuator which includes the bimorph actuator by one Embodiment. It is a figure which shows the SMA actuator which includes the bimorph actuator by one Embodiment. It is a figure which shows the SMA actuator which includes the bimorph actuator by one Embodiment. It is a figure which shows the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. FIG. 6 is an exploded view of an SMA system including an SMA actuator according to an embodiment, including a bimorph actuator configured as a biaxial lens shift OIS. FIG. 6 is a cross-sectional view of an SMA system comprising an SMA actuator according to one embodiment, comprising a bimorph actuator configured as a biaxial lens shift OIS. It is a figure which shows the box-by-morph actuator by one Embodiment. It is a figure which shows the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. FIG. 6 is an exploded view of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator. It is a figure which shows the cross section of the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. It is a figure which shows the box-by-morph actuator by one Embodiment. It is a figure which shows the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. FIG. 6 is an exploded view of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator. It is a figure which shows the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. It is a figure which shows the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. It is a figure which shows the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. FIG. 6 is an exploded view of an SMA comprising an SMA actuator according to an embodiment including a bimorph actuator. It is a figure which shows the cross section of the SMA system which contains the SMA actuator by one Embodiment which includes the bimorph actuator configured as a 3-axis sensor shift OIS. It is a figure which shows the box-by-morph actuator component by one Embodiment. It is a figure which shows the flexible sensor circuit used in the SMA system by one Embodiment. It is a figure which shows the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. FIG. 6 is an exploded view of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator. It is a figure which shows the cross section of the SMA system which includes the SMA actuator by one Embodiment. It is a figure which shows the box-by-morph actuator by one Embodiment. It is a figure which shows the flexible sensor circuit used in the SMA system by one Embodiment. It is a figure which shows the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. FIG. 6 is an exploded view of an SMA system including an SMA actuator according to an embodiment including a bimorph actuator. It is a figure which shows the cross section of the SMA system which includes the SMA actuator by one Embodiment. It is a figure which shows the box-by-morph actuator by one Embodiment. It is a figure which shows the flexible sensor circuit used in the SMA system by one Embodiment. It is a figure which shows the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. It is an exploded view of the SMA system including the SMA actuator according to one embodiment. It is a figure which shows the cross section of the SMA system which includes the SMA actuator by one Embodiment which includes a bimorph actuator. It is a figure which shows the box-by-morph actuator used in the SMA system by one Embodiment. It is a figure which shows the flexible sensor circuit used in the SMA system by one Embodiment. It is a figure which shows the exemplary dimension of the SMA actuator with respect to the bimorph actuator by one Embodiment. It is a figure which shows the lens system for the bent-type camera (folded camera) by one Embodiment. It is a figure which shows some embodiment of the lens system which includes a liquid lens by one Embodiment. It is a figure which shows the bending lens which is a prism which is arranged on the actuator by one Embodiment. It is a figure which shows the bimorph arm which includes the offset by one Embodiment. It is a figure which shows the bimorph arm which includes the offset and the limiter by one Embodiment. It is a figure which shows the bimorph arm which includes the offset and the limiter by one Embodiment. It is a figure which shows one Embodiment of the base which comprises the bimorph arm which includes the offset by one Embodiment. It is a figure which shows one Embodiment of the base which comprises two bimorph arms including the offset by one Embodiment. It is a figure which shows the buckler arm which includes the load point expansion part by one Embodiment. It is a figure which shows the buckler arm 9801 which includes the load point expansion part 9810 by one Embodiment. It is a figure which shows the bimorph arm which includes the load point expansion part by one Embodiment. It is a figure which shows the bimorph arm which includes the load point expansion part by one Embodiment. It is a figure which shows the SMA optical image stabilization mechanism by one Embodiment. It is a figure which shows the SMA material mounting part 40 of the movable part by one Embodiment. It is a figure which shows the SAM mounting part of the stationary plate to which the resistance welded SMA wire by one Embodiment is attached. It is a figure which shows the SMA actuator 45 including the buckle actuator by one Embodiment. It is a figure which shows the resistance welding crimping part including the island-shaped part for the SMA actuator by one Embodiment. It is a figure which shows the resistance welding crimping part including the island-shaped part for the SMA actuator by one Embodiment. It is a figure which shows the relationship between the curved surface z offset, the valley width, and the peak force of a bimorph beam according to one Embodiment. It is a figure which shows the example of how the box volume which is the approximation of the box which surrounds the whole bimorph actuator by one embodiment is related to work for each bimorph component. It is a figure which shows the liquid lens which operates by using the buckler actuator by one Embodiment. It is a figure which shows the unfixed load point end part of the bimorph arm by one Embodiment. It is a figure which shows the unfixed load point end part of the bimorph arm by one Embodiment. It is a figure which shows the unfixed load point end part of the bimorph arm by one Embodiment. It is a figure which shows the unfixed load point end part of the bimorph arm by one Embodiment. It is a figure which shows the fixed end portion of the bimorph arm by one Embodiment. It is a figure which shows the fixed end portion of the bimorph arm by one Embodiment. It is a figure which shows the fixed end portion of the bimorph arm by one Embodiment. It is a figure which shows the fixed end portion of the bimorph arm by one Embodiment. It is a figure which shows the rear view of the fixed end portion of the bimorph arm by one Embodiment.

Described herein are embodiments of SMA actuators that include a small footprint and provide high operating heights, eg, movement in the positive z-axis direction (z-direction), referred to herein as z-strokes. do. Embodiments of SMA actuators include SMA buckle actuators and SMA bimorph actuators. SMA actuators are used in many applications including, but not limited to, lens assemblies as autofocus actuators, microfluidic pumps, sensor shifts, optical camera shake correction, optical zoom assemblies, as well as haptic feedback sensors and devices, as well as actuators. It can be used to mechanically collide the two surfaces to provide the vibration sensation normally found in other systems. For example, the actuator embodiments described herein are as haptic feedback actuators used in mobile phones or wearable devices configured to provide users with alarms, notifications, warnings, contact areas or press button responses. Can be used. In addition, two or more SMA actuators can be used to achieve greater stroke in the system.

In various embodiments, the SMA actuator has a z-stroke greater than 0.4 millimeters. Moreover, the SMA actuators for various embodiments have a height of 2.2 millimeters or less in the z direction when in their initial, stop position. Various embodiments of the SMA actuator configured as an autofocus actuator in a lens assembly can have a small footprint, such as about 3 millimeters larger than the lens inner diameter (“ID”). According to various embodiments, the SMA actuator can have a wider footprint in one direction than the other so as to accommodate components including, but not limited to, sensors, wires, traces and connectors. According to some embodiments, the footprint of the SMA actuator is 0.5 mm larger in one direction than the other, for example, the length of the SMA actuator is 0.5 mm larger than the width.

FIG. 1a shows a lens assembly comprising an SMA actuator configured as a buckle actuator according to one embodiment. FIG. 1b shows an SMA actuator configured as a buckle actuator according to an embodiment. The buckle actuator 102 is coupled to the base 101. As shown in FIG. 1b, when the SMA wire 100 is actuated and contracted, it retains the buckle actuator 102 so that at least the central portion 104 of each buckle actuator 102 is in the z-stroke direction, eg, positive, as indicated by the arrow 108. The SMA wire 100 is attached to the buckle actuator 102 so as to move in the z direction. According to some embodiments, the SMA wire 100 operates when a current is applied to one end of the wire through a wire holder such as a crimp structure 106. The current flows through the SMA wire 100 and heats the SMA wire 100 due to the inherent resistance of the SMA material that is the raw material of the SMA wire 100. The other side of the SMA wire 100 has a wire holder, such as a crimp structure 106, that connects the SMA wire 100 so that the circuit is grounded and completed. By heating the SMA wire 100 to a sufficient temperature, the unique material properties change from the martensite crystal structure to the austenite crystal structure, thereby changing the length of the wire. By changing the current, the temperature of the wire changes, and thus the length of the wire, which is used to activate and stop the actuator to control the movement of the actuator at least in the z direction. Those skilled in the art will appreciate that other techniques can be used to provide current to the SMA wire.

FIG. 2 shows an SMA actuator configured as an SMA bimorph actuator according to one embodiment. As shown in FIG. 2, the SMA actuator includes a bimorph actuator 202 coupled to a base 204. The bimorph actuator 202 includes the SMA ribbon 206. The bimorph actuator 202 is configured to move at least the non-fixed end of the bimorph actuator 202 in the z-stroke direction 208 as the SMA ribbon 206 contracts.

FIG. 3 shows an exploded view of an autofocus assembly comprising an SMA actuator according to an embodiment. As shown, the SMA actuator 302 is configured as a buckle actuator according to the embodiments described herein. The autofocus assembly is also configured to hold one or more optical lenses using techniques including Optical Image Stabilizer (“OIS”) 304 and those known in the art. It includes a 306, a return spring 308, a vertical slide bearing 310, and a guide cover 312. The lens carriage 306 is operated and pulled by the SMA wire using techniques including those described herein, and when the buckle actuator 302 is fastened, the SMA actuator 302 is in the z-stroke direction, eg, the positive z-direction. It is configured to slide with respect to the vertical slide bearing 310 when moved to. The return spring 308 is configured to exert a force on the lens carriage 306 in a direction opposite to the z-stroke direction using techniques known in the art. The return spring 308 is configured to move the lens carriage 306 in the opposite direction of the z-stroke direction when the tension in the SMA wire drops when the SMA wire stops, according to various embodiments. When the tension in the SMA wire drops to the initial value, the lens carriage 306 moves to the lowest height in the z-stroke direction. FIG. 4 shows an autofocus assembly comprising an SMA actuator according to one embodiment shown in FIG.

FIG. 5 shows an SMA wire actuator according to an embodiment that includes a sensor. In various embodiments, the sensor 502 measures the movement of the SMA actuator in the z direction, or the movement of components that the SMA actuator is moving using techniques including those known in the art. It is configured as follows. SMA actuators include one or more buckle actuators 506 configured to operate using one or more SMA wires 508 similar to those described herein. For example, in the autofocus assembly described with reference to FIG. 4, the sensor moves the lens carriage 306 from the initial position in the z direction 504 using techniques including those known in the art. It is configured to calculate the quantity. According to some embodiments, the sensor is a tunnel magnetoresistive (“TMR”) sensor.

FIG. 6 shows a top view and a side view of the SMA actuator 602 configured as a buckle actuator according to the embodiment to which the lens carriage 604 is attached. FIG. 7 shows a side view of a section of the SMA actuator 602 according to the embodiment shown in FIG. According to the embodiment shown in FIG. 7, the SMA actuator 602 includes a slide base 702. According to one embodiment, the slide base 702 is made of a metal such as stainless steel using techniques including those known in the art. However, it will be appreciated by those skilled in the art that other materials can be used to form the slide base 702. Further, the slide base 702 according to some embodiments has a spring arm 612 coupled to the SMA actuator 602. According to various embodiments, the spring arm 612 is configured to provide two functions. The first function is to help push an object, such as the lens carriage 604, into the vertical sliding plane of the guide cover. In this example, the spring arm 612 preloads the lens carriage 604 against this surface to ensure that the lens does not tilt during operation. In some embodiments, the vertical slide surface 708 is configured to fit the guide cover. The second function of the spring arm 612 is to help the SMA wire 602 move the SMA actuator 602 in the z-stroke direction, i.e. the positive z-direction, and then pull the SMA actuator 602 downward, for example in the negative z-direction. That is. Therefore, the SMA wire 608 is configured to contract to move the SMA actuator 602 in the z-stroke direction when actuated, and to move the SMA actuator 602 in the opposite direction of the z-stroke direction when stopped.

The SMA actuator 602 also includes a buckle actuator 710. In various embodiments, the buckle actuator 710 is made of a metal such as stainless steel. Further, the buckle actuator 710 includes a buckle arm 610 and one or more wire holders 606. According to the embodiments shown in FIGS. 6 and 7, the buckle actuator 710 includes four wire holders 606. Each of the four wire holders 606 is configured to receive the end of the SMA wire 608 and hold the SMA wire 608 so that the SMA wire 608 is attached to the buckle actuator 710. In various embodiments, the four wire holders 606 are crimps, which are configured to clamp a portion of the SMA wire 608 so that the wire is attached to the crimp. Those skilled in the art will appreciate that the SMA wire 608 can be attached to the wire holder 606 using techniques known in the art, including but not limited to adhesives, solders and mechanical attachments. .. The smart memory alloy (“SMA”) wire 608 extends between the pair of wire holders 606, and the buckle arm 610 of the buckle actuator 710 is actuated by the SMA wire 608, resulting in the pair of wire holders 606. It is configured to move when pulled closer to each other. According to various embodiments, the SMA wire 608 is electrically actuated when a current is applied to the SMA wire 608 to move the buckle arm 610 and control its position. The SMA wire 608 stops when the current is removed or falls below the threshold. As a result, the pair of wire holders 606 move apart, and the buckle arm 610 moves in the direction opposite to the direction in which the SMA wire 608 is activated. According to various embodiments, the buckle arm 610 is configured to have an initial angle of 5 degrees with respect to the slide base 702 when the SMA wire is stopped at its initial position. Also, at full stroke, or when the SMA wire is fully actuated, the buckle arm 610 is configured to have an angle of 10-12 degrees with respect to the slide base 702, according to various embodiments.

According to the embodiments shown in FIGS. 6 and 7, the SMA actuator 602 also includes a slide bearing 706 configured between the slide base 702 and the wire holder 606. The slide bearing 706 is configured to minimize any friction between the slide base 702 and the buckle arm 610 and / or the wire holder 606. The slide bearings of some embodiments are attached to the slide bearing 706. According to various embodiments, the slide bearing is made of polyoxymethylene (“POM”). Those skilled in the art will appreciate that other structures can be used to reduce any friction between the buckle actuator and the base.

According to various embodiments, the slide base 702 is configured to be coupled to an assembly base 704 such as an autofocus base for an autofocus assembly. The actuator base 704 according to some embodiments comprises an etched shim. Such etched shims can be used to provide clearance for wires and crimps when the SMA actuator 602 is part of an assembly such as an autofocus assembly.

FIG. 8 shows a plurality of diagrams of one embodiment of the buckle actuator 802 for the x-axis, y-axis and z-axis. As directed in FIG. 8, the buckle arm 804 is configured to move in the z-axis when the SMA wire is activated and stopped as described herein. According to the embodiment shown in FIG. 8, the buckle arms 804 are connected to each other via a central portion such as a hammock portion 806. The hammock portion 806 according to various embodiments is configured to rest on an object on which the buckle actuator acts, eg, a portion of the lens carriage that the buckle actuator moves using techniques including those described herein. There is. The hammock portion 806 is configured, according to some embodiments, to provide lateral stiffness to the buckle actuator during operation. In another embodiment, the buckle actuator does not include the hammock portion 806. According to these embodiments, the buckle arm is configured to act on the object to move it. For example, the buckle arm is configured to act directly on the feature of the lens carriage to push it up.

FIG. 9 shows an SMA actuator configured as an SMA bimorph actuator according to one embodiment. SMA bimorph actuators include bimorph actuators 902, including those described herein. According to the embodiment shown in FIG. 9, each end 906 of the bimorph actuator 902 is attached to the base 908. According to some embodiments, one end 906 is welded to the base 908. However, it will be appreciated by those skilled in the art that other techniques can be used to attach one end 906 to the base 908. FIG. 9 also shows the lens carriage 904, which is arranged such that the bimorph actuator 902 is configured to wind up in the z direction and lift the carriage 904 in the z direction when actuated. In some embodiments, a return spring is used to push the bimorph actuator 902 back to its initial position. The return springs can be configured to help push the bimorph actuators down to their initial, stop position, as described herein. Since the footprint of the bimorph actuator is small, it is possible to manufacture an SMA actuator having a reduced footprint as compared with the current actuator technology.

FIG. 10 shows a cut-out view of an autofocus assembly comprising an SMA actuator according to one embodiment, including a position sensor such as a TMR sensor. The autofocus assembly 1002 includes a position sensor 1004 attached to the movable spring 1006 and a magnet 1008 attached to the lens carriage 1010 of the autofocus assembly including the SMA actuator, such as those described herein. The position sensor 1004 uses techniques known in the art to determine the amount of movement of the lens carriage 1010 from its initial position in the z direction 1005 based on the distance of the magnet 1008 from the position sensor 1004. It is configured to determine. According to some embodiments, the position sensor 1004 is electrically coupled to a controller or processor, such as a central processing unit, using multiple electrical traces in the spring arm of the movable spring 1006 of the optical camera shake correction assembly. ing.

11a-11c show diagrams of bimorph actuators according to some embodiments. According to various embodiments, the bimorph actuator 1102 is one or more of the beam 1104 and the SMA ribbon 1106b (eg, as shown in the perspective view of the bimorph actuator including the SMA ribbon according to the embodiment of FIG. 11b). Includes SMA material 1106, or SMA wire 1106a (eg, as shown in the cross section of a bimorph actuator comprising SMA wire according to the embodiment of FIG. 11a). The SMA material 1106 is attached to the beam 1104 using techniques including those described herein. According to some embodiments, the SMA material 1106 is attached to the beam 1104 using an adhesive film material 1108. In various embodiments, the ends of the SMA material 1106 are electrically and electrically to contacts 1110 configured to supply current to the SMA material 1106 using techniques including those known in the art. It is mechanically bonded. The contact 1110 according to various embodiments (eg, as shown in FIGS. 11a and 11b) is a gold-copper pad. According to embodiments, the bimorph actuator 1102 having a length of approximately 1 millimeter is configured to generate a large stroke, for example, as shown in FIG. 11c, a pressing force of 50 millinewtons (“mN”). Is used as part of the lens assembly. According to some embodiments, the use of a bimorph actuator 1102 with a lens larger than 1 mm produces a larger stroke than a bimorph actuator with a length of 1 mm, but produces a smaller force. In one embodiment, the bimorph actuator 1102 comprises a 20 micrometer thick SMA material 1106, a 20 micrometer thick insulator such as a polyimide insulator 1112, and a 30 micrometer thick stainless steel beam 1104 or base metal. And include. Various embodiments include a second insulator 1114 disposed between the contact layer containing the contacts 1110 and the SMA material 1106. The second insulator 1114 is configured to insulate the SMA material 1106 from portions of the contact layer that are not used as contacts 1110, according to some embodiments. In some embodiments, the second insulator 1114 is a covercoat layer, such as a polyimide insulator. Those skilled in the art will appreciate that other dimensions and materials can be used to satisfy the desired design characteristics.

FIG. 12 shows a diagram of an embodiment of a bimorph actuator according to an embodiment. The embodiment shown in FIG. 12 includes a central power feeding unit 1204 to which electric power is applied. Power is supplied to the center of SMA material 1202 (wire or ribbon), such as those described herein. The ends of the SMA material 1202 are grounded to the beam 1206 or the base metal as a return path in the end pads 1203. The end pad 1203 is electrically isolated from the rest of the contact layer 1214. According to embodiments, when the beam 1206 or the base metal is in close proximity to the SMA material 1202 along the entire length of the SMA material 1202, such as the SMA wire, the current is turned off, i.e. when the bimorph actuator is stopped. , The wire is cooled faster. As a result, wire deactivation and actuator response times are faster. The thermal profile of the SMA wire or ribbon is improved. For example, the thermal profile is more uniform to ensure that the wire delivers a higher total current. Without a uniform heat sink, parts of the wire, such as the central region, could be overheated and damaged, and therefore reduced current and reduced motion are needed to ensure proper operation. Central feeding unit 1204 benefits from faster wire activation / operation (faster heating) and reduced power consumption of SMA material 1202 (lower resistance path length) for faster response times. offer. This allows for faster actuator motion and the ability to operate at higher mobile frequencies.

As shown in FIG. 12, the beam 1206 contains a central metal 1208 that is isolated from the rest of the beam 1206 so as to form the central feeding section 1204. Insulators 1210, such as those described herein, are placed on beam 1206. Insulator 1210 provides electrical access to the beam 1206 and, for example, contacts to the central metal 1208 to couple the grounding compartments 1214b of the contact layer and to form the central feeding section 1204. It is configured to have one or more openings or vias 1212. As described herein, the contact layer 1214 includes a power compartment 1214a and a ground compartment 1214b according to some embodiments that provide an actuation / control signal to the bimorph actuator by means of a power contact 1216 and a ground contact 1218. A covercoat layer 1220, such as those described herein, is placed on top of the contact layer 1214, except for portions of the contact layer 1214 where electrical coupling is desired (eg, one or more contacts). Electrically separate the layers.

FIG. 13 shows a cross section of the end pad of a bimorph actuator according to an embodiment as shown in FIG. As mentioned above, the end pad 1203 is electrically isolated from the rest of the contact layer 1214 by the gap 1222 formed between the end pad 1203 and the contact layer 1214. The gaps are formed by some embodiments using etching techniques, including those known in the art. The end pad 1203 includes a via compartment 1224 configured to electrically couple the end pad 1203 to the beam 1206. The via compartment 1224 is formed in the via 1212 formed in the insulator 1210. The SMA material 1202 is electrically coupled to the end pad 1213. The SMA material 1202 can be electrically coupled to the end pad 1213 using techniques including, but not limited to, soldering, resistance welding, laser welding and direct plating.

FIG. 14 shows a cross section of a central feeding portion of a bimorph actuator according to an embodiment as shown in FIG. The central feed unit 1204 is electrically coupled to the power source via the contact layer 1214 and is electrically connected to the central metal 1208 by the via compartment 1226 of the central power supply unit 1204 formed on the via 1212 formed on the insulator 1210. It is thermally and thermally coupled.

The actuators described herein can be used to form actuator assemblies that use multiple buckle actuators and / or bimorph actuators. According to one embodiment, the actuators can be stacked on top of each other to increase the stroke distance that can be achieved.

FIG. 15 shows an exploded view of an SMA actuator including two buckle actuators according to one embodiment. The two buckle actuators 1302, 1304 according to the embodiments described herein are arranged relative to each other so as to act in opposition to each other using their motion. In various embodiments, the two buckle actuators 1302 and 1304 are configured to move in opposite relations to each other to position the lens carriage 1306. For example, the first buckle actuator 1302 is configured to receive the reverse power signal of the power signal transmitted to the second buckle actuator 1304.

FIG. 16 shows an SMA actuator including two buckle actuators according to one embodiment. The buckle actuators 1302 and 1304 are configured such that the buckle arms 1310 and 1312 of the buckle actuators 1302 and 1304 face each other and the slide bases 1314 and 1316 of the buckle actuators 1302 and 1304 are the outer surfaces of the two buckle actuators. ing. A lens in which the hammock portion 1308 of each SMA actuator 1302, 1304 according to various embodiments is moved by a buckle actuator using techniques including those on which one or more buckle actuators 1302, 1304 act, eg, those described above. It is configured to carry a part of the carriage 1306.

FIG. 17 shows a side view of an SMA actuator including two buckle actuators according to one embodiment, showing the direction of the SMA wire 1318 that results in movement of an object such as a lens carriage in the positive z direction or in the upward direction.

FIG. 18 shows a side view of an SMA actuator including two buckle actuators according to one embodiment, showing the direction of the SMA wire 1318 that results in movement of an object such as a lens carriage in the negative z direction or in the downward direction.

FIG. 19 shows an exploded view of an assembly comprising an SMA actuator comprising two buckle actuators according to one embodiment. The buckle actuators 1902, 1904 are configured such that the buckle arms 1910, 1912 of each buckle actuator 1902, 1904 are the outer surfaces of the two buckle actuators, and the slide bases 1914, 1916 of each buckle actuator 1902, 1904 face each other. ing. According to various embodiments, the hammock portion 1908 of each SMA actuator 1902, 1904 is buckled using a technique that includes objects on which one or more buckle actuators 1902, 1904 act, eg, those described herein. It is configured to carry a portion of the lens carriage 1906 that the actuator moves. In some embodiments, the SMA actuator comprises a base portion 1918 configured to accommodate a second buckle actuator 1904. The SMA actuator can also include a cover portion 1920. FIG. 20 shows an SMA actuator including two buckle actuators according to one embodiment including a base portion and a cover portion.

FIG. 21 shows an SMA actuator including two buckle actuators according to one embodiment. In some embodiments, the buckle actuators 1902 and 1904 are arranged relative to each other such that the hammock portion 1908 of the first buckle actuator 1902 is rotated about 90 degrees from the hammock portion of the second buckle actuator 1904. The 90 degree configuration allows pitch and roll rotation of objects such as the lens carriage 1906. Thereby, the movement of the lens carriage 1906 can be controlled more appropriately. In various embodiments, a differential power signal is applied to the SMA wire of each buckle actuator pair, which allows pitch and roll rotation of the lens carriage for tilt OIS motion.

The embodiment of the SMA actuator including the two buckle actuators eliminates the need to have a return spring. The use of two buckler actuators can improve / reduce hysteresis when using SMA wire resistance for position feedback. Opposite force SMA actuators, including two buckler actuators, have lower hysteresis than those that include a return spring, thus helping for more accurate position control. In some embodiments, such as the embodiment shown in FIG. 22, the SMA actuator including the two buckle actuators 2202, 2204 uses differential power for the left SMA wire 2218a and the right SMA wire 2218b of each buckle actuator 2202, 2204. To provide a biaxial tilt. For example, the left SMA wire 2218a is operated with a higher power than the right SMA wire 2218b. As a result, the left side of the lens carriage 2206 moves downward, and the right side moves upward (tilts). The SMA wire of the first buckle actuator 2202, in some embodiments, is held at equal power and acts as a fulcrum that differentially pushes the SMA wires 2218a, 2218b to provide tilting motion. For example, by applying power equal to the SMA wire of the second buckle actuator 2202 and using differential power to the left SMA2218a and right SMA2218b of the second buckle actuator 2204 to invert the power signal applied to the SMA wire. , The lens carriage 2206 will be tilted in the other direction. This allows an object such as a lens carrier to be tilted to any axis of motion, or can be adjusted to eliminate any tilt between the lens and the sensor for good dynamic tilt. It can, which results in better image quality across all pixels.

FIG. 23 shows an SMA actuator including two buckle actuators and a coupler according to one embodiment. SMA actuators include two buckle actuators such as those described herein. The first buckle actuator 2302 is configured to be coupled to the second buckle actuator 2304 using a coupler such as a coupler ring 2305. The buckle actuators 2302 and 2304 are arranged with respect to each other so that the hammock portion 2308 of the first buckle actuator 2302 is rotated about 90 degrees from the hammock portion 2309 of the second buckle actuator 2304. The moving payload, such as a lens or lens assembly, is attached to a lens carriage 2306 configured to be placed on the slide base of the first buckle actuator 2302.

In various embodiments, equal power can be applied to the SMA wires of the first buckle actuator 2302 and the second buckle actuator 2304. This makes it possible to maximize the z-stroke of the SMA actuator in the positive z-direction. In some embodiments, the stroke of the SMA actuator can have a z-stroke greater than or equal to twice the stroke of the other SMA actuator, including the two buckle actuators. In some embodiments, when the power signal is removed from the SMA actuator, additional springs can be added to push against the two bucklers to help push the actuator assembly and payload back downwards. .. Equal and opposite power signals can be applied to the SMA wires of the first buckle actuator 2302 and the second buckle actuator 2304. As a result, the SMA actuator can be moved in the positive z direction by one buckle actuator and in the negative z direction by one buckle actuator, which enables accurate control of the position of the SMA actuator. become. Further, equal and opposite power signals (differential power signals) are applied to the left SMA wire and the right SMA wire of the first buckle actuator 2302 and the second buckle actuator 2304 to make an object such as the lens carriage 2306 into two axes. It can be tilted in at least one of the directions.

An embodiment of an SMA actuator comprising two buckle actuators and a coupler, such as that shown in FIG. 23, is coupled to a further buckle actuator and buckle actuator pair to provide a desired stroke greater than the stroke of a single SMA actuator. Can be achieved.

FIG. 24 shows an exploded view of an SMA system including an SMA actuator including a buckle actuator with a laminated hammock according to one embodiment. As described herein, the SMA system is configured to be used with one or more camera lens elements as an autofocus drive mechanism in some embodiments. As shown in FIG. 24, the SMA system, according to various embodiments, causes the lens carriage 2406 to move in the opposite direction of the z-stroke direction when the tension in the SMA wire 2408 is reduced when the SMA wire 2408 is stopped. Includes a configured return spring 2403. Some embodiments of the SMA system include a housing 2409 configured to accept a return spring 2403 and act as a slide bearing to guide the lens carriage in the z-stroke direction. The housing 2409 is also configured to be placed on top of the buckle actuator 2402. The buckle actuator 2402 includes a slide base 2401 as described herein. The buckle actuator 2402 includes a buckle arm 2404 coupled to a hammock portion such as a laminated hammock 2406 formed from a laminate. The buckle actuator 2402 also includes an SMA wire mounting structure such as a laminated molded crimp connection portion 2412.

As shown in FIG. 24, the slide base 2401 is located on an optional adapter plate 2414. The adapter plate is configured to fit the SMA system or buckler actuator 2402 into another system, such as an OIS, an additional SMA system or other components. FIG. 25 shows an SMA system 2501 including an SMA actuator including a buckle actuator 2402 with a laminated hammock, according to one embodiment.

FIG. 26 shows a buckle actuator including a laminated hammock according to one embodiment. The buckle actuator 2402 includes a buckle arm 2404. The buckle arm 2404 is configured to move in the z-axis as the SMA wire 2412 operates and stops as described herein. The SMA wire 2408 is attached to the buckle actuator using a laminate molded crimp connection 2412. According to the embodiment shown in FIG. 26, the buckle arms 2404 are coupled to each other via a central portion such as a laminated hammock 2406. Laminated hammocks 2406 according to various embodiments are configured to mount a portion of the lens carriage that the buckle actuator moves using an object on which the buckle actuator acts, eg, one described herein. There is.

FIG. 27 shows a laminated hammock of an SMA actuator according to one embodiment. In some embodiments, the material of the laminated hammock 2406 is a low stiffness material and therefore does not resist working motion. For example, the laminated hammock 2406 is formed by using a copper layer arranged on the first polyimide layer together with a second polyimide layer arranged on the copper layer. In some embodiments, the laminated hammock 2406 is formed onto the buckle arm 2404 using deposition and etching techniques, including those known in the art. In another embodiment, the laminated hammock 2406 is formed separately from the buckle arm 2404 and attached to the buckle arm 2404 using techniques including welding, adhesives, and other techniques known in the art. Be done. In various embodiments, glue or other adhesive is used on top of the laminated hammock 2406 to ensure that the buckler arm 2404 remains in place with respect to the lens carriage.

FIG. 28 shows a laminate molded crimp connection portion of an SMA actuator according to an embodiment. The laminate molded crimp connection portion 2412 is configured to attach the SMA wire 2408 to the buckle actuator and to form an electric circuit joint with the SMA wire 2408. In various embodiments, the laminate molded crimp connection 2412 comprises a laminate formed from one or more layers of insulation and one or more layers of conductive layers formed on top of the crimp. ..

For example, a polyimide layer is placed on at least a portion of the stainless steel portion forming the crimp portion 2413. Then, a conductive layer such as copper is arranged on the polyimide layer, which is electrically coupled to one or more signal traces 2415 arranged on the buckle actuator. The SMA wire also makes electrical contact with the conductive layer by deforming the crimping portion to contact the internal SMA wire. Therefore, using a conductive layer coupled with one or more signal traces, a power signal is applied to the SMA wire using techniques including those described herein. In some embodiments, a second polyimide layer is formed on the conductive layer in a region where the conductive layer does not come into contact with the SMA wire. In some embodiments, the laminate molded crimp connection 2412 is formed onto the crimp 2413 using deposition and etching techniques, including those known in the art. In other embodiments, the laminated molded crimp connection 2412 and one or more electrical traces are formed separately from the crimp 2413 and buckle actuator and are known in the art for welding, adhesives, and the like. It is attached to the crimping portion 2412 and the buckle actuator using techniques including the above technique.

FIG. 29 shows an SMA actuator including a buckle actuator with a laminated hammock. As shown in FIG. 29, when a power signal is applied, the SMA wire contracts or contracts to move the buckle arm and laminated hammock in the positive z direction. Then, the laminated hammock in contact with the object thereby moves the object such as a lens carriage in the positive z direction. When the power signal is reduced or removed, the SMA wire elongates, moving the buckle arm and laminated hammock in the negative z direction.

FIG. 30 shows an exploded view of an SMA system including an SMA actuator including a buckle actuator according to one embodiment. As described herein, the SMA system is configured to be used with one or more camera lens elements as an autofocus drive mechanism in some embodiments. As shown in FIG. 30, the SMA system, according to various embodiments, causes the lens carriage 3005 to move in the direction opposite to the z-stroke direction when the tension in the SMA wire 3008 decreases when the SMA wire stops. Includes a carriage spring 3003 configured in. The SMA system, in some embodiments, includes a stiffener 3000 placed on the return spring 3003. In some embodiments, the SMA system includes a housing 3009 formed of two parts configured to accept a return spring 3003 and act as a slide bearing to guide the lens carriage in the z-stroke direction. The housing 3009 is also configured to be placed on top of the buckle actuator 3002. The buckle actuator 3002 includes a slide base 3001 similar to that described herein, formed from two parts. The slide base 3001 electrically separates two sides (eg, one side is grounded and the other) as current flows through a portion of the slide base 3001 to a wire, according to some embodiments. Side is divided so that it is electric power).

The buckle actuator 3002 includes a buckle arm 3004. Each pair of buckle actuators 3002 is formed in a separate portion of buckle actuator 3002. The buckle actuator 3002 also includes an SMA wire mounting structure such as a resistance welded wire crimping portion 3012. The SMA system optionally includes a flex circuit 3020 that electrically couples the SMA wire 3008 to one or more control circuits.

As shown in FIG. 30, the slide base 3001 is placed on an optional adapter plate 3014. The adapter plate is configured to fit the SMA system or buckler adapter 3002 into another system, such as an OIS, an additional SMA system or other components. FIG. 31 shows an SMA system 3101 comprising an SMA actuator including a buckle actuator 3002 according to one embodiment.

FIG. 32 includes an SMA actuator including a buckle actuator according to one embodiment. The buckle actuator 3002 includes a buckle arm 3004. The buckle arm 3004 is configured to move in the z-axis when the SMA wire 3012 operates and stops as described above. The SMA wire 2408 is attached to the resistance welded wire crimping portion 3012. According to the embodiment shown in FIG. 32, the buckle arm 3004 is configured to fit into an object such as a lens carriage without a central portion using a two-yoke capture junction.

FIG. 33 shows a two-yoke capture joint of a pair of buckle arms of an SMA actuator according to one embodiment. FIG. 33 also shows a plating pad used to attach an optional flex circuit to the sliding base. In some embodiments, the plating pad is formed using gold. FIG. 34 shows a resistance welded crimping portion for an SMA actuator according to one embodiment, which is used to attach the SMA wire to the buckle actuator. In some embodiments, glue or adhesive can also be placed on top of the weld to serve mechanical strength as well as act as a fatigue strain mitigator during operation and impact loading.

FIG. 35 shows an SMA actuator including a buckle actuator with a two yoke capture joint. As shown in FIG. 35, when a power signal is applied, the SMA wire contracts or contracts to move the buckle arm in the positive z direction. The two yoke capture joints come into contact with an object, thereby moving the object, such as a lens carriage, in the positive z direction. When the power signal is reduced or removed, the SMA wire extends to move the buckle arm in the negative z direction. The yoke capture feature ensures that the buckle arm remains in the correct position with respect to the lens carriage.

FIG. 36 shows an SMA bimorph liquid lens according to one embodiment. The SMA bimorph liquid lens 3501 includes a liquid lens subassembly 3502, a housing 3504, and a circuit comprising the SMA actuator 3506. In various embodiments, the SMA actuator includes four bimorph actuators 3508, such as those described herein. The bimorph actuator 3508 is configured to press the forming ring 3510 located on the flexible film 3512. The ring distorts the membrane 3512 / liquid 3514 and alters the optical path through the membrane 3512 / liquid 3514. A liquid containing ring 3516 is used to house the liquid 3514 between the film 3512 and the lens 3518. Equal forces from the bimorph actuator change the focus of the image in the Z direction (perpendicular to the lens), which allows the bimorph actuator to function as autofocus. The differential force from the bimorph actuator 3508 allows the light beam to move in the X-axis and Y-axis directions, which allows the bimorph actuator to act as an optical image stabilization mechanism according to some embodiments. Both the OIS function and the AF function can be achieved simultaneously by appropriate control for each actuator. In some embodiments, three actuators are used. The circuit comprising the SMA actuator 3506 includes one or more contacts 3520 for control signals that actuate the SMA actuator. According to some embodiments comprising four SMA actuators, the circuit comprising the SMA actuator 3506 includes four power circuit control contacts for each SMA actuator and a common return contact.

FIG. 37 shows an SMA bimorph liquid lens viewed from diagonally above according to one embodiment. FIG. 38 shows a cross-sectional view and a bottom view of the SMA bimorph liquid lens according to one embodiment.
FIG. 39 shows an SMA system including an SMA actuator 3902 with a bimorph actuator according to one embodiment. The SMA actuator 3902 includes four bimorph actuators using the techniques described herein. As shown in FIG. 40 showing the SMA actuator 3902 with the bimorph actuator according to one embodiment, two of the bimorph actuators are configured as positive z-stroke actuators 3904 and two are negative z-stroke actuators 3906. It is configured as. Opposing actuators 3906, 3904 are configured to control motion in both directions over the entire stroke range. This allows the control code to be adjusted to compensate for the tilt. In various embodiments, two SMA wires 3908 mounted on top of the component allow for positive z-stroke displacement. Two SMA wires attached to the bottom of the component allow for negative z-stroke displacement. In some embodiments, each bimorph actuator is attached to an object, such as a lens carriage 3910, using tabs that engage the object. The SMA system includes an upper spring 3912 configured to provide stability of the lens carriage 3910 in an axis perpendicular to the z-stroke axis, eg, in the z-axis and y-axis directions. Further, the upper spacer 3914 is configured to be disposed between the upper spring 3912 and the SMA actuator 3902. A bottom spacer 3916 is located between the SMA actuator 3902 and the bottom spring 3918. The bottom spring 3918 is configured to provide stability of the lens carriage 3910 in an axis perpendicular to the z-stroke axis, eg, in the x-axis and y-axis directions. The bottom spring 3918 is configured to be placed on a base 3920, such as those described herein.

FIG. 41 shows the length 4102 of the bimorph actuator 4103 and the position of the bonding pad 4104 where the SMA wire 4206 extends the wire length beyond the bimorph actuator. Wires longer than bimorph actuators are used to increase stroke and force. Therefore, the stroke and force with respect to the bimorph actuator 4103 is set using the extension length 4108 of the SMA wire 4206 that exceeds the bimorph actuator 4103.

FIG. 42 shows an exploded view of the SMA system including the SMA bimorph actuator 4202 according to one embodiment. SMA systems according to various embodiments are configured to use separate metallic materials and non-conductive adhesives to generate one or more electrical circuits that independently power SMA wires. There is. Some embodiments are unaffected by AF size and include four bimorph actuators such as those described herein. Two of the bimorph actuators are configured as positive z-stroke actuators and two are configured as negative z-stroke actuators. FIG. 43 shows an exploded view of a subsection of the SMA actuator according to one embodiment. The subsection includes a base 4304 with a negative actuator signal connection 4302 and a bimorph actuator 4306. The negative actuator signal connection unit 4302 includes a wire bond pad 4308 for connecting the SMA wire of the bimorph actuator 4306 using techniques including those described herein. The negative actuator signal connection 4302 is attached to the base 4304 using the adhesive layer 4310. The subsection also includes a positive actuator signal connection 4314 comprising a wire bond pad 4316 for connecting the SMA wire 4312 of the bimorph actuator 4306 using techniques including those described herein. The positive actuator signal connection 4314 is attached to the base 4304 using an adhesive layer 4318. Each of the base 4304, the negative actuator signal connecting portion 4302 and the positive actuator signal connecting portion 4314 is made of metal, for example stainless steel. The connection pads 4322 in each of the base 4304, the negative actuator signal connection 4302 and the positive actuator signal connection 4314 each have a control signal and ground to activate the bimorph actuator 4306 using techniques including those described herein. Is configured to electrically bond. In some embodiments, the connection pad 4322 is gold plated. FIG. 44 shows a subsection of the SMA actuator according to one embodiment. In some embodiments, gold-plated pads are formed on the stainless steel layer for solder joining or other known electrical termination methods. In addition, molded wire bond pads are used for signal junctions for electrically coupling SMA wires for power signals.

FIG. 45 shows a 5-axis sensor shift system according to an embodiment. The 5-axis sensor shift system is configured to move an object such as a 5-axis image sensor with respect to one or more lenses. This includes X / Y / Z axis translation and pitch / roll tilt. Optionally, the system is configured to use only four axes, including X / Y axis translation and pitch / roll tilt, with a separate AF at the top to perform the Z motion. Other embodiments include a 5-axis sensor shift system configured to move one or more lenses relative to an image sensor. In some embodiments, the static lens stack is mounted on top of the top cover and inserted inside the ID (without touching the inside of the orange movable carriage).

FIG. 46 shows an exploded view of a 5-axis sensor shift system according to an embodiment. The 5-axis sensor shift system consists of two circuit components, namely the flexible sensor circuit 4602, the bimorph actuator circuit 4604, and eight to twelve built into the bimorph circuit components using techniques including those described herein. Includes a bimorph actuator 4606 and the like. The 5-axis sensor shift system includes a movable carriage 4608 configured to hold one or more lenses and an outer housing 4610. The bimorph actuator circuit 4604, according to one embodiment, includes 8 to 12 SMA actuators such as those described herein. The SMA actuator is configured to move the movable carriage 4608 in five axes, such as x-direction, y-direction, z-direction, pitch and roll, similar to the other 5-axis systems described herein.

FIG. 47 shows an SMA actuator according to an embodiment, the SMA actuator including a bimorph actuator incorporated within this circuit for all motions. Embodiments of the SMA actuator can include 8-12 bimorph actuators 4606. However, other embodiments may include more or less bimorph actuators. FIG. 48 is a SMA actuator 4802 according to one embodiment, a bimorph actuator incorporated within this circuit for all motion, partially formed to fit inside the corresponding outer housing 4804. Including, SMA actuator 4802 is shown. FIG. 49 shows a cross section of a 5-axis sensor shift system according to an embodiment.

FIG. 50 shows an SMA actuator 5002 according to an embodiment including a bimorph actuator. The SMA actuator 5002 is configured to use the SMA bimorph actuator 5004 mounted on four sides to move the image sensor, lens or various other payloads in the x and y directions. FIG. 51 shows a top view of an SMA actuator including a bimorph actuator with image sensors, lenses or various other payloads moved in different x-positions and y-axis.

FIG. 52 shows an SMA actuator including a bimorph actuator 5202 according to an embodiment configured as a box bimorph autofocus. The four top and bottom mounted SMA bimorph actuators, such as those described herein, are configured to move together to provide movement in the z-stroke direction for autofocus movement. FIG. 53 shows an SMA actuator including a bimorph actuator according to one embodiment, the bimorph actuator 5302 mounted on two tops configured to push down on one or more lenses. FIG. 54 shows an SMA actuator including a bimorph actuator according to one embodiment, the bimorph actuator 5402 mounted on two bottoms configured to push up one or more lenses. FIG. 55 shows that four top and bottom mounted SMA bimorph actuators 5502, such as those described herein, are used to move one or more lenses to provide tilting motion. The SMA actuator including the bimorph actuator according to one embodiment is shown.

FIG. 56 shows an SMA system comprising an SMA actuator according to one embodiment, comprising a bimorph actuator configured as a biaxial lens shift OIS. In some embodiments, the biaxial lens shift OIS is configured to move the lens in the X / Y axis. In some embodiments, the Z-axis motion comes from a separate AF, such as those described herein. The four bimorph actuators push the sides of the autofocus for OIS movement. FIG. 57 shows an exploded view of an SMA system including an SMA actuator 5802 according to one embodiment, including a bimorph actuator 5806 configured as a biaxial lens shift OIS. FIG. 58 shows a cross section of an SMA system comprising an SMA actuator 5802 according to one embodiment, comprising a bimorph actuator 5806 configured as a biaxial lens shift OIS. FIG. 59 shows a box-by-morph actuator 5802 according to one embodiment used in a manufacturing SMA system configured as a biaxial lens shift OIS before being molded to fit the system. Such systems can be configured to have a high OIS stroke OIS (eg ± 200 μm or greater). Further, these embodiments are configured to have a wide range of motion and excellent OIS dynamic tilt using four slide bearings such as POM slide bearings. These embodiments are configured to be easily integrated with the AF design (eg VCM or SMA).

FIG. 60 shows an SMA system comprising an SMA actuator according to one embodiment, including a bimorph actuator configured as a 5-axis lens shift OIS and autofocus. In some embodiments, the 5-axis lens shift OIS and autofocus are configured to move the lens in the X / Y / Z axes. In some embodiments, the pitch and yaw axis motions are due to the dynamic tilt adjustment function. Eight bimorph actuators are used to provide motion for autofocus and OIS using the techniques described herein. FIG. 61 shows an exploded view of an SMA system including an SMA actuator 6202 according to an embodiment, including a bimorph actuator 6204 according to an embodiment, configured as a 5-axis lens shift OIS and autofocus. FIG. 62 shows a cross section of an SMA system including the SMA actuator 6202 according to one embodiment, comprising a bimorph actuator 6204 configured as a 5-axis lens shift OIS and autofocus. FIG. 63 shows a box-by-morph actuator 6202 according to one embodiment used in a manufacturing SMA system configured as a 5-axis lens shift OIS and autofocus before being molded to fit the system. Such a system can be configured to have a high OIS stroke OIS (eg, ± 200 μm or greater) and a high autofocus stroke (eg, 400 μm or greater). Moreover, these embodiments can be adjusted to eliminate any tilt and eliminate the need for a separate autofocus assembly.

FIG. 64 shows an SMA system comprising an SMA actuator according to one embodiment, comprising a bimorph actuator configured as an outward extrusion box. In some embodiments, the bimorph actuator assembly is configured to wrap around an object such as a lens carriage. Since the circuit assembly is moving with the lens carriage, there is a flexible portion for low X / Y / Z stiffness. The end pad of the circuit is static. The outward push box can be configured for 4 or 8 bimorph actuators. As such, the outward extrusion box can be configured as a 4-bimorph actuator on the side for OIS moving on the X-axis and Y-axis. The outward push box can be configured as a 4-bimorph actuator at the top and bottom for autofocus moving on the z-axis. The outward extrusion box is an 8-bimorph actuator at the top, bottom and sides for OIS and autofocus that moves on x-axis, y-axis and z-axis and is capable of 3-axis tilt (pitch / low / yaw). Can be configured as. FIG. 65 shows an exploded view of an SMA system comprising the SMA actuator 6602 according to one embodiment, comprising a bimorph actuator 6604 configured as an outward extrusion box. Accordingly, the SMA actuator is configured such that the bimorph actuator acts on the outer housing 6504 to move the lens carriage 6506 using the techniques described herein. FIG. 66 shows an SMA system comprising an SMA actuator 6602 according to one embodiment, comprising a bimorph actuator configured as an outward extrusion box partially molded to receive a lens carriage 6604. FIG. 67 shows an SMA system including an SMA actuator 6602 including a bimorph actuator 6604 according to an embodiment configured as an outward extrusion box before being molded into the system.

FIG. 68 shows an SMA system comprising an SMA actuator 6802 according to one embodiment, comprising a bimorph actuator configured as a 3-axis sensor shift OIS. In some embodiments, the z-axis movement comes from a separate autofocus system. The four bimorph actuators are configured to push the sides of the sensor carriage 6804 to provide motion for OIS using the techniques described herein. FIG. 69 shows an exploded view of an SMA comprising an SMA actuator 6802 according to one embodiment, comprising a bimorph actuator configured as a 3-axis sensor shift OIS. FIG. 70 shows a cross section of an SMA system comprising the SMA actuator 6802 according to one embodiment, comprising a bimorph actuator 6806 configured as a 3-axis sensor shift OIS. FIG. 71 shows a box-by-morph actuator 6802 component according to one embodiment used in an SMA system configured as a 3-axis lens shift OIS during manufacturing before being molded to fit the system. FIG. 72 shows a flexible sensor circuit used in an SMA system according to one embodiment, configured as a 3-axis sensor shift OIS. Such a system can be configured to have a high OIS stroke OIS (eg, ± 200 μm or greater) and a high autofocus stroke (eg, 400 μm or greater). Further, these embodiments are configured to have a wide range of biaxial motion and excellent OIS dynamic tilt using four slide bearings such as POM slide bearings. These embodiments are configured to be easily integrated with the AF design (eg VCM or SMA).

FIG. 73 shows an SMA system comprising an SMA actuator 7302 according to one embodiment, comprising a 6-axis sensor shift OIS and a bimorph actuator 7304 configured as autofocus. In some embodiments, the 6-axis sensor shift OIS and autofocus are configured to move the lens along the X / Y / Z / pitch / yaw / roll axes. In some embodiments, the pitch and yaw axis motions are due to the dynamic tilt adjustment function. Eight bimorph actuators are used to provide motion for autofocus and OIS using the techniques described herein. FIG. 74 shows an exploded view of the SMA system including the SMA actuator 7402 according to one embodiment, including the bimorph actuator 7404 configured as a 6-axis sensor shift OIS and autofocus. FIG. 75 shows a cross section of an SMA system including the SMA actuator 7402 according to one embodiment, including a bimorph actuator configured as a 6-axis sensor shift OIS and autofocus. FIG. 76 shows a box-by-morph actuator 7402 according to one embodiment used in a manufacturing SMA system configured as a 6-axis lens shift OIS and autofocus before being molded to fit the system. FIG. 77 shows a flexible sensor circuit used in an SMA system according to one embodiment, configured as a 3-axis sensor shift OIS. Such a system can be configured to have a high OIS stroke OIS (eg, ± 200 μm or greater) and a high autofocus stroke (eg, 400 μm or greater). Moreover, these embodiments can be adjusted to eliminate any tilt and eliminate the need for a separate autofocus assembly.

FIG. 78 shows an SMA system comprising an SMA actuator according to one embodiment, including a bimorph actuator configured as a 2-axis camera tilt OIS. In some embodiments, the biaxial camera tilt OIS is configured to move the camera along the pitch / yaw axis. Four bimorph actuators are used to push the top and bottom of the autofocus for the entire camera movement for OIS pitch and yaw movements using the techniques described herein. FIG. 79 shows an exploded view of an SMA system including an SMA actuator 7902 according to an embodiment, including a bimorph actuator 7904 configured as a 2-axis camera tilt OIS. FIG. 80 shows a cross section of an SMA system including an SMA actuator according to one embodiment, including a bimorph actuator configured as a 2-axis camera tilt OIS. FIG. 81 shows a box-by-morph actuator according to one embodiment used in a manufacturing SMA system configured as a biaxial lens shift OIS before being molded to fit the system. FIG. 82 shows a flexible sensor circuit used in an SMA system according to an embodiment configured as a 2-axis camera tilt OIS. Such a system can be configured to have a high OIS stroke OIS (eg, ± 3 degrees or more). These embodiments are configured to be easily integrated with an autofocus (“AF”) design (eg, VCM or SMA).

FIG. 83 shows an SMA system comprising an SMA actuator according to one embodiment, including a bimorph actuator configured as a 3-axis camera tilt OIS. In some embodiments, the biaxial camera tilt OIS is configured to move the camera along the pitch / yaw / roll axes. Using four bimorph actuators, the top and bottom of the autofocus are pushed for the entire camera motion for OIS pitch and yaw motion using the techniques described herein, and four bimorph actuators are used. , The side of the autofocus is pressed for the entire camera motion relative to the OIS roll motion using the techniques described herein. FIG. 84 shows an exploded view of the SMA system including the SMA actuator 8402 according to one embodiment, including the bimorph actuator 8404 configured as a 3-axis camera tilt OIS. FIG. 85 shows a cross section of an SMA system including an SMA actuator according to one embodiment, including a bimorph actuator configured as a 3-axis camera tilt OIS. FIG. 86 shows a box-by-morph actuator used in a manufacturing SMA system according to an embodiment configured as a 3-axis camera tilt OIS before being molded to fit the system. FIG. 87 shows a flexible sensor circuit used in an SMA system according to an embodiment configured as a 3-axis camera tilt OIS. Such a system can be configured to have a high OIS stroke OIS (eg, ± 3 degrees or more). These embodiments are configured to be easily integrated with the AF design (eg VCM or SMA).

FIG. 88 shows exemplary dimensions of a bimorph actuator for an SMA actuator according to an embodiment. Dimensions are preferred embodiments, but it will be appreciated by those skilled in the art that other dimensions can be used based on the desired characteristics for the SMA actuator.

FIG. 89 shows a lens system for a flexible camera according to an embodiment. The bending camera includes a bending lens 8902 configured to bend light to a lens system 8901 including one or more lenses 8903a-8903d. In some embodiments, the bending lens is one or more of the prisms and lenses. The lens system 8901 is configured to have a spindle 8904 that is angled with respect to a transmission axis 8906 that is parallel to the direction of travel of the light before the light reaches the bending lens 8902. For example, a bendable camera is used in a camera telephone system to reduce the height of the lens system 8901 in the direction of the transmission axis 8906.

Embodiments of the lens system include one or more liquid lenses, such as those described herein. The embodiment shown in FIG. 89 includes two liquid lenses 8903b, 8903d, such as those described herein. One or more liquid lenses 8903b, 8903d are configured to operate using techniques including those described herein. Liquid lenses are actuated using actuators including, but not limited to, buckler actuators, bimorph actuators and other SMA actuators. FIG. 108 shows a liquid lens actuated using the buckler actuator 60 according to one embodiment. The liquid lens includes a molded ring coupler 64, a liquid lens assembly 61, one or more buckler actuators 60 such as those described herein, a slide base 65, and a base 62. One or more buckler actuators 60 are molded rings to change the shape of the flexible film of the liquid lens assembly 61, eg, to move or shape light rays, as described herein. / It is configured to move the coupler 64. In some embodiments, three or four actuators are used. The liquid lens can be configured to act as an autofocus or optical image stabilization mechanism, either alone or in combination with other lenses. The liquid lens can also be configured to otherwise direct the image onto the image sensor.

FIG. 90 shows some embodiments of the lens system 9001 including the liquid lenses 9002a-9002h that focus the image on the image sensor 9004. As shown, the liquid lenses 9002a-9002h include any lens shape and are dynamically configured to adjust the optical path through the lens using techniques including those described herein. Can be configured in.

The lens system for the bending camera is configured to include an actuating bending lens 9100. An example of an actuating bending lens is a prism tilt, such as that shown in FIG. 91. In the example shown in FIG. 91, the bending lens is a prism 9102 disposed on the actuator 9104. Actuators include, but are not limited to, SMA actuators, including those described herein. In some embodiments, the prism tilt is placed on top of a SMA actuator that includes four bimorph actuators 9106, such as those described herein. The actuated bending lens 9100 according to some embodiments is configured as an optical image stabilization mechanism using techniques including those described herein. For example, the actuated bending lens is configured to include an SMA system such as that shown in FIG. Another example of the actuated bending lens can include an SMA actuator such as that shown in FIG. However, the bending lens can also include other actuators.

FIG. 92 shows a bimorph arm including an offset according to one embodiment. The bimorph arm 9201 includes a bimorph beam 9202 with a forming offset 9203. The forming offset 9203 increases the mechanical advantage of generating higher forces than the non-offset bimorph arm. According to some embodiments, the depth of the offset 9204 (also referred to herein as the bent surface z offset 9204) and the length of the offset 9206 (also referred to herein as the valley width 9206) are. It is configured to define the characteristics of the bimorph arm such as peak force. For example, the graph of FIG. 106 shows the bent surface z offset 9204, the valley width 9206, and the peak force of the bimorph beam 9202 according to one embodiment.

Bimorph arms include one or more SM materials such as those shown herein, such as SMA ribbons or SMA wires 9210. The SMA material is attached to the beam using techniques including those described herein. In some embodiments, the SMA material, such as the SMA wire 9210, is attached to the fixed end 9212 of the bimorph arm and to the load point end 9214 of the bimorph arm, with a forming offset 9203 attached to the SMA material. It will be between both ends. The ends of the SMA material, in various embodiments, are electrically and mechanically with contacts configured to supply an electric current to the SMA material, using techniques including those known in the art. Combined with. Bimorph arms, including offsets, can be included in SMA actuators and systems such as those described herein.

FIG. 93 shows a bimorph arm including an offset and a limiter according to one embodiment. The bimorph arm 9301 includes a bimorph beam 9302 having a forming offset 9303 and a limiter 9304 adjacent to the forming offset 9303. The offset 9303 increases the mechanical advantage of generating a higher force than the non-offset bimorph arm 9301, and the limiter 9304 moves the arm away from the unfixed, load point end 9306 of the bimorph actuator. To prevent. The bimorph arm 9301 including the forming offset 9303 and the limiter 9304 can be included in SMA actuators and systems such as those described herein. The bimorph arm 9301 is attached to the bimorph arm 9301 using techniques including those described herein, such as those described herein, one or more SMAs such as SMA ribbons or SMA wires 9308. Including materials.

FIG. 94 shows a bimorph arm including an offset and a limiter according to one embodiment. The bimorph arm 9401 includes a bimorph beam 9402 with a forming offset 9403 and a limiter 9404 adjacent to the forming offset 9403. The limiter 9404 is formed as part of the base 9406 for the bimorph arm 9401. The base 9406 includes a recess 9408 configured to accommodate the bimorph arm 9401 as well as an offset portion of the bimorph beam. The bottom of the recess is configured as a limiter 9404 adjacent to the forming offset 9403. The base 9406 may also include one or more portions 9410 configured to support a portion of the bimorph arm when not in operation. Bimorph arms 9401, including forming offset 9403 and limiter 9404, can be included in SMA actuators and systems such as those described herein. The bimorph arm 9401 is attached to the bimorph arm 9401 using techniques including those described herein, such as those described herein, one or more SMA materials such as SMA ribbons or SMA wires. including.

FIG. 95 shows an embodiment of a base comprising a bimorph arm including an offset according to one embodiment. The bimorph arm 9501 includes a bimorph beam 9502 with a forming offset 9504. The bimorph arm can also include a limiter that uses techniques including those described herein. The bimorph arm 9501 is attached to the bimorph arm 9501 using techniques including those described herein, such as those described herein, one or more SMA materials such as SMA ribbons or SMA wires 9506. including.

FIG. 96 shows one embodiment of the base 9608 comprising two bimorph arms including an offset, according to one embodiment. Each bimorph arm 9601a, 9601b includes a bimorph beam 9602a, 9602b with forming offsets 9604a, 9604b. Each bimorph arm 9601a, 9601b is one of the SMA ribbons or SMA wires 9606a, 9606b, etc. as described herein attached to the bimorph arm 9501 using techniques including those described herein. Or includes multiple SMA materials. Each bimorph arm 9601a, 9601b can also include a limiter using techniques including those described herein. Some embodiments include a base comprising three or more bimorph arms formed using techniques including those described herein. According to some embodiments, the bimorph arm 9601 is integrally formed with the base 9608. In other embodiments, one or more of the bimorph arms 9602a, 9602b are formed separately from the base 9608, using techniques including, but not limited to, soldering, resistance welding, laser welding and adhesives. It is attached to the base 9608. In some embodiments, the two or more bimorph arms 9601a, 9601b are configured to act on a single object. This can make it possible to increase the force applied to the object. Subsequent graphs in FIG. 107 show an example of how the box volume, which is an approximation of the box surrounding the entire bimorph actuator, is related to the work of each bimorph component. The box volume is approximated using the length of the bimorph actuator 9612 (collectively referred to as the "box volume"), the width of the bimorph actuator 9610, and the height of the bimorph actuator 9614.

FIG. 97 shows a buckler arm including a load point expansion portion according to one embodiment. The buckler arm 9701 includes a beam portion 9702 and one or more load point expansion portions 9704a, 9704b extending from the beam portion 9702. Each end of the buckler arm 9701 9706a, 9706b is configured to be attached to or integrally formed with a plate or other base using techniques including those described herein. One or more load point expansion portions 9704a, 9704b according to some embodiments are attached to or integrally formed with the beam portion 9702 offset from the load points 9710a, 9710b of the beam portion 9702. The load points 9710a and 9710b are portions of the beam portion 9702 configured to transmit the force of the buckler arm 9701 to another object. In some embodiments, the load points 9710a, 9710b are the center of the beam portion 9702. In another embodiment, the load points 9710a, 9710b are located at positions other than the center of the beam portion 9702. The load point expansion portions 9704a and 9704b are configured to extend from the portion joined to the beam portion 9702 toward the load points 9710a and 9710b of the beam portion 9702 in the direction of the longitudinal axis of the beam portion 9702. There is. In some embodiments, the ends of the load point expansions 9704a, 9704b extend to at least the load points 9710a, 9710b of the beam portion 9702. Buckler arm 9701 includes one or more SMA materials such as those described herein, such as SMA ribbons or SMA wires 9712. SMA materials such as SMA wire 9712 are attached to both ends of the beam portion 9702. The SMA material is attached to both ends of the beam portion using techniques including those described herein. In some embodiments, the length of the load point extension 9704a, 9704b is configured to be any length contained within the longitudinal length of the associated flat (non-actuated) beam portion 9702 of the buckler arm 9701. Can be done.

FIG. 98 shows the buckler arm 9801 including the load point expansion portion 9810 according to the embodiment in the operating position. The SMA material attached to both ends of the beam portion 9802 is operated using techniques including those described herein. The load point 9804 allows the buckler arm 9801 to increase the stroke range on the buckler arm without extension. Therefore, a buckler arm that includes a load point extension allows for a larger maximum vertical stroke. Buckler arms, including load point extensions, can be included in SMA actuators and systems such as those described herein.

FIG. 99 shows a bimorph arm including a load point expansion portion according to one embodiment. The bimorph arm 9901 includes a beam portion 9902 and one or more load point expansion portions 9904a, 9904b extending from the beam portion. One end of the bimorph arm 9901 is configured to be attached to or integrally formed with a plate or other base using techniques including those described herein. The end of the beam portion 9902 opposite to the attached or integrally formed end is not fixed and can move freely. One or more load point expansions 9904a, 9904b according to some embodiments are attached to or integrally formed with the beam portion 9902 offset from the free end of the beam portion 9902. The load point expansion portions 9904a and 9904b are configured to extend from the portion joined to the beam portion 9902 in a direction away from the plane including the longitudinal axis of the beam portion 9902. For example, one or more load point expansion portions 9904a, 9904b extend in a direction in which the free end of the beam portion extends when actuated. Some embodiments of the bimorph arm 9901 have one or more load point extensions 9904a, having a longitudinal axis forming an angle including an angle of 1 degree to 90 degrees with a plane comprising the longitudinal axis of the beam portion. Includes 9904b. In some embodiments, the ends 9910a, 9910b of the load point expansions 9904a, 9904b are configured to engage an object configured to move.

The bimorph arm 9901 comprises one or more SMA materials such as those described herein, such as SMA ribbons or SMA wires 9906. SMA materials such as SMA wire 9906 are attached to both ends of the beam portion 9902. The SMA material is attached to both ends of beam portion 9902 using techniques including those described herein. In some embodiments, the length of the load point expansion portions 9904a, 9904b can be configured to be any length. The position of the engagement point of the object by the ends 9910a, 9910b of the load point expansion portions 9904a, 9904b according to some embodiments can be configured to be at any location along the longitudinal length of the beam portion 9902. .. The height above the beam portion at the end of the load point extension when the beam portion is flat (non-actuated) can be configured to be any height. In some embodiments, the load point extension can be configured to be at least above the rest of the bimorph arm when the bimorph arm is activated.

FIG. 100 shows a bimorph arm in an operating position that includes a load point extension according to one embodiment. The SMA material attached to both ends of the beam portion 2 is actuated using techniques including those described herein. The load point expansion portion 10 allows the bimorph arm 1 to increase the stroke force against the bimorph arm without extension. Therefore, the bimorph arm 1 including the load point expansion portion 10 allows for greater force applied by the bimorph arm 1. The bimorph arm 1 including the load point expansion unit 10 can be included in SMA actuators and systems such as those described herein.

FIG. 101 shows an SMA optical image stabilization mechanism according to an embodiment. The SMA optical image stabilization mechanism 20 includes a movable plate 22 and a stationary plate 24. The movable plate 22 includes a spring arm 26 integrally formed with the movable plate 22. In some embodiments, the movable plate 22 and the stationary plate 24 are each formed to be a single integrated plate. The movable plate 22 includes a first SMA material mounting portion 28a and a second SMA material mounting portion 28b. The stationary plate 24 includes a first SMA material mounting portion 30a and a second SMA material mounting portion 30b. Each SMA material mounting portion 28, 30 is configured to fix an SMA material such as an SMA wire to a plate using a resistance welded joint. The first SMA material mounting portion 28a of the movable plate 22 is arranged between the first SMA wire 32a arranged between it and the first SMA material mounting portion 30a of the stationary plate and the second SMA mounting portion 30b of the stationary plate 24. The second SMA wire 32b and the like are included. The second SMA material mounting portion 28b of the movable plate 22 is arranged between the third SMA wire 32c arranged between it and the second SMA material mounting portion 30b of the stationary plate and the first SMA mounting portion 30a of the stationary plate 24. Includes the 4th SMA wire 32d and the above. By activating each SMA wire using techniques including those described herein, the movable plate 22 is moved away from the rest plate 24. FIG. 102 shows the SMA material mounting portion 40 of the movable portion according to one embodiment. The SMA material mounting portion is configured to have an SMA material such as an SMA wire 41 that is resistance welded to the SMA material mounting portion 40. FIG. 103 shows the SMA mounting portion 42 of the stationary plate to which the resistance welded SMA wire 43 is mounted according to one embodiment.

FIG. 104 shows an SMA actuator 45 including a buckle actuator according to one embodiment. The buckle actuator 46 includes a buckle arm 47, such as those described herein. The buckle arm 47 is configured to move in the z-axis when the SMA wire 48 is activated and stopped using techniques including those described herein. Each SMA wire 48 is attached to a respective resistance welded wire crimping portion 49 using resistance welding. Each resistance welded wire crimping portion 49 includes an island-shaped portion 50 isolated from the metal 51 forming the buckle arm 47 on at least one side of the SMA wire 48. The island structure is an isolated island structure in which at least one side of the SMA wire is formed in a base metal layer in other actuators, optical image stabilization mechanisms and autofocus systems such as the OIS application shown in FIG. Can be used to connect to substructures.

FIG. 105 is a resistance welded crimp portion comprising an island for the SMA actuator according to one embodiment, which is used to attach the SMA wire 48 to the buckle actuator 46 using techniques including those described herein. Is shown. FIG. 105a shows the bottom of the SMA actuator 45. The SMA actuator 45 according to some embodiments is formed from a stainless steel base layer 51. A dielectric layer 52 such as a polyimide layer is arranged on the bottom of the stainless steel base layer 51. A conductor layer 53 according to some embodiments allows the wire welded to the stainless steel island 50 to electrically connect the conductor circuit attached to the stainless steel island. It is electrically connected to the stainless steel 50 via a via in the dielectric layer 52. The islands 50 according to some embodiments are etched from the stainless steel base layer. The dielectric layer 52 maintains the position of the island-shaped portion 50 within the stainless steel base layer 51. The island portion 50 is configured to attach the SMA wire to the island portion 50 using techniques including those described herein, such as resistance welding. FIG. 105b shows the top of the SMA actuator 45 including the island portion 50. In some embodiments, glue or adhesive can also be placed on top of the weld to serve mechanical strength and act as fatigue strain mitigation during operation and impact loading.

FIG. 108 includes a lens system including an SMA actuator including a buckle actuator according to one embodiment. The lens system includes a liquid lens assembly 61 placed on top of the base 62. The lens system also includes a molded ring / coupler 64 that is mechanically coupled to the buckle actuator 60. The SMA actuator, including the buckle actuator 60, such as those described herein, is located on a slide base 65 that is located on the base 62. The SMA actuator is configured to move the molded ring / coupler 64 along the optical axis of the liquid lens assembly 61 by activating the buckle actuator 60 using techniques including those described herein. There is. This causes the molding ring / couple 64 to move and change the focus of the liquid lens within the liquid lens assembly.

FIG. 109 shows an unfixed load point end of a bimorph arm according to one embodiment. The non-fixed load point end 70 of the bimorph arm includes a flat surface 71 for attaching an SMA material such as an SMA wire 72. The SMA material 72 is attached to the flat surface 71 by the resistance welded portion 73. The resistance weld 73 is formed using techniques including those known in the art.

FIG. 110 shows an unfixed load point end of a bimorph arm according to one embodiment. The non-fixed load point end 76 of the bimorph arm includes a flat surface 77 for mounting the SMA material, such as the SMA wire 78. The SMA wire 78 is attached to the flat surface 77 by a resistance welded portion similar to that shown in FIG. 109. The adhesive 79 is arranged on the resistance welded portion. This allows for a more reliable connection between the SMA wire 78 and the unfixed load point end 76. Adhesives 79 include, but are not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

FIG. 111 shows an unfixed load point end of a bimorph arm according to one embodiment. The non-fixed load point end 80 of the bimorph arm includes a flat surface 81 for mounting the SMA material, such as the SMA wire 82. The metal intermediate layer 84 is arranged on the flat surface 81. Examples of the metal intermediate layer 84 include, but are not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 82 is attached to the metal intermediate layer 84 arranged on the flat surface 81 by the resistance welded portion 83. The resistance welded portion 83 is formed using techniques including those known in the art. The metal intermediate layer 84 allows for better adhesion to the unfixed load point end 80.

FIG. 112 shows an unfixed load point end of a bimorph arm according to one embodiment. The non-fixed load point end 88 of the bimorph arm includes a flat surface 89 for attaching the SMA material, such as the SMA wire 90. The metal intermediate layer 92 is arranged on the flat surface 89. The metal intermediate layer 92 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 90 is attached to the flat surface 89 by a resistance weld similar to that shown in FIG. 111. The adhesive 91 is arranged on the resistance welded portion. This allows for a more reliable connection between the SMA wire 90 and the unfixed load point end 88. The adhesive 91 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

FIG. 113 shows a fixed end of a bimorph arm according to one embodiment. The fixed end 95 of the bimorph arm includes a flat surface 96 for mounting the SMA material, such as the SMA wire 97. The SMA wire 97 is attached to the flat surface 96 by a resistance welded portion 98. The resistance weld 98 is formed using techniques including those known in the art.

FIG. 114 shows a fixed end of a bimorph arm according to one embodiment. The fixed end 120 of the bimorph arm includes a flat surface 121 for mounting the SMA material, such as the SMA wire 122. The SMA wire 122 is attached to the flat surface 121 by a resistance welded portion similar to that shown in FIG. 113. The adhesive 123 is arranged on the resistance welded portion. This allows for a more reliable bond between the SMA wire 122 and the fixed end 120. The adhesive 123 includes, but is not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

FIG. 115 shows a fixed end of a bimorph arm according to one embodiment. The fixed end 126 of the bimorph arm includes a flat surface 127 for mounting the SMA material, such as the SMA wire 128. The metal intermediate layer 130 is arranged on the flat surface 127. The metal intermediate layer 130 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 128 is attached to the metal intermediate layer 130 arranged on the flat surface 127 by the resistance welded portion 129. The resistance welded portion 129 is formed using techniques including those known in the art. The metal intermediate layer 130 allows for better adhesion to the fixed end 126.

FIG. 116 shows a fixed end of a bimorph arm according to one embodiment. The fixed end 135 of the bimorph arm includes a flat surface 136 for attaching the SMA material, such as the SMA wire 137. A metal intermediate layer 138 is arranged on the flat surface 136. The metal intermediate layer 136 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 137 is attached to a flat surface by a resistance weld similar to that shown in FIG. 115. Adhesive 139 is placed on the resistance weld. This allows for a more reliable bond between the SMA wire 137 and the fixed end 135. Adhesives 139 include, but are not limited to, conductive adhesives, non-conductive adhesives, and other adhesives known in the art.

FIG. 117 shows a rear view of the fixed end of the bimorph arm according to one embodiment. The bimorph arm 143 is configured according to the embodiments described herein. The fixed end 143 of the bimorph arm includes an island-shaped portion 144 isolated from the outer portion 145 of the fixed end 143. This allowed the island-shaped portion 144 to be electrically and / or thermally isolated from the outer portion 145. In some embodiments, the SMA material attached to the opposite side of the fixed end 143 of the bimorph arm is electrically coupled to the SMA material, such as a SMA wire, via vias. The island portion 144 is arranged on the insulator 146, such as those described herein. The islands 144 can be formed using etching techniques, including those known in the art.

As used herein, terms such as "top", "bottom", "upper", "lower" and x, y and z directions may refer to any given spatial or gravitational orientation of the part. It will be understood that it is a convenient term that indicates a spatial relationship to each other. Thus, these terms refer to an assembly of components, whether the assembly is oriented in a particular orientation as shown in the drawings and as described herein, or upside down from that orientation, or otherwise. It is intended to be included regardless of whether it is directed at any rotational deformation of.

It is understood that the term "invention" as used herein should not be construed to mean that only a single invention with a single essential element or group of elements is presented. Yeah. Similarly, it will be appreciated that the term "invention" includes multiple distinct innovations, each of which can be considered as a separate invention. Although the present invention has been described in detail with respect to preferred embodiments and drawings thereof, those skilled in the art will achieve various adaptations and modifications of embodiments of the invention without departing from the spirit and scope of the invention. It should be clear that you can. In addition, the techniques described herein can be used to make devices with 2, 3, 4, 5, 6, or more generally n bimorph and buckle actuators. Accordingly, the detailed description and accompanying drawings as shown above limit the scope of the invention to be inferred only from the following claims and their appropriately interpreted legal equivalents. It should be understood that is not intended.

Claims (30)

Beam part and
With a fixed end,
A load point end portion, wherein the beam portion is arranged between the fixed end portion and the load point end portion, and a load point end portion.
An actuator comprising the SMA material attached to the fixed end and the load point end. The actuator according to claim 1, wherein the actuator includes a limiter. The actuator according to claim 1, wherein the load point end is configured to attach the SMA material using a resistance weld. The actuator of claim 1, wherein the fixed end is configured to mount the SMA material using a resistance weld. The actuator according to claim 4, wherein the fixed end portion includes a flat surface. The actuator according to claim 5, wherein the SMA material is attached to the flat surface by the resistance welded portion. The actuator of claim 6, wherein the adhesive is placed on the resistance weld and at least a portion of the flat surface. The actuator according to claim 5, comprising a metal intermediate layer arranged on the flat surface. The actuator according to claim 3, wherein the fixed end portion includes a flat surface. The actuator according to claim 9, wherein the SMA material is attached to the flat surface by the resistance welded portion. 10. The actuator of claim 10, wherein the adhesive is placed on the resistance weld and at least a portion of the flat surface. 9. The actuator of claim 9, comprising a metal interlayer disposed on the flat surface. The actuator according to claim 10, further comprising an island-shaped portion formed on the opposite side of the fixed end portion to the resistance welded portion, wherein the island-shaped portion is electrically coupled to the SMA material. The actuator according to claim 1, wherein the beam portion includes a molding offset. 14. The actuator of claim 14, comprising a limiter configured to be adjacent to the molding offset. 15. The actuator of claim 15, wherein the limiter is formed as part of a base. The actuator according to claim 1, wherein the SMA material is an SMA wire. The actuator according to claim 1, further comprising one or more load point expansion portions. The actuator according to claim 18, wherein the one or more load point expansion portions are formed at an angle with respect to the beam portion. The actuator according to claim 18, wherein the one or more load point expansion portions are formed in parallel with the beam portion. With the base
One or more bimorph arms, said one or more bimorph arms.
Beam part and
With a fixed end,
A load point end portion, wherein the beam portion is arranged between the fixed end portion and the load point end portion, and a load point end portion.
An actuator comprising the SMA material attached to the fixed end and the load point end. 21. The actuator of claim 21, wherein the SMA material of the one or more bimorph arms is an SMA wire. 21. The actuator of claim 21, wherein the bimorph arm is integrally formed with the base. 21. The actuator of claim 21, wherein at least one of the fixed end and the load point end of the one or more bimorph arms comprises a flat surface. 24. The actuator of claim 24, wherein the SMA material of the one or more bimorph arms is attached to the flat surface of at least one of the fixed end and the load point end by a resistance weld. 25. The actuator of claim 25, wherein the adhesive is placed on the resistance weld and the flat surface of at least one of the fixed end and the load point end. 25. The actuator of claim 25, wherein at least one of the fixed end and the load point end comprises a metal intermediate layer disposed on the flat surface. It has an island-shaped portion formed on the side opposite to the resistance welded portion of at least one of the fixed end portion and the load point end portion, and the island-shaped portion is electrically coupled to the SMA material. 25. The actuator according to claim 25. 21. The actuator of claim 21, wherein the beam portion of the one or more bimorph arms comprises a molding offset. 29. The actuator of claim 29, wherein the one or more bimorph arms include a limiter configured to be adjacent to the molding offset.

Images