CN112654786B

CN112654786B - Shape memory alloy actuator and method thereof

Info

Publication number: CN112654786B
Application number: CN202080004847.0A
Authority: CN
Inventors: N·K·贝宁; M·A·米勒; D·E·迈尔斯; M·W·戴维斯; R·N·鲁日奇卡
Original assignee: Hutchinson Technology Inc
Current assignee: Hutchinson Technology Inc
Priority date: 2019-03-29
Filing date: 2020-03-26
Publication date: 2023-07-11
Anticipated expiration: 2040-03-26
Also published as: JP2022527469A; GB2596673A; CN112654786A; KR20210143285A; GB202113598D0; WO2020205453A1; GB2596673B; TW202101056A

Abstract

SMA actuators and related methods are described herein. One embodiment of the actuator comprises: a base; a plurality of flexion arms; at least a first shape memory alloy wire coupled with a pair of flexure arms of the plurality of flexure arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator is attached to the base.

Description

Shape memory alloy actuator and method thereof

Cross Reference to Related Applications

The present application claims the benefit of U.S. patent application 16/775,207, filed on day 28 of 1 in 2020, and further claims the benefit of U.S. provisional patent application 62/826,106, filed on day 29 of 3 in 2019, which are incorporated herein by reference in their entirety.

Technical Field

Embodiments of the present invention relate to the field of shape memory alloy systems. More particularly, embodiments of the present invention relate to the field of shape memory alloy actuators and related methods.

Background

Shape memory alloy ("SMA") systems have a moving component or structure that can be used, for example, as an autofocus actuator with a camera lens element. These systems may be surrounded by structures such as shields. The moving assembly is supported for movement on a support assembly by bearings such as a plurality of balls. A flexure element formed of a metal such as phosphor bronze or stainless steel has a moving plate and a flexure. The flexure extends between the moving plate and the fixed support assembly and acts as a spring to enable the moving assembly to move relative to the fixed support assembly. The balls allow the moving assembly to move with little resistance. The moving assembly and the support assembly are coupled by four strip-shaped Shape Memory Alloy (SMA) wires extending between the assemblies. One end of each SMA wire is attached to the support assembly and the other end is attached to the movement assembly. The suspension is actuated by applying an electrical drive signal to the SMA wire. However, these types of systems suffer from system complexity, which results in heavy systems requiring large footprint and large height clearances. Furthermore, current systems are unable to provide a high Z range of travel with a compact low profile footprint.

Disclosure of Invention

SMA actuators and related methods are described herein. One embodiment of an actuator includes a base; a plurality of flexion arms; at least a first shape memory alloy wire coupled with a pair of flexure arms of the plurality of flexure arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator is attached to the base.

Other features and advantages of embodiments of the present invention will become apparent from the accompanying drawings and the following detailed description.

Drawings

Embodiments of the invention are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings and in which like reference numerals refer to similar elements and in which:

FIG. 1a illustrates a lens assembly including an SMA actuator configured as a buckling actuator according to one embodiment;

FIG. 1b illustrates an SMA actuator according to one embodiment;

FIG. 2 illustrates an SMA actuator according to one embodiment;

figure 3 illustrates an exploded view of an autofocus assembly including an SMA wire actuator according to one embodiment;

FIG. 4 illustrates an autofocus assembly including an SMA actuator according to one embodiment;

FIG. 5 illustrates an SMA actuator including a sensor according to one embodiment;

FIG. 6 illustrates top and side views of an SMA actuator configured as a buckling actuator equipped with a lens carrier according to one embodiment;

FIG. 7 illustrates a side view of a portion of an SMA actuator according to one embodiment;

FIG. 8 illustrates multiple views of an embodiment of a buckling actuator;

FIG. 9 illustrates a bimorph actuator with a lens holder according to one embodiment;

FIG. 10 illustrates a cross-sectional view of an autofocus assembly including an SMA actuator according to one embodiment;

FIGS. 11a-c illustrate views of a bimorph actuator according to some embodiments;

FIG. 12 illustrates a view of an embodiment of a bimorph actuator according to one embodiment;

FIG. 13 illustrates an end pad cross-section of a bimorph actuator according to one embodiment;

FIG. 14 illustrates a center power pad cross section of a bimorph actuator according to one embodiment;

FIG. 15 illustrates an exploded view of an SMA actuator including two buckling actuators according to one embodiment;

FIG. 16 illustrates an SMA actuator including two buckling actuators according to one embodiment;

FIG. 17 illustrates a side view of an SMA actuator including two buckling actuators according to one embodiment;

FIG. 18 illustrates a side view of an SMA actuator including two buckling actuators according to one embodiment;

FIG. 19 illustrates an exploded view of an assembly including an SMA actuator including two buckling actuators according to one embodiment;

FIG. 20 illustrates an SMA actuator including two buckling actuators according to one embodiment;

FIG. 21 illustrates an SMA actuator including two buckling actuators according to one embodiment;

FIG. 22 illustrates an SMA actuator including two buckling actuators according to one embodiment;

FIG. 23 illustrates an SMA actuator including two buckling actuators and a coupler, according to one embodiment;

FIG. 24 illustrates an exploded view of an SMA system including an SMA actuator including a buckling actuator with a laminated hammock according to one embodiment;

FIG. 25 illustrates an SMA system including an SMA actuator including a buckling actuator 2402 with a laminated hammock according to one embodiment;

FIG. 26 illustrates a buckling actuator including a laminated hammock according to one embodiment;

FIG. 27 illustrates a laminated hammock of an SMA actuator according to one embodiment;

FIG. 28 illustrates a laminated crimp connection of an SMA actuator according to one embodiment;

FIG. 29 illustrates an SMA actuator including a buckling actuator with a laminated hammock;

FIG. 30 illustrates an exploded view of an SMA system including an SMA actuator including a buckling actuator according to one embodiment;

FIG. 31 illustrates an SMA system including an SMA actuator including a buckling actuator according to one embodiment;

FIG. 32 illustrates an SMA actuator including a buckling actuator, according to one embodiment;

FIG. 33 illustrates a two yoke capture joint of a pair of buckling arms of an SMA actuator according to one embodiment;

FIG. 34 illustrates a resistance weld crimp of an SMA actuator for attaching an SMA wire to a buckling actuator according to one embodiment;

FIG. 35 illustrates an SMA actuator that includes a buckling actuator having two yoke capture joints;

FIG. 36 illustrates an SMA bimorph liquid lens according to one embodiment;

FIG. 37 illustrates a perspective view of an SMA bimorph liquid lens according to one embodiment;

FIG. 38 illustrates a cross-sectional view and a bottom view of an SMA bimorph liquid lens according to one embodiment;

FIG. 39 illustrates an SMA system including an SMA actuator having a bimorph actuator according to one embodiment;

FIG. 40 illustrates an SMA actuator having a bimorph actuator according to one embodiment;

FIG. 41 shows the length of a bimorph actuator and the location of the wire pads used to extend the wire length of the SMA wire beyond the bimorph actuator;

FIG. 42 illustrates an exploded view of an SMA system that includes a bimorph actuator according to one embodiment;

FIG. 43 illustrates an exploded view of a sub-portion of an SMA actuator according to one embodiment;

FIG. 44 illustrates a subsection of an SMA actuator according to one embodiment;

FIG. 45 illustrates a five-axis sensor shift system according to one embodiment;

FIG. 46 illustrates an exploded view of a five-axis sensor shift system according to one embodiment;

FIG. 47 illustrates an SMA actuator that includes a bimorph actuator integrated into the circuit for all movement, according to one embodiment;

FIG. 48 illustrates an SMA actuator that includes a bimorph actuator integrated into the circuit for all movement, according to one embodiment;

FIG. 49 illustrates a cross section of a five-axis sensor displacement system according to one embodiment;

FIG. 50 illustrates an SMA actuator that includes a bimorph actuator according to one embodiment;

FIG. 51 illustrates a top view of an SMA actuator that includes a bimorph actuator that moves an image sensor to different x and y positions, according to one embodiment;

FIG. 52 illustrates an SMA actuator comprising a bimorph actuator configured as a cassette bimorph autofocus device according to one embodiment;

FIG. 53 illustrates an SMA actuator that includes a bimorph actuator according to one embodiment;

FIG. 54 illustrates an SMA actuator that includes a bimorph actuator according to one embodiment;

FIG. 55 illustrates an SMA actuator that includes a bimorph actuator according to one embodiment;

FIG. 56 illustrates an SMA system including an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 57 illustrates an exploded view of an SMA system including an SMA actuator including a bimorph actuator configured as a two-axis lens-shifted OIS in accordance with one embodiment;

FIG. 58 illustrates a cross-section of an SMA system including an SMA actuator comprising a bimorph actuator configured as a two-axis lens-shifted OIS in accordance with one embodiment;

FIG. 59 illustrates a cassette bimorph actuator according to one embodiment;

FIG. 60 illustrates an SMA system including an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 61 illustrates an exploded view of an SMA system that includes an SMA actuator that includes a bimorph actuator according to one embodiment;

FIG. 62 illustrates a cross-section of an SMA system that includes an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 63 illustrates a cassette bimorph actuator according to one embodiment;

FIG. 64 illustrates an SMA system that includes an SMA actuator that includes a bimorph actuator according to one embodiment;

FIG. 65 illustrates an exploded view of an SMA system that includes an SMA actuator that includes a bimorph actuator according to one embodiment;

FIG. 66 illustrates an SMA system including an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 67 illustrates an SMA system that includes an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 68 illustrates an SMA system including an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 69 illustrates an exploded view of an SMA including an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 70 illustrates a cross-section of an SMA system including an SMA actuator comprising a bimorph actuator configured to displace OIS from a tri-axial sensor according to one embodiment;

FIG. 71 illustrates a cassette bimorph actuator member according to one embodiment;

FIG. 72 illustrates a flexible sensor circuit used in an SMA system according to one embodiment;

FIG. 73 illustrates an SMA system including an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 74 illustrates an exploded view of an SMA system that includes an SMA actuator that includes a bimorph actuator according to one embodiment;

FIG. 75 illustrates a cross-section of an SMA system that includes an SMA actuator according to one embodiment;

FIG. 76 illustrates a cassette bimorph actuator according to one embodiment;

FIG. 77 illustrates a flexible sensor circuit used in an SMA system according to one embodiment;

FIG. 78 illustrates an SMA system including an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 79 illustrates an exploded view of an SMA system that includes an SMA actuator that includes a bimorph actuator according to one embodiment;

FIG. 80 illustrates a cross-section of an SMA system that includes an SMA actuator according to one embodiment;

FIG. 81 illustrates a cassette bimorph actuator according to one embodiment;

FIG. 82 illustrates a flexible sensor circuit used in an SMA system according to one embodiment;

FIG. 83 illustrates an SMA system that includes an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 84 illustrates an exploded view of an SMA system including an SMA actuator according to one embodiment;

FIG. 85 illustrates a cross-section of an SMA system that includes an SMA actuator comprising a bimorph actuator according to one embodiment;

FIG. 86 illustrates a cassette bimorph actuator used in an SMA system according to one embodiment;

FIG. 87 illustrates a flexible sensor circuit used in an SMA system according to one embodiment;

FIG. 88 illustrates exemplary dimensions of a bimorph actuator of an SMA actuator according to one embodiment;

FIG. 89 illustrates a lens system of a folded camera, according to one embodiment;

FIG. 90 illustrates several embodiments of a lens system including a liquid lens according to one embodiment;

FIG. 91 illustrates a folded lens as a prism disposed on an actuator according to one embodiment;

FIG. 92 illustrates a bimorph arm with offset according to one embodiment;

FIG. 93 illustrates a bimorph arm with an offset and limiter according to one embodiment;

FIG. 94 illustrates a bimorph arm with an offset and limiter according to one embodiment;

FIG. 95 illustrates an embodiment of a base including a bimorph arm with an offset according to one embodiment;

FIG. 96 illustrates an embodiment of a base including two bimorph arms with offsets according to one embodiment;

FIG. 97 illustrates a buckling arm including a load point extension according to one embodiment;

FIG. 98 illustrates a flexure arm 9801 including a point of load extension 9810 according to one embodiment;

FIG. 99 illustrates a bimorph arm including a point of load extension according to one embodiment;

FIG. 100 illustrates a bimorph arm including a point of load extension according to one embodiment;

FIG. 101 illustrates an SMA optical image stabilizer, according to one embodiment;

FIG. 102 illustrates the SMA material attachment portion 40 of the moving portion according to one embodiment;

FIG. 103 illustrates an SMA attachment portion of a static plate having resistance welded SMA wires attached thereto, according to one embodiment;

FIG. 104 illustrates an SMA actuator 45 that includes a buckling actuator, according to one embodiment;

FIGS. 105a-b illustrate a resistance weld crimp including an island structure for an SMA actuator, according to one embodiment;

FIG. 106 illustrates a relationship between bending plane z-offset, valley width, and peak force of a bimorph beam according to one embodiment;

FIG. 107 illustrates an example of how the box volume of an approximation box surrounding an entire bimorph actuator according to one embodiment is associated with the work of each bimorph member;

FIG. 108 illustrates a liquid lens actuated using a buckling actuator, according to one embodiment;

FIG. 109 illustrates an unfixed load point end of a bimorph arm according to one embodiment;

FIG. 110 illustrates an unfixed load point end of a bimorph arm according to one embodiment;

FIG. 111 illustrates an unfixed load point end of a bimorph arm according to one embodiment;

FIG. 112 illustrates an unfixed load point end of a bimorph arm according to one embodiment;

FIG. 113 illustrates a fixed end of a bimorph arm according to one embodiment;

FIG. 114 illustrates a fixed end of a bimorph arm according to one embodiment;

FIG. 115 illustrates a fixed end of a bimorph arm according to one embodiment;

FIG. 116 illustrates a fixed end of a bimorph arm according to one embodiment; and

FIG. 117 illustrates a rear view of a fixed end of a bimorph arm according to one embodiment.

Detailed Description

Embodiments of SMA actuators are described herein that have a compact footprint and provide a high actuation height, e.g., high positive z-axis direction (z-direction) movement, referred to herein as z-travel. Embodiments of SMA actuators include SMA buckling actuators and SMA bimorph actuators. SMA actuators are useful in many applications including, but not limited to, use in lens assemblies (as auto focus actuators, microfluidic pumps, sensor displacement devices, optical image stabilization devices, optical zoom assemblies) to mechanically strike two surfaces to create the vibration sensations typically found in haptic feedback sensors and devices, as well as other systems for using actuators. For example, embodiments of the actuators described herein may be used as haptic feedback actuators used in a cell phone or a wearable device configured to provide an alarm clock, notification, alarm, touch area, or push button response to a user. Furthermore, more than one SMA actuator may be used in the system to achieve a greater stroke.

For various embodiments, the SMA actuator has a z-travel of greater than 0.4 millimeters. Further, the SMA actuators of the various embodiments have a height in the z-direction of 2.2 millimeters or less when the SMA actuator is in its initial deactivated position. The footprint size of the various embodiments of SMA actuators configured as autofocus actuators in a lens assembly may be as small as 3 millimeters greater than the lens inner diameter ("ID"). According to various embodiments, the footprint of the SMA actuator may be wider in one direction to accommodate components including, but not limited to, sensors, wires, traces, and connectors. According to some embodiments, the footprint of the SMA actuator is 0.5 millimeters greater in one direction, e.g., the SMA actuator is 0.5 millimeters greater in length than in width.

FIG. 1a illustrates a lens assembly including an SMA actuator configured as a buckling actuator according to one embodiment. FIG. 1b illustrates an SMA actuator configured as a buckling actuator, according to one embodiment. The buckling actuator 102 is coupled with the base 101. As shown in fig. 1b, the SMA wires (wires) 100 are attached to the buckling actuators 102 such that when the SMA wires 100 are actuated and contracted, the buckling actuators 102 are caused to buckle (bend), which results in at least a central portion 104 of each buckling actuator 102 moving in a z-travel direction (e.g., positive z-direction) as indicated by arrow 108. According to some embodiments, the SMA wire 100 is actuated when current is supplied to one end of the wire through a wire holder such as the crimp structure 106. The current flowing through the SMA wire 100 heats the SMA wire 100 due to the inherent resistance of the SMA material from which the SMA wire 100 is made. The other side of the SMA wire 100 has a wire holder, such as a crimp structure 106, that connects the SMA wire 100 to ground the circuit. Heating the SMA wire 100 to a sufficient temperature causes the unique material properties to transform from martensite to austenite crystal structure, which results in a change in the length of the wire. Changing the current will change the temperature and thus the length of the wire, and the change in wire length will be used to actuate and de-actuate the actuator to at least control the movement of the actuator in the z-direction. Those skilled in the art will appreciate that other techniques may be used to provide current to the SMA wire.

FIG. 2 illustrates an SMA actuator configured as an SMA bimorph actuator according to one embodiment. As shown in fig. 2, the SMA actuator comprises a bimorph actuator 202 coupled to a base 204. The bimorph actuator 202 includes SMA strips 206. The bimorph actuator 202 is configured to move the unfixed end of the bimorph actuator 202 at least along the z-stroke direction 208 when the SMA tape 206 contracts.

FIG. 3 illustrates an exploded view of an autofocus assembly including an SMA actuator according to one embodiment. As shown, the SMA actuator 302 is configured as a buckling actuator according to embodiments described herein. The autofocus assembly also includes an optical image stabilizer ("OIS") 304, a lens carrier 306 configured to hold one or more optical lenses using techniques including those known in the art, a return spring 308, a vertical (vertical) slide bearing 310, and a guide cover 312. When the SMA wires are actuated and caused to pull the buckling actuator 302 to buckle the buckling actuator 302 using techniques including those described herein, the lens bracket 306 is configured to slide against the vertical sliding bearing 310 as the SMA actuator 302 moves in the z-travel direction (e.g., positive z-direction). The return spring 308 is configured to apply a force to the lens carrier 306 in a direction opposite the z-travel direction using techniques including those known in the art. According to various embodiments, the return spring 308 is configured to move the lens carrier 306 in a direction opposite the z-travel direction when tension in the SMA wire is reduced due to de-actuation of the SMA wire. When the tension in the SMA wire decreases to an initial value, the lens holder 306 moves to the lowest height in the z-travel direction. Figure 4 illustrates an autofocus assembly including an SMA wire actuator according to the embodiment illustrated in figure 3.

Figure 5 illustrates an SMA wire actuator including a sensor according to one embodiment. For various embodiments, the sensor 502 is configured to measure movement of the SMA actuator in the z-direction or movement of a component that the SMA actuator is moving using techniques including techniques known in the art. The SMA actuators include one or more buckling actuators 506 configured to be actuated using one or more SMA wires 508 (similar to SMA wires described herein). For example, in the autofocus assembly described with reference to fig. 4, the sensor is configured to determine the amount of movement that the lens holder 306 moves from the initial position along the z-direction 504 using techniques including those known in the art. According to some embodiments, the sensor is a tunneling magneto-resistance ("TMR") sensor.

Fig. 6 illustrates top and side views of an SMA actuator 602 configured as a buckling actuator equipped with a lens carrier 604 according to one embodiment. Fig. 7 illustrates a side view of a portion of an SMA actuator 602 according to the embodiment illustrated in fig. 6. The SMA actuator 602 includes a sliding base 702, as in the embodiment shown in fig. 7. According to one embodiment, the slide base 702 is formed from a metal such as stainless steel using techniques including those known in the art. However, those skilled in the art will appreciate that other materials may be used to form the slide base 702. Furthermore, according to some embodiments, the slide base 702 has a spring arm 612 coupled with the SMA actuator 602. According to various embodiments, spring arm 612 is configured to have two functions. The first function is to help push an object (e.g., lens carrier 604) to the vertical sliding surface of the guide cover. For this example, spring arm 612 preloads lens carrier 604 onto the surface to ensure that the lens does not tilt during actuation. For some embodiments, the vertical sliding surface 708 is configured to mate with a guide cover. A second function of the spring arm 612 is to assist in (e.g., pulling back the SMA actuator 602 in the negative z-direction) after the SMA wire 608 moves the SMA actuator 602 in the z-travel direction (positive z-direction). Thus, when the SMA wire 608 is actuated, the SMA wire 608 contracts to move the SMA actuator 602 in the z-stroke direction, and when the SMA wire 608 is de-actuated, the spring arm 612 is configured to move the SMA actuator 602 in a direction opposite the z-stroke direction.

The SMA actuator 602 also includes a buckling actuator 710. For various embodiments, buckling actuator 710 is formed of a metal such as stainless steel. In addition, the buckle actuator 710 includes a buckle arm 610 and one or more lead retainers 606. According to the embodiment shown in fig. 6 and 7, buckling actuator 710 includes four wire retainers 606. The four wire retainers 606 are each configured to receive an end of the SMA wire 608 and retain an end of the SMA wire 608 such that the SMA wire 608 is secured to the buckling actuator 710. For various embodiments, the four wire retainers 606 are crimps configured to crimp down on a portion of the SMA wire 608 to secure the wire to the crimps. Those skilled in the art will appreciate that the SMA wire 608 may be secured to the wire holder 606 using techniques known in the art, including but not limited to adhesive, welding, and mechanical fixation. A smart memory alloy ("SMA") wire 608 extends between the pair of wire holders 606 such that the buckling arms 610 of the buckling actuator 710 are configured to move when the SMA wire 608 is actuated, causing the pair of wire holders 606 to be pulled closer. According to various embodiments, when a current is applied to the SMA wire 608, the SMA wire 608 is electrically actuated to move and control the position of the flex arm 610. When the current is removed or below a threshold, the SMA wire 608 is deactivated. This separates the pair of wire retainers 606 and moves the buckling arms 610 in a direction opposite to that when the SMA wire 608 is actuated. According to various embodiments, qu Qubei 610 is configured to have an initial angle of 5 degrees relative to the slide base 702 when the SMA wire is deactivated in its initial position. Also, according to various embodiments, at full travel or when the SMA wire is fully actuated, the buckling arm 610 is configured to have an angle of 10 to 12 degrees relative to the sliding base 702.

According to the embodiment shown in fig. 6 and 7, the SMA actuator 602 further comprises a sliding bearing 706 disposed between the sliding base 702 and the wire holder 606. The slide bearing 706 is configured to minimize any friction between the slide base 702 and the flex arm 610 and/or wire retainer 606. The plain bearing of some embodiments is fixed to the plain bearing 706. According to various embodiments, the sliding bearing is formed from polyoxymethylene ("POM"). Those skilled in the art will appreciate that other structures may be used to reduce any friction between the buckling actuator and the base.

According to various embodiments, the slide base 702 is configured to couple with a component base 704, such as an autofocus base of an autofocus component. According to some embodiments, the actuator base 704 includes an etched spacer. Such etched shims may be used to provide clearance for wires and crimps when the SMA actuator 602 is part of an assembly such as an autofocus assembly.

Fig. 8 illustrates multiple views of an embodiment of a buckling actuator 802 relative to the x, y, and z axes. As shown in fig. 8, the buckling arm 804 is configured to move along the z-axis when the SMA wires are actuated and de-actuated as described herein. According to the embodiment shown in fig. 8, qu Qubei 804 are coupled to each other by a central portion, such as a hammock (sling) portion 806. According to various embodiments, the hammock portion 806 is configured to support (hold up) a portion of the object that is acted upon by the buckling actuator (e.g., a lens bracket that is moved by the buckling actuator using techniques including those described herein). According to some embodiments, the hammock portion 806 is configured to provide lateral (transverse) stiffness to the buckling actuator during actuation. For other embodiments, the buckling actuator does not include a hammock portion 806. According to these embodiments, qu Qubei is configured to act on an object to move it. For example, the flex arm is configured to act directly on a feature of the lens carrier to push it upward.

FIG. 9 illustrates an SMA actuator configured as an SMA bimorph actuator according to one embodiment. SMA bimorph actuators include a bimorph actuator 902, the bimorph actuator 902 including those described herein. According to the embodiment shown in fig. 9, one end 906 of each bimorph actuator 902 is secured to base 908. According to some embodiments, the one end 906 is welded to the base 908. However, those skilled in the art will appreciate that other techniques may be used to secure the one end 906 to the base 908. Fig. 9 also shows a lens carrier 904, the lens carrier 904 being arranged such that the bimorph actuator 902 is configured to roll up in the z-direction when actuated, and to lift the carrier 904 in the z-direction. For some embodiments, a return spring is used to push the bimorph actuator 902 back to the initial position. The return spring may be configured as described herein to help push the bimorph actuator downward to its initial deactivated position. Because of the small footprint of bimorph actuators, SMA actuators can be manufactured having reduced footprint compared to existing actuator technology.

Fig. 10 illustrates a cross-sectional view of an autofocus assembly including an SMA actuator that includes a position sensor, such as a TMR sensor, according to one embodiment. Autofocus assembly 1002 includes a position sensor 1004 attached to a travel spring 1006 and a magnet 1008 attached to a lens carrier 1010 of an autofocus assembly that includes an SMA actuator such as the SMA actuator described herein. The position sensor 1004 is configured to determine an amount of movement of the lens carrier 1010 from the initial position along the z-direction 1005 based on the distance of the magnet 1008 from the position sensor 1004 using techniques including those known in the art. According to some embodiments, the position sensor 1004 is electrically coupled to a controller or processor (e.g., a central processing unit) using a plurality of electrical traces on a spring arm of the moving spring 1006 of the optical image stabilization assembly.

Fig. 11a-c illustrate views of a bimorph actuator according to some embodiments. According to various embodiments, the bimorph actuator 1102 includes a beam 1104 and one or more SMA materials 1106, such as SMA tape 1106b (e.g., as shown in the perspective view of the bimorph actuator including SMA tape according to the embodiment of fig. 11 b) or SMA wire 1106a (e.g., as shown in the cross-section of the bimorph actuator including SMA wire according to the embodiment of fig. 11 a). The SMA material 1106 is fixed to the beam 1104 using techniques including those described herein. According to some embodiments, the SMA material 1106 is fixed to the beam 1104 using an adhesive film material 1108. For various embodiments, the ends of the SMA material 1106 are electrically and mechanically coupled to contacts 1110, the contacts 1110 being configured to supply current to the SMA material 1106 using techniques including those known in the art. According to various embodiments, contacts 1110 (e.g., as shown in fig. 11a and 11 b) are gold plated copper pads (lands). According to various embodiments, a bimorph actuator 1102 having a length of about 1 millimeter is configured to produce a large stroke and 50 millinewtons ("mN") of thrust and is used as part of a lens assembly, for example as shown in fig. 11 c. According to some embodiments, the use of a bimorph actuator 1102 having a length of greater than 1 millimeter will produce a greater stroke but less force than a bimorph actuator 1102 having a length of 1 millimeter. For one embodiment, the bimorph actuator 1102 includes a 20 micron thick SMA material 1106, a 20 micron thick insulator 1112 (e.g., polyimide insulator), and a 30 micron thick stainless steel beam 1104 or base metal. Various embodiments include a second insulator 1114, the second insulator 1114 being disposed between a contact layer including contacts 1110 and the SMA material 1106. According to some embodiments, the second insulator 1114 is configured to insulate the SMA material 1106 from portions of the contact layer not used as contacts 1110. For some embodiments, the second insulator 1114 is a cover layer, such as a polyimide insulator. Those skilled in the art will appreciate that other dimensions and materials may be used to meet the desired design characteristics.

Fig. 12 illustrates a view of an embodiment of a bimorph actuator according to one embodiment. The embodiment shown in fig. 12 includes a center feed 1204 for applying power (electricity). As described herein, power is supplied at the center of the SMA material 1202 (wire or ribbon). The end of the SMA material 1202 is grounded to the beam 1206 or base metal at an end pad 1203 as a return path. The end pad 1203 is electrically isolated from the rest of the contact layer 1214. According to various embodiments, the beam 1206 or base metal is in close proximity to the SMA material 1202 (e.g., SMA wire) along the entire length of the SMA material 1202 such that the wire is able to cool relatively quickly when the current is turned off (i.e., when the bimorph actuator is deactivated). This results in faster wire deactivation and faster actuator response time. The thermal profile (performance) of the SMA wire or ribbon is improved. For example, the thermal profile is more uniform, so that a higher total current can be reliably transferred to the wire. If there is no uniform heat dissipation, certain portions of the wire (e.g., the central region) may overheat and fail, requiring reduced current and reduced movement to operate reliably. The center feed 1204 has the following advantages: the SMA material 1202 has faster wire activation/actuation (faster heating) and reduced power consumption (lower resistance path length), enabling faster response times. This allows for faster movement of the actuator and enables operation at higher movement frequencies.

As shown in fig. 12, the beam 1206 includes a center metal 1208, which center metal 1208 is isolated from the rest of the beam 1206 to form a center feed 1204. An insulator 1210, such as the insulators described herein, is disposed on the beam 1206. The insulator 1210 is configured with one or more openings or vias 1212 to provide electrical communication to the beam 1206 (e.g., to couple to a ground portion 1214b of the contact layer) and to provide contact with the center metal 1208 to form the center feed 1204. According to some embodiments, a contact layer 1214, such as the contact layer described herein, includes a power portion 1214a and a ground portion 1214b to provide actuation/control signals to the bimorph actuator through power contacts 1216 and ground contacts 1218. A capping layer 1220, such as the capping layers described herein, is disposed on the contact layer 1214 to electrically isolate the contact layer 1214 at portions other than portions of the contact layer 1214 (e.g., one or more contacts) where electrical coupling is desired.

Fig. 13 shows a cross section of an end pad of a bimorph actuator according to the embodiment shown in fig. 12. As described above, the end pad 1203 is electrically isolated from the rest of the contact layer 1214 by a gap 1222 formed between the end pad 1203 and the contact layer 1214. According to some embodiments, the gap is formed using etching techniques, including techniques known in the art. The end pad 1203 includes a via portion 1224 configured to electrically couple the end pad 1203 with the beam 1206. The via portion 1224 is formed in the via 1212 formed in the insulator 1210. The SMA material 1202 is electrically coupled to the end pad 1213. The SMA material 1202 may be electrically coupled to the end pads 1213 using techniques including, but not limited to, welding, resistance welding, laser welding, and direct plating.

Fig. 14 shows a cross section of a center feed of a bimorph actuator according to the embodiment shown in fig. 12. The center feed 1204 is electrically coupled to a power source through the contact layer 1214 and is electrically and thermally coupled to the center metal 1208 through a via portion 1226 in the center feed 1204 formed in a via 1212 formed in the insulator 1210.

The actuators described herein may be used to form actuator assemblies using multiple buckling actuators and/or multiple bimorph actuators. According to one embodiment, the actuators may be stacked on top of each other in order to increase the stroke distance that can be achieved.

Figure 15 illustrates an exploded view of an SMA actuator including two buckling actuators according to one embodiment. According to embodiments described herein, the two buckling

actuators

1302, 1304 are arranged relative to each other such that their motions oppose each other. For various embodiments, the two buckling

actuators

1302, 1304 are configured to move in a reverse relationship to each other to position the lens carrier 1306. For example, the first buckling actuator 1302 is configured to receive a power signal that is opposite to a power (electrical) signal sent to the second buckling actuator 1304.

Figure 16 illustrates an SMA actuator including two buckling actuators according to one embodiment. The buckling

actuators

1302, 1304 are configured such that the buckling arms 1310, 1312 of each buckling

actuator

1302, 1304 face each other, and the

slide base

1314, 1316 of each buckling

actuator

1302, 1304 is the outer surface of both buckling actuators. According to various embodiments, the hammock portion 1308 of each

SMA actuator

1302, 1304 is configured to support a portion of the object that is acted upon by the one or more buckling actuators 1302, 1304 (e.g., a lens carrier 1306 that is moved by the buckling actuators using techniques including those described herein).

Figure 17 illustrates a side view of an SMA actuator including two buckling actuators showing the direction of SMA wires 1318 that cause an object such as a lens carrier to move in a positive z-direction or upward direction, according to one embodiment.

Figure 18 illustrates a side view of an SMA actuator including two buckling actuators showing the direction of SMA wires 1318 that cause an object such as a lens carrier to move in a negative z-direction or downward direction, according to one embodiment.

Figure 19 illustrates an exploded view of an assembly including an SMA actuator including two buckling actuators according to one embodiment. The

flex actuators

1902, 1904 are configured such that the flex arms 1910, 1912 of each

flex actuator

1902, 1904 are the outer surfaces of the two flex actuators, and the sliding

bases

1914, 1916 of each

flex actuator

1902, 1904 face each other. According to various embodiments, the hammock portion 1908 of each

SMA actuator

1902, 1904 is configured to support a portion of the object acted upon by the one or more buckling actuators 1902, 1904 (e.g., a lens bracket 1906 that is moved by the buckling actuators using techniques including those described herein). For some embodiments, the SMA actuator includes a base portion 1918 configured to receive the second buckling actuator 1904. The SMA actuator may also include a cover portion 1920. FIG. 20 illustrates an SMA actuator including two buckling actuators including a base portion and a cover portion according to one embodiment.

Figure 21 illustrates an SMA actuator including two buckling actuators according to one embodiment. For some embodiments, the

flexion actuators

1902, 1904 are arranged relative to each other such that the hammock portion 1908 of the first flexion actuator 1902 is rotated approximately 90 degrees relative to the hammock portion of the second flexion actuator 1904. The 90 degree configuration enables pitch and roll rotation of an object such as lens carrier 1906. This enables better control of the movement of the lens holder 1906. For various embodiments, a differential power signal is applied to the SMA wires of each buckling actuator pair to cause pitch and roll rotations of the lens carrier to effect tilt OIS motion.

Embodiments of SMA actuators that include two buckling actuators do not require a return spring. When using SMA wire resistance for position feedback, the use of two buckling actuators may improve/reduce hysteresis. The reaction force SMA actuator comprising two buckling actuators contributes to a more accurate position control due to the lower hysteresis than an actuator comprising a return spring. For some embodiments, such as the embodiment shown in fig. 22, an SMA actuator comprising two buckling

actuators

2202, 2204 provides 2-axis tilting by applying differential power to the left and right SMA wires 2218a, 2218b of each buckling

actuator

2202, 2204. For example, the left SMA wire 2218a is actuated at a higher power than the right SMA wire 2218 b. This causes the left side of the lens holder 2206 to move downward and the right side to move upward (tilt). For some embodiments, the SMA wires of the first buckling actuator 2202 are held at equal power to act as a fulcrum for differential pushing of the SMA wires 2218a, 2218b to cause tilting motion. For example, applying equal power to the SMA wires of the second buckling actuator 2202 and applying differential power to the left and right SMA wires 2218a, 2218b of the second buckling actuator 2204 will cause the lens carrier 2206 to tilt in the other direction. This enables the object (e.g. the lens holder) to tilt along any axis of motion, or any tilt between the lens and the sensor can be adjusted to achieve good dynamic tilt, thus achieving better image quality across all pixels.

FIG. 23 illustrates an SMA actuator including two buckling actuators and one coupler, according to one embodiment. The SMA actuator includes two buckling actuators, such as those described herein. The first buckling actuator 2302 is configured to couple with the second buckling actuator 2304 using a coupler, such as a coupler ring 2305. The buckling

actuators

2302, 2304 are arranged relative to each other such that the hammock portion 2308 of the first buckling actuator 2302 is rotated about 90 degrees relative to the hammock portion 2309 of the second buckling actuator 2304. A payload (e.g., a lens or lens assembly) for movement is attached to a lens carrier 2306, the lens carrier 2306 being configured to be disposed on a sliding base of a first buckling actuator 2302.

For various embodiments, equal power may be applied to the SMA wires of the first and second buckling

actuators

2302, 2304. This may cause the z-travel of the SMA actuator in the positive z-direction to be maximized. For some embodiments, the stroke of the SMA actuator may have a z-stroke equal to or greater than twice the stroke of the other SMA actuator comprising two buckling actuators. For some embodiments, when the power signal is removed from the SMA actuator, additional springs pushing against the two buckling (actuators) may be added to help push the actuator assembly and the payload back down. Equal and opposite power signals may be applied to SMA wires of the first and second buckling

actuators

2302, 2304. This enables the SMA actuator to be moved in the positive z-direction by the buckling actuator and in the negative z-direction by the buckling actuator, which enables the position of the SMA actuator to be accurately controlled. Further, equal and opposite power signals (differential power signals) may be applied to the left and right SMA wires of the first and second buckling

actuators

2302, 2304 to tilt an object such as the lens carrier 2306 in the direction of at least one of the two axes.

An embodiment of an SMA actuator including two buckling actuators and couplers (such as shown in fig. 23) may be coupled with an additional buckling actuator and pair of buckling actuators to achieve a desired travel greater than a single SMA actuator.

Figure 24 illustrates an exploded view of an SMA system including an SMA actuator comprising a buckling actuator with a laminated hammock according to one embodiment. As described herein, for some embodiments, the SMA system is configured to be used as an autofocus driver with one or more camera lens elements. As shown in fig. 24, the SMA system includes a return spring 2403, which return spring 2403 is configured to move the lens carrier 2406 in a direction opposite to the z-stroke direction when tension in the SMA wire 2408 is reduced due to de-actuation of the SMA wire, according to various embodiments. For some embodiments, the SMA system includes a housing 2409, the housing 2409 configured to receive the return spring 2403 and act as a sliding bearing that guides movement of the lens carrier in the z-travel direction. The housing 2409 is also configured to be disposed on the buckling actuator 2402. The buckling actuator 2402 includes a slide base 2401 similar to the slide bases described herein. The buckling actuator 2402 includes a buckling arm 2404 coupled to a hammock portion (e.g., a laminated hammock 2406 formed of a laminate plate). The buckling actuator 2402 also includes SMA wire attachment structures, such as crimp connections 2412 formed by lamination.

As shown in fig. 24, the slide base 2401 is disposed on an optional adapter plate 2414. The adapter plate is configured to mate the SMA system or buckling actuator 2402 with another system (e.g., OIS, additional SMA system, or other component). FIG. 25 illustrates an SMA system 2501 that includes an SMA actuator including a buckling actuator 2402 with a laminated hammock according to one embodiment.

Figure 26 illustrates a buckling actuator including a laminated hammock according to one embodiment. The buckling actuator 2402 includes a buckling arm 2404. As described herein, the buckling arms 2404 are configured to move along the z-axis when the SMA wire 2412 is actuated and deactuated. The SMA wire 2408 is attached to the buckling actuator using a crimp connection 2412 formed by lamination. According to the embodiment shown in fig. 26, buckling arms 2404 are coupled to each other by a central portion such as a laminated hammock 2406. According to various embodiments, the laminate hammock 2406 is configured to support a portion of the object that is acted upon by the buckling actuator (e.g., a lens bracket that is moved by the buckling actuator using techniques including those described herein).

Figure 27 illustrates a laminated hammock of an SMA actuator according to one embodiment. For some embodiments, the material of the laminate hammock 2406 is a low stiffness material, so it does not resist actuation motions. For example, the laminate hammock 2406 is formed using a copper layer disposed on the first polyimide layer and a second polyimide layer disposed on the copper. For some embodiments, a laminated hammock 2406 is formed on the flex arm 2404 using deposition and etching techniques, including those known in the art. For other embodiments, the laminate hammock 2406 is formed separately from the buckling arm 2404 and attached to the buckling arm 2404 using techniques including welding, bonding, and other techniques known in the art. For various embodiments, glue or other adhesive is used on the laminate hammock 2406 to ensure that the buckling arm 2404 remains in place with respect to the lens bracket.

Figure 28 illustrates a press-fit connection formed by lamination of SMA actuators according to one embodiment. The lamination crimp connection 2412 is configured to attach the SMA wire 2408 to the buckling actuator and form a circuit joint with the SMA wire 2408. For various embodiments, the laminate formed crimp connection 2412 includes a laminate formed from one or more conductive layers and one or more insulators formed on the crimp connection.

For example, a polyimide layer is disposed on at least a portion of the stainless steel portion forming the crimp 2413. A conductive layer, such as copper, is then disposed on the polyimide layer, which is electrically coupled to one or more signal traces 2415 disposed on the buckling actuator. Deforming the crimp member to bring the crimp member into contact with the SMA wire therein also brings the SMA wire into electrical contact with the conductive layer. Thus, the conductive layer coupled to the one or more signal traces is used to apply a power signal to the SMA wire using techniques including those described herein. For some embodiments, a second polyimide layer is formed on the conductive layer in areas where the conductive layer will not contact the SMA wire. For some embodiments, a laminate crimp connection 2412 is formed on crimp 2413 using deposition and etching techniques, including techniques known in the art. For other embodiments, the lamination crimp connection 2412 and the one or more electrical traces are formed separately from the crimp 2413 and the buckling actuator and attached to the crimp 2412 and the buckling actuator using techniques including welding, bonding, and other techniques known in the art.

Figure 29 shows an SMA actuator comprising a buckling actuator with a laminated hammock. As shown in fig. 29, when a power signal is applied, the SMA wire contracts or shortens to move the flexure arm and the laminated couch in the positive z-direction. While the laminate hammock in contact with the object moves the object (e.g., lens holder) in a positive z-direction. When the power signal is reduced or removed, the SMA wire lengthens and moves the flexure arm and the laminated hammock in the negative z direction.

Figure 30 illustrates an exploded view of an SMA system including an SMA actuator including a buckling actuator according to one embodiment. As described herein, for some embodiments, the SMA system is configured to be used as an autofocus driver with one or more camera lens elements. As shown in fig. 30, the SMA system includes a return spring 3003, which return spring 3003 is configured to move the lens carrier 3005 in a direction opposite the z-stroke direction when tension in the SMA wire 3008 is reduced by de-actuation of the SMA wire, according to various embodiments. For some embodiments, the SMA system includes a stiffener 3000 disposed on the return spring 3003. For some embodiments, the SMA system includes a two-part housing 3009, the housing 3009 configured to receive the return spring 3003 and to act as a sliding bearing to guide movement of the lens carrier in the z-stroke direction. The housing 3009 is also configured to be disposed on the buckling actuator 3002. The buckling actuator 3002 includes a slide base 3001, the slide base 3001 being formed in two parts similar to the slide bases described herein. The slide base 3001 is split to electrically isolate the two sides (e.g., one side grounded, the other side powered), because according to some embodiments, current flows to the wires through certain portions of the slide base 3001.

The buckling actuator 3002 includes a buckling arm 3004. Each pair of buckling actuators 3002 is formed on a separate portion of the buckling actuators 3002. The buckling actuator 3002 also includes SMA wire attachment structures, such as resistance welded wire crimps 3012. The SMA system optionally includes a flexible circuit 3020 for electrically coupling the SMA wires 3008 to one or more control circuits.

As shown in fig. 30, a slide base 3001 is provided on an optional adapter plate 3014. The adapter plate is configured to mate the SMA system or buckling actuator 3002 with another system (e.g., OIS, additional SMA system, or other component). Fig. 31 illustrates an SMA system 3101 including an SMA actuator comprising a buckling actuator 3002 according to one embodiment.

Figure 32 includes an SMA actuator including a buckling actuator according to one embodiment. The buckling actuator 3002 includes a buckling arm 3004. The buckling arm 3004 is configured to move along the z-axis when the SMA wire 3012 is actuated and de-actuated as described herein. The SMA wire 2408 is attached to the resistance welding wire crimp 3012. According to the embodiment shown in fig. 32, the buckling arm 3004 is configured to mate with an object (e.g., a lens carrier) without using a center portion of a two yoke capture joint.

FIG. 33 illustrates a two yoke capture joint of a pair of buckling arms of an SMA actuator according to one embodiment. Fig. 33 also shows plating pads for attaching an optional flex circuit to the slide base. For some embodiments, the plating pad is formed using gold. Figure 34 illustrates a resistance weld crimp for an SMA actuator for attaching SMA wires to a buckling actuator according to one embodiment. For some embodiments, glue or adhesive may also be applied on top of the weld to help improve mechanical strength and to act to relieve fatigue strain during handling and impact loading.

Figure 35 shows an SMA actuator comprising a buckling actuator with two yoke capture joints. As shown in fig. 35, when a power signal is applied, the SMA wire contracts or shortens to move the buckling arm in the positive z-direction. While the two yoke capture tabs, which are in contact with the object (e.g., lens holder), move the object in the positive z-direction. When the power signal is reduced or removed, the SMA wire lengthens and moves the flexure arm in the negative z-direction. The yoke capture feature may ensure that the flex arm remains in the correct position relative to the lens carrier.

FIG. 36 illustrates an SMA bimorph liquid lens according to one embodiment. The SMA bimorph liquid lens 3501 includes a liquid lens sub-assembly 3502, a housing 3504, and an electrical circuit 3506 with an SMA actuator. For various embodiments, the SMA actuator comprises four bimorph actuators 3508, such as the embodiments described herein. The bimorph actuator 3508 is configured to push the forming ring 3510 on the flexible membrane 3512. The loop bends the membrane 3512/liquid 3514, thereby changing the optical path through the membrane 3512/liquid 3514. The liquid containment ring 3516 is for containing a liquid 3514 between the membrane 3512 and the lens 3518. Equal force from the bimorph actuator will change the focus of the image in the Z direction (perpendicular to the lens), which makes it possible to use it as an autofocus device. According to some embodiments, differential (different) forces from the bimorph actuator 3508 can move light along the X, Y axis, which can be used as an optical image stabilizer. By appropriately controlling each actuator, OIS (optical image stabilization) and AF (auto focus) functions can be simultaneously realized. For some embodiments, three actuators are used. The electrical circuit 3506 with the SMA actuator includes one or more contacts 3520 for transmitting control signals to actuate the SMA actuator. According to some embodiments including four SMA actuators, the circuit 3506 with an SMA actuator includes four power circuit control contacts and one common return contact for each SMA actuator.

FIG. 37 illustrates a perspective view of an SMA bimorph liquid lens according to one embodiment. FIG. 38 illustrates a cross-sectional view and a bottom view of an SMA bimorph liquid lens according to one embodiment.

Fig. 39 illustrates an SMA system including an SMA actuator 3902 with a bimorph actuator according to one embodiment. The SMA actuator 3902 comprises four bimorph actuators using the techniques described herein. As shown in fig. 40, two bimorph actuators are configured as positive z-stroke actuators 3904 and two bimorph actuators are configured as negative z-stroke actuators 3906, wherein SMA actuators 3902 with bimorph actuators are shown according to one embodiment. The opposing

actuators

3906, 3904 are configured to control movement in both directions throughout a range of travel. This enables adjustment of the control code to compensate for tilting. For the various embodiments, two SMA wires 3908 attached to the top of the component achieve positive z-stroke displacement. Two SMA wires attached to the bottom of the component can achieve a negative z-stroke displacement. For some embodiments, each bimorph actuator is attached to an object (e.g., lens carrier 3910) by engaging the object with a tab. The SMA system includes a top spring 3912, the top spring 3912 configured to provide stability to the lens carrier 3910 in an axis perpendicular to the z-axis of travel (e.g., in the directions of the x-axis and the y-axis). Further, the top spacer 3914 is configured to be disposed between the top spring 3912 and the SMA actuator 3902. The bottom spacer 3916 is disposed between the SMA actuator 3902 and the bottom spring 3918. The bottom spring 3918 is configured to provide stability to the lens carrier 3910 in an axis perpendicular to the z-travel axis (e.g., in the directions of the x-axis and the y-axis). The bottom spring 3918 is configured to be disposed on a base 3920 (e.g., a base as described herein).

Fig. 41 shows the length 4102 of the bimorph actuator 4103 and the location of the patch pads 4104, the patch pads 4104 being used to extend the wire length of the SMA wire 4206 beyond the bimorph actuator. Wires longer than bimorph actuators are used to increase travel and force. Thus, the extension length 4108 of the SMA wire 4206 beyond the bimorph actuator 4103 is used to set the stroke and force of the bimorph actuator 4103.

Fig. 42 shows an exploded view of an SMA system including an SMA bimorph actuator 4202 according to one embodiment. According to various embodiments, the SMA system is configured to use separate metallic materials and non-conductive adhesives to create one or more circuits to independently power the SMA wires. Some embodiments do not affect AF size and include four bimorph actuators, such as those described herein. The two bimorph actuators are configured as positive z-stroke actuators and the two bimorph actuators are configured as negative z-stroke actuators. FIG. 43 illustrates an exploded view of a sub-portion of an SMA actuator according to one embodiment. The sub-section includes a negative actuator signal connection 4302, a base 4304 with a bimorph actuator 4306. The negative actuator signal connection 4302 includes a wiring pad 4308 for connecting SMA wires of the bimorph actuator 4306 using techniques including those described herein. The negative actuator signal connector 4302 is secured to the base 4304 using an adhesive layer 4310. The subsection also includes a positive actuator signal connection 4314, the positive actuator signal connection 4314 carrying a wiring pad 4316 for connecting the SMA wires 4312 of the bimorph actuator 4306 using techniques including those described herein. The positive actuator signal connection 4314 is secured to the base 4304 using an adhesive layer 4318. Each of the base 4304, the negative actuator signal connector 4302, and the positive actuator signal connector 4314 is formed of metal, such as stainless steel. The connection pads 4322 on each of the base 4304, the negative actuator signal connection 4302, and the positive actuator signal connection 4314 are configured to electrically couple control signals and ground to actuate the bimorph actuator 4306 using techniques including those described herein. For some embodiments, the connection pad 4322 is gold plated. FIG. 44 illustrates a subsection of an SMA actuator in accordance with one embodiment. For some embodiments, gold-plated pads are formed on the stainless steel layer for solder bonding or other known electrical termination methods. Furthermore, the formed wiring pads are used for signal joints to electrically couple SMA wires for power signals.

FIG. 45 illustrates a five-axis sensor shift system according to one embodiment. The five-axis sensor displacement system is configured to move an object (e.g., an image sensor) along the five axes relative to one or more lenses. Including X/Y/Z axis translational and pitch/roll tilting. Optionally, the system is configured to use only four axes (i.e., X/Y axis translation and pitch/roll tilt) and has a separate AF on top to perform the Z motion. Other embodiments include a five-axis sensor displacement system configured to move one or more lenses relative to an image sensor. For some embodiments, the static lens stack is mounted on a top cover and inserted into the ID (without touching the inside orange moving carriage).

FIG. 46 illustrates an exploded view of a five-axis sensor shift system according to one embodiment. The five-axis sensor shift system includes: two circuit components, namely, a flexible sensor circuit 4602, a bimorph actuator circuit 4604; and 8-12 bimorph actuators 4606 built on the bimorph circuit member using techniques including those described herein. The five-axis sensor shift system includes a movement bracket 4608 configured to hold one or more lenses and a housing 4610. According to one embodiment, the bimorph actuator circuit 4604 includes 8-12 SMA actuators, such as the SMA actuators described herein. The SMA actuator is configured to move the movement carriage 4608 along five axes (e.g., x-direction, y-direction, z-direction, pitch, and roll), similar to other five axis systems described herein.

Figure 47 illustrates an SMA actuator comprising a bimorph actuator integrated into the circuit for all movement, according to one embodiment. Embodiments of SMA actuators may include 8-12 bimorph actuators 4606. However, other embodiments may include more or fewer bimorph actuators. Fig. 48 illustrates an SMA actuator 4802 according to one embodiment, the SMA actuator 4802 comprising a bimorph actuator integrated into the circuit for all movement, and the SMA actuator 4802 is formed in part to fit within a respective housing 4804. FIG. 49 illustrates a cross section of a five-axis sensor shift system in accordance with one embodiment.

Fig. 50 illustrates an SMA actuator 5002 including a bimorph actuator according to one embodiment. The SMA actuator 5002 is configured to move an image sensor, a lens, or other various payloads in the x-direction and the y-direction using four side-mounted SMA bimorph actuators 5004. Figure 51 shows a top view of an SMA actuator comprising a bimorph actuator that moves an image sensor, lens or other various payloads to different x and y positions.

Fig. 52 illustrates an SMA actuator including a bimorph actuator 5202 configured as a cassette bimorph autofocus device according to one embodiment. Four top and bottom mounted SMA bimorph actuators (e.g., the SMA bimorph actuators described herein) are configured to move together to produce movement in the z-stroke direction for autofocus movement. Fig. 53 illustrates an SMA actuator comprising a bimorph actuator according to one embodiment, and wherein two top mounted bimorph actuators 5302 are configured to push down one or more lenses. Fig. 54 illustrates an SMA actuator comprising a bimorph actuator according to one embodiment, and wherein two bottom mounted bimorph actuators 5402 are configured to urge one or more lenses upward. Fig. 55 illustrates an SMA actuator including a bimorph actuator to show four top and bottom mounted SMA bimorph actuators 5502, such as described herein, for moving the one or more lenses to produce tilting motion, according to one embodiment.

Figure 56 illustrates an SMA system including an SMA actuator comprising a bimorph actuator configured to two-axis lens shift OIS according to one embodiment. For some embodiments, the two-axis lens shift OIS is configured to move the lens along the X/Y axis. For some embodiments, the Z-axis movement comes from individual AFs, such as those described herein. Four bimorph actuators push the sides of the autofocus device for OIS movement. Fig. 57 shows an exploded view of an SMA system including an SMA actuator 5802 according to one embodiment, the SMA actuator 5802 comprising a bimorph actuator 5806 configured as a two-axis lens-shifted OIS. Fig. 58 illustrates a cross section of an SMA system including an SMA actuator 5802 according to one embodiment, the SMA actuator 5802 comprising a bimorph actuator 5806 configured as a two-axis lens-shifted OIS. Fig. 59 illustrates a cassette bimorph actuator 5802 for an SMA system according to one embodiment, the cassette bimorph actuator 5802 configured as shaped to fit a two-axis lens shift OIS previously manufactured by the system. Such a system may be configured as OIS with a high OIS trip (e.g., +/-200um or higher). Furthermore, such embodiments are configured to have a wide range of motion and good OIS dynamic tilting using four slide bearings (e.g., POM slide bearings). These embodiments are configured to be easily integrated with an AF design (e.g., VCM or SMA).

Figure 60 illustrates an SMA system including an SMA actuator comprising a bimorph actuator configured as a five-axis lens shift OIS and an autofocus device according to one embodiment. For some embodiments, the five axis lens shift OIS and autofocus device are configured to move the lens along the X/Y/Z axis. For some embodiments, pitch and yaw axis motions are used for dynamic tilt tuning capabilities. Using the techniques described herein, eight bimorph actuators are used to move the autofocus device and OIS. Fig. 61 illustrates an exploded view of an SMA system including an SMA actuator 6202 according to one embodiment, the SMA actuator 6202 comprising a bimorph actuator 6204 according to one embodiment, the bimorph actuator 6204 being configured as a five-axis lens shifting OIS and autofocus device. Fig. 62 illustrates a cross section of an SMA system including an SMA actuator 6202 according to one embodiment, the SMA actuator 6202 comprising a bimorph actuator 6204 configured as a five-axis lens shift OIS and autofocus device. Fig. 63 illustrates a cassette bimorph actuator 6202 for an SMA system according to one embodiment, the cassette bimorph actuator 6202 being configured as shaped to fit a five-axis lens shifting OIS and autofocus device previously manufactured by the system. Such a system may be configured with OIS with high OIS travel (e.g., +/-200um or higher) and high autofocus travel (e.g., 400um or higher). Furthermore, such an embodiment enables any tilt to be eliminated and does not require a separate autofocus assembly.

Figure 64 illustrates an SMA system including an SMA actuator comprising a bimorph actuator configured to push a cassette outward according to one embodiment. For some embodiments, the bimorph actuator assembly is configured to be wrapped around an object such as a lens holder. The X/Y/Z stiffness of the flexible portion is low as the circuit assembly moves with the lens carrier. The tail pad of the circuit is static. The push-out cassette may be configured as four or eight bimorph actuators. Thus, the push-out cassette may be configured as four bimorph actuators on the OIS side and move in the X and Y axes. The push-out cassette may be configured as four bimorph actuators on the top and bottom of the autofocus device to move in the z-axis. The push-out box may be configured as eight bimorph actuators on the OIS and autofocus device top, bottom and sides to move in the x, y and z axes and may tilt (pitch/roll/yaw) on the 3-axis. Fig. 65 illustrates an exploded view of an SMA system including an SMA actuator 6602 according to one embodiment, the SMA actuator 6602 comprising a bimorph actuator 6604 configured to urge the cassette outward. Thus, the SMA actuator is configured such that a bimorph actuator acts on the housing 6504 to move the lens carrier 6506 using the techniques described herein. Fig. 66 illustrates an SMA system including an SMA actuator 6602 according to one embodiment, the SMA actuator 6602 comprising a bimorph actuator configured to push a cassette outwardly, the cassette being shaped in part to receive a lens carrier 6604. Fig. 67 illustrates an SMA system including an SMA actuator 6602 having a bimorph actuator 6604 according to one embodiment, the bimorph actuator 6604 configured to push a cassette outward as shaped to fit into a previously manufactured cassette of the system.

Fig. 68 illustrates an SMA system including an SMA actuator 6802 according to one embodiment, the SMA actuator 6802 comprising a bimorph actuator configured to displace OIS by a tri-axis sensor. For some embodiments, the z-axis movement is from a separate autofocus system. The four bimorph actuators are configured to push the sides of the sensor carriage 6804 to move OIS using the techniques described herein. Fig. 69 illustrates an exploded view of an SMA including an SMA actuator 6802 according to one embodiment, the SMA actuator 6802 comprising a bimorph actuator configured to displace OIS of a three-axis sensor. Figure 70 illustrates a cross section of an SMA system including an SMA actuator 6802 according to one embodiment, the SMA actuator 6802 comprising a bimorph actuator 6806 configured as a tri-axis sensor-shifted OIS. Fig. 71 illustrates components of a cassette bimorph actuator 6802 for an SMA system configured as shaped to fit into a tri-axial sensor displacement OIS previously manufactured by the system, according to one embodiment. FIG. 72 illustrates a flexible sensor circuit for an SMA system configured as a three-axis sensor-shifted OIS, according to one embodiment. Such a system may be configured with OIS with high OIS travel (e.g., +/-200um or higher) and high autofocus travel (e.g., 400um or higher). Furthermore, such embodiments are configured to have a wide range of two-axis motion and good OIS dynamic tilting using four slide bearings (e.g., POM slide bearings). These embodiments are configured to be easily integrated with an AF design (e.g., VCM or SMA).

Fig. 73 illustrates an SMA system including an SMA actuator 7302 according to one embodiment, the SMA actuator 7302 comprising a bimorph actuator 7304 configured to six-axis sensor shift OIS and autofocus device. For some embodiments, the six-axis sensor-shifted OIS and autofocus device are configured to move the lens on X/Y/Z/pitch/yaw/roll axes. For some embodiments, pitch and yaw axis motions are used for dynamic tilt tuning capabilities. Using the techniques described herein, eight bimorph actuators are used to move the autofocus and OIS device. Figure 74 illustrates an exploded view of an SMA system including an SMA actuator 7402 according to one embodiment, the SMA actuator 7402 comprising a bimorph actuator 7404 configured as a six-axis sensor-shifted OIS and autofocus device. Fig. 75 illustrates a cross section of an SMA system including an SMA actuator 7402 according to one embodiment, the SMA actuator 7402 comprising a bimorph actuator configured as a six-axis sensor-shifted OIS and autofocus device. Fig. 76 shows a cassette bimorph actuator 7402 for an SMA system according to one embodiment, the cassette bimorph actuator 7402 being configured as shaped to fit a six-axis sensor-shifted OIS and autofocus device previously manufactured for the system. FIG. 77 illustrates a flexible sensor circuit for an SMA system configured as a tri-axis sensor displacement OIS, according to one embodiment. Such a system may be configured with OIS with high OIS travel (e.g., +/-200um or higher) and high autofocus travel (e.g., 400um or higher). Furthermore, such an embodiment enables any tilt to be eliminated and does not require a separate autofocus assembly.

Figure 78 illustrates an SMA system including an SMA actuator comprising a bimorph actuator configured as a two-axis camera tilt OIS according to one embodiment. For some embodiments, the two-axis camera tilt OIS is configured to move the camera in the pitch/yaw axis. Using the techniques described herein, four bimorph actuators are used to push the top and bottom of the autofocus device throughout the camera motion to achieve OIS pitch and yaw motions. Fig. 79 illustrates an exploded view of an SMA system including an SMA actuator 7902 according to one embodiment, the SMA actuator 7902 comprising a bimorph actuator 7904 configured as a two-axis camera tilt OIS. Figure 80 illustrates a cross-section of an SMA system including an SMA actuator comprising a bimorph actuator configured as a two-axis camera tilt OIS according to one embodiment. FIG. 81 illustrates a cassette bimorph actuator for an SMA system configured as shaped to fit a two-axis camera tilt OIS previously manufactured by the system, according to one embodiment. Fig. 82 illustrates a flexible sensor circuit for an SMA system configured as a two-axis camera tilt OIS, according to one embodiment. Such a system may be configured as OIS with high OIS travel (e.g., plus or minus 3 degrees or higher). These embodiments are configured to be easily integrated with an autofocus ("AF") design (e.g., VCM or SMA).

Figure 83 illustrates an SMA system including an SMA actuator comprising a bimorph actuator configured to tilt OIS with a three-axis camera according to one embodiment. For some embodiments, the two-axis camera tilt OIS is configured to move the camera along a pitch/yaw/roll axis. Using the techniques described herein, four bimorph actuators are used to push the top and bottom of the autofocus device throughout the camera motion to achieve OIS pitch and yaw motions, and four bimorph actuators are used to push the sides of the autofocus device throughout the camera motion to achieve OIS roll motions. Fig. 84 illustrates an exploded view of an SMA system including an SMA actuator 8402 according to one embodiment, the SMA actuator 8402 comprising a bimorph actuator 8404 configured as a three-axis camera tilt OIS. Figure 85 illustrates a cross section of an SMA system including an SMA actuator comprising a bimorph actuator configured to tilt OIS with a three-axis camera according to one embodiment. Figure 86 illustrates a cassette bimorph actuator for an SMA system configured as shaped to fit a triaxial camera tilt OIS previously manufactured for the system, according to one embodiment. Fig. 87 illustrates a flexible sensor circuit for an SMA system configured as a three-axis camera tilt OIS according to one embodiment. Such a system may be configured as OIS with high OIS travel (e.g., plus or minus 3 degrees or higher). These embodiments are configured to be easily integrated with an AF design (e.g., VCM or SMA).

Fig. 88 illustrates exemplary dimensions of a bimorph actuator of an SMA actuator according to various embodiments. These dimensions are preferred embodiments, but those skilled in the art will appreciate that other dimensions may be used based on the desired characteristics of the SMA actuator.

Fig. 89 illustrates a lens system for a folded camera according to one embodiment. The folded camera includes a folded lens 8902, the folded lens 8902 configured to bend light to a lens system 8901 including one or more lenses 8903 a-d. For some embodiments, the folded lens is any one or more of a prism and a lens. The lens system 8901 is configured to have a principal axis 8904, the principal axis 8904 being at an angle to a transmission axis 8906, the transmission axis 8906 being parallel to the direction of travel of the light before it reaches the folded lens 8902. For example, a folded camera may be used in a camera phone system to reduce the height of the lens system 8901 in the direction of the transmission axis 8906.

Embodiments of the lens system include one or more liquid lenses, such as those described herein. The embodiment shown in fig. 89 includes two liquid lenses 8903b, d, such as those described herein. The one or more liquid lenses 8903b, d are configured to be actuated using techniques including those described herein. Actuators including, but not limited to, buckling actuators, bimorph actuators, and other SMA actuators are used to actuate the liquid lens. FIG. 108 illustrates a liquid lens actuated using a buckling actuator 60 according to one embodiment. The liquid lens includes a shaped ring coupler 64, a liquid lens assembly 61, one or more buckling actuators 60 such as described herein, a sliding base 65, and a base 62. The one or more buckling actuators 60 are configured to move the shaping ring/coupler 64 to change the shape of the flexible membrane of the liquid lens assembly 61 to move or shape light rays, e.g., as described herein. For some embodiments, three or four actuators are used. The liquid lens may be configured alone or in combination with other lenses to function as an auto-focusing device or an optical image stabilizer. The liquid lens may also be configured to direct an image onto the image sensor in other ways.

Fig. 90 illustrates several embodiments of a lens system 9001, said lens system 9001 comprising liquid lenses 9002a-h to focus an image on an image sensor 9004. As shown, the liquid lenses 9002a-h can have any lens shape and are configured to dynamically configure to adjust an optical path through the lenses using techniques including those described herein.

The lens system for a folded camera is configured to include an actuated folded lens 9100. An example of an actuated folding lens is a prism tilting device, such as shown in fig. 91. In the example shown in fig. 91, the folded lens is a prism 9102 provided on an actuator 9104. Including, but not limited to, SMA actuators including those described herein. For some embodiments, the prism tilting device is disposed on an SMA actuator that includes four bimorph actuators 9106 (e.g., those described herein). According to some embodiments, the actuated folding lens 9100 is configured as an optical image stabilizer using techniques including those described herein. For example, the actuated folding lens is configured to include an SMA system such as the SMA system shown in fig. 39. Another example of an actuated folding lens may include an SMA actuator such as the SMA actuator shown in fig. 21. However, the folded lens may also include other actuators.

FIG. 92 illustrates a bimorph arm with offset according to one embodiment. The bimorph arm 9201 includes a bimorph beam 9202 having a shaped offset 9203. Shaping the offset 9203 adds mechanical advantage to create higher forces than a bimorph arm without an offset. According to some embodiments, the depth 9204 of the offset (also referred to herein as the bending plane z-offset 9204) and the length 9206 of the offset (also referred to herein as the valley width 9206) are configured to define characteristics of the bimorph arm, such as peak force. For example, the graph in fig. 106 shows the relationship between the bending plane z-offset 9204, the valley width 9206, and the peak force of the bimorph beam 9202 according to one embodiment.

The bimorph arm includes one or more SMA materials, such as SMA strips or SMA wires 9210, such as those described herein. The SMA material is secured to the beam using techniques including those described herein. For some embodiments, SMA material (e.g., SMA wire 9210) is attached to the fixed end 9212 of the bimorph arm and the load point end 9214 of the bimorph arm such that the shaping offset 9203 is between the two ends of the fixed SMA material. For various embodiments, the ends of the SMA material are electrically and mechanically coupled to contacts configured to supply electrical current to the SMA material using techniques including those known in the art. Bimorph arms with offsets may be included in SMA actuators and systems such as those described herein.

FIG. 93 illustrates a bimorph arm with an offset and limiter according to one embodiment. The bimorph arm 9301 includes a bimorph beam 9302 having a shaped offset 9303 and a limiter 9304 adjacent the shaped offset 9303. The offset 9303 adds mechanical advantage to create a higher force than a bimorph arm 9301 without offset, and the limiter 9304 prevents the arm from moving away from the unfixed load point end 9306 of the bimorph actuator. A bimorph arm 9301 with a shaped offset 9303 and limiter 9304 can be included in SMA actuators and systems such as those described herein. The bimorph arm 9301 includes one or more SMA materials such as those described herein, for example SMA strips or SMA wires 9308, and these SMA materials are secured to the bimorph arm 9301 using techniques including those described herein.

FIG. 94 illustrates a bimorph arm with an offset and limiter according to one embodiment. The bimorph arm 9401 includes a bimorph beam 9402, the bimorph beam 9402 having a shaped offset 9403 and a limiter 9404 adjacent the shaped offset 9403. The limiter 9404 is formed as part of the base 9406 of the bimorph arm 9401. The base 9406 is configured to receive the bimorph arm 9401 and includes a recess 9408, the recess 9408 being configured to receive an offset portion of the bimorph beam. The bottom of the recess is configured as a limiter 9404 adjacent to the forming offset 9403. The base 9406 may also include one or more portions 9410 configured to support certain portions of the bimorph arm when the bimorph arm is not actuated. A bimorph arm 9401 with a shaped offset 9403 and limiter 9404 can be included in SMA actuators and systems such as those described herein. The bimorph arm 9401 includes one or more SMA materials, such as those described herein, for example SMA strips or wires, secured to the bimorph arm 9401 using techniques including those described herein.

Fig. 95 illustrates an embodiment of a base including a bimorph arm with an offset according to one embodiment. The bimorph arm 9501 includes a bimorph beam 9502 having a shaped offset 9504. The bimorph arm may also include a limiter using techniques including those described herein. The bimorph arm 9501 includes one or more SMA materials such as those described herein, for example SMA strips or SMA wires 9506, secured to the bimorph arm 9501 using techniques including those described herein.

Fig. 96 illustrates an embodiment of a base 9608 including two bimorph arms with offsets according to one embodiment. Each bimorph arm 9601a, b includes a bimorph beam 9602a, b having a shaped offset 9604a, b. Each bimorph arm 9601a, b has one or more SMA materials such as those described herein, e.g., SMA strips or SMA wires 9606a, b, secured to the bimorph arm 9501 using techniques including those described herein. Each bimorph arm 9601a, b may also include a limiter using techniques including those described herein. Some embodiments include a base that includes more than two bimorph arms formed using techniques including those described herein. According to some embodiments, bimorph arm 9601 is integrally formed with base 9608. For other embodiments, one or more of the bimorph arms 9602a, b are formed separately from the base 9608 and secured to the base 9608 using techniques including, but not limited to, welding, resistance welding, laser welding, and adhesive. For some embodiments, two or more bimorph arms 9601a, b are configured to act on a single object. This enables an increase in the force applied to the object. The following graph in fig. 107 illustrates an example of how the box volume of an approximate box surrounding the entire bimorph actuator is related to the work of each bimorph member. The length of the bimorph actuator 9612, the width of the bimorph actuator 9610, and the height of the bimorph actuator 9614 are used to approximate the cartridge volume (collectively, "cartridge volume").

FIG. 97 illustrates a buckling arm including a point of load extension according to one embodiment. The flex arm 9701 includes a beam portion 9702 and one or more load point extensions 9704a, b extending from the beam portion 9702. Each end 9706a, b of the flex arms 9701 is configured to be secured to or integrally formed with a plate or other base using techniques including those described herein. According to some embodiments, the one or more load point extensions 9704a, b are fixed to the beam portion 9702 with an offset from the load points 9710a, b of the beam portion 9702 or are integrally formed with the beam portion 9702. Load points 9710a, b are portions of beam portion 9702 that are configured to transfer the force of flexure arm 9701 to another object. For some embodiments, the load points 9710a, b are the centers of the beam portions 9702. For other embodiments, the load points 9710a, b are at locations outside the center of the beam portion 9702. The load point extensions 9704a, b are configured to extend from the points at which they are connected to the beam portion 9702 toward the load points 9710a, b of the beam portion 9702 along the longitudinal axis direction of the beam portion 9702. For some embodiments, the ends of the load point extensions 9704a, b extend at least to the load points 9710a, b of the beam portion 9702. The flexure arm 9701 includes one or more SMA materials such as those described herein, for example SMA strips or wires 9712.SMA material (e.g., SMA wires 9712) is secured at opposite ends of the beam portion 9702. The SMA material is secured to opposite ends of the beam portion using techniques including those described herein. For some embodiments, the length of the load point extensions 9704a, b may be configured to be any length contained within the longitudinal length of the associated flat (unactuated) beam portion 9702 of the flexure arm 9701.

FIG. 98 illustrates a buckling arm 9801 including a point of load extension 9810 in an actuated position according to one embodiment. The SMA material attached to the opposite end of the beam portion 9802 is actuated using techniques including those described herein. The load point 9804 enables the flex arm 9801 to increase the range of travel compared to flex arms without extensions. Thus, a greater maximum vertical travel of the flexor arm including the point of load extension may be achieved. A flexure arm with a point-of-load extension may be included in SMA actuators and systems such as those described herein.

Figure 99 illustrates a bimorph arm including a point of load extension according to one embodiment. The bimorph arm 9901 includes a beam portion 9902 and one or more load point extensions 9904a, b extending from the beam portion. One end of the bimorph arm 9901 is configured to be secured to or integrally formed with a plate or other base using techniques including those described herein. The end of beam portion 9902 opposite the fixed or integrally formed end is not fixed and is free to move. According to some embodiments, the one or more load point extensions 9904a, b are fixed to the beam portion 9902 offset from the free end of the beam portion 9902 or are integrally formed with the beam portion 9902. The load point extensions 9904a, b are configured to extend from the point at which they are connected to the beam portion 9902, in a direction away from a plane including the longitudinal axis of the beam portion 9902. For example, the one or more load point extensions 9904a, b extend toward the free end of the beam portion in the direction of extension when actuated. Some embodiments of the bimorph arm 9901 include one or more load point extensions 9904a, b, the longitudinal axes of the one or more load point extensions 9904a, b forming an angle with a plane including the longitudinal axis of the beam portion that includes 1 to 90 degrees. For some embodiments, the ends 9910a, b of the point-of-load extensions 9904a, b are configured to engage an object configured to move.

The bimorph arm 9901 includes one or more SMA materials such as those described herein, for example SMA strips or SMA wires 9906.SMA material (e.g., SMA wires 9906) is secured at opposite ends of the beam portion 9902. The SMA material is secured to opposite ends of the beam portion 9902 using techniques including those described herein. For some embodiments, the length of the point-of-load extensions 9904a, b may be configured to any length. According to some embodiments, the location of the point of engagement of the ends 9910a, b of the load point extensions 9904a, b with the object may be configured at any point along the longitudinal length of the beam portion 9902. The height of the end of the load point extension above the beam portion when the beam portion is flat (unactuated) may be configured to any height. For some embodiments, the load point extension may be configured to be at least over other portions of the bimorph arm when the bimorph arm is actuated.

Figure 100 illustrates a bimorph arm including a point of load extension in an actuated position according to one embodiment. The SMA material secured to the opposite end of the beam portion 2 is actuated using techniques including those described herein. The point of load extension 10 enables the bimorph arm 1 to increase the stroke force compared to a bimorph arm without an extension. Thus, the bimorph arm 1 including the load point extension 10 enables the bimorph arm 1 to apply a greater force. The bimorph arm 1 with the point of load extension 10 may be included in an SMA actuator and system such as described herein.

FIG. 101 illustrates an SMA optical image stabilizer, according to one embodiment. The SMA optical image stabilizer 20 includes a moving plate 22 and a static plate 24. The moving plate 22 includes a spring arm 26 integrally formed with the moving plate 22. For some embodiments, the moving plate 22 and the stationary plate 24 are each formed as a unitary, monolithic plate. The moving plate 22 includes a first SMA material attachment portion 28a and a second SMA material attachment portion 28b. The static plate 24 includes a first SMA material attachment portion 30a and a second SMA material attachment portion 30b. Each SMA material attachment portion 28, 30 is configured to secure SMA material, such as SMA wire, to a plate using a resistance welded joint. The first SMA material attachment portion 28a of the moving plate 22 includes a first SMA wire 32a disposed between it and the first SMA material attachment portion 30a of the static plate and a second SMA wire 32b disposed between it and the second SMA attachment portion 30b of the static plate 24. The second SMA material attachment portion 28b of the moving plate 22 includes a third SMA wire 32c disposed between it and the second SMA material attachment portion 30b of the static plate and a fourth SMA wire 32d disposed between it and the first SMA attachment portion 30a of the static plate 24. Each SMA wire is actuated using techniques including those described herein to move the moving plate 22 away from the stationary plate 24. Fig. 102 illustrates the SMA material attachment portion 40 of the moving part according to one embodiment. The SMA material attachment portion is configured to resistance weld SMA material (e.g., SMA wire 41) to SMA material attachment portion 40. Fig. 103 shows the SMA attachment portion 42 of the static plate with the resistance welded SMA wire 43 attached thereto, according to one embodiment.

FIG. 104 illustrates an SMA actuator 45 that includes a buckling actuator, according to one embodiment. The buckling actuator 46 includes a buckling arm 47 such as described herein. Qu Qubei 47 are configured to move along the z-axis when SMA wires 48 are actuated and de-actuated using techniques including those described herein. Each SMA wire 48 is attached to a respective resistance welded wire crimp 49 using resistance welding. Each resistance weld wire crimp 49 includes an island structure 50 on at least one side of the SMA wire 48 that is isolated from the metal 51 forming the flexure arms 47. The island structure may be used in other actuators, optical image stabilizers, and auto-focusing systems to connect at least one side of an SMA wire to an isolated island structure formed in a base metal layer, such as the OIS application shown in fig. 101.

Figure 105 illustrates a resistance weld crimp including an island structure for attaching SMA wires 48 to a buckling actuator 46 using techniques including those described herein, according to one embodiment. Fig. 105A shows the bottom of SMA actuator 45. According to some embodiments, SMA actuator 45 is formed from a stainless steel base layer 51. A dielectric layer 52 (e.g., a polyimide layer) is provided on the bottom of the stainless steel base layer 51. According to some embodiments, conductor layer 53 is electrically connected to stainless steel island structure 50 through vias in dielectric layer 52, thereby enabling electrical connection between wires soldered to stainless steel island structure 50 and conductor circuits attached to the stainless steel island structure. According to some embodiments, island structures 50 are etched from a stainless steel base layer. Dielectric layer 52 maintains the position of island structures 50 within stainless steel base layer 51. The island structure 50 is configured to attach SMA wires thereto using techniques (e.g., resistance welding) including those described herein. Fig. 105B shows the top of the SMA actuator 45 including the island structure 50. For some embodiments, glue or adhesive may also be applied on top of the weld to help improve mechanical strength and to act to relieve fatigue strain during handling and impact loading.

FIG. 108 includes a lens system including an SMA actuator having a buckling actuator, according to one embodiment. The lens system includes a liquid lens assembly 61 disposed on a base 62. The lens system also includes a shaping ring/coupler 64 mechanically coupled to the buckling actuator 60. An SMA actuator comprising a buckling actuator 60 such as described herein is disposed on a sliding base 65, the sliding base 65 being disposed on a base 62. The SMA actuator is configured to move the shaping ring/coupler 64 along the optical axis of the liquid lens assembly 61 by actuating the buckling actuator 60 using techniques including those described herein. This moves the shaping ring/coupler 64 to change the focus of the liquid lens in the liquid lens assembly.

FIG. 109 illustrates an unfixed load point end of a bimorph arm according to one embodiment. The unfixed load point end 70 of the bimorph arm includes a flat surface 71 for securing SMA material (e.g., SMA wire 72). SMA wire 72 is secured to planar surface 71 by a resistive weld 73. The resistance weld 73 is formed using techniques including those known in the art.

Figure 110 illustrates an unfixed load point end of a bimorph arm according to one embodiment. The unfixed load point end 76 of the bimorph arm includes a flat surface 77 for securing SMA material (e.g., SMA wire 78). The SMA wire 78 is secured to the planar surface 77 by a resistive weld, similar to that shown in fig. 109. An adhesive 79 is disposed on the resistance weld. This makes the bond between the SMA wire 78 and the unfixed load point end 76 more reliable. The adhesive 79 includes, but is not limited to, conductive adhesives, nonconductive adhesives, and other adhesives known in the art.

FIG. 111 illustrates an unfixed load point end of a bimorph arm according to one embodiment. The unfixed load point end 80 of the bimorph arm includes a flat surface 81 for securing SMA material (e.g., SMA wire 82). A metal intermediate layer (interlayer) 84 is provided on the flat surface 81. The metal intermediate layer 84 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. SMA wire 82 is secured to a metal intermediate layer 84 disposed on planar surface 81 by a resistive weld 83. The resistive weld 83 is formed using techniques including those known in the art. The metal intermediate layer 84 provides better adhesion to the unfixed load point end 80.

FIG. 112 illustrates an unfixed load point end of a bimorph arm according to one embodiment. The unfixed load point end 88 of the bimorph arm includes a flat surface 89 for securing SMA material (e.g., SMA wire 90). A metal intermediate layer 92 is provided on the flat surface 89. The metal intermediate layer 92 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 90 is secured to the planar surface 89 by a resistive weld, similar to that shown in fig. 111. An adhesive 91 is provided on the resistive weld. This makes the bond between the SMA wire 90 and the unfixed load point end 88 more reliable. The adhesive 91 includes, but is not limited to, conductive adhesives, nonconductive adhesives, and other adhesives known in the art.

FIG. 113 illustrates a fixed end of a bimorph arm according to one embodiment. The fixed end 95 of the bimorph arm includes a planar surface 96 for securing SMA material (e.g., SMA wire 97). SMA wire 97 is secured to planar surface 96 by a resistive weld 98. The resistive weld 98 is formed using techniques including those known in the art.

FIG. 114 illustrates a fixed end of a bimorph arm according to one embodiment. The fixed end 120 of the bimorph arm includes a planar surface 121 for securing SMA material (e.g., SMA wire 122). The SMA wire 122 is secured to the planar surface 121 by a resistive weld, similar to that shown in fig. 113. An adhesive 123 is disposed on the resistance weld. This makes the bond between the SMA wire 122 and the fixed end 120 more reliable. Adhesive 123 includes, but is not limited to, conductive adhesives, nonconductive adhesives, and other adhesives known in the art.

FIG. 115 illustrates a fixed end of a bimorph arm according to one embodiment. The fixed end 126 of the bimorph arm includes a planar surface 127 for securing SMA material (e.g., SMA wire 128). A metal intermediate layer 130 is provided on the planar surface 127. The metal intermediate layer 130 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. The SMA wire 128 is secured to a metal intermediate layer 130 disposed on the planar surface 127 by a resistive weld 129. The resistive weld 129 is formed using techniques including those known in the art. The metal intermediate layer 130 provides better adhesion to the fixed end 126.

FIG. 116 illustrates a fixed end of a bimorph arm according to one embodiment. The fixed end 135 of the bimorph arm includes a planar surface 136 for securing SMA material (e.g., SMA wire 137). A metal intermediate layer 138 is disposed on the planar surface 136. The metal intermediate layer 136 includes, but is not limited to, a gold layer, a nickel layer, or an alloy layer. Similar to that shown in fig. 115, SMA wire 137 is secured to planar surface 136 by a resistive weld. An adhesive 139 is disposed on the resistance weld. This makes the bond between the SMA wire 137 and the fixed end 135 more reliable. The adhesive 139 includes, but is not limited to, conductive adhesives, nonconductive adhesives, and other adhesives known in the art.

FIG. 117 illustrates a rear view of a fixed end of a bimorph arm according to one embodiment. The bimorph arm 143 is configured according to embodiments described herein. The fixed end 143 of the bimorph arm includes an island structure 144 isolated from an outer portion 145 of the fixed end 143. This electrically and/or thermally isolates the island structures 144 from the outer portion 145. For some embodiments, SMA material secured to the opposite side of the fixed end 143 of the bimorph arm is electrically coupled to SMA material (e.g., SMA wire) through a via. Island structures 144 are disposed on insulators 146, such as described herein. Island structures 144 may be formed using etching techniques including those known in the art.

It will be understood that terms such as "top," "bottom," "above," "below," and x-, y-, and z-directions are used herein for convenience to refer to the spatial relationship of parts relative to one another, and not to any particular spatial or gravitational direction. Accordingly, these terms are intended to encompass an assembly of parts, whether the assembly is oriented in the particular direction shown in the figures and described in the specification, upside down from that direction, or any other rotationally varying orientation.

It is to be understood that the term "invention" as used herein should not be interpreted as representing only a single invention having a single basic element or group of elements. Similarly, it will also be appreciated that the term "invention" encompasses a number of individual innovations, each of which may be considered a separate invention. Although the present invention has been described in detail with respect to the preferred embodiments and the accompanying drawings thereof, it should be apparent to those skilled in the art that various modifications and variations can be made to the embodiments of the present invention without departing from the spirit and scope of the invention. In addition, the techniques described herein may be used to fabricate devices having two, three, four, five, six, or more typically n numbers of bimorph actuators and buckling actuators. Accordingly, it is to be understood that the detailed description and drawings set forth above are not intended to limit the breadth of the present invention, which should be inferred only from the appended claims and their legal equivalents as properly interpreted.

Claims

1. An actuator, the actuator comprising:

a beam portion, wherein the beam portion includes a shaped offset;

a fixed end;

a load point end configured for movement, the beam portion disposed between the fixed end and the load point end, the beam portion extending along a length direction between the fixed end and the load point end, the forming offset being offset relative to a remainder of the beam portion along a direction transverse to the length direction;

a first electrical contact disposed on the fixed end;

a second electrical contact disposed on the load point end; and

SMA material secured to a first electrical contact disposed on the fixed end and a second electrical contact disposed on the load point end.

2. The actuator of claim 1, comprising a limiter.

3. An actuator according to claim 1, wherein the load point end is configured to secure the SMA material using a resistive weld.

4. An actuator according to claim 1, wherein the fixed end is configured to fix the SMA material using a resistive weld.

5. The actuator of claim 4, wherein the fixed end comprises a planar surface.

6. An actuator according to claim 5, wherein the SMA material is secured to the planar surface by the resistive weld.

7. The actuator of claim 6, wherein an adhesive is disposed on at least a portion of the planar surface and the resistive weld.

8. The actuator of claim 5, comprising a metallic intermediate layer disposed on the planar surface.

9. The actuator of claim 3, wherein the fixed end comprises a planar surface.

10. An actuator according to claim 9, wherein the SMA material is secured to the planar surface by the resistive weld.

11. The actuator of claim 10, wherein an adhesive is disposed on at least a portion of the planar surface and the resistive weld.

12. The actuator of claim 9, comprising a metallic intermediate layer disposed on the planar surface.

13. An actuator according to claim 10, comprising an island structure formed on the fixed end on the side opposite the resistance weld, the island structure being electrically coupled with the SMA material.

14. The actuator of claim 1, comprising a limiter configured adjacent to the shaped offset.

15. The actuator of claim 14, wherein the limiter is formed as part of a base.

16. An actuator according to claim 1, wherein the SMA material is an SMA wire.

17. The actuator of claim 1, comprising one or more point-of-load extensions.

18. The actuator of claim 17, wherein the one or more load point extensions are formed at an angle to the beam portion.

19. The actuator of claim 17, wherein the one or more load point extensions are formed parallel to the beam portion.

20. An actuator, the actuator comprising:

a base; and

one or more bimorph arms, the one or more bimorph arms comprising:

a beam portion, wherein the beam portion of the one or more bimorph arms includes a shaped offset,

fixed end

A first electrical contact disposed on the fixed end;

a second electrical contact disposed on the load point end; and

21. An actuator according to claim 20, wherein the SMA material of the one or more bimorph arms is an SMA wire.

22. The actuator of claim 20, wherein the bimorph arm is integrally formed with the base.

23. The actuator of claim 20, wherein at least one of the fixed end and the load point end of the one or more bimorph arms comprises a planar surface.

24. The actuator of claim 23, wherein the SMA material of the one or more bimorph arms is secured to the planar surface of at least one of the fixed end and the load point end by a resistive weld.

25. The actuator of claim 24, wherein an adhesive is disposed on the planar surface and the resistive weld of at least one of the fixed end and the load point end.

26. The actuator of claim 24, wherein at least one of the fixed end and the load point end comprises a metallic intermediate layer disposed on the planar surface.

27. An actuator according to claim 24, comprising an island structure formed on at least one of the fixed end and the load point end on a side opposite the resistance weld, the island structure being electrically coupled with the SMA material.

28. The actuator of claim 20, wherein the one or more bimorph arms include a limiter configured adjacent the shaped offset.