TW202223237A - Cryopump system and monitoring method for cryopump - Google Patents

Abstract

A cryopump system mounted on a vacuum process device, the cryopump system including at least one cryopump, a cryopump controller that controls the cryopump, a network that connects the cryopump to the cryopump controller and transmits information related to the cryopump between the cryopump and the cryopump controller, and a cryopump monitor that is connected to the network and displays the information related to the cryopump, which is transmitted via the network, in which the cryopump controller is disposed in a casing of the vacuum process device, and the cryopump monitor is disposed outside the casing of the vacuum process device.

Description

Cryopump system and monitoring method thereof

The present invention relates to a cryopump system and a monitoring method thereof. This application claims priority based on Japanese Patent Application No. 2020-194876 filed on November 25, 2020. The entire contents of the Japanese application are incorporated in this specification by reference.

A cryopump is a vacuum pump that traps gas molecules on a cryoplate cooled to an extremely low temperature by condensation or adsorption and discharges them. The cryopump is mounted on a vacuum sequencer to realize a clean vacuum environment required in a semiconductor circuit manufacturing process or the like. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2008-2333

[Problems to be Solved by Invention]

The inventors of the present invention have found the following problems as a result of examining a cryopump system mounted on a vacuum sequencer. It would be very convenient to be able to view information related to the cryopump while the vacuum sequencer is in operation. Such information is particularly useful in determining the cause of an anomaly or returning to a normal state in the event of any anomaly. Therefore, a solution is considered in which a display unit for displaying information and a cryopump are integrally assembled. However, even so, in fact, many times during operation the information cannot be viewed. This is because the cryopump is installed in the vacuum sequencer, so even if the display unit is provided, it is often hidden from view. Furthermore, for safety reasons to avoid dangerous contact with high voltages or high-energy beams used in the vacuum sequencer, it is required that a person cannot physically access the internal structure of the vacuum sequencer such as a cryopump while the vacuum sequencer is in operation. elements. When the operation of the vacuum sequencer is stopped, the display unit can be viewed close to the cryopump, but the stoppage of the operation of the device causes a drop in productivity, which is not preferable.

One of the exemplary objects of an embodiment of the present invention is to provide a cryopump system that can easily confirm information related to the cryopump during the operation of the vacuum sequencer. [Technical means to solve problems]

According to one embodiment of the present invention, there is provided a cryopump system mounted on a vacuum sequencer. The cryopump system has: at least one cryopump; a cryopump controller, which controls the cryopump; a network that connects the cryopump and the cryopump controller, and transmits cryopump-related information between the cryopump and the cryopump controller ; and a cryopump monitor, connected to a network, to display information about cryopumps transmitted over the network. The cryopump controller is arranged in the housing of the vacuum sequencer, and the cryopump monitor is arranged outside the housing of the vacuum sequencer.

According to an embodiment of the present invention, there is provided a method of monitoring a cryopump system mounted on a vacuum sequencer. The cryopump system includes: at least one cryopump; a cryopump controller, which is arranged in the housing of the vacuum sequencer to control the cryopump; and a network that connects the cryopump and the cryopump controller, and controls the cryopump and the cryopump. The information related to the cryopump is transmitted between the devices. The method includes the steps of connecting the cryopump monitor to the network and disposing it outside the housing of the vacuum procedure device; and displaying the cryopump related information transmitted through the network on the cryopump monitor.

In addition, any combination of the above constituent elements, constituent elements or expressions of the present invention are replaced with each other among methods, apparatuses, systems, and the like, which are also effective as embodiments of the present invention. [Effect of invention]

According to the present invention, it is possible to provide a cryopump system capable of easily confirming information related to the cryopump during the operation of the vacuum sequencer.

Hereinafter, the form for implementing this invention is demonstrated in detail, referring drawings. In the description and drawings, the same or equivalent components, members, and processes are denoted by the same reference numerals, and overlapping descriptions are appropriately omitted. The proportions or shapes of the respective parts of the drawings are appropriately set for convenience of description, and are not to be limitedly construed unless otherwise specified. The embodiments are illustrative, and do not limit the scope of the present invention at all. All the features and combinations described in the embodiments are not necessarily essential parts of the invention.

FIG. 1 is a schematic diagram showing a cryopump system 100 according to the embodiment. The cryopump system 100 is mounted on the vacuum sequencer 200 and is used to evacuate the vacuum container 202 of the vacuum sequencer 200 to a desired degree of vacuum. The vacuum sequencer 200 is configured to process a to-be-processed object such as a wafer by a desired vacuum sequence, for example, in a vacuum environment in the vacuum chamber 202 . The vacuum process device 200 may be, for example, an ion implantation device, a sputtering device, a vapor deposition device, or other vacuum process devices.

The vacuum sequencer 200 includes a main controller 204 and a housing 206 in addition to the vacuum container 202 . The main controller 204 is configured to control the communication between the vacuum sequencer 200 and the cryopump system 100 . The main controller 204 constitutes a control device for controlling the vacuum sequencer 200, or may also constitute a part of such a control device. The housing 206 forms an outer casing of the vacuum sequencer 200 and houses various components of the vacuum sequencer 200 . The vacuum vessel 202 and the main controller 204 are arranged in the housing 206 .

The housing 206 may be an outer box that covers the entire face of the vacuum sequencer 200 . The housing 206 may be provided with: a frame structure in which the constituent elements of the vacuum sequencer 200 are arranged and supported; a panel member that separates the interior of the vacuum sequencer 200 from the exterior; and an openable or closable door for viewing from the outside Access the interior of the vacuum sequencer 200 . Panel components and door leaves can be mounted on the frame construction. The housing 206 may have, for example, a radiation shielding material such as lead, to prevent radiation that may occur in the vacuum procedure device 200 from leaking to the outside.

Alternatively, the housing 206 may not cover the entire surface of the vacuum sequencer 200 . It is also possible to open a portion of the housing 206 so that a portion of the vacuum sequencer 200 can be viewed from the outside.

The cryopump system 100 includes: at least one cryopump 10 ; at least one compressor 12 ; a cryopump controller 110 ; a network 120 ; and a cryopump monitor 130 .

The cryopump 10 is installed in the vacuum container 202 to evacuate the vacuum container 202 of the vacuum sequencer 200 . Thereby, the cryopump 10 and the vacuum container 202 are arranged in the housing 206 of the vacuum sequencer 200 . An exemplary configuration of the cryopump 10 that can be used in the cryopump system 100 of the embodiment will be described later with reference to FIG. 2 .

The compressor 12 is provided to supply and discharge a refrigerant gas to an expander (described later) provided in the cryopump 10 . The compressor 12 is connected to the expander of the cryopump 10 through the gas pipeline 13 and is disposed outside the casing 206 of the vacuum sequencer 200 . The gas line 13 includes a high-pressure line 13a that connects the compressor 12 and the expander to supply refrigerant gas from the compressor 12 to the expander, and a low-pressure line 13b that connects the compressor 12 and the expander to connect the compressor 12 to the expander. The refrigerant gas is recovered from the expander to the compressor 12 . An exemplary structure of the compressor 12 used in the cryopump system 100 of the embodiment will be described later with reference to FIG. 3 .

In addition, in the cryopump system 100 , a plurality of cryopumps 10 , for example, several to several tens, or more cryopumps 10 may be provided. In addition, in order to supply and discharge refrigerant gas to the cryopumps 10 , a plurality of compressors 12 may be installed in the cryopump system 100 .

The cryopump controller 110 is configured to centrally control the cryopump system 100 according to instructions received from the main controller 204 . Furthermore, the cryopump controller 110 is configured to transmit information related to the cryopump system 100 to the main controller 204 . Thereby, the cryopump controller 110 can control the cryopump 10 and the compressor 12 according to the instructions from the main controller 204, and can send the information related to the cryopump 10 and the information related to the compressor 12 to the main controller 204.

The cryopump controller 110 is communicably connected to the main controller 204 via the first communication line 208 . The first communication line 208 may be, for example, a communication cable such as RS-232C. Like the main controller 204 , the cryopump controller 110 is arranged in the housing 206 of the vacuum sequencer 200 .

In the internal structure of the cryopump controller 110, the hardware structure can be realized by components or circuits represented by the CPU or memory of the computer, and the software structure can be realized by computer programs, etc. The ground is drawn as functional blocks realized by such cooperation. Those skilled in the art can of course understand that these functional blocks are implemented in various forms by a combination of hardware and software. For example, the cryopump controller 110 can be realized by a combination of a CPU (Central Processing Unit), a processor (hardware) such as a microcomputer, and a software program executed by the processor (hardware).

The network 120 connects the cryopump 10 and the cryopump controller 110 in a communicable manner. The cryopump system 100 transmits information related to the cryopump 10 between the cryopump 10 and the cryopump controller 110 through the network 120 . The cryopump 10 is connected to the cryopump controller 110 through the second communication line 122 . The second communication line 122 may be, for example, a communication cable such as RS-485.

The network 120 can also connect the compressor 12 and the cryopump controller 110 in a communicative manner. The cryopump system 100 transmits information related to the compressor 12 between the compressor 12 and the cryopump controller 110 through the network 120 . The compressor 12 is connected to the cryopump controller 110 via the third communication line 123 . The third communication line 123 may be, for example, a communication cable such as RS-485.

The cryopump monitor 130 is configured to be connected to the network 120 , and displays information related to the cryopump 10 transmitted through the network 120 . Additionally or alternatively, the cryopump monitor 130 may also be configured to display information related to the compressor 12 transmitted over the network 120 .

The cryopump monitor 130 is not connected to the network 120 through the main controller 204 . That is, the cryopump monitor 130 is configured not to communicate with the main controller 204 of the vacuum sequencer 200 . In this embodiment, the cryopump monitor 130 is connected to the cryopump controller 110 via the fourth communication line 124 . The fourth communication line 124 may be, for example, a communication cable such as RS-485.

The cryopump monitor 130 is disposed outside the housing 206 of the vacuum sequencer 200 . The cryopump monitor 130 is disposed away from the housing 206 . In this embodiment, the cryopump monitor 130 is arranged in the compressor 12 or its vicinity. The cryopump monitor 130 may be detachably attached to the compressor 12 . Alternatively, the cryopump monitor 130 may be installed on a monitor installation surface installed near the compressor 12 . The monitor installation surface may be, for example, a wall surface near the compressor 12 or a surface of a machine near the compressor 12 . The cryopump monitor 130 may be configured as a device that the operator can carry.

An exemplary configuration of the cryopump monitor 130 that can be used in the cryopump system 100 of the embodiment will be described later with reference to FIG. 4 .

FIG. 2 is a schematic diagram showing an example of the cryopump 10 that can be used in the cryopump system 100 of the embodiment. The cryopump 10 includes: an expander 14 ; a cryopump container 16 ; a radiation shield 18 ; and a cryopanel 20 . Furthermore, the cryopump 10 includes a pressure sensor 21 , a roughing valve 24 , a purge valve 26 , and a vent valve 28 , which are provided in the cryopump container 16 .

The compressor 12 is configured to recover the refrigerant gas from the expander 14 , pressurize the recovered refrigerant gas, and supply the refrigerant gas to the expander 14 again. The expander 14 is also called a cold head, and together with the compressor 12 constitutes a cryogenic refrigerator. The expander 14 is also sometimes referred to as a "refrigerator". The circulation of the refrigerant gas between the compressor 12 and the expander 14 is performed by a combination of appropriate pressure fluctuations and volume fluctuations of the refrigerant gas in the expander 14, thereby constituting a thermodynamic cycle for generating cold, and the expander 14 can provide Very low temperature cooling. The refrigerant gas is usually helium, but suitable other gases may also be used. For ease of understanding, the flow direction of the refrigerant gas is indicated by arrows in FIG. 1 . As an example, the cryogenic refrigerator is a two-stage Gifford-McMahon (GM) refrigerator, but it may also be a pulse tube refrigerator, a Stirling refrigerator, or other types of cryogenic refrigerators.

Cryopump vessel 16 is a vacuum vessel that is designed to maintain a vacuum during the evacuation operation of cryopump 10 and can withstand the pressure of the surrounding environment (eg, atmospheric pressure). The cryopump container 16 includes a cryopanel accommodating portion 16a having an air inlet 17 and a refrigerator accommodating portion 16b. The cryopanel housing portion 16a has a dome-like shape in which the intake port 17 is opened and the opposite side thereof is closed, and the radiation shield 18 and the cryopanel 20 are accommodated therein. The refrigerator housing portion 16b has a cylindrical shape, one end is fixed to the room temperature portion of the expander 14, the other end is connected to the cryopanel housing portion 16a, and the expander 14 is inserted therein. Furthermore, the pressure sensor 21 measures the pressure in the cryopump container 16 .

The radiation shield 18 is thermally connected to the first cooling stage of the expander 14, and is cooled to a first cooling temperature (eg, 80K to 120K). The cryopanel 20 is thermally connected to the second cooling stage of the expander 14, and is cooled to a second cooling temperature (eg, 10K to 20K) lower than the first cooling temperature. The radiation shield 18 is disposed in the cryopump container 16 so as to surround the cryopanel 20 , and shields heat input from the cryopump container 16 and the surrounding environment to the cryopanel 20 . The gas entering from the suction port 17 of the cryopump 10 is trapped in the cryopanel 20 by condensation or adsorption. Furthermore, a first temperature sensor 22 for measuring the temperature of the radiation shield 18 and a second temperature sensor 23 for measuring the temperature of the cryopanel 20 are provided in the cryopump container 16 . As the structure of the cryopump 10 such as the arrangement and shape of the radiation shield 18 and the cryopanel 20 , various well-known structures can be appropriately adopted, and therefore, detailed descriptions thereof are omitted here.

The roughing valve 24 is attached to the cryopump container 16, for example, the refrigerator housing portion 16b. The roughing valve 24 is connected to a roughing pump (not shown) provided outside the cryopump 10 . The roughing pump is a vacuum pump used to evacuate the cryopump 10 to its operation start pressure. When the roughing valve 24 is opened under the control of the cryopump controller 110, the cryopump container 16 is connected to the roughing pump, and when the roughing valve 24 is closed, the cryopump container 16 and the roughing pump are blocked. The cryopump 10 can be decompressed by opening the roughing valve 24 and operating the roughing pump.

The purge valve 26 is attached to the cryopump container 16, for example, the cryopanel housing portion 16a. The purge valve 26 is connected to a purge gas supply device (not shown) provided outside the cryopump 10 . When the purge valve 26 is opened under the control of the cryopump controller 110, the purge gas is supplied to the cryopump container 16, and when the purge valve 26 is closed, the supply of purge gas to the cryopump container 16 is blocked. The purge gas may be, for example, nitrogen or other dry gas, and the temperature of the purge gas may be adjusted to, for example, room temperature, or may be heated to a temperature higher than room temperature. By opening the purge valve 26 and introducing the purge gas into the cryopump container 16, the cryopump 10 can be increased in pressure. In addition, the cryopump 10 can be heated from an extremely low temperature to room temperature or higher.

The vent valve 28 is attached to the cryopump container 16, for example, the refrigerator housing portion 16b. The vent valve 28 is provided to discharge the fluid from the inside of the cryopump 10 to the outside. The fluid exiting the vent valve 28 is essentially a gas, but can also be a liquid or a mixture of gas and liquid. The vent valve 28 can be opened or closed under the control of the cryopump controller 110 . In addition, the vent valve 28 can be mechanically opened by the pressure difference between the inside and outside of the cryopump container 16 . The vent valve 28 is configured to also function as a safety valve for releasing the pressure to the outside when excess pressure occurs in the cryopump container 16 .

In addition, the expander 14 is provided with a variable speed expander motor 30 that drives the expander 14 . The expander motor 30 has an inverter, and the motor operating frequency can be changed under the control of the cryopump controller 110 .

The cryopump controller 110 can control the expander motor 30 according to the cooling temperature of the radiation shield 18 (or the cryopanel 20 ) during the evacuation operation of the cryopump 10 . For example, the cryopump controller 110 may control the operating frequency of the expander motor 30 in such a manner that the cooling temperature of the radiation shield 18 is kept constant.

In addition, during the regeneration operation of the cryopump 10, the cryopump controller 110 may control the rough pumping according to the pressure in the cryopump container 16 (or, if necessary, according to the temperature of the cryopanel 20 and the pressure in the cryopump container 16). Valve 24 , purge valve 26 , vent valve 28 , expander motor 30 .

The cryopump 10 includes an input/output circuit 32 that integrates transmission and reception of the cryopump 10 and the cryopump controller 110 . The input/output circuit 32 may be, for example, an I/O module or a remote I/O unit. The input/output circuit 32 and each device of the cryopump 10 are, for example, the pressure sensor 21 , the first temperature sensor 22 , the second temperature sensor 23 , the rough valve 24 , the suction valve 26 , the vent valve 28 , the expander The various machines such as the motor 30 are electrically connected to transmit and receive signals. In addition, the input/output circuit 32 is communicably connected to the cryopump controller 110 via the second communication line 122 .

Therefore, the cryopump 10 transmits a measured pressure signal representing the measured pressure in the cryopump container 16 by the pressure sensor 21 to the cryopump controller 110 through the input/output circuit 32 (and the second communication line 122 ). The cryopump 10 transmits a measured temperature signal representing the measured temperature of each of the first temperature sensor 22 and the second temperature sensor 23 to the cryopump controller 110 through the input/output circuit 32 . Then, the cryopump 10 transmits a valve state signal indicating the open or closed state of each valve (ie, the rough valve 24 , the suction valve 26 , and the vent valve 28 ) to the cryopump controller 110 through the input/output circuit 32 . The cryopump 10 transmits a motor state signal indicating the on or off state and the operating frequency of the expander motor 30 to the cryopump controller 110 through the input/output circuit 32 .

In addition, the cryopump 10 receives the valve control signal from the cryopump controller 110 indicating the operation command for each valve through the I/O circuit 32, and the I/O circuit 32 transmits the valve control signal to the corresponding valve. The valve receiving the valve control signal opens or closes according to the valve control signal. Likewise, the cryopump 10 receives a motor control signal from the cryopump controller 110 indicating an operation command to the expander motor 30 through the input/output circuit 32 , and the input/output circuit 32 sends the motor control signal to the expander motor 30 . The expander motor 30 is turned on or off or the operating frequency is controlled according to the motor control signal.

In addition, in this embodiment, each cryopump 10 is not provided with a liquid crystal panel or monitor that displays information related to the cryopump 10, such as the measured pressure, the measured temperature, the operating state of each valve or the expander motor 30, etc. department.

FIG. 3 is a schematic diagram showing an example of the compressor 12 that can be used in the cryopump system 100 of the embodiment. The compressor 12 includes a high-pressure gas outlet 50, a low-pressure gas inlet 51, a high-pressure flow path 52, a low-pressure flow path 53, a first pressure sensor 54, a second pressure sensor 55, a bypass line 56, and a compressor body. 57 and compressor housing 58.

The high-pressure gas outlet 50 is provided in the compressor casing 58 as a working gas discharge port of the compressor 12 , and the low-pressure gas inlet 51 is provided in the compressor casing 58 as a working gas suction port of the compressor 12 . The high pressure line 13a is connected to the high pressure gas outlet 50 and the low pressure line 13b is connected to the low pressure gas inlet 51 . The high-pressure flow path 52 connects the discharge port of the compressor body 57 to the high-pressure gas outlet 50 , and the low-pressure flow path 53 connects the low-pressure gas inlet 51 to the suction port of the compressor body 57 . The compressor casing 58 accommodates the high-pressure flow path 52 , the low-pressure flow path 53 , the first pressure sensor 54 , the second pressure sensor 55 , the bypass line 56 , and the compressor body 57 . The compressor 12 is also referred to as a compressor unit.

The compressor main body 57 is configured to internally compress the working gas sucked from the suction port and discharge the working gas from the discharge port. The compressor body 57 may be, for example, a scroll type, a rotary type, or another pump that pressurizes the working gas. The compressor body 57 may include a variable speed compressor motor 57a. The compressor motor 57a has an inverter, and the motor operating frequency can be changed under the control of the cryopump controller 110 . In this way, the compressor body 57 can be configured to change the flow rate of the working gas to be discharged. Alternatively, the compressor body 57 may be configured to discharge a fixed constant flow rate of the working gas. The compressor body 57 is also referred to as a compression chamber.

The first pressure sensor 54 is arranged in the high-pressure flow path 52 to measure the pressure of the working gas flowing through the high-pressure flow path 52 . The second pressure sensor 55 is disposed in the low-pressure flow path 53 to measure the pressure of the working gas flowing through the low-pressure flow path 53 . Therefore, the first pressure sensor 54 and the second pressure sensor 55 can also be referred to as a high pressure sensor and a low pressure sensor, respectively.

The bypass line 56 connects the high-pressure flow path 52 and the low-pressure flow path 53 so that the working gas bypasses the expander 14 and flows back from the high-pressure flow path 52 to the low-pressure flow path 53 . An overflow valve 60 is provided in the bypass line 56 for opening or closing the bypass line 56 or for controlling the flow rate of the working gas flowing through the bypass line 56 . The relief valve 60 is configured to open when a pressure difference equal to or higher than the set pressure acts between the inlet and outlet. The relief valve 60 may be an on-off valve or a flow control valve, for example, a solenoid valve. The setting pressure can be appropriately set based on the designer's experience, or by the designer's experiments, simulation tests, and the like. Thereby, the pressure difference between the high-pressure line 13a and the low-pressure line 13b can be prevented from becoming too large beyond the set pressure.

As an example, the relief valve 60 may be opened or closed by control based on the cryopump controller 110 . The cryopump controller 110 can control the overflow valve 60 in the following manner: compare the measured pressure difference between the high pressure line 13a and the low pressure line 13b with the set pressure, and open the overflow valve when the measured pressure difference is higher than the set pressure. The flow valve 60 closes the relief valve 60 when the measured pressure difference is less than the set pressure difference. The cryopump controller 110 can acquire the measured pressure difference between the high-pressure line 13 a and the low-pressure line 13 b from the measured pressures of the first pressure sensor 54 and the second pressure sensor 55 . As another example, the relief valve 60 may be configured to operate as a so-called safety valve, that is, to mechanically open when a pressure difference equal to or greater than a set pressure acts between the inlet and outlet.

In addition, in this embodiment, the compressor 12 is provided with the operation panel 62 for operating the compressor 12 . The operation panel 62 is provided in the compressor casing 58 . The operation panel 62 is provided with an operation unit 63 , a control unit 64 , and a display unit 65 . The operation part 63 has input means, such as an operation button, for receiving the operation of the compressor 12 by an operator. The control unit 64 is attached to the inside of the operation panel 62 , and controls each device of the compressor 12 , such as the compressor body 57 (compressor motor 57 a ) and the relief valve 60 , according to the operation of the operation unit 63 . The display unit 65 is controlled by the control unit 64 and displays information related to the compressor 12 .

The control unit 64 of the compressor 12 can operate as an input/output circuit (eg, an I/O module or a remote I/O unit) that integrates transmission and reception of the compressor 12 and the cryopump controller 110 . Therefore, the control unit 64 is electrically connected to each device of the compressor 12, such as the first pressure sensor 54, the second pressure sensor 55, the compressor body 57 (compressor motor 57a), the relief valve 60, and other devices, to send and receive signals. In addition, the control unit 64 is communicably connected to the cryopump controller 110 via the third communication line 123 .

Therefore, the compressor 12 transmits, to the cryopump controller 110 , the measured pressure signal indicating the measured pressure of each of the first pressure sensor 54 and the second pressure sensor 55 through the control unit 64 . In addition, the compressor 12 transmits, to the cryopump through the control unit 64, a motor state signal indicating the on or off state and the operating frequency of the compressor motor 57a, and a valve state signal indicating the open or closed state or the opening degree of the relief valve 60 controller 110.

Then, the compressor 12 receives a motor control signal from the cryopump controller 110 indicating an operation command to the compressor motor 57a through the control unit 64, and the control unit 64 transmits the motor control signal to the compressor motor 57a. The compressor motor 57a is turned on or off, or the operating frequency is controlled according to the motor control signal. Similarly, the compressor 12 receives the valve control signal from the cryopump controller 110 indicating the operation command to the relief valve 60 through the control unit 64 , and the control unit 64 sends the valve control signal to the relief valve 60 . The relief valve 60 is opened or closed according to the valve control signal.

In addition, the compressor 12 may have other various components. For example, an oil separator, an adsorber, or the like may be provided in the high-pressure flow path 52 . A tank and other components may be provided in the low-pressure flow path 53 . In addition, the compressor 12 may be provided with an oil circulation system for cooling the compressor body 57 with oil, a cooling system for cooling the oil with cooling water, or the like.

FIG. 4 is a schematic diagram showing an example of a cryopump monitor 130 that can be used in the cryopump system 100 of the embodiment. The cryopump monitor 130 includes an operation unit 132 , an input/output circuit 134 , and a display unit 136 .

The operation unit 132 has input means such as various operation buttons for receiving the operation of the cryopump system 100 (eg, the cryopump 10 and the compressor 12 ) by the operator. The operation unit 132 is electrically connected to the input/output circuit 134 to transmit an operation signal indicating the operation of the operation unit 132 to the input/output circuit 134 . The cryopump controller 110 receives the operation signal through the input/output circuit 134 (and the fourth communication line 124 ), and controls the cryopump 10 (or the compressor 12 ) according to the operation signal. In this example, the operation unit 132 is provided at the lower part of the cryopump monitor 130 .

The input/output circuit 134 is installed inside the cryopump monitor 130 , and is communicably connected to the cryopump controller 110 via the fourth communication line 124 . The input/output circuit 134 may be, for example, an I/O module or a remote I/O unit. The fourth communication line 124 is connected to a connector provided on the cryopump monitor 130, and may also be connected to the input/output circuit 134 through the connector.

The display portion 136 is electrically connected to the input-output circuit 134 to receive signals from the input-output circuit 134 representing information related to the cryopump 10 and/or information related to the compressor 12 . The display unit 136 displays information related to the cryopump 10 and/or the compressor 12 according to the signal received from the cryopump controller 110 by the input/output circuit 134 . As an example, the display unit 136 includes a display panel unit 136a and a display lamp unit 136b. The display panel portion 136a may be, for example, a liquid crystal panel or other display device capable of displaying numbers, characters, symbols, etc. representing information related to the cryopump 10 and/or the compressor 12 . The display light portion 136b may also be, for example, an LED light or other indicators, which are turned on or off to indicate information related to the cryopump 10 and/or the compressor 12 . In this example, the display unit 136 is provided on the upper portion of the cryopump monitor 130 .

As the information related to the cryopump 10 that can be displayed on the display unit 136 , for example, the following examples are given, but the present invention is not limited thereto. Based on the current measured values of the sensors mounted on the cryopump 10 (for example, the measured pressure of the pressure sensor 21, the measured temperature of the first temperature sensor 22, the measured temperature of the second temperature sensor 23, etc. ) The current operating state of the equipment mounted on the cryopump 10 (for example, the open or closed state of the rough valve 24, the open or closed state of the suction valve 26, the open or closed state of the vent valve 28, the conduction of the expander motor 30 or off state (ie, the on or off state of the cryopump 10, etc.), the operating frequency of the expander motor 30, etc.) Operation history of the cryopump 10 (for example, the operation duration of the cryopump 10, the elapsed time since the regeneration of the cryopump 10, the number of times of completion of the regeneration of the cryopump 10, the occurrence of the cryopump 10 during the operation of the cryopump 10 Related alarms, communication time between the cryopump 10 and the cryopump controller 110, past measurement values based on the sensors mounted on the cryopump 10, past operating states of the equipment mounted on the cryopump 10, etc.) Internal parameters of the cryopump 10 (for example, the set cooling temperature of the radiation shield 18 and cryopanel 20 for performing the evacuation operation of the cryopump 10 , the temperature for adjusting the radiation shield 18 (or the cryopanel 20 ) (for example, control gain for controlling PID, etc.), various regeneration parameters that define conditions for performing regeneration of cryopump 10, such as temperature, pressure, timing of opening or closing of each valve, etc.) · Other parameters related to the cryopump 10 (eg, the serial number of the cryopump 10 , etc.) · Various commands for operating the cryopump 10

In addition, as the information related to the compressor 12 that can be displayed on the display unit 136, for example, the following examples are given, but the present invention is not limited thereto. Based on the current measured values of the sensors mounted on the compressor 12 (for example, the measured pressure of the first pressure sensor 54, the measured pressure of the second pressure sensor 55, the first pressure sensor 54 and the 2. Differential pressure of the measured pressure of the pressure sensor 55, etc.) The current operating state of the equipment mounted on the compressor 12 (the set value of the differential pressure between the high-pressure flow path 52 and the low-pressure flow path 53, the ON or OFF state of the compressor motor 57a (that is, the ON or OFF state of the compressor 12) state), the operating frequency of the compressor motor 57a, the open or closed state or the opening degree of the relief valve 60, the flow rate of the cooling water for cooling the compressor body 57, etc.) Operation history of the compressor 12 (operation duration of the compressor 12, use time of the adsorber, alarms related to the compressor 12 that occurred during the operation of the compressor 12, alarms based on the sensors mounted on the compressor 12 past measured values, past operating states of the equipment mounted on the compressor 12, etc.) · Internal parameters of compressor 12 · Other parameters related to compressor 12 · Various commands for operating the compressor 12

In addition, the cryopump monitor 130 may include a memory unit such as a large storage area, or may be connectable to an external memory device. Past measured values, operating states, or other displayable information of the cryopump system 100 are stored in the memory unit or memory device, and can be accessed from the cryopump monitor 130 as needed to be displayed on the cryopump monitor 130 .

In addition, the cryopump monitor 130 prompts information intuitively, and can also prompt by auditory or other methods.

The monitoring method of the cryopump system 100 according to the embodiment includes the steps of connecting the cryopump monitor 130 to the network 120 and arranging it outside the casing 206 of the vacuum sequencer 200 . For example, the cryopump monitor 130 is connected to the cryopump controller 110 via the fourth communication line 124 . Thereby, the cryopump monitor 130 is connected to the network 120 and is disposed outside the housing 206 of the vacuum sequencer 200 . Since the cryopump controller 110 is disposed in the housing 206 of the vacuum sequencer 200 , it is difficult to perform the communication between the cryopump monitor 130 and the cryopump controller 110 during the operation of the cryopump system 100 (ie, during the operation of the vacuum sequencer 200 ). connect. Therefore, it is preferable to perform the connection operation of the cryopump monitor 130 before the operation of the cryopump system 100 .

The monitoring method of the cryopump system 100 further includes the step of displaying the information related to the cryopump 10 transmitted through the network 120 on the cryopump monitor 130 . Furthermore, the method may also include the step of displaying the information related to the compressor 12 transmitted through the network 120 on the cryopump monitor 130 . These displays may be performed while the cryopump system 100 is in operation, or may be performed while the operation of the cryopump system 100 is stopped.

As described above, in the cryopump system 100 , the information related to the cryopump 10 and the information related to the compressor 12 are all collected in the cryopump controller 110 . The network 120 used for communication in the cryopump system 100 is configured to broadcast communication data (including information related to the cryopump 10 (or the compressor 12 )) to all nodes, for example, like RS-485. Therefore, by connecting the cryopump monitor 130 to the network 120 (eg, the cryopump controller 110 ), the cryopump monitor 130 can obtain (also may be referred to as intercepting) the communication between the cryopump controller 110 and the cryopump 10 (or the cryopump controller 110 ). The communication data transmitted between the compressors 12) through the network 120. In this way, the cryopump monitor 130 can display information related to the cryopump 10 (or the compressor 12 ) according to the acquired communication data.

The monitoring method of the cryopump system 100 may further include the step of controlling the cryopump system 100 according to the operation of the cryopump monitor 130 . As described above, the cryopump controller 110 can receive the operation signal generated by the operator operating the operation unit 132 through the input/output circuit 134 (and the fourth communication line 124 ), and control the cryopump 10 (or the compressor 12 ) according to the operation signal . For example, as the operation of the cryopump system 100 by the operator using the cryopump monitor 130 , the following examples are given, but not limited thereto. Turning on or off of the cryopump 10 Start of regeneration of cryopump 10 and selection of regeneration mode Operation of equipment mounted on the cryopump 10 (for example, the opening or closing operation of the rough valve 24, the suction valve 26, the breather valve 28, the change of the operating frequency of the expander motor 30, etc.) Calibration of sensors mounted on cryopump 10, such as pressure sensor 21 (eg, atmospheric pressure adjustment, zero point adjustment) Turning on or off of compressor 12

As mentioned at the beginning of this specification, it would be very convenient to be able to check the information related to the cryopump 10 during the operation of the vacuum sequencer 200 . Such information is particularly useful in determining the cause of the abnormality or returning to a normal state if any abnormality occurs in the cryopump system 100 .

However, most of the existing cryopump products are not equipped with such an information display tool, so it takes a long time to analyze the abnormality and return to normal. In this case, the cryopump system 100 is connected to the vacuum sequencer 200 , so information related to the cryopump system 100 can be obtained from the vacuum sequencer 200 . However, in practice, the vacuum sequencer 200 is generally not designed to be able to access so-called information related to the cryopump system 100 . Therefore, this method does not necessarily guarantee that the information needed to analyze the abnormality and return to normal can be obtained. Furthermore, as one of the reasons for the abnormality, it may also be suspected that the communication between the main controller 204 of the vacuum sequencer 200 and the cryopump system 100 is abnormal.

Therefore, a solution of integrating the display unit for displaying information and the cryopump 10 is considered. However, even so, in fact, many times during operation the information cannot be viewed. This is because the cryopump 10 is installed in the vacuum sequencer 200 , so even if the display unit is provided, it is hidden from view in most cases. Furthermore, for safety reasons to avoid dangerous contact with high voltages or high-energy beams used in the vacuum sequencer 200, it is required that a person cannot physically access the vacuum sequencer such as the cryopump 10 during the operation of the vacuum sequencer 200. 200's internal components. When the operation of the vacuum sequencer 200 is stopped, the display unit can be viewed close to the cryopump 10, but the stoppage of the operation of the apparatus causes a decrease in productivity, which is not preferable.

On the other hand, according to the embodiment, the cryopump monitor 130 is disposed outside the housing 206 of the vacuum sequencer 200, and the cryopump monitor 130 displays information related to the cryopump 10 (and/or the compressor 12), Therefore, the operator can easily confirm the displayed information related to the cryopump 10 (and/or the compressor 12 ) at hand during the operation of the vacuum sequencer 200 . By viewing the cryopump monitor 130, the operator can obtain the required information at any time in a safe place. When any abnormality occurs in the cryopump system 100 , the operator can quickly determine the cause of the abnormality or restore the normal state by using the information obtained from the cryopump monitor 130 .

Furthermore, according to the embodiment, the cryopump monitor 130 does not need to be connected to the network 120 through the main controller 204 . For example, the cryopump monitor 130 is connected to the network 120 by being directly connected to the cryopump controller 110 . Thereby, even if the abnormality of the main controller 204 or the abnormality of the communication between the cryopump controller 110 and the main controller 204 is suspected, the cryopump monitor 130 can obtain information from the cryopump controller 110 and display it . In addition, the cryopump monitor 130 can also acquire information from the cryopump controller 110 that cannot be acquired by the main controller 204 (the main controller 204 is set to monitor information of a cryopump other than the object) and display it.

Furthermore, according to the embodiment, the cryopump monitor 130 includes the operation unit 132 for operating the cryopump system 100 . Therefore, in addition to operating the cryopump system 100 through the main controller 204 of the vacuum sequencer 200 , necessary operations of the cryopump system 100 can also be performed from the cryopump monitor 130 .

The present invention has been described above based on the embodiments. The present invention is not limited to the above-described embodiment, and various design changes are possible, and it will be understood by those skilled in the art that various modifications can be made, and such modifications are also included in the scope of the present invention.

In the above-described embodiment, the compressor 12 and the cryopump monitor 130 are connected to the cryopump controller 110 via respective communication cables (the third communication line 123 and the fourth communication line 124). In one embodiment, the third communication line 123 and the fourth communication line 124 may be integrated into a single communication cable drawn at the end portion, and the compressor 12 and the cryopump monitor 130 may be connected to the compressor 12 and the cryopump monitor 130 using the single communication cable. The cryopump controller 110 is connected.

Instead of directly connecting the cryopump monitor 130 and the cryopump controller 110 , the cryopump monitor 130 may be connected to the network 120 through a wired connection with the compressor 12 and disposed in the housing 206 of the vacuum sequencer 200 . outside. At this time, the connection operation of the cryopump monitor 130 may be performed before the operation of the cryopump system 100 , or may be performed during the operation of the cryopump system 100 . In addition, the cryopump monitor 130 can be connected to the network 120 by being connected to other nodes on the network 120 (eg, the cryopump 10 ), and is disposed outside the housing 206 of the vacuum sequencer 200 .

The cryopump monitor 130 may be mounted integrally with the compressor 12 . For example, the operation panel 62 provided on the compressor 12 may be configured to operate as the cryopump monitor 130 .

The cryopump monitor 130 can be set to be able to switch between valid and invalid of at least a part of the display function (and/or operation function). For example, it can be locked by a password or the like so that some display functions such as the display of the internal parameters of the cryopump 10 cannot be used in the initial state of the cryopump monitor 130 . The cryopump monitor 130 may be set to be able to use the display function by releasing the lock.

The connection to the network 120 of the cryopump monitor 130 may also be wireless. For example, compressor 12 may be wired to cryopump controller 110 and cryopump monitor 130 may be wirelessly connected to compressor 12 . The cryopump monitor 130 and the compressor 12 are arranged outside the vacuum sequencer 200 together, and are arranged close to each other, so that the transfer waves used for wireless communication are easily transmitted to each other well. Alternatively, where possible, the cryopump controller 110 and cryopump monitor 130 may be wirelessly connected.

In the above-described embodiment, the cryopump monitor 130 has the operation unit 132 and thereby has the operation function of the cryopump system 100 . However, in one embodiment, the cryopump monitor 130 may not have an operation function but only a display function.

At least one cryopump 10 provided in the cryopump system 100 may be a cold trap. Typically, the cold trap is cooled by a single-stage cryogenic refrigerator, which is disposed at the inlet of a high vacuum pump such as a turbomolecular pump, and mainly condenses water vapor on the surface of the cold trap and exhausts it. The cryopump monitor 130 may display information related to the cold trap.

10: Cryopump 12: Compressor 100: Cryopump System 110: Cryopump Controller 120: Internet 130: Cryopump Monitor 132: Operation Department 136: Display part 200: Vacuum program device 204: Main Controller 206: Shell

Fig. 1 is a schematic diagram showing a cryopump system according to an embodiment. Fig. 2 is a schematic diagram showing an example of a cryopump that can be used in the cryopump system of the embodiment. 3 is a schematic diagram showing an example of a compressor that can be used in the cryopump system of the embodiment. 4 is a schematic diagram showing an example of a cryopump monitor that can be used in the cryopump system of the embodiment.

10: Cryopump

12: Compressor

13: Gas pipeline

13a: High pressure pipeline

13b: low pressure line

100: Cryopump System

110: Cryopump Controller

120: Internet

122: 2nd communication line

123: 3rd communication line

124: 4th communication line

130: Cryopump Monitor

200: Vacuum program device

202: Vacuum container

204: Main Controller

206: Shell

208: 1st Communication Line

Claims (6)

A cryopump system mounted on a vacuum sequencer, characterized in that it is provided with: At least 1 cryopump; a cryopump controller, which controls the aforementioned cryopump; a network, connecting the cryopump and the cryopump controller, and transmitting information related to the cryopump between the cryopump and the cryopump controller; and A cryopump monitor, connected to the aforementioned network, and displaying information related to the aforementioned cryopump transmitted through the aforementioned network, The cryopump controller is arranged in the housing of the vacuum sequencer, and the cryopump monitor is arranged outside the housing of the vacuum sequencer. The cryopump system of claim 1, wherein The cryopump controller can be connected to the main controller provided in the vacuum sequencer, The cryopump monitor is not connected to the network through the main controller. The cryopump system according to claim 1 or claim 2, further comprising: At least one compressor is disposed outside the casing of the vacuum sequencer and connected to the network, The cryopump monitor is installed in the compressor. The cryopump system of claim 3, wherein The cryopump monitor displays information related to the compressor transmitted through the network. The cryopump system of claim 1 or claim 2, wherein The cryopump monitor includes an operation unit for operating the cryopump system. A method of monitoring a cryopump system mounted on a vacuum sequencer, wherein, The cryopump system includes: at least one cryopump; a cryopump controller, which is disposed in the housing of the vacuum sequencer and controls the cryopump; and a network that connects the cryopump and the cryopump controller, and transmitting information related to the cryopump between the cryopump and the cryopump controller, The aforementioned methods include: the steps of connecting the cryopump monitor to the network and disposing it outside the housing of the vacuum sequencer; and The step of displaying information related to the cryopump transmitted through the network on the cryopump monitor.

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