KR20220072740A - Cryopump system, and monitoring method for cryopump - Google Patents

Abstract

Provided is a cryopump system that can easily check information about a cryopump while a vacuum process device is in operation.
The cryopump system 100 includes a cryopump 10 , a cryopump controller 110 that controls the cryopump 10 , and the cryopump 10 and the cryopump controller 110 . connected to the network 120 for transmitting information about the cryopump 10 between the cryopump 10 and the cryopump controller 110, and connected to the network 120, the network 120 and a cryopump monitor 130 that displays information about the cryopump 10 transmitted through the The cryopump controller 110 is disposed inside the case 206 of the vacuum process device 200 , and the cryopump monitor 130 is disposed outside the case 206 of the vacuum process device 200 .

Description

Cryopump system and its monitoring method

This application claims priority based on Japanese Patent Application No. 2020-194876 filed on November 25, 2020. The entire contents of the application are incorporated herein by reference.

The present invention relates to a cryopump system and a method for monitoring the same.

A cryopump is a vacuum pump that traps and exhausts gas molecules by condensation or adsorption in a cryopanel cooled to a cryogenic temperature. The cryopump is mounted on a vacuum process device to realize a clean vacuum environment required for a semiconductor circuit manufacturing process and the like.

Patent Document 1: Japanese Patent Application Laid-Open No. 2008-2333

The present inventors came to recognize the following problems as a result of examining the cryopump system mounted on the vacuum process apparatus. It is convenient to be able to view information about the cryopump while the vacuum process device is in operation. Such information is helpful in identifying the cause of the abnormality or in recovering to a normal state, especially when any abnormality occurs. Therefore, it is conceivable to introduce a display unit for displaying information integrally to the cryopump. However, even in this way, in reality, in many cases, information is not visible during operation. This is because, since the cryopump enters the vacuum processing device, even if the display unit is provided, in most cases, it is hidden in a place that cannot be seen from the outside. In addition, for safety reasons such as avoiding contact with dangers such as high voltage or high energy beam used in the vacuum process device, during the operation of the vacuum process device, there is a human physically No access is requested. If the operation of the vacuum process device is stopped, the display unit will be visible as it approaches the cryopump, but stopping the operation of the device causes a decrease in productivity, so it is not preferable.

One of the exemplary objects of one aspect of the present invention is to provide a cryopump system that can easily check information about the cryopump while the vacuum process device is in operation.

According to one aspect of the present invention, there is provided a cryopump system mounted on a vacuum process device. The cryopump system includes at least one cryopump, a cryopump controller that controls the cryopump, connects the cryopump and the cryopump controller, and transmits information about the cryopump to the cryopump and the cryopump. A network transmitted between the oppump controllers and a cryopump monitor connected to the network and displaying information about the cryopump transmitted through the network are provided. The cryopump controller is disposed inside the case of the vacuum process device, and the cryopump monitor is disposed outside the case of the vacuum process device.

According to one aspect of the present invention, there is provided a method for monitoring a cryopump system mounted on a vacuum process device. The cryopump system includes at least one cryopump, a cryopump controller disposed in a case of the vacuum process device and controlling the cryopump, and connecting the cryopump and the cryopump controller, the cryopump and a network that transmits information about the cryopump between the cryopump and the cryopump controller. The method includes connecting the cryopump monitor to a network and disposing it outside the case of the vacuum processing device, and displaying information about the cryopump transmitted through the network on the cryopump monitor.

However, it is also effective as an aspect of this invention that arbitrary combinations of the above-mentioned components and the components and expressions of this invention are mutually substituted among methods, apparatuses, systems, etc.

According to the present invention, it is possible to provide a cryopump system in which information about the cryopump can be easily checked while the vacuum process apparatus is in operation.

1 is a schematic diagram showing a cryopump system according to an embodiment.
2 is a schematic diagram showing an example of a cryopump that can be used in the cryopump system according to the embodiment.
3 is a schematic diagram showing an example of a compressor that can be used in the cryopump system according to the embodiment.
4 is a schematic diagram showing an example of a cryopump monitor that can be used in the cryopump system according to the embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing this invention is demonstrated in detail, referring drawings. In the description and drawings, the same or equivalent components, members, and processes are denoted by the same reference numerals, and overlapping explanations are omitted as appropriate. The scale and shape of each part shown are set for convenience in order to facilitate explanation, and are not interpreted limitedly unless otherwise specified. The embodiments are illustrative and do not in any way limit the scope of the present invention. All the features described in the embodiment and combinations thereof are not necessarily limited to the essential thing of the invention.

1 is a schematic diagram showing a cryopump system 100 according to an embodiment. The cryopump system 100 is mounted on the vacuum process apparatus 200 and is used to evacuate the vacuum container 202 of the vacuum process apparatus 200 to a desired vacuum level. The vacuum processing apparatus 200 is configured to process, for example, a target object such as a wafer in a vacuum environment in the vacuum container 202 by a desired vacuum process. The vacuum processing apparatus 200 may be, for example, an ion implantation apparatus, a sputtering apparatus, a vapor deposition apparatus, or other vacuum processing apparatus.

The vacuum processing apparatus 200 includes a host controller 204 and a case 206 in addition to the vacuum container 202 . The host controller 204 is configured to control communication between the vacuum process device 200 and the cryopump system 100 . The host controller 204 is configured as a control device for controlling the vacuum process device 200, or may constitute a part of such a control device. The case 206 forms the exterior of the vacuum processing apparatus 200 and accommodates various components of the vacuum processing apparatus 200 . The vacuum vessel 202 and the host controller 204 are disposed in the case 206 .

The case 206 may be an enclosure that covers the entire surface of the vacuum processing apparatus 200 . The case 206 includes a frame structure in which the components of the vacuum processing apparatus 200 are arranged and supporting them, a panel member dividing the inside of the vacuum processing apparatus 200 from the outside, and the inside of the vacuum processing apparatus 200 . You may provide the door which can be opened and closed for access from the outside. Panel members and doors may be mounted to the frame structure. The case 206 may include, for example, a radiation shielding material such as lead in order to prevent radiation that may be generated in the vacuum process device 200 from leaking out.

Alternatively, the case 206 may not cover the entire surface of the vacuum processing apparatus 200 . A part of the case 206 is opened, and a part of the vacuum processing apparatus 200 may be seen from the outside.

The cryopump system 100 includes at least one cryopump 10 , at least one compressor 12 , a cryopump controller 110 , a network 120 , and a cryopump monitor 130 . ) is provided.

The cryopump 10 is mounted on the vacuum container 202 to evacuate the vacuum container 202 of the vacuum process apparatus 200 . Accordingly, the cryopump 10 is disposed in the case 206 of the vacuum processing apparatus 200 together with the vacuum container 202 . An exemplary configuration of the cryopump 10 that can be used in the cryopump system 100 according to the embodiment will be described later with reference to FIG. 2 .

The compressor 12 is provided to supply and discharge refrigerant gas to an expander (to be described later) provided in the cryopump 10 . The compressor 12 is connected to the expander of the cryopump 10 by a gas line 13 , and is disposed outside the case 206 of the vacuum process device 200 . The gas line 13 includes a high-pressure line 13a connecting the compressor 12 to the expander to supply refrigerant gas from the compressor 12 to the expander, and a compressor 12 to recover refrigerant gas from the expander to the compressor 12 . ) is provided with a low pressure line (13b) for connecting the inflator. An exemplary configuration of the compressor 12 that can be used in the cryopump system 100 according to the embodiment will be described later with reference to FIG. 3 .

However, in the cryopump system 100 , a plurality of cryopumps 10 , for example, several to ten, or a plurality of cryopumps 10 may be provided. In addition, a plurality of compressors 12 may be provided in the cryopump system 100 in order to supply and discharge refrigerant gas to these cryopumps 10 .

The cryopump controller 110 is configured to comprehensively control the cryopump system 100 based on a command received from the host controller 204 . Also, the cryopump controller 110 is configured to transmit information about the cryopump system 100 to the host controller 204 . Accordingly, the cryopump controller 110 may control the cryopump 10 and the compressor 12 based on a command from the host controller 204 , and information about the cryopump 10 and the compressor The information regarding (12) may be transmitted to the host controller (204).

The cryopump controller 110 is communicatively connected to the host controller 204 through the first communication line 208 . The first communication line 208 may be, for example, a communication cable such as RS-232C. The cryopump controller 110 is disposed in the case 206 of the vacuum process device 200, similarly to the host controller 204 .

The internal configuration of the cryopump controller 110 is realized by elements and circuits including the CPU and memory of a computer as a hardware configuration, and is realized by a computer program or the like as a software configuration. It is drawn as a block. It is understood by those skilled in the art that these functional blocks can be realized in various forms by a combination of hardware and software. For example, the cryopump controller 110 may be implemented as a combination of a processor (hardware), such as a central processing unit (CPU) and a microcomputer, and a software program executed by the processor (hardware).

The network 120 communicatively connects the cryopump 10 and the cryopump controller 110 . The cryopump system 100 transmits information about the cryopump 10 between the cryopump 10 and the cryopump controller 110 through the network 120 . The cryopump 10 is connected to the cryopump controller 110 through a second communication line 122 . The second communication line 122 may be, for example, a communication cable such as RS-485.

The network 120 also communicatively connects the compressor 12 and the cryopump controller 110 . The cryopump system 100 transmits information about the compressor 12 between the compressor 12 and the cryopump controller 110 through the network 120 . The compressor 12 is connected to the cryopump controller 110 through a third communication line 123 . The third communication line 123 may be, for example, a communication cable such as RS-485.

The cryopump monitor 130 is connected to the network 120 and is configured to display information about the cryopump 10 transmitted through the network 120 . In addition, or instead, the cryopump monitor 130 may be configured to display information about the compressor 12 transmitted over the network 120 .

The cryopump monitor 130 is connected to the network 120 without interposing the host controller 204 . That is, the cryopump monitor 130 is configured not to communicate with the host controller 204 of the vacuum process device 200 . In this embodiment, the cryopump monitor 130 is connected to the cryopump controller 110 via a fourth communication line 124 . The fourth communication line 124 may be, for example, a communication cable such as RS-485.

The cryopump monitor 130 is disposed outside the case 206 of the vacuum process device 200 . The cryopump monitor 130 is disposed at a location away from the case 206 . In this embodiment, the cryopump monitor 130 is installed at or near the compressor 12 . The cryopump monitor 130 may be detachably mounted to the compressor 12 . Alternatively, the cryopump monitor 130 may be installed on a monitor mounting surface provided in the vicinity of the compressor 12 . The monitor mounting surface may be, for example, a wall surface in the vicinity of the compressor 12 or a surface of a device in the vicinity of the compressor 12 . The cryopump monitor 130 may be configured as a portable device by an operator.

An exemplary configuration of the cryopump monitor 130 that can be used in the cryopump system 100 according to the embodiment will be described later with reference to FIG. 4 .

2 is a schematic diagram showing an example of the cryopump 10 that can be used in the cryopump system 100 according to the embodiment. The cryopump 10 includes an inflator 14 , a cryopump container 16 , a radiation shield 18 , and a cryopanel 20 . Further, the cryopump 10 includes a pressure sensor 21 , a rough valve 24 , a purge valve 26 , and a vent valve 28 , which are installed in the cryopump container 16 . has been

The compressor (12) is configured to recover the refrigerant gas from the expander (14), pressurize the recovered refrigerant gas, and supply the refrigerant gas to the expander (14) again. The expander 14 is also referred to as a cold head, and together with the compressor 12 constitutes a cryogenic freezer. The expander 14 is sometimes referred to as a "freezer". The circulation of the refrigerant gas between the compressor (12) and the expander (14) is performed by a combination of an appropriate pressure change and volume change of the refrigerant gas in the expander (14), thereby forming a thermodynamic cycle for generating cooling, the expander (14) can provide cryogenic cooling. The refrigerant gas is usually helium gas, but other suitable gases may be used. For understanding, the direction in which the refrigerant gas flows is indicated by an arrow in FIG. 1 . The cryogenic freezer is, for example, a two-stage Gifford-McMahon (GM) refrigerator, but may be a pulse tube refrigerator, a Stirling refrigerator, or other types of cryogenic freezers.

The cryopump container 16 is a vacuum container designed to withstand the pressure of the surrounding environment (for example, atmospheric pressure) by maintaining a vacuum during the vacuum exhaust operation of the cryopump 10 . The cryopump container 16 includes a cryopanel accommodating part 16a having an intake port 17 and a refrigerator accommodating part 16b. The cryopanel accommodating portion 16a has a dome-shaped shape in which the intake port 17 is open and the opposite side is closed, and the radiation shield 18 and the cryopanel 20 are accommodated therein. The refrigerator accommodating part 16b has a cylindrical shape, one end of which is fixed to the room temperature part of the inflator 14, the other end is connected to the cryopanel accommodating part 16a, and the inflator 14 is provided therein. is inserted. In addition, the pressure sensor 21 measures the pressure in the cryopump container 16 .

The radiation shield 18 is thermally coupled to the first cooling stage of the inflator 14 and cooled to a first cooling temperature (eg 80K-120K). The cryopanel 20 is thermally coupled to the second cooling stage of the expander 14 and cooled to a second cooling temperature (eg, 10K to 20K) lower than the first cooling temperature. The radiation shield 18 is disposed in the cryopump container 16 to surround the cryopanel 20 , and heat input from the cryopump container 16 and the surrounding environment to the cryopanel 20 . ) is shielded. The gas entering from the intake port 17 of the cryopump 10 is captured by the cryopanel 20 by condensation or adsorption. Further, in the cryopump container 16 , a first temperature sensor 22 for measuring the temperature of the radiation shield 18 and a second temperature sensor 23 for measuring the temperature of the cryopanel 20 are provided. is provided. The configuration of the cryopump 10 , such as the arrangement and shape of the radiation shield 18 and the cryopanel 20 , may appropriately employ various known configurations, and thus will not be described in detail here.

The rough valve 24 is attached to the cryopump container 16 , for example, the refrigerator accommodating part 16b. The rough valve 24 is connected to a rough pump (not shown) provided outside the cryopump 10 . The rough pump is a vacuum pump for vacuum-suctioning the cryopump 10 to its operation start pressure. When the rough valve 24 is opened under the control of the cryopump controller 110, the cryopump container 16 communicates with the rough pump 32, and when the rough valve 24 is closed, the cryopump container (16) is disconnected from the rough pump. By opening the rough valve 24 and operating the rough pump, the pressure of the cryopump 10 can be reduced.

The purge valve 26 is attached to the cryopump container 16 , for example, the cryopanel accommodating part 16a. The purge valve 26 is connected to a purge gas supply device (not shown) installed outside the cryopump 10 . When the purge valve 26 is opened under the control of the cryopump controller 110, purge gas is supplied to the cryopump container 16, and when the purge valve 26 is closed, the cryopump container 16 The purge gas supply to the furnace is cut off. The purge gas may be, for example, nitrogen gas or other dry gas, and the temperature of the purge gas may be adjusted to, for example, room temperature or heated to a higher temperature than room temperature. By opening the purge valve 26 and introducing the purge gas into the cryopump container 16 , the pressure of the cryopump 10 can be increased. In addition, the cryopump 10 may be heated from a cryogenic temperature to room temperature or higher.

The vent valve 28 is attached to the cryopump container 16 , for example, the refrigerator accommodating part 16b. The vent valve 28 is provided to discharge the fluid from the inside of the cryopump 10 to the outside. The fluid discharged from the vent valve 28 is basically a gas, but may be a liquid or a mixture of gas-liquid. The vent valve 28 can be opened and closed under the control of the cryopump controller 110 . At the same time, the vent valve 28 can be mechanically opened by the differential pressure inside and outside the cryopump container 16 . The vent valve 28 is configured to function also as a safety valve for releasing excessive pressure to the outside when excessive pressure is generated in the cryopump container 16 .

Further, the expander 14 is provided with a variable speed expander motor 30 for driving the expander 14 . The expander motor 30 has an inverter, and may change the motor operating frequency under the control of the cryopump controller 110 .

The cryopump controller 110 controls the expander motor 30 based on the cooling temperature of the radiation shield 18 (or the cryopanel 20 ) in the vacuum exhaust operation of the cryopump 10 . You can do it. For example, the cryopump controller 110 may control the operating frequency of the expander motor 30 so that the cooling temperature of the radiation shield 18 is constant.

In addition, in the regeneration operation of the cryopump 10 , the cryopump controller 110 is configured based on the pressure in the cryopump container 16 (or, if necessary, the temperature of the cryopanel 20 ). and the pressure in the cryopump container 16 ), the rough valve 24 , the purge valve 26 , the vent valve 28 , and the expander motor 30 may be controlled.

The cryopump 10 includes an input/output circuit 32 that integrates transmission/reception between the cryopump 10 and the cryopump controller 110 . The input/output circuit 32 may be, for example, an I/O module or a remote I/O unit. The input/output circuit 32 includes each device of the cryopump 10 , for example, a pressure sensor 21 , a first temperature sensor 22 , a second temperature sensor 23 , a rough valve 24 , and a purge. The valve 26, the vent valve 28, and the expander motor 30 are electrically connected to each of these devices so as to transmit and receive signals. In addition, the input/output circuit 32 is communicatively connected to the cryopump controller 110 via the second communication line 122 .

Accordingly, the cryopump 10 transmits a measured pressure signal representing the measured pressure in the cryopump container 16 by the pressure sensor 21 via the input/output circuit 32 (and the second communication line 122) to the cryopump. It is transmitted to the op-pump controller 110 . The cryopump 10 transmits a measured temperature signal indicating the measured temperature of each of the first temperature sensor 22 and the second temperature sensor 23 to the cryopump controller 110 through the input/output circuit 32 . . In addition, the cryopump 10 transmits a valve state signal indicating the open/close state of each valve (that is, the rough valve 24 , the purge valve 26 , and the vent valve 28 ) via the input/output circuit 32 to the cryopump. It is transmitted to the op-pump controller 110 . The cryopump 10 transmits a motor state signal indicating an on-off state and an operating frequency of the expander motor 30 to the cryopump controller 110 through the input/output circuit 32 .

In addition, the cryopump 10 receives, to the input/output circuit 32, a valve control signal from the cryopump controller 110 indicating an operation command to each valve, and the input/output circuit 32 receives this valve control signal. is sent to the corresponding valve. The valve that has received the valve control signal is opened and closed according to the valve control signal. Similarly, the cryopump 10 receives a motor control signal from the cryopump controller 110 indicating an operation command to the expander motor 30 to the input/output circuit 32, and the input/output circuit 32 A motor control signal is transmitted to the inflator motor 30 . The inflator motor 30 is turned on or off according to a motor control signal, or an operating frequency is controlled.

However, in this embodiment, each cryopump 10 has a liquid crystal panel that displays information about the cryopump 10 , such as the measured pressure, the measured temperature, and the operating state of each valve and the expander motor 30 . A display unit such as a monitor or monitor is not provided.

3 is a schematic diagram showing an example of the compressor 12 that can be used in the cryopump system 100 according to the embodiment. The compressor 12 includes a high-pressure gas outlet 50 , a low-pressure gas inlet 51 , a high-pressure flow path 52 , a low-pressure flow path 53 , a first pressure sensor 54 , a second pressure sensor 55 , and a bypass. A line 56 , a compressor body 57 , and a compressor case 58 are provided.

The high-pressure gas outlet 50 is installed in the compressor case 58 as a working gas discharge port of the compressor 12 , and the low-pressure gas inlet 51 is a working gas suction port of the compressor 12 , and the compressor case 58 . is installed on A high-pressure line 13a is connected to the high-pressure gas outlet 50 , and a low-pressure line 13b is connected to the low-pressure gas inlet 51 . The high pressure flow path 52 connects the discharge port of the compressor body 57 to the high pressure gas outlet 50 , and the low pressure flow path 53 connects the low pressure gas inlet 51 to the suction port of the compressor body 57 . The compressor case 58 accommodates the high pressure flow path 52 , the low pressure flow path 53 , the first pressure sensor 54 , the second pressure sensor 55 , the bypass line 56 , and the compressor body 57 . do. The compressor 12 is also called a compressor unit.

The compressor main body (57) is configured to compress the working gas sucked in from the suction port inside and to be discharged from the discharge port. The compressor body 57 may be, for example, a scroll type, a rotary type, or other pump that boosts the working gas pressure. The compressor body 57 may include a variable speed compressor motor 57a. The compressor motor 57a has an inverter and may change the motor operating frequency under the control of the cryopump controller 110 . In this way, the compressor body 57 may be configured to vary the flow rate of the discharged working gas. Alternatively, the compressor main body 57 may be configured to discharge a fixed and constant working gas flow rate. The compressor body 57 is sometimes referred to as a compression capsule.

The first pressure sensor 54 is disposed in the high pressure flow passage 52 to measure the pressure of the working gas flowing through the high pressure flow passage 52 . The second pressure sensor 55 is disposed in the low pressure flow path 53 to measure the pressure of the working gas flowing through the low pressure flow path 53 . Accordingly, the first pressure sensor 54 and the second pressure sensor 55 may be referred to as a high pressure sensor and a low pressure sensor, respectively.

The bypass line 56 connects the high pressure flow path 52 to the low pressure flow path 53 to bypass the expander 14 and reflux the working gas from the high pressure flow path 52 to the low pressure flow path 53 . The bypass line 56 is provided with a relief valve 60 for opening and closing the bypass line 56 or for controlling the flow rate of the working gas flowing through the bypass line 56 . The relief valve 60 is configured to open when a differential pressure greater than or equal to a set pressure acts between the entrances and exits. The relief valve 60 may be an on-off valve or a flow control valve, for example, a solenoid valve may be sufficient as it. The set pressure can be appropriately set based on the designer's empirical knowledge or the designer's experiments, simulations, or the like. Accordingly, it is possible to prevent the differential pressure between the high-pressure line 13a and the low-pressure line 13b from exceeding this set pressure and being excessive.

As an example, the relief valve 60 may be opened and closed under control by the cryopump controller 110 . The cryopump controller 110 compares the measured differential pressure between the high pressure line 13a and the low pressure line 13b with a set pressure, and opens the relief valve 60 when the measured differential pressure is equal to or greater than the set pressure, and the measured differential pressure You may control the relief valve 60 so that the relief valve 60 may be closed when it is less than this set differential pressure. The cryopump controller 110 may acquire the measured pressure difference between the high pressure line 13a and the low pressure line 13b from the measured pressures of the first pressure sensor 54 and the second pressure sensor 55 . As another example, the relief valve 60 may be configured to operate as a so-called safety valve, that is, may be mechanically opened when a differential pressure greater than or equal to a set pressure acts between the entrances and exits.

Moreover, in this embodiment, the compressor 12 is equipped with the operation panel 62 for operating the compressor 12. As shown in FIG. The operation panel 62 is provided in the compressor case 58 . The operation panel 62 is provided with an operation unit 63 , a control unit 64 , and a display unit 65 . The operation part 63 has input means, such as an operation button, which accepts the operation of the compressor 12 by an operator, for example. The control unit 64 is housed in the operation panel 62, and according to the operation of the operation unit 63, each device of the compressor 12, for example, the compressor body 57 (compressor motor 57a). , to control the relief valve (60). The display unit 65 is controlled by the control unit 64 and displays information regarding the compressor 12 .

The control unit 64 of the compressor 12 may operate as an input/output circuit (for example, an I/O module or a remote I/O unit) that integrates transmission/reception between the compressor 12 and the cryopump controller 110 . have. Accordingly, the control unit 64 includes each device of the compressor 12 , for example, the first pressure sensor 54 , the second pressure sensor 55 , the compressor body 57 (compressor motor 57a ), the relief It is electrically connected to each of these devices so as to transmit and receive signals to and from the valve 60 . In addition, the control unit 64 is communicatively connected to the cryopump controller 110 through the third communication line 123 .

Accordingly, the compressor 12 transmits a measured pressure signal representing each of the measured pressures of the first pressure sensor 54 and the second pressure sensor 55 to the cryopump controller 110 through the control unit 64 . In addition, the compressor 12 transmits a motor state signal indicating an on-off state and an operating frequency of the compressor motor 57a, and a valve state signal indicating an open/close state or an opening degree of the relief valve 60, to the control unit ( 64) through the cryopump controller 110.

Further, the compressor 12 receives a motor control signal from the cryopump controller 110 indicating an operation command to the compressor motor 57a to the control unit 64, and the control unit 64 transmits the motor control signal to the compressor. transmitted to the motor 57a. The compressor motor 57a is turned on and off or the operating frequency is controlled according to the motor control signal. Similarly, the compressor 12 receives a valve control signal from the cryopump controller 110 indicating an operation command to the relief valve 60 to the control unit 64, and the control unit 64 transmits the valve control signal. It transmits to the relief valve (60). The relief valve 60 is opened and closed according to the valve control signal.

However, the compressor 12 may have various other components. For example, the high-pressure flow path 52 may be provided with an oil separator, an adsorber, or the like. The low-pressure flow path 53 may be provided with a storage tank and other components. Further, the compressor 12 may be provided with an oil circulation system for cooling the compressor body 57 with oil, a cooling system for cooling oil with cooling water, or the like.

4 is a schematic diagram showing an example of a cryopump monitor 130 that can be used in the cryopump system 100 according to the embodiment. The cryopump monitor 130 includes an operation unit 132 , an input/output circuit 134 , and a display unit 136 .

The operation unit 132 includes input means such as various operation buttons for receiving an operation of the cryopump system 100 (eg, the cryopump 10 and the compressor 12 ) by an operator. The operation unit 132 is electrically connected to the input/output circuit 134 so as to transmit an operation signal indicating an operation to the operation unit 132 to the input/output circuit 134 . The cryopump controller 110 receives this operation signal through the input/output circuit 134 (and the fourth communication line 124), and operates the cryopump 10 (or the compressor 12) according to the operation signal. control In this example, the operation unit 132 is provided below the cryopump monitor 130 .

The input/output circuit 134 is placed inside the cryopump monitor 130 and is communicatively connected to the cryopump controller 110 through a fourth communication line 124 . The input/output circuit 134 may be, for example, an I/O module or a remote I/O unit. The fourth communication line 124 may be connected to a connector provided in the cryopump monitor 130 , and may be connected to the input/output circuit 134 via this connector.

The display unit 136 is electrically connected to the input/output circuit 134 so as to receive a signal indicating information about the cryopump 10 and/or information about the compressor 12 from the input/output circuit 134 . The display unit 136 displays information about the cryopump 10 and/or the compressor 12 based on a signal received by the input/output circuit 134 from the cryopump controller 110 . As an example, the display unit 136 includes a display panel unit 136a and a display light unit 136b. The display panel unit 136a may be, for example, a liquid crystal panel or other display device capable of displaying numbers, letters, symbols, etc. indicating information regarding the cryopump 10 and/or the compressor 12 . The indicator 136b may be, for example, an LED lamp or other indicator that is turned off to indicate information regarding the cryopump 10 and/or the compressor 12 . In this example, the display unit 136 is provided above the cryopump monitor 130 .

Information regarding the cryopump 10 that can be displayed on the display unit 136 includes, for example, the following, and is not limited thereto.

The current measured value by the sensor mounted on the cryopump 10 (eg, the measured pressure of the pressure sensor 21 , the measured temperature of the first temperature sensor 22 , the measured value of the second temperature sensor 23 ) measured temperature, etc.)

The current operating state of the device mounted on the cryopump 10 (eg, the open/closed state of the rough valve 24, the open/close state of the purge valve 26, the open/close state of the vent valve 28, and the expander motor The on-off state of (30) (that is, the on-off state of the cryopump 10, etc.), the operating frequency of the expander motor 30, etc.)

Operation history of the cryopump 10 (eg, the duration of operation of the cryopump 10 , the elapsed time from the start of regeneration of the cryopump 10 , the number of times of regeneration of the cryopump 10 ) , an alarm about the cryopump 10 that occurred during operation of the cryopump 10 , a communication time between the cryopump 10 and the cryopump controller 110 , and a sensor mounted on the cryopump 10 . past measured values by the cryopump 10, the past operating state of the device mounted on the cryopump 10

- Internal parameters of the cryopump 10 (for example, the set cooling temperature of the radiation shield 18 and the cryopanel 20 for performing the vacuum exhaust operation of the cryopump 10, the radiation shield 18 ) (or the control parameters for temperature adjustment of the cryopanel 20 (eg, control gain for PID control, etc.), temperature, pressure, and opening/closing of each valve for regenerating the cryopump 10 ) Various playback parameters that define all conditions such as timing, etc.)

・Other parameters related to the cryopump 10 (eg, serial number of the cryopump 10, etc.)

Various commands for operating the cryopump 10

In addition, as information regarding the compressor 12 which can be displayed on the display part 136, the following are illustrated, for example, and it is not limited to these.

The current measured value by the sensor mounted on the compressor 12 (for example, the measured pressure of the first pressure sensor 54, the measured pressure of the second pressure sensor 55, the first pressure sensor 54 and Differential pressure of the pressure measured by the second pressure sensor 55, etc.)

The current operating state of the device mounted on the compressor 12 (the set value of the differential pressure between the high-pressure passage 52 and the low-pressure passage 53, the on-off state of the compressor motor 57a (that is, the on-off state of the compressor 12) state), the operating frequency of the compressor motor 57a, the opening/closing state or opening degree of the relief valve 60, the flow rate of cooling water for cooling the compressor body 57, etc.)

The operation history of the compressor 12 (the duration of operation of the compressor 12, the usage time of the adsorber, the alarm about the compressor 12 that occurred during operation of the compressor 12, the past by the sensor mounted on the compressor 12) measured values, past operating conditions of the equipment mounted on the compressor 12, etc.)

· Internal parameters of the compressor (12)

・Other parameters related to the compressor (12)

Various commands for operating the compressor 12

However, the cryopump monitor 130 may be provided with a storage unit such as a large-capacity storage unit, or may be connectable to an external storage device. Past measured values, operating states, and other displayable information of the cryopump system 100 are stored in this storage unit or storage device, and can be accessed from the cryopump monitor 130 if necessary, and the cryopump system 100 . It may be displayed on the op-pump monitor 130 .

In addition, the cryopump monitor 130 may present information visually, or may be presented by auditory or other means.

The monitoring method of the cryopump system 100 according to the embodiment includes connecting the cryopump monitor 130 to the network 120 and disposing the cryopump monitor 130 outside the case 206 of the vacuum process device 200 . For example, the cryopump monitor 130 is connected to the cryopump controller 110 using the fourth communication line 124 . Accordingly, the cryopump monitor 130 is connected to the network 120 and disposed outside the case 206 of the vacuum processing apparatus 200 . Since the cryopump controller 110 is disposed in the case 206 of the vacuum process device 200 , the connection between the cryopump monitor 130 and the cryopump controller 110 is connected to the cryopump system 100 . It may be difficult to do it during operation (ie, during operation of the vacuum processing apparatus 200 ). Therefore, it is preferable to connect the cryopump monitor 130 before the cryopump system 100 is operated.

The monitoring method of the cryopump system 100 further includes displaying information about the cryopump 10 transmitted through the network 120 on the cryopump monitor 130 . Also, this method may include displaying information on the compressor 12 transmitted through the network 120 on the cryopump monitor 130 . These indications may be made while the cryopump system 100 is in operation, or may be made while the cryopump system 100 is stopped.

In the cryopump system 100 , as described above, both the information about the cryopump 10 and the information about the compressor 12 are integrated in the cryopump controller 110 . The network 120 used for communication in the cryopump system 100 is, for example, RS-485, such as communication data (including information about the cryopump 10 (or the compressor 12)). is configured to broadcast to all nodes. Accordingly, by connecting the cryopump monitor 130 to the network 120 (eg, the cryopump controller 110 ), the cryopump monitor 130 , the cryopump controller 110 and the cryopump Communication data transmitted through the network 120 between (10) (or the compressor 12) can be acquired (so-called waterproofing). In this way, the cryopump monitor 130 may display information about the cryopump 10 (or the compressor 12 ) based on the acquired communication data.

The monitoring method of the cryopump system 100 may further include controlling the cryopump system 100 according to an operation of the cryopump monitor 130 . As described above, the cryopump controller 110 receives an operation signal generated when the operator operates the operation unit 132 through the input/output circuit 134 (and the fourth communication line 124 ), and receives the operation signal. Accordingly, the cryopump 10 (or the compressor 12) may be controlled. For example, as an operation of the cryopump system 100 that can be performed by the operator using the cryopump monitor 130, the following are exemplified, but not limited thereto.

On/off of the cryopump (10)

· Start regeneration of the cryopump 10, selection of regeneration mode

・Operation of the device mounted on the cryopump 10 (eg, the opening and closing operation of the rough valve 24, the purge valve 26, and the vent valve 28, change of the operating frequency of the expander motor 30, etc.) )

- Calibration of the sensor mounted on the cryopump 10, for example, the pressure sensor 21 (for example, atmospheric pressure adjustment, zero point adjustment)

Compressor 12 on/off

As described in the introduction of this manual, it is convenient if information about the cryopump 10 can be viewed while the vacuum process device 200 is in operation. Such information, particularly, when any abnormality occurs in the cryopump system 100, is helpful in identifying the cause of the abnormality or in recovering to a normal state.

However, in most cases of known cryopump products, since such an information display tool is not equipped, it may take a long time for the analysis of the above and recovery to normal. In this case, since the cryopump system 100 is connected to the vacuum process device 200 , information about the cryopump system 100 may be obtained from the vacuum process device 200 . However, in reality, it is common that the vacuum process device 200 is not designed to be able to access all information about the cryopump system 100 . Therefore, this method does not necessarily guarantee that the information necessary for the above analysis and recovery to normal can be obtained. In addition, as one of the causes of the above, there may be a case where a communication error between the host controller 204 of the vacuum process device 200 and the cryopump system 100 is suspected.

Therefore, it is considered to incorporate a display unit for displaying information into the cryopump 10 . However, even in this way, in reality, in many cases, information is not visible during operation. This is because, since the cryopump 10 enters the vacuum process apparatus 200, even if the display unit is provided, in most cases, it is hidden in a place that cannot be seen from the outside. In addition, for safety reasons such as avoiding contact with dangers such as high voltage or high energy beam used in the vacuum process device 200 , during operation of the vacuum process device 200 , the vacuum process device such as the cryopump 10 . It is requested that no person physically access the internal components of 200 . When the operation of the vacuum process apparatus 200 is stopped, the display unit is displayed as it approaches the cryopump 10 , but stopping the operation of the apparatus causes a decrease in productivity, so it is not preferable.

In contrast, according to the embodiment, the cryopump monitor 130 is disposed outside the case 206 of the vacuum process device 200 , and the cryopump monitor 130 is connected to the cryopump 10 (and/or the compressor). (12)) is displayed. Therefore, the operator can easily check the displayed information about the cryopump 10 (and/or the compressor 12 ) directly while the vacuum process apparatus 200 is in operation. By viewing the cryopump monitor 130 , the operator can obtain necessary information at any time in a safe place. When any abnormality occurs in the cryopump system 100 , the operator can use the information obtained from the cryopump monitor 130 to identify the cause of the abnormality or to quickly proceed with recovery to a normal state.

Further, according to the embodiment, the cryopump monitor 130 is connected to the network 120 without interposing the host controller 204 . For example, the cryopump monitor 130 is connected to the network 120 by being directly connected to the cryopump controller 110 . Accordingly, even when an abnormality in the host controller 204 or a communication abnormality between the cryopump controller 110 and the host controller 204 is suspected, the cryopump monitor 130 is Information can be obtained from and displayed. Also, the cryopump monitor 130 obtains information not obtained through the host controller 204 (information on the cryopump that the host controller 204 does not monitor) from the cryopump controller 110 . can be displayed

Further, according to the embodiment, the cryopump monitor 130 includes an operation unit 132 for operating the cryopump system 100 . Therefore, separately from operating the cryopump system 100 via the host controller 204 of the vacuum process device 200 , the cryopump monitor 130 performs necessary operations from the cryopump system 100 . can be done on

As mentioned above, this invention was demonstrated based on an Example. The present invention is not limited to the above embodiment, and various design changes are possible, and it is understood by those skilled in the art that various modifications are possible, and that such modifications are also within the scope of the present invention.

In the above-described embodiment, the compressor 12 and the cryopump monitor 130 are respectively connected to the cryopump controller 110 with separate communication cables (the third communication line 123 and the fourth communication line 124). . In one embodiment, the third communication line 123 and the fourth communication line 124 are integrated into one communication cable branched from the end, and the compressor 12 and the cryopump monitor 130 using this single communication cable. ) may be connected to the cryopump controller 110 .

Instead of directly connecting the cryopump monitor 130 to the cryopump controller 110 , the cryopump monitor 130 is connected to the network 120 by being wired to the compressor 12 , and the vacuum process It may be disposed outside the case 206 of the device 200 . In this case, the connection operation of the cryopump monitor 130 may be performed before the operation of the cryopump system 100 or may be performed during operation of the cryopump system 100 . In addition, the cryopump monitor 130 is connected to the network 120 by being connected to other nodes on the network 120 (eg, the cryopump 10), and the case ( 206) may be placed outside.

The cryopump monitor 130 may be integrally mounted on the compressor 12 . For example, the operation panel 62 provided in the compressor 12 may be configured to operate as the cryopump monitor 130 .

The cryopump monitor 130 may be able to switch between enabling and disabling at least some of the display functions (and/or operation functions). For example, some display functions such as display of internal parameters of the cryopump 10 may be locked by, for example, a password so that they cannot be used in the initial state of the cryopump monitor 130 . The cryopump monitor 130 may enable this display function to be used by releasing the lock.

The connection of the cryopump monitor 130 to the network 120 may be made wireless. For example, the compressor 12 may be connected to the cryopump controller 110 by wire, and the cryopump monitor 130 and the compressor 12 may be connected wirelessly. Since the cryopump monitor 130 and the compressor 12 are disposed outside the vacuum process device 200 together and disposed close to each other, carriers for wireless communication are easily transmitted to each other. Alternatively, if possible, the cryopump controller 110 and the cryopump monitor 130 may be wirelessly connected.

In the above-described embodiment, the cryopump monitor 130 has an operation unit 132 , thereby having an operation function of the cryopump system 100 . However, in one embodiment, the cryopump monitor 130 does not have an operation function, but may have only a display function.

At least one cryopump 10 provided in the cryopump system 100 may be a cold trap. Typically, the cold trap is cooled by a single stage cryogenic freezer, for example, disposed at the inlet of a high vacuum pump such as a turbo molecular pump, and mainly condensing water vapor on the surface of the cold trap and exhausting it. The cryopump monitor 130 may display information about the cold trap.

10 cryopump
12 Compressor
100 cryopump system
110 cryopump controller
120 network
130 cryopump monitor
132 control panel
136 display
200 vacuum process device
204 host controller
206 cases

Claims (6)

As a cryopump system mounted on a vacuum process device,
at least one cryopump;
a cryopump controller for controlling the cryopump;
a network connecting the cryopump and the cryopump controller and transmitting information about the cryopump between the cryopump and the cryopump controller;
a cryopump monitor connected to the network and displaying information about the cryopump transmitted through the network;
The cryopump controller is disposed in a case of the vacuum process device, and the cryopump monitor is disposed outside the case of the vacuum process device. According to claim 1,
The cryopump controller is connectable to a host controller provided in the vacuum process device,
The cryopump monitor is a cryopump system, characterized in that connected to the network without interposing the host controller. 3. The method of claim 1 or 2,
It is disposed outside the case of the vacuum processing device, further comprising at least one compressor connected to the network,
The cryopump monitor is a cryopump system, characterized in that installed in the compressor. 4. The method of claim 3,
The cryopump monitor is a cryopump system, characterized in that it displays information about the compressor transmitted through the network. 3. The method of claim 1 or 2,
The cryopump monitor comprises an operation unit for operating the cryopump system. A method of monitoring a cryopump system mounted on a vacuum process device, comprising:
The cryopump system includes at least one cryopump, a cryopump controller disposed in a case of the vacuum processing device and controlling the cryopump, and the cryopump and the cryopump controller are connected. and a network for transmitting information about the cryopump between the cryopump and the cryopump controller,
The method of monitoring the cryopump system,
Connecting a cryopump monitor to the network and disposing it outside the case of the vacuum process device;
and displaying information about the cryopump transmitted through the network on the cryopump monitor.

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