JP3114092B2 - Cryopump regeneration apparatus and regeneration method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cryopump regenerating apparatus and method for producing a high vacuum by cryogenic cooling, and more particularly to a cryopump for removing gas adsorbed on a cryopanel of a cryopump. The present invention relates to a pump regeneration device and a regeneration method.

[0002]

2. Description of the Related Art A conventional cryopump and its regenerating apparatus will be outlined with reference to FIG. FIG. 4 is a schematic sectional view of a conventional cryopump 1. The cryopump 1 includes a pump housing 2, a vacuum vessel 3, and a regenerative refrigerator such as a two-stage GM refrigerator 4 (Gifford McMahon refrigeration). Machine) and the regenerating device 5 of the cryopump 1
And

The pump housing 2 accommodates a GM refrigerator 4 therein, is provided with an atmospheric release valve 6 (safety valve), an inlet 7 for regenerating gas such as nitrogen gas, and a vacuum container 8 through a vacuum seal 8. The suction pump chamber 9 and the test chamber 10 are respectively formed in the inside by hermetically mounting 3.

[0004] The vacuum vessel 3 is used to make the inside of the test chamber 10 a high vacuum by the cryopump 1.
Semiconductor or other manufacturing line 11 in test chamber 10
And the production line gas such as argon gas is supplied to the first valve 12, the flow controller 13, and the second valve 1.
4, the gas can be introduced into the test chamber 10 through the gas inlet 15 and the gas inlet tube 16. Further, the vacuum vessel 3 is provided with a vacuum valve 17, a vacuum pump 18 and a vacuum gauge 19, so that the suction pump chamber 9 is provided.
In addition, the inside of the test chamber 10 is roughly evacuated and mechanically evacuated to a predetermined degree of vacuum, for example, 1 Pa (10 ^-2 Torr), so that evacuation can be performed.

[0005] The GM refrigerator 4 includes a compressor 20 and an intake valve 2.
1, an exhaust valve 22, a drive motor 23, and a drive mechanism 2.
4, the first-stage cylinder 25 and the second-stage cylinder 2
6, a first stage displacer 27 and a second stage displacer 28, a first stage cooling stage 29 (first stage low temperature section) and a second stage cooling stage 30 (second stage low temperature section)
And a cup-shaped first-stage cryopanel 31 (radiation shield) and a second-stage cryopanel 32.

The compressor 20 supplies a refrigerant gas such as helium gas through a conduit 33 to a first-stage regenerator 34 in a first-stage displacer 27 in the first-stage cylinder 25 and a second-stage regenerator in the second-stage cylinder 26. It is supplied to the second-stage regenerator 35 in the two-stage displacer 28.

A first-stage seal 36 is provided between the first-stage cylinder 25 and the first-stage displacer 27, and a second-stage seal 36 is provided between the second-stage cylinder 26 and the second-stage displacer 28.
A step seal 37 is provided, respectively, and a first communication path 38, a second communication path 39, a third communication path 4
0, a fourth communication passage 41 and a fifth communication passage 42 are respectively formed, a first-stage expansion chamber 43 is provided inside the first-stage cooling stage 29, and a second-stage expansion chamber 43 is provided inside the second-stage cooling stage 30. The expansion chambers 44 are respectively formed.

A first stage cryopanel 31 is provided on the first stage cooling stage 29 in thermal contact with the first stage cryopanel 31, and the leading end of the first stage cryopanel 31 is connected to the suction pump chamber 9 and the test chamber 10. A baffle 45 is provided at the boundary. The second cooling stage 30 has a second cryopanel 32 provided in thermal contact therewith, and an adsorbent 46 such as activated carbon is adhered to the inner wall surface of the second cryopanel 32.

The regenerating apparatus 5 includes the regenerating gas inlet 7,
It has a first-stage heater 47 (first-stage heating unit) and a second-stage heater 48 (second-stage heating unit). The first-stage heater 47 is brought into contact with the first-stage cooling stage 29 via the first-stage cryopanel 31. The second heater 48 is in contact with the second cooling stage 30 via the second cryopanel 32. A nitrogen gas at a predetermined temperature can be introduced into the adsorption pump chamber 9 from the regeneration gas inlet 7.

In the cryopump 1 and the regenerator 5 having such a configuration, first, in a normal vacuum operation, the test chamber 10 (and the adsorption pump chamber 9) is mechanically operated by opening the vacuum valve 17 and operating the vacuum pump 18. Vacuum (rough evacuation) is applied to a vacuum up to a pressure of about 10 ^-2 Torr.

Next, the GM refrigerator 4 is operated to further increase the vacuum. That is, the intake valve 21 and the exhaust valve 22
The first stage regenerator 34 and the second stage regenerator 3 are operated by opening and closing the first stage regenerator 34 and the second stage displacer 28 by the drive mechanism 24.
5, the refrigerant gas is reciprocated and passed through the first cooling stage 29.
Is cooled to, for example, a temperature of 80K, and the second cooling stage 30 is cooled to a temperature of about 20K. Accordingly, water vapor, carbon dioxide gas and other gas molecules having a relatively high boiling point are condensed and solidified on the first cryopanel 31 of the first cooling stage 29,
The second-stage cryopanel 32 of the second-stage cooling stage 30 adsorbs nitrogen gas, argon and other gases having a relatively low boiling point. Further, the gas having the lowest boiling point, such as hydrogen, neon, or helium, is adsorbed at low temperature to the adsorbent 46 of the second cryopanel 32.

In this way, the gas in the adsorption pump chamber 9 is condensed, adsorbed or adsorbed at a low temperature, so that the test chamber 10 is evacuated to a high vacuum and the production line 11 is operated. Or is adsorbed at a low temperature by the adsorbent 46 of the second-stage cryopanel 32 to be saturated. Therefore, a regeneration operation is required to release these gases and gas molecules from the cryopump 1 in the saturated state. This regeneration operation is usually performed by stopping the operation of the production line 11 and the GM refrigerator 4 and heating the first-stage cryopanel 31 and the second-stage cryopanel 32 by the regeneration device 5.

That is, the operation of the GM refrigerator 4 is stopped,
The adiabatic vacuum in the adsorption pump chamber 9 is broken by introducing heated nitrogen gas or the like into the adsorption pump chamber 9 from the regeneration gas inlet 7, and the surfaces of the first-stage cryopanel 31 and the second-stage cryopanel 32 are broken. This gas is flowed through the air to raise the temperature and release the adsorbed gas.
Exhaust to the atmosphere. Further, the first-stage cryopanel 31 and the second-stage cryopanel 32 are directly heated by the first-stage heater 47 and the second-stage heater 48 of the reproducing apparatus 5.

The exhaust capacity (low temperature adsorption) of activated carbon in a general cryopump 1 for a gas having the lowest boiling point such as hydrogen gas is smaller than the exhaust capacity (condensation adsorption) for a gas such as nitrogen or argon. Since it is much smaller (approximately 1/100), the adsorbent 46 such as activated carbon is saturated by a short-time action. Therefore, the regeneration operation of heating the adsorbent 46 of the second-stage cryopanel 32 to release the adsorbed gas in order to recover the exhaust capacity of the adsorbent 46 is smaller than that of the first-stage cryopanel 31. More often needed.

This regenerating operation is usually performed by stopping the GM refrigerator 4 and raising the temperature of the second-stage cryopanel 32 to normal temperature, and in particular, a cooling operation for lowering the regenerated cryopump 1 to its operating temperature. It takes a long time,
The entire regenerative operation will take several hours. During this time,
For example, when the manufacturing line 11 is a semiconductor manufacturing device,
There is a problem that the loss time increases, and it is required to reduce the time required for the reproduction operation as much as possible.

Further, such a regeneration device 5 requires a regeneration gas facility including a regeneration gas inlet 7, and
There is a problem that the amount of gas used is large and the cost of regeneration is high. Further, since the first-stage heater 47 and the second-stage heater 48 are used in a vacuum, problems such as poor insulation and disconnection are liable to occur, and there is a problem that there is a concern about safety.

As a well-known technique, Japanese Patent Laid-Open No. 5-3218 is known.
No. 32 and JP-A-5-340622.

[0018]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and provides a cryopump regenerating apparatus and a regenerating method utilizing a refrigerant gas of a GM refrigerator as heating means for regenerating. The task is to

It is another object of the present invention to provide a cryopump regenerating apparatus and a regenerating method capable of raising the temperature of a cryopanel by generating adiabatic compression heat of a refrigerant gas.

Another object of the present invention is to provide a cryopump regenerating apparatus and a regenerating method capable of performing a regenerating operation safely, quickly and in a simple manner, particularly in the production of a heating part.

Further, the present invention provides a cryopump regenerating apparatus and a regenerating method which can efficiently and inexpensively restart the operation after the regeneration without stopping the operation of the GM refrigerator during the regeneration operation. The task is to

[0022]

That is, the present invention provides a GM
Focusing on using a refrigerant gas having the same cycle and pressure as the refrigerant gas supplied to the regenerator of the refrigerator, and being able to directly heat the cryopanel portion using the adiabatic compression heat of the refrigerant gas, One invention is a cylinder, a displacer that reciprocates in the cylinder, a regenerator accommodated in the displacer, a cooling stage whose temperature is lowered by the reciprocation of the displacer, A cryopump that uses a regenerative refrigerator having a cryopanel in contact with the cryopanel, wherein a refrigerant gas having the same cycle and pressure as the refrigerant gas supplied to the regenerator is supplied from the room temperature portion to the cryopanel. A conduit for regeneration, an on-off valve provided on the conduit for regeneration, and one end connected to the conduit for regeneration, and the other end closed and closed. A heating section provided in the cryopanel having an amount of space, and heating the cryopanel by adiabatic compression heat generated in the space when the refrigerant gas is supplied to the heating section. A cryopump regenerating apparatus characterized in that:

According to a second aspect of the present invention, there is provided a cylinder, a displacer reciprocating in the cylinder, a regenerator accommodated in the displacer, a cooling stage having a low temperature by reciprocating the displacer, and a cooling stage. And a cryopanel using a regenerative refrigerator having thermal contact with the regenerator, wherein the refrigerant gas is supplied at room temperature to the same cycle and pressure as the refrigerant gas supplied to the regenerator. Introducing the refrigerant gas to the cryopanel through a regeneration conduit and an on-off valve, and supplying the refrigerant gas to a heat generating portion provided in the cryopanel while having one end closed to have a space portion of a predetermined capacity. And a heating step of heating the cryopanel by adiabatic compression heat generated in the space when performing the heating. A reproduction method of cryo pump to be.

The heat-generating portion is constituted by a pipe, which facilitates the production thereof, and activated carbon is adhered to the outer surface of the pipe, and the pipe is provided in contact with the surface of the cryopanel. Can be.

By forming the pipe in a helical shape, the heating action can be uniformly, quickly and efficiently applied over a wide range of the surface of the cryopanel.

According to the number of stages of the cooling stage, the heating units can be provided in multiple stages such as two stages and three stages.

In the cryopump regenerating apparatus and the regenerating method according to the present invention, the regeneration pipe for guiding the refrigerant gas from the room temperature section to the cryopanel of the cooling stage of the regenerative refrigerator and the on-off valve provided on the regeneration pipe are provided. Since the heat generating portion is provided through the heat generating portion, the cryopanel can be directly heated by the adiabatic compression heat generated at this time by supplying the refrigerant gas to the space portion of the heat generating portion. Even without providing a special regenerating device, that is, a regenerating gas inlet, a first-stage heater, a second-stage heater, and the like, it is possible to raise the temperature of the cryopanel by directly performing the regenerating operation of the cryopump. Therefore, it is possible to avoid the danger due to disconnection or short-circuit of the first-stage heater and the second-stage heater as in the conventional cryopump regeneration device, and to quickly and safely regenerate the cryopanel and its adsorbent. be able to.

Further, since the refrigerant gas having the same cycle and pressure as the refrigerant gas supplied to the regenerator is used, it is not necessary to stop the operation of the GM refrigerator during the regeneration operation as in the conventional regeneration device, and the GM refrigerator is not required. The regeneration operation can be performed while maintaining the above operation, and the operation restart after the regeneration can be efficiently performed at low cost.

In the case of the present invention, the partial regeneration of only the second-stage cryopanel having a multistage cooling stage and particularly requiring frequent regeneration work can be performed without stopping the operation of the GM refrigerator.
It can be realized safely and quickly, and the improvement of the cryopump operating rate can be expected.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a cryopump 50 equipped with a regenerating apparatus according to an embodiment of the present invention will be described with reference to FIGS. However, the same parts as those in FIG. 4 are denoted by the same reference numerals, and detailed description thereof will be omitted. FIG. 1 is a schematic cross-sectional view of a cryopump 50. The cryopump 50 includes a pump housing 2, a vacuum vessel 3, and a GM refrigerator 4 as in the cryopump 1 (FIG. 4) described above. And a regenerating device 51 for the cryopump 50.

The regeneration device 51 includes a first-stage regeneration conduit 52 and a second-stage regeneration conduit 53 made of, for example, stainless steel.
A first-stage on-off valve 54 and a second-stage on-off valve 55; a first-stage heat generating portion 57 having a first-stage space portion 56 having a predetermined volume; and a second-stage heat generating portion having a second-stage space portion 58 having a predetermined volume. 59,
A first stage temperature sensor 60 and a second stage temperature sensor 61 such as a platinum-cobalt sensor;
And 2.

The first-stage regeneration conduit 52 branches off from the conduit 33 and is provided with a first-stage on-off valve 54 so that refrigerant gas can be supplied from the room temperature portion to the first-stage space portion 56 of the first-stage heat generating portion 57. I do. The second-stage regeneration conduit 53 branches in parallel from the conduit 33 to the first-stage regeneration conduit 52, and is provided with a second-stage on-off valve 55;
Refrigerant gas can be supplied to the second-stage space portion 58 of the second-stage heat generating portion 59.

The first-stage heat generating portion 57 is connected to the first-stage regeneration conduit 5.
2 is a cylindrical member closed at the other end, for example, and is brought into thermal contact with the first cooling stage 29. The second-stage heat generating portion 59 is connected to the second-stage regeneration conduit 5.
3, a cylindrical member whose other end is closed, for example, which is in thermal contact with the inner wall surface of the second-stage cryopanel 32.

The first-stage temperature sensor 60 is provided on the first-stage cooling stage 29 to measure the temperature in the regeneration operation. The second-stage temperature sensor 61 is provided on the second-stage cooling stage 30, and measures the temperature in the regeneration operation.

The control circuit 62 includes a first stage temperature sensor 60
And a detection signal from the second-stage temperature sensor 61, the first-stage on-off valve 54 and the second-stage on-off valve 55,
Compressor 20, intake valve 21, exhaust valve 22, drive motor 2
3 (drive mechanism 24).

In the cryopump 50 and the regenerating apparatus 51 having such a configuration, the normal operation of the cryopump 50 is substantially the same as that of the cryopump 1 shown in FIG. However, during the operation of the GM refrigerator 4, the first-stage on-off valve 54 and the second-stage on-off valve 55 are closed, and the first-stage heat generating section 5
The refrigerant gas having the same pressure as that of the GM refrigerator 4 is sealed in the first space 56 and the second space 58 of the second heat generator 59.

When the cryopump 50 is regenerated, refrigerant gas having the same cycle and pressure as the refrigerant gas supplied to the first-stage regenerator 34 and the second-stage regenerator 35 is supplied from the conduit 33 to the first-stage on-off valve 54 or the second-stage regenerator. The first through the step on-off valve 55
First-stage space portion 56 and second-stage heat generation portion 5 of step heating portion 57
9 can be supplied to the second-stage space 58, and the first-stage cooling stage 29 is supplied by the adiabatic compression heat generated inside the first-stage space 56 and the second-stage space 58 during this supply. The second cryopanel 32 can be heated, and the regeneration operation can be performed while the operating state of the GM refrigerator 4 is maintained.

In the present embodiment shown in FIG. 1, the first-stage heating section 57 and the second-stage heating section 59 are formed as cylindrical members, but in the present invention, these heating sections are formed by pipes. Structure and simplify its structure,
It can be manufactured at low cost. That is, FIG. 2 is a cross-sectional view of a main part showing another example of the heat generating portion. In place of the second heat generating portion 59, the second heat generating portion 63 is formed from a helically wound copper pipe having a uniform diameter. The second stage heat generating section 6
An adsorbent 46 such as activated carbon is adhered on the outer surface of the third cryopanel 3 and is in thermal contact with the peripheral surface of the inner wall surface of the second cryopanel 32. Of course, the first-stage heat generating portion 57 may also be formed of a helical pipe.

Since the second-stage cryopanel 32 is saturated in a shorter time than the first-stage cryopanel 31, the actual reproduction operation is performed by the second-stage cryopanel 32.
You will do this more often. Specifically, argon gas was introduced into the test chamber 10 from the gas introduction pipe 16 and about 50
Regeneration of only the second-stage cryopanel 32 by the regenerating device 51 from a state in which 0 liter of argon gas is condensed will be described below with reference to an example in which a helical second-stage heat generating portion 63 is employed.

FIG. 3 is a graph showing an experimental result in the partial regeneration when the second-stage heat generating portion 63 is used. A copper pipe having an outer diameter of 16 mm, an inner diameter of 14 mm, a length of 400 mm, and an inner volume of 61 cc is processed into a coil shape as the second-stage heat generating portion 63, and is soldered to the inner wall surface of the second-stage cryopanel 32 to make thermal fixed contact. It is. First stage regeneration conduit 52
And the outer diameter of the second stage regeneration conduit 53 is 5 mm.

The temperatures of the first cooling stage 29 and the second cooling stage 30 before the regeneration of the second cryopanel 32 are controlled by the first temperature sensor 60 and the second temperature sensor 6.
The regeneration operation is started from a state in which the first cooling stage 29 is cooled to a temperature of 80K and the second cooling stage 30 is cooled to a temperature of 12K.

That is, since only the second stage cooling stage 30 is regenerated, the second stage cooling valve 30 is kept closed while the second stage cooling valve 30 is closed.
Only the step opening / closing valve 55 is opened (manually or by the control circuit 6
2). As a result of the refrigerant gas being packed into the first-stage regenerator 34 and the second-stage regenerator 35 at the same cycle and pressure via the second-stage regeneration conduit 53 into the first-stage regenerator 34 and the second-stage regenerator 35, the adiabatic heat of compression is reduced. The second stage cryopanel 32 and the second stage cooling stage 30 are quickly heated because the second stage cryopanel 32 is uniformly and entirely heated on the inner wall surface of the second stage cryopanel 32. To start.

As the temperature of the second-stage cryopanel 32 rises, the argon gas condensed here becomes at a temperature and pressure higher than the triple point (the triple point temperature of the argon gas 8).
3.82K, pressure 68754 Pa (515.7 Torr)
r)) and very quickly transitions from the solid phase to the liquid phase to the gaseous phase and most of the gas is released to the atmosphere release valve 6.
From the suction pump chamber 9. Also,
Various gases adsorbed on the adsorbent 46 at a low temperature are also released as a gas phase. The temperature of the first cooling stage 29 rises due to breakage of the vacuum heat insulation inside the suction pump chamber 9.

When the temperature of the second cooling stage 30 reaches 120 K, the second stage on-off valve 55 is closed. The temperature of the second-stage cooling stage 30 further rises by about 8K from the temperature (120K) at which the second-stage on-off valve 55 is closed, reaches a maximum temperature of 128K, and then shifts to a cooling process, where it reaches 20K in 25 minutes. The temperature returned to the following. Further, the temperature of the first cooling stage 29 rose to 135K. At this point, the evacuation of the argon gas remaining in the suction pump chamber 9 is started by the vacuum pump 18, and after the degree of vacuum in the suction pump chamber 9 reaches 10 Pa or less, the vacuum valve 17 is closed.

In this experiment, as shown in FIG. 3, the operation as the cryopump 50 in which the temperature of the second cooling stage 30 is again lower than 20 K is started after the partial regeneration operation of only the second cryopanel 32 is started. The time required to make it possible was 40 minutes.

The opening and closing of the first-stage on-off valve 54 and the second-stage on-off valve 55 can be performed manually or by the second-stage temperature sensor 6.
Automatic opening and closing can also be performed in conjunction with the temperature of the second cooling stage 30 based on the measurement of 1.

When the regeneration of the second cryopanel 32 alone is performed, when the temperature of the first cryopanel 31 is low, the gas condensed in the second cryopanel 32 is vaporized as the temperature rises. At this time, there is a problem that the liquid crystal is condensed again on the first-stage cryopanel 31 and cannot be completely reproduced. In such a case, according to the reproducing apparatus 51 of the present invention, the first-stage cryopanel before the reproduction is provided. Panel 3
The first temperature is slightly raised by adjusting the opening and closing of the first-stage on-off valve 54, for example, beforehand at a temperature of 80K to 100K.
By setting it to about K, complete reproduction of the second-stage cryopanel 32 becomes possible.

In the partial regeneration of only the second-stage cryopanel 32, the first-stage cryopanel 31 is kept in a cooled state, and the water condensed there is not released. Normally, the partial regeneration is performed in the cryopump 50 as described above, and when the first-stage cryopanel 31 has excessively accumulated water, the first-stage cryopanel 31 and the second-stage cryopanel 32 are both regenerated. The number of times is smaller than that of reproduction.

[0049]

As described above, according to the present invention, since the adiabatic compression heat using the refrigerant gas of the GM refrigerator is used as the means for raising the temperature of the cryopump, the power supply equipment and the nitrogen for regeneration are particularly used. It is possible to safely and quickly perform temperature-increasing regeneration as compared with a conventional regenerator without the need for a temperature-raising facility using gas or the like. Further, since the cryopump can be regenerated while the GM refrigerator is maintained in the operating state, the cooling time to the cryopump operable temperature after the regeneration can be significantly reduced. Furthermore, the temperature of the cryopanel can be easily adjusted by appropriately setting the volume of the heat generating portion (space portion) by the adiabatic compression heat and adjusting the opening and closing of the on-off valve, and the operability is good.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of a cryopump 50 equipped with a reproducing apparatus 51 according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a main part showing another example (second-stage heat generating portion 63) of the heat generating portion.

FIG. 3 is a graph showing an experimental result in partial regeneration when a second-stage heat generating unit 63 is used.

FIG. 4 is a schematic sectional view of a conventional cryopump 1;

[Explanation of symbols]

1 Cryopump (Fig. 4) 2 Pump housing 3 Vacuum container 4 Two-stage GM refrigerator (cool storage refrigerator, Gifford
5 Regeneration device for cryopump 1 6 Atmospheric release valve (safety valve) 7 Regeneration gas inlet such as nitrogen gas 8 Vacuum seal 9 Pump chamber for adsorption 10 Test chamber 11 Production line 12 First valve 13 Flow controller 14 Second valve 15 Gas inlet 16 Gas inlet pipe 17 Vacuum valve 18 Vacuum pump 19 Vacuum gauge 20 Compressor 21 Intake valve 22 Exhaust valve 23 Drive motor 24 Drive mechanism 25 First stage cylinder 26 Second stage cylinder 27 First stage Displacer 28 Second-stage displacer 29 First-stage cooling stage (first-stage low-temperature section) 30 Second-stage cooling stage (second-stage low-temperature section) 31 First-stage cryopanel (radiation shield) 32 Second-stage cryopanel 33 conduit 34 first stage regenerator 35 second stage regenerator 36 first stage seal 7 Second-stage seal 38 First communication path 39 Second communication path 40 Third communication path 41 Fourth communication path 42 Fifth communication path 43 First-stage expansion chamber 44 Second-stage expansion chamber 45 Baffle 46 Adsorbent such as activated carbon 47 First-stage heater (first-stage heating unit) 48 Second-stage heater (second-stage heating unit) 50 Cryopump (FIG. 1) 51 Regeneration device of cryopump 50 52 First-stage regeneration conduit 53 Second-stage regeneration conduit 54 First-stage on-off valve 55 Second-stage on-off valve 56 First-stage space portion 57 First-stage heat generation portion 58 Second-stage space portion 59 Second-stage heat generation portion 60 First-stage temperature sensor 61 Second-stage temperature sensor 62 Control circuit 63 Second-stage heating unit (FIG. 2)

Claims (4)

(57) [Claims] 1. A cylinder, a displacer that reciprocates in the cylinder, a regenerator accommodated in the displacer, a cooling stage whose temperature is reduced by the reciprocation of the displacer, A cryopump using a regenerative refrigerator having a cryopanel in contact with the cryopanel, wherein a refrigerant gas having the same cycle and pressure as a refrigerant gas supplied to the regenerator is supplied from a room temperature portion to the cryopanel. A conduit for regeneration, an on-off valve provided in the conduit for regeneration, an end connected to the conduit for regeneration, a closed end having a space of a predetermined capacity, and A heating section provided on the panel; and the heating section is formed by a pipe,
Activated carbon is adhered to the outer surface of the
A cryopump, wherein the cryopanel is heated by adiabatic compression heat generated in the space when the refrigerant gas is supplied to the heat-generating portion. apparatus. Wherein said pipe is cryopump reproducing apparatus according to claim 1, wherein the this was formed spirally. 3. The cryopump regenerating apparatus according to claim 1, wherein the heat generating sections are provided in multiple stages according to the number of stages of the cooling stage. 4. A cylinder, a displacer that reciprocates in the cylinder, a regenerator accommodated in the displacer, a cooling stage whose temperature is lowered by the reciprocation of the displacer, A cryopanel using the regenerative refrigerator having the cryopanel in contact with the cryopump, wherein the refrigerant gas is supplied from the room temperature portion to the regeneration conduit at the same cycle and pressure as the refrigerant gas supplied to the regenerator. And an introduction step of leading to the cryopanel via an on-off valve, and a pipe having a predetermined capacity by closing one end of the pipe , and adhering activated carbon on the outer surface thereof
And heating the cryopanel by adiabatic compression heat generated in the space when the refrigerant gas is supplied to the heat generating portion provided in contact with the surface of the cryopanel. A method for regenerating a cryopump, comprising: