TW202222467A - Material modifying system enabling modulated laser light to accurately focus on the defect range of the modified layer to achieve evenly and efficiently modify the defect range - Google Patents

Abstract

This invention provides a material modifying system, including a pulse generation apparatus and a visual alignment apparatus. The pulse generation apparatus includes an objective lens and is used for projecting laser by means of the objective lens, so as to modify a modified layer of an object. The visual alignment apparatus is connected with the pulse generation apparatus and includes a lighting unit, an image sensing unit and a focusing unit. The lighting unit is used for projecting a visible light beam to the object. The image sensing unit includes a visual range and is used for sensing the visible light beam reflected by the object to generate visual information. The visual information includes an observation distance for adjusting a height of the objective lens relative to the object. The focusing unit includes a laser detection range. The laser detection range is within the visual range. The focusing unit detects focusing information within a defect range of the modified layer of the object within the laser detection range, and the focusing information includes a focusing distance. The focusing distance is a distance of the objective lens being pushed and aims at focusing laser on the modified layer.

Description

Material modification system

The present invention is related to liquid crystal panel defect repair equipment, and particularly refers to a material modification system.

Liquid crystal panels are manufactured through a series of known processes. In order to ensure the quality and yield of the liquid crystal panel, it is usually necessary to inspect the liquid crystal panel after the manufacturing is completed to confirm that the liquid crystal panel does not have defects, such as bright spots or light leakage. The panel cannot display all black, that is, light can penetrate the color filter of the LCD panel and appear outward.

The current method of laser focusing is usually through visual image focusing, that is, the position of the bright spot is sensed through an image sensing element, and after the position of the bright spot is determined, the laser is used to modify the operation, so that one of the color filters Pixel blackening. However, in the structure of the liquid crystal panel, it is known that the color filter is one of the structures inside the liquid crystal panel, and the visual image is only to observe the surface image of the liquid crystal panel. The focus of the laser is not on the color filter, so the laser is not directly modified for the color filter, and it cannot achieve accurate operation.

In view of the above deficiencies, the material modification system of the present invention is used to find the position of the bright spot through visual observation, and then focus through the laser, so that the modulated laser light can be accurately focused on the defect area of the modified layer, thereby making the defect area black. change.

In order to achieve the above object, the material modification system of the present invention includes a pulse generating device and a visual alignment device. The pulse generating device includes an objective lens, and is used for projecting laser light through the objective lens, so as to modify the modified layer of the object. The visual alignment device is connected to the pulse generating device, and includes an illumination unit, an image sensing unit and a focusing unit. The lighting unit is used for projecting visible light beams on the object. The image sensing unit includes a visual range for sensing the visible light beam reflected by the object to generate visual information, and the visual information includes a viewing distance for adjusting the height of the objective lens relative to the object. The focusing unit includes a laser detection range. The laser detection range is within the visual range, and the focusing unit detects the focus information of the defect range of the modified layer of the object within the laser detection range, and the focus information includes the focus distance. The focusing distance is the distance the objective lens is pushed to focus the laser light on the modified layer.

In this way, the material modification system of the present invention can accurately focus the defect range through the focusing unit, so that the laser light can be accurately focused in the defect range, so as to achieve uniform and efficient modification of the defect range.

The detailed composition, steps, structure, characteristics, operation or usage of the material modification system provided by the present creation will be described in the detailed description of the subsequent implementation manner. However, those with ordinary knowledge in the field of the present invention should understand that these detailed descriptions and specific embodiments for implementing the present invention are only used to illustrate the present invention, and are not intended to limit the scope of the patent application of the present invention.

Hereinafter, the corresponding preferred embodiments are listed with the drawings to illustrate the components, steps, optical paths, connections and achieved effects of the material modification system of the present invention. However, the composition, optical elements, number, components, dimensions, appearance and steps of the material modification system in the drawings are only used to illustrate the technical features of the present invention, but not to limit the present invention.

As shown in FIG. 1 , the material modification system 100 of the present invention includes a pulse generating device 10 and a visual alignment device 30 . The above modification is the behavior of changing the characteristics of the raw material through the pulse characteristics output by the pulse generating device 10. In this embodiment, the object is the liquid crystal panel 50 as an example, and the modification object is the color filter or other light of the liquid crystal panel 50. film to blacken part of the material to block light.

Wherein, the above-mentioned device may include more or less optical elements such as lenses, mirrors, etc. than the embodiment, so as to change the transmission of light. Therefore, the following embodiments are for the convenience of describing the present invention, rather than expressing or implying the optical elements of the present invention. Quantitative limitations are used and therefore should not be construed as limiting the invention.

The pulse generating device 10 includes a laser source 11 , a pulse intensity adjustment unit 13 , a pulse modulation unit 15 , a scanning unit 17 , a relay lens 18 and a pulse output unit 19 . The laser source 11 is used for radiating laser light of near-infrared wavelength, and the laser light includes a plurality of short pulses (as shown in FIG. 4 ). The pulse intensity adjustment unit 13 is used for adjusting the intensity of a plurality of short pulses. The pulse modulation unit 15 is used to modulate the laser light through the grating modulation signal, so as to control the output frequency and peak power of a plurality of short pulses of the laser light. The scanning unit 17 is used to change the reflection angle of the laser light. The pulse output unit 19 is used for projecting the modulated laser light to the defect range of the modified layer of the liquid crystal panel 50 . The laser light output by the laser source 11 passes through the pulse intensity adjustment unit 13 , the pulse modulation unit 15 , the scanning unit 17 , the relay lens 18 and the pulse output unit 19 in sequence.

The time-domain pulse width of the short pulse is on the order of femtoseconds, and the femtosecond order is about the same power output in one hundred billionth of a second to generate multiphoton absorption to make the defective pixels of the color filter of the liquid crystal panel instantaneous. It is modified into blackening to block the light from the backlight source and achieve the effect of darkening the bright spots.

The pulse intensity adjustment unit 13 includes a polarizer, and adjusts the laser intensity by adjusting the angle of the polarizer to change the polarization direction of the laser light. When the polarization direction of the polarizer is parallel to the polarization direction of the laser light, the output power is the strongest, and when the polarization direction of the polarizer is perpendicular to the transmission direction of the laser polarization, the output power is the weakest.

The pulse modulation unit 15 includes a first mirror 151 , a pulse grid controller 153 and a second mirror 155 . The first reflecting mirror 151 is used for reflecting the laser light output by the pulse intensity adjusting unit 13 . The pulse grid controller 153 is located between the first reflection mirror 151 and the second reflection mirror 153 to receive the laser light reflected by the first reflection mirror 151 . The second mirror 155 is used to reflect the modulated laser light by the pulse grid controller 153 to the scanning unit 17 .

The scanning unit 17 has an X-Y laser galvanometer to change the deflection angle of the laser light. The scanning unit 17 is used for scanning the defect (pixel) range of the color filter of the liquid crystal panel 50, and planning the scanning path to meet the defect (pixel) range.

The relay lens 18 receives the laser light output by the scanning unit 17 and transmits the laser light to the pulse output unit 19 . The relay lens 18 is used for condensing the laser light output by the scanning unit 17 , so that the modulated laser light can be transmitted to the pulse output unit 19 .

The pulse output unit 19 receives the modulated laser light output by the relay lens 18 , and includes a coupling mirror 191 , an objective lens 193 and a Z-axis adjustment module 195 . The modulated laser light passes through the coupling mirror 191 and the objective lens 193 in sequence. The coupling mirror 191 and the objective lens 193 are coupled to the Z-axis adjustment module 195 . The Z-axis adjustment module 195 is used to move the coupling mirror 191 and the objective lens 193 up or down.

In this embodiment, the distance between the coupling mirror 191 and the objective lens 193 is fixed, and the visual alignment device 30 is arranged on the Z-axis adjustment module 195. Therefore, during the moving process, the coupling mirror 191, the objective lens 193 and the The visual alignment devices 30 all move synchronously. In other embodiments, the Z-axis adjustment module 195 may only move the objective lens 193 or the coupling mirror 191 .

The visual alignment device 30 is used for generating visual images and focusing, so that the laser processing operation is accurate and the modification process can be observed by naked eyes. The visual alignment device 30 includes a transmission unit 31 , an illumination unit 33 , an image sensing unit 35 and a focusing unit 37 . The transmitting unit 31 is used to transmit the light beam, such as visible light or laser light, so as to transmit the light beam to the destination, such as the coupling mirror 191 , the image sensing unit 35 and the focusing unit 37 . The illumination unit 31 is used for generating visible light beams, and the visible light beams are projected to the liquid crystal panel 50 through the transmission unit 31 and the coupling mirror 191 of the pulse output unit 19 .

The image sensing unit 33 includes a visual field for sensing the visible light beam reflected by the liquid crystal panel 50 to generate visual information. The visual information includes the observation distance. The observation distance is used to adjust the height of the objective lens 193 relative to the liquid crystal panel 50 . The reflected light of the visible beam is transmitted to the image sensing unit 33 through the coupling mirror 191 of the pulse output unit 19 and the transmission unit 31 .

The focusing unit 35 includes a laser detection range, and the laser detection range is within the visual range. The focusing unit 35 detects the focusing information of the defect range of the modified layer of the liquid crystal panel 50 within the laser detection range, and the focusing information includes the focusing information. The distance, focus distance is the distance by which the objective lens 193 is pushed.

As shown in FIG. 2 , the focusing unit 37 includes a transmitting module 371 , a sensing module 373 and a processing module 375 . The emitting module 371 is used for generating the focusing laser. The sensing module 373 is used for sensing the focusing laser reflected by the defect area of the modified layer. In this embodiment, the sensing module 373 senses half of the reflected beam of the focusing laser, and the other half of the beam is blocked and not sensed. The half beam is used to identify whether focusing (focusing) is completed. The processing module 375 is coupled to the transmitting module 371 , the sensing module 373 and the Z-axis adjusting module 195 . The processing module 375 calculates the focusing distance according to the round-trip time of the focusing laser, and controls the Z-axis adjustment module 195 to push the objective lens 193 up or down to make the laser more accurate.

As shown in FIG. 3 and FIG. 4 , the pulse gating device 153 is, for example, an Acousto-Optic _Mmodulator (AOM), and is used to modulate the duty cycle TD of the laser light. The duty cycle T _D includes the on time Tn and the off time To. During the on time Tn, the pulse gate controller 153 allows the short pulse of the laser light corresponding to the time domain to be output to the second mirror 155. During the off time To, the pulse gate controller 153 The short pulse corresponding to the time domain of the laser light is not allowed to be output to the second mirror 155 . In this embodiment, the time domain corresponding to the laser light refers to the time overlap between the laser light of the time domain signal and the duty cycle _TD .

The pulse gate controller 153 includes a signal generating module 157 , a radio frequency driving module 158 and a modulation output module 159 . The signal generating module 157 is coupled to the RF driving module 158 and is used for outputting a grating modulation signal, such as the symbol S157 in FIG. 4 , modulation means that the period or the amplitude can be changed. The RF driving module 158 receives and transmits the grating modulation signal S157. The modulation output module 159 receives the grating modulation signal S157 and the laser light Si input from the first mirror 151 , and outputs the modulated laser light S _O according to the duty cycle of the grating modulation signal S157 . In this way, during the laser modification process, heat can be dissipated through the off time To of the duty cycle _TD to reduce heat accumulation. In addition, multiple short pulses are intermittently output during the on time _Tn of the duty cycle TD to uniformly repair The range of pixels for a color filter to block light by making it black.

As shown in FIG. 5 , the focusing process 700 of the material modification system of the present invention includes step 701 : detecting the bright spot of the liquid crystal panel, and then step 703 : adjusting the relative height of the objective lens 193 and the liquid crystal panel, through the Z-axis adjustment module 195 Adjust the relative viewing distance between the objective lens 193 of the pulse output unit 19 and the liquid crystal panel 50 to clearly identify the image at the bright spot. Next, step 705 : focus the modified layer of the liquid crystal panel 50 , and the focus unit 35 detects and focuses the liquid crystal panel 50 to obtain the relative focusing distance between the modified layer and the objective lens 193, and then, step 707: adjust the relative height of the objective lens 193 and the modified layer of the liquid crystal panel, so that the laser light is focused on the modified layer, according to the focusing distance The relative height of the objective lens 193 and the modified layer of the liquid crystal panel 50 is adjusted through the Z-axis adjustment module 195, and finally, step 709: outputting laser light to modify the modified layer. Among them, in steps 705-709, it is more precise to focus or modify the defect range of the modified layer, that is, a specific pixel range.

After the backlight of the liquid crystal panel is turned on, it can be clearly identified whether there is a bright spot on the surface of the liquid crystal panel through step 701 in a completely black picture. In step 701 , the detection is to detect the visible light beam reflected from the liquid crystal panel through the image sensing unit, and the reflected visible light beam passes through the image sensing unit to generate visual information 91 , as shown in FIG. 6 . The rectangular dashed box represents the defect (pixel) range 95 within which the bright spot 93 is located. The image sensing unit 33 has a visual range 90, and the visual range 90 is a picture that can be presented through a display, such as a partial surface appearance of a liquid crystal panel. Visual information 91 is related to visual range 90 .

In step 703 , the adjustment is performed by the Z-axis adjustment module 195 . As shown in FIG. 7, in order to clearly identify the bright spot 93, the Z-axis adjustment module 195 can be adjusted manually or automatically to change the relative observation distance between the objective lens 191 and the surface 51 of the liquid crystal panel 50, and then find a clear image, as shown in FIG. 6 As shown, in this way, the display can clearly display the bright spot 93 and the range. Through a clear image, it can be confirmed that the bright spot 93 corresponds to the corresponding pixel of the color filter (modified layer) of the liquid crystal panel 50 .

In step 705, the focusing is performed through the focusing unit 37, and the focusing unit 37 focuses on the defect range of the modified layer (ie, the color filter) 53 of the liquid crystal panel 50. This step is also to find out that the laser light is focused on the modified layer. The relative height of the defect area of the layer 53, that is, the relative focus distance between the objective lens 193 and the defect area.

In this embodiment, the focusing unit 37 is used to detect the focusing information of the modified layer of the liquid crystal panel 50 through the focusing laser, and the focusing information includes the focusing shape and the defocusing shape. The focus information is within the visual range, and the processing positions where the visible light, the laser light and the focus laser are projected to the object 50 are overlapped. The focus shape and the out-of-focus shape are related to the beam profile of the reflected focusing laser. When the shape of the beam profile is a circle, because the sensing module senses half of the beam, the out-of-focus shape is incomplete when the focus is out of focus. pattern, such as a semicircle, and the beam profile is not clear. When focusing, the focus shape is a complete pattern, such as dots, and the beam profile is roughly sharp. In other embodiments, if the shape of the beam profile is other shapes, for example, a square or other shapes, the focusing shape may be a line, or a combination of points and lines. The processing module 375 of the focusing unit 37 determines the focusing distance according to the focusing shape.

The adjustment in step 707 is adjusted by the Z-axis adjustment module 195 . Adjust the relative height of the objective lens 193 and the modified layer of the liquid crystal panel 50 according to the focusing distance, so that the modulated laser light is roughly focused on the modified layer, and finally, the laser light output in step 709 can be correctly within the defect range of the modified layer 95 (ie, the corresponding pixel area) is modified to blacken the corresponding pixel to achieve the effect of shielding light. As shown in FIG. 8 , the defect area 95 has been modified to be blackened to shield the light of the backlight source.

As shown in FIG. 7 , the color filter 53 of the liquid crystal panel 50 is below the surface 51 . Therefore, through steps 705 and 707 , the laser light can be more accurately focused on the modified layer for more uniform modification material and avoid spalling of adjacent materials.

Finally, it is emphasized again that the constituent elements disclosed in the foregoing embodiments of the present creation are only for illustration and are not intended to limit the scope of this application. The substitution or variation of other equivalent elements shall also be covered by the scope of the patent application of this application. covered.

100: Material modification system 10: Pulse generator 11: Laser source 13: Pulse intensity adjustment unit 15: Pulse modulation unit 151: First mirror 153: Pulse grid controller 155: Second mirror 157: Signal generation Module 158: RF drive module 159: Modulation output module 17: Scanning unit 18: Relay lens 19: Pulse output unit 191: Coupling mirror 193: Objective lens 195: Z-axis adjustment module 30: Vision alignment device 31 : transfer unit 33 : lighting unit 35 : image sensing unit 37 : focusing unit 371 : emission module 373 : sensing module 375 : processing module 50 : liquid crystal panel 51 : surface 53 : modified layer 700 : focusing process 701 -709: Step 91: Visual information 93: Highlights 95: Defect range T _D : Duty cycle Tn: On time To: Off time S157: Grating modulation signal Si: Laser light

FIG. 1 is a schematic diagram of the composition of the material modification system of the present invention. FIG. 2 is a schematic diagram of the composition of the focusing unit in FIG. 1 . FIG. 3 is a schematic diagram of the composition of the pulse gate controller of the pulse modulation unit in FIG. 1 . FIG. 4 is a time domain signal diagram of the laser light, the grating modulation signal and the modulated laser light in FIG. 1 . FIG. 5 is a flow chart of the steps of the focusing process in FIG. 1 . FIG. 6 is a schematic diagram of the visual range for finding the position of the bright spot of the liquid crystal panel in steps 701-703 in FIG. 5 . FIG. 7 is a schematic diagram of the pulse output unit, the visual alignment device and the liquid crystal panel in FIG. 1 . FIG. 8 is a schematic diagram of the visual range after step 709 in FIG. 5 has been modified.

100: Material modification system

10: Pulse generator

11: Laser source

13: Pulse intensity adjustment unit

15: Pulse modulation unit

151: First reflector

153: Pulse gate controller

155: Second reflector

17: Scanning unit

18: Relay lens

19: Pulse output unit

191: Coupling mirror

193: Objective lens

195:Z axis adjustment module

30: Vision alignment device

31: Delivery unit

33: Lighting unit

35: Image Sensing Unit

37: Focusing unit

50: LCD panel

Claims (7)

A material modification system comprising: a pulse generating device, comprising an objective lens, and used for projecting a laser light through the objective lens to perform a modification operation on a modification layer of an object; A visual alignment device, connected to the pulse generating device, includes an illumination unit, an image sensing unit and a focusing unit, the illumination unit is used for projecting a visible light beam to an object, and the image sensing unit includes a visual range , used to sense the visible light beam reflected by the object to generate a visual information, the visual information includes a viewing distance, used to adjust the height of the objective lens relative to the object, the focusing unit includes a laser detection range, the The laser detection range is within the visual range, and the focusing unit detects a focus information of a defect range of the modified layer of the object within the laser detection range, the focus information includes a focus distance, and the focus distance is The distance that the objective lens is pushed to focus the laser light on the modified layer. The material modification system according to claim 1, wherein the focusing unit comprises an emission module, a sensing module and a processing module, the emission module is used for generating a focusing laser, and the sensing module The group is used for sensing the focusing laser reflected by the defect area of the modified layer, the processing module is coupled to the emission module and the sensing module, and the processing module is based on the reflected focusing laser of the focusing laser. The focus information calculates the focus distance. The material modification system of claim 2, wherein the focus information includes a focus shape, and the focus shape includes a point or a line. The material modification system of claim 1, wherein the visible light beam and the focusing laser pass through the objective lens. The material modification system of claim 1, wherein the visual alignment device comprises a transmission unit for transmitting the visible light beam and the focusing laser to the objective lens, and the visible light beam and the visible light beam reflected from the objective lens and the objective lens The focusing laser is transmitted to the image sensing unit and the focusing unit. The material modification system of claim 1, wherein the pulse generating device includes a Z-axis adjustment module, connected to the objective lens, and used to adjust and push the height of the objective lens relative to the object according to the focusing distance. The material modification system of claim 2, wherein the Z-axis adjustment module is connected to the visual alignment device, and synchronously adjusts and pushes the visual alignment device.

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