TW202214058A - Bonding device, repairing device and repairing method - Google Patents
Bonding device, repairing device and repairing method Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
Abstract
Description
本發明係關於一種將電子零件封裝在電路基板之接合裝置,尤其是關於一種可洗淨經焊接處理後之電子零件之電極部的焊材表面及電路基板表面,並且排除電性連接不良之接合裝置、修復裝置及修復方法。The present invention relates to a bonding device for encapsulating electronic parts on a circuit board, in particular to a bonding device that can clean the surface of the soldering material and the surface of the circuit board of the electrode part of the electronic parts after soldering treatment, and eliminates poor electrical connection. Device, repair device and repair method.
傳統修復裝置所使用的接合裝置係將新導電性接合材料提供至從配置於基板上之複數LED中所檢測出的缺陷LED已被去除後之基板的缺陷發生區域,並將新LED安裝在新導電性接合材料上,而加熱新導電性接合材料以使新LED與基板結合(參照例如日本特開2020-102616號公報)。 然而上述般傳統接合裝置中,在使用焊材來作為接合材料時,會有焊材表面形成有氧化膜而導致新LED的電極部與基板的電極部發生連接不良之問題。 針對上述般之問題,考慮了將助焊劑塗佈在基板以去除焊材表面的氧化膜。然而此情況下,在將新LED連接於基板後,必須洗淨基板上的多餘助焊劑來加以去除,而有修復工序變得繁雜之問題。 因此,本發明有鑑於上述般之問題,其目的為提供一種可洗淨經焊接處理後之電子零件之電極部的焊材表面及電路基板表面,並且排除電性連接不良之接合裝置、修復裝置及修復方法。 The bonding apparatus used in the conventional repair apparatus supplies a new conductive bonding material to the defect occurrence region of the substrate after the defective LEDs detected from the plurality of LEDs arranged on the substrate have been removed, and mounts the new LED on the new LED. On the conductive bonding material, the new conductive bonding material is heated to bond the new LED to the substrate (see, for example, Japanese Patent Laid-Open No. 2020-102616). However, in the above-mentioned conventional bonding apparatus, when the solder material is used as the bonding material, there is a problem that an oxide film is formed on the surface of the solder material, resulting in poor connection between the electrode portion of the new LED and the electrode portion of the substrate. In view of the above-mentioned problems, it has been considered to apply flux to the substrate to remove the oxide film on the surface of the solder material. However, in this case, after connecting a new LED to the substrate, it is necessary to wash and remove the excess flux on the substrate, and there is a problem that the repair process becomes complicated. Therefore, in view of the above-mentioned problems, the present invention aims to provide a bonding device and a repairing device that can clean the surface of the soldering material and the surface of the circuit board of the electrode part of the electronic component after the soldering process, and eliminate the poor electrical connection. and repair methods.
為達成上述目的,本發明之接合裝置係將載置帶體的修復用電子零件電性接合在封裝有複數電子零件之電路基板上的指定區域,該載置帶體會保持與具有經焊接處理後的電極部之複數該修復用電子零件的該電極部為相反側之端面,且被移送於長軸方向;該修復用電子零件被接合於該指定區域之接合位置之該載置帶體的移送方向上游側係設置有會將助焊劑塗佈在該修復用電子零件的該電極部之助焊劑塗佈裝置。 本發明之接合裝置具體而言係將良品的電子零件接合在封裝有複數電子零件之電路基板中已被去除缺陷電子零件後的區域,即修復區域;係構成為具備:台座,係保持與該電路基板之封裝面為相反側的內面;移送機構,係將載置帶體移送於長軸方向,該載置帶體係於該長軸方向並排地具有具備經焊接處理後的電極部之複數修復用電子零件,且會保持與該電極部為相反側之端面;助焊劑塗佈裝置,係在該載置帶體的送出側來將助焊劑塗佈在該複數修復用電子零件的該電極部;觀察裝置,係觀察塗佈有該助焊劑之經處理後修復用電子零件與該電路基板的該修復區域並使其對位;升降機構,係使該台座上升來將該經處理後修復用電子零件壓接在該電路基板的該修復區域;以及加熱裝置,係使該經處理後修復用電子零件之該電極部的焊材加熱熔融,來將該經處理後修復用電子零件電性接合在該電路基板的該修復區域。 又,本發明之修復裝置係具備電子零件去除裝置及接合裝置;該電子零件去除裝置係將雷射光照射在封裝有複數電子零件之電路基板的缺陷電子零件,來去除該缺陷電子零件以於該電路基板形成修復區域,且會記憶該修復區域的位置座標;該接合裝置係構成為具備:台座,係保持與該電路基板之封裝面為相反側的內面;移送機構,係將載置帶體移送於該長軸方向,該載置帶體係於長軸方向並排地具有具備經焊接處理後的電極部之複數修復用電子零件,且會保持與該電極部為相反側之端面;助焊劑塗佈裝置,係在該載置帶體的送出側來將助焊劑塗佈在該複數修復用電子零件的該電極部;觀察裝置,係觀察塗佈有該助焊劑之經處理後修復用電子零件與該電路基板的修復區域並使其對位;升降機構,係使該台座上升來將該經處理後修復用電子零件壓接在該電路基板的修復區域;以及加熱裝置,係使該經處理後修復用電子零件之該電極部的焊材加熱熔融,來將該經處理後修復用電子零件電性接合在該電路基板的修復區域;該台座係構成為會在該電子零件去除裝置與該接合裝置之間移動,而依據該修復區域的該位置座標來將該修復區域定位在該接合裝置之與該經處理後修復用電子零件的接合位置。 較佳地,該修復裝置可構成為另具備點啟檢查裝置,係通電於該電路基板來判定複數電子零件的良窳,且會記憶缺陷電子零件的位置座標;該台座係構成為會在該點啟檢查裝置與該電子零件去除裝置及該接合裝置之間移動,而依據該缺陷電子零件的位置座標來將該缺陷電子零件定位在該電子零件去除裝置的雷射照光位置,並依據該修復區域的位置座標來將該修復區域定位在該接合裝置之與該經處理後修復用電子零件的接合位置。 進一步地,本發明之修復方法會進行以下步驟:第1步驟,係將與封裝有複數電子零件之電路基板的封裝面為相反側之內面保持在台座;第2步驟,係將載置帶體移送於長軸方向,該載置帶體係於該長軸方向並排地具有具備經焊接處理後的電極部之複數修復用電子零件,且會保持與該電極部為相反側之端面;第3步驟,係將助焊劑塗佈在該複數修復用電子零件的該電極部;第4步驟,係觀察塗佈有該助焊劑之經處理後修復用電子零件與該電路基板中已被去除缺陷電子零件後的區域,即修復區域並使其對位;第5驟,係將該經處理後修復用電子零件壓接在該電路基板的該修復區域;以及第6步驟,係使該經處理後修復用電子零件之該電極部的焊材加熱熔融,來將該經處理後修復用電子零件電性接合在該電路基板的該修復區域。 較佳地,該修復方法可在實施該第1步驟前會實施以下步驟:通電於該電路基板來判定複數電子零件的良窳,並將雷射光照射在被判定為不良之缺陷電子零件,來去除該缺陷電子零件以於該電路基板形成該修復區域。 依據本發明,由於係將助焊劑塗佈在經焊接處理後之電子零件的電極部,故在加熱熔融焊材來將電子零件接合在電路基板的特定區域之際,便可藉由加熱後的助焊劑來洗淨焊材表面及電路基板之上述特定區域的碎屑,以排除電性連接不良的發生。又,相較於將助焊劑塗佈在電路基板之方法,不須在將電子零件連接於電路基板後洗淨電路基板的多餘助焊劑來加以去除,則接合作業會變得容易。 In order to achieve the above object, the bonding device of the present invention electrically bonds the repairing electronic components of the carrier tape body to a designated area on the circuit substrate encapsulated with a plurality of electronic components, and the carrier tape body retains and has a soldering-treated electronic component. The electrode portion of the repairing electronic component is the end face on the opposite side, and is transferred in the long-axis direction; the repairing electronic component is joined to the transfer of the mounting belt at the joining position of the designated area On the upstream side in the direction, a flux application device that applies flux to the electrode portion of the electronic component for repair is provided. Specifically, the bonding apparatus of the present invention is used to bond good electronic components to the area after the defective electronic components have been removed in the circuit substrate encapsulated with a plurality of electronic components, that is, the repaired area; The encapsulation surface of the circuit board is the inner surface of the opposite side; the transfer mechanism is to transfer the carrier tape body in the long axis direction, and the carrier tape system has a plurality of electrode parts with soldered electrode parts side by side in the long axis direction Repair electronic parts, and keep the end face opposite to the electrode part; flux coating device, which is attached to the delivery side of the carrier belt to apply flux to the electrodes of the plurality of repair electronic parts part; an observation device, which is used to observe and align the repaired area of the electronic parts for repair after treatment and the circuit substrate coated with the flux; the lifting mechanism is to raise the pedestal to repair the treated area. An electronic part is crimped on the repair area of the circuit substrate; and a heating device is used to heat and melt the soldering material of the electrode part of the treated electronic part for repair, so as to electrically improve the electrical properties of the treated electronic part for repair bonded to the repaired area of the circuit substrate. Furthermore, the repairing device of the present invention includes an electronic component removing device and a bonding device; the electronic component removing device irradiates a defective electronic component on a circuit board encapsulated with a plurality of electronic components to remove the defective electronic component so as to remove the defective electronic component. The circuit board forms a repair area, and the position coordinates of the repair area are memorized; the bonding device is configured to include: a pedestal for holding the inner surface on the opposite side of the packaging surface of the circuit board; a transfer mechanism for placing the belt The body is transferred in the long-axis direction, and the carrier belt system has a plurality of repaired electronic parts with electrode parts after welding processing side by side in the long-axis direction, and maintains the end face on the opposite side of the electrode part; flux; A coating device is used to apply flux to the electrode parts of the plurality of electronic parts for repair on the delivery side of the carrier belt; an observation device is used to observe the treated electronic parts coated with the flux for repair. The parts are aligned with the repaired area of the circuit substrate; a lifting mechanism is used to raise the pedestal to crimp the processed repaired electronic parts on the repaired area of the circuit substrate; and a heating device is used to make the The welding material of the electrode part of the electronic component for repair after treatment is heated and melted to electrically join the electronic component for repair after treatment in the repair area of the circuit substrate; the pedestal is configured to be connected with the electronic component removal device. The joint devices move between the joint devices, and the repair region is positioned at the joint position between the joint device and the processed repaired electronic part according to the position coordinates of the repair region. Preferably, the repairing device can be configured to be further provided with a point-on-point inspection device, which is powered on the circuit substrate to determine the goodness of the plurality of electronic parts, and can memorize the position coordinates of the defective electronic parts; the pedestal is configured to The point-start inspection device is moved between the electronic part removing device and the bonding device, and the defective electronic part is positioned at the laser light position of the electronic part removing device according to the position coordinates of the defective electronic part, and the repair is performed according to the The position coordinates of the area are used to locate the repair area at the joint position of the joint device and the processed repair electronic part. Further, the repair method of the present invention will perform the following steps: the first step is to hold the inner surface on the pedestal on the opposite side to the packaging surface of the circuit substrate encapsulated with the plurality of electronic components; the second step is to place the mounting tape The body is transported in the long axis direction, and the carrier belt system has a plurality of electronic parts for repair including the electrode parts after the welding process side by side in the long axis direction, and maintains the end face on the opposite side of the electrode part; the third The step is to apply flux on the electrode parts of the plurality of repaired electronic parts; the fourth step is to observe the repaired electronic parts coated with the flux and the circuit substrates that have been removed from defective electrons. The area behind the parts, that is, the repair area, and aligning it; the fifth step is to crimp the treated electronic component for repair on the repaired area of the circuit substrate; and the sixth step is to make the treated repaired area. The soldering material of the electrode part of the electronic component for repair is heated and melted to electrically bond the electronic component for repair after the treatment to the repair area of the circuit board. Preferably, the repair method may perform the following steps before implementing the first step: energizing the circuit substrate to determine the goodness of the plurality of electronic parts, and irradiating the laser light on the defective electronic parts that are determined to be defective, to The defective electronic parts are removed to form the repaired area on the circuit substrate. According to the present invention, since the flux is applied to the electrode portion of the electronic component after the soldering process, when the electronic component is joined to a specific area of the circuit board by heating and melting the solder, the heated Flux is used to clean the debris on the surface of the solder material and the above-mentioned specific area of the circuit board to eliminate the occurrence of poor electrical connection. Moreover, compared with the method of applying flux to the circuit board, it is not necessary to wash and remove the excess flux of the circuit board after connecting the electronic components to the circuit board, so that the bonding operation becomes easier.
以下,依據添附圖式來詳細地說明本發明之實施型態。圖1係顯示本發明之接合裝置之一實施型態的概略構成之前視圖。該接合裝置1係被使用在修復裝置中,會將良品的電子零件安裝在電路基板中的缺陷電子零件已被去除後之區域(即修復區域),且係構成為具備台座2、移送機構3、助焊劑塗佈裝置4、觀察裝置5、升降機構6及加熱裝置7。以下,便針對電子零件為微型LED(Light Emitting Diode)(以下簡稱作「LED」)之情況來加以說明。
上述台座2如圖4所示,係將陣列狀地配置封裝有複數LED8之顯示面板(電路基板)9之與封裝面為相反側的內面吸附在載置面2a來加以保持,會在正交於後述觀察裝置5之對物透鏡10的光軸之XY平面內移動,且在垂直於XY平面之Z方向上做升降,而繞著載置面2a的中心軸轉動(θ)。
上述顯示面板9係於交叉設置之複數掃描線及資料線的交叉區域具備LED8以及會驅動該LED8之薄膜電晶體,可為玻璃等所構成的硬式基板,亦可為聚醯亞胺等所構成的可撓性基板。
上述台座2的上方係設置有移送機構3。該移送機構3如圖2所示,會將例如UV剝離帶、黏著帶或熱剝離帶等載置帶體11(參照圖3)移送於長軸方向,且係構成為具備送出捲筒12、捲繞捲筒13、分離捲筒14及複數導引捲筒15,該載置帶體11係於長軸方向並排地具備有具有藉由焊材34來被焊接處理後的電極部8a之複數修復用LED8A,且會保持與電極部8a為相反側之端面8b。
此外,載置帶體11如圖3(a)所示,係貼付有會保護修復用LED8A的電極部8a之保護膜16。又,圖3(b)雖係顯示於載置帶體11的長軸方向具備有並排成一列之修復用LED8A,但載置帶體11亦可具備有在長軸方向上並排成複數列之修復用LED8A。
此處,上述送出捲筒12係以修復用LED8A的電極部8a作為外側來間歇地送出已被捲繞成捲之載置帶體11,可控制例如送出捲筒馬達(省略圖示)的驅動來對載置帶體11賦予固定的反張力。又,上述捲繞捲筒13係以每固定量來捲繞已剝離修復用LED8A後的載置帶體11,會藉由捲繞捲筒馬達(省略圖示)而被驅動且旋轉於捲繞方向。另外,上述分離捲筒14係藉由捲筒馬達(省略圖示)而被旋轉驅動,且會對應於載置帶體11的送出量而以每固定量來捲繞已從載置帶體11剝除修復用LED8A後之保護膜16。然後,導引捲筒5係用以限制平行於載置帶體11的長軸之兩端部來穩定地保持載置帶體11的移送,可依需要而在適當位置處設置有複數個。
載置帶體11的送出側係設置有助焊劑塗佈裝置4。該助焊劑塗佈裝置4會將助焊劑17塗佈在已被剝除保護膜16後之修復用LED8A的電極部8a,如圖4所示,係面對載置帶體11而具備噴嘴18,可從該噴嘴18來將助焊劑17噴霧至修復用LED8A的電極部8a。又,助焊劑塗佈裝置4之載置帶體11的移送方向下游側側面係設置有為過剩地塗佈有助焊劑之情況所具備,而會回收助焊劑17之回收部19。
在上述助焊劑塗佈裝置4之載置帶體11的移送方向下游側處,台座2的上方係設置有觀察裝置5。該觀察裝置5如圖4所示,會觀察塗佈有助焊劑17之經處理後的修復用LED8B與顯示面板9的修復區域20並使其對位,如圖1所示,係構成為從台座2的載置面2a側而具備按壓組件21、對物透鏡10及觀察光學系統22(參照圖7)。
上述按壓組件21係由石英等透明的玻璃組件所形成,為固定設置,會配合台座2的上升而透過載置帶體11來將經處理後的修復用LED8B壓接在顯示面板9的修復區域20。詳細地說明,按壓組件21如圖5所示,係具有對物透鏡10側的上面21a以及使載置帶體11滑動之下面21b,上面21a係形成為以對物透鏡10的焦點位置C作為中心之曲率半徑來加以表示之曲面,下面21b則是形成為具有會交叉於載置帶體11移送方向的中心軸之柱面。
此情況下,如圖5所示,穿透對物透鏡10的光(照明光)會穿透按壓組件21而聚光在對齊於觀察面23之對物透鏡10的焦點位置C。然後,從觀察面23反射的反射光會形成球面波SW,並再次穿透按壓組件21而回到對物透鏡10。
圖6係關於按壓組件21之上面21a的形狀之說明圖。圖6(a)係例示按壓組件21的上面21a乃具有曲面形狀之情況,該曲面形狀係具有與反射光的球面波SW一致之曲率。此情況下,如使用圖5所敘述般地,由於球面波SW的波面在按壓組件21的上面21a並未改變。亦即,光並未在上面21a發生折射,故不會產生像差。圖6(b)係例示不同於上述按壓組件21之上面21a的形狀,上面21a'乃具有平面形狀之按壓組件21’。當上面21a’為平面形狀的情況,則光便會在上面21a’發生折射而產生像差。於是,光學系統的解析度便會降低而妨礙高精度的定位。
按壓組件21之下面21b的形狀若由光學性觀點來看則最好是平面。但只要是視野內的光線路徑差會收斂在對物透鏡10的焦點深度內之範圍內,則曲面亦不會有問題。本發明中,如上所述,下面21b係形成為具有會交叉於載置帶體11移送方向的中心軸之柱面。
上述按壓組件21的上方係設置有對物透鏡10。該對物透鏡10會將照明光聚光在觀察面23,並且與後述觀察光學系統22的第1成像透鏡24協動來使經處理後之修復用LED8B的端面8b(觀察面23)成像在第1觀察照相機25的攝影面,且與觀察光學系統22的第2成像透鏡26協動來使顯示面板9的修復區域20(觀察面23)成像在第2觀察照相機27的攝影面。
上述對物透鏡10的上方係設置有觀察光學系統22。該觀察光學系統22係用以取得經處理後的修復用LED8B之端面8b的影像及顯示面板9之修復區域20的影像,且控制台座2朝XY方向的驅動並使其對位以使兩影像相互對齊,如圖7所示,係構成為具備從對物透鏡10到第1觀察照相機25之第1光線路徑28、從對物透鏡10到第2觀察照相機27之第2光線路徑29、以及透過對物透鏡10來照射觀察面23之照明系統光線路徑30。
詳細地說明,觀察光學系統22如圖7所示,係在從對物透鏡10到第1觀察照相機25之第1光線路徑28上具備且固定有會與對物透鏡10協動來使經處理後之修復用LED8B的端面8b成像在第1觀察照相機25的攝影面之第1成像透鏡24。又,從對物透鏡10到第1觀察照相機25之第1光線路徑28中,在對物透鏡10與第1成像透鏡24之間藉由第1半透鏡31而被分歧之第2光線路徑29上係具備會與對物透鏡10協動來使顯示面板9的修復區域20成像在第2觀察照相機27的攝影面之第2成像透鏡26。此情況下,第2成像透鏡26係可一邊維持顯示面板9之修復區域20的成像(最佳聚焦)一邊隨著台座2的上升而移動於光軸方向。另外,從對物透鏡10到第1觀察照相機25之第1光線路徑28中,在對物透鏡10與第1半透鏡31之間藉由第2半透鏡32而被分歧之光線路徑(照明系統光線路徑30)上係設置有照明光源33,可透過對物透鏡10、按壓組件21及載置帶體11來將可見光照射在經處理後的修復用LED8B及顯示面板9的修復區域20,且以第1及第2觀察照相機25、27來觀察經處理後之修復用LED8B的端面8b及顯示面板9的修復區域20。
上述台座2係設置有升降機構6。該升降機構6係用以讓台座2升降來將經處理後的修復用LED8B壓接在顯示面板9的修復區域20及解除壓接,可為會使台座2移動於Z方向之電動台座或氣壓缸等。
與上述觀察裝置5一體地設置有加熱裝置7。該加熱裝置7會使經處理後的修復用LED8B之電極部8a的焊材34(參照圖2)加熱熔融,來將經處理後的修復用LED8B電性接合在顯示面板9之修復區域20的電極襯墊,可透過對物透鏡10、按壓組件21及載置帶體11來將紅外線照射在經處理後的修復用LED8B。具體而言,加熱裝置7如圖7所示,係在會因稜鏡35而被分歧之光線路徑36上具備紅外線雷射37,該稜鏡35係在從對物透鏡10朝照明光源33之照明系統光線路徑30中的斜面具有半透鏡。
此外,圖1中的符號38為用以在助焊劑塗佈裝置4之載置帶體11的移送方向上游側朝載置帶體11釋放出離子,以將帶電後之載置帶體11的靜電中和來加以去除之電離器。又,圖7中,符號39為用以讓從紅外線雷射37被放射出而直徑擴大後的雷射光變得準直之準直透鏡,符號40為讓變得準直後的雷射光會配合經處理後的修復用LED8B之端面8b的形狀來加以整形之槽縫,符號41為會與對物透鏡10協動來使槽縫成像在經處理後之修復用LED8B的端面8b之成像透鏡。又,符號42為用以調整光線路徑36來使從紅外線雷射37所放射出的雷射光正確地照射在經處理後之修復用LED8B的端面8b之導引照明光源,符號43為用以讓到導引照明光源42為止之光線路徑從光線路徑36分歧之半透鏡稜鏡。然後,符號44為用以讓光線路徑彎折90°之全反射鏡。
圖8係顯示使用有本發明的接合裝置1之修復裝置之第1實施型態的概略構成之前視圖。
上述第1實施型態中係並排於接合裝置1而設置有LED去除裝置45。該LED去除裝置45為用以將雷射光照射在封裝有複數LED8之顯示面板9的缺陷LED8,來去除缺陷LED8以於顯示面板9形成修復區域20,係構成為具備觀察光學系統單元46及雷射光學系統單元47。
上述觀察光學系統單元46係透過對物透鏡48來取得顯示面板9之缺陷LED8的影像,且依據所取得之影像的影像資訊來控制台座2的移動,以將上述缺陷LED8定位在對物透鏡48的視野中心,而成為與接合裝置1之觀察光學系統22相同的光學構成。具體而言,觀察光學系統單元46係構成為在從對物透鏡48朝觀察照相機之光線路徑上具備有會與對物透鏡48協動來使上述缺陷LED8成像在觀察照相機的攝影面之成像透鏡,且在藉由從對物透鏡48朝成像透鏡之光線路徑中的半透鏡而被分歧之光線路徑上具備有照明光源。此情況下,可具備固定的上述成像透鏡,亦可具備可沿著光軸移動之上述成像透鏡。具備有可移動的成像透鏡之情況便能實現自動對焦功能。
上述雷射光學系統單元47係透過對物透鏡48來將雷射光照射在上述缺陷LED8以使缺陷LED8昇華來加以去除,具備會放射出紫外線(近紫外線或遠紫外線)、紅外線或第2高諧波(SHG)之雷射。此情況下,可個別地具備單一波長的雷射來切換使用,亦可將基本波的波長轉換來生成高次高諧波並輸出需要波長的雷射光。
上述雷射光學系統單元47具體而言為與接合裝置1的加熱裝置7相同之光學構成,係於藉由朝向上述照明光源之光線路徑中的其他半透鏡或會反射可見光而讓紫外線穿透之波長選擇鏡而被分歧之光線路徑上具備有雷射。又,朝向上述雷射之光線路徑上係設置有用以配合LED8之端面8b的形狀來將雷射光整形之槽縫,且設置有會與對物透鏡48協動來使該槽縫成像在缺陷LED8之成像透鏡。
由於對物透鏡48的焦點位置會因所使用之雷射光的波長而不同,故當切換使用複數波長的雷射光之情況,則最好是對應於所使用之波長而具備複數個對物透鏡48。圖8係例示可將紅外線及SHG用的第1對物透鏡48A、近紫外線用的第2對物透鏡48B以及遠紫外線用的第3對物透鏡48C安裝在轉盤49來切換使用之LED去除裝置45。此外,圖8中的符號50為可吹除及吸引昇華後的LED8來加以去除以抑制修復區域20產生碎屑之吹除・吸引部,係對向於對物透鏡48而設置有開口51。
接著,針對使用上述方式所構成之上述第1實施型態的修復裝置所進行之修復方法,參照圖9、10的流程圖來加以說明。
首先,如圖9所示,步驟S1中會對被封裝在顯示面板9之複數LED8實施點啟檢查來判定LED8的良窳。上述第1實施型態中,LED8的點啟檢查係藉由獨立於上述修復裝置而另外具備之點啟檢查裝置來加以實施。具體而言,在使用點啟檢查裝置所具備之對位裝置來實施對位以使台座上所載置之顯示面板9的XY座標軸與點啟檢查裝置的XY座標軸對齊後,當通電於顯示面板9來讓複數LED8全部點啟或是在具有紅、綠、藍3色的LED8之情況,則是會點啟每個顏色且藉由CCD或CMOS等影像感測器來拍攝以實施點啟檢查。此外,影像感測器亦可為即便是固定照相機,仍可一邊從顯示面板9的一端朝另一端移動一邊攝影之線型感測器。
接著,步驟S2中會依據影像感測器的攝影影像來進行良窳判定。例如,當LED8的點啟輝度為特定基準值以上且發光波長位在特定波長帶域內時,便會判定為良品,而當點啟輝度低於上述基準值時、未點啟時、或發光波長的偏移超過容許範圍時,便會判定為缺陷品。然後,在檢測出缺陷LED8後,由相對於顯示面板9所預先設定的基準位置(例如面板的中心畫素)之行數及列數來求得該缺陷LED8的位置座標,並將該位置座標記憶在可移動式媒體。或是,當點啟檢查裝置係連接於修復裝置與工廠內的LAN(Enthernet)之情況,亦可將上述位置座標的資訊記憶在各裝置所具備之控制單元的記憶部或已連接網路之資料伺服器,來使上述位置座標的資訊可共有在裝置間。此外,以下的說明中係針對各裝置可透過已連接網路之資料伺服器來共有資料的情況加以說明。
步驟S2中,當未檢測出缺陷LED8(“NO”判定)時,便結束顯示面板9的修復工序。另一方面,當檢測出缺陷LED8(“YES”判定)時,則是會前進至使用第1實施型態的修復裝置之修復工序,來實施步驟S3以將缺陷LED8自顯示面板9去除。
具體而言,步驟S3中,首先,係將顯示面板9吸附保持在修復裝置之台座2的載置面2a並定位在LED去除裝置45的正下方位置。在LED去除裝置45中,會使用對位裝置(省略圖示)來實施對位以讓顯示面板9的XY座標軸與LED去除裝置45的XY座標軸對齊。又,LED去除裝置45會從上述資料伺服器來讀取上述點啟檢查裝置中所被檢測出之缺陷LED8的位置座標,並依據該位置座標來將缺陷LED8(當存在有複數個缺陷LED8之情況,則為所選擇之1個缺陷LED8)定位在LED去除裝置45之雷射光的照射位置。進一步地,一邊藉由觀察光學系統單元46來觀察缺陷LED8,一邊控制升降機構6所進行之台座2的升降以聚焦在缺陷LED8的端面8b,並且使台座2微動於XY方向來微調缺陷LED8相對於整雷射光的照射位置之位置。然後,從雷射光學系統單元47的雷射放射出例如紫外線(近紫外線或遠紫外線),並將藉由槽縫而被整形至配合缺陷LED8之端面8b的形狀後之紫外線的雷射光照射在缺陷LED8。藉此,缺陷LED8便會被燒蝕去除,而於顯示面板9形成有修復區域20。又,可將紅外線或第2高諧波(SHG)等照射在缺陷LED8,抑或,亦可組合紫外線與紅外線或SHG來加以照射。如此般地去除缺陷LED8後,將顯示面板9中已被去除缺陷LED8後之區域(即修復區域)20的位置座標保存在資料伺服器。又,當存在有其他第2缺陷LED8時,會依據從上述資料伺服器所讀取之上述第2缺陷LED8的位置座標來將該第2缺陷LED8定位在雷射光的照射位置。然後,與上述同樣地去除上述第2缺陷LED8,並將該修復區域20的位置座標保存在資料伺服器。
接著,步驟S4中會使用接合裝置1來將良品的LED8安裝在顯示面板9的修復區域20,便結束接合工序。此外,當使用接合裝置1之上述接合工序結束後,可依需要而回到步驟S1,並藉由點啟檢查裝置來重新實施顯示面板9的點啟檢查。
圖10為顯示使用接合裝置1所進行的接合工序之流程圖,係顯示上述步驟S4的具體工序。
首先,移動台座2並依據從資料伺服器所讀取之上述修復區域20的位置座標,來將顯示面板9的修復區域20(當存在有複數修復區域20的情況,則為所選擇之1個修復區域20)定位在接合裝置1的觀察光學系統22之對物透鏡10的視野內而開始接合。此情況下,係使用第2觀察照相機27來觀察顯示面板9的表面,並使第2成像透鏡26偏移於光軸方向來實施自動對焦,以讓修復區域20的影像變得清楚。
在圖10的步驟S11中,係從助焊劑塗佈裝置4來朝被保持在載置帶體11(例如黏著帶)且已被剝除保護膜16後的修復用LED8A噴霧出助焊劑17,以將助焊劑17塗佈在修復用LED8A之經焊接處理後的電極部8a。
接著,步驟S12中,如圖4所示,會使載置帶體11移送特定量,來使塗佈有助焊劑17之經處理後的修復用LED8B會在按壓組件21的正下方而定位在對物透鏡10的視野內。此情況下,如圖11所示,係透過載置帶體11、按壓組件21、對物透鏡10及第1成像透鏡24來使經處理後之修復用LED8B的端面8b成像在第1觀察照相機25的攝影面。另一方面,透過載置帶體11、按壓組件21、對物透鏡10及第2成像透鏡26來使顯示面板9的修復區域20成像在第2觀察照相機27的攝影面。
在接合裝置1之控制部(省略圖示)中,會比較處理藉由第1觀察照相機25所拍攝取得之經處理後的修復用LED8B之端面8b的影像資訊與藉由第2觀察照相機27所拍攝取得之顯示面板9之修復區域20的影像資訊,來計算出兩影像的位移量及位移方向。然後,使台座2微動於X及Y方向來實施對位以讓兩影像對齊。
接著,步驟S13中,當結束對位後會使台座2上升,來將經處理後之修復用LED8B的電極部8a壓接在顯示面板9之修復區域20的電極襯墊。此時,伴隨著台座2的上升,第2成像透鏡26會偏移至圖12所示之箭頭方向,來維持第2觀察照相機27中之顯示面板9之修復區域20的成像狀態(最佳聚焦狀態)。
接著,步驟S14中,會驅動加熱裝置7的紅外線雷射37,且透過對物透鏡10、按壓組件21及載置帶體11來將藉由槽縫40而被整形至配合LED8之端面8b的形狀後之紅外線的雷射光照射在經處理後之修復用LED8B的端面8b。藉此,經處理後的修復用LED8B之電極部8a的焊材34便會被加熱熔融,來將LED8的電極部8a電性接合在顯示面板9之修復區域20的電極襯墊。此時,由於LED8之電極部8a上的焊材34係塗佈有助焊劑17,故會洗淨焊材34的表面及上述修復區域20的表面來排除電性連接不良。
當針對修復區域20之LED8的修復結束後,便使台座2下降。此時,由於被接合於顯示面板9的修復區域20之經處理後的修復用LED8B會和台座2一起下降,故會因焊材34所致之接合強度與黏著帶的黏著強度之強度差,而讓經處理後的修復用LED8B從載置帶體11被剝離。
接著,步驟S15中會判斷是否需要更進一步的修復處理。亦即,會判斷是否存在有其他修復區域20。然後,若未存在有其他修復區域20時,則步驟S15便會成為“NO”判定而結束使用接合裝置1之接合工序。另一方面,若存在有複數修復區域20時,則步驟S15便會成為“YES”判定。同時,依據第2修復區域20的位置座標來使台座2移動於XY方向,以將上述第2修復區域20定位在接合裝置1的接合位置。之後,回到步驟S11,來從助焊劑塗佈裝置4朝向已被剝除保護膜16後的第2修復用LED8A噴霧出助焊劑17,以將助焊劑17塗佈在上述第2修復用LED8A之經焊接處理後的電極部8a。之後,與上述同樣地對第2修復區域20實施修復處理。然後,反覆實施步驟S11~S15直到針對所有修復區域20之修復處理結束,且變成未存在有其他修復區域20而步驟S15成為“NO”判定為止。
圖13係顯示本發明之修復裝置之第2實施型態的概略構成之前視圖。
與上述第1實施型態之相異點為修復裝置係具備點啟檢查裝置52。該點啟檢查裝置52係具有與第1實施型態所說明之點啟檢查裝置相同的構成,可通電於顯示面板9來判定複數LED8的良窳且取得缺陷LED8的位置座標。然後,將LED去除裝置45及接合裝置1一體地加以設置。
依據此第2實施型態,首先,移動台座2來將被吸附保持在台座2之顯示面板9定位在點啟檢查裝置52之影像感測器53的攝影區域內。此時,使用對位裝置(省略圖示)來實施對位以使顯示面板9的XY座標軸與點啟檢查裝置52的XY座標軸對齊。之後,點啟顯示面板9的複數LED8且藉由影像感測器53來拍攝,以檢查是否存在有未點啟等的缺陷LED8。其結果,當顯示面板9存在有缺陷LED8之情況,便會取得該缺陷LED8的位置座標,並將該缺陷LED8之位置座標的資訊保存在修復裝置的記憶部(省略圖示)。
接著,移動台座2來將顯示面板9搬送至LED去除裝置45的正下方。在LED去除裝置45中,會從修復裝置的記憶部來讀取缺陷LED8之位置座標的資訊,且依據該位置座標來將顯示面板9上的缺陷LED8(存在有複數缺陷LED8的情況則為所選擇之1個缺陷LED8)定位在LED去除裝置45之雷射光的照射位置。進一步地,在LED去除裝置45中,會一邊藉由觀察光學系統單元46的觀察照相機來觀察缺陷LED8,一邊讓台座2升降來聚焦在缺陷LED8的端面8b。然後,從雷射光學系統單元47的雷射放射出例如紫外線,並將藉由槽縫而被整形至配合缺陷LED8之端面8b的形狀後之紫外線的雷射光照射在缺陷LED8。藉此,缺陷LED8便會被燒蝕去除,而於顯示面板9形成有修復區域20。
當LED去除裝置45所進行之缺陷LED8的去除結束後,移動台座2來將顯示面板9搬送至接合裝置1的正下方。在接合裝置1中,會依據從修復裝置的記憶部所讀取之缺陷LED8的位置座標來讓台座2移動,以將顯示面板9的修復區域20(存在有複數修復區域20的情況,則為所選擇之1個修復區域20)定位在接合裝置1之對物透鏡10的視野內。進一步地,在接合裝置1中,會使載置帶體11移送於上述長軸方向,該載置帶體11係於長軸方向並排地具有具備經焊接處理後的電極部8a之複數修復用LED8A,且會保持與電極部8a為相反側之端面8b。接著,將助焊劑塗佈在已被剝除保護膜16後之修復用LED8A的電極部8a。接著,以第1及第2觀察照相機25、27來觀察塗佈有助焊劑17之經處理後的修復用LED8B與顯示面板9的修復區域20,並依據所取得之兩影像的影像資訊來讓台座2微動而實施對位,以使兩影像對齊。接著,使台座2上升來將經處理後的修復用LED8B壓接在顯示面板9的修復區域20。然後,藉由從加熱裝置7所照射之紅外線雷射光來將經處理後的修復用LED8B之電極部8a的焊材34加熱熔融,以將經處理後的修復用LED8B電性接合在顯示面板9的修復區域20。
依據本發明,由於係將助焊劑17塗佈在經焊接處理後之修復用LED8A的電極部8a,故加熱熔融焊材34來將修復用LED8A接合在顯示面板9的修復區域20之際,便可藉由加熱後的助焊劑17來洗淨焊材34的表面及顯示面板9之修復區域20的碎屑,以排除電性連接不良的發生。又,相較於將助焊劑17塗佈在顯示面板9之方法,則在將修復用LED8A連接於顯示面板9後,不須洗淨顯示面板9上的多餘助焊劑17來加以去除,故修復作業會變得容易。
此外,上述實施型態中雖已針對電子零件為微型LED8的情況加以說明,但本發明並未侷限於此,電子零件亦可為次毫米LED或半導體晶片等任何電子零件。因此,電路基板並未侷限於顯示面板9。
上述實施型態係概略地表示成能夠理解及實施本發明之程度,惟本發明並未侷限於此。本發明可在未背離申請專利範圍所示之技術思想的範圍內來做各種變更及修正。
Hereinafter, embodiments of the present invention will be described in detail based on the accompanying drawings. FIG. 1 is a front view showing a schematic configuration of an embodiment of the bonding apparatus of the present invention. The
1:接合裝置
2:台座
2a:載置面
3:移送機構
4:助焊劑塗佈裝置
5:觀察裝置
6:升降機構
7:加熱裝置
8:LED(電子零件)
8a:電極部
8b:端面
8A:修復用LED
8B:經處理後之修復用LED
9:顯示面板(電路基板)
10:對物透鏡
11:載置帶體
12:送出捲筒
13:捲繞捲筒
14:分離捲筒
15:導引捲筒
16:保護膜
17:助焊劑
19:回收部
20:修復區域
21:按壓組件
21a:上面
21b:下面
34:焊材
37:紅外線雷射
38:電離器
45:LED去除裝置(電氣零件去除裝置)
52:點啟檢查裝置
1: Engagement device
2:
圖1係顯示本發明之接合裝置之一實施型態的概略構成之前視圖。 圖2係顯示本發明之接合裝置所使用的修復用LED之圖式,(a)為俯視圖,(b)為前視圖。 圖3係顯示本發明之接合裝置所使用的載置帶體之圖式,(a)為前視圖,(b)為去除保護膜後之俯視圖。 圖4為本發明之接合裝置的主要部分放大前視圖。 圖5係顯示本發明之接合裝置所使用之按壓組件的形狀之說明圖。 圖6為關於按壓組件的上面形狀之說明圖,(a)係顯示上面乃具有曲面形狀的情況,該曲面形狀係具有和反射光的球面波一致之曲率,(b)係顯示上面為平面形狀的情況。 圖7係顯示本發明之接合裝置所使用之觀察裝置的觀察光學系統及加熱裝置的雷射光學系統之圖式。 圖8係顯示本發明之修復裝置之第1實施型態的概略構成之前視圖。 圖9係顯示本發明之修復方法之流程圖。 圖10係顯示上述修復方法中的接合工序之流程圖。 圖11為說明利用上述觀察光學系統來同時觀察焦點位置不同的觀察面之第1示意圖。 圖12為說明利用上述觀察光學系統來同時觀察焦點位置不同的觀察面之第2示意圖。 圖13係顯示本發明之修復裝置之第2實施型態的概略構成之前視圖。 FIG. 1 is a front view showing a schematic configuration of an embodiment of the bonding apparatus of the present invention. FIG. 2 is a diagram showing a repairing LED used in the bonding device of the present invention, (a) is a plan view, and (b) is a front view. Fig. 3 is a schematic diagram showing a carrier tape body used in the bonding device of the present invention, (a) is a front view, and (b) is a top view after removing the protective film. Fig. 4 is an enlarged front view of the main part of the engaging device of the present invention. FIG. 5 is an explanatory view showing the shape of a pressing member used in the joint device of the present invention. Fig. 6 is an explanatory view of the top shape of the pressing member, (a) shows the case where the top has a curved surface shape having a curvature corresponding to the spherical wave of the reflected light, and (b) shows that the top has a flat shape Case. FIG. 7 is a diagram showing an observation optical system of an observation apparatus and a laser optical system of a heating apparatus used in the bonding apparatus of the present invention. Fig. 8 is a front view showing the schematic configuration of the first embodiment of the repair apparatus of the present invention. FIG. 9 is a flow chart showing the repairing method of the present invention. FIG. 10 is a flow chart showing the joining process in the above-mentioned repairing method. FIG. 11 is a first schematic diagram illustrating the simultaneous observation of observation surfaces with different focal positions by the observation optical system. FIG. 12 is a second schematic diagram illustrating simultaneous observation of observation surfaces with different focal positions by the observation optical system. Fig. 13 is a front view showing the schematic configuration of the second embodiment of the repair apparatus of the present invention.
1:接合裝置 1: Engagement device
2:台座 2: Pedestal
2a:載置面 2a: Mounting surface
3:移送機構 3: Transfer mechanism
4:助焊劑塗佈裝置 4: Flux coating device
5:觀察裝置 5: Observation device
6:升降機構 6: Lifting mechanism
7:加熱裝置 7: Heating device
10:對物透鏡 10: Object lens
11:載置帶體 11: Placing the belt
12:送出捲筒 12: Send out the reel
13:捲繞捲筒 13: Winding the reel
14:分離捲筒 14: Separating the reels
15:導引捲筒 15: Guide the reel
16:保護膜 16: Protective film
21:按壓組件 21: Press the assembly
38:電離器 38: Ionizer
Claims (15)
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JP2020-149743 | 2020-09-07 | ||
JP2020149743A JP2022044218A (en) | 2020-09-07 | 2020-09-07 | Bonding apparatus, repair apparatus, and repair method |
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