TW202214058A - Bonding device, repairing device and repairing method - Google Patents

Bonding device, repairing device and repairing method Download PDF

Info

Publication number
TW202214058A
TW202214058A TW110126231A TW110126231A TW202214058A TW 202214058 A TW202214058 A TW 202214058A TW 110126231 A TW110126231 A TW 110126231A TW 110126231 A TW110126231 A TW 110126231A TW 202214058 A TW202214058 A TW 202214058A
Authority
TW
Taiwan
Prior art keywords
repair
electronic
electronic component
area
flux
Prior art date
Application number
TW110126231A
Other languages
Chinese (zh)
Inventor
大倉直也
鈴木良和
Original Assignee
日商V科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商V科技股份有限公司 filed Critical 日商V科技股份有限公司
Publication of TW202214058A publication Critical patent/TW202214058A/en

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors

Abstract

This bonding device holds an end surface on the opposite side to an electrode part of each of a plurality of repair LEDs having the soldered electrode part, and electrically bonds, to a repair region designated on a display panel on which a plurality of LEDs have been mounted, each of the repair LEDs on a carrier tape transferred in a longitudinal direction. The bonding device is provided with, on the upstream side in the transfer direction of the carrier tape from a bonding position at which the repair LED is to be bonded to the repair region, a flux applying device which applies a flux on the electrode part of the repair LED.

Description

接合裝置、修復裝置及修復方法Jointing device, repairing device and repairing method

本發明係關於一種將電子零件封裝在電路基板之接合裝置,尤其是關於一種可洗淨經焊接處理後之電子零件之電極部的焊材表面及電路基板表面,並且排除電性連接不良之接合裝置、修復裝置及修復方法。The present invention relates to a bonding device for encapsulating electronic parts on a circuit board, in particular to a bonding device that can clean the surface of the soldering material and the surface of the circuit board of the electrode part of the electronic parts after soldering treatment, and eliminates poor electrical connection. Device, repair device and repair method.

傳統修復裝置所使用的接合裝置係將新導電性接合材料提供至從配置於基板上之複數LED中所檢測出的缺陷LED已被去除後之基板的缺陷發生區域,並將新LED安裝在新導電性接合材料上,而加熱新導電性接合材料以使新LED與基板結合(參照例如日本特開2020-102616號公報)。 然而上述般傳統接合裝置中,在使用焊材來作為接合材料時,會有焊材表面形成有氧化膜而導致新LED的電極部與基板的電極部發生連接不良之問題。 針對上述般之問題,考慮了將助焊劑塗佈在基板以去除焊材表面的氧化膜。然而此情況下,在將新LED連接於基板後,必須洗淨基板上的多餘助焊劑來加以去除,而有修復工序變得繁雜之問題。 因此,本發明有鑑於上述般之問題,其目的為提供一種可洗淨經焊接處理後之電子零件之電極部的焊材表面及電路基板表面,並且排除電性連接不良之接合裝置、修復裝置及修復方法。 The bonding apparatus used in the conventional repair apparatus supplies a new conductive bonding material to the defect occurrence region of the substrate after the defective LEDs detected from the plurality of LEDs arranged on the substrate have been removed, and mounts the new LED on the new LED. On the conductive bonding material, the new conductive bonding material is heated to bond the new LED to the substrate (see, for example, Japanese Patent Laid-Open No. 2020-102616). However, in the above-mentioned conventional bonding apparatus, when the solder material is used as the bonding material, there is a problem that an oxide film is formed on the surface of the solder material, resulting in poor connection between the electrode portion of the new LED and the electrode portion of the substrate. In view of the above-mentioned problems, it has been considered to apply flux to the substrate to remove the oxide film on the surface of the solder material. However, in this case, after connecting a new LED to the substrate, it is necessary to wash and remove the excess flux on the substrate, and there is a problem that the repair process becomes complicated. Therefore, in view of the above-mentioned problems, the present invention aims to provide a bonding device and a repairing device that can clean the surface of the soldering material and the surface of the circuit board of the electrode part of the electronic component after the soldering process, and eliminate the poor electrical connection. and repair methods.

為達成上述目的,本發明之接合裝置係將載置帶體的修復用電子零件電性接合在封裝有複數電子零件之電路基板上的指定區域,該載置帶體會保持與具有經焊接處理後的電極部之複數該修復用電子零件的該電極部為相反側之端面,且被移送於長軸方向;該修復用電子零件被接合於該指定區域之接合位置之該載置帶體的移送方向上游側係設置有會將助焊劑塗佈在該修復用電子零件的該電極部之助焊劑塗佈裝置。 本發明之接合裝置具體而言係將良品的電子零件接合在封裝有複數電子零件之電路基板中已被去除缺陷電子零件後的區域,即修復區域;係構成為具備:台座,係保持與該電路基板之封裝面為相反側的內面;移送機構,係將載置帶體移送於長軸方向,該載置帶體係於該長軸方向並排地具有具備經焊接處理後的電極部之複數修復用電子零件,且會保持與該電極部為相反側之端面;助焊劑塗佈裝置,係在該載置帶體的送出側來將助焊劑塗佈在該複數修復用電子零件的該電極部;觀察裝置,係觀察塗佈有該助焊劑之經處理後修復用電子零件與該電路基板的該修復區域並使其對位;升降機構,係使該台座上升來將該經處理後修復用電子零件壓接在該電路基板的該修復區域;以及加熱裝置,係使該經處理後修復用電子零件之該電極部的焊材加熱熔融,來將該經處理後修復用電子零件電性接合在該電路基板的該修復區域。 又,本發明之修復裝置係具備電子零件去除裝置及接合裝置;該電子零件去除裝置係將雷射光照射在封裝有複數電子零件之電路基板的缺陷電子零件,來去除該缺陷電子零件以於該電路基板形成修復區域,且會記憶該修復區域的位置座標;該接合裝置係構成為具備:台座,係保持與該電路基板之封裝面為相反側的內面;移送機構,係將載置帶體移送於該長軸方向,該載置帶體係於長軸方向並排地具有具備經焊接處理後的電極部之複數修復用電子零件,且會保持與該電極部為相反側之端面;助焊劑塗佈裝置,係在該載置帶體的送出側來將助焊劑塗佈在該複數修復用電子零件的該電極部;觀察裝置,係觀察塗佈有該助焊劑之經處理後修復用電子零件與該電路基板的修復區域並使其對位;升降機構,係使該台座上升來將該經處理後修復用電子零件壓接在該電路基板的修復區域;以及加熱裝置,係使該經處理後修復用電子零件之該電極部的焊材加熱熔融,來將該經處理後修復用電子零件電性接合在該電路基板的修復區域;該台座係構成為會在該電子零件去除裝置與該接合裝置之間移動,而依據該修復區域的該位置座標來將該修復區域定位在該接合裝置之與該經處理後修復用電子零件的接合位置。 較佳地,該修復裝置可構成為另具備點啟檢查裝置,係通電於該電路基板來判定複數電子零件的良窳,且會記憶缺陷電子零件的位置座標;該台座係構成為會在該點啟檢查裝置與該電子零件去除裝置及該接合裝置之間移動,而依據該缺陷電子零件的位置座標來將該缺陷電子零件定位在該電子零件去除裝置的雷射照光位置,並依據該修復區域的位置座標來將該修復區域定位在該接合裝置之與該經處理後修復用電子零件的接合位置。 進一步地,本發明之修復方法會進行以下步驟:第1步驟,係將與封裝有複數電子零件之電路基板的封裝面為相反側之內面保持在台座;第2步驟,係將載置帶體移送於長軸方向,該載置帶體係於該長軸方向並排地具有具備經焊接處理後的電極部之複數修復用電子零件,且會保持與該電極部為相反側之端面;第3步驟,係將助焊劑塗佈在該複數修復用電子零件的該電極部;第4步驟,係觀察塗佈有該助焊劑之經處理後修復用電子零件與該電路基板中已被去除缺陷電子零件後的區域,即修復區域並使其對位;第5驟,係將該經處理後修復用電子零件壓接在該電路基板的該修復區域;以及第6步驟,係使該經處理後修復用電子零件之該電極部的焊材加熱熔融,來將該經處理後修復用電子零件電性接合在該電路基板的該修復區域。 較佳地,該修復方法可在實施該第1步驟前會實施以下步驟:通電於該電路基板來判定複數電子零件的良窳,並將雷射光照射在被判定為不良之缺陷電子零件,來去除該缺陷電子零件以於該電路基板形成該修復區域。 依據本發明,由於係將助焊劑塗佈在經焊接處理後之電子零件的電極部,故在加熱熔融焊材來將電子零件接合在電路基板的特定區域之際,便可藉由加熱後的助焊劑來洗淨焊材表面及電路基板之上述特定區域的碎屑,以排除電性連接不良的發生。又,相較於將助焊劑塗佈在電路基板之方法,不須在將電子零件連接於電路基板後洗淨電路基板的多餘助焊劑來加以去除,則接合作業會變得容易。 In order to achieve the above object, the bonding device of the present invention electrically bonds the repairing electronic components of the carrier tape body to a designated area on the circuit substrate encapsulated with a plurality of electronic components, and the carrier tape body retains and has a soldering-treated electronic component. The electrode portion of the repairing electronic component is the end face on the opposite side, and is transferred in the long-axis direction; the repairing electronic component is joined to the transfer of the mounting belt at the joining position of the designated area On the upstream side in the direction, a flux application device that applies flux to the electrode portion of the electronic component for repair is provided. Specifically, the bonding apparatus of the present invention is used to bond good electronic components to the area after the defective electronic components have been removed in the circuit substrate encapsulated with a plurality of electronic components, that is, the repaired area; The encapsulation surface of the circuit board is the inner surface of the opposite side; the transfer mechanism is to transfer the carrier tape body in the long axis direction, and the carrier tape system has a plurality of electrode parts with soldered electrode parts side by side in the long axis direction Repair electronic parts, and keep the end face opposite to the electrode part; flux coating device, which is attached to the delivery side of the carrier belt to apply flux to the electrodes of the plurality of repair electronic parts part; an observation device, which is used to observe and align the repaired area of the electronic parts for repair after treatment and the circuit substrate coated with the flux; the lifting mechanism is to raise the pedestal to repair the treated area. An electronic part is crimped on the repair area of the circuit substrate; and a heating device is used to heat and melt the soldering material of the electrode part of the treated electronic part for repair, so as to electrically improve the electrical properties of the treated electronic part for repair bonded to the repaired area of the circuit substrate. Furthermore, the repairing device of the present invention includes an electronic component removing device and a bonding device; the electronic component removing device irradiates a defective electronic component on a circuit board encapsulated with a plurality of electronic components to remove the defective electronic component so as to remove the defective electronic component. The circuit board forms a repair area, and the position coordinates of the repair area are memorized; the bonding device is configured to include: a pedestal for holding the inner surface on the opposite side of the packaging surface of the circuit board; a transfer mechanism for placing the belt The body is transferred in the long-axis direction, and the carrier belt system has a plurality of repaired electronic parts with electrode parts after welding processing side by side in the long-axis direction, and maintains the end face on the opposite side of the electrode part; flux; A coating device is used to apply flux to the electrode parts of the plurality of electronic parts for repair on the delivery side of the carrier belt; an observation device is used to observe the treated electronic parts coated with the flux for repair. The parts are aligned with the repaired area of the circuit substrate; a lifting mechanism is used to raise the pedestal to crimp the processed repaired electronic parts on the repaired area of the circuit substrate; and a heating device is used to make the The welding material of the electrode part of the electronic component for repair after treatment is heated and melted to electrically join the electronic component for repair after treatment in the repair area of the circuit substrate; the pedestal is configured to be connected with the electronic component removal device. The joint devices move between the joint devices, and the repair region is positioned at the joint position between the joint device and the processed repaired electronic part according to the position coordinates of the repair region. Preferably, the repairing device can be configured to be further provided with a point-on-point inspection device, which is powered on the circuit substrate to determine the goodness of the plurality of electronic parts, and can memorize the position coordinates of the defective electronic parts; the pedestal is configured to The point-start inspection device is moved between the electronic part removing device and the bonding device, and the defective electronic part is positioned at the laser light position of the electronic part removing device according to the position coordinates of the defective electronic part, and the repair is performed according to the The position coordinates of the area are used to locate the repair area at the joint position of the joint device and the processed repair electronic part. Further, the repair method of the present invention will perform the following steps: the first step is to hold the inner surface on the pedestal on the opposite side to the packaging surface of the circuit substrate encapsulated with the plurality of electronic components; the second step is to place the mounting tape The body is transported in the long axis direction, and the carrier belt system has a plurality of electronic parts for repair including the electrode parts after the welding process side by side in the long axis direction, and maintains the end face on the opposite side of the electrode part; the third The step is to apply flux on the electrode parts of the plurality of repaired electronic parts; the fourth step is to observe the repaired electronic parts coated with the flux and the circuit substrates that have been removed from defective electrons. The area behind the parts, that is, the repair area, and aligning it; the fifth step is to crimp the treated electronic component for repair on the repaired area of the circuit substrate; and the sixth step is to make the treated repaired area. The soldering material of the electrode part of the electronic component for repair is heated and melted to electrically bond the electronic component for repair after the treatment to the repair area of the circuit board. Preferably, the repair method may perform the following steps before implementing the first step: energizing the circuit substrate to determine the goodness of the plurality of electronic parts, and irradiating the laser light on the defective electronic parts that are determined to be defective, to The defective electronic parts are removed to form the repaired area on the circuit substrate. According to the present invention, since the flux is applied to the electrode portion of the electronic component after the soldering process, when the electronic component is joined to a specific area of the circuit board by heating and melting the solder, the heated Flux is used to clean the debris on the surface of the solder material and the above-mentioned specific area of the circuit board to eliminate the occurrence of poor electrical connection. Moreover, compared with the method of applying flux to the circuit board, it is not necessary to wash and remove the excess flux of the circuit board after connecting the electronic components to the circuit board, so that the bonding operation becomes easier.

以下,依據添附圖式來詳細地說明本發明之實施型態。圖1係顯示本發明之接合裝置之一實施型態的概略構成之前視圖。該接合裝置1係被使用在修復裝置中,會將良品的電子零件安裝在電路基板中的缺陷電子零件已被去除後之區域(即修復區域),且係構成為具備台座2、移送機構3、助焊劑塗佈裝置4、觀察裝置5、升降機構6及加熱裝置7。以下,便針對電子零件為微型LED(Light Emitting Diode)(以下簡稱作「LED」)之情況來加以說明。 上述台座2如圖4所示,係將陣列狀地配置封裝有複數LED8之顯示面板(電路基板)9之與封裝面為相反側的內面吸附在載置面2a來加以保持,會在正交於後述觀察裝置5之對物透鏡10的光軸之XY平面內移動,且在垂直於XY平面之Z方向上做升降,而繞著載置面2a的中心軸轉動(θ)。 上述顯示面板9係於交叉設置之複數掃描線及資料線的交叉區域具備LED8以及會驅動該LED8之薄膜電晶體,可為玻璃等所構成的硬式基板,亦可為聚醯亞胺等所構成的可撓性基板。 上述台座2的上方係設置有移送機構3。該移送機構3如圖2所示,會將例如UV剝離帶、黏著帶或熱剝離帶等載置帶體11(參照圖3)移送於長軸方向,且係構成為具備送出捲筒12、捲繞捲筒13、分離捲筒14及複數導引捲筒15,該載置帶體11係於長軸方向並排地具備有具有藉由焊材34來被焊接處理後的電極部8a之複數修復用LED8A,且會保持與電極部8a為相反側之端面8b。 此外,載置帶體11如圖3(a)所示,係貼付有會保護修復用LED8A的電極部8a之保護膜16。又,圖3(b)雖係顯示於載置帶體11的長軸方向具備有並排成一列之修復用LED8A,但載置帶體11亦可具備有在長軸方向上並排成複數列之修復用LED8A。 此處,上述送出捲筒12係以修復用LED8A的電極部8a作為外側來間歇地送出已被捲繞成捲之載置帶體11,可控制例如送出捲筒馬達(省略圖示)的驅動來對載置帶體11賦予固定的反張力。又,上述捲繞捲筒13係以每固定量來捲繞已剝離修復用LED8A後的載置帶體11,會藉由捲繞捲筒馬達(省略圖示)而被驅動且旋轉於捲繞方向。另外,上述分離捲筒14係藉由捲筒馬達(省略圖示)而被旋轉驅動,且會對應於載置帶體11的送出量而以每固定量來捲繞已從載置帶體11剝除修復用LED8A後之保護膜16。然後,導引捲筒5係用以限制平行於載置帶體11的長軸之兩端部來穩定地保持載置帶體11的移送,可依需要而在適當位置處設置有複數個。 載置帶體11的送出側係設置有助焊劑塗佈裝置4。該助焊劑塗佈裝置4會將助焊劑17塗佈在已被剝除保護膜16後之修復用LED8A的電極部8a,如圖4所示,係面對載置帶體11而具備噴嘴18,可從該噴嘴18來將助焊劑17噴霧至修復用LED8A的電極部8a。又,助焊劑塗佈裝置4之載置帶體11的移送方向下游側側面係設置有為過剩地塗佈有助焊劑之情況所具備,而會回收助焊劑17之回收部19。 在上述助焊劑塗佈裝置4之載置帶體11的移送方向下游側處,台座2的上方係設置有觀察裝置5。該觀察裝置5如圖4所示,會觀察塗佈有助焊劑17之經處理後的修復用LED8B與顯示面板9的修復區域20並使其對位,如圖1所示,係構成為從台座2的載置面2a側而具備按壓組件21、對物透鏡10及觀察光學系統22(參照圖7)。 上述按壓組件21係由石英等透明的玻璃組件所形成,為固定設置,會配合台座2的上升而透過載置帶體11來將經處理後的修復用LED8B壓接在顯示面板9的修復區域20。詳細地說明,按壓組件21如圖5所示,係具有對物透鏡10側的上面21a以及使載置帶體11滑動之下面21b,上面21a係形成為以對物透鏡10的焦點位置C作為中心之曲率半徑來加以表示之曲面,下面21b則是形成為具有會交叉於載置帶體11移送方向的中心軸之柱面。 此情況下,如圖5所示,穿透對物透鏡10的光(照明光)會穿透按壓組件21而聚光在對齊於觀察面23之對物透鏡10的焦點位置C。然後,從觀察面23反射的反射光會形成球面波SW,並再次穿透按壓組件21而回到對物透鏡10。 圖6係關於按壓組件21之上面21a的形狀之說明圖。圖6(a)係例示按壓組件21的上面21a乃具有曲面形狀之情況,該曲面形狀係具有與反射光的球面波SW一致之曲率。此情況下,如使用圖5所敘述般地,由於球面波SW的波面在按壓組件21的上面21a並未改變。亦即,光並未在上面21a發生折射,故不會產生像差。圖6(b)係例示不同於上述按壓組件21之上面21a的形狀,上面21a'乃具有平面形狀之按壓組件21’。當上面21a’為平面形狀的情況,則光便會在上面21a’發生折射而產生像差。於是,光學系統的解析度便會降低而妨礙高精度的定位。 按壓組件21之下面21b的形狀若由光學性觀點來看則最好是平面。但只要是視野內的光線路徑差會收斂在對物透鏡10的焦點深度內之範圍內,則曲面亦不會有問題。本發明中,如上所述,下面21b係形成為具有會交叉於載置帶體11移送方向的中心軸之柱面。 上述按壓組件21的上方係設置有對物透鏡10。該對物透鏡10會將照明光聚光在觀察面23,並且與後述觀察光學系統22的第1成像透鏡24協動來使經處理後之修復用LED8B的端面8b(觀察面23)成像在第1觀察照相機25的攝影面,且與觀察光學系統22的第2成像透鏡26協動來使顯示面板9的修復區域20(觀察面23)成像在第2觀察照相機27的攝影面。 上述對物透鏡10的上方係設置有觀察光學系統22。該觀察光學系統22係用以取得經處理後的修復用LED8B之端面8b的影像及顯示面板9之修復區域20的影像,且控制台座2朝XY方向的驅動並使其對位以使兩影像相互對齊,如圖7所示,係構成為具備從對物透鏡10到第1觀察照相機25之第1光線路徑28、從對物透鏡10到第2觀察照相機27之第2光線路徑29、以及透過對物透鏡10來照射觀察面23之照明系統光線路徑30。 詳細地說明,觀察光學系統22如圖7所示,係在從對物透鏡10到第1觀察照相機25之第1光線路徑28上具備且固定有會與對物透鏡10協動來使經處理後之修復用LED8B的端面8b成像在第1觀察照相機25的攝影面之第1成像透鏡24。又,從對物透鏡10到第1觀察照相機25之第1光線路徑28中,在對物透鏡10與第1成像透鏡24之間藉由第1半透鏡31而被分歧之第2光線路徑29上係具備會與對物透鏡10協動來使顯示面板9的修復區域20成像在第2觀察照相機27的攝影面之第2成像透鏡26。此情況下,第2成像透鏡26係可一邊維持顯示面板9之修復區域20的成像(最佳聚焦)一邊隨著台座2的上升而移動於光軸方向。另外,從對物透鏡10到第1觀察照相機25之第1光線路徑28中,在對物透鏡10與第1半透鏡31之間藉由第2半透鏡32而被分歧之光線路徑(照明系統光線路徑30)上係設置有照明光源33,可透過對物透鏡10、按壓組件21及載置帶體11來將可見光照射在經處理後的修復用LED8B及顯示面板9的修復區域20,且以第1及第2觀察照相機25、27來觀察經處理後之修復用LED8B的端面8b及顯示面板9的修復區域20。 上述台座2係設置有升降機構6。該升降機構6係用以讓台座2升降來將經處理後的修復用LED8B壓接在顯示面板9的修復區域20及解除壓接,可為會使台座2移動於Z方向之電動台座或氣壓缸等。 與上述觀察裝置5一體地設置有加熱裝置7。該加熱裝置7會使經處理後的修復用LED8B之電極部8a的焊材34(參照圖2)加熱熔融,來將經處理後的修復用LED8B電性接合在顯示面板9之修復區域20的電極襯墊,可透過對物透鏡10、按壓組件21及載置帶體11來將紅外線照射在經處理後的修復用LED8B。具體而言,加熱裝置7如圖7所示,係在會因稜鏡35而被分歧之光線路徑36上具備紅外線雷射37,該稜鏡35係在從對物透鏡10朝照明光源33之照明系統光線路徑30中的斜面具有半透鏡。 此外,圖1中的符號38為用以在助焊劑塗佈裝置4之載置帶體11的移送方向上游側朝載置帶體11釋放出離子,以將帶電後之載置帶體11的靜電中和來加以去除之電離器。又,圖7中,符號39為用以讓從紅外線雷射37被放射出而直徑擴大後的雷射光變得準直之準直透鏡,符號40為讓變得準直後的雷射光會配合經處理後的修復用LED8B之端面8b的形狀來加以整形之槽縫,符號41為會與對物透鏡10協動來使槽縫成像在經處理後之修復用LED8B的端面8b之成像透鏡。又,符號42為用以調整光線路徑36來使從紅外線雷射37所放射出的雷射光正確地照射在經處理後之修復用LED8B的端面8b之導引照明光源,符號43為用以讓到導引照明光源42為止之光線路徑從光線路徑36分歧之半透鏡稜鏡。然後,符號44為用以讓光線路徑彎折90°之全反射鏡。 圖8係顯示使用有本發明的接合裝置1之修復裝置之第1實施型態的概略構成之前視圖。 上述第1實施型態中係並排於接合裝置1而設置有LED去除裝置45。該LED去除裝置45為用以將雷射光照射在封裝有複數LED8之顯示面板9的缺陷LED8,來去除缺陷LED8以於顯示面板9形成修復區域20,係構成為具備觀察光學系統單元46及雷射光學系統單元47。 上述觀察光學系統單元46係透過對物透鏡48來取得顯示面板9之缺陷LED8的影像,且依據所取得之影像的影像資訊來控制台座2的移動,以將上述缺陷LED8定位在對物透鏡48的視野中心,而成為與接合裝置1之觀察光學系統22相同的光學構成。具體而言,觀察光學系統單元46係構成為在從對物透鏡48朝觀察照相機之光線路徑上具備有會與對物透鏡48協動來使上述缺陷LED8成像在觀察照相機的攝影面之成像透鏡,且在藉由從對物透鏡48朝成像透鏡之光線路徑中的半透鏡而被分歧之光線路徑上具備有照明光源。此情況下,可具備固定的上述成像透鏡,亦可具備可沿著光軸移動之上述成像透鏡。具備有可移動的成像透鏡之情況便能實現自動對焦功能。 上述雷射光學系統單元47係透過對物透鏡48來將雷射光照射在上述缺陷LED8以使缺陷LED8昇華來加以去除,具備會放射出紫外線(近紫外線或遠紫外線)、紅外線或第2高諧波(SHG)之雷射。此情況下,可個別地具備單一波長的雷射來切換使用,亦可將基本波的波長轉換來生成高次高諧波並輸出需要波長的雷射光。 上述雷射光學系統單元47具體而言為與接合裝置1的加熱裝置7相同之光學構成,係於藉由朝向上述照明光源之光線路徑中的其他半透鏡或會反射可見光而讓紫外線穿透之波長選擇鏡而被分歧之光線路徑上具備有雷射。又,朝向上述雷射之光線路徑上係設置有用以配合LED8之端面8b的形狀來將雷射光整形之槽縫,且設置有會與對物透鏡48協動來使該槽縫成像在缺陷LED8之成像透鏡。 由於對物透鏡48的焦點位置會因所使用之雷射光的波長而不同,故當切換使用複數波長的雷射光之情況,則最好是對應於所使用之波長而具備複數個對物透鏡48。圖8係例示可將紅外線及SHG用的第1對物透鏡48A、近紫外線用的第2對物透鏡48B以及遠紫外線用的第3對物透鏡48C安裝在轉盤49來切換使用之LED去除裝置45。此外,圖8中的符號50為可吹除及吸引昇華後的LED8來加以去除以抑制修復區域20產生碎屑之吹除・吸引部,係對向於對物透鏡48而設置有開口51。 接著,針對使用上述方式所構成之上述第1實施型態的修復裝置所進行之修復方法,參照圖9、10的流程圖來加以說明。 首先,如圖9所示,步驟S1中會對被封裝在顯示面板9之複數LED8實施點啟檢查來判定LED8的良窳。上述第1實施型態中,LED8的點啟檢查係藉由獨立於上述修復裝置而另外具備之點啟檢查裝置來加以實施。具體而言,在使用點啟檢查裝置所具備之對位裝置來實施對位以使台座上所載置之顯示面板9的XY座標軸與點啟檢查裝置的XY座標軸對齊後,當通電於顯示面板9來讓複數LED8全部點啟或是在具有紅、綠、藍3色的LED8之情況,則是會點啟每個顏色且藉由CCD或CMOS等影像感測器來拍攝以實施點啟檢查。此外,影像感測器亦可為即便是固定照相機,仍可一邊從顯示面板9的一端朝另一端移動一邊攝影之線型感測器。 接著,步驟S2中會依據影像感測器的攝影影像來進行良窳判定。例如,當LED8的點啟輝度為特定基準值以上且發光波長位在特定波長帶域內時,便會判定為良品,而當點啟輝度低於上述基準值時、未點啟時、或發光波長的偏移超過容許範圍時,便會判定為缺陷品。然後,在檢測出缺陷LED8後,由相對於顯示面板9所預先設定的基準位置(例如面板的中心畫素)之行數及列數來求得該缺陷LED8的位置座標,並將該位置座標記憶在可移動式媒體。或是,當點啟檢查裝置係連接於修復裝置與工廠內的LAN(Enthernet)之情況,亦可將上述位置座標的資訊記憶在各裝置所具備之控制單元的記憶部或已連接網路之資料伺服器,來使上述位置座標的資訊可共有在裝置間。此外,以下的說明中係針對各裝置可透過已連接網路之資料伺服器來共有資料的情況加以說明。 步驟S2中,當未檢測出缺陷LED8(“NO”判定)時,便結束顯示面板9的修復工序。另一方面,當檢測出缺陷LED8(“YES”判定)時,則是會前進至使用第1實施型態的修復裝置之修復工序,來實施步驟S3以將缺陷LED8自顯示面板9去除。 具體而言,步驟S3中,首先,係將顯示面板9吸附保持在修復裝置之台座2的載置面2a並定位在LED去除裝置45的正下方位置。在LED去除裝置45中,會使用對位裝置(省略圖示)來實施對位以讓顯示面板9的XY座標軸與LED去除裝置45的XY座標軸對齊。又,LED去除裝置45會從上述資料伺服器來讀取上述點啟檢查裝置中所被檢測出之缺陷LED8的位置座標,並依據該位置座標來將缺陷LED8(當存在有複數個缺陷LED8之情況,則為所選擇之1個缺陷LED8)定位在LED去除裝置45之雷射光的照射位置。進一步地,一邊藉由觀察光學系統單元46來觀察缺陷LED8,一邊控制升降機構6所進行之台座2的升降以聚焦在缺陷LED8的端面8b,並且使台座2微動於XY方向來微調缺陷LED8相對於整雷射光的照射位置之位置。然後,從雷射光學系統單元47的雷射放射出例如紫外線(近紫外線或遠紫外線),並將藉由槽縫而被整形至配合缺陷LED8之端面8b的形狀後之紫外線的雷射光照射在缺陷LED8。藉此,缺陷LED8便會被燒蝕去除,而於顯示面板9形成有修復區域20。又,可將紅外線或第2高諧波(SHG)等照射在缺陷LED8,抑或,亦可組合紫外線與紅外線或SHG來加以照射。如此般地去除缺陷LED8後,將顯示面板9中已被去除缺陷LED8後之區域(即修復區域)20的位置座標保存在資料伺服器。又,當存在有其他第2缺陷LED8時,會依據從上述資料伺服器所讀取之上述第2缺陷LED8的位置座標來將該第2缺陷LED8定位在雷射光的照射位置。然後,與上述同樣地去除上述第2缺陷LED8,並將該修復區域20的位置座標保存在資料伺服器。 接著,步驟S4中會使用接合裝置1來將良品的LED8安裝在顯示面板9的修復區域20,便結束接合工序。此外,當使用接合裝置1之上述接合工序結束後,可依需要而回到步驟S1,並藉由點啟檢查裝置來重新實施顯示面板9的點啟檢查。 圖10為顯示使用接合裝置1所進行的接合工序之流程圖,係顯示上述步驟S4的具體工序。 首先,移動台座2並依據從資料伺服器所讀取之上述修復區域20的位置座標,來將顯示面板9的修復區域20(當存在有複數修復區域20的情況,則為所選擇之1個修復區域20)定位在接合裝置1的觀察光學系統22之對物透鏡10的視野內而開始接合。此情況下,係使用第2觀察照相機27來觀察顯示面板9的表面,並使第2成像透鏡26偏移於光軸方向來實施自動對焦,以讓修復區域20的影像變得清楚。 在圖10的步驟S11中,係從助焊劑塗佈裝置4來朝被保持在載置帶體11(例如黏著帶)且已被剝除保護膜16後的修復用LED8A噴霧出助焊劑17,以將助焊劑17塗佈在修復用LED8A之經焊接處理後的電極部8a。 接著,步驟S12中,如圖4所示,會使載置帶體11移送特定量,來使塗佈有助焊劑17之經處理後的修復用LED8B會在按壓組件21的正下方而定位在對物透鏡10的視野內。此情況下,如圖11所示,係透過載置帶體11、按壓組件21、對物透鏡10及第1成像透鏡24來使經處理後之修復用LED8B的端面8b成像在第1觀察照相機25的攝影面。另一方面,透過載置帶體11、按壓組件21、對物透鏡10及第2成像透鏡26來使顯示面板9的修復區域20成像在第2觀察照相機27的攝影面。 在接合裝置1之控制部(省略圖示)中,會比較處理藉由第1觀察照相機25所拍攝取得之經處理後的修復用LED8B之端面8b的影像資訊與藉由第2觀察照相機27所拍攝取得之顯示面板9之修復區域20的影像資訊,來計算出兩影像的位移量及位移方向。然後,使台座2微動於X及Y方向來實施對位以讓兩影像對齊。 接著,步驟S13中,當結束對位後會使台座2上升,來將經處理後之修復用LED8B的電極部8a壓接在顯示面板9之修復區域20的電極襯墊。此時,伴隨著台座2的上升,第2成像透鏡26會偏移至圖12所示之箭頭方向,來維持第2觀察照相機27中之顯示面板9之修復區域20的成像狀態(最佳聚焦狀態)。 接著,步驟S14中,會驅動加熱裝置7的紅外線雷射37,且透過對物透鏡10、按壓組件21及載置帶體11來將藉由槽縫40而被整形至配合LED8之端面8b的形狀後之紅外線的雷射光照射在經處理後之修復用LED8B的端面8b。藉此,經處理後的修復用LED8B之電極部8a的焊材34便會被加熱熔融,來將LED8的電極部8a電性接合在顯示面板9之修復區域20的電極襯墊。此時,由於LED8之電極部8a上的焊材34係塗佈有助焊劑17,故會洗淨焊材34的表面及上述修復區域20的表面來排除電性連接不良。 當針對修復區域20之LED8的修復結束後,便使台座2下降。此時,由於被接合於顯示面板9的修復區域20之經處理後的修復用LED8B會和台座2一起下降,故會因焊材34所致之接合強度與黏著帶的黏著強度之強度差,而讓經處理後的修復用LED8B從載置帶體11被剝離。 接著,步驟S15中會判斷是否需要更進一步的修復處理。亦即,會判斷是否存在有其他修復區域20。然後,若未存在有其他修復區域20時,則步驟S15便會成為“NO”判定而結束使用接合裝置1之接合工序。另一方面,若存在有複數修復區域20時,則步驟S15便會成為“YES”判定。同時,依據第2修復區域20的位置座標來使台座2移動於XY方向,以將上述第2修復區域20定位在接合裝置1的接合位置。之後,回到步驟S11,來從助焊劑塗佈裝置4朝向已被剝除保護膜16後的第2修復用LED8A噴霧出助焊劑17,以將助焊劑17塗佈在上述第2修復用LED8A之經焊接處理後的電極部8a。之後,與上述同樣地對第2修復區域20實施修復處理。然後,反覆實施步驟S11~S15直到針對所有修復區域20之修復處理結束,且變成未存在有其他修復區域20而步驟S15成為“NO”判定為止。 圖13係顯示本發明之修復裝置之第2實施型態的概略構成之前視圖。 與上述第1實施型態之相異點為修復裝置係具備點啟檢查裝置52。該點啟檢查裝置52係具有與第1實施型態所說明之點啟檢查裝置相同的構成,可通電於顯示面板9來判定複數LED8的良窳且取得缺陷LED8的位置座標。然後,將LED去除裝置45及接合裝置1一體地加以設置。 依據此第2實施型態,首先,移動台座2來將被吸附保持在台座2之顯示面板9定位在點啟檢查裝置52之影像感測器53的攝影區域內。此時,使用對位裝置(省略圖示)來實施對位以使顯示面板9的XY座標軸與點啟檢查裝置52的XY座標軸對齊。之後,點啟顯示面板9的複數LED8且藉由影像感測器53來拍攝,以檢查是否存在有未點啟等的缺陷LED8。其結果,當顯示面板9存在有缺陷LED8之情況,便會取得該缺陷LED8的位置座標,並將該缺陷LED8之位置座標的資訊保存在修復裝置的記憶部(省略圖示)。 接著,移動台座2來將顯示面板9搬送至LED去除裝置45的正下方。在LED去除裝置45中,會從修復裝置的記憶部來讀取缺陷LED8之位置座標的資訊,且依據該位置座標來將顯示面板9上的缺陷LED8(存在有複數缺陷LED8的情況則為所選擇之1個缺陷LED8)定位在LED去除裝置45之雷射光的照射位置。進一步地,在LED去除裝置45中,會一邊藉由觀察光學系統單元46的觀察照相機來觀察缺陷LED8,一邊讓台座2升降來聚焦在缺陷LED8的端面8b。然後,從雷射光學系統單元47的雷射放射出例如紫外線,並將藉由槽縫而被整形至配合缺陷LED8之端面8b的形狀後之紫外線的雷射光照射在缺陷LED8。藉此,缺陷LED8便會被燒蝕去除,而於顯示面板9形成有修復區域20。 當LED去除裝置45所進行之缺陷LED8的去除結束後,移動台座2來將顯示面板9搬送至接合裝置1的正下方。在接合裝置1中,會依據從修復裝置的記憶部所讀取之缺陷LED8的位置座標來讓台座2移動,以將顯示面板9的修復區域20(存在有複數修復區域20的情況,則為所選擇之1個修復區域20)定位在接合裝置1之對物透鏡10的視野內。進一步地,在接合裝置1中,會使載置帶體11移送於上述長軸方向,該載置帶體11係於長軸方向並排地具有具備經焊接處理後的電極部8a之複數修復用LED8A,且會保持與電極部8a為相反側之端面8b。接著,將助焊劑塗佈在已被剝除保護膜16後之修復用LED8A的電極部8a。接著,以第1及第2觀察照相機25、27來觀察塗佈有助焊劑17之經處理後的修復用LED8B與顯示面板9的修復區域20,並依據所取得之兩影像的影像資訊來讓台座2微動而實施對位,以使兩影像對齊。接著,使台座2上升來將經處理後的修復用LED8B壓接在顯示面板9的修復區域20。然後,藉由從加熱裝置7所照射之紅外線雷射光來將經處理後的修復用LED8B之電極部8a的焊材34加熱熔融,以將經處理後的修復用LED8B電性接合在顯示面板9的修復區域20。 依據本發明,由於係將助焊劑17塗佈在經焊接處理後之修復用LED8A的電極部8a,故加熱熔融焊材34來將修復用LED8A接合在顯示面板9的修復區域20之際,便可藉由加熱後的助焊劑17來洗淨焊材34的表面及顯示面板9之修復區域20的碎屑,以排除電性連接不良的發生。又,相較於將助焊劑17塗佈在顯示面板9之方法,則在將修復用LED8A連接於顯示面板9後,不須洗淨顯示面板9上的多餘助焊劑17來加以去除,故修復作業會變得容易。 此外,上述實施型態中雖已針對電子零件為微型LED8的情況加以說明,但本發明並未侷限於此,電子零件亦可為次毫米LED或半導體晶片等任何電子零件。因此,電路基板並未侷限於顯示面板9。 上述實施型態係概略地表示成能夠理解及實施本發明之程度,惟本發明並未侷限於此。本發明可在未背離申請專利範圍所示之技術思想的範圍內來做各種變更及修正。 Hereinafter, embodiments of the present invention will be described in detail based on the accompanying drawings. FIG. 1 is a front view showing a schematic configuration of an embodiment of the bonding apparatus of the present invention. The bonding device 1 is used in a repairing device, and mounts a good electronic component in an area (ie, a repaired area) of the circuit board after the defective electronic component has been removed, and is configured to include a pedestal 2 and a transfer mechanism 3 , Flux coating device 4 , observation device 5 , lifting mechanism 6 and heating device 7 . Hereinafter, the case where the electronic component is a micro LED (Light Emitting Diode) (hereinafter abbreviated as "LED") will be described. As shown in FIG. 4 , the pedestal 2 is held by sucking and holding the inner surface of the display panel (circuit board) 9 in which a plurality of LEDs 8 are packaged in an array on the opposite side to the packaging surface on the mounting surface 2a. It moves in the XY plane intersecting the optical axis of the objective lens 10 of the observation device 5 to be described later, moves up and down in the Z direction perpendicular to the XY plane, and rotates (θ) around the central axis of the placement surface 2a. The above-mentioned display panel 9 is provided with LEDs 8 and thin-film transistors that drive the LEDs 8 in the intersecting regions of the plurality of scanning lines and the data lines that are arranged in the intersecting area. flexible substrate. A transfer mechanism 3 is provided above the pedestal 2 . As shown in FIG. 2 , the transfer mechanism 3 transfers the carrier tape body 11 (see FIG. 3 ) such as a UV peeling tape, an adhesive tape, or a thermal peeling tape in the longitudinal direction, and is configured to include a delivery reel 12 , A winding reel 13, a separating reel 14, and a plurality of guide reels 15 are provided, and the mounting belt 11 is provided with a plurality of electrode portions 8a that have been welded by the welding material 34 in parallel in the longitudinal direction. The LED 8A for repairing will hold the end face 8b on the opposite side to the electrode portion 8a. Moreover, as shown in FIG.3(a), the mounting tape 11 is attached with the protective film 16 which protects the electrode part 8a of LED8A for restoration|repair. Moreover, although FIG.3(b) is shown in the long-axis direction of the mounting tape body 11 is provided with the LEDs 8A for restoration which are lined up in a row, the mounting tape body 11 may also be provided with a plurality of side by side in the long-axis direction Column repair with LED8A. Here, the above-mentioned feeding reel 12 intermittently feeds out the carrier tape 11 wound into a roll with the electrode portion 8a of the repairing LED 8A as the outer side, and the drive of the feeding reel motor (not shown) can be controlled, for example. A fixed back tension is applied to the mounting belt 11 . In addition, the above-mentioned take-up reel 13 winds the mounting tape body 11 after peeling the LED 8A for repairing by a fixed amount, and is driven by a take-up reel motor (not shown) to rotate on the winding reel. direction. In addition, the separation reel 14 is rotationally driven by a reel motor (not shown), and is wound by a fixed amount corresponding to the feeding amount of the carrier tape 11 that has been removed from the carrier tape 11 . The protective film 16 after peeling off the repairing LED 8A. Then, the guide reels 5 are used to restrict the two ends parallel to the long axis of the carrier tape body 11 to stably maintain the transfer of the carrier tape body 11 . A flux application device 4 is provided on the delivery side of the mounting belt 11 . The flux application device 4 applies the flux 17 to the electrode portion 8a of the repairing LED 8A after the protective film 16 has been peeled off, and as shown in FIG. , the flux 17 can be sprayed from the nozzle 18 to the electrode portion 8a of the repairing LED 8A. Moreover, the downstream side surface of the conveyance direction of the mounting belt 11 of the flux coating apparatus 4 is provided with the collection|recovery part 19 which collects the flux 17 for the case where the flux is applied excessively. An observation device 5 is provided above the pedestal 2 on the downstream side in the transfer direction of the mounting belt 11 of the above-described flux coating device 4 . The observation device 5, as shown in FIG. 4, observes and aligns the treated repair LED 8B coated with the flux 17 and the repair area 20 of the display panel 9, as shown in FIG. The mounting surface 2a side of the pedestal 2 is provided with the pressing member 21, the objective lens 10, and the observation optical system 22 (refer FIG. 7). The above-mentioned pressing component 21 is formed of a transparent glass component such as quartz. For fixed installation, the processed LED 8B for repairing will be pressed to the repairing area of the display panel 9 through the mounting belt 11 in accordance with the rise of the pedestal 2 . 20. 5, the pressing member 21 has an upper surface 21a on the objective lens 10 side and a lower surface 21b on which the mounting belt 11 slides, and the upper surface 21a is formed with the focal position C of the objective lens 10 as the The lower surface 21b is formed as a curved surface represented by the radius of curvature of the center, and has a central axis intersecting the transfer direction of the mounting tape body 11 as a cylindrical surface. In this case, as shown in FIG. 5 , the light (illumination light) passing through the objective lens 10 will pass through the pressing member 21 and be condensed at the focal position C of the objective lens 10 aligned with the observation surface 23 . Then, the reflected light reflected from the observation surface 23 will form a spherical wave SW, and will pass through the pressing member 21 again and return to the objective lens 10 . FIG. 6 is an explanatory view of the shape of the upper surface 21 a of the pressing member 21 . FIG. 6( a ) illustrates a case where the upper surface 21 a of the pressing member 21 has a curved shape having a curvature corresponding to the spherical wave SW of the reflected light. In this case, as described using FIG. 5 , the wave front of the spherical wave SW does not change on the upper surface 21 a of the pressing member 21 . That is, light is not refracted on the upper surface 21a, so that no aberration occurs. Fig. 6(b) illustrates the shape of the upper surface 21a of the pressing member 21, which is different from the above-mentioned shape, and the upper surface 21a' is the pressing member 21' having a planar shape. When the upper surface 21a' is in a flat shape, light is refracted on the upper surface 21a' to generate aberrations. As a result, the resolution of the optical system is lowered and high-precision positioning is hindered. The shape of the lower surface 21b of the pressing member 21 is preferably flat from an optical viewpoint. However, as long as the ray path difference in the field of view is within the range of the focal depth of the objective lens 10, there is no problem with the curved surface. In this invention, as mentioned above, the lower surface 21b is formed so that it may have the cylindrical surface which crosses the center axis|shaft of the conveyance direction of the mounting tape body 11. The objective lens 10 is disposed above the pressing member 21 . The pair of objective lenses 10 condenses the illumination light on the observation surface 23, and cooperates with the first imaging lens 24 of the observation optical system 22 to be described later to form an image on the end surface 8b (observation surface 23) of the treated repair LED 8B on the observation surface 23. The imaging surface of the first observation camera 25 cooperates with the second imaging lens 26 of the observation optical system 22 to image the repaired region 20 (observation surface 23 ) of the display panel 9 on the imaging surface of the second observation camera 27 . An observation optical system 22 is provided above the objective lens 10 . The observation optical system 22 is used to obtain the image of the end face 8b of the repaired LED 8B and the image of the repaired area 20 of the display panel 9, and the console base 2 is driven in the XY direction and aligned to make the two images Aligned with each other, as shown in FIG. 7, it is configured to include a first light path 28 from the objective lens 10 to the first observation camera 25, a second light path 29 from the objective lens 10 to the second observation camera 27, and The light path 30 of the illumination system illuminates the observation surface 23 through the objective lens 10 . Describing in detail, the observation optical system 22 is provided on the first ray path 28 from the objective lens 10 to the first observation camera 25 as shown in FIG. After that, the end surface 8 b of the repairing LED 8B is imaged on the first imaging lens 24 of the imaging surface of the first observation camera 25 . In addition, among the first ray paths 28 from the objective lens 10 to the first observation camera 25 , the second ray paths 29 are branched by the first half mirror 31 between the objective lens 10 and the first imaging lens 24 . The upper system is provided with a second imaging lens 26 that cooperates with the objective lens 10 to form an image of the repaired region 20 of the display panel 9 on the imaging surface of the second observation camera 27 . In this case, the second imaging lens 26 can move in the direction of the optical axis as the pedestal 2 rises while maintaining the image (best focus) of the repaired region 20 of the display panel 9 . In addition, among the first ray paths 28 from the objective lens 10 to the first observation camera 25, the ray paths branched by the second half-mirror 32 between the objective lens 10 and the first half-mirror 31 (illumination system The light path 30) is provided with an illumination light source 33, which can irradiate visible light on the treated repair LED 8B and the repair area 20 of the display panel 9 through the objective lens 10, the pressing component 21 and the mounting belt 11, and The end surface 8b of the LED 8B for restoration|repair after the process, and the restoration|restoration area 20 of the display panel 9 are observed with the 1st and 2nd observation cameras 25 and 27. The pedestal 2 is provided with a lift mechanism 6 . The elevating mechanism 6 is used to lift and lower the pedestal 2 to press the processed repair LED 8B on the repair area 20 of the display panel 9 and release the crimping. Cylinder etc. A heating device 7 is provided integrally with the observation device 5 described above. The heating device 7 heats and melts the solder material 34 (refer to FIG. 2 ) of the electrode portion 8 a of the treated repair LED 8B to electrically bond the treated repair LED 8B to the repair area 20 of the display panel 9 . The electrode pad can irradiate infrared rays to the treated repairing LED 8B through the objective lens 10 , the pressing member 21 and the mounting belt 11 . Specifically, as shown in FIG. 7 , the heating device 7 is provided with an infrared laser 37 on a light path 36 that will be diverged by the lens 35 , which is connected from the objective lens 10 to the illumination light source 33 . The slopes in the light path 30 of the lighting system have half mirrors. In addition, the reference numeral 38 in FIG. 1 is used to release ions toward the carrier tape 11 on the upstream side in the transfer direction of the carrier tape 11 of the flux coating device 4 to charge the carrier tape 11 after charging. Ionizers for electrostatic neutralization to remove. 7, the reference numeral 39 is a collimating lens for collimating the laser light radiated from the infrared laser 37 and the diameter of which has been enlarged, and the reference numeral 40 is the collimated laser light that is processed in conjunction with the The slot is shaped by the shape of the end face 8b of the repair LED 8B, and the symbol 41 is an imaging lens that cooperates with the objective lens 10 to image the slot on the end face 8b of the repair LED 8B after processing. In addition, the reference numeral 42 is a guide illumination light source for adjusting the light path 36 so that the laser light emitted from the infrared laser 37 can be accurately irradiated on the end face 8b of the repaired LED 8B, and the reference numeral 43 is used to allow The light path to guide the illumination light source 42 diverges from the light path 36 half-mirror. Then, reference numeral 44 is a total reflection mirror for bending the light path by 90°. FIG. 8 is a front view showing the schematic configuration of the first embodiment of the repair apparatus using the joining apparatus 1 of the present invention. In the above-described first embodiment, the LED removing device 45 is provided in parallel with the bonding device 1 . The LED removal device 45 is used to irradiate the defective LEDs 8 of the display panel 9 encapsulated with a plurality of LEDs 8 with laser light to remove the defective LEDs 8 to form the repair area 20 in the display panel 9 , and is configured to include an observation optical system unit 46 and a laser beam. The radiation optical system unit 47 . The above-mentioned observation optical system unit 46 obtains the image of the defective LED 8 of the display panel 9 through the objective lens 48 , and controls the movement of the base 2 according to the image information of the obtained image, so as to locate the above-mentioned defective LED 8 on the objective lens 48 the center of the field of view, and the optical structure is the same as that of the observation optical system 22 of the bonding device 1 . Specifically, the observation optical system unit 46 is configured to include an imaging lens that cooperates with the objective lens 48 to image the defect LED 8 on the imaging surface of the observation camera on the light path from the objective lens 48 to the observation camera. , and an illumination light source is provided on the light path branched by the semi-mirror in the light path from the objective lens 48 toward the imaging lens. In this case, the above-mentioned imaging lens that is fixed may be provided, or the above-mentioned imaging lens that is movable along the optical axis may be provided. With a movable imaging lens, the autofocus function can be realized. The above-mentioned laser optical system unit 47 irradiates laser light on the above-mentioned defective LEDs 8 through the objective lens 48 to sublime the defective LEDs 8 to remove them, and has a device that emits ultraviolet rays (near-ultraviolet or far-ultraviolet), infrared rays or second harmonics. Wave (SHG) of the laser. In this case, a laser with a single wavelength can be individually provided for switching use, and the wavelength of the fundamental wave can be converted to generate higher harmonics and output laser light of a desired wavelength. Specifically, the above-mentioned laser optical system unit 47 has the same optical structure as that of the heating device 7 of the bonding device 1, and is due to the fact that other semi-mirrors in the light path toward the above-mentioned illumination light source may reflect visible light and allow ultraviolet rays to penetrate. There is a laser on the light path that is divided by the wavelength selective mirror. In addition, the light path toward the above-mentioned laser is provided with a slot for shaping the laser light according to the shape of the end face 8b of the LED 8, and a slot is arranged to cooperate with the objective lens 48 to make the slot image on the defective LED 8 the imaging lens. Since the focal position of the objective lens 48 is different depending on the wavelength of the used laser light, when switching to use the laser light of plural wavelengths, it is preferable to have a plurality of objective lenses 48 corresponding to the used wavelengths . FIG. 8 shows an example of an LED removal device that can be switched by mounting a first pair of objective lenses 48A for infrared and SHG, a second pair of objective lenses 48B for near-ultraviolet rays, and a third pair of objective lenses for far-ultraviolet rays 48C on a turntable 49 45. In addition, the reference numeral 50 in FIG. 8 is a blow-off/suction part that can blow off and suck the sublimated LED 8 for removal to suppress the generation of debris in the repaired region 20 , and an opening 51 is provided facing the objective lens 48 . Next, the restoration method performed using the restoration apparatus of the above-described first embodiment configured as described above will be described with reference to the flowcharts of FIGS. 9 and 10 . First, as shown in FIG. 9 , in step S1 , a spot check is performed on the plurality of LEDs 8 packaged in the display panel 9 to determine the quality of the LEDs 8 . In the above-mentioned first embodiment, the spot-on inspection of the LED 8 is implemented by a spot-on inspection device provided separately from the above-mentioned repair device. Specifically, after performing the alignment using the alignment device provided in the point-of-view inspection device to align the XY coordinate axis of the display panel 9 placed on the pedestal with the XY coordinate axis of the point-of-view inspection device, when power is applied to the display panel 9 to make all of the plurality of LED8 turn on or in the case of LED8 with three colors of red, green and blue, each color will be turned on and photographed by an image sensor such as CCD or CMOS to perform a light check. . In addition, the image sensor may be a linear sensor that can take pictures while moving from one end of the display panel 9 to the other end even if the camera is fixed. Next, in step S2, a good quality judgment is performed according to the photographed image of the image sensor. For example, when the point-on brightness of LED8 is above a specific reference value and the emission wavelength is within a specific wavelength band, it will be judged as a good product, and when the point-on brightness is lower than the above-mentioned reference value, when it is not turned on, or emits light When the wavelength shift exceeds the allowable range, it is judged as a defective product. Then, after the defective LED 8 is detected, the position coordinates of the defective LED 8 are obtained from the number of rows and columns relative to the preset reference position of the display panel 9 (for example, the center pixel of the panel), and the position coordinates Memories on removable media. Or, when the point-of-use inspection device is connected to the repair device and the LAN (Enthernet) in the factory, the information of the above-mentioned position coordinates can also be stored in the memory part of the control unit provided in each device or in the connected network. A data server, so that the information of the above-mentioned position coordinates can be shared among the devices. In addition, the following description is for the case where each device can share data through the data server connected to the network. In step S2, when the defective LED 8 is not detected (“NO” determination), the repairing process of the display panel 9 ends. On the other hand, when the defective LED 8 is detected (“YES” determination), the process proceeds to the repair process using the repair apparatus of the first embodiment, and step S3 is performed to remove the defective LED 8 from the display panel 9 . Specifically, in step S3 , first, the display panel 9 is adsorbed and held on the mounting surface 2 a of the pedestal 2 of the repairing device, and positioned at the position just below the LED removing device 45 . In the LED removing device 45 , an alignment device (not shown) is used to perform alignment so that the XY coordinate axis of the display panel 9 is aligned with the XY coordinate axis of the LED removing device 45 . In addition, the LED removing device 45 will read the position coordinates of the defective LEDs 8 detected in the point-and-click inspection device from the data server, and according to the position coordinates, remove the defective LEDs 8 (when there are a plurality of defective LEDs 8 among the defective LEDs 8 ). In this case, the selected one defective LED 8) is positioned at the irradiation position of the laser light of the LED removing device 45. Further, while observing the defective LED 8 through the observation optical system unit 46, the elevating and lowering of the pedestal 2 by the elevating mechanism 6 is controlled to focus on the end face 8b of the defective LED 8, and the pedestal 2 is slightly moved in the XY direction to fine-tune the relative position of the defective LED 8. in the position where the laser light is irradiated. Then, for example, ultraviolet rays (near ultraviolet rays or extreme ultraviolet rays) are emitted from the laser beam of the laser optical system unit 47, and the laser light of ultraviolet rays after being shaped into the shape of the end face 8b of the defective LED 8 by the slit is irradiated on the Defective LED8. In this way, the defective LEDs 8 are removed by ablation, and a repaired region 20 is formed on the display panel 9 . Moreover, infrared rays, a 2nd harmonic wave (SHG) etc. may be irradiated to defect LED8, or you may irradiate an ultraviolet-ray and infrared rays or SHG in combination. After the defective LED 8 is removed in this way, the position coordinates of the area (ie, the repaired area) 20 in the display panel 9 after the defective LED 8 has been removed are stored in the data server. Furthermore, when there are other second defective LEDs 8, the second defective LEDs 8 are positioned at the irradiation position of the laser light according to the position coordinates of the second defective LEDs 8 read from the data server. Then, in the same manner as described above, the second defective LED 8 is removed, and the position coordinates of the repaired area 20 are stored in the data server. Next, in step S4, the bonding device 1 is used to mount the LEDs 8 of good quality in the repaired area 20 of the display panel 9, and the bonding process is completed. In addition, after the above-mentioned bonding process using the bonding device 1 is completed, it is possible to return to step S1 as required, and perform the spot-on inspection of the display panel 9 again by using the spot-on inspection device. FIG. 10 is a flowchart showing the bonding process performed using the bonding apparatus 1, and shows the specific process of the above-mentioned step S4. First, move the pedestal 2 and set the restoration area 20 of the display panel 9 according to the position coordinates of the restoration area 20 read from the data server (if there are multiple restoration areas 20, it is the selected one The repair area 20) is positioned within the field of view of the observation optical system 22 of the bonding apparatus 1 to the objective lens 10 to start bonding. In this case, the second observation camera 27 is used to observe the surface of the display panel 9 , and the second imaging lens 26 is shifted in the optical axis direction to perform auto-focusing to make the image of the repaired area 20 clear. In step S11 of FIG. 10 , the flux 17 is sprayed from the flux coating device 4 to the LED 8A for repair, which is held on the mounting tape 11 (eg, an adhesive tape) and from which the protective film 16 has been peeled off. In order to apply the flux 17 to the electrode part 8a after the soldering process of the LED 8A for repairing. Next, in step S12 , as shown in FIG. 4 , the placing belt 11 is moved by a predetermined amount so that the treated repairing LED 8B coated with the flux 17 is positioned directly under the pressing member 21 . within the field of view of the objective lens 10 . In this case, as shown in FIG. 11 , the end surface 8b of the processed repair LED 8B is imaged on the first observation camera through the mounting belt 11, the pressing member 21, the objective lens 10, and the first imaging lens 24. 25 photographic faces. On the other hand, the restoration area 20 of the display panel 9 is imaged on the imaging surface of the second observation camera 27 through the mounting belt 11 , the pressing member 21 , the objective lens 10 , and the second imaging lens 26 . The control unit (not shown) of the bonding apparatus 1 compares and processes the image information of the end face 8b of the repaired LED 8B captured by the first observation camera 25 and the image information obtained by the second observation camera 27 The acquired image information of the repaired area 20 of the display panel 9 is taken to calculate the displacement amount and the displacement direction of the two images. Then, the pedestal 2 is slightly moved in the X and Y directions to perform alignment to align the two images. Next, in step S13 , after the alignment is completed, the pedestal 2 is raised to press the electrode portion 8 a of the treated repair LED 8B to the electrode pad of the repair area 20 of the display panel 9 . At this time, with the rise of the pedestal 2, the second imaging lens 26 is shifted to the direction of the arrow shown in FIG. state). Next, in step S14 , the infrared laser 37 of the heating device 7 is driven, and through the objective lens 10 , the pressing element 21 and the mounting belt 11 , the slit 40 is shaped to fit the end face 8 b of the LED 8 . The end face 8b of the LED 8B for restoration|repair after processing is irradiated with the laser light of infrared rays after shaping|molding. Thereby, the solder material 34 of the electrode part 8a of the processed LED 8B for repair is heated and melted to electrically bond the electrode part 8a of the LED 8 to the electrode pad of the repair area 20 of the display panel 9 . At this time, since the solder material 34 on the electrode portion 8a of the LED 8 is coated with the flux 17, the surface of the solder material 34 and the surface of the repair area 20 are cleaned to eliminate poor electrical connection. After the repair of the LED 8 in the repair area 20 is completed, the pedestal 2 is lowered. At this time, since the processed repair LEDs 8B joined to the repair area 20 of the display panel 9 will descend together with the pedestal 2, the strength of the bonding strength due to the welding material 34 and the adhesive strength of the adhesive tape will be poor. On the other hand, the treated repairing LED 8B is peeled off from the mounting tape 11 . Next, in step S15, it is determined whether further repair processing is required. That is, it is determined whether there are other repaired regions 20 . Then, if there is no other repaired region 20, step S15 will be judged as "NO", and the bonding process using the bonding apparatus 1 will be terminated. On the other hand, if there are plural repair areas 20, step S15 will be judged as "YES". At the same time, the pedestal 2 is moved in the XY directions according to the position coordinates of the second repair area 20 to position the second repair area 20 at the joining position of the joining device 1 . After that, returning to step S11, the flux 17 is sprayed from the flux coating device 4 toward the second repair LED 8A after the protective film 16 has been peeled off, and the flux 17 is applied to the second repair LED 8A. The electrode portion 8a after the welding process. After that, repair processing is performed on the second repair region 20 in the same manner as described above. Then, steps S11 to S15 are repeatedly performed until the repair processing for all the repaired regions 20 is completed, and it is determined that no other repaired region 20 exists, and step S15 is determined as "NO". Fig. 13 is a front view showing the schematic configuration of the second embodiment of the repair apparatus of the present invention. The point of difference from the above-described first embodiment is that the repair device includes a point-on-check device 52 . The spot inspection device 52 has the same structure as the spot inspection device described in the first embodiment, and can be powered on the display panel 9 to determine the goodness of a plurality of LEDs 8 and obtain the position coordinates of the defective LEDs 8 . Then, the LED removing device 45 and the bonding device 1 are integrally provided. According to this second embodiment, first, the pedestal 2 is moved to position the display panel 9 that is adsorbed and held on the pedestal 2 within the photographing area of the image sensor 53 of the point-on-check device 52 . At this time, an alignment device (not shown) is used to perform alignment so that the XY coordinate axis of the display panel 9 is aligned with the XY coordinate axis of the spot-on inspection device 52 . After that, the plurality of LEDs 8 of the display panel 9 are turned on and photographed by the image sensor 53 to check whether there are defective LEDs 8 that are not turned on or the like. As a result, when the display panel 9 has a defective LED 8, the position coordinates of the defective LED 8 are obtained, and the information of the position coordinates of the defective LED 8 is stored in the memory unit (not shown) of the repairing device. Next, the pedestal 2 is moved, and the display panel 9 is conveyed right below the LED removal device 45 . In the LED removal device 45, the information of the position coordinates of the defective LEDs 8 is read from the memory part of the repair device, and the defective LEDs 8 on the display panel 9 (if there are plural defective LEDs 8) are sorted according to the position coordinates. The selected one defective LED 8) is positioned at the irradiation position of the laser light of the LED removing device 45. Further, in the LED removal device 45, the stand 2 is raised and lowered to focus on the end face 8b of the defective LED 8 while observing the defective LED 8 by the observation camera of the observation optical system unit 46. Then, for example, ultraviolet rays are emitted from the laser beam of the laser optical system unit 47 , and the defect LEDs 8 are irradiated with ultraviolet rays shaped by the slits to fit the shape of the end faces 8 b of the defect LEDs 8 . In this way, the defective LEDs 8 are removed by ablation, and a repaired region 20 is formed on the display panel 9 . After the removal of the defective LEDs 8 by the LED removal device 45 is completed, the pedestal 2 is moved and the display panel 9 is conveyed to the position just below the bonding device 1 . In the bonding device 1, the pedestal 2 is moved according to the position coordinates of the defective LED 8 read from the memory part of the repairing device, so that the repairing area 20 of the display panel 9 (if there are plural repairing areas 20, it is The selected 1 repair area 20 ) is positioned within the field of view of the objective lens 10 of the bonding device 1 . Furthermore, in the bonding apparatus 1, the carrier tape 11 having a plurality of repairing electrodes including the electrode portions 8a after the welding process is arranged side by side in the long-axis direction is transferred in the long-axis direction. The LED 8A holds the end face 8b on the opposite side to the electrode portion 8a. Next, the electrode part 8a of LED8A for restoration|repair is apply|coated to the electrode part 8a of LED8A for restoration|repair after peeling off the protective film 16 with a flux. Next, the first and second observation cameras 25 and 27 are used to observe the treated repairing LED 8B coated with the flux 17 and the repaired area 20 of the display panel 9, and based on the image information of the two obtained images, the The pedestal 2 is slightly moved to perform alignment, so that the two images are aligned. Next, the pedestal 2 is raised, and the processed LED 8B for restoration|repair is press-contacted to the restoration area|region 20 of the display panel 9. Then, the solder material 34 of the electrode portion 8a of the treated repair LED 8B is heated and melted by the infrared laser light irradiated from the heating device 7, so that the treated repair LED 8B is electrically bonded to the display panel 9 Repair area 20. According to the present invention, since the flux 17 is applied to the electrode portion 8a of the repairing LED 8A after the soldering process, when the soldering material 34 is heated and melted to bond the repairing LED 8A to the repairing region 20 of the display panel 9, The surface of the solder material 34 and the debris in the repaired area 20 of the display panel 9 can be cleaned by the heated flux 17 to eliminate the occurrence of poor electrical connection. In addition, compared with the method of applying the flux 17 to the display panel 9, after the repairing LED 8A is connected to the display panel 9, it is not necessary to wash and remove the excess flux 17 on the display panel 9, so repairing Homework will become easier. In addition, although the above-mentioned embodiment has described the case where the electronic components are micro LEDs 8 , the present invention is not limited to this, and the electronic components may also be any electronic components such as sub-millimeter LEDs or semiconductor chips. Therefore, the circuit substrate is not limited to the display panel 9 . The above-described embodiments are schematically shown to the extent that the present invention can be understood and implemented, but the present invention is not limited thereto. In the present invention, various changes and corrections can be made without departing from the technical idea shown in the scope of the patent application.

1:接合裝置 2:台座 2a:載置面 3:移送機構 4:助焊劑塗佈裝置 5:觀察裝置 6:升降機構 7:加熱裝置 8:LED(電子零件) 8a:電極部 8b:端面 8A:修復用LED 8B:經處理後之修復用LED 9:顯示面板(電路基板) 10:對物透鏡 11:載置帶體 12:送出捲筒 13:捲繞捲筒 14:分離捲筒 15:導引捲筒 16:保護膜 17:助焊劑 19:回收部 20:修復區域 21:按壓組件 21a:上面 21b:下面 34:焊材 37:紅外線雷射 38:電離器 45:LED去除裝置(電氣零件去除裝置) 52:點啟檢查裝置 1: Engagement device 2: Pedestal 2a: Mounting surface 3: Transfer mechanism 4: Flux coating device 5: Observation device 6: Lifting mechanism 7: Heating device 8: LED (electronic parts) 8a: Electrode part 8b: End face 8A: Repair LED 8B: LED for repair after treatment 9: Display panel (circuit substrate) 10: Object lens 11: Placing the belt 12: Send out the reel 13: Winding the reel 14: Separating the reels 15: Guide the reel 16: Protective film 17: Flux 19: Recycling Department 20: Repair area 21: Press the assembly 21a: Above 21b: Below 34: Welding consumables 37: Infrared Laser 38: Ionizer 45: LED removal device (electrical parts removal device) 52: Click on the inspection device

圖1係顯示本發明之接合裝置之一實施型態的概略構成之前視圖。 圖2係顯示本發明之接合裝置所使用的修復用LED之圖式,(a)為俯視圖,(b)為前視圖。 圖3係顯示本發明之接合裝置所使用的載置帶體之圖式,(a)為前視圖,(b)為去除保護膜後之俯視圖。 圖4為本發明之接合裝置的主要部分放大前視圖。 圖5係顯示本發明之接合裝置所使用之按壓組件的形狀之說明圖。 圖6為關於按壓組件的上面形狀之說明圖,(a)係顯示上面乃具有曲面形狀的情況,該曲面形狀係具有和反射光的球面波一致之曲率,(b)係顯示上面為平面形狀的情況。 圖7係顯示本發明之接合裝置所使用之觀察裝置的觀察光學系統及加熱裝置的雷射光學系統之圖式。 圖8係顯示本發明之修復裝置之第1實施型態的概略構成之前視圖。 圖9係顯示本發明之修復方法之流程圖。 圖10係顯示上述修復方法中的接合工序之流程圖。 圖11為說明利用上述觀察光學系統來同時觀察焦點位置不同的觀察面之第1示意圖。 圖12為說明利用上述觀察光學系統來同時觀察焦點位置不同的觀察面之第2示意圖。 圖13係顯示本發明之修復裝置之第2實施型態的概略構成之前視圖。 FIG. 1 is a front view showing a schematic configuration of an embodiment of the bonding apparatus of the present invention. FIG. 2 is a diagram showing a repairing LED used in the bonding device of the present invention, (a) is a plan view, and (b) is a front view. Fig. 3 is a schematic diagram showing a carrier tape body used in the bonding device of the present invention, (a) is a front view, and (b) is a top view after removing the protective film. Fig. 4 is an enlarged front view of the main part of the engaging device of the present invention. FIG. 5 is an explanatory view showing the shape of a pressing member used in the joint device of the present invention. Fig. 6 is an explanatory view of the top shape of the pressing member, (a) shows the case where the top has a curved surface shape having a curvature corresponding to the spherical wave of the reflected light, and (b) shows that the top has a flat shape Case. FIG. 7 is a diagram showing an observation optical system of an observation apparatus and a laser optical system of a heating apparatus used in the bonding apparatus of the present invention. Fig. 8 is a front view showing the schematic configuration of the first embodiment of the repair apparatus of the present invention. FIG. 9 is a flow chart showing the repairing method of the present invention. FIG. 10 is a flow chart showing the joining process in the above-mentioned repairing method. FIG. 11 is a first schematic diagram illustrating the simultaneous observation of observation surfaces with different focal positions by the observation optical system. FIG. 12 is a second schematic diagram illustrating simultaneous observation of observation surfaces with different focal positions by the observation optical system. Fig. 13 is a front view showing the schematic configuration of the second embodiment of the repair apparatus of the present invention.

1:接合裝置 1: Engagement device

2:台座 2: Pedestal

2a:載置面 2a: Mounting surface

3:移送機構 3: Transfer mechanism

4:助焊劑塗佈裝置 4: Flux coating device

5:觀察裝置 5: Observation device

6:升降機構 6: Lifting mechanism

7:加熱裝置 7: Heating device

10:對物透鏡 10: Object lens

11:載置帶體 11: Placing the belt

12:送出捲筒 12: Send out the reel

13:捲繞捲筒 13: Winding the reel

14:分離捲筒 14: Separating the reels

15:導引捲筒 15: Guide the reel

16:保護膜 16: Protective film

21:按壓組件 21: Press the assembly

38:電離器 38: Ionizer

Claims (15)

一種接合裝置,係將載置帶體的修復用電子零件電性接合在封裝有複數電子零件之電路基板上的指定區域,該載置帶體會保持與具有經焊接處理後的電極部之複數該修復用電子零件的該電極部為相反側之端面,且被移送於長軸方向; 該修復用電子零件被接合於該指定區域之接合位置之該載置帶體的移送方向上游側係設置有會將助焊劑塗佈在該修復用電子零件的該電極部之助焊劑塗佈裝置。 A bonding device for electrically bonding repairing electronic components of a carrier tape body to a designated area on a circuit substrate encapsulating a plurality of electronic components, the carrier tape body holding a plurality of the electronic components having soldered electrode parts. The electrode portion of the repaired electronic component is the end face on the opposite side, and is transferred in the long axis direction; A flux application device for applying flux to the electrode portion of the repair electronic component is provided on the upstream side in the conveying direction of the mounting belt at the joint position where the repair electronic component is joined to the designated area. . 如申請專利範圍第1項之接合裝置,其中該電子零件及該修復用電子零件為微型LED。According to the joint device of claim 1, the electronic component and the repairing electronic component are micro LEDs. 一種接合裝置,係將良品的電子零件接合在封裝有複數電子零件之電路基板中已被去除缺陷電子零件後的區域,即修復區域; 係構成為具備: 台座,係保持與該電路基板之封裝面為相反側的內面; 移送機構,係將載置帶體移送於長軸方向,該載置帶體係於該長軸方向並排地具有具備經焊接處理後的電極部之複數修復用電子零件,且會保持與該電極部為相反側之端面; 助焊劑塗佈裝置,係在該載置帶體的送出側來將助焊劑塗佈在該複數修復用電子零件的該電極部; 觀察裝置,係觀察塗佈有該助焊劑之經處理後修復用電子零件與該電路基板的該修復區域並使其對位; 升降機構,係使該台座上升來將該經處理後修復用電子零件壓接在該電路基板的該修復區域;以及 加熱裝置,係使該經處理後修復用電子零件之該電極部的焊材加熱熔融,來將該經處理後修復用電子零件電性接合在該電路基板的該修復區域。 A bonding device, which is used for bonding good electronic parts to the area after the defective electronic parts have been removed in a circuit substrate encapsulated with a plurality of electronic parts, that is, the repair area; The system consists of: a pedestal, which maintains the inner surface on the opposite side to the packaging surface of the circuit substrate; The transfer mechanism transfers the carrier belt body in the long axis direction, and the carrier belt system has a plurality of repaired electronic parts including the electrode parts after the welding process side by side in the long axis direction, and keeps the electrode parts with the electrode parts. is the end face on the opposite side; A flux coating device for coating the electrode parts of the plurality of electronic components for repair with flux on the delivery side of the mounting belt; An observation device for observing and aligning the electronic parts for repair after treatment coated with the flux and the repair area of the circuit substrate; an elevating mechanism for raising the pedestal to crimp the processed electronic component for repair on the repair area of the circuit substrate; and The heating device heats and melts the soldering material of the electrode portion of the processed electronic component for repair, so as to electrically bond the processed electronic component for repair to the repair area of the circuit substrate. 如申請專利範圍第3項之接合裝置,其中該助焊劑塗佈裝置係設置有助焊劑的回收部。According to the bonding device of claim 3, the flux coating device is provided with a flux recovery part. 如申請專利範圍第3或4項之接合裝置,其中該助焊劑塗佈裝置之該載置帶體的移送方向上游側係設置有用以去除該載置帶體的靜電之電離器。The joining device according to claim 3 or 4 of the scope of claim 3, wherein an ionizer for removing static electricity from the carrier belt is provided on the upstream side of the carrier belt in the flux coating device in the transfer direction. 如申請專利範圍第3項之接合裝置,其中該台座的載置面與對向於該載置面而為該觀察裝置所具備之對物透鏡之間係設置有透過該載置帶體來將該經處理後修復用電子零件壓接在該修復區域之按壓組件。According to the bonding device of claim 3 of the scope of application, wherein a mounting surface is provided between the mounting surface of the pedestal and the objective lens opposite to the mounting surface and provided for the observation device through the mounting belt. The processed electronic component for repair is crimped to the pressing component of the repair area. 如申請專利範圍第6項之接合裝置,其中該按壓組件係具有該對物透鏡側的上面與使該載置帶體滑動之下面,該上面係形成為曲面,該曲面係由以該對物透鏡的焦點位置作為中心之曲率半徑來加以表示,該下面係形成為柱面,該柱面係具有會交叉於該載置帶體的移送方向之中心軸。The joint device of claim 6, wherein the pressing member has an upper surface on the side of the pair of objective lenses and a lower surface that slides the carrier belt, the upper surface is formed into a curved surface, and the curved surface is formed by the pair of objects. The focal position of the lens is represented as the radius of curvature of the center, and the lower surface is formed as a cylindrical surface, and the cylindrical surface has a central axis that intersects the transfer direction of the mounting tape. 如申請專利範圍第3項之接合裝置,其中該加熱裝置為與該觀察裝置一體地設置之紅外線雷射。The bonding device of claim 3, wherein the heating device is an infrared laser integrated with the observation device. 如申請專利範圍第3項之接合裝置,其中該電子零件及該修復用電子零件為微型LED。According to the joint device of claim 3 of the scope of application, wherein the electronic component and the electronic component for repair are micro LEDs. 一種修復裝置,係具備電子零件去除裝置及接合裝置; 該電子零件去除裝置係將雷射光照射在封裝有複數電子零件之電路基板的缺陷電子零件,來去除該缺陷電子零件以於該電路基板形成修復區域,且會記憶該修復區域的位置座標; 該接合裝置係構成為具備: 台座,係保持與該電路基板之封裝面為相反側的內面; 移送機構,係將載置帶體移送於該長軸方向,該載置帶體係於長軸方向並排地具有具備經焊接處理後的電極部之複數修復用電子零件,且會保持與該電極部為相反側之端面; 助焊劑塗佈裝置,係在該載置帶體的送出側來將助焊劑塗佈在該複數修復用電子零件的該電極部; 觀察裝置,係觀察塗佈有該助焊劑之經處理後修復用電子零件與該電路基板的修復區域並使其對位; 升降機構,係使該台座上升來將該經處理後修復用電子零件壓接在該電路基板的修復區域;以及 加熱裝置,係使該經處理後修復用電子零件之該電極部的焊材加熱熔融,來將該經處理後修復用電子零件電性接合在該電路基板的修復區域; 該台座係構成為會在該電子零件去除裝置與該接合裝置之間移動,而依據該修復區域的該位置座標來將該修復區域定位在該接合裝置之與該經處理後修復用電子零件的接合位置。 A repairing device is provided with an electronic parts removing device and a joining device; The electronic part removing device irradiates a laser light on a defective electronic part of a circuit substrate encapsulated with a plurality of electronic parts to remove the defective electronic part to form a repair area on the circuit substrate, and memorizes the position coordinates of the repair area; The joining device is configured to include: a pedestal, which maintains the inner surface on the opposite side to the packaging surface of the circuit substrate; The transfer mechanism transfers the carrier belt body in the long axis direction, the carrier belt system has a plurality of electronic parts for repair including the electrode parts after the welding process side by side in the long axis direction, and keeps the electrode part with the electrode part. is the end face on the opposite side; A flux coating device for coating the electrode parts of the plurality of electronic components for repair with flux on the delivery side of the mounting belt; An observation device, which is used to observe and align the repaired area of the electronic component for repair after treatment coated with the flux and the circuit substrate; a lifting mechanism for raising the pedestal to crimp the processed electronic component for repair on the repair area of the circuit substrate; and A heating device for heating and melting the soldering material of the electrode portion of the processed electronic component for repair, so as to electrically bond the processed electronic component for repair to the repair area of the circuit substrate; The pedestal is configured to move between the electronic part removal device and the bonding device, and the repaired region is positioned between the bonding device and the processed repaired electronic part according to the positional coordinates of the repaired region engagement position. 如申請專利範圍第10項之修復裝置,其另具備點啟檢查裝置,係通電於該電路基板來判定複數電子零件的良窳,且會記憶缺陷電子零件的位置座標; 該台座係構成為會在該點啟檢查裝置與該電子零件去除裝置及該接合裝置之間移動,而依據該缺陷電子零件的位置座標來將該缺陷電子零件定位在該電子零件去除裝置的雷射照光位置,並依據該修復區域的位置座標來將該修復區域定位在該接合裝置之與該經處理後修復用電子零件的接合位置。 For the repairing device of item 10 of the scope of the application, it is additionally provided with a point-and-click inspection device, which is energized on the circuit substrate to determine the quality of a plurality of electronic parts, and can memorize the position coordinates of the defective electronic parts; The pedestal is configured to move between the point-start inspection device, the electronic part removing device and the joining device, and the defective electronic part is positioned on the lightning bolt of the electronic part removing device according to the position coordinates of the defective electronic part The light position is irradiated, and the repaired region is positioned at the joint position between the joint device and the processed repaired electronic part according to the position coordinates of the repaired region. 如申請專利範圍第10或11項之修復裝置,其中該電子零件及該修復用電子零件為微型LED。For the repairing device according to claim 10 or 11 of the scope of the application, the electronic component and the electronic component for repairing are micro LEDs. 一種修復方法,會進行以下步驟: 第1步驟,係將與封裝有複數電子零件之電路基板的封裝面為相反側之內面保持在台座; 第2步驟,係將載置帶體移送於長軸方向,該載置帶體係於該長軸方向並排地具有具備經焊接處理後的電極部之複數修復用電子零件,且會保持與該電極部為相反側之端面; 第3步驟,係將助焊劑塗佈在該複數修復用電子零件的該電極部; 第4步驟,係觀察塗佈有該助焊劑之經處理後修復用電子零件與該電路基板中已被去除缺陷電子零件後的區域,即修復區域並使其對位; 第5驟,係將該經處理後修復用電子零件壓接在該電路基板的該修復區域;以及 第6步驟,係使該經處理後修復用電子零件之該電極部的焊材加熱熔融,來將該經處理後修復用電子零件電性接合在該電路基板的該修復區域。 A repair method that takes the following steps: The first step is to hold the inner surface on the pedestal on the opposite side to the packaging surface of the circuit substrate encapsulating the plurality of electronic components; In the second step, the carrier belt is transferred in the long axis direction, and the carrier belt system has a plurality of electronic parts for repair including the electrode parts after the welding process side by side in the long axis direction, and keeps the electrodes with the electrodes. The part is the end face on the opposite side; The third step is to apply flux on the electrode parts of the plurality of repaired electronic parts; The fourth step is to observe the repaired electronic parts coated with the flux and the area of the circuit substrate after the defective electronic parts have been removed, that is, the repaired area and align it; The fifth step is to crimp the processed electronic component for repair on the repaired area of the circuit substrate; and In the sixth step, the soldering material of the electrode portion of the processed electronic component for repair is heated and melted to electrically bond the processed electronic component to the repaired area of the circuit board. 如申請專利範圍第13項之修復方法,其中在實施該第1步驟前會實施以下步驟:通電於該電路基板來判定複數電子零件的良窳,並將雷射光照射在被判定為不良之缺陷電子零件,來去除該缺陷電子零件以於該電路基板形成該修復區域。According to the repair method of claim 13, before the first step is performed, the following steps are performed: energizing the circuit board to determine the goodness of a plurality of electronic components, and irradiating laser light on the defects that are determined to be defective electronic parts to remove the defective electronic parts to form the repaired area on the circuit substrate. 如申請專利範圍第13或14項之修復方法,其中該電子零件及該修復用電子零件為微型LED。According to the repairing method of claim 13 or 14 of the scope of application, wherein the electronic component and the electronic component for repair are micro LEDs.
TW110126231A 2020-09-07 2021-07-16 Bonding device, repairing device and repairing method TW202214058A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-149743 2020-09-07
JP2020149743A JP2022044218A (en) 2020-09-07 2020-09-07 Bonding apparatus, repair apparatus, and repair method

Publications (1)

Publication Number Publication Date
TW202214058A true TW202214058A (en) 2022-04-01

Family

ID=80491007

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110126231A TW202214058A (en) 2020-09-07 2021-07-16 Bonding device, repairing device and repairing method

Country Status (3)

Country Link
JP (1) JP2022044218A (en)
TW (1) TW202214058A (en)
WO (1) WO2022049883A1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020064118A (en) * 2018-10-15 2020-04-23 株式会社ブイ・テクノロジー Carrier film, and method and device for repairing led display panel
KR101953645B1 (en) * 2018-12-19 2019-03-04 (주)에스티아이 Apparatus and method for repairing led substrate
JP2020136304A (en) * 2019-02-13 2020-08-31 アスリートFa株式会社 Conductive ball checking repairing apparatus

Also Published As

Publication number Publication date
WO2022049883A1 (en) 2022-03-10
JP2022044218A (en) 2022-03-17

Similar Documents

Publication Publication Date Title
KR101180916B1 (en) Apparatus for bonding camera module, equipment for assembling camera module having the same and method for assembling camera module using the same
CN110352476B (en) Laser joining apparatus and method for three-dimensional structure
US5741410A (en) Apparatus for forming spherical electrodes
KR20170048971A (en) Apparatus for bonding of flip chip
JP7062703B2 (en) Laser welding equipment and methods for semiconductor devices
JP7107601B1 (en) Bump forming apparatus, bump forming method, solder ball repair apparatus, and solder ball repair method
TW202214058A (en) Bonding device, repairing device and repairing method
JP2007147840A (en) Defect correcting device for pattern substrate, method for correcting defect and method for manufacturing pattern substrate
CN110164784A (en) The method and apparatus of conducting element for reflow semiconductor device
US20230405712A1 (en) Dual laser optic module of turntable type probe pin bonding apparatus
JP7387666B2 (en) Chip parts removal equipment
US20230256546A1 (en) Laser reflow method
KR20180107651A (en) Device bonding method and device bonding system performing the same
JP5175610B2 (en) Manufacturing method of semiconductor device
TW202207791A (en) Component packaging device and component packaging method characterized in that the components can be transferred with high accuracy to be packaged on the substrate
JP2024008161A (en) Bump forming device, bump forming method, solder ball repair device, and solder ball repair method
JPH06283819A (en) Die bonder and die bonding method for optical element
JP2003297881A (en) Optical processing method for ball grid array
KR20240041236A (en) Semiconductor manufacturing apparatus, peeling unit and method of manufacturing semiconductor device
CN116511723A (en) Method and device for removing mini LED adhesive layer by laser
TW202410276A (en) pick-up device
CN117747491A (en) Semiconductor manufacturing apparatus, peeling unit, and method for manufacturing semiconductor device
JPH05235538A (en) Electronic parts correction equipment
KR20240031081A (en) Pickup apparatus
KR20210133520A (en) Apparatus and method for removing mini led chip, and system and method for repairing mini led display module using the same