TW202146589A - Pigment dispersion composition for black matrix, photo resist composition for black matrix and black matrix wherein the pigment dispersion composition includes a black colorant, a pigment dispersant, a compound, and an organic solvent - Google Patents

Pigment dispersion composition for black matrix, photo resist composition for black matrix and black matrix wherein the pigment dispersion composition includes a black colorant, a pigment dispersant, a compound, and an organic solvent Download PDF

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TW202146589A
TW202146589A TW110109560A TW110109560A TW202146589A TW 202146589 A TW202146589 A TW 202146589A TW 110109560 A TW110109560 A TW 110109560A TW 110109560 A TW110109560 A TW 110109560A TW 202146589 A TW202146589 A TW 202146589A
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black matrix
black
pigment dispersion
pigment
dispersion composition
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辻康人
杉江俊輔
大泊研
井上拓也
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日商阪田油墨股份有限公司
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    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D17/00Pigment pastes, e.g. for mixing in paints
    • C09D17/004Pigment pastes, e.g. for mixing in paints containing an inorganic pigment
    • C09D17/005Carbon black
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
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    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/0008Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
    • C08K5/0041Optical brightening agents, organic pigments
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    • C08K5/00Use of organic ingredients
    • C08K5/36Sulfur-, selenium-, or tellurium-containing compounds
    • C08K5/37Thiols
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    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
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    • C09C3/00Treatment in general of inorganic materials, other than fibrous fillers, to enhance their pigmenting or filling properties
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    • C09D17/00Pigment pastes, e.g. for mixing in paints
    • C09D17/002Pigment pastes, e.g. for mixing in paints in organic medium
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
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    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

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Abstract

The present invention provides a pigment dispersion composition for a black matrix, which can form a black matrix having an excellent developability for a photoresist composition of the black matrix and an excellent surface resistance even if a post-bake at a high temperature is performed for a long time. The pigment dispersion composition for the black matrix of the present invention is characterized in comprising a black colorant, a pigment dispersant, a compound, and an organic solvent. The pigment dispersant is an acrylic block copolymer containing nitrogen atoms.

Description

黑矩陣用顏料分散組成物、黑矩陣用光阻組成物、及黑矩陣Pigment dispersion composition for black matrix, photoresist composition for black matrix, and black matrix

本發明係關於一種黑矩陣用顏料分散組成物、黑矩陣用光阻組成物、及黑矩陣。The present invention relates to a pigment dispersion composition for a black matrix, a photoresist composition for a black matrix, and a black matrix.

於使用液晶或電漿等之影像顯示裝置中,在畫面之顯示區域內之著色圖案之間隙或顯示區域周邊部分之緣部設置有遮光膜(黑矩陣),又,於使用TFT之液晶顯示器中,在TFT之外界光側等處設置有遮光膜(黑矩陣)。 並且,遮光膜(黑矩陣)在液晶顯示裝置中主要有助於防止來自背光源之漏光映入至畫面,又,在電漿顯示裝置中主要有助於防止由各色光之混濁導致之污斑映入至畫面,從而提昇顯示特性(對比度及色純度)。In an image display device using liquid crystal or plasma, etc., a light-shielding film (black matrix) is provided in the gap between the coloring patterns in the display area of the screen or at the edge of the peripheral portion of the display area. In addition, in the liquid crystal display using TFT , a light-shielding film (black matrix) is provided on the outside light side of the TFT, etc. In addition, the light-shielding film (black matrix) mainly helps to prevent the leakage of light from the backlight from being reflected on the screen in the liquid crystal display device, and in the plasma display device, it mainly helps to prevent the smear caused by the turbidity of each color light. Reflected on the screen to improve display characteristics (contrast and color purity).

例如,用以將液晶顯示裝置之背光源之白色光轉換為著色光之濾色器通常藉由如下方法製造:於形成有黑矩陣之玻璃或塑膠片等透明基板表面,以條紋狀或鑲嵌狀等圖案依序形成紅、綠、藍之不同色相之像素。For example, a color filter for converting white light of a backlight source of a liquid crystal display device into colored light is usually manufactured by the following method: on the surface of a transparent substrate such as a glass or a plastic sheet formed with a black matrix, a stripe or mosaic pattern is formed. Such patterns form pixels of different hues of red, green, and blue in sequence.

又,於使影像顯示裝置與位置輸入裝置重合之觸控面板中,亦同樣地利用形成有黑矩陣作為遮光膜之濾色器,先前通常隔著覆蓋玻璃形成於與感測器基板相反之側。然而,隨著對觸控面板輕量化之要求提高,為了進一步謀求輕量化,對於在覆蓋玻璃之同側同時形成遮光膜及觸控感測器之技術進行了開發。Also, in the touch panel in which the image display device and the position input device are superimposed, a color filter formed with a black matrix as a light-shielding film is also used, which is usually formed on the opposite side of the sensor substrate through a cover glass. . However, with the increasing demand for weight reduction of touch panels, in order to further reduce weight, a technology of forming a light-shielding film and a touch sensor on the same side of the cover glass at the same time has been developed.

例如,專利文獻1中揭示有如下技術:一種黑矩陣用光阻組成物,其含有黑色著色劑、具有羧基之鹼可溶性樹脂、光聚合開始劑、有機溶劑、分子内具有複數個

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
環之多價
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物。For example, Patent Document 1 discloses a technique for a photoresist composition for a black matrix comprising a black colorant, an alkali-soluble resin having a carboxyl group, a photopolymerization initiator, an organic solvent,
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
polyvalent ring
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
compound.

於專利文獻1中,使用碳二亞胺系之顏料分散劑作為顏料分散劑。 於在含有多價

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物之黑矩陣用光阻組成物中使用上述碳二亞胺系之顏料分散劑時,有「所得到之黑矩陣其表面電阻値優異,但是黑矩陣用光阻組成物之顯影性降低」之類的課題。In Patent Document 1, a carbodiimide-based pigment dispersant is used as the pigment dispersant. containing polyvalent
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
When the above-mentioned carbodiimide-based pigment dispersant is used in the black matrix photoresist composition of the compound, there is a problem of "the obtained black matrix has excellent surface resistance value, but the developability of the black matrix photoresist composition is lowered". class subject.

另一方面,於在含有多價

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物之黑矩陣用光阻組成物中使用一直以來通常被使用之顏料分散劑(例如,胺酯(urethane)系顏料分散劑)時,雖然黑矩陣用光阻組成物之顯影性沒有問題,但有所得到之黑矩陣之表面電阻値降低之類的課題。On the other hand, in the presence of polyvalent
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
When a conventionally used pigment dispersant (for example, a urethane-based pigment dispersant) is used in the photoresist composition for black matrix of the compound, there is no problem in the developability of the photoresist composition for black matrix. There is a problem such as a reduction in the surface resistance of the obtained black matrix.

又,近年來,影像顯示裝置被用於行動電話用途等各種用途。 隨著此種影像顯示裝置之用途擴大,逐漸要求更牢固之黑矩陣。In addition, in recent years, video display devices have been used in various applications such as mobile phone applications. With the expansion of the use of such image display devices, a stronger black matrix is gradually required.

作為使黑矩陣更牢固之方法,有時使用進行高溫且長時間之後烘烤(post-bake)之方法。 然而,以往之黑矩陣用顏料分散物存在如下問題,即,若進行高溫且長時間之後烘烤,則表面電阻值會降低,仍有改善之餘地。 [先前技術文獻] [專利文獻]As a method of making the black matrix firmer, a method of post-bake at a high temperature and for a long time is sometimes used. However, the conventional pigment dispersions for black matrices have a problem that, when baked at a high temperature and after a long period of time, the surface resistance value is lowered, and there is still room for improvement. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本特開2003-344996號公報[Patent Document 1] Japanese Patent Laid-Open No. 2003-344996

[發明所欲解決之課題][The problem to be solved by the invention]

因此,本發明之目的在於提供一種黑矩陣用顏料分散組成物,其能夠形成黑矩陣用光阻組成物之顯影性優異、且即使進行高溫且長時間之後烘烤,表面電阻值亦優異之黑矩陣。 [解決課題之技術手段]Therefore, an object of the present invention is to provide a pigment-dispersed composition for black matrices, which can form a black matrix having excellent developability as a photoresist composition for black matrices, and excellent surface resistance value even if it is baked at high temperature and after a long period of time. matrix. [Technical means to solve the problem]

本發明人等發現,藉由含有黑色著色劑、顏料分散劑、

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物、及有機溶劑,且上述顏料分散劑為含有氮原子之丙烯酸系嵌段共聚物,可獲得一種黑矩陣用顏料分散組成物,其能夠形成黑矩陣用光阻組成物之顯影性優異、且即使進行高溫且長時間之後烘烤,表面電阻值亦優異之黑矩陣,從而完成本發明。The inventors of the present invention found that by containing a black colorant, a pigment dispersant,
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
A compound, and an organic solvent, wherein the pigment dispersant is an acrylic block copolymer containing nitrogen atoms, to obtain a pigment dispersion composition for a black matrix, which can form a photoresist composition for a black matrix, excellent in developability, and The present invention has been completed with a black matrix having excellent surface resistance value even after baking at a high temperature and for a long time.

即,本發明係一種黑矩陣用顏料分散組成物,其特徵在於:含有黑色著色劑、顏料分散劑、

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物、及有機溶劑,上述顏料分散劑為含有氮原子之丙烯酸系嵌段共聚物。That is, the present invention is a pigment dispersion composition for a black matrix, characterized by comprising a black colorant, a pigment dispersant,
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
A compound and an organic solvent, wherein the pigment dispersant is a nitrogen atom-containing acrylic block copolymer.

於本發明之黑矩陣用顏料分散組成物中,較佳為進一步含有顏料分散助劑。 又,上述顏料分散助劑較佳為酞青系化合物之碸化物。 又,上述

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物較佳為下述通式(1)及/或(2)所表示之化合物。
Figure 02_image001
〔通式(1)中,R1 及R2 表示可具有不飽和鍵之烷基或芳基,彼此可相同亦可不同。X1 為2價連結基。 通式(2)中,R3 及R4 表示可具有不飽和鍵之烷基或芳基,彼此可相同亦可不同。X2 為2價連結基。〕 又,上述黑色著色劑較佳含有碳黑。 又,上述碳黑較佳為酸性碳黑。 本發明亦為由本發明之黑矩陣用顏料分散組成物得到之黑矩陣用光阻組成物。 本發明亦為由本發明之黑矩陣用光阻組成物形成之黑矩陣。 以下對本發明之黑矩陣用顏料分散組成物、黑矩陣用光阻組成物、及由此形成之黑矩陣進行詳細說明。In the pigment dispersion composition for black matrices of the present invention, it is preferable to further contain a pigment dispersion auxiliary. Moreover, it is preferable that the said pigment dispersing auxiliary agent is a phthalocyanine compound. Also, the above
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
The compound is preferably a compound represented by the following general formula (1) and/or (2).
Figure 02_image001
[In the general formula (1), R 1 and R 2 represent an alkyl group or an aryl group which may have an unsaturated bond, and may be the same or different from each other. X 1 is a divalent linking group. In the general formula (2), R 3 and R 4 represent an alkyl group or an aryl group which may have an unsaturated bond, and may be the same or different from each other. X 2 is a divalent linking group. ] Moreover, it is preferable that the said black coloring agent contains carbon black. Moreover, it is preferable that the said carbon black is acidic carbon black. The present invention is also a photoresist composition for a black matrix obtained from the pigment dispersion composition for a black matrix of the present invention. The present invention is also a black matrix formed from the photoresist composition for a black matrix of the present invention. Hereinafter, the pigment dispersion composition for black matrices, the photoresist composition for black matrices, and the black matrix formed therefrom of the present invention will be described in detail.

<黑矩陣用顏料分散組成物> 本發明之黑矩陣用顏料分散組成物其特徵在於:含有黑色著色劑、環氧樹脂、

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物、及有機溶劑,上述環氧樹脂具有芳香環。<Pigment dispersion composition for black matrix> The pigment dispersion composition for black matrix of the present invention is characterized by containing a black colorant, an epoxy resin,
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
The compound, and the organic solvent, wherein the epoxy resin has an aromatic ring.

(黑色著色劑) 本發明之黑矩陣用顏料分散組成物含有黑色著色劑。 作為上述黑色著色劑,較佳含有碳黑,更佳為上述碳黑為酸性碳黑。 作為上述碳黑,較佳為平均一次粒徑20~60 nm,其中更佳為平均一次粒徑20~60 nm之中性碳黑及/或平均一次粒徑20~60 nm之酸性碳黑。 於上述黑色著色劑之一次粒徑小於20 nm或大於60 nm之情形時,存在不具有充分之遮光性或保存穩定性變差之情況。 再者,上述平均一次粒徑為藉由電子顯微鏡觀察所獲得之算術平均直徑之值。(black colorant) The pigment dispersion composition for black matrices of the present invention contains a black colorant. As said black coloring agent, it is preferable to contain carbon black, and it is more preferable that the said carbon black is acidic carbon black. The carbon black is preferably an average primary particle size of 20 to 60 nm, and more preferably neutral carbon black with an average primary particle size of 20 to 60 nm and/or acid carbon black with an average primary particle size of 20 to 60 nm. When the primary particle diameter of the above-mentioned black colorant is less than 20 nm or more than 60 nm, sufficient light-shielding properties may not be obtained or storage stability may be deteriorated. In addition, the said average primary particle diameter is the value of the arithmetic mean diameter obtained by electron microscope observation.

於併用上述中性碳黑與酸性碳黑之情形時,中性碳黑與酸性碳黑之混合比率(質量比)較佳為85/15~15/85,更佳為75/25~40/60。 於上述碳黑中之中性碳黑之比率大於85/15之情形時,存在密封強度降低之情況,於酸性碳黑之比率大於15/85之情形時,存在顯影邊界(development margin)或細線密接性降低之情況。When the above neutral carbon black and acid carbon black are used together, the mixing ratio (mass ratio) of neutral carbon black and acid carbon black is preferably 85/15 to 15/85, more preferably 75/25 to 40/ 60. In the case where the ratio of neutral carbon black in the above carbon black is more than 85/15, there is a case where the sealing strength is lowered, and when the ratio of acid carbon black is more than 15/85, there is a development margin or a thin line. When the adhesion is reduced.

對上述酸性碳黑及中性碳黑進行說明。 碳黑根據表面之結構可大致劃分為酸性碳與中性碳。酸性碳係指原本為酸性或經人工處理而酸化之碳質物質,與蒸餾水混合煮沸時顯示酸性。另一方面,已知中性碳在與蒸餾水混合煮沸時顯示中性或高於中性之pH。The above-mentioned acidic carbon black and neutral carbon black will be described. Carbon black can be roughly divided into acidic carbon and neutral carbon according to the structure of the surface. Acidic carbon refers to carbonaceous substances that are originally acidic or acidified by artificial treatment, and show acidity when they are mixed with distilled water and boiled. On the other hand, neutral carbons are known to exhibit a neutral or higher pH when mixed with distilled water and boiled.

作為上述中性碳黑,較佳為pH為8.0~10.0之範圍,具體而言,可列舉:Orion Engineered Carbons公司製造之Printex 25(平均一次粒徑56 nm、pH9.5)、Printex 35(平均一次粒徑31 nm、pH9.5)、Printex 65(平均一次粒徑21 nm、pH9.5)、三菱化學公司製造之MA#20(平均一次粒徑40 nm、pH8.0)、MA#40(平均一次粒徑40 nm、pH8.0)、MA#30(平均一次粒徑30 nm、pH8.0)等。The neutral carbon black preferably has a pH in the range of 8.0 to 10.0, and specifically, Printex 25 (average primary particle size 56 nm, pH 9.5), Printex 35 (average primary particle size 56 nm, pH 9.5) manufactured by Orion Engineered Carbons, Inc., Primary particle size: 31 nm, pH 9.5), Printex 65 (average primary particle size: 21 nm, pH 9.5), MA#20 manufactured by Mitsubishi Chemical Corporation (average primary particle size: 40 nm, pH 8.0), MA#40 (average primary particle size 40 nm, pH 8.0), MA#30 (average primary particle size 30 nm, pH 8.0), etc.

作為上述酸性碳黑,較佳為pH為2.0~4.0之範圍,具體而言,可列舉:Columbia Chemicals公司製造之Raven 1080(平均一次粒徑28 nm、pH2.4)、Raven 1100(平均一次粒徑32 nm、pH2.9)、三菱化學公司製造之MΑ-8(平均一次粒徑24 nm、pH3.0)、MΑ-100(平均一次粒徑22 nm、pH3.5)、Orion Engineered Carbons公司製造之Special black 250(平均一次粒徑56 nm、pH3.0)、Special black 350(平均一次粒徑31 nm、pH3.0)、Special black 550(平均一次粒徑25 nm、pH4.0)等。As the acid carbon black, the pH is preferably in the range of 2.0 to 4.0. Specifically, Raven 1080 (average primary particle size: 28 nm, pH 2.4), Raven 1100 (average primary particle size) manufactured by Columbia Chemicals, Inc. Diameter 32 nm, pH 2.9), MA-8 (average primary particle size 24 nm, pH 3.0) manufactured by Mitsubishi Chemical Corporation, MA-100 (average primary particle size 22 nm, pH 3.5), Orion Engineered Carbons Special black 250 (average primary particle size 56 nm, pH 3.0), Special black 350 (average primary particle size 31 nm, pH 3.0), Special black 550 (average primary particle size 25 nm, pH 4.0), etc. .

作為上述黑色著色劑,就適當地賦予顏料分散性或表面電阻值之觀點而言,較佳為Special black 250。As the above-mentioned black colorant, Special black 250 is preferable from the viewpoint of appropriately imparting pigment dispersibility and surface resistance value.

再者,上述pH可藉由如下方式測得:將1 g碳黑添加至20 ml之去除碳酸後之蒸餾水(pH7.0)中,並利用磁攪拌器進行混合而製備水性懸濁液,使用玻璃電極於25℃進行測定(德國工業品標準規格DIN ISO 787/9)。Furthermore, the above pH can be measured by the following method: adding 1 g of carbon black to 20 ml of distilled water (pH 7.0) after removing carbonic acid, and mixing with a magnetic stirrer to prepare an aqueous suspension, using The glass electrode was measured at 25°C (DIN ISO 787/9).

作為上述黑色著色劑之含量,以相對於本發明之黑矩陣用顏料分散組成物之全部固形物成分之質量百分率表示,較佳為3~70質量%,更佳為10~50質量%。 若上述黑色著色劑之含量未達3質量%,則存在形成黑矩陣時之遮光性變低之情況,若超過70質量%,則存在顏料變得難以分散之情況。The content of the black colorant is preferably 3 to 70% by mass, more preferably 10 to 50% by mass, expressed as a percentage by mass relative to the total solid content of the pigment dispersion composition for black matrices of the present invention. If the content of the black colorant is less than 3% by mass, the light-shielding properties at the time of forming a black matrix may be lowered, and if it exceeds 70% by mass, the pigment may be difficult to disperse.

(顏料分散劑) 本發明之黑矩陣用顏料分散組成物含有顏料分散劑。上述顏料分散劑為含有氮原子之丙烯酸系嵌段共聚物。 藉由含有上述顏料分散劑與後述㗁

Figure 110109560-A0101-12-02
化合物,而藉由後烘烤時之高溫,上述㗁
Figure 110109560-A0101-12-02
化合物聚合而成為高分子量體,藉此,即使因高溫而軟化之塗膜中產生上述黑色著色劑之移動,亦由於該㗁
Figure 110109560-A0101-12-02
化合物之聚合物成為間隔物,而上述黑色著色劑彼此不接觸。 又,上述顏料分散劑由於對上述黑色著色劑之吸附強烈,因此和上述
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物之聚合物相同,由於成為間隔物,而上述黑色著色劑彼此不接觸。 因此,推定本發明之黑矩陣用光阻組成物中,由於不形成導電性之組織結構,故可確保高表面電阻值。 但本發明可不限定於該作用機制而解釋。(Pigment Dispersant) The pigment dispersion composition for a black matrix of the present invention contains a pigment dispersant. The above-mentioned pigment dispersant is an acrylic block copolymer containing nitrogen atoms. By containing the above-mentioned pigment dispersant and the following
Figure 110109560-A0101-12-02
compound, and by the high temperature during post-baking, the above
Figure 110109560-A0101-12-02
The compound is polymerized to form a high-molecular-weight body, so that even if the above-mentioned movement of the black colorant occurs in the coating film softened by high temperature, the
Figure 110109560-A0101-12-02
The polymer of the compound becomes a spacer, and the above-mentioned black colorants do not come into contact with each other. In addition, since the above-mentioned pigment dispersant strongly adsorbs the above-mentioned black colorant, it is different from the above-mentioned
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
The polymers of the compounds are the same, and the above-mentioned black colorants do not come into contact with each other because they serve as spacers. Therefore, in the photoresist composition for a black matrix of the present invention, it is presumed that a high surface resistance value can be ensured because a conductive structure is not formed. However, the present invention can be interpreted without being limited to this mechanism of action.

作為上述含有氮原子之丙烯酸系嵌段共聚物,可適當選擇日本特開2019-35970號公報所揭示者、及製造方法來使用。 作為上述含有氮原子之丙烯酸系嵌段共聚物,具體而言,較佳為由於側鏈具有4級銨鹽基及胺基之至少一者的A嵌段、與不具有4級銨鹽基及胺基的B嵌段構成,更佳為A-B嵌段共聚物及B-A-B嵌段共聚物中之至少一者。As the above-mentioned nitrogen atom-containing acrylic block copolymer, those disclosed in JP 2019-35970 A and the production method can be appropriately selected and used. As the above-mentioned nitrogen atom-containing acrylic block copolymer, specifically, the A block having at least one of a quaternary ammonium salt group and an amine group in the side chain, and a block not having a quaternary ammonium salt group and The B block structure of the amine group is more preferably at least one of an AB block copolymer and a BAB block copolymer.

上述含有氮原子之丙烯酸系嵌段共聚物之胺值較佳為10~200mgKOH/g,更佳為20~150mgKOH/g。 再者,胺值係對應於為了將丙烯酸系嵌段共聚物1g中之胺基中和所需要之酸的莫耳當量之KOH的以mg數表示之値。The amine value of the nitrogen atom-containing acrylic block copolymer is preferably 10 to 200 mgKOH/g, more preferably 20 to 150 mgKOH/g. In addition, the amine value is the value expressed in mg of KOH corresponding to the molar equivalent of the acid required to neutralize the amine groups in 1 g of the acrylic block copolymer.

關於上述含有氮原子之丙烯酸系嵌段共聚物之分子量,以GPC測得之聚苯乙烯換算之重量平均分子量(Mw)較佳為1000~40000,更佳為2000~20000。The molecular weight of the nitrogen atom-containing acrylic block copolymer is preferably 1,000 to 40,000, more preferably 2,000 to 20,000 in terms of weight average molecular weight (Mw) in terms of polystyrene measured by GPC.

作為上述含有氮原子之丙烯酸系嵌段共聚物之市售品,可列舉BYK-LPN21116、BYK-2000、BYK-LPN6919、BYK-LPN21324、BYK-LPN22012(皆為BYK-Chemie公司製造)等。As a commercial item of the said nitrogen atom containing acrylic block copolymer, BYK-LPN21116, BYK-2000, BYK-LPN6919, BYK-LPN21324, BYK-LPN22012 (all are BYK-Chemie company make) etc. are mentioned.

作為上述顏料分散劑之含量,相對於上述黑色著色劑100質量份,較佳為1~200質量份,更佳為5~100質量份。As content of the said pigment dispersing agent, 1-200 mass parts is preferable with respect to 100 mass parts of said black coloring agents, More preferably, it is 5-100 mass parts.

(㗁

Figure 110109560-A0101-12-02
化合物) 本發明之黑矩陣用顏料分散組成物含有㗁
Figure 110109560-A0101-12-02
化合物。 上述
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物較佳為下述通式(1)及/或(2)所表示之化合物。
Figure 02_image001
[通式(1)中,R1 及R2 表示可具有不飽和鍵之烷基或芳基,彼此可相同亦可不同。X1 為2價連結基。 通式(2)中,R3 及R4 表示可具有不飽和鍵之烷基或芳基,彼此可相同亦可不同。X2 為2價連結基。](㗁
Figure 110109560-A0101-12-02
compound) The pigment dispersion composition for black matrix of the present invention contains:
Figure 110109560-A0101-12-02
compound. the above
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
The compound is preferably a compound represented by the following general formula (1) and/or (2).
Figure 02_image001
[In the general formula (1), R 1 and R 2 represent an alkyl group or an aryl group which may have an unsaturated bond, and may be the same or different from each other. X 1 is a divalent linking group. In the general formula (2), R 3 and R 4 represent an alkyl group or an aryl group which may have an unsaturated bond, and may be the same or different from each other. X 2 is a divalent linking group. ]

R1 及R2 以及R3 及R4 為可具有不飽和鍵之烷基或芳基。 作為上述烷基,例如可為直鏈狀、支鏈狀、環狀之任一者,作為其具體例,可列舉:甲基、乙基、正丙基、異丙基、環丙基、正丁基、異丁基、第二丁基、第三丁基、環丁基、正戊基、環戊基、環己基、降莰基、金剛烷基等或來自腰果殼液(CNSL)之可具有不飽和鍵之烷基等。R 1 and R 2 and R 3 and R 4 are an alkyl group or an aryl group which may have an unsaturated bond. The above-mentioned alkyl group may be, for example, any of linear, branched, and cyclic, and specific examples thereof include methyl, ethyl, n-propyl, isopropyl, cyclopropyl, n-propyl Butyl, isobutyl, sec-butyl, tert-butyl, cyclobutyl, n-pentyl, cyclopentyl, cyclohexyl, norbornyl, adamantyl, etc. or from cashew nut shell liquid (CNSL) Alkyl groups with unsaturated bonds, etc.

作為上述芳基,例如可列舉:甲苯基、二甲苯基、苯基、聯苯基、萘基、蒽基等。As said aryl group, a tolyl group, a xylyl group, a phenyl group, a biphenyl group, a naphthyl group, an anthracenyl group, etc. are mentioned, for example.

X1 及X2 為2價連結基。 作為上述2價連結基,除下述式(3)~(5)所示之連結基以外,亦可列舉:碳數1~12之直鏈狀或支鏈狀之伸烷基;或者構成上述伸烷基之1個以上-CH2 -經-O-、-S-、-NH-、胺酯基、脲基、醯胺基、可具有取代基之矽氧烷鍵、或-CO-取代之2價連結基等。

Figure 02_image004
X 1 and X 2 are divalent linking groups. As the above-mentioned divalent linking group, in addition to the linking groups represented by the following formulae (3) to (5), a linear or branched alkylene group having 1 to 12 carbon atoms may be mentioned; One or more -CH 2 - of the alkylene group is substituted by -O-, -S-, -NH-, urethane group, urea group, amide group, siloxane bond which may have a substituent, or -CO- The bivalent linking base, etc.
Figure 02_image004

作為上述通式(1)所表示之㗁

Figure 110109560-A0101-12-02
化合物,就形成表面電阻值高之黑矩陣之觀點而言,較佳為R1 及R2 為苯基且X1 為上述式(3)~(5)所示之連結基之任一者。 又,作為上述通式(2)所表示之㗁
Figure 110109560-A0101-12-02
化合物,就形成表面電阻值高之黑矩陣之觀點而言,較佳為R3 及R4 為H且X2 為亞甲基二氧基,或者R3 及R4 為來自腰果殼液(CNSL)之可具有不飽和鍵之烷基且X2 為伸乙基。As represented by the general formula (1) above
Figure 110109560-A0101-12-02
In the compound, from the viewpoint of forming a black matrix having a high surface resistance value, it is preferable that R 1 and R 2 are phenyl groups, and X 1 is any one of the linking groups represented by the above formulae (3) to (5). In addition, as the expression represented by the above general formula (2)
Figure 110109560-A0101-12-02
Compounds, from the viewpoint of forming a black matrix with a high surface resistance value, preferably R 3 and R 4 are H and X 2 are methylene dioxy, or R 3 and R 4 are derived from cashew nut shell liquid (CNSL ) may have an alkyl group with an unsaturated bond and X 2 is an ethylidene group.

作為獲得上述㗁

Figure 110109560-A0101-12-02
化合物之方法,可使用公知之方法,例如可使用日本特開2000-178332號公報、日本特開2003-344996號公報等中記載之方法。as obtained above 㗁
Figure 110109560-A0101-12-02
As the method of the compound, a known method can be used, for example, the method described in JP 2000-178332 A, JP 2003-344996 A, and the like can be used.

作為上述㗁

Figure 110109560-A0101-12-02
化合物之含量,就較佳地形成即使進行高溫且長時間之後烘烤,表面電阻值亦不會降低之黑矩陣之觀點而言,以相對於本發明之黑矩陣用顏料分散組成物之全部固形物成分之質量百分率表示,較佳為下限為0.1質量%,更佳為下限為0.5質量%,再更佳為下限為1質量%,尤佳為下限為3質量%,最佳為下限為5質量%。 又,作為上述㗁
Figure 110109560-A0101-12-02
化合物之含量,就確保黑矩陣內之源自顏料濃度之光學濃度的觀點而言,以相對於本發明之黑矩陣用顏料分散組成物之全部固形物成分之質量百分率表示,較佳為上限為30質量%,更佳為上限為25質量%,再更佳為上限為20質量%,尤佳為上限為15質量%。as the above
Figure 110109560-A0101-12-02
The content of the compound is relative to the total solid content of the pigment dispersion composition for black matrix of the present invention, from the viewpoint of preferably forming a black matrix whose surface resistance value does not decrease even after baking at a high temperature and for a long time. Indicated by the mass percentage of the material components, preferably the lower limit is 0.1 mass %, more preferably the lower limit is 0.5 mass %, still more preferably the lower limit is 1 mass %, particularly preferably the lower limit is 3 mass %, and the best lower limit is 5 mass % quality%. Also, as the above
Figure 110109560-A0101-12-02
The content of the compound, from the viewpoint of securing the optical density derived from the pigment concentration in the black matrix, is expressed as a mass percentage relative to the total solid content of the pigment dispersion composition for a black matrix of the present invention, and the upper limit is preferably 30 mass %, more preferably the upper limit is 25 mass %, still more preferably the upper limit is 20 mass %, and particularly preferably the upper limit is 15 mass %.

(有機溶劑) 本發明之黑矩陣用顏料分散組成物含有有機溶劑。 作為上述有機溶劑,可較佳地使用以往一直於液晶黑矩陣光阻之領域中使用之有機溶劑。(Organic solvents) The pigment dispersion composition for black matrices of the present invention contains an organic solvent. As the above-mentioned organic solvent, the organic solvent conventionally used in the field of liquid crystal black matrix photoresist can be preferably used.

作為上述有機溶劑,具體而言,為於常壓(1.013×102 kPa)之沸點為100~250℃之酯系有機溶劑、醚系有機溶劑、醚酯系有機溶劑、酮系有機溶劑、芳香族烴系有機溶劑、含氮系有機溶劑等。 若含有大量上述沸點超過250℃之有機溶劑,則存在如下情況:於對塗佈由本發明之黑矩陣用顏料分散組成物得到之黑矩陣用光阻組成物所形成之塗膜進行預烤(pre-bake)時,有機溶劑未充分蒸發而殘留於乾燥塗膜內,從而乾燥塗膜之耐熱性降低。 又,若含有大量上述沸點未達100℃之有機溶劑,則存在難以無不均而均勻地塗佈,從而無法獲得表面平滑性優異之塗膜之情況。Examples of the organic solvent, specifically, having a boiling point in a normal pressure (1.013 × 10 2 kPa) of the ester 100 ~ 250 ℃ of an organic solvent, an ether-based organic solvents, ether ester organic solvents, ketone organic solvents, aromatic Hydrocarbon-based organic solvents, nitrogen-containing organic solvents, etc. If a large amount of the above-mentioned organic solvent with a boiling point exceeding 250°C is contained, there is a case in which the coating film formed by coating the photoresist composition for black matrix obtained from the pigment dispersion composition for black matrix of the present invention is subjected to pre-baking (pre-baking). -bake), the organic solvent is not sufficiently evaporated and remains in the dry coating film, thereby reducing the heat resistance of the dry coating film. Moreover, when a large amount of the organic solvent whose boiling point is less than 100 degreeC is contained, it becomes difficult to apply|coat uniformly without unevenness, and the coating film excellent in surface smoothness may not be obtained.

作為上述有機溶劑,具體而言,可例示:乙二醇單甲醚、乙二醇單乙醚、乙二醇單異丙醚、乙二醇單丁醚、二乙二醇單甲醚、二乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單丁醚、二乙二醇二乙醚、二乙二醇二甲醚、二乙二醇甲基乙基醚等醚系有機溶劑;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、乙二醇單丁醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等醚酯系有機溶劑;甲基異丁基酮、環己酮、2-庚酮、δ-丁內酯等酮系有機溶劑;2-羥基丙酸甲酯、2-羥基丙酸乙酯、2-羥基-2-甲基丙酸乙酯、丙酸3-甲基-3-甲氧基丁酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、甲酸正戊酯等酯系有機溶劑;甲醇、乙醇、異丙醇、丁醇等醇系溶劑;N-甲基吡咯啶酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等含氮系有機溶劑等。該等可單獨使用或將2種以上加以混合而使用。Specific examples of the organic solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, and diethyl ether. Ethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, diethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether and other ether-based organic solvents; Glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate and other ether ester organic solvents; Ketone-based organic solvents such as isobutyl ketone, cyclohexanone, 2-heptanone, δ-butyrolactone; methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, 2-hydroxy-2-methyl Ethyl propionate, 3-methyl-3-methoxybutyl propionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, Ester-based organic solvents such as ethyl 3-ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, n-amyl formate, etc.; alcohol-based solvents such as methanol, ethanol, isopropanol, butanol; N-methyl alcohol Nitrogen-containing organic solvents such as pyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, etc. These can be used individually or in mixture of 2 or more types.

上述有機溶劑中,就溶解性、分散性、塗佈性等方面而言,較佳為二乙二醇二甲醚、二乙二醇甲基乙基醚、乙二醇單甲醚乙酸酯、丙二醇單甲醚、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、環己酮、2-庚酮、2-羥基丙酸乙酯、丙酸3-甲基-3-甲氧基丁酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、甲酸正戊酯等,更佳為丙二醇單甲醚、丙二醇單甲醚乙酸酯。Among the above-mentioned organic solvents, in terms of solubility, dispersibility, coatability, etc., diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, and ethylene glycol monomethyl ether acetate are preferred , propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, 2-heptanone, ethyl 2-hydroxypropionate, 3-methyl-3-methoxy propionate Butyl ester, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, n-amyl formate, etc., more preferably propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate.

(顏料分散助劑) 本發明之黑矩陣用顏料分散組成物較佳含有顏料分散助劑。 上述顏料分散助劑於上述黑色著色劑之微粒子化或分散之步驟中,由於基本骨架部分和顏料表面吸附,酸基提高與有機溶劑或顏料分散劑之親和力,因此具有提高上述黑色著色劑之分散時之微細化或分散後之經時分散穩定性等之效果。又,上述黑色著色劑分散助劑本身在有機溶劑中溶解或以微粒子之形式成為分散狀態者,由於可在上述黑色著色劑之表面的更廣範圍進行吸附,因此更合適。(Pigment Dispersing Auxiliary) The pigment dispersion composition for a black matrix of the present invention preferably contains a pigment dispersion auxiliary. In the step of micronizing or dispersing the above-mentioned black colorant, the acid group increases the affinity with the organic solvent or the pigment dispersant due to the adsorption of the basic skeleton part and the surface of the pigment, so it can improve the dispersion of the above-mentioned black colorant. Effects such as miniaturization over time or dispersion stability over time after dispersion. In addition, the above-mentioned black colorant dispersing aid itself is dissolved in an organic solvent or in a dispersed state in the form of fine particles, since it can be adsorbed in a wider range on the surface of the above-mentioned black colorant, so it is more suitable.

作為上述顏料分散助劑,可例示具有酸基之酞青系化合物、具有酸基之蒽醌系化合物、具有酸基之萘系化合物等。 當中,從上述黑色著色劑之分散性之觀點而言,較佳為具有酸基之酞青系化合物。As said pigment dispersing aid, the phthalocyanine type compound which has an acid group, the anthraquinone type compound which has an acid group, the naphthalene type compound which has an acid group, etc. are illustrated. Among them, a phthalocyanine-based compound having an acid group is preferred from the viewpoint of the dispersibility of the black colorant.

作為上述酸基,可列舉磺酸基、羧基、磷酸基等。 當中,從上述黑色著色劑之分散性之觀點、及合適地賦予黑矩陣表面電阻値之觀點而言,較佳為磺酸基。As said acid group, a sulfonic acid group, a carboxyl group, a phosphoric acid group, etc. are mentioned. Among them, a sulfonic acid group is preferable from the viewpoint of the dispersibility of the black colorant and the viewpoint of appropriately imparting a surface resistance value to the black matrix.

作為上述具有酸基之酞青系化合物之市售品,可列舉BYK-2100(BYK-Chemie公司製造)、Solsperse 5000(Lubrizol公司製造)等。As a commercial item of the phthalocyanine type compound which has the said acid group, BYK-2100 (made by BYK-Chemie company), Solsperse 5000 (made by Lubrizol company), etc. are mentioned.

關於上述顏料衍生物之含量,相對於上述黑色著色劑100質量份,較佳為0.1~20質量份,更佳為0.5~10質量份。About content of the said pigment derivative, 0.1-20 mass parts is preferable with respect to 100 mass parts of said black colorants, More preferably, it is 0.5-10 mass parts.

(黑矩陣用顏料分散組成物) 本發明之黑矩陣用顏料分散組成物之黏度較佳為10mPa・s以下,更佳為8mPa・s以下,再更佳為6mPa・s以下。 再者,上述黏度意指使用E型黏度計(東機產業公司製造,R100型黏度計 型式RE100L)在25℃測得之黏度。(Pigment dispersion composition for black matrix) The viscosity of the pigment dispersion composition for a black matrix of the present invention is preferably 10 mPa・s or less, more preferably 8 mPa・s or less, and still more preferably 6 mPa・s or less. In addition, the above viscosity means the viscosity measured at 25°C using an E-type viscometer (manufactured by Toki Sangyo Co., Ltd., R100 type viscometer type RE100L).

本發明之黑矩陣用顏料分散組成物在40℃保存1個月其前後之黏度變化率[(保存後之黏度-保存前之黏度)/(保存前之黏度)]較佳為10%以下,更佳為8%以下,再更佳為6%以下。The viscosity change rate before and after the pigment dispersion composition for black matrix of the present invention is stored at 40°C for 1 month [(viscosity after storage - viscosity before storage)/(viscosity before storage)] is preferably 10% or less, More preferably, it is 8% or less, and still more preferably, it is 6% or less.

(黑矩陣用顏料分散組成物之製造方法) 作為本發明之黑矩陣用顏料分散組成物之製造方法,可藉由添加上述各種成分,進行混合及混煉而得到。 作為進行上述混煉之方法,並無特別限定,可以使用例如珠磨機、預磨機(ready mill)、超音波均質機、高壓均質機、塗料攪拌器(paint shaker)、球磨機、輥磨機、砂磨機、磨砂機、動力磨機(dyno-mill)、分散器(dispermat)、SC磨機、奈米化機(nanomizer)等,藉由公知方法進行混煉。(Manufacturing method of pigment dispersion composition for black matrix) As a method for producing the pigment dispersion composition for black matrix of the present invention, it can be obtained by adding the above-mentioned various components, mixing and kneading. The method for performing the above-mentioned kneading is not particularly limited, and for example, a bead mill, a ready mill, an ultrasonic homogenizer, a high pressure homogenizer, a paint shaker, a ball mill, and a roll mill can be used. , sand mill, sand mill, dyno-mill, dispermat, SC mill, nanomizer, etc., are kneaded by known methods.

<黑矩陣用光阻組成物> 本發明亦為由本發明之黑矩陣用顏料分散組成物得到之黑矩陣用光阻組成物。<Photoresist composition for black matrix> The present invention is also a photoresist composition for a black matrix obtained from the pigment dispersion composition for a black matrix of the present invention.

(黑矩陣用顏料分散組成物) 本發明之黑矩陣用光阻組成物含有上述本發明之黑矩陣用顏料分散組成物。 作為上述黑矩陣用顏料分散組成物之含量,以本發明之黑矩陣用光阻組成物之總質量為基準,較佳為30~80質量%,更佳為40~75質量%。(Pigment dispersion composition for black matrix) The photoresist composition for black matrices of the present invention contains the above-described pigment dispersion composition for black matrices of the present invention. As content of the said pigment dispersion composition for black matrices, based on the total mass of the photoresist composition for black matrices of this invention, it is preferable that it is 30-80 mass %, and it is more preferable that it is 40-75 mass %.

(光聚合起始劑) 本發明之黑矩陣用光阻組成物含有光聚合起始劑。 作為上述光聚合起始劑,只要為藉由照射紫外線或電子束等活性能量線,可產生自由基或陽離子者即可,並無特別限制,例如可列舉:1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)乙酮、二苯甲酮、N,N'-四乙基-4,4'-二胺基二苯甲酮、4-甲氧基-4'-二甲胺基二苯甲酮、2,2-二乙氧基苯乙酮、安息香、安息香甲醚、安息香異丁醚、二苯乙二酮二甲基縮酮(benzil dimethyl ketal)、α-羥基異丁基苯酮、9-氧硫

Figure 110109560-A0101-12-03
Figure 110109560-A0101-12-04
、2-氯9-氧硫
Figure 110109560-A0101-12-03
Figure 110109560-A0101-12-04
、1-羥基環己基苯基酮、第三丁基蒽醌、1-氯蒽醌、2,3-二氯蒽醌、3-氯-2-甲基蒽醌、2-乙基蒽醌、1,4-萘醌、1,2-苯并蒽醌、1,4-二甲基蒽醌、2-苯基蒽醌、2-甲基-1[4-(甲硫基)苯基]-2-
Figure 110109560-A0101-12-05
啉基丙烷-1-酮等二苯甲酮系、9-氧硫
Figure 110109560-A0101-12-03
Figure 110109560-A0101-12-04
系、蒽醌系、三
Figure 110109560-A0101-12-02
系等光聚合起始劑等。 上述光聚合起始劑可單獨使用或將2種以上加以組合而使用。(Photopolymerization Initiator) The photoresist composition for a black matrix of the present invention contains a photopolymerization initiator. The photopolymerization initiator is not particularly limited as long as it can generate radicals or cations by irradiation with active energy rays such as ultraviolet rays or electron beams. For example, 1-[9-ethyl-6 -(2-Methylbenzyl)-9H-carbazol-3-yl]-1-(O-acetyloxime)ethanone, benzophenone, N,N'-tetraethyl-4 ,4'-Diaminobenzophenone, 4-methoxy-4'-dimethylaminobenzophenone, 2,2-diethoxyacetophenone, benzoin, benzoin methyl ether, benzoin isoform Butyl ether, benzil dimethyl ketal, α-hydroxyisobutylphenone, 9-oxysulfur
Figure 110109560-A0101-12-03
Figure 110109560-A0101-12-04
, 2-chloro-9-oxosulfur
Figure 110109560-A0101-12-03
Figure 110109560-A0101-12-04
, 1-hydroxycyclohexyl phenyl ketone, tert-butyl anthraquinone, 1-chloroanthraquinone, 2,3-dichloroanthraquinone, 3-chloro-2-methylanthraquinone, 2-ethylanthraquinone, 1,4-Naphthoquinone, 1,2-Benzanthraquinone, 1,4-Dimethylanthraquinone, 2-phenylanthraquinone, 2-methyl-1[4-(methylthio)phenyl] -2-
Figure 110109560-A0101-12-05
Benzophenones such as linopropane-1-one, 9-oxosulfur
Figure 110109560-A0101-12-03
Figure 110109560-A0101-12-04
series, anthraquinone series, three
Figure 110109560-A0101-12-02
such as photopolymerization initiators, etc. The above-mentioned photopolymerization initiators may be used alone or in combination of two or more.

上述光聚合起始劑之含量以相對於本發明之黑矩陣用光阻組成物之全部固形物成分之質量百分率表示,較佳為1~20質量%。The content of the above-mentioned photopolymerization initiator is represented by a mass percentage relative to the total solid content of the photoresist composition for a black matrix of the present invention, and is preferably 1 to 20 mass %.

(光聚合性化合物) 本發明之黑矩陣用光阻組成物較佳含有光聚合性化合物。 作為上述光聚合性化合物,可列舉:分子內具有1個或2個以上光聚合性不飽和鍵之單體、具有光聚合性不飽和鍵之低聚物等。(Photopolymerizable compound) The photoresist composition for a black matrix of the present invention preferably contains a photopolymerizable compound. As said photopolymerizable compound, the monomer which has 1 or 2 or more of photopolymerizable unsaturated bonds in a molecule|numerator, the oligomer which has a photopolymerizable unsaturated bond, etc. are mentioned.

作為上述分子內具有1個光聚合性不飽和鍵之單體,例如可使用:甲基丙烯酸甲酯、甲基丙烯酸丁酯、甲基丙烯酸2-乙基己酯、丙烯酸甲酯、丙烯酸丁酯、丙烯酸2-乙基己酯等甲基丙烯酸烷基酯或丙烯酸烷基酯;甲基丙烯酸苄酯、丙烯酸苄酯等甲基丙烯酸芳烷基酯或丙烯酸芳烷基酯;甲基丙烯酸丁氧基乙酯、丙烯酸丁氧基乙酯等甲基丙烯酸烷氧基烷基酯或丙烯酸烷氧基烷基酯;甲基丙烯酸N,N-二甲胺基乙酯、丙烯酸N,N-二甲胺基乙酯等甲基丙烯酸胺基烷基酯或丙烯酸胺基烷基酯;二乙二醇單乙醚、三乙二醇單丁醚、二丙二醇單甲醚等聚伸烷基二醇單烷基醚之甲基丙烯酸酯或丙烯酸酯;六乙二醇單苯醚等聚伸烷基二醇單芳醚之甲基丙烯酸酯或丙烯酸酯;甲基丙烯酸異莰基酯或丙烯酸異莰基酯;甲基丙烯酸甘油酯或丙烯酸甘油酯;甲基丙烯酸2-羥基乙酯或丙烯酸2-羥基乙酯等。As the monomer having one photopolymerizable unsaturated bond in the molecule, for example, methyl methacrylate, butyl methacrylate, 2-ethylhexyl methacrylate, methyl acrylate, and butyl acrylate can be used. , 2-ethylhexyl acrylate and other alkyl methacrylates or alkyl acrylates; benzyl methacrylate, benzyl acrylate and other aralkyl methacrylates or aralkyl acrylates; butoxy methacrylate Ethyl methacrylate, butoxyethyl acrylate and other alkoxyalkyl methacrylate or alkoxyalkyl acrylate; N,N-dimethylaminoethyl methacrylate, N,N-dimethylacrylate Amino ethyl ester and other amino alkyl methacrylates or acrylic acid amino alkyl esters; polyalkylene glycol monoalkanes such as diethylene glycol monoethyl ether, triethylene glycol monobutyl ether, dipropylene glycol monomethyl ether, etc. methacrylates or acrylates of base ethers; methacrylates or acrylates of polyalkylene glycol monoaryl ethers such as hexaethylene glycol monophenyl ether; isocamphenyl methacrylate or isocamphenyl acrylate ; Glyceryl methacrylate or glycerol acrylate; 2-hydroxyethyl methacrylate or 2-hydroxyethyl acrylate, etc.

作為上述分子內具有2個以上光聚合性不飽和鍵之單體,例如可使用:雙酚A二甲基丙烯酸酯、1,4-丁二醇二甲基丙烯酸酯、1,3-丁二醇二甲基丙烯酸酯、二乙二醇二甲基丙烯酸酯、甘油二甲基丙烯酸酯、新戊二醇二甲基丙烯酸酯、聚乙二醇二甲基丙烯酸酯、聚丙二醇二甲基丙烯酸酯、四乙二醇二甲基丙烯酸酯、三羥甲基丙烷三甲基丙烯酸酯、新戊四醇三甲基丙烯酸酯、新戊四醇四甲基丙烯酸酯、二新戊四醇四甲基丙烯酸酯、二新戊四醇六甲基丙烯酸酯、二新戊四醇五甲基丙烯酸酯、雙酚A二丙烯酸酯、1,4-丁二醇二丙烯酸酯、1,3-丁二醇二丙烯酸酯、二乙二醇二丙烯酸酯、甘油二丙烯酸酯、新戊二醇二丙烯酸酯、聚乙二醇二丙烯酸酯、聚丙二醇二丙烯酸酯、四乙二醇二丙烯酸酯、三羥甲基丙烷三丙烯酸酯、新戊四醇三丙烯酸酯、新戊四醇四丙烯酸酯、二新戊四醇四丙烯酸酯、二新戊四醇六丙烯酸酯、二新戊四醇五丙烯酸酯等。As the monomer having two or more photopolymerizable unsaturated bonds in the molecule, for example, bisphenol A dimethacrylate, 1,4-butanediol dimethacrylate, 1,3-butanediol can be used. Alcohol Dimethacrylate, Diethylene Glycol Dimethacrylate, Glycerin Dimethacrylate, Neopentyl Glycol Dimethacrylate, Polyethylene Glycol Dimethacrylate, Polypropylene Glycol Dimethacrylate Esters, Tetraethylene Glycol Dimethacrylate, Trimethylolpropane Trimethacrylate, Neotaerythritol Trimethacrylate, Neotaerythritol Tetramethacrylate, Dipionaerythritol Tetramethyl Alkyl acrylate, Dipivalerythritol Hexamethacrylate, Dipivalerythritol Pentamethacrylate, Bisphenol A Diacrylate, 1,4-Butanediol Diacrylate, 1,3-Butanediol Alcohol Diacrylate, Diethylene Glycol Diacrylate, Glycerin Diacrylate, Neopentyl Glycol Diacrylate, Polyethylene Glycol Diacrylate, Polypropylene Glycol Diacrylate, Tetraethylene Glycol Diacrylate, Trihydroxy Methylpropane triacrylate, neopentaerythritol triacrylate, neopentaerythritol tetraacrylate, dipivalerythritol tetraacrylate, dipivalerythritol hexaacrylate, dipivalerythritol pentaacrylate, etc. .

作為上述具有光聚合性不飽和鍵之低聚物,可使用使上述單體適當聚合而獲得者。 上述光聚合性化合物可單獨使用或將2種以上加以組合而使用。As the oligomer having the above-mentioned photopolymerizable unsaturated bond, one obtained by appropriately polymerizing the above-mentioned monomer can be used. The said photopolymerizable compound can be used individually or in combination of 2 or more types.

上述光聚合性化合物之含量以相對於本發明之黑矩陣用光阻組成物之全部固形物成分之質量百分率表示,較佳為3~50質量%。Content of the said photopolymerizable compound is represented by the mass percentage with respect to the total solid content of the photoresist composition for black matrices of this invention, Preferably it is 3-50 mass %.

(鹼可溶性樹脂) 本發明之黑矩陣用光阻組成物,較佳含有鹼可溶性樹脂。 作為上述鹼可溶性樹脂,較佳為如下者:作為黏合劑對上述黑色著色劑發揮作用,且於製造黑矩陣時,對於其顯影處理步驟中使用之顯影液、尤其是鹼性顯影液具有可溶性。(alkali-soluble resin) The photoresist composition for a black matrix of the present invention preferably contains an alkali-soluble resin. The alkali-soluble resin is preferably one that acts as a binder for the black colorant and is soluble in a developing solution, especially an alkaline developing solution, used in the development process when a black matrix is produced.

作為上述鹼可溶性樹脂,可設為嵌段共聚物。藉由採用嵌段共聚物,與其他共聚物相比,顏料分散能力提昇,可賦予對PGMEA或鹼性顯影液之溶解性。 該嵌段共聚物中,較佳為具有「由具有1個以上羧基之乙烯性不飽和單體構成之嵌段」、及「由其他可共聚合之乙烯性不飽和單體構成之嵌段」的嵌段共聚物。As said alkali-soluble resin, a block copolymer can be used. By using the block copolymer, the dispersibility of the pigment is improved compared with other copolymers, and the solubility to PGMEA or alkaline developer can be imparted. Among the block copolymers, it is preferable to have "a block composed of an ethylenically unsaturated monomer having one or more carboxyl groups" and "a block composed of other copolymerizable ethylenically unsaturated monomers" of block copolymers.

作為上述嵌段共聚物,並無特別限制,可使用以往一直使用者。其中,具體而言,可列舉:丙烯酸、甲基丙烯酸等具有羧基之乙烯性不飽和單體與選自可與具有羧基之乙烯性不飽和單體共聚合之苯乙烯、丙烯酸2-羥基乙酯、甲基丙烯酸2-羥基乙酯、丙烯酸烯丙酯、甲基丙烯酸烯丙酯、丙烯酸苄酯、甲基丙烯酸苄酯、丙烯酸環己酯、甲基丙烯酸環己酯、單丙烯酸甘油酯、甲基丙烯酸甘油酯、N-苯基順丁烯二醯亞胺、聚苯乙烯巨單體、聚甲基丙烯酸甲酯巨單體、碳環氧基二丙烯酸酯等單體、低聚物類之群中之至少1種乙烯性不飽和單體的共聚物。 其中,較理想為不使用N-乙烯基吡咯啶酮、含硫元素之單體。 作為上述嵌段共聚物,可採用利用活性自由基聚合、陰離子聚合所合成之嵌段樹脂。 上述嵌段共聚物之一部分嵌段部分可由無規共聚物構成。There is no restriction|limiting in particular as said block copolymer, The conventional user can be used. Among them, specifically, ethylenically unsaturated monomers having a carboxyl group such as acrylic acid and methacrylic acid, and styrene and 2-hydroxyethyl acrylate that can be copolymerized with an ethylenically unsaturated monomer having a carboxyl group can be mentioned. , 2-hydroxyethyl methacrylate, allyl acrylate, allyl methacrylate, benzyl acrylate, benzyl methacrylate, cyclohexyl acrylate, cyclohexyl methacrylate, glycerol monoacrylate, methyl methacrylate Monomers and oligomers such as glyceryl methacrylate, N-phenylmaleimide, polystyrene macromonomer, polymethyl methacrylate macromonomer, carbon epoxy diacrylate, etc. A copolymer of at least one ethylenically unsaturated monomer in the group. Among them, it is preferable not to use N-vinylpyrrolidone and a monomer containing a sulfur element. As the above-mentioned block copolymer, a block resin synthesized by living radical polymerization or anionic polymerization can be used. A part of the block portion of the above-mentioned block copolymer may be constituted by a random copolymer.

作為上述鹼可溶性樹脂,亦可採用鹼可溶性Cardo樹脂。 作為上述鹼可溶性Cardo樹脂,可列舉:作為茀環氧(甲基)丙烯酸衍生物與二羧酸酐及/或四羧酸二酐之加成產物之具有茀骨架之環氧(甲基)丙烯酸酯酸加成物等。 又,本鹼可溶性樹脂可具有光聚合性之官能基。As the above-mentioned alkali-soluble resin, an alkali-soluble Cardo resin can also be used. As said alkali-soluble Cardo resin, the epoxy (meth)acrylate which has a perylene skeleton which is an addition product of a perylene epoxy (meth)acrylic acid derivative and a dicarboxylic anhydride and/or a tetracarboxylic dianhydride can be mentioned. Acid adducts, etc. Moreover, this alkali-soluble resin may have a photopolymerizable functional group.

作為上述鹼可溶性樹脂之酸值,就顯影特性之觀點而言,較佳為5~300 mgKOH/g,更佳為5~250 mgKOH/g,再更佳為10~200 mgKOH/g,尤佳為60~150 mgKOH/g。 再者,於本說明書中,上述酸值係理論酸值,為基於具有羧基之乙烯性不飽和單體及其含量進行計算而求出之值。The acid value of the above-mentioned alkali-soluble resin is preferably 5 to 300 mgKOH/g, more preferably 5 to 250 mgKOH/g, still more preferably 10 to 200 mgKOH/g, still more preferably 10 to 200 mgKOH/g, from the viewpoint of developing characteristics. It is 60~150 mgKOH/g. In addition, in this specification, the said acid value is a theoretical acid value, and is a value calculated|required based on the ethylenically unsaturated monomer which has a carboxyl group, and its content.

就顯影特性或對有機溶劑之溶解性之觀點而言,上述鹼可溶性樹脂之重量平均分子量較佳為1,000~100,000,更佳為3,000~50,000,再更佳為5,000~30,000。 再者,於本發明中,上述重量平均分子量為基於GPC所獲得之聚苯乙烯換算之重量平均分子量。 於本說明書中,作為測定上述重量平均分子量之裝置,使用Water2690(沃特斯公司製造),作為管柱,使用PLgel 5 μm MIXED-D(Agilent Technologies公司製造)。The weight-average molecular weight of the alkali-soluble resin is preferably 1,000 to 100,000, more preferably 3,000 to 50,000, and even more preferably 5,000 to 30,000, from the viewpoint of developing characteristics or solubility in organic solvents. In addition, in this invention, the said weight average molecular weight is the weight average molecular weight based on the polystyrene conversion obtained by GPC. In this specification, Water2690 (manufactured by Waters Corporation) was used as an apparatus for measuring the above-mentioned weight average molecular weight, and PLgel 5 μm MIXED-D (manufactured by Agilent Technologies) was used as a column.

關於上述鹼可溶性樹脂之含量,相對於上述黑色著色劑100質量份,較佳為1~200質量份,再更佳為10~150質量份。 於該情形時,若上述鹼可溶性樹脂之含量未達1質量份,則存在顯影特性降低之情況,若上述鹼可溶性樹脂之含量超過200質量份,則上述黑色著色劑之濃度相對降低,故存在難以達成作為薄膜之目標色濃度之情況。About content of the said alkali-soluble resin, 1-200 mass parts is preferable with respect to 100 mass parts of said black colorants, and 10-150 mass parts is still more preferable. In this case, if the content of the above-mentioned alkali-soluble resin is less than 1 part by mass, the developing characteristics may decrease, and if the content of the above-mentioned alkali-soluble resin exceeds 200 parts by mass, the concentration of the above-mentioned black colorant is relatively reduced, so there is a It is difficult to achieve the target color density as a thin film.

作為上述鹼可溶性樹脂,較佳為不含有一級、二級、及三級之任一胺基,進而亦不含有四級銨基。更佳為進而亦不具有鹼性基。 再者,可於不損害本發明之效果之範圍內摻合具有除嵌段共聚物以外之結構之鹼可溶性樹脂。It is preferable that the said alkali-soluble resin does not contain any one of primary, secondary, and tertiary amine groups, and further does not contain quaternary ammonium groups. More preferably, it also does not have a basic group. Furthermore, an alkali-soluble resin having a structure other than the block copolymer can be blended within a range that does not impair the effects of the present invention.

(有機溶劑) 作為上述有機溶劑,可適當選擇上述本發明之黑矩陣用顏料分散組成物中所記載之有機溶劑來使用。(Organic solvents) As said organic solvent, the organic solvent described in the said pigment dispersion composition for black matrices of this invention can be suitably selected and used.

作為上述有機溶劑之含量,以本發明之黑矩陣用光阻組成物之總質量為基準,較佳為1~40質量%,更佳為5~35質量%。As content of the said organic solvent, based on the total mass of the photoresist composition for black matrices of this invention, it is preferable that it is 1-40 mass %, and it is more preferable that it is 5-35 mass %.

(其他添加劑) 本發明之黑矩陣用光阻組成物可視需要適當使用熱聚合抑制劑、紫外線吸收劑、抗氧化劑等各種添加劑。(other additives) The photoresist composition for black matrices of the present invention may appropriately use various additives such as thermal polymerization inhibitors, ultraviolet absorbers, and antioxidants as necessary.

(黑矩陣用光阻組成物) 本發明之黑矩陣用光阻組成物對顯影液之溶解性優異。 以厚度成為1 μm之方式利用旋轉塗佈機將本發明之黑矩陣用光阻組成物塗佈於玻璃基板(Corning 1737)上,並於100℃進行3分鐘預烤之後,使其浸漬於23℃之顯影液(氫氧化鉀之0.05質量%水溶液),此時,輕易地溶解為較佳。(Photoresist composition for black matrix) The photoresist composition for a black matrix of the present invention is excellent in solubility to a developer. The photoresist composition for black matrix of the present invention was coated on a glass substrate (Corning 1737) with a thickness of 1 μm using a spin coater, and after pre-baking at 100° C. for 3 minutes, it was immersed in 23 The developing solution (0.05 mass % aqueous solution of potassium hydroxide) of ℃, in this case, it is preferable that it dissolves easily.

本發明之黑矩陣用光阻組成物其顯影性優異。 上述顯影性可利用以下方法來進行試驗。 以膜厚成為1 μm之方式利用旋轉塗佈機將黑矩陣用顏料分散光阻組成物塗佈於玻璃基板(Corning 1737)上,並於100℃進行3分鐘預烤。 接著,使用具有5μm、8μm、10μm、15μm、20μm、30μm之線條圖案之光罩,利用高壓水銀燈以UV累計光量400 mJ/cm2 進行曝光。 然後,使其浸漬於23℃之顯影液(氫氧化鉀之0.05質量%水溶液)中,測定在0.5kgf/cm2 之噴淋顯影壓力下顯影圖案開始出現之時間(斷點(break point))。 此時,上述光罩部分之黑矩陣用光阻組成物在60秒以内完全去除為較佳,在45秒以内完全去除為更佳,在30秒以内完全去除為再更佳。The photoresist composition for a black matrix of the present invention is excellent in developability. The above-mentioned developability can be tested by the following method. The pigment dispersion photoresist composition for black matrix was apply|coated on the glass substrate (Corning 1737) by the spin coater so that a film thickness might become 1 micrometer, and prebaked at 100 degreeC for 3 minutes. Next, using a mask having line patterns of 5 μm, 8 μm, 10 μm, 15 μm, 20 μm, and 30 μm, exposure was performed with a high-pressure mercury lamp with a cumulative UV light amount of 400 mJ/cm 2 . Then, it was immersed in a developing solution (a 0.05 mass % aqueous solution of potassium hydroxide) at 23° C., and the time (break point) at which a developed pattern started to appear under a spray developing pressure of 0.5 kgf/cm 2 was measured. . At this time, the photoresist composition for the black matrix of the above-mentioned mask portion is preferably completely removed within 60 seconds, more preferably within 45 seconds, and even more preferably within 30 seconds.

(黑矩陣用光阻組成物之製造方法) 作為本發明之黑矩陣用光阻組成物之製造方法,例如可藉由以下方式製作:製作本發明之黑矩陣用顏料分散組成物,其後,添加剩餘之材料,使用攪拌裝置等進行攪拌混合。 作為上述攪拌、混合之方法,並無特別限制,可使用超音波分散機、高壓乳化機、珠磨機、三輥研磨機、砂磨機、捏合機等公知方法。 再者,於製作本發明之黑矩陣用光阻組成物時,視需要,亦可添加本發明之黑矩陣用顏料分散組成物中所記載之上述黑色著色劑、上述顏料分散劑、上述

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物、上述顏料分散助劑等。(Manufacturing method of photoresist composition for black matrix) As a manufacturing method of the photoresist composition for black matrix of the present invention, for example, it can be produced by the following method: producing the pigment dispersion composition for black matrix of the present invention, and then, Add the remaining materials, and use a stirring device or the like to stir and mix. The method of stirring and mixing is not particularly limited, and known methods such as an ultrasonic disperser, a high-pressure emulsifier, a bead mill, a three-roll mill, a sand mill, and a kneader can be used. Furthermore, when producing the photoresist composition for black matrices of the present invention, the above-mentioned black colorant, the above-mentioned pigment dispersant, the above-mentioned pigment dispersion agent described in the pigment-dispersed composition for black matrices of the present invention may also be added as necessary.
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
Compounds, the above-mentioned pigment dispersing aids, and the like.

<黑矩陣> 本發明之黑矩陣由本發明之黑矩陣用光阻組成物形成。<Black Matrix> The black matrix of the present invention is formed from the photoresist composition for a black matrix of the present invention.

作為本發明之黑矩陣之形成方法,並無特別限制,例如,可於透明基板上塗佈本發明之黑矩陣用光阻組成物,並進行乾燥而形成塗膜之後,於上述塗膜上放置光罩,經由該光罩,藉由影像曝光、顯影、及視需要而定之光硬化等方法形成黑矩陣。The method for forming the black matrix of the present invention is not particularly limited. For example, the photoresist composition for a black matrix of the present invention can be coated on a transparent substrate, dried to form a coating film, and then placed on the coating film. A photomask, through which a black matrix is formed by image exposure, development, and photohardening as needed.

關於對本發明之黑矩陣用光阻組成物進行塗佈、乾燥、曝光及顯影之方法等,可適當選擇公知方法。 又,作為上述透明基板,可適當選擇玻璃基板、塑膠基板等公知之透明基板來使用。About the method of coating, drying, exposing and developing the photoresist composition for black matrices of this invention, a well-known method can be suitably selected. Moreover, as said transparent substrate, a well-known transparent substrate, such as a glass substrate and a plastic substrate, can be suitably selected and used.

作為上述塗膜之厚度,以乾燥後之膜厚計,較佳為0.2~10 μm,更佳為0.5~6 μm,再更佳為1~4 μm。 藉由設為上述厚度範圍,可使特定之圖案較佳地顯影,可較佳地賦予特定之光學濃度。The thickness of the coating film is preferably 0.2 to 10 μm, more preferably 0.5 to 6 μm, and even more preferably 1 to 4 μm in terms of the film thickness after drying. By setting it as the said thickness range, a specific pattern can be developed favorably, and a specific optical density can be given favorably.

關於本發明之黑矩陣,於玻璃基板(Corning 1737)上進行塗佈,並於100℃進行3分鐘預烤之後,利用高壓水銀燈進行曝光(UV累計光量400 mJ/cm2 ),進而於230℃進行3小時後烘烤,從而形成厚度1 μm之光阻圖案,此時之表面電阻值較佳為5.0×109 Ω/□以上,更佳為1.0×101 0 Ω/□以上,再更佳為1.0×101 1 Ω/□以上,尤佳為5.0×101 1 Ω/□以上,最佳為1.0×1012 Ω/□以上。 再者,上述表面電阻值可利用本體:微小電流計 R8340、選用零件(option):屏蔽箱(Shield box)R12702A(均為Advance公司製造)測得。The black matrix of the present invention was coated on a glass substrate (Corning 1737), pre-baked at 100° C. for 3 minutes, then exposed with a high-pressure mercury lamp (UV cumulative light amount of 400 mJ/cm 2 ), and further heated at 230° C. After 3 hours of post-baking, a photoresist pattern with a thickness of 1 μm is formed. At this time, the surface resistance value is preferably 5.0×10 9 Ω/□ or more, more preferably 1.0×10 1 0 Ω/□ or more, and more best of 1.0 × 10 1 1 Ω / □ or more, and particularly preferably 5.0 × 10 1 1 Ω / □ or more, most preferably 1.0 × 10 12 Ω / □ or more. Furthermore, the above-mentioned surface resistance value can be measured by using the body: micro current meter R8340, and optional parts (option): shield box (Shield box) R12702A (both are manufactured by Advance Company).

本發明之黑矩陣用顏料分散組成物、黑矩陣用光阻組成物、及黑矩陣具有上述特性,故可較佳地用作影像顯示裝置或觸控面板等之黑矩陣。 [發明之效果]The pigment dispersion composition for black matrix, the photoresist composition for black matrix, and the black matrix of the present invention have the above-mentioned characteristics, so they can be preferably used as a black matrix of an image display device or a touch panel. [Effect of invention]

根據本發明,可提供一種黑矩陣用顏料分散組成物,其能夠形成黑矩陣用光阻組成物之顯影性優異、且即使進行高溫且長時間之後烘烤,表面電阻值亦優異之黑矩陣。ADVANTAGE OF THE INVENTION According to this invention, the pigment dispersion composition for black matrices which can form the black matrix which is excellent in the developability of the photoresist composition for black matrices, and is excellent in surface resistance value even if it bakes after a high temperature and a long time can be provided.

以下使用實施例對本發明進行具體說明,但本發明只要不脫離其主旨及應用範圍,則並不限定於該等實施例。再者,只要未特別聲明,則於本實施例中,「份」及「%」分別表示「質量份」及「質量%」。The present invention will be specifically described below using examples, but the present invention is not limited to these examples unless it deviates from the gist and scope of application. In addition, unless otherwise stated, in this Example, "part" and "%" represent "mass part" and "mass %", respectively.

以下實施例、比較例中使用之各種材料如下。 <黑色著色劑> (碳黑1) 酸性碳黑、製品名「SPECIAL BLACK 250」、平均一次粒徑56 nm、pH3.0、Orion Engineered Carbons公司製造 (碳黑2) 中性碳黑、製品名「Printex35」、平均一次粒徑31nm、pH9.5、Orion Engineered Carbons公司製造 <顏料分散劑> (顏料分散劑1) 製品名「BYK-LPN21116」、由「於側鏈具有4級銨鹽基及胺基之A嵌段」及「不具有4級銨鹽基及胺基之B嵌段」構成的丙烯酸系A-B嵌段共聚物、固形物成分40%、BYK-Chemie公司製造 (顏料分散劑2) 製品名「BYK-2000」、由「於側鏈具有4級銨鹽基之A嵌段」及「不具有4級銨鹽基之B嵌段」構成的丙烯酸系A-B嵌段共聚物、固形物成分40%、BYK-Chemie公司製造 (顏料分散劑3) 向具備回流冷卻管、氮氣導入管、攪拌棒、溫度計之四口燒瓶中添加50.0份之具有異氰酸基之碳二亞胺當量316之聚碳二亞胺化合物、115.7份之分子量1000之二醇聚(己二酸3-甲基戊酯),並於約100℃保持5小時,使異氰酸基與羥基反應,繼而,添加84.6份之末端具有羧基之分子量2000之聚己內酯之開環聚合物,並於約100℃保持2小時,使碳二亞胺基與羧基反應,其後,添加375.5份之丙二醇單甲醚乙酸酯,獲得數量平均分子量約4200、碳二亞胺當量1583之顏料分散劑3之溶液(固形物成分40%)。 (顏料分散劑4) 製品名「DISPERBYK-167」、胺酯系顏料分散劑、固形物成分52%、BYK-Chemie公司製造 <顏料分散助劑> (顏料分散助劑1) 製品名「BYK-2100」、酞青系化合物之碸化物、BYK-Chemie公司製造 (顏料分散助劑2) 製品名「Solsperse 5000」、酞青系化合物之碸化物、Lubrizol公司製造 (顏料分散助劑3) 將30ml之濃硫酸加入100ml錐形瓶中,一面以磁力攪拌器攪拌,一面加入10g之C.I. Pigment Red 2,於室溫攪拌30分鐘。將50g的水與50g的冰之混合物加入1L燒杯中,將上述反應物注入此冰水中,以磁力攪拌器攪拌30分鐘。於減壓下將其過濾、水洗,使所得到之固體乾燥,獲得12g的C.I. Pigment Red 2之碸化物(顏料分散助劑3)。 <㗁

Figure 110109560-A0101-12-02
化合物> (㗁
Figure 110109560-A0101-12-02
化合物1) 上述通式(2)中,R3 及R4 為H且X2 為亞甲基二氧基所表示之㗁
Figure 110109560-A0101-12-02
化合物(商品名「JBZ-OP100N」、JFE化學公司製造) (㗁
Figure 110109560-A0101-12-02
化合物2) 藉由公知之方法(日本特開2000-178332號公報等中記載之方法)合成上述通式(1)中R1 及R2 為苯基且X1 為上述式(3)所表示之連結基之㗁
Figure 110109560-A0101-12-02
化合物。 (㗁
Figure 110109560-A0101-12-02
化合物3) 上述通式(2)中R3 及R4 為來自腰果殼液(CNSL)之可具有不飽和鍵之烷基且X2 為伸乙基所表示之㗁
Figure 110109560-A0101-12-02
化合物(商品名「CR-276」、東北化工公司製造) <有機溶劑> PM(丙二醇單甲醚) PGMEA(丙二醇單甲醚乙酸酯) <光聚合性化合物> DPHA(二新戊四醇六丙烯酸酯) <光聚合起始劑> OXE02(製品名「Irgacure OXE02」、1-[9-乙基-6-(2-甲基苄醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)乙酮、BASF公司製造) <鹼可溶性樹脂> WR-301(製品名「WR-301」、Cardo系樹脂、酸值100mgKOH/g、固形物成分45%、ADEKA公司製造)Various materials used in the following Examples and Comparative Examples are as follows. <Black colorant> (Carbon black 1) Acidic carbon black, product name "SPECIAL BLACK 250", average primary particle size 56 nm, pH 3.0, manufactured by Orion Engineered Carbons (carbon black 2) Neutral carbon black, product name "Printex35", average primary particle size 31nm, pH 9.5, manufactured by Orion Engineered Carbons <Pigment Dispersant> (Pigment Dispersant 1) Product name "BYK-LPN21116", consisting of Acrylic AB block copolymer composed of "A block of amine group" and "B block without quaternary ammonium salt group and amine group", solid content 40%, manufactured by BYK-Chemie (Pigment Dispersant 2 ) Product name "BYK-2000", acrylic AB block copolymer composed of "A block with quaternary ammonium salt group in the side chain" and "B block without quaternary ammonium salt group", solid Material composition 40%, manufactured by BYK-Chemie (Pigment Dispersant 3) 50.0 parts equivalent of carbodiimide having an isocyanato group was added to a four-necked flask equipped with a reflux cooling tube, a nitrogen gas introduction tube, a stirring bar, and a thermometer 316 polycarbodiimide compound, 115.7 parts of diol poly(3-methylamyl adipate) with molecular weight of 1000, and kept at about 100 ° C for 5 hours to make the isocyanate group react with the hydroxyl group, and then, 84.6 parts of a ring-opening polymer of polycaprolactone with a molecular weight of 2000 having a carboxyl group at the end was added, and kept at about 100° C. for 2 hours to make the carbodiimide group react with the carboxyl group, after which 375.5 parts of propylene glycol monomethyl was added ether acetate to obtain a solution (solid content 40%) of pigment dispersant 3 with a number average molecular weight of about 4200 and a carbodiimide equivalent of 1583. (Pigment dispersant 4) Product name "DISPERBYK-167", urethane-based pigment dispersant, solid content 52%, manufactured by BYK-Chemie <Pigment Dispersion Aid> (Pigment Dispersion Aid 1) Product name "BYK- 2100", a phthalocyanine compound, manufactured by BYK-Chemie (pigment dispersing aid 2), product name "Solsperse 5000", a phthalocyanine compound, manufactured by Lubrizol (pigment dispersing aid 3) 30ml The concentrated sulfuric acid was added to a 100ml conical flask, while stirring with a magnetic stirrer, 10g of CI Pigment Red 2 was added, and the mixture was stirred at room temperature for 30 minutes. A mixture of 50 g of water and 50 g of ice was added to a 1 L beaker, the above-mentioned reactants were poured into the ice water, and the mixture was stirred with a magnetic stirrer for 30 minutes. This was filtered under reduced pressure, washed with water, and the obtained solid was dried to obtain 12 g of CI Pigment Red 2 slag (pigment dispersing aid 3). <㗁
Figure 110109560-A0101-12-02
Compound > (㗁
Figure 110109560-A0101-12-02
Compound 1) In the above general formula (2), R 3 and R 4 are H and X 2 is represented by methylene dioxy
Figure 110109560-A0101-12-02
Compound (trade name "JBZ-OP100N", manufactured by JFE Chemical Co., Ltd.) (㗁
Figure 110109560-A0101-12-02
Compound 2) is synthesized by a known method (the method described in Japanese Patent Laid-Open No. 2000-178332, etc.) wherein R 1 and R 2 in the above general formula (1) are phenyl groups and X 1 is represented by the above formula (3) the link base
Figure 110109560-A0101-12-02
compound. (㗁
Figure 110109560-A0101-12-02
Compound 3) In the above general formula (2), R 3 and R 4 are alkyl groups that may have unsaturated bonds derived from cashew nut shell liquid (CNSL) and X 2 is represented by ethylidene
Figure 110109560-A0101-12-02
Compound (trade name "CR-276", manufactured by Tohoku Chemical Co., Ltd.) <Organic solvent> PM (Propylene Glycol Monomethyl Ether) PGMEA (Propylene Glycol Monomethyl Ether Acetate) Acrylate) <Photopolymerization initiator> OXE02 (product name "Irgacure OXE02", 1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl]-1 -(O-Acetyl oxime) ethyl ketone, manufactured by BASF Corporation) <Alkali-soluble resin> WR-301 (product name "WR-301", Cardo-based resin, acid value 100 mgKOH/g, solid content 45%, ADEKA company manufacturing)

<黑矩陣用顏料分散組成物之製作> 以成為表1之組成之方式將上述黑色著色劑、顏料分散劑1~4、顏料分散助劑1~3、

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物1~3及有機溶劑加以混合,利用珠磨機混練一晝夜,製成黑矩陣用顏料分散組成物。<Preparation of pigment dispersion composition for black matrix> The above-mentioned black colorant, pigment dispersing agents 1 to 4, pigment dispersing aids 1 to 3,
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
Compounds 1 to 3 and an organic solvent were mixed and kneaded with a bead mill all day and night to prepare a pigment dispersion composition for a black matrix.

<評價試驗> (黏度) 針對實施例及比較例所作製之黑矩陣用顏料分散組成物,使用E型黏度計(東機產業公司製造,R100型黏度計 型式RE100L)測定在25℃之黏度。將其結果示於表1。<Evaluation test> (viscosity) For the pigment dispersion compositions for black matrices prepared in Examples and Comparative Examples, the viscosity at 25°C was measured using an E-type viscometer (manufactured by Toki Sangyo Co., Ltd., R100-type viscometer type RE100L). The results are shown in Table 1.

(黏度變化率) 將實施例及比較例所作製之黑矩陣用顏料分散組成物於40℃保存1個月。 於上述保存之前後,使用E型黏度計(東機產業公司製造,R100型黏度計 型式RE100L)測定在25℃之黏度,求出黏度變化率[(保存後之黏度-保存前之黏度)/(保存前之黏度)],利用下述基準進行評價。將其結果示於表1。 ○:保管前後之黏度變化率在10%以下。 ×:保管前後之黏度變化率超過10%。(Rate of Viscosity Change) The pigment dispersion compositions for black matrices prepared in Examples and Comparative Examples were stored at 40° C. for one month. Before and after the above storage, use an E-type viscometer (manufactured by Toki Sangyo Co., Ltd., R100 type viscometer type RE100L) to measure the viscosity at 25°C, and obtain the viscosity change rate [(viscosity after storage - viscosity before storage) / (viscosity before storage)], and evaluated by the following criteria. The results are shown in Table 1. ○: The viscosity change rate before and after storage is 10% or less. ×: The viscosity change rate before and after storage exceeded 10%.

[表1] 黑矩陣用顏料分散組成物 實施例1 實施例2 實施例3 實施例4 實施例5 實施例6 實施例7 實施例8 比較例1 比較例2 比較例3 黑色著色劑 碳黑1 20.0 20.0 20.0 20.0 20.0 20.0 - 20.0 20.0 20.0 20.0 碳黑2 - - - - - - 20.0 - - - - 顏料分散劑 顏料分散劑1 (固形物成分40%) 5.0 - 5.0 5.0 5.0 5.0 5.0 5.0 - - 5.0 顏料分散劑2 (固形物成分40%) - 5.0 - - - - - - - - - 顏料分散劑3 (固形物成分40%) - - - - - - - - 3.8 - - 顏料分散劑4 (固形物成分52%) - - - - - - - - - 5.0 - 顏料分散助劑 顏料分散助劑1 0.6 0.6 0.6 0.6 - - 0.6 - 0.6 0.6 0.6 顏料分散助劑2 - - - - 0.6 - - - - - - 顏料分散助劑3 - - - - - 0.6 - - - - -

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物1
1.5 1.5 - - 1.5 1.5 1.5 1.5 1.5 1.5 -
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物2
- - 1.5 - - - - - - - -
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物3
- - - 1.5 - - - - - - -
有機溶劑 PM 6.0 6.0 6.0 6.0 6.0 6.0 6.0 6.0 6.0 6.0 6.0 PGMEA 66.9 66.9 66.9 66.9 66.9 66.9 66.9 67.5 68.1 66.9 68.4 合計 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 評價試驗 黏度(mPa・s) 5.1 5.3 5.0 5.0 5.0 5.0 5.5 8.0 5.0 5.7 5.0 黏度變化 × [Table 1] Pigment dispersion composition for black matrix Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 Comparative Example 1 Comparative Example 2 Comparative Example 3 black colorant Carbon Black 1 20.0 20.0 20.0 20.0 20.0 20.0 - 20.0 20.0 20.0 20.0 Carbon Black 2 - - - - - - 20.0 - - - - Pigment Dispersant Pigment dispersant 1 (40% solid content) 5.0 - 5.0 5.0 5.0 5.0 5.0 5.0 - - 5.0 Pigment dispersant 2 (40% solid content) - 5.0 - - - - - - - - - Pigment dispersant 3 (40% solid content) - - - - - - - - 3.8 - - Pigment dispersant 4 (solid content 52%) - - - - - - - - - 5.0 - Pigment Dispersing Auxiliary Pigment Dispersing Auxiliary 1 0.6 0.6 0.6 0.6 - - 0.6 - 0.6 0.6 0.6 Pigment Dispersing Auxiliary 2 - - - - 0.6 - - - - - - Pigment Dispersing Auxiliary 3 - - - - - 0.6 - - - - -
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
compound
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
Compound 1
1.5 1.5 - - 1.5 1.5 1.5 1.5 1.5 1.5 -
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
Compound 2
- - 1.5 - - - - - - - -
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
Compound 3
- - - 1.5 - - - - - - -
Organic solvents PM 6.0 6.0 6.0 6.0 6.0 6.0 6.0 6.0 6.0 6.0 6.0 PGMEA 66.9 66.9 66.9 66.9 66.9 66.9 66.9 67.5 68.1 66.9 68.4 total 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 Evaluation test Viscosity (mPa・s) 5.1 5.3 5.0 5.0 5.0 5.0 5.5 8.0 5.0 5.7 5.0 Viscosity change ×

使用高速攪拌機,以成為表2之組成之方式將上述黑矩陣用顏料分散組成物與其他材料(光聚合性化合物、鹼可溶性樹脂、光聚合起始劑及有機溶劑)均勻地混合之後,利用孔徑3 μm之過濾器進行過濾,獲得實施例及比較例之黑矩陣用光阻組成物。Using a high-speed mixer, the above-mentioned pigment dispersion composition for black matrix and other materials (photopolymerizable compound, alkali-soluble resin, photopolymerization initiator, and organic solvent) were uniformly mixed so as to have the composition shown in Table 2. Filtered with a 3 μm filter to obtain photoresist compositions for black matrices of Examples and Comparative Examples.

<評價試驗> (表面電阻值) 以膜厚成為1 μm之方式利用旋轉塗佈機將實施例及比較例之各黑矩陣用顏料分散光阻組成物塗佈於玻璃基板(Corning 1737)上,並於100℃進行3分鐘預烤之後,利用高壓水銀燈進行曝光,進而於230℃進行3小時後烘烤,製成僅於滿版(solid)部形成之黑色光阻圖案。 利用本體:微小電流計 R8340、選用零件:屏蔽箱 R12702A(均為Advance公司製造)對製作之各黑色光阻圖案之表面電阻值進行測定。將其結果示於表2。<Evaluation test> (surface resistance value) The pigment-dispersed photoresist compositions for black matrices of Examples and Comparative Examples were coated on a glass substrate (Corning 1737) with a spin coater so that the film thickness was 1 μm, and pre-baked at 100° C. for 3 minutes. After that, exposure was performed with a high-pressure mercury lamp, and post-baking was performed at 230° C. for 3 hours to form a black photoresist pattern formed only on a solid portion. Using the main body: micro current meter R8340, optional parts: shielding box R12702A (both manufactured by Advance Company), the surface resistance value of each black photoresist pattern produced was measured. The results are shown in Table 2.

(顯影液溶解性) 以膜厚成為1 μm之方式利用旋轉塗佈機將實施例及比較例之各黑矩陣用顏料分散光阻組成物塗佈於玻璃基板(Corning 1737)上,並於100℃進行3分鐘預烤之後,使其浸漬於23℃之顯影液(氫氧化鉀之0.05質量%水溶液),以目視評價溶解狀態。將其結果示於表2。(developer solubility) The pigment-dispersed photoresist compositions for black matrices of Examples and Comparative Examples were coated on a glass substrate (Corning 1737) with a spin coater so that the film thickness was 1 μm, and pre-baked at 100° C. for 3 minutes. Then, it was made to immerse in the developing solution (0.05 mass % aqueous solution of potassium hydroxide) of 23 degreeC, and the melt|dissolution state was evaluated visually. The results are shown in Table 2.

(顯影性) 以膜厚成為1 μm之方式利用旋轉塗佈機將實施例及比較例之各黑矩陣用顏料分散光阻組成物塗佈於玻璃基板(Corning 1737)上,並於100℃進行3分鐘預烤。 接著,使用具有5μm、8μm、10μm、15μm、20μm、30μm之線條圖案之光罩,利用高壓水銀燈以UV累計光量400 mJ/cm2 進行曝光。 然後,使其浸漬於23℃之顯影液(氫氧化鉀之0.05質量%水溶液)中,測定在0.5kgf/cm2 之噴淋顯影壓力下顯影圖案開始出現之時間(斷點),利用以下基準進行評價。將其結果示於表2。 ○:可在30秒以内完全去除光罩部分之黑矩陣用光阻組成物。 △: 可在超過30秒且60秒以内完全去除光罩部分之黑矩陣用光阻組成物。 ×:即便超過60秒亦無法完全去除光罩部分之黑矩陣用光阻組成物。(Developability) The pigment-dispersed photoresist compositions for black matrices of Examples and Comparative Examples were coated on a glass substrate (Corning 1737) with a spin coater so that the film thickness would be 1 μm, and the results were carried out at 100° C. 3 minutes pre-bake. Next, using a mask having line patterns of 5 μm, 8 μm, 10 μm, 15 μm, 20 μm, and 30 μm, exposure was performed with a high-pressure mercury lamp with a cumulative UV light amount of 400 mJ/cm 2 . Then, it was immersed in a developing solution (a 0.05 mass % aqueous solution of potassium hydroxide) at 23° C., and the time (break point) at which the developed pattern began to appear under a spray developing pressure of 0.5 kgf/cm 2 was measured, using the following criteria Evaluate. The results are shown in Table 2. ○: The photoresist composition for black matrix in the mask portion can be completely removed within 30 seconds. △: The photoresist composition for black matrix of the mask part can be completely removed in more than 30 seconds and within 60 seconds. ×: The photoresist composition for black matrix in the mask portion could not be completely removed even if it exceeded 60 seconds.

[表2] 黑矩陣用顏料分散光阻組成物 實施例1 實施例2 實施例3 實施例4 實施例5 實施例6 實施例7 實施例8 比較例1 比較例2 比較例3 黑矩陣用 顏料分散組成物 實施例1 63.6 - - - - - - - - - - 實施例2 - 63.6 - - - - - - - - - 實施例3 - - 63.6 - - - - - - - - 實施例4 - - - 63.6 - - - - - - - 實施例5 - - - - 63.6 - - - - - - 實施例6 - - - - - 63.6 - - - - - 實施例7 - - - - - - 63.6 - - - - 實施例8 - - - - - - 63.6 - - - 比較例1 - - - - - - - - 63.6 - - 比較例2 - - - - - - - - - 63.6 - 比較例3 - - - - - - - - - - 63.6 光聚合起始劑 OXE02 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 光聚合性化合物 DPHA 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 2.0 鹼可溶性樹脂 WR-301 (固形物成分45%) 10.0 10.0 10.0 10.0 10.0 10.0 10.0 10.0 10.0 10.0 10.0 有機溶劑 PGMEA 24.4 24.4 24.4 24.4 24.4 24.4 24.4 24.4 24.4 24.4 23.4 合計 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 評價結果 表面電阻値(Ω/□) 3.8×1011 2.2×1011 7.6×1011 2.8×1011 5.5×1012 6.6×1011 0.8×1010 0.8×1011 6.8×1012 3.6×108 2.6×108 顯影液溶解性 溶解 溶解 溶解 溶解 溶解 溶解 溶解 溶解 剝離 溶解 溶解 顯影性 × [Table 2] Pigment-dispersed photoresist composition for black matrix Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 Comparative Example 1 Comparative Example 2 Comparative Example 3 Pigment dispersion composition for black matrix Example 1 63.6 - - - - - - - - - - Example 2 - 63.6 - - - - - - - - - Example 3 - - 63.6 - - - - - - - - Example 4 - - - 63.6 - - - - - - - Example 5 - - - - 63.6 - - - - - - Example 6 - - - - - 63.6 - - - - - Example 7 - - - - - - 63.6 - - - - Example 8 - - - - - - 63.6 - - - Comparative Example 1 - - - - - - - - 63.6 - - Comparative Example 2 - - - - - - - - - 63.6 - Comparative Example 3 - - - - - - - - - - 63.6 photopolymerization initiator OXE02 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 photopolymerizable compound DPHA 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 2.0 Alkali Soluble Resin WR-301 (45% solid content) 10.0 10.0 10.0 10.0 10.0 10.0 10.0 10.0 10.0 10.0 10.0 Organic solvents PGMEA 24.4 24.4 24.4 24.4 24.4 24.4 24.4 24.4 24.4 24.4 23.4 total 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 100.0 Evaluation results Surface resistance value (Ω/□) 3.8×10 11 2.2×10 11 7.6×10 11 2.8×10 11 5.5×10 12 6.6×10 11 0.8×10 10 0.8×10 11 6.8×10 12 3.6×10 8 2.6×10 8 Developer Solubility dissolve dissolve dissolve dissolve dissolve dissolve dissolve dissolve peel off dissolve dissolve developability ×

根據實施例確認到,藉由使用含有黑色著色劑、顏料分散劑、

Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物、及有機溶劑,且上述顏料分散劑為含有氮原子之丙烯酸系嵌段共聚物之黑矩陣用顏料分散組成物,可形成黑矩陣用光阻組成物之顯影性優異、且即使進行高溫且長時間之後烘烤,表面電阻值亦優異之黑矩陣。 另一方面,確認到,未使用碳二亞胺系之顏料分散劑之比較例1,顯影液溶解性差(無法溶解,而且剝離)、顯影性亦差。又,使用胺酯系顏料分散劑之比較例2、及未使用
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物之比較例3,進行了高溫且長時間之後烘烤時的表面電阻値不足。 [產業上之可利用性]According to the examples, it was confirmed that by using a black colorant, a pigment dispersant,
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
A compound, an organic solvent, and the above-mentioned pigment dispersant is a pigment dispersion composition for a black matrix of an acrylic block copolymer containing a nitrogen atom, which can form a photoresist composition for a black matrix. A black matrix with excellent surface resistance after baking for a long time. On the other hand, it was confirmed that Comparative Example 1 in which a carbodiimide-based pigment dispersant was not used was poor in developer solubility (insoluble and peeled off) and poor in developability. Moreover, the comparative example 2 which used the urethane type pigment dispersant, and did not use
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
In Comparative Example 3 of the compound, the surface resistance value at the time of baking at a high temperature for a long time was insufficient. [Industrial Availability]

根據本發明,可提供一種黑矩陣用顏料分散組成物,其能夠形成黑矩陣用光阻組成物之顯影性優異、且即使進行高溫且長時間之後烘烤,表面電阻值亦優異之黑矩陣。ADVANTAGE OF THE INVENTION According to this invention, the pigment dispersion composition for black matrices which can form the black matrix which is excellent in the developability of the photoresist composition for black matrices, and is excellent in surface resistance value even if it bakes after a high temperature and a long time can be provided.

none

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Claims (8)

一種黑矩陣用顏料分散組成物,其含有: 黑色著色劑、顏料分散劑、
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物、及有機溶劑; 上述顏料分散劑係含有氮原子之丙烯酸系嵌段共聚物。
A pigment dispersion composition for a black matrix, comprising: a black colorant, a pigment dispersant,
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
Compound, and organic solvent; The above-mentioned pigment dispersant is a nitrogen atom-containing acrylic block copolymer.
如請求項1之黑矩陣用顏料分散組成物,其進一步含有顏料分散助劑。The pigment dispersion composition for a black matrix according to claim 1, further comprising a pigment dispersion auxiliary. 如請求項2之黑矩陣用顏料分散組成物,其中,上述顏料分散助劑係酞青系化合物之碸化物。The pigment dispersion composition for a black matrix according to claim 2, wherein the pigment dispersion aid is a phthalocyanine compound. 如請求項1至3中任一項之黑矩陣用顏料分散組成物,其中,上述
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
化合物係下述通式(1)及/或(2)所表示之化合物,
Figure 03_image001
〔通式(1)中,R1 及R2 表示可具有不飽和鍵之烷基或芳基,彼此可相同亦可不同,X1 為2價連結基; 通式(2)中,R3 及R4 表示可具有不飽和鍵之烷基或芳基,彼此可相同亦可不同,X2 為2價連結基〕。
The pigment dispersion composition for a black matrix according to any one of claims 1 to 3, wherein the above
Figure 110109560-A0101-12-01
Figure 110109560-A0101-12-02
The compound is a compound represented by the following general formula (1) and/or (2),
Figure 03_image001
[In the general formula (1), R 1 and R 2 represent an alkyl group or an aryl group which may have an unsaturated bond, which may be the same or different from each other, and X 1 is a divalent linking group; In the general formula (2), R 3 and R 4 represents an alkyl group or an aryl group which may have an unsaturated bond, which may be the same or different from each other, and X 2 is a divalent linking group].
如請求項1至4中任一項之黑矩陣用顏料分散組成物,其中,上述黑色著色劑含有碳黑。The pigment dispersion composition for a black matrix according to any one of claims 1 to 4, wherein the black colorant contains carbon black. 如請求項5之黑矩陣用顏料分散組成物,其中,上述碳黑為酸性碳黑。The pigment dispersion composition for a black matrix according to claim 5, wherein the carbon black is acid carbon black. 一種黑矩陣用光阻組成物,其係由請求項1至6中任一項之黑矩陣用顏料分散組成物獲得。A photoresist composition for a black matrix obtained from the pigment dispersion composition for a black matrix according to any one of claims 1 to 6. 一種黑矩陣,其係由請求項7之黑矩陣用光阻組成物形成。A black matrix formed from the photoresist composition for a black matrix of claim 7.
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