TW202140152A - Liquid withdrawing system that includes a base, at least one movement assisting member, a plurality of fixing members, and a clamping device - Google Patents

Abstract

The present invention provides a liquid withdrawing system that comprises a base, at least one movement assisting member, a plurality of fixing members, and a clamping device. The base defines a carrying surface and a rotation axis, in which the rotation axis is perpendicular to the carrying surface, and the base is rotatable relative to the rotation axis. The movement assisting member is disposed on the carrying surface. The clamping device is disposed opposite to the carrying surface. The base and the clamping device collectively define a receiving space, and the receiving space is adapted to receiving a liquid storage tank. The fixing members are movably connected to the base and are disposed symmetric with respect to the base.

Description

Pumping system

The invention provides a liquid pumping system, in particular to a pumping system that can assist the liquid storage barrel to move to a specific position on a bearing surface.

In the manufacturing process of the semiconductor and precision electronics industries, it is often necessary to use chemical liquids such as polishing fluids or cleaning agents to provide cleaning applications for the planarization process or related manufacturing devices. These chemical liquids will be temporarily stored in the chemical liquid tank after use, and will be removed by pumping or manual methods after accumulating a certain volume. However, because the liquid storage barrel filled with chemical residual liquid has a considerable weight, it will be quite difficult to move the liquid storage barrel directly to the carrying platform dedicated to pumping liquid by manpower; on the other hand, the carrying platform currently on the market Mostly it is a fixed type. Once the relative position of the lid of the liquid storage barrel and the fixture for pumping liquid has an error, it must be manually corrected in the direction of the deviation, so that the liquid storage barrel can be moved to enable the fixture to be pumped smoothly. The position of the liquid also caused many inconveniences in the operation.

The inventor then exhausted his mind and intensive research, and then developed a liquid pumping system that can assist the liquid storage barrel to move to a specific position on the bearing surface, in order to achieve the effects of saving manpower and improving operation convenience.

The first aspect of the present invention provides a liquid pumping system, which includes a base, at least one assisting member, a plurality of holding members, and a clamp. The base defines a bearing surface and a rotation axis, wherein the rotation axis is perpendicular to the bearing surface and the base can rotate relative to the rotation axis; the assisting member is arranged on the bearing surface; the holding member is movably connected to the base and relative to the base The seat is symmetrically arranged; the clamp and the bearing surface are arranged oppositely, the base and the clamp jointly define an accommodating space, and the accommodating space is suitable for accommodating a liquid storage barrel.

On the other hand, the second aspect of the present invention provides another liquid pumping system, which includes a base, at least one assisting member, and a plurality of holding members. The base defines a bearing surface and a rotation axis, wherein the rotation axis is perpendicular to the bearing surface and the base can rotate relative to the rotation axis; the assisting member is arranged on the bearing surface; the holding member is movably connected to the base and relative to the base Seat symmetrical configuration.

In an embodiment, the liquid pumping system further includes a plurality of screws, the screws are arranged along the radial direction of the base, and the rotating shaft passes through a center that bisects the distance of the holding members. Each of these holding parts includes a central part and a plurality of end parts. The screw is connected to the base and each central part of these holding parts. The distance between each central part and the center is smaller than the distance between each end and the center, and each end is arranged There is a rotating part, and each rotating part has a height difference with respect to the bearing surface.

In one embodiment, the aforementioned assisting member is a one-way roller, a universal roller, a roller or a crawler.

In an embodiment, the liquid pumping system further includes a limiting member, which is connected to the base and the clamp, and the shape of the limiting member corresponds to the liquid storage barrel.

In one embodiment, the pumping system further includes a tilt mechanism, the tilt mechanism is pivotally connected to the ground, and the base is disposed on the tilt mechanism.

In one embodiment, a connecting portion is formed on one end of the above-mentioned tilting mechanism, and the base is disposed on a part of the tilting mechanism away from this end. When this end touches the ground, the base and the tilt mechanism make an angle with the ground.

In one embodiment, the above-mentioned carrying surface is suitable for carrying a liquid storage tank, and the base further includes a sensing unit. When the bearing surface carries the liquid storage barrel, the sensing unit is physically deformed or generates an electronic signal.

In an embodiment, the liquid pumping system further includes a limiting member connected to the base, wherein the bearing surface is adapted to carry a liquid storage barrel, and the shape of the limiting member corresponds to the liquid storage barrel.

Thereby, the liquid pumping system of the present invention can assist the liquid storage barrel to move to the bearing surface by the assisting member on the bearing surface, and since the base can rotate relative to the rotating shaft, the user does not need to move to various positions, Combined with the force of the rotating base, the liquid storage tank is moved to a specific position, which greatly saves manpower and improves the convenience of operation.

In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.

The foregoing and other technical content, features, and effects of the present invention will be clearly presented in the following detailed description of the preferred embodiment with reference to the drawings. It is worth mentioning that the directional terms mentioned in the following embodiments, for example: up, down, left, right, front or back, etc., only refer to the directions of the attached drawings. Therefore, the directional terms used are for illustration, not for limiting the present invention. In addition, in the following embodiments, the same or similar elements will use the same or similar reference numerals.

Please refer to FIGS. 1 and 2. FIG. 1 is a schematic diagram of the synergy between an embodiment of the pumping system of the present invention and a liquid storage barrel, and FIG. 2 is a three-dimensional schematic diagram of the pumping system shown in FIG. The liquid pumping system 1 of this embodiment includes a base 110, at least one assisting member 120, and a plurality of holding members 130. The base 110 defines a bearing surface 112 and a rotation axis X. The rotation axis X is perpendicular to the bearing surface 112. And the base 110 can rotate relative to the rotation axis X; the assist member 120 is disposed on the bearing surface 112; the holding member 130 is movably connected to the base 110 and is arranged symmetrically with respect to the base 110. Preferably, the liquid pumping system 1 further includes a clamp 140, wherein the clamp 140 is disposed opposite to the bearing surface 112, and the base 110 and the clamp 140 jointly define an accommodating space S, and the accommodating space S is suitable for accommodating liquid storage. Bucket 2.

In detail, the base 110 of this embodiment is a rotating platform that can freely rotate in a clockwise or counterclockwise direction relative to the rotation axis X, and the bearing surface 112 is suitable for bearing the liquid tank 2. Preferably, the liquid pumping system 1 of this embodiment further includes a limiting member 150, and the limiting member 150 is connected to the base 110 and the clamp 140, so it can be used as a connecting member between the base 110 and the clamp 140. In this embodiment, the limiting member 150 is a curved baffle, the shape corresponding to the liquid tank 2, and the base 110 is pivotally connected to the bottom of the limiting member 150, so when the liquid tank 2 is pushed on the bearing surface 112 Moreover, when the position of the liquid storage barrel 2 is shifted due to excessive force, the limit member 150 can restrict the position of the liquid storage barrel 2 to prevent the liquid storage barrel 2 from slipping off the base 110.

The following will specifically describe how the liquid pumping system 1 of this embodiment assists the user to move the liquid storage bucket 2 to the base 110. Please refer to FIG. 3 and FIG. 4. FIG. 3 is a three-dimensional schematic diagram of the lower component of the liquid pumping system shown in FIG. 2, and FIG. 4 is a front schematic diagram of the lower component shown in FIG. 3. As mentioned above, at least one assisting member 120 is configured on the bearing surface 112. In this embodiment, the assisting member 120 is a one-dimensional directional roller, and the number is 10. When the user moves from the edge of the base 110 When a part of the liquid storage bucket 2 is leaning on the supporting surface 112, the liquid storage bucket 2 can be smoothly moved to a specific position (for example, the center) on the supporting surface 112 through the rolling of the assisting member 120. In addition, since the base 110 can rotate freely with respect to the rotation axis X, no matter which direction the user wants to move the liquid storage tank 2 to the base 110, the base 110 can be rotated before or during the movement. With the assistance of the assisting member 120 in the correct rolling direction, the transportation work becomes smoother.

It is worth mentioning that, in this embodiment, the base 110 further includes a sensing unit 114, which is disposed in the center of the bearing surface 112 to detect the weight of the liquid tank 2 loaded with chemical residual liquid, wherein the sensing unit 114 The unit 114 may be a general weighing spring, or a load gauge, strain gauge, or piezoelectric element that generates digital or electronic signals. When the bearing surface 112 carries the liquid storage tank 2, the sensing unit 114 will produce a physical deformation or generate an electronic signal, so that the liquid pumping system 1 or the user knows the current weight of the liquid storage tank 2 for pumping or unloading the storage tank. Liquid barrel 2 and other programs. However, in other embodiments, the base 110 may not include the sensing unit 114, and the position and quantity of the configuration may also be adjusted according to actual requirements such as the appearance of the liquid tank 2, which is not limited by the present invention. .

On the other hand, in order to prevent the liquid storage barrel 2 from falling from the base 110 due to the rotation of the base 110 or other factors during the loading process, the holding members 130 are symmetrically arranged around the base 110 to hold the liquid storage barrel 2. Specifically, the liquid pumping system 1 of this embodiment further includes a plurality of screws 160, wherein the number of the screws 160 corresponds to the number of the holders 130 and is arranged along the radial direction of the base 110. Furthermore, each holding member 130 includes a central portion 132 and a plurality of end portions 134, wherein the end portions 134 are connected to each other through the corresponding central portion 132, and the screw 160 is connected to the base 110 and the holding members 130的 Each central part 132. As shown in FIG. 4, the rotation axis X passes through a center C that bisects the distance of the retaining members 130, so that the retaining member 130 screwed on the screw 160 moves away or approaching with the rotation axis X as the center.

In addition, each end 134 is provided with a rotating member 136, wherein the rotating member 136 is, for example, a roller or a sleeve, has a height difference H relative to the bearing surface 112 and is pivotally connected to the corresponding end 134 for use So as to abut and hold the barrel body of the liquid storage barrel 2. In detail, as shown in FIG. 4, the distance between each center portion 132 and the center C is smaller than the distance between each end portion 134 and the center C. Thereby, when the screw 160 rotates, the central part 132 connected to the screw 160 will enter the bottom side of the base 110 first, and the rotating member 136 arranged on the end 134 still outside the base 110 will move in the radial direction. The inner side is tightened and abuts against the barrel body of the liquid storage barrel 2.

The process of holding the liquid storage barrel 2 by the holding member 130 will be described in detail below. Please refer to FIGS. 5 and 6. FIG. 5 is a schematic top view of the lower element shown in FIG. 3 when the holding member is expanded relative to the base. Fig. 6 is a schematic top view of Fig. 5 when the holding member is folded relative to the base and the base is rotated to one position. When you want to move the liquid storage barrel 2, a part of the liquid storage barrel 2 is first leaned against the supporting surface 112. At this time, the holding member 130 is in an unfolded state relative to the base 110 as shown in FIG. 5, and the user The screw 160 can be activated and drive the holding member 130 near the leaning side of the liquid storage barrel 2 so that the rotating member 136 abuts on the liquid storage barrel 2 and temporarily holds it. After the seat 110 is rotated to a predetermined position, all the holding members 130 are tightened together until the rotating member 136 abuts against the body of the liquid storage barrel 2, and becomes the state shown in FIG. 6, whereby the liquid storage barrel 2 It is ensured that the rotating member 136 is held in each position of the base 110, and will not fall from the base 110 due to external force or other factors, and because the rotating member 136 can rotate in accordance with the curve of the barrel body of the liquid storage barrel 2, it can be Reduce the barrel deformation caused by pressure when the element contacts the soft barrel. In addition, when the loaded liquid storage barrel 2 has different specifications and sizes, the center of the liquid storage barrel 2 can also be moved to a predetermined position by tightening the holder 130, so that it can correspond to different specifications and sizes. Liquid storage tank 2.

Please refer to FIGS. 7-10. FIG. 7 is a schematic top view of the lower element of another embodiment of the pumping system of the present invention when the holder is expanded relative to the base, and FIG. 8 is FIG. 7 when the holder is relative to the base. The top view schematic view when the base is folded and rotated in one position. FIG. 9 is a top view view of the lower element of another embodiment of the pumping system of the present invention when the holder is expanded relative to the base. FIG. 10 is the top view of FIG. 9 when it is held. A schematic top view when the piece is folded relative to the base and the base rotates in one position. In addition to the one-way rollers mentioned above, in other embodiments, the assisting member 120 may also be of other types, such as the assisting member 120a (as shown in Figures 7 and 8) using crawler tracks to assist movement, or using The assisting member 120b (as shown in Figure 9 and Figure 10) assisted by the universal rollers, or the assisting member (not shown) laid on the supporting surface 112 by means of a long strip of rollers, or even The above-mentioned types of assisting elements are used in combination, and the present invention does not limit this.

Please refer to FIGS. 11 and 12. FIG. 11 is a schematic side view of the lower component shown in FIG. 3, and FIG. 12 is a schematic diagram of the lower component shown in FIG. When the clamp 140 above the liquid pumping system 1 clamps the lid of the bucket and pumps the liquid storage bucket 2 to a certain extent, the residual liquid in the bucket will decrease, making it difficult to extract the extraction equipment protruding into the liquid storage bucket 2. In order to solve this problem, the liquid pumping system 1 of this embodiment further includes a tilting mechanism 170, wherein the tilting mechanism 170 is pivotally connected to the ground, and the base 110 is disposed on the tilting mechanism 170.

In detail, as shown in FIG. 11, a connecting portion 172 is formed on one end of the tilting mechanism 170 for connecting the support rod (not shown) of the tilting mechanism 170, and the base 110 is disposed on the tilting mechanism 170 away from the connection 172 on a part of one end. When the liquid suction system 1 or the user knows that the chemical residual liquid in the liquid tank 2 is less than a certain percentage through the aforementioned sensing unit 114 during the liquid suction process, the user can connect the support connected to the connecting portion 172 The lever is pressed down, so that the tilt mechanism 170 pivots, so that one end of the connecting portion 172 is displaced downward and contacts the ground. When one end of the connecting portion 172 touches the ground, the base 110, the tilt mechanism 170, and the bottom surface of the liquid storage tank 2 carried on the base 110 form an angle θ with the ground, so that the residual liquid in the liquid storage tank 2 can be Concentrating on an area at the bottom of the liquid storage barrel 2 is beneficial for the liquid pumping system 1 to completely drain the remaining liquid. According to actual tests, when the angle θ is in the range of 5-10 degrees, the liquid pumping system 1 can effectively drain the remaining liquid without overturning the barrel due to the excessively large tilt angle.

The present invention has been disclosed in preferred embodiments above, but those skilled in the art should understand that the above-mentioned embodiments are only used to describe the present invention and should not be construed as limiting the scope of the present invention. And it should be noted that all changes and substitutions equivalent to the above-mentioned embodiments should be included in the scope of the present invention. Therefore, the protection scope of the present invention should be defined by the scope of the patent application.

1: Pumping system 110: Pedestal 112: bearing surface 114: Sensing unit 120, 120a, 120b: auxiliary parts 130: Holder 132: Central 134: End 136: Rotating Parts 140: Fixture 150: limit piece 160: screw 170: Tilt mechanism 172: Connection 2: liquid storage tank C: Center H: height difference S: accommodating space X: Rotation axis θ: Angle

FIG. 1 is a schematic diagram of the synergistic effect of an embodiment of the pumping system of the present invention and a liquid storage tank. Fig. 2 is a three-dimensional schematic diagram of the pumping system shown in Fig. 1. Fig. 3 is a three-dimensional schematic diagram of the lower components of the liquid pumping system shown in Fig. 2. Fig. 4 is a schematic front view of the lower component shown in Fig. 3. Fig. 5 is a schematic top view of the lower element shown in Fig. 3 when the holder is expanded relative to the base. Fig. 6 is a schematic top view of Fig. 5 when the holding member is folded relative to the base and the base is rotated to one position. Fig. 7 is a schematic top view of the lower element of another embodiment of the liquid pumping system of the present invention when the holder is deployed relative to the base. Fig. 8 is a schematic top view of Fig. 7 when the holding member is folded relative to the base and the base is rotated to one position. Fig. 9 is a schematic top view of the lower element of still another embodiment of the liquid pumping system of the present invention when the holder is deployed relative to the base. Fig. 10 is a schematic top view of Fig. 9 when the holding member is folded relative to the base and the base is rotated to one position. Fig. 11 is a schematic side view of the lower component shown in Fig. 3. Fig. 12 is a schematic diagram when the lower element shown in Fig. 11 carries the liquid storage barrel and is inclined at an angle.

1: Pumping system

110: Pedestal

112: bearing surface

120: helper

130: Holder

140: Fixture

150: limit piece

170: Tilt mechanism

S: accommodating space

X: Rotation axis

Claims (10)

A pumping system, including: A base defining a bearing surface and a rotation axis, wherein the rotation axis is perpendicular to the bearing surface, and the base can rotate relative to the rotation axis; At least one assisting part is arranged on the bearing surface; A plurality of holding parts are movably connected to the base and are arranged symmetrically with respect to the base; and A clamp is arranged opposite to the carrying surface, the base and the clamp jointly define an accommodating space, and the accommodating space is suitable for accommodating a liquid storage barrel. The pumping system according to claim 1, further comprising: A plurality of screws are arranged along the radial direction of the base, and the rotating shaft passes through a center that bisects the distance of the plurality of holding parts; Wherein each of the plurality of holding parts includes a central part and a plurality of end parts, the plurality of screws are connected to the base and each of the central parts of the plurality of holding parts, and the distance between each central part and the center is smaller than each of the central parts. The distance between the end portion and the center, each end portion is equipped with a rotating piece, and each rotating piece has a height difference with respect to the bearing mask. The pumping system according to claim 1, wherein the at least one assisting member is a one-way roller, a universal roller, a roller or a crawler. The liquid pumping system according to claim 1, further comprising a limiting member, the limiting member is connected to the base and the clamp, and the shape of the limiting member corresponds to the liquid storage barrel. A pumping system, including: A base defines a bearing surface and a rotation axis, the rotation axis is perpendicular to the bearing surface, and the base can rotate relative to the rotation axis; At least one booster is arranged on the bearing surface; and A plurality of holding parts are movably connected to the base and arranged symmetrically with respect to the base. The liquid pumping system according to claim 5, further comprising a tilting mechanism, the tilting mechanism is pivotally connected to the ground, and the base is disposed on the tilting mechanism. The pumping system according to claim 6, wherein a connecting portion is formed on one end of the tilting mechanism, and the base is disposed on a part of the tilting mechanism away from the end, and when the end contacts the ground, the base The seat and the tilting mechanism make an angle with the ground. The pumping system according to claim 5, further comprising: A plurality of screws are arranged along the radial direction of the base, and the rotating shaft passes through a center that bisects the distance of the plurality of holding parts; Wherein each of the plurality of holding parts includes a central part and a plurality of end parts, the plurality of screws are connected to the base and each of the central parts of the plurality of holding parts, and the distance between each central part and the center is smaller than each of the central parts. The distance between the end portion and the center, each end portion is equipped with a rotating piece, and each rotating piece has a height difference with respect to the bearing mask. The pumping system according to claim 5, wherein the carrying surface is adapted to carry a liquid storage barrel, and the base further includes a sensing unit, and when the carrying surface carries the liquid storage barrel, the sensing unit occurs Physically deform or generate an electronic signal. The pumping system according to claim 5, further comprising a limiting member connected to the base, wherein the bearing surface is adapted to carry a liquid storage barrel, and the shape of the limiting member corresponds to the Liquid storage tank.

Images