CN113562385B

CN113562385B - Liquid pumping system

Info

Publication number: CN113562385B
Application number: CN202010354030.8A
Authority: CN
Inventors: 徐宏信; 邱彦岚
Original assignee: Asia IC MIC Process Inc
Current assignee: Asia IC MIC Process Inc
Priority date: 2020-04-29
Filing date: 2020-04-29
Publication date: 2023-06-13
Anticipated expiration: 2040-04-29
Also published as: CN113562385A

Abstract

The invention provides an liquid pumping system which comprises a base, at least one auxiliary piece, a plurality of fixing pieces and a clamp. The base defines a bearing surface and a rotating shaft, wherein the rotating shaft is perpendicular to the bearing surface, and the base can rotate relative to the rotating shaft; the auxiliary piece is arranged on the bearing surface; the clamp is arranged opposite to the bearing surface, the base and the clamp jointly define a containing space, and the containing space is suitable for containing the liquid storage barrel; the holder is movably connected to the base and symmetrically arranged relative to the base. Therefore, a user does not need to move to all directions, and the liquid storage barrel can be moved to a specific position by combining the force applied by the rotating base, so that the labor is greatly saved, and the convenience of operation is improved.

Description

Liquid pumping system

Technical Field

The present invention relates to a liquid pump system, and more particularly, to a liquid pump system capable of assisting a liquid storage barrel to move to a specific position on a bearing surface.

Background

In the manufacture of semiconductors and precision electronics, it is often desirable to use chemical liquids, such as polishing fluids or cleaning agents, to provide cleaning for planarization processes or related manufacturing equipment. The chemical liquids are temporarily stored in the liquid barrel after use, and are removed by pumping or manual operation after accumulating a certain volume. However, since the liquid storage barrel filled with the chemical residual liquid has a considerable weight, the liquid storage barrel is quite laborious to move to the special carrying platform for liquid pumping directly by manpower; on the other hand, the existing commercial carrying platforms are mostly of fixed type, and once the relative positions of the barrel cover of the liquid storage barrel and the clamp for liquid pumping generate errors, the relative positions of the barrel cover of the liquid storage barrel and the clamp for liquid pumping need to be manually corrected in the direction of generating offset so as to move the liquid storage barrel to a position capable of enabling the clamp to smoothly pump liquid, which also causes a plurality of inconveniences in operation.

Disclosure of Invention

According to at least one embodiment of the invention, the liquid pumping system can assist the liquid storage barrel to move to the bearing surface by the aid of the aid piece on the bearing surface, and because the base can rotate relative to the rotating shaft, a user does not need to move to various directions, and the liquid storage barrel can be moved to a specific position by combining the force applied by the rotating base, so that the labor is greatly saved, and the convenience of operation is improved.

A first embodiment of the present invention provides an aspiration system including a base, at least one booster, a plurality of holders, and a clamp. The base defines a bearing surface and a rotating shaft, wherein the rotating shaft is perpendicular to the bearing surface, and the base can rotate relative to the rotating shaft; the auxiliary piece is arranged on the bearing surface; the fixing piece is movably connected to the base and is symmetrically arranged relative to the base; the clamp is arranged opposite to the bearing surface, the base and the clamp jointly define a containing space, and the containing space is suitable for containing the liquid storage barrel.

In another aspect, a second embodiment of the present invention provides another fluid extraction system comprising a base, at least one booster, and a plurality of holders. The base defines a bearing surface and a rotating shaft, wherein the rotating shaft is perpendicular to the bearing surface, and the base can rotate relative to the rotating shaft; the auxiliary piece is arranged on the bearing surface; the holder is movably connected to the base and symmetrically arranged relative to the base.

Preferably, the liquid extraction system further comprises a plurality of screws arranged in a radial direction of the base, and the rotation axis passes through a center bisecting a distance of the holders. The fixing pieces comprise a central part and a plurality of end parts, the screw rod is connected with the base and each central part of the fixing pieces, the distance between each central part and the center is smaller than that between each end part and the center, the rotating pieces are arranged on each end part, and each rotating piece has a height difference relative to the bearing surface.

Preferably, the auxiliary member is a unidirectional roller, a universal roller, a roller member or a track.

Preferably, the liquid pumping system further comprises a limiting piece, wherein the limiting piece is connected to the base and the clamp, and the shape of the limiting piece corresponds to the liquid storage barrel.

Preferably, the liquid suction system further comprises a tilting mechanism, wherein the tilting mechanism is pivoted relative to the ground, and the base is configured on the tilting mechanism.

Preferably, the tilting mechanism has a connecting portion formed at one end thereof, and the base is disposed at a portion of the tilting mechanism away from the one end. When the end contacts the ground, the base and the tilting mechanism are at an angle to the ground.

Preferably, the bearing surface is suitable for bearing the liquid storage barrel, and the base further comprises a sensing unit. When the bearing surface bears the liquid storage barrel, the sensing unit is subjected to physical deformation or generates an electronic signal.

Preferably, the liquid pumping system further comprises a limiting piece, wherein the limiting piece is connected to the base, the bearing surface is suitable for bearing the liquid storage barrel, and the shape of the limiting piece corresponds to the liquid storage barrel.

Drawings

In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings to be used in the description of the embodiments will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of a first embodiment of an extraction system of the present invention in cooperation with a liquid storage tank.

Fig. 2 is a schematic perspective view of the fluid evacuation system shown in fig. 1.

Fig. 3 is a schematic perspective view of the components below the fluid evacuation system shown in fig. 2.

Fig. 4 is a schematic front view of the lower assembly shown in fig. 3.

Fig. 5 is a schematic top view of the lower assembly of fig. 3 when the holder is unfolded relative to the base.

FIG. 6 is a schematic top view of FIG. 5 when the holder is retracted relative to the base and the base is rotated one orientation.

FIG. 7 is a schematic top view of an underlying assembly of another embodiment of the fluid extraction system of the present invention when the retainer is deployed relative to the base.

FIG. 8 is a schematic top view of FIG. 7 when the holder is retracted relative to the base and the base is rotated one orientation.

FIG. 9 is a schematic top view of the lower assembly of yet another embodiment of the fluid evacuation system of the present disclosure when the retainer is deployed relative to the base.

FIG. 10 is a schematic top view of FIG. 9 when the holder is retracted relative to the base and the base is rotated one orientation.

Fig. 11 is a schematic side view of the lower assembly shown in fig. 3.

FIG. 12 is a schematic view of the lower assembly of FIG. 11 carrying a liquid storage tank and tilted at an angle.

Reference numerals

1. Liquid pumping system

110. Base seat

112. Bearing surface

114. Sensing unit

120. 120a, 120b booster

130. Holding piece

132. Central portion

134. End portion

136. Rotating member

140. Clamp

150. Limiting piece

160. Screw rod

170. Tilting mechanism

172. Connecting part

2. Liquid storage barrel

C center

H height difference

S accommodation space

X rotation axis

Angle theta

Detailed Description

The foregoing and other technical aspects, features and advantages of the present invention will become more apparent from the following detailed description of the preferred embodiments, which proceeds with reference to the accompanying drawings. It is noted that the directional terms mentioned in the following embodiments, for example: upper, lower, left, right, front or rear, etc., are merely references to the directions of the attached drawings. Accordingly, the directional terminology is used for purposes of illustration and is not intended to be limiting of the invention. In addition, in the following embodiments, the same or similar components will be denoted by the same or similar reference numerals.

Referring to fig. 1 and 2, fig. 1 is a schematic diagram illustrating a cooperation between a first embodiment of the pumping system and a liquid storage barrel according to the present invention, and fig. 2 is a schematic perspective view of the pumping system shown in fig. 1. The liquid extraction system 1 of the present embodiment includes a base 110, at least one booster 120, and a plurality of holders 130, wherein the base 110 defines a bearing surface 112 and a rotation axis X, the rotation axis X is perpendicular to the bearing surface 112, and the base 110 is rotatable relative to the rotation axis X; the auxiliary member 120 is disposed on the carrying surface 112; the holder 130 is movably connected to the base 110 and symmetrically disposed with respect to the base 110. Preferably, the drainage system 1 further includes a fixture 140, wherein the fixture 140 is disposed opposite to the carrying surface 112, the base 110 and the fixture 140 together define a receiving space S, and the receiving space S is adapted to receive the liquid storage tank 2.

In detail, the base 110 of the present embodiment is a rotating platform, and can freely rotate in a clockwise or counterclockwise direction relative to the rotation axis X, and the bearing surface 112 is adapted to bear the liquid storage barrel 2. Preferably, the drainage system 1 of the present embodiment further includes a limiting member 150, and the limiting member 150 is connected to the base 110 and the clamp 140, so as to be a connecting member between the base 110 and the clamp 140. In the embodiment, the limiting member 150 is a cambered surface baffle, the shape of the limiting member corresponds to the liquid storage barrel 2, and the base 110 is pivotally connected to the bottom of the limiting member 150, so that when the liquid storage barrel 2 is pushed onto the carrying surface 112 and the liquid storage barrel 2 is offset due to an excessive force, the limiting member 150 can limit the position of the liquid storage barrel 2 to prevent the liquid storage barrel 2 from sliding off the base 110.

How the liquid drawing system 1 of the present embodiment assists the user in moving the liquid storage tank 2 onto the base 110 will be described in detail below. Referring to fig. 3 and 4, fig. 3 is a schematic perspective view of a lower component of the liquid extraction system shown in fig. 2, and fig. 4 is a schematic front view of the lower component shown in fig. 3. As mentioned above, at least one auxiliary member 120 is disposed on the supporting surface 112, in this embodiment, the auxiliary member 120 is a one-dimensional directional roller, and the number of the auxiliary members is 10, and when a user leans a part of the liquid storage barrel 2 against the supporting surface 112 from the edge of the base 110, the liquid storage barrel 2 can be smoothly slid to a specific position (for example, the center) on the supporting surface 112 by rolling the auxiliary member 120. In addition, since the base 110 is rotatable about the rotation axis X, no matter from which direction the user wants to move the liquid storage tank 2 onto the base 110, the user can rotate the base 110 before or during the movement to obtain assistance of the assist member 120 in the correct rolling direction, so that the conveying work becomes smoother.

It should be noted that, in the present embodiment, the base 110 further includes a sensing unit 114 disposed in the center of the carrying surface 112 for detecting the weight of the liquid storage tank 2 loaded with the chemical residual liquid, wherein the sensing unit 114 may be a common weighing spring, or may be a weight meter, strain gauge or piezoelectric element that generates a digital or electronic signal. When the carrying surface 112 carries the liquid storage barrel 2, the sensing unit 114 will generate physical deformation or generate an electronic signal, so that the liquid pumping system 1 or the user can know the weight of the liquid storage barrel 2 at present, and perform the procedures of liquid pumping or discharging the liquid storage barrel 2. However, in other embodiments, the base 110 may not include the sensing unit 114, and the positions and the number of the configurations may be adjusted according to the actual requirements such as the shape of the liquid storage tank 2, which is not limited in the present invention.

On the other hand, in order to prevent the liquid storage barrel 2 from falling off the base 110 due to rotation of the base 110 or other factors during the loading process, the holding members 130 are symmetrically disposed around the base 110 for holding the liquid storage barrel 2. Specifically, the liquid extraction system 1 of the present embodiment further includes a plurality of screws 160, wherein the number of screws 160 corresponds to the number of holders 130, and is configured along the radial direction of the base 110. Further, each holder 130 includes a central portion 132 and a plurality of end portions 134, wherein the end portions 134 are connected to each other by the corresponding central portion 132, and the screw 160 is connected to the base 110 and each central portion 132 of the holders 130. As shown in fig. 4, the rotation axis X passes through the center C bisecting the distance of the holders 130, so that the holders 130 screwed on the screw 160 move away from or close to each other about the rotation axis X.

In addition, each end 134 is provided with a rotating member 136, wherein the rotating member 136 is, for example, a roller or a sleeve, has a height difference H with respect to the bearing surface 112, and is pivotally connected to the corresponding end 134 for abutting against and holding the barrel body of the liquid storage barrel 2. In detail, as shown in fig. 4, the distance between each central portion 132 and the center C is smaller than the distance between each end portion 134 and the center C. Thus, when the screw 160 rotates, the central portion 132 connected to the screw 160 enters the bottom inside of the base 110, and the rotating member 136 disposed on the end 134 still outside the base 110 tightens radially inward and abuts against the tub body of the liquid storage tub 2.

Referring to fig. 5 and 6, fig. 5 is a schematic top view of the lower assembly shown in fig. 3 when the holder is unfolded with respect to the base, and fig. 6 is a schematic top view of fig. 5 when the holder is folded with respect to the base and the base is rotated by one orientation. When the liquid storage barrel 2 is desired to be moved, a part of the liquid storage barrel 2 is leaned against the bearing surface 112, at this time, the fixing member 130 is unfolded relative to the base 110 as shown in fig. 5, the user can start the screw 160 and drive the fixing member 130 close to the leaning side of the liquid storage barrel 2, so that the rotating member 136 is abutted against the liquid storage barrel 2 to temporarily fix, after the liquid storage barrel 2 is rotationally moved to a predetermined position by the aid of the aid member 120 and the base 110, all fixing members 130 are tightened together until the rotating member 136 is abutted against the barrel body of the liquid storage barrel 2, so as to achieve the state as shown in fig. 6, thereby ensuring that the liquid storage barrel 2 is fixed by the rotating member 136 in all directions of the base 110, and can not fall off from the base 110 due to external force or other factors, and can reduce barrel deformation caused by pressure when the component contacts with the soft barrel body because the rotating member 136 can rotate in compliance with the barrel body curve of the liquid storage barrel 2. In addition, when the carried liquid storage barrels 2 have different sizes, the center of the liquid storage barrel 2 can be moved to a preset position by tightening the fixing piece 130, so that the liquid storage barrels 2 with different sizes and specifications can be correspondingly arranged.

Referring to fig. 7 to 10, fig. 7 is a schematic top view of a lower assembly of another embodiment of the pumping system of the present invention when the holder is unfolded with respect to the base, fig. 8 is a schematic top view of fig. 7 when the holder is folded with respect to the base and the base is rotated by one orientation, fig. 9 is a schematic top view of a lower assembly of another embodiment of the pumping system of the present invention when the holder is unfolded with respect to the base, and fig. 10 is a schematic top view of fig. 9 when the holder is folded with respect to the base and the base is rotated by one orientation. In addition to the unidirectional rollers, in other embodiments, the auxiliary member 120 may be other types, such as an auxiliary member 120a (as shown in fig. 7 and 8) that is moved with the aid of a crawler belt, an auxiliary member 120b (as shown in fig. 9 and 10) that is moved with the aid of a universal roller, or an auxiliary member (not shown) that is laid on the carrying surface 112 with the aid of an elongated roller, or even an auxiliary member of the above type may be used in combination.

Referring to fig. 11 and 12, fig. 11 is a schematic side view of the lower assembly shown in fig. 3, and fig. 12 is a schematic view of the lower assembly shown in fig. 11 when the lower assembly carries a liquid storage tank and is inclined at an angle. When the clamp 140 above the liquid pumping system 1 clamps the barrel cover and pumps liquid to a certain extent from the liquid storage barrel 2, residual liquid in the barrel can be reduced so that the extraction equipment penetrating into the liquid storage barrel 2 is not easy to extract. To solve this problem, the drainage system 1 of the present embodiment further includes a tilting mechanism 170, wherein the tilting mechanism 170 is pivoted to the ground, and the base 110 is disposed on the tilting mechanism 170.

In detail, as shown in fig. 11, a connection portion 172 is formed at one end of the tilting mechanism 170 for connecting a support rod (not shown) of the tilting mechanism 170, and the base 110 is disposed at a portion of the tilting mechanism 170 away from the end of the connection portion 172. When the pumping system 1 or the user knows that the chemical residual liquid in the liquid storage tank 2 is less than a certain proportion through the sensing unit 114, the user can press down the support rod connected to the connection part 172, so that the tilting mechanism 170 pivots, and one end of the connection part 172 is displaced downward and contacts the ground. When one end of the connecting portion 172 contacts the ground, the base 110, the tilting mechanism 170 and the bottom surface of the liquid storage barrel 2 supported on the base 110 form an angle θ with the ground, so that the residual liquid in the liquid storage barrel 2 can be concentrated in a region at the bottom of the liquid storage barrel 2, which is beneficial for the liquid pumping system 1 to completely pump out the residual liquid. Through practical tests, when the angle theta is in the range of 5-10 degrees, the liquid suction system 1 can effectively suck residual liquid, and the barrel body cannot be turned over due to overlarge inclination angle.

The foregoing is merely exemplary of the present invention and is not intended to limit the scope of the present invention. It should be noted that all the equivalent changes and substitutions are intended to be included in the scope of the present invention. Accordingly, the scope of the invention is defined by the appended claims.

Claims

1. An aspiration system, comprising:

a base defining a bearing surface and a rotation axis, wherein the rotation axis is perpendicular to the bearing surface and the base is rotatable relative to the rotation axis;

at least one auxiliary member arranged on the bearing surface;

the fixing pieces are movably connected to the base and are symmetrically arranged relative to the base, each fixing piece comprises a central part and a plurality of end parts, each central part can selectively enter the inside of the bottom side of the base, and each end part is arranged outside the base;

a plurality of screws arranged in a radial direction of the base and connected to the base and each of the center portions, the rotation shaft passing through a center that bisects a distance between the plurality of holders, each of the center portions being less than a distance between each of the end portions and the center, each of the end portions being provided with a rotation member having a height difference with respect to the bearing surface; and

the clamp is arranged opposite to the bearing surface, the base and the clamp jointly define a containing space, and the containing space is suitable for containing the liquid storage barrel.

2. The fluid evacuation system of claim 1, wherein the at least one booster member is a unidirectional roller, a universal roller, a roller member, or a track.

3. The fluid evacuation system of claim 1, further comprising a stop member coupled to the base and the clamp, the stop member having a shape corresponding to the fluid reservoir.

4. An aspiration system, comprising:

a base defining a bearing surface and a rotation axis, the rotation axis being perpendicular to the bearing surface and the base being rotatable relative to the rotation axis;

at least one auxiliary member arranged on the bearing surface;

the fixing pieces are movably connected to the base and are symmetrically arranged relative to the base, each fixing piece comprises a central part and a plurality of end parts, each central part can selectively enter the inside of the bottom side of the base, and each end part is arranged outside the base; and

the rotating shafts pass through centers which divide the distances between the plurality of retainers, the distances between the centers and the center are smaller than the distances between the end portions and the center, the rotating members are arranged on the end portions, and the rotating members have height differences relative to the bearing surface.

5. The fluid evacuation system of claim 4, further comprising a tilting mechanism pivotally connected to the ground, and wherein the base is disposed on the tilting mechanism.

6. The fluid evacuation system of claim 5, wherein the tilting mechanism has a connection formed at one end thereof and the base is disposed on a portion of the tilting mechanism remote from the end, the base and the tilting mechanism being at an angle to the ground when the end contacts the ground.

7. The fluid evacuation system of claim 4, wherein the bearing surface is adapted to carry a fluid reservoir, and wherein the base further comprises a sensing unit that is physically deformed or generates an electrical signal when the bearing surface carries the fluid reservoir.

8. The fluid evacuation system of claim 4, further comprising a stop member coupled to the base, wherein the bearing surface is adapted to bear a fluid reservoir, and wherein the stop member has a shape corresponding to the fluid reservoir.