TW202134006A - Jet machining device and jet machining method which can shorten the processing time - Google Patents

Abstract

The jet machining device of the present invention comprises a nozzle unit having a plurality of nozzles for spraying an abrasive material to the surface of the workpiece together with compressed air, and a distribution mechanism for distributing the abrasive material to the plurality of nozzles; a storage part for storing the abrasive material inside; a supply part for supplying the abrasive material stored in the storage part to the nozzle unit; and a mobile part for moving at least one of the plurality of nozzles and the workpiece to change the relative position between the plurality of nozzles and the workpiece. The distribution mechanism includes a dispersion member for internally defining a dispersion chamber for dispersing the abrasive material in an aerosol shape, an introduction tube for connecting the supply part and the dispersion chamber and supplying the abrasive material in the supply part to the dispersion chamber, and a delivery tube for connecting the plurality of nozzles and the dispersion chamber and supplying the aerosol-shaped abrasive material in the dispersion chamber to the plurality of nozzles. The dispersion member is provided with an import port communicated with the introduction tube and a delivery port communicated with the delivery tube. The present invention also provides a jet machining method including the steps of preparing a printed circuit board material as the workpiece; forming a resist layer having an opening of [phi]25 [mu]m or more and [phi]80 [mu]m or less on a surface of the printed circuit board material; and spraying the abrasive material on the surface of the printed circuit board material including the resist layer and forming a through hole in the printed circuit board material through the opening of the resist layer, wherein the ratio h/d of the depth h of the through hole to the diameter d of the opening of the resist layer is 0.8 or more and 2.0 or less.

Description

Jet processing device and jet processing method

The invention relates to a spray processing device and a spray processing method.

There is known a jet processing method in which an abrasive is jetted from a nozzle together with compressed air to form a deep space such as a hole and a groove in the workpiece. In this jet processing method, a dry film with a mask pattern is formed on the workpiece, the abrasive material is jetted from a nozzle, and the area exposed from the dry film is removed from the workpiece. Form space.

In the jet processing method, particularly when a printed circuit board is used as a workpiece, etc., when very fine processing is performed, the processing accuracy is required for the space. As a technique for forming a space with processing precision, the jet processing method described in Patent Document 1, that is, a method of manufacturing a multi-line substrate with via holes (spaces) is known. Patent Document 1 discloses a spray processing method in which a dry film formed with a mask pattern is adhered to the front and back sides of the workpiece, and spray processing is performed from the front and back sides of the workpiece. Prior art literature Patent literature

Patent Document 1: Japanese Patent No. 6296407

[The problem to be solved by the invention]

In the jet processing described in Patent Document 1, the dry film needs to be adhered to both the front and back with high precision in a way that the mask pattern is consistent, and the workpiece is turned over during processing. Therefore, there is a concern that the processing time will be longer. .

In view of the above, it is required to provide a spray processing device and a spray processing method that can shorten the processing time. [Technical means to solve the problem]

One aspect of the present invention is a jet processing device. The jet processing device includes a nozzle unit, a storage unit, a supply unit, and a moving unit. The nozzle unit has a plurality of nozzles and a distribution mechanism. A plurality of nozzles spray abrasive materials and compressed air onto the surface of the workpiece. The distribution mechanism distributes the abrasive material to a plurality of nozzles. Abrasive materials are stored in the storage part. The supply part supplies the abrasive material stored in the storage part to the nozzle unit. The moving part moves at least one of the plurality of nozzles and the workpiece, and changes the relative positions of the plurality of nozzles and the workpiece.

In this jet processing device, the abrasive material is distributed to a plurality of nozzles by a distribution mechanism. The abrasive material is sprayed from each of the plurality of nozzles to the surface of the workpiece. Since a plurality of nozzles spray abrasives on the surface of the workpiece in parallel, the spray processing device can shorten the processing time compared to a spray processing device that does not have a plurality of nozzles.

In one embodiment of the present invention, the distribution mechanism may have a dispersing member, an introduction pipe, and an output pipe. The dispersing member can divide the dispersing chamber inside to disperse the abrasive material in aerosol form. The introduction pipe can connect the supply part and the dispersion chamber, and supply the abrasive material of the supply part to the dispersion chamber. The outlet pipe can connect a plurality of nozzles with the dispersion chamber, and supply the aerosol-like abrasive material in the dispersion chamber to the plurality of nozzles. Since this jet processing apparatus disperses the abrasive in an aerosol form in the dispersion chamber, it can uniformly supply the abrasive to a plurality of nozzles.

In one embodiment of the present invention, the dispersing member may be provided with an inlet communicating with the inlet pipe and an outlet communicating with the outlet pipe. The top surface of the dispersion chamber opposite to the inlet is circular, and the outlet can be arranged in a circular ring shape so as to surround the center of the top surface. The jet processing device can uniformly disperse the aerosol-like abrasive material from the center of the top surface toward the outlet port arranged in an annular shape.

In one embodiment of the present invention, the distance between the top surface in the direction orthogonal to the top surface and the introduction port may be 1/5 or more and 1/2 or less of the diameter of the top surface. By setting the height of the dispersion chamber, that is, the distance between the top surface and the introduction port, within the specified range, the jet processing device can suppress the deviation of the aerosol-like abrasive in the dispersion chamber (that is, the amount of abrasive being led out) Deviation at each outlet).

In one embodiment of the present invention, the introduction tube may be a round tube including a straight part connected with the dispersion member. The length of the straight part can be more than 5 times the inner diameter of the introduction tube in the straight part. The jet processing device rectifies the flow of the abrasive material formed by compressed air at the straight part of the inlet pipe, so it can promote the uniform dispersion of the aerosol-like abrasive material.

In one embodiment of the present invention, the jet processing device may further include a control unit that controls the operation of the moving unit. The control unit can control the moving unit by alternately performing the first scan and the second scan. In the first scan, the control unit can move at least one of the plurality of nozzles and the workpiece along the first direction parallel to the surface of the workpiece. In the second scan, the control unit can move at least one of the plurality of nozzles and the workpiece along the second direction orthogonal to the first direction and parallel to the surface of the workpiece. The movement distance in the second scan can be less than the diameter of the ejection openings provided in the plurality of nozzles. Multiple nozzles can be arranged in a manner of connecting in the second direction. By arranging a plurality of nozzles in this way, the position where the abrasive material is sprayed on the surface of the workpiece does not overlap, so the spray processing device can efficiently perform spray processing on the entire surface of the workpiece.

In one embodiment of the present invention, the jet processing apparatus may further include a pressurizing catheter. The pressurizing duct can supply compressed air to the storage part, pressurize the inside of the storage part, and squeeze the abrasive material to the supply part. The jet processing device uses a pressure pipe to pressurize the abrasive material from the storage part, and can suppress the pressure loss of the compressed air injected together with the abrasive material, thereby improving the processing capability of the jet processing.

25 μm以上

80 μm以下之開口之抗蝕劑層之步驟。 (3)向包含抗蝕劑層之印刷基板材料之一個面噴射研磨材料，經由抗蝕劑層之開口於印刷基板材料形成貫通孔之深度h相對於抗蝕劑層之開口之直徑d之比h/d為0.8以上2.0以下之貫通孔之步驟。In another aspect of the present invention, the jet processing method includes the following steps (1) to (3). (1) The step of preparing the printed circuit board material as the object to be processed. (2) Formed and arranged on one surface of the printed circuit board material

25 μm or more

Step of resist layer with openings below 80 μm. (3) The ratio of the polishing material to one surface of the printed circuit board material containing the resist layer, and the depth h of the through hole formed in the printed circuit board material through the opening of the resist layer to the diameter d of the opening of the resist layer h/d is the step of through-holes whose h/d is 0.8 or more and 2.0 or less.

By setting the opening of the resist layer within the above-mentioned range, the spray processing method can form a through hole with a high aspect ratio (h/d).

In one embodiment of the present invention, the ratio Da/Db of the diameter Da of the through hole to the diameter Db of the opening of the resist layer may be 0.84 or more and 0.94 or less. [Effects of Invention]

The technology of the present invention can provide a spray processing device and a spray processing method capable of shortening the processing time.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in the following description, the same or equivalent elements are denoted with the same reference numerals, and repeated descriptions are omitted. The size ratio of the drawing is not necessarily consistent with the size ratio of the description. As long as the words "up", "down", "left" and "right" are not specified, they indicate the state of the icon for ease of description. The X-axis direction, the Y-axis direction, and the Z-axis direction are the axial directions orthogonal to each other in the orthogonal coordinate system of the three-dimensional space.

(Jet processing device) FIG. 1 is an overall cross-sectional view showing the jet processing apparatus of the embodiment. The jet processing device 1 is a device that jets a fixed amount of abrasive 3 supplied by the supply part 2. The jet processing device 1 jets the abrasive 3 onto the surface of the workpiece 4 to perform jet processing as one of cutting processing methods such as cutting, grooving, and drilling. The abrasive 3 is, for example, alumina powder, pig iron abrasive, mold abrasive, and the like. Examples of the workpiece 4 include hard and brittle materials such as ceramic materials and glass materials, difficult-to-cut materials such as CFRP (Carbon Fiber Reinforced Plastics) materials, and printed circuit board materials. The printed substrate material is a base material on which a conductive film is formed on an insulating material or a glass epoxy substrate.

The jet processing device 1 includes a supply unit 2, a processing unit 5, a screening unit 6, a dust collecting unit 7, and a control unit 9. The jet processing device 1 jets the abrasive 3 supplied via the supply part 2 in the processing part 5 together with compressed air as a gas-solid two-phase flow toward the surface of the workpiece 4 to perform jet processing. The jet processing device 1 recovers the jetted abrasive 3 in the processing part 5 and reuses it. When the to-be-processed object 4 is spray-processed in the processing part 5, powder and granular bodies 8 containing the used abrasive 3 are produced. The powder body 8 includes, for example, a reusable abrasive material 3, an abrasive material 3 of a size that is not reusable due to crushing and abrasion, and cutting powder of the workpiece 4. The jet processing device 1 transfers the powder and granular body 8 from the processing section 5 to the screening section 6. The jet processing device 1 transfers the reusable abrasive 3 in the powder or granular body 8 from the screening part 6 to the supply part 2 and sprays it. The jet processing device 1 transports the non-reusable abrasive 3 and cutting powder from the screening part 6 to the dust collecting part 7 for collection.

(Supply Department) The supply unit 2 shown in FIG. 1 includes a storage unit 10, a filling unit 20, a roller 30, a driving unit 40, and a take-out unit 50. The storage part 10 stores the abrasive material 3 inside. A pressurizing duct 73 for supplying compressed air is connected to the storage portion 10, so that the inside of the storage portion 10 is pressurized by the compressed air.

The filling part 20 is connected below the storage part 10. Below the filling part 20, a frame body of a part of the housing roller 30, the driving part 40, and the take-out part 50 is connected. The roller 30 has a cylindrical shape, and a rotating shaft (not shown) is connected to the center of the two sides that are circular. In addition, a plurality of grooves are formed at equal intervals on the surface of the roller 30 in a direction parallel to the rotation axis. The drive unit 40 is a mechanism for rotating the roller 30 about the axis of rotation. The take-out part 50 is a flow path of compressed air formed to cover a part of the groove of the roller 30. A pipeline (not shown) for supplying compressed air is connected to the extraction part 50.

The abrasive 3 stored in the storage part 10 is transferred to the filling part 20. Then, the grinding material 3 is filled in the groove of the roller 30 by the pressing force generated by the compressed air. The roller 30 is rotated by the operation of the driving unit 40, and therefore all the grooves are continuously filled with the abrasive 3. The grinding material 3 reaching the take-out part 50 from the filling part 20 by the rotation of the roller 30 is extruded from the groove to the nozzle unit U by the compressed air. After that, the abrasive 3 is supplied to the nozzle 502 via the nozzle unit U.

(Processing Department) The processing part 5 performs jet processing on the workpiece 4. The processing part 5 has a housing 501, a nozzle unit U, a processing table 503, and a moving part M. A processing chamber 509 is divided inside the housing 501.

The nozzle unit U has a distribution mechanism 550 and a plurality of nozzles 502. The plurality of nozzles 502 are arranged on the upper part of the processing chamber 509, for example. A plurality of nozzles 502 extend along the Z axis orthogonal to the surface of the workpiece 4, and each injection port faces the surface of the workpiece 4. A plurality of nozzles 502 spray the abrasive 3 together with compressed air onto the surface of the workpiece 4. The plurality of nozzles 502 spray the abrasive 3 as a mixed fluid (gas-solid two-phase flow) with compressed air from each injection port. The ejection ports of the plurality of nozzles 502 are circular. A plurality of nozzles 502 are arranged side by side along the X axis (refer to FIG. 4). Furthermore, the negative direction of the X axis is the feed direction described later.

As shown in FIGS. 2 and 3, the distribution mechanism 550 has an introduction pipe 551, a dispersion member 552, and a plurality of outlet pipes 553. Inside the dispersing member 552, a dispersing chamber 552S is divided. One end of the introduction pipe 551 is connected to the supply part 2, and the other end is connected to the dispersion chamber 552S. The dispersing member 552 is provided with an introduction port 551H communicating with the introduction pipe 551. The number of the plurality of outlet pipes 553 is the same as the number of the plurality of nozzles 502. One end of each of the plurality of outlet pipes 553 is connected to one of the plurality of nozzles 502, and the other end is connected to the dispersion chamber 552S. The dispersing member 552 is provided with a lead-out port 553H corresponding to a plurality of lead-out pipes 553, respectively.

The abrasive material 3 is extruded from the take-out part 50 to the introduction pipe 551 of the nozzle unit U by the flow of compressed air. The air flow containing the abrasive 3 extruded into the introduction pipe 551 is supplied to the dispersion chamber 552S through the introduction pipe 551. The introduction pipe 551 may also include a straight portion 551S connected to the dispersion chamber 552S. By setting the linear portion 551S as a linear circular pipe with a predetermined length, the air flow containing the abrasive 3 is rectified before being supplied to the dispersion chamber 552S. That is, in the airflow containing the abrasive 3, the dispersion of the abrasive 3 can be promoted. For example, the tube length along the vertical direction (Z-axis direction) of the linear portion 551S may be 5 times or more of the inner diameter of the introduction tube 551 in the linear portion 551S, preferably 10 times or more. By appropriately setting the length of the linear portion 551S, the abrasive 3 can be efficiently dispersed.

The dispersion chamber 552S uniformly disperses the abrasive 3 supplied from the introduction pipe 551. The dispersion chamber 552S disperses the abrasive 3 in an aerosol state. The top surface 552A of the dispersion chamber 552S facing the inlet 551H is circular. Here, due to the distance (height H) between the inlet 551H and the top surface 552A, the uniformity of the aerosol concentration is impaired, or the pressure when the abrasive 3 is sprayed in the plurality of nozzles 502 is impaired. In order to maintain the uniformity of the aerosol concentration without affecting the spray pressure of the abrasive material 3 sprayed by the plurality of nozzles 502, the height H can also be set to 1/5 or more and 1/2 or less of the diameter D1 of the top surface.

The plurality of outlets 553H are arranged in an annular shape so as to surround the center of the top surface 552A of the dispersion member 552. The abrasive 3 supplied from the inlet 551H abuts against the circular top surface 552A facing the inlet 551H and is dispersed in an aerosol state. The aerosol-like abrasive material 3 is evenly dispersed from the center of the circular top surface 552A toward the outer edge. The abrasive 3 dispersed in the form of aerosol is respectively pushed out from the plurality of outlets 553H to the plurality of nozzles 502 via hoses, and is ejected by the plurality of nozzles 502. The plurality of outlets 553H can be configured to uniformly press out the abrasive 3 with respect to each of the plurality of nozzles 502. As an example, the outlet pipes 553 are arranged concentrically at equal intervals in the vicinity of the outer edge of the top surface 552A.

The moving part M is a driving part which changes the relative position of the to-be-processed object 4 and a plurality of nozzles 502. The moving part M can move the workpiece 4 and can move a plurality of nozzles 502, and can also move both the workpiece 4 and the plurality of nozzles 502. In this embodiment, a configuration in which the nozzle drive unit 504 and the workpiece drive unit 505 are provided as the moving unit M, and both the plurality of nozzles 502 and the workpiece 4 are moved will be described.

The processing table 503 is a table on which the to-be-processed object 4 is placed. The processing table 503 is arranged in the processing room 509. As shown in FIG. 4, the processing table 503 is placed in the jetting direction of the abrasive material 3 by the plurality of nozzles 502 so that the surface on which the workpiece 4 is placed is orthogonal to the extending direction (Z-axis direction) of the plurality of nozzles 502. It is placed on the to-be-processed object drive part 505. The surface of the processing table 503 on which the processed object 4 is placed may also be a surface on which the processed object 4 is adsorbed.

The nozzle driving unit 504 is arranged on the upper part of the housing 501. The nozzle driving unit 504 is connected to a plurality of nozzles 502. The nozzle driving unit 504 moves the plurality of nozzles 502 such that the spray area of the abrasive 3 and the workpiece 4 are relatively moved by the nozzles 502. The workpiece driving unit 505 is arranged at the lower part of the housing 501. The workpiece drive unit 505 is connected to the lower surface of the processing table 503. The workpiece drive unit 505 moves the processing table 503 on which the workpiece 4 is placed such that the spray area of the abrasive 3 and the workpiece 4 are moved relative to each other by a plurality of nozzles 502 jetting. The workpiece drive unit 505 is, for example, a drive mechanism such as an X-Y table. The trajectory (scanning trajectory) formed by the relative movement of the nozzle driving unit 504 and the workpiece driving unit 505 is controlled by the control unit 9.

The control unit 9 controls the operation of the moving unit M. The control unit 9 is composed of, for example, a computing device such as a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), and HDD (Hard Disk Drive). : Hard disk drive) and other general-purpose computers such as memory devices and communication devices. The control unit 9 may also be a motion controller such as PLC (Programmable Logic Controller) or DSP (Digital Signal Processor). The control unit 9 may also be a hardware that controls the entire jet processing device 1.

FIG. 5 is a schematic diagram showing a trajectory (scanning trajectory) in a direction parallel to the surface of the workpiece 4 formed by the relative movement of the workpiece 4 and a plurality of nozzles 502. The scan trajectory represents a zigzag shape along the X-axis direction and the Y-axis direction orthogonal to the X-axis direction. The control unit 9 controls the operation of the moving unit M such that the workpiece 4 and the plurality of nozzles 502 trace such a scanning trajectory. The description is based on the scanning trajectory of the figure. First, adjust the relative positions of the workpiece 4 and the plurality of nozzles 502 in such a way that the ejection area of the nozzle 502A, which is arranged in the most positive direction of the X-axis, among the plurality of nozzles 502 overlaps the starting point S on the scanning track. . The starting point S is set in the most positive direction of the X-axis and the most negative position of the Y-axis in the scanning trajectory. In this case, since the other nozzles are arranged in a manner connected in the negative direction of the X axis, the spray areas of the other nozzles overlap with other starting points (not shown) arranged in the negative direction of the X axis when viewed from the starting point S2. Hereinafter, the spray area of the nozzle 502A will be described as the "spray area".

First, the control unit 9 controls the operation (first scan) of the workpiece driving unit 505 so that the ejection area moves from the starting point S in the Y-axis direction (first direction) parallel to the surface of the workpiece 4. Specifically, the workpiece 4 is moved in the negative direction of the Y axis. Then, when the injection area reaches the end of the negative direction of the Y-axis, the control unit 9 moves the injection area along the X-axis direction (second direction) orthogonal to the Y-axis direction and parallel to the surface of the workpiece 4 The operation of the nozzle drive unit 504 is controlled (second scan). Specifically, the plurality of nozzles 502 are moved along the negative direction of the X axis (also referred to as the feed direction in this specification). Then, the control unit 9 controls the operation of the workpiece driving unit 505 so that the ejection area moves in the Y-axis direction. Specifically, the workpiece 4 is moved in the positive direction of the Y axis. When the spray area reaches the upper end in the first direction, the control unit 9 controls the operation of the nozzle drive unit 504 so that the spray area moves in the feed direction. By alternately repeating this action, the scanning trajectory is drawn. Here, the gas-solid two-phase flow sprayed from the nozzle 502A has a velocity distribution, so that the grinding force will be different according to the position from the nozzle 502A. The movement distance in the feed direction is set in consideration of the difference in the grinding force. The movement distance in the feed direction may not include 0, and may be less than or equal to the diameter of the injection port of the nozzle 502A, for example.

(Screening Department) The screening part 6 collects the powder and granular body 8 produced in the process of the processing part 5 spraying the to-be-processed object 4. The screening part 6 transports the reusable abrasive 3 in the powder and granular body 8 to the storage part 10 described later. The screening part 6 conveys the grinding material 3 that is not reusable in the granular material 8 and the cutting powder generated by the peeling of the workpiece 4 to the dust collector 702 described later. The screening unit 6 has a recovery duct 601 and a classification unit 602. The recovery pipe 601 is a tube connected to the processing part 5 at one end and connected to the classification part 602 at the other end. The recovery duct 601 transports the powder and granular material 8 from the processing section 5 to the classification section 602 of the screening section 6 on the airflow generated by the dust collector 702 described later.

The upper part of the classification part 602 communicates with the dust collection duct 701 mentioned later. The classification part 602 communicates with the storage part 10 at the lower part. The classification part 602 is a mortar-shaped hollow structure, for example. The classification part 602 classifies the powder and granular material 8 conveyed from the recovery duct 601 into reusable abrasive 3, non-reusable abrasive 3, and cutting powder. The classification unit 602 is, for example, a cyclone separator.

The powder and granular body 8 revolves in the classification unit 602, for example. The reusable abrasive 3 in the powder body 8 is heavier than the non-reusable abrasive 3 and cutting powder. The reusable abrasive 3, which is a heavier particle, drops to the lower part of the classification part 602 and is collected due to gravity when the rotation speed is reduced. When the compressed air does not flow into the storage part 10, and the valve between the classification part 602 and the storage part 10 is opened to connect the storage part 10 and the classification part 602, the reusable abrasive material collected in the lower part of the classification part 602 is collected 3 is sent to the storage section 10 of the supply section 2. The abrasive material 3 and the cutting powder that are not reusable as lighter particles are sent to the dust collecting duct 701 which is connected to the upper part of the classification part 602 and described later.

(Dust collection department) The dust collecting part 7 collects the non-reusable abrasive 3 and cutting powder recovered by the screening part 6. The dust collecting part 7 has a dust collecting duct 701 and a dust collector 702. The dust collecting duct 701 is a tube connected to the classification part 602 at one end and connected to the dust collector 702 at the other end. The dust collecting duct 701 conveys the non-reusable abrasive 3 and cutting powder from the classification part 602 to the dust collector 702.

The dust collector 702 collects the non-reusable abrasive 3 and cutting powder conveyed from the dust collecting duct 701. The dust collector 702 has a suction source and a filter which are not shown in the figure. By operating the suction force generating source, an airflow toward the dust collector 702 is generated in the processing chamber 509, the recovery duct 601, the classification part 602, and the dust collection duct 701 which are connected to the dust collector 702. Due to the action of the source of attraction, the unusable abrasive 3 and cutting powder conveyed from the dust collecting duct 701 are sucked into the dust collector 702 together with air. In the dust collector 702, the filter is arranged on the path between the dust collecting duct 701 and the source of attraction. The filter captures the abrasive material 3 and cutting powder that can no longer be used. With the filter, only air is transferred to the source of attraction. The captured non-reusable abrasive 3 and cutting powder can be recovered by removing the filter.

(Steps of jet processing device) The spray processing steps performed by the spray processing device 1 will be described. Here, the blasting process of forming through holes for forming via holes and through holes using a printed circuit board material as the workpiece 4 will be described as an example. The printed circuit board is made by pasting a conductor foil such as copper on the surface of an insulator sheet such as polyimide, polyester, etc. and a glass epoxy substrate. FIG. 6 is a flowchart showing the overall steps of the jet processing apparatus 1 of the embodiment.

25 μm以上

80 μm以下之開口。First, the preparation step of the workpiece 4 (step S1) is performed. In step S1, a mask pattern is formed on the surface of the object 4 to be processed. Specifically, the workpiece 4 is heated, and the mask material is pasted on the heated workpiece 4 (the surface thereof) by a laminator. Then, the to-be-processed object 4 to which the mask material is pasted is arrange|positioned in an exposure machine. In the exposure machine, a CCD (Charge Coupled Device) camera is used to align the position of the original pattern with the workpiece 4 for exposure. Then, the exposed workpiece 4 is placed in a developing machine. In the developing machine, by rotating the workpiece 4 on one side while spraying the developer on the other side, a mask pattern of the resist layer is formed. Here, the resist layer is provided with at least

25 μm or more

Openings below 80 μm.

Then, the preparation step of the jet processing apparatus 1 is performed (step S2). In step S2, the distance between the plurality of nozzles 502 and the workpiece 4 based on the nozzle driving unit 504, the injection pressure of the abrasive material 3 injected by the plurality of nozzles 502, and the like are adjusted. For the adjustment of the injection pressure, first, compressed air is supplied to a plurality of nozzles 502 via a hose. Then, the injection pressure of the abrasive 3 is adjusted to a predetermined pressure by operating the pressure valve. After adjusting the injection pressure, stop the supply of compressed air.

In addition, in step S2, the control unit 9 sets the operation mode of the moving unit M. The operation mode includes scanning trajectories, moving speeds, and scanning times of a plurality of nozzles 502. The setting information indicating the operation mode is stored in the storage device of the control unit 9.

After finishing these adjustments, the abrasive 3 is put into the storage part 10 of the supply part 2. Put in an amount of abrasive 3 corresponding to the amount of spray.

Then, the step of setting the workpiece 4 (S3) is performed. In step S3, the workpiece 4 is placed on the surface of the processing table 503 facing the plurality of nozzles 502 through the observation window provided in the processing chamber 509.

Then, the blast processing step (S4) is performed. In step S4, first, compressed air is supplied to the storage unit 10 through the pressurizing duct 73. Next, by supplying compressed air to the inside of the storage section 10 to pressurize the inside of the storage section 10, the valve between the storage section 10 and the classification section 602 is closed. Thereby, the storage part 10 is sealed. Next, the abrasive 3 is pressurized by compressed air in the storage part 10 and moves to the filling part 20. Next, the abrasive 3 is filled in the groove of the roller 30 by the pressing force of compressed air. The abrasive material 3 is pressurized by compressed air through the storage part 10 and the filling part 20, thereby densely filling each groove. Next, the roller 30 is rotated by the power of the driving unit 40 at a speed set by the control unit 9. Next, the abrasive 3 filled in the groove is moved to the position of the take-out part 50 by the rotation of the roller 30 in the rotation process (S21), thereby forming a flow path. Next, the compressed air supplied from the pipeline is supplied to the flow path. The compressed air generates airflow in a direction parallel to the extending direction of the groove. The abrasive material 3 filled in the groove is extruded to the nozzle unit U by the airflow generated by the compressed air.

The abrasive material 3 extruded into the nozzle unit U together with the compressed air faces the dispensing mechanism 550 of the nozzle unit U. The abrasive 3 supplied to the introduction pipe 551 of the distribution mechanism 550 is rectified when passing through the introduction pipe 551, and is initially dispersed. The abrasive 3 supplied to the dispersion member 552 is dispersed in an aerosol state in the dispersion chamber 552S. The dispersed abrasive 3 is pressed out from the outlet pipe 553 together with the compressed air.

The abrasive 3 extruded from the outlet pipe 553 is supplied to the plurality of nozzles 502 via hoses. By spraying the abrasive 3 together with compressed air as a mixed fluid from a plurality of nozzles 502, the workpiece 4 is spray-processed. The workpiece drive unit 505 makes the workpiece 4 and the processing table 503 on the workpiece drive unit 505 perform relative to the plurality of nozzles 502 based on the scan trajectory, scan speed, and number of scans set in the preparation step (S3). Relative movement. The workpiece 4 is processed based on the scan trajectory set by the control unit 9. Here, a plurality of nozzles 502 are arranged in a row so as to be connected along the X-axis direction. Therefore, the number of scans can be set to be less than when one nozzle is arranged. In addition, compared with the case where one nozzle is arranged or the case where a plurality of nozzles are arranged in a row so as to be connected along the Y-axis direction, the movement distance in the feed direction can be set to be shorter. That is, by reducing the number of scans and shortening the moving distance in the feed direction, it is possible to reduce excessive collision of the abrasive 3 with the resist layer. As a result, damage to the resist layer can be reduced. Therefore, the surface of the workpiece 4 exposed from the opening (hole) of the resist layer can be effectively cut, so that the through hole can be formed with high accuracy. If the damage of the resist layer is large, the opening of the resist layer will be damaged before the hole penetrates. By using the spray processing device 1 of one embodiment to perform spray processing, it is possible to form an aspect ratio (the ratio of the depth h of the through hole to the diameter d of the opening of the resist layer, that is, h/d) of 0.8 or more and 2.0 or less Through hole.

In the jet processing device 1 of one embodiment, by making the jet openings of the plurality of nozzles 502 circular, and adjusting the intervals between the plurality of nozzles 502, it is possible to obtain a small deviation in the velocity distribution of the jet flow as a whole And can carry out a wide range of processing jet stream. When the jet opening of the nozzle is rectangular in a manner that forms a jet with the same processing width as the jet processing device 1 of one embodiment, the velocity distribution of the jet has a large deviation. As a result, compared with the jet processing device 1 of one embodiment, in a jet processing device with a large deviation in the velocity distribution of the jet, it is necessary to increase the number of scans or shorten the movement distance in the feed direction. Therefore, the jet processing apparatus 1 of one embodiment can perform jet processing with higher accuracy. By processing with the jet processing apparatus 1 of one embodiment, the ratio of the diameter Da of the through hole formed on the surface of the workpiece 4 to the diameter Db of the opening formed in the resist layer is Da/Db It is a hole above 0.84 and below 0.94.

When the set scanning and processing are completed, stop spraying the abrasive 3 and compressed air from the plurality of nozzles 502.

In addition, in the blast processing step (S4), the dust collection step is also performed. In the dust collection step, the dust collector 702 generates an air flow that sucks the powder and granular material 8 and air toward the dust collector 702 inside the processing chamber 509, the recovery duct 601, the classification part 602, and the dust collection duct 701. The air flow generated by the operation of the dust collector 702 causes the powder and granular body 8 generated in the processing chamber 509 to move to the processing chamber 509, the recovery duct 601, and the classification unit 602 in sequence. Through the classification by the classification unit 602, the reusable abrasive 3 is recovered to the storage unit 10, and the non-reusable abrasive 3 and cutting powder are recovered to the dust collector 702 through the dust collecting duct 701.

Finally, the process of recovering the processed material (S5) is performed. In step S5, the processed object 4 passes through the observation window of the housing 501 and is recovered from the surface of the processing table 503.

The embodiments of the present invention have been described above, but the present invention is not limited to the above-mentioned embodiments. Appropriate changes can be made within the scope of not changing the spirit of the invention. In addition, the above-mentioned embodiments can be combined within a range that does not contradict each other.

(Effects of implementation) As described above, according to the jet processing apparatus 1 of the present embodiment, by arranging a plurality of nozzles 502 in a row in a manner connected along the feed direction in the scanning track, a wide jet area can be obtained. With the distribution mechanism 550, the abrasive material 3 can be uniformly supplied to the plurality of nozzles 502, so all the plurality of nozzles 502 can have the same processing capability. As a result, it is possible to obtain a jet stream with a small velocity distribution in the area where it collides with the workpiece 4 (that is, a jet area with a small deviation in processing ability).

Since the jet processing apparatus 1 includes a plurality of nozzles 502, the time for jetting the abrasive 3 to the workpiece 4 can be shortened. Therefore, it is possible to reduce the processing time and the damage to the workpiece 4 at the same time. In addition, since the distribution mechanism 550 that can uniformly distribute the abrasive 3 supplied from the single storage portion 10 to the plurality of nozzles 502 is provided, the overall processing accuracy is improved.

The distribution mechanism 550 is configured to be sequentially connected to the introduction pipe 551, the dispersing member 552, and the outlet pipe 553, so that it is possible to provide substantially the same processing capability to all nozzles with a simple structure. By making the top surface 552A of the dispersing chamber 552S of the dispersing member 552 circular, and the outlet pipe is arranged in a circular ring to surround the center of the top surface 552A, the aerosol of uniform concentration can be dispersed in the dispersing chamber 552S The abrasive 3 in the state is supplied to all the plural nozzles 502. The dispersion chamber 552S can obtain an excellent dispersion effect by setting the height to be 1/5 or more and 1/2 or less of the diameter of the top surface 552A. In addition, by setting the straight portion 551S connected to the dispersion chamber 552S in the introduction pipe 551 as a round pipe whose pipe length is 5 times or more of the inner diameter, the abrasive 3 can be introduced into the dispersion member 552 in an initially dispersed state.

Since a jet stream with a small velocity distribution can be obtained, it is possible to reduce the number of times the workpiece 4 is moved relative to the plurality of nozzles 502 to draw a scanning path, or it is possible to extend the moving distance in the feed direction (not including 0 and being The diameter of the jet port of the plurality of nozzles 502 is less than or equal to). As a result, it is possible to reduce excessive collision between the abrasive 3 and the workpiece 4, and therefore it is possible to reduce damage to the workpiece 4.

By adopting a configuration in which the storage portion 10 is pressurized to extrude the abrasive 3 through the supply portion 2 to the introduction pipe 551 toward the distribution mechanism 550, the pressure loss of the compressed air can be reduced. As a result, it is possible to improve the processing capability, and thereby it is possible to reduce the number of times the workpiece 4 is moved relative to the nozzle to draw a scanning trajectory. In addition, since the processing ability of the abrasive 3 is high, the time for bringing the abrasive 3 into contact with the workpiece 4 can be shortened. Therefore, it is possible to shorten the processing time and reduce the damage to the workpiece 4 at the same time.

A plurality of nozzles 502 are arranged side by side in a manner of being connected along the X-axis direction. By arranging a plurality of nozzles 502 in this way, it is possible to reduce the processing time and the damage to the workpiece 4 at the same time.

25 μm以上

80 μm以下般極小徑之抗蝕劑圖案之情形時，若縱橫比(h/d)為0.8以上2.0以下，則亦能夠以通常之噴射加工中難以實現之精度進行加工。又，若形成於被加工物4之貫通孔之直徑Da相對於形成於抗蝕劑層之開口部之直徑Db之比即Da/Db為0.84以上0.94以下，則能夠以通常之噴射加工中難以實現之精度進行加工。The jet processing device 1 can both shorten the processing time and reduce the damage to the workpiece 4. In the case of hole processing and groove processing, a resist layer is provided on the workpiece 4, but the spray processing apparatus 1 can reduce damage to the resist layer. For example, when the printed circuit board material, which is an example of the workpiece 4, is sprayed to open through holes such as through-holes and vias, damage to the resist layer can be reduced, thereby enabling high-precision spraying. Processing. That is, by performing blast processing using the blast processing apparatus 1 of this embodiment, even when the opening is formed, it is

25 μm or more

In the case of a resist pattern with an extremely small diameter of 80 μm or less, if the aspect ratio (h/d) is 0.8 or more and 2.0 or less, it can be processed with a precision that is difficult to achieve in normal blast processing. In addition, if the ratio of the diameter Da of the through hole formed in the workpiece 4 to the diameter Db of the opening formed in the resist layer, that is, Da/Db is 0.84 or more and 0.94 or less, it can be difficult to perform in normal jet processing. The precision achieved is processed.

According to the jet processing apparatus 1 and the jet processing method of this embodiment, it is possible to perform high-precision processing as described above by jetting the abrasive 3 from only one side. In addition, the verticality of the space can be improved. It is particularly suitable for forming holes for forming via holes or through holes as fine holes.

(Variation example) The dispersing member 552 in the embodiment can be not only a cylindrical shape, but also a conical shape or a truncated cone shape. Since these shapes are shapes whose diameters are continuously expanded from the introduction part toward the bottom surface, the abrasive 3 can be dispersed in a more uniform concentration aerosol.

1: Jet processing device 2: Supply Department 3: Abrasive materials 4: processed objects 5: Processing Department 6: Screening Department 7: Dust collection department 8: Powder and granule 9: Control Department 10: Storage Department 20: Filling part 30: Roll 40: Drive 50: Take out part 73: Compression catheter 501: Shell 502: Nozzle 503: processing table 504: Nozzle Drive 505: Workpiece drive unit 509: Processing Room 550: distribution agency 551: introduction tube 551S: straight part 552: Dispersion Component 552A: Top surface 553: export tube 601: Recovery Conduit 602: Classification Department 701: Dust Collection Conduit 702: Dust Collector M: Mobile Department U: Nozzle unit

FIG. 1 is an overall cross-sectional view showing the jet processing apparatus of the embodiment. Fig. 2 is a perspective view showing the distribution mechanism. Figure 3 is a perspective cross-sectional view of the dispensing device of Figure 2; Fig. 4 is a schematic diagram showing the disposition state of the nozzles. Fig. 5 is a schematic diagram showing a scanning trajectory generated by the relative movement of the nozzle and the workpiece by the moving part. Figure 6 is a flow chart of the blasting process.

1: Jet processing device

2: Supply Department

3: Abrasive materials

5: Processing Department

6: Screening Department

7: Dust collection department

8: Powder and granule

9: Control Department

10: Storage Department

20: Filling part

30: Roll

40: Drive

73: Compression catheter

501: Shell

502: Nozzle

503: processing table

504: Nozzle Drive

505: Workpiece drive unit

509: Processing Room

550: distribution agency

551: introduction tube

551S: straight part

552: Dispersion Component

553: export tube

601: Recovery Conduit

602: Classification Department

701: Dust Collection Conduit

702: Dust Collector

M: Mobile Department

Claims (9)

A jet processing device, which is provided with: A nozzle unit, which has a plurality of nozzles for spraying abrasive materials and compressed air onto the surface of the workpiece, and a distribution mechanism for distributing the abrasive materials to the plurality of nozzles; The storage part stores the above-mentioned abrasive materials inside; A supply part that supplies the abrasive material stored in the storage part to the nozzle unit; and A moving part that moves at least one of the plurality of nozzles and the workpiece to change the relative position of the plurality of nozzles and the workpiece. Such as the jet processing device of claim 1, wherein the above-mentioned distribution mechanism includes: A dispersing member, the inside of which is divided into a dispersing chamber for dispersing the above-mentioned abrasive material in aerosol form; An introduction pipe that connects the supply part and the dispersion chamber, and supplies the abrasive material of the supply part to the dispersion chamber; and An outlet pipe connects the plurality of nozzles with the dispersion chamber, and supplies the aerosol-like abrasive in the dispersion chamber to the plurality of nozzles. The jet processing device of claim 2, wherein the dispersing member is provided with an inlet communicating with the inlet pipe and an outlet communicating with the outlet pipe, The top surface of the dispersion chamber opposite to the inlet is circular, The lead-out port is arranged in an annular shape so as to surround the center of the top surface. The jet processing device of claim 3, wherein the distance between the top surface in a direction orthogonal to the top surface and the introduction port is 1/5 or more and 1/2 or less of the diameter of the top surface. The jet processing device according to any one of claims 2 to 4, wherein the introduction pipe system includes a round pipe with a straight portion connected to the dispersion member, The length of the straight portion is more than 5 times the inner diameter of the introduction tube in the straight portion. Such as the jet processing device of any one of claims 1 to 5, which further includes a control unit that controls the operation of the above-mentioned moving unit, The control unit controls the moving unit to alternately perform the first scan and the second scan, In the first scan, at least one of the plurality of nozzles and the workpiece is moved in a first direction parallel to the surface of the workpiece, In the second scan, at least one of the plurality of nozzles and the workpiece is moved in a second direction orthogonal to the first direction and parallel to the surface of the workpiece, The movement distance in the second scan is less than the diameter of the ejection openings of the plurality of nozzles, The plurality of nozzles are arranged side by side so as to be connected in the second direction. The jet processing apparatus according to any one of claims 1 to 6, further provided with a pressurizing conduit that supplies compressed air to the storage portion, pressurizes the inside of the storage portion, and polishes the The material is extruded to the nozzle unit described above. A jet processing method, which is the jet processing method of the jet processing device according to any one of claims 1 to 7, comprising the following steps: preparing a printed board material as the object to be processed; forming and setting on one surface of the printed board material Have

25 μm or more

A resist layer with an opening of 80 μm or less; and the above-mentioned abrasive material is sprayed onto the one surface of the above-mentioned printed circuit board material containing the above-mentioned resist layer, and a through hole is formed in the above-mentioned printed circuit board material through the opening of the resist layer; The ratio h/d of the depth h of the through hole to the diameter d of the opening of the resist layer is 0.8 or more and 2.0 or less. The jet processing method of claim 8, wherein the ratio Da/Db of the diameter Da of the through hole to the diameter Db of the opening of the resist layer is 0.84 or more and 0.94 or less.

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