CN101626842B - Nozzle, dry cleaner, dry cleaner system - Google Patents
Nozzle, dry cleaner, dry cleaner system Download PDFInfo
- Publication number
- CN101626842B CN101626842B CN2008800073382A CN200880007338A CN101626842B CN 101626842 B CN101626842 B CN 101626842B CN 2008800073382 A CN2008800073382 A CN 2008800073382A CN 200880007338 A CN200880007338 A CN 200880007338A CN 101626842 B CN101626842 B CN 101626842B
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- Prior art keywords
- nozzle
- discharge opening
- dry cleaner
- pressurized air
- spues
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- 238000010926 purge Methods 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 86
- 238000007599 discharging Methods 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000011521 glass Substances 0.000 description 8
- 239000000428 dust Substances 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 238000007664 blowing Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
- B08B5/023—Cleaning travelling work
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Cleaning In General (AREA)
- Nozzles (AREA)
- Liquid Crystal (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Provided is a dry cleaner capable of removing an adhesion excellently from the surface of a substrate. The dry cleaner for removing an adhesion from a discharged object (10) comprises a nozzle (16) arranged at a predetermined spacing from the discharged object and including a bulging shape (16c) having a reserving portion (16a) for reserving compressed air therein and a slit discharge port (16b) communicating with the reserving portion (16a). The bulging shape (16c) has a predetermined curvature as such a sectional shape as is perpendicular, at the position of the discharge port, to the extending direction of the discharge port. This discharge port is formed at the position the closest to the discharged object. Further comprised is a housing (18) containing the nozzle therein and including an opening (18a) for passing both the compressed air to be discharged from the discharge port of the nozzle in the direction substantially perpendicular to the discharged object and the compressed air having swept the surface of the discharged object, and a passage (18b) for passing the compressed air having flown along the bulging shape of the nozzle having the predetermined curvature. Still further comprised is a discharge portion (18c) for discharging the compressed air having flown along the bulging shape of the predetermined curvature.
Description
Technical field
The present invention relates to be used for the employed nozzle of being removed by the attachment on the object that spues of dry cleaner, possess the dry cleaner of this nozzle and possess the dry cleaner system of this dry cleaner.
Background technology
In the assembly operation of liquid crystal display, use the spherical powder (wadding) of between liquid crystal indicator is with employed two glass substrates of screen uniformly dispersing and the gap of two glass substrates is kept uniform method.The wadding of distribution because when wadding was dispersed on the glass substrate with the state of aggegation, the gap of two glass substrates was just inhomogeneous, scatters wadding again so need be removed.So, as the device that the wadding that scatters on the glass substrate is removed and motion has such dust arrester: possess first, second jetting nozzle and of being configured between them attracts nozzle with ultrasonic generator, to the surface of glass substrate ejection ultrasound wave air, attract wadding (for example disclosing flat 7-60211 communique) from first, second jetting nozzle with reference to No. the 3009694th, the practical new case of Japan's login, Japan's patented claim by the attraction nozzle of central authorities.
In this dust arrester, attract nozzle not attract consequently to exist attached to the wadding of glass substrate and do not removed clean situation fully with high-level efficiency from the ultrasound wave air of first, second jetting nozzle ejection.
Summary of the invention
The object of the present invention is to provide a kind of can attached to by the attachment of spew surface for example the employed nozzle of dry cleaner well removed of wadding and small particle diameter dust class, possess the dry cleaner of this nozzle and possess the dry cleaner system of this dry cleaner.
Nozzle of the present invention be configured to have the interval of regulation with the object that spued and be used for to the described roughly direction of the quadrature pressurized air that spues of object that spued, wherein, have in the described compressed-air actuated reservoir of internal storage, possesses the narrow slit shape discharge opening that is communicated with this reservoir, at the convex form that the cross sectional shape with described discharge opening bearing of trend quadrature that forms described discharge opening position has regulation curvature, described discharge opening is set at the immediate position of the described object that spued with described convex form.
According to nozzle of the present invention, because the convex form that the cross sectional shape with discharge opening bearing of trend quadrature in formation discharge opening position has regulation curvature, so by pressurized air from discharge opening by to by spued object roughly the direction of quadrature spue, peel off and make by the attachment of spew surface, the pressurized air that includes the attachment of peeling off utilizes wall attachment effect and advances along the convex form with regulation curvature.Therefore, can prevent that the attachment once peeled off from adhering to the quilt object that spues once more.
Nozzle of the present invention be configured to have the interval of regulation with the object that spued and be used for to the described roughly direction of the quadrature pressurized air that spues of object that spued, wherein, have in the described compressed-air actuated reservoir of internal storage, possesses the narrow slit shape discharge opening that is communicated with this reservoir, at the convex form with regulation curvature that the cross sectional shape with described discharge opening bearing of trend quadrature that forms described discharge opening position has flat shape and forms continuously with it, described discharge opening is set at the substantial middle portion of described flat shape.
According to nozzle of the present invention, owing to have flat shape and continuous with it the convex form that forms with regulation curvature at the cross sectional shape that forms the discharge opening position with discharge opening bearing of trend quadrature, so by pressurized air from discharge opening by to by spued object roughly the direction of quadrature spue, peel off and make by the attachment of spew surface, the pressurized air that includes the attachment of peeling off utilizes flat shape and wall attachment effect and advances along the convex form with regulation curvature.Therefore, can prevent that the attachment once peeled off from adhering to the quilt object that spues once more.
Dry cleaner of the present invention is used for being removed by the attachment on the object that spues, wherein, comprise: nozzle, it is configured to be had the interval of regulation by the object that spues and have in the compressed-air actuated reservoir of internal storage with described, possesses the narrow slit shape discharge opening that is communicated with this reservoir, at the convex form that the cross sectional shape with described discharge opening bearing of trend quadrature that forms described discharge opening position has regulation curvature, described discharge opening is set at the immediate position of the described object that spued with described convex form; Housing, it accommodates described nozzle in inside, have from the described discharge opening of described nozzle to the described roughly described pressurized air that spues of the direction of quadrature and purge the described peristome that is passed through by the described pressurized air of spew surface of object that spued, form the described compressed-air actuated path of advancing along the convex form with regulation curvature of described nozzle; Exhaust portion, it is used for the described pressurized air of advancing along the convex form with described regulation curvature is discharged.
According to dry cleaner of the present invention, owing to from the discharge opening of nozzle pressurized air is blown out to the direction of quadrature roughly for the object that spued, so can be peeling off reliably attached to the attachment of the object that spued.The convex form that the cross sectional shape with discharge opening bearing of trend quadrature in formation nozzle discharge opening position has regulation curvature, so from discharge opening to spued object roughly the direction of quadrature spued and purged the object surfaces that spued, include from the pressurized air of the attachment that object peels off by spuing and utilize wall attachment effect and in housing, advance along convex form with regulation curvature.Therefore, can prevent that the attachment of being stripped from from dispersing outside housing, can prevent that the attachment once peeled off from adhering to the quilt object that spues once more.
Dry cleaner of the present invention is used for being removed by the attachment on the object that spues, wherein, comprise: nozzle, it is configured to be had the interval of regulation by the object that spues and have in the compressed-air actuated reservoir of internal storage with described, possesses the narrow slit shape discharge opening that is communicated with this reservoir, at the convex form of the regulation curvature that has flat shape with the cross sectional shape of described discharge opening bearing of trend quadrature and form continuously with it that forms described discharge opening position, described discharge opening is set at the substantial middle portion of described flat shape; Housing, it accommodates described nozzle in inside, have from the described discharge opening of described nozzle to the described roughly described pressurized air that spues of the direction of quadrature and purge the described peristome that is passed through by the described pressurized air of spew surface of object that spued, form the described compressed-air actuated path of advancing along the convex form with regulation curvature of described nozzle; Exhaust portion, it is used for the described pressurized air of advancing along the convex form with described regulation curvature is discharged.
According to dry cleaner of the present invention, owing to from the discharge opening of nozzle pressurized air is blown out to the direction of quadrature roughly for the object that spued, so can be peeling off reliably attached to the attachment of the object that spued.The convex form that the cross sectional shape with discharge opening bearing of trend quadrature in formation nozzle discharge opening position has regulation curvature, so from discharge opening to spued object roughly the direction of quadrature spued and purged the object surfaces that spued, include from the pressurized air of the attachment that object peels off by spuing and utilize flat shape and wall attachment effect and in housing, advance along convex form with regulation curvature.Therefore, can prevent that the attachment of being stripped from from dispersing outside housing, can prevent that the attachment once peeled off from adhering to the quilt object that spues once more.
Dry cleaner of the present invention described exhaust portion along the described discharge opening bearing of trend of described nozzle and be configured in the top of described nozzle, and possess the pipe shape parts that have narrow slit shape opening on top, the described path that described pressurized air is advanced is that path by certain altitude roughly is the open communication of the described peristome of described housing and described pipe shape parts.
According to dry cleaner of the present invention, air from the peristome of housing including of sucking from the attachment peeled off by the object that spues is advanced with roughly certain flow velocity in path, owing to be that narrow slit shape opening from pipe shape parts top sucks in pipe shape parts, so relative width direction and can attracting equably.Advance with roughly certain flow velocity in path owing to include from the air of the attachment that object peels off by spuing, so can prevent the attachment of once peeling off adheres to the inwall of path once more, even and the supposition situation that has attachment to adhere to the inwall of path once more, also be difficult to fall.
Dry cleaner system of the present invention possesses: described dry cleaner and the supporting part that carries the object that spued, the nozzle of described dry cleaner and the described object that spued keep certain interval mutually, and relatively move to the direction with the length direction quadrature of the described discharge opening of described nozzle.
Dry cleaner system of the present invention possesses: described dry cleaner to the carrying mechanism of the direction carrying of the length direction quadrature of the described discharge opening of described nozzle or the described object that spued to the carrying mechanism of carrying with the direction of the length direction quadrature of the described discharge opening of described nozzle.
According to dry cleaner system of the present invention, because spued object and nozzle relatively move to the direction with the length direction quadrature of the discharge opening of nozzle, so object also can promptly carry out removing of attachment even large-scale quilt spues.
According to nozzle of the present invention, the convex form that the cross sectional shape with discharge opening bearing of trend quadrature in formation discharge opening position has regulation curvature, so from discharge opening to spued object roughly the direction of quadrature spued and purged by the object surfaces that spues, include from the pressurized air of the attachment that object peels off by spuing and utilize wall attachment effect and advance along convex form with regulation curvature.Therefore, can prevent that the attachment of being stripped from from dispersing outside housing, can prevent that the attachment once peeled off from adhering to the quilt object that spues once more.
According to dry cleaner of the present invention, owing to from the discharge opening of nozzle pressurized air is blown out to the direction of quadrature roughly for the object that spued, so can be peeling off reliably attached to the attachment of the object that spued.The convex form that the cross sectional shape with discharge opening bearing of trend quadrature in formation nozzle discharge opening position has regulation curvature, so from discharge opening to spued object roughly the direction of quadrature spued and purged the object surfaces that spued, include from the pressurized air of the attachment that object peels off by spuing and utilize wall attachment effect and in housing, advance along convex form with regulation curvature.Therefore, can prevent that the attachment once peeled off from adhering to the quilt object that spues once more.
According to dry cleaner system of the present invention, because spued object and nozzle relatively move to the direction with the length direction quadrature of the discharge opening of nozzle, so object also can promptly carry out removing of attachment even large-scale quilt spues.
Description of drawings
Fig. 1 is the figure of the expression first embodiment dry cleaner system structure;
Fig. 2 is the cut-open view of the expression first embodiment dry cleaner structure;
Fig. 3 is used to illustrate the mobile figure of pressurized air that spues from the nozzle of first embodiment;
Fig. 4 is the cut-open view of the expression second embodiment dry cleaner structure;
Fig. 5 is used to illustrate the mobile figure of pressurized air that spues from the nozzle of second embodiment;
Fig. 6 is the cut-open view of expression the 3rd embodiment dry cleaner structure;
Fig. 7 is used to illustrate the mobile figure of pressurized air that spues from the nozzle of the 3rd embodiment;
Fig. 8 is the curve of the relation of the compressed-air actuated attraction power that blows out pressure and exhaust apparatus of expression;
Fig. 9 is a cut-open view of representing not utilize the dry cleaner structure of wall attachment effect.
Embodiment
Following dry cleaner with reference to the description of drawings first embodiment of the invention.Fig. 1 is the figure that expression possesses the dry cleaner system structure of the first embodiment dry cleaner.In the following description, set the rectangular coordinate system shown in Fig. 1, with reference to this XYZ rectangular coordinate system each position component relation on one side be described on one side.The XYZ rectangular coordinate system is set X-axis and Y-axis for base plate carrying portion surperficial parallel, and it is direction with the surperficial quadrature of base plate carrying portion that the Z axle is set for.In fact XYZ rectangular coordinate system among the figure sets the XY plane for the face parallel with surface level, and it is vertical direction that the Z axle is set for.
As shown in Figure 1, dry cleaner system 2 possesses: being arranged at dry cleaner 4 and the carrying that dry cleaner is provided with portion 3 is the base plate carrying portion 8 of liquid crystal indicator with the substrate 10 of screen by the object that spues.At this, substrate 10 is the glass substrates with large-scale rectangular shape, and base plate carrying portion 8 has the base plate carrying face of the rectangular shape bigger than substrate 10 in order to carry large substrate 10.
Dry cleaner 4 is supplied to pressurized air from air compressor 5 via supply pipe 6.The compressed and supplied air is spued from the narrow slit shape discharge opening 16b of nozzle 16 (with reference to Fig. 2), and the liquid crystal indicator that is carried to base plate carrying portion 8 blows out with substrate 10 surfaces of screen, is the attachment that scatters on the substrate 10 that wadding (with the dust class of small particle diameter, below identical) is removed.Promptly, pressurized air is spued and blows out to substrate 10 surfaces from the narrow slit shape discharge opening 16b of nozzle 16, making the attachment that scatters on the substrate 10 is that wadding is peeled off from substrate 10, the pressurized air that comprises the wadding of being stripped from is carried out exhaust via gas outlet 12 by the exhaust apparatus 14 that possesses fan blower, come like this wadding on the substrate 10 is removed.At this moment, base plate carrying portion 8 by travelling belt etc. by to the direction of arrow shown in Figure 1 (Y direction), that is,, relatively move mutually with substrate 10 the maintenance certain intervals and whole of substrate 10 removed wadding by discharge opening 16b with the direction carrying of the length direction quadrature of discharge opening 16b.
Fig. 2 is the cut-open view (at the Width central portion and cut-open view narrow slit shape discharge opening orthogonal directions of dry cleaner) that is used to illustrate dry cleaner 4 structures.Even the cross sectional shape of dry cleaner all has same shape in any position of dry cleaner Width.Arrow among the figure is represented the moving direction of substrate.
As shown in Figure 2, dry cleaner 4 possesses: be used for the spue compressed-air actuated nozzle 16 and accommodate the housing 18 of nozzle 16 to the surperficial 10a of substrate 10.Nozzle 16 has the shape of extending to the Width of substrate 10 (directions X), has the width bigger a little than the Width of substrate 10.Nozzle 16 portion within it has the reservoir 16a that stores via supply pipe 6 compressed and supplied air from air compressor 5.At this, reservoir 16a is formed at the roughly whole width in the nozzle 16.And nozzle 16 possesses the narrow slit shape discharge opening 16b that is communicated with reservoir 16a.As shown in Figure 2, the convex form 16c that the cross sectional shape with discharge opening 16b bearing of trend quadrature of nozzle 16 in the position that forms discharge opening 16b has regulation curvature, discharge opening 16b is arranged on the substantial middle portion of convex form 16c, that is, be arranged on the immediate position of surperficial 10a with substrate 10 nozzle 16 being configured to following discharge opening 16b of situation that surperficial 10a with substrate 10 has predetermined distance.The convex form 16c of the regulation curvature that nozzle 16 is had discharge opening 16b-it is R1 that the radius-of-curvature of Y side is set at, the radius-of-curvature of the Y side of discharge opening 16b is set at when being R2, can be R1=R2, also can be R1 ≠ R2, the size of R1, R2 can distinguish suitably select only.
Discharge opening 16b from the narrow slit shape spues to substrate 10 via reservoir 16a from air compressor 5 compressed and supplied air, arrives the surperficial 10a of substrate 10.At this, it is 0.01～30mm, preferred 0.5～5mm for well that discharge opening 16b is become with the distance setting of substrate surface 10a, and the pressurized air that spues as the discharge opening 16b from the narrow slit shape is for example set 0.01～0.95MPa, preferred 0.1～0.5MPa for for well blowing out pressure.As shown in Figure 3, after the peristome 18a of the pressurized air that spues from the discharge opening 16b of narrow slit shape by housing 18 arrives the surperficial 10a of substrate 10, make attached to the wadding of the surperficial 10a of substrate 10 and peel off.Then, the pressurized air that includes the wadding of being stripped from by peristome 18a and shown in arrow among the figure like that, the convex form 16c with regulation curvature along nozzle 16 advances in path 18b, be deflated device 14 via exhaust portion 18c and gas outlet 12 and attract, for example discharged to factory is outside.At this moment, by making the base plate carrying portion 8 that carries substrate move and can remove the wadding of the whole surperficial 10a of substrate 10 to the Y direction.
According to the dry cleaner of this first embodiment, owing to from the discharge opening of nozzle pressurized air is blown out to the direction of quadrature roughly for substrate, so can peel off attachment reliably attached to substrate.The convex form that the cross sectional shape with discharge opening bearing of trend quadrature in formation nozzle discharge opening position has regulation curvature, so from discharge opening to substrate roughly the direction of quadrature spued and purged the surface of substrate, include from the pressurized air of the attachment of strippable substrate and utilize wall attachment effect and in housing, advance along convex form with regulation curvature.Therefore, can prevent that the attachment of being stripped from from dispersing outside housing, can prevent that the attachment once peeled off from adhering to the quilt object that spues once more.Utilize wall attachment effect and advance owing to include the pressurized air of being stripped from attachment, so can reduce the needed attraction power of exhaust apparatus along the convex form of nozzle.
The dry cleaner of second embodiment of the invention is described with reference to the accompanying drawings.This dry cleaner and first embodiment similarly are used for by dry cleaner system.Fig. 4 is the cut-open view (at the Width substantial middle portion of dry cleaner and the cut-open view of narrow slit shape discharge opening orthogonal directions) that is used to illustrate dry cleaner 30 structures.Even the cross sectional shape of dry cleaner all has same shape in any position of dry cleaner Width.Arrow among the figure is represented the moving direction of substrate.
As shown in Figure 4, dry cleaner 30 possesses: be used for the spue compressed-air actuated nozzle 32 and accommodate the housing 34 of nozzle 32 to the surperficial 10a of substrate 10.Nozzle 32 has the shape of extending to the Width of substrate 10 (directions X), has the width bigger a little than the Width of substrate 10.Nozzle 32 has inner the reservoir 32a that stores via supply pipe 6 compressed and supplied air from air compressor 5.At this, reservoir 32a is formed at the roughly whole width in the nozzle 32.And nozzle 32 possesses the narrow slit shape discharge opening 32b that is communicated with reservoir 32a.As shown in Figure 4, nozzle 32 is arranged on discharge opening 32b the substantial middle portion of flat shape 32c at the convex form 32d of the regulation curvature that has flat shape 32c with the cross sectional shape of discharge opening 32b bearing of trend quadrature and form continuously with it of the position that forms discharge opening 32b.The convex form 32d that 32 tools of nozzle have plenty of regulation curvature discharge opening 32b-it is R1 that the radius-of-curvature of Y side is set at, the radius-of-curvature of the Y side of discharge opening 32b is set at when being R2, can be R1=R2, also can be R1 ≠ R2, the size of R1, R2 can distinguish suitably select only.
Discharge opening 32b from the narrow slit shape spues to substrate 10 via reservoir 32a from air compressor 5 compressed and supplied air, arrives the surperficial 10a of substrate 10.At this, distance and the compressed-air actuated pressure that spues from discharge opening 32b of discharge opening 32b and the surperficial 10a of substrate 10, to blow out speed then preferred identical with first embodiment.As shown in Figure 5, after the peristome 34a of the pressurized air that spues from the discharge opening 32b of narrow slit shape by housing 34 arrives the surperficial 10a of substrate 10, make attached to the wadding of the surperficial 10a of substrate 10 and peel off.Then, the pressurized air that includes the wadding of being stripped from is advanced in path 34b along the flat shape 32c of nozzle 32 and convex form 32d with regulation curvature by peristome 34a, be deflated device 14 via exhaust portion 34c and gas outlet 12 and attract, discharged to the outside.At this moment, by making the base plate carrying portion 8 that carries substrate promptly move and can remove the wadding of the whole surperficial 10a of substrate 10 with the direction of the length direction quadrature of discharge opening 32b to the Y direction.
According to the dry cleaner of this second embodiment, owing to from the discharge opening of nozzle pressurized air is blown out to the direction of quadrature roughly for substrate, so can peel off attachment reliably attached to substrate.The convex form that the cross sectional shape with discharge opening bearing of trend quadrature in formation nozzle discharge opening position has regulation curvature, so from discharge opening to substrate roughly the direction of quadrature spued and purged the surface of substrate, include from the pressurized air of the attachment of strippable substrate and utilize wall attachment effect and in housing, advance along convex form with regulation curvature.Therefore, can prevent that the attachment of being stripped from from dispersing outside housing, the attachment that can prevent from once to peel off is once more to substrate attachment.Utilize wall attachment effect and advance owing to include the pressurized air of being stripped from attachment, so, also can comprise the compressed-air actuated exhaust of being stripped from wadding reliably even under the low situation of the attraction power of exhaust apparatus along the convex form of nozzle.
The dry cleaner of third embodiment of the invention is described with reference to the accompanying drawings.This dry cleaner and first embodiment similarly are used for by dry cleaner system.As shown in Figure 6, dry cleaner 50 possesses: be used for the spue compressed-air actuated nozzle 56 and accommodate the housing 58 of nozzle 56 to the surperficial 10a of substrate 10.Nozzle 56 has the shape of extending to the Width of substrate 10 (directions X), has the width bigger a little than the Width of substrate 10.Nozzle 56 has inner the reservoir 56a that stores via supply pipe 6 compressed and supplied air from air compressor 5.At this, reservoir 56a is formed at the roughly whole width in the nozzle 56.And nozzle 56 possesses the narrow slit shape discharge opening 56b that is communicated with reservoir 56a.As shown in Figure 6, the convex form 56c that the cross sectional shape with discharge opening 56b bearing of trend quadrature of nozzle 56 in the position that forms discharge opening 56b has regulation curvature is arranged on the immediate position of surperficial 10a with substrate 10 nozzle 56 being configured to following discharge opening 56b of situation that surperficial 10a with substrate 10 has predetermined distance.The convex form 56c of the regulation curvature that nozzle 56 is had discharge opening 56b-it is R1 that the radius-of-curvature of Y side is set at, the radius-of-curvature of the Y side of discharge opening 16b is set at when being R2, can be R1=R2, also can be R1 ≠ R2, the size of R1, R2 can distinguish suitably select only.
Discharge opening 56b from the narrow slit shape spues to substrate 10 via reservoir 56a from air compressor 5 compressed and supplied air, arrives the surperficial 10a of substrate 10.At this, discharge opening 56b is become with the distance setting of substrate surface 10a is 0.01～30mm, be preferably 0.5～5mm, for example sets 0.01～0.95MPa for, is preferably 0.1～0.5MPa blowing out pressure as the pressurized air that the discharge opening 56b from the narrow slit shape spues.As shown in Figure 7, after the peristome 58a of the pressurized air that spues from the discharge opening 56b of narrow slit shape by housing 58 arrives the surperficial 10a of substrate 10, make attached to the wadding of the surperficial 10a of substrate 10 and peel off.Then, the pressurized air that includes the wadding of being stripped from by peristome 58a and shown in arrow among the figure like that, the convex form 56c with regulation curvature along nozzle 56 advances in path 58b, in the path of the roughly certain altitude of the opening 60a of 58a of open communication portion and pipe shape parts 60, advance, be drawn into from opening 60a in the pipe shape parts 60, and be deflated device 14 via gas outlet 12 and attract, for example discharged to factory is outside.At this moment, by making the base plate carrying portion 8 that carries substrate move and can remove the wadding of the whole surperficial 10a of substrate 10 to the Y direction.
According to the dry cleaner of this 3rd embodiment, owing to from the discharge opening of nozzle pressurized air is blown out to the direction of quadrature roughly for substrate, so can peel off attachment reliably attached to substrate.The convex form that the cross sectional shape with discharge opening bearing of trend quadrature in formation nozzle discharge opening position has regulation curvature, so from discharge opening to substrate roughly the direction of quadrature spued and purged the surface of substrate, include from the pressurized air of the attachment of strippable substrate and utilize wall attachment effect and in housing, advance along convex form with regulation curvature.Therefore, can prevent that the attachment of being stripped from from dispersing outside housing, can prevent that the attachment once peeled off from adhering to the quilt object that spues once more.Utilize wall attachment effect and advance owing to include the pressurized air of being stripped from attachment, so can reduce the needed attraction power of exhaust apparatus along the convex form of nozzle.
Air from the peristome of housing including of sucking from the attachment peeled off by the object that spues since path have certain height and in path, advance with certain flow velocity, owing to be that narrow slit shape opening from pipe shape parts top sucks in pipe shape parts, so relative width direction and can attracting equably.Advance with certain flow velocity in path owing to include from the air of the attachment that object peels off by spuing, so can prevent the attachment of once peeling off adheres to the inwall of path once more, even and the supposition situation that has attachment to adhere to the inwall of path once more, also be difficult to fall.
In the above-described embodiments, base plate carrying portion 8 moves to the Y direction relative to dry cleaner 4 (30,50), and move to the Y direction relative to base plate carrying portion 8 (30,50) but also can be dry cleaner 4.That is, also can to the carrying of Y direction dry cleaner 4 be moved to the Y direction relative to base plate carrying portion 8 by dry cleaner 4 (30,50) being utilized carrying mechanisms such as travelling belt.
The quilt of the foregoing description object 10 that spues is liquid crystal indicators with the substrate 10 of screen, attachment is the wadding that scatters on quilt spues object 10, for example also can be the substrate, multifunctional membrane etc. of installation base plate, silicon wafer, field-emitter display screen and plasma display screen etc. that electronic component is installed by the object 10 that spues, attachment for example also can be the substrate cut bits, the first-class dust of spun yarn silk of number nm～number μ m etc.
In the above-described embodiments, the air compressor that is to use factory to be provided with to supply with pressurized air to dry cleaner, but also air compressor can be set in dry cleaner system, supplies with pressurized air to dry cleaner.
Below, for the dry cleaner that as the various embodiments described above, has used wall attachment effect with do not use the compressed-air actuated relation that blows out the attraction power of pressure and exhaust apparatus in the dry cleaner of wall attachment effect to describe from nozzle.At this, Fig. 8 be expression from the compressed-air actuated curve that blows out the attraction dynamic relation of pressure and exhaust apparatus of nozzle, Fig. 9 is a cut-open view of representing not utilize the dry cleaner structure of wall attachment effect.Dry cleaner 100 shown in Figure 9 possesses nozzle 120 in housing 110, the convex form that does not have regulation curvature with the cross sectional shape of discharge opening 130 bearing of trend quadratures in the position of the formation discharge opening 130 of nozzle 120.
Shown in the curve of Fig. 8, the interval (gap) of the discharge opening and the substrate of nozzle is changed between 0.5～2.0 (mm), the compressed-air actuated pressure that blows out from nozzle is changed between 0.2～0.5 (MPa), the attraction power (-) of measuring the exhaust apparatus under each situation (is set at 0.5 (mm) to the gap, attraction load when utilizing wall attachment effect is as 1.0, it is the number of nondimensionalization that the attraction load set of other situations is become), no matter under the situation of any condition, all be to utilize the attraction power of exhaust apparatus of wall attachment effect situation little.
More than Shuo Ming embodiment puts down in writing in order to understand the present invention easily, is not to put down in writing in order to limit the present invention.Therefore, purport is that disclosed each element of the foregoing description also comprises all design alterations under the technology of the present invention scope and equipollent etc.
The disclosure is relevant with the theme that the Japan's patented claim that proposed on March 8th, 2007 is comprised for 2007-58278 number, and the whole of the disclosure are clearly organized as the reference item at this.
As more than, nozzle of the present invention, dry cleaner and dry cleaner system are suitable for dust arrester.
Claims (5)
1. a dry cleaner is used for it is characterized in that being removed by the attachment on the object that spues,
Comprise: nozzle, it is configured to be had the interval of regulation by the object that spues and have in the compressed-air actuated reservoir of internal storage with described, possesses the narrow slit shape discharge opening that is communicated with this reservoir, at the convex form that the cross sectional shape with described discharge opening bearing of trend quadrature that forms described discharge opening position has regulation curvature, described discharge opening is set at the immediate position of the described object that spued with described convex form;
Housing, it accommodates described nozzle in inside, have from the described discharge opening of described nozzle to the described roughly described pressurized air that spues of the direction of quadrature and purge the described peristome that is passed through by the described pressurized air of spew surface of object that spued, form the described compressed-air actuated path of advancing along the convex form with regulation curvature of described nozzle;
Exhaust portion, it is used for the described pressurized air of advancing along described convex form with regulation curvature is discharged.
2. dry cleaner, it is used for it is characterized in that being removed by the attachment on the object that spues,
Comprise: nozzle, it is configured to be had the interval of regulation by the object that spues and have in the compressed-air actuated reservoir of internal storage with described, possesses the narrow slit shape discharge opening that is communicated with this reservoir, at the convex form of the regulation curvature that has flat shape with the cross sectional shape of described discharge opening bearing of trend quadrature and form continuously with it that forms described discharge opening position, described discharge opening is set at the substantial middle portion of described flat shape;
Housing, it accommodates described nozzle in inside, have from the described discharge opening of described nozzle to the described roughly described pressurized air that spues of the direction of quadrature and purge the described peristome that is passed through by the described pressurized air of spew surface of object that spued, form the described compressed-air actuated path of advancing along the convex form with regulation curvature of described nozzle;
Exhaust portion, it is used for the described pressurized air of advancing along the convex form with described regulation curvature is discharged.
3. as claim 1 or the described dry cleaner of claim 2, it is characterized in that described exhaust portion is along the described discharge opening bearing of trend of described nozzle and be configured in the top of described nozzle, and possess the pipe shape parts that have narrow slit shape opening on top,
The described path that described pressurized air is advanced is that path by certain altitude roughly is the open communication of the described peristome of described housing and described pipe shape parts.
4. dry cleaner system is characterized in that possessing: the spued supporting part of object of each described dry cleaner of claim 1～claim 3 and carrying,
The nozzle of described dry cleaner and the described object that spued keep certain interval mutually, and relatively move to the direction with the length direction quadrature of the described discharge opening of described nozzle.
5. dry cleaner system as claimed in claim 4, it is characterized in that possessing: described dry cleaner to the carrying mechanism of the direction carrying of the length direction quadrature of the described discharge opening of described nozzle or the described object that spued to the carrying mechanism of carrying with the direction of the length direction quadrature of the described discharge opening of described nozzle.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007058278 | 2007-03-08 | ||
| JP058278/2007 | 2007-03-08 | ||
| PCT/JP2008/052801 WO2008108168A1 (en) | 2007-03-08 | 2008-02-20 | Nozzle, dry cleaner, dry cleaner system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101626842A CN101626842A (en) | 2010-01-13 |
| CN101626842B true CN101626842B (en) | 2011-06-29 |
Family
ID=39738065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008800073382A Active CN101626842B (en) | 2007-03-08 | 2008-02-20 | Nozzle, dry cleaner, dry cleaner system |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4932897B2 (en) |
| KR (1) | KR101439575B1 (en) |
| CN (1) | CN101626842B (en) |
| TW (1) | TWI415695B (en) |
| WO (1) | WO2008108168A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104941956B (en) * | 2015-06-25 | 2017-02-01 | 无锡杰夫电声有限公司 | Device for clearing foreign matters in magnetic gaps of loudspeaker |
| JP6116629B2 (en) | 2015-08-11 | 2017-04-19 | 株式会社ハーモテック | Suction device |
| IT202000012211A1 (en) * | 2020-05-25 | 2021-11-25 | F M Srl | CAPTATION SYSTEM AND PRODUCTION PROCESS OF THIS CAPTATION SYSTEM |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1052969A (en) * | 1989-12-29 | 1991-07-10 | 邮电部成都电缆厂 | Compressed air drier |
| CN1065509A (en) * | 1991-03-29 | 1992-10-21 | 新坎坡有限公司 | Pneumatic device for cleaning air filters |
| WO2005056202A2 (en) * | 2003-12-15 | 2005-06-23 | Coreflow Scientific Solutions Ltd. | Apparatus and method for cleaning surfaces |
| JP2007014846A (en) * | 2005-07-06 | 2007-01-25 | Hugle Electronics Inc | Using method of substrate conveying and dust removing device, and substrate conveying and dust removing device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5466298A (en) * | 1993-10-01 | 1995-11-14 | James River Paper Company, Inc. | Web cleaning method |
| JP3919132B2 (en) * | 1997-04-22 | 2007-05-23 | シシド静電気株式会社 | Dust suction type dust remover |
| JP2002343761A (en) * | 2001-05-16 | 2002-11-29 | Kubota Corp | Laser cleaning apparatus and method therefor |
| US20050260771A1 (en) * | 2002-07-08 | 2005-11-24 | Mitsuaki Iwashita | Processing device and processing method |
| JP2004330162A (en) * | 2003-05-12 | 2004-11-25 | Hugle Electronics Inc | Clogging detecting device for dust-proof apparatus |
| US7757340B2 (en) * | 2005-03-25 | 2010-07-20 | S.C. Johnson & Son, Inc. | Soft-surface remediation device and method of using same |
| JP4948787B2 (en) | 2005-06-13 | 2012-06-06 | 東洋熱工業株式会社 | Dust remover |
| WO2007007407A1 (en) | 2005-07-07 | 2007-01-18 | Hugle Electronics Inc. | Spot cleaner |
-
2008
- 2008-02-20 JP JP2009502505A patent/JP4932897B2/en not_active Expired - Fee Related
- 2008-02-20 KR KR1020097018684A patent/KR101439575B1/en active IP Right Grant
- 2008-02-20 WO PCT/JP2008/052801 patent/WO2008108168A1/en active Application Filing
- 2008-02-20 CN CN2008800073382A patent/CN101626842B/en active Active
- 2008-03-06 TW TW097107837A patent/TWI415695B/en active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1052969A (en) * | 1989-12-29 | 1991-07-10 | 邮电部成都电缆厂 | Compressed air drier |
| CN1065509A (en) * | 1991-03-29 | 1992-10-21 | 新坎坡有限公司 | Pneumatic device for cleaning air filters |
| WO2005056202A2 (en) * | 2003-12-15 | 2005-06-23 | Coreflow Scientific Solutions Ltd. | Apparatus and method for cleaning surfaces |
| JP2007014846A (en) * | 2005-07-06 | 2007-01-25 | Hugle Electronics Inc | Using method of substrate conveying and dust removing device, and substrate conveying and dust removing device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101439575B1 (en) | 2014-09-11 |
| JP4932897B2 (en) | 2012-05-16 |
| CN101626842A (en) | 2010-01-13 |
| TWI415695B (en) | 2013-11-21 |
| WO2008108168A1 (en) | 2008-09-12 |
| TW200836849A (en) | 2008-09-16 |
| KR20090129420A (en) | 2009-12-16 |
| JPWO2008108168A1 (en) | 2010-06-10 |
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