TW202133788A - Maintenance device capable of improving the accuracy of determining an abnormality level of an X-ray thickness measurement device - Google Patents

Abstract

An object of the invention is to improve the accuracy of determining an abnormality level of an X-ray thickness measurement device. To achieve the object, a maintenance device of an embodiment includes a diagnostic part. The diagnostic part detects: a detection result of a tube voltage between a filament that emits electrons by the electric power from an X-ray control power supply and a target that irradiates X-ray to a thickness measurement target by the collision of the electrons emitted from the filament; a detection result of a tube current flowing between the filament and target; a detection result of at least one of the detection voltage and the detection current according to the intensity of the X-ray passing through the measurement target; a detection result of a driving voltage on the primary side of a transformer that transforms the electric power of the X-ray control power supply for being supplied to the filament; and a surge of measurement information including at least one of the detection results of the driving current flowing to the primary side of the transformer. Furthermore, according to a product of the occurrence frequency of the surge and the size of the surge, the diagnostic part determines the abnormality level of the X-ray thickness measurement device that calculates the thickness of the measurement target based on the detection signal.

Description

Maintenance device

The embodiment of the present invention relates to a maintenance device.

As one type of thickness meter, there is an X-ray thickness measuring device that measures the thickness of the steel plate to be measured in the production lines of various steel plates. The X-ray thickness measuring device is used to measure the thickness of the measuring object in a 24-hour iron/non-ferrous rolling line. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] JP 2010-167282 A

[The problem to be solved by the invention)

However, the X-ray thickness measuring device is equipped with an X-ray generator that irradiates the measurement object such as steel plate with X-rays. However, if the X-ray generator fails, it becomes impossible to measure the thickness of the measurement object, and it becomes impossible to perform in-line manufacturing. Control and monitor the thickness of the measurement target. Therefore, Figure Qiu replaces the X-ray generator before the X-ray generator fails to reduce the impact on the manufacturing line caused by the X-ray generator failure. (Technical means to solve the problem)

The maintenance device of the embodiment includes a diagnosis unit. The diagnostic unit detects the tube voltage between the electric wire that emits electrons by the electric power from the X-ray control power supply and the electrons emitted from the electric wire collide and irradiate the thickness of the target with X-rays. The detection result, the detection result of the tube current flowing between the electric wire and the target, the detection result of at least one of the detection voltage and the detection current corresponding to the intensity of the X-ray passing through the measurement object, and the detection result of the detection signal from the X-ray control power supply. A surge of measurement information in at least one of the detection result of the drive voltage on the primary side of the transformer where the power is transformed and supplied to the electric wire and the detection result of the drive current flowing to the primary side of the transformer. In addition, the diagnosis unit determines the abnormal level of the X-ray thickness measuring device that calculates the thickness of the object to be measured based on the detection signal based on the frequency of occurrence of the surge and the product of the magnitude of the surge.

The embodiments or modification examples exemplified below include the same constituent elements. Therefore, in the following, common symbols are given to the same constituent elements, and overlapping descriptions are partially omitted. The part included in the embodiment or the modification can be configured by replacing the part corresponding to the other embodiment or the modification. In addition, unless otherwise mentioned, the configuration or position of the part included in the embodiment or the modification is the same as the other embodiment or the modification.

Fig. 1 is a schematic diagram showing an example of the overall configuration of the X-ray thickness measurement system of the present embodiment.

First, using FIG. 1, an example of the overall configuration of the X-ray thickness measurement system of this embodiment will be described.

The X-ray thickness measurement system 10 uses the X-ray thickness measurement device 12 to measure the thickness of the measurement object 90 (for example, a steel plate), and generates the omen data 68 (see FIG. 2) necessary for diagnosing the abnormality of the X-ray thickness measurement device 12 It accumulates, and diagnoses the abnormality of the X-ray thickness measuring device 12.

As shown in FIG. 1, the X-ray thickness measurement system 10 of the present embodiment includes an X-ray thickness measurement device 12, an omen data server 14, a maintenance device 16, and a network 18. The network 18 is a LAN (Local Area Network) connecting the X-ray thickness measuring device 12, the predictive data server 14, and the maintenance device 16 so as to transmit and receive information to each other. In addition, the X-ray thickness measurement system 10 of the present embodiment can communicate with a host device provided outside the X-ray thickness measurement system 10 via a network such as the Internet in accordance with communication standards such as TCP/IP.

The X-ray thickness measuring device 12 irradiates the thickness measurement target 90 with X-rays, and measures the thickness of the measurement target 90 by the amount of X-rays passing through the measurement target 90. The X-ray thickness measurement device 12 includes a measurement unit 20, an X-ray control power supply 22, and a plate thickness calculation unit (control device) 24.

The measurement unit 20 irradiates the measurement target 90 with X-rays, and outputs at least one of a detection voltage or a detection current for calculating the thickness of the measurement target 90 to the plate thickness calculation unit 24 as a detection value. The measurement unit 20 of this embodiment includes a holding unit 26, a transformer 28, an X-ray generator 30, a detector 32, an output detection unit 34, a resistor 35, a transformer 37, and boosting circuits 39a and 39b.

The holding unit 26 holds: the transformer 28, the X-ray generator 30, the detector 32, the output detection unit 34, the resistor 35, the transformer 37, and the booster circuits 39a and 39b.

The transformer 28 transforms (for example, boosts) the power output from the X-ray control power supply 22 and supplies it to the filament 38 of the X-ray generator 30 described later.

The transformer 37 is a transformer that transforms (boosts) the voltage across the resistor 35.

The booster circuit 39a is a booster circuit that boosts the voltage applied to one end of the transformer 37 (the end on the electric wire 38 side).

The booster circuit 39b is a booster circuit that boosts the voltage applied to the other end of the transformer 37 (the end on the target 40 side).

The X-ray generator 30 generates X-rays by the power supplied from the X-ray control power supply 22 to irradiate the measurement target 90. The X-ray generator 30 of this embodiment includes an X-ray tube 36, an electric wire 38, and a target 40.

The X-ray tube 36 is, for example, a closed tube that maintains the inside in a vacuum state. The X-ray tube 36 accommodates and holds the electric wire 38 and the target 40 inside. The electric wire 38 emits electrons to the target 40 by the electric power supplied from the X-ray control power source 22 through the transformer 28. The target 40 irradiates the measurement target 90 with X-rays due to the collision of electrons emitted by the electric wire 38.

The detector 32 is arranged at a position facing the X-ray generator 30 with the measurement object 90 therebetween. The detector 32 of the present embodiment outputs the value of at least one of the detection voltage and the detection current corresponding to the intensity of the X-rays irradiated by the X-ray generator 30 and passing through the measurement target 90 to the output detection unit as a detection signal. 34. The detector 32 may also be, for example, an ionization box that outputs a detection voltage and a detection current corresponding to the incident X-ray.

The output detection unit 34 converts the detection signal output by the detector 32 and outputs it to the thickness calculation unit 24. For example, the output detection unit 34 may have an AD converter or the like, and output the value after digital conversion of the detection signal of the analog signal as a detection value for calculating the thickness of the measurement target 90.

The X-ray control power supply 22 is an example of a power supply, and supplies electric power to the electric wire 38 of the X-ray generator 30 through the transformer 28 in accordance with the power control signal from the plate thickness calculation unit 24. The X-ray control power supply 22 may also be connected to an external power supply such as a commercial power supply. In addition, the X-ray control power supply 22 has a drive detection unit 42 and a tube detection unit 44.

The drive detection unit 42 detects the drive voltage and drive current. The drive voltage is the value of the voltage on the primary side of the transformer 28, and is the value of the voltage of the power supplied by the X-ray control power supply 22. The drive current is the value of the current flowing to the primary side of the transformer 28, and is the value of the current of the power supplied by the X-ray control power supply 22. The drive detection unit 42 outputs the sensed (detected) drive voltage and drive current to the plate thickness calculation unit 24.

In this embodiment, the drive detection unit 42 uses an RTC (Real Time Clock, not shown) included in the X-ray control power supply 22 to obtain the time stamp that is the time when the drive voltage and drive current are detected. material. Next, the drive detection unit 42 adds the acquired time data to the detected drive voltage and drive current, and outputs it to the plate thickness calculation unit 24.

The tube detection unit 44 detects tube voltage and tube current. The tube voltage is the value of the voltage on the secondary side of the transformer 28 and is the value of the voltage between the wire 38 and the target 40. The tube current is the value of the current flowing on the secondary side of the X-ray generator 30 and is the value of the current flowing between the electric wire 38 and the target 40.

In this embodiment, the tube detection unit 44 detects the voltage at both ends of the resistor 35 as the tube voltage, and detects the value of the current flowing through the resistor 35 as the tube current. Next, the tube detection unit 44 outputs the sensed (detected) tube voltage and tube current to the plate thickness calculation unit 24.

In the present embodiment, the tube detection unit 44 uses an RTC (not shown) included in the X-ray control power supply 22 to obtain time data, which is a time stamp, when the tube voltage and tube current are detected. Next, the tube detection unit 44 adds the acquired time data to the detected tube voltage and tube current, and outputs it to the plate thickness calculation unit 24.

The plate thickness calculation unit 24 is in charge of the overall control of the X-ray thickness measuring device 12. The plate thickness calculation unit 24 may be a computer used by an operator or the like who measures the thickness of the measurement target 90 by the X-ray thickness measurement device 12.

Specifically, the plate thickness calculation unit 24 calculates the thickness of the measurement target 90 based on the detection value acquired by the output detection unit 34.

In addition, the plate thickness calculation unit 24 outputs to the X-ray control power supply 22 a power supply control signal indicating a drive voltage corresponding to the tube voltage of the power supplied to the X-ray generator 30. The plate thickness calculation unit 24 may also generate a power supply control signal that instructs the drive voltage set based on the tube voltage obtained by the tube detection unit 44.

In addition, the plate thickness calculation section 24 will include: the detection result of the detection value output by the output detection section 34, the detection result of the drive voltage obtained by the drive detection section 42, and the drive current obtained by the drive detection section 42 The measurement information 56 (refer to FIG. 2) of at least one of the detection result, the tube voltage detection result obtained by the tube detection unit 44, and the tube current detection result obtained by the tube detection unit 44 is output to the network 18 . In this embodiment, the thickness calculation unit 24 includes the maximum, minimum, and maximum values of the detection value, drive voltage, drive current, tube voltage, and tube current for each cycle (for example, 100 ms) set in advance. The measurement information 56 of the average value is output to the network 18. The thickness calculation unit 24 may also output the measurement information 56 by broadcasting, for example.

In this embodiment, the thickness calculation unit 24 outputs the measurement information 56 including the detection value among the detection value obtained by the output detection unit 304 and the thickness of the measurement object 90, but if the output includes the detection value and the measurement The measurement information 56 of at least any one of the thickness of the object 90 is not limited to this. For example, the plate thickness calculation unit 24 may output measurement information 56 including both the detection value and the thickness of the measurement target 90, or instead of the detection value, output measurement information 56 including the thickness of the measurement target 90.

In addition, in the present embodiment, the plate thickness calculation unit 24 outputs the measurement information 56 including the maximum value, minimum value, and average value of the detection value, drive voltage, drive current, tube voltage, and tube current to the network. Circuit 18, but if it is the detection value, drive voltage, drive current, tube voltage, and tube current of each maximum, minimum, and average value, the measurement information 56 that includes at least the maximum and minimum values is output to the network Road 18 is fine.

The omen data server 14 obtains the measurement information 56 multiple times by the plate thickness calculation unit 24, and stores data 68 (hereinafter referred to as omen data) indicating an abnormality of the X-ray thickness measuring device 12 generated by the plurality of measurement information 56. Refer to Fig. 2) for accumulation. Here, the omen data 68 is the statistics of the measurement information 56 obtained by the X-ray thickness measurement device 12. Then, the omen data server 14 outputs the measurement information 56 and the omen data 68 in accordance with the request from the maintenance device 16.

The maintenance device 16 is, for example, a computer used by a maintenance contractor who maintains the X-ray thickness measuring device 12. The maintenance device 16 diagnoses the abnormality of the X-ray thickness measuring device 12 based on the measurement information 56 and the sign data 68 obtained by the sign data server 14, and outputs the diagnosed result by the image or the like.

Fig. 2 is a block diagram showing an example of the functional configuration of the control system of the X-ray thickness measurement system of the present embodiment.

First, using FIG. 2, an example of the functional configuration of the plate thickness calculation unit 24 included in the X-ray thickness measuring device 12 will be described.

As shown in FIG. 2, the thickness calculation unit 24 includes a control-side processing unit 46 and a control-side storage unit 48.

The control-side processing unit 46 is in charge of the overall control of the X-ray thickness measuring device 12. The control-side processing unit 46 may also be a hardware processor such as a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit) that perform arithmetic processing and the like. The control-side processing unit 46 reads a program stored in the control-side storage unit 48 by a human, and develops the read program in the control-side storage unit 48 to execute various arithmetic processing.

The control-side processing unit 46 reads, for example, the measurement program 54 and functions as the receiving unit 50 and the calculation unit 52. Among them, part or all of the accepting unit 50 and the calculating unit 52 may also be implemented by circuits including ASIC (Application Specific Integrated Circuit) or FPGA (Field-Programmable Gate Array). It is composed of hardware.

The receiving unit 50 receives the measurement information 56 and outputs it to the calculation unit 52. The receiving unit 50 receives, for example, the detection value output by the output detection unit 34, the drive voltage detected by the drive detection unit 42, the drive current detected by the drive detection unit 42, and the detection value detected by the tube detection unit 44. The tube voltage and the tube current detected by the tube detection unit 44 are used as measurement information 56.

When the calculation unit 52 obtains the measurement information 56 from the reception unit 50, it calculates the thickness of the measurement target 90 based on the measurement information 56 and controls the X-ray thickness measurement device 12. For example, the calculation unit 52 calculates the thickness of the measurement target 90 based on the detection value. In this embodiment, the calculation unit 52 obtains a detection value from the output detection unit 34, and calculates the thickness of the measurement target 90 every time the detection value is obtained.

In addition, in the present embodiment, the calculation unit 52 is an RTC (not shown) included in the thickness calculation unit 24, and acquires time data that is a time stamp at the time of detection of the detection value. Next, the calculation unit 52 adds the acquired time data to the acquired detection value and the calculated thickness of the measurement target 90. In addition, the calculation unit 52 generates and outputs a power supply control signal that instructs the X-ray control power supply 22 to drive voltage so that the tube voltage and the tube current become preset voltages. In addition, the calculation unit 52 outputs the measurement information 56 to the network 18 by broadcasting.

The control-side memory unit 48 is equipped with ROM (Read Only Memory), RAM (Random Access Memory), and HDD (Hard Disk Drive) and other main memory devices and auxiliary Memory device. The control-side storage unit 48 stores the measurement program 54 executed by the control-side processing unit 46, the measurement information 56 obtained for the execution of the measurement program 54, and the like. The measurement program 54 can also be stored in CD-ROM (Compact Disc Read Only Memory) or DVD-ROM (Digital Versatile Disc Read Only Memory), etc. It can be read by a computer. It can be provided by the memory media that it takes, or it can be provided through the Internet and other networks.

Next, using FIG. 2, an example of the functional configuration of the omen data server 14 will be described. As shown in FIG. 2, the omen data server 14 has a omen-side processing unit 58 and an omen-side memory unit 60.

The omen-side processing unit 58 is in charge of the overall control of the omen data server 14. The omen-side processing unit 58 may also be a hardware processor such as a CPU and a GPU. The omen-side processing unit 58 reads the program stored in the omen-side memory unit 60, and expands the read program in the omen-side memory unit 60, thereby performing various arithmetic processing. The omen-side processing unit 58 reads the omen program 66, for example, and functions as the acquisition unit 62 and the omen unit 64. Part or all of the acquisition unit 62 and the omen unit 64 may also be constituted by hardware such as circuits including ASIC or FPGA.

The acquiring unit 62 acquires the measurement information 56 from the X-ray thickness measuring device 12. The acquisition unit 62 of this embodiment acquires at least one parameter (detection result) among the driving voltage, driving current, tube voltage, tube current, and detection value flowing to the network 18 a plurality of times, and the parameter detection is added. The measurement information 56 of the time or the time data at the calculated time is output to the omen section 64.

The acquisition unit 62 of the present embodiment acquires the measurement information 56 from the X-ray thickness measuring device 12 in a period longer than the time required for the generation of the omen data 68 by the omen unit 64 described later. That is, it is assumed that the period for obtaining the measurement information 56 by the obtaining unit 62 is longer than the time required for the generation of the omen data 68 by the omen unit 64. Thereby, it is possible to prevent a situation in which the processing load imposed on the foreboding data server 14 due to the generation of the foreboding data 68 by the foreboding unit 64 increases, and the acquisition of the measurement information 56 from the X-ray thickness measuring device 12 fails.

The omen unit 64 writes the measurement information 56 obtained by the obtaining unit 62 into the omen-side memory unit 60. Next, the omen unit 64 generates statistics of the measurement information 56 as omen data 68. Next, the omen unit 64 writes the generated omen data 68 to the omen-side memory unit 60.

In addition, the omen unit 64 outputs the measurement information 56 and omen data 68 accumulated in the omen-side memory unit 60 in accordance with a request from the maintenance device 16. In addition, the sign unit 64 notifies the external high-level device of the generated sign data 68 in accordance with communication standards such as analog or TCP/IP.

The omen-side memory unit 60 has a main memory device such as ROM, RAM, and HDD, and an auxiliary memory device. The omen-side storage unit 60 stores the omen program 66 executed by the omen-side processing unit 58 and omen data 68 generated by the execution of the omen program 66. The omen program 66 may also be provided by a storage medium that can be read by a computer, such as a CD-ROM or a DVD-ROM, or may be provided through a network such as the Internet.

Next, using FIG. 2, an example of the functional configuration of the maintenance device 16 will be described.

As shown in FIG. 2, the maintenance device 16 includes a maintenance-side processing unit 70, a maintenance-side memory unit 72, and a display unit 73.

The maintenance-side processing unit 70 is in charge of the overall control of the maintenance device 16. The maintenance-side processing unit 70 may also be a hardware processor such as a CPU and a GPU. The maintenance-side processing unit 70 reads the program stored in the maintenance-side memory unit 72 and expands the read program in the maintenance-side memory unit 72 to execute various arithmetic processing. The maintenance-side processing unit 70 reads the maintenance program 76, for example, and functions as the diagnosis unit 74. A part or all of the diagnostic unit 74 may also be constituted by hardware such as a circuit including an ASIC or FPGA.

The diagnosis unit 74 obtains the measurement information 56 and the omen data 68 output by the omen data server 14. In this embodiment, the diagnosis unit 74 obtains the measurement information 56 output by the omen data server 14, but it is not limited to this, and it can also be obtained by the X-ray thickness measurement device 12 (plate thickness calculation unit 24). Output measurement information 56.

In addition, the diagnosis unit 74 diagnoses an abnormality of the X-ray thickness measuring device 12 based on the acquired measurement information 56. Specifically, the diagnosis unit 74 obtains the product of the frequency of occurrence of a spike in the measurement information 56 and the magnitude of the spike based on the measurement information 56. Next, the diagnosis unit 74 determines the abnormal level of the X-ray thickness measuring device 12 based on the obtained product. Here, the abnormal level is the level at which the X-ray thickness measuring device 12 is close to the failure state.

According to the experimental results, it can be seen that there are two types of surges in the surge system of the measurement information 56: very large surges that occur discretely and small surges that occur continuously. Therefore, the abnormal level of the X-ray thickness measuring device 12 is preferably determined in consideration of both the frequency of occurrence of the spike of the measurement information 56 and the magnitude of the spike.

Therefore, as described above, the diagnosis unit 74 determines the abnormal level of the X-ray thickness measuring device 12 based on the product of the frequency of occurrence of the surge of the measurement information 56 and the magnitude of the surge. With this, even in the case of any type of surge that occurs in the measurement information 56 such as a very large surge that occurs discretely and a small surge that occurs continuously, the detection results of both types of surges can be reflected. The abnormal level of the X-ray thickness measuring device 12 is determined. As a result, the accuracy of determining the abnormal level of the X-ray thickness measuring device 12 can be improved.

In the present embodiment, the diagnosis unit 74 first removes the transition period data from the acquired measurement information 56. Here, the transition period data is the measurement information 56 in the transition period in which the measurement information 56 (for example, tube voltage) is changed. For example, the diagnosis unit 74 removes the transition period data from the initial measurement information 56 among the acquired measurement information 56. Here, the initial measurement information 56 is, for example, measurement information 56 until a predetermined time (for example, 1 minute, 10 minutes) elapses after the X-ray thickness measuring device 12 is activated.

Next, the diagnosis unit 74 sets the difference between the maximum value and the minimum value included in the initial measurement information 56 after the transition period data is removed, as shown in the following equation (1), in the fluctuation range of the measurement information 56. In this embodiment, the diagnosis unit 74 sets the fluctuation range of the measurement information 56 every 100 ms. In addition, the diagnosis unit 74 removes outliers from the fluctuation range of the measurement information 56. Next, the diagnosis unit 74 creates the Huart control chart or the R control chart of the fluctuation range after removing the outliers, and performs distortion correction on the Huart control chart or the R control chart. Variation range = (maximum value of measurement information 56)-(minimum value of measurement information 56)...(1)

Next, the diagnosis unit 74 obtains the upper limit management limit UCL and the lower limit management limit LCL of the fluctuation range of the measurement information 56 based on the repaired control chart or the R control chart for which the distortion has been corrected. With this, even when the measurement information 56 contains unnecessary data, or when the measurement information 56 contains distortion, it is possible to use the repaired control chart or the R control chart with distortion correction to find an appropriate upper limit. The management limit UCL and the lower management limit LCL are detected, and a surge of the measurement information 56 is detected. As a result, the accuracy of determining the abnormal level of the X-ray thickness measuring device can be improved. The diagnostic unit 74 is a unit that obtains the upper limit management limit UCL and the lower limit management limit LCL for the fluctuation ranges of the drive voltage, the drive current, the tube voltage, the tube current, and the detection value included in the measurement information 56.

After that, the diagnostic unit 74 includes the measurement information 56 of the detection target of the surge, and the measurement information 56 whose detection variation range exceeds the upper limit management limit UCL or the lower limit management limit LCL is regarded as the surge. Here, the measurement information 56 of the detection target of the surge is, for example, the measurement information 56 after a predetermined time has elapsed after the X-ray thickness measurement device 12 is activated.

In addition, the diagnosis unit 74 generates an indicator (hereinafter referred to as a level meter) indicating the abnormal level of the X-ray thickness measuring device 12, and causes the display unit 73 to display the generated level meter. The display unit 73 displays various information such as the omen data 68 output from the omen data server 14 and the level meter.

The maintenance-side memory unit 72 includes a main memory device such as ROM, RAM, and HDD, and an auxiliary memory device. The maintenance-side storage unit 72 stores maintenance programs 76 and the like executed by the maintenance-side processing unit 70. The maintenance program 76 may also be stored in a storage medium that can be read by a computer, such as a CD-ROM or a DVD-ROM, or may be provided through a network such as the Internet.

Next, a specific example of the process of calculating the upper limit management limit UCL and the lower limit management limit LCL by the diagnosis unit 74 of the maintenance device 16 will be described. In the following description, an example in which the diagnostic unit 74 calculates the upper limit management limit UCL and the lower limit management limit LCL of the tube voltage TV as an example of the measurement information 56 is described. However, the tube current, drive voltage, drive current, and detection value are also used. Similarly, the upper limit management limit UCL and the lower limit management limit LCL are calculated.

First, the process of removing the data during the transition period from the initial tube voltage TV (an example of the initial measurement information 56) by the diagnostic unit 74 will be described.

When the tube voltage TV is changed from a certain setting value to another setting value, it may take several seconds until the tube voltage TV detected by the tube detection unit 44 is stabilized. Therefore, when the diagnostic unit 74 changes the set value of the tube voltage TV, the tube voltage TV (an example of the transition period data) required to stabilize the tube voltage TV detected by the tube detection unit 44 is determined by Use the calculated tube voltage TV at the upper limit management limit UCL and the lower limit management limit LCL to remove. However, if the transition period data has been removed by the tube voltage TV obtained from the predictive data server 14, the diagnosis unit 74 may not perform the process of removing the transition period data by the tube voltage TV.

In this embodiment, the diagnosis unit 74 uses the local maximum (Local Maxima), and the transition period data is removed by the tube voltage TV. Specifically, the diagnosis unit 74 converts the average of the tube voltage TV into an absolute gradient value, and based on the absolute gradient value, sets the threshold value of the tube voltage TV judged to be the transition period data. Next, the diagnostic unit 74 extracts the tube voltage TV that exceeds the set threshold among the tube voltages TV, and among the extracted tube voltages TV, the tube voltage TV is different from the adjacent tube voltage TV. The collection of TV is removed as the data during the transition. Here, the adjacent tube voltage TV is the set value of the tube voltage TV that is closest to the tube voltage TV that is drawn out among the set values of the tube voltage TV that can be applied between the electric wire 38 and the target 40.

Alternatively, in the present embodiment, the diagnostic unit 74 uses batch averaging to remove the transition period data from the tube voltage TV. Specifically, if there are plural set values (for example, 60kV, 80kV, 100kV, 110kV, 120kV, 130kV, and 140kV) of the tube voltage TV that can be applied between the electric wire 38 and the target 40, and the allowable values of each set value When the limit is ±1 kV, the diagnosis unit 74 calculates the average of the tube voltage TV (for example, 200 tube voltages TV) actually detected by the tube detection unit 44 for each set value of the tube voltage TV. Next, the diagnosis unit 74 removes the tube voltage TV that does not match the average of the tube voltage TV calculated for the set value of each tube voltage TV as the transition period data.

Next, an example of the process of setting the fluctuation range of the initial tube voltage TV by the diagnosis unit 74 will be described.

In the present embodiment, the diagnosis unit 74 sets the difference between the minimum value and the maximum value of the tube voltage TV per 100 ms acquired by the omen data server 14 within the fluctuation range of the tube voltage TV.

FIG. 3 is a diagram for explaining an example of the setting process of the variation range by the X-ray thickness measurement system of this embodiment. In FIG. 3, the vertical axis represents the fluctuation range of the tube voltage TV, and the horizontal axis represents data points at which the detection result of the tube voltage TV can be recognized every predetermined period (for example, 100 ms).

In this embodiment, as shown in FIG. 3, the diagnosis unit 74 sets the (difference) between the maximum value TVmax and the minimum value TVmin of the tube voltage TV in each data point within the fluctuation range of the tube voltage TV.

Next, an example of the process of removing outliers from the fluctuation range of the initial tube voltage TV by the diagnosis unit 74 will be described.

In the present embodiment, the diagnostic unit 74 uses the interquartile range (IQR: Interquartile Range) from the variation range of the tube voltage TV until a predetermined period has elapsed after replacing the X-ray generator 30, and divides the outliers Remove. Specifically, the diagnosis unit 74 divides the 75th percentile (third quartile) and the 25th percentile (first quartile) into 1.5 *The range of variation outside the IQR is removed as an outlier (outlier).

4 is a diagram for explaining an example of outlier removal processing performed by the X-ray thickness measurement system of this embodiment. In FIG. 4, the vertical axis represents the fluctuation range of the tube voltage TV, and the horizontal axis represents data points at which the detection result of the tube voltage TV can be recognized for each predetermined period.

The diagnosis unit 74 removes the fluctuation range outside each of the 75th percentile and the 25th percentile of 1.5*IQR as outliers in the fluctuation range of the tube voltage TV. As a result, as shown in Figure 4, it can be seen that before and after removing the outliers, the fluctuation range of the tube voltage TV changes, and the surge that may also occur in the ordinary tube voltage TV is managed by the upper limit management limit UCL and the lower limit. The calculated tube voltage TV of the limit LCL is deleted.

In addition, in this embodiment, the diagnostic unit 74 uses a trimmed mean to divide the outliers from the variation range of the tube voltage TV after a preset time has passed after replacing the X-ray generator 30. Remove. Specifically, the diagnosis unit 74 sorts the fluctuation range of the tube voltage TV in ascending order, and then removes the fluctuation range of the tube voltage TV at a predetermined ratio from each of the minimum value and the maximum value as outliers. If the data set of tube voltage TV acquired by the acquisition unit 62 is an unstable data set, or the data set of the tube voltage TV has an extremely biased distribution, the diagnosis unit 74 uses a truncated average to control The variation range of the voltage TV removes outliers. In this way, it is possible to create a Schwart control chart or an R control chart with a purposeful standard deviation limit.

When removing the outliers from the variation range of the tube voltage TV, either of the above two methods can be used. The tube voltage TV system surge until the initial period of the life cycle of the X-ray generator 30 has passed is very small, and the outlier can be removed by IQR. Therefore, the diagnostic unit 74 removes outliers by IQR based on the fluctuation range of the tube voltage TV until a predetermined period elapses after replacing the X-ray generator 30.

On the other hand, if the fluctuation range of the tube voltage TV in the second half of the life cycle of the X-ray generator 30 is removed by IQR, the number of surges increases, and it falls between the upper limit management limit UCL and the lower limit management limit LCL. It is calculated that there is a possibility that the surge caused by the second half of the life cycle of the X-ray generator 30 may be considered to be an abnormal level. Therefore, the diagnostic unit 74 uses the truncated average to remove the outliers from the fluctuation range of the tube voltage TV after a predetermined period has elapsed after replacing the X-ray generator 30.

Next, a description will be given of the process of creating the Schwart control chart or the R control chart of the fluctuation range of the tube voltage TV in the initial stage by the diagnostic unit 74.

First, the diagnosis unit 74 creates the Huart control chart or the R control chart of the fluctuation range after removing the outliers. The Xiuhuat control chart and the R control chart are simple and powerful tools in the statistical management of the measurement information 56. In addition, the Xiuhua special control chart and the R control chart system are widely used and applied in the industrial field.

However, the Xiuhuat control chart and the R control chart are based on the assumption that the distribution of the measurement information 56 that is statistically managed is a normal distribution or a roughly normal distribution. However, the measurement information 56 is information indicating the life cycle of the X-ray generator 30. Therefore, the measurement information 56 in a certain period (for example, the second half of the life cycle of the X-ray generator 30) is due to the deterioration of the X-ray generator 30, and the number of noise increases. Therefore, the accuracy distribution of the data set of the measurement information 56 is often expressed as a gamma distribution or a Weibull distribution.

FIG. 5 is a diagram for explaining an example of the correction processing of the skewness of the repaired control chart or the R control chart by the X-ray thickness measurement system of the present embodiment. In FIG. 5, the vertical axis represents the number of detection results of the tube voltage TV, and the horizontal axis represents the fluctuation range of the tube voltage TV.

As shown in Fig. 5, the distribution of the fluctuation range of the tube voltage TV from which outliers have been removed is based on a gamma distribution or a Weber distribution in which the fluctuation range of the tube voltage TV becomes larger than the average of the fluctuation range of the tube voltage TV. Distribution to express. Therefore, there is no need to correct the skewness of the Xiuhuat control chart or the R control chart. If the Xiuhuat control chart or the R control chart is used to calculate the upper limit management limit UCL and the lower limit management limit LCL, there is a reason for the X-ray thickness measurement device 12 Possibility to reduce the detection accuracy of surges caused by abnormalities.

Therefore, in this embodiment, the diagnosis unit 74 corrects the skewness of the repair chart or the R chart of the tube voltage TV. In this way, it is possible to calculate the upper limit management limit UCL and the lower limit management limit LCL using the Xiuhuat control chart or the R control chart created based on the assumption that the measurement information 56 becomes a normal distribution or an approximately normal distribution. As a result, the surge caused by the abnormality of the X-ray thickness measuring device 12 can be detected with higher accuracy.

Specifically, the diagnosis unit 74 uses the following equations (2) and (3) to calculate the upper limit management limit UCL and the lower limit management limit LCL of the Xiuhuat control chart with the corrected skewness. In equations (2) and (3), the horizontal bar above R is the average of the fluctuation range of the tube voltage TV, T is an arbitrary value, and d _R is the value corrected by the skewness of the Xiuhuat control chart (hereinafter referred to as Is the skewness correction value), CL is the center line of the Xiuhuat control chart, σ _R is the standard deviation of the tube voltage TV, and K(R) is the skewness of the tube voltage TV.

Fig. 6 is a diagram showing an example of an R control chart of tube voltage created by the X-ray thickness measurement system of the present embodiment. In FIG. 6, the vertical axis represents the fluctuation range of the tube voltage TV, and the horizontal axis represents data points that can identify the detection results of the tube voltage TV for each preset period.

As shown in FIG. 6, the diagnosis unit 74 uses the above-mentioned equations (2) and (3) to calculate the upper limit management limit UCL and the lower limit management limit LCL of the R control chart of the tube voltage TV. Next, the diagnostic unit 74 detects the tube voltage TV whose fluctuation range exceeds the upper limit management limit UCL or the lower limit management limit LCL among the tube voltages TV of the detection target of the surge as the surge.

Next, a specific example of the process of determining the abnormal level of the X-ray thickness measuring device 12 by the diagnosis unit 74 will be described. In the following description, an example in which the diagnostic unit 74 determines the abnormal level of the X-ray thickness measuring device 12 based on the detection result of the tube voltage TV is described, but the tube current, driving voltage, driving current, and detection value are the same. The abnormal level of the X-ray thickness measuring device 12 is determined.

7 and 8 are diagrams showing an example of the surge of the tube voltage TV detected by the X-ray thickness measurement system of this embodiment. In FIGS. 7 and 8, the vertical axis represents the fluctuation range of the tube voltage TV, and the horizontal axis represents data points that can identify the detection result of the tube voltage TV for each preset period.

The types of the surge of the tube voltage TV are mainly divided into two types. Type 1 is shown in Fig. 7, where large surges are generated discretely. The other type is shown in Fig. 8, where smaller surges continuously occur. Therefore, the abnormality of the X-ray thickness measuring device 12 is expressed by both of the large spikes that occur discretely and the small spikes that occur continuously.

Therefore, the diagnosis unit 74 determines the abnormal level of the X-ray thickness measuring device 12 based on the product of the frequency of occurrence of the surge of the tube voltage TV and the magnitude of the surge (for example, the fluctuation range of the tube voltage TV). Thereby, even in the case where the measurement information 56 has discretely generated very large surges and continuously generated small surges of any type, the detection results of both types of surges can be reflected in X The abnormal level of the wire thickness measuring device 12 is determined. As a result, the accuracy of determining the abnormal level of the X-ray thickness measuring device 12 can be improved.

Fig. 9 is a diagram showing an example of the frequency of occurrence of tube voltage surges detected by the X-ray thickness measurement system of the present embodiment. In FIG. 9, the vertical axis indicates the frequency of occurrence of the surge of the tube voltage TV every predetermined time (for example, one hour), and the horizontal axis indicates the time when the surge of the tube voltage TV is detected.

FIG. 10 is a diagram showing an example of the magnitude of the tube voltage surge detected by the X-ray thickness measurement system of this embodiment. In FIG. 10, the vertical axis represents the magnitude of the surge of the tube voltage TV for each predetermined time, and the horizontal axis represents the time for detecting the surge of the tube voltage TV.

The diagnostic unit 74 establishes a flag for the detection result of the tube voltage TV whose fluctuation range exceeds the upper limit management limit UCL or the lower limit management limit LCL (hereinafter referred to as the surge flag) among the tube voltage TV of the detection target of the surge. . Next, as shown in FIG. 9, the diagnosis unit 74 calculates the sum of the number of surge flags for each predetermined time as the frequency of occurrence of the surge of the tube voltage TV. In addition, as shown in FIG. 10, the diagnosis unit 74 calculates the detection result of the tube voltage TV (for example, the fluctuation range of the tube voltage TV) that establishes the surge flag every predetermined time as the magnitude of the surge.

FIG. 11 is a diagram showing an example of the calculation result of the product of the frequency and the magnitude of the tube voltage surge caused by the X-ray thickness measurement system of the present embodiment. In FIG. 11, the vertical axis represents the product of the frequency and magnitude of the surge of the tube voltage TV for each predetermined time, and the horizontal axis represents the time when the surge of the tube voltage TV is detected.

As shown in FIG. 11, the diagnostic unit 74 calculates the product of the frequency and magnitude of the surge of the tube voltage TV for each predetermined time as the abnormality of the surge of the tube voltage TV. Next, the diagnosis unit 74 sets the maximum value X among the abnormalities for each predetermined time to the highest abnormality level. Next, the diagnosis unit 74 uses the peak hold technique to classify the abnormality of the tube voltage TV for each predetermined time into a plurality of abnormal levels (for example, 4 abnormal levels). Thereby, the diagnosis unit 74 determines the abnormal level of the X-ray thickness measuring device 12 at each predetermined time.

For example, as shown in Table 1 below, the diagnosis unit 74 classifies a surge with an abnormality degree equal to or greater than the maximum value X as the highest abnormality level: 4. In addition, as shown in Table 1 below, the diagnosis unit 74 classifies a surge with an abnormality degree greater than or equal to 3×(maximum value X/4) and less than or equal to maximum value X as an abnormality level: 3. In addition, as shown in Table 1 below, the diagnosis unit 74 classifies a surge of 2×(maximum value X/4) or more and less than 3×(maximum value X/4) as an abnormality level: 2. In addition, as shown in Table 1 below, the diagnosis unit 74 classifies a surge with a maximum value X/4 or more and an abnormality degree less than 2×(maximum X/4) as an abnormality level: 1. In addition, as shown in Table 1 below, the diagnosis unit 74 classifies a surge with an abnormality degree that does not reach the maximum value X/4 as an abnormality level: 0.

FIG. 12 is a diagram showing an example of the cumulative sum of the occurrence frequency of tube voltage surges detected by the X-ray thickness measurement system of the present embodiment. In FIG. 12, the vertical axis represents the cumulative sum of the frequency of occurrence of the tube voltage TV surge for each predetermined time, and the horizontal axis represents the time when the tube voltage TV surge is detected.

FIG. 13 is a diagram showing an example of the sum of the magnitude of the tube voltage surge detected by the X-ray thickness measuring system of this embodiment. In FIG. 13, the vertical axis represents the sum of the magnitude of the surge of the tube voltage TV for each predetermined time, and the horizontal axis represents the time when the surge of the tube voltage TV is detected.

As shown in FIG. 12, the diagnosis unit 74 calculates the cumulative sum of the frequency of occurrence of the surge of the tube voltage TV for each predetermined time. In addition, the diagnosis unit 74 calculates the cumulative sum of the magnitude of the tube voltage TV for each predetermined time as shown in FIG. 13.

FIG. 14 is a diagram showing an example of calculation results of the cumulative sum of the frequency of occurrence of tube voltage surges and the product of the cumulative sum of magnitudes caused by the X-ray thickness measurement system of the present embodiment. In FIG. 14, the vertical axis represents the product of the cumulative sum of the occurrence frequency of the tube voltage TV surge and the cumulative sum of the magnitude for each predetermined time, and the horizontal axis represents the time when the tube voltage TV surge is detected.

As shown in FIG. 14, the diagnostic unit 74 calculates the cumulative sum of the frequency of occurrence of the surge of the tube voltage TV for each predetermined time and the product of the cumulative sum of the magnitude of the surge as the abnormality of the surge of the tube voltage TV. Spend. Next, the diagnosis unit 74 sets the maximum value to the highest abnormality level among the calculated abnormality degrees. Next, the diagnosis unit 74 classifies the abnormality of the tube voltage TV into a plurality of abnormal levels (for example, 4 abnormal levels) by using the peak hold technique.

FIG. 15 is a diagram showing an example of an abnormal level gauge displayed by the X-ray thickness measurement system of this embodiment.

As shown in FIG. 15, the diagnosis unit 74 displays a level meter 1500 indicating the abnormal level of the X-ray thickness measuring device 12 on the display unit 73. For example, if the degree of abnormality of the surge of the tube voltage TV is classified into four abnormal levels, as shown in FIG.

FIG. 16 is a flowchart showing an example of the calculation processing flow of the upper limit management limit and the lower limit management limit by the X-ray thickness measurement system of this embodiment.

The diagnosis unit 74 obtains the initial measurement information 56 after the X-ray thickness measurement device 12 is activated from the omen data server 14 until a predetermined time has elapsed (step S1601). Next, the diagnosis unit 74 determines whether the acquired measurement information 56 includes the measurement information 56 in the transition period (step S1602).

If the acquired measurement information 56 includes the measurement information 56 during the transition period (step S1602: Yes), the diagnostic unit 74 uses the local maximum value or batch average to remove the transition period data from the acquired measurement information 56 ( Step S1603). Next, the diagnosis unit 74 sets the difference between the maximum value and the minimum value of the measurement information 56 from which the transition period data has been removed, within the fluctuation range of the measurement information 56 (step S1604). If the acquired measurement information 56 is the measurement information 56 outside the transition period (step S1602: No), the diagnostic unit 74 sets the difference between the maximum value and the minimum value of the acquired measurement information 56 within the fluctuation range of the measurement information 56 (Step S1604).

Next, the diagnosis unit 74 uses the IQR or the truncated average to remove the outliers from the fluctuation range of the measurement information report 56 (step S1605). Next, the diagnosis unit 74 performs distortion correction on the Huart control chart or the R control chart from which the fluctuation range of the outliers has been removed, and obtains measurement information based on the Huart control chart or the R control chart for which the distortion has been corrected. The upper limit management limit UCL and the lower limit management limit LCL of the variation range of 56 (step S1606).

FIG. 17 is a flowchart showing an example of the flow of determination processing of the abnormal level of the X-ray thickness measuring device in the X-ray thickness measuring system of the present embodiment.

The diagnosis unit 74 obtains the measurement information 56 after a predetermined time has elapsed after the X-ray thickness measurement device 12 is activated from the omen data server 14 (step S1701). Next, the diagnosis unit 74 determines whether the acquired measurement information 56 includes the measurement information 56 during the transition period (step S1702).

If it is determined that the acquired measurement information 56 includes the measurement information 56 during the transition period (step S1702: Yes), the diagnostic unit 74 uses the local maximum value or the batch average, and the transition period data is included in the acquired measurement information 56 Remove (step S1703). Next, the difference between the maximum value and the minimum value of the measurement information 56 after the data of the transition period has been removed is set in the fluctuation range of the measurement information 56 (step S1704). If the acquired measurement information 56 is the measurement information 56 outside the transition period (step S1702: No), the diagnostic unit 74 sets the difference between the maximum value and the minimum value of the acquired measurement information 56 within the fluctuation range of the measurement information 56 (Step S1704).

Next, the diagnosis unit 74 compares the fluctuation range of the measurement information 56 with the upper limit management limit UCL and the lower limit management limit LCL (step S1705), and determines whether the fluctuation range of the measurement information 56 exceeds the upper limit management limit UCL or the lower limit management limit LCL (step S1706) ).

Next, the diagnostic unit 74 detects the measurement information 56 whose fluctuation range exceeds the upper limit management limit UCL or the lower limit management limit LCL among the measurement information 56 as a spike (step S1707). In addition, the diagnosis unit 74 calculates the product of the frequency and magnitude (variation range of the measurement information 56) of the surge of the measurement information 56 for each predetermined time as the abnormality degree, and calculates the abnormality level corresponding to the calculated abnormality degree , It is determined as the abnormal level of the X-ray thickness measuring device 12 (step S1708). After that, the diagnosis unit 74 displays the level meter on the display unit 73 based on the determination result of the abnormal level of the X-ray thickness measuring device 12 (step S1709).

As shown above, with the X-ray thickness measurement system of the present embodiment, even in the case where the measurement information 56 generates discretely generated very large surges and continuously generated small surges of any type, The detection results of both types of surges can be reflected in the determination of the abnormal level of the X-ray thickness measuring device 12. As a result, the accuracy of determining the abnormal level of the X-ray thickness measuring device 12 can be improved.

The embodiments of the present invention have been described above, but the embodiments are presented as examples and are not intended to limit the scope of the invention. This novel embodiment can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. This embodiment is included in the scope or gist of the invention, and is included in the invention described in the scope of the patent application and its equivalent scope.

10: X-ray thickness measurement system 12: X-ray thickness measuring device 14: Omen Data Server 16: Maintenance device 18: Internet 20: Measurement Department 22: X-ray control power supply 24: Board thickness calculation department 26: holding part 28, 37: Transformer 30: X-ray generator 32: detector 34: Output detection section 35: resistance 36: X-ray tube 37: Transformer 38: Electric wire 39a, 39b: boost circuit 40: target 42: Drive detection department 44: Tube Inspection Department 46: Control side processing section 48: Control side memory 50: Acceptance Department 52: Calculation Department 54: Measurement program 56: Measurement Information 58: Omen side processing department 60: Omen side memory 62: Acquisition Department 64: Omen Department 66: Omen Program 68: Omen Information 70: Maintenance side processing department 72: Maintenance side memory 73: Display 74: Diagnosis Department 76: Maintenance program 90: Measurement object 1500: Level meter

Fig. 1 is a schematic diagram showing an example of the overall configuration of the X-ray thickness measurement system of the present embodiment. [FIG. 2] A block diagram showing an example of the functional configuration of the control system of the X-ray thickness measurement system of this embodiment. [Fig. 3] is a diagram for explaining an example of the setting process of the variation range by the X-ray thickness measurement system of this embodiment. [Fig. 4] is a diagram for explaining an example of outlier removal processing performed by the X-ray thickness measurement system of this embodiment. [Fig. 5] is a diagram for explaining an example of the correction processing of the skewness of the Shewhart control chart or the R control chart by the X-ray thickness measurement system of this embodiment. [FIG. 6] A diagram showing an example of an R control chart of tube voltage created by the X-ray thickness measurement system of this embodiment. Fig. 7 is a diagram showing an example of the surge of the tube voltage TV detected by the X-ray thickness measurement system of the present embodiment. Fig. 8 is a diagram showing an example of the surge of the tube voltage TV detected by the X-ray thickness measurement system of the present embodiment. Fig. 9 is a diagram showing an example of the frequency of occurrence of tube voltage surges detected by the X-ray thickness measurement system of the present embodiment. Fig. 10 is a diagram showing an example of the magnitude of the tube voltage surge detected by the X-ray thickness measurement system of the present embodiment. Fig. 11 is a diagram showing an example of the calculation result of the product of the frequency and magnitude of the tube voltage surge generated by the X-ray thickness measurement system of the present embodiment. Fig. 12 is a diagram showing an example of the cumulative sum of the occurrence frequency of tube voltage surges detected by the X-ray thickness measurement system of the present embodiment. Fig. 13 is a diagram showing an example of the sum of the magnitude of the tube voltage surge detected by the X-ray thickness measurement system of the present embodiment. Fig. 14 is a diagram showing an example of the calculation result of the product of the cumulative sum of the occurrence frequency of the tube voltage surge and the cumulative sum of the magnitude by the X-ray thickness measurement system of the present embodiment. [FIG. 15] A diagram showing an example of an abnormal level level meter displayed by the X-ray thickness measurement system of this embodiment. [Fig. 16] is a flowchart showing an example of the calculation processing flow of the upper limit management limit and the lower limit management limit by the X-ray thickness measurement system of this embodiment. [Fig. 17] Fig. 17 is a flowchart showing an example of the flow of determination processing of the abnormal level of the X-ray thickness measuring device in the X-ray thickness measuring system of the present embodiment.

10: X-ray thickness measurement system

12: X-ray thickness measuring device

14: Omen Data Server

16: Maintenance device

18: Internet

22: X-ray control power supply

24: Board thickness calculation department

34: Output detection section

42: Drive detection department

44: Tube Inspection Department

46: Control side processing section

48: Control side memory

50: Acceptance Department

52: Calculation Department

54: Measurement program

56: Measurement Information

58: Omen side processing department

60: Omen side memory

62: Acquisition Department

64: Omen Department

66: Omen Program

68: Omen Information

70: Maintenance side processing department

72: Maintenance side memory

73: Display

74: Diagnosis Department

76: Maintenance program

Claims (5)

A maintenance device, which is equipped with: The diagnostic unit detects the tube between the electric wire that emits electrons by the electric power from the X-ray control power supply, and the tube between the target that irradiates the thickness measurement object with X-rays by the collision of the electrons emitted from the electric wire The detection result of the voltage, the detection result of the tube current flowing between the aforementioned electric wire and the aforementioned target, the detection result of at least one of the detection voltage and the detection current corresponding to the intensity of the X-ray passing through the measurement object, and the detection result of the detection signal. Measurement information of at least one of the detection result of the drive voltage of the primary side of the transformer of the electric wire and the detection result of the drive current flowing to the primary side of the transformer by transforming the power from the X-ray control power supply The abnormal level of the X-ray thickness measuring device that calculates the thickness of the measurement object based on the detection signal is determined based on the frequency of the occurrence of the surge and the product of the magnitude of the surge. The maintenance device of claim 1, wherein the measurement information includes: the detection result of the tube voltage, the detection result of the tube current, the detection result of the detection signal, the detection result of the driving voltage, and the detection of the driving current The maximum and minimum of at least one of the results, The diagnostic unit removes the measurement information during the transition period during which the measurement information is changed, that is, the transition period data, based on the measurement information, and removes the maximum value and the minimum value contained in the measurement information from which the transition period data has been removed. The value difference is set in the fluctuation range of the aforementioned measurement information, and the outliers are removed from the aforementioned fluctuation range, and distortion correction is performed on the Xiuhuat control chart or the R control chart of the aforementioned fluctuation range from which the outliers have been removed. Correct the distortion of the aforementioned Xiuhuat control chart or the aforementioned R control chart, find the upper limit and lower limit of the aforementioned fluctuation range, and detect the aforementioned measurement information that exceeds the aforementioned upper limit or the aforementioned lower limit of the fluctuation range as a sudden Wave. For example, in the maintenance device of claim 2, wherein the aforementioned diagnostic unit uses the aforementioned measurement information to remove the aforementioned data during the migration period by using local maximum values or batch averages. For example, the maintenance device of claim 2 or claim 3, wherein the diagnostic unit is to replace the X-ray generator with the electric wire and the target material, and the IQR is used until a predetermined period of time has elapsed. Group value removal. Such as the maintenance device of claim 4, wherein the diagnostic unit uses a truncated average after the predetermined period has elapsed after replacing the X-ray generator, and removes outliers from the variation range.

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