TW202130404A - Organic solvent recovery system - Google Patents

Organic solvent recovery system Download PDF

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TW202130404A
TW202130404A TW109145451A TW109145451A TW202130404A TW 202130404 A TW202130404 A TW 202130404A TW 109145451 A TW109145451 A TW 109145451A TW 109145451 A TW109145451 A TW 109145451A TW 202130404 A TW202130404 A TW 202130404A
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organic solvent
gas
cooling
processing gas
recovery system
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TW109145451A
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Chinese (zh)
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河野大樹
杉浦勉
田中將博
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日商東洋紡股份有限公司
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Abstract

In an organic solvent recovery system according to the present disclosure, a cooling and condensing device (100) comprises: a mesh-like structure (121) that separates a cooling processing gas and a condensed organic solvent by being brought into contact with an exhaust gas (G2) after cooling; and a chamber (123) that stores for a certain time period the cooling gas (G3) having passed through the mesh-like structure (121). A first pass-through flow path (F1) is installed so as to introduce a part (G4) of the cooling processing gas from a ceiling part (127) of the chamber (123) into a concentration device (300).

Description

有機溶劑回收系統Organic solvent recovery system

本發明係關於一種有機溶劑回收系統。The invention relates to an organic solvent recovery system.

過去,作為從含有有機溶劑之排放氣體回收有機溶劑的處理系統,已知一種組合有冷卻冷凝裝置及使用吸附元件之濃縮裝置的系統。冷卻冷凝裝置,將有機溶劑冷凝回收,降低排放氣體中的有機溶劑濃度。使用吸附元件之濃縮裝置,使從冷卻冷凝裝置排出的有機溶劑濃度已降低之排放氣體接觸吸附元件,吸附有機溶劑,進一步降低排放氣體中的有機溶劑濃度,且對吸附有有機溶劑之吸附材噴吹高溫氣體而使有機溶劑脫附,作為含有高濃度有機溶劑之脫附氣體排出。將脫附氣體送回至冷卻冷凝裝置,予以再處理(參考專利文獻1、2)。 [習知技術文獻] [專利文獻]In the past, as a processing system for recovering organic solvent from exhaust gas containing organic solvent, a system combining a cooling and condensing device and a concentration device using an adsorption element is known. Cool the condensing device to condense and recover the organic solvent to reduce the concentration of the organic solvent in the exhaust gas. Use the concentration device of the adsorption element to make the exhaust gas whose concentration of the organic solvent discharged from the cooling and condensing device contact the adsorption element, adsorb the organic solvent, further reduce the concentration of the organic solvent in the exhaust gas, and spray the adsorbent with the organic solvent Blow high-temperature gas to desorb the organic solvent, and discharge it as a desorption gas containing a high concentration of organic solvent. The desorbed gas is sent back to the cooling and condensing device for reprocessing (refer to Patent Documents 1 and 2). [Literature Technical Literature] [Patent Literature]

專利文獻1:日本特開第2016-101553號公報 專利文獻2:日本特開第2017-991號公報Patent Document 1: Japanese Patent Laid-Open No. 2016-101553 Patent Document 2: Japanese Patent Laid-Open No. 2017-991

[本發明所欲解決的問題][Problems to be solved by the present invention]

於生產設備中,補給一定量之乾淨氣體。因而,將補給氣體分之排放氣體往外部環境排出。近年,伴隨世界性之排放氣體管制,要求將有機溶劑去除至極低濃度,要求高度的處理效率。In the production equipment, a certain amount of clean gas is supplied. Therefore, the exhaust gas, which is the supply gas, is discharged to the external environment. In recent years, with the worldwide emission gas control, it is required to remove organic solvents to extremely low concentrations, and high processing efficiency is required.

本發明之目的在於提供一種有機溶劑回收系統,可從排放氣體將有機溶劑更高效率地回收。 [解決問題之技術手段]The purpose of the present invention is to provide an organic solvent recovery system that can recover organic solvents from exhaust gas more efficiently. [Technical means to solve the problem]

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,具備:冷卻冷凝裝置,藉由將含有有機溶劑之排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出;第一流通路徑,使該冷卻處理氣體的一部分流通;濃縮裝置,具備吸附元件,將從該第一流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由該吸附元件吸附,作為該有機溶劑的濃度進一步降低之潔淨氣體排出,導入高溫氣體而從該吸附元件使該有機溶劑脫附,作為脫附氣體排出;以及第二流通路徑,將該脫附氣體導入至該冷卻冷凝裝置;於該有機溶劑回收系統中,該冷卻冷凝裝置,具備:網眼狀構造體,藉由接觸冷卻後之該排放氣體,而使冷凝的該有機溶劑與該冷卻處理氣體分離;以及腔室,將通過該網眼狀構造體後之該冷卻處理氣體貯存一定時間;該第一流通路徑,設置為從該腔室之頂棚部將該冷卻處理氣體的一部分導入至該濃縮裝置。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system including: a cooling and condensing device, which cools the exhaust gas containing the organic solvent to liquefy and condense the organic solvent as the organic solvent. The cooling process gas whose solvent concentration has been reduced is discharged; the first circulation path allows a part of the cooling process gas to circulate; the concentration device is equipped with an adsorption element, and the organic contained in the cooling process gas introduced from the first circulation path The solvent is adsorbed by the adsorption element and discharged as a clean gas whose concentration of the organic solvent is further reduced. A high-temperature gas is introduced to desorb the organic solvent from the adsorption element and is discharged as a desorption gas; and the second flow path is The desorption gas is introduced into the cooling and condensing device; in the organic solvent recovery system, the cooling and condensing device is provided with: a mesh-like structure that contacts the cooled exhaust gas to condense the organic solvent and the Separation of the cooling processing gas; and a chamber for storing the cooling processing gas after passing through the mesh structure for a certain period of time; the first circulation path is set to introduce a part of the cooling processing gas from the ceiling portion of the chamber To the concentration device.

於該有機溶劑回收系統中,該腔室具備分隔部,該分隔部可與從該網眼狀構造體排出之該冷卻處理氣體的排氣方向對向而進行該第一流通路徑的吸入。In the organic solvent recovery system, the chamber is provided with a partition that can be opposed to the exhaust direction of the cooling process gas discharged from the mesh structure to perform the suction of the first flow path.

於該有機溶劑回收系統中,該冷卻冷凝裝置,具備藉由與冷媒之熱交換而施行該冷卻的熱交換器。In the organic solvent recovery system, the cooling and condensing device includes a heat exchanger that performs the cooling by heat exchange with a refrigerant.

於該有機溶劑回收系統中,該第二流通路徑,將脫附部設置於較該脫附氣體與該排放氣體的合流位置更為上部。In the organic solvent recovery system, the second circulation path has the desorption part located above the confluence position of the desorption gas and the exhaust gas.

於該有機溶劑回收系統中,該排放氣體為從生產設備排出之氣體;具備返回路徑,其使從該第一流通路徑排出之該冷卻處理氣體的一部分以外亦即該冷卻處理氣體的其餘部分,返回至該生產設備。In the organic solvent recovery system, the exhaust gas is the gas discharged from the production equipment; a return path is provided, which allows a part of the cooling process gas discharged from the first circulation path, that is, the remaining part of the cooling process gas, Return to the production facility.

於該有機溶劑回收系統中,該熱交換器,包含第一熱交換器、及設置於該第一熱交換器之前段的第二熱交換器;該第二熱交換器,將導入至該冷卻冷凝裝置之該排放氣體,藉由與該冷卻處理氣體的其餘部分之熱交換而冷卻。In the organic solvent recovery system, the heat exchanger includes a first heat exchanger and a second heat exchanger arranged in the front stage of the first heat exchanger; the second heat exchanger will be introduced to the cooling The exhaust gas of the condensing device is cooled by heat exchange with the rest of the cooling process gas.

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含:冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出;第一流通路徑,使該冷卻處理氣體流通;第一濃縮裝置,將從該第一流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出;第二流通路徑,使該第一處理氣體的一部分流通;第二濃縮裝置,將從該第二流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出;以及第三流通路徑,使該第一脫附氣體及該第二脫附氣體,返回至該冷卻冷凝裝置。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system. The organic solvent is recovered from the exhaust gas containing the organic solvent discharged from the production equipment, including: a cooling and condensing device, The exhaust gas containing the organic solvent is cooled, and the organic solvent is liquefied and condensed to be discharged as a cooling processing gas whose concentration of the organic solvent has been reduced; the first circulation path allows the cooling processing gas to circulate; the first concentrating device The organic solvent contained in the cooled processing gas introduced from the first flow path is adsorbed by the first adsorption element, and discharged as a first processing gas whose concentration of the organic solvent is further reduced, and a high-temperature gas is introduced to adsorb from the first adsorption element. The element desorbs the organic solvent and discharges it as the first desorption gas; the second circulation path allows a part of the first processing gas to circulate; the second concentrating device, the first processing gas introduced from the second circulation path The organic solvent contained is adsorbed by the second adsorption element and discharged as a second processing gas whose concentration of the organic solvent is further reduced. A high-temperature gas is introduced to desorb the organic solvent from the second adsorption element as a second desorption. The attached gas is discharged; and a third circulation path is used to return the first desorbed gas and the second desorbed gas to the cooling and condensing device.

於該有機溶劑回收系統中,該冷卻冷凝裝置,更包含:網眼狀構造體,藉由接觸該冷卻後之該排放氣體,而使冷凝的該有機溶劑與該冷卻處理氣體分離;以及腔室,將通過該網眼狀構造體後之該冷卻處理氣體貯存一定時間;該第一流通路徑,設置為從該腔室之頂棚部將該冷卻處理氣體導入至該第一濃縮裝置。In the organic solvent recovery system, the cooling and condensing device further includes: a mesh-like structure for separating the condensed organic solvent from the cooling process gas by contacting the cooled exhaust gas; and a chamber , Storing the cooling processing gas after passing through the mesh structure for a certain period of time; the first circulation path is arranged to introduce the cooling processing gas from the ceiling portion of the chamber to the first concentrating device.

於該有機溶劑回收系統中,該腔室具備分隔部,該分隔部可與從該網眼狀構造體排出之該冷卻處理氣體的排氣方向對向而進行該第一流通路徑的吸入。In the organic solvent recovery system, the chamber is provided with a partition that can be opposed to the exhaust direction of the cooling process gas discharged from the mesh structure to perform the suction of the first flow path.

於該有機溶劑回收系統中,該冷卻冷凝裝置,更包含藉由與冷媒之熱交換而施行該冷卻的熱交換器。In the organic solvent recovery system, the cooling and condensing device further includes a heat exchanger that performs the cooling by heat exchange with a refrigerant.

於該有機溶劑回收系統中,更包含返回路徑,其使從該第二流通路徑排出之該第一處理氣體的一部分以外亦即該第一處理氣體的其餘部分,返回至該生產設備。The organic solvent recovery system further includes a return path for returning part of the first processing gas discharged from the second circulation path, that is, the remaining part of the first processing gas, to the production equipment.

於該有機溶劑回收系統中,該熱交換器,包含第一熱交換器、及設置於該第一熱交換器之前段的第二熱交換器;該第二熱交換器,將導入至該冷卻冷凝裝置之該排放氣體,藉由與該第一處理氣體的其餘部分之熱交換而冷卻。In the organic solvent recovery system, the heat exchanger includes a first heat exchanger and a second heat exchanger arranged in the front stage of the first heat exchanger; the second heat exchanger will be introduced to the cooling The exhaust gas of the condensing device is cooled by heat exchange with the rest of the first processing gas.

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含:冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該排放氣體之該有機溶劑的濃度已降低之冷卻處理氣體排出;冷卻氣體流通路徑,使該冷卻處理氣體流通;濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由吸附元件吸附,作為該有機溶劑的濃度進一步降低之處理氣體排出,導入高溫氣體而從該吸附元件使該有機溶劑脫附,作為脫附氣體排出;以及脫附氣體流通路徑,將該脫附氣體導入至該冷卻冷凝裝置。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system. The organic solvent is recovered from the exhaust gas containing the organic solvent discharged from the production equipment, including: a cooling and condensing device, The exhaust gas containing the organic solvent is cooled, and the organic solvent is liquefied and condensed, and the cooling process gas whose concentration of the organic solvent has been reduced as the exhaust gas is discharged; the cooling gas circulation path allows the cooling process gas to circulate; concentrating device , The organic solvent contained in the cooling processing gas introduced from the cooling gas flow path is adsorbed by the adsorption element, and discharged as processing gas whose concentration of the organic solvent is further reduced, and high temperature gas is introduced to make the organic solvent from the adsorption element The solvent is desorbed and discharged as a desorbed gas; and a desorbed gas flow path is used to introduce the desorbed gas to the cooling and condensing device.

該冷卻冷凝裝置,包含:冷卻部,使該排放氣體流通;以及分離部,在沿著該排放氣體的流動方向觀察之情況,位於該冷卻部的下游側;該分離部,具備:承接部,承接以該冷卻部冷卻的含有該有機溶劑之冷卻冷凝液;網眼狀構造體,藉由接觸冷卻後之該排放氣體,而使該冷卻冷凝液與該冷卻處理氣體分離;以及腔室,將通過該網眼狀構造體後之該冷卻處理氣體貯存一定時間;沿著該排放氣體的流動方向觀察之情況,相對於從該冷卻部往該分離部流動的方向,使該分離部內從該網眼狀構造體往該腔室流動的方向交叉,藉以使該排放氣體沿L字形方向流動。The cooling and condensing device includes: a cooling part that allows the exhaust gas to circulate; and a separation part located on the downstream side of the cooling part when viewed along the flow direction of the exhaust gas; the separation part includes: a receiving part, Receiving the cooling condensate containing the organic solvent cooled by the cooling part; a mesh-like structure that separates the cooling condensate from the cooling processing gas by contacting the exhaust gas after cooling; and a chamber, After passing through the mesh-like structure, the cooling processing gas is stored for a certain period of time; when viewed along the flow direction of the exhaust gas, relative to the direction from the cooling part to the separation part, the separation part flows from the net The eye-shaped structure crosses the flow direction of the chamber, so that the exhaust gas flows in the L-shaped direction.

於該有機溶劑回收系統中,於該網眼狀構造體的下游側,配置用於將該冷卻處理氣體加熱之加熱器。In the organic solvent recovery system, a heater for heating the cooling process gas is arranged on the downstream side of the mesh structure.

於該有機溶劑回收系統中,於該腔室內,設置防止該冷卻冷凝液往該冷卻氣體流通路徑流動的堰部。In the organic solvent recovery system, a weir is provided in the chamber to prevent the cooling condensate from flowing to the cooling gas flow path.

於該有機溶劑回收系統中,該濃縮裝置,包含第一濃縮裝置、及位於該第一濃縮裝置的下游側之第二濃縮裝置;該第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出;該有機溶劑回收系統,更包含使該第一處理氣體的一部分流通之第一處理氣體流通路徑;該第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出。In the organic solvent recovery system, the concentration device includes a first concentration device and a second concentration device located on the downstream side of the first concentration device; the first concentration device introduces the cooling gas flow path into the The organic solvent contained in the cooling process gas is adsorbed by the first adsorption element, and discharged as the first process gas whose concentration of the organic solvent is further reduced, and high-temperature gas is introduced to desorb the organic solvent from the first adsorption element. The first desorption gas is discharged; the organic solvent recovery system further includes a first processing gas flow path through which a part of the first processing gas circulates; the second concentrating device introduces the first processing gas through the flow path The organic solvent contained in the first processing gas is adsorbed by the second adsorption element, and discharged as a second processing gas whose concentration of the organic solvent is further reduced, and a high-temperature gas is introduced to desorb the organic solvent from the second adsorption element, It is discharged as the second desorption gas.

於該有機溶劑回收系統中,該第一濃縮裝置,將該第一吸附元件於繞筒軸旋轉之中空圓柱狀的轉筒之繞筒軸的圓周方向配置複數個。In the organic solvent recovery system, the first concentrating device arranges a plurality of the first adsorption elements in the circumferential direction around the cylindrical axis of the hollow cylindrical rotating drum rotating around the cylindrical axis.

於該有機溶劑回收系統中,該第二濃縮裝置,將該第二吸附元件配置於繞筒軸旋轉之圓盤狀的吸附轉筒。In the organic solvent recovery system, the second concentrating device arranges the second adsorption element on a disc-shaped adsorption drum rotating around a drum axis.

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,具備:冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出;冷卻氣體流通路徑,使該冷卻處理氣體流通;第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出;第一處理氣體流通路徑,使該第一處理氣體的一部分流通;以及第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出;使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該冷卻氣體流通路徑。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system. The organic solvent is recovered from the exhaust gas containing organic solvent discharged from the production equipment. The organic solvent is equipped with a cooling and condensing device. The exhaust gas containing the organic solvent is cooled, and the organic solvent is liquefied and condensed, and discharged as a cooling processing gas whose concentration of the organic solvent has been reduced; a cooling gas circulation path allows the cooling processing gas to circulate; a first concentrating device The organic solvent contained in the cooling process gas introduced from the cooling gas flow path is adsorbed by the first adsorption element, and discharged as the first process gas whose concentration of the organic solvent is further reduced, and high temperature gas is introduced to adsorb from the first adsorption element. The element desorbs the organic solvent and discharges it as the first desorption gas; the first processing gas flow path allows a part of the first processing gas to circulate; and the second concentrating device introduces the first processing gas through the flow path The organic solvent contained in the first processing gas is adsorbed by the second adsorption element, and discharged as a second processing gas whose concentration of the organic solvent is further reduced, and a high-temperature gas is introduced to desorb the organic solvent from the second adsorption element , It is discharged as the second desorption gas; the first desorption gas is returned to the cooling and condensing device, and the second desorption gas is returned to the cooling gas flow path.

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,具備:冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出;冷卻氣體流通路徑,使該冷卻處理氣體流通;第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,藉由第一加熱器導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出;第一處理氣體流通路徑,使該第一處理氣體的一部分流通;以及第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,藉由第二加熱器導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出;使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該第一加熱器。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system. The organic solvent is recovered from the exhaust gas containing organic solvent discharged from the production equipment. The organic solvent is equipped with a cooling and condensing device. The exhaust gas containing the organic solvent is cooled, and the organic solvent is liquefied and condensed, and discharged as a cooling processing gas whose concentration of the organic solvent has been reduced; a cooling gas circulation path allows the cooling processing gas to circulate; a first concentrating device The organic solvent contained in the cooling processing gas introduced from the cooling gas flow path is adsorbed by the first adsorption element, and discharged as the first processing gas whose concentration of the organic solvent is further reduced, and high temperature gas is introduced by the first heater The organic solvent is desorbed from the first adsorption element and discharged as the first desorption gas; the first processing gas flow path allows a part of the first processing gas to circulate; and the second concentrating device removes the first processing gas from the The organic solvent contained in the first processing gas introduced into the processing gas flow path is adsorbed by the second adsorption element and discharged as the second processing gas whose concentration of the organic solvent is further reduced, and the high temperature gas is introduced by the second heater. The organic solvent is desorbed from the second adsorption element and discharged as the second desorption gas; the first desorption gas is returned to the cooling and condensing device, and the second desorption gas is returned to the first Heater.

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,具備:冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出;冷卻氣體流通路徑,使該冷卻處理氣體流通;第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出;第一處理氣體流通路徑,使該第一處理氣體的一部分流通;冷卻冷凝裝置返回路徑,使從該第一處理氣體流通路徑排出之該第一處理氣體的一部分以外亦即該第一處理氣體的其餘部分,返回至該冷卻冷凝裝置;以及第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出;使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該冷卻冷凝裝置返回路徑。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system. The organic solvent is recovered from the exhaust gas containing organic solvent discharged from the production equipment. The organic solvent is equipped with a cooling and condensing device. The exhaust gas containing the organic solvent is cooled, and the organic solvent is liquefied and condensed, and discharged as a cooling processing gas whose concentration of the organic solvent has been reduced; a cooling gas circulation path allows the cooling processing gas to circulate; a first concentrating device The organic solvent contained in the cooling process gas introduced from the cooling gas flow path is adsorbed by the first adsorption element, and discharged as the first process gas whose concentration of the organic solvent is further reduced, and high temperature gas is introduced to adsorb from the first adsorption element. The element desorbs the organic solvent and discharges it as the first desorption gas; the first processing gas flow path allows a part of the first processing gas to circulate; the cooling condensing device return path is used to discharge the gas from the first processing gas flow path A part of the first processing gas, that is, the rest of the first processing gas, is returned to the cooling and condensing device; and a second concentrating device is contained in the first processing gas introduced from the first processing gas flow path The organic solvent is adsorbed by the second adsorption element, and discharged as a second processing gas whose concentration of the organic solvent is further reduced, and a high-temperature gas is introduced to desorb the organic solvent from the second adsorption element as a second desorption gas Discharge; the first desorption gas is returned to the cooling and condensing device, and the second desorption gas is returned to the cooling and condensing device return path.

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,具備:冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出;冷卻氣體流通路徑,使該冷卻處理氣體流通;第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出;第一處理氣體流通路徑,使該第一處理氣體的一部分流通;第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出;該冷卻冷凝裝置,包含藉由與冷媒之熱交換而施行冷卻的熱交換器;該有機溶劑回收系統更包含生產設備返回路徑,該生產設備返回路徑使從該生產設備排出之該排放氣體的一部分,於通過該熱交換器後返回至該生產設備;使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該生產設備返回路徑。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system. The organic solvent is recovered from the exhaust gas containing organic solvent discharged from the production equipment. The organic solvent is equipped with a cooling and condensing device. The exhaust gas containing the organic solvent is cooled, and the organic solvent is liquefied and condensed, and discharged as a cooling processing gas whose concentration of the organic solvent has been reduced; a cooling gas circulation path allows the cooling processing gas to circulate; a first concentrating device The organic solvent contained in the cooling process gas introduced from the cooling gas flow path is adsorbed by the first adsorption element, and discharged as the first process gas whose concentration of the organic solvent is further reduced, and high temperature gas is introduced to adsorb from the first adsorption element. The element desorbs the organic solvent and discharges it as the first desorption gas; the first processing gas flow path allows a part of the first processing gas to circulate; the second concentrating device introduces the first processing gas through the first processing gas flow path. The organic solvent contained in the first processing gas is adsorbed by the second adsorption element, and discharged as the second processing gas whose concentration of the organic solvent is further reduced, high temperature gas is introduced to desorb the organic solvent from the second adsorption element, It is discharged as the second desorption gas; the cooling and condensing device includes a heat exchanger that performs cooling by heat exchange with the refrigerant; the organic solvent recovery system further includes a production equipment return path, which makes the production equipment return path from the production equipment Part of the exhaust gas discharged from the equipment is returned to the production equipment after passing through the heat exchanger; the first desorbed gas is returned to the cooling and condensing device, and the second desorbed gas is returned to the production The return path of the device.

於該有機溶劑回收系統中,該第一濃縮裝置,將該第一吸附元件於繞筒軸旋轉之中空圓柱狀的轉筒之繞筒軸的圓周方向配置複數個。In the organic solvent recovery system, the first concentrating device arranges a plurality of the first adsorption elements in the circumferential direction around the cylindrical axis of the hollow cylindrical rotating drum rotating around the cylindrical axis.

於該有機溶劑回收系統中,該第二濃縮裝置,將該第二吸附元件配置於繞筒軸旋轉之圓盤狀的吸附轉筒。In the organic solvent recovery system, the second concentrating device arranges the second adsorption element on a disc-shaped adsorption drum rotating around a drum axis.

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,具備:冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出;冷卻氣體流通路徑,使該冷卻處理氣體的一部分流通;第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出;第一處理氣體流通路徑,使該第一處理氣體流通;第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出;該冷卻冷凝裝置,包含藉由與冷媒之熱交換而施行該排放氣體的冷卻之熱交換器;該有機溶劑回收系統更包含熱交換器返回路徑,該熱交換器返回路徑使該冷卻處理氣體的一部分以外亦即該冷卻處理氣體的其餘部分,返回至該熱交換器;使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該冷卻氣體流通路徑。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system. The organic solvent is recovered from the exhaust gas containing organic solvent discharged from the production equipment. The organic solvent is equipped with a cooling and condensing device. The exhaust gas containing the organic solvent is cooled, and the organic solvent is liquefied and condensed, and discharged as a cooling processing gas whose concentration of the organic solvent has been reduced; a cooling gas circulation path, allowing a part of the cooling processing gas to circulate; a first concentrating device , The organic solvent contained in the cooling processing gas introduced from the cooling gas flow path is adsorbed by the first adsorption element, and discharged as the first processing gas whose concentration of the organic solvent is further reduced, and the high temperature gas is introduced from the first adsorption element An adsorption element desorbs the organic solvent and discharges it as the first desorption gas; the first processing gas circulation path allows the first processing gas to circulate; and the second concentrating device introduces the first processing gas through the first processing gas circulation path. The organic solvent contained in the first processing gas is adsorbed by the second adsorption element, and discharged as the second processing gas whose concentration of the organic solvent is further reduced, high temperature gas is introduced to desorb the organic solvent from the second adsorption element, It is discharged as the second desorption gas; the cooling and condensing device includes a heat exchanger that performs cooling of the exhaust gas by heat exchange with a refrigerant; the organic solvent recovery system further includes a heat exchanger return path, the heat exchanger The return path allows part of the cooling process gas, that is, the rest of the cooling process gas, to return to the heat exchanger; to return the first desorption gas to the cooling and condensing device, and to make the second desorption gas , Return to the cooling gas flow path.

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,具備:冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出;冷卻氣體流通路徑,使該冷卻處理氣體的一部分流通;第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,藉由加熱器導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出;第一處理氣體流通路徑,使該第一處理氣體流通;以及第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出;該冷卻冷凝裝置,包含藉由與冷媒之熱交換而施行該排放氣體的冷卻之熱交換器;該有機溶劑回收系統更包含熱交換器返回路徑,該熱交換器返回路徑使該冷卻處理氣體的一部分以外亦即該冷卻處理氣體的其餘部分,返回至該熱交換器;使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該加熱器。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system. The organic solvent is recovered from the exhaust gas containing organic solvent discharged from the production equipment. The organic solvent is equipped with a cooling and condensing device. The exhaust gas containing the organic solvent is cooled, and the organic solvent is liquefied and condensed, and discharged as a cooling processing gas whose concentration of the organic solvent has been reduced; a cooling gas circulation path, allowing a part of the cooling processing gas to circulate; a first concentrating device , The organic solvent contained in the cooling processing gas introduced from the cooling gas flow path is adsorbed by the first adsorption element, and discharged as the first processing gas whose concentration of the organic solvent is further reduced, and high temperature gas is introduced by a heater The organic solvent is desorbed from the first adsorption element and discharged as the first desorption gas; the first processing gas flow path allows the first processing gas to circulate; and the second concentrating device removes the first processing gas from The organic solvent contained in the first processing gas introduced in the flow path is adsorbed by the second adsorption element, and discharged as the second processing gas whose concentration of the organic solvent is further reduced, and the high temperature gas is introduced to make the second adsorption element The organic solvent is desorbed and discharged as the second desorption gas; the cooling and condensing device includes a heat exchanger that performs cooling of the exhaust gas by heat exchange with a refrigerant; the organic solvent recovery system further includes a heat exchanger return path , The heat exchanger return path makes part of the cooling process gas, that is, the rest of the cooling process gas, return to the heat exchanger; returns the first desorbed gas to the cooling and condensing device, and makes the The second desorption gas returns to the heater.

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,具備:冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出;冷卻氣體流通路徑,使該冷卻處理氣體的一部分流通;第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出;第一處理氣體流通路徑,使該第一處理氣體流通;第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出;該冷卻冷凝裝置,包含藉由與冷媒之熱交換而施行冷卻的熱交換器;該有機溶劑回收系統更包含熱交換器返回路徑,該熱交換器返回路徑使該冷卻處理氣體的一部分以外亦即該冷卻處理氣體的其餘部分,返回至該熱交換器;使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該熱交換器返回路徑。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system. The organic solvent is recovered from the exhaust gas containing organic solvent discharged from the production equipment. The organic solvent is equipped with a cooling and condensing device. The exhaust gas containing the organic solvent is cooled, and the organic solvent is liquefied and condensed, and discharged as a cooling processing gas whose concentration of the organic solvent has been reduced; a cooling gas circulation path, allowing a part of the cooling processing gas to circulate; a first concentrating device , The organic solvent contained in the cooling processing gas introduced from the cooling gas flow path is adsorbed by the first adsorption element, and discharged as the first processing gas whose concentration of the organic solvent is further reduced, and the high temperature gas is introduced from the first adsorption element An adsorption element desorbs the organic solvent and discharges it as the first desorption gas; the first processing gas circulation path allows the first processing gas to circulate; and the second concentrating device introduces the first processing gas through the first processing gas circulation path. The organic solvent contained in the first processing gas is adsorbed by the second adsorption element, and discharged as the second processing gas whose concentration of the organic solvent is further reduced, high temperature gas is introduced to desorb the organic solvent from the second adsorption element, Is discharged as the second desorbed gas; the cooling and condensing device includes a heat exchanger that performs cooling by heat exchange with the refrigerant; the organic solvent recovery system further includes a heat exchanger return path, and the heat exchanger return path causes the Part of the cooling process gas, that is, the rest of the cooling process gas, is returned to the heat exchanger; the first desorbed gas is returned to the cooling and condensing device, and the second desorbed gas is returned to the Heat exchanger return path.

依本發明揭露的有機溶劑回收系統之一態樣,則為一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,具備:冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出;冷卻氣體流通路徑,使該冷卻處理氣體的一部分流通;第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出;第一處理氣體流通路徑,使該第一處理氣體流通;第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出;該冷卻冷凝裝置,包含藉由與冷媒之熱交換而施行冷卻的熱交換器;該有機溶劑回收系統,更包含:熱交換器返回路徑,使該冷卻處理氣體的一部分以外亦即該冷卻處理氣體的其餘部分,返回至該熱交換器;以及生產設備返回路徑,使從該生產設備排出之該排放氣體的一部分,於通過該熱交換器後返回至該生產設備;使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該生產設備返回路徑。According to one aspect of the organic solvent recovery system disclosed in the present invention, it is an organic solvent recovery system. The organic solvent is recovered from the exhaust gas containing organic solvent discharged from the production equipment. The organic solvent is equipped with a cooling and condensing device. The exhaust gas containing the organic solvent is cooled, and the organic solvent is liquefied and condensed, and discharged as a cooling processing gas whose concentration of the organic solvent has been reduced; a cooling gas circulation path, allowing a part of the cooling processing gas to circulate; a first concentrating device , The organic solvent contained in the cooling processing gas introduced from the cooling gas flow path is adsorbed by the first adsorption element, and discharged as the first processing gas whose concentration of the organic solvent is further reduced, and the high temperature gas is introduced from the first adsorption element An adsorption element desorbs the organic solvent and discharges it as the first desorption gas; the first processing gas circulation path allows the first processing gas to circulate; and the second concentrating device introduces the first processing gas through the first processing gas circulation path. The organic solvent contained in the first processing gas is adsorbed by the second adsorption element, and discharged as the second processing gas whose concentration of the organic solvent is further reduced, high temperature gas is introduced to desorb the organic solvent from the second adsorption element, Is discharged as the second desorption gas; the cooling and condensing device includes a heat exchanger that performs cooling by heat exchange with the refrigerant; the organic solvent recovery system further includes: a heat exchanger return path to cool the treated gas Part of the gas, that is, the remaining part of the cooling process gas, is returned to the heat exchanger; and the production equipment return path, so that a part of the exhaust gas discharged from the production equipment returns to the production equipment after passing through the heat exchanger ; Make the first desorption gas return to the cooling and condensing device, and make the second desorption gas return to the return path of the production equipment.

於該有機溶劑回收系統中,該第一濃縮裝置,將該第一吸附元件於繞筒軸旋轉之中空圓柱狀的轉筒之繞筒軸的圓周方向配置複數個。In the organic solvent recovery system, the first concentrating device arranges a plurality of the first adsorption elements in the circumferential direction around the cylindrical axis of the hollow cylindrical rotating drum rotating around the cylindrical axis.

於該有機溶劑回收系統中,該第二濃縮裝置,將該第二吸附元件配置於繞筒軸旋轉之圓盤狀的吸附轉筒。 [本發明之效果]In the organic solvent recovery system, the second concentrating device arranges the second adsorption element on a disc-shaped adsorption drum rotating around a drum axis. [Effects of the invention]

依本發明揭露之內容,可提供一種有機溶劑回收系統,可從排放氣體將有機溶劑更高效率地回收。According to the disclosure of the present invention, an organic solvent recovery system can be provided, which can recover organic solvents from exhaust gas more efficiently.

針對依據本發明之各實施形態的有機溶劑回收系統,以下,參考圖式並予以說明。以下說明之實施形態中,在提及個數、數量等的情況,除了特別記載的情況以外,本發明之範圍並未限定於該個數、數量等。有對相同之零件、相當之零件,給予相同參考符號而不重複進行說明的情況。從一開始,即預定將實施形態之構成適當地組合使用。The organic solvent recovery system according to each embodiment of the present invention is described below with reference to the drawings. In the embodiments described below, when the number, number, etc. are mentioned, the scope of the present invention is not limited to the number, number, etc., except in the case of special description. There are cases where the same reference symbols are given to the same or equivalent parts without repeating the description. From the beginning, it is planned to appropriately combine and use the constitution of the embodiment.

[實施形態1A] 圖1係概略顯示實施形態1A之有機溶劑回收系統1A之構成的圖。有機溶劑回收系統1A,係以冷卻冷凝裝置100、濃縮裝置300、第一流通路徑F1、及第二流通路徑F2構成。[Embodiment 1A] Fig. 1 is a diagram schematically showing the configuration of the organic solvent recovery system 1A of the embodiment 1A. The organic solvent recovery system 1A is composed of a cooling and condensing device 100, a concentration device 300, a first flow path F1, and a second flow path F2.

冷卻冷凝裝置100,具備冷卻部110、分離部120及腔室123。含有有機溶劑之排放氣體G1,藉由通過冷卻部110而冷卻,該有機溶劑伴隨於此而液化冷凝。接著,該排放氣體G2,藉由通過分離部120,而分離為經液化冷凝之冷卻冷凝液L1與有機溶劑濃度降低之冷卻處理氣體G3。最後,以通過腔室123,將冷卻處理氣體的一部分(吸附入口氣體)G4往濃縮裝置300供給之方式分配,從冷卻冷凝裝置100排出。The cooling and condensing device 100 includes a cooling unit 110, a separation unit 120 and a chamber 123. The exhaust gas G1 containing the organic solvent is cooled by passing through the cooling part 110, and the organic solvent is liquefied and condensed along with it. Then, the exhaust gas G2 is separated into the cooling condensate L1 that has been liquefied and condensed and the cooling process gas G3 whose concentration of the organic solvent is reduced by passing through the separation unit 120. Finally, a part of the cooling process gas (adsorption inlet gas) G4 is supplied to the concentrating device 300 through the chamber 123 and is discharged from the cooling condensing device 100.

冷卻部110之冷卻手段/構成並無特別限定,有藉由冷卻水、冷水、鹹水等冷媒與排放氣體之間接熱交換而進行冷卻的第一熱交換器111等。冷卻溫度等之條件,亦依作為回收對象的有機溶劑適當決定即可。The cooling means/configuration of the cooling unit 110 is not particularly limited, and there is a first heat exchanger 111 that performs cooling by exchanging heat between a refrigerant such as cooling water, cold water, salt water, and the exhaust gas. Conditions such as the cooling temperature can also be appropriately determined according to the organic solvent to be recovered.

此外,冷卻部110,亦可於第一熱交換器111之前,設置藉由冷卻處理氣體的其餘部分(返回氣體)G6與排放氣體G1之熱交換而使排放氣體G1冷卻的第二熱交換器112。此係由於可減少第一熱交換器111所需之傳熱面積與冷媒量的緣故。In addition, the cooling unit 110 may also be provided with a second heat exchanger that cools the exhaust gas G1 by heat exchange between the remaining part of the processing gas (return gas) G6 and the exhaust gas G1 before the first heat exchanger 111 112. This is because the heat transfer area and the amount of refrigerant required by the first heat exchanger 111 can be reduced.

分離部120之分離手段/構成並無特別限定,具有除霧器、濾網、篩孔等接觸液滴而加以捕捉的網眼狀構造體121等。網眼狀構造體121捕捉到之冷卻冷凝液L1,因重力而往配置於網眼狀構造體121的下部之貯存槽125集液,作為回收液L3回收。The separation means/configuration of the separation unit 120 is not particularly limited, and it has a mesh structure 121 and the like that contact the droplets and catch the droplets, such as a demister, a filter, and a mesh. The cooling condensate L1 captured by the mesh structure 121 is collected by gravity into the storage tank 125 arranged at the lower part of the mesh structure 121 and is recovered as the recovery liquid L3.

腔室123,係具有一定容量之空間的構造體。分配給往濃縮裝置300供給之冷卻處理氣體的一部分(吸附入口氣體)G4、及冷卻處理氣體的其餘部分(返回氣體)G6。腔室123具備分隔部128,分隔部128可與從網眼狀構造體121排出之冷卻處理氣體G3的排氣方向對向而進行第一流通路徑F1的吸入。The chamber 123 is a structure with a certain volume of space. A part of the cooling process gas (adsorption inlet gas) G4 and the remaining part of the cooling process gas (return gas) G6 are allocated to the cooling process gas supplied to the concentrating device 300. The chamber 123 is provided with a partition 128 which can be opposed to the exhaust direction of the cooling process gas G3 discharged from the mesh-like structure 121 to suck in the first flow path F1.

濃縮裝置300具備包含吸附材之吸附元件310,藉由與氣體接觸而吸附其含有的有機溶劑,藉由與加熱氣體接觸而使吸附的有機溶劑脫附。此外,吸附元件310,包含脫附部(脫附區)311與吸附部(吸附區)312。吸附部312,藉由將冷卻處理氣體的一部分(吸附入口氣體)G4導入,而使冷卻處理氣體的一部分(吸附入口氣體)G4與吸附材接觸,藉以將冷卻處理氣體的一部分(吸附入口氣體)G4所含有之有機溶劑吸附於吸附材,藉此使冷卻處理氣體的一部分(吸附入口氣體)G4潔淨化,作為潔淨氣體G9排出。The concentrating device 300 is provided with an adsorption element 310 including an adsorbent, and adsorbs the organic solvent contained in it by contact with the gas, and desorbs the adsorbed organic solvent by contact with the heated gas. In addition, the adsorption element 310 includes a desorption part (desorption zone) 311 and an adsorption part (adsorption zone) 312. The adsorbing part 312 introduces a part of the cooling process gas (adsorption inlet gas) G4, so that a part of the cooling process gas (adsorption inlet gas) G4 is in contact with the adsorbing material, so that a part of the cooling process gas (adsorption inlet gas) is brought into contact with the adsorbent. The organic solvent contained in G4 is adsorbed to the adsorption material, thereby cleaning a part of the cooling process gas (adsorption inlet gas) G4, and is discharged as clean gas G9.

脫附部311,藉由將較冷卻處理氣體的一部分(吸附入口氣體)G4更高溫之氣體G10導入至吸附材,而使有機溶劑從吸附材脫附,藉此作為含有有機溶劑之脫附氣體G11排出。The desorption part 311 introduces a part of the cooler process gas (adsorption inlet gas) G4 to the adsorbent gas G10, which desorbs the organic solvent from the adsorbent, thereby serving as a desorption gas containing the organic solvent G11 is discharged.

作為吸附元件310所包含之吸附材,廣泛利用活性氧化鋁、矽膠、活性碳材料或沸石,其中特別適合利用活性碳與疏水性沸石。活性碳與疏水性沸石,將低濃度的有機化合物吸附、脫附之功能良好,一直以來作為吸附材利用在各種裝置。As the adsorption material contained in the adsorption element 310, activated alumina, silica gel, activated carbon material or zeolite is widely used, and activated carbon and hydrophobic zeolite are particularly suitable for use. Activated carbon and hydrophobic zeolite have a good function of adsorbing and desorbing low-concentration organic compounds, and they have been used as adsorbents in various devices.

此外,實施形態之濃縮裝置的具體構成並無特別限定,但如圖1所示,已知下述構成:具備旋轉軸、及繞旋轉軸而設置之吸附元件310,藉由使吸附元件310繞旋轉軸旋轉,而於吸附部312中,使吸附有冷卻處理氣體的一部分(吸附入口氣體)G4中的有機溶劑之吸附材連續地往脫附部311移動。In addition, the specific configuration of the concentrating device of the embodiment is not particularly limited. However, as shown in FIG. 1, the following configuration is known: a rotating shaft and an adsorption element 310 arranged around the rotating shaft, by making the adsorption element 310 around The rotating shaft rotates, and in the adsorption part 312, the adsorption material which adsorbs the organic solvent in a part of the cooling process gas (adsorption inlet gas) G4 is continuously moved to the desorption part 311.

實施形態之濃縮裝置300,如圖1所示,脫附部311宜配置於較吸附部312更為下部。此係因即便在脫附氣體G11中所含有的有機溶劑之一部分液化冷凝而產生脫附冷凝液L2的情況中,仍使脫附冷凝液L2不易附著於吸附部312之緣故。使脫附冷凝液L2,往較脫附部311更下部滴落,沿著脫附部之外部的內面等而回收。更佳態樣中,如圖1所示,宜使脫附部311往下方傾斜。此係為了使脫附冷凝液L2更容易往下方滴落。In the concentration device 300 of the embodiment, as shown in FIG. This is because even when a part of the organic solvent contained in the desorption gas G11 is liquefied and condensed to produce the desorption condensate L2, the desorption condensate L2 is still difficult to adhere to the adsorption part 312. The desorption condensate L2 is dropped to a lower portion than the desorption part 311, and is recovered along the inner surface of the outside of the desorption part. In a more preferable aspect, as shown in FIG. 1, the desorption part 311 is preferably inclined downward. This is to make the desorption condensate L2 easier to drip downward.

濃縮裝置300,亦可具備脫附部311之脫附處理結束的部分在往吸附部312移動之前往其移動的吹掃部(未圖示)。亦可為將潔淨氣體G9的一部分導入至吹掃部,將從吹掃部排出之吹掃部出口氣體導入至吸附部312之構成。此係因藉由以潔淨氣體G9吹掃結束脫附的吸附材,而防止殘留於吸附材之脫附氣體G11往潔淨氣體G9的混入,可將吸附材冷卻之緣故。The concentrating device 300 may also include a purge part (not shown) that moves to the adsorption part 312 after the desorption process of the desorption part 311 is completed. It may also be a configuration in which a part of the clean gas G9 is introduced to the purge section, and the purge section outlet gas discharged from the purge section is introduced to the adsorption section 312. This is because by purging the desorbed adsorbent with the clean gas G9, the desorption gas G11 remaining in the adsorbent is prevented from mixing into the clean gas G9, and the adsorbent can be cooled.

濃縮裝置300,使用於脫附之高溫氣體G10,宜為利用再生加熱器350等加熱手段使潔淨氣體G9的一部分成為高溫狀態者。此係因不在吸附部312增加有機溶劑含有氣體的處理風量之緣故。排放氣體G1的溫度為50~200℃的溫度之情況中,更宜以再生加熱器350等使排放氣體G1的一部分升溫而使用。此係因藉由將高溫之排放氣體G1使用於脫附,而可降低再生加熱器350的使用效用,藉由排放氣體G1的溫度而使脫附不需要再生加熱器350之緣故。此外,將排放氣體G1及脫附氣體G11通過冷卻冷凝裝置100的比例,假設為排放氣體G1為0%~50%,脫附氣體G11為50%~100%。The concentrating device 300 is used for the desorption of the high temperature gas G10, and it is preferable to use heating means such as the regeneration heater 350 to make a part of the clean gas G9 into a high temperature state. This is because the adsorption part 312 does not increase the processing air volume of the organic solvent-containing gas. When the temperature of the exhaust gas G1 is 50 to 200° C., it is more preferable to use the regeneration heater 350 or the like to raise a part of the exhaust gas G1. This is because the use of the high-temperature exhaust gas G1 for desorption can reduce the utility of the regeneration heater 350, and the temperature of the exhaust gas G1 eliminates the need for the regeneration heater 350 for desorption. In addition, the ratio of the exhaust gas G1 and the desorption gas G11 through the cooling and condensing device 100 is assumed to be 0%-50% for the exhaust gas G1 and 50%-100% for the desorption gas G11.

第一流通路徑F1,係將冷卻處理氣體的一部分(吸附入口氣體)G4從腔室123往濃縮裝置300導入之部位。第一流通路徑F1的往腔室123之連接口,宜為腔室123之頂棚部127。此係為了抑制分離部120未捕捉到的微少液滴之往濃縮裝置300的侵入,防止後述因濃縮裝置300之吸附元件310的潤濕所造成之性能降低/強度降低等。更佳態樣中,宜設置分隔部128,以與冷卻處理氣體G3的流通方向對向之方式,將冷卻處理氣體的一部分(吸附入口氣體)G4取出。可進一步防止液滴的侵入。除此之外,亦可於冷卻處理氣體的一部分(吸附入口氣體)G4之取出口,設置與上述網眼狀構造體121類似的防液滴侵入構件,亦可設置用於使液滴氣化的加熱器。The first flow path F1 is a part where a part of the cooling process gas (adsorption inlet gas) G4 is introduced from the chamber 123 to the concentration device 300. The connection port of the first circulation path F1 to the cavity 123 is preferably the ceiling portion 127 of the cavity 123. This is to prevent the intrusion of minute liquid droplets not caught by the separation unit 120 into the concentrating device 300, and to prevent performance degradation/strength degradation caused by the wetting of the adsorbing element 310 of the concentrating device 300, which will be described later. In a more preferable aspect, a partition 128 is preferably provided to take out a part of the cooling processing gas (adsorption inlet gas) G4 in a manner opposed to the flow direction of the cooling processing gas G3. It can further prevent the intrusion of droplets. In addition, a part of the cooling process gas (adsorption inlet gas) G4 can be provided with a droplet intrusion prevention member similar to the above-mentioned mesh structure 121, or can be provided to vaporize the droplets. Heater.

第二流通路徑F2,係將脫附氣體G11送回至冷卻冷凝裝置100之排放氣體G1的導入部之部位。第二流通路徑F2,宜以將脫附部311配置於較脫附氣體G11與往冷卻冷凝裝置100供給之排放氣體G1的合流位置更為上部之方式連接。此係因由濃縮裝置300之脫附氣體G11產生的脫附冷凝液L2,容易往冷卻冷凝裝置100移動之緣故。更佳態樣中,宜構成為使冷卻冷凝裝置100之排放氣體G1的導入部及貯存槽125此兩處流通。此係使由脫附氣體G11產生的脫附冷凝液L2變得容易直接往貯存槽125回收之緣故。The second flow path F2 is to return the desorbed gas G11 to the inlet of the exhaust gas G1 of the cooling and condensing device 100. The second flow path F2 is preferably connected in such a way that the desorption part 311 is arranged above the confluence position of the desorption gas G11 and the exhaust gas G1 supplied to the cooling and condensing device 100. This is because the desorption condensate L2 generated by the desorption gas G11 of the concentrating device 300 is easy to move to the cooling and condensing device 100. In a more preferable aspect, it is preferable to configure the cooling and condensing device 100 to circulate the discharge gas G1 and the storage tank 125 in two places. This is because the desorption condensate L2 generated by the desorption gas G11 is easily directly recovered to the storage tank 125.

實施形態的有機溶劑回收系統1A之濃縮裝置300的使用於脫附之高溫氣體G10,如同前述宜為利用再生加熱器350等加熱手段使潔淨氣體G9的一部分成為高溫狀態者,但在排放氣體G1的溫度為50~200℃的溫度之情況中,更宜以再生加熱器350等使排放氣體G1的一部分升溫而使用。此係因藉由將高溫之排放氣體使用於脫附,而可降低再生加熱器350的使用效用,藉由排放氣體G1的溫度而使脫附不需要再生加熱器350之緣故。此外,將排放氣體G1及脫附氣體G11往冷卻冷凝裝置100通過的比例,假設為排放氣體G1為0%~50%,脫附氣體G11為50%~100%。The concentration device 300 of the organic solvent recovery system 1A of the embodiment uses the high-temperature gas G10 for desorption. As mentioned above, it is preferable to use heating means such as the regenerative heater 350 to make part of the clean gas G9 into a high-temperature state, but the exhaust gas G1 When the temperature is 50 to 200°C, it is more preferable to use the regenerative heater 350 or the like to raise a part of the exhaust gas G1. This is because by using high-temperature exhaust gas for desorption, the utility of the regeneration heater 350 can be reduced, and the regeneration heater 350 is not required for desorption by the temperature of the exhaust gas G1. In addition, the ratio of the exhaust gas G1 and the desorption gas G11 to the cooling and condensing device 100 is assumed to be 0%-50% for the exhaust gas G1 and 50%-100% for the desorption gas G11.

排放氣體G1,係從生產設備130排出之氣體的情況,亦可成為使冷卻處理氣體的其餘部分(返回氣體)G6,返回至生產設備130之構成。When the exhaust gas G1 is the gas discharged from the production equipment 130, it can also be a structure that returns the remaining part (return gas) G6 of the cooling processing gas to the production equipment 130.

欲進一步降低冷卻處理氣體的其餘部分(返回氣體)G6所包含之有機溶劑濃度的情況,亦可如圖2所示,追加導入將冷卻處理氣體的其餘部分(返回氣體)G6予以處理之濃縮裝置500。此外,欲進一步降低潔淨氣體G9所包含之有機溶劑濃度的情況,亦可如圖3所示,追加導入將潔淨氣體G9予以處理之濃縮裝置600。濃縮裝置500、濃縮裝置600,可與濃縮裝置300為相同構成,亦可為其他構成。此外,追加導入之濃縮裝置數量並無限制。將從任一濃縮裝置排出之脫附氣體,經由第二流通路徑F2,送回至冷卻冷凝裝置100之排放氣體G1的導入部。To further reduce the concentration of the organic solvent contained in the remaining part of the cooling process gas (return gas) G6, as shown in Figure 2, an additional concentrating device for processing the remaining part of the cooling process gas (return gas) G6 can be introduced. 500. In addition, if it is desired to further reduce the concentration of the organic solvent contained in the clean gas G9, as shown in FIG. 3, a concentrating device 600 for processing the clean gas G9 may be additionally introduced. The concentrating device 500 and the concentrating device 600 may have the same configuration as the concentrating device 300 or other configurations. In addition, there is no limit to the number of additional enrichment devices introduced. The desorbed gas discharged from any of the concentrating devices is returned to the inlet of the exhaust gas G1 of the cooling and condensing device 100 via the second flow path F2.

在實施形態,作為排放氣體G1所含有的有機溶劑,列舉可藉由1℃~50℃之冷卻而液化回收的有機溶劑。作為有機溶劑,例如為N-甲基吡咯烷酮、N-乙基吡咯烷酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、或正癸烷。其等僅為例示,並未限定於其等。所含有的有機溶劑,可為1種亦可為複數種。In the embodiment, examples of the organic solvent contained in the exhaust gas G1 include organic solvents that can be liquefied and recovered by cooling at 1°C to 50°C. The organic solvent is, for example, N-methylpyrrolidone, N-ethylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, or n-decane. These etc. are only examples, and are not limited to them. The organic solvent contained may be one type or plural types.

[實施形態1B] 圖4係概略顯示實施形態1B的有機溶劑回收系統1B之構成的圖。有機溶劑回收系統1B,係由冷卻冷凝裝置100、第一濃縮裝置200、第二濃縮裝置300、及各種流通路徑構成。[Embodiment 1B] Fig. 4 is a diagram schematically showing the configuration of the organic solvent recovery system 1B of the embodiment 1B. The organic solvent recovery system 1B is composed of a cooling and condensing device 100, a first concentrating device 200, a second concentrating device 300, and various circulation paths.

冷卻冷凝裝置100,具備冷卻部110及分離部120。含有有機溶劑之排放氣體G1,從生產設備130排出。排放氣體G1,藉由通過冷卻部110而冷卻。排放氣體G1,伴隨通過冷卻部110而使有機溶劑液化冷凝。The cooling and condensing device 100 includes a cooling unit 110 and a separation unit 120. The exhaust gas G1 containing the organic solvent is exhausted from the production equipment 130. The exhaust gas G1 is cooled by passing through the cooling unit 110. The exhaust gas G1 liquefies and condenses the organic solvent as it passes through the cooling unit 110.

通過冷卻部110之排放氣體G2,藉由通過分離部120,而分離為經液化冷凝之冷卻冷凝液L1與有機溶劑濃度降低之冷卻處理氣體G3。冷卻處理氣體G3,通過腔室123,作為冷卻處理氣體G4從冷卻冷凝裝置100往第一濃縮裝置200排出。The exhaust gas G2 passing through the cooling part 110 is separated into the cooling condensate L1 which has been liquefied and condensed and the cooling process gas G3 whose concentration of the organic solvent is reduced by passing through the separation part 120. The cooling processing gas G3 passes through the chamber 123 and is discharged from the cooling and condensing device 100 to the first concentrating device 200 as the cooling processing gas G4.

冷卻部110之冷卻手段及構成,並無特別限定。在實施形態1B,使用藉由冷卻水、冷水、鹹水等冷媒與排放氣體之間接熱交換而進行冷卻的第一熱交換器111。第一熱交換器111,位於使排放氣體G1往上下方向流通之位置。The cooling means and structure of the cooling unit 110 are not particularly limited. In Embodiment 1B, the first heat exchanger 111 that performs cooling by heat exchange between a refrigerant such as cooling water, cold water, salt water, and the exhaust gas is used. The first heat exchanger 111 is located at a position where the exhaust gas G1 circulates in the up and down direction.

冷卻部110,於第一熱交換器111之前,設置藉由後述冷卻處理氣體G6與排放氣體G1之熱交換而使排放氣體G1冷卻的第二熱交換器112。第二熱交換器112,可減少第一熱交換器111所需之傳熱面積與冷媒量。排放氣體G1及冷卻處理氣體G6的一部分,通過第五流通路徑F5往生產設備130返回。第一熱交換器111及第二熱交換器112中的冷卻溫度等之條件,依作為回收對象的有機溶劑適當決定即可。The cooling unit 110 is provided before the first heat exchanger 111 with a second heat exchanger 112 that cools the exhaust gas G1 by heat exchange between the cooling process gas G6 and the exhaust gas G1 described later. The second heat exchanger 112 can reduce the heat transfer area and the amount of refrigerant required by the first heat exchanger 111. A part of the exhaust gas G1 and the cooling process gas G6 returns to the production facility 130 through the fifth flow path F5. Conditions such as the cooling temperature in the first heat exchanger 111 and the second heat exchanger 112 may be appropriately determined depending on the organic solvent to be recovered.

分離部120之分離手段及構成並無特別限定。在實施形態1B,使用除霧器、濾網、及篩孔等接觸液滴而加以捕捉的網眼狀構造體121。分離部120具備漏斗狀之承接部122,承接部122承接以冷卻部110冷卻的包含有機溶劑之冷卻冷凝液L1。以冷卻部110冷卻之冷卻冷凝液L1、及網眼狀構造體121捕捉到之冷卻冷凝液L1,因重力而流至承接部122後,往配置於承接部122的下部之貯存槽125集液,作為回收液L3回收。The separation means and structure of the separation part 120 are not particularly limited. In Embodiment 1B, a mesh-like structure 121 that contacts and captures droplets, such as a demister, a filter, and a mesh, is used. The separation part 120 includes a funnel-shaped receiving part 122, and the receiving part 122 receives the cooling condensate L1 containing the organic solvent cooled by the cooling part 110. The cooling condensate L1 cooled by the cooling part 110 and the cooling condensate L1 captured by the mesh structure 121 flow to the receiving part 122 by gravity, and then collect the liquid in the storage tank 125 arranged at the lower part of the receiving part 122 , As the recovery liquid L3 recovered.

腔室123,係具有一定容量之空間的構造體。於腔室123內,設置堰部124。堰部124,防止冷卻冷凝液L1的一部分往腔室123之前端方向移動而往作為冷卻氣體流通路徑的第一流通路徑F1流通之情形。堰部124,達到將冷卻冷凝液L1確實地回收之作用。使於腔室123內貯存一定時間之冷卻處理氣體G3,作為冷卻處理氣體G4在第一流通路徑F1流通,往第一濃縮裝置200供給。The chamber 123 is a structure with a certain volume of space. Inside the cavity 123, a weir 124 is provided. The weir 124 prevents a part of the cooling condensate L1 from moving in the direction of the front end of the chamber 123 and flowing to the first flow path F1 as a cooling gas flow path. The weir 124 has the function of reliably recovering the cooling condensate L1. The cooling processing gas G3 stored in the chamber 123 for a certain period of time is circulated as the cooling processing gas G4 in the first circulation path F1 and supplied to the first concentration device 200.

在有機溶劑回收系統1B,沿著排放氣體G1的流動方向觀察之情況,相對於從冷卻部110往分離部120流動的方向,使分離部120內從網眼狀構造體121往腔室123流動的方向交叉,藉以成為使排放氣體G1(排放氣體G2、冷卻處理氣體G3)沿L字形方向流動的構造。In the organic solvent recovery system 1B, when viewed along the flow direction of the exhaust gas G1, the inside of the separation section 120 flows from the mesh structure 121 to the chamber 123 relative to the direction from the cooling section 110 to the separation section 120 The directions intersect with each other to form a structure in which exhaust gas G1 (exhaust gas G2, cooling process gas G3) flows in an L-shaped direction.

有機溶劑回收系統1B,以冷卻部110與分離部120構成處為L字形構造,故可抑制因液滴、飛沫而使第一濃縮裝置200及第二濃縮裝置300暴露的情形。第一濃縮裝置200及第二濃縮裝置300,若暴露而吸附劑潤濕,則有強度降低或破損的可能。有機溶劑回收系統1B,藉由具有L字形構造,而可防止第一濃縮裝置200及第二濃縮裝置300之強度降低或破損。The organic solvent recovery system 1B has an L-shaped structure where the cooling unit 110 and the separation unit 120 are formed, so that the first concentrating device 200 and the second concentrating device 300 can be prevented from being exposed due to droplets and splashes. If the first concentrating device 200 and the second concentrating device 300 are exposed and the adsorbent is wetted, the strength may be reduced or damaged. The organic solvent recovery system 1B has an L-shaped structure to prevent the strength of the first concentrating device 200 and the second concentrating device 300 from being reduced or damaged.

第一濃縮裝置200具備包含吸附材之吸附轉筒212,藉由與氣體接觸而吸附其含有的有機溶劑,藉由與加熱氣體接觸而使吸附的有機溶劑脫附。吸附轉筒212,係由以複數個分隔部分隔出之複數個吸附單元210構成。吸附轉筒212,藉由複數個吸附單元210而使全體成為中空圓柱狀的形狀。吸附轉筒212,設置於處理室內,設置為流體可沿徑方向流動。吸附轉筒212,設置為受到馬達之旋轉驅動力而可繞筒軸旋轉。The first concentrating device 200 includes an adsorption drum 212 containing an adsorbent, and adsorbs the organic solvent contained in it by contact with the gas, and desorbs the adsorbed organic solvent by contact with the heated gas. The adsorption drum 212 is composed of a plurality of adsorption units 210 separated by a plurality of partitions. The suction drum 212 has a hollow cylindrical shape as a whole by a plurality of suction units 210. The adsorption drum 212 is arranged in the processing chamber and arranged so that the fluid can flow in the radial direction. The suction drum 212 is configured to be rotated around the drum shaft by the rotational driving force of the motor.

在第一濃縮裝置200,使吸附單元210的一部分構成吸附部,吸附從吸附單元210的外側向內側供給之冷卻處理氣體G4所含有的有機溶劑;且使吸附單元210的其餘部分構成脫附部,藉由從吸附單元210的內側向外側供給加熱空氣而使吸附於吸附單元210的有機溶劑從吸附單元210脫附。In the first concentrating device 200, a part of the adsorption unit 210 constitutes an adsorption part, and the organic solvent contained in the cooling processing gas G4 supplied from the outside to the inside of the adsorption unit 210 is adsorbed; and the remaining part of the adsorption unit 210 constitutes a desorption part The organic solvent adsorbed on the adsorption unit 210 is desorbed from the adsorption unit 210 by supplying heated air from the inside to the outside of the adsorption unit 210.

潔淨化時,將供給至處理室內之冷卻處理氣體G4,從吸附轉筒212的外周面往吸附部導入。導入至吸附部之冷卻處理氣體G4,在沿著徑方向從外周面向內周面通過吸附轉筒212時,將有機溶劑吸附至位於吸附部之複數個吸附單元210,藉以潔淨化。At the time of cleaning, the cooled processing gas G4 supplied into the processing chamber is introduced from the outer peripheral surface of the adsorption drum 212 to the adsorption part. When the cooling processing gas G4 introduced into the adsorption part passes through the adsorption drum 212 from the outer peripheral surface to the inner peripheral surface along the radial direction, the organic solvent is adsorbed to the plurality of adsorption units 210 located in the adsorption part, thereby being cleaned.

將經潔淨化的作為被處理流體之冷卻處理氣體G5、G6,作為潔淨氣體,從吸附單元210之上部排出。使排出之潔淨氣體的一部分,作為冷卻處理氣體G5在第二流通路徑F2流通,往第二濃縮裝置300供給。使排出之潔淨氣體的一部分,作為冷卻處理氣體G6在第四流通路徑F4流通,往第二熱交換器112返回。The cleaned cooling processing gases G5 and G6 serving as the fluid to be processed are discharged from the upper portion of the adsorption unit 210 as clean gas. A part of the discharged clean gas is circulated through the second flow path F2 as the cooling processing gas G5, and is supplied to the second concentrating device 300. A part of the discharged clean gas is circulated through the fourth flow path F4 as the cooling processing gas G6, and returns to the second heat exchanger 112.

內周側流路形成構件211及外周側流路形成構件213,以將圓周方向中之吸附轉筒212的一部分夾入之方式,於吸附轉筒212的內周側及外周側中彼此相對向地配置。由內周側流路形成構件211及外周側流路形成構件213所包夾之吸附轉筒212的區域為脫附部。The inner circumference side flow path forming member 211 and the outer circumference side flow path forming member 213 are opposed to each other on the inner circumference side and the outer circumference side of the suction drum 212 by sandwiching a part of the suction drum 212 in the circumferential direction地Configuration. The area of the adsorption drum 212 sandwiched by the inner circumference side flow path forming member 211 and the outer circumference side flow path forming member 213 is a desorption part.

為了施行有機溶劑之脫附,而從內周側流路形成構件211,對脫附部導入藉由再生加熱器250加熱之冷卻處理氣體G5的一部分即高溫氣體G7。導入至脫附部之高溫氣體G7,在通過吸附轉筒212時,從位於脫附部之複數個吸附單元210,藉由熱使吸附於其等的有機溶劑脫附。含有有機溶劑之脫附氣體G8,作為濃縮氣體,從脫附部通過外周側流路形成構件213,往處理室外排出,返回至第三流通路徑F3。將脫附氣體G8中所含有的有機溶劑之一部分液化冷凝,作為脫附冷凝液L2往貯存槽125集液。In order to perform the desorption of the organic solvent, the high-temperature gas G7, which is a part of the cooling process gas G5 heated by the regeneration heater 250, is introduced into the desorption portion from the inner peripheral side flow path forming member 211. When the high-temperature gas G7 introduced into the desorption section passes through the adsorption drum 212, the organic solvent adsorbed thereon is desorbed by heat from the plurality of adsorption units 210 located in the desorption section. The desorbed gas G8 containing an organic solvent, as a concentrated gas, is discharged from the desorbed part through the outer peripheral side flow path forming member 213 to the outside of the processing room, and returns to the third flow path F3. A part of the organic solvent contained in the desorption gas G8 is liquefied and condensed, and collected in the storage tank 125 as the desorption condensate L2.

第三流通路徑F3,係將脫附氣體G8及後述脫附氣體G11送回至冷卻冷凝裝置100之排放氣體G1的導入部之部位。第三流通路徑F3,宜以將脫附部配置於較脫附氣體與往冷卻冷凝裝置100供給之排放氣體G1的合流位置更為上部之方式連接。此係因由第一濃縮裝置200之脫附氣體G8及第二濃縮裝置300之脫附氣體G11產生的脫附冷凝液L2,容易往冷卻冷凝裝置100移動之緣故。第三流通路徑F3,宜構成為使冷卻冷凝裝置100之排放氣體G1的導入部及貯存槽125此兩處流通。此係使由脫附氣體G8及脫附氣體G11產生的脫附冷凝液L2變得容易直接往貯存槽125回收之緣故。The third flow path F3 is a part where the desorbed gas G8 and the desorbed gas G11 described later are returned to the inlet of the exhaust gas G1 of the cooling and condensing device 100. The third flow path F3 is preferably connected in such a way that the desorption part is arranged above the confluence position of the desorption gas and the exhaust gas G1 supplied to the cooling and condensing device 100. This is because the desorption condensate L2 generated by the desorption gas G8 of the first concentration device 200 and the desorption gas G11 of the second concentration device 300 is easy to move to the cooling and condensing device 100. The third flow path F3 is preferably configured to circulate both the inlet of the exhaust gas G1 of the cooling and condensing device 100 and the storage tank 125. This is because the desorption condensate L2 generated by the desorption gas G8 and the desorption gas G11 is easily recovered directly to the storage tank 125.

於第一濃縮裝置200中,對位於吸附部之吸附單元210施行被處理物質的吸附處理,對在吸附處理後位於脫附部之吸附單元210施行被處理物質的脫附處理。藉由使吸附轉筒212繞筒軸旋轉,而使吸附單元210將脫附部與吸附部交互地移動,連續地實施被處理物質的吸附處理與脫附處理。In the first concentrating device 200, the adsorption unit 210 located in the adsorption part is subjected to adsorption treatment of the substance to be treated, and the adsorption unit 210 located in the desorption part after the adsorption treatment is subjected to the desorption treatment of the substance to be treated. By rotating the adsorption drum 212 around the cylinder axis, the adsorption unit 210 alternately moves the desorption part and the adsorption part to continuously perform the adsorption treatment and desorption treatment of the substance to be processed.

作為構成吸附單元210之吸附元件的材料,可利用活性氧化鋁、矽膠、活性碳材料、沸石等。吸附單元210中之吸附元件的形狀並無特別限定,例如,可為將含有活性碳材料或沸石之薄片形成為蜂巢狀者,亦可為將活性碳纖維不織布疊層者。As the material constituting the adsorption element of the adsorption unit 210, activated alumina, silica gel, activated carbon material, zeolite, etc. can be used. The shape of the adsorption element in the adsorption unit 210 is not particularly limited. For example, it may be a honeycomb-shaped sheet containing activated carbon material or zeolite, or a laminate of activated carbon fiber non-woven fabrics.

第二濃縮裝置300具備包含吸附材之吸附元件310,藉由與氣體接觸而吸附其含有的有機溶劑,藉由與加熱氣體接觸而使吸附的有機溶劑脫附。吸附元件310,包含脫附部(脫附區)311與吸附部(吸附區)312。吸附部312,藉由將冷卻處理氣體G5導入,而使冷卻處理氣體G5與吸附材接觸,藉以將冷卻處理氣體G5所含有的有機溶劑吸附於吸附材,使冷卻處理氣體G5潔淨化,作為潔淨氣體G9排出。The second concentrating device 300 includes an adsorption element 310 including an adsorbent, and adsorbs the organic solvent contained in it by contact with the gas, and desorbs the adsorbed organic solvent by contact with the heated gas. The adsorption element 310 includes a desorption part (desorption zone) 311 and an adsorption part (adsorption zone) 312. The adsorption part 312 brings the cooling processing gas G5 into contact with the adsorbing material by introducing the cooling processing gas G5, thereby adsorbing the organic solvent contained in the cooling processing gas G5 to the adsorbing material, so that the cooling processing gas G5 is cleaned as a clean The gas G9 is discharged.

脫附部311,藉由將較冷卻處理氣體G5更高溫之氣體G10導入至吸附材,而使有機溶劑從吸附材脫附,藉此作為含有有機溶劑之脫附氣體G11排出。The desorption part 311 introduces a gas G10 that has a higher temperature than the cooling process gas G5 to the adsorption material to desorb the organic solvent from the adsorption material, thereby discharging the desorption gas G11 containing the organic solvent.

作為吸附元件310所包含之吸附材,廣泛利用活性氧化鋁、矽膠、活性碳材料或沸石,其中特別適合利用活性碳與疏水性沸石。As the adsorption material contained in the adsorption element 310, activated alumina, silica gel, activated carbon material or zeolite is widely used, and activated carbon and hydrophobic zeolite are particularly suitable for use.

如圖4所示,第二濃縮裝置300,具備旋轉軸、及繞旋轉軸而設置之吸附元件310。第二濃縮裝置300,為下述構成:藉由使吸附元件310繞旋轉軸旋轉,而於吸附部312中,使吸附有從第二流通路徑F2導入之冷卻處理氣體G5中的有機溶劑之吸附材連續地往脫附部311移動。As shown in FIG. 4, the second concentrating device 300 includes a rotating shaft and an adsorption element 310 arranged around the rotating shaft. The second concentrating device 300 is configured as follows: by rotating the adsorption element 310 around the rotation axis, the adsorption part 312 adsorbs the organic solvent in the cooling processing gas G5 introduced from the second flow path F2. The material continuously moves to the desorption part 311.

如圖4所示,第二濃縮裝置300,宜將脫附部311配置於較吸附部312更為下部。此係因即便在脫附氣體G11中所含有的有機溶劑之一部分液化冷凝而產生脫附冷凝液L2的情況中,仍使脫附冷凝液L2不易附著於吸附部312之緣故。使脫附冷凝液L2,往較脫附部311更下部滴落,沿著脫附部之外部的內面等而回收。更佳態樣中,宜為了使脫附冷凝液L2更容易往下方滴落,而使脫附部311往下方傾斜。As shown in FIG. 4, in the second concentrating device 300, it is advisable to dispose the desorption part 311 at a lower part than the adsorption part 312. This is because even when a part of the organic solvent contained in the desorption gas G11 is liquefied and condensed to produce the desorption condensate L2, the desorption condensate L2 is still difficult to adhere to the adsorption part 312. The desorption condensate L2 is dropped to a lower portion than the desorption part 311, and is recovered along the inner surface of the outside of the desorption part. In a more preferable aspect, in order to make it easier for the desorption condensate L2 to drip downward, the desorption part 311 should be inclined downward.

第二濃縮裝置300,亦可具備脫附部311之脫附處理結束的部分在往吸附部312移動之前往其移動的清潔部(吹掃部)。亦可為將潔淨氣體G9的一部分導入至吹掃部,將從吹掃部排出之吹掃部出口氣體導入至吸附部312之構成。此係因藉由以潔淨氣體G9清潔結束脫附的吸附材,而防止殘留於吸附材之脫附氣體G11往潔淨氣體G9的混入,可將吸附材冷卻之緣故。The second concentrating device 300 may also include a cleaning part (purge part) that moves to the adsorption part 312 after the part where the desorption process of the desorption part 311 is completed. It may also be a configuration in which a part of the clean gas G9 is introduced to the purge section, and the purge section outlet gas discharged from the purge section is introduced to the adsorption section 312. This is because by cleaning the desorbed adsorbent with the clean gas G9, the desorption gas G11 remaining in the adsorbent is prevented from mixing into the clean gas G9, and the adsorbent can be cooled.

使用於脫附之高溫氣體G10,宜為利用再生加熱器350等加熱手段使潔淨氣體G9的一部分成為高溫狀態者。此係因吸附部312中,不增加有機溶劑含有氣體的處理風量之緣故。The high-temperature gas G10 used for desorption is preferably one that uses heating means such as the regeneration heater 350 to make a part of the clean gas G9 into a high-temperature state. This is because in the adsorption part 312, the processing air volume of the organic solvent-containing gas is not increased.

[實施形態2B] 圖5係概略顯示實施形態2B的有機溶劑回收系統2B之構成的圖。有機溶劑回收系統2B,係由冷卻冷凝裝置100、第一濃縮裝置200、第二濃縮裝置300、及各種流通路徑構成。有機溶劑回收系統2B,除了下述點以外之構成,與實施形態1B的有機溶劑回收系統1B相同:於腔室123內設置加熱器126。[Embodiment 2B] Fig. 5 is a diagram schematically showing the configuration of an organic solvent recovery system 2B of Embodiment 2B. The organic solvent recovery system 2B is composed of a cooling and condensing device 100, a first concentrating device 200, a second concentrating device 300, and various circulation paths. The organic solvent recovery system 2B has the same configuration as the organic solvent recovery system 1B of Embodiment 1B except for the following points: a heater 126 is installed in the chamber 123.

加熱器126,將冷卻後之冷卻處理氣體G3略為加熱。藉由將冷卻處理氣體G3略微加熱,而可防止有機溶劑或水分之冷凝。The heater 126 slightly heats the cooled processing gas G3 after cooling. By slightly heating the cooling process gas G3, the condensation of the organic solvent or moisture can be prevented.

[作用/效果] 本實施形態之冷卻冷凝裝置100,包含:冷卻部110,使排放氣體G1流通;以及分離部120,在沿著排放氣體G1的流動方向觀察之情況,位於冷卻部110的下游側。分離部120,具備:承接部122,承接以冷卻部110冷卻的含有有機溶劑之冷卻冷凝液L1;網眼狀構造體121,藉由接觸冷卻後之排放氣體G2,而使冷卻冷凝液L1與冷卻處理氣體G3分離;以及腔室123,將通過網眼狀構造體121後之冷卻處理氣體G3貯存一定時間。[Effect] The cooling and condensing device 100 of this embodiment includes a cooling unit 110 that circulates the exhaust gas G1, and a separation unit 120 located on the downstream side of the cooling unit 110 when viewed along the flow direction of the exhaust gas G1. The separating part 120 is provided with: a receiving part 122 for receiving the cooling condensate L1 containing an organic solvent cooled by the cooling part 110; The cooling processing gas G3 is separated; and the chamber 123 stores the cooling processing gas G3 after passing through the mesh structure 121 for a certain period of time.

沿著排放氣體G1的流動方向觀察之情況,相對於從冷卻部110往分離部120流動的方向,使分離部120內從網眼狀構造體121往腔室123流動的方向交叉,藉以使該排放氣體沿L字形方向流動。藉此,可從排放氣體G1將含有有機溶劑之冷卻冷凝液L1更高效率地回收。本實施形態之有機溶劑回收系統,由於以冷卻部110與分離部120構成處為L字形構造,故可抑制因液滴、飛沫而使設置於後段之第一濃縮裝置200及第二濃縮裝置300暴露的情形。When viewed along the flow direction of the exhaust gas G1, with respect to the direction from the cooling section 110 to the separation section 120, the direction in which the mesh structure 121 flows to the chamber 123 in the separation section 120 is crossed, so that the The exhaust gas flows in the L-shaped direction. Thereby, the cooling condensate L1 containing the organic solvent can be recovered more efficiently from the exhaust gas G1. The organic solvent recovery system of this embodiment has an L-shaped structure where the cooling unit 110 and the separation unit 120 are formed, so that the first concentrating device 200 and the second concentrating device 300 installed in the subsequent stage can be suppressed due to droplets and droplets. The situation of exposure.

於本實施形態之網眼狀構造體121的下游側,配置用於將冷卻處理氣體G3加熱之加熱器126。藉此,藉由將冷卻處理氣體G3略微加熱,而可防止有機溶劑或水分之冷凝。On the downstream side of the mesh structure 121 of this embodiment, a heater 126 for heating the cooling process gas G3 is arranged. Thereby, by slightly heating the cooling process gas G3, the condensation of the organic solvent or moisture can be prevented.

於本實施形態之腔室123內,設置堰部124。藉此,可防止冷卻冷凝液L1往作為冷卻氣體流通路徑之第一流通路徑F1流動。In the chamber 123 of this embodiment, a weir 124 is provided. Thereby, the cooling condensate L1 can be prevented from flowing to the first circulation path F1 as the cooling gas circulation path.

本實施形態之濃縮裝置,包含第一濃縮裝置200、及位於第一濃縮裝置的下游側之第二濃縮裝置300。第一濃縮裝置200,將從第一流通路徑F1導入之冷卻處理氣體G4所含有的有機溶劑藉由吸附單元210吸附,作為有機溶劑的濃度進一步降低之冷卻處理氣體G5排出,導入高溫氣體G7而從吸附單元210使有機溶劑脫附,作為脫附氣體G8排出。The concentration device of this embodiment includes a first concentration device 200 and a second concentration device 300 located on the downstream side of the first concentration device. The first concentrator 200 absorbs the organic solvent contained in the cooling process gas G4 introduced from the first flow path F1 by the adsorption unit 210, and discharges it as the cooling process gas G5 whose concentration of the organic solvent is further reduced, and introduces the high-temperature gas G7. The organic solvent is desorbed from the adsorption unit 210 and discharged as a desorption gas G8.

本實施形態之有機溶劑回收系統,更包含使冷卻處理氣體G5的一部分流通之第二流通路徑F2;第二濃縮裝置300,將從第二流通路徑F2導入之冷卻處理氣體G5所含有的有機溶劑藉由吸附元件310吸附,作為有機溶劑的濃度進一步降低之潔淨氣體G9排出,導入高溫氣體G10而從吸附元件310使有機溶劑脫附,作為脫附氣體G11排出。The organic solvent recovery system of this embodiment further includes a second flow path F2 for circulating a part of the cooling process gas G5; the second concentrating device 300 includes the organic solvent contained in the cooling process gas G5 introduced from the second flow path F2 The clean gas G9 whose concentration of the organic solvent is further reduced by the adsorption element 310 is discharged, and the high-temperature gas G10 is introduced to desorb the organic solvent from the adsorption element 310 and is discharged as the desorption gas G11.

將本實施形態之第一濃縮裝置200,於使吸附單元210繞筒軸旋轉之中空圓柱狀的轉筒之繞筒軸的圓周方向配置複數個。藉此,可高效率地回收有機溶劑。The first concentrating device 200 of the present embodiment is arranged in plural in the circumferential direction around the drum axis of the hollow cylindrical drum that rotates the adsorption unit 210 around the drum axis. Thereby, the organic solvent can be recovered efficiently.

本實施形態之第二濃縮裝置300,將吸附元件310配置於繞筒軸旋轉之圓盤狀的吸附轉筒。藉此,可高效率地回收有機溶劑。In the second concentrating device 300 of this embodiment, the adsorption element 310 is arranged in a disc-shaped adsorption drum that rotates around a drum axis. Thereby, the organic solvent can be recovered efficiently.

[其他實施形態] 上述實施形態中,濃縮裝置,利用第一濃縮裝置200與第二濃縮裝置300此兩台。濃縮裝置,亦可因應風量,應用兩台第一濃縮裝置200或兩台第二濃縮裝置300。此外,亦可因應去除效率,應用三台以上之濃縮裝置。[Other embodiments] In the above embodiment, two concentrating devices, the first concentrating device 200 and the second concentrating device 300, are used. The concentration device can also use two first concentration devices 200 or two second concentration devices 300 according to the air volume. In addition, more than three concentrators can also be used according to the removal efficiency.

作為排放氣體G1所含有的有機溶劑,列舉可藉由1℃~50℃之冷卻而液化回收的有機溶劑。作為有機溶劑,例如為N-甲基吡咯烷酮、N-乙基吡咯烷酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、或正癸烷。其等僅為例示,並未限定於其等。所含有的有機溶劑,可為1種亦可為複數種。Examples of the organic solvent contained in the exhaust gas G1 include organic solvents that can be liquefied and recovered by cooling at 1°C to 50°C. The organic solvent is, for example, N-methylpyrrolidone, N-ethylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, or n-decane. These etc. are only examples, and are not limited to them. The organic solvent contained may be one type or plural types.

[實施形態1C] 圖6係概略顯示實施形態1C的有機溶劑回收系統1C之構成的圖。有機溶劑回收系統1C,係由冷卻冷凝裝置100、第一濃縮裝置200、第二濃縮裝置300、及各種流通路徑構成。[Embodiment 1C] Fig. 6 is a diagram schematically showing the configuration of the organic solvent recovery system 1C of the embodiment 1C. The organic solvent recovery system 1C is composed of a cooling and condensing device 100, a first concentrating device 200, a second concentrating device 300, and various circulation paths.

冷卻冷凝裝置100,具備冷卻部110及分離部120。含有有機溶劑之排放氣體G1,從生產設備130排出。排放氣體G1,藉由通過冷卻部110而冷卻。排放氣體G1,伴隨通過冷卻部110而使有機溶劑液化冷凝。The cooling and condensing device 100 includes a cooling unit 110 and a separation unit 120. The exhaust gas G1 containing the organic solvent is exhausted from the production equipment 130. The exhaust gas G1 is cooled by passing through the cooling unit 110. The exhaust gas G1 liquefies and condenses the organic solvent as it passes through the cooling unit 110.

通過冷卻部110之排放氣體G2,藉由通過分離部120,而分離為經液化冷凝之冷卻冷凝液L1與有機溶劑濃度降低之冷卻處理氣體G3。冷卻處理氣體G3,通過腔室123,作為冷卻處理氣體G4從冷卻冷凝裝置100往第一濃縮裝置200排出。The exhaust gas G2 passing through the cooling part 110 is separated into the cooling condensate L1 which has been liquefied and condensed and the cooling process gas G3 whose concentration of the organic solvent is reduced by passing through the separation part 120. The cooling processing gas G3 passes through the chamber 123 and is discharged from the cooling and condensing device 100 to the first concentrating device 200 as the cooling processing gas G4.

冷卻部110之冷卻手段及構成,並無特別限定。在實施形態1,使用藉由冷卻水、冷水、鹹水等冷媒與排放氣體之間接熱交換而進行冷卻的第一熱交換器111。第一熱交換器111,位於使排放氣體G1往水平方向流通之位置。The cooling means and structure of the cooling unit 110 are not particularly limited. In the first embodiment, the first heat exchanger 111 that performs cooling by exchanging heat between a refrigerant such as cooling water, cold water, or salt water, and exhaust gas is used. The first heat exchanger 111 is located at a position where the exhaust gas G1 circulates in the horizontal direction.

冷卻部110,於第一熱交換器111之前,設置藉由後述冷卻處理氣體G6與排放氣體G1之熱交換而使排放氣體G1冷卻的第二熱交換器112。第二熱交換器112,可減少第一熱交換器111所需之傳熱面積與冷媒量。排放氣體G1及冷卻處理氣體G6的一部分,通過第五流通路徑F5往生產設備130返回。第一熱交換器111及第二熱交換器112中的冷卻溫度等之條件,依作為回收對象的有機溶劑適當決定即可。The cooling unit 110 is provided before the first heat exchanger 111 with a second heat exchanger 112 that cools the exhaust gas G1 by heat exchange between the cooling process gas G6 and the exhaust gas G1 described later. The second heat exchanger 112 can reduce the heat transfer area and the amount of refrigerant required by the first heat exchanger 111. A part of the exhaust gas G1 and the cooling process gas G6 returns to the production facility 130 through the fifth flow path F5. Conditions such as the cooling temperature in the first heat exchanger 111 and the second heat exchanger 112 may be appropriately determined depending on the organic solvent to be recovered.

分離部120之分離手段及構成並無特別限定。在實施形態1C,使用除霧器、濾網、及篩孔等接觸液滴而加以捕捉的網眼狀構造體121。網眼狀構造體121捕捉到之冷卻冷凝液L1,因重力而往配置於網眼狀構造體121的下部之貯存槽125集液,作為回收液L3回收。The separation means and structure of the separation part 120 are not particularly limited. In Embodiment 1C, a mesh-like structure 121 that contacts and captures droplets, such as a demister, a filter, and a mesh, is used. The cooling condensate L1 captured by the mesh structure 121 is collected by gravity into the storage tank 125 arranged at the lower part of the mesh structure 121 and is recovered as the recovery liquid L3.

腔室123,係具有一定容量之空間的構造體。使於腔室123內貯存一定時間之冷卻處理氣體G3,作為冷卻處理氣體G4在第一流通路徑F1流通,往第一濃縮裝置200供給。腔室123具備分隔部128,分隔部128可與從網眼狀構造體121排出之冷卻處理氣體G3的排氣方向對向而進行第一流通路徑F1的吸入。The chamber 123 is a structure with a certain volume of space. The cooling processing gas G3 stored in the chamber 123 for a certain period of time is circulated as the cooling processing gas G4 in the first circulation path F1 and supplied to the first concentration device 200. The chamber 123 is provided with a partition 128 which can be opposed to the exhaust direction of the cooling process gas G3 discharged from the mesh-like structure 121 to suck in the first flow path F1.

第一流通路徑F1,係將冷卻處理氣體G4從腔室123往第一濃縮裝置200導入之部位。第一流通路徑F1的往腔室123之連接口,宜為腔室123之頂棚部127。藉此,抑制分離部120未捕捉到的微少液滴之往第一濃縮裝置200的侵入,可防止後述因第一濃縮裝置200之吸附單元210的潤濕所造成之性能降低/強度降低等。更佳態樣中,宜以與冷卻處理氣體G3的流通方向對向之方式,將冷卻處理氣體G4取出。藉此,可進一步防止液滴的侵入。除此之外,亦可於冷卻處理氣體G4之取出口,設置與上述網眼狀構造體121類似的防液滴侵入構件,亦可設置用於使液滴氣化的加熱器。The first flow path F1 is a part where the cooling processing gas G4 is introduced from the chamber 123 to the first concentration device 200. The connection port of the first circulation path F1 to the cavity 123 is preferably the ceiling portion 127 of the cavity 123. Thereby, the intrusion of minute droplets not caught by the separating unit 120 into the first concentrating device 200 can be suppressed, and the performance degradation/strength degradation caused by the wetting of the adsorption unit 210 of the first concentrating device 200 described later can be prevented. In a more preferable aspect, the cooling processing gas G4 should be taken out in a manner opposite to the flow direction of the cooling processing gas G3. In this way, the intrusion of droplets can be further prevented. In addition, a droplet prevention member similar to the mesh structure 121 described above may be provided at the outlet of the cooling processing gas G4, or a heater for vaporizing the droplets may be provided.

第一濃縮裝置200具備包含吸附材之吸附轉筒212,藉由與氣體接觸而吸附其含有的有機溶劑,藉由與加熱氣體接觸而使吸附的有機溶劑脫附。吸附轉筒212,係由以複數個分隔部分隔出之複數個吸附單元210構成。吸附轉筒212,藉由複數個吸附單元210而使全體成為中空圓柱狀的形狀。吸附轉筒212,設置於處理室內,設置為流體可沿徑方向流動。吸附轉筒212,設置為受到馬達之旋轉驅動力而可繞筒軸旋轉。The first concentrating device 200 includes an adsorption drum 212 containing an adsorbent, and adsorbs the organic solvent contained in it by contact with the gas, and desorbs the adsorbed organic solvent by contact with the heated gas. The adsorption drum 212 is composed of a plurality of adsorption units 210 separated by a plurality of partitions. The suction drum 212 has a hollow cylindrical shape as a whole by a plurality of suction units 210. The adsorption drum 212 is arranged in the processing chamber and arranged so that the fluid can flow in the radial direction. The suction drum 212 is configured to be rotated around the drum shaft by the rotational driving force of the motor.

在第一濃縮裝置200,使吸附單元210的一部分構成吸附部,吸附從吸附單元210的外側向內側供給之冷卻處理氣體G4所含有的有機溶劑;且使吸附單元210的其餘部分構成脫附部,藉由從吸附單元210的內側向外側供給加熱空氣而使吸附於吸附單元210的有機溶劑從吸附單元210脫附。In the first concentrating device 200, a part of the adsorption unit 210 constitutes an adsorption part, and the organic solvent contained in the cooling processing gas G4 supplied from the outside to the inside of the adsorption unit 210 is adsorbed; and the remaining part of the adsorption unit 210 constitutes a desorption part The organic solvent adsorbed on the adsorption unit 210 is desorbed from the adsorption unit 210 by supplying heated air from the inside to the outside of the adsorption unit 210.

潔淨化時,將供給至處理室內之冷卻處理氣體G4,從吸附轉筒212的外周面往吸附部導入。導入至吸附部之冷卻處理氣體G4,在沿著徑方向從外周面向內周面通過吸附轉筒212時,將有機溶劑吸附至位於吸附部之複數個吸附單元210,藉以潔淨化。At the time of cleaning, the cooled processing gas G4 supplied into the processing chamber is introduced from the outer peripheral surface of the adsorption drum 212 to the adsorption part. When the cooling processing gas G4 introduced into the adsorption part passes through the adsorption drum 212 from the outer peripheral surface to the inner peripheral surface along the radial direction, the organic solvent is adsorbed to the plurality of adsorption units 210 located in the adsorption part, thereby being cleaned.

將經潔淨化的作為被處理流體之冷卻處理氣體G5、G6,作為潔淨氣體,從吸附單元210之上部排出。使排出之潔淨氣體的一部分,作為冷卻處理氣體G5在第二流通路徑F2流通,往第二濃縮裝置300供給。使排出之潔淨氣體的一部分,作為冷卻處理氣體G6在第四流通路徑F4流通,往第二熱交換器112返回。The cleaned cooling processing gases G5 and G6 serving as the fluid to be processed are discharged from the upper portion of the adsorption unit 210 as clean gas. A part of the discharged clean gas is circulated through the second flow path F2 as the cooling processing gas G5, and is supplied to the second concentrating device 300. A part of the discharged clean gas is circulated through the fourth flow path F4 as the cooling processing gas G6, and returns to the second heat exchanger 112.

內周側流路形成構件211及外周側流路形成構件213,以將圓周方向中之吸附轉筒212的一部分夾入之方式,於吸附轉筒212的內周側及外周側中彼此相對向地配置。由內周側流路形成構件211及外周側流路形成構件213所包夾之吸附轉筒212的區域,為脫附部。The inner circumference side flow path forming member 211 and the outer circumference side flow path forming member 213 are opposed to each other on the inner circumference side and the outer circumference side of the suction drum 212 by sandwiching a part of the suction drum 212 in the circumferential direction地Configuration. The area of the suction drum 212 enclosed by the inner flow path forming member 211 and the outer flow path forming member 213 is a desorption part.

為了施行有機溶劑之脫附,而從內周側流路形成構件211,對脫附部導入藉由再生加熱器250加熱之冷卻處理氣體G5的一部分即高溫氣體G7。導入至脫附部之高溫氣體G7,在通過吸附轉筒212時,從位於脫附部之複數個吸附單元210,藉由熱使吸附於其等的有機溶劑脫附。含有有機溶劑之脫附氣體G8,作為濃縮氣體,從脫附部通過外周側流路形成構件213,往處理室外排出,返回至第三流通路徑F3。將脫附氣體G8中所含有的有機溶劑之一部分液化冷凝,作為脫附冷凝液L2往貯存槽125集液。In order to perform the desorption of the organic solvent, the high-temperature gas G7, which is a part of the cooling process gas G5 heated by the regeneration heater 250, is introduced into the desorption portion from the inner peripheral side flow path forming member 211. When the high-temperature gas G7 introduced into the desorption section passes through the adsorption drum 212, the organic solvent adsorbed thereon is desorbed by heat from the plurality of adsorption units 210 located in the desorption section. The desorbed gas G8 containing an organic solvent, as a concentrated gas, is discharged from the desorbed part through the outer peripheral side flow path forming member 213 to the outside of the processing room, and returns to the third flow path F3. A part of the organic solvent contained in the desorption gas G8 is liquefied and condensed, and collected in the storage tank 125 as the desorption condensate L2.

第三流通路徑F3,係將脫附氣體G8送回至冷卻冷凝裝置100之排放氣體G1的導入部之部位。第三流通路徑F3,宜以將脫附部配置於較脫附氣體G8與往冷卻冷凝裝置100供給之排放氣體G1的合流位置更為上部之方式連接。藉由此一配置,由第一濃縮裝置200之脫附氣體G8產生的脫附冷凝液L2,變得容易往冷卻冷凝裝置100移動。第三流通路徑F3,宜構成為使冷卻冷凝裝置100之排放氣體G1的導入部及貯存槽125此兩處流通。藉由此一構成,由脫附氣體G8產生的脫附冷凝液L2變得容易直接往貯存槽125回收。The third flow path F3 is to return the desorbed gas G8 to the inlet of the exhaust gas G1 of the cooling and condensing device 100. The third flow path F3 is preferably connected in such a way that the desorption part is arranged above the confluence position of the desorption gas G8 and the exhaust gas G1 supplied to the cooling and condensing device 100. With this configuration, the desorbed condensate L2 generated by the desorbed gas G8 of the first concentrating device 200 can easily move to the cooling and condensing device 100. The third flow path F3 is preferably configured to circulate both the inlet of the exhaust gas G1 of the cooling and condensing device 100 and the storage tank 125. With this configuration, the desorption condensate L2 generated by the desorption gas G8 can be easily recovered directly to the storage tank 125.

於第一濃縮裝置200中,對位於吸附部之吸附單元210施行被處理物質的吸附處理,對在吸附處理後位於脫附部之吸附單元210施行被處理物質的脫附處理。藉由使吸附轉筒212繞筒軸旋轉,而使吸附單元210將脫附部與吸附部交互地移動,連續地實施被處理物質的吸附處理與脫附處理。In the first concentrating device 200, the adsorption unit 210 located in the adsorption part is subjected to adsorption treatment of the substance to be treated, and the adsorption unit 210 located in the desorption part after the adsorption treatment is subjected to the desorption treatment of the substance to be treated. By rotating the adsorption drum 212 around the cylinder axis, the adsorption unit 210 alternately moves the desorption part and the adsorption part to continuously perform the adsorption treatment and desorption treatment of the substance to be processed.

作為構成吸附單元210之吸附元件的材料,可利用活性氧化鋁、矽膠、活性碳材料、沸石等。吸附單元210中之吸附元件的形狀並無特別限定,例如,可為將含有活性碳材料或沸石之薄片形成為蜂巢狀者,亦可為將活性碳纖維不織布疊層者。As the material constituting the adsorption element of the adsorption unit 210, activated alumina, silica gel, activated carbon material, zeolite, etc. can be used. The shape of the adsorption element in the adsorption unit 210 is not particularly limited. For example, it may be a honeycomb-shaped sheet containing activated carbon material or zeolite, or a laminate of activated carbon fiber non-woven fabrics.

第二濃縮裝置300具備包含吸附材之吸附元件310,藉由與氣體接觸而吸附其含有的有機溶劑,藉由與加熱氣體接觸而使吸附的有機溶劑脫附。吸附元件310,包含脫附部(脫附區)311與吸附部(吸附區)312。吸附部312,藉由將冷卻處理氣體G5導入,而使冷卻處理氣體G5與吸附材接觸,藉以將冷卻處理氣體G5所含有的有機溶劑吸附於吸附材,使冷卻處理氣體G5潔淨化,作為潔淨氣體G9排出。The second concentrating device 300 includes an adsorption element 310 including an adsorbent, and adsorbs the organic solvent contained in it by contact with the gas, and desorbs the adsorbed organic solvent by contact with the heated gas. The adsorption element 310 includes a desorption part (desorption zone) 311 and an adsorption part (adsorption zone) 312. The adsorption part 312 brings the cooling processing gas G5 into contact with the adsorbing material by introducing the cooling processing gas G5, thereby adsorbing the organic solvent contained in the cooling processing gas G5 to the adsorbing material, so that the cooling processing gas G5 is cleaned as a clean The gas G9 is discharged.

脫附部311,藉由將較冷卻處理氣體G5更高溫之氣體G10導入至吸附材,而使有機溶劑從吸附材脫附,藉此作為含有有機溶劑之脫附氣體G11排出。脫附氣體G11,通過第六流通路徑F6,返回至第一流通路徑F1。The desorption part 311 introduces a gas G10 that has a higher temperature than the cooling process gas G5 to the adsorption material to desorb the organic solvent from the adsorption material, thereby discharging the desorption gas G11 containing the organic solvent. The desorbed gas G11 passes through the sixth flow path F6 and returns to the first flow path F1.

有機溶劑回收系統1C,由於使脫附氣體G11返回至第一流通路徑F1,故於冷卻冷凝裝置100中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統1C,可對於冷卻冷凝裝置100的小型化、節能化有所助益。有機溶劑回收系統1C,由於脫附氣體G11為高溫,故可抑制冷卻處理氣體G4中所包含的NMP(N-甲基吡咯烷酮)、水分等之冷凝。Since the organic solvent recovery system 1C returns the desorbed gas G11 to the first flow path F1, the cooling and condensing device 100 does not need to process the air volume of the desorbed gas G11. Therefore, the organic solvent recovery system 1C can contribute to the miniaturization and energy saving of the cooling and condensing device 100. In the organic solvent recovery system 1C, since the desorption gas G11 has a high temperature, it can suppress the condensation of NMP (N-methylpyrrolidone), moisture, etc. contained in the cooling process gas G4.

作為吸附元件310所包含之吸附材,廣泛利用活性氧化鋁、矽膠、活性碳材料或沸石,其中特別適合利用活性碳與疏水性沸石。As the adsorption material contained in the adsorption element 310, activated alumina, silica gel, activated carbon material or zeolite is widely used, and activated carbon and hydrophobic zeolite are particularly suitable for use.

如圖6所示,第二濃縮裝置300,具備旋轉軸、及繞旋轉軸而設置之吸附元件310。第二濃縮裝置300,為下述構成:藉由使吸附元件310繞旋轉軸旋轉,而於吸附部312中,使吸附有從第二流通路徑F2導入之冷卻處理氣體G5中的有機溶劑之吸附材連續地往脫附部311移動。As shown in FIG. 6, the second concentrating device 300 includes a rotating shaft and an adsorption element 310 provided around the rotating shaft. The second concentrating device 300 is configured as follows: by rotating the adsorption element 310 around the rotation axis, the adsorption part 312 adsorbs the organic solvent in the cooling processing gas G5 introduced from the second flow path F2. The material continuously moves to the desorption part 311.

第二濃縮裝置300,亦可具備脫附部311之脫附處理結束的部分在往吸附部312移動之前往其移動的清潔部(吹掃部)。亦可為將潔淨氣體G9的一部分導入至吹掃部,將從吹掃部排出之吹掃部出口氣體導入至吸附部312之構成。此係因藉由以潔淨氣體G9清潔結束脫附的吸附材,而防止殘留於吸附材之脫附氣體G11往潔淨氣體G9的混入,可將吸附材冷卻之緣故。The second concentrating device 300 may also include a cleaning part (purge part) that moves to the adsorption part 312 after the part where the desorption process of the desorption part 311 is completed. It may also be a configuration in which a part of the clean gas G9 is introduced to the purge section, and the purge section outlet gas discharged from the purge section is introduced to the adsorption section 312. This is because by cleaning the desorbed adsorbent with the clean gas G9, the desorption gas G11 remaining in the adsorbent is prevented from mixing into the clean gas G9, and the adsorbent can be cooled.

使用於脫附之高溫氣體G10,宜為利用再生加熱器350等加熱手段使潔淨氣體G9的一部分成為高溫狀態者。藉由使其成為高溫狀態,於吸附部312中,可抑制有機溶劑含有氣體的處理風量之增加。The high-temperature gas G10 used for desorption is preferably one that uses heating means such as the regeneration heater 350 to make a part of the clean gas G9 into a high-temperature state. By making it into a high temperature state, in the adsorption part 312, the increase of the processing air volume of the organic solvent containing gas can be suppressed.

[實施形態2C] 圖7係概略顯示實施形態2C的有機溶劑回收系統2C之構成的圖。有機溶劑回收系統2C,係由冷卻冷凝裝置100、第一濃縮裝置200、第二濃縮裝置300、及各種流通路徑構成。有機溶劑回收系統2C,除了下述點以外之構成,與實施形態1C的有機溶劑回收系統1C相同:使第二濃縮裝置300之脫附氣體G11通過第六流通路徑F6,返回至再生加熱器250。[Embodiment 2C] Fig. 7 is a diagram schematically showing the configuration of an organic solvent recovery system 2C of Embodiment 2C. The organic solvent recovery system 2C is composed of a cooling and condensing device 100, a first concentrating device 200, a second concentrating device 300, and various circulation paths. The organic solvent recovery system 2C has the same configuration as the organic solvent recovery system 1C of Embodiment 1C except for the following points: the desorbed gas G11 of the second concentrator 300 passes through the sixth flow path F6 and returns to the regeneration heater 250 .

有機溶劑回收系統2C,由於使脫附氣體G11返回至再生加熱器250,故於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統2C,可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統2C,由於脫附氣體G11為高溫,故可對於再生加熱器250的節能化有所助益。Since the organic solvent recovery system 2C returns the desorbed gas G11 to the regeneration heater 250, there is no need to process the air volume of the desorbed gas G11 in the cooling and condensing device 100 and the first concentration device 200. Therefore, the organic solvent recovery system 2C can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. Since the organic solvent recovery system 2C has a high temperature of the desorption gas G11, it can contribute to the energy saving of the regenerative heater 250.

[實施形態3C] 圖8係概略顯示實施形態3C的有機溶劑回收系統3C之構成的圖。有機溶劑回收系統3C,係由冷卻冷凝裝置100、第一濃縮裝置200、第二濃縮裝置300、及各種流通路徑構成。有機溶劑回收系統3C,使第二濃縮裝置300之脫附氣體G11通過第六流通路徑F6,返回至第四流通路徑F4。有機溶劑回收系統3C,除了下述點以外之構成,與實施形態1C的有機溶劑回收系統1C相同:使第二濃縮裝置300之脫附氣體G11通過第六流通路徑F6,返回至第四流通路徑F4。[Embodiment 3C] Fig. 8 is a diagram schematically showing the configuration of the organic solvent recovery system 3C of Embodiment 3C. The organic solvent recovery system 3C is composed of a cooling and condensing device 100, a first concentrating device 200, a second concentrating device 300, and various circulation paths. The organic solvent recovery system 3C allows the desorbed gas G11 of the second concentration device 300 to pass through the sixth flow path F6 and return to the fourth flow path F4. The organic solvent recovery system 3C has the same configuration as the organic solvent recovery system 1C of Embodiment 1C except for the following points: the desorbed gas G11 of the second concentrator 300 passes through the sixth flow path F6 and returns to the fourth flow path F4.

使在第六流通路徑F6流通之脫附氣體G11,與從第二濃縮裝置300排出之冷卻處理氣體G6一同在第四流通路徑F4流通,往第二熱交換器112返回。有機溶劑回收系統3C,於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統3C,可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統3C,由於脫附氣體G11為高溫,故可使往第二熱交換器112流通之流體的溫度上升,可對於用於將排放氣體G1冷卻之第二熱交換器112的小型化、節能化有所助益。The desorbed gas G11 circulating in the sixth circulation path F6 is allowed to circulate in the fourth circulation path F4 together with the cooled processing gas G6 discharged from the second concentrating device 300 and returns to the second heat exchanger 112. The organic solvent recovery system 3C does not need to process the air volume of the desorption gas G11 in the cooling and condensing device 100 and the first concentrating device 200. Therefore, the organic solvent recovery system 3C can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. The organic solvent recovery system 3C can increase the temperature of the fluid flowing through the second heat exchanger 112 due to the high temperature of the desorbed gas G11, which can reduce the size of the second heat exchanger 112 for cooling the exhaust gas G1 , Energy saving is helpful.

[實施形態4C] 圖9係概略顯示實施形態4C的有機溶劑回收系統4C之構成的圖。有機溶劑回收系統4C,係由冷卻冷凝裝置100、第一濃縮裝置200、第二濃縮裝置300、及各種流通路徑構成。有機溶劑回收系統4C,使第二濃縮裝置300之脫附氣體G11通過第六流通路徑F6,返回至第五流通路徑F5。有機溶劑回收系統4C,除了下述點以外之構成,與實施形態1C的有機溶劑回收系統1C相同:使第二濃縮裝置300之脫附氣體G11通過第六流通路徑F6,返回至第五流通路徑F5。[Embodiment 4C] Fig. 9 is a diagram schematically showing the configuration of the organic solvent recovery system 4C of Embodiment 4C. The organic solvent recovery system 4C is composed of a cooling and condensing device 100, a first concentrating device 200, a second concentrating device 300, and various circulation paths. The organic solvent recovery system 4C allows the desorbed gas G11 of the second concentration device 300 to pass through the sixth flow path F6 and return to the fifth flow path F5. The organic solvent recovery system 4C has the same configuration as the organic solvent recovery system 1C of Embodiment 1C except for the following points: the desorbed gas G11 of the second concentrator 300 passes through the sixth flow path F6 and returns to the fifth flow path F5.

使在第六流通路徑F6流通之脫附氣體G11,與從第二熱交換器112排出之排放氣體G1及冷卻處理氣體G6的一部分一同在第五流通路徑F5流通,往生產設備130返回。有機溶劑回收系統4C,於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統4C,可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統4C,由於脫附氣體G11為高溫,故可提高從生產設備130再度排出之排放氣體G1的溫度。因此,有機溶劑回收系統4C,可使往第二熱交換器112流通之流體的溫度上升,可對於用於將排放氣體G1冷卻之第二熱交換器112的小型化、節能化有所助益。The desorbed gas G11 circulating in the sixth circulation path F6 is allowed to circulate in the fifth circulation path F5 together with part of the exhaust gas G1 discharged from the second heat exchanger 112 and the cooling process gas G6, and is returned to the production facility 130. The organic solvent recovery system 4C does not need to process the air volume of the desorption gas G11 in the cooling and condensing device 100 and the first concentration device 200. Therefore, the organic solvent recovery system 4C can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. In the organic solvent recovery system 4C, since the desorption gas G11 has a high temperature, the temperature of the exhaust gas G1 discharged from the production equipment 130 can be increased. Therefore, the organic solvent recovery system 4C can increase the temperature of the fluid flowing through the second heat exchanger 112, which can contribute to the miniaturization and energy saving of the second heat exchanger 112 for cooling the exhaust gas G1. .

[作用/效果] 本實施形態之有機溶劑回收系統1C,具備:冷卻冷凝裝置100,藉由將含有有機溶劑之排放氣體G1冷卻,而將有機溶劑液化冷凝,作為有機溶劑的濃度已降低之冷卻處理氣體G4排出;第一流通路徑F1,使冷卻處理氣體G4流通;第一濃縮裝置200,將從第一流通路徑F1導入之冷卻處理氣體G4所含有的有機溶劑藉由吸附單元210吸附,作為有機溶劑的濃度進一步降低之冷卻處理氣體G5排出,導入高溫氣體G7而從吸附單元210使有機溶劑脫附,作為脫附氣體G8排出;第二流通路徑F2,使冷卻處理氣體G5的一部分流通;以及第二濃縮裝置300,將從第二流通路徑F2導入之冷卻處理氣體G5所含有的有機溶劑藉由吸附元件310吸附,作為有機溶劑的濃度進一步降低之潔淨氣體G9排出,導入高溫氣體G10而從吸附元件310使有機溶劑脫附,作為脫附氣體G11排出。[Effect] The organic solvent recovery system 1C of the present embodiment includes: a cooling and condensing device 100, which cools the exhaust gas G1 containing the organic solvent to liquefy and condense the organic solvent, and discharges it as a cooling treatment gas G4 whose concentration of the organic solvent has been reduced; The first flow path F1 circulates the cooling process gas G4; the first concentrating device 200, the organic solvent contained in the cooling process gas G4 introduced from the first flow path F1 is adsorbed by the adsorption unit 210, and the concentration of the organic solvent is further increased. The reduced cooling process gas G5 is discharged, the high-temperature gas G7 is introduced to desorb the organic solvent from the adsorption unit 210, and is discharged as the desorption gas G8; the second flow path F2 allows a part of the cooling process gas G5 to circulate; and the second concentrating device 300. The organic solvent contained in the cooling process gas G5 introduced from the second flow path F2 is adsorbed by the adsorption element 310 and discharged as the clean gas G9 whose concentration of the organic solvent is further reduced. The organic solvent is desorbed and discharged as desorption gas G11.

使脫附氣體G8,返回至冷卻冷凝裝置100,且使脫附氣體G11,返回至第一流通路徑F1。有機溶劑回收系統1C,由於使脫附氣體G11返回至第一流通路徑F1,故於冷卻冷凝裝置100中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統1C,可對於冷卻冷凝裝置100的小型化、節能化有所助益。有機溶劑回收系統1C,由於脫附氣體G11為高溫,故可抑制冷卻處理氣體G4中所包含的NMP(N-甲基吡咯烷酮)、水分等之冷凝。The desorbed gas G8 is returned to the cooling and condensing device 100, and the desorbed gas G11 is returned to the first circulation path F1. Since the organic solvent recovery system 1C returns the desorbed gas G11 to the first flow path F1, the cooling and condensing device 100 does not need to process the air volume of the desorbed gas G11. Therefore, the organic solvent recovery system 1C can contribute to the miniaturization and energy saving of the cooling and condensing device 100. In the organic solvent recovery system 1C, since the desorption gas G11 has a high temperature, it can suppress the condensation of NMP (N-methylpyrrolidone), moisture, etc. contained in the cooling process gas G4.

使脫附氣體G8,返回至冷卻冷凝裝置100,且使脫附氣體G11,返回至再生加熱器250。有機溶劑回收系統2C,由於使脫附氣體G11返回至再生加熱器250,故於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統2C可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統2C,由於脫附氣體G11為高溫,故可對於再生加熱器250的節能化有所助益。The desorbed gas G8 is returned to the cooling and condensing device 100, and the desorbed gas G11 is returned to the regeneration heater 250. Since the organic solvent recovery system 2C returns the desorbed gas G11 to the regeneration heater 250, there is no need to process the air volume of the desorbed gas G11 in the cooling and condensing device 100 and the first concentration device 200. Therefore, the organic solvent recovery system 2C can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. Since the organic solvent recovery system 2C has a high temperature of the desorption gas G11, it can contribute to the energy saving of the regenerative heater 250.

使脫附氣體G8,返回至冷卻冷凝裝置100,且使脫附氣體G11,返回至第四流通路徑F4。脫附氣體G11,與冷卻處理氣體G6一同在第四流通路徑F4流通,往第二熱交換器112返回。有機溶劑回收系統3C,於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統3C,可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統3C,由於脫附氣體G11為高溫,故可使往第二熱交換器112流通之流體的溫度上升,可對於用於將排放氣體G1冷卻之第二熱交換器112的小型化、節能化有所助益。The desorbed gas G8 is returned to the cooling and condensing device 100, and the desorbed gas G11 is returned to the fourth flow path F4. The desorbed gas G11 flows through the fourth flow path F4 together with the cooling process gas G6, and returns to the second heat exchanger 112. The organic solvent recovery system 3C does not need to process the air volume of the desorption gas G11 in the cooling and condensing device 100 and the first concentrating device 200. Therefore, the organic solvent recovery system 3C can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. The organic solvent recovery system 3C can increase the temperature of the fluid flowing through the second heat exchanger 112 due to the high temperature of the desorbed gas G11, which can reduce the size of the second heat exchanger 112 for cooling the exhaust gas G1 , Energy saving is helpful.

使脫附氣體G8,返回至冷卻冷凝裝置100,且使脫附氣體G11,返回至第五流通路徑F5。脫附氣體G11,與從第二熱交換器112排出之排放氣體G1及冷卻處理氣體G6的一部分一同在第五流通路徑F5流通,往生產設備130返回。有機溶劑回收系統4C,於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統4C可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統4C,由於脫附氣體G11為高溫,故可提高從生產設備130再度排出之排放氣體G1的溫度。因此,有機溶劑回收系統4C,可使往第二熱交換器112流通之流體的溫度上升,可對於用於將排放氣體G1冷卻之第二熱交換器112的小型化、節能化有所助益。The desorbed gas G8 is returned to the cooling and condensing device 100, and the desorbed gas G11 is returned to the fifth flow path F5. The desorbed gas G11 circulates in the fifth circulation path F5 together with part of the exhaust gas G1 and the cooling process gas G6 discharged from the second heat exchanger 112 and returns to the production facility 130. The organic solvent recovery system 4C does not need to process the air volume of the desorption gas G11 in the cooling and condensing device 100 and the first concentration device 200. Therefore, the organic solvent recovery system 4C can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. In the organic solvent recovery system 4C, since the desorption gas G11 has a high temperature, the temperature of the exhaust gas G1 discharged from the production equipment 130 can be increased. Therefore, the organic solvent recovery system 4C can increase the temperature of the fluid flowing through the second heat exchanger 112, which can contribute to the miniaturization and energy saving of the second heat exchanger 112 for cooling the exhaust gas G1. .

將本實施形態之第一濃縮裝置200,於使吸附單元210繞筒軸旋轉之中空圓柱狀的轉筒之繞筒軸的圓周方向配置複數個。藉此,可高效率地回收有機溶劑。The first concentrating device 200 of the present embodiment is arranged in plural in the circumferential direction around the drum axis of the hollow cylindrical drum that rotates the adsorption unit 210 around the drum axis. Thereby, the organic solvent can be recovered efficiently.

本實施形態之第二濃縮裝置300,將吸附元件310配置於繞筒軸旋轉之圓盤狀的吸附轉筒。藉此,可高效率地回收有機溶劑。In the second concentrating device 300 of this embodiment, the adsorption element 310 is arranged in a disc-shaped adsorption drum that rotates around a drum axis. Thereby, the organic solvent can be recovered efficiently.

[其他實施形態] 上述實施形態中,濃縮裝置,利用第一濃縮裝置200與第二濃縮裝置300此兩台。濃縮裝置,亦可因應風量,應用兩台第一濃縮裝置200或兩台第二濃縮裝置300。此外,亦可因應去除效率,應用三台以上之濃縮裝置。[Other embodiments] In the above embodiment, two concentrating devices, the first concentrating device 200 and the second concentrating device 300, are used. The concentration device can also use two first concentration devices 200 or two second concentration devices 300 according to the air volume. In addition, more than three concentrators can also be used according to the removal efficiency.

作為排放氣體G1所含有的有機溶劑,列舉可藉由1℃~50℃之冷卻而液化回收的有機溶劑。作為有機溶劑,例如為N-甲基吡咯烷酮、N-乙基吡咯烷酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、或正癸烷。其等僅為例示,並未限定於其等。所含有的有機溶劑,可為1種亦可為複數種。Examples of the organic solvent contained in the exhaust gas G1 include organic solvents that can be liquefied and recovered by cooling at 1°C to 50°C. The organic solvent is, for example, N-methylpyrrolidone, N-ethylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, or n-decane. These etc. are only examples, and are not limited to them. The organic solvent contained may be one type or plural types.

[實施形態1D] 圖10係概略顯示實施形態1D的有機溶劑回收系統1D之構成的圖。有機溶劑回收系統1D,係由冷卻冷凝裝置100、第一濃縮裝置200、第二濃縮裝置300、及各種流通路徑構成。[Embodiment 1D] Fig. 10 is a diagram schematically showing the configuration of the organic solvent recovery system 1D of the embodiment 1D. The organic solvent recovery system 1D is composed of a cooling and condensing device 100, a first concentrating device 200, a second concentrating device 300, and various circulation paths.

冷卻冷凝裝置100,具備冷卻部110及分離部120。含有有機溶劑之排放氣體G1,從生產設備130排出。排放氣體G1,藉由通過冷卻部110而冷卻。排放氣體G1,伴隨通過冷卻部110而使有機溶劑液化冷凝。The cooling and condensing device 100 includes a cooling unit 110 and a separation unit 120. The exhaust gas G1 containing the organic solvent is exhausted from the production equipment 130. The exhaust gas G1 is cooled by passing through the cooling unit 110. The exhaust gas G1 liquefies and condenses the organic solvent as it passes through the cooling unit 110.

通過冷卻部110之排放氣體G2,藉由通過分離部120,而分離為經液化冷凝之冷卻冷凝液L1與有機溶劑濃度降低之冷卻處理氣體G3。冷卻處理氣體G3,通過腔室123,使一部分作為冷卻處理氣體G4從冷卻冷凝裝置100往第一濃縮裝置200排出,其餘部分作為冷卻處理氣體G6從冷卻冷凝裝置100往後述第二熱交換器112返回。The exhaust gas G2 passing through the cooling part 110 is separated into the cooling condensate L1 which has been liquefied and condensed and the cooling process gas G3 whose concentration of the organic solvent is reduced by passing through the separation part 120. The cooling process gas G3 passes through the chamber 123, and a part of it is discharged as the cooling process gas G4 from the cooling and condensing device 100 to the first concentrating device 200, and the remaining part is being used as the cooling process gas G6 from the cooling and condensing device 100 to the second heat exchanger 112 described later. return.

冷卻部110之冷卻手段及構成,並無特別限定。在實施形態1D,使用藉由冷卻水、冷水、鹹水等冷媒與排放氣體之間接熱交換而進行冷卻的第一熱交換器111。第一熱交換器111,位於使排放氣體G1往水平方向流通之位置。The cooling means and structure of the cooling unit 110 are not particularly limited. In Embodiment 1D, the first heat exchanger 111 that performs cooling by exchanging heat between a refrigerant such as cooling water, cold water, and salt water, and exhaust gas is used. The first heat exchanger 111 is located at a position where the exhaust gas G1 circulates in the horizontal direction.

冷卻部110,於第一熱交換器111之前,設置藉由冷卻處理氣體G6與排放氣體G1之熱交換而使排放氣體G1冷卻的第二熱交換器112。第二熱交換器112,可減少第一熱交換器111所需之傳熱面積與冷媒量。排放氣體G1及冷卻處理氣體G6的一部分,通過第五流通路徑F5往生產設備130返回。第一熱交換器111及第二熱交換器112中的冷卻溫度等之條件,依作為回收對象的有機溶劑適當決定即可。The cooling part 110 is provided before the first heat exchanger 111 with a second heat exchanger 112 that cools the exhaust gas G1 by cooling the heat exchange between the processing gas G6 and the exhaust gas G1. The second heat exchanger 112 can reduce the heat transfer area and the amount of refrigerant required by the first heat exchanger 111. A part of the exhaust gas G1 and the cooling process gas G6 returns to the production facility 130 through the fifth flow path F5. Conditions such as the cooling temperature in the first heat exchanger 111 and the second heat exchanger 112 may be appropriately determined depending on the organic solvent to be recovered.

分離部120之分離手段及構成並無特別限定。在實施形態1D,使用除霧器、濾網、及篩孔等接觸液滴而加以捕捉的網眼狀構造體121。網眼狀構造體121捕捉到之冷卻冷凝液L1,因重力而往配置於網眼狀構造體121的下部之貯存槽125集液,作為回收液L3回收。The separation means and structure of the separation part 120 are not particularly limited. In Embodiment 1D, a mesh-like structure 121 that contacts and captures liquid droplets, such as a demister, a filter, and a mesh, is used. The cooling condensate L1 captured by the mesh structure 121 is collected by gravity into the storage tank 125 arranged at the lower part of the mesh structure 121 and is recovered as the recovery liquid L3.

腔室123,係具有一定容量之空間的構造體。於腔室123內貯存一定時間之冷卻處理氣體G3,作為冷卻處理氣體G4使一部分在第一流通路徑F1流通,往第一濃縮裝置200供給。冷卻處理氣體G3,作為冷卻處理氣體G6使其餘部分在第四流通路徑F4流通,往第二熱交換器112返回。腔室123具備分隔部128,分隔部128可與從網眼狀構造體121排出之冷卻處理氣體G3的排氣方向對向而進行第一流通路徑F1的吸入。The chamber 123 is a structure with a certain volume of space. The cooling processing gas G3 for a certain period of time is stored in the chamber 123, a part of the cooling processing gas G4 is circulated through the first circulation path F1, and is supplied to the first concentrating device 200. The cooling process gas G3 is used as the cooling process gas G6 to circulate the remainder through the fourth flow path F4 and return to the second heat exchanger 112. The chamber 123 is provided with a partition 128 which can be opposed to the exhaust direction of the cooling process gas G3 discharged from the mesh-like structure 121 to suck in the first flow path F1.

第一流通路徑F1,係將冷卻處理氣體G4從腔室123往第一濃縮裝置200導入之部位。第一流通路徑F1的往腔室123之連接口,宜為腔室123之頂棚部127。藉此,抑制分離部120未捕捉到的微少液滴之往第一濃縮裝置200的侵入,可防止後述第一濃縮裝置200之因吸附單元210的潤濕所造成之性能降低/強度降低等。更佳態樣中,宜以與冷卻處理氣體G3的流通方向對向之方式,將冷卻處理氣體G4取出。藉此,可進一步防止液滴的侵入。除此之外,亦可於冷卻處理氣體G4之取出口,設置與上述網眼狀構造體121類似的防液滴侵入構件,亦可設置用於使液滴氣化的加熱器。The first flow path F1 is a part where the cooling processing gas G4 is introduced from the chamber 123 to the first concentration device 200. The connection port of the first circulation path F1 to the cavity 123 is preferably the ceiling portion 127 of the cavity 123. Thereby, the intrusion of minute liquid droplets not caught by the separating unit 120 into the first concentrating device 200 can be suppressed, and the performance degradation/strength reduction caused by the wetting of the adsorption unit 210 of the first concentrating device 200 described later can be prevented. In a more preferable aspect, the cooling processing gas G4 should be taken out in a manner opposite to the flow direction of the cooling processing gas G3. In this way, the intrusion of droplets can be further prevented. In addition, a droplet prevention member similar to the mesh structure 121 described above may be provided at the outlet of the cooling processing gas G4, or a heater for vaporizing the droplets may be provided.

第一濃縮裝置200具備包含吸附材之吸附轉筒212,藉由與氣體接觸而吸附其含有的有機溶劑,藉由與加熱氣體接觸而使吸附的有機溶劑脫附。吸附轉筒212,係由以複數個分隔部分隔出之複數個吸附單元210構成。吸附轉筒212,藉由複數個吸附單元210而使全體成為中空圓柱狀的形狀。吸附轉筒212,設置於處理室內,設置為流體可沿徑方向流動。吸附轉筒212,設置為受到馬達之旋轉驅動力而可繞筒軸旋轉。The first concentrating device 200 includes an adsorption drum 212 containing an adsorbent, and adsorbs the organic solvent contained in it by contact with the gas, and desorbs the adsorbed organic solvent by contact with the heated gas. The adsorption drum 212 is composed of a plurality of adsorption units 210 separated by a plurality of partitions. The suction drum 212 has a hollow cylindrical shape as a whole by a plurality of suction units 210. The adsorption drum 212 is arranged in the processing chamber and arranged so that the fluid can flow in the radial direction. The suction drum 212 is configured to be rotated around the drum shaft by the rotational driving force of the motor.

在第一濃縮裝置200,使吸附單元210的一部分構成吸附部,吸附從吸附單元210的外側向內側供給之冷卻處理氣體G4所含有的有機溶劑;且使吸附單元210的其餘部分構成脫附部,藉由從吸附單元210的內側向外側供給加熱空氣而使吸附於吸附單元210的有機溶劑從吸附單元210脫附。In the first concentrating device 200, a part of the adsorption unit 210 constitutes an adsorption part, and the organic solvent contained in the cooling processing gas G4 supplied from the outside to the inside of the adsorption unit 210 is adsorbed; and the remaining part of the adsorption unit 210 constitutes a desorption part The organic solvent adsorbed on the adsorption unit 210 is desorbed from the adsorption unit 210 by supplying heated air from the inside to the outside of the adsorption unit 210.

潔淨化時,將供給至處理室內之冷卻處理氣體G4,從吸附轉筒212的外周面往吸附部導入。導入至吸附部之冷卻處理氣體G4,在沿著徑方向從外周面向內周面通過吸附轉筒212時,將有機溶劑吸附至位於吸附部之複數個吸附單元210,藉以潔淨化。At the time of cleaning, the cooled processing gas G4 supplied into the processing chamber is introduced from the outer peripheral surface of the adsorption drum 212 to the adsorption part. When the cooling processing gas G4 introduced into the adsorption part passes through the adsorption drum 212 from the outer peripheral surface to the inner peripheral surface along the radial direction, the organic solvent is adsorbed to the plurality of adsorption units 210 located in the adsorption part, thereby being cleaned.

將經潔淨化的作為被處理流體之冷卻處理氣體G5,作為潔淨氣體,從吸附單元210之上部排出。使排出之潔淨氣體,作為冷卻處理氣體G5在第二流通路徑F2流通,往第二濃縮裝置300供給。The cleaned cooling processing gas G5 as the fluid to be processed is discharged from the upper part of the adsorption unit 210 as a clean gas. The discharged clean gas is circulated through the second flow path F2 as the cooling processing gas G5, and is supplied to the second concentrating device 300.

內周側流路形成構件211及外周側流路形成構件213,以將圓周方向中之吸附轉筒212的一部分夾入之方式,於吸附轉筒212的內周側及外周側中彼此相對向地配置。由內周側流路形成構件211及外周側流路形成構件213所包夾之吸附轉筒212的區域,為脫附部。The inner circumference side flow path forming member 211 and the outer circumference side flow path forming member 213 are opposed to each other on the inner circumference side and the outer circumference side of the suction drum 212 by sandwiching a part of the suction drum 212 in the circumferential direction地Configuration. The area of the suction drum 212 enclosed by the inner flow path forming member 211 and the outer flow path forming member 213 is a desorption part.

為了施行有機溶劑之脫附,而從內周側流路形成構件211,對脫附部導入藉由再生加熱器250加熱之冷卻處理氣體G5的一部分即高溫氣體G7。導入至脫附部之高溫氣體G7,在通過吸附轉筒212時,從位於脫附部之複數個吸附單元210,藉由熱使吸附於其等的有機溶劑脫附。含有有機溶劑之脫附氣體G8,作為濃縮氣體,從脫附部通過外周側流路形成構件213,往處理室外排出,返回至第三流通路徑F3。將脫附氣體G8中所含有的有機溶劑之一部分液化冷凝,作為脫附冷凝液L2往貯存槽125集液。In order to perform the desorption of the organic solvent, the high-temperature gas G7, which is a part of the cooling process gas G5 heated by the regeneration heater 250, is introduced into the desorption portion from the inner peripheral side flow path forming member 211. When the high-temperature gas G7 introduced into the desorption section passes through the adsorption drum 212, the organic solvent adsorbed thereon is desorbed by heat from the plurality of adsorption units 210 located in the desorption section. The desorbed gas G8 containing an organic solvent, as a concentrated gas, is discharged from the desorbed part through the outer peripheral side flow path forming member 213 to the outside of the processing room, and returns to the third flow path F3. A part of the organic solvent contained in the desorption gas G8 is liquefied and condensed, and collected in the storage tank 125 as the desorption condensate L2.

第三流通路徑F3,係將脫附氣體G8送回至冷卻冷凝裝置100之排放氣體G1的導入部之部位。第三流通路徑F3,宜以將脫附部配置於較脫附氣體G8與往冷卻冷凝裝置100供給之排放氣體G1的合流位置更為上部之方式連接。藉由此一配置,由第一濃縮裝置200之脫附氣體G8產生的脫附冷凝液L2,變得容易往冷卻冷凝裝置100移動。第三流通路徑F3,宜構成為使冷卻冷凝裝置100之排放氣體G1的導入部及貯存槽125此兩處流通。藉由此一構成,由脫附氣體G8產生的脫附冷凝液L2變得容易直接往貯存槽125回收。The third flow path F3 is to return the desorbed gas G8 to the inlet of the exhaust gas G1 of the cooling and condensing device 100. The third flow path F3 is preferably connected in such a way that the desorption part is arranged above the confluence position of the desorption gas G8 and the exhaust gas G1 supplied to the cooling and condensing device 100. With this configuration, the desorbed condensate L2 generated by the desorbed gas G8 of the first concentrating device 200 can easily move to the cooling and condensing device 100. The third flow path F3 is preferably configured to circulate both the inlet of the exhaust gas G1 of the cooling and condensing device 100 and the storage tank 125. With this configuration, the desorption condensate L2 generated by the desorption gas G8 can be easily recovered directly to the storage tank 125.

於第一濃縮裝置200中,對位於吸附部之吸附單元210施行被處理物質的吸附處理,對在吸附處理後位於脫附部之吸附單元210施行被處理物質的脫附處理。藉由使吸附轉筒212繞筒軸旋轉,而使吸附單元210將脫附部與吸附部交互地移動,連續地實施被處理物質的吸附處理與脫附處理。In the first concentrating device 200, the adsorption unit 210 located in the adsorption part is subjected to adsorption treatment of the substance to be treated, and the adsorption unit 210 located in the desorption part after the adsorption treatment is subjected to the desorption treatment of the substance to be treated. By rotating the adsorption drum 212 around the cylinder axis, the adsorption unit 210 alternately moves the desorption part and the adsorption part to continuously perform the adsorption treatment and desorption treatment of the substance to be processed.

作為構成吸附單元210之吸附元件的材料,可利用活性氧化鋁、矽膠、活性碳材料、沸石等。吸附單元210中之吸附元件的形狀並無特別限定,例如,可為將含有活性碳材料或沸石之薄片形成為蜂巢狀者,亦可為將活性碳纖維不織布疊層者。As the material constituting the adsorption element of the adsorption unit 210, activated alumina, silica gel, activated carbon material, zeolite, etc. can be used. The shape of the adsorption element in the adsorption unit 210 is not particularly limited. For example, it may be a honeycomb-shaped sheet containing activated carbon material or zeolite, or a laminate of activated carbon fiber non-woven fabrics.

第二濃縮裝置300具備包含吸附材之吸附元件310,藉由與氣體接觸而吸附其含有的有機溶劑,藉由與加熱氣體接觸而使吸附的有機溶劑脫附。吸附元件310,包含脫附部(脫附區)311與吸附部(吸附區)312。吸附部312,藉由將冷卻處理氣體G5導入,而使冷卻處理氣體G5與吸附材接觸,藉以將冷卻處理氣體G5所含有的有機溶劑吸附於吸附材,使冷卻處理氣體G5潔淨化,作為潔淨氣體G9排出。The second concentrating device 300 includes an adsorption element 310 including an adsorbent, and adsorbs the organic solvent contained in it by contact with the gas, and desorbs the adsorbed organic solvent by contact with the heated gas. The adsorption element 310 includes a desorption part (desorption zone) 311 and an adsorption part (adsorption zone) 312. The adsorption part 312 brings the cooling processing gas G5 into contact with the adsorbing material by introducing the cooling processing gas G5, thereby adsorbing the organic solvent contained in the cooling processing gas G5 to the adsorbing material, so that the cooling processing gas G5 is cleaned as a clean The gas G9 is discharged.

脫附部311,藉由將較冷卻處理氣體G5更高溫之氣體G10導入至吸附材,而使有機溶劑從吸附材脫附,藉此作為含有有機溶劑之脫附氣體G11排出。脫附氣體G11,通過第六流通路徑F6,返回至第一流通路徑F1。The desorption part 311 introduces a gas G10 that has a higher temperature than the cooling process gas G5 to the adsorption material to desorb the organic solvent from the adsorption material, thereby discharging the desorption gas G11 containing the organic solvent. The desorbed gas G11 passes through the sixth flow path F6 and returns to the first flow path F1.

有機溶劑回收系統1D,由於使脫附氣體G11返回至第一流通路徑F1,故於冷卻冷凝裝置100中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統1D,可對於冷卻冷凝裝置100的小型化、節能化有所助益。有機溶劑回收系統1D,由於脫附氣體G11為高溫,故可抑制冷卻處理氣體G4中所包含的NMP(N-甲基吡咯烷酮)、水分等之冷凝。Since the organic solvent recovery system 1D returns the desorbed gas G11 to the first flow path F1, the cooling and condensing device 100 does not need to process the air volume of the desorbed gas G11. Therefore, the organic solvent recovery system 1D can contribute to the miniaturization and energy saving of the cooling and condensing device 100. In the organic solvent recovery system 1D, since the desorption gas G11 has a high temperature, it can suppress the condensation of NMP (N-methylpyrrolidone), moisture, etc. contained in the cooling process gas G4.

作為吸附元件310所包含之吸附材,廣泛利用活性氧化鋁、矽膠、活性碳材料或沸石,其中特別適合利用活性碳與疏水性沸石。As the adsorption material contained in the adsorption element 310, activated alumina, silica gel, activated carbon material or zeolite is widely used, and activated carbon and hydrophobic zeolite are particularly suitable for use.

如圖10所示,第二濃縮裝置300,具備旋轉軸、及繞旋轉軸而設置之吸附元件310。第二濃縮裝置300,為下述構成:藉由使吸附元件310繞旋轉軸旋轉,而於吸附部312中,使吸附有從第二流通路徑F2導入之冷卻處理氣體G5中的有機溶劑之吸附材連續地往脫附部311移動。As shown in FIG. 10, the second concentrating device 300 includes a rotating shaft and an adsorption element 310 provided around the rotating shaft. The second concentrating device 300 is configured as follows: by rotating the adsorption element 310 around the rotation axis, the adsorption part 312 adsorbs the organic solvent in the cooling processing gas G5 introduced from the second flow path F2. The material continuously moves to the desorption part 311.

第二濃縮裝置300,亦可具備脫附部311之脫附處理結束的部分在往吸附部312移動之前往其移動的清潔部(吹掃部)。亦可為將潔淨氣體G9的一部分導入至吹掃部,將從吹掃部排出之吹掃部出口氣體導入至吸附部312之構成。此係因藉由以潔淨氣體G9清潔結束脫附的吸附材,而防止殘留於吸附材之脫附氣體G11往潔淨氣體G9的混入,可將吸附材冷卻之緣故。The second concentrating device 300 may also include a cleaning part (purge part) that moves to the adsorption part 312 after the part where the desorption process of the desorption part 311 is completed. It may also be a configuration in which a part of the clean gas G9 is introduced to the purge section, and the purge section outlet gas discharged from the purge section is introduced to the adsorption section 312. This is because by cleaning the desorbed adsorbent with the clean gas G9, the desorption gas G11 remaining in the adsorbent is prevented from mixing into the clean gas G9, and the adsorbent can be cooled.

使用於脫附之高溫氣體G10,宜為利用再生加熱器350等加熱手段使潔淨氣體G9的一部分成為高溫狀態者。藉由使其成為高溫狀態,於吸附部312中,可抑制有機溶劑含有氣體的處理風量之增加。The high-temperature gas G10 used for desorption is preferably one that uses heating means such as the regeneration heater 350 to make a part of the clean gas G9 into a high-temperature state. By making it into a high temperature state, in the adsorption part 312, the increase of the processing air volume of the organic solvent containing gas can be suppressed.

[實施形態2D] 圖11係概略顯示實施形態2D的有機溶劑回收系統2D之構成的圖。有機溶劑回收系統2D,係由冷卻冷凝裝置100、第一濃縮裝置200、第二濃縮裝置300、及各種流通路徑構成。有機溶劑回收系統2D,除了下述點以外之構成,與實施形態1D的有機溶劑回收系統1D相同:使第二濃縮裝置300之脫附氣體G11通過第六流通路徑F6,返回至再生加熱器250。[Embodiment 2D] Fig. 11 is a diagram schematically showing the configuration of the organic solvent recovery system 2D of Embodiment 2D. The organic solvent recovery system 2D is composed of a cooling and condensing device 100, a first concentrating device 200, a second concentrating device 300, and various circulation paths. The organic solvent recovery system 2D has the same configuration as the organic solvent recovery system 1D of Embodiment 1D except for the following points: the desorbed gas G11 of the second concentrator 300 is returned to the regeneration heater 250 through the sixth flow path F6 .

有機溶劑回收系統2D,由於使脫附氣體G11返回至再生加熱器250,故於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統2D可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統2D,由於脫附氣體G11為高溫,故可對於再生加熱器250的節能化有所助益。Since the organic solvent recovery system 2D returns the desorbed gas G11 to the regeneration heater 250, there is no need to process the air volume of the desorbed gas G11 in the cooling and condensing device 100 and the first concentration device 200. Therefore, the organic solvent recovery system 2D can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. The organic solvent recovery system 2D, because the desorption gas G11 has a high temperature, can contribute to the energy saving of the regenerative heater 250.

[實施形態3D] 圖12係概略顯示實施形態3D的有機溶劑回收系統3D之構成的圖。有機溶劑回收系統3D,係由冷卻冷凝裝置100、第一濃縮裝置200、第二濃縮裝置300、及各種流通路徑構成。有機溶劑回收系統3D,使第二濃縮裝置300之脫附氣體G11通過第六流通路徑F6,返回至第四流通路徑F4。有機溶劑回收系統3D,除了下述點以外之構成,與實施形態1D的有機溶劑回收系統1D相同:使第二濃縮裝置300之脫附氣體G11通過第六流通路徑F6,返回至第四流通路徑F4。[Embodiment 3D] Fig. 12 is a diagram schematically showing the configuration of the organic solvent recovery system 3D of the embodiment 3D. The organic solvent recovery system 3D is composed of a cooling and condensing device 100, a first concentrating device 200, a second concentrating device 300, and various circulation paths. The organic solvent recovery system 3D allows the desorbed gas G11 of the second concentration device 300 to pass through the sixth circulation path F6 and return to the fourth circulation path F4. The organic solvent recovery system 3D has the same configuration as the organic solvent recovery system 1D of Embodiment 1D except for the following points: the desorbed gas G11 of the second concentrator 300 passes through the sixth flow path F6 and returns to the fourth flow path F4.

在第六流通路徑F6流通之脫附氣體G11,與從冷卻冷凝裝置100排出之冷卻處理氣體G6一同在第四流通路徑F4流通,往第二熱交換器112返回。有機溶劑回收系統3D,於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統3D,可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統3D,由於脫附氣體G11為高溫,故可使往第二熱交換器112流通之流體的溫度上升,可對於用於將排放氣體G1冷卻之第二熱交換器112的小型化、節能化有所助益。The desorbed gas G11 that flows through the sixth flow path F6 flows through the fourth flow path F4 together with the cooled processing gas G6 discharged from the cooling and condensing device 100 and returns to the second heat exchanger 112. The organic solvent recovery system 3D does not need to process the air volume of the desorbed gas G11 in the cooling and condensing device 100 and the first concentrating device 200. Therefore, the organic solvent recovery system 3D can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. The organic solvent recovery system 3D can increase the temperature of the fluid flowing through the second heat exchanger 112 due to the high temperature of the desorbed gas G11, which can reduce the size of the second heat exchanger 112 for cooling the exhaust gas G1 , Energy saving is helpful.

[實施形態4D] 圖13係概略顯示實施形態4D的有機溶劑回收系統4D之構成的圖。有機溶劑回收系統4D,係由冷卻冷凝裝置100、第一濃縮裝置200、第二濃縮裝置300、及各種流通路徑構成。有機溶劑回收系統4D,使第二濃縮裝置300之脫附氣體G11通過第六流通路徑F6,返回至第五流通路徑F5。有機溶劑回收系統4D,除了下述點以外之構成,與實施形態1D的有機溶劑回收系統1D相同:使第二濃縮裝置300之脫附氣體G11通過第六流通路徑F6,返回至第五流通路徑F5。[Embodiment 4D] Fig. 13 is a diagram schematically showing the configuration of the organic solvent recovery system 4D of Embodiment 4D. The organic solvent recovery system 4D is composed of a cooling and condensing device 100, a first concentrating device 200, a second concentrating device 300, and various circulation paths. The organic solvent recovery system 4D allows the desorbed gas G11 of the second concentration device 300 to pass through the sixth flow path F6 and return to the fifth flow path F5. The organic solvent recovery system 4D has the same configuration as the organic solvent recovery system 1D of Embodiment 1D except for the following points: the desorbed gas G11 of the second concentrator 300 passes through the sixth flow path F6 and returns to the fifth flow path F5.

在第六流通路徑F6流通之脫附氣體G11,與從第二熱交換器112排出之排放氣體G1及冷卻處理氣體G6的一部分一同在第五流通路徑F5流通,往生產設備130返回。有機溶劑回收系統4D,於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統4D可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統4D,由於脫附氣體G11為高溫,故可提高從生產設備130再度排出之排放氣體G1的溫度。因此,有機溶劑回收系統4D,可使往第二熱交換器112流通之流體的溫度上升,可對於用於將排放氣體G1冷卻之第二熱交換器112的小型化、節能化有所助益。The desorbed gas G11 flowing through the sixth flow path F6 circulates through the fifth flow path F5 together with part of the exhaust gas G1 and the cooling process gas G6 discharged from the second heat exchanger 112 and returns to the production facility 130. The organic solvent recovery system 4D does not need to process the air volume of the desorption gas G11 in the cooling and condensing device 100 and the first concentrating device 200. Therefore, the organic solvent recovery system 4D can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. In the organic solvent recovery system 4D, since the desorption gas G11 is high temperature, the temperature of the exhaust gas G1 discharged from the production equipment 130 can be increased. Therefore, the organic solvent recovery system 4D can increase the temperature of the fluid flowing through the second heat exchanger 112, which can contribute to the miniaturization and energy saving of the second heat exchanger 112 for cooling the exhaust gas G1. .

[作用/效果] 本實施形態之有機溶劑回收系統1D,具備:冷卻冷凝裝置100,藉由將含有有機溶劑之排放氣體G1冷卻,而將有機溶劑液化冷凝,作為有機溶劑的濃度已降低之冷卻處理氣體G4排出;第一流通路徑F1,使冷卻處理氣體G4的一部分流通;第一濃縮裝置200,將從第一流通路徑F1導入之冷卻處理氣體G4所包含的有機溶劑藉由吸附單元210吸附,作為有機溶劑的濃度進一步降低之冷卻處理氣體G5排出,導入高溫氣體G7而從吸附單元210使有機溶劑脫附,作為脫附氣體G8排出;第二流通路徑F2,使冷卻處理氣體G5流通;以及第二濃縮裝置300,將從第二流通路徑F2導入之冷卻處理氣體G5所含有的有機溶劑藉由吸附元件310吸附,作為有機溶劑的濃度進一步降低之潔淨氣體G9排出,導入高溫氣體G10而從吸附元件310使有機溶劑脫附,作為脫附氣體G11排出。[Effect] The organic solvent recovery system 1D of this embodiment includes a cooling and condensing device 100, which cools the exhaust gas G1 containing the organic solvent to liquefy and condense the organic solvent, and discharges it as the cooled processing gas G4 whose concentration of the organic solvent has been reduced; The first flow path F1 circulates a part of the cooled processing gas G4; the first concentrating device 200, the organic solvent contained in the cooled processing gas G4 introduced from the first flow path F1 is adsorbed by the adsorption unit 210 as the organic solvent The cooling process gas G5 whose concentration is further reduced is discharged, the high-temperature gas G7 is introduced to desorb the organic solvent from the adsorption unit 210, and is discharged as the desorption gas G8; the second flow path F2 allows the cooling process gas G5 to circulate; and the second concentrating device 300. The organic solvent contained in the cooling process gas G5 introduced from the second flow path F2 is adsorbed by the adsorption element 310 and discharged as the clean gas G9 whose concentration of the organic solvent is further reduced. The organic solvent is desorbed and discharged as desorption gas G11.

冷卻冷凝裝置100,包含藉由與冷媒之熱交換而施行排放氣體G1的冷卻之第二熱交換器112。有機溶劑回收系統1D更包含第四流通路徑F4,第四流通路徑F4使作為冷卻處理氣體G4的一部分以外亦即冷卻處理氣體的其餘部分之冷卻處理氣體G6,返回至第二熱交換器112。使脫附氣體G8,返回至冷卻冷凝裝置100,且使脫附氣體G11,返回至第一流通路徑F1。有機溶劑回收系統1D,由於脫附氣體G11返回至第一流通路徑F1,故於冷卻冷凝裝置100中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統1D,可對於冷卻冷凝裝置100的小型化、節能化有所助益。有機溶劑回收系統1D,由於脫附氣體G11為高溫,故可抑制冷卻處理氣體G4中所包含的NMP(N-甲基吡咯烷酮)、水分等之冷凝。The cooling and condensing device 100 includes a second heat exchanger 112 that performs cooling of the exhaust gas G1 by heat exchange with a refrigerant. The organic solvent recovery system 1D further includes a fourth flow path F4. The fourth flow path F4 returns the cooling process gas G6, which is a part of the cooling process gas G4, that is, the remaining part of the cooling process gas, to the second heat exchanger 112. The desorbed gas G8 is returned to the cooling and condensing device 100, and the desorbed gas G11 is returned to the first circulation path F1. In the organic solvent recovery system 1D, since the desorbed gas G11 returns to the first circulation path F1, there is no need to process the air volume of the desorbed gas G11 in the cooling and condensing device 100. Therefore, the organic solvent recovery system 1D can contribute to the miniaturization and energy saving of the cooling and condensing device 100. In the organic solvent recovery system 1D, since the desorption gas G11 has a high temperature, it can suppress the condensation of NMP (N-methylpyrrolidone), moisture, etc. contained in the cooling process gas G4.

使脫附氣體G8,返回至冷卻冷凝裝置100,且使脫附氣體G11,返回至再生加熱器250。有機溶劑回收系統2D,由於使脫附氣體G11返回至再生加熱器250,故於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統2D,可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統2D,由於脫附氣體G11為高溫,故可對於再生加熱器250的節能化有所助益。The desorbed gas G8 is returned to the cooling and condensing device 100, and the desorbed gas G11 is returned to the regeneration heater 250. Since the organic solvent recovery system 2D returns the desorbed gas G11 to the regeneration heater 250, there is no need to process the air volume of the desorbed gas G11 in the cooling and condensing device 100 and the first concentration device 200. Therefore, the organic solvent recovery system 2D can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. The organic solvent recovery system 2D, because the desorption gas G11 has a high temperature, can contribute to the energy saving of the regenerative heater 250.

使脫附氣體G8,返回至冷卻冷凝裝置100,且使脫附氣體G11,返回至第四流通路徑F4。脫附氣體G11,與冷卻處理氣體G6一同在第四流通路徑F4流通,往第二熱交換器112返回。有機溶劑回收系統3D,於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統3D,可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統3D,由於脫附氣體G11為高溫,故可使往第二熱交換器112流通之流體的溫度上升,可對於用於將排放氣體G1冷卻之第二熱交換器112的小型化、節能化有所助益。The desorbed gas G8 is returned to the cooling and condensing device 100, and the desorbed gas G11 is returned to the fourth flow path F4. The desorbed gas G11 flows through the fourth flow path F4 together with the cooling process gas G6, and returns to the second heat exchanger 112. The organic solvent recovery system 3D does not need to process the air volume of the desorbed gas G11 in the cooling and condensing device 100 and the first concentrating device 200. Therefore, the organic solvent recovery system 3D can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. The organic solvent recovery system 3D can increase the temperature of the fluid flowing through the second heat exchanger 112 due to the high temperature of the desorbed gas G11, which can reduce the size of the second heat exchanger 112 for cooling the exhaust gas G1 , Energy saving is helpful.

使脫附氣體G8,返回至冷卻冷凝裝置100,且使脫附氣體G11,返回至第五流通路徑F5。脫附氣體G11,與從第二熱交換器112排出之排放氣體G1及冷卻處理氣體G6的一部分一同在第五流通路徑F5流通,往生產設備130返回。有機溶劑回收系統4D,於冷卻冷凝裝置100及第一濃縮裝置200中無須處理脫附氣體G11的風量分。因此,有機溶劑回收系統4D可對於冷卻冷凝裝置100及第一濃縮裝置200的小型化、節能化有所助益。有機溶劑回收系統4D,由於脫附氣體G11為高溫,故可提高從生產設備130再度排出之排放氣體G1的溫度。因此,有機溶劑回收系統4D,可使往第二熱交換器112流通之流體的溫度上升,可對於用於將排放氣體G1冷卻之第二熱交換器112的小型化、節能化有所助益。The desorbed gas G8 is returned to the cooling and condensing device 100, and the desorbed gas G11 is returned to the fifth flow path F5. The desorbed gas G11 circulates in the fifth circulation path F5 together with part of the exhaust gas G1 and the cooling process gas G6 discharged from the second heat exchanger 112 and returns to the production facility 130. The organic solvent recovery system 4D does not need to process the air volume of the desorption gas G11 in the cooling and condensing device 100 and the first concentrating device 200. Therefore, the organic solvent recovery system 4D can contribute to the miniaturization and energy saving of the cooling and condensing device 100 and the first concentration device 200. In the organic solvent recovery system 4D, since the desorption gas G11 is high temperature, the temperature of the exhaust gas G1 discharged from the production equipment 130 can be increased. Therefore, the organic solvent recovery system 4D can increase the temperature of the fluid flowing through the second heat exchanger 112, which can contribute to the miniaturization and energy saving of the second heat exchanger 112 for cooling the exhaust gas G1. .

將本實施形態之第一濃縮裝置200,於使吸附單元210繞筒軸旋轉之中空圓柱狀的轉筒之繞筒軸的圓周方向配置複數個。藉此,可高效率地回收有機溶劑。The first concentrating device 200 of the present embodiment is arranged in plural in the circumferential direction around the drum axis of the hollow cylindrical drum that rotates the adsorption unit 210 around the drum axis. Thereby, the organic solvent can be recovered efficiently.

本實施形態之第二濃縮裝置300,將吸附元件310配置於繞筒軸旋轉之圓盤狀的吸附轉筒。藉此,可高效率地回收有機溶劑。In the second concentrating device 300 of this embodiment, the adsorption element 310 is arranged in a disc-shaped adsorption drum that rotates around a drum axis. Thereby, the organic solvent can be recovered efficiently.

[其他實施形態] 上述實施形態中,濃縮裝置,利用第一濃縮裝置200與第二濃縮裝置300此兩台。濃縮裝置,亦可因應風量,應用兩台第一濃縮裝置200或兩台第二濃縮裝置300。此外,亦可因應去除效率,應用三台以上之濃縮裝置。[Other embodiments] In the above embodiment, two concentrating devices, the first concentrating device 200 and the second concentrating device 300, are used. The concentration device can also use two first concentration devices 200 or two second concentration devices 300 according to the air volume. In addition, more than three concentrators can also be used according to the removal efficiency.

作為排放氣體G1所含有的有機溶劑,列舉可藉由1℃~50℃之冷卻而液化回收的有機溶劑。作為有機溶劑,例如為N-甲基吡咯烷酮、N-乙基吡咯烷酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、或正癸烷。其等僅為例示,並未限定於其等。所含有的有機溶劑,可為1種亦可為複數種。Examples of the organic solvent contained in the exhaust gas G1 include organic solvents that can be liquefied and recovered by cooling at 1°C to 50°C. The organic solvent is, for example, N-methylpyrrolidone, N-ethylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, or n-decane. These etc. are only examples, and are not limited to them. The organic solvent contained may be one type or plural types.

本次揭露之實施形態全部的點僅為例示,應考慮到其等並非用於限制本發明。本發明揭露之範圍,係由發明申請專利範圍而非上述說明顯示,本發明意在包含發明申請專利範圍、及其均等意涵與範圍內之全部變更。All the points of the embodiment disclosed this time are only examples, and it should be considered that they are not intended to limit the present invention. The scope of the disclosure of the present invention is shown by the scope of the invention patent application rather than the above description. The invention is intended to include the scope of the invention patent application and all changes within the equivalent meaning and scope thereof.

1A,1B,1C,1D,2B,2C,2D,3C,3D,4C,4D:有機溶劑回收系統 100:冷卻冷凝裝置 110:冷卻部 111:第一熱交換器 112:第二熱交換器 120:分離部 121:網眼狀構造體 122:承接部 123:腔室 124:堰部 126:加熱器 125:貯存槽 127:頂棚部 128:分隔部 130:生產設備 200:第一濃縮裝置 210:吸附單元 211:內周側流路形成構件 212:吸附轉筒 213:外周側流路形成構件 250,350:再生加熱器 300:第二濃縮裝置 310:吸附元件 311:脫附部(脫附區) 312:吸附部(吸附區) 500,600:濃縮裝置 F1:第一流通路徑 F2:第二流通路徑 F3:第三流通路徑 F4:第四流通路徑 F5:第五流通路徑 F6:第六流通路徑 G1,G2:排放氣體 G3,G4,G5,G6:冷卻處理氣體 G7,G10:高溫氣體 G8,G11:脫附氣體 G9:潔淨氣體 L1:冷卻冷凝液 L2:脫附冷凝液 L3:回收液1A, 1B, 1C, 1D, 2B, 2C, 2D, 3C, 3D, 4C, 4D: organic solvent recovery system 100: Cooling and condensing device 110: Cooling part 111: The first heat exchanger 112: second heat exchanger 120: Separation part 121: Mesh structure 122: Acceptance Department 123: Chamber 124: Weir 126: heater 125: storage tank 127: Ceiling Department 128: divider 130: production equipment 200: The first concentration device 210: Adsorption unit 211: Inner peripheral side flow path forming member 212: Adsorption drum 213: Peripheral flow path forming member 250, 350: Regenerative heater 300: The second concentration device 310: Adsorption component 311: Desorption part (desorption area) 312: Adsorption part (adsorption zone) 500,600: concentration device F1: The first circulation path F2: Second circulation path F3: Third circulation path F4: Fourth circulation path F5: Fifth circulation path F6: The sixth circulation path G1, G2: exhaust gas G3, G4, G5, G6: cooling process gas G7, G10: high temperature gas G8, G11: desorption gas G9: Clean gas L1: Cooling condensate L2: Desorption condensate L3: Recovered liquid

圖1係概略顯示實施形態1A的有機溶劑回收系統之構成的圖。 圖2係實施形態1A的有機溶劑回收系統之另一構成圖的一例。 圖3係實施形態1A的有機溶劑回收系統之更另一構成圖的一例。 圖4係實施形態1B的有機溶劑回收系統之構成概略顯示的圖。 圖5係概略顯示實施形態2B的有機溶劑回收系統之構成的圖。 圖6係概略顯示實施形態1C的有機溶劑回收系統之構成的圖。 圖7係概略顯示實施形態2C的有機溶劑回收系統之構成的圖。 圖8係概略顯示實施形態3C的有機溶劑回收系統之構成的圖。 圖9係概略顯示實施形態4C的有機溶劑回收系統之構成的圖。 圖10係概略顯示實施形態1D的有機溶劑回收系統之構成的圖。 圖11係概略顯示實施形態2D的有機溶劑回收系統之構成的圖。 圖12係概略顯示實施形態3D的有機溶劑回收系統之構成的圖。 圖13係概略顯示實施形態4D的有機溶劑回收系統之構成的圖。Fig. 1 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 1A. Fig. 2 is an example of another configuration diagram of the organic solvent recovery system of Embodiment 1A. Fig. 3 is an example of another configuration diagram of the organic solvent recovery system of Embodiment 1A. Fig. 4 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 1B. Fig. 5 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 2B. Fig. 6 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 1C. Fig. 7 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 2C. Fig. 8 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 3C. Fig. 9 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 4C. Fig. 10 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 1D. Fig. 11 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 2D. Fig. 12 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 3D. Fig. 13 is a diagram schematically showing the configuration of the organic solvent recovery system of Embodiment 4D.

1A:有機溶劑回收系統 1A: Organic solvent recovery system

100:冷卻冷凝裝置 100: Cooling and condensing device

110:冷卻部 110: Cooling part

111:第一熱交換器 111: The first heat exchanger

112:第二熱交換器 112: second heat exchanger

120:分離部 120: Separation part

121:網眼狀構造體 121: Mesh structure

123:腔室 123: Chamber

125:貯存槽 125: storage tank

127:頂棚部 127: Ceiling Department

128:分隔部 128: divider

130:生產設備 130: production equipment

300:第二濃縮裝置 300: The second concentration device

310:吸附元件 310: Adsorption component

311:脫附部(脫附區) 311: Desorption part (desorption area)

312:吸附部(吸附區) 312: Adsorption part (adsorption zone)

350:再生加熱器 350: Regenerative heater

F1:第一流通路徑 F1: The first circulation path

F2:第二流通路徑 F2: Second circulation path

G1,G2:排放氣體 G1, G2: exhaust gas

G3,G4,G6:冷卻處理氣體 G3, G4, G6: Cooling process gas

G9:潔淨氣體 G9: Clean gas

G10:高溫氣體 G10: High temperature gas

G11:脫附氣體 G11: desorption gas

L1:冷卻冷凝液 L1: Cooling condensate

L2:脫附冷凝液 L2: Desorption condensate

L3:回收液 L3: Recovered liquid

Claims (30)

一種有機溶劑回收系統,包含: 冷卻冷凝裝置,藉由將含有有機溶劑之排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出; 第一流通路徑,使該冷卻處理氣體的一部分流通; 濃縮裝置,具備吸附元件,將從該第一流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由該吸附元件吸附,作為該有機溶劑的濃度進一步降低之潔淨氣體排出,導入高溫氣體而從該吸附元件使該有機溶劑脫附,作為脫附氣體排出;以及 第二流通路徑,將該脫附氣體導入至該冷卻冷凝裝置; 於該有機溶劑回收系統中, 該冷卻冷凝裝置,具備:網眼狀構造體,藉由接觸冷卻後之該排放氣體,而使冷凝的該有機溶劑與該冷卻處理氣體分離;以及腔室,將通過該網眼狀構造體後之該冷卻處理氣體貯存一定時間; 該第一流通路徑,設置為從該腔室之頂棚部將該冷卻處理氣體的一部分導入至該濃縮裝置。An organic solvent recovery system, including: The cooling and condensing device, by cooling the exhaust gas containing the organic solvent, the organic solvent is liquefied and condensed, and discharged as the cooling processing gas whose concentration of the organic solvent has been reduced; The first circulation path allows a part of the cooling process gas to circulate; The concentration device is equipped with an adsorption element, and the organic solvent contained in the cooling processing gas introduced from the first flow path is adsorbed by the adsorption element, and discharged as a clean gas whose concentration of the organic solvent is further reduced, and a high-temperature gas is introduced. Desorb the organic solvent from the adsorption element and discharge it as a desorption gas; and A second circulation path, introducing the desorption gas to the cooling and condensing device; In this organic solvent recovery system, The cooling and condensing device includes: a mesh-like structure that separates the condensed organic solvent from the cooling process gas by contacting the exhaust gas after cooling; and a chamber that passes through the mesh-like structure The cooling process gas is stored for a certain period of time; The first flow path is provided to introduce a part of the cooling processing gas from the ceiling portion of the chamber to the concentrating device. 如請求項1之有機溶劑回收系統,其中, 該腔室具備分隔部,該分隔部可與從該網眼狀構造體排出之該冷卻處理氣體的排氣方向對向而進行該第一流通路徑的吸入。Such as the organic solvent recovery system of claim 1, in which, The chamber is provided with a partition that can be opposed to the exhaust direction of the cooling process gas discharged from the mesh-like structure to perform the suction of the first flow path. 如請求項1之有機溶劑回收系統,其中, 該冷卻冷凝裝置,具備藉由與冷媒之熱交換而施行該冷卻的熱交換器。Such as the organic solvent recovery system of claim 1, in which, The cooling and condensing device includes a heat exchanger that performs the cooling by heat exchange with a refrigerant. 如請求項1之有機溶劑回收系統,其中, 該第二流通路徑,將脫附部設置於較該脫附氣體與該排放氣體的合流位置更為上部。Such as the organic solvent recovery system of claim 1, in which, In the second flow path, the desorption part is arranged above the confluence position of the desorption gas and the exhaust gas. 如請求項1之有機溶劑回收系統,其中, 該排放氣體為從生產設備排出之氣體; 該有機溶劑回收系統更包含返回路徑,其使從該第一流通路徑排出之該冷卻處理氣體的一部分以外亦即該冷卻處理氣體的其餘部分,返回至該生產設備。Such as the organic solvent recovery system of claim 1, in which, The exhaust gas is the gas discharged from the production equipment; The organic solvent recovery system further includes a return path for returning part of the cooling process gas discharged from the first circulation path, that is, the remaining part of the cooling process gas, to the production equipment. 如請求項3至5中任一項之有機溶劑回收系統,其中, 該熱交換器,包括第一熱交換器、及設置於該第一熱交換器之前段的第二熱交換器; 該第二熱交換器,將導入至該冷卻冷凝裝置之該排放氣體,藉由與該冷卻處理氣體的其餘部分之熱交換而冷卻。Such as the organic solvent recovery system of any one of claims 3 to 5, wherein: The heat exchanger includes a first heat exchanger and a second heat exchanger arranged in the front section of the first heat exchanger; The second heat exchanger cools the exhaust gas introduced into the cooling and condensing device by heat exchange with the rest of the cooling process gas. 一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含: 冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出; 第一流通路徑,使該冷卻處理氣體流通; 第一濃縮裝置,將從該第一流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出; 第二流通路徑,使該第一處理氣體的一部分流通; 第二濃縮裝置,將從該第二流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出;以及 第三流通路徑,使該第一脫附氣體及該第二脫附氣體返回至該冷卻冷凝裝置。An organic solvent recovery system that recovers the organic solvent from the exhaust gas containing the organic solvent discharged from the production equipment, including: Cooling and condensing device, by cooling the exhaust gas containing the organic solvent to liquefy and condense the organic solvent, and discharge it as a cooling treatment gas whose concentration of the organic solvent has been reduced; The first circulation path allows the cooling process gas to circulate; The first concentrating device absorbs the organic solvent contained in the cooled processing gas introduced from the first flow path by the first adsorption element, and discharges it as the first processing gas whose concentration of the organic solvent is further reduced, and introduces high-temperature gas The organic solvent is desorbed from the first adsorption element and discharged as the first desorption gas; The second circulation path allows a part of the first processing gas to circulate; The second concentrating device absorbs the organic solvent contained in the first processing gas introduced from the second flow path by the second adsorption element, and discharges it as the second processing gas whose concentration of the organic solvent is further reduced, and introduces high temperature Gas and desorb the organic solvent from the second adsorption element, and discharge it as a second desorption gas; and The third circulation path returns the first desorption gas and the second desorption gas to the cooling and condensing device. 如請求項7之有機溶劑回收系統,其中, 該冷卻冷凝裝置,更包含:網眼狀構造體,藉由接觸該冷卻後之該排放氣體,而使冷凝的該有機溶劑與該冷卻處理氣體分離;以及腔室,將通過該網眼狀構造體後之該冷卻處理氣體貯存一定時間; 該第一流通路徑,設置為從該腔室之頂棚部將該冷卻處理氣體導入至該第一濃縮裝置。Such as the organic solvent recovery system of claim 7, in which, The cooling and condensing device further includes: a mesh-like structure for separating the condensed organic solvent from the cooling processing gas by contacting the cooled exhaust gas; and a chamber through which the mesh-like structure will pass The cooling process gas after the body is stored for a certain period of time; The first circulation path is provided to introduce the cooling processing gas from the ceiling portion of the chamber to the first concentrating device. 如請求項8之有機溶劑回收系統,其中, 該腔室具備分隔部,該分隔部可與從該網眼狀構造體排出之該冷卻處理氣體的排氣方向對向而進行該第一流通路徑的吸入。Such as the organic solvent recovery system of claim 8, in which, The chamber is provided with a partition that can be opposed to the exhaust direction of the cooling process gas discharged from the mesh-like structure to perform the suction of the first flow path. 如請求項7之有機溶劑回收系統,其中, 該冷卻冷凝裝置,更包含藉由與冷媒之熱交換而施行該冷卻的熱交換器。Such as the organic solvent recovery system of claim 7, in which, The cooling and condensing device further includes a heat exchanger that performs the cooling by heat exchange with the refrigerant. 如請求項7之有機溶劑回收系統,其中, 更包含返回路徑,其使從該第二流通路徑排出之該第一處理氣體的一部分以外亦即該第一處理氣體的其餘部分,返回至該生產設備。Such as the organic solvent recovery system of claim 7, in which, It further includes a return path for returning part of the first processing gas discharged from the second circulation path, that is, the remaining part of the first processing gas, to the production equipment. 如請求項10或11之有機溶劑回收系統,其中, 該熱交換器,包括第一熱交換器、及設置於該第一熱交換器之前段的第二熱交換器; 該第二熱交換器,將導入至該冷卻冷凝裝置之該排放氣體,藉由與該第一處理氣體的其餘部分之熱交換而冷卻。Such as the organic solvent recovery system of claim 10 or 11, in which, The heat exchanger includes a first heat exchanger and a second heat exchanger arranged in the front section of the first heat exchanger; The second heat exchanger cools the exhaust gas introduced into the cooling and condensing device by heat exchange with the rest of the first processing gas. 一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含: 冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該排放氣體之該有機溶劑的濃度已降低之冷卻處理氣體排出; 冷卻氣體流通路徑,使該冷卻處理氣體流通; 濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由吸附元件吸附,作為該有機溶劑的濃度進一步降低之處理氣體排出,導入高溫氣體而從該吸附元件使該有機溶劑脫附,作為脫附氣體排出;以及 脫附氣體流通路徑,將該脫附氣體導入至該冷卻冷凝裝置; 該冷卻冷凝裝置,包含:冷卻部,使該排放氣體流通;以及分離部,在沿著該排放氣體的流動方向觀察之情況,位於該冷卻部的下游側; 該分離部,具備:承接部,承接以該冷卻部冷卻的含有該有機溶劑之冷卻冷凝液;網眼狀構造體,藉由接觸冷卻後之該排放氣體,而使該冷卻冷凝液與該冷卻處理氣體分離;以及腔室,將通過該網眼狀構造體後之該冷卻處理氣體貯存一定時間; 沿著該排放氣體的流動方向觀察之情況,相對於從該冷卻部往該分離部流動的方向,使該分離部內從該網眼狀構造體往該腔室流動的方向交叉,藉以使該排放氣體沿L字形方向流動。An organic solvent recovery system that recovers the organic solvent from the exhaust gas containing the organic solvent discharged from the production equipment, including: A cooling and condensing device, by cooling the exhaust gas containing the organic solvent to liquefy and condense the organic solvent, and discharge the cooled processing gas whose concentration of the organic solvent has been reduced as the exhaust gas; Cooling gas circulation path to circulate the cooling processing gas; The concentrating device absorbs the organic solvent contained in the cooling processing gas introduced from the cooling gas flow path by an adsorption element, and discharges it as processing gas whose concentration of the organic solvent is further reduced, and introduces a high-temperature gas to remove it from the adsorption element. The organic solvent is desorbed and discharged as a desorption gas; and A desorption gas flow path, introducing the desorption gas to the cooling and condensing device; The cooling and condensing device includes: a cooling part that allows the exhaust gas to circulate; and a separation part, which is located on the downstream side of the cooling part when viewed along the flow direction of the exhaust gas; The separation part is provided with: a receiving part to receive the cooling condensate containing the organic solvent cooled by the cooling part; Processing gas separation; and a chamber, storing the cooling processing gas after passing through the mesh structure for a certain period of time; When viewed along the flow direction of the exhaust gas, with respect to the direction from the cooling section to the separation section, the direction of flow from the mesh structure in the separation section to the chamber is crossed so that the exhaust The gas flows in the L-shaped direction. 如請求項13之有機溶劑回收系統,其中, 於該網眼狀構造體的下游側,配置用於將該冷卻處理氣體加熱之加熱器。Such as the organic solvent recovery system of claim 13, in which, A heater for heating the cooling processing gas is arranged on the downstream side of the mesh structure. 如請求項13之有機溶劑回收系統,其中, 於該腔室內,設置防止該冷卻冷凝液往該冷卻氣體流通路徑流動的堰部。Such as the organic solvent recovery system of claim 13, in which, In the chamber, a weir is provided to prevent the cooling condensate from flowing to the cooling gas flow path. 如請求項13之有機溶劑回收系統,其中, 該濃縮裝置,包含第一濃縮裝置、及位於該第一濃縮裝置的下游側之第二濃縮裝置; 該第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出; 該有機溶劑回收系統,更包含使該第一處理氣體的一部分流通之第一處理氣體流通路徑; 該第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出。Such as the organic solvent recovery system of claim 13, in which, The concentrating device includes a first concentrating device and a second concentrating device located on the downstream side of the first concentrating device; In the first concentrating device, the organic solvent contained in the cooling processing gas introduced from the cooling gas flow path is adsorbed by the first adsorption element, and discharged as the first processing gas whose concentration of the organic solvent is further reduced, and introducing a high temperature Gas and desorb the organic solvent from the first adsorption element, and discharge it as the first desorption gas; The organic solvent recovery system further includes a first processing gas circulation path for circulating a part of the first processing gas; The second concentrating device absorbs the organic solvent contained in the first processing gas introduced from the first processing gas flow path by a second adsorption element, and discharges it as a second processing gas whose concentration of the organic solvent is further reduced , The high-temperature gas is introduced to desorb the organic solvent from the second adsorption element, and is discharged as the second desorption gas. 如請求項16之有機溶劑回收系統,其中, 該第一濃縮裝置,係將該第一吸附元件於繞筒軸旋轉之中空圓柱狀的轉筒之繞筒軸的圓周方向配置複數個。Such as the organic solvent recovery system of claim 16, in which, In the first concentrating device, a plurality of the first adsorption elements are arranged in the circumferential direction around the drum axis of the hollow cylindrical rotating drum rotating around the drum axis. 如請求項16之有機溶劑回收系統,其中, 該第二濃縮裝置,係將該第二吸附元件配置於繞筒軸旋轉之圓盤狀的吸附轉筒。Such as the organic solvent recovery system of claim 16, in which, In the second concentrating device, the second adsorption element is arranged on a disc-shaped adsorption drum that rotates around a drum axis. 一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含: 冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出; 冷卻氣體流通路徑,使該冷卻處理氣體流通; 第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出; 第一處理氣體流通路徑,使該第一處理氣體的一部分流通;以及 第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出; 使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該冷卻氣體流通路徑。An organic solvent recovery system that recovers the organic solvent from the exhaust gas containing the organic solvent discharged from the production equipment, including: Cooling and condensing device, by cooling the exhaust gas containing the organic solvent to liquefy and condense the organic solvent, and discharge it as a cooling treatment gas whose concentration of the organic solvent has been reduced; Cooling gas circulation path to circulate the cooling processing gas; The first concentrating device absorbs the organic solvent contained in the cooling process gas introduced from the cooling gas flow path by the first adsorption element, and discharges it as the first process gas whose concentration of the organic solvent is further reduced, and introduces high-temperature gas The organic solvent is desorbed from the first adsorption element and discharged as the first desorption gas; The first processing gas flow path allows a part of the first processing gas to circulate; and The second concentrating device absorbs the organic solvent contained in the first processing gas introduced from the first processing gas flow path by the second adsorption element, and discharges it as the second processing gas whose concentration of the organic solvent is further reduced, Introducing a high-temperature gas to desorb the organic solvent from the second adsorption element, and discharge it as a second desorption gas; The first desorption gas is returned to the cooling and condensing device, and the second desorption gas is returned to the cooling gas circulation path. 一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含: 冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出; 冷卻氣體流通路徑,使該冷卻處理氣體流通; 第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,藉由第一加熱器導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出; 第一處理氣體流通路徑,使該第一處理氣體的一部分流通;以及 第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,藉由第二加熱器導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出; 使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該第一加熱器。An organic solvent recovery system that recovers the organic solvent from the exhaust gas containing the organic solvent discharged from the production equipment, including: Cooling and condensing device, by cooling the exhaust gas containing the organic solvent to liquefy and condense the organic solvent, and discharge it as a cooling treatment gas whose concentration of the organic solvent has been reduced; Cooling gas circulation path to circulate the cooling processing gas; The first concentrating device absorbs the organic solvent contained in the cooling processing gas introduced from the cooling gas flow path by the first adsorption element, and discharges it as the first processing gas whose concentration of the organic solvent is further reduced. A heater introduces high-temperature gas to desorb the organic solvent from the first adsorption element, and discharge it as the first desorption gas; The first processing gas flow path allows a part of the first processing gas to circulate; and The second concentrating device absorbs the organic solvent contained in the first processing gas introduced from the first processing gas flow path by the second adsorption element, and discharges it as the second processing gas whose concentration of the organic solvent is further reduced, Introducing a high-temperature gas through a second heater to desorb the organic solvent from the second adsorption element, and discharge it as a second desorption gas; The first desorption gas is returned to the cooling and condensing device, and the second desorption gas is returned to the first heater. 一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含: 冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出; 冷卻氣體流通路徑,使該冷卻處理氣體流通; 第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出; 第一處理氣體流通路徑,使該第一處理氣體的一部分流通; 冷卻冷凝裝置返回路徑,使從該第一處理氣體流通路徑排出之該第一處理氣體的一部分以外亦即該第一處理氣體的其餘部分,返回至該冷卻冷凝裝置;以及 第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出; 使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該冷卻冷凝裝置返回路徑。An organic solvent recovery system that recovers the organic solvent from the exhaust gas containing the organic solvent discharged from the production equipment, including: Cooling and condensing device, by cooling the exhaust gas containing the organic solvent to liquefy and condense the organic solvent, and discharge it as a cooling treatment gas whose concentration of the organic solvent has been reduced; Cooling gas circulation path to circulate the cooling processing gas; The first concentrating device absorbs the organic solvent contained in the cooling process gas introduced from the cooling gas flow path by the first adsorption element, and discharges it as the first process gas whose concentration of the organic solvent is further reduced, and introduces high-temperature gas The organic solvent is desorbed from the first adsorption element and discharged as the first desorption gas; The first processing gas circulation path allows a part of the first processing gas to circulate; Cooling and condensing device return path, so that part of the first processing gas discharged from the first processing gas flow path, that is, the remaining part of the first processing gas, is returned to the cooling and condensing device; and The second concentrating device absorbs the organic solvent contained in the first processing gas introduced from the first processing gas flow path by the second adsorption element, and discharges it as the second processing gas whose concentration of the organic solvent is further reduced, Introducing a high-temperature gas to desorb the organic solvent from the second adsorption element, and discharge it as a second desorption gas; The first desorbed gas is returned to the cooling and condensing device, and the second desorbed gas is returned to the cooling and condensing device return path. 一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含: 冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出; 冷卻氣體流通路徑,使該冷卻處理氣體流通; 第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出; 第一處理氣體流通路徑,使該第一處理氣體的一部分流通;以及 第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出; 該冷卻冷凝裝置,包含藉由與冷媒之熱交換而施行冷卻的熱交換器; 該有機溶劑回收系統更包含生產設備返回路徑,該生產設備返回路徑使從該生產設備排出之該排放氣體的一部分,於通過該熱交換器後返回至該生產設備; 使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該生產設備返回路徑。An organic solvent recovery system that recovers the organic solvent from the exhaust gas containing the organic solvent discharged from the production equipment, including: Cooling and condensing device, by cooling the exhaust gas containing the organic solvent to liquefy and condense the organic solvent, and discharge it as a cooling treatment gas whose concentration of the organic solvent has been reduced; Cooling gas circulation path to circulate the cooling processing gas; The first concentrating device absorbs the organic solvent contained in the cooling process gas introduced from the cooling gas flow path by the first adsorption element, and discharges it as the first process gas whose concentration of the organic solvent is further reduced, and introduces high-temperature gas The organic solvent is desorbed from the first adsorption element and discharged as the first desorption gas; The first processing gas flow path allows a part of the first processing gas to circulate; and The second concentrating device absorbs the organic solvent contained in the first processing gas introduced from the first processing gas flow path by the second adsorption element, and discharges it as the second processing gas whose concentration of the organic solvent is further reduced, Introducing a high-temperature gas to desorb the organic solvent from the second adsorption element, and discharge it as a second desorption gas; The cooling and condensing device includes a heat exchanger that performs cooling by heat exchange with a refrigerant; The organic solvent recovery system further includes a production equipment return path, and the production equipment return path enables a part of the exhaust gas discharged from the production equipment to return to the production equipment after passing through the heat exchanger; The first desorption gas is returned to the cooling and condensing device, and the second desorption gas is returned to the return path of the production equipment. 如請求項19至22中任一項之有機溶劑回收系統,其中, 該第一濃縮裝置,係將該第一吸附元件於繞筒軸旋轉之中空圓柱狀的轉筒之繞筒軸的圓周方向配置複數個。Such as the organic solvent recovery system of any one of claims 19 to 22, wherein: In the first concentrating device, a plurality of the first adsorption elements are arranged in the circumferential direction around the drum axis of the hollow cylindrical rotating drum rotating around the drum axis. 如請求項19至22中任一項之有機溶劑回收系統,其中, 該第二濃縮裝置,將該第二吸附元件配置於繞筒軸旋轉之圓盤狀的吸附轉筒。Such as the organic solvent recovery system of any one of claims 19 to 22, wherein: In the second concentrating device, the second adsorption element is arranged on a disc-shaped adsorption drum rotating around a drum axis. 一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含: 冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出; 冷卻氣體流通路徑,使該冷卻處理氣體的一部分流通; 第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出; 第一處理氣體流通路徑,使該第一處理氣體流通;以及 第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出; 該冷卻冷凝裝置,包含藉由與冷媒之熱交換而施行該排放氣體的冷卻之熱交換器; 該有機溶劑回收系統更包含熱交換器返回路徑,該熱交換器返回路徑使該冷卻處理氣體的一部分以外亦即該冷卻處理氣體的其餘部分,返回至該熱交換器; 使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該冷卻氣體流通路徑。An organic solvent recovery system that recovers the organic solvent from the exhaust gas containing the organic solvent discharged from the production equipment, including: Cooling and condensing device, by cooling the exhaust gas containing the organic solvent to liquefy and condense the organic solvent, and discharge it as a cooling treatment gas whose concentration of the organic solvent has been reduced; Cooling gas circulation path, allowing part of the cooling processing gas to circulate; The first concentrating device absorbs the organic solvent contained in the cooling process gas introduced from the cooling gas flow path by the first adsorption element, and discharges it as the first process gas whose concentration of the organic solvent is further reduced, and introduces high-temperature gas The organic solvent is desorbed from the first adsorption element and discharged as the first desorption gas; The first processing gas flow path allows the first processing gas to circulate; and The second concentrating device absorbs the organic solvent contained in the first processing gas introduced from the first processing gas flow path by the second adsorption element, and discharges it as the second processing gas whose concentration of the organic solvent is further reduced, Introducing a high-temperature gas to desorb the organic solvent from the second adsorption element, and discharge it as a second desorption gas; The cooling and condensing device includes a heat exchanger that performs cooling of the exhaust gas by heat exchange with a refrigerant; The organic solvent recovery system further includes a heat exchanger return path, and the heat exchanger return path returns a part of the cooling process gas, that is, the rest of the cooling process gas, to the heat exchanger; The first desorption gas is returned to the cooling and condensing device, and the second desorption gas is returned to the cooling gas circulation path. 一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含: 冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出; 冷卻氣體流通路徑,使該冷卻處理氣體的一部分流通; 第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,藉由加熱器導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出; 第一處理氣體流通路徑,使該第一處理氣體流通;以及 第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出; 該冷卻冷凝裝置,包含藉由與冷媒之熱交換而施行該排放氣體的冷卻之熱交換器; 該有機溶劑回收系統更包含熱交換器返回路徑,該熱交換器返回路徑使該冷卻處理氣體的一部分以外亦即該冷卻處理氣體的其餘部分,返回至該熱交換器; 使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該加熱器。An organic solvent recovery system that recovers the organic solvent from the exhaust gas containing the organic solvent discharged from the production equipment, including: Cooling and condensing device, by cooling the exhaust gas containing the organic solvent to liquefy and condense the organic solvent, and discharge it as a cooling treatment gas whose concentration of the organic solvent has been reduced; Cooling gas circulation path, allowing part of the cooling processing gas to circulate; The first concentrating device absorbs the organic solvent contained in the cooling processing gas introduced from the cooling gas flow path by the first adsorption element, and discharges it as the first processing gas whose concentration of the organic solvent is further reduced, and is heated by heating The device introduces high-temperature gas to desorb the organic solvent from the first adsorption element, and discharges it as the first desorption gas; The first processing gas flow path allows the first processing gas to circulate; and The second concentrating device absorbs the organic solvent contained in the first processing gas introduced from the first processing gas flow path by the second adsorption element, and discharges it as the second processing gas whose concentration of the organic solvent is further reduced, Introducing a high-temperature gas to desorb the organic solvent from the second adsorption element, and discharge it as a second desorption gas; The cooling and condensing device includes a heat exchanger that performs cooling of the exhaust gas by heat exchange with a refrigerant; The organic solvent recovery system further includes a heat exchanger return path, and the heat exchanger return path returns a part of the cooling process gas, that is, the rest of the cooling process gas, to the heat exchanger; The first desorption gas is returned to the cooling and condensing device, and the second desorption gas is returned to the heater. 一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含: 冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出; 冷卻氣體流通路徑,使該冷卻處理氣體的一部分流通; 第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出; 第一處理氣體流通路徑,使該第一處理氣體流通;以及 第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出; 該冷卻冷凝裝置,包含藉由與冷媒之熱交換而施行冷卻的熱交換器; 該有機溶劑回收系統更包含熱交換器返回路徑,該熱交換器返回路徑使該冷卻處理氣體的一部分以外亦即該冷卻處理氣體的其餘部分,返回至該熱交換器; 使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該熱交換器返回路徑。An organic solvent recovery system that recovers the organic solvent from the exhaust gas containing the organic solvent discharged from the production equipment, including: Cooling and condensing device, by cooling the exhaust gas containing the organic solvent to liquefy and condense the organic solvent, and discharge it as a cooling treatment gas whose concentration of the organic solvent has been reduced; Cooling gas circulation path, allowing part of the cooling processing gas to circulate; The first concentrating device absorbs the organic solvent contained in the cooling process gas introduced from the cooling gas flow path by the first adsorption element, and discharges it as the first process gas whose concentration of the organic solvent is further reduced, and introduces high-temperature gas The organic solvent is desorbed from the first adsorption element and discharged as the first desorption gas; The first processing gas flow path allows the first processing gas to circulate; and The second concentrating device absorbs the organic solvent contained in the first processing gas introduced from the first processing gas flow path by the second adsorption element, and discharges it as the second processing gas whose concentration of the organic solvent is further reduced, Introducing a high-temperature gas to desorb the organic solvent from the second adsorption element, and discharge it as a second desorption gas; The cooling and condensing device includes a heat exchanger that performs cooling by heat exchange with a refrigerant; The organic solvent recovery system further includes a heat exchanger return path, and the heat exchanger return path returns a part of the cooling process gas, that is, the rest of the cooling process gas, to the heat exchanger; The first desorbed gas is returned to the cooling and condensing device, and the second desorbed gas is returned to the heat exchanger return path. 一種有機溶劑回收系統,由從生產設備排出的含有有機溶劑之排放氣體,將該有機溶劑回收,包含: 冷卻冷凝裝置,藉由將含有該有機溶劑之該排放氣體冷卻,而將該有機溶劑液化冷凝,作為該有機溶劑的濃度已降低之冷卻處理氣體排出; 冷卻氣體流通路徑,使該冷卻處理氣體的一部分流通; 第一濃縮裝置,將從該冷卻氣體流通路徑導入之該冷卻處理氣體所含有的該有機溶劑藉由第一吸附元件吸附,作為該有機溶劑的濃度進一步降低之第一處理氣體排出,導入高溫氣體而從該第一吸附元件使該有機溶劑脫附,作為第一脫附氣體排出; 第一處理氣體流通路徑,使該第一處理氣體流通;以及 第二濃縮裝置,將從該第一處理氣體流通路徑導入之該第一處理氣體所含有的該有機溶劑藉由第二吸附元件吸附,作為該有機溶劑的濃度進一步降低之第二處理氣體排出,導入高溫氣體而從該第二吸附元件使該有機溶劑脫附,作為第二脫附氣體排出; 該冷卻冷凝裝置,包含藉由與冷媒之熱交換而施行冷卻的熱交換器; 該有機溶劑回收系統,更包含: 熱交換器返回路徑,使該冷卻處理氣體的一部分以外亦即該冷卻處理氣體的其餘部分,返回至該熱交換器;以及 生產設備返回路徑,使從該生產設備排出之該排放氣體的一部分,於通過該熱交換器後返回至該生產設備; 使該第一脫附氣體,返回至該冷卻冷凝裝置,且使該第二脫附氣體,返回至該生產設備返回路徑。An organic solvent recovery system that recovers the organic solvent from the exhaust gas containing the organic solvent discharged from the production equipment, including: Cooling and condensing device, by cooling the exhaust gas containing the organic solvent to liquefy and condense the organic solvent, and discharge it as a cooling treatment gas whose concentration of the organic solvent has been reduced; Cooling gas circulation path, allowing part of the cooling processing gas to circulate; The first concentrating device absorbs the organic solvent contained in the cooling process gas introduced from the cooling gas flow path by the first adsorption element, and discharges it as the first process gas whose concentration of the organic solvent is further reduced, and introduces high-temperature gas The organic solvent is desorbed from the first adsorption element and discharged as the first desorption gas; The first processing gas flow path allows the first processing gas to circulate; and The second concentrating device absorbs the organic solvent contained in the first processing gas introduced from the first processing gas flow path by the second adsorption element, and discharges it as the second processing gas whose concentration of the organic solvent is further reduced, Introducing a high-temperature gas to desorb the organic solvent from the second adsorption element, and discharge it as a second desorption gas; The cooling and condensing device includes a heat exchanger that performs cooling by heat exchange with a refrigerant; The organic solvent recovery system further includes: A heat exchanger return path, so that a part of the cooling process gas, that is, the rest of the cooling process gas, is returned to the heat exchanger; and Production equipment return path, so that a part of the exhaust gas discharged from the production equipment returns to the production equipment after passing through the heat exchanger; The first desorption gas is returned to the cooling and condensing device, and the second desorption gas is returned to the return path of the production equipment. 如請求項25至28中任一項之有機溶劑回收系統,其中, 該第一濃縮裝置,將該第一吸附元件於繞筒軸旋轉之中空圓柱狀的轉筒之繞筒軸的圓周方向配置複數個。Such as the organic solvent recovery system of any one of Claims 25 to 28, wherein: In the first concentrating device, a plurality of the first adsorption elements are arranged in the circumferential direction around the drum axis of the hollow cylindrical rotating drum rotating around the drum axis. 如請求項25至28中任一項之有機溶劑回收系統,其中, 該第二濃縮裝置,將該第二吸附元件配置於繞筒軸旋轉之圓盤狀的吸附轉筒。Such as the organic solvent recovery system of any one of Claims 25 to 28, wherein: In the second concentrating device, the second adsorption element is arranged on a disc-shaped adsorption drum rotating around a drum axis.
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