TW202127969A - Film suction structure which is adapted to a film peeling machine for sucking or separating the film - Google Patents

Film suction structure which is adapted to a film peeling machine for sucking or separating the film Download PDF

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TW202127969A
TW202127969A TW109100643A TW109100643A TW202127969A TW 202127969 A TW202127969 A TW 202127969A TW 109100643 A TW109100643 A TW 109100643A TW 109100643 A TW109100643 A TW 109100643A TW 202127969 A TW202127969 A TW 202127969A
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holes
inner suction
outer drum
row
film
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TW109100643A
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TWI721753B (en
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張德勇
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鴻鉑科技有限公司
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Abstract

The invention provides a film suction structure, which mainly includes a first inner suction cylinder fixedly connected to a film peeling machine and provided with at least one first air inlet at the lower half of the cylinder body of the first inner suction cylinder, in which one end of the first inner suction cylinder is connected to a suction device for sucking air into the cylinder body of the first inner suction cylinder through at least one first air inlet; and a first outer drum coaxially sleeved on the first inner suction cylinder in a manner that the first outer drum can rotate relative to the first inner suction cylinder, in which the cylinder body of the first outer drum is provided with a plurality of row holes arranged at intervals around the circumference, and any one of the first row holes has a plurality of first through holes arranged at intervals in the axial direction. When the first outer drum rotates, the plurality of first row holes in the lower half of the cylinder body of the first outer drum are communicated with or are configured to interrupt the air flow so as to suck or separate the film.

Description

吸取薄膜結構 Absorb the film structure

本創作係有關一種吸取薄膜結構,尤指一種適用於剝膜機,而可吸附或分離薄膜,並將薄膜順暢、有效且全面性剝離者。 This creation is about a kind of film absorption structure, especially one that is suitable for film stripping machine, which can absorb or separate the film, and peel the film smoothly, effectively and comprehensively.

在印刷電路板的製造過程中,基板在曝光之前,皆會在基板之上、下表面分別形成光阻層及黏附於光阻層表面之薄膜,在曝光之後,再將薄膜剝離以使光阻層外露,以進行後續之顯影及蝕刻程序。而早期剝膜機剝離薄膜之方式,主要是藉由一前輸送段以輸送上述印刷電路板之類的薄板,使沿著由前朝後的輸送方向移動,薄板經由一阻擋單元之阻擋定位,再經由一組壓花輪在薄膜表面上滾壓之後,讓薄板繼續延著一後輸送段向後輸送,並以一組黏輪將前端緣產生皺摺之薄膜逐步剝離。其在實際剝離薄膜的過程中發現,由於基板本身之厚度不大,容易會有彎曲不平的現象,當外徑一致的長直筒形黏輪黏著薄膜時,各個黏著位置之黏著力並不全然相同,且由於薄膜之厚度很薄且脆弱,常無法順暢且全面性的讓薄膜逐漸剝離,仍舊會有部份的薄膜脆片黏附於光阻層之表面上,並常由於薄膜脆片之面積太小而無法被偵測到,此種現象將會在整個印刷電路板的製造過程中,讓基板面臨報廢的結果。 In the manufacturing process of printed circuit boards, before the substrate is exposed, a photoresist layer and a film adhered to the surface of the photoresist layer are formed on the upper and lower surfaces of the substrate, respectively. After the exposure, the film is peeled off to make the photoresist The layer is exposed for subsequent development and etching procedures. In the early days, the film peeling machine used a front conveying section to convey the above-mentioned printed circuit board and other thin plates, so that the thin plates were moved along the conveying direction from front to back, and the thin plates were blocked and positioned by a blocking unit. After rolling on the surface of the film through a set of embossing wheels, the sheet is conveyed backward along a rear conveying section, and the wrinkled film on the front edge is gradually peeled off by a set of adhesive wheels. It was found in the actual process of peeling the film that because the thickness of the substrate itself is not large, it is prone to bend and uneven. When the long straight cylindrical adhesive wheel with the same outer diameter is adhered to the film, the adhesive force of each adhesive position is not completely the same. And because the thickness of the film is very thin and fragile, it is often unable to peel off the film smoothly and comprehensively. There will still be some thin film flakes sticking to the surface of the photoresist layer, and often due to the area of the film fragile film being too large. It is too small to be detected. This phenomenon will cause the substrate to be scrapped during the entire manufacturing process of the printed circuit board.

因此,為了解決上述問題,目前即有一種「自動剝膜機」, 其主要包括一輸送單元、一阻擋單元、一夾持單元、一輾壓單元、一第一吹氣單元以及一剝膜單元。其剝膜方法係先以輸送單元輸送平板,再以阻擋單元阻擋於平板之前端緣,同時以夾持單元夾持定位平板,之後再使輾壓單元移動以輾壓平板之前端緣,使平板上之至少一薄膜之前端緣產生至少一平行於平板前端緣之皺摺,同時以第一吹氣單元吹動並掀起至少一薄膜前端緣所產生之至少一皺摺,而在輾壓單元及夾持單元復位之後,讓平板繼續移動,使剝膜單元延著至少一薄膜之前端緣將至少一薄膜剝離。 Therefore, in order to solve the above problems, there is currently an "automatic peeling machine", It mainly includes a conveying unit, a blocking unit, a clamping unit, a rolling unit, a first blowing unit and a film stripping unit. The method of stripping film is to transport the flat plate with the conveying unit first, then block the front edge of the flat plate with the blocking unit, and clamp and position the flat plate with the clamping unit, then move the rolling unit to roll the front edge of the flat plate to make the flat At least one wrinkle parallel to the front edge of the flat plate is generated on the front edge of at least one film, and at least one wrinkle generated by the front edge of the at least one film is blown and lifted by the first blowing unit. After the clamping unit is reset, the plate is allowed to continue to move, so that the peeling unit will peel off the at least one film along the front edge of the at least one film.

惟,上述剝膜機主要是適用於厚度較厚平板的薄膜剝離使用,但是對於厚度在0.1mm以下,甚至於0.04mm的薄板或是軟板而言,其在實際薄膜剝離的過程中,由於剝膜單元主要是以垂直於平板板面之方向拉起薄膜,容易會有同時拉動或捲起整個平板之現象產生,而讓基板因此而報廢、影響生產效率,甚至於讓剝膜機之機件損壞。有鑑於此,為了提供一種有別於習用技術之結構,並改善上述之缺點,發明人積多年的經驗及不斷的研發改進,遂有本創作之產生。 However, the above-mentioned film stripping machine is mainly suitable for the use of thick flat film peeling, but for thin plates or soft plates with a thickness of less than 0.1mm, or even 0.04mm, during the actual film peeling process, due to The film stripping unit is mainly to pull up the film in the direction perpendicular to the surface of the flat plate. It is easy to pull or roll up the entire flat plate at the same time, which will cause the substrate to be scrapped, affect the production efficiency, and even make the film stripper machine. Pieces are damaged. In view of this, in order to provide a structure that is different from the conventional technology and improve the above-mentioned shortcomings, the inventor has accumulated many years of experience and continuous research and development and improvement, and this creation was born.

本創作之一目的在提供一種吸取薄膜結構,俾能解決習用剝膜機在薄板或是軟板的薄膜剝離過程中,容易會有同時拉動或捲起整個平板的問題,而能使薄膜能順暢且全面性的與基板分離,以提高作業品質,增加良率,並有效避免因捲起整個平板所產生之機件損壞,或因平板報廢所造成之材料浪費。 One purpose of this creation is to provide a film-absorbing structure that can solve the problem of pulling or rolling up the entire flat plate at the same time during the peeling process of the thin or soft film with the conventional peeling machine, so that the film can be smooth Moreover, it is completely separated from the substrate to improve the quality of the work, increase the yield, and effectively avoid the damage of the mechanical parts caused by the rolling up of the entire plate, or the waste of materials caused by the scrap of the plate.

為達上述之目的,本創作所設之吸取薄膜結構係包括一第一內吸氣筒以及一第一外滾筒。其中之第一內吸氣筒係固定連接於一剝膜機 上,第一內吸氣筒之筒身下半部設有至少一第一進氣孔,第一內吸氣筒之一端連接一吸氣裝置,供吸氣讓氣流經由至少一第一進氣孔進入第一內吸氣筒之筒身內部;而第一外滾筒係以可相對於第一內吸氣筒轉動之方式同軸套接第一內吸氣筒,第一外滾筒之筒身設有複數個繞著圓周間隔併列之第一排孔,任一第一排孔具有軸向間隔排列之複數個第一通孔,藉以在第一外滾筒轉動時,讓第一外滾筒之筒身下半部之複數個第一排孔與第一內吸氣筒之至少一第一進氣孔連通,供向上吸氣,而在第一外滾筒之筒身下半部之複數個第一排孔繼續轉動至第一內吸氣筒之上半部時,中斷空氣由複數個第一排孔進入第一內吸氣筒之筒身內部。 In order to achieve the above-mentioned purpose, the suction film structure of this creation includes a first inner suction tube and a first outer roller. The first inner suction cylinder is fixedly connected to a peeling machine Above, the lower half of the body of the first inner suction tube is provided with at least one first air intake hole, and one end of the first inner suction tube is connected with an inhalation device for inhaling air and allowing the airflow to pass through the at least one first air inlet The hole enters the inside of the barrel of the first inner suction cylinder; and the first outer drum is coaxially sleeved with the first inner suction cylinder in a rotatable manner relative to the first inner suction cylinder. The barrel of the first outer drum is provided with There are a plurality of first rows of holes arranged at intervals around the circumference, and any first row of holes has a plurality of first through holes arranged at intervals in the axial direction, so that when the first outer drum rotates, the barrel of the first outer drum The plurality of first rows of holes in the lower half communicate with at least one first air inlet of the first inner suction tube for upward suction, and the plurality of first rows in the lower half of the first outer drum body When the hole continues to rotate to the upper half of the first inner suction cylinder, the interrupted air enters the inside of the cylinder body of the first inner suction cylinder from the plurality of first rows of holes.

實施時,第一進氣孔係為繞著第一內吸氣筒之筒身下半部所開設之弧形孔,且複數個第一進氣孔係以第一內吸氣筒之軸方向間隔併列。 In implementation, the first air inlet is an arc-shaped hole opened around the lower half of the barrel of the first inner suction tube, and the plurality of first air inlets are in the axial direction of the first inner suction tube Spaced juxtaposed.

實施時,本創作更包括一第一中間套筒,第一中間套筒係以可相對於第一外滾筒軸向移動之方式同軸連接第一外滾筒,並套接第一內吸氣筒;第一中間套筒之筒身設有複數個繞著圓周間隔併列之第一中間排孔,任一第一中間排孔包括複數個軸向間隔排列且具有不同軸向長度之第一中間通孔,且複數個第一中間排孔之複數個第一中間通孔對應第一外滾筒之複數個第一通孔,藉以在第一中間套筒軸向移動時,調整複數個第一中間通孔與複數個第一通孔之連通狀態。 In implementation, this creation further includes a first intermediate sleeve, which is coaxially connected to the first outer roller in a manner that can move axially relative to the first outer roller, and sleeves the first inner suction cylinder; The barrel of the first middle sleeve is provided with a plurality of first middle rows of holes arranged at intervals around the circumference, and any first middle row of holes includes a plurality of first middle through holes arranged at intervals in the axial direction and having different axial lengths , And the plurality of first middle through holes of the plurality of first middle rows of holes correspond to the plurality of first through holes of the first outer drum, so that when the first middle sleeve moves axially, the plurality of first middle through holes are adjusted The state of communication with a plurality of first through holes.

實施時,第一中間排孔之軸線中段具有最大長度之一第一中間通孔,最大長度第一中間通孔兩側之其他複數個第一中間通孔係以長度漸短之方式分別往第一中間排孔之軸線兩端間隔排列。 In implementation, the axial middle section of the first middle row of holes has a first middle through hole with the largest length, and the other plural first middle through holes on both sides of the first middle through hole of the largest length go to the first middle through hole in a way that the length becomes shorter. The two ends of the axis of a middle row of holes are arranged at intervals.

實施時,第一外滾筒之筒身外周緣更設有複數個第一槽,第 一槽之兩端分別連通任一第一排孔之二個間隔相鄰之該第一通孔。 During implementation, the outer circumference of the barrel of the first outer drum is further provided with a plurality of first grooves. Two ends of a groove are respectively connected with two adjacent first through holes of any first row of holes.

實施時,第一外滾筒之筒身外周緣更設有複數個第一導槽,第一導槽係以斜向連通於任二個相鄰併列之第一排孔之第一通孔之間。 During implementation, the outer periphery of the barrel of the first outer drum is further provided with a plurality of first guide grooves, the first guide grooves are connected obliquely between the first through holes of any two adjacent parallel first rows of holes .

實施時,本創作更包括一第二內吸氣筒及一第二外滾筒,第二內吸氣筒固定連接於剝膜機上,並平行定位於第一內吸氣筒之下方,第二內吸氣筒之筒身上半部設有至少一第二進氣孔,第二內吸氣筒連接吸氣裝置,供吸氣讓至少一第二進氣孔產生負壓;第二外滾筒係以可自轉之方式同軸連接第二內吸氣筒,第二外滾筒之筒身設有複數個繞著圓周間隔併列之第二排孔,任一第二排孔具有軸向間隔排列之複數個第二通孔,藉以在第二外滾筒轉動時,讓第二外滾筒之筒身上半部之複數個第二排孔與第二內吸氣筒之至少一第二進氣孔連通,供向下吸氣,而在第二外滾筒之筒身上半部之複數個第二排孔繼續轉動至第二內吸氣筒之下半部時,中斷空氣由複數個第二排孔進入第二內吸氣筒之筒身內部。 When implemented, this creation further includes a second inner suction cylinder and a second outer drum. The second inner suction cylinder is fixedly connected to the peeling machine and is positioned parallel to the bottom of the first inner suction cylinder. The upper half of the inner suction tube is provided with at least one second air inlet, and the second inner suction tube is connected to an air suction device for sucking air and causing the at least one second air inlet to generate negative pressure; the second outer drum is The second inner suction cylinder is coaxially connected in a rotatable manner. The cylinder body of the second outer cylinder is provided with a plurality of second rows of holes arranged at intervals around the circumference, and any second row of holes has a plurality of axially spaced apart The second through hole is used to allow the plurality of second rows of holes in the upper half of the second outer drum to communicate with at least one second air inlet of the second inner suction tube when the second outer drum rotates to supply Inhale downward, and when the second row of holes in the upper half of the second outer drum continue to rotate to the lower half of the second inner suction tube, the air is interrupted to enter the second inner through the plurality of second row of holes The inside of the cylinder of the inhaler.

實施時,本創作更包括一第二中間套筒,第二中間套筒係以可相對於第二外滾筒軸向移動之方式同軸連接第二外滾筒,並套接第二內吸氣筒;第二中間套筒之筒身設有複數個繞著圓周間隔併列之第二中間排孔,任一第二中間排孔包括複數個軸向間隔排列且具有不同軸向長度之第二中間通孔,且複數個第二中間排孔之複數個第二中間通孔對應第二外滾筒之複數個第二通孔,藉以在第二中間套筒軸向移動時,調整複數個第二中間通孔與複數個第二通孔之連通狀態。 When implemented, this creation further includes a second intermediate sleeve, which is coaxially connected to the second outer roller in a manner that can move axially relative to the second outer roller, and sleeves the second inner suction cylinder; The barrel of the second middle sleeve is provided with a plurality of second middle rows of holes arranged at intervals around the circumference, and any second middle row of holes includes a plurality of second middle through holes arranged at intervals in the axial direction and having different axial lengths , And the plurality of second middle through holes of the plurality of second middle rows of holes correspond to the plurality of second through holes of the second outer drum, so as to adjust the plurality of second middle through holes when the second middle sleeve moves axially The state of communication with a plurality of second through holes.

實施時,第一外滾筒之筒身外周緣更設有複數個第二槽,第二槽之兩端分別連通任一第二排孔之二個間隔相鄰之第二通孔。 During implementation, the outer periphery of the barrel of the first outer drum is further provided with a plurality of second grooves, and both ends of the second grooves are respectively connected with two adjacent second through holes of any second row of holes.

實施時,第二外滾筒之筒身外周緣更設有複數個第二導槽,第二導槽係以斜向連通於任二個相鄰併列之第二排孔之第二通孔之間。 During implementation, the outer periphery of the second outer drum is further provided with a plurality of second guide grooves, which are connected obliquely between the second through holes of any two adjacent second row of holes. .

為進一步了解本創作,以下舉較佳之實施例,配合圖式、圖號,將本創作之具體構成內容及其所達成的功效詳細說明如下。 In order to further understand the creation, the following is a preferred embodiment, in conjunction with the drawings and figure numbers, the specific content of the creation and the effects achieved are described in detail as follows.

1‧‧‧吸取薄膜結構 1‧‧‧Suck film structure

2‧‧‧第一內吸氣筒 2‧‧‧The first inner suction tube

21‧‧‧第一進氣孔 21‧‧‧First air inlet

3‧‧‧第一外滾筒 3‧‧‧The first outer roller

31‧‧‧第一排孔 31‧‧‧The first row of holes

311‧‧‧第一通孔 311‧‧‧First through hole

32‧‧‧第一槽 32‧‧‧First slot

33‧‧‧第一導槽 33‧‧‧First guide groove

4‧‧‧第一中間套筒 4‧‧‧The first intermediate sleeve

41‧‧‧第一中間排孔 41‧‧‧The first middle row of holes

411‧‧‧第一中間通孔 411‧‧‧The first middle through hole

5‧‧‧第二內吸氣筒 5‧‧‧Second inner aspirator

51‧‧‧第二進氣孔 51‧‧‧Second air inlet

6‧‧‧第二外滾筒 6‧‧‧Second outer roller

61‧‧‧第二排孔 61‧‧‧The second row of holes

611‧‧‧第二通孔 611‧‧‧Second through hole

62‧‧‧第二槽 62‧‧‧Second slot

63‧‧‧第二導槽 63‧‧‧Second guide groove

7‧‧‧第二中間套筒 7‧‧‧Second intermediate sleeve

71‧‧‧第二中間排孔 71‧‧‧The second middle row of holes

711‧‧‧第二中間通孔 711‧‧‧Second middle through hole

9‧‧‧剝膜機 9‧‧‧Film Stripping Machine

91‧‧‧平板 91‧‧‧Plate

911,912‧‧‧薄膜 911,912‧‧‧film

92‧‧‧輸送單元 92‧‧‧Conveying unit

921‧‧‧前輸送段 921‧‧‧Front conveying section

922‧‧‧後輸送段 922‧‧‧rear conveying section

93‧‧‧阻擋輾壓單元 93‧‧‧Block rolling unit

94‧‧‧第一吹氣單元 94‧‧‧First blowing unit

95‧‧‧第二吹氣單元 95‧‧‧Second blowing unit

第1圖係為本創作之較佳實施例安裝於剝膜機上之流程示意圖。 Figure 1 is a schematic flow diagram of the preferred embodiment of the creation installed on the film stripping machine.

第2圖係為本創作之較佳實施例之各筒之軸向剖面示意圖。 Figure 2 is a schematic diagram of the axial cross-section of each barrel of the preferred embodiment of creation.

第3圖係為本創作之較佳實施例之各筒之徑向剖面示意圖。 Figure 3 is a schematic diagram of a radial cross-section of each barrel of a preferred embodiment of creation.

第4圖係為本創作之較佳實施例之各筒之元件分解圖。 Figure 4 is an exploded view of the components of each barrel of the preferred embodiment of the creation.

第5圖係為本創作之較佳實施例在剝離薄膜時之使用狀態示意圖。 Figure 5 is a schematic diagram of the working state of the preferred embodiment of the creation when the film is peeled off.

第6圖係為本創作之較佳實施例在調整吸引薄膜寬度時之使用狀態示意圖。 Figure 6 is a schematic diagram of the use state of the preferred embodiment of the creation when adjusting the width of the suction film.

請參閱第1圖所示,本創作吸取薄膜結構1係供剝離一剝膜機9上之一平板91上下表面之至少一薄膜(911,912),其中之平板91可以為厚度在0.1mm以下,甚至於0.04mm的印刷電路板之類的薄板或是軟板。實施時,該剝膜機9更包括一輸送單元92以及一阻擋輾壓單元93。其中之輸送單元92包括一前輸送段921及一後輸送段922,前輸送段921係由複數水平間隔排列之滾筒所組成,供輸送一平板91使朝向吸取薄膜結構1之方向移動。而阻擋輾壓單元93係位於前輸送段921之後端,平板91經由阻擋輾壓單元93之阻擋定位,並以一組壓花輪分別在平板91上、下面之薄膜(911,912)表面上滾壓之後,即可在上、下薄膜(911,912)之前端邊緣分別形成平行於平板91前端緣之 一皺摺。而一第一吹氣單元94係定位於後輸送段922之前端上方,第一吹氣單元94之前端具有一第一吹氣口,第一吹氣口平行平板91之前端緣,藉以吹起薄膜911前端緣上方之皺摺;一第二吹氣單元95係定位於後輸送段922之前端下方,且第二吹氣單元95之前端具有一第二吹氣口,第二吹氣口平行平板91之前端緣,藉以吹起薄膜912前端緣下方之皺摺。而當平板91繼續延著後輸送段922之方向向後移動時,則可以吸取薄膜結構1捲起薄膜(911,912),使薄膜(911,912)分別與基板分離,並分別掉落於容納箱內。 Please refer to Figure 1. The film absorption structure 1 of the present creation is used to peel off at least one film (911, 912) on the upper and lower surfaces of a flat plate 91 on a peeling machine 9. The flat plate 91 can be less than 0.1mm in thickness, or even For thin boards or flexible boards such as 0.04mm printed circuit boards. In implementation, the film stripping machine 9 further includes a conveying unit 92 and a blocking and rolling unit 93. The conveying unit 92 includes a front conveying section 921 and a rear conveying section 922. The front conveying section 921 is composed of a plurality of horizontally spaced rollers for conveying a flat plate 91 to move in the direction of the film suction structure 1. The blocking and rolling unit 93 is located at the rear end of the front conveying section 921. The plate 91 is positioned through the blocking of the blocking and rolling unit 93, and is rolled on the surface of the film (911, 912) on and under the plate 91 with a set of embossing wheels. , That is, the front edges of the upper and lower films (911, 912) are respectively formed parallel to the front edge of the flat plate 91 A crease. A first blowing unit 94 is positioned above the front end of the rear conveying section 922. The front end of the first blowing unit 94 has a first blowing port. The first blowing port is parallel to the front edge of the flat plate 91 to blow up the film 911. Wrinkles above the front edge; a second blowing unit 95 is positioned below the front end of the rear conveying section 922, and the front end of the second blowing unit 95 has a second blowing port, which is parallel to the front end of the flat plate 91 Edge, so as to blow up the wrinkles under the front edge of the film 912. When the plate 91 continues to move backward in the direction of the rear conveying section 922, the film structure 1 can be sucked to roll up the film (911, 912), separate the film (911, 912) from the substrate, and respectively fall into the containing box.

請參閱第2~4圖所示,其為本創作吸取薄膜結構1之較佳實施例,主要包括一第一內吸氣筒2、一第一外滾筒3、一第一中間套筒4、一第二內吸氣筒5、一第二外滾筒6以及一第二中間套筒7。 Please refer to Figures 2 to 4, which is a preferred embodiment of the creative suction film structure 1, which mainly includes a first inner suction tube 2, a first outer roller 3, and a first intermediate sleeve 4. A second inner suction cylinder 5, a second outer roller 6 and a second intermediate sleeve 7.

第一內吸氣筒2係為橫向設置並固定連接於剝膜機9上之中空圓筒,第一內吸氣筒2定位於前輸送段921之後端上方並平行平板91之前端緣,第一內吸氣筒2之筒身下半部設有至少一第一進氣孔21,而在本實施例中,第一進氣孔21具有複數個,複數個第一進氣孔21係為繞著第一內吸氣筒2之筒身下半部所開設之弧形孔,且複數個第一進氣孔21係以第一內吸氣筒2之軸方向間隔併列。第一內吸氣筒2之一端連接一鼓風機,該鼓風機做為吸氣裝置,藉以在吸氣裝置吸氣時,讓第一內吸氣筒2之筒身外部的空氣能經由複數個第一進氣孔21進入筒身內部,而形成負壓狀態;實施時,吸氣裝置亦可依需要而產生不同之負壓吸力。 The first inner suction cylinder 2 is a hollow cylinder arranged horizontally and fixedly connected to the peeling machine 9. The first inner suction cylinder 2 is positioned above the rear end of the front conveying section 921 and parallel to the front edge of the flat plate 91. At least one first air inlet 21 is provided on the lower half of the cylinder body of an inner suction cylinder 2, and in this embodiment, there are a plurality of first air inlets 21, and the plurality of first air inlets 21 are The arc-shaped holes are opened around the lower half of the barrel of the first inner suction tube 2, and a plurality of first air inlet holes 21 are arranged in parallel at an axial interval of the first inner suction tube 2. One end of the first inner suction tube 2 is connected to a blower. The blower acts as an air suction device, so that when the suction device inhales air, the air outside the barrel of the first inner suction tube 2 can pass through a plurality of first The air inlet 21 enters the inside of the barrel to form a negative pressure state; when implemented, the suction device can also generate different negative pressure suction according to needs.

第一外滾筒3係為橫向設置之圓筒,第一外滾筒3由外而內依序套接第一中間套筒4與第一內吸氣筒2,且第一外滾筒3與第一中間套筒4之一端連接一傳動機構,藉以讓第一外滾筒3與第一中間套筒4同時繞著第 一內吸氣筒2同軸自轉。第一外滾筒3之筒身上設有複數個繞著圓周間隔併列之第一排孔31,任一第一排孔31具有軸向間隔排列之複數個第一通孔311,藉以在第一外滾筒3轉動時,讓第一外滾筒3之筒身下半部之複數個第一排孔31與第一內吸氣筒2之複數個第一進氣孔21連通,並讓第一外滾筒3之筒身上半部之複數個第一排孔31呈封閉狀態。藉此,如第5圖所示,即可在第一外滾筒3自轉而其筒身下半部之複數個第一排孔31與第一內吸氣筒2之複數個第一進氣孔21連通時,以負壓向上吸引並掀起薄膜911前端緣上方之皺摺,並同步帶動薄膜911向上捲動,而在第一外滾筒3繼續自轉但第一內吸氣筒2固定不動,亦即第一外滾筒3之筒身下半部之複數個第一排孔31繼續轉動至第一內吸氣筒2之上半部時,中斷空氣由複數個第一排孔31進入第一內吸氣筒2之筒身內部,使原本連通之複數個第一排孔31呈封閉狀態而解除負壓吸力,讓薄膜911之前端緣與第一外滾筒3分開以剝離薄膜911。另,第一外滾筒3之筒身外周緣更設有複數個第一槽32及複數個第一導槽33,其中之第一槽32的兩端分別連通任一第一排孔31之二個間隔相鄰之第一通孔311;而第一導槽33係以相互交叉之方式斜向連通於任二個相鄰併列之第一排孔31的第一通孔311之間,藉以讓氣流可以在各個第一通孔311、第一槽32及複數個第一導槽33之間流動,以吸附薄膜911之皺摺之邊角。 The first outer roller 3 is a horizontally arranged cylinder. The first outer roller 3 sleeves the first intermediate sleeve 4 and the first inner suction cylinder 2 in sequence from the outside to the inside, and the first outer roller 3 and the first One end of the intermediate sleeve 4 is connected to a transmission mechanism, so that the first outer roller 3 and the first intermediate sleeve 4 simultaneously surround the first outer roller 3 and the first intermediate sleeve 4 An inner suction tube 2 rotates coaxially. The cylinder body of the first outer drum 3 is provided with a plurality of first rows of holes 31 arranged at intervals around the circumference, and any first row of holes 31 has a plurality of first through holes 311 arranged at an axial interval, so that When the drum 3 rotates, the plurality of first row holes 31 in the lower half of the cylinder body of the first outer drum 3 communicate with the plurality of first air inlet holes 21 of the first inner suction tube 2 and allow the first outer drum The plurality of first row holes 31 in the upper half of the tube 3 are in a closed state. As a result, as shown in Figure 5, the first outer drum 3 can rotate on its own and the first row of holes 31 in the lower half of the barrel and the first inner suction tube 2 of the plurality of first air inlets When 21 is connected, the negative pressure sucks and lifts up the wrinkles above the front edge of the film 911, and synchronously drives the film 911 to roll up, and the first outer drum 3 continues to rotate but the first inner suction cylinder 2 is fixed. That is, when the plurality of first rows of holes 31 in the lower half of the cylinder body of the first outer drum 3 continue to rotate to the upper half of the first inner suction cylinder 2, the interrupted air enters the first inner through the plurality of first rows of holes 31 The inside of the cylinder body of the suction cylinder 2 closes the first row of holes 31 that were originally connected to release the negative pressure suction force, so that the front edge of the film 911 is separated from the first outer roller 3 to peel off the film 911. In addition, the outer circumference of the barrel of the first outer drum 3 is further provided with a plurality of first grooves 32 and a plurality of first guide grooves 33, wherein the two ends of the first groove 32 are respectively connected to two of the first row of holes 31 The first through holes 311 are adjacently spaced; and the first guide groove 33 is diagonally connected to any two adjacent first through holes 311 of the first row of holes 31 in an intersecting manner, so as to allow The air flow can flow between each of the first through holes 311, the first groove 32 and the plurality of first guide grooves 33 to absorb the wrinkle corners of the film 911.

第一中間套筒4套接第一內吸氣筒2,且第一中間套筒4以可相對於第一外滾筒4與第一內吸氣筒2軸向移動之方式同軸連接第一外滾筒4。第一中間套筒4之筒身設有複數個繞著圓周間隔併列之第一中間排孔41,任一第一中間排孔41包括複數個軸向間隔排列且具有不同軸向長度之第一中間通孔411,位於任一第一中間排孔41之軸線中段之一第一中間通孔411 具有最大之長度,而同一第一中間排孔41之其他複數個第一中間通孔411則是位於該最大長度第一中間通孔411之兩側,並以長度漸短之方式分別往第一中間排孔41之軸線兩端間隔排列。第一中間套筒4筒身上之複數個第一中間排孔41之複數個第一中間通孔411分別對應第一外滾筒3筒身上之複數個第一排孔31之複數個第一通孔311。藉此,當第一外滾筒3之複數個第一通孔311全部對應連通第一中間套筒4之複數個第一中間通孔411時,即可具有最大長度之薄膜911分離效果;而如第6圖所示,當第一中間套筒4相對於第一外滾筒3軸向移動時,則會讓第一外滾筒3之筒身依序遮蔽最大長度第一中間通孔411兩側之複數個第一中間通孔411,讓能夠吸引並分離薄膜911之長度逐漸縮短,以適用於具有較短水平寬度之平板91。 The first intermediate sleeve 4 is sleeved with the first inner suction cylinder 2, and the first intermediate sleeve 4 is coaxially connected to the first outer cylinder in a manner that can move axially relative to the first outer drum 4 and the first inner suction cylinder 2. Roller 4. The barrel of the first intermediate sleeve 4 is provided with a plurality of first intermediate rows of holes 41 arranged at intervals around the circumference. Middle through hole 411, one of the first middle through holes 411 located in the middle section of the axis of any first middle row of holes 41 Has the largest length, and the other plural first middle through holes 411 of the same first middle row of holes 41 are located on both sides of the first middle through hole 411 with the largest length, and go to the first in a decreasing length The two ends of the axis of the middle row of holes 41 are arranged at intervals. The plural first middle through holes 411 of the plural first middle rows of holes 41 on the cylinder body of the first middle sleeve 4 correspond to the plural first through holes of the plural first rows of holes 31 on the cylinder body of the first outer drum 3 respectively 311. Thereby, when the plurality of first through holes 311 of the first outer drum 3 all correspond to the plurality of first middle through holes 411 of the first intermediate sleeve 4, the separation effect of the film 911 with the maximum length can be achieved; and As shown in Figure 6, when the first intermediate sleeve 4 moves axially relative to the first outer roller 3, the barrel of the first outer roller 3 will sequentially cover the two sides of the first intermediate through hole 411 with the maximum length. The plurality of first middle through holes 411 gradually shorten the length of the film 911 that can attract and separate the film 911, so as to be suitable for the flat plate 91 with a shorter horizontal width.

而第二內吸氣筒5、第二外滾筒6與第二中間套筒7係為上下對應於第一內吸氣筒2、第一外滾筒3與第一中間套筒4之套筒結構,並位於前輸送段921之後端下方,同時平行平板91之前端緣。其中之第二內吸氣筒5之筒身上半部設有至少一第二進氣孔51,第二進氣孔51係為繞著第二內吸氣筒5之筒身上半部所開設之弧形孔,且複數個第二進氣孔51係以第二內吸氣筒5之軸方向間隔併列,第二內吸氣筒5連接吸氣裝置。第二外滾筒6係以可自轉之方式同軸連接第二內吸氣筒5,第二外滾筒6之筒身設有複數個繞著圓周間隔併列之第二排孔61,任一第二排孔61具有軸向間隔排列之複數個第二通孔611;而第二中間套筒7係以可相對於第二外滾筒6軸向移動之方式同軸連接第二外滾筒6,並套接第二內吸氣筒5;第二中間套筒7之筒身設有複數個繞著圓周間隔併列之第二中間排孔71,任一第二中間排孔71包括複數個軸向間隔排列且具有不同軸向長度之第二中間通孔711,第二中間排孔71之 軸線中段具有最大長度之一第二中間通孔711,最大長度第二中間通孔711兩側之其他複數個第二中間通孔711係以長度漸短之方式分別往第二中間排孔71之軸線兩端間隔排列,且複數個第二中間排孔71之複數個第二中間通孔711對應第二外滾筒6之複數個第二通孔611。藉此,即可以如第5圖所示向下吸引並分離薄膜912,並調整可分離薄膜912之水平寬度。另,第二外滾筒6之筒身外周緣更設有複數個第二槽62及複數個第二導槽63,其中之第二槽62的兩端分別連通任一第二排孔61之二個間隔相鄰之第二通孔611;而第二導槽63係以相互交叉之方式斜向連通於任二個相鄰併列之第二排孔61的第二通孔611之間,藉以讓氣流可以在各個第二通孔611、第二槽62及複數個第二導槽63之間流動,以吸附薄膜912之皺摺之邊角。 The second inner suction cylinder 5, the second outer roller 6 and the second intermediate sleeve 7 are corresponding to the first inner suction cylinder 2, the first outer roller 3 and the first intermediate sleeve 4 in a sleeve structure up and down. , And located below the rear end of the front conveying section 921, and parallel to the front edge of the flat plate 91 at the same time. The upper half of the second inner suction tube 5 is provided with at least one second air inlet 51, and the second air inlet 51 is opened around the upper half of the second inner suction tube 5 The arc-shaped holes, and a plurality of second air inlet holes 51 are arranged in parallel at an axial interval of the second inner suction cylinder 5, and the second inner suction cylinder 5 is connected to the suction device. The second outer drum 6 is coaxially connected to the second inner suction tube 5 in a rotatable manner. The barrel of the second outer drum 6 is provided with a plurality of second rows of holes 61 arranged at intervals around the circumference, any second row The holes 61 have a plurality of second through holes 611 arranged at intervals in the axial direction; and the second intermediate sleeve 7 is coaxially connected to the second outer roller 6 in a manner that can move axially relative to the second outer roller 6 and sleeves the second outer roller 6 Two inner suction cylinders 5; the cylinder of the second middle sleeve 7 is provided with a plurality of second middle rows of holes 71 arranged at intervals around the circumference, any second middle row of holes 71 includes a plurality of axially spaced arrangements and has The second middle through hole 711 of different axial length, the second middle row of holes 71 The middle section of the axis has a second middle through hole 711 with one of the largest lengths. The other plural second middle through holes 711 on both sides of the second middle through hole 711 of the largest length are respectively directed to the second middle row of holes 71 in a manner of decreasing length. The two ends of the axis are arranged at intervals, and the plurality of second middle through holes 711 of the plurality of second middle rows of holes 71 correspond to the plurality of second through holes 611 of the second outer drum 6. Thereby, the film 912 can be attracted and separated downward as shown in FIG. 5, and the horizontal width of the separable film 912 can be adjusted. In addition, the outer periphery of the barrel of the second outer drum 6 is further provided with a plurality of second grooves 62 and a plurality of second guide grooves 63, wherein the two ends of the second groove 62 are respectively connected to two of the second rows of holes 61 Two adjacent second through holes 611; and the second guide groove 63 is diagonally connected to the second through holes 611 of any two adjacent second row of holes 61 in a mutually intersecting manner, so as to allow The air flow can flow between each of the second through holes 611, the second groove 62 and the plurality of second guide grooves 63 to absorb the wrinkled corners of the film 912.

因此,本創作具有以下之優點: Therefore, this creation has the following advantages:

1、本創作可以在上下兩端分別形成負壓以分別吸取平板上下兩表面之薄膜,並在分別吸取薄膜之後,分別以捲繞之方式讓兩個薄膜分別與平板之基板分離,因此,可以經由對稱的分別捲起薄膜,並依需要而產生不同之負壓吸力,讓薄膜能順暢且全面性的與基板分離,以提高作業品質,增加良率,並有效避免因捲起整個平板所產生之機件損壞,或因平板報廢所造成之材料浪費。 1. In this creation, negative pressure can be formed on the upper and lower ends to absorb the films on the upper and lower surfaces of the plate, and after the films are respectively sucked, the two films are separately wound from the substrate of the plate. Therefore, you can The film is separately rolled up symmetrically, and different negative pressure suction is generated according to the needs, so that the film can be separated from the substrate smoothly and comprehensively, so as to improve the quality of the work, increase the yield, and effectively avoid the roll up of the entire plate. The machine parts are damaged, or the material is wasted due to the scrapped plate.

2、本創作可以調整複數個第一中間通孔、複數個第一通孔之連通狀態,以及調整複數個第二中間通孔、複數個第二通孔之連通狀態,因此,能適用於具有不同水平寬度之平板,並讓吸力能有效集中以節省能源之消耗。 2. This creation can adjust the connection state of a plurality of first middle through holes and a plurality of first through holes, and adjust the connection state of a plurality of second middle through holes and a plurality of second through holes. Therefore, it can be applied to Plates with different horizontal widths allow the suction to be effectively concentrated to save energy consumption.

3、本創作之外滾筒筒身的外周緣設有複數個軸向間隔排列及相互交叉之空氣流通槽道,且各個槽道分別連通各個通孔,因此,當薄膜之皺摺邊角不是剛好位於各個通孔上時,仍然可以防止皺摺之邊角翹起,以產生完 全吸附之效果。 3. In addition to this creation, the outer periphery of the drum body is provided with a plurality of axially spaced and intersecting air circulation channels, and each channel is connected to each through hole. Therefore, when the wrinkle corner of the film is not just right When it is located on each through hole, it can still prevent the corners of the wrinkles from lifting, so as to produce a complete The effect of full adsorption.

綜上所述,依上文所揭示之內容,本創作確可達到預期之目的,提供一種能將薄膜順暢、有效且全面性剝離,並可節省能源消耗之吸取薄膜結構,極具產業上利用之價值,爰依法提出發明專利申請。 In summary, according to the content disclosed above, this creation can indeed achieve the expected purpose, providing a film structure that can peel the film smoothly, effectively and comprehensively, and can save energy consumption, which is extremely industrially useful. For the value of this, Yan filed an application for a patent for invention in accordance with the law.

2‧‧‧第一內吸氣筒 2‧‧‧The first inner suction tube

21‧‧‧第一進氣孔 21‧‧‧First air inlet

3‧‧‧第一外滾筒 3‧‧‧The first outer roller

31‧‧‧第一排孔 31‧‧‧The first row of holes

311‧‧‧第一通孔 311‧‧‧First through hole

32‧‧‧第一槽 32‧‧‧First slot

33‧‧‧第一導槽 33‧‧‧First guide groove

4‧‧‧第一中間套筒 4‧‧‧The first intermediate sleeve

41‧‧‧第一中間排孔 41‧‧‧The first middle row of holes

411‧‧‧第一中間通孔 411‧‧‧The first middle through hole

5‧‧‧第二內吸氣筒 5‧‧‧Second inner aspirator

51‧‧‧第二進氣孔 51‧‧‧Second air inlet

6‧‧‧第二外滾筒 6‧‧‧Second outer roller

61‧‧‧第二排孔 61‧‧‧The second row of holes

611‧‧‧第二通孔 611‧‧‧Second through hole

62‧‧‧第二槽 62‧‧‧Second slot

63‧‧‧第二導槽 63‧‧‧Second guide groove

7‧‧‧第二中間套筒 7‧‧‧Second intermediate sleeve

71‧‧‧第二中間排孔 71‧‧‧The second middle row of holes

711‧‧‧第二中間通孔 711‧‧‧Second middle through hole

Claims (10)

一種吸取薄膜結構,係包括: An absorption film structure, which includes: 一第一內吸氣筒,係固定連接於一剝膜機上,該第一內吸氣筒之筒身下半部設有至少一第一進氣孔,該第一內吸氣筒之一端連接一吸氣裝置,供吸氣讓氣流經由該至少一第一進氣孔進入該第一內吸氣筒之筒身內部;以及 A first inner suction tube is fixedly connected to a peeling machine, the lower half of the first inner suction tube is provided with at least one first air inlet hole, and one end of the first inner suction tube Connected to an air suction device for inhaling air to allow airflow to enter the inside of the barrel of the first inner suction tube through the at least one first air inlet hole; and 一第一外滾筒,係以可相對於該第一內吸氣筒轉動之方式同軸套接該第一內吸氣筒,該第一外滾筒之筒身設有複數個繞著圓周間隔併列之第一排孔,該任一第一排孔具有軸向間隔排列之複數個第一通孔,藉以在該第一外滾筒轉動時,讓該第一外滾筒之筒身下半部之該複數個第一排孔與該第一內吸氣筒之至少一第一進氣孔連通,供向上吸氣,而在該第一外滾筒之筒身下半部之該複數個第一排孔繼續轉動至該第一內吸氣筒之上半部時,中斷空氣由該複數個第一排孔進入該第一內吸氣筒之筒身內部。 A first outer drum is coaxially sleeved with the first inner suction drum in a rotatable manner relative to the first inner suction drum. The first row of holes, any one of the first rows of holes has a plurality of first through holes arranged at intervals in the axial direction, so that when the first outer drum rotates, the pluralities of the lower half of the barrel of the first outer drum A first row of holes communicates with at least one first air inlet hole of the first inner suction cylinder for upward suction, and the plurality of first rows of holes in the lower half of the barrel of the first outer drum continue When rotating to the upper half of the first inner suction cylinder, interrupted air enters the inside of the barrel of the first inner suction cylinder through the plurality of first rows of holes. 如申請專利範圍第1項所述之吸取薄膜結構,其中,該第一進氣孔係為繞著該第一內吸氣筒之筒身下半部所開設之弧形孔,且該複數個第一進氣孔係以該第一內吸氣筒之軸方向間隔併列。 The suction film structure described in item 1 of the scope of patent application, wherein the first air inlet is an arc-shaped hole opened around the lower half of the barrel of the first inner suction tube, and the plurality of The first air intake holes are arranged in parallel at an axial interval of the first inner suction tube. 如申請專利範圍第1項所述之吸取薄膜結構,其更包括一第一中間套筒,該第一中間套筒係以可相對於該第一外滾筒軸向移動之方式同軸連接該第一外滾筒,並套接該第一內吸氣筒;該第一中間套筒之筒身設有複數個繞著圓周間隔併列之第一中間排孔,該任一第一中間排孔包括複數個軸向間隔排列且具有不同軸向長度之第一中間通孔,且該複數個第一中 間排孔之該複數個第一中間通孔對應該第一外滾筒之該複數個第一通孔,藉以在該第一中間套筒軸向移動時,調整該複數個第一中間通孔與該複數個第一通孔之連通狀態。 The suction film structure described in item 1 of the scope of patent application further includes a first intermediate sleeve which is coaxially connected to the first intermediate sleeve in a manner that can move axially relative to the first outer roller. The outer drum is sleeved with the first inner suction tube; the barrel of the first middle sleeve is provided with a plurality of first middle rows of holes arranged at intervals around the circumference, and any one of the first middle rows of holes includes a plurality of The first middle through holes arranged at intervals in the axial direction and having different axial lengths, and the plurality of first middle through holes The plurality of first middle through holes of the row of holes correspond to the plurality of first through holes of the first outer drum, so that when the first middle sleeve moves axially, the plurality of first middle through holes and The connected state of the plurality of first through holes. 如申請專利範圍第3項所述之吸取薄膜結構,其中,該第一中間排孔之軸線中段具有最大長度之一第一中間通孔,該最大長度第一中間通孔兩側之其他複數個第一中間通孔係以長度漸短之方式分別往該第一中間排孔之軸線兩端間隔排列。 The suction film structure described in item 3 of the scope of patent application, wherein the axial middle section of the first middle row of holes has a first middle through hole with the largest length, and the other pluralities on both sides of the largest length first middle through hole The first middle through holes are arranged at intervals to the two ends of the axis of the first middle row of holes in a manner of decreasing length. 如申請專利範圍第1至4項其中任一項所述之吸取薄膜結構,其中該第一外滾筒之筒身外周緣更設有複數個第一槽,該第一槽之兩端分別連通該任一第一排孔之二個間隔相鄰之該第一通孔。 As described in any one of items 1 to 4 in the scope of the patent application, the outer periphery of the barrel of the first outer drum is further provided with a plurality of first grooves, and the two ends of the first groove are respectively connected to the Two adjacent first through holes of any first row of holes are spaced apart. 如申請專利範圍第5項所述之吸取薄膜結構,其中該第一外滾筒之筒身外周緣更設有複數個第一導槽,該第一導槽係以斜向連通於任二個相鄰併列之該第一排孔之該第一通孔之間。 As described in item 5 of the scope of patent application, the outer periphery of the cylinder body of the first outer drum is further provided with a plurality of first guide grooves, and the first guide grooves are connected to any two phases in an oblique direction. Between the first through holes adjacent to the first row of holes. 如申請專利範圍第1項所述之薄膜剝離裝置,其更包括一第二內吸氣筒及一第二外滾筒,該第二內吸氣筒係固定連接於該剝膜機上,並平行定位於該第一內吸氣筒之下方,該第二內吸氣筒之筒身上半部設有至少一第二進氣孔,該第二內吸氣筒連接該吸氣裝置,供吸氣讓該至少一第二進氣孔產生負壓;該第二外滾筒係以可自轉之方式同軸連接該第二內吸氣筒,該第二外滾筒之筒身設有複數個繞著圓周間隔併列之第二排孔,該任一第二排孔具有軸向間隔排列之複數個第二通孔,藉以在該第二外滾筒轉動時,讓該第二外滾筒之筒身上半部之該複數個第二排孔與該第二內吸氣筒之至少一第二進氣孔連通,供向下吸氣,而在該第二外滾筒之 筒身上半部之該複數個第二排孔繼續轉動至該第二內吸氣筒之下半部時,中斷空氣由該複數個第二排孔進入該第二內吸氣筒之筒身內部。 The film peeling device described in item 1 of the scope of patent application further includes a second inner suction tube and a second outer roller, and the second inner suction tube is fixedly connected to the peeling machine and is parallel Located below the first inner suction cylinder, the second inner suction cylinder is provided with at least one second air inlet on the upper half of the cylinder, and the second inner suction cylinder is connected to the suction device for inhalation The at least one second air inlet is allowed to generate negative pressure; the second outer drum is coaxially connected to the second inner suction tube in a rotatable manner, and the barrel of the second outer drum is provided with a plurality of intervals around the circumference The parallel second row of holes, any of the second row of holes has a plurality of second through holes arranged at intervals in the axial direction, so that when the second outer drum rotates, the second outer drum A plurality of second rows of holes communicate with at least one second air inlet of the second inner suction tube for downward air suction, and in the second outer drum When the second row of holes in the upper half of the cylinder continue to rotate to the lower half of the second inner suction cylinder, the interrupted air enters the cylinder body of the second inner suction cylinder from the plurality of second rows of holes . 如申請專利範圍第7項所述之薄膜剝離裝置,其更包括一第二中間套筒,該第二中間套筒係以可相對於該第二外滾筒軸向移動之方式同軸連接該第二外滾筒,並套接該第二內吸氣筒;該第二中間套筒之筒身設有複數個繞著圓周間隔併列之第二中間排孔,該任一第二中間排孔包括複數個軸向間隔排列且具有不同軸向長度之第二中間通孔,且該複數個第二中間排孔之該複數個第二中間通孔對應該第二外滾筒之該複數個第二通孔,藉以在該第二中間套筒軸向移動時,調整該複數個第二中間通孔與該複數個第二通孔之連通狀態。 As described in item 7 of the scope of patent application, the film peeling device further includes a second intermediate sleeve which is coaxially connected to the second intermediate sleeve in a manner that can move axially relative to the second outer roller. The outer drum is sleeved with the second inner suction tube; the barrel of the second middle sleeve is provided with a plurality of second middle rows of holes arranged at intervals around the circumference, and any second middle row of holes includes a plurality of Second middle through holes arranged at intervals in the axial direction and having different axial lengths, and the plurality of second middle through holes of the plurality of second middle rows of holes correspond to the plurality of second through holes of the second outer drum, Therefore, when the second middle sleeve moves axially, the communication state between the plurality of second middle through holes and the plurality of second through holes is adjusted. 如申請專利範圍第7或8項所述之吸取薄膜結構,其中該第一外滾筒之筒身外周緣更設有複數個第二槽,該第二槽之兩端分別連通該任一第二排孔之二個間隔相鄰之該第二通孔。 As described in item 7 or 8 of the scope of patent application, the outer periphery of the barrel of the first outer drum is further provided with a plurality of second grooves, and both ends of the second groove are respectively connected to any one of the second grooves. Two adjacent second through holes in the row of holes are spaced apart. 如申請專利範圍第9項所述之吸取薄膜結構,其中該第二外滾筒之筒身外周緣更設有複數個第二導槽,該第二導槽係以斜向連通於任二個相鄰併列之該第二排孔之該第二通孔之間。 As described in item 9 of the scope of patent application, the outer periphery of the second outer drum is further provided with a plurality of second guide grooves, and the second guide grooves are connected to any two phases in an oblique direction. Between the second through holes adjacent to the second row of holes.
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TWI793005B (en) * 2022-05-06 2023-02-11 鴻鉑科技有限公司 A film peeling module (2)
TWI793004B (en) * 2022-05-06 2023-02-11 鴻鉑科技有限公司 A film peeling module (1)

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DE102014011721B4 (en) * 2014-08-06 2016-06-23 Josef Moser Apparatus and method for stripping protective films
JP6548006B2 (en) * 2015-02-10 2019-07-24 Agc株式会社 Peeling device for laminate, peeling method, and method of manufacturing electronic device
JP6468462B2 (en) * 2015-02-23 2019-02-13 Agc株式会社 Laminate peeling apparatus, peeling method, and electronic device manufacturing method
CN105564957A (en) * 2015-12-18 2016-05-11 苏州康鸿电子科技有限公司 Multi-station film tearing machine and sorting method based on film tearing machine
TWM597552U (en) * 2020-01-08 2020-06-21 鴻鉑科技有限公司 Structure for sucking thin film

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI793005B (en) * 2022-05-06 2023-02-11 鴻鉑科技有限公司 A film peeling module (2)
TWI793004B (en) * 2022-05-06 2023-02-11 鴻鉑科技有限公司 A film peeling module (1)

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