TW202127003A - Carrier device, optical inspection apparatus and optical inspection method - Google Patents

Abstract

The present invention provides a carrier device comprises a suction stage and a bearing device. The suction stage comprises a carrier table body, a first lifting unit and a second lifting unit on one side of the carrier table body. The first lifting unit includes a first suction unit, and the second lifting unit includes a second suction unit. The bearing device carries the suction stage to move in a interval. Wherein the first lifting unit and the second lifting unit are individually aligned to a first position and a second position of a workpiece which are in misaligned with each other. The second lifting unit lift down and the first lifting unit lift up to touch the first position of workpiece, and the first lifting unit lift down and the second lifting unit lift up to touch the second position of workpiece.

Description

Transfer device, optical detection equipment and optical detection method

The invention relates to a suction transfer device, an optical detection device and an optical detection method, in particular to a transfer device, an optical detection equipment and an optical detection method that can adsorb different positions of a material sheet to perform a comprehensive optical detection of the material sheet.

With the rapid development of science and technology, electronic products are widely used in life, and in order to improve the precision of electronic products and their parts, various related testing equipment has also been developed. In the automated industrial process, transfer equipment is used to transfer objects to the work platform or inspection location for various optical inspections or sorting operations after inspection.

In the prior art, equipment used as panels, substrates, or other objects to be inspected is often provided with a work platform for placing the objects to be inspected to perform related optical inspections. Part of the current method is to suspend and carry objects to be tested by providing airflow.

However, when the airflow is used to carry the object to be inspected, since the object is suspended on the carrier, a positioning structure contacting the object must be provided to fix the object at the detection position. However, when the camera captures the object, the positioning structure and the object The contact position of the image will cause the image to have a hidden area, resulting in an undetectable area (non-inspection area) in the image, and a second inspection must be performed. Furthermore, when using airflow to carry objects for back inspection, because the supporting and adsorbing surface must be opposite to the object detection surface, there is a risk of items falling during the back inspection.

The main purpose of the present invention is to provide a transfer device including a suction stage and a carrying device. The suction stage includes a stage main body, and a first lifting unit and a second lifting unit which are arranged on the side of the carrier main body. A first suction unit is provided on the first lifting unit, and a second suction unit is provided on the second lifting unit. The carrying device carries the suction stage, and the carrying device transfers the suction stage in a moving section. Wherein, the first lifting unit and the second lifting unit are arranged in a staggered arrangement, so that the first suction unit and the second suction unit are respectively aligned to a first position and a second position that do not overlap with each other. The suction stage has a first lifting state, which causes the second lifting unit to descend and the first lifting unit to rise, so as to contact an object to be measured at the first position, and a second lifting state, which causes the first lifting unit to descend and the first lifting unit to rise. The second lifting unit rises so as to contact the object under test at the second position.

The present invention also provides an optical inspection device, which includes a transfer device as described above, an image capture device, and an image processing device. The image capturing device is arranged on one side of a carrying device of the transfer device. The image capturing device photographs the object to be tested to obtain a first image when the adsorption stage is in the first elevated state. The image capturing device shoots the object to be tested to obtain a second image when the adsorption stage is in the second elevated state. After obtaining the first image and the second image, the image processing device combines the unmasked area outside the first position in the first image and the unmasked area outside the second position in the second image to output a combined image.

The present invention also provides an optical detection device, which includes a first-side image capturing device and a second-side image capturing device. The first-side imaging device includes an optical detection device as described above, used to shoot an image of a first surface of the object to be measured, and a lifting platform arranged on one side of the cut-and-transfer device for lifting and transferring Device. The second side imaging device includes an optical detection device as described above Prepared. The second-side image capturing device is arranged upside down on the upper side of the lifting platform, and is used for adsorbing the object to be measured and used for shooting an image of a second surface of the object to be measured.

The present invention also provides an optical detection method, including the following steps: providing a first transfer device for carrying an object to be tested; driving a second lifting unit of the first transfer device to descend and a first lifting unit to rise, By adsorbing the object under test at a first position; driving the first transfer device to move along a forward path so that the object under test passes through a shooting area of a first image capturing device; by the first image capturing device Take a first image of a first surface of the object to be measured; drive the first lifting unit of the first transfer device to descend and the second lifting unit to rise, so as to adsorb the object to be measured at a second position; drive the first transfer The device moves along a reverse path so that the object to be measured passes through the shooting area of the first image capturing device again; the first image capturing device captures a second image of the first surface of the object to be measured; An image processing device receives and merges the first image and the second image of the first surface of the object to be measured obtained from the first image capturing device.

The transfer device of the present invention switches the lifting state of the first lifting unit and the second lifting unit to allow the first lifting unit or the second lifting unit to contact different positions of the object to be tested, thereby eliminating the undetected image of the object to be tested Area. At the same time, the first lifting unit or the second lifting unit is used to adsorb multiple positions of the object to be measured, thereby increasing the adsorption area and improving the stability during high-speed transfer.

100‧‧‧Optical Inspection Equipment

A1‧‧‧The first side imaging device

A2‧‧‧Second side image capturing equipment

1‧‧‧The first transfer device

2‧‧‧The first image capture device

3‧‧‧The first image processing device

4‧‧‧Second transfer device

5‧‧‧Second image capture device

6‧‧‧Second image processing device

11‧‧‧Adsorption stage

12‧‧‧Carrier device

111‧‧‧The main body of the stage

112, 412‧‧‧The first lifting unit

113、413‧‧‧Second lifting unit

121‧‧‧Frame

122‧‧‧Orbit

123‧‧‧Drive device

1121‧‧‧Bracket

1122, 1132‧‧‧Drive unit

1131‧‧‧ Bracket

S1‧‧‧First adsorption unit

S2‧‧‧Second Adsorption Unit

S11, S21‧‧‧Vacuum adsorption device

S12, S22‧‧‧Air nozzle

S121, S221‧‧‧Protection pad

S122, S222‧‧‧Through hole

P‧‧‧Object to be tested

T‧‧‧Lifting platform

R1, R3‧‧‧forward path

R2, R4‧‧‧Reverse path

Z1, Z2‧‧‧Shooting area

Steps S101 to S109‧‧‧

L‧‧‧Lighting source

Figure 1 is a schematic side view of the double-sided optical inspection equipment of the present invention.

Fig. 2 is a schematic diagram (1) of the appearance of the first transfer device of the present invention.

Fig. 3 is a schematic diagram (2) of the appearance of the first transfer device of the present invention.

4 is a schematic side view of the first transfer device of the present invention in a first state.

Fig. 5 is a schematic side view of the first transfer device of the present invention in a second state.

6-1 to 6-4 are schematic diagrams (1) to (4) of the operation of the double-sided optical inspection device of the present invention.

Figures 7-1 to 7-2 are schematic diagrams (1) to (2) of the flow of the double-sided optical inspection equipment of the present invention.

The detailed description and technical content of the present invention will now be described in conjunction with the drawings as follows. Furthermore, the figures in the present invention are not necessarily drawn according to actual proportions for the convenience of description, and these figures and their proportions are not used to limit the scope of the present invention, and are described here first.

Please refer to "Figure 1", which is a schematic side view of the double-sided optical inspection equipment of the present invention, as shown in the figure:

The present invention discloses an optical detection device 100, which is a double-sided optical detection device. The optical inspection device 100 includes a first-side image capturing device A1 and a second-side image capturing device A2, which are used to carry and adsorb a test object P on its two sides, and to carry the test object P to The detection position is optically detected. The optical inspection equipment 100 can be applied to automated production equipment or automatic optical inspection equipment (Automated Optical Inspection) to move carrier sheets, workpieces, panels, substrates, circuit boards (PCB), flexible circuit boards (FPC) or other The test object P like this is not limited in the present invention.

The first surface image capturing device A1 is used to capture a first surface image of the object P to be tested, and includes a first transfer device 1, a first image capture device 2 and a first image processing device 3. The first transfer device 1 is a switchable suction transfer device, but it is not limited to this. The first surface imaging device A1 also includes a lifting platform T arranged on one side of the first transfer device 1 for lifting the first transfer device 1. Optionally, the jacking platform T can be a pneumatic pump, a hydraulic pump, a screw or any other method or structure that can drive the first transfer device 1 to rise and fall. The present invention does not limit this, and is described here first. .

The second surface image capturing device A2 includes a second transfer device 4, a second image capture device 5, and a second image processing device 6. The second transfer device 4 is a switchable suction transfer device, but it is not limited to this. The second side image capturing device A2 is arranged upside down on the upper side of the lifting platform T, and is used for adsorbing the object P to be measured and shooting a second side image of the object P to be measured.

Since the first transfer device 1 and the second transfer device 4 of the present invention are two devices with exactly the same structure, the difference is that the second transfer device 4 is set upside down. Therefore, the following only focuses on the specifics of the first transfer device 1. The structure is explained, and the specific structure of the second transfer device 4 will not be repeated, and it will be described here first.

For the detailed structure of the transfer device (the first transfer device 1 and the second transfer device 2), please refer to "Figure 2" to "Figure 5" together, showing the appearance of the first transfer device of the present invention from different viewing angles. Schematic diagrams (1) to (2), and side diagrams of the first transfer device in different states. As shown in the figure, the first transfer device 1 includes a suction stage 11 and a carrying device 12. The suction stage 11 includes a stage main body 111, a first lifting unit 112 disposed on one side of the stage main body 111, and a second lifting unit 113. The first lifting unit 112 is provided with a first suction unit S1, and the second lifting unit 113 is provided with a second suction unit S2. The first lifting unit 112 and the second lifting unit 113 are arranged in a staggered arrangement, so that the first suction unit S1 and the second suction unit S2 are respectively aligned to a first position and a second position that do not overlap with each other.

The suction stage 11 has a first raised state. At this time, the second raising unit 113 is lowered and the first raising unit 112 is raised, thereby contacting the object to be measured P at the first position (as shown in "FIG. 4" (Shown), and a second raised state. At this time, the first raising unit 112 descends and the second raising unit 113 rises, so as to contact the test object P at the second position (as shown in "FIG. 5"). In the above two states, the first lifting unit 112 and the second lifting unit 113 rise alternately, so as to avoid the appearance of background objects in the image of the object P to be measured and affect subsequent detection results.

The first lifting unit 112 includes a bracket 1121 and a driving unit 1122 that drives the bracket 1121 to rise or fall. The second lifting unit 113 includes a bracket 1131 and a driving unit 1132 that drives the bracket 1131 to rise or fall. Optionally, the driving unit that drives the first lifting unit 112 and the second lifting unit 113 may be a co-construction device, so as to synchronously switch the lifting states of the first lifting unit 112 and the second lifting unit 113.

The first suction unit S1 includes a vacuum suction device S11 and a plurality of gas nozzles S12 arranged on the first lifting unit 112. The air nozzles S12 are respectively connected to the vacuum adsorption device S11 via pipeline channels. The multiple air nozzles S12 adsorb multiple positions of the test object P, which can increase the adsorption area and improve the stability during high-speed transfer to avoid film dropping. The setting of the air nozzle S12 is suitable for adsorbing materials with irregular edges and improving the flexibility of the device. The pipeline channel system may be a gas conveying pipe (not shown) provided in the vacuum adsorption device S11 and connected to the gas nozzle S12. Optionally, in order to prevent the gas nozzle S12 from hitting the test object P, a protective pad S121 is provided on the surface of the gas nozzle S12, and the protective pad S121 is provided with at least one through hole S122 at a position corresponding to the gas nozzle S12.

The second suction unit S2 includes a vacuum suction device S21 and a plurality of gas nozzles S22 arranged on the second lifting unit 113. The air nozzles S22 are respectively connected to the vacuum adsorption device S21 via pipeline channels. The air nozzles S22 absorb multiple positions of the test object P, which can increase the adsorption area and improve the stability during high-speed transfer to avoid film dropping. The setting of the air nozzle S22 is suitable for adsorbing materials with irregular edges and improving the flexibility of the device. Pipeline channel system can be It is supposed to be installed in the vacuum adsorption device S21 for connecting to the gas delivery pipe (not shown in the figure) of the gas nozzle S22. Optionally, in order to prevent the gas nozzle S22 from hitting the test object P, a protective pad S221 is provided on the surface of the gas nozzle S22, and the protective pad S221 is provided with at least one through hole S222 at a position corresponding to the gas nozzle S22.

The carrying device 12 carries the suction stage 11, and the carrying device 12 transfers the suction stage 11 in a moving section for carrying the object P to be measured for image capturing by the first image capturing device 2. The carrying device 12 has a first action state and a second action state. When the carrying device 12 is in the first operating state, the suction stage 11 is in the first uplifted state, and the object P to be measured is transported toward a forward path R1 to capture a first image of the object P through the first image capturing device 2 Image (as shown in "Figure 4"). When the carrying device 12 is in the second operating state, the suction stage 11 is in the second raised state, and the object P to be measured is transported toward a reverse path R2 to capture a second image of the object P through the first image capturing device 2 Image (as shown in "Figure 5"). In a preferred embodiment, the carrying device 12 is a linear moving platform, and the carrying device 12 includes a frame 121 and two rails 122 respectively disposed on the frame 121. The suction stage 11 is driven by a driving device 123 to move along the two rails 122.

The first image capturing device 2 is arranged on one side of the supporting device 12 of the first transfer device 1. The first image capturing device 2 photographs the object P to be measured when the suction stage 11 is in the first raised state to obtain the first Image; The first image capturing device 2 shoots the object P to obtain a second image when the suction stage 11 is in the second elevated state. In a preferred embodiment, the first image capturing device 2 can be a line scan camera or an area scan camera, which is not limited by the present invention. In a preferred embodiment, one side or peripheral side of the first image capturing device 2 is provided with an illuminating light source L that complements the light to be measured P. The illuminating light source L can be a coaxial light source or a side light source (such as " Figure 1" shows) or a ring light source, which is not limited by the present invention.

After obtaining the first image and the second image, the first image processing device 3 combines the unmasked area outside the first position in the first image with the unmasked area outside the second position in the second image to output a combined image. The merging image can be to use image fusion technology to merge the images of the same side of the object P taken by the first image capturing device 2, so as to obtain an image of the object P without a covered area, so as to facilitate the image of the object P to be measured. All positions are inspected optically. In a preferred embodiment, the first image processing device 3 can be a computer device, or any other device or device capable of image processing and analysis, which is not limited by the present invention, and is described here first.

Please refer to "Figure 6-1" to "Figure 6-4" together below, which are schematic diagrams (1) to (4) of the operation of the double-sided optical inspection equipment of the present invention, as shown in the figure:

First, as shown in "FIG. 6-1", the second lifting unit 113 of the first transfer device 1 descends and the first lifting unit 112 rises, so that the first lifting unit 112 contacts and adsorbs the first position of the test object P , The first transfer device 1 moves along the forward path R1 so that the object P to be tested passes through a shooting area Z1 of the first image capturing device 2 so as to capture a first image of a first surface of the object P to be tested.

Continuing, as shown in "FIG. 6-2", the first lifting unit 112 of the first transfer device 1 descends and the second lifting unit 113 rises, so that the second lifting unit 113 contacts and adsorbs the second position of the test object P , The first transfer device 1 moves along the reverse path R2, so that the test object P passes through the shooting area Z1 of the first image capturing device 2 again, so as to capture the second image of the first surface of the test object P. Optionally, the first transfer device 1 may first move the object P to be measured along the reverse path R2, and then perform the state switching of the first lifting unit 112 and the second lifting unit 113, and then the completion of the lifting units After switching, move the test object P again along the forward path R1 through the first image capturing device 2 for shooting, or switch the state of the second lifting unit 112 and the second lifting unit 113 first, and then follow the reverse path R2 moves the test object P through the first image capturing device 2 for shooting, or on the test object P After moving along the reverse path R2, the object P to be measured is moved along the forward path R1 to pass through the first image capturing device 2 to be photographed. The present invention does not limit this, and is described here first.

Continuing, as shown in "FIG. 6-3", the inverted second transfer device 4 contacts and adsorbs the object P lifted by the lifting platform T. The second lifting unit 413 of the second transfer device 4 descends and the first lifting unit 412 rises, so that the first lifting unit 412 absorbs the first position of the test object P, and the second transfer device 3 moves along a forward path R3 , So that the test object P passes through a shooting area Z2 of the second image capturing device 5, so as to capture a first image of a second surface of the test object P.

Finally, as shown in "FIG. 6-4", the first lifting unit 412 of the second transfer device 4 descends and the second lifting unit 413 rises, so that the second lifting unit 413 contacts and adsorbs the second position of the test object P , The second transfer device 3 moves along a reverse path R4, so that the test object P passes through the shooting area Z2 of the second image capturing device 5 again, so as to capture a second image of the second surface of the test object P. Optionally, the second transfer device 4 may first move the object P to be measured along the reverse path R4, and then perform the state switching between the first lifting unit 412 and the second lifting unit 413, and then completing the lifting units After switching, move the test object P again along the forward path R3 through the second image capturing device 5 for shooting, or switch the state of the first lifting unit 412 and the second lifting unit 413 first, and then follow the reverse path R4 moves the test object P through the second image capturing device 5 for shooting, or after the test object P moves along the reverse path R4, then moves the test object P along the forward path R3 through the second image capture device 5 for shooting, the present invention does not limit this, and it is described here first.

Please refer to "Figure 7-1" to "Figure 7-2" together below, which are schematic diagrams (1) to (2) of the optical inspection method of the present invention, as shown in the figure:

First, as shown in "Figure 7-1", the first transfer device 1 is provided to carry the object P, and the second lifting unit 113 of the first transfer device 1 is driven to descend and the first lifting unit 112 Ascend to adsorb the first position of the test object P (step S101); continue, drive the first transfer device 1 to move along the forward path R1 so that the test object P passes through the shooting zone Z1 of the first image capturing device 2, Therefore, the first image of the first surface of the object P is captured by the first image capturing device 2 (step S102); the first lifting unit 112 of the first transfer device 1 is driven to descend and the second lifting unit 113 is raised to Adsorb the second position of the test object P (step S103); continue, drive the first transfer device 1 to move along the reverse path R2 so that the test object P passes through the shooting zone Z1 of the first image capturing device 2 again, thereby The second image of the first surface of the test object P is captured by the first image capturing device 2 (step S104).

Next, as shown in "Figure 7-2", an inverted second transfer device 3 is provided, and the object P to be measured is lifted by the lifting platform T to the lower side of the suction plane of the second transfer device 4, and the second transfer device 4 is driven. The second lifting unit 413 of the second transfer device 4 descends and the first lifting unit 412 rises to adsorb the first position of the test object P (step S105); continue, drive the second transfer device 4 to move along the forward path R3 to The object P to be measured is passed through the shooting zone Z2 of the second image capturing device 5, so that the first image of the second surface of the object P to be measured is captured by the second image capturing device 5 (step S106); continue, drive the second The first lifting unit 412 of the transfer device 4 descends and the second lifting unit 413 rises to adsorb the second position of the test object P (step S107); continue, drive the second transfer device 4 to move along the reverse path R4 to make The test object P passes through the shooting area Z2 of the second image capturing device 4 again, so that the second image of the second surface F2 of the test object P is captured by the second image capturing device 5 (step S108).

Finally, the first image and the second image of the first surface of the object P obtained from the first image capturing device 2 are received and combined by the first image processing device 3, and the second image processing device 6 is received and combined The first image and the second image of the second surface of the test object P are obtained from the second image capturing device 5 (step 109), so as to obtain the combined image and the first surface of the test object P without being covered by background objects. The merged image of the second side is used for optical inspection of all positions of the test object P Measurement. Optionally, the first image processing device 3 and the second image processing device 6 may be a co-structured device, which is not limited by the present invention, and is described here first.

To sum up, the optical inspection equipment of the present invention is equipped with an upside-down transfer device, and by switching the action states of the first lifting unit and the second lifting unit of the transfer device, the lifting unit contacts the different positions of the object to be measured. Image, and through image processing to obtain an image of the object under test without background objects, so as to eliminate the undetected area of the image of the object under test. At the same time, the first lifting unit or the second lifting unit is used to adsorb multiple positions of the object to be measured, thereby increasing the adsorption area and improving the stability during high-speed transfer.

The present invention has been described in detail above, but what is described above is only a preferred embodiment of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, everything made in accordance with the scope of the patent application of the present invention is equal Changes and modifications should still fall within the scope of the patent of the present invention.

100‧‧‧Optical Inspection Equipment

A1‧‧‧The first side imaging device

A2‧‧‧Second side image capturing equipment

1‧‧‧The first transfer device

2‧‧‧The first image capture device

3‧‧‧The first image processing device

4‧‧‧Second transfer device

5‧‧‧Second image capture device

6‧‧‧Second image processing device

11‧‧‧Adsorption stage

12‧‧‧Carrier device

111‧‧‧The main body of the stage

112‧‧‧The first lifting unit

113‧‧‧Second Lifting Unit

121‧‧‧Frame

122‧‧‧Orbit

123‧‧‧Drive device

T‧‧‧Lifting platform

P‧‧‧Object to be tested

L‧‧‧Lighting source

Claims (18)

A transfer device, including: A suction stage includes a stage body, a first lifting unit and a second lifting unit arranged on one side of the stage body, the first lifting unit is provided with a first sucking unit, and the second lifting unit A second adsorption unit is provided on the unit; and A carrying device for carrying the adsorption stage, and the carrying device transfers the adsorption stage in a moving section; Wherein, the first lifting unit and the second lifting unit are arranged in a staggered arrangement, so that the first suction unit and the second suction unit are respectively aligned to a first position and a second position that do not overlap each other, the The suction stage has a first lifting state, which causes the second lifting unit to descend and the first lifting unit to rise so as to contact the object to be measured at the first position, and a second lifting state to cause the first lifting unit to descend And the second lifting unit rises so as to contact the object under test at the second position. As for the transfer device described in claim 1, wherein the first adsorption unit includes a vacuum adsorption device and a plurality of gas nozzles arranged on the first lifting unit, and the gas nozzles are respectively connected via pipeline channels To the vacuum adsorption device. For the transfer device described in item 2 of the scope of patent application, a protective pad is provided on the surface of each of the air nozzles, and at least one through hole is provided on the protective pad corresponding to the air nozzle. As for the transfer device described in claim 1, wherein the second adsorption unit includes a vacuum adsorption device and a plurality of gas nozzles arranged on the second lifting unit, and the gas nozzles are respectively connected via pipeline channels To the vacuum adsorption device. According to the transfer device described in item 4 of the scope of patent application, a protective pad is provided on the surface of each of the air nozzles, and at least one through hole is provided on the protective pad corresponding to the air nozzle. According to the transfer device described in item 1 of the scope of patent application, the first lifting unit includes a bracket and a driving unit that drives the bracket to rise or fall. According to the transfer device described in item 1 of the scope of patent application, the second lifting unit includes a bracket and a driving unit that drives the bracket to rise or fall. According to the transfer device described in item 1 of the scope of patent application, the bearing device is a linear moving stage. An optical detection equipment, including: The transfer device as described in any one of items 1 to 8 in the scope of the patent application; An image capturing device arranged on one side of the carrying device of the transfer device, the image capturing device photographing the object to be measured when the suction stage is in the first raised state to obtain a first image, the The image capturing device captures the object to be tested to obtain a second image when the adsorption stage is in the second elevated state; and An image processing device that obtains the first image and the second After the image is imaged, the unmasked area outside the first position in the first image is combined with the unmasked area outside the second position in the second image to output a combined image. According to the optical inspection device described in item 9 of the scope of patent application, the image capturing device is a line scan camera or a side scan camera. According to the optical inspection device described in item 9 of the scope of patent application, wherein the carrying device has a first action state, the suction stage is in the first raised state, and the object to be measured is transported toward a forward path through the The image capture device captures the first image of the object under test and a second action state, the suction stage is in the second action state, and the object under test is transported to a reverse path to be captured by the image capture device The second image of the test object. According to the optical inspection device described in item 9 of the scope of patent application, an illumination light source for supplementing light for the object to be measured is provided on one side or the peripheral side of the image capturing device. Such as the optical detection device described in item 12 of the scope of patent application, wherein the illumination light source is a coaxial light source, a side light source or a ring light source. An optical detection equipment, including: A first-side image capturing device, including the optical detection device as described in any one of items 9 to 11 in the scope of the patent application, for shooting an image of a first surface of the object to be tested, and a device set on the The lifting platform on the side of the transfer device is used to lift the Transfer device; and A second surface imaging device, including the optical detection device as described in any one of items 9 to 11 in the scope of the patent application, which is arranged upside down on the upper side of the lifting platform to absorb the object to be measured and used to photograph the An image of the second side of the test object. An optical detection method includes the following steps: Provide a first transfer device for carrying an object to be tested; Driving a second lifting unit of the first transfer device to descend and a first lifting unit to rise, thereby adsorbing the object to be tested at a first position; Driving the first transfer device to move along a forward path so that the object to be measured passes through a shooting area of a first image capturing device; Shooting a first image of a first surface of the object under test by the first image capturing device; Driving the first lifting unit of the first transfer device to descend and the second lifting unit to rise, thereby adsorbing the object to be tested at a second position; Driving the first transfer device to move along a reverse path so that the object to be measured passes through the shooting area of the first image capturing device again; Shooting a second image of the first surface of the object under test by the first image capturing device; and Receiving and merging the first image and the second image of the first surface of the object under test obtained from the first image capturing device through a first image processing device. For example, the optical inspection method according to claim 15, wherein, after the first image processing device obtains the first image and the second image of the first surface, The unmasked area outside the first position in the first image is combined with the unmasked area outside the second position in the second image to output a combined image. The optical inspection method as described in item 15 of the scope of patent application further includes the following steps: An inverted second transfer device is provided, and the object under test is lifted by a lifting platform to the lower side of the suction plane of the second transfer device; Driving a second lifting unit of the second transfer device to descend and a first lifting unit to rise, so as to adsorb the object to be tested at the first position; Driving the second transfer device to move along another forward path so that the object to be measured passes through a shooting area of a second image capturing device; Shooting the first image of a second surface of the object under test by the second image capturing device; Driving the first lifting unit of the second transfer device to descend and the second lifting unit to rise, so as to adsorb the object to be tested at the second position; Driving the second transfer device to move along another reverse path so that the object to be measured passes through the shooting area of the second image capturing device again; Shooting the second image of the second surface of the object under test by the second image capturing device; and The first image and the second image of the second surface of the object to be measured are received and combined by the second image processing device. For example, the optical inspection method according to item 17 of the scope of patent application, wherein the second image processing device obtains the first image and the second image of the second surface, The unmasked area outside the first position in the first image is combined with the unmasked area outside the second position in the second image to output a combined image.

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