TW202122197A

TW202122197A - Laser device for cleaning a probe card and method thereof

Info

Publication number: TW202122197A
Application number: TW108144393A
Authority: TW
Inventors: 李俊豪
Original assignee: 李俊豪
Priority date: 2019-12-04
Filing date: 2019-12-04
Publication date: 2021-06-16

Abstract

A Laser device for cleaning a probe-card and a method thereof are provided. The method includes: removably fixing the probe-card, obtaining a three-dimensional topography image of a probe-area of the probe-card, selecting a to-be-cleaned probe of the probe-area according to the three-dimensional topography image, and cleaning the to-be-cleaned probe by a clean laser.

Description

Laser device and method for cleaning probe card

本發明是有關於一種雷射控制技術，尤指一種用於清潔探針卡的雷射裝置及其方法。The present invention relates to a laser control technology, in particular to a laser device and method for cleaning probe cards.

探針卡（probe card）是應用在積體電路（IC）尚未封裝前，對裸晶以探針（probe）做功能測試，藉以篩選掉不良品，再進行之後的封裝工程。然而，探針卡在大量使用次數之後，在探針接觸部位會積累髒污，導致接觸不良的現象。The probe card is used to test the function of the bare die with the probe before the integrated circuit (IC) is packaged, so as to screen out the defective products, and then carry out the subsequent packaging project. However, after a large number of uses of the probe card, dirt will accumulate in the contact part of the probe, resulting in poor contact.

有鑑於此，本發明實施例提出一種用於清潔探針卡的雷射裝置及其方法，能夠確實檢測探針的髒污積累情形，對需要清潔的探針精準、有效率的執行清潔。In view of this, the embodiments of the present invention provide a laser device and a method for cleaning a probe card, which can reliably detect the dirt accumulation of the probe, and perform accurate and efficient cleaning of the probe that needs to be cleaned.

用於清潔探針卡的雷射裝置，包括治具、運動平台、清潔雷射頭、自動光學檢測鏡頭及控制台。治具供可移除的固持一探針卡。清潔雷射頭與自動光學檢測鏡頭設置於運動平台上。自動光學檢測鏡頭用於取得探針卡的一探針區的三維表面形貌影像。控制台電連接運動平台、清潔雷射頭及自動光學檢測鏡頭，以根據三維表面形貌影像選定待清潔探針，並控制清潔雷射頭對於待清潔探針輸出一清潔雷射光。The laser device used to clean the probe card, including jigs, moving platforms, cleaning laser heads, automatic optical inspection lenses and consoles. The fixture is for removable holding a probe card. The cleaning laser head and the automatic optical inspection lens are set on the moving platform. The automatic optical inspection lens is used to obtain a three-dimensional surface topography image of a probe area of the probe card. The console is electrically connected to the motion platform, the cleaning laser head and the automatic optical inspection lens to select the probe to be cleaned according to the three-dimensional surface topography image, and control the cleaning laser head to output a clean laser light to the probe to be cleaned.

利用雷射清潔探針卡的方法，包括：可移除的固持一探針卡；取得探針卡的一探針區的三維表面形貌影像；根據三維表面形貌影像選定探針區中的一待清潔探針；以及對探針卡上的待清潔探針輸出一清潔雷射光。The method of using a laser to clean a probe card includes: removably holding a probe card; obtaining a three-dimensional surface topography image of a probe area of the probe card; selecting the probe area according to the three-dimensional surface topography image A probe to be cleaned; and output a cleaning laser light to the probe to be cleaned on the probe card.

綜上所述，根據本發明的實施例，可精準量測探針的位置及高度，並可確實判斷探針是否需要清潔，而可精確的將探針的髒污去除，同時避免傷害探針與探針卡座體。In summary, according to the embodiments of the present invention, the position and height of the probe can be accurately measured, and it can be determined whether the probe needs to be cleaned, and the dirt of the probe can be accurately removed while avoiding damage to the probe. And the probe card holder body.

參照圖1A及圖1B，圖1A為本發明一實施例之探針卡100之俯視圖，圖1B為圖1A中區域1B的放大圖。探針卡100具有供積體電路電性連接的探針區110，探針區110包括複數探針111。在此，為了清楚呈現圖式，刻意將探針111放大，而未依比例關係繪製。1A and 1B, FIG. 1A is a top view of a probe card 100 according to an embodiment of the present invention, and FIG. 1B is an enlarged view of area 1B in FIG. 1A. The probe card 100 has a probe area 110 for electrical connection of an integrated circuit, and the probe area 110 includes a plurality of probes 111. Here, in order to clearly present the drawing, the probe 111 is deliberately enlarged, rather than drawn to scale.

分別參照圖2及圖3，圖2為本發明一實施例之用於清潔探針卡100的雷射裝置之立體圖，圖3為本發明一實施例之用於清潔探針卡100的雷射裝置之側視圖。雷射裝置包括治具210、運動平台220、清潔雷射頭230、自動光學檢測（Automated Optical Inspection）鏡頭240、及控制台250。控制台250電連接運動平台220、清潔雷射頭230及自動光學檢測鏡頭240，以對此些裝置進行控制。2 and 3 respectively, FIG. 2 is a perspective view of a laser device for cleaning the probe card 100 according to an embodiment of the present invention, and FIG. 3 is a laser device for cleaning the probe card 100 according to an embodiment of the present invention Side view of the device. The laser device includes a jig 210, a moving platform 220, a cleaning laser head 230, an Automated Optical Inspection lens 240, and a console 250. The console 250 is electrically connected to the moving platform 220, the cleaning laser head 230, and the automatic optical inspection lens 240 to control these devices.

治具210供可移除的固持探針卡100。在一些實施例中，雷射裝置還包括具有窗口212的防護殼體211，與治具210相連接。窗口212位於靠近清潔雷射頭230的一側，以於探針卡100裝載於治具210時可通過窗口212露出探針111，其餘被防護殼體211遮蔽的區域可受防護殼體211保護以避免受到雷射破壞。也就是說，雷射光可通過窗口212並受防護殼體211的阻隔。治具210可透過夾持、吸附、鎖固等方式可移除的固定探針卡100。The jig 210 is used to removably hold the probe card 100. In some embodiments, the laser device further includes a protective housing 211 with a window 212 connected to the fixture 210. The window 212 is located on the side close to the cleaning laser head 230, so that when the probe card 100 is loaded on the fixture 210, the probe 111 can be exposed through the window 212, and the remaining area covered by the protective housing 211 can be protected by the protective housing 211 To avoid damage by laser. In other words, the laser light can pass through the window 212 and be blocked by the protective housing 211. The jig 210 can be used to fix the probe card 100 detachably by clamping, adsorbing, locking, or the like.

如圖4所示，係為本發明另一實施例之治具210連接探針卡100之示意圖。在此，為了清楚呈現圖式，刻意將探針111放大，而未依比例關係繪製。在一些實施例中，治具210還經由轉接座300連接至探針卡100，也就是說，轉接座300可與探針卡100匹配結合，以經由轉接座300固定探針卡100於治具210上。探針卡100上具有一個或多個定位孔120，適配於轉接座300上，例如透過緊配、拴鎖等方式。在此，定位孔120可以是通孔或盲孔。轉接座300包括固定部320，如凸部、定位柱等方式，以與治具210連接。也就是說，探針卡100可與轉接座300相結合，治具210與轉接座300連接。如此，可使得治具210可適用於不同形狀、尺寸的探針卡100。As shown in FIG. 4, it is a schematic diagram of a fixture 210 connected to a probe card 100 according to another embodiment of the present invention. Here, in order to clearly present the drawing, the probe 111 is deliberately enlarged, rather than drawn to scale. In some embodiments, the fixture 210 is also connected to the probe card 100 via the adapter 300, that is, the adapter 300 can be matched and combined with the probe card 100 to fix the probe card 100 via the adapter 300 On the fixture 210. The probe card 100 has one or more positioning holes 120, which are adapted to the adapter 300, for example, by means of tight fitting, latching and the like. Here, the positioning hole 120 may be a through hole or a blind hole. The adapter 300 includes a fixing portion 320, such as a convex portion, a positioning post, etc., to connect with the jig 210. In other words, the probe card 100 can be combined with the adapter 300, and the jig 210 is connected with the adapter 300. In this way, the jig 210 can be applied to probe cards 100 of different shapes and sizes.

運動平台220為三維運動平台，具有三軸移動方向，可相對於治具210沿三維方向移動。清潔雷射頭230和自動光學檢測鏡頭240均設置於運動平台220上，使得清潔雷射頭230和自動光學檢測鏡頭240可因運動平台220而移動，據以改變作用位置。例如，沿平行於探針卡100表面的方向二維移動，或者沿垂直於探針卡100表面（即沿探針111長軸方向）一維移動。在此，治具210是位於運動平台220上方，使得清潔產生的粉塵、灰塵等受重力落下而不會殘留在探針111上。The motion platform 220 is a three-dimensional motion platform, which has a three-axis movement direction and can move in a three-dimensional direction relative to the jig 210. The cleaning laser head 230 and the automatic optical detection lens 240 are both arranged on the moving platform 220, so that the cleaning laser head 230 and the automatic optical detection lens 240 can be moved by the moving platform 220 to change the position of action accordingly. For example, two-dimensional movement in a direction parallel to the surface of the probe card 100, or one-dimensional movement in a direction perpendicular to the surface of the probe card 100 (that is, along the long axis direction of the probe 111). Here, the jig 210 is located above the moving platform 220, so that the dust, dust, etc. generated during cleaning will fall by gravity without remaining on the probe 111.

清潔雷射頭230可輸出雷射光（後稱「清潔雷射光」）。清潔雷射光經控制其能量、頻率、聚焦範圍等參數而能去除探針卡100上的待清潔探針上的髒污，同時避免傷害待清潔探針或探針卡100。The cleaning laser head 230 can output laser light (hereinafter referred to as "cleaning laser light"). The cleaning laser can remove dirt on the probe to be cleaned on the probe card 100 by controlling its energy, frequency, focus range and other parameters, and at the same time avoid damaging the probe to be cleaned or the probe card 100.

自動光學檢測鏡頭240可取得探針區110的三維表面形貌影像。控制台250能根據三維表面形貌影像選定探針區110上的待清潔探針。控制台250執行有自動光學檢測系統之軟體，能高速對三維表面形貌影像進行影像處理分析，依據影像上探針111的形貌與正常的探針111的形貌進行比較。若有嚴重髒污，則探針111上會有明顯的髒污凸出形體。藉此，可判定探針111上是否有髒污或髒污程度是否需要進行清潔。若需要清潔，則將該探針111判定為待清潔探針。在選定待清潔探針之後，控制台250可驅動運動平台220移動，使得清潔雷射頭230能對位該待清潔探針，以執行雷射清潔動作。The automatic optical inspection lens 240 can obtain the three-dimensional surface topography image of the probe area 110. The console 250 can select the probe to be cleaned on the probe area 110 according to the three-dimensional surface topography image. The console 250 executes software with an automatic optical inspection system, which can perform image processing and analysis on the three-dimensional surface topography image at a high speed, and compare the topography of the probe 111 with the normal topography of the probe 111 on the image. If there is serious dirt, there will be obvious dirt protrusions on the probe 111. In this way, it can be determined whether there is dirt on the probe 111 or whether the degree of dirt needs to be cleaned. If cleaning is required, the probe 111 is determined as a probe to be cleaned. After the probe to be cleaned is selected, the console 250 can drive the moving platform 220 to move, so that the cleaning laser head 230 can align the probe to be cleaned to perform the laser cleaning action.

在一些實施例中，控制台250能根據待清潔探針的三維表面形貌影像來識別待清潔探針上的髒污位置，以控制清潔雷射頭230針對髒污位置執行雷射清潔動作。也就是說，能精準的依據髒污位置，決定對待清潔探針施以清潔雷射光的位置及次數。例如，若面對待清潔探針的針端右上側及左下侧均具有需要清潔的髒污時，則可控制清潔雷射頭230針對該兩位置分別施以清潔雷射光。In some embodiments, the console 250 can identify the dirty position on the probe to be cleaned according to the three-dimensional surface topography image of the probe to be cleaned, so as to control the cleaning laser head 230 to perform laser cleaning actions on the dirty position. In other words, the position and frequency of applying cleaning laser light to the probe to be cleaned can be determined accurately based on the dirty position. For example, if both the upper right side and the lower left side of the needle end of the probe to be cleaned have dirt that needs to be cleaned, the cleaning laser head 230 can be controlled to apply cleaning laser light to the two positions respectively.

在一些實施例中，控制台250可將探針卡100劃分多個區域，對於其中一個區域內的探針111都檢測過髒污後，標記此區域內的所有待清潔探針之後，再根據所標記的待清潔探針的位置驅動運動平台220移動而依次清潔此區域內的待清潔探針。完成清潔後，再對下一個區域檢測、清潔髒污。In some embodiments, the console 250 can divide the probe card 100 into multiple areas. After the probes 111 in one area have been tested for contamination, all the probes to be cleaned in this area are marked, and then according to The marked positions of the probes to be cleaned drive the moving platform 220 to move to sequentially clean the probes to be cleaned in this area. After the cleaning is completed, the next area will be inspected and cleaned.

在一些實施例中，控制台250能根據三維表面形貌影像識別待清潔探針的高度，以控制運動平台220沿待清潔探針的長軸移動清潔雷射頭230，使清潔雷射頭230聚焦於待清潔探針的針端，避免清潔雷射光傷害到探針卡100。在一些實施例中，控制台250不是控制運動平台220移動，而是依據待清潔探針的高度，控制清潔雷射頭230的聚焦範圍，使得清潔雷射頭230聚焦於待清潔探針的針端。In some embodiments, the console 250 can recognize the height of the probe to be cleaned according to the three-dimensional surface topography image, so as to control the moving platform 220 to move the cleaning laser head 230 along the long axis of the probe to be cleaned, so that the cleaning laser head 230 can be cleaned. Focus on the needle end of the probe to be cleaned to avoid damage to the probe card 100 by the cleaning laser light. In some embodiments, the console 250 does not control the movement of the moving platform 220, but controls the focus range of the cleaning laser head 230 according to the height of the probe to be cleaned, so that the cleaning laser head 230 focuses on the needle of the probe to be cleaned. end.

在一些實施例中，雷射裝置還包括電連接控制台250的加熱雷射頭260。加熱雷射頭260用於對探針卡100的探針區110加熱，以幫助髒污中的物質產生共晶、共熔，使其容易被清潔雷射光去除。In some embodiments, the laser device further includes a heated laser head 260 electrically connected to the console 250. The heating laser head 260 is used to heat the probe area 110 of the probe card 100 to help the substances in the dirt produce eutectic and eutectic so that they can be easily removed by the cleaning laser light.

在一些實施例中，可僅對探針區110的特定區域加熱，例如僅對於待清潔探針進行加熱。In some embodiments, only a specific area of the probe area 110 may be heated, for example, only the probe to be cleaned.

在一些實施例中，雷射裝置還包括電連接控制台250的熱像儀270。熱像儀270用以於加熱雷射頭260對於探針區110加熱的過程中，拍攝探針區110之熱影像。控制台250根據熱影像識別探針區110表面的溫度，以確認加熱的程度。藉此，可在加熱達到所需溫度時，停止或減弱加熱雷射頭260的輸出，以避免加熱溫度過高而傷害到探針卡100。In some embodiments, the laser device further includes a thermal imager 270 electrically connected to the console 250. The thermal imager 270 is used to capture a thermal image of the probe area 110 when the heating laser head 260 heats the probe area 110. The console 250 recognizes the temperature of the surface of the probe area 110 according to the thermal image to confirm the degree of heating. In this way, when the heating reaches the required temperature, the output of the heating laser head 260 can be stopped or reduced, so as to prevent the probe card 100 from being damaged by the heating temperature being too high.

在一些實施例中，控制台250載入有對應探針區110的探針分布圖，例如以AutoCAD電腦軟體繪製的電路佈局圖檔。藉此，控制台250可以根據探針分布圖得知探針區110內的每個探針111的位置，而可驅動運動平台220運動，使得自動光學檢測鏡頭240或/及清潔雷射頭230與探針卡100上的探針對位。In some embodiments, the console 250 loads a probe distribution map corresponding to the probe area 110, such as a circuit layout drawing file drawn by AutoCAD computer software. Thereby, the console 250 can know the position of each probe 111 in the probe area 110 according to the probe distribution map, and can drive the moving platform 220 to move, so that the automatic optical inspection lens 240 or/and the cleaning laser head 230 can be driven. Align with the probe on the probe card 100.

參照圖5，係為本發明另一實施例之用於清潔探針卡100的雷射裝置之側視圖。與前述實施例的差異在於，雷射裝置的罩覆治具210（即包容探針卡100）的腔室280可充入幫助共晶或抑制氧化的氣體。5, which is a side view of a laser device for cleaning the probe card 100 according to another embodiment of the present invention. The difference from the foregoing embodiment is that the cavity 280 of the covering jig 210 of the laser device (that is, containing the probe card 100) can be filled with gas that helps eutectic or inhibits oxidation.

在一些實施例中，雷射裝置還包括吸塵裝置290，以於清潔雷射光清潔髒污時同時吸取產生的粉屑、灰塵、或煙霧。In some embodiments, the laser device further includes a dust collection device 290, so as to simultaneously absorb dust, dust, or smoke generated when the laser light is used to clean dirt.

參照圖6，係為本發明一實施例之利用雷射清潔探針卡100的方法流程圖。首先，利用治具210，可移除的固持探針卡100（步驟S601）。接著，利用自動光學檢測鏡頭240對探針卡100的探針區110進行三維掃描，以取得三維表面形貌影像（步驟S603）。根據三維表面形貌影像，可獲得探針區110中的探針111的位置及高度，以利後續清潔雷射光能精準打在目標位置上（步驟S605）。根據三維表面形貌影像，可檢測各個探針111的髒污程度，以選定待清潔探針（步驟S607）。於是，可利用清潔雷射頭230對探針卡100上的待清潔探針輸出清潔雷射光，以清潔待清潔探針的髒污（步驟S609）。Referring to FIG. 6, it is a flowchart of a method for cleaning the probe card 100 by using a laser according to an embodiment of the present invention. First, using the jig 210, the probe card 100 is removably held (step S601). Next, the automatic optical inspection lens 240 is used to perform three-dimensional scanning on the probe area 110 of the probe card 100 to obtain a three-dimensional surface topography image (step S603). According to the three-dimensional surface topography image, the position and height of the probe 111 in the probe area 110 can be obtained, so that the subsequent cleaning laser light can accurately hit the target position (step S605). According to the three-dimensional surface topography image, the dirtiness of each probe 111 can be detected to select the probe to be cleaned (step S607). Therefore, the cleaning laser head 230 can be used to output cleaning laser light to the probe to be cleaned on the probe card 100 to clean the dirt of the probe to be cleaned (step S609).

參照圖7，係為本發明另一實施例之利用雷射清潔探針卡100的方法流程圖。在一些實施例中，在步驟S609之前，還可利用加熱雷射光對待清潔探針加熱，以幫助後續清潔髒污（步驟S608）。Referring to FIG. 7, it is a flowchart of a method for cleaning the probe card 100 by using a laser according to another embodiment of the present invention. In some embodiments, before step S609, heating laser light can also be used to heat the probe to be cleaned to help subsequent cleaning of dirt (step S608).

在一些實施例中，在步驟S608中，還包括於加熱過程中拍攝探針區110之熱影像，以確認加熱的溫度是否滿足需求。In some embodiments, in step S608, it further includes taking a thermal image of the probe area 110 during the heating process to confirm whether the heating temperature meets the demand.

在一些實施例中，在步驟S609之後，可再次利用自動光學檢測鏡頭240取得三維表面形貌影像，以供控制台250判定該待清潔探針是否完成清潔（步驟S610）。若該待清潔探針已完成清潔，則判斷是否還有其他待清潔探針（步驟S611）。若是，則移動到下一個待清潔探針（步驟S612），並接續步驟S609，繼續對所述下一個待清潔探針清潔；若否，則可卸下探針卡100（步驟S613），而結束流程。在步驟S610中，若判斷該待清潔探針還沒完成清潔（即需要再次清潔髒污），則回到步驟S609繼續清潔。In some embodiments, after step S609, the automatic optical inspection lens 240 can be used again to obtain a three-dimensional surface topography image for the console 250 to determine whether the probe to be cleaned has been cleaned (step S610). If the probe to be cleaned has been cleaned, it is determined whether there are other probes to be cleaned (step S611). If yes, move to the next probe to be cleaned (step S612), and continue with step S609 to continue cleaning the next probe to be cleaned; if not, you can remove the probe card 100 (step S613), and End the process. In step S610, if it is determined that the probe to be cleaned has not been cleaned (that is, it needs to be cleaned again), return to step S609 to continue cleaning.

綜上所述，根據本發明的實施例所提出的用於清潔探針卡的雷射裝置及利用雷射清潔探針卡的方法，可精準量測探針的位置及高度，並可確實判斷探針是否需要清潔，而可精確的將探針的髒污去除，同時避免傷害探針與探針卡座體。In summary, the laser device for cleaning the probe card and the method for cleaning the probe card by using the laser provided by the embodiments of the present invention can accurately measure the position and height of the probe, and can determine the position and height of the probe accurately. Whether the probe needs to be cleaned, it can accurately remove the dirt of the probe while avoiding damage to the probe and the probe holder body.

100:探針卡 110:探針區 111:探針 120:定位孔 210:治具 211:防護殼體 212:窗口 220:運動平台 230:清潔雷射頭 240:自動光學檢測鏡頭 250:控制台 260:加熱雷射頭 270:熱像儀 280:腔室 290:吸塵裝置 300:轉接座 320:固定部 1B:區域 S601~S613:步驟100: Probe card 110: Probe area 111: Probe 120: positioning hole 210: Fixture 211: Protective shell 212: Window 220: sports platform 230: Clean the laser head 240: Automatic optical inspection lens 250: console 260: Heated laser head 270: Thermal imager 280: Chamber 290: Vacuum Cleaner 300: Adapter 320: fixed part 1B: Area S601~S613: steps

[圖1A]為本發明一實施例之探針卡之俯視圖。 [圖1B]為圖1A中區域1B的放大圖。 [圖2]為本發明一實施例之用於清潔探針卡的雷射裝置之立體圖。 [圖3]為本發明一實施例之用於清潔探針卡的雷射裝置之側視圖。 [圖4]為本發明另一實施例之治具連接探針卡之示意圖。 [圖5]為本發明另一實施例之用於清潔探針卡的雷射裝置之側視圖。 [圖6]為本發明一實施例之利用雷射清潔探針卡的方法流程圖。 [圖7]為本發明另一實施例之利用雷射清潔探針卡的方法流程圖。[Figure 1A] is a top view of a probe card according to an embodiment of the present invention. [Fig. 1B] is an enlarged view of area 1B in Fig. 1A. [Figure 2] is a perspective view of a laser device for cleaning a probe card according to an embodiment of the present invention. [Figure 3] is a side view of a laser device for cleaning probe cards according to an embodiment of the present invention. [Figure 4] is a schematic diagram of a fixture connected to a probe card according to another embodiment of the present invention. [Figure 5] is a side view of a laser device for cleaning probe cards according to another embodiment of the present invention. [Fig. 6] is a flowchart of a method for cleaning a probe card by using a laser according to an embodiment of the present invention. [Fig. 7] is a flowchart of a method for cleaning a probe card by using a laser according to another embodiment of the present invention.

100:探針卡100: Probe card

210:治具210: Fixture

211:防護殼體211: Protective shell

212:窗口212: Window

220:運動平台220: sports platform

230:清潔雷射頭230: Clean the laser head

240:自動光學檢測鏡頭240: Automatic optical inspection lens

250:控制台250: console

260:加熱雷射頭260: Heated laser head

270:熱像儀270: Thermal imager

280:腔室280: Chamber

Claims

A laser device for cleaning probe cards, including: A fixture for removable holding a probe card; A sports platform; A cleaning laser head, which is set on the moving platform, and outputs a cleaning laser light to a probe to be cleaned in a probe area of the probe card; An automatic optical inspection lens is set on the moving platform and obtains a three-dimensional surface topography image of the probe area; and A console is electrically connected to the movement platform, the cleaning laser head and the automatic optical inspection lens to select the probe to be cleaned according to the three-dimensional surface topography image.

The laser device used to clean the probe card as described in claim 1, further including: A heating laser head is electrically connected to the console and configured to heat the probe area.

The laser device used to clean the probe card as described in claim 2 further includes: A thermal imager, electrically connected to the console, is configured to take a thermal image of the probe area during the heating process.

The laser device for cleaning a probe card according to claim 1, wherein the console also recognizes the height of the probe to be cleaned according to the three-dimensional surface topography image, so as to control the moving platform along the probe to be cleaned The long axis of φ moves the cleaning laser head to make the cleaning laser head focus on the needle end of the probe to be cleaned.

The laser device for cleaning a probe card according to claim 1, wherein the console decides to apply the probe to the probe to be cleaned according to the three-dimensional topography of the probe to be cleaned in the three-dimensional surface topography image The position and frequency of the cleaning laser light.

The laser device for cleaning a probe card as described in claim 1, wherein the console is loaded with a probe distribution map corresponding to the probe area, so as to drive the motion platform to move the automatic according to the probe distribution map. The optical detection lens or the cleaning laser light is aligned with a probe on the probe card.

The laser device for cleaning a probe card as described in claim 1, further comprising: a protective housing having a window so that the cleaning laser light can pass through the window and be protected by the protective housing Obstruct.

The laser device for cleaning the probe card as described in claim 1, further comprising: a chamber covering the fixture for filling with a gas that helps eutectic or inhibits oxidation.

The laser device for cleaning the probe card as described in claim 1 further includes: a dust suction device for simultaneously sucking dust, dust, or smoke generated when the cleaning laser light cleans dirt.

The laser device for cleaning a probe card as described in claim 1, further comprising: an adaptor, which is matched and combined with the probe card to fix the probe card on the fixture via the adaptor .

A method for cleaning the probe card using a laser, including: Removably hold a probe card; Acquiring a three-dimensional surface topography image of a probe area of the probe card; Selecting a probe to be cleaned in the probe area according to the three-dimensional surface topography image; and A cleaning laser light is output to the probe to be cleaned on the probe card.

The method for cleaning the probe card by using a laser as described in claim 11 further includes heating the probe area.

The method for cleaning the probe card using a laser as described in claim 12 further includes: taking a thermal image of the probe area during the heating process.

The method for cleaning a probe card using a laser as described in claim 11, further comprising: identifying the height of the probe to be cleaned according to the three-dimensional surface topography image, so as to move the cleaning mine along the long axis of the probe to be cleaned The shooting head makes the cleaning laser head focus on the needle end of the probe to be cleaned.

The method for cleaning a probe card using a laser according to claim 11, wherein the step of outputting a cleaning laser light to the probe to be cleaned on the probe card is based on the comparison of the three-dimensional surface topography image The three-dimensional topography of the probe to be cleaned should determine the position and frequency of applying the cleaning laser light to the probe to be cleaned.

The method for cleaning a probe card by using a laser as described in claim 11, wherein the console is loaded with a probe distribution map corresponding to the probe card, and the moving platform is driven to move the automatic optics according to the probe distribution map. The detection lens or the cleaning laser light is aligned with a probe on the probe card.