TWM590499U - Laser device for cleaning probe card - Google Patents

Abstract

A laser device for cleaning a probe card includes a jig, a sports platform, a cleaning laser head, an automatic optical detection lens and a console. The fixture provides a probe card that can be held in a removable manner. The cleaning laser head and automatic optical detection lens are set on the motion platform. The automatic optical inspection lens is used to obtain a three-dimensional surface topography image of a probe area of the probe card. The console is electrically connected to the motion platform, the cleaning laser head and the automatic optical detection lens to select the probe to be cleaned according to the three-dimensional surface topography image, and controls the cleaning laser head to output a clean laser light to the probe to be cleaned.

Description

Laser device for cleaning probe card

The present invention relates to a laser control technology, especially a laser device for cleaning probe cards.

The probe card is used before the integrated circuit (IC) has been packaged. The probe is used to test the function of the probe, so as to filter out the defective products and then carry out the subsequent packaging project. However, after a large number of probe cards are used, dirt will accumulate in the probe contact area, resulting in poor contact.

In view of this, the embodiment of the present invention provides a laser device for cleaning a probe card, which can accurately detect the accumulation of dirt on the probe and accurately and efficiently perform cleaning on the probe that needs to be cleaned.

Laser device for cleaning probe card, including jig, motion platform, cleaning laser head, automatic optical detection lens and console. The fixture provides a probe card that can be held in a removable manner. The cleaning laser head and automatic optical detection lens are set on the motion platform. The automatic optical inspection lens is used to obtain a three-dimensional surface topography image of a probe area of the probe card. The console is electrically connected to the motion platform, the cleaning laser head and the automatic optical detection lens to select the probe to be cleaned according to the three-dimensional surface topography image, and controls the cleaning laser head to output a clean laser light to the probe to be cleaned.

In summary, according to the embodiment of the present invention, the position and height of the probe can be accurately measured, and whether the probe needs to be cleaned can be accurately determined, and the dirt of the probe can be accurately removed while avoiding damage to the probe With probe card body.

1A and 1B, FIG. 1A is a top view of a probe card 100 according to an embodiment of the present invention, and FIG. 1B is an enlarged view of a region 1B in FIG. 1A. The probe card 100 has a probe area 110 for electrically connecting the integrated circuit. The probe area 110 includes a plurality of probes 111. Here, in order to clearly show the pattern, the probe 111 is deliberately enlarged, but not drawn in proportion.

2 and 3, respectively, FIG. 2 is a perspective view of a laser device for cleaning the probe card 100 according to an embodiment of the new type, and FIG. 3 is a laser for cleaning the probe card 100 according to an embodiment of the new type. Side view of the device. The laser device includes a jig 210, a motion platform 220, a cleaning laser head 230, an automated optical inspection (Automated Optical Inspection) lens 240, and a console 250. The console 250 is electrically connected to the motion platform 220, the cleaning laser head 230 and the automatic optical detection lens 240 to control these devices.

The jig 210 provides a removable holding probe card 100. In some embodiments, the laser device further includes a protective housing 211 having a window 212, which is connected to the jig 210. The window 212 is located on the side close to the cleaning laser head 230 so that the probe 111 can be exposed through the window 212 when the probe card 100 is loaded on the jig 210, and the remaining area covered by the protective housing 211 can be protected by the protective housing 211 To avoid damage by laser. In other words, the laser light can pass through the window 212 and be blocked by the protective housing 211. The jig 210 can be fixed to the probe card 100 by means of clamping, adsorption, and locking.

As shown in FIG. 4, it is a schematic diagram of a fixture 210 connected to a probe card 100 according to another embodiment of the present invention. Here, in order to clearly show the pattern, the probe 111 is deliberately enlarged, but not drawn in proportion. In some embodiments, the jig 210 is also connected to the probe card 100 via the adapter 300, that is, the adapter 300 can be matched with the probe card 100 to fix the probe card 100 via the adapter 300 On the fixture 210. The probe card 100 has one or more positioning holes 120, which are adapted to the adaptor 300, for example, by means of tight fitting and latching. Here, the positioning hole 120 may be a through hole or a blind hole. The adapter 300 includes a fixing portion 320, such as a convex portion, a positioning post, etc., to connect with the jig 210. In other words, the probe card 100 can be combined with the adapter 300, and the jig 210 can be connected to the adapter 300. In this way, the jig 210 can be applied to the probe cards 100 of different shapes and sizes.

The motion platform 220 is a three-dimensional motion platform, which has a three-axis moving direction, and can move relative to the jig 210 in a three-dimensional direction. The cleaning laser head 230 and the automatic optical detection lens 240 are both disposed on the motion platform 220, so that the cleaning laser head 230 and the automatic optical detection lens 240 can move due to the motion platform 220, and the action position is changed accordingly. For example, two-dimensional movement in a direction parallel to the surface of the probe card 100, or one-dimensional movement in a direction perpendicular to the surface of the probe card 100 (ie, along the long axis direction of the probe 111). Here, the jig 210 is located above the moving platform 220, so that dust, dust, etc. generated by cleaning fall under gravity without remaining on the probe 111.

The cleaning laser head 230 can output laser light (hereinafter referred to as "cleaning laser light"). The cleaning laser light can remove the dirt on the probe to be cleaned on the probe card 100 by controlling its energy, frequency, focusing range and other parameters, while avoiding harm to the probe to be cleaned or the probe card 100.

The automatic optical inspection lens 240 can obtain the three-dimensional surface topography image of the probe area 110. The console 250 can select the probe to be cleaned on the probe area 110 according to the three-dimensional surface topography image. The control panel 250 executes software with an automatic optical inspection system, and can perform image processing and analysis on the three-dimensional surface topography image at high speed, and compares the shape of the probe 111 on the image with the normal shape of the probe 111. If there is serious dirt, there will be obvious dirt protruding on the probe 111. In this way, it can be determined whether the probe 111 is dirty or the degree of dirt needs to be cleaned. If cleaning is required, the probe 111 is determined to be a probe to be cleaned. After the probe to be cleaned is selected, the console 250 can drive the moving platform 220 to move, so that the cleaning laser head 230 can position the probe to be cleaned to perform the laser cleaning action.

In some embodiments, the console 250 can identify the dirty position on the probe to be cleaned according to the three-dimensional surface topography image of the probe to be cleaned, so as to control the cleaning laser head 230 to perform a laser cleaning action on the dirty position. In other words, it can accurately determine the position and frequency of laser light to be cleaned on the basis of the dirty position. For example, if both the upper right side and the lower left side of the needle end of the probe to be cleaned have dirt that needs to be cleaned, the cleaning laser head 230 can be controlled to apply cleaning laser light to the two positions respectively.

In some embodiments, the console 250 may divide the probe card 100 into multiple areas. After the probe 111 in one area has been detected as dirty, mark all the probes to be cleaned in this area, and then The marked position of the probe to be cleaned drives the moving platform 220 to move to clean the probes to be cleaned in this area in sequence. After the cleaning is completed, check and clean the next area.

In some embodiments, the console 250 can recognize the height of the probe to be cleaned according to the three-dimensional surface topography image, to control the movement platform 220 to move the cleaning laser head 230 along the long axis of the probe to be cleaned, so that the cleaning laser head 230 Focus on the needle end of the probe to be cleaned to prevent the probe card 100 from being damaged by the cleaning laser light. In some embodiments, the console 250 does not control the movement of the moving platform 220, but controls the focusing range of the cleaning laser head 230 according to the height of the probe to be cleaned, so that the cleaning laser head 230 focuses on the needle of the probe to be cleaned end.

In some embodiments, the laser device further includes a heated laser head 260 electrically connected to the console 250. The heating laser head 260 is used to heat the probe area 110 of the probe card 100 to help the eutectic and eutectic substances in the dirt to be easily removed by the cleaning laser.

In some embodiments, only a specific area of the probe area 110 may be heated, for example, only the probe to be cleaned.

In some embodiments, the laser device further includes a thermal imager 270 electrically connected to the console 250. The thermal imager 270 is used to take a thermal image of the probe area 110 during the heating process of the laser head 260 to the probe area 110. The console 250 recognizes the temperature of the surface of the probe area 110 according to the thermal image to confirm the degree of heating. In this way, when the heating reaches the desired temperature, the output of the heating laser head 260 can be stopped or weakened to prevent the heating temperature from being too high and damaging the probe card 100.

In some embodiments, the control panel 250 is loaded with a probe map corresponding to the probe area 110, such as a circuit layout drawing file drawn by AutoCAD computer software. In this way, the console 250 can know the position of each probe 111 in the probe area 110 according to the probe map, and can drive the movement platform 220 to move, so that the automatic optical detection lens 240 or/and the cleaning laser head 230 Align with the probe on the probe card 100.

5 is a side view of a laser device for cleaning the probe card 100 according to another embodiment of the present invention. The difference from the previous embodiment is that the cavity 280 of the cover fixture 210 (ie, the probe card 100) of the laser device can be filled with a gas that helps eutectic or inhibits oxidation.

In some embodiments, the laser device further includes a dust suction device 290 to absorb dust, dust, or smoke generated when the laser light is used to clean dirt.

Referring to FIG. 6, it is a flowchart of a method for cleaning the probe card 100 using laser according to an embodiment of the present invention. First, using the jig 210, the probe card 100 is held to be removable (step S601). Next, the automatic optical inspection lens 240 is used to three-dimensionally scan the probe area 110 of the probe card 100 to obtain a three-dimensional surface topography image (step S603). According to the three-dimensional surface topography image, the position and height of the probe 111 in the probe area 110 can be obtained, so that subsequent cleaning laser light can accurately hit the target position (step S605). According to the three-dimensional surface topography image, the degree of contamination of each probe 111 can be detected to select the probe to be cleaned (step S607). Therefore, the cleaning laser head 230 can output cleaning laser light to the probe to be cleaned on the probe card 100 to clean the probe to be cleaned (step S609).

Referring to FIG. 7, it is a flowchart of a method for cleaning the probe card 100 using laser according to another embodiment of the present invention. In some embodiments, prior to step S609, the probe to be cleaned may also be heated with heating laser light to help subsequent cleaning of dirt (step S608).

In some embodiments, in step S608, it also includes taking a thermal image of the probe area 110 during the heating process to confirm whether the heating temperature meets the demand.

In some embodiments, after step S609, the automatic optical inspection lens 240 may be used again to obtain a three-dimensional surface topography image for the console 250 to determine whether the probe to be cleaned has been cleaned (step S610). If the probe to be cleaned has been cleaned, it is determined whether there are other probes to be cleaned (step S611). If yes, move to the next probe to be cleaned (step S612), and continue to step S609 to continue cleaning the next probe to be cleaned; if not, the probe card 100 can be removed (step S613), and End the process. In step S610, if it is determined that the probe to be cleaned has not been cleaned (that is, dirt needs to be cleaned again), then return to step S609 to continue cleaning.

In summary, according to the laser device for cleaning the probe card and the method for cleaning the probe card provided by the embodiments of the present invention, the position and height of the probe can be accurately measured and the judgment can be made accurately Whether the probe needs to be cleaned, and the dirt of the probe can be accurately removed, and at the same time, the probe and the probe holder body are not damaged.

100‧‧‧Probe card 110‧‧‧Probe area 111‧‧‧Probe 120‧‧‧Locating hole 210‧‧‧ Fixture 211‧‧‧Protection shell 212‧‧‧window 220‧‧‧Sports platform 230‧‧‧ clean laser head 240‧‧‧Automatic optical inspection lens 250‧‧‧Console 260‧‧‧Heating laser head 270‧‧‧ thermal imager 280‧‧‧chamber 290‧‧‧Dust suction device 300‧‧‧Adapter 320‧‧‧Fixed Department 1B‧‧‧Region S601~S603‧‧‧Step

[FIG. 1A] A top view of a probe card according to an embodiment of the new model. [FIG. 1B] is an enlarged view of the region 1B in FIG. 1A. [Fig. 2] A perspective view of a laser device for cleaning a probe card according to an embodiment of the new model. [Fig. 3] A side view of a laser device for cleaning a probe card according to an embodiment of the new model. [Fig. 4] A schematic diagram of a probe card connected with a fixture according to another embodiment of the present invention. 5 is a side view of a laser device for cleaning a probe card according to another embodiment of the new model. [FIG. 6] A flow chart of a method for cleaning a probe card by laser according to an embodiment of the present invention. 7 is a flowchart of a method for cleaning a probe card by laser according to another embodiment of the present invention.

100‧‧‧Probe card

210‧‧‧ Fixture

211‧‧‧Protection shell

212‧‧‧window

220‧‧‧Sports platform

230‧‧‧ clean laser head

240‧‧‧Automatic optical inspection lens

250‧‧‧Console

260‧‧‧Heating laser head

270‧‧‧ thermal imager

280‧‧‧chamber

Claims (10)

A laser device for cleaning a probe card includes: A fixture for removable holding a probe card; A sports platform; A cleaning laser head is arranged on the motion platform and outputs a cleaning laser light to a probe to be cleaned in a probe area of the probe card; An automatic optical inspection lens is installed on the motion platform and obtains a three-dimensional surface topography image of the probe area; and A console is electrically connected to the motion platform, the cleaning laser head and the automatic optical detection lens to select the probe to be cleaned according to the three-dimensional surface topography image. The laser device for cleaning the probe card according to claim 1, further comprising: A heated laser head, electrically connected to the console, is configured to heat the probe zone. The laser device for cleaning the probe card as described in claim 2 further includes: A thermal imager, electrically connected to the console, is configured to take thermal images of the probe area during heating. The laser device for cleaning a probe card according to claim 1, wherein the console also recognizes the height of the probe to be cleaned according to the three-dimensional surface topography image to control the movement platform along the probe to be cleaned The long axis of moves the cleaning laser head so that the cleaning laser head is focused on the needle end of the probe to be cleaned. The laser device for cleaning a probe card according to claim 1, wherein the console decides to apply the probe to be cleaned according to the three-dimensional shape corresponding to the probe to be cleaned in the three-dimensional surface topography image The position and frequency of the clean laser light. The laser device for cleaning a probe card as described in claim 1, wherein the console is loaded with a probe map corresponding to the probe area to drive the motion platform to move the automatic according to the probe map The optical detection lens or the cleaning laser light is aligned with a probe on the probe card. The laser device for cleaning a probe card according to claim 1, further comprising: a protective housing having a window, so that the cleaning laser light can pass through the window and be protected by the protective housing Block. The laser device for cleaning a probe card according to claim 1, further comprising: a chamber covering the jig for charging a gas that helps the eutectic or inhibits oxidation. The laser device for cleaning a probe card according to claim 1, further comprising: a dust suction device, which absorbs the generated dust, dust, or smoke at the same time when the cleaning laser light cleans the dirt. The laser device for cleaning a probe card according to claim 1, further comprising: an adaptor seat matched with the probe card to fix the probe card on the jig through the adaptor seat .

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