TW202120257A - Cutting device which does not damage a wafer and a cutting blade and does not suck cutting water and cutting debris from the position between a fixing base and a cutting blade - Google Patents

Abstract

The subject of this invention is to provide a cutting device which does not damage a wafer and a cutting blade and does not suck cutting water and cutting debris from the position between a fixing base and a cutting blade. When the value measured by the pressure gauge (56) does not reach the allowable value, the cutting device (2) is disposed with a control means (70) to prevent the start of rotation of the rotating shaft (26) and the start of supply of the cutting water; and while the value measured by the pressure gauge (56) reaches the allowable value, the control means (70) allows the start of rotation of the rotating shaft (26) and also allows the start of supply of cutting water after the start of rotation of the rotating shaft (26).

Description

Cutting device

The present invention relates to a cutting means including a holding means for holding a workpiece, and a cutting tool that rotatably supports the cutting edge of the workpiece to be cut and held by the holding means on the outer periphery, and the cutting tool and the workpiece are supplied with cutting water The cutting device is the cutting water supply means, the relative processing conveying and holding means and the cutting means of the cutting means.

Plural devices such as IC, LSI, etc. are formed on a wafer that is divided by a predetermined dividing line. It is divided into individual device chips by a cutting device equipped with a rotatable cutter. The divided device chips are used in mobile phones. , Electrical equipment such as personal computers.

The applicant proposes a cutting device capable of avoiding special tools required when a cutting blade is connected to a fixed seat with a nut, and avoiding personal differences when a cutting blade is connected to a fixed plate with a nut (for example, refer to Patent Document 1).

This cutting device includes a holding means for holding the workpiece, and a cutting means for rotatably supporting the cutting blade of the workpiece held by the holding means on the outer periphery, and supplying cutting water to the cutting blade and the workpiece The cutting device is the cutting water supply means, the relative processing conveying and holding means and the cutting means of the cutting means. The cutting means is provided with a rotating shaft, a housing that can rotatably support the rotating shaft, and a fixed seat for holding the cutting knife formed at the front end of the rotating shaft. The fixing base has a wheel housing part inserted in the opening formed in the center of the cutting blade, an annular support part that exposes the cutting edge of the cutting blade formed on the outer periphery of the wheel housing part, and an opening in the wheel housing part and the support part In between, the suction hole that sucks and holds the cutting blade, and the communication path that connects the suction hole to the suction source. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] JP 2002-154054 A

[The problem to be solved by the invention]

However, there is a problem of damage to the wafer and the cutter when the rotating cutter is performed in a state where there is a foreign object intervening between the fixed seat and the cutter and cannot be sufficiently attracted.

Moreover, even when the cutting tool is properly installed in the fixed seat, when cutting water is supplied, there will be a problem of a slight gap between the fixed seat and the cutting tool, which is accompanied by the cutting water, which attracts cutting chips.

In view of the foregoing facts, the subject of the present invention is to provide a cutting device that does not damage the wafer and the cutting blade, and does not attract cutting water and cutting chips from between the holder and the cutting blade. [Means to solve the problem]

In order to solve the above-mentioned problems, the present invention provides the following cutting device. That is, the present invention provides a cutting means including a holding means for holding a workpiece, and a cutting tool rotatably supporting the cutting edge of the workpiece held by the holding means on the outer periphery, and the cutting tool and the workpiece The cutting water supply means for supplying cutting water, and the cutting device for conveying the holding means and the feeding means for the cutting means relative to processing, the cutting means is at least a rotating shaft and a housing that rotatably supports the rotating shaft , And a fixed seat that holds the cutting blade formed at the front end of the rotating shaft, the fixed seat includes a wheel shell portion inserted into an opening formed in the center of the cutting blade, and an exposed support formed on the wheel shell portion The ring-shaped support portion of the cutting edge of the cutting knife on the outer periphery, and the suction hole that opens between the wheel housing portion and the support portion, sucks and holds the suction hole of the cutting knife, and a communication path that connects the suction hole to the suction source, Equipped with a pressure gauge installed in the communication path. When the value measured by the pressure gauge does not reach the allowable value, the rotation of the rotating shaft and the supply of cutting water are prevented, and the value measured by the pressure gauge reaches the allowable value A cutting device that permits the start of the rotation of the rotating shaft at the same time as the start of the rotation of the rotating shaft and allows the start of the supply of cutting water.

Preferably, the cutting means are arranged in such a way that the cutting blades are opposed to each other, and the control means is in the state that the value measured by the pressure gauge reaches the allowable value, and the fixed seat of the cutting means on both sides, When the cutting tool is installed, it is allowed to rotate the rotation axis of the other cutting means while cutting the workpiece held by the holding means by the cutting means of only one side. [Effects of the invention]

The cutting device of the present invention includes a holding means for holding a workpiece, and a cutting means for rotatably supporting a cutting blade that cuts and holds the workpiece on the holding means on the outer periphery, and the cutting tool and the workpiece The cutting water supply means for supplying cutting water, and the feeding means for conveying the holding means and the cutting means relative to processing, the cutting means is formed by at least a rotating shaft, a housing that rotatably supports the rotating shaft, and holding The fixed seat of the cutting tool at the front end of the rotating shaft is composed of a wheel housing part inserted into an opening formed in the center of the cutting tool, and an exposed support formed on the outer periphery of the wheel housing part. The annular support portion of the blade of the knife, and the suction hole that is opened between the wheel housing portion and the support portion to attract and hold the cutting blade, and the communication path connecting the suction hole to the suction source are provided in the communication The path is equipped with a pressure gauge. When the value measured by the pressure gauge does not reach the allowable value, the rotation of the rotating shaft and the supply of cutting water are prevented. When the value measured by the pressure gauge reaches the allowable value, the rotation is allowed At the same time when the rotation of the shaft starts, the control means that allows the supply of cutting water to start after the rotation of the rotation shaft starts, because there is a foreign object intervening between the holder and the cutting tool, and when sufficient attraction cannot be obtained (ie. , When the value measured by the pressure gauge does not reach the allowable value), the cutting process will not be started to solve the problem of damage to the wafer and cutter. Moreover, in the cutting device of the present invention, after the start of the rotation of the rotating shaft, the supply of cutting water is allowed to start, and even if cutting water and cutting chips adhere to the holder and the cutting tool, due to the gap between the holder and the cutting tool The centrifugal force throws away the cutting water and cutting chips, and the cutting water will not be attracted to the cutting chips from the slight gap between the fixed seat and the cutting tool.

Hereinafter, a suitable embodiment of the cutting device constructed according to the present invention will be described with reference to the drawings.

The cutting device 2 shown in FIG. 1 includes a holding means 4 for holding the workpiece, and a cutting means 6 that rotatably supports the cutting edge of the workpiece for cutting and holding the holding means 4 on the outer periphery, and the cutting tool The cutting water supply means 8 (refer to FIG. 2) for supplying cutting water with the workpiece, and the feeding means 10 facing the processing conveying and holding means 4 and the cutting means 6. However, in FIG. 1, the X-axis direction, Y-axis direction, and Z-axis direction orthogonal to each other are shown by arrows X, Y, and Z respectively. The plane defined by the X-axis direction and the Y-axis direction is substantially horizontal.

The holding means 4 includes an X-axis movable plate 14 mounted on a substrate 12 that is movable in the X-axis direction, a pillar 16 fixed to the upper surface of the X-axis movable plate 14, and a cover plate 18 fixed to the upper end of the pillar 16. In the cover plate 18, a circular opening 18a is formed. Through the circular opening 18a, the chuck 20 extending above is rotatably mounted on the upper end of the pillar 16. The chuck 20 is rotated by a chuck motor (not shown) embedded in the support column 16 with an axis extending in the vertical direction as the center.

At the upper end of the chuck 20, a porous circular suction cup 22 connected to a suction means (not shown) is arranged. Then, in the chuck 20, an attractive force is generated on the upper surface of the suction plate 22 by a suction means, and the processed object placed on the upper surface of the suction plate 22 is sucked and held. In addition, on the periphery of the chuck 20, a plurality of clamps 24 are arranged at intervals in the circumferential direction.

The cutting means 6 of the illustrated embodiment are spaced apart from each other in the Y-axis direction, and the cutting blades are opposed to each other, and two cutting means 6a and 6b are arranged as the first cutting means 6a and the second cutting means 6b. In the cutting means 6 of the embodiment shown in the figure, the workpiece held by the holding means 4 can be simultaneously cut by two cutting blades. 2 and 3 for description, the first cutting means 6a is made up of at least the rotating shaft 26 (refer to Figure 3), and the housing 28 that can rotatably support the rotating shaft 26, and the holding formed at the front end of the rotating shaft 26 The cutting tool 30 is constituted by a fixed seat 32.

At the other end of the rotating shaft 26, a motor (not shown) for rotating the rotating shaft 26 is connected. As shown in FIG. 2, a knife cover 34 is installed at the front end of the housing 28. The blade cover 34 includes a main part 36 fixed to the front end of the housing 28 and a movable part 38 supported by the main part 36 in a rocking manner. The cutting blade 30 has a cylindrical base 40 and an annular cutting edge 42 mounted on the outer periphery of one side surface of the base 40. At the center of the base 40, a circular opening 40a is formed. However, in FIG. 3, the knife cover 34 is omitted for convenience.

3 to continue the description, the fixed seat 32 includes a wheel shell portion 44 inserted in the opening 40a formed in the center of the cutting blade 30, and exposed and supporting the cutting edge 42 of the cutting blade 30 formed on the outer periphery of the wheel shell portion 44 The annular support portion 46 and the suction hole 50 that opens between the wheel shell portion 44 and the support portion 46 to attract and hold the cutting blade 30 and the communication path 54 that connects the suction hole 50 to the suction source 52.

The wheel shell portion 44 is formed in a cylindrical shape, and the diameter of the wheel shell portion 44 corresponds to the diameter of the opening 40 a of the base 40 of the cutter 30. The outer diameter of the supporting part 46 is smaller than the outer diameter of the cutting edge 42 of the cutting blade 30. When the cutting blade 30 is mounted on the fixing plate 32, the cutting edge 42 is exposed from the fixing seat 32. In addition, the front end surface of the support portion 46 in the Y-axis direction is receded from the front end surface of the wheel housing portion 44 in the Y-axis direction.

Between the wheel shell portion 44 and the support portion 46, there is provided a ring-shaped recess 48 that recedes in the Y-axis direction than the front end of the support portion 46. The ring-shaped recess 48 is formed to attract and hold the cutting blade 30.孔50. In the fixing base 32 of the illustrated embodiment, a pair of suction holes 50 are provided. The number of suction holes 50 may be one, and in order to achieve a good rotation balance, it is preferable to form two or more at equal angular intervals. As shown in FIG. 3, each suction hole 50 is connected to a suction source 52 and communicates with each other via a communication path 54. The communication path 54 is equipped with a pressure gauge 56 designed to measure the pressure in the communication path 54 and a valve 58 for opening and closing the communication path 54. Then, in the fixed seat 32, the suction source 52 is actuated in a state where the valve 58 is opened to suck and hold the cutting blade 30 fitted in the wheel shell part 44.

In addition, the first cutting means 6a is shown in FIG. 1, and includes a Y-axis movable piece 60 supported by a support member (not shown) that is suitably movable in the Y-axis direction, and a Y-axis movable piece 60 supported by a support member that is freely movable in the Z-axis direction. The Z-axis movable piece 62 of the Y-axis movable piece 60. At the lower end of the Z-axis movable piece 62, the above-mentioned housing 28 is fixed. However, as for the second cutting means 6b, the same configuration as the first cutting means 6a is sufficient, and the same reference numerals as those of the first cutting means 6a are attached, and the description is omitted.

2, the cutting water supply means 8 will be described. The cutting water supply means 8 includes a cylindrical supply port 64 attached to the main portion 36 of the blade cover 34 and a nozzle 66 communicating with a pair of the supply ports 64. The supply port 64 communicates with a cutting water supply source (not shown), and a water path (not shown) that communicates the supply port 64 with the cutting water supply source is provided with a valve (not shown) for opening and closing the water path. As shown in FIG. 2(b) and FIG. 2(c), the nozzle 66 has a plurality of injection holes 68 formed thereon. Then, when the cutting water supply means 8 is attached to the workpiece held by the holding means 4 and the cutting process is applied via the cutting means 6, the cutting water supplied from the cutting water supply source to the supply port 64 will be supplied from the nozzle 66 The cutting water of the spray hole 68 is sprayed toward the cutting blade 30 and the workpiece.

As shown in FIG. 3, the pressure gauge 56 is electrically connected to the control means 70 that controls the operation of the cutting device 2, and the value measured by the pressure gauge 56 is sent to the control means 70. The control means 70 composed of a computer has a central processing unit (CPU) for calculating and processing according to a control program, a read-only memory (ROM) for storing the control program, etc., and a read-write random access memory for storing calculation results, etc. RAM (all not shown). Then, when the value measured by the pressure gauge 56 does not reach the allowable value, the control means 70 prevents the rotation of the rotating shaft 26 from starting and the supply of cutting water starts, and when the value measured by the pressure gauge 56 reaches the allowable value, the rotating shaft is allowed At the same time when the rotation of 26 starts, after the rotation of the rotating shaft 26 starts, the supply of cutting water is allowed to start.

The feeding means 10 of the illustrated embodiment is shown in FIG. 1, and includes an X-axis feeding means 72, and the first and the second part of the door frame (not shown) arranged across the base 12 The second Y-axis feeding means 74a, 74b, and the first and second Z-axis feeding means 76a, 76b. The X-axis feeding means 72 has a ball screw 78 extending in the X-axis direction connected to the X-axis movable plate 14 and a motor 80 that rotates the ball screw 78. Then, the X-axis feeding means 72 converts the rotational motion of the motor 80 into linear motion via the ball screw 78, and transmits it to the X-axis movable plate 14. For the cutting means 6, the holding means 4 is relatively processed and transported in the X-axis direction. .

The first Y-axis feeding means 74a has a ball screw 82 extending in the Y-axis direction connected to the Y-axis movable piece 60, and a motor 84 that rotates the ball screw 82. Then, the first Y-axis feeding means 74a converts the rotational motion of the motor 84 into linear motion via the ball screw 82, and transmits it to the Y-axis movable piece 60. For the holding means 4, the first cutting means 6a is directed to Y Relative processing and conveying in the axial direction (graded conveying). In addition, in the first Y-axis feeding means 74a, the motor 84 is connected to one end of the ball screw 82 in the Y-axis direction. On the other hand, in the second Y-axis feeding means 74b, the motor 84 is connected to the ball screw. Except for the part of the other end in the Y-axis direction of 84, the second Y-axis feeding means 74b can have the same structure as the first Y-axis feeding means 74a. Then, the second Y-axis feeding means 74b is for relative processing and conveying (stage conveying) of the second cutting means 6b in the Y-axis direction with respect to the holding means 4.

The first Z-axis feeding means 76a has a ball screw (not shown) extending in the Z-axis direction connected to the Z-axis movable piece 62, and a motor 86 that rotates the ball screw. Then, the first Z-axis feeding means 76a converts the rotational motion of the motor 86 into linear motion via a ball screw, and transmits it to the Z-axis movable piece 62. For the holding means 4, the first cutting means 6a is directed to the Z-axis Directional relative processing and conveying (cut-in conveying). In addition, the first Z-axis feeding means 76a and the second Z-axis feeding means 76b, which can be of the same configuration, are for the holding means 4, and the second cutting means 6b is relatively processed and conveyed in the Z-axis direction (cutting conveyance). ).

As in the above-mentioned cutting device 2, when any one of the first cutting means 6a or the second cutting means 6b is inserted between the fixed seat 32 and the cutting tool 30, when a foreign object or the like is inserted between the fixed seat 32 and the cutting There is a gap between the cutters 30, and air flows into the communication path 54 from this gap. Therefore, the pressure in the communication path 54 cannot be reduced to an allowable value (for example, the absolute pressure is about 0.03 MPa), and the fixed seat 32 maintains the attractive force of the cutter 30 Unable to reach the required value. Therefore, when the value measured by the pressure gauge 56 does not reach the allowable value, the control means 70 prevents the start of rotation of the rotation shaft 26 of both the first and second cutting means 6a, 6b and the start of the supply of cutting water.

On the other hand, in both the first and second cutting means 6a, 6b, when there is no foreign matter or the like between the fixed seat 32 and the cutting blade 30, the cutting blade 30 is sucked and held (installed) on the fixed seat At 32, the supporting portion 46 of the fixed seat 32 and the cutting blade 30 are in close contact. As a result, the pressure in the communication path 54 drops to a permissible value, and the cutting blade 30 is held on the fixed seat 32 with the required attractive force. Therefore, when the value measured by the pressure gauge 56 reaches the allowable value, the control means 70 allows the first and second cutting means 6a, 6b to start the rotation of the rotating shafts 26 at the same time as the two rotating shafts 26 After the rotation starts, the supply of cutting water is allowed to start.

In the cutting device 2 of the embodiment shown in the figure, when the value measured by the pressure gauge 56 provided with one of them does not reach the allowable value, the rotation of the rotation shaft 26 of both the first and second cutting means 6a, 6b is prevented When the value measured by the pressure gauge 56 on both sides reaches the allowable value at the start and the supply of cutting water, the rotation of the rotation shafts 26 of both the first and second cutting means 6a and 6b is allowed to start at the same time as both After the rotation of the rotating shaft 26 is started, the control means 70 that allows the supply of cutting water to start is because of the foreign matter intervening between the fixed seat 32 and the cutting blade 30, and the cutting process is not started when sufficient attraction is not obtained. Therefore, the wafer and the cutter 30 will not be damaged.

Moreover, in the cutting device 2, after the start of the rotation of the rotating shaft 26, the supply of cutting water is allowed to start. Even if cutting water and cutting chips adhere to the fixed seat 32 and the cutting blade 30, the fixed seat 32 and cutting The centrifugal force of the knife 30 throws away the cutting water and cutting chips, and the cutting water will not be attracted to the cutting chips from the slight gap between the fixed seat 32 and the cutting knife 30 along with the cutting water.

In addition, in the cutting device 2, the workpiece held by the holding means 4 can be cut by only one of the first and second cutting means 6a and 6b. At this time, the control means 70 is to allow only the first and second cutting means 6a when the cutting tool 30 is installed on the fixing seats 32 of both sides when the values measured by the pressure gauges 56 of both sides reach the allowable value. , While cutting the workpiece by one of 6b, rotate the rotation shaft 26 of the other of the first and second cutting means 6a, 6b.

Therefore, the cutting chips generated by the cutting by one cutting means 6 will not adhere to the fixing seat 32 of the other cutting means 6 and contaminate the fixing seat 32. That is, when the value measured by the pressure gauge 56 reaches the allowable value, the cutting tool 30 is installed through the fixing seat 32 of the other cutting means 6 to prevent the fixing seat 32 of the other cutting means 6 Adhesion of cutting chips.

In addition, even if the cutting tool 30 of the other cutting means 6 is set on the fixed seat 32, the chips generated by the cutting by the one cutting means 6 will not be attracted from the slight gap between the cutting tool 30 and the fixed seat 32 situation. That is, by rotating the rotating shaft 26 of the other cutting means 6, the centrifugal force of the rotation prevents the suction of cutting chips from the slight gap between the fixed seat 32 and the cutting blade 30.

However, in the cutting device 2 of the illustrated embodiment, although the case where two cutting means 6 are provided has been described, the number of cutting means 6 may be one.

2: Cutting device 4: keep the means 6: Cutting means 6a: The first cutting method 6b: The second cutting method 8: Cutting water supply means 10: Feeding means 26: Rotation axis 28: shell 30: Cutter 32: fixed seat 42: Blade 44: Wheel shell 46: Support Department 50: Attraction hole 52: Attraction source 54: Connected Path 56: Pressure gauge 70: Control

[Figure 1] A partial perspective view of a cutting device constructed according to the present invention. [Fig. 2] (a) A partial oblique view of the cutting means shown in Fig. 1, (b) an oblique view showing the state of raising the cutting water supply from the state shown in (a), and (c) showing the state shown in (b) The oblique view of the state with the cutter removed. [Fig. 3] A partial cross-sectional view of the cutting means shown in Fig. 1.

6: Cutting means

6a: The first cutting method

6b: The second cutting method

26: Rotation axis

28: shell

30: Cutter

32: fixed seat

40: Abutment

40a: opening

42: Blade

44: Wheel shell

46: Support Department

48: Annular recess

50: Attraction hole

52: Attraction source

54: Connected Path

56: Pressure gauge

58: Valve

70: Control

Claims (2)

A cutting device comprising a holding means for holding a workpiece, a cutting means for rotatably supporting a cutting blade for cutting the workpiece held by the holding means on the outer periphery, and the cutting tool and the workpiece The cutting water supply means for supplying cutting water, and the cutting device for processing and conveying the holding means and the feeding means of the cutting means relatively, are characterized by The cutting means is composed of at least a rotating shaft, a housing rotatably supporting the rotating shaft, and a fixed seat formed at the front end of the rotating shaft and holding the cutting knife, The fixing seat includes a wheel housing portion inserted into an opening formed in the center of the cutting blade, a ring-shaped support portion formed on the outer periphery of the wheel housing portion and supporting the cutting edge of the cutting blade by exposing it, and an opening in Between the wheel shell portion and the support portion, the suction hole that sucks and holds the cutting blade, and the communication path that connects the suction hole to the suction source, Equipped with a pressure gauge installed in the communication path. When the value measured by the pressure gauge does not reach the allowable value, the rotation of the rotating shaft and the supply of cutting water are prevented, and the value measured by the pressure gauge reaches the allowable value , Allows the start of the rotation of the rotating shaft at the same time, after the start of the rotation of the rotating shaft, the control means to allow the start of the supply of cutting water. Such as the cutting device described in claim 1, wherein the cutting means is arranged with the cutting knife as the opposite way, and two are provided, The control means is in the state that the value measured by the pressure gauge reaches the allowable value. When the fixing seat of the cutting means of both sides is installed, the cutting tool is allowed to be maintained by the cutting means of only one side. While cutting the workpiece of the holding means, rotate the rotation axis of the other cutting means.

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