TW202117411A - Pixel substrate with quantum dots and fabrication method thereof comprising a transparent substrate, a black matrix layer, and a plurality of quantum dot adhesive layers - Google Patents
Pixel substrate with quantum dots and fabrication method thereof comprising a transparent substrate, a black matrix layer, and a plurality of quantum dot adhesive layers Download PDFInfo
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Abstract
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本發明係關於一種量子點技術,特別關於一種具量子點的畫素基板及其製作方法。 The present invention relates to a quantum dot technology, in particular to a pixel substrate with quantum dots and a manufacturing method thereof.
量子點(Quantum Dots)作為平面顯示器技術的應用材料已經成為下一代顯示技術的顯學。量子點有以下的特色,其轉換光譜可隨尺寸調整(透過調整量子點的奈米晶體大小,尺寸在1~20nm之間)、發光效率高、發光穩定性好等光學性能。並且,量子點大多為無機化合物,其性能穩定,具有耐久性佳之特色。使得量子點技術成為下一代顯示技術的關注重點。 Quantum dots (Quantum Dots), as an applied material for flat panel display technology, have become the display technology for the next generation of display technology. Quantum dots have the following characteristics. The conversion spectrum can be adjusted with the size (by adjusting the size of the nanocrystals of the quantum dots, the size is between 1-20nm), high luminous efficiency, and good luminous stability. In addition, most of the quantum dots are inorganic compounds with stable performance and good durability. This makes quantum dot technology the focus of next-generation display technology.
目前,已經有廠商發展出量子點發光二極體(Quantum Dots Light Emitting Diodes,QD-LEDs)、量子點有機發光二極體(Quantum Dots Organic Light Emitting Diodes,QD-LEDs)等顯示技術。目前的發展,主要是利用發光二極體或有機發光二極體的發光來作為量子點的光源,讓其轉換到想要發光的頻譜。無論是哪一種應用手段,由於量子點的製程技術與發光二極體或有機發光二極的製程大不相同,因此,由量子點所構成的像素基板的製作,目前尚須與兩者的製程分開。 At present, some manufacturers have developed display technologies such as Quantum Dots Light Emitting Diodes (QD-LEDs) and Quantum Dots Organic Light Emitting Diodes (QD-LEDs). The current development mainly uses the luminescence of light-emitting diodes or organic light-emitting diodes as the light source of quantum dots to convert them to the desired light-emitting spectrum. Regardless of the application method, the manufacturing process of quantum dots is quite different from that of light-emitting diodes or organic light-emitting diodes. Therefore, the production of pixel substrates composed of quantum dots still needs to be compared with the manufacturing process of both. separate.
因此,如何能夠簡化量子點所構成的像素基板的製程與其結構,成為目前量子點顯示技術開發廠商所希求的發展方向。 Therefore, how to simplify the manufacturing process and structure of the pixel substrate formed by quantum dots has become the development direction that the current quantum dot display technology developers want.
為達上述目的,本發明提供一種具量子點的畫素基板及其製作方法,可達到最簡易製程製作具量子點的畫素基板,並讓量子點灌注容易,生產良率提高,進一步可加速量子點運用於顯示技術進程的特殊技術功效。 To achieve the above objective, the present invention provides a pixel substrate with quantum dots and a manufacturing method thereof, which can achieve the simplest manufacturing process to fabricate a pixel substrate with quantum dots, and facilitate the perfusion of quantum dots, improve the production yield, and further accelerate Quantum dots are used to display the special technical effects of technological progress.
本發明的目的在提供一種具量子點的畫素基板,包含:一透明基板;一黑矩陣層,形成於該透明基板的表面,定義複數個像素空間;複數個量子點膠層,個別形成於該像素空間中;及其中,該黑矩陣層由負型光阻材料硬化製作而成,且與該透明基板形成一小於90度之一夾角,而使該些像素空間構成一倒梯形之碗狀結構。 The object of the present invention is to provide a pixel substrate with quantum dots, comprising: a transparent substrate; a black matrix layer formed on the surface of the transparent substrate to define a plurality of pixel spaces; and a plurality of quantum dot adhesive layers are individually formed on In the pixel space; and wherein, the black matrix layer is hardened and made of a negative photoresist material, and forms an included angle less than 90 degrees with the transparent substrate, so that the pixel spaces form an inverted trapezoidal bowl shape structure.
本發明又提供一種具量子點的畫素基板的製造方法,包含:於透明基板的表面形成一光阻層;以一光罩對該光阻層進行曝光;移除未被曝光的該光阻層,並將未被曝光的該光阻層製作為梯形結構之一黑矩陣結構,以定義複數個像素空間,且該黑矩陣結構與該透明基板形成一小於90度之一夾角;固化該黑矩陣結構;及將該些像素空間個別對應灌注相對應畫素材料之一量子點膠層。 The present invention also provides a method for manufacturing a pixel substrate with quantum dots, including: forming a photoresist layer on the surface of the transparent substrate; exposing the photoresist layer with a mask; and removing the photoresist that has not been exposed The unexposed photoresist layer is made into a black matrix structure of a trapezoidal structure to define a plurality of pixel spaces, and the black matrix structure and the transparent substrate form an included angle less than 90 degrees; curing the black Matrix structure; and these pixel spaces are individually correspondingly perfused with a quantum dot glue layer of corresponding pixel material.
為讓本發明之上述和其他目的、特徵、和優點能更明顯易懂,下文特舉數個較佳實施例,並配合所附圖式,作詳細說明如下(實施方式)。 In order to make the above and other objects, features, and advantages of the present invention more comprehensible, several preferred embodiments are listed below in conjunction with the accompanying drawings, which are described in detail as follows (implementations).
2‧‧‧局部 2‧‧‧Part
10‧‧‧具量子點的像素基板 10‧‧‧Pixel substrate with quantum dots
11‧‧‧透明基板 11‧‧‧Transparent substrate
12‧‧‧光阻層 12‧‧‧Photoresist layer
12-1‧‧‧黑矩陣層 12-1‧‧‧Black matrix layer
20‧‧‧發光層 20‧‧‧Light-emitting layer
30-1、30-2、30-3‧‧‧量子點膠層 30-1, 30-2, 30-3‧‧‧Quantum dot adhesive layer
40‧‧‧光罩 40‧‧‧Mask
80‧‧‧紫外光 80‧‧‧UV
90‧‧‧光 90‧‧‧Light
91‧‧‧目標光 91‧‧‧Target Light
第1圖,本發明所揭示的一種具量子點的畫素基板的製作方法流程圖。 Figure 1 is a flow chart of a method for manufacturing a pixel substrate with quantum dots disclosed in the present invention.
第2A-2E圖,其為第3B圖的局部2的剖面圖的製作流程圖。
Figures 2A-2E are a flow chart for making a cross-sectional view of
第3A圖,其說明了本發明的具量子點的像素基板10及其所對應的發光基板20的示意圖。
FIG. 3A illustrates a schematic diagram of the
第3B圖為本發明的具量子點的像素基板10及其所對應的局部2的放大示意圖。
FIG. 3B is an enlarged schematic diagram of the
第3C圖為本發明的具量子點的像素基板10的局部2沿A-A剖面線的剖面示意圖。
FIG. 3C is a schematic cross-sectional view of the
根據本發明的實施例,本發明運用曝光顯影製程來製作具量子點的畫素基板,藉以製作出高精度的黑矩陣層,讓量子點可準確地灌注於由黑矩陣層所定義的像素空間中,進而達到製程簡易,高解析度的下一代顯示技術所需的具量子點的畫素基板,以作為量子點顯示器使用。 According to an embodiment of the present invention, the present invention uses an exposure and development process to fabricate a pixel substrate with quantum dots, thereby fabricating a high-precision black matrix layer, so that the quantum dots can be accurately poured into the pixel space defined by the black matrix layer Among them, the pixel substrate with quantum dots required by the next-generation display technology with simple manufacturing process and high resolution can be used as a quantum dot display.
請參考第1圖,本發明所揭示的一種具量子點的畫素基板的製作方法流程圖,請同時參考第2A-2E圖(第3B圖的局部2的剖面圖的製作流程),包含:
Please refer to Fig. 1, the flow chart of the manufacturing method of a pixel substrate with quantum dots disclosed in the present invention. Please also refer to Figs. 2A-2E (the manufacturing process of the cross-sectional view of
步驟S101:於透明基板的表面形成一光阻層;例如,運用噴塗法,漸次形成厚度介於1.5um至20um的光阻;或者,形成厚度介於15um至20um的光阻。由於此光阻層後續會製作為永久材料層,因此,選用負型光阻來製作。此外,此光阻層將製作為黑矩陣結構,因此,可選用摻雜黑色顏料的負型光阻材料。如第2A、2B圖所示,在放大的局部2的範圍中,將透明基板11上以噴塗法製作出膜厚介於1.5um-20um之間的光阻層12。
Step S101: forming a photoresist layer on the surface of the transparent substrate; for example, a spraying method is used to gradually form a photoresist with a thickness of 1.5um to 20um; alternatively, a photoresist with a thickness of 15um to 20um is formed. Since this photoresist layer will be made as a permanent material layer in the future, a negative photoresist is used to make it. In addition, the photoresist layer will be made into a black matrix structure. Therefore, a negative photoresist material doped with black pigments can be used. As shown in FIGS. 2A and 2B, in the area of the enlarged
步驟S102:以一光罩對該光阻層進行曝光;此光罩即為相對應於黑矩陣結構的光罩圖案,可以紫外光進行曝光。如第2C圖所示,以光罩40在紫外光80的曝光下,即可對光阻層12進行曝光。
Step S102: Expose the photoresist layer with a photomask; this photomask is a photomask pattern corresponding to the black matrix structure, and can be exposed to ultraviolet light. As shown in FIG. 2C, the
步驟S103:移除未被曝光的該光阻層,並將未被曝光的該光阻層製作為梯形結構之一黑矩陣結構,以定義複數個像素空間,且該黑矩陣結構與該透明基板形成一小於90度之一夾角;由於所選用的光阻材料為負型光阻,因此,未被曝光的部分,將可被顯影劑清除掉。而被曝光的部分會留下來成為本發明所預留下來的黑矩陣結構。此外,由於所欲形成的黑矩陣結構與透明基板所接觸的部分形成一小於90度之一夾角,黑矩陣層12-1本身形成正梯型結構,可於顯影的過程選擇適當的顯影劑與顯影的時間來製作此梯形結構。該夾角之角度介於45至90度之間,或者,該夾角之角度介於60至85度之間。請參考第2D圖,被曝光的部分,即構成黑矩陣層12-1。 Step S103: Remove the unexposed photoresist layer, and make the unexposed photoresist layer into a black matrix structure of a trapezoidal structure to define a plurality of pixel spaces, and the black matrix structure and the transparent substrate An included angle less than 90 degrees is formed; since the selected photoresist material is a negative photoresist, the unexposed part can be removed by the developer. The exposed part will remain as the black matrix structure reserved by the present invention. In addition, since the black matrix structure to be formed and the part in contact with the transparent substrate form an angle less than 90 degrees, the black matrix layer 12-1 itself forms a positive trapezoidal structure, and an appropriate developer and developer can be selected during the development process. Development time to make this trapezoidal structure. The angle of the included angle is between 45 and 90 degrees, or the angle of the included angle is between 60 and 85 degrees. Please refer to Figure 2D, the exposed part constitutes the black matrix layer 12-1.
步驟S104:固化該黑矩陣結構;例如,透過熱固化或光固化的方式來進一步讓黑矩陣結構固化為永久材料層。 Step S104: curing the black matrix structure; for example, further curing the black matrix structure into a permanent material layer through thermal curing or light curing.
步驟S105:將該些像素空間個別對應灌注相對應畫素材料之一量子點膠層。可採用例如噴墨塗佈法(Inkjet printing),準確地將相同光源轉換為不同顏色的量子點膠噴墨塗佈於對應的像素空間當中。其中,量子點膠層之厚度小於黑矩陣層的厚度,且介於1um~15um之間,或者介於1um~9um之間,或者,介於1um~5um之間。請參考第2E圖,量子點膠層30-1、30-2、30-3分別獨立形成於黑矩陣層12-1所形成的像素空間中,並且,可各別依據不同的光轉換效率來調整量子點膠層30-1、30-2、30-3的厚度,可透過控制噴墨塗佈的時間長短來達成。具有較高光轉換效率之該量子點膠層之厚度, 小於具有較低光轉換效率之該量子點膠層之厚度,此一技術特徵,可解決不同的量子點膠的配方的轉換率不一的問題,而使得不同顏色的量子點膠可達到相同的發光度,進而達到解決因量子點膠的轉換效率不同而產生的色偏問題的特殊技術功效。舉例而言,量子點膠層30-1當中的量子點膠的光轉換效率為95%,而量子點膠層30-2當中的量子點膠的光轉換效率為85%,量子點膠層30-3當中的量子點膠的光轉換效率為70%,本發明即將量子點膠層30-1、30-2、30-3的厚度,對應為基本厚度/95%、基本厚度/85%、基本厚度/70%。如此,即形成了如第2E圖的量子點膠層30-1、30-2、30-3的厚度不相同的狀況。當然,如果不同顏色,例如紅、藍、綠的量子點膠的轉換效率相同,則可採用三者對應的量子點膠層厚度相同的做法。其中,量子點膠層的基本厚度同樣小於黑矩陣層的厚度,換算轉換效率後的量子點膠層的厚度,同樣都必須小於黑矩陣層的厚度。 Step S105: Pouring a quantum dot adhesive layer of corresponding pixel materials into the pixel spaces individually. For example, inkjet printing can be used to accurately convert the same light source into different colors of quantum dots and inkjet coating them in the corresponding pixel space. Wherein, the thickness of the quantum dot adhesive layer is smaller than the thickness of the black matrix layer, and is between 1 um and 15 um, or between 1 um and 9 um, or between 1 um and 5 um. Please refer to Figure 2E, the quantum dot adhesive layers 30-1, 30-2, and 30-3 are respectively formed independently in the pixel space formed by the black matrix layer 12-1, and can be individually adjusted according to different light conversion efficiencies. Adjusting the thickness of the quantum dot adhesive layer 30-1, 30-2, 30-3 can be achieved by controlling the length of time for inkjet coating. The thickness of the quantum dot adhesive layer with higher light conversion efficiency, It is smaller than the thickness of the quantum dot adhesive layer with lower light conversion efficiency. This technical feature can solve the problem of different conversion rates of different quantum dot formulations, so that the quantum dots of different colors can achieve the same Luminance, and then achieve the special technical effect of solving the color shift problem caused by the different conversion efficiency of quantum dots. For example, the light conversion efficiency of the quantum dot adhesive in the quantum dot adhesive layer 30-1 is 95%, and the light conversion efficiency of the quantum dot adhesive in the quantum dot adhesive layer 30-2 is 85%, and the quantum dot adhesive layer 30 The light conversion efficiency of the quantum dot adhesive in -3 is 70%. In the present invention, the thickness of the quantum dot adhesive layer 30-1, 30-2, 30-3 corresponds to the basic thickness/95%, basic thickness/85%, Basic thickness/70%. In this way, a situation where the thicknesses of the quantum dot adhesive layers 30-1, 30-2, and 30-3 are not the same as shown in FIG. 2E is formed. Of course, if the conversion efficiencies of the quantum dots of different colors, such as red, blue, and green, are the same, the thickness of the quantum dots corresponding to the three can be the same. Wherein, the basic thickness of the quantum dot adhesive layer is also smaller than the thickness of the black matrix layer, and the thickness of the quantum dot adhesive layer after conversion efficiency conversion must also be smaller than the thickness of the black matrix layer.
其中,透明基板11可以是PET基板(聚对苯二甲酸乙二酯,Polyethylene terephthalate,簡稱PET)、COP基板、PC基板、CPI基板、玻璃基板,聚乙烯醇縮丁醛樹脂(Polyvinyl Butyral Resin簡稱PVB)基板等。透明基板10在可見光波段的光透度大於80%以上。
Wherein, the
本發明中之光阻使用負光阻,但較佳地,本發明的光阻層係使用高解析度負型光阻劑。光阻層的材料主要由高分子樹脂(Resin)、感光起始劑(Photo initiator)、單體(Monomer)、溶劑(Solvent),以及添加劑(Additives)所組成。 The photoresist in the present invention uses a negative photoresist, but preferably, the photoresist layer of the present invention uses a high-resolution negative photoresist. The material of the photoresist layer is mainly composed of polymer resin (Resin), photo initiator (Photo initiator), monomer (Monomer), solvent (Solvent), and additives (Additives).
其中在光阻層的材料中,高分子樹脂(Resin)的功能在於附著性、顯影性、顏料分散性、流動性、耐熱性、耐化性、解析能力;感光 起始劑(Photo initiator)的功能在於感光特性、解析能力;單體(Monomer)的功能在於附著性、顯影性、解析能力;溶劑(Solvent)的功能在於黏度與塗布性質;添加劑(Additives)的功能則在於塗布性、流平性及起泡性。 Among the materials of the photoresist layer, the function of polymer resin (Resin) lies in adhesion, developability, pigment dispersibility, fluidity, heat resistance, chemical resistance, and resolution; The function of the initiator (Photo initiator) lies in the photosensitivity and resolution; the function of the monomer (Monomer) lies in the adhesion, development and resolution; the function of the solvent (Solvent) lies in the viscosity and coating properties; the function of the additive (Additives) The function is coating, leveling and foaming.
高分子樹脂(Resin)可以為含羧酸基(COOH)的聚合物或共聚物,如壓克力(Acrylic)樹脂、壓克力-環氧(Epoxy)樹脂、壓克力_美耐皿(Melamine)樹脂、壓克力-苯乙烯(Styrene)樹脂、苯酚-酚醛(PhenolicAldehyde)樹脂等樹脂,或以上樹脂的任意混合,但不以此為限。樹脂在光阻中的重量百分比範圍可以是0.1%至99%。 The polymer resin (Resin) can be a polymer or copolymer containing carboxylic acid group (COOH), such as acrylic resin, acrylic-epoxy resin, acrylic_melamine ( Melamine resin, acrylic-styrene (Styrene) resin, phenol-phenol (Phenolic Aldehyde) resin and other resins, or any combination of the above resins, but not limited to this. The weight percentage of the resin in the photoresist can range from 0.1% to 99%.
單體可分非水溶性及水溶性單體,其中,非水溶性單體(water-insolubleMonomer)可以為戊赤藻糖醇三丙烯酸酯、三甲基醚丙烷三丙烯酸酯、三甲基醚丙烷三甲基丙烯酸酯、三,二-乙醇異氰酸酯三丙烯酸酯,二,三甲醇丙烷四丙烯酸酯、二異戊四醇五丙烯酸酯、五丙烯酸酯、四乙酸異戊四醇;六乙酸二己四醇、六乙酸二異戊四醇,或為多官能基單體、樹狀/多叢族丙烯酸酯寡體、多叢蔟聚醚丙烯酸酯、氨甲酸乙酯。水溶性單體(water-soluble monomer)則可為Ethoxylated(聚氧乙烯)(簡稱EO)base和Propoxylated(聚氧丙烯)(簡稱PO)的單體(monomer);例如為:二-(二-氧乙烯氧乙烯)乙烯基丙烯酸酉旨、十五聚氧乙烯三甲醇丙烷三丙烯酸酯、三十氧乙烯二,二-雙對酚甲烷二丙烯酸酯、三十個氧乙烯二,二-雙對酚甲烷二甲基丙烯酸酉旨、二十氧乙烯三甲醇丙烷三丙烯酸酯、十五氧乙烯三甲醇丙烷三丙烯酸酯、甲基氧五百五十個氧乙烯單甲基丙烯酸酯、二百氧乙烯二丙烯酸酯、四百氧乙烯二丙烯酸酉旨、四百氧乙烯二甲基丙烯酸酯、六百氧乙烯二丙烯酸酯、六百氧乙烯二甲基丙烯酸酯、聚氧丙烯單甲基丙烯酸酯。 當然亦可添加兩種以上單體(monomer)混合成共單體(co-monomer)。單體或共單體在光阻中的重量百分比範圍可以是0.1%至99%。 Monomers can be divided into water-insoluble monomers and water-soluble monomers. Among them, water-insoluble monomers can be penerythritol triacrylate, trimethyl ether propane triacrylate, and trimethyl ether propane. Trimethacrylate, tris, diethanol isocyanate triacrylate, di, trimethanol propane tetraacrylate, diisopentaerythritol pentaacrylate, pentaacrylate, isopentaerythritol tetraacetate; dihexanetetraacetate Alcohol, diisopentaerythritol hexaacetate, or multifunctional monomer, dendrimer/multiplex acrylate oligomer, polyether acrylate, urethane. Water-soluble monomers can be monomers of Ethoxylated (polyoxyethylene) (EO for short) base and Propoxylated (polyoxypropylene) (PO for short); for example: two-(two-) Oxyethylene oxyethylene) vinyl acrylic acid unitary, pentadecoxyethylene trimethanol propane triacrylate, triacontanoxyethylene di, two-bis-p-phenol methane diacrylate, thirty oxyethylene di, two-pair Phenol methane dimethacrylic acid unitary, eicosoxyethylene trimethanol propane triacrylate, pentaoxyethylene trimethanol propane triacrylate, methyloxy 550 oxyethylene monomethacrylate, two hundred oxygen Ethylene diacrylate, four hundred oxyethylene diacrylate unitary, four hundred oxyethylene dimethacrylate, six hundred oxyethylene diacrylate, six hundred oxyethylene dimethacrylate, polyoxypropylene monomethacrylate . Of course, two or more monomers can also be added and mixed to form a co-monomer. The weight percentage of monomer or comonomer in the photoresist can range from 0.1% to 99%.
光起始劑(Photo initiator),可以選自苯乙酮系化合物(acetophenone)、二苯甲酮(Benzophenone)系化合物或二咪唑系化合物(bis_imidazole)、苯偶姻系化合物(Benzoin),苯偶酰系化合物(Benzil)、α-氨基酮系化合物(α-amino ketone)、酰基膦氧化物系化合物(Acyl phosphine oxide)或苯甲酰甲酸酯系化合物以上光起始劑任意的混合,但不以此為限。光起始劑在光阻中的重量百分比範圍可以是至0.1至10%。 The photo initiator can be selected from acetophenone, benzophenone, bis_imidazole, benzoin, and benzidine. Benzil, α-amino ketone, Acyl phosphine oxide, or benzoyl formate compound can be any combination of the above photoinitiators, but Not limited to this. The weight percentage of the photoinitiator in the photoresist can range from 0.1 to 10%.
溶劑(Solvent)可以為乙二醇丙醚(ethylene glycol monopropylether)、二甘醇二甲醚(di-ethylene glycol dimethylether)、四氫呋喃、乙二醇甲醚(ethylene glycol monomethyl ether)、乙二醇乙醚(ethyleneglycol monoethyl ether)、二甘醇一甲醚(di-ethylene glycol mono-methylether)、二甘醇一乙醚(di-ethylene glycol mono-ethyl ether)、二甘醇一丁醚(di-ethylene glycol mono-butyl ether)、丙二醇甲醚醋酸酯(propylene glycol mono-methyl ether acetate)、丙二醇乙醚醋酸酯(propylene glycol mono-ethyl ether acetate)、丙二醇丙醚醋酸酯(propylene glycol mono-propyl ether acetate)、3-乙氧基丙酸乙酯(ethyl3_ethoxy propionate)等,或以上溶劑任意的混合,但不限於此。溶劑在光阻中的重量百分比範圍可以是0.1%至99%。 The solvent (Solvent) can be ethylene glycol monopropylether, di-ethylene glycol dimethylether, tetrahydrofuran, ethylene glycol monomethyl ether, and ethylene glycol monomethyl ether. ethyleneglycol monoethyl ether), di-ethylene glycol mono-methylether, di-ethylene glycol mono-ethyl ether, di-ethylene glycol mono-butyl ether (di-ethylene glycol mono-methylether) butyl ether), propylene glycol mono-methyl ether acetate, propylene glycol mono-ethyl ether acetate, propylene glycol mono-propyl ether acetate, 3- Ethoxy propionate (ethyl3_ethoxy propionate), etc., or any combination of the above solvents, but not limited thereto. The weight percentage of the solvent in the photoresist can range from 0.1% to 99%.
添加劑一般為顏料分散劑,此為含有顏料的光阻所必需加入的成份,一般為非離子型介面活性劑,舉例如:Solsperse39000,Solsperse21000,此分散劑在光阻中的重量百分比範圍可以是至0.1至5%。 Additives are generally pigment dispersants, which are necessary ingredients for photoresists containing pigments. They are generally non-ionic interfacial active agents, such as Solsperse 39000 and Solsperse 21000. The weight percentage of this dispersant in the photoresist can range from up to 0.1 to 5%.
在本發明的步驟S102時進行曝光時,更包含:(1)基板洗淨 (Substrate Clean);(2)塗布(Coating);(3)軟烤(pre-baking);(4)曝光(exposure);(5)顯影(Developing)等加工步驟。 When performing exposure in step S102 of the present invention, it further includes: (1) substrate cleaning (Substrate Clean); (2) Coating; (3) Pre-baking; (4) Exposure; (5) Development (Developing) and other processing steps.
接著,請參考第3A圖,其說明了本發明的具量子點的像素基板10及其所對應的發光基板20的示意圖;第3B圖為本發明的具量子點的像素基板10及其所對應的局部2的放大示意圖;第3C圖為本發明的具量子點的像素基板10的局部2沿A-A剖面線的剖面示意圖。
Next, please refer to Figure 3A, which illustrates a schematic diagram of the
第3A-3C圖揭露了本發明的具量子點的像素基板10,其包含了:透明基板11、黑矩陣層12-1與複數個量子點膠層30-1、30-2、30-3。其中,黑矩陣層12-1形成於透明基板10的表面,定義複數個像素空間;複數個量子點膠層30-1、30-2、30-3則個別形成於像素空間中,並且,可具有相同厚度或不同厚度。其中,黑矩陣層12-1由負型光阻材料硬化製作而成,且與透明基板10所接觸的部分形成一小於90度之一夾角(黑矩陣層12-1本身為正梯型結構),而使該些像素空間構成一倒梯形之碗狀結構,如第3C圖所示。
Figures 3A-3C disclose the
在第3A圖中,其為運用了發光層20的實施例。發光層20可以是LED發光層或者OLED發光層。控制發光層20所發出的光90,經由具量子點的像素基板10轉換後,可轉換為目標光91。
In Fig. 3A, this is an example in which the light-emitting
其中,黑矩陣層12-1之厚度介於1.5um至40um;就本發明的另一實施例而言,黑矩陣層之厚度介於3um至40um之間;就本發明的另一實施例而言,黑矩陣層之厚度介於5um至20um之間;就本發明的另一實施例而言,黑矩陣層之厚度介於5um至30um之間。其中,夾角之角度介於45至90度之間;就本發明的另一實施例而言,夾角之角度介於60至85度之間。其中,複數個量子點膠層30-1、30-2、30-3之厚度小於黑矩陣層12-1的厚度,且介於 1um至15um之間,或1um-9um之間。 Wherein, the thickness of the black matrix layer 12-1 is between 1.5um and 40um; according to another embodiment of the present invention, the thickness of the black matrix layer is between 3um and 40um; according to another embodiment of the present invention, In other words, the thickness of the black matrix layer is between 5um and 20um; in another embodiment of the present invention, the thickness of the black matrix layer is between 5um and 30um. Wherein, the angle of the included angle is between 45 to 90 degrees; in another embodiment of the present invention, the angle of the included angle is between 60 to 85 degrees. Wherein, the thickness of the plurality of quantum dot adhesive layers 30-1, 30-2, 30-3 is less than the thickness of the black matrix layer 12-1, and is between Between 1um and 15um, or between 1um-9um.
雖然本發明的技術內容已經以較佳實施例揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神所作些許之更動與潤飾,皆應涵蓋於本發明的範疇內,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the technical content of the present invention has been disclosed in the preferred embodiment as above, it is not intended to limit the present invention. Anyone who is familiar with this technique and makes some changes and modifications without departing from the spirit of the present invention should be covered by the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of the attached patent application.
2‧‧‧局部 2‧‧‧Part
11‧‧‧透明基板 11‧‧‧Transparent substrate
12-1‧‧‧黑矩陣層 12-1‧‧‧Black matrix layer
30-1、30-2、30-3‧‧‧量子點膠層 30-1, 30-2, 30-3‧‧‧Quantum dot adhesive layer
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