TW202112904A - Resin material and multilayer printed wiring board - Google Patents

Resin material and multilayer printed wiring board Download PDF

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TW202112904A
TW202112904A TW109126098A TW109126098A TW202112904A TW 202112904 A TW202112904 A TW 202112904A TW 109126098 A TW109126098 A TW 109126098A TW 109126098 A TW109126098 A TW 109126098A TW 202112904 A TW202112904 A TW 202112904A
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compound
resin material
mentioned
weight
skeleton
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川原悠子
久保顕紀子
林達史
竹田幸平
新土誠実
大當悠太
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日商積水化學工業股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1075Partially aromatic polyimides
    • C08G73/1082Partially aromatic polyimides wholly aromatic in the tetracarboxylic moiety
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B32B15/088Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising polyamides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B32B15/092Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1042Copolyimides derived from at least two different tetracarboxylic compounds or two different diamino compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1085Polyimides with diamino moieties or tetracarboxylic segments containing heterocyclic moieties
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/036Multilayers with layers of different types
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits

Abstract

Provided is a resin material whereby (1) the dielectric dissipation factor of a cured article thereof can be lowered, (2) the thermal dimensional stability of the cured article can be increased, (3) resin smear can be effectively removed by desmearing, (4) variation in surface roughness after etching can be suppressed, and (5) plating peel strength can be increased. The resin material pertaining to the present invention includes a compound having a structure represented by formula (X), and a curing accelerator. In formula (X), R represents an organic group, and n ≥ 1.

Description

樹脂材料及多層印刷佈線板Resin materials and multilayer printed wiring boards

本發明係關於一種包含具有醯亞胺骨架之化合物之樹脂材料。又,本發明係關於一種使用上述樹脂材料之多層印刷佈線板。The present invention relates to a resin material containing a compound having an imine skeleton. In addition, the present invention relates to a multilayer printed wiring board using the above-mentioned resin material.

先前,為了獲得半導體裝置、積層板及印刷佈線板等電子零件而使用有各種樹脂材料。例如於多層印刷佈線板中,為了形成用以使內部之層間絕緣之絕緣層,或形成位於表層部分之絕緣層而使用有樹脂材料。於上述絕緣層之表面通常積層作為金屬之佈線。又,為了形成上述絕緣層,有時使用將上述樹脂材料膜化而成之樹脂膜。上述樹脂材料及上述樹脂膜係用作包含增層膜之多層印刷佈線板用之絕緣材料等。In the past, various resin materials have been used to obtain electronic components such as semiconductor devices, build-up boards, and printed wiring boards. For example, in a multilayer printed wiring board, a resin material is used in order to form an insulating layer to insulate the internal interlayers, or to form an insulating layer located on the surface part. The surface of the above-mentioned insulating layer is usually laminated as a metal wiring. Moreover, in order to form the said insulating layer, the resin film which formed the said resin material into a film may be used. The above-mentioned resin material and the above-mentioned resin film are used as insulating materials for multilayer printed wiring boards including build-up films.

下述專利文獻1中揭示有一種樹脂組合物,其含有具有順丁烯二醯亞胺基、及具有至少2個醯亞胺鍵之二價基及飽和或不飽和之二價烴基之化合物。專利文獻1中記載有可使用該樹脂組合物之硬化物作為多層印刷佈線板等之絕緣層。The following Patent Document 1 discloses a resin composition containing a compound having a maleimide group, a divalent group having at least two imidine bonds, and a saturated or unsaturated divalent hydrocarbon group. Patent Document 1 describes that the cured product of the resin composition can be used as an insulating layer of a multilayer printed wiring board or the like.

下述專利文獻2中揭示有一種樹脂組合物,其包含(A)環氧樹脂、及(B)順丁烯二醯亞胺化合物,且(B)成分包含碳原子數為5以上之烷基及碳原子數為5以上之伸烷基中之至少任一者。The following Patent Document 2 discloses a resin composition comprising (A) an epoxy resin and (B) a maleimide compound, and the (B) component contains an alkyl group having 5 or more carbon atoms And at least any one of alkylene groups having 5 or more carbon atoms.

下述專利文獻3中揭示有一種電子材料用樹脂組合物,其包含雙順丁烯二醯亞胺化合物,該雙順丁烯二醯亞胺化合物具有2個順丁烯二醯亞胺基、及1個以上之具有特定結構之聚醯亞胺基。於上述雙順丁烯二醯亞胺化合物中,2個上述順丁烯二醯亞胺基分別獨立地至少經由8個以上之原子以直鏈狀連結而成之第1連結基而鍵結至上述聚醯亞胺基之兩端。The following Patent Document 3 discloses a resin composition for electronic materials, which contains a bismaleimide compound having two maleimide groups, And more than one polyimide group with specific structure. In the above-mentioned bismaleimide compound, two of the above-mentioned maleimide groups are each independently bonded to each other via a first linking group formed by at least 8 or more atoms in a straight chain. Both ends of the above-mentioned polyimide group.

下述專利文獻4中揭示有一種印刷佈線基板用樹脂組合物,其係用以形成印刷佈線基板中之絕緣層之熱硬化性樹脂組合物,且包含順丁烯二醯亞胺化合物(A),上述順丁烯二醯亞胺化合物(A)至少包含具有特定結構之雙順丁烯二醯亞胺化合物(A1)。 [先前技術文獻] [專利文獻]The following Patent Document 4 discloses a resin composition for a printed wiring board, which is a thermosetting resin composition for forming an insulating layer in a printed wiring board, and contains a maleimide compound (A) , The maleimide compound (A) includes at least a bismaleimide compound (A1) having a specific structure. [Prior Technical Literature] [Patent Literature]

[專利文獻1]WO2016/114286A1 [專利文獻2]日本專利特開2019-44128號公報 [專利文獻3]日本專利特開2018-90728號公報 [專利文獻4]日本專利特開2016-196549號公報[Patent Document 1] WO2016/114286A1 [Patent Document 2] Japanese Patent Laid-Open No. 2019-44128 [Patent Document 3] Japanese Patent Laid-Open No. 2018-90728 [Patent Document 4] Japanese Patent Laid-Open No. 2016-196549

[發明所欲解決之問題][The problem to be solved by the invention]

於使用如專利文獻1中所記載之先前之樹脂材料形成絕緣層之情形時,有時硬化物之熱尺寸穩定性未變得足夠高。又,於使用如專利文獻2中所記載之先前之樹脂材料形成絕緣層之情形時,有時硬化物之介電損耗因數未變得足夠低。如專利文獻3、4中所記載,若使用包含具有特定結構之順丁烯二醯亞胺化合物之樹脂材料,則可使介電損耗因數及熱尺寸穩定性一定程度變良好,但期待進一步提高。In the case of forming an insulating layer using the previous resin material as described in Patent Document 1, the thermal dimensional stability of the cured product may not become sufficiently high. In addition, when the insulating layer is formed using the previous resin material as described in Patent Document 2, the dielectric loss factor of the cured product may not become sufficiently low. As described in Patent Documents 3 and 4, if a resin material containing a maleimide compound having a specific structure is used, the dielectric loss factor and thermal dimensional stability can be improved to a certain extent, but further improvement is expected .

又,關於如專利文獻1-4中所記載之先前之樹脂材料,有時於形成絕緣層時藉由除膠渣處理,未將通孔內之膠渣充分地去除。In addition, with regard to the previous resin materials described in Patent Documents 1-4, the scum in the through holes may not be sufficiently removed by the desmear treatment when forming the insulating layer.

進而,於使用先前之樹脂材料形成絕緣層之情形時,存在蝕刻後之表面粗度不均,或與在該絕緣層之表面上藉由鍍覆處理所積層之金屬層之鍍覆剝離強度未變得足夠高之情形。Furthermore, when the insulating layer is formed using the previous resin material, the surface roughness after etching may be uneven, or the plating peel strength of the metal layer deposited by the plating treatment on the surface of the insulating layer may be different. The situation becomes high enough.

本發明之目的在於提供一種樹脂材料,其1)可降低硬化物之介電損耗因數,2)可提高硬化物之熱尺寸穩定性,3)藉由除膠渣處理可有效地去除膠渣,4)可抑制蝕刻後之表面粗度之不均,5)可提高鍍覆剝離強度。又,本發明之目的亦在於提供一種使用上述樹脂材料之多層印刷佈線板。 [解決問題之技術手段]The purpose of the present invention is to provide a resin material, which 1) can reduce the dielectric loss factor of the hardened object, 2) can improve the thermal dimensional stability of the hardened object, and 3) can effectively remove the scum by desmear treatment, 4) It can suppress the unevenness of the surface roughness after etching, and 5) it can improve the peeling strength of the plating. Moreover, the object of the present invention is also to provide a multilayer printed wiring board using the above-mentioned resin material. [Technical means to solve the problem]

根據本發明之較廣之態樣,提供一種樹脂材料,其包含具有下述式(X)所表示之結構之化合物、及硬化促進劑。According to a broader aspect of the present invention, a resin material is provided, which includes a compound having a structure represented by the following formula (X) and a hardening accelerator.

[化1]

Figure 02_image003
[化1]
Figure 02_image003

上述式(X)中,R表示有機基,n表示1以上之數。In the above formula (X), R represents an organic group, and n represents a number of 1 or more.

於本發明之樹脂材料之某一特定態樣中,上述式(X)中,n表示2以上之數。In a specific aspect of the resin material of the present invention, in the above formula (X), n represents a number of 2 or more.

於本發明之樹脂材料之某一特定態樣中,上述式(X)中,R係具有脂肪族環之基。In a specific aspect of the resin material of the present invention, in the above formula (X), R is an aliphatic ring group.

於本發明之樹脂材料之某一特定態樣中,上述式(X)中,R具有源自二聚二胺之骨架之部分骨架。In a specific aspect of the resin material of the present invention, in the above formula (X), R has a partial skeleton derived from the skeleton of dimer diamine.

於本發明之樹脂材料之某一特定態樣中,上述式(X)中,R具有源自二聚二胺以外之二胺化合物之骨架之部分骨架。In a specific aspect of the resin material of the present invention, in the above formula (X), R has a partial skeleton derived from the skeleton of a diamine compound other than dimer diamine.

於本發明之樹脂材料之某一特定態樣中,於上述化合物中,構成醯亞胺骨架之氮原子僅鍵結於構成脂肪族骨架之碳原子。In a specific aspect of the resin material of the present invention, in the above-mentioned compound, the nitrogen atom constituting the imine skeleton is only bonded to the carbon atom constituting the aliphatic skeleton.

於本發明之樹脂材料之某一特定態樣中,上述化合物係具有順丁烯二醯亞胺骨架之化合物。In a specific aspect of the resin material of the present invention, the above-mentioned compound is a compound having a maleimide skeleton.

於本發明之樹脂材料之某一特定態樣中,上述化合物係於兩末端具有順丁烯二醯亞胺骨架之化合物。In a specific aspect of the resin material of the present invention, the above-mentioned compound is a compound having a maleimide skeleton at both ends.

於本發明之樹脂材料之某一特定態樣中,上述化合物之重量平均分子量為1000以上且100000以下。In a specific aspect of the resin material of the present invention, the weight average molecular weight of the above-mentioned compound is 1,000 or more and 100,000 or less.

於本發明之樹脂材料之某一特定態樣中,上述化合物具有下述式(Y)所表示之結構,且上述式(X)所表示之結構之重複數與下述式(Y)所表示之結構之重複數的合計100%中,上述式(X)所表示之結構之重複數為10%以上且90%以下。 [化2]

Figure 02_image005
In a specific aspect of the resin material of the present invention, the compound has a structure represented by the following formula (Y), and the number of repetitions of the structure represented by the above formula (X) is the same as that represented by the following formula (Y) In 100% of the total number of repetitions of the structure, the number of repetitions of the structure represented by the above formula (X) is 10% or more and 90% or less. [化2]
Figure 02_image005

上述式(Y)中,R1表示四價有機基,R2表示有機基,m表示1以上之數。In the above formula (Y), R1 represents a tetravalent organic group, R2 represents an organic group, and m represents a number of 1 or more.

於本發明之樹脂材料之某一特定態樣中,上述式(Y)中,R1不具有源自鄰苯二甲醯亞胺之骨架,上述式(Y)中,R2不具有源自鄰苯二甲醯亞胺之骨架。In a specific aspect of the resin material of the present invention, in the above formula (Y), R1 does not have a skeleton derived from phthalimide, and in the above formula (Y), R2 does not have a skeleton derived from phthalimide The skeleton of dimethyl imide.

於本發明之樹脂材料之某一特定態樣中,上述式(Y)中,R1不具有芳香族骨架。In a specific aspect of the resin material of the present invention, in the above formula (Y), R1 does not have an aromatic skeleton.

於本發明之樹脂材料之某一特定態樣中,包含熱硬化性化合物與硬化劑,且上述熱硬化性化合物包含環氧化合物。In a specific aspect of the resin material of the present invention, a thermosetting compound and a curing agent are included, and the thermosetting compound includes an epoxy compound.

於本發明之樹脂材料之某一特定態樣中,上述硬化劑包含活性酯化合物。In a specific aspect of the resin material of the present invention, the curing agent includes an active ester compound.

於本發明之樹脂材料之某一特定態樣中,上述環氧化合物與上述活性酯化合物中之至少一者具有醯亞胺骨架或醯胺骨架。In a specific aspect of the resin material of the present invention, at least one of the epoxy compound and the active ester compound has an amide skeleton or an amide skeleton.

於本發明之樹脂材料之某一特定態樣中,上述熱硬化性化合物包含自由基硬化性化合物。In a specific aspect of the resin material of the present invention, the thermosetting compound includes a radical curing compound.

於本發明之樹脂材料之某一特定態樣中,上述樹脂材料包含無機填充材。In a specific aspect of the resin material of the present invention, the above-mentioned resin material includes an inorganic filler.

於本發明之樹脂材料之某一特定態樣中,樹脂材料中之除溶劑以外之成分100重量%中,上述無機填充材之含量為50重量%以上。In a specific aspect of the resin material of the present invention, in 100% by weight of the components other than the solvent in the resin material, the content of the above-mentioned inorganic filler is 50% by weight or more.

於本發明之樹脂材料之某一特定態樣中,上述無機填充材為二氧化矽。In a specific aspect of the resin material of the present invention, the above-mentioned inorganic filler is silica.

於本發明之樹脂材料之某一特定態樣中,上述樹脂材料為樹脂膜。In a specific aspect of the resin material of the present invention, the above-mentioned resin material is a resin film.

本發明之樹脂材料於多層印刷佈線板中,可適宜地用於形成絕緣層。The resin material of the present invention can be suitably used for forming an insulating layer in a multilayer printed wiring board.

根據本發明之較廣之態樣,提供一種多層印刷佈線板,其具備:電路基板、配置於上述電路基板之表面上之複數層絕緣層、及配置於複數層上述絕緣層間之金屬層,且複數層上述絕緣層中之至少1層為上述樹脂材料之硬化物。 [發明之效果]According to a broader aspect of the present invention, there is provided a multilayer printed wiring board comprising: a circuit substrate, a plurality of insulating layers arranged on the surface of the circuit substrate, and a metal layer arranged between the plurality of insulating layers, and At least one of the plurality of insulating layers is a cured product of the resin material. [Effects of Invention]

本發明之樹脂材料包含具有式(X)所表示之結構之化合物、及硬化促進劑。關於本發明之樹脂材料,由於具備上述構成,故1)可降低硬化物之介電損耗因數,2)可提高硬化物之熱尺寸穩定性,3)藉由除膠渣處理可有效地去除膠渣,4)可抑制蝕刻後之表面粗度之不均,5)可提高鍍覆剝離強度。The resin material of the present invention includes a compound having a structure represented by formula (X) and a hardening accelerator. Regarding the resin material of the present invention, due to the above-mentioned structure, 1) the dielectric loss factor of the hardened material can be reduced, 2) the thermal dimensional stability of the hardened material can be improved, and 3) the glue can be effectively removed by desmear treatment Dross, 4) can suppress uneven surface roughness after etching, and 5) can improve plating peel strength.

以下,詳細地說明本發明。Hereinafter, the present invention will be explained in detail.

本發明之樹脂材料包含具有下述式(X)所表示之結構之化合物(以下,有時記載為化合物X)、及硬化促進劑。The resin material of the present invention includes a compound having a structure represented by the following formula (X) (hereinafter, sometimes referred to as compound X), and a curing accelerator.

[化3]

Figure 02_image007
[化3]
Figure 02_image007

上述式(X)中,R表示有機基,n表示1以上之數。In the above formula (X), R represents an organic group, and n represents a number of 1 or more.

關於本發明之樹脂材料,由於具備上述構成,故1)可降低硬化物之介電損耗因數,2)可提高硬化物之熱尺寸穩定性,3)藉由除膠渣處理可有效地去除膠渣,4)可抑制蝕刻後之表面粗度之不均,5)可提高鍍覆剝離強度。本發明之樹脂材料可發揮出1)-5)之全部效果。Regarding the resin material of the present invention, due to the above-mentioned structure, 1) the dielectric loss factor of the hardened material can be reduced, 2) the thermal dimensional stability of the hardened material can be improved, and 3) the glue can be effectively removed by desmear treatment Dross, 4) can suppress uneven surface roughness after etching, and 5) can improve plating peel strength. The resin material of the present invention can exert all the effects of 1)-5).

又,關於本發明之樹脂材料,由於具備上述構成,故可提高樹脂材料之相溶性。又,關於本發明之樹脂材料,由於具備上述構成,故可提高樹脂材料之硬化物之伸長率特性。In addition, since the resin material of the present invention has the above-mentioned structure, the compatibility of the resin material can be improved. Furthermore, since the resin material of the present invention has the above-mentioned structure, the elongation characteristic of the cured resin material can be improved.

本發明之樹脂材料可為樹脂組合物,亦可為樹脂膜。上述樹脂組合物具有流動性。上述樹脂組合物可為糊狀。上述糊狀包含液狀。就處理性優異之方面而言,本發明之樹脂材料較佳為樹脂膜。The resin material of the present invention may be a resin composition or a resin film. The above-mentioned resin composition has fluidity. The above-mentioned resin composition may be in a paste form. The above-mentioned paste state includes a liquid state. In terms of excellent handling properties, the resin material of the present invention is preferably a resin film.

本發明之樹脂材料較佳為熱硬化性樹脂材料。於上述樹脂材料為樹脂膜之情形時,該樹脂膜較佳為熱硬化性樹脂膜。The resin material of the present invention is preferably a thermosetting resin material. When the above-mentioned resin material is a resin film, the resin film is preferably a thermosetting resin film.

以下,說明本發明之樹脂材料中所使用之各成分之詳細情況、及本發明之樹脂材料之用途等。Hereinafter, the details of each component used in the resin material of the present invention and the use of the resin material of the present invention will be described.

[化合物X] 本發明之樹脂材料包含具有下述式(X)所表示之結構之化合物X。下述式(X)所表示之結構具有源自3,3',4,4'-聯苯四羧酸二酐之骨架。下述式(X)所表示之結構具有醯亞胺骨架。因此,化合物X具有醯亞胺骨架。化合物X較佳為熱硬化性化合物。化合物X可僅使用一種,亦可併用兩種以上。以下,具體地說明可更進一步有效地發揮出本發明之效果之較佳之結構等。[Compound X] The resin material of the present invention includes a compound X having a structure represented by the following formula (X). The structure represented by the following formula (X) has a skeleton derived from 3,3',4,4'-biphenyltetracarboxylic dianhydride. The structure represented by the following formula (X) has an imine skeleton. Therefore, compound X has an imine skeleton. The compound X is preferably a thermosetting compound. Compound X may use only one type, or two or more types may be used in combination. Hereinafter, the preferable structure etc. which can exhibit the effect of this invention more effectively are demonstrated concretely.

[化4]

Figure 02_image009
[化4]
Figure 02_image009

上述式(X)中,R表示有機基,n表示1以上之數。In the above formula (X), R represents an organic group, and n represents a number of 1 or more.

上述式(X)中,n較佳為表示2以上之數,且較佳為表示20以下之數,更佳為表示10以下之數。In the above formula (X), n preferably represents a number of 2 or more, and preferably represents a number of 20 or less, and more preferably represents a number of 10 or less.

上述式(X)中,作為R,可列舉具有脂肪族環之基等。作為上述具有脂肪族環之基,可列舉具有環己烷環之基、及形成源自二聚二胺之骨架之一部分之基等。In the above formula (X), as R, a group having an aliphatic ring and the like can be mentioned. Examples of the group having an aliphatic ring include a group having a cyclohexane ring, a group forming a part of the skeleton derived from dimer diamine, and the like.

就更進一步有效地發揮出本發明之效果之觀點而言,上述式(X)中,R較佳為具有脂肪族環之基,更佳為具有環己烷環之基。From the viewpoint of further effectively exerting the effects of the present invention, in the above formula (X), R is preferably a group having an aliphatic ring, and more preferably a group having a cyclohexane ring.

再者,於本說明書中,所謂環己烷環係指6個碳原子以環狀鍵結而成之六員環之脂環式結構。構成上述環己烷環之碳原子可與碳數1以上且20以下之烴基鍵結,亦可與碳數1以上且4以下之烴基鍵結。又,上述化合物X可具有三環癸烷環、降𦯉烷環、作為構成金剛烷骨架等之環之環己烷環。又,上述化合物X可具有複數個環己烷環經由烷基等烴基連接之結構。Furthermore, in this specification, the so-called cyclohexane ring refers to an alicyclic structure of a six-membered ring formed by cyclic bonding of six carbon atoms. The carbon atoms constituting the cyclohexane ring may be bonded to a hydrocarbon group having a carbon number of 1 or more and 20 or less, or may be bonded to a hydrocarbon group having a carbon number of 1 or more and 4 or less. In addition, the above-mentioned compound X may have a tricyclodecane ring, a nordecane ring, and a cyclohexane ring as a ring constituting the adamantane skeleton and the like. In addition, the aforementioned compound X may have a structure in which a plurality of cyclohexane rings are connected via a hydrocarbon group such as an alkyl group.

於上述式(X)中之R係具有環己烷環之基之情形時,較佳為構成該環己烷環之碳原子與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子直接鍵結、或經由3個以下之原子鍵結。該原子較佳為碳原子。In the case where R in the above formula (X) has a cyclohexane ring group, it is preferable that the carbon atoms constituting the cyclohexane ring be derived from 3,3',4,4'-biphenyltetracarboxylic acid The nitrogen atoms in the skeleton of the acid dianhydride are directly bonded or bonded via 3 or less atoms. The atom is preferably a carbon atom.

於上述式(X)中之R具有上述三環癸烷環作為環己烷環之情形時,較佳為構成該三環癸烷環之碳原子與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子直接鍵結、或經由2個以下之原子鍵結。該原子較佳為碳原子。When R in the above formula (X) has the above tricyclodecane ring as the cyclohexane ring, it is preferable that the carbon atoms constituting the tricyclodecane ring are derived from 3,3',4,4' -The nitrogen atom in the skeleton of biphenyltetracarboxylic dianhydride is directly bonded or bonded via 2 or less atoms. The atom is preferably a carbon atom.

就進而更有效地發揮出本發明之效果之觀點而言,上述式(X)中,R較佳為下述式(A1)、下述式(A2)、下述式(A3)、下述式(A4)、下述式(A5)、下述式(A6)、或下述式(A7)所表示之基。From the viewpoint of further effectively exerting the effects of the present invention, in the above formula (X), R is preferably the following formula (A1), the following formula (A2), the following formula (A3), and the following A group represented by the formula (A4), the following formula (A5), the following formula (A6), or the following formula (A7).

[化5]

Figure 02_image011
[化5]
Figure 02_image011

上述式(A1)中,R1~R10分別表示氫原子、或碳數1以上且20以下之烴基。上述式(A1)中,R1~R10分別較佳為氫原子、或甲基。上述式(A1)中,R1~R10分別可相同亦可不同。In the above formula (A1), R1 to R10 each represent a hydrogen atom or a hydrocarbon group having 1 or more and 20 or less carbon atoms. In the above formula (A1), R1 to R10 are each preferably a hydrogen atom or a methyl group. In the above formula (A1), R1 to R10 may be the same or different.

上述式(A1)所表示之基具有環己烷環。The group represented by the above formula (A1) has a cyclohexane ring.

具有上述式(A1)所表示之基之上述式(X)所表示之結構中,構成環己烷環之碳原子與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子經由1個碳原子鍵結。In the structure represented by the above formula (X) having the group represented by the above formula (A1), the carbon atoms constituting the cyclohexane ring are derived from 3,3',4,4'-biphenyltetracarboxylic dianhydride The nitrogen atom in the skeleton is bonded via a carbon atom.

[化6]

Figure 02_image013
[化6]
Figure 02_image013

上述式(A2)中,R1~R10分別表示氫原子、或碳數1以上且20以下之烴基。上述式(A2)中,R1~R10分別較佳為氫原子、或甲基。上述式(A2)中,R1~R10分別可相同亦可不同。In the above formula (A2), R1 to R10 each represent a hydrogen atom or a hydrocarbon group having 1 or more and 20 or less carbon atoms. In the above formula (A2), R1 to R10 are each preferably a hydrogen atom or a methyl group. In the above formula (A2), R1 to R10 may be the same or different.

上述式(A2)所表示之基具有環己烷環。The group represented by the above formula (A2) has a cyclohexane ring.

具有上述式(A2)所表示之基之上述式(X)所表示之結構中,構成環己烷環之第1碳原子(左側之碳原子)與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子直接鍵結。具有上述式(A2)所表示之基之上述式(X)所表示之結構中,構成環己烷環之第2碳原子(右側之碳原子)與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子經由1個碳原子鍵結。In the structure represented by the above formula (X) having the group represented by the above formula (A2), the first carbon atom (the carbon atom on the left side) constituting the cyclohexane ring is derived from 3,3',4,4' -The nitrogen atom in the skeleton of biphenyltetracarboxylic dianhydride is directly bonded. In the structure represented by the above formula (X) having the group represented by the above formula (A2), the second carbon atom (the carbon atom on the right side) constituting the cyclohexane ring is derived from 3,3',4,4' -The nitrogen atom in the skeleton of biphenyltetracarboxylic dianhydride is bonded via one carbon atom.

[化7]

Figure 02_image015
[化7]
Figure 02_image015

上述式(A3)中,R1~R10分別表示氫原子、或碳數1以上且20以下之烴基。上述式(A3)中,R1~R10分別較佳為氫原子、或甲基。上述式(A3)中,R1~R10分別可相同亦可不同。In the above formula (A3), R1 to R10 each represent a hydrogen atom or a hydrocarbon group having 1 or more and 20 or less carbon atoms. In the above formula (A3), R1 to R10 are each preferably a hydrogen atom or a methyl group. In the above formula (A3), R1 to R10 may be the same or different.

上述式(A3)所表示之基具有環己烷環。The group represented by the above formula (A3) has a cyclohexane ring.

具有上述式(A3)所表示之基之上述式(X)所表示之結構中,構成環己烷環之第1碳原子(左側之碳原子)與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子經由2個碳原子而鍵結。於具有上述式(A3)所表示之基之上述式(X)所表示之結構中,構成環己烷環之第2碳原子(右側之碳原子)與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子直接鍵結。In the structure represented by the above formula (X) having the group represented by the above formula (A3), the first carbon atom (the carbon atom on the left side) constituting the cyclohexane ring is derived from 3,3',4,4' -The nitrogen atom in the skeleton of biphenyltetracarboxylic dianhydride is bonded via 2 carbon atoms. In the structure represented by the above formula (X) having the group represented by the above formula (A3), the second carbon atom (the carbon atom on the right side) constituting the cyclohexane ring is derived from 3,3',4,4 The nitrogen atom in the skeleton of'-biphenyltetracarboxylic dianhydride is directly bonded.

[化8]

Figure 02_image017
[化8]
Figure 02_image017

上述式(A4)中,R1~R18分別表示氫原子、或碳數1以上且20以下之烴基,Q表示任意基。上述式(A4)中,R1~R18分別較佳為氫原子、或甲基。上述式(A4)中,Q較佳為碳數1以上且4以下之烴基、或具有芳香族環之基,更佳為伸烷基,進而較佳為亞甲基。上述式(A4)中,於Q為具有芳香族環之基之情形時,Q亦可為芳香族環彼此經由酯鍵鍵結而成之基。上述式(A4)中,R1~R18分別可相同亦可不同。In the above formula (A4), R1 to R18 each represent a hydrogen atom or a hydrocarbon group having 1 or more and 20 or less carbon atoms, and Q represents an arbitrary group. In the above formula (A4), R1 to R18 are each preferably a hydrogen atom or a methyl group. In the above formula (A4), Q is preferably a hydrocarbon group having a carbon number of 1 or more and 4 or less, or a group having an aromatic ring, more preferably an alkylene group, and still more preferably a methylene group. In the above formula (A4), when Q is a group having an aromatic ring, Q may also be a group in which aromatic rings are bonded to each other via an ester bond. In the above formula (A4), R1 to R18 may be the same or different.

上述式(A4)所表示之基具有環己烷環。The group represented by the above formula (A4) has a cyclohexane ring.

具有上述式(A4)所表示之基之上述式(X)所表示之結構中,構成環己烷環之第1碳原子(左側之碳原子)與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子直接鍵結。具有上述式(A4)所表示之基之上述式(X)所表示之結構中,構成環己烷環之第2碳原子(右側之碳原子)與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子直接鍵結。In the structure represented by the above formula (X) having the group represented by the above formula (A4), the first carbon atom (the carbon atom on the left side) constituting the cyclohexane ring is derived from 3,3',4,4' -The nitrogen atom in the skeleton of biphenyltetracarboxylic dianhydride is directly bonded. In the structure represented by the above formula (X) having the group represented by the above formula (A4), the second carbon atom (the carbon atom on the right side) constituting the cyclohexane ring is derived from 3,3',4,4' -The nitrogen atom in the skeleton of biphenyltetracarboxylic dianhydride is directly bonded.

[化9]

Figure 02_image019
[化9]
Figure 02_image019

上述式(A5)中,R1~R8分別表示氫原子、或碳數1以上且20以下之烴基。上述式(A5)中,R1~R8分別較佳為氫原子、或甲基。上述式(A5)中,R1~R8分別可相同亦可不同。In the above formula (A5), R1 to R8 each represent a hydrogen atom or a hydrocarbon group having 1 or more and 20 or less carbon atoms. In the above formula (A5), R1 to R8 are each preferably a hydrogen atom or a methyl group. In the above formula (A5), R1 to R8 may be the same or different.

再者,上述式(X)中,R可為下述式(A5-1)所表示之基。Furthermore, in the above formula (X), R may be a group represented by the following formula (A5-1).

[化10]

Figure 02_image021
[化10]
Figure 02_image021

上述式(A5-1)中,R1~R10分別表示氫原子、或碳數1以上且20以下之烴基,R1~R10中之2個表示與構成醯亞胺骨架之氮原子鍵結之基。上述式(A5-1)中,R9及R10表示與構成醯亞胺骨架之氮原子鍵結之基之情形係相當於上述式(A5)。In the above formula (A5-1), R1 to R10 each represent a hydrogen atom or a hydrocarbon group having a carbon number of 1 or more and 20 or less, and two of R1 to R10 represent a group that is bonded to the nitrogen atom constituting the imine skeleton. In the above formula (A5-1), the case where R9 and R10 represent a group bonded to the nitrogen atom constituting the imidine skeleton corresponds to the above formula (A5).

上述式(A5)及上述式(A5-1)所表示之基具有降𦯉烷環。The group represented by the above formula (A5) and the above formula (A5-1) has a nordane ring.

具有上述式(A5)及上述式(A5-1)所表示之基之上述式(X)所表示之結構中,構成環己烷環之碳原子與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子經由1個碳原子鍵結。In the structure represented by the above formula (X) having the group represented by the above formula (A5) and the above formula (A5-1), the carbon atoms constituting the cyclohexane ring are derived from 3,3',4,4' -The nitrogen atom in the skeleton of biphenyltetracarboxylic dianhydride is bonded via one carbon atom.

[化11]

Figure 02_image023
[化11]
Figure 02_image023

上述式(A6)中,R1~R12分別表示氫原子、或碳數1以上且20以下之烴基。上述式(A6)中,R1~R12分別較佳為氫原子、或甲基。上述式(A6)中,R1~R12分別可相同亦可不同。In the above formula (A6), R1 to R12 each represent a hydrogen atom or a hydrocarbon group having 1 or more and 20 or less carbon atoms. In the above formula (A6), R1 to R12 are each preferably a hydrogen atom or a methyl group. In the above formula (A6), R1 to R12 may be the same or different.

再者,上述式(X)中,R可為下述式(A6-1)所表示之基。Furthermore, in the above formula (X), R may be a group represented by the following formula (A6-1).

[化12]

Figure 02_image025
[化12]
Figure 02_image025

上述式(A6-1)中,R1~R14分別表示氫原子、或碳數1以上且20以下之烴基,R1~R14中之2個表示與構成醯亞胺骨架之氮原子鍵結之基。於上述式(A6-1)中,R13及R14表示與構成醯亞胺骨架之氮原子鍵結之基之情形相當於上述式(A6)。In the above formula (A6-1), R1 to R14 each represent a hydrogen atom or a hydrocarbon group having a carbon number of 1 or more and 20 or less, and two of R1 to R14 represent a group that is bonded to the nitrogen atom constituting the imine skeleton. In the above formula (A6-1), the case where R13 and R14 represent a group bonded to the nitrogen atom constituting the amide skeleton corresponds to the above formula (A6).

上述式(A6)及上述式(A6-1)所表示之基具有三環癸烷環。The group represented by the above formula (A6) and the above formula (A6-1) has a tricyclodecane ring.

具有上述式(A6)及上述式(A6-1)所表示之基之上述式(X)所表示之結構中,構成環己烷環之第1碳原子(左側之碳原子)與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子經由1個碳原子鍵結。具有上述式(A6)及上述式(A6-1)所表示之基之上述式(X)所表示之結構中,構成環己烷環之第2碳原子(右側之碳原子)與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子經由2個碳原子鍵結。具有上述式(A6)及上述式(A6-1)所表示之基之上述式(X)所表示之結構中,構成三環癸烷環之第2碳原子(右側之碳原子)與源自3,3',4,4'-聯苯四羧酸二酐之骨架中之氮原子經由1個碳原子鍵結。In the structure represented by the above formula (X) having the group represented by the above formula (A6) and the above formula (A6-1), the first carbon atom (the carbon atom on the left side) constituting the cyclohexane ring is derived from 3 The nitrogen atom in the skeleton of ,3',4,4'-biphenyltetracarboxylic dianhydride is bonded via 1 carbon atom. In the structure represented by the above formula (X) having the group represented by the above formula (A6) and the above formula (A6-1), the second carbon atom (the carbon atom on the right side) constituting the cyclohexane ring is derived from 3 The nitrogen atom in the skeleton of ,3',4,4'-biphenyltetracarboxylic dianhydride is bonded via 2 carbon atoms. In the structure represented by the above formula (X) having the group represented by the above formula (A6) and the above formula (A6-1), the second carbon atom (the carbon atom on the right side) constituting the tricyclodecane ring is derived from The nitrogen atom in the skeleton of 3,3',4,4'-biphenyltetracarboxylic dianhydride is bonded via 1 carbon atom.

[化13]

Figure 02_image027
[化13]
Figure 02_image027

上述式(A7)所表示之基具有環己烷環。上述式(A7)所表示之基為源自二聚二胺之基。於合成具有上述式(A7)所表示之基之化合物X時,使用二聚二胺作為原料。然而,由於二聚二胺為天然物(混合物),故難以將該二聚二胺之結構定義為一種結構。因此,於所獲得之化合物X中,可存在除上述式(A7)所表示之基以外,還例如具有上述式(A7)中具有雙鍵之基之化合物。The group represented by the above formula (A7) has a cyclohexane ring. The group represented by the above formula (A7) is a group derived from dimer diamine. When synthesizing the compound X having the group represented by the above formula (A7), dimer diamine is used as a raw material. However, since dimer diamine is a natural product (mixture), it is difficult to define the structure of the dimer diamine as a structure. Therefore, in the obtained compound X, in addition to the group represented by the above formula (A7), there may be, for example, a compound having a group having a double bond in the above formula (A7).

就更進一步有效地發揮出本發明之效果之觀點而言,關於上述化合物X,上述式(X)中,R較佳為具有源自二聚二胺之骨架之部分骨架,亦較佳為具有源自二聚二胺以外之二胺化合物之骨架之部分骨架。From the viewpoint of further effectively exerting the effects of the present invention, with regard to the above compound X, in the above formula (X), R preferably has a partial skeleton derived from a dimer diamine skeleton, and preferably has Part of the skeleton derived from the skeleton of a diamine compound other than dimer diamine.

就更進一步有效地發揮出本發明之效果之觀點而言,較佳為上述式(X)中,構成醯亞胺骨架之氮原子僅鍵結於構成脂肪族骨架之碳原子。就更進一步有效地發揮出本發明之效果之觀點而言,較佳為於上述化合物X中,構成醯亞胺骨架之氮原子僅鍵結於構成脂肪族骨架之碳原子。From the viewpoint of further effectively exerting the effects of the present invention, it is preferable that in the above formula (X), the nitrogen atom constituting the imine skeleton is only bonded to the carbon atom constituting the aliphatic skeleton. From the viewpoint of further effectively exerting the effects of the present invention, it is preferable that in the above compound X, the nitrogen atom constituting the imine skeleton is only bonded to the carbon atom constituting the aliphatic skeleton.

就更進一步有效地發揮出本發明之效果之觀點而言,關於上述化合物X,上述式(X)中,作為R,較佳為具有上述式(A5)、上述式(A6)或上述(A7)所表示之基,更佳為具有上述式(A6)或上述(A7)所表示之基。From the viewpoint of further effectively exerting the effects of the present invention, regarding the compound X, in the formula (X), as R, it is preferable to have the formula (A5), the formula (A6), or the formula (A7). The group represented by) more preferably has the group represented by the above formula (A6) or the above (A7).

就更進一步提高除膠渣性之觀點及更進一步提高熱尺寸穩定性之觀點而言,關於上述化合物X,上述式(X)中,作為R,較佳為具有上述式(A5)或上述式(A6)所表示之基。其原因在於,具有上述式(A5)或上述式(A6)所表示之基之化合物X與具有上述式(A7)所表示之基之化合物X相比,醯亞胺骨架間之距離較短,故能夠提高分子內之醯亞胺骨架之濃度。From the viewpoint of further improving the desmear property and the viewpoint of further improving the thermal dimensional stability, with respect to the above-mentioned compound X, in the above-mentioned formula (X), R preferably has the above-mentioned formula (A5) or the above-mentioned formula (A6) represents the base. The reason is that the compound X having the group represented by the above formula (A5) or the above formula (A6) has a shorter distance between the imine skeletons than the compound X having the group represented by the above formula (A7), Therefore, it can increase the concentration of the imine skeleton in the molecule.

上述化合物X可具有2種上述式(X)所表示之結構,可具有2種以上上述式(X)所表示之結構,亦可具有3種以上上述式(X)所表示之結構。The compound X may have two structures represented by the above formula (X), two or more structures represented by the above formula (X), or three or more structures represented by the above formula (X).

例如,上述化合物X可具有下述式(X1)所表示之結構作為上述式(X)所表示之結構。下述式(X1)所表示之結構之2個骨架(左側之骨架A與右側之骨架B)可無規地配置(例如…A/B/A/B…等)。For example, the aforementioned compound X may have a structure represented by the following formula (X1) as the structure represented by the aforementioned formula (X). The two skeletons of the structure represented by the following formula (X1) (the skeleton A on the left and the skeleton B on the right) can be randomly arranged (for example...A/B/A/B... etc.).

[化14]

Figure 02_image029
[化14]
Figure 02_image029

上述式(X1)中,R1及R2分別表示有機基,p、q分別表示1以上之數。In the above formula (X1), R1 and R2 each represent an organic group, and p and q each represent a number of 1 or more.

上述式(X1)中,p及q分別較佳為表示2以上之數,且較佳為表示10以下之數,更佳為表示7以下之數。In the above formula (X1), p and q each preferably represent a number of 2 or more, and preferably represent a number of 10 or less, and more preferably represent a number of 7 or less.

上述式(X1)中,R1與R2之組合較佳為以下之第1組合,更佳為以下之第2組合。In the above formula (X1), the combination of R1 and R2 is preferably the following first combination, and more preferably the following second combination.

第1組合:R1為上述式(A1)、上述式(A2)、上述式(A3)、上述式(A4)、上述式(A5)、或上述式(A6),R2為上述式(A7)。The first combination: R1 is the above-mentioned formula (A1), the above-mentioned formula (A2), the above-mentioned formula (A3), the above-mentioned formula (A4), the above-mentioned formula (A5), or the above-mentioned formula (A6), and R2 is the above-mentioned formula (A7) .

第2組合:R1為上述式(A6),R2為上述式(A7)。The second combination: R1 is the above-mentioned formula (A6), and R2 is the above-mentioned formula (A7).

於上述式(X1)為上述第1組合之情形時,上述式(X1)中,p較佳為表示1以上之數,更佳為表示3以上之數,且較佳為表示18以下之數,更佳為表示12以下之數。於上述式(X1)為上述第1組合之情形時,上述式(X1)中,q更佳為表示1以上之數,且較佳為表示10以下之數,更佳為表示8以下之數。When the above formula (X1) is the above first combination, in the above formula (X1), p preferably represents a number of 1 or more, more preferably represents a number of 3 or more, and preferably represents a number of 18 or less , More preferably represents a number of 12 or less. When the above formula (X1) is the above first combination, in the above formula (X1), q more preferably represents a number of 1 or more, and preferably represents a number of 10 or less, and more preferably represents a number of 8 or less .

於上述式(X1)為上述第2組合之情形時,上述式(X1)中,p較佳為表示2以上之數,更佳為表示3以上之數,且較佳為表示18以下之數,更佳為表示12以下之數。於上述式(X1)為上述第2組合之情形時,上述式(X1)中,q較佳為表示1以上之數,更佳為表示2以上之數,且較佳為表示10以下之數,更佳為表示8以下之數。When the above formula (X1) is the above second combination, in the above formula (X1), p preferably represents a number of 2 or more, more preferably represents a number of 3 or more, and preferably represents a number of 18 or less , More preferably represents a number of 12 or less. When the above formula (X1) is the above second combination, in the above formula (X1), q preferably represents a number of 1 or more, more preferably represents a number of 2 or more, and preferably represents a number of 10 or less , More preferably represents a number of 8 or less.

以下,對可形成具有上述式(A1)、(A2)、(A3)、(A4)、(A5)、(A6)及(A7)所表示之基之上述式(X)所表示之骨架的化合物進而進行說明。進而,對可形成具有不同於上述式(A1)、(A2)、(A3)、(A4)、(A5)、(A6)及(A7)所表示之基之基之上述式(X)所表示之骨架的化合物等進而進行說明。Hereinafter, for the skeleton represented by the above formula (X) which can form the base represented by the above formula (A1), (A2), (A3), (A4), (A5), (A6) and (A7) The compound is further explained. Furthermore, it is possible to form a base different from the base represented by the above formula (A1), (A2), (A3), (A4), (A5), (A6), and (A7) as expressed by the above formula (X) The compound etc. of the skeleton shown are further explained.

上述式(X)所表示之結構例如可藉由使二胺化合物與3,3',4,4'-聯苯四羧酸二酐反應而獲得。The structure represented by the above formula (X) can be obtained, for example, by reacting a diamine compound with 3,3',4,4'-biphenyltetracarboxylic dianhydride.

上述二胺化合物可為脂肪族二胺化合物,亦可為不同於脂肪族二胺化合物之二胺化合物。The above-mentioned diamine compound may be an aliphatic diamine compound or a diamine compound different from the aliphatic diamine compound.

作為脂肪族二胺化合物,可列舉:二聚二胺、三環癸烷二胺、1,3-雙(胺基甲基)環己烷、1,4-雙(胺基甲基)環己烷、雙(胺基甲基)降𦯉烷、3(4),8(9)-雙(胺基甲基)三環[5.2.1.02,6]癸烷、1,3-環己烷二胺、1,4-環己烷二胺、異佛爾酮二胺、4,4'-亞甲基雙(環己基胺)、及4,4'-亞甲基雙(2-甲基環己基胺)等。脂肪族二胺化合物可僅使用一種,亦可併用兩種以上。Examples of aliphatic diamine compounds include dimer diamine, tricyclodecane diamine, 1,3-bis(aminomethyl)cyclohexane, and 1,4-bis(aminomethyl)cyclohexane Alkane, bis(aminomethyl)nor ethane, 3(4),8(9)-bis(aminomethyl)tricyclo[5.2.1.02,6]decane, 1,3-cyclohexanedi Amine, 1,4-cyclohexanediamine, isophoronediamine, 4,4'-methylenebis(cyclohexylamine), and 4,4'-methylenebis(2-methyl ring Hexylamine) and so on. Only one type of aliphatic diamine compound may be used, or two or more types may be used in combination.

作為上述二聚二胺,例如可列舉:VERSAMINE 551(商品名、BASF Japan公司製造之3,4-雙(1-胺基庚基)-6-己基-5-(1-辛烯基)環己烯)、VERSAMINE 552(商品名、Cognis Japan公司製造之VERSAMINE 551之氫化物)、以及PRIAMINE1075、及PRIAMINE1074(商品名、均為Croda Japan公司製造)等。Examples of the dimer diamine include: VERSAMINE 551 (trade name, 3,4-bis(1-aminoheptyl)-6-hexyl-5-(1-octenyl) ring manufactured by BASF Japan Hexene), VERSAMINE 552 (trade name, hydride of VERSAMINE 551 manufactured by Cognis Japan), PRIAMINE 1075, and PRIAMINE 1074 (trade name, all manufactured by Croda Japan), etc.

就更進一步降低硬化物之介電損耗因數之觀點而言,上述二聚二胺較佳為Croda Japan公司製造之「PRIAMINE1075」之二聚二胺。From the viewpoint of further reducing the dielectric loss factor of the hardened material, the above-mentioned dimer diamine is preferably the dimer diamine of "PRIAMINE 1075" manufactured by Croda Japan.

就更進一步提高除膠渣性之觀點而言,上述二聚二胺較佳為Croda Japan公司製造之「PRIAMINE1074」之二聚二胺。From the viewpoint of further improving the scum removal performance, the above-mentioned dimer diamine is preferably the dimer diamine of "PRIAMINE 1074" manufactured by Croda Japan.

就更進一步有效地發揮出本發明之效果之觀點而言,上述脂肪族二胺化合物較佳為碳數為36個以下之化合物。From the viewpoint of further effectively exerting the effects of the present invention, the aliphatic diamine compound is preferably a compound having 36 carbon atoms or less.

就更進一步有效地發揮出本發明之效果之觀點而言,上述脂肪族二胺化合物較佳為二聚二胺、三環癸烷二胺、雙(胺基甲基)降𦯉烷、異佛爾酮二胺或4,4'-亞甲基雙(2-甲基環己基胺)。就更進一步有效地發揮出本發明之效果之觀點而言,上述脂肪族二胺化合物更佳為二聚二胺、三環癸烷二胺、或雙(胺基甲基)降𦯉烷。於上述脂肪族二胺化合物為雙(胺基甲基)降𦯉烷之情形時,上述化合物X例如具有上述式(A5)所表示之基。於上述脂肪族二胺化合物為三環癸烷二胺之情形時,上述化合物X例如具有上述式(A6)所表示之基。於上述脂肪族二胺化合物為二聚二胺之情形時,上述化合物X例如具有上述式(A7)所表示之基。From the viewpoint of further effectively exerting the effects of the present invention, the above-mentioned aliphatic diamine compound is preferably dimer diamine, tricyclodecane diamine, bis(aminomethyl)nordecane, isophor Ketone diamine or 4,4'-methylene bis(2-methylcyclohexylamine). From the viewpoint of further effectively exerting the effects of the present invention, the aliphatic diamine compound is more preferably dimer diamine, tricyclodecane diamine, or bis(aminomethyl)norcarne. When the aliphatic diamine compound is bis(aminomethyl)norethane, the compound X has, for example, a group represented by the formula (A5). When the aliphatic diamine compound is tricyclodecane diamine, the compound X has, for example, a group represented by the formula (A6). When the aliphatic diamine compound is a dimer diamine, the compound X has, for example, a group represented by the formula (A7).

作為不同於上述脂肪族二胺化合物之二胺化合物,可列舉:1,1-雙(4-胺基苯基)環己烷、2,7-二胺基茀、4,4'-伸乙基二苯胺、4,4'-亞甲基雙(2,6-二乙基苯胺)、4,4'-亞甲基雙(2-乙基-6-甲基苯胺)、1,4-二胺基丁烷、1,10-二胺基癸烷、1,12-二胺基十二烷、1,7-二胺基庚烷、1,6-二胺基己烷、1,5-二胺基戊烷、1,8-二胺基辛烷、1,3-二胺基丙烷、1,11-二胺基十一烷、2-甲基-1,5-二胺基戊烷、2,2-雙(3-胺基-4-羥基苯基)丙烷、及2,2-雙(3-胺基-4-羥基苯基)六氟丙烷等。不同於上述脂肪族二胺化合物之二胺化合物可僅使用一種,亦可併用兩種以上。Examples of diamine compounds that are different from the above-mentioned aliphatic diamine compounds include: 1,1-bis(4-aminophenyl)cyclohexane, 2,7-diaminopyridine, and 4,4'-ethylene ethylene Diphenylamine, 4,4'-methylenebis(2,6-diethylaniline), 4,4'-methylenebis(2-ethyl-6-methylaniline), 1,4- Diaminobutane, 1,10-diaminodecane, 1,12-diaminododecane, 1,7-diaminoheptane, 1,6-diaminohexane, 1,5 -Diaminopentane, 1,8-diaminooctane, 1,3-diaminopropane, 1,11-diaminoundecane, 2-methyl-1,5-diaminopentan Alkane, 2,2-bis(3-amino-4-hydroxyphenyl)propane, and 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane, etc. The diamine compound different from the above-mentioned aliphatic diamine compound may use only 1 type, and may use 2 or more types together.

不同於上述脂肪族二胺化合物之二胺化合物亦可為具有酚性羥基之芳香族二胺。於該情形時,可更進一步縮小線膨脹係數。The diamine compound different from the above-mentioned aliphatic diamine compound may also be an aromatic diamine having a phenolic hydroxyl group. In this case, the coefficient of linear expansion can be further reduced.

上述化合物X可具有源自二胺化合物與3,3',4,4'-聯苯四羧酸二酐以外之酸二酐之反應物之骨架。The above compound X may have a skeleton derived from a reactant of a diamine compound and an acid dianhydride other than 3,3',4,4'-biphenyltetracarboxylic dianhydride.

作為上述3,3',4,4'-聯苯四羧酸二酐以外之酸二酐,可列舉四羧酸二酐等。作為該四羧酸二酐,例如可列舉:均苯四甲酸二酐、3,3',4,4'-二苯甲酮四羧酸二酐、3,3',4,4'-二苯基碸四羧酸二酐、1,4,5,8-萘四羧酸二酐、2,3,6,7-萘四羧酸二酐、3,3',4,4'-聯苯醚四羧酸二酐、3,3',4,4'-二甲基二苯基矽烷四羧酸二酐、3,3',4,4'-四苯基矽烷四羧酸二酐、1,2,3,4-呋喃四羧酸二酐、4,4'-雙(3,4-二羧基苯氧基)二苯硫醚二酐、4,4'-雙(3,4-二羧基苯氧基)二苯基碸二酐、4,4'-雙(3,4-二羧基苯氧基)二苯基丙烷二酐、3,3',4,4'-全氟亞異丙基二鄰苯二甲酸二酐、雙(鄰苯二甲酸)苯基氧化膦二酐、對伸苯基-雙(三苯基鄰苯二甲酸)二酐、間伸苯基-雙(三苯基鄰苯二甲酸)二酐、雙(三苯基鄰苯二甲酸)-4,4'-二苯醚二酐、雙(三苯基鄰苯二甲酸)-4,4'-二苯甲烷二酐、4,4'-(六氟亞異丙基)二鄰苯二甲酸酐、雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐、及5-(2,5-二氧雜四氫呋喃基)-3-甲基-3-環己烯-1,2-二羧酸酐等。Examples of acid dianhydrides other than the aforementioned 3,3',4,4'-biphenyltetracarboxylic dianhydride include tetracarboxylic dianhydride and the like. Examples of the tetracarboxylic dianhydride include pyromellitic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 3,3',4,4'-di Phenyl tetracarboxylic dianhydride, 1,4,5,8-naphthalene tetracarboxylic dianhydride, 2,3,6,7-naphthalene tetracarboxylic dianhydride, 3,3',4,4'-linked Phenyl ether tetracarboxylic dianhydride, 3,3',4,4'-dimethyldiphenylsilane tetracarboxylic dianhydride, 3,3',4,4'-tetraphenylsilane tetracarboxylic dianhydride , 1,2,3,4-furantetracarboxylic dianhydride, 4,4'-bis(3,4-dicarboxyphenoxy)diphenyl sulfide dianhydride, 4,4'-bis(3,4 -Dicarboxyphenoxy)diphenyl dianhydride, 4,4'-bis(3,4-dicarboxyphenoxy)diphenylpropane dianhydride, 3,3',4,4'-perfluoro Isopropylidene diphthalic dianhydride, bis(phthalic acid) phenyl phosphine oxide dianhydride, p-phenylene-bis(triphenylphthalic acid) dianhydride, m-phenylene-bis (Triphenylphthalic acid) dianhydride, bis(triphenylphthalic acid)-4,4'-diphenyl ether dianhydride, bis(triphenylphthalic acid)-4,4'- Diphenylmethane dianhydride, 4,4'-(hexafluoroisopropylidene) diphthalic anhydride, bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic acid Anhydride, and 5-(2,5-dioxatetrahydrofuranyl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride, etc.

就降低硬化物之介電損耗因數之觀點及提高硬化物之熱尺寸穩定性之觀點而言,上述化合物X較佳為具有順丁烯二醯亞胺骨架。From the viewpoint of reducing the dielectric loss factor of the cured product and the viewpoint of improving the thermal dimensional stability of the cured product, the above-mentioned compound X preferably has a maleimide skeleton.

上述化合物X中之順丁烯二醯亞胺骨架之數量較佳為2個以上,更佳為3個以上,且較佳為10個以下,更佳為5個以下。若上述順丁烯二醯亞胺骨架之數量為上述下限以上及上述上限以下,則可更進一步有效地發揮出本發明之效果。The number of maleimide skeletons in the compound X is preferably 2 or more, more preferably 3 or more, and preferably 10 or less, more preferably 5 or less. If the number of the maleimide skeleton is more than the aforementioned lower limit and less than the aforementioned upper limit, the effects of the present invention can be more effectively exhibited.

就更進一步降低硬化物之介電損耗因數之觀點及更進一步提高硬化物之熱尺寸穩定性之觀點而言,上述化合物X較佳為於兩末端具有順丁烯二醯亞胺骨架。From the viewpoint of further reducing the dielectric loss factor of the cured product and the viewpoint of further improving the thermal dimensional stability of the cured product, the compound X preferably has a maleimide skeleton at both ends.

上述化合物X可具有支鏈結構,亦可不具有。The aforementioned compound X may or may not have a branched structure.

就更進一步有效地發揮出本發明之效果之觀點而言,上述化合物X較佳為具有下述式(Y)所表示之結構。 [化15]

Figure 02_image031
From the viewpoint of further effectively exerting the effects of the present invention, the compound X preferably has a structure represented by the following formula (Y). [化15]
Figure 02_image031

上述式(Y)中,R1表示四價有機基,R2表示有機基,m表示1以上之數。In the above formula (Y), R1 represents a tetravalent organic group, R2 represents an organic group, and m represents a number of 1 or more.

上述式(Y)中,m較佳為表示2以上之數,且較佳為表示20以下之數,更佳為表示10以下之數。In the above formula (Y), m preferably represents a number of 2 or more, and preferably represents a number of 20 or less, and more preferably represents a number of 10 or less.

上述式(Y)中,作為R1,可列舉不具有聯苯骨架之骨架,例如可列舉源自上述3,3',4,4'-聯苯四羧酸二酐以外之酸二酐之骨架。上述式(Y)中,作為R2,可列舉與上述之上述式(X)中之R之有機基同樣之有機基。In the above formula (Y), as R1, a skeleton having no biphenyl skeleton can be mentioned, for example, skeletons derived from acid dianhydrides other than the above 3,3',4,4'-biphenyltetracarboxylic dianhydride can be mentioned . In the above-mentioned formula (Y), as R2, the same organic group as the organic group of R in the above-mentioned formula (X) can be exemplified.

就更進一步有效地發揮出本發明之效果之觀點而言,上述式(Y)中,R1較佳為不具有源自鄰苯二甲醯亞胺之骨架。就更進一步有效地發揮出本發明之效果之觀點而言,上述式(Y)中,R1較佳為不具有芳香族骨架。From the viewpoint of further effectively exerting the effects of the present invention, in the above formula (Y), R1 preferably does not have a skeleton derived from phthalimide. From the viewpoint of further effectively exerting the effects of the present invention, in the above formula (Y), R1 preferably does not have an aromatic skeleton.

就更進一步有效地發揮出本發明之效果之觀點而言,上述式(Y)中,R2較佳為不具有源自鄰苯二甲醯亞胺之骨架。From the viewpoint of further effectively exerting the effects of the present invention, in the above formula (Y), R2 preferably does not have a skeleton derived from phthalimide.

於上述化合物X中,上述式(X)所表示之結構之重複數(n)與上述式(Y)所表示之結構之重複數(m)的合計100%中,上述式(X)所表示之結構之重複數(n)較佳為10%以上,更佳為20%以上,且較佳為90%以下,更佳為75%以下,進而較佳為60%以下。於該情形時,可更進一步有效地發揮出本發明之效果。In the above compound X, 100% of the total of the repetition number (n) of the structure represented by the above formula (X) and the repetition number (m) of the structure represented by the above formula (Y) is represented by the above formula (X) The number of repetitions (n) of the structure is preferably 10% or more, more preferably 20% or more, and preferably 90% or less, more preferably 75% or less, and more preferably 60% or less. In this case, the effect of the present invention can be more effectively exhibited.

上述化合物X可具有偶數個醯亞胺骨架,可具有奇數個醯亞胺骨架,亦可為具有偶數個醯亞胺骨架之化合物與具有奇數個醯亞胺骨架之化合物之混合物。The above compound X may have an even number of amide skeletons, an odd number of amide skeletons, or a mixture of a compound having an even number of amide skeletons and a compound having an odd number of amide skeletons.

上述化合物X例如能夠以如下方式合成。使二胺化合物、二聚二胺、及3,3',4,4'-聯苯四羧酸二酐反應而獲得第1反應物。使所獲得之第1反應物與順丁烯二酸酐反應。The above-mentioned compound X can be synthesized in the following manner, for example. The diamine compound, dimer diamine, and 3,3',4,4'-biphenyltetracarboxylic dianhydride are reacted to obtain a first reactant. The obtained first reactant is reacted with maleic anhydride.

又,於末端具有二聚二胺骨架之化合物X例如能夠以如下方式合成。使二胺化合物與3,3',4,4'-聯苯四羧酸二酐反應,獲得於兩末端具有酸酐結構之第1反應物。使所獲得之第1化合物與二聚二胺反應而獲得第2反應物。使所獲得之第2反應物與順丁烯二酸酐反應。In addition, the compound X having a dimer diamine skeleton at the terminal can be synthesized as follows, for example. The diamine compound is reacted with 3,3',4,4'-biphenyltetracarboxylic dianhydride to obtain a first reactant having an acid anhydride structure at both ends. The obtained first compound is reacted with dimer diamine to obtain a second reactant. The obtained second reactant is reacted with maleic anhydride.

上述化合物X之重量平均分子量較佳為1000以上,更佳為3100以上,進而較佳為4500以上,且較佳為100000以下,更佳為70000以下,進而較佳為25000以下,尤佳為18000以下,最佳為15000以下。若上述重量平均分子量為上述下限以上,則可更進一步縮小線膨脹係數。又,若上述重量平均分子量超過25000,則與上述重量平均分子量為25000以下之情形相比,存在樹脂材料之熔融黏度增高,且對於凹凸表面之嵌埋性降低之情形。The weight average molecular weight of the compound X is preferably 1,000 or more, more preferably 3100 or more, still more preferably 4,500 or more, and preferably 100,000 or less, more preferably 70,000 or less, still more preferably 25,000 or less, particularly preferably 18,000 Below, the best is 15000 or less. If the weight average molecular weight is greater than or equal to the lower limit, the coefficient of linear expansion can be further reduced. In addition, if the weight average molecular weight exceeds 25,000, the melt viscosity of the resin material may increase compared with the case where the weight average molecular weight is 25,000 or less, and the embedding property on the uneven surface may decrease.

上述化合物X之重量平均分子量表示藉由凝膠滲透層析法(GPC)測定之以聚苯乙烯換算計之重量平均分子量。The weight average molecular weight of the above compound X represents the weight average molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC).

就更進一步提高硬化物之熱尺寸穩定性之觀點、更進一步提高絕緣層與金屬層之密接性之觀點而言,上述化合物X之玻璃轉移溫度較佳為70℃以上,更佳為85℃以上。From the viewpoint of further improving the thermal dimensional stability of the cured product and the viewpoint of further improving the adhesion between the insulating layer and the metal layer, the glass transition temperature of the compound X is preferably 70°C or higher, more preferably 85°C or higher .

上述玻璃轉移溫度可使用示差掃描熱量測定裝置(例如TA Instruments公司製造之「Q2000」),以升溫速度3℃/min於氮氣氣氛下自-30℃加熱至260℃,並根據反向熱流之反曲點求出。The above-mentioned glass transition temperature can be measured using a differential scanning calorimetry device (such as "Q2000" manufactured by TA Instruments), heated from -30°C to 260°C in a nitrogen atmosphere at a heating rate of 3°C/min, and according to the reverse of the reverse heat flow Find the curve point.

上述樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,上述化合物X之含量較佳為3重量%以上,更佳為5重量%以上,進而較佳為10重量%以上,且較佳為80重量%以下,更佳為70重量%以下,進而較佳為50重量%以下。若上述化合物X之含量為上述下限以上,則可更進一步降低硬化物之介電損耗因數,更進一步提高除膠渣性。若上述化合物X之含量為上述上限以下,則可降低樹脂材料之除膠渣處理後之表面粗度,可提高對於基板等之凹凸之嵌埋性。In 100% by weight of the components other than inorganic fillers and solvents in the resin material, the content of the compound X is preferably 3% by weight or more, more preferably 5% by weight or more, and still more preferably 10% by weight or more, and It is preferably 80% by weight or less, more preferably 70% by weight or less, and still more preferably 50% by weight or less. If the content of the above-mentioned compound X is above the above-mentioned lower limit, the dielectric loss factor of the hardened product can be further reduced, and the scum removal performance can be further improved. If the content of the above-mentioned compound X is below the above-mentioned upper limit, the surface roughness of the resin material after desmearing treatment can be reduced, and the embedding property for the unevenness of the substrate and the like can be improved.

[熱硬化性化合物] 上述樹脂材料較佳為包含不具有下述式(100)所表示之結構之熱硬化性化合物。上述熱硬化性化合物係不同於上述化合物X之熱硬化性化合物。上述熱硬化性化合物可僅使用一種,亦可併用兩種以上。[Thermosetting compound] The above-mentioned resin material preferably contains a thermosetting compound that does not have a structure represented by the following formula (100). The above-mentioned thermosetting compound is a thermosetting compound different from the above-mentioned compound X. Only one kind of the above-mentioned thermosetting compound may be used, or two or more kinds may be used in combination.

[化16]

Figure 02_image033
[化16]
Figure 02_image033

上述式(100)中,R表示有機基,n表示1以上之數。In the above formula (100), R represents an organic group, and n represents a number of 1 or more.

作為上述熱硬化性化合物,可列舉:苯氧基化合物、氧雜環丁烷化合物、順丁烯二醯亞胺化合物、環氧化合物、氰酸酯化合物、乙烯系化合物、聚芳酯化合物、鄰苯二甲酸二烯丙酯化合物、環硫化物化合物、(甲基)丙烯酸化合物、胺基化合物、不飽和聚酯化合物、聚胺基甲酸酯化合物、及聚矽氧化合物等。Examples of the above-mentioned thermosetting compounds include: phenoxy compounds, oxetane compounds, maleimide compounds, epoxy compounds, cyanate compounds, vinyl compounds, polyarylate compounds, ortho Diallyl phthalate compounds, episulfide compounds, (meth)acrylic compounds, amino compounds, unsaturated polyester compounds, polyurethane compounds, polysiloxane compounds, etc.

上述熱硬化性化合物較佳為順丁烯二醯亞胺化合物、環氧化合物、或乙烯系化合物,更佳為包含環氧化合物、或乙烯系化合物,進而較佳為包含環氧化合物。上述乙烯系化合物較佳為包含苯乙烯化合物或丙烯酸酯化合物,較佳為包含苯乙烯化合物。於該情形時,可更進一步降低硬化物之介電損耗因數,且更進一步提高硬化物之熱尺寸穩定性。The thermosetting compound is preferably a maleimide compound, an epoxy compound, or a vinyl compound, more preferably contains an epoxy compound or a vinyl compound, and still more preferably contains an epoxy compound. The above-mentioned vinyl compound preferably contains a styrene compound or an acrylate compound, and preferably contains a styrene compound. In this case, the dielectric loss factor of the cured product can be further reduced, and the thermal dimensional stability of the cured product can be further improved.

<順丁烯二醯亞胺化合物> 上述順丁烯二醯亞胺化合物係不具有上述式(100)所表示之結構之順丁烯二醯亞胺化合物。上述順丁烯二醯亞胺化合物係不同於上述化合物X之順丁烯二醯亞胺化合物。上述順丁烯二醯亞胺化合物可為檸康醯亞胺化合物。上述順丁烯二醯亞胺化合物可僅使用一種,亦可併用兩種以上。<Maleimide compound> The maleimide compound is a maleimide compound that does not have the structure represented by the above formula (100). The maleimide compound is different from the maleimide compound X described above. The maleimide compound mentioned above may be a citraconimine compound. Only one type of the maleimide compound may be used, or two or more types may be used in combination.

上述順丁烯二醯亞胺化合物可為雙順丁烯二醯亞胺化合物。The above maleimide compound may be a bismaleimide compound.

作為上述順丁烯二醯亞胺化合物,可列舉N-苯基順丁烯二醯亞胺及N-烷基雙順丁烯二醯亞胺等。As said maleimide compound, N-phenyl maleimide, N-alkyl bismaleimide, etc. are mentioned.

上述順丁烯二醯亞胺化合物可具有源自二聚二胺以外之二胺化合物或三聚物三胺以外之三胺化合物之骨架,亦可不具有。The maleimide compound may have a skeleton derived from a diamine compound other than dimer diamine or a triamine compound other than trimer triamine, or not.

上述順丁烯二醯亞胺化合物較佳為具有芳香族骨架。The maleimide compound preferably has an aromatic skeleton.

上述順丁烯二醯亞胺化合物中,較佳為順丁烯二醯亞胺骨架中之氮原子與芳香族環鍵結。Among the above maleimide compounds, it is preferable that the nitrogen atom in the maleimide skeleton is bonded to the aromatic ring.

就更進一步提高硬化物之熱尺寸穩定性之觀點而言,樹脂材料中之除溶劑以外之成分100重量%中,上述順丁烯二醯亞胺化合物之含量較佳為0.5重量%以上,更佳為1重量%以上,且較佳為15重量%以下,更佳為10重量%以下。From the viewpoint of further improving the thermal dimensional stability of the cured product, the content of the maleimide compound is preferably 0.5% by weight or more in 100% by weight of the components other than the solvent in the resin material. It is preferably 1% by weight or more, preferably 15% by weight or less, and more preferably 10% by weight or less.

上述樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,上述順丁烯二醯亞胺化合物之含量較佳為2.5重量%以上,更佳為5重量%以上,且較佳為50重量%以下,更佳為35重量%以下,進而較佳為20重量%以下。若上述順丁烯二醯亞胺化合物之含量為上述下限以上及上述上限以下,則可更進一步提高硬化物之熱尺寸穩定性。The content of the maleimide compound in 100% by weight of the components other than the inorganic filler and solvent in the resin material is preferably 2.5% by weight or more, more preferably 5% by weight or more, and more preferably 50% by weight or less, more preferably 35% by weight or less, and still more preferably 20% by weight or less. If the content of the maleimide compound is above the above lower limit and below the above upper limit, the thermal dimensional stability of the cured product can be further improved.

就有效地發揮出本發明之效果之觀點而言,上述順丁烯二醯亞胺化合物之分子量較佳為500以上,更佳為1000以上,且較佳為未達30000,更佳為未達20000。From the viewpoint of effectively exerting the effects of the present invention, the molecular weight of the maleimide compound is preferably 500 or more, more preferably 1,000 or more, and preferably less than 30,000, more preferably less than 20000.

關於上述順丁烯二醯亞胺化合物之分子量,於上述順丁烯二醯亞胺化合物不為聚合物之情形時,及可特定上述順丁烯二醯亞胺化合物之結構式之情形時,係指可根據該結構式算出之分子量。又,關於上述順丁烯二醯亞胺化合物之分子量,於上述順丁烯二醯亞胺化合物為聚合物之情形時,表示藉由凝膠滲透層析法(GPC)測定之以聚苯乙烯換算計之重量平均分子量。Regarding the molecular weight of the maleimide compound, when the maleimide compound is not a polymer, and when the structural formula of the maleimide compound can be specified, Refers to the molecular weight that can be calculated according to the structural formula. In addition, regarding the molecular weight of the maleimide compound, when the maleimide compound is a polymer, it means that it is measured by gel permeation chromatography (GPC) with polystyrene Converted weight average molecular weight.

作為上述順丁烯二醯亞胺化合物之市售品,例如可列舉:大和化成工業公司製造之「BMI4000」及「BMI5100」、日本化藥公司製造之「MIR-3000」、以及Designer Molecules Inc.製造之「BMI-3000」及「BMI-689」等。Examples of commercially available products of the maleimide compound include: "BMI4000" and "BMI5100" manufactured by Daiwa Chemical Industry Co., Ltd., "MIR-3000" manufactured by Nippon Kayaku Co., Ltd., and Designer Molecules Inc. Manufactured "BMI-3000" and "BMI-689", etc.

<環氧化合物> 作為上述環氧化合物,可使用先前公知之環氧化合物。上述環氧化合物係具有至少1個環氧基之有機化合物。上述環氧化合物可僅使用一種,亦可併用兩種以上。<Epoxy compound> As the above-mentioned epoxy compound, a conventionally known epoxy compound can be used. The epoxy compound is an organic compound having at least one epoxy group. As for the said epoxy compound, only 1 type may be used, and 2 or more types may be used together.

作為上述環氧化合物,可列舉:雙酚A型環氧化合物、雙酚F型環氧化合物、雙酚S型環氧化合物、苯酚酚醛清漆型環氧化合物、聯苯型環氧化合物、聯苯酚醛清漆型環氧化合物、聯苯酚型環氧化合物、萘型環氧化合物、茀型環氧化合物、苯酚芳烷基型環氧化合物、萘酚芳烷基型環氧化合物、二環戊二烯型環氧化合物、蒽型環氧化合物、具有金剛烷骨架之環氧化合物、具有三環癸烷骨架之環氧化合物、萘醚型環氧化合物、及骨架上具有三𠯤核之環氧化合物等。Examples of the epoxy compound include: bisphenol A type epoxy compound, bisphenol F type epoxy compound, bisphenol S type epoxy compound, phenol novolak type epoxy compound, biphenyl type epoxy compound, and biphenol Aldehyde type epoxy compound, biphenol type epoxy compound, naphthalene type epoxy compound, sulphur type epoxy compound, phenol aralkyl type epoxy compound, naphthol aralkyl type epoxy compound, dicyclopentadiene Type epoxy compounds, anthracene type epoxy compounds, epoxy compounds with adamantane skeleton, epoxy compounds with tricyclodecane skeleton, naphthyl ether type epoxy compounds, and epoxy compounds with three nuclei on the skeleton, etc. .

上述環氧化合物可為縮水甘油醚化合物。上述所謂縮水甘油醚化合物係具有至少1個縮水甘油醚基之化合物。The above-mentioned epoxy compound may be a glycidyl ether compound. The above-mentioned so-called glycidyl ether compound is a compound having at least one glycidyl ether group.

上述環氧化合物可為具有氟原子之環氧化合物。The above-mentioned epoxy compound may be an epoxy compound having a fluorine atom.

就更進一步降低硬化物之介電損耗因數,且提高熱尺寸穩定性及阻燃性之觀點而言,上述環氧化合物較佳為包含具有芳香族骨架之環氧化合物,較佳為包含具有萘骨架或苯基骨架之環氧化合物,更佳為具有芳香族骨架之環氧化合物。From the viewpoint of further reducing the dielectric loss factor of the cured product and improving the thermal dimensional stability and flame retardancy, the above-mentioned epoxy compound preferably includes an epoxy compound having an aromatic skeleton, and preferably includes a naphthalene The epoxy compound having a skeleton or a phenyl skeleton is more preferably an epoxy compound having an aromatic skeleton.

就更進一步降低介電損耗因數,且使硬化物之線膨脹係數(CTE)變得良好之觀點而言,上述環氧化合物較佳為包含25℃下液狀之環氧化合物與25℃下固形之環氧化合物。From the viewpoint of further reducing the dielectric loss factor and improving the coefficient of linear expansion (CTE) of the cured product, the epoxy compound preferably includes a liquid epoxy compound at 25°C and a solid form at 25°C. The epoxy compound.

上述25℃下液狀之環氧化合物於25℃下之黏度較佳為1000 mPa・s以下,更佳為500 mPa・s以下。The viscosity of the liquid epoxy compound at 25°C at 25°C is preferably 1000 mPa·s or less, more preferably 500 mPa·s or less.

上述環氧化合物之黏度例如可使用動態黏彈性測定裝置(Reologica Instruments公司製造之「VAR-100」)等而加以測定。The viscosity of the epoxy compound can be measured using, for example, a dynamic viscoelasticity measuring device ("VAR-100" manufactured by Reologica Instruments).

上述環氧化合物之分子量更佳為1000以下。於該情形時,樹脂材料中之除溶劑以外之成分100重量%中,即便無機填充材之含量為50重量%以上,亦可於絕緣層之形成時獲得流動性較高之樹脂材料。因此,於將樹脂材料之未硬化物或B階化物層壓於電路基板上之情形時,可使無機填充材均勻地存在。The molecular weight of the above-mentioned epoxy compound is more preferably 1000 or less. In this case, in 100% by weight of the components other than the solvent in the resin material, even if the content of the inorganic filler is 50% by weight or more, a resin material with higher fluidity can be obtained when the insulating layer is formed. Therefore, when the uncured resin material or the B-staged compound is laminated on the circuit board, the inorganic filler can be uniformly present.

關於上述環氧化合物之分子量,於上述環氧化合物不為聚合物之情形時、及可特定出上述環氧化合物之結構式之情形時,係指可根據該結構式算出之分子量。又,於上述環氧化合物為聚合物之情形時,係指重量平均分子量。Regarding the molecular weight of the epoxy compound, when the epoxy compound is not a polymer, and when the structural formula of the epoxy compound can be specified, it means the molecular weight that can be calculated from the structural formula. In addition, when the above-mentioned epoxy compound is a polymer, it means a weight average molecular weight.

就更進一步提高硬化物之熱尺寸穩定性之觀點而言,樹脂材料中之除溶劑以外之成分100重量%中,上述環氧化合物之含量較佳為4重量%以上,更佳為7重量%以上,且較佳為15重量%以下,更佳為12重量%以下。From the viewpoint of further improving the thermal dimensional stability of the cured product, the content of the epoxy compound in 100% by weight of the components other than the solvent in the resin material is preferably 4% by weight or more, more preferably 7% by weight Above, 15% by weight or less is preferable, and 12% by weight or less is more preferable.

上述樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,上述環氧化合物之含量較佳為15重量%以上,更佳為25重量%以上,且較佳為50重量%以下,更佳為40重量%以下。若上述環氧化合物之含量為上述下限以上及上述上限以下,則可更進一步提高硬化物之熱尺寸穩定性。The content of the epoxy compound is preferably 15% by weight or more, more preferably 25% by weight or more, and preferably 50% by weight or less in 100% by weight of the components other than inorganic fillers and solvents in the resin material. More preferably, it is 40% by weight or less. If the content of the epoxy compound is above the above lower limit and below the above upper limit, the thermal dimensional stability of the cured product can be further improved.

上述環氧化合物之含量相對於上述化合物X與下述硬化劑之合計含量的重量比(上述環氧化合物之含量/上述化合物X與下述硬化劑之合計含量)較佳為0.2以上,更佳為0.3以上。上述環氧化合物之含量相對於上述化合物X與下述硬化劑之合計含量的重量比(上述環氧化合物之含量/上述化合物X與下述硬化劑之合計含量)較佳為1以下,更佳為0.8以下。若上述重量比為上述下限以上及上述上限以下,則可更進一步降低介電損耗因數,更進一步提高熱尺寸穩定性。The weight ratio of the content of the epoxy compound to the total content of the compound X and the following curing agent (the content of the epoxy compound/the total content of the compound X and the curing agent) is preferably 0.2 or more, more preferably Is 0.3 or more. The weight ratio of the content of the epoxy compound to the total content of the compound X and the following curing agent (the content of the epoxy compound/the total content of the compound X and the curing agent) is preferably 1 or less, more preferably It is 0.8 or less. If the weight ratio is greater than or equal to the aforementioned lower limit and less than or equal to the aforementioned upper limit, the dielectric loss factor can be further reduced, and the thermal dimensional stability can be further improved.

<乙烯系化合物> 作為上述乙烯系化合物,可使用先前公知之乙烯系化合物。上述乙烯系化合物係具有至少1個乙烯基之有機化合物。上述乙烯系化合物可僅使用一種,亦可併用兩種以上。<Ethylene compounds> As the above-mentioned ethylene-based compound, a conventionally known ethylene-based compound can be used. The above-mentioned vinyl compound is an organic compound having at least one vinyl group. Only one type of the above-mentioned vinyl compound may be used, or two or more types may be used in combination.

作為上述乙烯系化合物,可列舉:苯乙烯化合物、丙烯酸酯化合物、及二乙烯系化合物等。作為上述二乙烯系化合物,可列舉二乙烯基苄醚化合物。上述乙烯系化合物可為具有脂肪族骨架之二乙烯系化合物,亦可為二乙烯醚化合物。As said vinyl compound, a styrene compound, an acrylate compound, a divinyl compound, etc. are mentioned. As said divinyl compound, a divinyl benzyl ether compound is mentioned. The above-mentioned vinyl compound may be a divinyl compound having an aliphatic skeleton, or may be a divinyl ether compound.

作為上述苯乙烯化合物,可列舉末端苯乙烯改性苯醚化合物。上述苯乙烯化合物可僅使用一種,亦可併用兩種以上。Examples of the above-mentioned styrene compounds include terminal styrene-modified phenylene ether compounds. Only one kind of the above-mentioned styrene compound may be used, or two or more kinds may be used in combination.

作為苯乙烯化合物之市售品,例如可列舉三菱瓦斯化學公司製造之「OPE-2St」等。As a commercially available product of the styrene compound, for example, "OPE-2St" manufactured by Mitsubishi Gas Chemical Co., Ltd. can be cited.

再者,上述苯乙烯化合物及上述丙烯酸酯化合物等乙烯系化合物亦相當於自由基硬化性化合物。因此,上述熱硬化性化合物較佳為包含自由基硬化性化合物。上述樹脂材料較佳為包含自由基硬化性化合物。In addition, vinyl compounds such as the above-mentioned styrene compound and the above-mentioned acrylate compound also correspond to a radical curable compound. Therefore, it is preferable that the said thermosetting compound contains a radical-hardening compound. The above-mentioned resin material preferably contains a radical curable compound.

上述樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,上述乙烯系化合物之含量較佳為5重量%以上,更佳為10重量%以上,進而較佳為20重量%以上,且較佳為80重量%以下,更佳為70重量%以下。若上述乙烯系化合物之含量為上述下限以上及上述上限以下,則可更進一步提高硬化物之熱尺寸穩定性。In 100% by weight of the components other than inorganic fillers and solvents in the resin material, the content of the ethylene compound is preferably 5% by weight or more, more preferably 10% by weight or more, and still more preferably 20% by weight or more, And it is preferably 80% by weight or less, more preferably 70% by weight or less. If the content of the ethylene-based compound is more than the aforementioned lower limit and less than the aforementioned upper limit, the thermal dimensional stability of the cured product can be further improved.

[無機填充材] 上述樹脂材料較佳為包含無機填充材。藉由使用上述無機填充材,可更進一步降低硬化物之介電損耗因數。又,藉由使用上述無機填充材,由硬化物之熱引起之尺寸變化更進一步減小。上述無機填充材可僅使用一種,亦可併用兩種以上。[Inorganic Filler] The above-mentioned resin material preferably contains an inorganic filler. By using the above-mentioned inorganic filler, the dielectric loss factor of the hardened material can be further reduced. In addition, by using the above-mentioned inorganic filler, the dimensional change caused by the heat of the hardened product is further reduced. Only one kind of the above-mentioned inorganic filler may be used, or two or more kinds may be used in combination.

作為上述無機填充材,可列舉:二氧化矽、滑石、黏土、雲母、水滑石、氧化鋁、氧化鎂、氫氧化鋁、金剛石、氮化鋁、及氮化硼等。Examples of the above-mentioned inorganic fillers include silica, talc, clay, mica, hydrotalcite, alumina, magnesia, aluminum hydroxide, diamond, aluminum nitride, and boron nitride.

上述無機填充材較佳為氧化鋁及氮化硼等導熱率為10 W/mK以上之無機填充材。於該情形時,可提高散熱性。The above-mentioned inorganic filler is preferably an inorganic filler having a thermal conductivity of 10 W/mK or more, such as alumina and boron nitride. In this case, heat dissipation can be improved.

就減小硬化物表面之表面粗糙度,更進一步提高硬化物與金屬層之接著強度,且於硬化物之表面形成更微細之佈線,且利用硬化物賦予良好之絕緣可靠性之觀點而言,上述無機填充材較佳為二氧化矽或氧化鋁,更佳為二氧化矽,進而較佳為熔融二氧化矽。上述二氧化矽可為中空二氧化矽。藉由使用二氧化矽,硬化物之熱膨脹率更進一步降低,又,硬化物之介電損耗因數更進一步降低。又,藉由使用二氧化矽,硬化物表面之表面粗糙度有效地減小,硬化物與金屬層之接著強度有效地增高。二氧化矽之形狀較佳為球狀。From the viewpoint of reducing the surface roughness of the hardened object, further improving the bonding strength between the hardened object and the metal layer, and forming finer wiring on the surface of the hardened object, and using the hardened object to provide good insulation reliability, The above-mentioned inorganic filler is preferably silica or alumina, more preferably silica, and still more preferably fused silica. The above-mentioned silicon dioxide may be hollow silicon dioxide. By using silicon dioxide, the thermal expansion rate of the hardened material is further reduced, and the dielectric loss factor of the hardened material is further reduced. In addition, by using silicon dioxide, the surface roughness of the hardened object surface is effectively reduced, and the bonding strength between the hardened object and the metal layer is effectively increased. The shape of silicon dioxide is preferably spherical.

就不取決於硬化環境而進行樹脂之硬化,有效地提高硬化物之玻璃轉移溫度,有效地減小硬化物之熱線膨脹係數之觀點而言,上述無機填充材較佳為球狀二氧化矽。From the viewpoint of curing the resin without depending on the curing environment, effectively increasing the glass transition temperature of the cured product, and effectively reducing the thermal linear expansion coefficient of the cured product, the above-mentioned inorganic filler is preferably spherical silica.

就提高導熱率,且提高絕緣性之觀點而言,上述無機填充材較佳為氧化鋁或氮化硼。尤其是由於氮化硼具有各向異性,故可更進一步縮小熱線膨脹係數。From the viewpoint of improving thermal conductivity and improving insulation, the above-mentioned inorganic filler is preferably alumina or boron nitride. In particular, because boron nitride has anisotropy, it can further reduce the thermal linear expansion coefficient.

上述無機填充材之平均粒徑較佳為50 nm以上,更佳為100 nm以上,進而較佳為500 nm以上,且較佳為5 μm以下,更佳為3 μm以下,進而較佳為1 μm以下。若上述無機填充材之平均粒徑為上述下限以上及上述上限以下,則可減小蝕刻後之表面粗度,且提高鍍覆剝離強度,又,可更進一步提高絕緣層與金屬層之密接性。The average particle diameter of the above-mentioned inorganic filler is preferably 50 nm or more, more preferably 100 nm or more, still more preferably 500 nm or more, and preferably 5 μm or less, more preferably 3 μm or less, and still more preferably 1 Below μm. If the average particle size of the above-mentioned inorganic filler is above the above lower limit and below the above upper limit, the surface roughness after etching can be reduced, the peeling strength of plating can be improved, and the adhesion between the insulating layer and the metal layer can be further improved .

作為上述無機填充材之平均粒徑,採用成為50%之中值徑(d50)之值。上述平均粒徑能夠使用雷射繞射散射方式之粒度分佈測定裝置進行測定。再者,於無機填充材為凝聚粒子之情形時,無機填充材之平均粒徑係指一次粒徑。As the average particle diameter of the above-mentioned inorganic filler, a value that becomes 50% of the median diameter (d50) is adopted. The above-mentioned average particle size can be measured using a particle size distribution measuring device of a laser diffraction scattering method. Furthermore, when the inorganic filler is agglomerated particles, the average particle diameter of the inorganic filler refers to the primary particle diameter.

上述無機填充材較佳為球狀,更佳為球狀二氧化矽。於該情形時,硬化物表面之表面粗糙度有效地減小,進而硬化物與金屬層之接著強度有效地增高。於上述無機填充材為球狀之情形時,上述無機填充材之縱橫比較佳為2以下,更佳為1.5以下。The above-mentioned inorganic filler is preferably spherical, more preferably spherical silica. In this case, the surface roughness of the surface of the hardened object is effectively reduced, and the bonding strength between the hardened object and the metal layer is effectively increased. When the inorganic filler is spherical, the aspect ratio of the inorganic filler is preferably 2 or less, more preferably 1.5 or less.

上述無機填充材較佳為經表面處理,更佳為利用偶合劑之表面處理物,進而較佳為利用矽烷偶合劑之表面處理物。藉由上述無機填充材經表面處理,粗化硬化物表面之表面粗糙度更進一步減小,硬化物與金屬層之接著強度變得更高。又,藉由上述無機填充材經表面處理,可於硬化物之表面形成更微細之佈線,且可對硬化物賦予更良好之佈線間絕緣可靠性及層間絕緣可靠性。The above-mentioned inorganic filler is preferably surface-treated, more preferably a surface-treated product using a coupling agent, and still more preferably a surface-treated product using a silane coupling agent. With the above-mentioned inorganic filler undergoing surface treatment, the surface roughness of the surface of the roughened hardened product is further reduced, and the bonding strength between the hardened product and the metal layer becomes higher. In addition, by surface treatment of the above-mentioned inorganic filler, finer wiring can be formed on the surface of the hardened product, and better inter-wiring insulation reliability and interlayer insulation reliability can be imparted to the hardened product.

作為上述偶合劑,可列舉矽烷偶合劑、鈦偶合劑及鋁偶合劑等。作為上述矽烷偶合劑,可列舉:甲基丙烯酸矽烷、丙烯酸矽烷、胺基矽烷、咪唑矽烷、乙烯基矽烷、及環氧矽烷等。As said coupling agent, a silane coupling agent, a titanium coupling agent, an aluminum coupling agent, etc. are mentioned. Examples of the silane coupling agent include methacrylic silane, acrylic silane, amino silane, imidazole silane, vinyl silane, epoxy silane, and the like.

樹脂材料中之除溶劑以外之成分100重量%中,上述無機填充材之含量較佳為50重量%以上,更佳為60重量%以上,進而較佳為65重量%以上,尤佳為68重量%以上,且較佳為90重量%以下,更佳為85重量%以下,進而較佳為80重量%以下,尤佳為75重量%以下。若上述無機填充材之含量為上述下限以上,則介電損耗因數有效地降低。若上述無機填充材之含量為上述上限以下,則可提高熱尺寸穩定性,有效地抑制硬化物之翹曲。若上述無機填充材之含量為上述下限以上及上述上限以下,則可更進一步縮小硬化物表面之表面粗糙度,且可於硬化物之表面形成更微細之佈線。進而,若為該無機填充材之含量,則亦能夠降低硬化物之熱膨脹率,同時使膠渣去除性變得良好。In 100% by weight of the components other than the solvent in the resin material, the content of the above-mentioned inorganic filler is preferably 50% by weight or more, more preferably 60% by weight or more, still more preferably 65% by weight or more, and particularly preferably 68% by weight % Or more, and preferably 90% by weight or less, more preferably 85% by weight or less, still more preferably 80% by weight or less, and particularly preferably 75% by weight or less. If the content of the above-mentioned inorganic filler is more than the above-mentioned lower limit, the dielectric loss factor is effectively reduced. If the content of the above-mentioned inorganic filler is not more than the above-mentioned upper limit, the thermal dimensional stability can be improved and the warpage of the cured product can be effectively suppressed. If the content of the inorganic filler is above the above lower limit and below the above upper limit, the surface roughness of the surface of the hardened product can be further reduced, and finer wiring can be formed on the surface of the hardened product. Furthermore, if it is the content of the inorganic filler, the thermal expansion rate of the hardened product can also be reduced, and the sludge removability can be improved at the same time.

[硬化劑] 上述樹脂材料較佳為包含硬化劑。上述硬化劑並無特別限定。作為上述硬化劑,可使用先前公知之硬化劑。上述硬化劑可僅使用一種,亦可併用兩種以上。[hardener] The above-mentioned resin material preferably contains a hardener. The above-mentioned hardener is not particularly limited. As the above-mentioned hardening agent, a conventionally known hardening agent can be used. Only one type of the above-mentioned curing agent may be used, or two or more types may be used in combination.

作為上述硬化劑,可列舉:酚化合物(苯酚硬化劑)、活性酯化合物、氰酸酯化合物(氰酸酯硬化劑)、不具有醯亞胺鍵之苯并㗁 𠯤化合物(苯并㗁 𠯤硬化劑)、碳二醯亞胺化合物(碳二醯亞胺硬化劑)、胺化合物(胺硬化劑)、硫醇化合物(硫醇硬化劑)、膦化合物、雙氰胺、及酸酐等。上述硬化劑較佳為具有能夠與上述環氧化合物之環氧基反應之官能基。Examples of the above-mentioned hardener include: phenol compounds (phenol hardeners), active ester compounds, cyanate ester compounds (cyanate ester hardeners), and benzo ketone compounds (benzo ketone hardeners) that do not have an imine bond. Agents), carbodiimide compounds (carbodiimide hardeners), amine compounds (amine hardeners), thiol compounds (thiol hardeners), phosphine compounds, dicyandiamide, and acid anhydrides. The curing agent preferably has a functional group capable of reacting with the epoxy group of the epoxy compound.

就更進一步提高熱尺寸穩定性之觀點及進一步降低介電損耗因數之觀點而言,上述硬化劑較佳為包含酚化合物、活性酯化合物、氰酸酯化合物、不具有醯亞胺鍵之苯并㗁 𠯤化合物、碳二醯亞胺化合物及酸酐中之至少1種成分。就更進一步提高熱尺寸穩定性之觀點及進一步降低介電損耗因數之觀點而言,上述硬化劑更佳為包含酚化合物、活性酯化合物、氰酸酯化合物、不具有醯亞胺鍵之苯并㗁 𠯤化合物、及碳二醯亞胺化合物中之至少1種成分,進而較佳為包含活性酯化合物。From the viewpoint of further improving the thermal dimensional stability and the viewpoint of further reducing the dielectric loss factor, the above-mentioned hardener preferably includes a phenol compound, an active ester compound, a cyanate ester compound, and a benzoic acid compound without an imine bond. At least one component of 㗁𠯤 compound, carbodiimide compound and acid anhydride. From the viewpoint of further improving the thermal dimensional stability and the viewpoint of further reducing the dielectric loss factor, the above-mentioned hardener is more preferably composed of a phenol compound, an active ester compound, a cyanate ester compound, and a benzoyl compound without an imine bond. At least one of the 㗁𠯤 compound and the carbodiimide compound further preferably contains an active ester compound.

就更進一步提高熱尺寸穩定性之觀點及進一步降低介電損耗因數之觀點而言,上述熱硬化性化合物包含環氧化合物,上述硬化劑較佳為包含酚化合物與活性酯化合物兩者。From the viewpoint of further improving the thermal dimensional stability and the viewpoint of further reducing the dielectric loss factor, the thermosetting compound includes an epoxy compound, and the hardener preferably includes both a phenol compound and an active ester compound.

作為上述酚化合物,可列舉:酚醛清漆型苯酚、聯苯酚型苯酚、萘型苯酚、二環戊二烯型苯酚、芳烷基型苯酚及二環戊二烯型苯酚等。As said phenol compound, a novolak type phenol, a biphenol type phenol, a naphthalene type phenol, a dicyclopentadiene type phenol, an aralkyl type phenol, a dicyclopentadiene type phenol, etc. are mentioned.

作為上述酚化合物之市售品,可列舉:酚醛清漆型苯酚(DIC公司製造之「TD-2091」)、聯苯酚醛清漆型苯酚(明和化成公司製造之「MEH-7851」)、芳烷基型酚化合物(明和化成公司製造之「MEH-7800」)、以及具有胺基三𠯤骨架之苯酚(DIC公司製造之「LA-1356」及「LA-3018-50P」)等。Commercial products of the above-mentioned phenol compounds include: novolac type phenol ("TD-2091" manufactured by DIC Corporation), biphenol novolac type phenol ("MEH-7851" manufactured by Meiwa Chemical Co., Ltd.), and aralkyl groups Type phenolic compound ("MEH-7800" manufactured by Meiwa Chemical Co., Ltd.), and phenol with an amino tris-frame ("LA-1356" and "LA-3018-50P" manufactured by DIC Company), etc.

所謂上述活性酯化合物係指於構造體中包含至少1個酯鍵,且脂肪族鏈、脂肪族環或芳香族環鍵結於酯鍵之兩側之化合物。活性酯化合物例如係藉由羧酸化合物或硫代羧酸化合物與羥基化合物或硫醇化合物之縮合反應而獲得。作為活性酯化合物之例,可列舉下述式(1)所表示之化合物。The above-mentioned active ester compound refers to a compound containing at least one ester bond in the structure, and an aliphatic chain, aliphatic ring, or aromatic ring is bonded to both sides of the ester bond. The active ester compound is obtained, for example, by the condensation reaction of a carboxylic acid compound or a thiocarboxylic acid compound and a hydroxyl compound or a thiol compound. As an example of an active ester compound, the compound represented by following formula (1) can be mentioned.

[化17]

Figure 02_image035
[化17]
Figure 02_image035

上述式(1)中,X1表示包含脂肪族鏈之基、包含脂肪族環之基或包含芳香族環之基,X2表示包含芳香族環之基。作為上述包含芳香族環之基之較佳之例,可列舉可具有取代基之苯環、及可具有取代基之萘環等。作為上述取代基,可列舉烴基。該烴基之碳數較佳為12以下,更佳為6以下,進而較佳為4以下。In the above formula (1), X1 represents an aliphatic chain-containing group, an aliphatic ring-containing group, or an aromatic ring-containing group, and X2 represents an aromatic ring-containing group. As a preferable example of the group containing an aromatic ring mentioned above, the benzene ring which may have a substituent, the naphthalene ring which may have a substituent, etc. are mentioned. As said substituent, a hydrocarbon group can be mentioned. The carbon number of the hydrocarbon group is preferably 12 or less, more preferably 6 or less, and still more preferably 4 or less.

上述式(1)中,作為X1及X2之組合,可列舉:可具有取代基之苯環與可具有取代基之苯環之組合、可具有取代基之苯環與可具有取代基之萘環之組合。進而,上述式(1)中,作為X1及X2之組合,可列舉可具有取代基之萘環與可具有取代基之萘環之組合。In the above formula (1), the combination of X1 and X2 includes: a combination of a benzene ring which may have a substituent and a benzene ring which may have a substituent, a benzene ring which may have a substituent and a naphthalene ring which may have a substituent的组合。 The combination. Furthermore, in the above formula (1), the combination of X1 and X2 includes a combination of a naphthalene ring which may have a substituent and a naphthalene ring which may have a substituent.

上述活性酯化合物並無特別限定。就更進一步提高熱尺寸穩定性及阻燃性之觀點而言,上述活性酯化合物較佳為具有2個以上之芳香族骨架之活性酯化合物。就降低硬化物之介電損耗因數,且提高硬化物之熱尺寸穩定性之觀點而言,活性酯化合物更佳為於主鏈骨架中具有萘環、或二環戊二烯骨架。The above-mentioned active ester compound is not particularly limited. From the viewpoint of further improving thermal dimensional stability and flame retardancy, the above-mentioned active ester compound is preferably an active ester compound having two or more aromatic skeletons. From the viewpoint of reducing the dielectric loss factor of the cured product and improving the thermal dimensional stability of the cured product, the active ester compound preferably has a naphthalene ring or a dicyclopentadiene skeleton in the main chain skeleton.

於上述樹脂材料包含上述環氧化合物與上述活性酯化合物之情形時,較佳為該環氧化合物與該活性酯化合物中之至少一者具有醯亞胺骨架或醯胺骨架。於該情形時,可更進一步有效地發揮出本發明之效果。When the resin material includes the epoxy compound and the active ester compound, it is preferable that at least one of the epoxy compound and the active ester compound has an amide skeleton or an amide skeleton. In this case, the effect of the present invention can be more effectively exhibited.

作為上述活性酯化合物之市售品,可列舉:DIC公司製造之「HPC-8000-65T」、「EXB9416-70BK」、「EXB8100-65T」、「HPC-8150-62T」及「EXB-8」等。Commercial products of the above-mentioned active ester compounds include: "HPC-8000-65T", "EXB9416-70BK", "EXB8100-65T", "HPC-8150-62T" and "EXB-8" manufactured by DIC Corporation Wait.

就降低樹脂材料之熔融黏度,縮短交聯點間距離,更進一步減小硬化物之線膨脹係數之觀點而言,上述活性酯化合物較佳為具有低分子活性之酯化合物。作為具有低分子活性之酯化合物之市售品,可列舉上述DIC公司製造之「EXB-8」等。From the viewpoint of reducing the melt viscosity of the resin material, shortening the distance between cross-linking points, and further reducing the linear expansion coefficient of the cured product, the above-mentioned active ester compound is preferably an ester compound having low molecular activity. Examples of commercially available products of ester compounds having low molecular weight activity include "EXB-8" manufactured by the aforementioned DIC company.

作為上述氰酸酯化合物,可列舉:酚醛清漆型氰酸酯樹脂、雙酚型氰酸酯樹脂、以及該等經部分三聚化而成之預聚物等。作為上述酚醛清漆型氰酸酯樹脂,可列舉苯酚酚醛清漆型氰酸酯樹脂及烷基苯酚型氰酸酯樹脂等。作為上述雙酚型氰酸酯樹脂,可列舉雙酚A型氰酸酯樹脂、雙酚E型氰酸酯樹脂及四甲基雙酚F型氰酸酯樹脂等。As said cyanate ester compound, a novolak type cyanate ester resin, a bisphenol type cyanate ester resin, and these prepolymers etc. which were partially trimerized are mentioned. As said novolak type cyanate resin, a phenol novolak type cyanate resin, an alkylphenol type cyanate resin, etc. are mentioned. As said bisphenol type cyanate resin, bisphenol A type cyanate resin, bisphenol E type cyanate resin, tetramethyl bisphenol F type cyanate resin, etc. are mentioned.

作為上述氰酸酯化合物之市售品,可列舉:苯酚酚醛清漆型氰酸酯樹脂(Lonza Japan公司製造之「PT-30」及「PT-60」)、以及雙酚型氰酸酯樹脂經三聚化而成之預聚物(Lonza Japan公司製造之「BA-230S」、「BA-3000S」、「BTP-1000S」及「BTP-6020S」)等。Commercial products of the above-mentioned cyanate ester compounds include: phenol novolac type cyanate ester resins ("PT-30" and "PT-60" manufactured by Lonza Japan), and bisphenol type cyanate ester resins Prepolymers made by trimerization ("BA-230S", "BA-3000S", "BTP-1000S" and "BTP-6020S" manufactured by Lonza Japan), etc.

上述樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,上述氰酸酯化合物之含量較佳為10重量%以上,更佳為15重量%以上,進而較佳為20重量%以上,且較佳為85重量%以下,更佳為75重量%以下。若上述氰酸酯化合物之含量為上述下限以上及上述上限以下,則可更進一步提高硬化物之熱尺寸穩定性。The content of the cyanate ester compound is preferably 10% by weight or more, more preferably 15% by weight or more, and still more preferably 20% by weight or more in 100% by weight of the components other than the inorganic filler and solvent in the resin material , And preferably 85% by weight or less, more preferably 75% by weight or less. If the content of the cyanate ester compound is greater than or equal to the aforementioned lower limit and less than the aforementioned upper limit, the thermal dimensional stability of the cured product can be further improved.

作為上述不具有醯亞胺鍵之苯并㗁 𠯤化合物,可列舉:P-d型苯并㗁 𠯤、及F-a型苯并㗁 𠯤等。As the above-mentioned benzodiazepine compound which does not have an imine bond, P-d type benzodiazepine, F-a type benzodiazepine, and the like can be cited.

作為上述不具有醯亞胺鍵之苯并㗁 𠯤化合物之市售品,可列舉:四國化成工業公司製造之「P-d型」、JFE化學公司製造之「ODA-BOZ」等。Examples of commercially available products of the above-mentioned benzoxa compound without an imine bond include "P-d type" manufactured by Shikoku Kasei Kogyo Co., Ltd., "ODA-BOZ" manufactured by JFE Chemical Co., Ltd., and the like.

上述樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,上述不具有醯亞胺鍵之苯并㗁 𠯤化合物之含量較佳為1重量%以上,更佳為5重量%以上,進而較佳為10重量%以上,且較佳為70重量%以下,更佳為60重量%以下。若上述不具有醯亞胺鍵之苯并㗁 𠯤化合物之含量為上述下限以上及上述上限以下,則可降低硬化物之介電損耗因數,且更進一步提高熱尺寸穩定性。In 100% by weight of the components other than inorganic fillers and solvents in the above resin material, the content of the above-mentioned benzophenone compound without an imine bond is preferably 1% by weight or more, more preferably 5% by weight or more, It is more preferably 10% by weight or more, more preferably 70% by weight or less, and more preferably 60% by weight or less. If the content of the above-mentioned benzophenone compound without an imine bond is above the above lower limit and below the above upper limit, the dielectric loss factor of the hardened product can be reduced, and the thermal dimensional stability can be further improved.

上述碳二醯亞胺化合物係具有下述式(2)所表示之結構單元之化合物。於下述式(2)中,右端部及左端部係與其他基之鍵結部位。上述碳二醯亞胺化合物可僅使用一種,亦可併用兩種以上。The above-mentioned carbodiimide compound is a compound having a structural unit represented by the following formula (2). In the following formula (2), the right end and the left end are the bonding sites with other bases. As for the said carbodiimide compound, only 1 type may be used, and 2 or more types may be used together.

[化18]

Figure 02_image037
[化18]
Figure 02_image037

上述式(2)中,X表示伸烷基、於伸烷基上鍵結取代基而成之基、伸環烷基、於伸環烷基上鍵結取代基而成之基、伸芳基、或於伸芳基上鍵結取代基而成之基,p表示1~5之整數。於存在複數個X之情形時,複數個X可相同亦可不同。In the above formula (2), X represents an alkylene group, a group formed by bonding a substituent to an alkylene group, a cycloalkylene group, a group formed by bonding a substituent to a cycloalkylene group, an aryl group , Or a group formed by bonding a substituent to an aryl group, p represents an integer of 1 to 5. When there are a plurality of Xs, the plurality of Xs may be the same or different.

於適宜之一形態中,至少1個X為伸烷基、於伸烷基上鍵結取代基而成之基、伸環烷基、或於伸環烷基上鍵結取代基而成之基。In a suitable form, at least one X is an alkylene group, a group formed by bonding a substituent to an alkylene group, a cycloalkylene group, or a group formed by bonding a substituent to a cycloalkylene group .

作為上述碳二醯亞胺化合物之市售品,可列舉:日清紡化學公司製造之「Carbodilite V-02B」、「Carbodilite V-03」、「Carbodilite V-04K」、「Carbodilite V-07」、「Carbodilite V-09」、「Carbodilite 10M-SP」、及「Carbodilite 10M-SP(改)」、以及Rhein Chemie公司製造之「Stabaxol P」、「Stabaxol P400」、及「Hycasyl 510」等。Commercial products of the above-mentioned carbodiimide compounds include: "Carbodilite V-02B", "Carbodilite V-03", "Carbodilite V-04K", "Carbodilite V-07", "Carbodilite V-02B", "Carbodilite V-03", "Carbodilite V-04K", "Carbodilite V-07", and "Carbodilite V-02B" manufactured by Nisshinbo Chemical Co., Ltd. "Carbodilite V-09", "Carbodilite 10M-SP", and "Carbodilite 10M-SP (modified)", as well as "Stabaxol P", "Stabaxol P400", and "Hycasyl 510" manufactured by Rhein Chemie.

作為上述酸酐,可列舉四氫鄰苯二甲酸酐、及烷基苯乙烯-順丁烯二酸酐共聚物等。Examples of the acid anhydride include tetrahydrophthalic anhydride and alkylstyrene-maleic anhydride copolymers.

作為上述酸酐之市售品,可列舉新日本理化公司製造之「RIKACID TDA-100」等。Examples of commercially available products of the acid anhydride include "RIKACID TDA-100" manufactured by Nippon Rika Co., Ltd. and the like.

上述硬化劑相對於上述環氧化合物100重量份之含量較佳為70重量份以上,更佳為85重量份以上,且較佳為150重量份以下,更佳為120重量份以下。若上述硬化劑之含量為上述下限以上及上述上限以下,則硬化性更優異,可更進一步提高熱尺寸穩定性,更進一步抑制殘留未反應成分之揮發。The content of the curing agent relative to 100 parts by weight of the epoxy compound is preferably 70 parts by weight or more, more preferably 85 parts by weight or more, and preferably 150 parts by weight or less, and more preferably 120 parts by weight or less. If the content of the curing agent is more than the aforementioned lower limit and less than the aforementioned upper limit, the curability is more excellent, the thermal dimensional stability can be further improved, and the volatilization of remaining unreacted components can be further suppressed.

上述樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,上述化合物X、上述熱硬化性化合物及上述硬化劑之合計含量較佳為40重量%以上,更佳為60重量%以上,且較佳為98重量%以下,更佳為95重量%以下。若上述化合物X、上述熱硬化性化合物及上述硬化劑之合計含量為上述下限以上及上述上限以下,則硬化性更優異,可更進一步提高熱尺寸穩定性。The total content of the above-mentioned compound X, the above-mentioned thermosetting compound, and the above-mentioned hardener in 100% by weight of the components other than the inorganic filler and the solvent in the above-mentioned resin material is preferably 40% by weight or more, more preferably 60% by weight or more , And preferably 98% by weight or less, more preferably 95% by weight or less. If the total content of the compound X, the thermosetting compound, and the curing agent is greater than or equal to the aforementioned lower limit and less than or equal to the aforementioned upper limit, the curability is more excellent, and the thermal dimensional stability can be further improved.

[硬化促進劑] 上述樹脂材料包含硬化促進劑。藉由使用上述硬化促進劑,硬化速度變得更快。藉由使用樹脂材料迅速硬化,硬化物中之交聯結構變得均勻,並且未反應之官能基數減少,結果交聯密度增高。上述硬化促進劑並無特別限定,可使用先前公知之硬化促進劑。上述硬化促進劑可僅使用一種,亦可併用兩種以上。[Hardening accelerator] The above-mentioned resin material contains a hardening accelerator. By using the above-mentioned hardening accelerator, the hardening speed becomes faster. By using the resin material to harden quickly, the cross-linked structure in the hardened product becomes uniform, and the number of unreacted functional groups is reduced, resulting in an increase in the cross-linking density. The above-mentioned hardening accelerator is not particularly limited, and conventionally known hardening accelerators can be used. Only one kind of the above-mentioned hardening accelerator may be used, or two or more kinds may be used in combination.

作為上述硬化促進劑,例如可列舉:咪唑化合物等陰離子性硬化促進劑、胺化合物等陽離子性硬化促進劑、磷化合物及有機金屬化合物等陰離子性及陽離子性硬化促進劑以外之硬化促進劑、以及過氧化物等自由基性硬化促進劑等。Examples of the above-mentioned hardening accelerator include anionic hardening accelerators such as imidazole compounds, cationic hardening accelerators such as amine compounds, hardening accelerators other than anionic and cationic hardening accelerators such as phosphorus compounds and organometallic compounds, and Radical hardening accelerators such as peroxides, etc.

作為上述咪唑化合物,可列舉:2-十一烷基咪唑、2-十七烷基咪唑、2-甲基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、2-苯基-4-甲基咪唑、1-苄基-2-甲基咪唑、1-苄基-2-苯基咪唑、1,2-二甲基咪唑、1-氰乙基-2-甲基咪唑、1-氰乙基-2-乙基-4-甲基咪唑、1-氰乙基-2-十一烷基咪唑、1-氰乙基-2-苯基咪唑、1-氰乙基-2-十一烷基咪唑鎓三偏苯三酸酯、1-氰乙基-2-苯基咪唑鎓三偏苯三酸酯、2,4-二胺基-6-[2'-甲基咪唑基-(1')]-乙基-對稱三𠯤、2,4-二胺基-6-[2'-十一烷基咪唑基-(1')]-乙基-對稱三𠯤、2,4-二胺基-6-[2'-乙基-4'-甲基咪唑基-(1')]-乙基-對稱三𠯤、2,4-二胺基-6-[2'-甲基咪唑基-(1')]-乙基-對稱三𠯤異三聚氰酸加成物、2-苯基咪唑異三聚氰酸加成物、2-甲基咪唑異三聚氰酸加成物、2-苯基-4,5-二羥基甲基咪唑及2-苯基-4-甲基-5-二羥基甲基咪唑等。Examples of the imidazole compound include: 2-undecylimidazole, 2-heptadecylimidazole, 2-methylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-benzene 4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-phenylimidazole, 1,2-dimethylimidazole, 1-cyanoethyl-2-methylimidazole , 1-cyanoethyl-2-ethyl-4-methylimidazole, 1-cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl- 2-Undecylimidazolium trimellitate, 1-cyanoethyl-2-phenylimidazolium trimellitate, 2,4-diamino-6-[2'-methyl Imidazolyl-(1')]-ethyl-symmetric tris, 2,4-diamino-6-[2'-undecylimidazolyl-(1')]-ethyl-symmetric tris, 2,4-Diamino-6-[2'-ethyl-4'-methylimidazolyl-(1')]-ethyl-symmetric tris, 2,4-diamino-6-[2 '-Methylimidazolyl-(1')]-Ethyl-symmetric triisocyanuric acid adduct, 2-phenylimidazole isocyanuric acid adduct, 2-methylimidazole isotrimer Cyanate adducts, 2-phenyl-4,5-dihydroxymethylimidazole and 2-phenyl-4-methyl-5-dihydroxymethylimidazole, etc.

作為上述胺化合物,可列舉:二乙基胺、三乙基胺、二伸乙基四胺、三伸乙基四胺及4,4-二甲胺基吡啶等。As said amine compound, diethylamine, triethylamine, diethylenetetramine, triethylenetetramine, 4, 4- dimethylamino pyridine, etc. are mentioned.

作為上述磷化合物,可列舉三苯基膦化合物等。As said phosphorus compound, a triphenyl phosphine compound etc. are mentioned.

作為上述有機金屬化合物,可列舉:環烷酸鋅、環烷酸鈷、辛酸錫、辛酸鈷、雙乙醯丙酮鈷(II)及三乙醯丙酮鈷(III)等。As said organometallic compound, zinc naphthenate, cobalt naphthenate, tin octoate, cobalt octoate, cobalt diacetone (II), cobalt triacetone (III), etc. are mentioned.

作為上述過氧化物,可列舉過氧化二異丙苯、及PERHEXYL25B等。As said peroxide, dicumyl peroxide, PERHEXYL25B, etc. are mentioned.

就將硬化溫度抑製得更低,有效地抑制硬化物之翹曲之觀點而言,上述硬化促進劑較佳為包含上述陰離子性硬化促進劑,更佳為包含上述咪唑化合物。From the viewpoint of suppressing the curing temperature lower and effectively suppressing the warpage of the cured product, the curing accelerator preferably contains the anionic curing accelerator, and more preferably the imidazole compound.

就將硬化溫度抑製得更低,有效地抑制硬化物之翹曲之觀點而言,上述硬化促進劑100重量%中,上述陰離子性硬化促進劑之含量較佳為20重量%以上,更佳為50重量%以上,進而較佳為70重量%以上,最佳為100重量%(總量)。因此,上述硬化促進劑最佳為上述陰離子性硬化促進劑。From the viewpoint of suppressing the curing temperature lower and effectively suppressing the warpage of the cured product, the content of the anionic curing accelerator in 100% by weight of the curing accelerator is preferably 20% by weight or more, more preferably 50% by weight or more, more preferably 70% by weight or more, most preferably 100% by weight (total amount). Therefore, the above-mentioned hardening accelerator is preferably the above-mentioned anionic hardening accelerator.

於上述熱硬化性化合物包含上述乙烯系化合物、上述丙烯酸酯化合物及上述苯乙烯化合物等自由基硬化性化合物之情形時,進行自由基硬化,故上述硬化促進劑較佳為包含上述自由基性硬化促進劑。In the case where the thermosetting compound contains a radical curable compound such as the vinyl compound, the acrylate compound, and the styrene compound, radical curing is performed. Therefore, the curing accelerator preferably contains the radical curing compound. Accelerator.

上述硬化促進劑之含量並無特別限定。樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,上述硬化促進劑之含量較佳為0.01重量%以上,更佳為0.05重量%以上,且較佳為5重量%以下,更佳為3重量%以下。若上述硬化促進劑之含量為上述下限以上及上述上限以下,則樹脂材料有效率地硬化。若上述硬化促進劑之含量在更佳之範圍內,則樹脂材料之保存穩定性變得更高,且可獲得更良好之硬化物。The content of the above-mentioned hardening accelerator is not particularly limited. In 100% by weight of the components other than the inorganic filler and solvent in the resin material, the content of the hardening accelerator is preferably 0.01% by weight or more, more preferably 0.05% by weight or more, and preferably 5% by weight or less, and more It is preferably 3% by weight or less. If the content of the hardening accelerator is greater than or equal to the aforementioned lower limit and less than or equal to the aforementioned upper limit, the resin material is cured efficiently. If the content of the above-mentioned hardening accelerator is in a better range, the storage stability of the resin material becomes higher, and a better hardened product can be obtained.

[熱塑性樹脂] 上述樹脂材料較佳為包含熱塑性樹脂。作為上述熱塑性樹脂,可列舉:聚乙烯醇縮醛樹脂、聚醯亞胺樹脂、苯氧基樹脂及苯乙烯丁二烯樹脂等。上述熱塑性樹脂可僅使用一種,亦可併用兩種以上。[Thermoplastic resin] The above-mentioned resin material preferably contains a thermoplastic resin. As said thermoplastic resin, polyvinyl acetal resin, polyimide resin, phenoxy resin, styrene butadiene resin, etc. are mentioned. As for the said thermoplastic resin, only 1 type may be used, and 2 or more types may be used together.

就不取決於硬化環境而有效地降低介電損耗因數,且有效地提高金屬佈線之密接性之觀點而言,上述熱塑性樹脂較佳為苯氧基樹脂。藉由使用苯氧基樹脂,可抑制樹脂膜對於電路基板之孔或凹凸之嵌埋性之惡化及無機填充材之不均勻化。又,藉由使用苯氧基樹脂,能夠調整熔融黏度,故無機填充材之分散性變得良好,且於硬化過程中,於非期望之領域中樹脂組合物或B階化物難以潤濕擴散。From the viewpoint of effectively reducing the dielectric loss factor without depending on the curing environment, and effectively improving the adhesion of the metal wiring, the above-mentioned thermoplastic resin is preferably a phenoxy resin. By using phenoxy resin, it is possible to suppress the deterioration of the embedding property of the resin film into the holes or unevenness of the circuit board and the unevenness of the inorganic filler. In addition, by using phenoxy resin, the melt viscosity can be adjusted, so the dispersibility of the inorganic filler becomes good, and during the curing process, the resin composition or the B-stage compound is difficult to wet and spread in undesired areas.

上述樹脂材料中所含之苯氧基樹脂並無特別限定。作為上述苯氧基樹脂,可使用先前公知之苯氧基樹脂。上述苯氧基樹脂可僅使用一種,亦可併用兩種以上。The phenoxy resin contained in the above resin material is not particularly limited. As the above-mentioned phenoxy resin, a conventionally known phenoxy resin can be used. As for the said phenoxy resin, only 1 type may be used, and 2 or more types may be used together.

作為上述苯氧基樹脂,例如可列舉具有雙酚A型之骨架、雙酚F型之骨架、雙酚S型之骨架、聯苯骨架、酚醛清漆骨架、萘骨架及醯亞胺骨架等骨架之苯氧基樹脂等。Examples of the above-mentioned phenoxy resin include those having a bisphenol A type skeleton, a bisphenol F type skeleton, a bisphenol S type skeleton, a biphenyl skeleton, a novolak skeleton, a naphthalene skeleton, and an amide skeleton. Phenoxy resin etc.

作為上述苯氧基樹脂之市售品,例如可列舉:新日鐵住金化學公司製造之「YP50」、「YP55」及「YP70」、以及三菱化學公司製造之「1256B40」、「4250」、「4256H40」、「4275」、「YX6954BH30」及「YX8100BH30」等。Examples of commercially available products of the above-mentioned phenoxy resin include: "YP50", "YP55" and "YP70" manufactured by Nippon Steel & Sumitomo Metal Chemical Corporation, and "1256B40", "4250", and "Mitsubishi Chemical Corporation" manufactured by Mitsubishi Chemical Corporation. 4256H40", "4275", "YX6954BH30" and "YX8100BH30" etc.

就提高處理性、低粗度下之鍍覆剝離強度及絕緣層與金屬層之密接性之觀點而言,上述熱塑性樹脂較佳為聚醯亞胺樹脂(聚醯亞胺化合物)。From the viewpoints of improving handleability, plating peel strength at low thickness, and adhesion between the insulating layer and the metal layer, the above-mentioned thermoplastic resin is preferably a polyimide resin (polyimide compound).

就使溶解性變得良好之觀點而言,上述聚醯亞胺化合物較佳為藉由使四羧酸二酐與脂肪族二胺化合物反應之方法而獲得之聚醯亞胺化合物。From the viewpoint of improving solubility, the polyimide compound is preferably a polyimide compound obtained by a method of reacting tetracarboxylic dianhydride with an aliphatic diamine compound.

作為上述四羧酸二酐,例如可列舉:均苯四甲酸二酐、3,3',4,4'-二苯甲酮四羧酸二酐、3,3',4,4'-二苯基碸四羧酸二酐、1,4,5,8-萘四羧酸二酐、2,3,6,7-萘四羧酸二酐、3,3',4,4'-聯苯醚四羧酸二酐、3,3',4,4'-二甲基二苯基矽烷四羧酸二酐、3,3',4,4'-四苯基矽烷四羧酸二酐、1,2,3,4-呋喃四羧酸二酐、4,4'-雙(3,4-二羧基苯氧基)二苯硫醚二酸酐、4,4'-雙(3,4-二羧基苯氧基)二苯基碸二酸酐、4,4'-雙(3,4-二羧基苯氧基)二苯基丙烷二酐、3,3',4,4'-全氟亞異丙基二鄰苯二甲酸二酐、雙(鄰苯二甲酸)苯基氧化膦二酸酐、對伸苯基-雙(三苯基鄰苯二甲酸)二酸酐、間伸苯基-雙(三苯基鄰苯二甲酸)二酸酐、雙(三苯基鄰苯二甲酸)-4,4'-二苯醚二酸酐、及雙(三苯基鄰苯二甲酸)-4,4'-二苯甲烷二酐等。Examples of the tetracarboxylic dianhydride include: pyromellitic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 3,3',4,4'-di Phenyl tetracarboxylic dianhydride, 1,4,5,8-naphthalene tetracarboxylic dianhydride, 2,3,6,7-naphthalene tetracarboxylic dianhydride, 3,3',4,4'-linked Phenyl ether tetracarboxylic dianhydride, 3,3',4,4'-dimethyldiphenylsilane tetracarboxylic dianhydride, 3,3',4,4'-tetraphenylsilane tetracarboxylic dianhydride , 1,2,3,4-furantetracarboxylic dianhydride, 4,4'-bis(3,4-dicarboxyphenoxy)diphenyl sulfide dianhydride, 4,4'-bis(3,4 -Dicarboxyphenoxy)diphenyl dianhydride, 4,4'-bis(3,4-dicarboxyphenoxy)diphenylpropane dianhydride, 3,3',4,4'-perfluoro Isopropylidene diphthalic acid dianhydride, bis(phthalic acid) phenyl phosphine oxide dianhydride, p-phenylene-bis(triphenylphthalic acid) dianhydride, m-phenylene-bis (Triphenylphthalic acid) dianhydride, bis(triphenylphthalic acid)-4,4'-diphenyl ether dianhydride, and bis(triphenylphthalic acid)-4,4' -Diphenylmethane dianhydride, etc.

作為上述脂肪族二胺,可列舉二聚二胺等。作為上述二聚二胺,例如可列舉:VERSAMINE 551(商品名BASF Japan公司製造之3,4-雙(1-胺基庚基)-6-己基-5-(1-辛烯基)環己烯)、VERSAMINE 552(商品名、コグニクスJapan公司製造之VERSAMINE 551之氫化物)、PRIAMINE1075、PRIAMINE1074(商品名、均為Croda Japan公司製造)等。As said aliphatic diamine, dimer diamine etc. are mentioned. As the dimer diamine, for example, VERSAMINE 551 (trade name 3,4-bis(1-aminoheptyl)-6-hexyl-5-(1-octenyl)cyclohexyl) manufactured by BASF Japan Ene), VERSAMINE 552 (trade name, hydride of VERSAMINE 551 manufactured by Coconic Japan), PRIAMINE 1075, PRIAMINE 1074 (trade name, all manufactured by Croda Japan), etc.

再者,上述聚醯亞胺化合物於末端可具有酸酐結構、順丁烯二醯亞胺結構、檸康醯亞胺結構。於該情形時,可使上述聚醯亞胺化合物與環氧化合物反應。藉由使上述聚醯亞胺化合物與環氧化合物反應,可提高硬化物之熱尺寸穩定性。Furthermore, the above-mentioned polyimide compound may have an acid anhydride structure, a maleimide structure, and a citraconic imine structure at the end. In this case, the above-mentioned polyimide compound and epoxy compound can be reacted. By reacting the above-mentioned polyimide compound with an epoxy compound, the thermal dimensional stability of the cured product can be improved.

就獲得保存穩定性更優異之樹脂材料之觀點而言,上述熱塑性樹脂、上述聚醯亞胺樹脂及上述苯氧基樹脂之重量平均分子量較佳為10000以上,更佳為15000以上,且較佳為100000以下,更佳為50000以下。From the viewpoint of obtaining a resin material with more excellent storage stability, the weight average molecular weight of the thermoplastic resin, the polyimide resin, and the phenoxy resin is preferably 10,000 or more, more preferably 15,000 or more, and more preferably It is 100,000 or less, more preferably 50,000 or less.

上述熱塑性樹脂、上述聚醯亞胺樹脂及上述苯氧基樹脂之上述重量平均分子量表示藉由凝膠滲透層析法(GPC)測定之以聚苯乙烯換算計之重量平均分子量。The weight average molecular weight of the thermoplastic resin, the polyimide resin, and the phenoxy resin means the weight average molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC).

上述熱塑性樹脂、上述聚醯亞胺樹脂及上述苯氧基樹脂之含量並無特別限定。樹脂材料中之上述無機填充材及上述溶劑除外之成分100重量%中,上述熱塑性樹脂之含量(於熱塑性樹脂為聚醯亞胺樹脂或苯氧基樹脂之情形時,聚醯亞胺樹脂或苯氧基樹脂之含量)較佳為1重量%以上,更佳為2重量%以上,且較佳為30重量%以下,更佳為20重量%以下。若上述熱塑性樹脂之含量為上述下限以上及上述上限以下,則對於樹脂材料之電路基板之孔或凹凸之嵌埋性變得良好。若上述熱塑性樹脂之含量為上述下限以上,則變得更容易形成樹脂膜,可獲得更良好之絕緣層。若上述熱塑性樹脂之含量為上述上限以下,則硬化物之熱膨脹率更進一步降低。若上述熱塑性樹脂之含量為上述上限以下,則硬化物表面之表面粗糙度更進一步減小,硬化物與金屬層之接著強度變得更高。The content of the thermoplastic resin, the polyimide resin, and the phenoxy resin is not particularly limited. The content of the above-mentioned thermoplastic resin in 100% by weight of the above-mentioned inorganic filler and the above-mentioned solvent in the resin material (when the thermoplastic resin is polyimide resin or phenoxy resin, polyimide resin or benzene The content of the oxy resin is preferably 1% by weight or more, more preferably 2% by weight or more, and preferably 30% by weight or less, and more preferably 20% by weight or less. If the content of the thermoplastic resin is greater than or equal to the aforementioned lower limit and less than or equal to the aforementioned upper limit, the embedding properties of the holes or irregularities of the resin material circuit board become good. If the content of the thermoplastic resin is greater than or equal to the lower limit, it becomes easier to form a resin film, and a better insulating layer can be obtained. If the content of the thermoplastic resin is less than or equal to the upper limit, the thermal expansion coefficient of the cured product is further reduced. If the content of the above-mentioned thermoplastic resin is below the above-mentioned upper limit, the surface roughness of the surface of the cured product is further reduced, and the bonding strength between the cured product and the metal layer becomes higher.

[溶劑] 上述樹脂材料不含或包含溶劑。藉由使用上述溶劑,可將樹脂材料之黏度控制在適宜之範圍內,可提高樹脂材料之塗敷性。又,上述溶劑可用於獲得包含上述無機填充材之漿料。上述溶劑可僅使用一種,亦可併用兩種以上。[Solvent] The above-mentioned resin material does not contain or contains a solvent. By using the above-mentioned solvent, the viscosity of the resin material can be controlled within an appropriate range, and the coating property of the resin material can be improved. In addition, the above-mentioned solvent can be used to obtain a slurry containing the above-mentioned inorganic filler. Only one kind of the above-mentioned solvent may be used, or two or more kinds may be used in combination.

作為上述溶劑,可列舉:丙酮、甲醇、乙醇、丁醇、2-丙醇、2-甲氧基乙醇、2-乙氧基乙醇、1-甲氧基-2-丙醇、2-乙醯氧基-1-甲氧基丙烷、甲苯、二甲苯、甲基乙基酮、N,N-二甲基甲醯胺、甲基異丁基酮、N-甲基-吡咯啶酮、正己烷、環己烷、環己酮及作為混合物之石腦油等。Examples of the above-mentioned solvents include acetone, methanol, ethanol, butanol, 2-propanol, 2-methoxyethanol, 2-ethoxyethanol, 1-methoxy-2-propanol, and 2-ethoxyethanol. Oxy-1-methoxypropane, toluene, xylene, methyl ethyl ketone, N,N-dimethylformamide, methyl isobutyl ketone, N-methyl-pyrrolidone, n-hexane , Cyclohexane, cyclohexanone and naphtha as a mixture.

上述溶劑之多數較佳為於使上述樹脂組合物成形為膜狀時去除。因此,上述溶劑之沸點較佳為200℃以下,更佳為180℃以下。上述樹脂組合物中之上述溶劑之含量並無特別限定。考慮上述樹脂組合物之塗敷性等,能夠適當變更上述溶劑之含量。Most of the above-mentioned solvents are preferably removed when the above-mentioned resin composition is formed into a film shape. Therefore, the boiling point of the above-mentioned solvent is preferably 200°C or lower, more preferably 180°C or lower. The content of the solvent in the resin composition is not particularly limited. The content of the solvent can be appropriately changed in consideration of the coating properties of the resin composition and the like.

於上述樹脂材料為B階膜之情形時,上述B階膜100重量%中,上述溶劑之含量較佳為1重量%以上,更佳為2重量%以上,且較佳為10重量%以下,更佳為5重量%以下。When the resin material is a B-stage film, the content of the solvent in 100% by weight of the B-stage film is preferably 1% by weight or more, more preferably 2% by weight or more, and preferably 10% by weight or less, More preferably, it is 5 wt% or less.

[其他成分] 為了改善耐衝擊性、耐熱性、樹脂之相溶性及作業性等,上述樹脂材料亦可包含有機填充材、調平劑、阻燃劑、偶合劑、著色劑、抗氧化劑、抗紫外線劣化劑、消泡劑、增黏劑、及揺變性賦予劑等。[Other ingredients] In order to improve impact resistance, heat resistance, resin compatibility and workability, the above resin materials may also include organic fillers, leveling agents, flame retardants, coupling agents, colorants, antioxidants, anti-ultraviolet degradation agents, Antifoaming agent, tackifier, and denaturation imparting agent, etc.

作為上述有機填充材,可列舉包含苯并㗁 𠯤樹脂、苯并㗁唑樹脂、氟樹脂、丙烯酸系樹脂及苯乙烯樹脂等之粒子狀物。作為上述氟樹脂,可列舉聚四氟乙烯(PTFE)等。藉由使用氟樹脂粒子作為上述有機填充材,可更進一步降低硬化物之相對介電常數。上述有機填充材之平均粒徑較佳為1 μm以下。若上述有機填充材之平均粒徑為上述上限以下,則可減小蝕刻後之表面粗度,且提高鍍覆剝離強度,又,可更進一步提高絕緣層與金屬層之密接性。上述有機填充材之平均粒徑可為50 nm以上。Examples of the above-mentioned organic filler include particulate matter containing benzoxazole resin, benzoxazole resin, fluororesin, acrylic resin, and styrene resin. As said fluororesin, polytetrafluoroethylene (PTFE) etc. are mentioned. By using fluororesin particles as the above-mentioned organic filler, the relative dielectric constant of the cured product can be further reduced. The average particle diameter of the organic filler is preferably 1 μm or less. If the average particle size of the organic filler is below the above upper limit, the surface roughness after etching can be reduced, the plating peel strength can be improved, and the adhesion between the insulating layer and the metal layer can be further improved. The average particle size of the organic filler may be 50 nm or more.

作為上述有機填充材之平均粒徑,採用成為50%之中值徑(d50)之值。上述平均粒徑能夠使用雷射繞射散射方式之粒度分佈測定裝置進行測定。As the average particle diameter of the organic filler, a value that becomes 50% of the median diameter (d50) is adopted. The above-mentioned average particle size can be measured using a particle size distribution measuring device of a laser diffraction scattering method.

作為上述偶合劑,可列舉矽烷偶合劑、鈦偶合劑及鋁偶合劑等。作為上述矽烷偶合劑,可列舉:乙烯基矽烷、胺基矽烷、咪唑矽烷及環氧矽烷等。As said coupling agent, a silane coupling agent, a titanium coupling agent, an aluminum coupling agent, etc. are mentioned. As said silane coupling agent, vinyl silane, amino silane, imidazole silane, epoxy silane, etc. are mentioned.

(樹脂膜) 藉由使上述樹脂組合物成形為膜狀,可獲得樹脂膜(B階化物/B階膜)。上述樹脂材料較佳為樹脂膜。樹脂膜較佳為B階膜。(Resin film) By molding the above-mentioned resin composition into a film shape, a resin film (B-stage product/B-stage film) can be obtained. The above-mentioned resin material is preferably a resin film. The resin film is preferably a B-stage film.

作為使樹脂組合物成形為膜狀而獲得樹脂膜之方法,可列舉以下之方法。使用擠出機,將樹脂組合物熔融混練,並於擠出後,利用T型模頭或圓形模具等成形為膜狀之擠出成形法。澆鑄包含溶劑之樹脂組合物而成形為膜狀之澆鑄成形法。先前公知之其他膜成形法。就能夠應對薄型化之方面而言,較佳為擠出成形法或澆鑄成形法。膜包含片材。As a method of forming a resin composition into a film shape to obtain a resin film, the following methods can be cited. An extrusion molding method in which the resin composition is melted and kneaded using an extruder, and after extrusion, it is molded into a film shape using a T-die or a circular die. A casting method of casting a resin composition containing a solvent into a film shape. Previously known other film forming methods. In terms of being able to cope with thinning, an extrusion molding method or a cast molding method is preferable. The film contains a sheet.

使樹脂組合物成形為膜狀,以由熱引起之硬化不會過度進行之程度,例如於50℃~150℃下加熱乾燥1分鐘~10分鐘,藉此可獲得作為B階膜之樹脂膜。The resin composition is formed into a film shape so that the hardening caused by heat does not proceed excessively, for example, by heating and drying at 50°C to 150°C for 1 minute to 10 minutes, thereby obtaining a resin film as a B-stage film.

將可藉由如上所述之乾燥步驟所獲得之膜狀之樹脂組合物稱為B階膜。上述B階膜處於半硬化狀態。半硬化物未完全硬化,可進而進行硬化。The film-like resin composition that can be obtained by the drying step as described above is called a B-stage film. The above-mentioned B-stage film is in a semi-cured state. The semi-hardened product is not completely hardened and can be hardened further.

上述樹脂膜可不為預浸體。於上述樹脂膜不為預浸體之情形時,沿著玻璃布等不會產生電子遷移。又,於使樹脂膜層壓或預硬化時,於表面不會產生由玻璃布引起之凹凸。The above-mentioned resin film may not be a prepreg. When the above-mentioned resin film is not a prepreg, no electron migration occurs along glass cloth or the like. In addition, when the resin film is laminated or pre-cured, the surface does not have unevenness caused by the glass cloth.

上述樹脂膜能夠以具備金屬箔或基材膜、及積層於該金屬箔或基材表面之樹脂膜之積層膜的形態使用。上述金屬箔較佳為銅箔。The above-mentioned resin film can be used in the form of a laminated film provided with a metal foil or a base film, and a resin film laminated on the surface of the metal foil or the base. The above-mentioned metal foil is preferably copper foil.

作為上述積層膜之上述基材膜,可列舉:聚對苯二甲酸乙二酯膜及聚對苯二甲酸丁二酯膜等聚酯樹脂膜、聚乙烯膜及聚丙烯膜等烯烴樹脂膜、以及聚醯亞胺樹脂膜等。上述基材膜之表面視需要可經脫模處理。Examples of the above-mentioned base film of the above-mentioned laminated film include polyester resin films such as polyethylene terephthalate film and polybutylene terephthalate film, olefin resin films such as polyethylene film and polypropylene film, And polyimide resin film. The surface of the above-mentioned base film may be subjected to a mold release treatment as needed.

就將樹脂膜之硬化度控製得更均勻之觀點而言,上述樹脂膜之厚度較佳為5 μm以上,較佳為200 μm以下。於使用上述樹脂膜作為電路之絕緣層之情形時,較佳為利用上述樹脂膜形成之絕緣層之厚度為形成電路之導體層(金屬層)的厚度以上。上述絕緣層之厚度較佳為5 μm以上,較佳為200 μm以下。From the viewpoint of controlling the curing degree of the resin film more uniformly, the thickness of the resin film is preferably 5 μm or more, and more preferably 200 μm or less. When the above-mentioned resin film is used as the insulating layer of a circuit, it is preferable that the thickness of the insulating layer formed by the above-mentioned resin film is equal to or greater than the thickness of the conductor layer (metal layer) forming the circuit. The thickness of the above-mentioned insulating layer is preferably 5 μm or more, preferably 200 μm or less.

(半導體裝置、印刷佈線板、銅箔積層板及多層印刷佈線板) 上述樹脂材料可適宜地用以於半導體裝置中形成嵌埋半導體晶片之塑模樹脂。(Semiconductor devices, printed wiring boards, copper foil laminates and multilayer printed wiring boards) The above-mentioned resin material can be suitably used to form a mold resin for embedding a semiconductor chip in a semiconductor device.

上述樹脂材料可適宜地用作絕緣材料。上述樹脂材料可適宜地用以於印刷佈線板中形成絕緣層。The above-mentioned resin material can be suitably used as an insulating material. The above-mentioned resin material can be suitably used to form an insulating layer in a printed wiring board.

上述印刷佈線板例如可藉由將上述樹脂材料加熱加壓成形而獲得。The printed wiring board can be obtained, for example, by heating and pressing the resin material.

對上述樹脂膜,可於單面或雙面積層表面具有金屬層之積層對象構件。可適宜地獲得如下積層構造體,其具備:表面具有金屬層之積層對象構件、及積層於上述金屬層之表面上之樹脂膜,且上述樹脂膜為上述樹脂材料。積層上述樹脂膜與上述表面具有金屬層之積層對象構件之方法並無特別限定,可使用公知之方法。例如能夠使用平行平板壓機或輥貼合機等裝置,一面加熱或一面不加熱地加壓,一面將上述樹脂膜積層於表面具有金屬層之積層對象構件。The above-mentioned resin film may be a laminate target member having a metal layer on the surface of a single-sided or double-area layer. A laminated structure comprising: a member to be laminated having a metal layer on the surface; and a resin film laminated on the surface of the metal layer, wherein the resin film is the resin material, can be suitably obtained. The method of laminating the resin film and the member to be laminated having the metal layer on the surface is not particularly limited, and a known method can be used. For example, an apparatus such as a parallel plate press or a roll laminator can be used to laminate the above-mentioned resin film on a laminate target member having a metal layer on the surface while heating or pressing without heating.

上述金屬層之材料較佳為銅。The material of the metal layer is preferably copper.

上述表面具有金屬層之積層對象構件可為銅箔等金屬箔。The laminate target member having a metal layer on the surface may be a metal foil such as copper foil.

上述樹脂材料可適宜地用於獲得銅箔積層板。作為上述銅箔積層板之一例,可列舉具備銅箔、及積層於該銅箔之一表面之樹脂膜之銅箔積層板。The above-mentioned resin material can be suitably used for obtaining a copper foil laminated board. As an example of the said copper foil laminated board, the copper foil laminated board provided with the resin film laminated|stacked on one surface of the copper foil and this copper foil is mentioned.

上述銅箔積層板之上述銅箔之厚度並無特別限定。上述銅箔之厚度較佳為1 μm~50 μm之範圍內。又,為了提高上述樹脂材料之硬化物與銅箔之接著強度,上述銅箔較佳為於表面具有微細之凹凸。凹凸之形成方法並無特別限定。作為上述凹凸之形成方法,可列舉利用使用公知之藥液之處理之形成方法等。The thickness of the said copper foil of the said copper foil laminated board is not specifically limited. The thickness of the above-mentioned copper foil is preferably in the range of 1 μm to 50 μm. In addition, in order to increase the bonding strength between the cured product of the resin material and the copper foil, the copper foil preferably has fine irregularities on the surface. The method of forming the unevenness is not particularly limited. As a method of forming the above-mentioned concavities and convexities, a method of forming using a treatment using a known chemical solution, etc., can be cited.

上述樹脂材料可適宜地用於獲得多層基板。The above-mentioned resin materials can be suitably used to obtain a multilayer substrate.

作為上述多層基板之一例,可列舉如下多層基板,其具備:電路基板、及積層於該電路基板上之絕緣層。該多層基板之絕緣層係利用上述樹脂材料形成。又,多層基板之絕緣層亦可使用積層膜,利用上述積層膜之上述樹脂膜形成。上述絕緣層較佳為積層於電路基板之設置有電路之表面上。上述絕緣層之一部分較佳為嵌埋於上述電路間。As an example of the above-mentioned multilayer substrate, a multilayer substrate including a circuit substrate and an insulating layer laminated on the circuit substrate can be cited. The insulating layer of the multilayer substrate is formed using the above-mentioned resin material. In addition, the insulating layer of the multilayer substrate may also be a laminate film, and it may be formed using the above-mentioned resin film of the above-mentioned laminate film. The above-mentioned insulating layer is preferably laminated on the surface of the circuit board where the circuit is provided. A part of the above-mentioned insulating layer is preferably embedded between the above-mentioned circuits.

上述多層基板中,較佳為上述絕緣層之與積層有上述電路基板之表面相反之側的表面經粗化處理。In the multilayer substrate, it is preferable that the surface of the insulating layer on the side opposite to the surface on which the circuit board is laminated is roughened.

粗化處理方法可使用先前公知之粗化處理方法,並無特別限定。上述絕緣層之表面亦可於粗化處理前經膨潤處理。The roughening treatment method can use a previously known roughening treatment method, and it is not particularly limited. The surface of the above-mentioned insulating layer may also be subjected to swelling treatment before roughening treatment.

又,上述多層基板較佳為進而具備積層於上述絕緣層之經粗化處理之表面之銅鍍覆層。Moreover, it is preferable that the said multilayer board|substrate is further provided with the copper plating layer laminated|stacked on the roughened surface of the said insulating layer.

又,作為上述多層基板之另一例,可列舉如下多層基板,其具備:電路基板、積層於該電路基板之表面上之絕緣層、及積層於該絕緣層之與積層有上述電路基板之表面相反之側之表面的銅箔。上述絕緣層較佳為藉由使用具備銅箔與積層於該銅箔之一表面之樹脂膜之銅箔積層板,使上述樹脂膜硬化而形成。進而,上述銅箔較佳為經蝕刻處理,且為銅電路。In addition, as another example of the above-mentioned multilayer substrate, the following multilayer substrate may be cited, which includes: a circuit substrate, an insulating layer laminated on the surface of the circuit substrate, and the insulating layer laminated on the surface opposite to the surface on which the circuit substrate is laminated The copper foil on the side of the surface. It is preferable that the said insulating layer is formed by hardening the said resin film using the copper foil laminated board provided with the copper foil and the resin film laminated|stacked on one surface of this copper foil. Furthermore, it is preferable that the said copper foil is etched, and it is a copper circuit.

作為上述多層基板之另一例,可列舉如下多層基板,其具備:電路基板、及積層於該電路基板之表面上之複數層絕緣層。配置於上述電路基板上之上述複數層絕緣層中之至少1層係使用上述樹脂材料形成。上述多層基板較佳為進而具備電路,該電路積層於使用上述樹脂膜形成之上述絕緣層之至少一表面。As another example of the above-mentioned multilayer substrate, a multilayer substrate provided with a circuit substrate and a plurality of insulating layers laminated on the surface of the circuit substrate can be cited. At least one of the plurality of insulating layers arranged on the circuit board is formed using the resin material. The multilayer substrate preferably further includes a circuit laminated on at least one surface of the insulating layer formed using the resin film.

於多層基板中之多層印刷佈線板中,要求較低之介電損耗因數,要求絕緣層之較高之絕緣可靠性。於本發明之樹脂材料中,藉由降低介電損耗因數,且提高絕緣層與金屬層之密接性及蝕刻性能,可有效地提高絕緣可靠性。因此,本發明之樹脂材料於多層印刷佈線板中,可適宜地用於形成絕緣層。In a multilayer printed wiring board in a multilayer substrate, a lower dielectric loss factor is required, and a higher insulation reliability of the insulating layer is required. In the resin material of the present invention, by reducing the dielectric loss factor, and improving the adhesion and etching performance between the insulating layer and the metal layer, the insulation reliability can be effectively improved. Therefore, the resin material of the present invention can be suitably used for forming an insulating layer in a multilayer printed wiring board.

上述多層印刷佈線板例如具備:電路基板、配置於上述電路基板之表面上之複數層絕緣層、及配置於複數層上述絕緣層間之金屬層。上述絕緣層中之至少1層為上述樹脂材料之硬化物。The multilayer printed wiring board includes, for example, a circuit board, a plurality of insulating layers arranged on the surface of the circuit board, and a metal layer arranged between the plurality of insulating layers. At least one of the insulating layers is a cured product of the resin material.

圖1係模式性地表示使用本發明之一實施形態之樹脂材料之多層印刷佈線板之剖視圖。Fig. 1 is a cross-sectional view schematically showing a multilayer printed wiring board using a resin material according to an embodiment of the present invention.

圖1所示之多層印刷佈線板11中,於電路基板12之上表面12a上積層有複數層絕緣層13~16。絕緣層13~16為硬化物層。於電路基板12之上表面12a之一部分之領域中形成有金屬層17。複數層絕緣層13~16之中,於位於和電路基板12側相反之外側之表面的絕緣層16以外之絕緣層13~15中,於上表面之一部分之領域中形成有金屬層17。金屬層17為電路。於電路基板12與絕緣層13之間、及所積層之絕緣層13~16之各層間分別配置有金屬層17。下方之金屬層17與上方之金屬層17藉由未圖示之導孔連接及穿通孔連接中之至少一者相互連接。In the multilayer printed wiring board 11 shown in FIG. 1, a plurality of insulating layers 13 to 16 are laminated on the upper surface 12 a of the circuit board 12. The insulating layers 13-16 are hardened layers. A metal layer 17 is formed in the area of a part of the upper surface 12a of the circuit board 12. Among the plurality of insulating layers 13-16, the insulating layers 13-15 other than the insulating layer 16 on the outer side opposite to the circuit board 12 side have a metal layer 17 formed in a part of the upper surface area. The metal layer 17 is a circuit. A metal layer 17 is arranged between the circuit board 12 and the insulating layer 13 and between the layers of the laminated insulating layers 13-16, respectively. The lower metal layer 17 and the upper metal layer 17 are connected to each other by at least one of via connection and through-hole connection not shown.

多層印刷佈線板11中,絕緣層13~16係利用上述樹脂材料之硬化物形成。於本實施形態中,絕緣層13~16之表面經粗化處理,故於絕緣層13~16之表面形成有未圖示之微細之孔。又,金屬層17到達微細之孔之內部。又,多層印刷佈線板11中,可減小金屬層17之寬度方向尺寸(L)、及未形成金屬層17之部分之寬度方向尺寸(S)。又,多層印刷佈線板11中,對未藉由未圖示之導孔連接及穿通孔連接而連接之上方的金屬層與下方之金屬層之間賦予良好之絕緣可靠性。In the multilayer printed wiring board 11, the insulating layers 13-16 are formed using the hardened|cured material of the said resin material. In this embodiment, the surfaces of the insulating layers 13-16 are roughened, so that the surfaces of the insulating layers 13-16 are formed with fine holes (not shown). In addition, the metal layer 17 reaches the inside of the fine hole. In addition, in the multilayer printed wiring board 11, the widthwise dimension (L) of the metal layer 17 and the widthwise dimension (S) of the portion where the metal layer 17 is not formed can be reduced. Moreover, in the multilayer printed wiring board 11, good insulation reliability is provided between the upper metal layer and the lower metal layer which are not connected by via connection and through-hole connection which are not shown in figure.

(粗化處理及膨潤處理) 上述樹脂材料較佳為用於獲得經粗化處理或除膠渣處理之硬化物。於上述硬化物中進而亦包含能夠硬化之預硬化物。(Roughening treatment and swelling treatment) The above-mentioned resin material is preferably used to obtain a hardened product that has undergone roughening treatment or desmearing treatment. The above-mentioned hardened material further includes a pre-hardened material that can be hardened.

為了於藉由使上述樹脂材料預硬化所獲得之硬化物之表面形成微細之凹凸,硬化物較佳為經粗化處理。於粗化處理前,硬化物較佳為經膨潤處理。硬化物較佳為於預硬化後且經粗化處理前經膨潤處理,進而於粗化處理後硬化。其中,硬化物可未必經膨潤處理。In order to form fine concavities and convexities on the surface of the cured product obtained by pre-curing the above resin material, the cured product is preferably roughened. Before the roughening treatment, the hardened product is preferably subjected to swelling treatment. The hardened product is preferably subjected to swelling treatment after pre-hardening and before roughening treatment, and then hardening after roughening treatment. Among them, the hardened product may not necessarily undergo swelling treatment.

作為上述膨潤處理之方法,例如可使用利用以乙二醇等為主成分之化合物之水溶液或有機溶劑分散溶液等對硬化物進行處理之方法。膨潤處理中所使用之膨潤液通常包含鹼作為pH值調整劑等。膨潤液較佳為包含氫氧化鈉。具體而言,例如,上述膨潤處理係藉由如下方法進行:使用40重量%乙二醇水溶液等,於處理溫度30℃~85℃下將硬化物處理1分鐘~30分鐘。上述膨潤處理之溫度較佳為50℃~85℃之範圍內。若上述膨潤處理之溫度過低,則有膨潤處理需要長時間,進而硬化物與金屬層之接著強度降低之傾向。As the method of the above-mentioned swelling treatment, for example, a method of treating the hardened product with an aqueous solution of a compound mainly composed of ethylene glycol or the like or an organic solvent dispersion solution or the like can be used. The swelling liquid used in the swelling treatment usually contains an alkali as a pH adjuster or the like. The swelling liquid preferably contains sodium hydroxide. Specifically, for example, the above-mentioned swelling treatment is performed by a method of treating the cured product at a treatment temperature of 30°C to 85°C for 1 minute to 30 minutes using a 40% by weight ethylene glycol aqueous solution or the like. The temperature of the above-mentioned swelling treatment is preferably in the range of 50°C to 85°C. If the temperature of the above-mentioned swelling treatment is too low, the swelling treatment may take a long time, and the adhesive strength between the hardened product and the metal layer tends to decrease.

於上述粗化處理中例如可使用錳化合物、鉻化合物或過硫酸化合物等化學氧化劑等。該等化學氧化劑於添加水或有機溶劑後,可用作水溶液或有機溶劑分散溶液。粗化處理中所使用之粗化液通常包含鹼作為pH值調整劑等。粗化液較佳為包含氫氧化鈉。For the roughening treatment, for example, chemical oxidizing agents such as manganese compounds, chromium compounds, or persulfuric acid compounds can be used. These chemical oxidants can be used as aqueous solutions or organic solvent dispersion solutions after adding water or organic solvents. The roughening liquid used in the roughening treatment usually contains an alkali as a pH adjuster or the like. The roughening liquid preferably contains sodium hydroxide.

作為上述錳化合物,可列舉過錳酸鉀及過錳酸鈉等。作為上述鉻化合物,可列舉重鉻酸鉀及無水鉻酸鉀等。作為上述過硫酸化合物,可列舉:過硫酸鈉、過硫酸鉀及過硫酸銨等。As said manganese compound, potassium permanganate, sodium permanganate, etc. are mentioned. As said chromium compound, potassium dichromate, anhydrous potassium chromate, etc. are mentioned. As said persulfuric acid compound, sodium persulfate, potassium persulfate, ammonium persulfate, etc. are mentioned.

硬化物表面之算術平均粗糙度Ra較佳為10 nm以上,較佳為未達300 nm,更佳為未達200 nm,進而較佳為未達150 nm。於該情形時,硬化物與金屬層之接著強度增高,進而於絕緣層之表面形成更微細之佈線。進而,可抑制導體損耗,可將信號損耗抑制為較低。上述算術平均粗糙度Ra係依據JIS B0601:1994進行測定。The arithmetic average roughness Ra of the surface of the hardened object is preferably 10 nm or more, preferably less than 300 nm, more preferably less than 200 nm, and still more preferably less than 150 nm. In this case, the bonding strength between the hardened product and the metal layer is increased, and finer wiring is formed on the surface of the insulating layer. Furthermore, conductor loss can be suppressed, and signal loss can be suppressed low. The above-mentioned arithmetic average roughness Ra is measured in accordance with JIS B0601:1994.

(除膠渣處理) 存在於藉由使上述樹脂材料預硬化而獲得之硬化物上形成貫通孔之情形。於上述多層基板等中,作為貫通孔,形成通孔或穿通孔等。例如,通孔可藉由照射CO2 雷射等雷射而形成。通孔之直徑並無特別限定,為60 μm~80 μm左右。藉由形成上述貫通孔,多數情況下於通孔內之底部形成作為源自硬化物中所含之樹脂成分之樹脂之殘渣的膠渣。(Desmear treatment) There are cases where through holes are formed in the cured product obtained by pre-curing the above-mentioned resin material. In the above-mentioned multilayer substrate or the like, as a through hole, a through hole, a through hole, or the like is formed. For example, the through hole can be formed by irradiating a laser such as a CO 2 laser. The diameter of the through hole is not particularly limited, but is about 60 μm to 80 μm. By forming the above-mentioned through hole, in most cases, a scum, which is a residue of resin derived from the resin component contained in the hardened substance, is formed at the bottom of the through hole.

為了去除上述膠渣,硬化物之表面較佳為經除膠渣處理。除膠渣處理有時亦兼作並進行粗化處理。In order to remove the above-mentioned scum, the surface of the hardened object is preferably treated with scum removal. Desmear treatment is sometimes also used as a roughening treatment.

於上述除膠渣處理中,與上述粗化處理同樣地,例如可使用錳化合物、鉻化合物或過硫酸化合物等化學氧化劑等。該等化學氧化劑於添加水或有機溶劑後,可用作水溶液或有機溶劑分散溶液。除膠渣處理中所使用之除膠渣處理液通常包含鹼。除膠渣處理液較佳為包含氫氧化鈉。In the aforementioned desmear treatment, similar to the aforementioned roughening treatment, for example, chemical oxidizing agents such as manganese compounds, chromium compounds, or persulfuric acid compounds can be used. These chemical oxidants can be used as aqueous solutions or organic solvent dispersion solutions after adding water or organic solvents. The desmear treatment liquid used in the desmear treatment usually contains an alkali. The desmear treatment liquid preferably contains sodium hydroxide.

藉由使用上述樹脂材料,經除膠渣處理之硬化物表面之表面粗糙度變得足夠小。By using the above-mentioned resin material, the surface roughness of the surface of the hardened object after desmearing treatment becomes sufficiently small.

以下,列舉藉由實施例及比較例,具體地說明本發明。本發明並不限定於以下之實施例。Hereinafter, the present invention will be explained concretely by way of examples and comparative examples. The present invention is not limited to the following examples.

準備以下之材料。Prepare the following materials.

(化合物X) 化合物X-1: 依據以下之合成例1,合成下述式(X-1)所表示之化合物X-1(分子量4000)。(Compound X) Compound X-1: According to the following synthesis example 1, compound X-1 (molecular weight 4000) represented by the following formula (X-1) was synthesized.

<合成例1> 向500 mL之圓底燒瓶中加入90 g之甲苯、46 g之N-甲基-2-吡咯啶酮(NMP)、及9 g之甲磺酸。繼而,添加三環癸烷二胺15.6 g(80 mmol)。繼而,少量逐步添加3,3',4,4'-聯苯四羧酸二酐17.7 g(60 mmol)。繼而,於迪安-斯塔克裝置上安裝圓底燒瓶,進行3.5小時加熱回流。如此獲得於末端具有酸酐結構且具有複數個醯亞胺骨架之化合物。去除縮合時排出之水分,恢復至室溫後,添加順丁烯二酸酐4.42 g(45 mmol)並攪拌,同樣地進行加熱而使之反應。利用水與乙醇之混合溶劑洗淨有機層後,去除混合溶劑,而獲得甲苯溶液。繼而,向甲苯溶液中添加異丙醇而進行產物之再沈澱。其後利用真空烘箱使之乾燥,而獲得化合物X-1。<Synthesis example 1> A 500 mL round bottom flask was charged with 90 g of toluene, 46 g of N-methyl-2-pyrrolidone (NMP), and 9 g of methanesulfonic acid. Then, 15.6 g (80 mmol) of tricyclodecane diamine was added. Then, 17.7 g (60 mmol) of 3,3',4,4'-biphenyltetracarboxylic dianhydride was gradually added in small amounts. Then, a round-bottomed flask was installed on the Dean-Stark device, and heating and refluxing were performed for 3.5 hours. In this way, a compound having an acid anhydride structure at the end and a plurality of imine skeletons is obtained. The water discharged during the condensation was removed, and after returning to room temperature, 4.42 g (45 mmol) of maleic anhydride was added and stirred, and the mixture was heated and reacted in the same manner. After washing the organic layer with a mixed solvent of water and ethanol, the mixed solvent is removed to obtain a toluene solution. Then, isopropanol was added to the toluene solution to perform reprecipitation of the product. Then, it was dried in a vacuum oven to obtain compound X-1.

[化19]

Figure 02_image039
[化19]
Figure 02_image039

化合物X-2: 依據以下之合成例2,合成下述式(X-2)所表示之化合物X-2(分子量4500)。於所獲得之化合物X-2中,源自二胺化合物之骨架之全部結構單元100莫耳%中,源自三環癸烷二胺之第1骨架之平均比率為72莫耳%,源自二聚二胺之第2骨架之平均比率為28莫耳%。再者,下述式(X-2)為合成例2中所獲得之化合物X-2之一例,化合物X-2係以各胺之位置不同之化合物之混合物之形式獲得。Compound X-2: According to the following synthesis example 2, compound X-2 (molecular weight 4500) represented by the following formula (X-2) was synthesized. In the obtained compound X-2, in 100 mol% of all structural units derived from the skeleton of the diamine compound, the average ratio of the first skeleton derived from tricyclodecane diamine was 72 mol%, which was derived from The average ratio of the second skeleton of dimer diamine is 28 mol%. Furthermore, the following formula (X-2) is an example of the compound X-2 obtained in Synthesis Example 2. The compound X-2 is obtained as a mixture of compounds with different positions of each amine.

<合成例2> 向500 mL之圓底燒瓶中加入90 g之甲苯、46 g之N-甲基-2-吡咯啶酮(NMP)、及7 g之甲磺酸。繼而,添加二聚二胺(Croda Japan公司製造之「PRIAMINE1075」)6.6 g(16 mmol)、及三環癸烷二胺12.5 g(64 mmol)。繼而,少量逐步添加3,3',4,4'-聯苯四羧酸二酐17.7 g(60 mmol)。於迪安-斯塔克裝置上安裝圓底燒瓶,進行3.5小時加熱回流。如此獲得於兩末端具有胺且具有複數個醯亞胺骨架之化合物。去除縮合時排出之水分,恢復至室溫後,添加順丁烯二酸酐4.42 g(45 mmol)並攪拌,同樣地進行加熱而使之反應。如此獲得於兩末端具有順丁烯二醯亞胺骨架之化合物。利用水與乙醇之混合溶劑洗淨有機層後,去除混合溶劑,而獲得甲苯溶液。繼而,向甲苯溶液中添加異丙醇而進行產物之再沈澱。其後利用真空烘箱使之乾燥,而獲得化合物X-2。<Synthesis example 2> A 500 mL round bottom flask was charged with 90 g of toluene, 46 g of N-methyl-2-pyrrolidone (NMP), and 7 g of methanesulfonic acid. Next, 6.6 g (16 mmol) of dimer diamine ("PRIAMINE 1075" manufactured by Croda Japan) and 12.5 g (64 mmol) of tricyclodecane diamine were added. Then, 17.7 g (60 mmol) of 3,3',4,4'-biphenyltetracarboxylic dianhydride was gradually added in small amounts. A round-bottomed flask was installed on the Dean-Stark device and heated to reflux for 3.5 hours. In this way, a compound having an amine at both ends and a plurality of imidine skeletons is obtained. The water discharged during the condensation was removed, and after returning to room temperature, 4.42 g (45 mmol) of maleic anhydride was added and stirred, and the mixture was heated and reacted in the same manner. In this way, a compound having a maleimide skeleton at both ends is obtained. After washing the organic layer with a mixed solvent of water and ethanol, the mixed solvent is removed to obtain a toluene solution. Then, isopropanol was added to the toluene solution to perform reprecipitation of the product. Then, it was dried in a vacuum oven to obtain compound X-2.

[化20]

Figure 02_image041
[化20]
Figure 02_image041

化合物X-3: 依據以下之合成例3,合成下述式(X-3)所表示之化合物X-3(分子量4200)。於所獲得之化合物X-3中,源自二胺化合物之骨架之全部結構單元100莫耳%中,源自三環癸烷二胺之第1骨架之平均比率為75莫耳%,源自二聚二胺之第2骨架之平均比率為25莫耳%。再者,下述式(X-3)為合成例3中所獲得之化合物X-3之一例,化合物X-3係以各胺之位置不同之化合物之混合物之形式獲得。Compound X-3: According to the following synthesis example 3, compound X-3 (molecular weight 4200) represented by the following formula (X-3) was synthesized. In the obtained compound X-3, in 100 mol% of all structural units derived from the skeleton of the diamine compound, the average ratio of the first skeleton derived from tricyclodecane diamine is 75 mol%, which is derived from The average ratio of the second skeleton of dimer diamine is 25 mol%. Furthermore, the following formula (X-3) is an example of the compound X-3 obtained in Synthesis Example 3. The compound X-3 is obtained as a mixture of compounds having different positions of each amine.

<合成例3> 向500 mL之圓底燒瓶中加入90 g之甲苯、46 g之N-甲基-2-吡咯啶酮(NMP)、及7 g之甲磺酸。繼而,添加二聚二胺(Croda Japan公司製造之「PRIAMINE1075」)6.6 g(16 mmol)、及降𦯉烷二胺(Mitsui Fine Chemicals公司製造之「Pro-NBDA」9.9 g(64 mmol)。繼而,混合3,3',4,4'-聯苯四羧酸二酐15.9 g(54 mmol)、及雙環[2.2.2]辛-7-烯-2,3,5,6-四羧酸二酐1.5 g(6 mmol)後,少量逐步添加。於迪安-斯塔克裝置上安裝圓底燒瓶,進行3.5小時加熱回流。如此獲得於兩末端具有胺且具有複數個醯亞胺骨架之化合物。去除縮合時排出之水分,恢復至室溫後,添加順丁烯二酸酐4.42 g(45 mmol)並攪拌,同樣地進行加熱而使之反應。如此獲得於兩末端具有順丁烯二醯亞胺骨架之化合物。利用水與乙醇之混合溶劑洗淨有機層後,去除混合溶劑,而獲得化合物X-3之甲苯溶液。<Synthesis example 3> A 500 mL round bottom flask was charged with 90 g of toluene, 46 g of N-methyl-2-pyrrolidone (NMP), and 7 g of methanesulfonic acid. Then, 6.6 g (16 mmol) of dimer diamine ("PRIAMINE 1075" manufactured by Croda Japan) and 9.9 g (64 mmol) of noralane diamine ("Pro-NBDA" manufactured by Mitsui Fine Chemicals) were added. , Mix 3,3',4,4'-biphenyltetracarboxylic dianhydride 15.9 g (54 mmol), and bicyclo[2.2.2]oct-7-ene-2,3,5,6-tetracarboxylic acid After 1.5 g (6 mmol) of dianhydride, a small amount was added gradually. A round-bottom flask was installed on the Dean-Stark apparatus and heated to reflux for 3.5 hours. In this way, a product with an amine at both ends and a plurality of imine skeletons was obtained. Compound. After removing the water discharged during the condensation and returning to room temperature, 4.42 g (45 mmol) of maleic anhydride was added and stirred, and heated in the same way to react. In this way, the maleic acid at both ends was obtained. A compound of imine skeleton. After washing the organic layer with a mixed solvent of water and ethanol, the mixed solvent is removed to obtain a toluene solution of compound X-3.

[化21]

Figure 02_image043
[化21]
Figure 02_image043

(不相當於化合物X之化合物(化合物Y)) 化合物Y-1: 依據以下之合成例4,合成化合物Y-1(分子量3300)。(Compounds not equivalent to compound X (compound Y)) Compound Y-1: According to Synthesis Example 4 below, compound Y-1 (molecular weight 3300) was synthesized.

<合成例4> 向500 mL之圓底燒瓶中加入90 g之甲苯、46 g之N-甲基-2-吡咯啶酮(NMP)、及9 g之甲磺酸。繼而,添加三環癸烷二胺15.6 g(80 mmol)。繼而,少量逐步地添加均苯四甲酸二酐13.1 g(60 mmol)。繼而,於迪安-斯塔克裝置上安裝圓底燒瓶,進行3.5小時加熱回流。如此獲得於末端具有酸酐結構且具有複數個醯亞胺骨架之化合物。將縮合時所排出之水分去除,恢復至室溫後,添加順丁烯二酸酐4.42 g(45 mmol)並進行攪拌,同樣地進行加熱而進行反應。利用水與乙醇之混合溶劑來洗淨有機層後,去除混合溶劑,而獲得甲苯溶液。繼而,向甲苯溶液中添加異丙醇,進行產物之再沈澱。其後利用真空烘箱進行乾燥,而獲得化合物Y-1。<Synthesis example 4> A 500 mL round bottom flask was charged with 90 g of toluene, 46 g of N-methyl-2-pyrrolidone (NMP), and 9 g of methanesulfonic acid. Then, 15.6 g (80 mmol) of tricyclodecane diamine was added. Then, 13.1 g (60 mmol) of pyromellitic dianhydride was gradually added in small amounts. Then, a round-bottomed flask was installed on the Dean-Stark device, and heating and refluxing were performed for 3.5 hours. In this way, a compound having an acid anhydride structure at the end and a plurality of imine skeletons is obtained. The water discharged during the condensation was removed, and after returning to room temperature, 4.42 g (45 mmol) of maleic anhydride was added and stirred, and the reaction was carried out by heating in the same manner. After washing the organic layer with a mixed solvent of water and ethanol, the mixed solvent is removed to obtain a toluene solution. Then, isopropanol was added to the toluene solution to perform reprecipitation of the product. After that, it was dried in a vacuum oven to obtain compound Y-1.

化合物Y-2: 依據以下之合成例5,合成化合物Y-2(分子量5100)。Compound Y-2: According to Synthesis Example 5 below, compound Y-2 (molecular weight 5100) was synthesized.

<合成例5> 向500 mL之圓底燒瓶中加入90 g之甲苯、46 g之N-甲基-2-吡咯啶酮(NMP)、及7 g之甲磺酸。繼而,添加二聚二胺(Croda Japan公司製造之「PRIAMINE1075」)6.6 g(16 mmol)、及三環癸烷二胺12.5 g(64 mmol)。繼而,少量逐步地添加BisA型酸二酐31.3 g(60 mmol)。於迪安-斯塔克裝置上安裝圓底燒瓶,進行3.5小時加熱回流。如此獲得於兩末端具有胺且具有複數個醯亞胺骨架之化合物。將縮合時所排出之水分去除,恢復至室溫後,添加順丁烯二酸酐4.42 g(45 mmol)並進行攪拌,同樣地進行加熱來進行反應。如此獲得於兩末端具有順丁烯二醯亞胺骨架之化合物。利用水與乙醇之混合溶劑洗淨有機層後,去除混合溶劑而獲得甲苯溶液。繼而,向甲苯溶液中添加異丙醇,進行產物之再沈澱。其後利用真空烘箱進行乾燥,而獲得化合物Y-2。<Synthesis example 5> A 500 mL round bottom flask was charged with 90 g of toluene, 46 g of N-methyl-2-pyrrolidone (NMP), and 7 g of methanesulfonic acid. Next, 6.6 g (16 mmol) of dimer diamine ("PRIAMINE 1075" manufactured by Croda Japan) and 12.5 g (64 mmol) of tricyclodecane diamine were added. Then, 31.3 g (60 mmol) of BisA type acid dianhydride was gradually added in small amounts. A round-bottomed flask was installed on the Dean-Stark device and heated to reflux for 3.5 hours. In this way, a compound having an amine at both ends and a plurality of imidine skeletons is obtained. The water discharged during the condensation was removed, and after returning to room temperature, 4.42 g (45 mmol) of maleic anhydride was added and stirred, and the reaction was performed by heating in the same manner. In this way, a compound having a maleimide skeleton at both ends is obtained. After washing the organic layer with a mixed solvent of water and ethanol, the mixed solvent is removed to obtain a toluene solution. Then, isopropanol was added to the toluene solution to perform reprecipitation of the product. After that, it was dried in a vacuum oven to obtain compound Y-2.

合成例1-5中所合成之化合物X及化合物Y之分子量係以如下方式求出。The molecular weights of compound X and compound Y synthesized in Synthesis Example 1-5 were determined as follows.

GPC(凝膠滲透層析法)測定: 使用島津製作所公司製造之高速液相層析儀系統,將四氫呋喃(THF)作為展開溶劑,於管柱溫度40℃、流速1.0 ml/min下進行測定。使用「SPD-10A」作為檢測器,管柱係將Shodex公司製造之「KF-804L」(排除極限分子量400,000)2根串聯來使用。使用Tosoh公司製造之「TSK標準聚苯乙烯」作為標準聚苯乙烯,使用重量平均分子量Mw=354,000、189,000、98,900、37,200、17,100、9,830、5,870、2,500、1,050、500之物質而製作校準曲線,並進行分子量之計算。GPC (Gel Permeation Chromatography) measurement: Using a high-speed liquid chromatograph system manufactured by Shimadzu Corporation, using tetrahydrofuran (THF) as a developing solvent, the measurement was performed at a column temperature of 40°C and a flow rate of 1.0 ml/min. Use "SPD-10A" as a detector, and use two columns of "KF-804L" (excluded limit molecular weight 400,000) manufactured by Shodex Corporation in series. Use "TSK Standard Polystyrene" manufactured by Tosoh Corporation as the standard polystyrene, and use the weight average molecular weight Mw=354,000, 189,000, 98,900, 37,200, 17,100, 9,830, 5,870, 2,500, 1,050, 500 to create the calibration curve. And calculate the molecular weight.

合成例2、3中所合成之化合物X-2、X-3之各骨架之平均比率係藉由1 H-NMR(Nuclear Magnetic Resonance,核磁共振)並根據與鍵結於構成各自二胺骨架之氮原子之碳原子鍵結之氫原子之訊號的面積比算出。The average ratios of the skeletons of the compounds X-2 and X-3 synthesized in Synthesis Examples 2 and 3 were determined by 1 H-NMR (Nuclear Magnetic Resonance, nuclear magnetic resonance) and based on the bond to the structure of the respective diamine skeletons. Calculate the area ratio of the signal of the hydrogen atom bonded to the carbon atom of the nitrogen atom.

(熱硬化性化合物) 聯苯型環氧化合物(日本化藥公司製造之「NC-3000」) 萘型環氧化合物(新日鐵住金化學公司製造之「ESN-475V」) 間苯二酚二縮水甘油醚(Nagase chemtex公司製造之「EX-201」) 具有縮水甘油基胺骨架之環氧化合物(三菱化學公司製造之「630」) 具有聚丁二烯骨架之環氧化合物(Daicel公司製造之「PB3600」) 具有醯胺骨架之環氧化合物(日本化藥公司製造之「WHR-991S」) 多支鏈脂肪族環氧化合物(日產化學公司製造之「FoldiE101」) 順丁烯二醯亞胺化合物1(Designer Molecules Inc.製造之「BMI-689」) 順丁烯二醯亞胺化合物2(N-烷基雙順丁烯二醯亞胺化合物、Designer Molecules Inc.製造之「BMI-1500」) 順丁烯二醯亞胺化合物3(N-烷基雙順丁烯二醯亞胺化合物、Designer Molecules Inc.製造之「BMI-1700」) 順丁烯二醯亞胺化合物4(大和化成公司製造之「BMI-4100」) 順丁烯二醯亞胺化合物5(日本化藥公司製造之「MIR-3000」) 苯乙烯化合物(三菱瓦斯化學「OPE-2St-1200」、自由基硬化性化合物、具有苯醚骨架之苯乙烯化合物) 丙烯酸酯化合物(共榮社化學公司製造之「Light Acrylate DCP-A」、自由基硬化性化合物、表中縮寫為「DCP-A」)(Thermosetting compound) Biphenyl type epoxy compound ("NC-3000" manufactured by Nippon Kayaku Co., Ltd.) Naphthalene epoxy compound ("ESN-475V" manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.) Resorcinol diglycidyl ether ("EX-201" manufactured by Nagase chemtex) Epoxy compound with glycidylamine skeleton ("630" manufactured by Mitsubishi Chemical Corporation) Epoxy compound with polybutadiene skeleton ("PB3600" manufactured by Daicel) Epoxy compound with amide skeleton ("WHR-991S" manufactured by Nippon Kayaku Co., Ltd.) Multi-branched aliphatic epoxy compound ("FoldiE101" manufactured by Nissan Chemical Co., Ltd.) Maleimide compound 1 ("BMI-689" manufactured by Designer Molecules Inc.) Maleimide compound 2 (N-alkyl bismaleimide compound, "BMI-1500" manufactured by Designer Molecules Inc.) Maleimide compound 3 (N-alkyl bismaleimide compound, "BMI-1700" manufactured by Designer Molecules Inc.) Maleimide compound 4 (“BMI-4100” manufactured by Daiwa Chemical Co., Ltd.) Maleimide compound 5 ("MIR-3000" manufactured by Nippon Kayaku Co., Ltd.) Styrene compounds (Mitsubishi Gas Chemical "OPE-2St-1200", radical curable compounds, styrene compounds with phenyl ether skeleton) Acrylate compound ("Light Acrylate DCP-A" manufactured by Kyoeisha Chemical Co., Ltd., free radical hardening compound, abbreviated as "DCP-A" in the table)

(無機填充材) 含二氧化矽之漿料(二氧化矽75重量%:Admatechs公司製造之「SC4050-HOA」、平均粒徑1.0 μm、胺基矽烷處理、環己酮25重量%)(Inorganic filler) Silica-containing slurry (75% by weight of silica: "SC4050-HOA" manufactured by Admatechs, average particle size of 1.0 μm, aminosilane treatment, 25% by weight of cyclohexanone)

(硬化劑) 含活性酯化合物1之溶液(DIC公司製造之「EXB-9416-70BK」、固形物成分70重量%) 含活性酯化合物2之溶液(DIC公司製造之「HPC-8150-62T」、固形物成分62重量%) 含活性酯化合物3之溶液(DIC公司製造之「HPC-8000L-65T」、固形物成分65重量%) 活性酯化合物4(DIC公司製造之「EXB-8」、固形物成分100重量%) 碳二醯亞胺化合物(日清紡化學公司製造之「Carbodilite V-03」、表中縮寫為「V-03」) 含酚化合物之溶液(DIC公司製造之「LA-1356」、固形物成分60重量%、具有胺基三𠯤骨架之酚化合物)(hardener) Solution containing active ester compound 1 ("EXB-9416-70BK" manufactured by DIC Corporation, 70% by weight of solid content) Solution containing active ester compound 2 ("HPC-8150-62T" manufactured by DIC Corporation, 62% by weight of solid content) Solution containing active ester compound 3 ("HPC-8000L-65T" manufactured by DIC Corporation, 65% by weight of solid content) Active ester compound 4 ("EXB-8" manufactured by DIC, 100% by weight of solid content) Carbodilite imide compound ("Carbodilite V-03" manufactured by Nisshinbo Chemical Co., Ltd., abbreviated as "V-03" in the table) Phenolic compound-containing solution ("LA-1356" manufactured by DIC, 60% by weight solid content, phenolic compound with an amino tri-skeleton)

(硬化促進劑) 二甲胺基吡啶(和光純藥工業公司製造之「DMAP」) 2-苯基-4-甲基咪唑(四國化成工業公司製造之「2P4MZ」、陰離子性硬化促進劑) 過氧化二異丙苯(Hardening accelerator) Dimethylaminopyridine ("DMAP" manufactured by Wako Pure Chemical Industries, Ltd.) 2-Phenyl-4-methylimidazole ("2P4MZ", anionic hardening accelerator manufactured by Shikoku Chemical Industry Co., Ltd.) Dicumyl peroxide

(熱塑性樹脂) 苯乙烯丁二烯樹脂(旭化成公司製造之「Tuftec H1043」、表中縮寫為「H1043」) 未氫化脂環族/芳香族烴樹脂(JXTG公司製造之「Neo Resin EP-140」、表中縮寫為「EP-140」) 聚醯亞胺化合物(聚醯亞胺樹脂): 依據以下之合成例6合成作為四羧酸二酐與二聚二胺之反應物之含聚醯亞胺化合物之溶液(不揮發成分26.8重量%)。(Thermoplastic resin) Styrene butadiene resin ("Tuftec H1043" manufactured by Asahi Kasei Co., Ltd., abbreviated as "H1043" in the table) Unhydrogenated alicyclic/aromatic hydrocarbon resin ("Neo Resin EP-140" manufactured by JXTG, abbreviated as "EP-140" in the table) Polyimide compound (polyimide resin): According to Synthesis Example 6 below, a solution containing a polyimide compound (non-volatile content 26.8% by weight) as a reactant of tetracarboxylic dianhydride and dimerdiamine was synthesized.

<合成例6> 向具備攪拌機、分水器、溫度計及氮氣導入管之反應容器中添加四羧酸二酐(SABIC JAPAN LLC製造之「BisDA-1000」)300.0 g、及環己酮665.5 g,將反應容器中之溶液加熱至60℃。繼而,向反應容器中滴加二聚二胺(Croda Japan公司製造之「PRIAMINE1075」)89.0 g、及1,3-二胺基甲基環己烷(三菱瓦斯化學公司製造)54.7 g。繼而,向反應容器中添加甲基環己烷121.0 g、及乙二醇二甲醚423.5 g,於140℃下歷時10小時進行醯亞胺化反應。如此獲得含聚醯亞胺化合物之溶液(不揮發成分26.8重量%)。所獲得之聚醯亞胺化合物之分子量(重量平均分子量)為20000。再者,酸成分/胺成分之莫耳比為1.04。<Synthesis example 6> Add 300.0 g of tetracarboxylic dianhydride ("BisDA-1000" manufactured by SABIC JAPAN LLC) and 665.5 g of cyclohexanone to a reaction vessel equipped with a stirrer, a water trap, a thermometer, and a nitrogen introduction tube, and put it in the reaction vessel. The solution was heated to 60°C. Then, 89.0 g of dimer diamine ("PRIAMINE 1075" manufactured by Croda Japan) and 54.7 g of 1,3-diaminomethylcyclohexane (manufactured by Mitsubishi Gas Chemical Co., Ltd.) were dropped into the reaction vessel. Then, 121.0 g of methylcyclohexane and 423.5 g of ethylene glycol dimethyl ether were added to the reaction vessel, and the imidization reaction was performed at 140° C. for 10 hours. In this way, a solution containing a polyimide compound (non-volatile content 26.8% by weight) was obtained. The molecular weight (weight average molecular weight) of the obtained polyimide compound was 20,000. Furthermore, the molar ratio of acid component/amine component was 1.04.

合成例6中合成之聚醯亞胺化合物之分子量係以如下方式求出。The molecular weight of the polyimide compound synthesized in Synthesis Example 6 was determined as follows.

GPC(凝膠滲透層析法)測定: 使用島津製作所公司製造之高速液相層析儀系統,將四氫呋喃(THF)作為展開溶劑,於管柱溫度40℃、流速1.0 ml/min下進行測定。使用「SPD-10A」作為檢測器,管柱係將Shodex公司製造之「KF-804L」(排除極限分子量400,000)2根串聯而使用。使用Tosoh公司製造之「TSK標準聚苯乙烯」作為標準聚苯乙烯,使用重量平均分子量Mw=354,000、189,000、98,900、37,200、17,100、9,830、5,870、2,500、1,050、500之物質而製作校準曲線,並進行分子量之計算。GPC (Gel Permeation Chromatography) measurement: Using a high-speed liquid chromatograph system manufactured by Shimadzu Corporation, using tetrahydrofuran (THF) as a developing solvent, the measurement was performed at a column temperature of 40°C and a flow rate of 1.0 ml/min. Use "SPD-10A" as a detector, and use two columns of "KF-804L" manufactured by Shodex (excluding 400,000 limit molecular weight) in series. Use "TSK Standard Polystyrene" manufactured by Tosoh Corporation as the standard polystyrene, and use the weight average molecular weight Mw=354,000, 189,000, 98,900, 37,200, 17,100, 9,830, 5,870, 2,500, 1,050, 500 to create the calibration curve. And calculate the molecular weight.

(實施例1~9及比較例1~5) 以下述表1~3所示之調配量(單位為固形物成分重量份)調配下述表1~3所示之成分,並於常溫下攪拌直至成為均勻之溶液,而獲得樹脂材料。(Examples 1 to 9 and Comparative Examples 1 to 5) The ingredients shown in the following Tables 1 to 3 were blended in the blending amounts shown in the following Tables 1 to 3 (units are parts by weight of the solid content), and stirred at room temperature until it becomes a uniform solution to obtain a resin material.

樹脂膜之製作: 使用敷料器,於經脫模處理之PET(Polyethylene Terephthalate,聚對苯二甲酸乙二酯)膜(Toray公司製造之「XG284」、厚度25 μm)之脫模處理面上塗敷所獲得之樹脂材料後,於100℃之齒輪烘箱內進行乾燥2分30秒鐘,使溶劑揮發。如此獲得於PET膜上積層有厚度為40 μm之樹脂膜(B階膜)之積層膜(PET膜與樹脂膜之積層膜)。Production of resin film: Using an applicator, apply the obtained resin material on the demolding surface of a PET (Polyethylene Terephthalate) film ("XG284" manufactured by Toray, thickness 25 μm) that has been demolded After that, it was dried in a gear oven at 100°C for 2 minutes and 30 seconds to volatilize the solvent. In this way, a laminate film (a laminate film of a PET film and a resin film) in which a resin film (B-stage film) having a thickness of 40 μm was laminated on the PET film was obtained.

(評價) (1)介電損耗因數 將所獲得之樹脂膜於190℃下加熱90分鐘而獲得硬化物。將所獲得之硬化物裁切為寬度2 mm、長度80 mm之大小,將10片重疊,使用關東電子應用開發公司製造之「空腔共振擾動法介電常數測定裝置CP521」及Keysight Technologies公司製造之「網路分析儀N5224A PNA」,藉由空腔共振法於常溫(23℃)下,於頻率5.8 GHz下測定介電損耗因數。(Evaluation) (1) Dielectric loss factor The obtained resin film was heated at 190°C for 90 minutes to obtain a cured product. The obtained hardened material was cut into a size of 2 mm in width and 80 mm in length, and 10 pieces were superimposed, using the "cavity resonance perturbation method dielectric constant measuring device CP521" manufactured by Kanto Electronics Application Development Co., Ltd. and manufactured by Keysight Technologies. The "Network Analyzer N5224A PNA" uses the cavity resonance method to measure the dielectric loss factor at room temperature (23°C) at a frequency of 5.8 GHz.

[介電損耗因數之判定基準] ○:介電損耗因數未達2.9×10-3 ×:介電損耗因數為2.9×10-3 以上[Criteria for the determination of dielectric loss factor] ○: The dielectric loss factor is less than 2.9×10 -3 ×: The dielectric loss factor is 2.9×10 -3 or more

(2)熱尺寸穩定性(平均線膨脹係數(CTE)) 將所獲得之厚度40 μm之樹脂膜(B階膜)於190℃下加熱90分鐘,將所獲得之硬化物裁切為3 mm×25 mm之大小。使用熱機械分析裝置(SII NanoTechnology公司製造之「EXSTAR TMA/SS6100」),於拉伸荷重33 mN及升溫速度5℃/min之條件下,算出裁切之硬化物於25℃~150℃之平均線膨脹係數(ppm/℃)。(2) Thermal dimensional stability (average coefficient of linear expansion (CTE)) The obtained resin film (B-stage film) with a thickness of 40 μm was heated at 190° C. for 90 minutes, and the obtained cured product was cut into a size of 3 mm×25 mm. Using a thermomechanical analysis device ("EXSTAR TMA/SS6100" manufactured by SII NanoTechnology), under the conditions of a tensile load of 33 mN and a heating rate of 5°C/min, calculate the average of the cut hardened material at 25°C to 150°C Coefficient of linear expansion (ppm/°C).

[平均線膨脹係數之判定基準] ○○:平均線膨脹係數為25 ppm/℃以下 ○:平均線膨脹係數超過25 ppm/℃且為29 ppm/℃以下 ×:平均線膨脹係數超過29 ppm/℃[Judgment criteria for average linear expansion coefficient] ○ ○: The average linear expansion coefficient is 25 ppm/℃ or less ○: The average linear expansion coefficient exceeds 25 ppm/℃ and is below 29 ppm/℃ ×: The average linear expansion coefficient exceeds 29 ppm/℃

(3)除膠渣性(通孔底之殘渣之去除性) 層壓、半硬化處理: 於所獲得之樹脂膜CCL(Copper Clad Laminate,覆銅積層板)基板(日立化成工業公司製造之「E679FG」)上進行真空層壓,於180℃下加熱30分鐘,使之半硬化。如此獲得於CCL基板上積層有樹脂膜之半硬化物之積層體A。(3) Desmear property (removability of residue at the bottom of the through hole) Laminated and semi-hardened treatment: Vacuum lamination was performed on the obtained resin film CCL (Copper Clad Laminate) substrate ("E679FG" manufactured by Hitachi Chemical Co., Ltd.), and heated at 180°C for 30 minutes to semi-cured. In this way, a laminate A in which a semi-cured resin film is laminated on a CCL substrate is obtained.

通孔(貫通孔)形成: 於所獲得之積層體A之樹脂膜之半硬化物上使用CO2 雷射(Hitachi Via Mechanics公司製造),形成於上端之直徑為60 μm、於下端(底部)之直徑為40 μm之通孔(貫通孔)。如此獲得於CCL基板上積層有樹脂膜之半硬化物,且於樹脂膜之半硬化物上形成有通孔(貫通孔)之積層體B。 Through hole (through hole) formation: Use CO 2 laser (manufactured by Hitachi Via Mechanics) on the semi-cured material of the resin film of the laminate A, formed at the upper end with a diameter of 60 μm and at the lower end (bottom) The diameter is 40 μm through holes (through holes). In this way, a laminate B in which a semi-cured resin film is laminated on the CCL substrate, and a through hole (through hole) is formed in the semi-cured resin film is obtained.

通孔之底部之殘渣之去除處理: (a)膨潤處理 向60℃之膨潤液(Atotech Japan公司製造之「Swelling Dip Securigant P」)中,加入所獲得之積層體B,振盪10分鐘。其後,利用純水洗淨。Removal of the residue at the bottom of the through hole: (a) Swelling treatment To a swelling liquid ("Swelling Dip Securigant P" manufactured by Atotech Japan Co., Ltd.) at 60°C, the obtained laminate B was added, and the mixture was shaken for 10 minutes. After that, it was washed with pure water.

(b)過錳酸鹽處理(粗化處理及除膠渣處理) 向80℃之過錳酸鉀(Atotech Japan公司製造之「Concentrate Compact CP」)粗化水溶液中,加入膨潤處理後之積層體B,振盪30分鐘。其次,使用25℃之洗淨液(Atotech Japan公司製造之「Reduction Securigant P」)進行2分鐘處理後,利用純水進行洗淨,而獲得評價樣品1。(b) Permanganate treatment (roughening treatment and desmear treatment) To a roughening aqueous solution of potassium permanganate ("Concentrate Compact CP" manufactured by Atotech Japan) at 80°C, the layered body B after swelling treatment was added, and the mixture was shaken for 30 minutes. Next, a 25°C washing solution ("Reduction Securigant P" manufactured by Atotech Japan) was treated for 2 minutes, and then washed with pure water to obtain evaluation sample 1.

利用掃描電子顯微鏡(SEM)觀察評價樣品1之通孔之底部,測定源自通孔底之壁面之最大膠渣長度。藉由以下之基準判定通孔底之殘渣之去除性。The bottom of the through hole of the evaluation sample 1 was observed with a scanning electron microscope (SEM), and the maximum scum length from the wall surface of the bottom of the through hole was determined. Use the following criteria to determine the removability of the residue at the bottom of the through hole.

[通孔底之殘渣之去除性之判定基準] ○○:最大膠渣長度未達2 μm ○:最大膠渣長度為2 μm以上且未達5 μm ×:最大膠渣長度為5 μm以上[Judgment criteria for the removal of residues at the bottom of the through hole] ○○: The maximum glue residue length is less than 2 μm ○: The maximum glue residue length is 2 μm or more and less than 5 μm ×: The maximum slag length is 5 μm or more

(4)蝕刻後之表面粗度(表面粗糙度)及表面粗度之均一性 層壓步驟及半硬化處理: 準備雙面銅箔積層板(CCL基板)(日立化成公司製造之「E679FG」)。將該雙面銅箔積層板之銅箔面之雙面浸漬於MEC公司製造之「Cz8101」中,對銅箔之表面進行粗化處理。於經粗化處理之銅箔積層板之雙面,使用名機製作所公司製造之「批次式真空貼合機MVLP-500-IIA」,將積層膜之樹脂膜(B階膜)側重疊於銅箔積層板上進行層壓,而獲得積層構造體。層壓之條件係設為如下條件:進行30秒減壓將氣壓設為13 hPa以下,其後於30秒鐘、100℃及壓力0.4 MPa下加壓。其後,於180℃下加熱30分鐘,使樹脂膜半硬化。如此獲得於CCL基板上積層有樹脂膜之半硬化物之積層體。(4) Surface roughness (surface roughness) and uniformity of surface roughness after etching Laminating steps and semi-hardening treatment: Prepare a double-sided copper-clad laminate (CCL substrate) ("E679FG" manufactured by Hitachi Chemical Co., Ltd.). The both sides of the copper foil surface of this double-sided copper foil laminated board were immersed in "Cz8101" manufactured by MEC Corporation, and the surface of the copper foil was roughened. On both sides of the copper foil laminated board that has been roughened, use the "Batch Vacuum Laminator MVLP-500-IIA" manufactured by Meike Manufacturing Co., Ltd. to overlap the resin film (B-stage film) side of the laminated film on the The copper foil laminated board is laminated to obtain a laminated structure. The conditions of lamination were as follows: pressure was reduced for 30 seconds, the air pressure was set to 13 hPa or less, and then pressure was applied at 100°C and 0.4 MPa for 30 seconds. After that, it was heated at 180°C for 30 minutes to semi-harden the resin film. In this way, a laminate in which a semi-cured resin film is laminated on a CCL substrate is obtained.

粗化處理: (a)膨潤處理: 向60℃之膨潤液(Atotech Japan公司製造之「Swelling Dip Securigant P」)中,加入所獲得之積層體,振盪10分鐘。其後,利用純水洗淨。Coarse treatment: (a) Swelling treatment: The obtained laminate was added to a swelling liquid ("Swelling Dip Securigant P" manufactured by Atotech Japan) at 60°C, and shaken for 10 minutes. After that, it was washed with pure water.

(b)過錳酸鹽處理(粗化處理及除膠渣處理): 向80℃之過錳酸鉀(Atotech Japan公司製造之「Concentrate Compact CP」)粗化水溶液中,加入膨潤處理後之積層體,振盪30分鐘。其次,使用25℃之洗淨液(Atotech Japan公司製造之「Reduction Securigant P」)進行2分鐘處理後,利用純水進行洗淨,而獲得評價樣品。(b) Permanganate treatment (roughening treatment and desmear treatment): The swelling-treated laminate was added to the roughening aqueous solution of potassium permanganate ("Concentrate Compact CP" manufactured by Atotech Japan) at 80°C and shaken for 30 minutes. Next, a 25°C washing solution ("Reduction Securigant P" manufactured by Atotech Japan) was treated for 2 minutes, and then washed with pure water to obtain an evaluation sample.

表面粗糙度之測定: 於評價樣品(粗化處理之硬化物)之表面,對94 μm×123 μm之領域選擇任意10部位。對該10部位之各領域,使用非接觸3維表面形狀測定裝置(Veeco公司製造之「WYKO NT1100」),測定算術平均粗糙度Ra。根據所測定之10部位之算術平均粗糙度Ra之平均值評價下述表面粗度,並根據所測定之10部位之算術平均粗糙度Ra之最大值與最小值之差的絕對值,評價下述表面粗糙度之均一性。再者,上述算術平均粗糙度Ra係依據JIS B0601:1994進行測定。Measurement of surface roughness: On the surface of the evaluation sample (hardened product after roughening treatment), select any 10 locations in the area of 94 μm×123 μm. A non-contact three-dimensional surface profile measuring device ("WYKO NT1100" manufactured by Veeco Corporation) was used to measure the arithmetic average roughness Ra for each area of the 10 locations. Evaluate the following surface roughness based on the average value of the arithmetic average roughness Ra of the 10 measured locations, and evaluate the following surface roughness based on the absolute value of the difference between the maximum and minimum values of the arithmetic average roughness Ra of the 10 measured locations Uniformity of surface roughness. In addition, the above-mentioned arithmetic average roughness Ra is measured in accordance with JIS B0601:1994.

[蝕刻後之表面粗度之判定基準] ○:算術平均粗糙度Ra之平均值未達50 nm △:算術平均粗糙度Ra之平均值為50 nm以上且未達80 nm ×:算術平均粗糙度Ra之平均值為80 nm以上[Criteria for judging surface roughness after etching] ○: The average value of the arithmetic average roughness Ra is less than 50 nm △: The average value of the arithmetic average roughness Ra is 50 nm or more and less than 80 nm ×: The average value of the arithmetic average roughness Ra is 80 nm or more

[蝕刻後之表面粗度(表面粗糙度)之均一性之判定基準] ○:算術平均粗糙度Ra之最大值與最小值之差之絕對值未達10 nm △:算術平均粗糙度Ra之最大值與最小值之差之絕對值為10 nm以上且未達20 nm ×:算術平均粗糙度Ra之最大值與最小值之差之絕對值為20 nm以上[Judgement criteria for uniformity of surface roughness (surface roughness) after etching] ○: The absolute value of the difference between the maximum and minimum arithmetic mean roughness Ra is less than 10 nm △: The absolute value of the difference between the maximum and minimum arithmetic mean roughness Ra is 10 nm or more and less than 20 nm ×: The absolute value of the difference between the maximum and minimum arithmetic average roughness Ra is 20 nm or more

(5)鍍覆剝離強度 層壓步驟及半硬化處理: 準備100 mm見方之雙面銅箔積層板(CCL基板)(日立化成公司製造之「E679FG」)。將該雙面銅箔積層板之銅箔面之雙面浸漬於MEC公司製造之「Cz8101」中,對銅箔之表面進行粗化處理。使用名機製作所公司製造之「批次式真空貼合機MVLP-500-IIA」,於經粗化處理之銅箔積層板之雙面,將積層膜之樹脂膜(B階膜)側重疊於銅箔積層板上進行層壓,而獲得積層構造體。層壓之條件係設為進行30秒減壓,將氣壓設為13 hPa以下,其後於30秒鐘、100℃及壓力0.7 MPa進行層壓,進而於加壓壓力0.8 MPa及加壓溫度100℃下加壓60秒鐘。其後,於安裝有PET膜之狀態下,將積層構造體中之樹脂膜於100℃下加熱30分鐘後,於180℃下30分鐘進而加熱,使樹脂膜半硬化。其後,藉由剝離PET膜,獲得於CCL基板上積層有樹脂膜之半硬化物之積層體。(5) Plating peel strength Laminating steps and semi-hardening treatment: Prepare a 100 mm square double-sided copper-clad laminate (CCL substrate) (“E679FG” manufactured by Hitachi Chemical Co., Ltd.). The both sides of the copper foil surface of this double-sided copper foil laminated board were immersed in "Cz8101" manufactured by MEC Corporation, and the surface of the copper foil was roughened. Using the "Batch Type Vacuum Laminator MVLP-500-IIA" manufactured by Meiji Manufacturing Co., Ltd., overlap the resin film (B-stage film) side of the laminated film on both sides of the roughened copper foil laminated board The copper foil laminated board is laminated to obtain a laminated structure. The lamination conditions are set to reduce pressure for 30 seconds, set the air pressure to 13 hPa or less, and then perform lamination at 100°C and 0.7 MPa for 30 seconds, and then at a pressure of 0.8 MPa and a pressure of 100 Press at ℃ for 60 seconds. Thereafter, with the PET film mounted, the resin film in the laminated structure was heated at 100°C for 30 minutes, and then further heated at 180°C for 30 minutes to semi-harden the resin film. Thereafter, by peeling off the PET film, a laminate in which a semi-cured resin film was laminated on the CCL substrate was obtained.

粗化處理: (a)膨潤處理: 向60℃之膨潤液(Atotech Japan公司製造之「Swelling Dip Securigant P」)中,加入所獲得之積層體,振盪10分鐘。其後,利用純水洗淨。Coarse treatment: (a) Swelling treatment: The obtained laminate was added to a swelling liquid ("Swelling Dip Securigant P" manufactured by Atotech Japan) at 60°C, and shaken for 10 minutes. After that, it was washed with pure water.

(b)過錳酸鹽處理(粗化處理及除膠渣處理): 向80℃之過錳酸鉀(Atotech Japan公司製造之「Concentrate Compact CP」)粗化水溶液中,加入膨潤處理後之積層體,振盪30分鐘。其次,使用25℃之洗淨液(Atotech Japan公司製造之「Reduction Securigant P」)進行2分鐘處理後,利用純水進行洗淨,並進行粗化處理。(b) Permanganate treatment (roughening treatment and desmear treatment): The swelling-treated laminate was added to the roughening aqueous solution of potassium permanganate ("Concentrate Compact CP" manufactured by Atotech Japan) at 80°C and shaken for 30 minutes. Next, a 25°C washing solution ("Reduction Securigant P" manufactured by Atotech Japan Co., Ltd.) was used for 2 minutes of treatment, then washed with pure water, and subjected to roughening treatment.

無電解鍍覆處理: 將所獲得之粗化處理之硬化物之表面利用60℃之鹼清潔液(Atotech Japan公司製造之「Cleaner Securigant 902」)進行5分鐘處理,並進行脫脂洗淨。洗淨後,將上述硬化物利用25℃之預浸液(Atotech Japan公司製造之「Pre-dip Neogant B」)進行2分鐘處理。其後,將上述硬化物利用40℃之活化劑液(Atotech Japan公司製造之「Activator Neogant 834」)進行5分鐘處理,並添加鈀觸媒。其次,利用30℃之還原液(Atotech Japan公司製造之「Reducer Neogant WA」),將硬化物進行5分鐘處理。Electroless plating treatment: The surface of the obtained roughened hardened product was treated with an alkaline cleaning solution ("Cleaner Securigant 902" manufactured by Atotech Japan Co., Ltd.) for 5 minutes at 60°C, and then degreased and washed. After washing, the cured product was treated with a 25°C prepreg ("Pre-dip Neogant B" manufactured by Atotech Japan) for 2 minutes. After that, the cured product was treated with an activator liquid ("Activator Neogant 834" manufactured by Atotech Japan Co., Ltd.) at 40°C for 5 minutes, and a palladium catalyst was added. Next, a 30°C reducing solution ("Reducer Neogant WA" manufactured by Atotech Japan) was used to process the hardened product for 5 minutes.

其次,將上述硬化物加入至化學銅液(Atotech Japan公司製造之「Basic Printganth MSK-DK」、「Copper Printganth MSK」、「Stabilizer Printganth MSK」、及「Reducer Cu」)中,實施無電解鍍覆直至鍍覆厚度成為0.5 μm左右。於無電解鍍覆後,去除殘留之氫氣,故於120℃之溫度下進行30分鐘退火處理。再者,至無電解鍍覆之步驟為止之所有步驟係以燒杯刻度將處理液設為2 L,一面振盪硬化物一面實施。Next, add the above-mentioned hardened material to the chemical copper solution ("Basic Printganth MSK-DK", "Copper Printganth MSK", "Stabilizer Printganth MSK", and "Reducer Cu" manufactured by Atotech Japan), and perform electroless plating Until the plating thickness becomes about 0.5 μm. After electroless plating, the residual hydrogen is removed, so an annealing treatment is carried out at a temperature of 120°C for 30 minutes. In addition, all the steps up to the step of electroless plating were performed with the treatment liquid set to 2 L with the scale of the beaker, and the hardened product was shaken.

電解電鍍處理: 其次,對經無電解鍍覆處理之硬化物實施電解電鍍直至鍍覆厚度成為25 μm。作為電解銅鍍覆使用硫酸銅溶液(和光純藥工業公司製造之「硫酸銅五水合物」、和光純藥工業公司製造之「硫酸」、Atotech Japan公司製造之「Basic Leveller Cupracid HL」、Atotech Japan公司製造之「修正劑Cupracid GS」),流入0.6 A/cm2 之電流,實施電解電鍍直至鍍覆厚度成為25 μm左右。於銅鍍覆處理後,將硬化物於200℃下進行60分鐘加熱,進而使硬化物硬化。如此獲得獲得銅鍍覆層積層於上表面而成之硬化物。Electrolytic plating treatment: Secondly, electrolytic plating is performed on the hardened product after electroless plating treatment until the plating thickness becomes 25 μm. For electrolytic copper plating, copper sulfate solution ("copper sulfate pentahydrate" manufactured by Wako Pure Chemical Industries, Ltd., "sulfuric acid" manufactured by Wako Pure Chemical Industries, Ltd., "Basic Leveller Cupracid HL" manufactured by Atotech Japan, and Atotech Japan The "Correction Agent Cupracid GS" manufactured by the company) is supplied with a current of 0.6 A/cm 2 and electrolytic plating is performed until the plating thickness becomes about 25 μm. After the copper plating treatment, the hardened product is heated at 200°C for 60 minutes to further harden the hardened product. In this way, a hardened product in which a copper plating layer is laminated on the upper surface is obtained.

鍍覆剝離強度之測定: 於所獲得之銅鍍覆層積層於上表面而成之硬化物之銅鍍覆層之表面,以5 mm間隔置入合計6部位之10 mm寬之短條狀之切口。於90°剝離試驗機(TESTER SANGYO公司製造之「TE-3001」)上設置銅鍍覆層積層於上表面而成之硬化物,利用夾具抓起置入有切口之銅鍍覆層之端部,將銅鍍覆層剝離20 mm,並測定剝離強度(鍍覆剝離強度)。對6部位之切口部位分別測定剝離強度(鍍覆剝離強度),求出鍍覆剝離強度之平均值。藉由下述基準對鍍覆剝離強度進行判定。Measurement of plating peel strength: A total of 6 short 10 mm wide slits are placed at 5 mm intervals on the surface of the hardened copper plating layer of the obtained copper plating layer laminated on the upper surface. Set up a hardened product made of copper plating layer on the upper surface on a 90° peeling tester ("TE-3001" manufactured by TESTER SANGYO), and use a jig to pick up the end of the cut copper plating layer , The copper plating layer was peeled off by 20 mm, and the peel strength (plating peel strength) was measured. The peeling strength (plating peeling strength) was measured for each of the 6 cut portions, and the average value of the plating peeling strength was determined. The plating peel strength was judged based on the following criteria.

[鍍覆剝離強度之判定基準] ○○:鍍覆剝離強度之平均值為0.5 kgf/cm以上 ○:鍍覆剝離強度之平均值為0.45 kgf/cm以上且未達0.5 kgf/cm △:鍍覆剝離強度之平均值為0.35 kgf/cm以上且未達0.45 kgf/cm ×:鍍覆剝離強度之平均值未達0.35 kgf/cm[Criteria for determination of plating peel strength] ○ ○: The average value of plating peel strength is 0.5 kgf/cm or more ○: The average value of plating peel strength is 0.45 kgf/cm or more and less than 0.5 kgf/cm △: The average peel strength of the coating is 0.35 kgf/cm or more and less than 0.45 kgf/cm ×: The average value of plating peel strength is less than 0.35 kgf/cm

將組成及結果示於下述表1~3。The composition and results are shown in Tables 1 to 3 below.

[表1]       實施例1 實施例2 實施例3 實施例4 實施例5 化合物X 化合物X-1 合成例1 重量份 4.5             化合物X-2 合成例2 重量份    4.5          化合物X-3 合成例3 重量份       4.5 4.4 5.4 化合物Y(不相當於化合物X之化合物) 化合物Y-1 合成例4 重量份                化合物Y-2 合成例5 重量份                熱硬化性化合物 聯苯型環氧化合物 NC-3000 重量份 4.1 4.1 4.1 5.0 3.4 萘型環氧化合物 ESN-475V 重量份 4.1 4.1 4.1 4.5 4.0 間苯二酚二縮水甘油醚 EX-201 重量份 1.6 1.6 1.6 0.8 0.8 具有縮水甘油基胺骨架之環氧化合物 630 重量份             0.2 具有聚丁二烯骨架之環氧化合物 PB3600 重量份             0.5 具有醯胺骨架之環氧化合物 WHR-991S 重量份             1.2 多支鏈脂肪族環氧化合物 FoldiE101 重量份 1.8 1.8 1.8 2.2 1.8 順丁烯二醯亞胺化合物1 BM1-689 重量份          0.3    順丁烯二醯亞胺化合物2 BMI-1500 重量份                順丁烯二醯亞胺化合物3 BMI-1700 重量份                順丁烯二醯亞胺化合物4 BM1-4100 重量份                順丁烯二醯亞胺化合物5 MIR-3000 重量份          0.3    苯乙烯化合物(自由基硬化性化合物) 0PE-2St-1200 重量份                丙烯酸酯化合物(自由基硬化性化合物) DCP-A 重量份                無機填充材 二氧化矽 SC4050-H0A 重量份 70 70 70 70 70 硬化劑 活性酯化合物1 EXB-9416-70BK 重量份 4.9 4.9 4.9       活性酯化合物2 HPC-8150-62T 重量份 5.2 5.2 5.2 4.8 5.0 活性酯化合物3 HPC-8000L-65T 重量份          1.7 1.8 活性酯化合物4 EXB-8 重量份          2.9 2.9 碳二醯亞胺化合物 V-03 重量份             0.4 苯酚化合物 LA-1356 重量份 0.6 0.6 0.6 0.5 0.3 硬化促進劑 二甲胺基吡啶 DMAP 重量份 0.03 0.03 0.03 0.03 0.03 2-苯基-4-甲基咪唑 2P4MZ 重量份 0.28 0.28 0.28 0.26 0.26 過氧化二異丙苯    重量份                熱塑性樹脂 聚醯亞胺化合物 合成例6 重量份 2.7 2.7 2.7 2.0 2.0 苯乙烯丁二烯樹脂 H1043 重量份                未氫化脂環族/芳香族烴樹脂 EP140 重量份          0.4    樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,化合物X之含量 重量% 15 15 15 15 18 樹脂材料中之除溶劑以外之成分100重量%中,無機填充材之含量 重量% 70 70 70 70 70 評價 介電損耗因數 ×10-3 2.85 2.70 2.65 2.50 2.80 判定 熱尺寸穩定性(平均線膨脹係數(CTE)) ppm/℃ 19 24 25 24 24 判定 ○○ ○○ ○○ ○○ ○○ 除膠渣性 判定 ○○ ○○ ○○ ○○ ○○ 蝕刻後之表面粗度(表面粗糙度) Ra之平均值 nm 32 48 45 40 48 表面粗度 判定 Ra之最大值 nm 35 51 49 44 52 Ra之最小值 nm 28 45 41 37 44 均一性 判定 鍍覆剝離強度 判定 ○○ ○○ ○○ [Table 1] Example 1 Example 2 Example 3 Example 4 Example 5 Compound X Compound X-1 Synthesis example 1 Parts by weight 4.5 Compound X-2 Synthesis Example 2 Parts by weight 4.5 Compound X-3 Synthesis Example 3 Parts by weight 4.5 4.4 5.4 Compound Y (compound not equivalent to compound X) Compound Y-1 Synthesis Example 4 Parts by weight Compound Y-2 Synthesis Example 5 Parts by weight Thermosetting compound Biphenyl type epoxy compound NC-3000 Parts by weight 4.1 4.1 4.1 5.0 3.4 Naphthalene type epoxy compound ESN-475V Parts by weight 4.1 4.1 4.1 4.5 4.0 Resorcinol diglycidyl ether EX-201 Parts by weight 1.6 1.6 1.6 0.8 0.8 Epoxy compound with glycidylamine skeleton 630 Parts by weight 0.2 Epoxy compound with polybutadiene skeleton PB3600 Parts by weight 0.5 Epoxy compound with amide skeleton WHR-991S Parts by weight 1.2 Multi-branched aliphatic epoxy compound FoldiE101 Parts by weight 1.8 1.8 1.8 2.2 1.8 Maleimide compound 1 BM1-689 Parts by weight 0.3 Maleic imide compound 2 BMI-1500 Parts by weight Maleimide compound 3 BMI-1700 Parts by weight Maleimide compound 4 BM1-4100 Parts by weight Maleimide compound 5 MIR-3000 Parts by weight 0.3 Styrene compound (free radical hardening compound) 0PE-2St-1200 Parts by weight Acrylate compound (radical hardenable compound) DCP-A Parts by weight Inorganic filler Silicon dioxide SC4050-H0A Parts by weight 70 70 70 70 70 hardener Active ester compound 1 EXB-9416-70BK Parts by weight 4.9 4.9 4.9 Active ester compound 2 HPC-8150-62T Parts by weight 5.2 5.2 5.2 4.8 5.0 Active ester compound 3 HPC-8000L-65T Parts by weight 1.7 1.8 Active ester compound 4 EXB-8 Parts by weight 2.9 2.9 Carbodiimide compound V-03 Parts by weight 0.4 Phenol compound LA-1356 Parts by weight 0.6 0.6 0.6 0.5 0.3 Hardening accelerator Dimethylaminopyridine DMAP Parts by weight 0.03 0.03 0.03 0.03 0.03 2-phenyl-4-methylimidazole 2P4MZ Parts by weight 0.28 0.28 0.28 0.26 0.26 Dicumyl peroxide Parts by weight Thermoplastic resin Polyimide compound Synthesis Example 6 Parts by weight 2.7 2.7 2.7 2.0 2.0 Styrene butadiene resin H1043 Parts by weight Unhydrogenated alicyclic/aromatic hydrocarbon resin EP140 Parts by weight 0.4 The content of compound X in 100% by weight of components other than inorganic fillers and solvents in the resin material weight% 15 15 15 15 18 The content of inorganic fillers in 100% by weight of the components other than the solvent in the resin material weight% 70 70 70 70 70 Evaluation Dielectric loss factor ×10 -3 2.85 2.70 2.65 2.50 2.80 determination Thermal dimensional stability (average coefficient of linear expansion (CTE)) ppm/℃ 19 twenty four 25 twenty four twenty four determination ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ Desmear determination ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ Surface roughness after etching (surface roughness) Average value of Ra nm 32 48 45 40 48 Surface roughness determination Maximum value of Ra nm 35 51 49 44 52 Minimum value of Ra nm 28 45 41 37 44 Uniformity determination Plating peel strength determination ○ ○ ○ ○ ○ ○

[表2]       實施例6 實施例7 實施例8 實施例9 化合物X 化合物X-1 合成例1 重量份             化合物X-2 合成例2 重量份 2.8          化合物X-3 合成例3 重量份 3.5 4.7 3.5 4.9 化合物Y(不相當於化合物X之化合物) 化合物Y-1 合成例4 重量份             化合物Y-2 合成例5 重量份             熱硬化性化合物 雙酚型環氧化合物 NC-3000 重量份 3.7 4.0 4.0 3.6 萘型環氧化合物 ESN-475V 重量份 4.4 4.7 4.4 4.2 間苯二酚二縮水甘油醚 EX-201 重量份 0.8 0.8 0.7 0.7 具有縮水甘油基胺骨架之環氧化合物 630 重量份             具有聚丁二烯骨架之環氧化合物 PB3600 重量份             具有醯胺骨架之環氧化合物 WHR-991S 重量份 1.1 1.2    1.1 多支鏈脂肪族環氧化合物 FoldiE101 重量份 1.6 1.7 1.9 1.6 順丁烯二醯亞胺化合物1 BM1-689 重量份    0.3       順丁烯二醯亞胺化合物2 BM1-1500 重量份             順丁烯二醯亞胺化合物3 BM1-1700 重量份             順丁烯二醯亞胺化合物4 BM1-4100 重量份             順丁烯二醯亞胺化合物5 MIR-3000 重量份 0.2 0.3       苯乙烯化合物(自由基硬化性化合物) 0PE-2St-1200 重量份       2.5    丙烯酸酯化合物(自由基硬化性化合物) DCP-A 重量份       2.0    無機填充材 二氧化矽 SC4050-H0A 重量份 70 70 70 73 硬化劑 活性酯化合物1 EXB-9416-70BK 重量份             活性酯化合物2 HPC-8150-62T 重量份 4.6 4.8 4.2 4.3 活性酯化合物3 HPC-8000L-65T 重量份 1.6 1.7 1.5 1.6 活性酯化合物4 EXB-8 重量份 2.7 2.9 2.5 2.6 碳二醯亞胺化合物 V-03 重量份             苯酚化合物 LA-1356 重量份 0.5 0.5 0.5 0.5 硬化促進劑 二甲胺基吡啶 DMAP 重量份 0.03 0.03    0.03 2-苯基-4-甲基咪唑 2P4MZ 重量份 0.24 0.26 0.23 0.23 過氧化二異丙苯    重量份       0.05    熱塑性樹脂 聚醯亞胺化合物 合成例6 重量份 1.9 2.0 0.9 1.8 苯乙烯丁二烯樹脂 H1043 重量份       0.9    未氫化脂環族/芳香族烴樹脂 EP140 重量份             樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,化合物X之含量 重量% 21 16 12 18 樹脂材料中之除溶劑以外之成分100重量%中,無機填充材之含量 重量% 70 70 70 73 評價 介電損耗因數 ×10-3 2.60 2.50 2.45 2.30 判定 熱尺寸穩定性(平均線膨脹係數(CTE)) ppm/℃ 22 23 21 21 判定 ○○ ○○ ○○ ○○ 除膠渣性 判定 ○○ ○○ ○○ ○○ 蝕刻後之表面粗度(表面粗糙度) Ra之平均值 nm 45 46 49 52 表面粗度 判定 Ra之最大值 nm 49 49 53 56 Ra之最小值 nm 41 42 44 47 均一性 判定 鍍覆剝離強度 判定 ○○ ○○ ○○ [Table 2] Example 6 Example 7 Example 8 Example 9 Compound X Compound X-1 Synthesis example 1 Parts by weight Compound X-2 Synthesis Example 2 Parts by weight 2.8 Compound X-3 Synthesis Example 3 Parts by weight 3.5 4.7 3.5 4.9 Compound Y (compound not equivalent to compound X) Compound Y-1 Synthesis Example 4 Parts by weight Compound Y-2 Synthesis Example 5 Parts by weight Thermosetting compound Bisphenol type epoxy compound NC-3000 Parts by weight 3.7 4.0 4.0 3.6 Naphthalene type epoxy compound ESN-475V Parts by weight 4.4 4.7 4.4 4.2 Resorcinol diglycidyl ether EX-201 Parts by weight 0.8 0.8 0.7 0.7 Epoxy compound with glycidylamine skeleton 630 Parts by weight Epoxy compound with polybutadiene skeleton PB3600 Parts by weight Epoxy compound with amide skeleton WHR-991S Parts by weight 1.1 1.2 1.1 Multi-branched aliphatic epoxy compound FoldiE101 Parts by weight 1.6 1.7 1.9 1.6 Maleimide compound 1 BM1-689 Parts by weight 0.3 Maleic imide compound 2 BM1-1500 Parts by weight Maleimide compound 3 BM1-1700 Parts by weight Maleimide compound 4 BM1-4100 Parts by weight Maleimide compound 5 MIR-3000 Parts by weight 0.2 0.3 Styrene compound (free radical hardening compound) 0PE-2St-1200 Parts by weight 2.5 Acrylate compound (radical hardenable compound) DCP-A Parts by weight 2.0 Inorganic filler Silicon dioxide SC4050-H0A Parts by weight 70 70 70 73 hardener Active ester compound 1 EXB-9416-70BK Parts by weight Active ester compound 2 HPC-8150-62T Parts by weight 4.6 4.8 4.2 4.3 Active ester compound 3 HPC-8000L-65T Parts by weight 1.6 1.7 1.5 1.6 Active ester compound 4 EXB-8 Parts by weight 2.7 2.9 2.5 2.6 Carbodiimide compound V-03 Parts by weight Phenol compound LA-1356 Parts by weight 0.5 0.5 0.5 0.5 Hardening accelerator Dimethylaminopyridine DMAP Parts by weight 0.03 0.03 0.03 2-phenyl-4-methylimidazole 2P4MZ Parts by weight 0.24 0.26 0.23 0.23 Dicumyl peroxide Parts by weight 0.05 Thermoplastic resin Polyimide compound Synthesis Example 6 Parts by weight 1.9 2.0 0.9 1.8 Styrene butadiene resin H1043 Parts by weight 0.9 Unhydrogenated alicyclic/aromatic hydrocarbon resin EP140 Parts by weight The content of compound X in 100% by weight of components other than inorganic fillers and solvents in the resin material weight% twenty one 16 12 18 The content of inorganic fillers in 100% by weight of the components other than the solvent in the resin material weight% 70 70 70 73 Evaluation Dielectric loss factor ×10 -3 2.60 2.50 2.45 2.30 determination Thermal dimensional stability (average coefficient of linear expansion (CTE)) ppm/℃ twenty two twenty three twenty one twenty one determination ○ ○ ○ ○ ○ ○ ○ ○ Desmear determination ○ ○ ○ ○ ○ ○ ○ ○ Surface roughness after etching (surface roughness) Average value of Ra nm 45 46 49 52 Surface roughness determination Maximum value of Ra nm 49 49 53 56 Minimum value of Ra nm 41 42 44 47 Uniformity determination Plating peel strength determination ○ ○ ○ ○ ○ ○

[表3]       比較例1 比較例2 比較例3 比較例4 比較例5 化合物X 化合物X-1 合成例1 重量份                化合物X-2 合成例2 重量份                化合物X-3 合成例3 重量份                化合物Y(不相當於化合物X之化合物) 化合物Y-1 合成例4 重量份 4.5             化合物Y-2 合成例5 重量份    4.5          熱硬化性化合物 雙酚型環氧化合物 NC-3000 重量份 4.1 4.1    4.2 4.6 萘型環氧化合物 ESN-475V 重量份 4.1 4.1    5.5 4.6 間苯二酚二縮水甘油醚 EX-201 重量份 1.6 1.6    1.8 1.8 具有縮水甘油基胺骨架之環氧化合物 630 重量份                具有聚丁二烯骨架之環氧化合物 PB3600 重量份                具有醯胺骨架之環氧化合物 WHR-991S 重量份                多支鏈脂肪族環氧化合物 FoldiE101 重量份 1.8 1.8       2.0 順丁烯二醯亞胺化合物1 BM1-689 重量份                順丁烯二醯亞胺化合物2 BMI-1500 重量份          3.0    順丁烯二醯亞胺化合物3 BMI-1700 重量份       24.5       順丁烯二醯亞胺化合物4 BM1-4100 重量份       4.9       順丁烯二醯亞胺化合物5 MIR-3000 重量份                苯乙烯化合物(自由基硬化性化合物) 0PE-2St-1200 重量份                丙烯酸酯化合物(自由基硬化性化合物) DCP-A 重量份                無機填充材 二氧化矽 SC4050-H0A 重量份 70 70 70 70 70 硬化劑 活性酯化合物1 EXB-9416-70BK 重量份 4.9 4.9    4.9 5.5 活性酯化合物2 HPC-8150-62T 重量份 5.2 5.2    5.3 5.8 活性酯化合物3 HPC-8000L-65T 重量份                活性酯化合物4 EXB-8 重量份                碳二醯亞胺化合物 V-03 重量份                苯酚化合物 LA-1356 重量份 0.6 0.6    0.6 0.7 硬化促進劑 二甲胺基吡啶 DMAP 重量份 0.03 0.03    0.03 0.06 2-苯基-4-甲基咪唑 2P4MZ 重量份 0.28 0.28    0.35 0.31 過氧化二異丙苯    重量份       0.5882       熱塑性樹脂 聚醯亞胺化合物 合成例6 重量份 2.7 2.7    2.7 5.1 苯乙烯丁二烯樹脂 H1043 重量份                未氫化脂環族/芳香族烴樹脂 EP140 重量份                樹脂材料中之除無機填充材及溶劑以外之成分100重量%中,化合物X之含量 重量% 0 0 0 0 0 樹脂材料中之除溶劑以外之成分100重量%中,無機填充材之含量 重量% 70 70 70 71 70 評價 介電損耗因數 ×10-3 2.94 2.80 2.75 2.82 2.70 判定 × 熱尺寸穩定性(平均線膨脹係數(CTE)) ppm/℃ 22 35 40 29 30 判定 ○○ × × × 除膠渣性 判定 × 蝕刻後之表面粗度(表面粗糙度) Ra之平均值 nm 28 45 210 81 57 表面粗度 判定 × × Ra之最大值 nm 31 48 225 88 62 Ra之最小值 nm 26 40 203 76 54 均一性 判定 × 鍍覆剝離強度 判定 × × × [table 3] Comparative example 1 Comparative example 2 Comparative example 3 Comparative example 4 Comparative example 5 Compound X Compound X-1 Synthesis example 1 Parts by weight Compound X-2 Synthesis Example 2 Parts by weight Compound X-3 Synthesis Example 3 Parts by weight Compound Y (compound not equivalent to compound X) Compound Y-1 Synthesis Example 4 Parts by weight 4.5 Compound Y-2 Synthesis Example 5 Parts by weight 4.5 Thermosetting compound Bisphenol type epoxy compound NC-3000 Parts by weight 4.1 4.1 4.2 4.6 Naphthalene type epoxy compound ESN-475V Parts by weight 4.1 4.1 5.5 4.6 Resorcinol diglycidyl ether EX-201 Parts by weight 1.6 1.6 1.8 1.8 Epoxy compound with glycidylamine skeleton 630 Parts by weight Epoxy compound with polybutadiene skeleton PB3600 Parts by weight Epoxy compound with amide skeleton WHR-991S Parts by weight Multi-branched aliphatic epoxy compound FoldiE101 Parts by weight 1.8 1.8 2.0 Maleimide compound 1 BM1-689 Parts by weight Maleic imide compound 2 BMI-1500 Parts by weight 3.0 Maleimide compound 3 BMI-1700 Parts by weight 24.5 Maleimide compound 4 BM1-4100 Parts by weight 4.9 Maleimide compound 5 MIR-3000 Parts by weight Styrene compound (free radical hardening compound) 0PE-2St-1200 Parts by weight Acrylate compound (radical hardenable compound) DCP-A Parts by weight Inorganic filler Silicon dioxide SC4050-H0A Parts by weight 70 70 70 70 70 hardener Active ester compound 1 EXB-9416-70BK Parts by weight 4.9 4.9 4.9 5.5 Active ester compound 2 HPC-8150-62T Parts by weight 5.2 5.2 5.3 5.8 Active ester compound 3 HPC-8000L-65T Parts by weight Active ester compound 4 EXB-8 Parts by weight Carbodiimide compound V-03 Parts by weight Phenol compound LA-1356 Parts by weight 0.6 0.6 0.6 0.7 Hardening accelerator Dimethylaminopyridine DMAP Parts by weight 0.03 0.03 0.03 0.06 2-phenyl-4-methylimidazole 2P4MZ Parts by weight 0.28 0.28 0.35 0.31 Dicumyl peroxide Parts by weight 0.5882 Thermoplastic resin Polyimide compound Synthesis Example 6 Parts by weight 2.7 2.7 2.7 5.1 Styrene butadiene resin H1043 Parts by weight Unhydrogenated alicyclic/aromatic hydrocarbon resin EP140 Parts by weight The content of compound X in 100% by weight of components other than inorganic fillers and solvents in the resin material weight% 0 0 0 0 0 The content of inorganic fillers in 100% by weight of the components other than the solvent in the resin material weight% 70 70 70 71 70 Evaluation Dielectric loss factor ×10 -3 2.94 2.80 2.75 2.82 2.70 determination X Thermal dimensional stability (average coefficient of linear expansion (CTE)) ppm/℃ twenty two 35 40 29 30 determination ○ ○ X X X Desmear determination X Surface roughness after etching (surface roughness) Average value of Ra nm 28 45 210 81 57 Surface roughness determination X X Maximum value of Ra nm 31 48 225 88 62 Minimum value of Ra nm 26 40 203 76 54 Uniformity determination X Plating peel strength determination X X X

11:多層印刷佈線板 12:電路基板 12a:上表面 13:絕緣層 14:絕緣層 15:絕緣層 16:絕緣層 17:金屬層11: Multilayer printed wiring board 12: Circuit board 12a: upper surface 13: Insulation layer 14: Insulation layer 15: Insulation layer 16: insulation layer 17: Metal layer

圖1係模式性地表示使用本發明之一實施形態之樹脂材料之多層印刷佈線板之剖視圖。Fig. 1 is a cross-sectional view schematically showing a multilayer printed wiring board using a resin material according to an embodiment of the present invention.

Claims (22)

一種樹脂材料,其包含具有下述式(X)所表示之結構之化合物、及硬化促進劑, [化1]
Figure 03_image045
上述式(X)中,R表示有機基,n表示1以上之數。
A resin material comprising a compound having a structure represented by the following formula (X) and a hardening accelerator, [化1]
Figure 03_image045
In the above formula (X), R represents an organic group, and n represents a number of 1 or more.
如請求項1之樹脂材料,其中上述式(X)中,n表示2以上之數。Such as the resin material of claim 1, wherein in the above formula (X), n represents a number of 2 or more. 如請求項1或2之樹脂材料,其中上述式(X)中,R係具有脂肪族環之基。The resin material of claim 1 or 2, wherein in the above formula (X), R is a group having an aliphatic ring. 如請求項1或2之樹脂材料,其中上述式(X)中,R具有源自二聚二胺之骨架之部分骨架。The resin material of claim 1 or 2, wherein in the above formula (X), R has a partial skeleton derived from the skeleton of dimer diamine. 如請求項1或2之樹脂材料,其中上述式(X)中,R具有源自二聚二胺以外之二胺化合物之骨架之部分骨架。The resin material of claim 1 or 2, wherein in the above formula (X), R has a partial skeleton derived from the skeleton of a diamine compound other than dimer diamine. 如請求項1或2之樹脂材料,其中於上述化合物中,構成醯亞胺骨架之氮原子僅鍵結於構成脂肪族骨架之碳原子。The resin material of claim 1 or 2, wherein in the above-mentioned compound, the nitrogen atom constituting the imine skeleton is only bonded to the carbon atom constituting the aliphatic skeleton. 如請求項1或2之樹脂材料,其中上述化合物係具有順丁烯二醯亞胺骨架之化合物。The resin material of claim 1 or 2, wherein the above-mentioned compound is a compound having a maleimide skeleton. 如請求項1或2之樹脂材料,其中上述化合物係於兩末端具有順丁烯二醯亞胺骨架之化合物。The resin material of claim 1 or 2, wherein the above-mentioned compound is a compound having a maleimide skeleton at both ends. 如請求項1或2之樹脂材料,其中上述化合物之重量平均分子量為1000以上且100000以下。The resin material of claim 1 or 2, wherein the weight average molecular weight of the above-mentioned compound is 1,000 or more and 100,000 or less. 如請求項1或2之樹脂材料,其中上述化合物具有下述式(Y)所表示之結構,且 上述式(X)所表示之結構之重複數與下述式(Y)所表示之結構之重複數的合計100%中,上述式(X)所表示之結構之重複數為10%以上且90%以下, [化2]
Figure 03_image047
上述式(Y)中,R1表示四價有機基,R2表示有機基,m表示1以上之數。
The resin material of claim 1 or 2, wherein the above compound has a structure represented by the following formula (Y), and the number of repetitions of the structure represented by the above formula (X) and the structure represented by the following formula (Y) In 100% of the total number of repetitions, the number of repetitions of the structure represented by the above formula (X) is 10% or more and 90% or less, [Chemical 2]
Figure 03_image047
In the above formula (Y), R1 represents a tetravalent organic group, R2 represents an organic group, and m represents a number of 1 or more.
如請求項10之樹脂材料,其中上述式(Y)中,R1不具有源自鄰苯二甲醯亞胺之骨架, 上述式(Y)中,R2不具有源自鄰苯二甲醯亞胺之骨架。The resin material of claim 10, wherein in the above formula (Y), R1 does not have a skeleton derived from phthalimide, In the above formula (Y), R2 does not have a skeleton derived from phthalimide. 如請求項10之樹脂材料,其中上述式(Y)中,R1不具有芳香族骨架。The resin material of claim 10, wherein in the above formula (Y), R1 does not have an aromatic skeleton. 如請求項1或2之樹脂材料,其包含熱硬化性化合物與硬化劑,且 上述熱硬化性化合物包含環氧化合物。Such as the resin material of claim 1 or 2, which contains a thermosetting compound and a hardener, and The said thermosetting compound contains an epoxy compound. 如請求項13之樹脂材料,其中上述硬化劑包含活性酯化合物。The resin material according to claim 13, wherein the hardener includes an active ester compound. 如請求項14之樹脂材料,其中上述環氧化合物與上述活性酯化合物中之至少一者具有醯亞胺骨架或醯胺骨架。The resin material of claim 14, wherein at least one of the epoxy compound and the active ester compound has an amide skeleton or an amide skeleton. 如請求項13之樹脂材料,其中上述熱硬化性化合物包含自由基硬化性化合物。The resin material according to claim 13, wherein the thermosetting compound includes a radical curing compound. 如請求項1或2之樹脂材料,其包含無機填充材。Such as the resin material of claim 1 or 2, which contains an inorganic filler. 如請求項17之樹脂材料,其中樹脂材料中之除溶劑以外之成分100重量%中,上述無機填充材之含量為50重量%以上。Such as the resin material of claim 17, wherein the content of the above-mentioned inorganic filler in 100% by weight of the components other than the solvent in the resin material is 50% by weight or more. 如請求項17之樹脂材料,其中上述無機填充材為二氧化矽。The resin material of claim 17, wherein the above-mentioned inorganic filler is silicon dioxide. 如請求項1或2之樹脂材料,其為樹脂膜。Such as the resin material of claim 1 or 2, which is a resin film. 如請求項1或2之樹脂材料,其用以於多層印刷佈線板中形成絕緣層。The resin material of claim 1 or 2, which is used to form an insulating layer in a multilayer printed wiring board. 一種多層印刷佈線板,其具備: 電路基板、 配置於上述電路基板之表面上之複數層絕緣層、及 配置於複數層上述絕緣層間之金屬層,且 複數層上述絕緣層中之至少1層為如請求項1至20中任一項之樹脂材料之硬化物。A multilayer printed wiring board is provided with: Circuit board, A plurality of insulating layers arranged on the surface of the above-mentioned circuit substrate, and A metal layer arranged between the plurality of insulating layers, and At least one of the plurality of insulating layers is a cured product of a resin material according to any one of claims 1 to 20.
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