TW202111426A - Manufacturing method of a patterned resin device - Google Patents
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本申請案涉及膠材圖案化領域,特別是指一種圖案化膠材裝置的製造方法。This application relates to the field of glue patterning, in particular to a method for manufacturing a patterned glue device.
由於軟性膠體材質本身的特性,具有可控制的黏性、適用於各種元件轉移的製程中,因而圖案化膠材已越來越廣泛地應用於各領域中,例如,圖案化藍寶石基板壓印材料等的光學應用等。Due to the characteristics of the soft colloidal material itself, it has controllable viscosity and is suitable for various component transfer processes. Therefore, patterned adhesive materials have been more and more widely used in various fields, such as patterned sapphire substrate imprinting materials And other optical applications.
目前製作圖案化膠材裝置的製造方法常見的方式是熱壓印或是UV壓印製作。然而,由於軟性膠體材質材料上的特徵,可能因為收縮、固化不均勻等,而可能在與模具離型時產生難以控制之位移。也可能因為受到壓印之模具影響表面特性、或者有離型劑殘留等。這些問題都造成了材料容易有殘留、精度不易控制等問題,而造成了後續製程上的限制。At present, the common method of manufacturing the patterned adhesive device is hot embossing or UV embossing. However, due to the characteristics of the soft colloidal material, it may cause uncontrollable displacement when it is released from the mold due to shrinkage, uneven curing, etc. It may also be due to the impact of the imprinted mold on the surface characteristics, or residual release agent. These problems have caused problems such as material residues and difficult control of precision, and have caused restrictions on subsequent manufacturing processes.
另外,若是以固化後加工處理的方式來進行圖案化,其表面容易有較大的破損,且因為其具有黏性,容易黏附殘屑,難以清洗去除。這對於應用於高精密的製程上時容易產生碎屑、容易產生汙染,影響了後續的製程良率,且需要更多設備保養的時間。In addition, if it is patterned by post-curing processing, the surface is prone to large damage, and because of its viscosity, it is easy to adhere to debris and difficult to clean and remove. This is prone to debris and pollution when applied to high-precision manufacturing processes, which affects the subsequent process yield and requires more equipment maintenance time.
在此,提供一種圖案化膠材裝置的製造方法。圖案化膠材裝置的製造方法包括基材準備步驟、保護膜設置步驟、圖案化步驟、清洗步驟。基材準備步驟是提供膠材基板。保護膜設置步驟是於膠材基板上設置保護膜。圖案化步驟是對膠材基板上之預設區域施以能量,使膠材基板的表面圖案化。清洗步驟是清洗去除保護膜,而形成圖案化膠材裝置。Here, a method for manufacturing a patterned adhesive material device is provided. The manufacturing method of the patterned adhesive device includes a substrate preparation step, a protective film setting step, a patterning step, and a cleaning step. The substrate preparation step is to provide a glue substrate. The protective film setting step is to set the protective film on the adhesive substrate. The patterning step is to apply energy to a predetermined area on the glue substrate to pattern the surface of the glue substrate. The cleaning step is to clean and remove the protective film to form a patterned adhesive device.
在一些實施例中,圖案化步驟是在膠材基板上之預設區域進行雷射切割,而使預設區域形成凹槽。進一步地,在一些實施例中,於雷射切割之雷射源的波長為200-580nm。In some embodiments, the patterning step is to perform laser cutting on a predetermined area on the adhesive substrate to form a groove in the predetermined area. Further, in some embodiments, the wavelength of the laser source used for laser cutting is 200-580 nm.
在一些實施例中,膠材基板係選自矽膠、聚二甲基矽氧烷(polydimethylsiloxane,PDMS)、聚醯亞胺(Polyimide,PI)、聚氨基甲酸酯 (Polyurethane,PU)、壓克力、乳膠、以及環氧樹脂所構成之群組。In some embodiments, the adhesive substrate is selected from silicone, polydimethylsiloxane (PDMS), polyimide (PI), polyurethane (PU), acrylic A group consisting of force, latex, and epoxy.
在一些實施例中,在保護膜設置步驟中,保護膜是以貼覆的方式設置於膠材基板上。在另一些實施例中,保護膜設置步驟中,是將保護液塗佈於膠材基板的表面上,再經由乾燥而形成保護膜。In some embodiments, in the protective film setting step, the protective film is provided on the adhesive substrate in a pasting manner. In other embodiments, in the protective film setting step, the protective liquid is coated on the surface of the adhesive substrate, and then dried to form the protective film.
在一些實施例中,保護膜的厚度為0.2至15um。In some embodiments, the thickness of the protective film is 0.2 to 15um.
在一些實施例中,保護膜包含兩性高分子及光吸收劑。In some embodiments, the protective film includes an amphoteric polymer and a light absorber.
更詳細地,在一些實施例中,(polyvinylpyrrolidone,PVP)、聚乙烯吡咯烷酮-醋酸乙烯酯共聚物(vinylpyrrolidone/vinyl acetate,PVP/VA)、聚乙二醇(polyethylene glycol,PEG)、聚環氧乙烷(polyethyleneoxide,PEO)、聚(2-乙基-2-噁唑啉) (poly(2-ethyl-2-oxazoline))、以及聚丙烯酸(polyacrylic acid,PAA)所構成之群組。In more detail, in some embodiments, (polyvinylpyrrolidone, PVP), polyvinylpyrrolidone/vinyl acetate (PVP/VA), polyethylene glycol (PEG), polyepoxy Ethane (PEO), poly(2-ethyl-2-oxazoline) (poly(2-ethyl-2-oxazoline)), and polyacrylic acid (PAA) constitute a group.
更詳細地,在一些實施例中,光吸收劑係選自水楊酸酯類光吸收劑、苯酮類光吸收劑、苯并三唑類光吸收劑、三嗪類光吸收劑、四吡咯類色素、萜烯類色素、多酚類色素、食用色素黃色四號及食用色素紅色七號所構成的群組。In more detail, in some embodiments, the light absorber is selected from the group consisting of salicylate light absorbers, benzophenone light absorbers, benzotriazole light absorbers, triazine light absorbers, and tetrapyrroles. The group consisting of pigments, terpene pigments, polyphenol pigments, food coloring yellow No. 4 and food coloring red No. 7.
綜上所述,透過形成保護膜形成在膠材基板的表面,在圖案化步驟時,能避免被移除的碎屑黏附於膠材基板的表面而不易清除,造成後續製程上的嚴重缺陷。進一步地,此製造方法能使圖案精細,而能應用於精密的製程中。In summary, by forming the protective film on the surface of the adhesive substrate, the removed debris can be prevented from sticking to the surface of the adhesive substrate during the patterning step and is difficult to remove, causing serious defects in the subsequent manufacturing process. Furthermore, this manufacturing method can make the pattern fine, and can be applied to a precise manufacturing process.
圖1為圖案化膠材裝置的製造方法的流程圖。圖2為基材準備步驟的示意圖。圖3為保護膜設置步驟的示意圖。圖4為圖案化步驟一實施例的示意圖。圖5為圖案化膠材裝置的立體示意圖。以下將應用圖1至圖5來說明圖案化膠材裝置的製造方法。Fig. 1 is a flowchart of a manufacturing method of a patterned adhesive device. Figure 2 is a schematic diagram of the substrate preparation steps. Figure 3 is a schematic diagram of the protective film setting steps. FIG. 4 is a schematic diagram of an embodiment of the patterning step. Fig. 5 is a three-dimensional schematic diagram of a patterned glue device. Hereinafter, FIGS. 1 to 5 will be used to describe the manufacturing method of the patterned glue device.
如圖1所示,圖案化膠材裝置的製造方法S1包括基材準備步驟S10、保護膜設置步驟S20、圖案化步驟S30、清洗步驟S40。如圖2所示,基材準備步驟S10是提供膠材基板10。由於膠材基板10較軟、易變形,通常會將膠材基板10設置於載板500上,以利進行後續的步驟。進一步地,膠材基板10也可以是旋塗(spin coating)或是灌入於模具、並加壓的方式形成於載板500上,再透過加熱或光照固化來完成。在此,載板500通常為透光、具有較硬之硬度的材料,例如,石英板、玻璃板等。As shown in FIG. 1, the manufacturing method S1 of the patterned adhesive device includes a substrate preparation step S10, a protective film setting step S20, a patterning step S30, and a cleaning step S40. As shown in FIG. 2, the substrate preparation step S10 is to provide an
進一步地,膠材基板10可以由矽膠、聚二甲基矽氧烷、聚醯亞胺、聚氨基甲酸酯、壓克力、乳膠、或環氧樹脂等材料中,選擇至少其一來製成。Further, the
如圖3所示,保護膜設置步驟S20是於膠材基板10上設置保護膜20。保護膜20的厚度為0.2至15um,較佳地,為0.5-10um。在一些實施例中,保護膜20可以預先完成,以整張貼覆的方式設置於膠材基板10上,覆蓋膠材基板10的表面。在另一些實施例中,是將保護液透過旋塗來塗佈於膠材基板10的表面上,再經由乾燥而形成保護膜20。然而,已上僅為示例,而非用以限制。進一步地,保護膜20更形成於載板500的表面上。As shown in FIG. 3, the protective film setting step S20 is to install the
圖案化步驟S30是對膠材基板10上之預設區域施以能量,使膠材基板10的表面圖案化。在此,可以應用各種高能的方式,來實施圖案化。如圖4所示,在第一實施例中,圖案化步驟S30是在膠材基板10上的預設區域,透過雷射源200進行雷射切割,而使預設區域形成凹槽15,在此,雷射源200的波長為200-580nm,也就是紫外光到綠光之間的波段。更詳細地,雷射源200可以使用532nm的綠光雷射、355nm的UV光雷射等。在此,雖然僅示出雷射源200以單方向方式切割,但實際上,雷射源200可以透過橫向、直向的移動來切割。由於雷射源200的聚焦點小,可以產生精細的圖案。此外,雷射源200的選擇,可以選擇膠材基板10不吸收的波段,從而能避免膠材基板10的材料變質。The patterning step S30 is to apply energy to a predetermined area on the
更詳細地,雷射源200的雷射切割方式可以由內,再逐步向外切割,如此能避免在圖案化時產生的碎屑在側向上堆積。然而,在此雖以雷射切割來作為圖案化步驟S30的示例方法,然而,這並非用以限制,其他利用高能,例如,電漿或微影、蝕刻的方式,亦可以用於圖案化步驟S30。In more detail, the laser cutting method of the
清洗步驟S40是透過清洗去除保護膜20,清洗可以透過清水、酸洗或是有機溶劑,唯,必須考量不與膠材基板10起反應。進一步地,還可以應用超音波水槽來清洗,使得表面沾黏的所有顆粒,與保護膜20一併去除。進一步地,在清洗步驟S40中,形成於載板500上的保護膜20也一併去除。The cleaning step S40 is to remove the
如圖5所示,經過清洗步驟S40,可以得到圖案化膠材裝置100。載板500可以與圖案化膠材裝置100作為一體出貨。圖案化膠材裝置100圖案化的結構,可以應用於各種圖案化排列的元件轉移。As shown in FIG. 5, after the cleaning step S40, the patterned
更詳細地,在一些實施例中,保護膜20可以包含兩性高分子及光吸收劑。兩性高分子能夠在疏水端與膠材基板10接觸,而強化保護膜20與膠材基板10的黏接性質,另外,透過親水端,使得保護膜20容易溶解,以在圖案化步驟S30後被水、清洗液所移除,同時移除圖案化步驟S30產生的碎屑。如此,圖案化膠材裝置100上不會黏附碎屑而避免影響後續的製程。光吸收劑是進一步輔助保護膜20吸收能量。In more detail, in some embodiments, the
更詳細地,兩性高分子可以包含聚乙烯吡咯烷酮、聚乙烯吡咯烷酮-醋酸乙烯酯共聚物、聚乙二醇、聚環氧乙烷、聚(2-乙基-2-噁唑啉)、或聚丙烯酸中的至少一種。光吸收劑可以包含水楊酸酯類光吸收劑、苯酮類光吸收劑、苯并三唑類光吸收劑、三嗪類光吸收劑、四吡咯類色素、萜烯類色素、多酚類色素、食用色素黃色四號及食用色素紅色七號中的至少其中一種,其可以依據使用的雷射源200或光線等來調整。以上僅為示例,而非用以限制。In more detail, the amphoteric polymer may include polyvinylpyrrolidone, polyvinylpyrrolidone-vinyl acetate copolymer, polyethylene glycol, polyethylene oxide, poly(2-ethyl-2-oxazoline), or polyvinylpyrrolidone. At least one of acrylic. The light absorber may include a salicylate-based light absorber, a benzophenone-based light absorber, a benzotriazole-based light absorber, a triazine-based light absorber, a tetrapyrrole-based pigment, a terpene-based pigment, and a polyphenol At least one of the pigment, food coloring yellow No. 4, and food coloring red No. 7, which can be adjusted according to the
綜上實施例所述,圖案化膠材裝置的製造方法能解決現有技術上與模具離型時產生偏移的問題,此外,透過形成保護膜20形成在膠材基板10的表面,在圖案化步驟S30時,能避免被移除的碎屑黏附於膠材基板10的表面而不易清除,造成後續製程上的嚴重缺陷。進一步地,圖案化膠材裝置的製造方法S1能在膠材基板10製作出精細的圖案,而能應用於精密的製程中。例如,可以應用圖案化膠材裝置100的黏性,作為Micro-LED進行巨量轉移的黏附載體。In summary, the manufacturing method of the patterned adhesive material device can solve the problem of deviation in the prior art when it is released from the mold. In addition, the
10:膠材基板 15:凹槽 20:保護膜 100:圖案化膠材裝置 200:雷射源 500:載板 S1:圖案化膠材裝置的製造方法 S10:基材準備步驟 S20:保護膜設置步驟 S30:圖案化步驟 S40:清洗步驟10: Adhesive substrate 15: Groove 20: Protective film 100: Patterned glue device 200: Laser source 500: carrier board S1: Manufacturing method of patterned glue device S10: Substrate preparation steps S20: protective film setting steps S30: Patterning step S40: Cleaning steps
圖1為圖案化膠材裝置的製造方法的流程圖。 圖2為基材準備步驟的示意圖。 圖3為保護膜設置步驟的示意圖。 圖4為圖案化步驟一實施例的示意圖。 圖5為圖案化膠材裝置的立體示意圖。Fig. 1 is a flowchart of a manufacturing method of a patterned adhesive device. Figure 2 is a schematic diagram of the substrate preparation steps. Figure 3 is a schematic diagram of the protective film setting steps. FIG. 4 is a schematic diagram of an embodiment of the patterning step. Fig. 5 is a three-dimensional schematic diagram of a patterned glue device.
S1:圖案化膠材裝置的製造方法S1: Manufacturing method of patterned glue device
S10:基材準備步驟S10: Substrate preparation steps
S20:保護膜設置步驟S20: protective film setting steps
S30:圖案化步驟S30: Patterning step
S40:清洗步驟S40: Cleaning steps
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