TW202106649A - Glass substrate for magnetic recording and method of making - Google Patents
Glass substrate for magnetic recording and method of making Download PDFInfo
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- TW202106649A TW202106649A TW109115815A TW109115815A TW202106649A TW 202106649 A TW202106649 A TW 202106649A TW 109115815 A TW109115815 A TW 109115815A TW 109115815 A TW109115815 A TW 109115815A TW 202106649 A TW202106649 A TW 202106649A
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
- G11B5/73921—Glass or ceramic substrates
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
- G11B5/82—Disk carriers
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/365—Coating different sides of a glass substrate
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Abstract
Description
本申請案根據專利法主張2019年5月13日申請之美國臨時申請案第62/846,923號之優先權權益,該美國臨時申請案的內容作為依據且以引用方式整體併入本文。This application claims the priority rights of U.S. Provisional Application No. 62/846,923 filed on May 13, 2019 in accordance with the Patent Law. The content of the U.S. Provisional Application is used as a basis and is incorporated herein by reference in its entirety.
本發明關於用於磁記錄的玻璃基板及其製造方法。The present invention relates to a glass substrate for magnetic recording and a manufacturing method thereof.
近年來,諸如硬磁碟驅動機的磁性裝置的資料存儲容量已大大增加。熱輔助磁化記錄(heat-assisted magnetic recording; HAMR)是在寫入過程中暫時加熱磁碟資料的新興技術,這使其更容易接受磁效應且允許寫入至更小的區域。用於HAMR的關鍵記錄塗層中的一者是具有高垂直磁各向異性的高度有序顆粒膜。高垂直磁各向異性需要將基板加熱至600℃或更高,以獲得晶粒尺寸及分佈的良好均勻性,以及對位置、紋理及定向的隨機性的良好控制。用於HAMR媒體塗層的高沉積溫度排除了習知基板的使用,諸如由鋁製成的基板。相反,玻璃為HAMR塗層的優選基板。垂直磁記錄科技需要光滑且平坦的玻璃表面。In recent years, the data storage capacity of magnetic devices such as hard disk drives has greatly increased. Heat-assisted magnetic recording (HAMR) is an emerging technology that temporarily heats disk data during the writing process, which makes it more receptive to magnetic effects and allows writing to a smaller area. One of the key recording coatings used for HAMR is a highly ordered granular film with high perpendicular magnetic anisotropy. High perpendicular magnetic anisotropy requires heating the substrate to 600°C or higher to obtain good uniformity of grain size and distribution, as well as good control of the randomness of position, texture, and orientation. The high deposition temperature used for HAMR media coating precludes the use of conventional substrates, such as those made of aluminum. In contrast, glass is the preferred substrate for HAMR coating. Perpendicular magnetic recording technology requires a smooth and flat glass surface.
在各種實施例中,提供一種製備用於資訊記錄媒體的玻璃基板的方法。方法可包括提供具有至少一個外包覆層及內芯層的夾層玻璃製品。第一外包覆層可與內芯層的第一表面接觸且與之相鄰。第二外包覆層(若存在)可與內芯層的第二表面接觸且與之相鄰。方法可包括縮減至少一個外包覆層的厚度,以獲得具有一個或兩個適於記錄製程的平坦表面的玻璃基板(例如,HAMR)。In various embodiments, a method of preparing a glass substrate for an information recording medium is provided. The method may include providing a laminated glass article having at least one outer cladding layer and an inner core layer. The first outer cladding layer may be in contact with and adjacent to the first surface of the inner core layer. The second outer cladding layer (if present) may be in contact with and adjacent to the second surface of the inner core layer. The method may include reducing the thickness of at least one outer cladding layer to obtain a glass substrate (for example, HAMR) having one or two flat surfaces suitable for recording processes.
在各種實施例中,提供一種根據方法製備的玻璃基板。在各種實施例中,提供一種包括玻璃基板的硬磁碟驅動機。In various embodiments, a glass substrate prepared according to the method is provided. In various embodiments, a hard disk drive including a glass substrate is provided.
上述一般描述及以下詳細描述描述了各種實施例,且意欲提供用於理解所主張主題的實質及特徵的概述或框架。包括要連同考慮的附圖,以提供對在以下詳細描述中揭示的或藉由以下詳細描述變得明顯的各種實施例的特徵及優點的進一步理解。The above general description and the following detailed description describe various embodiments and are intended to provide an overview or framework for understanding the essence and characteristics of the claimed subject matter. The accompanying drawings to be considered are included to provide a further understanding of the features and advantages of the various embodiments disclosed in or made apparent by the following detailed description.
實施例的描述意欲結合附隨圖式理解,該等附隨圖式將被視為本揭示案的整個書面描述的一部分。圖式未必按比例繪製,且各種實施例的某些特徵可在比例上或以某種示意性形式誇示,以達明晰及簡明的目的。在本說明書中,諸如「水平」、「垂直」、「向上」、「向下」、「頂部」、「底部」的相對術語及其衍生詞(例如,「水平地」、「向下地」、「向上地」等)應解釋為指當時所描述的或正在討論的圖式中所示的定向。此等相對術語是為了便於描述,且通常並不意欲需要特定的定向。包括「向內」與「向外」、「縱向」與「橫向」等的術語應視情況相對於彼此或相對於伸長的軸線或旋轉的軸線或中心來解釋。關於附接、聯接等的術語,諸如「連接」及「互連」,除非另有明確說明,否則是指結構經由中間結構直接或間接地彼此固定或附接的關係,及可移動或剛性的附接或關係,且包括諸如「直接」聯接、固定等的術語。術語「操作地聯接」為允許相關結構憑藉該關係按預期操作的附接、聯接或連接。The description of the embodiments is intended to be understood in conjunction with the accompanying drawings, which will be regarded as a part of the entire written description of this disclosure. The drawings are not necessarily drawn to scale, and certain features of various embodiments may be exaggerated on scale or in a certain schematic form for the purpose of clarity and conciseness. In this manual, relative terms such as "horizontal", "vertical", "upward", "downward", "top", "bottom" and their derivatives (for example, "horizontal", "downward", "Upward", etc.) should be interpreted as referring to the orientation shown in the schema described or under discussion at the time. These relative terms are for ease of description, and are generally not intended to require a specific orientation. Terms including "inward" and "outward", "longitudinal" and "transverse" should be interpreted relative to each other or relative to the axis of elongation or the axis or center of rotation as appropriate. With regard to terms such as attachment and coupling, such as "connected" and "interconnected", unless expressly stated otherwise, it refers to the relationship in which structures are directly or indirectly fixed or attached to each other through intermediate structures, and movable or rigid Attachment or relationship, and includes terms such as "direct" connection, fixation, etc. The term "operationally connected" is the attachment, connection, or connection that allows related structures to operate as expected by virtue of the relationship.
第1A圖中所示的夾層玻璃製品100可由熔合層壓方法形成,諸如描述於美國專利第4,214,886號中的方法,該專利以引用方式整體併入本文。如第2圖所示,例如,用於形成夾層玻璃製品的層壓熔合拉伸設備200包括定位於下部等壓管204上方的上部等壓管202。上部等壓管202包括槽210,熔融玻璃包覆成分206經自熔化器(未示出)餽送至槽210中。類似地,下部等壓管204包括槽212,熔融玻璃芯成分208經自熔化器(未示出)餽送至槽212中。The laminated
當熔融玻璃芯成分208填充槽212時,熔融玻璃芯成分208溢出槽212且流過下部等壓管204的外成形表面216及218。下部等壓管204的外成形表面216及218在根部220處會聚。因此,流過外成形表面216及218的熔融玻璃芯成分208在下部等壓管204的根部220處重聚,從而形成夾層玻璃製品100的玻璃芯層102。When the molten
同時,熔融玻璃包覆成分206溢出在上部等壓管202中形成的槽210,且流過上部等壓管202的外成形表面222及224。熔融玻璃包覆成分206藉由上部等壓管202向外偏轉,使得熔融玻璃包覆成分206圍繞下部等壓管204流動,且與流過下部等壓管的外成形表面216及218的熔融玻璃芯成分208接觸,從而熔合成玻璃芯成分208且圍繞夾層玻璃製品100的玻璃芯層102形成玻璃包覆層104a及104b。At the same time, the molten
層壓熔合拉伸設備200以提供新形成的夾層玻璃製品100中的玻璃層的實質上均勻厚度的方式生產夾層玻璃。另選地,熔融玻璃包覆成分206的黏度、槽210的傾斜角及流速可經調整以彼此獨立地區分個別包覆層104a及104b的厚度。例如,在一些實施例中,槽210的傾斜角可足夠大,使得熔融玻璃成分流過其一側,且所得的夾層玻璃製品具有與芯102接觸的單個包覆層(亦即,104a或104b),如第1C圖所示。The laminate
熔融玻璃成分(諸如,像描述於美國專利申請案第US 2016/0114564號及第US 2018/0312422號中的化學成分,該等專利申請案以引用方式整體併入本文)可用於熔合成形方法中。亦設想了其他成分。熔融玻璃成分的性質(例如,液相線黏度、溫度等)可經控制,以使其非常適合用於熔合成形方法,諸如,熔合下拉方法或熔合層壓方法。芯層的玻璃成分的具體實例包括,例如,Lotus NXT玻璃(Corning)等。包覆層的玻璃成分的具體實例包括,例如,Eagle XG玻璃(Corning)、Gorilla玻璃(Corning)等。The composition of molten glass (such as the chemical composition described in US Patent Application Nos. US 2016/0114564 and US 2018/0312422, which are incorporated herein by reference in their entirety) can be used in the fusion forming method . Other components are also envisaged. The properties of the molten glass composition (for example, liquidus viscosity, temperature, etc.) can be controlled to make it very suitable for fusion forming methods, such as fusion down-drawing methods or fusion lamination methods. Specific examples of the glass composition of the core layer include, for example, Lotus NXT glass (Corning) and the like. Specific examples of the glass composition of the coating layer include, for example, Eagle XG glass (Corning), Gorilla glass (Corning), and the like.
使用熔合成形方法(諸如,上拉或下拉熔合方法)生產的玻璃的表面缺陷的發生率通常較低。然而,由靠近熔合拉伸設備的氣流及表面溫度變化可能會引起厚度變化及玻璃翹曲。此等缺陷主要影響玻璃的表面。對於由熔合拉伸方法形成的夾層玻璃而言,其中外包覆與內芯同時形成,芯將免遭氣流及表面溫度調製,且與包覆的外部表面相比,芯的厚度變化及翹曲將縮減。例如,第1B圖中的夾層玻璃製品100在包覆層104a及104b的外主要表面上具有可覺的表面厚度變化,但在內芯層102的主要表面上沒有可覺的厚度變化或翹曲。The incidence of surface defects of glass produced using a fusion forming method, such as a pull-up or pull-down fusion method, is generally low. However, the airflow and surface temperature changes near the fusion stretching equipment may cause thickness changes and glass warping. These defects mainly affect the surface of the glass. For laminated glass formed by the fusion stretching method, where the outer cladding is formed at the same time as the inner core, the core will be protected from airflow and surface temperature modulation, and compared with the outer surface of the cladding, the thickness of the core changes and warps Will be reduced. For example, the laminated
為了提高硬磁碟驅動機的記錄密度,磁記錄頭與磁碟表面之間的距離(定義為飛行高度)必須儘可能窄。一般而言,需要飛行高度為約10 nm或更低。因此,玻璃基板的平坦度及平滑度對於防止磁頭與磁碟接觸而導致頭損壞很重要。平坦度是指基板的總厚度變化(TTV)。一般而言,需要小於約1微米的TTV。平滑度或粗糙度是指表面紋理,且藉由真實表面的法向量方向偏離其理想形狀的偏差來量化。若偏差較大,則表面粗糙。若偏差較小,則表面光滑。輪廓(線)粗糙度參數(Ra)通常用於計算粗糙度值。一般而言,需要Ra小於0.2 nm。In order to increase the recording density of the hard disk drive, the distance between the magnetic recording head and the surface of the disk (defined as flying height) must be as narrow as possible. In general, the flying height is required to be about 10 nm or less. Therefore, the flatness and smoothness of the glass substrate are important to prevent the head from contacting the magnetic disk and causing head damage. Flatness refers to the total thickness variation (TTV) of the substrate. Generally speaking, a TTV of less than about 1 micron is required. Smoothness or roughness refers to the surface texture, and is quantified by the deviation of the normal vector direction of the real surface from its ideal shape. If the deviation is large, the surface is rough. If the deviation is small, the surface is smooth. The profile (line) roughness parameter (Ra) is usually used to calculate the roughness value. Generally speaking, Ra is required to be less than 0.2 nm.
在一些實施例中,夾層玻璃製品100由不同化學成分的組合製備。在此類實施例中,包覆層104a及104b的玻璃化學成分與芯102的玻璃化學成分相比具有不同的特性。在一些實施例中,芯及包覆玻璃成分具有不同的材料硬度、不同的熱導率及/或不同的化學耐久性。熱導率是等於熱擴散係數乘以比熱乘以玻璃密度的乘積的計算值。藉由調整夾層玻璃製品100的芯-包覆玻璃成分可提高熱導率。在一些實施例中,玻璃芯102包括具有較高熱導率的成分。在一些實施例中,可在包覆層104a及104b中使用無鹼玻璃成分,以防止在未完全地移除包覆層的情況下雜質自芯擴散。In some embodiments, the laminated
化學耐久性或耐腐蝕性經量測為在浸入腐蝕性環境中之後的每表面積重量損失(mg/cm2 )。重量損失率基於在一定溫度下獲得重量損失所需的時間。化學耐久性高度依賴於測試條件。其他特性,包括機械及電氣特性、黏度、折射率、摩擦係數、強度、抗衝擊性、抗劃傷性等,亦將取決於玻璃成分及對夾層玻璃製品100成分的處理。Chemical durability or corrosion resistance is measured as the weight loss per surface area (mg/cm 2 ) after immersion in a corrosive environment. The weight loss rate is based on the time required to obtain weight loss at a certain temperature. The chemical durability is highly dependent on the test conditions. Other properties, including mechanical and electrical properties, viscosity, refractive index, friction coefficient, strength, impact resistance, scratch resistance, etc., will also depend on the glass composition and the processing of the 100 components of laminated glass products.
如本文所揭示,其中芯102以及包覆層104a及104b由不同玻璃成分製備的夾層玻璃製品100有利於生產用於資訊記錄媒體的平坦且光滑的基板。例如,在一些實施例中,包覆層104a、104b的外部表面、主要表面或兩者(亦即,不與芯102相鄰的表面,且不是周邊側面的表面)可經處理以移除諸如翹曲或厚度變化的缺陷,且以其他方式提高最終表面品質。在此類實施例中,包覆層中的至少一者可經拋光或材料上縮減以確保所得的夾層玻璃基板(101)具有用於資訊記錄媒體的至少一個平坦且光滑的表面。例如,第3A圖至第3D圖示出夾層玻璃基板101的各種實施例,該夾層玻璃基板101是對包覆層104a、104b或兩者進行表面處理之後的夾層玻璃製品100。As disclosed herein, the
如第3A圖所示,例如,在一些實施例中,包覆層104b經部分地縮減(相對於夾層玻璃製品100中包覆層104b的外部表面)。在其他實施例中,如第3B圖所示,包覆層104b經完全地縮減至芯102的相鄰表面。在一些實施例中,如第3C圖所示,包覆層104a及104b兩者經部分地縮減。在一些實施例中,如第3D圖所示,至少一個包覆層(104a及/或104b)經完全地縮減至芯102的相鄰表面,使得玻璃芯102留存。第3A圖至第3D圖中的每一者中的元件符號106是指夾層製品100的包覆層的部分,該部分經移除以生產夾層玻璃基板101a、101b、101c或101d。As shown in FIG. 3A, for example, in some embodiments, the
在一些實施例中,玻璃成分經選擇以使得包覆層104a及104b比芯102相對地更軟。在一些實施例中,玻璃成分經選擇以使得芯102比包覆層104a及104b更耐腐蝕(化學耐久)。在此類實施例中,包覆層中的玻璃比芯102中的玻璃更易於縮減(機械、化學或兩者)。因此,在一些實施例中,由於芯玻璃更硬、更耐腐蝕或兩者,芯層102在包覆縮減製程期間充當支撐止擋件。此外,在一些實施例中,由於在層壓熔合方法中芯102係藉由包覆而免遭氣流及表面溫度調製,所以芯102提供具有最小表面缺陷的實質上平坦且光滑的表面。在此類實施例中,藉由調整玻璃成分及層的厚度比以精確地控制包覆及芯玻璃成分的硬度及彈性特性、熱導率及/或化學耐久性,以便確保在完全地移除至少一個包覆層之後,玻璃芯102的平坦且光滑的表面出現。In some embodiments, the glass composition is selected so that the
包覆縮減階段中可使用任何合適的製程。在一些實施例中,例如,使用化學蝕刻製程來縮減包覆層104a及104b。在此類實施例中,用於芯102以及包覆層104a及104b的成分可經精確地控制,以基於其相對耐腐蝕性建立差異蝕刻選擇性。此外,芯102以及包覆層104a及104b的厚度為可調整的,以精確地控制材料縮減的速率。在此類實施例中,芯102在蝕刻製程期間充當止動件。例如,芯102包含實質上耐蝕刻劑的玻璃成分,但構成(諸)包覆層的玻璃成分並不耐相同蝕刻劑。在選擇性地蝕刻掉包覆層中的一些或所有玻璃之後,分別獲得具有用於資訊記錄媒體的光滑且平坦的表面的芯玻璃,或芯玻璃及剩餘包覆。Any suitable process can be used in the coating reduction stage. In some embodiments, for example, a chemical etching process is used to shrink the
在一些實施例中,蝕刻步驟涉及濕式化學法(例如,包含酸、鹼、氟化物等的溶液)。在一些實施例中,蝕刻步驟涉及乾式化學法(例如,經由化學氣相沉積法所沉積的電漿)。In some embodiments, the etching step involves wet chemical methods (e.g., solutions containing acids, bases, fluorides, etc.). In some embodiments, the etching step involves dry chemistry (eg, plasma deposited via chemical vapor deposition).
在一些實施例中,使用酸蝕刻表面處理。此蝕刻製程包括將夾層玻璃製品100的一個或兩個外部表面與酸性玻璃蝕刻介質接觸,該酸性玻璃蝕刻介質可容易地根據特定的玻璃成分進行調整,且施加至於平面及複雜表面幾何結構。蝕刻夾層玻璃製品100可改變其表面缺陷的尺寸或幾何結構,及/或縮減表面缺陷的尺寸及數量,同時對受處理表面的總體形貌具有最小影響。此外,在一些實施例中,已發現酸蝕刻有效地降低強度可變性,即使在具有低表面缺陷發生率的玻璃中,包括習知地認為基本上不含表面缺陷的上拉或下拉(例如,熔合拉伸)玻璃片中。在一些實施例中,當酸腐蝕掉包覆層104a及104b時,新獲得的表面為拋光、光滑且平坦的。In some embodiments, acid etching surface treatment is used. The etching process includes contacting one or two external surfaces of the
可使用各種蝕刻劑化學品、濃度及處理時間來達成理想的表面處理水準。例如,可用於酸蝕刻製程的化學品包括具有至少一種活性玻璃蝕刻化合物的含氟水介質,諸如但不限於HF、HF與一種或多種HCl、HNO3
及H2
SO4
、二氟化銨、二氟化鈉及其他合適的化合物的組合。若密切控制HF的濃度,則藉由在含有HF的溶液中蝕刻來保持對移除的玻璃106的厚度的適當控制是有利的。用於蝕刻玻璃層的示例性方法描述於2013年5月31日提交的國際申請案號PCT/US13/43561中,其以引用方式整體併入本文。Various etchant chemicals, concentrations and treatment times can be used to achieve the ideal surface treatment level. For example, chemicals that can be used in the acid etching process include fluorine-containing aqueous media with at least one active glass etching compound, such as but not limited to HF, HF and one or more of HCl, HNO 3 and H 2 SO 4 , ammonium difluoride, Combinations of sodium difluoride and other suitable compounds. If the concentration of HF is closely controlled, it is advantageous to maintain proper control of the thickness of the removed
在一些實施例中,需要有限持續時間的表面蝕刻處理。特別地,將夾層玻璃製品100的包覆層的表面與蝕刻介質接觸的步驟可進行達一段時間,該段時間不超過有效移除約2至約80 μm(包括其間的所有範圍及子範圍)表面玻璃106所需的時間。例如,在一些實施例中,將夾層玻璃製品100的包覆層的表面與蝕刻介質接觸的步驟可進行達一段時間,該段時間不超過有效移除約5至約50 μm或約10至約30 μm表面玻璃106所需的時間。在其他實施例中,例如,移除約3 μm、10 μm、15 μm、20 μm、40 μm等。在任何特定情況下,限制玻璃移除所需的實際蝕刻時間可取決於蝕刻介質的成分及溫度以及包覆層的成分。例如,在包含HF的蝕刻成分中,蝕刻速率將取決於玻璃成分中的二氧化矽含量。在此類實施例中,氧矽比愈大,蝕刻速率愈慢。In some embodiments, a surface etching process of limited duration is required. In particular, the step of contacting the surface of the cladding layer of the
在一些實施例中,包覆層104a及104b中的每一者獨立地具有約1 μm至約100 μm的厚度,包括其間的所有範圍及子範圍。例如,在一些實施例中,厚度為約3 μm至約75 μm,或約為5 μm至約50 μm。在一些實施例中,酸蝕刻製程經設計成移除不超過約50 μm的表面玻璃、不超過約30 μm的表面玻璃、不超過15 μm的表面玻璃、不超過5 μm的表面玻璃、不超過2 μm的表面玻璃等。在一些實施例中,移除約20 μm至約50 μm的玻璃包覆,包括其間的所有範圍及子範圍。例如,在一些實施例中,移除約30 μm至約50 μm的玻璃包覆。In some embodiments, each of the
在一些實施例中,使用打磨及/或研磨來縮減至少一個包覆層。在此類實施例中,用於芯102以及包覆層104a及104b的成分經精確地控制,以建立差異硬度選擇性。具有較軟的包覆層及較硬的芯的夾層玻璃使得包覆比芯層102更快地經移除。藉由調整芯-包覆玻璃成分及芯-包覆厚度比,可精確地控制硬度及彈性特性。機械拋光的效果取決於玻璃的尺寸及硬度,以及研磨墊的硬度及耐磨性。在一些實施例中,打磨及/或研磨製程與化學拋光(稱為化學機械拋光(CMP)的製程)組合。在此類實施例中,組合後的製程可為資訊記錄媒體提供平坦且光滑的表面。一般而言,在一些實施例中,蝕刻比打磨/研磨製程更優選,因為蝕刻產生超光滑的玻璃表面,而不使玻璃暴露於粗糙的拋光及研磨製程中。In some embodiments, sanding and/or grinding are used to reduce at least one coating layer. In such embodiments, the composition used for the
相對於縮減階段,106的材料移除率取決於某些因素,諸如施加的壓力及相對速度、待移除層的厚度(106)、時間等。在摩擦學中,在滑動或研磨磨損條件下,縮減材料的體積與材料的硬度成反比,如下式(I)所示,其中,V是移除的體積,L是樣品上的載荷,S是相對滑動距離,H是相關材料的硬度,且kw 是磨損係數。 Relative to the reduction phase, the material removal rate of 106 depends on certain factors, such as the applied pressure and relative speed, the thickness (106) of the layer to be removed, time, and so on. In tribology, under sliding or abrasive wear conditions, the volume of the reduced material is inversely proportional to the hardness of the material, as shown in the following formula (I), where V is the removed volume, L is the load on the sample, and S is Relative to the sliding distance, H is the hardness of the relevant material, and k w is the wear coefficient.
在式(I)中,相關材料的硬度(H )是指使用標準試驗協定(例如,莫氏(Mohs)硬度試驗、維氏(Vicker)硬度、抗衝擊性、微壓痕)獲得的值。In formula (I), the hardness ( H ) of the relevant material refers to the value obtained using standard test protocols (for example, Mohs hardness test, Vicker hardness, impact resistance, micro-indentation).
在一些實施例中,芯102由第一玻璃成分組成,且至少一個包覆層(104a及/或104b)由第二玻璃成分組成,且第一玻璃成分及第二玻璃成分是不同的化學成分。在此類實施例中,第一玻璃成分具有第一硬度值,且第二玻璃成分具有第二硬度值。在一些實施例中,第一硬度值大於第二硬度值。例如,在此類實施例中,硬度差異為約3%至約50%,包括其間的所有範圍及子範圍。例如,在一些實施例中,硬度差異為至少3%、至少5%、至少10%或至少20%。在一些實施例中,第一硬度值比第二硬度值大約3%至約50%。在一些實施例中,第一硬度值比第二硬度值大約5%、約10%、約15%、約20%、約30%等。In some embodiments, the
熱導率是對於藉由材料的傳熱速率的有用設計參數,其中低熱導率的材料的傳熱速率低於高熱導率的材料。熱導率(λ)可藉由將材料的熱擴散係數乘以其密度(ρ )且乘以其比熱容()來計算。熱擴散係數(α) 量測自材料的熱端至其冷端的傳熱速率。雷射閃光分析可用於量測玻璃成分的熱擴散係數。材料的比熱是將材料的一個單位量的溫度提高一個單位溫度所需的能量。可使用示差掃描量熱法(DSC)來量測比熱容(cp )。Thermal conductivity is a useful design parameter for the heat transfer rate of materials, where low thermal conductivity materials have lower heat transfer rates than high thermal conductivity materials. Thermal conductivity (λ) can be obtained by multiplying the material's thermal diffusivity by its density ( ρ ) and multiplying by its specific heat capacity ( ) To calculate. The thermal diffusivity ( α) measures the rate of heat transfer from the hot end of a material to its cold end. Laser flash analysis can be used to measure the thermal diffusivity of glass components. The specific heat of a material is the energy required to increase the temperature of a unit amount of the material by a unit temperature. Differential scanning calorimetry (DSC) can be used to measure the specific heat capacity (c p ).
在一些實施例中,芯102由第一玻璃成分組成,且至少一個包覆層(104a及/或104b)由第二玻璃成分組成,且第一玻璃成分及第二玻璃成分是不同的化學成分。在此類實施例中,第一玻璃成分具有第一熱導率,且第二玻璃成分具有第二熱導率。在一些實施例中,第一熱導率的值大於第二熱導率的值。例如,在一些實施例中,熱導率差為約3%至約50%,包括其間的所有範圍及子範圍。例如,在一些實施例中,熱導率差為至少3%、至少5%、至少10%或至少20%。在一些實施例中,第一熱導率值比第二熱導率值大約3%至約50%。在一些實施例中,第一熱導率值比第二熱導率值大約5%、約10%、約15%、約20%、約30%等。In some embodiments, the
根據本文所描述的各種實施例,玻璃基板是經組態成硬磁碟驅動機的磁碟,該玻璃基板具有適於沉積資訊記錄媒體(例如,塗層或薄膜,諸如高度有序的L10 FePtX-Y奈米顆粒膜)的至少一個表面。在將記錄媒體沉積在玻璃基板上後,使用磁記錄頭將資訊記錄在媒體上,該磁記錄頭與磁碟的表面間隔約10 nm或更小(飛行高度)。根據本文所描述的各種實施例,玻璃基板具有實質上平坦的至少一個表面,具有的總厚度變化小於約1至5微米,包括其間的所有範圍及子範圍,其小於飛行高度,且因此適於記錄製程。According to various embodiments described herein, the glass substrate is a magnetic disk configured as a hard disk drive. The glass substrate has an information recording medium suitable for depositing information (for example, a coating or thin film, such as highly ordered L10 FePtX). -Y nanoparticle film) at least one surface. After the recording medium is deposited on the glass substrate, the information is recorded on the medium using a magnetic recording head that is separated from the surface of the magnetic disk by about 10 nm or less (flying height). According to various embodiments described herein, the glass substrate has at least one surface that is substantially flat, with a total thickness variation of less than about 1 to 5 microns, including all ranges and sub-ranges therebetween, which are less than the flying height, and are therefore suitable for Record the manufacturing process.
根據本文所描述的各種實施例,具有用於記錄製程的合適表面的玻璃基板是自圍繞芯層102具有兩個包覆層的夾層玻璃製品獲得的。包覆層中的一者或兩者經部分或完全地縮減以獲得平坦的表面。當一個包覆層經完全地縮減時,則芯102及相對的包覆層留存。當兩個包覆層經完全地縮減時,則芯102留存。在任一種情況下,包覆層的縮減產生適於基板及記錄製程的實質上平坦的表面。According to various embodiments described herein, a glass substrate with a suitable surface for recording the process is obtained from a laminated glass article having two cladding layers surrounding the
根據本文所描述的各種實施例,夾層玻璃製品包括至少一個包覆層(104a及/或104b)及芯層102,該至少一個包覆層包含第一玻璃成分,且芯層102包含第二玻璃成分,該第二玻璃成分是與第一玻璃成分不同的化學成分。第一玻璃成分及第二玻璃成分適於經由層壓熔合方法生產夾層玻璃製品,且第一玻璃成分及第二玻璃成分具有不同的材料硬度、不同的熱導率及/或不同的化學耐久性。因此,當夾層玻璃製品經受諸如酸蝕刻的縮減製程時,(諸)包覆層的厚度將以比芯102的厚度更快的速率縮減。夾層玻璃製品是藉由熔合方法形成的,該方法與內芯102同時形成外包覆層,該芯係藉由包覆層而免遭可導致厚度變化及翹曲的氣流及表面溫度調製。According to various embodiments described herein, a laminated glass article includes at least one cladding layer (104a and/or 104b) and a
根據本文所描述的各種實施例,芯層102將具有兩個相對的主要表面(第一表面及第二表面),其為實質上平坦的且適於基板及記錄製程。根據諸如硬度、熱導率及化學耐久性的不同特性來選擇包覆層104a及104b以及芯102的玻璃成分。在此類實施例中,包覆層104a及104b以比芯102更快的速率縮減,其產生具有適於基板及記錄製程的兩個實質上平坦的表面的玻璃基板。According to various embodiments described herein, the
提供上述內容是出於說明、解釋及描述本申請案的實施例的目的。對此等實施例的修改及適應對於熟習此項技術者而言顯而易見,且可在不脫離本申請案的範疇或精神的情況下進行。所有此類修改意欲涵蓋在下面的請求項中。The above content is provided for the purpose of illustration, explanation and description of the embodiments of this application. Modifications and adaptations to these embodiments are obvious to those familiar with the art, and can be made without departing from the scope or spirit of the application. All such modifications are intended to be covered by the request below.
雖然已根據示例性實施例描述了主題,但並不限於此。相反,附隨請求項應當被廣義地解釋為包括熟習此項技術者可做出的其他變體及實施例。Although the subject matter has been described according to exemplary embodiments, it is not limited thereto. On the contrary, the accompanying claims should be interpreted broadly to include other variations and embodiments that can be made by those familiar with the technology.
100:夾層玻璃製品
101a:層壓玻璃基板
101b:層壓玻璃基板
101c:層壓玻璃基板
101d:層壓玻璃基板
102:芯
104a,104b:包覆層
106:元件符號
200:層壓熔合拉伸設備
202:上部等壓管
204:下部等壓管
206:熔融玻璃包覆成分
208:熔融玻璃芯成分
210,212:槽
216,218,222,224:外成形表面
220:根部100:
第1A圖示意性地描繪根據本文所描述的一些實施例的夾層玻璃製品的橫截面。第1B圖示意性地描繪第1A圖的夾層玻璃製品,其中在其相對的外包覆表面上具有可覺的表面厚度變化。第1C圖示意性地描繪根據本文所描述的一些實施例的夾層玻璃製品的橫截面,其中在其外包覆表面上具有可覺的表面厚度變化。Figure 1A schematically depicts a cross-section of a laminated glass article according to some embodiments described herein. Figure 1B schematically depicts the laminated glass product of Figure 1A, in which there is a noticeable surface thickness change on the opposite outer covering surface. Figure 1C schematically depicts a cross-section of a laminated glass product according to some embodiments described herein, wherein there is a noticeable surface thickness change on the outer cladding surface thereof.
第2圖示意性地描繪用於製造第1A圖的夾層玻璃製品的熔合拉伸方法的實施例。Fig. 2 schematically depicts an embodiment of a fusion stretching method for manufacturing the laminated glass product of Fig. 1A.
第3A圖示意性地描繪根據本文所描述的一些實施例的夾層玻璃基板的橫截面。第3B圖示意性地描繪根據本文所描述的一些實施例的夾層玻璃基板的橫截面。第3C圖示意性地描繪根據本文所描述的一些實施例的夾層玻璃基板的橫截面。第3D圖示意性地描繪根據本文所描述的一些實施例的夾層玻璃基板的橫截面。Figure 3A schematically depicts a cross-section of a laminated glass substrate according to some embodiments described herein. Figure 3B schematically depicts a cross-section of a laminated glass substrate according to some embodiments described herein. Figure 3C schematically depicts a cross-section of a laminated glass substrate according to some embodiments described herein. Figure 3D schematically depicts a cross-section of a laminated glass substrate according to some embodiments described herein.
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100:夾層玻璃製品 100: laminated glass products
102:芯 102: Core
104a,104b:包覆層 104a, 104b: cladding layer
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