TW202104131A - Substrate for display device, method for producing the same, and resin composition solution for making the antireflection layer of that substrate - Google Patents

Substrate for display device, method for producing the same, and resin composition solution for making the antireflection layer of that substrate Download PDF

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TW202104131A
TW202104131A TW108145173A TW108145173A TW202104131A TW 202104131 A TW202104131 A TW 202104131A TW 108145173 A TW108145173 A TW 108145173A TW 108145173 A TW108145173 A TW 108145173A TW 202104131 A TW202104131 A TW 202104131A
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light
layer
resin composition
reflection layer
shielding
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小野悠樹
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日商日鐵化學材料股份有限公司
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136209Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/111Anti-reflection coatings using layers comprising organic materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133502Antiglare, refractive index matching layers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/04Materials and properties dye

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Electroluminescent Light Sources (AREA)
  • Optical Filters (AREA)
  • Materials For Photolithography (AREA)
  • Liquid Crystal (AREA)

Abstract

The present invention provides a substrate for a display device having a light-shielding film whose reflection of light is sufficiently suppressed, a method of manufacturing the same, and a resin composition solution for an anti-reflection layer used in these. The substrate includes a transparent substrate and a light-shielding film. The light-shielding film includes: an anti-reflection layer which is arranged on the transparent substrate, contains an inorganic filler with a refractive index of 1.2 to 1.8 and a transparent resin cured product and has an average thickness of 0.01 [mu]m to 1 [mu]m; and a light-shielding layer which is disposed on the anti-reflection layer, contains at least one light-shielding component selected from the group consisting of organic black pigments, inorganicblack pigments, and mixed-color pseudo-black pigments and a resin cured product, and has an average thickness of 0.1 [mu]m to 30 [mu]m. The surface roughness of the anti-reflection layer at the interface between the anti-reflection layer and the light-shielding layer is 40 nm to 200 nm.

Description

顯示裝置用基板及其製造方法、以及這些中使用的防反射層用樹脂組成物溶液Substrate for display device, manufacturing method thereof, and resin composition solution for anti-reflection layer used in these

本發明有關於一種顯示裝置用基板及其製造方法、以及這些中使用的防反射層用樹脂組成物溶液,更詳細而言有關於一種具有遮光膜的顯示裝置用基板及其製造方法、以及這些中使用的防反射層用樹脂組成物溶液。The present invention relates to a substrate for a display device, a method of manufacturing the same, and a resin composition solution for an anti-reflection layer used in these, and more specifically to a substrate for a display device having a light-shielding film, a method of manufacturing the same, and these Resin composition solution for anti-reflection layer used in.

在液晶顯示器等顯示裝置中,出於提高對比度或防止漏光等目的,而在紅、綠、藍等各像素的邊界處形成有格子狀、條紋狀或鑲嵌(mosaic)狀的黑色矩陣(Black Matrix)等遮光膜。作為此種遮光膜,已知使用含有黑色顏料等遮光成分的感光性樹脂組成物並形成於透明基板上的遮光膜,但在具有表面配置有此種遮光膜的透明基板的顯示裝置中,自透明基板側入射的光會在遮光膜的表面(與透明基板的界面)發生反射,因此存在周圍放置的物體等會映入畫面的問題。In display devices such as liquid crystal displays, for the purpose of improving contrast or preventing light leakage, a grid, stripe, or mosaic black matrix (Black Matrix) is formed at the boundary of each pixel such as red, green, and blue. ) And other light-shielding films. As such a light-shielding film, a light-shielding film formed on a transparent substrate using a photosensitive resin composition containing a light-shielding component such as a black pigment is known. However, in a display device having a transparent substrate with such a light-shielding film disposed on the surface, the The light incident on the transparent substrate side is reflected on the surface of the light-shielding film (the interface with the transparent substrate), so there is a problem that objects placed around it will be reflected on the screen.

因此,為了解決此種映入等問題,研究了抑制光在遮光膜表面的反射的方法。例如,在國際公開第2010/070929號(專利文獻1)中記載了:在具有透明基板與遮光層的顯示面板用基板中,藉由在透明基板上設置作為遮光層的光學濃度不同的兩種遮光層,且在透明基板與光學濃度高的遮光層之間配置比所述光學濃度高的遮光層光學濃度低的遮光層,來抑制光在遮光層表面的反射。而且,在國際公開第2014/178149號(專利文獻2)中記載了:在具有透明基板與黑色矩陣的顯示裝置用基板中,藉由在透明基板上層疊設置作為黑色矩陣的有效光學濃度處於特定的範圍內的反射率降低層與遮光層,來抑制光在黑色矩陣表面的反射。 [現有技術文獻]Therefore, in order to solve the problems such as reflections, methods of suppressing the reflection of light on the surface of the light-shielding film have been studied. For example, International Publication No. 2010/070929 (Patent Document 1) describes that in a substrate for a display panel having a transparent substrate and a light-shielding layer, two types of different optical densities are provided as the light-shielding layer on the transparent substrate. A light-shielding layer, and a light-shielding layer with a lower optical density than the light-shielding layer with a higher optical density is arranged between the transparent substrate and the light-shielding layer with a high optical density to suppress the reflection of light on the surface of the light-shielding layer. Furthermore, International Publication No. 2014/178149 (Patent Document 2) describes that in a substrate for a display device having a transparent substrate and a black matrix, the effective optical density of the black matrix is at a certain level by stacking on the transparent substrate. The reflectivity reduction layer and the light-shielding layer within the range of, to suppress the reflection of light on the surface of the black matrix. [Prior Art Literature]

[專利文獻] [專利文獻1]國際公開第2010/070929號 [專利文獻2]國際公開第2014/178149號[Patent Literature] [Patent Document 1] International Publication No. 2010/070929 [Patent Document 2] International Publication No. 2014/178149

[發明所要解決的問題] 然而,在專利文獻1及專利文獻2所記載的顯示裝置用基板中,未必能夠充分抑制光在遮光膜(遮光層、黑色矩陣)表面的反射,而為了提高對比度或防止漏光,需要進一步抑制光在遮光膜上的反射。[The problem to be solved by the invention] However, in the substrates for display devices described in Patent Document 1 and Patent Document 2, the reflection of light on the surface of the light-shielding film (light-shielding layer, black matrix) may not be sufficiently suppressed. In order to improve the contrast or prevent light leakage, it is necessary to further suppress the light. Reflection on the shading film.

本發明是鑒於所述以往技術所具有的課題而成,目的在於提供一種具有光的反射得到了充分抑制的遮光膜的顯示裝置用基板及其製造方法。The present invention is made in view of the problems of the above-mentioned prior art, and an object thereof is to provide a substrate for a display device having a light-shielding film in which reflection of light is sufficiently suppressed, and a method of manufacturing the same.

[解決問題的技術手段] 本發明者們為了達成所述目的反復進行了積極研究,結果發現:在具有透明基板及遮光膜的顯示裝置用基板中,藉由在透明基板上設置作為遮光膜的包括防反射層與遮光層,且所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度處於特定的範圍的遮光膜,會進一步抑制光在遮光膜表面的反射,從而完成了本發明。[Technical means to solve the problem] The inventors of the present invention have repeatedly conducted active studies to achieve the above-mentioned object. As a result, they have found that in a substrate for a display device having a transparent substrate and a light-shielding film, by providing a light-shielding film including an anti-reflection layer and a light-shielding layer on the transparent substrate And the light-shielding film with the surface roughness of the anti-reflection layer in the specific range at the interface of the anti-reflection layer and the light-shielding layer can further suppress the reflection of light on the surface of the light-shielding film, thereby completing the present invention.

即,本發明的顯示裝置用基板的特徵在於,包括透明基板以及遮光膜,所述遮光膜包括:配置於所述透明基板上,含有折射率為1.2~1.8的無機填料及透明樹脂硬化物,且平均厚度為0.01 μm~1 μm的防反射層;以及配置於所述防反射層上,含有選自由有機黑色顏料、無機黑色顏料及混色偽黑色顏料所組成的群組中的至少一種遮光成分及樹脂硬化物,且平均厚度為0.1 μm~30 μm的遮光層,並且所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度為40 nm~200 nm。That is, the substrate for a display device of the present invention is characterized by including a transparent substrate and a light-shielding film, and the light-shielding film includes: an inorganic filler having a refractive index of 1.2 to 1.8 and a transparent resin cured product arranged on the transparent substrate, And an anti-reflection layer with an average thickness of 0.01 μm-1 μm; and disposed on the anti-reflection layer, containing at least one light-shielding component selected from the group consisting of organic black pigments, inorganic black pigments, and mixed-color pseudo-black pigments And a resin cured product, and a light-shielding layer with an average thickness of 0.1 μm-30 μm, and the surface roughness of the anti-reflection layer at the interface between the anti-reflection layer and the light-shielding layer is 40 nm to 200 nm.

在此種顯示裝置用基板中,較佳為:所述無機填料的平均粒徑為25 nm~300 nm,而且,較佳為:相對於所述防反射層整體,所述無機填料的含量為5質量%~95質量%。In such a substrate for a display device, it is preferable that the average particle diameter of the inorganic filler is 25 nm to 300 nm, and it is preferable that the content of the inorganic filler relative to the whole anti-reflection layer is 5 mass% to 95 mass%.

而且,本發明的第一種顯示裝置用基板的製造方法是包括透明基板以及配置於所述透明基板上的包括防反射層及遮光層的遮光膜的顯示裝置用基板的製造方法,並且特徵在於,包括: 在所述透明基板上,形成含有折射率為1.2~1.8的無機填料及光硬化性透明樹脂、平均厚度為0.01 μm~1 μm且表面粗糙度為40 nm~200 nm的防反射層用樹脂組成物層的步驟; 在所述防反射層用樹脂組成物層上,形成含有選自由有機黑色顏料、無機黑色顏料及混色偽黑色顏料所組成的群組中的至少一種遮光成分及光硬化性樹脂的遮光層用樹脂組成物層的步驟;以及 對所述防反射層用樹脂組成物層及所述遮光層用樹脂組成物層一併實施曝光處理後,一併實施顯影處理,並且實施加熱處理(後烘烤),而形成含有所述無機填料及透明樹脂硬化物的防反射層以及含有所述遮光成分及樹脂硬化物且平均厚度為0.1 μm~30 μm的遮光層的步驟。Furthermore, the first method for manufacturing a substrate for a display device of the present invention is a method for manufacturing a substrate for a display device including a transparent substrate and a light-shielding film including an anti-reflection layer and a light-shielding layer disposed on the transparent substrate, and is characterized in ,include: On the transparent substrate, a resin composition for an anti-reflection layer containing an inorganic filler with a refractive index of 1.2 to 1.8 and a photocurable transparent resin, an average thickness of 0.01 μm to 1 μm, and a surface roughness of 40 nm to 200 nm is formed Physical layer steps; On the resin composition layer for the anti-reflection layer, a resin for a light-shielding layer containing at least one light-shielding component selected from the group consisting of organic black pigments, inorganic black pigments, and mixed-color pseudo-black pigments and a photocurable resin is formed The steps of the composition layer; and After the resin composition layer for the anti-reflection layer and the resin composition layer for the light-shielding layer are subjected to exposure treatment together, they are also subjected to a development treatment and heat treatment (post-baking) is carried out to form a layer containing the inorganic The step of filling an anti-reflection layer of a filler and a transparent resin cured product, and a light shielding layer containing the light shielding component and the resin cured product and having an average thickness of 0.1 μm to 30 μm.

在此種第一種顯示裝置用基板的製造方法中,較佳為:所述防反射層用樹脂組成物層中的光硬化性透明樹脂及所述遮光層用樹脂組成物層中的光硬化性樹脂均為鹼可溶性,所述顯影處理為鹼顯影處理。In this first method of manufacturing a substrate for a display device, it is preferable that the photocurable transparent resin in the resin composition layer for the anti-reflection layer and the photocurable resin in the resin composition layer for the light-shielding layer All resins are alkali-soluble, and the development treatment is alkali development treatment.

並且,本發明的第二種顯示裝置用基板的製造方法是包括透明基板以及配置於所述透明基板上的包括防反射層及遮光層的遮光膜的顯示裝置用基板的製造方法,並且特徵在於,包括: 在所述透明基板上,對含有折射率為1.2~1.8的無機填料及熱硬化性透明樹脂與熱硬化性單體中的至少一種的防反射層用樹脂組成物實施加熱硬化處理,形成平均厚度為0.01 μm~1 μm且表面粗糙度為40 nm~200 nm的防反射層的步驟;以及 在所述防反射層上,對含有選自由有機黑色顏料、無機黑色顏料及混色偽黑色顏料所組成的群組中的至少一種遮光成分及光硬化性樹脂的遮光層用樹脂組成物實施曝光處理後,實施顯影處理,並且實施加熱處理(後烘烤),而形成平均厚度為0.1 μm~30 μm的遮光層的步驟。Furthermore, the second method of manufacturing a substrate for a display device of the present invention is a method of manufacturing a substrate for a display device including a transparent substrate and a light shielding film including an anti-reflection layer and a light shielding layer disposed on the transparent substrate, and is characterized in ,include: On the transparent substrate, a resin composition for an anti-reflection layer containing at least one of an inorganic filler with a refractive index of 1.2 to 1.8, a thermosetting transparent resin, and a thermosetting monomer is heat-cured to form an average thickness The step of an anti-reflection layer with a surface roughness of from 0.01 μm to 1 μm and a surface roughness of from 40 nm to 200 nm; and On the anti-reflection layer, a resin composition for a light-shielding layer containing at least one light-shielding component selected from the group consisting of organic black pigments, inorganic black pigments, and mixed-color pseudo-black pigments and a photocurable resin is subjected to exposure treatment After that, a development process is performed, and a heating process (post-baking) is performed to form a step of forming a light-shielding layer with an average thickness of 0.1 μm to 30 μm.

在此種第二種顯示裝置用基板的製造方法中,較佳為:所述遮光層用樹脂組成物層中的光硬化性樹脂為鹼可溶性,所述顯影處理為鹼顯影處理。In the second method of manufacturing a substrate for a display device, it is preferable that the photocurable resin in the resin composition layer for the light-shielding layer is alkali-soluble, and the development treatment is an alkali development treatment.

而且,本發明的第一種防反射層用樹脂組成物溶液是含有能夠形成平均厚度為0.01 μm~1 μm且表面粗糙度為40 nm~200 nm的防反射層用樹脂組成物層的光硬化性樹脂組成物及有機溶媒的樹脂組成物溶液,並且特徵在於, 所述光硬化性樹脂組成物含有:相對於樹脂組成物整體,為5質量%~95質量%的折射率為1.2~1.8、平均粒徑為25 nm~300 nm且能夠分散於所述有機溶媒中的無機填料;相對於樹脂組成物整體,為1.54質量%~95質量%的光硬化性透明樹脂;相對於所述光硬化性透明樹脂與所述光聚合性單體的合計量,為0質量%~50質量%的光聚合性單體;以及相對於所述光硬化性透明樹脂與所述光聚合性單體的合計量100質量份,為0質量份~30質量份的光聚合引發劑,並且 相對於所述防反射層用樹脂組成物與所述有機溶媒的合計量,所述有機溶媒的含量為80質量%~99.9質量%, 溶液黏度為1 mPa·sec~4 mPa·sec。Furthermore, the first resin composition solution for an anti-reflection layer of the present invention contains a photohardening layer capable of forming a resin composition layer for an anti-reflection layer having an average thickness of 0.01 μm to 1 μm and a surface roughness of 40 nm to 200 nm. A resin composition solution of a sexual resin composition and an organic solvent, and is characterized in that: The photocurable resin composition contains: 5% to 95% by mass relative to the entire resin composition, a refractive index of 1.2 to 1.8, an average particle diameter of 25 nm to 300 nm, and can be dispersed in the organic solvent Inorganic filler; relative to the entire resin composition, 1.54% to 95% by mass of the photocurable transparent resin; relative to the total amount of the photocurable transparent resin and the photopolymerizable monomer, it is 0 Mass% to 50% by mass of the photopolymerizable monomer; and 0 to 30 parts by mass of photopolymerization initiation relative to 100 parts by mass of the total amount of the photocurable transparent resin and the photopolymerizable monomer Agent, and The content of the organic solvent is 80% by mass to 99.9% by mass relative to the total amount of the resin composition for the antireflection layer and the organic solvent, The viscosity of the solution is 1 mPa·sec~4 mPa·sec.

並且,本發明的第二種防反射層用樹脂組成物溶液是含有能夠形成平均厚度為0.01 μm~1 μm且表面粗糙度為40 nm~200 nm的防反射層的熱硬化性樹脂組成物、及有機溶媒的樹脂組成物溶液,並且特徵在於, 所述熱硬化性樹脂組成物含有:相對於樹脂組成物整體,為5質量%~95質量%的折射率為1.2~1.8、平均粒徑為25 nm~300 nm且能夠分散於所述有機溶媒中的無機填料;相對於樹脂組成物整體,為3.2質量%~94.06質量%的熱硬化性透明樹脂與熱硬化性單體中的至少一種;以及相對於所述熱硬化性透明樹脂與所述熱硬化性單體的合計量100質量份,為1質量份~25質量份的熱硬化劑,並且 相對於所述防反射層用樹脂組成物與所述有機溶媒的合計量,所述有機溶媒的含量為80質量%~99.9質量%, 溶液黏度為1 mPa·sec~4 mPa·sec。In addition, the second resin composition solution for an anti-reflection layer of the present invention contains a thermosetting resin composition capable of forming an anti-reflection layer having an average thickness of 0.01 μm to 1 μm and a surface roughness of 40 nm to 200 nm, And an organic solvent resin composition solution, and is characterized in that: The thermosetting resin composition contains: 5% to 95% by mass relative to the entire resin composition, a refractive index of 1.2 to 1.8, an average particle size of 25 nm to 300 nm, and can be dispersed in the organic solvent Inorganic filler in the resin composition; at least one of a thermosetting transparent resin and a thermosetting monomer of 3.2% to 94.06% by mass relative to the entire resin composition; and relative to the thermosetting transparent resin and the The total amount of the thermosetting monomer is 100 parts by mass, which is 1 part by mass to 25 parts by mass of the thermosetting agent, and The content of the organic solvent is 80% by mass to 99.9% by mass relative to the total amount of the resin composition for the antireflection layer and the organic solvent, The viscosity of the solution is 1 mPa·sec~4 mPa·sec.

[發明的效果] 根據本發明,能夠獲得一種具有光的反射得到了充分抑制的遮光膜的顯示裝置用基板。[Effects of the invention] According to the present invention, it is possible to obtain a substrate for a display device having a light-shielding film in which reflection of light is sufficiently suppressed.

以下,針對本發明,結合其較佳的實施方式進行詳細的說明。Hereinafter, the present invention will be described in detail in combination with its preferred embodiments.

首先,對本發明的顯示裝置用基板進行說明。本發明的顯示裝置用基板包括透明基板以及遮光膜,所述遮光膜包括:配置於所述透明基板上,含有折射率處於特定的範圍內的無機填料及透明樹脂硬化物,且平均厚度處於特定的範圍內的防反射層;配置於所述防反射層上,含有選自由有機黑色顏料、混色偽黑色顏料及無機黑色顏料所組成的群組中的至少一種遮光成分及樹脂硬化物,且平均厚度處於特定的範圍內的遮光層,並且所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度處於特定的範圍內。First, the substrate for a display device of the present invention will be described. The substrate for a display device of the present invention includes a transparent substrate and a light-shielding film. The light-shielding film includes: disposed on the transparent substrate, containing an inorganic filler having a refractive index in a specific range and a transparent resin cured product, and having an average thickness in a specific range. An anti-reflection layer within the range of; is disposed on the anti-reflection layer, and contains at least one light-shielding component and a resin cured product selected from the group consisting of organic black pigments, mixed-color pseudo-black pigments and inorganic black pigments, and average The thickness of the light shielding layer is within a specific range, and the surface roughness of the antireflection layer at the interface between the antireflection layer and the light shielding layer is within the specific range.

作為本發明中所使用的透明基板,並無特別限制,例如可列舉:玻璃基板、透明樹脂膜(聚對苯二甲酸乙二酯(Polyethylene terephthalate,PET)膜、聚萘二甲酸乙二酯(Polyethylene naphthalene,PEN)膜、聚碳酸脂膜、聚醯亞胺膜等)以及公知的用於顯示裝置中的透明基板。The transparent substrate used in the present invention is not particularly limited. For example, a glass substrate, a transparent resin film (polyethylene terephthalate (PET) film, polyethylene naphthalate ( Polyethylene naphthalene (PEN) film, polycarbonate film, polyimide film, etc.) and known transparent substrates used in display devices.

本發明中的遮光膜包括防反射層與遮光層,並且在本發明的顯示裝置用基板中,構成彩色濾光片或互補金屬氧化物半導體(complementary metal oxide semiconductor,CMOS)傳感器等的黑色矩陣、觸控面板用邊框(外框(bezel))、黑色柱狀間隔物(Blackcolumnspacer)、黑色間隔壁(阻隔(bank)材)等。而且,此種遮光膜配置於所述透明基板上,更詳細而言,防反射層配置於所述透明基板上,遮光層配置於所述防反射層上。The light-shielding film in the present invention includes an anti-reflection layer and a light-shielding layer, and in the display device substrate of the present invention, a black matrix, such as a color filter or a complementary metal oxide semiconductor (complementary metal oxide semiconductor, CMOS) sensor, etc. Touch panel frame (bezel), black column spacer (Blackcolumnspacer), black partition wall (bank material), etc. Moreover, such a light-shielding film is disposed on the transparent substrate. In more detail, the anti-reflection layer is disposed on the transparent substrate, and the light-shielding layer is disposed on the anti-reflection layer.

所述防反射層含有折射率為1.2~1.8的無機填料。具有此種折射率的無機填料具有比後述遮光成分的折射率小的折射率。藉由使用此種折射率小的無機填料,遮光膜的反射率被降低,光在遮光膜上的反射被抑制。作為此種無機填料的折射率,較佳為1.3~1.6,更佳為1.4~1.5。The anti-reflection layer contains an inorganic filler having a refractive index of 1.2 to 1.8. The inorganic filler having such a refractive index has a refractive index smaller than the refractive index of the light-shielding component described later. By using such an inorganic filler with a small refractive index, the reflectance of the light-shielding film is reduced, and the reflection of light on the light-shielding film is suppressed. The refractive index of such an inorganic filler is preferably 1.3 to 1.6, more preferably 1.4 to 1.5.

作為具有此種折射率的無機填料,可列舉二氧化矽(折射率:1.46)、氟化鎂(折射率:1.38)、氟化鋰(折射率:1.39)、氟化鈣(折射率:1.40)等,其中尤佳為二氧化矽(折射率:1.46)。而且,此種無機填料(特別是二氧化矽)較佳為被製造或經表面處理為能夠分散於有機溶媒中。作為此種被製造或經表面處理為能夠分散於有機溶媒中的二氧化矽,可列舉:氣相二氧化矽(fumed silica)、膠體二氧化矽(Colloidal silica)、有機二氧化矽溶膠(Organo silica sol),例如可使用以日產化學股份有限公司製造的有機二氧化矽溶膠、阿德瑪科技(Admatechs)股份有限公司製造的阿德瑪精細(admafine)及阿德瑪奈米(ADMANANO)、扶桑化學工業股份有限公司製造的膠體二氧化矽、有機二氧化矽溶膠及二氧化矽奈米粉末(SILICA NANO POWDER)、日本艾羅西爾(Aerosil)股份有限公司製造的氣相二氧化矽等商品名來售賣的二氧化矽中能夠分散於有機溶劑中者。Examples of inorganic fillers having such a refractive index include silicon dioxide (refractive index: 1.46), magnesium fluoride (refractive index: 1.38), lithium fluoride (refractive index: 1.39), and calcium fluoride (refractive index: 1.40). ), etc. Among them, silicon dioxide (refractive index: 1.46) is particularly preferred. Moreover, such an inorganic filler (especially silica) is preferably manufactured or surface-treated to be able to be dispersed in an organic solvent. As such silica that is manufactured or surface-treated to be dispersed in an organic solvent, fumed silica, colloidal silica, organic silica sol (Organo silica sol), such as organic silica sol manufactured by Nissan Chemical Co., Ltd., admafine manufactured by Admatechs Co., Ltd. and Admanano (ADMANANO), Colloidal silica, organic silica sol and silica nano powder (SILICA NANO POWDER) manufactured by Fuso Chemical Industry Co., Ltd., fumed silica manufactured by Aerosil Co., Ltd., etc. The silicon dioxide sold under the trade name can be dispersed in an organic solvent.

作為所述無機填料的平均粒徑,較佳為25 nm~300 nm,更佳為30 nm~260 nm,尤佳為30 nm~220 nm。若所述無機填料的平均粒徑不足所述下限,則存在所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度不足規定的範圍的下限的傾向,另一方面,若超過所述上限,則存在所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度超過規定的範圍的上限的傾向。另外,無機填料的平均粒徑可藉由利用動態光散射法等的粒度分佈測定來求出。The average particle size of the inorganic filler is preferably 25 nm to 300 nm, more preferably 30 nm to 260 nm, and particularly preferably 30 nm to 220 nm. If the average particle size of the inorganic filler is less than the lower limit, the surface roughness of the anti-reflection layer at the interface between the anti-reflection layer and the light shielding layer tends to be less than the lower limit of the predetermined range. On the other hand, if the upper limit is exceeded, the surface roughness of the antireflection layer at the interface between the antireflection layer and the light shielding layer tends to exceed the upper limit of the predetermined range. In addition, the average particle size of the inorganic filler can be determined by a particle size distribution measurement using a dynamic light scattering method or the like.

作為所述無機填料的含量,相對於防反射層整體,較佳為5質量%~95質量%,更佳為15質量%~90質量%,尤佳為25質量%~85質量%。若所述無機填料的含量不足所述下限,則存在所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度不足規定的範圍的下限的傾向,另一方面,若超過所述上限,則存在所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度超過規定的範圍的上限的傾向。The content of the inorganic filler is preferably 5% by mass to 95% by mass, more preferably 15% by mass to 90% by mass, and particularly preferably 25% by mass to 85% by mass relative to the entire antireflection layer. If the content of the inorganic filler is less than the lower limit, the surface roughness of the anti-reflection layer at the interface between the anti-reflection layer and the light-shielding layer tends to be less than the lower limit of the predetermined range. On the other hand, If the upper limit is exceeded, the surface roughness of the antireflection layer at the interface between the antireflection layer and the light shielding layer tends to exceed the upper limit of the predetermined range.

而且,所述防反射層含有透明樹脂硬化物。作為此種透明樹脂硬化物,並無特別限制,例如可列舉後述光硬化性透明樹脂或熱硬化性透明樹脂、熱硬化性單體的硬化物。作為所述透明樹脂硬化物的含量,相對於防反射層整體,較佳為4質量%~95質量%,更佳為9質量%~85質量%,尤佳為14質量%~75質量%。若所述透明樹脂硬化物的含量不足所述下限,則存在所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度超過規定的範圍的上限的傾向,另一方面,若超過所述上限,則存在所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度不足規定的範圍的下限的傾向。Furthermore, the anti-reflection layer contains a transparent resin cured product. The cured transparent resin is not particularly limited, and examples thereof include cured products of photocurable transparent resins, thermosetting transparent resins, and thermosetting monomers, which will be described later. The content of the cured transparent resin is preferably 4% by mass to 95% by mass, more preferably 9% by mass to 85% by mass, and particularly preferably 14% by mass to 75% by mass relative to the entire antireflection layer. If the content of the transparent resin cured product is less than the lower limit, the surface roughness of the anti-reflection layer at the interface between the anti-reflection layer and the light-shielding layer tends to exceed the upper limit of the predetermined range. On the other hand, if the upper limit is exceeded, the surface roughness of the antireflection layer at the interface between the antireflection layer and the light shielding layer tends to be less than the lower limit of the predetermined range.

在本發明中的遮光膜中,所述防反射層的平均厚度為0.01 μm~1 μm。若所述防反射層的平均厚度不足所述下限,則存在所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度超過規定的範圍的上限的傾向,另一方面,若超過所述上限,則存在所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度不足規定的範圍的下限的傾向。作為此種防反射層的平均厚度,就所述防反射層的表面粗糙度容易成為規定的範圍內的觀點而言,較佳為0.02 μm~0.5 μm,更佳為0.04 μm~0.3 μm。另外,防反射層的平均厚度可藉由使用觸針式階差形狀測定裝置測定防反射層表面與透明基板表面的階差,並將其平均而求出。In the light-shielding film of the present invention, the average thickness of the anti-reflection layer is 0.01 μm to 1 μm. If the average thickness of the anti-reflection layer is less than the lower limit, the surface roughness of the anti-reflection layer at the interface between the anti-reflection layer and the light shielding layer tends to exceed the upper limit of the predetermined range. On the other hand, if the upper limit is exceeded, the surface roughness of the antireflection layer at the interface between the antireflection layer and the light shielding layer tends to be less than the lower limit of the predetermined range. The average thickness of such an anti-reflection layer is preferably from 0.02 μm to 0.5 μm, and more preferably from 0.04 μm to 0.3 μm from the viewpoint that the surface roughness of the anti-reflection layer is easily within a predetermined range. In addition, the average thickness of the anti-reflection layer can be obtained by measuring the step difference between the surface of the anti-reflection layer and the surface of the transparent substrate using a stylus type step shape measuring device, and averaging them.

所述遮光層含有選自由有機黑色顏料、無機黑色顏料及混色偽黑色顏料所組成的群組中的至少一種遮光成分。作為有機黑色顏料,可列舉:苝黑、苯胺黑、花青黑、內醯胺黑等。作為無機黑色顏料,可列舉:碳黑、氧化鉻、氧化鐵、鈦黑等。作為混色偽黑色顏料,可列舉將紅、藍、綠、紫、黃、花青、品紅等中的兩種以上顏料混合,進行偽黑色化而成的顏料。這些遮光成分可單獨使用一種也可並用兩種以上。而且,這些遮光成分中,就遮光性、表面平滑性、分散穩定性、與樹脂的相容性良好的觀點而言,尤佳為碳黑。The light-shielding layer contains at least one light-shielding component selected from the group consisting of organic black pigments, inorganic black pigments, and color-mixed pseudo-black pigments. Examples of organic black pigments include perylene black, aniline black, cyanine black, and internal amide black. As an inorganic black pigment, carbon black, chromium oxide, iron oxide, titanium black, etc. are mentioned. Examples of the mixed-color pseudo-black pigment include pigments obtained by mixing two or more kinds of pigments, such as red, blue, green, purple, yellow, cyanine, and magenta, to pseudo-black. These light-shielding components may be used individually by 1 type, and may use 2 or more types together. Furthermore, among these light-shielding components, carbon black is particularly preferable from the viewpoint of good light-shielding properties, surface smoothness, dispersion stability, and compatibility with resins.

作為所述遮光成分的平均粒徑,較佳為10 nm~300 nm,更佳為30 nm~250 nm,尤佳為50 nm~220 nm。若所述遮光成分的平均粒徑不足所述下限,則存在所述遮光層的遮光性下降的傾向,另一方面,若超過所述上限,則存在所述遮光層的表面平滑性、所述遮光成分的分散均勻性下降的傾向。另外,遮光成分的平均粒徑可藉由利用動態光散射法等的粒度分佈測定來求出。The average particle diameter of the light-shielding component is preferably 10 nm to 300 nm, more preferably 30 nm to 250 nm, and particularly preferably 50 nm to 220 nm. If the average particle diameter of the light-shielding component is less than the lower limit, the light-shielding property of the light-shielding layer tends to decrease. On the other hand, if it exceeds the upper limit, the surface smoothness of the light-shielding layer and the The dispersion uniformity of the light-shielding component tends to decrease. In addition, the average particle size of the light-shielding component can be determined by particle size distribution measurement by dynamic light scattering method or the like.

作為所述遮光成分的含量,在使用碳黑作為遮光成分的情況下,相對於遮光層整體,較佳為10質量%~65質量%,更佳為15質量%~60質量%,尤佳為20質量%~55質量%。而且,在使用碳黑以外的物質作為遮光成分的情況下,相對於遮光層整體,較佳為10質量%~90質量%,更佳為20質量%~80質量%,尤佳為30質量%~70質量%。若所述遮光成分的含量不足所述下限,則存在所述遮光層的遮光性下降的傾向,另一方面,若超過所述上限,則存在所述遮光層的表面平滑性、所述遮光成分的分散均勻性下降的傾向。As the content of the light-shielding component, when carbon black is used as the light-shielding component, relative to the entire light-shielding layer, it is preferably 10% by mass to 65% by mass, more preferably 15% by mass to 60% by mass, and particularly preferably 20% by mass to 55% by mass. Furthermore, when a substance other than carbon black is used as the light-shielding component, relative to the entire light-shielding layer, it is preferably 10% by mass to 90% by mass, more preferably 20% by mass to 80% by mass, and particularly preferably 30% by mass. ~70% by mass. If the content of the light-shielding component is less than the lower limit, the light-shielding property of the light-shielding layer tends to decrease. On the other hand, if the content exceeds the upper limit, the surface smoothness of the light-shielding layer and the light-shielding component are present. The tendency of the uniformity of dispersion to decrease.

而且,所述遮光層含有樹脂硬化物。作為此種樹脂硬化物,並無特別限制,例如可列舉後述光硬化性樹脂的硬化物。作為所述樹脂硬化物的含量,在使用碳黑作為遮光成分的情況下,相對於遮光層整體,較佳為34質量%~90質量%,更佳為39質量%~85質量%,尤佳為44質量%~80質量%。而且,在使用碳黑以外的物質作為遮光成分的情況下,相對於遮光層整體,較佳為9質量%~90質量%,更佳為19質量%~80質量%,尤佳為29質量%~70質量%。若所述樹脂硬化物的含量不足所述下限,則存在所述遮光層的表面平滑性、所述遮光成分的分散均勻性下降的傾向,另一方面,若超過所述上限,則存在所述遮光層的遮光性下降的傾向。Furthermore, the light-shielding layer contains a cured resin. The resin cured product is not particularly limited, and for example, a cured product of a photocurable resin described later can be cited. As the content of the resin cured product, when carbon black is used as the light-shielding component, relative to the entire light-shielding layer, it is preferably 34% by mass to 90% by mass, more preferably 39% by mass to 85% by mass, particularly It is 44% by mass to 80% by mass. In addition, when a substance other than carbon black is used as the light-shielding component, relative to the entire light-shielding layer, it is preferably 9% by mass to 90% by mass, more preferably 19% by mass to 80% by mass, and particularly preferably 29% by mass. ~70% by mass. If the content of the cured resin is less than the lower limit, the surface smoothness of the light-shielding layer and the uniformity of dispersion of the light-shielding components tend to decrease. On the other hand, if the content exceeds the upper limit, the The light-shielding layer tends to decrease.

在本發明中的遮光膜中,所述遮光層的平均厚度為0.1 μm~30 μm。若所述遮光層的平均厚度不足所述下限,則所述遮光層的遮光性會下降,另一方面,若超過所述上限,則鹼顯影所需要的時間變長,生產性會下降。作為此種遮光層的平均厚度,就兼顧遮光性與生產性的觀點而言,較佳為0.5 μm~20 μm,更佳為1 μm~10 μm。另外,遮光層的平均厚度可藉由如下方式而求出,即:使用觸針式階差形狀測定裝置測定遮光膜表面與透明基板表面的階差,將其平均而求出遮光膜的平均厚度,並自所述遮光膜的平均厚度中減去所述防反射層的平均厚度。In the light-shielding film of the present invention, the average thickness of the light-shielding layer is 0.1 μm to 30 μm. If the average thickness of the light-shielding layer is less than the lower limit, the light-shielding property of the light-shielding layer will decrease. On the other hand, if it exceeds the upper limit, the time required for alkali development will become longer and productivity will decrease. The average thickness of such a light-shielding layer is preferably 0.5 μm to 20 μm, and more preferably 1 μm to 10 μm from the viewpoint of both light-shielding properties and productivity. In addition, the average thickness of the light-shielding layer can be obtained by measuring the level difference between the surface of the light-shielding film and the surface of the transparent substrate using a stylus-type step shape measuring device, and averaging them to obtain the average thickness of the light-shielding film , And subtract the average thickness of the anti-reflection layer from the average thickness of the light-shielding film.

而且,在本發明中的遮光膜中,所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度為40 nm~200 nm。若所述防反射層的表面粗糙度不足所述下限,則無法充分降低遮光膜的反射率,而無法充分防止光在遮光膜上的反射。另一方面,若所述防反射層的表面粗糙度超過所述上限,則難以使遮光膜的平坦性成為期望的水平。作為此種防反射層的表面粗糙度,就遮光膜的反射率變低,光在遮光膜上的反射被抑制,而且,確保遮光膜的平坦性的觀點而言,較佳為50 nm~180 nm,更佳為80 nm~160 nm。Furthermore, in the light-shielding film of the present invention, the surface roughness of the anti-reflection layer at the interface between the anti-reflection layer and the light-shielding layer is 40 nm to 200 nm. If the surface roughness of the anti-reflection layer is less than the lower limit, the reflectance of the light-shielding film cannot be sufficiently reduced, and the reflection of light on the light-shielding film cannot be sufficiently prevented. On the other hand, if the surface roughness of the anti-reflection layer exceeds the upper limit, it is difficult to make the flatness of the light shielding film to a desired level. As for the surface roughness of such an anti-reflection layer, the reflectance of the light-shielding film is reduced, the reflection of light on the light-shielding film is suppressed, and from the viewpoint of ensuring the flatness of the light-shielding film, it is preferably 50 nm to 180 nm, more preferably 80 nm to 160 nm.

其次,對本發明的顯示裝置用基板的製造方法進行說明。本發明的第一種顯示裝置用基板的製造方法是包括透明基板以及配置於所述透明基板上的包括防反射層及遮光層的遮光膜的顯示裝置用基板的製造方法,並且包括: 在所述透明基板上,形成含有折射率處於特定的範圍內的無機填料及光硬化性透明樹脂、平均厚度為0.01 μm~1 μm且表面粗糙度為40 nm~200 nm的防反射層用樹脂組成物層的步驟; 在所述防反射層用樹脂組成物層上,形成含有選自由有機黑色顏料、無機黑色顏料及混色偽黑色顏料所組成的群組中的至少一種遮光成分及光硬化性樹脂的遮光層用樹脂組成物層的步驟;以及 對所述防反射層用樹脂組成物層及所述遮光層用樹脂組成物層一併實施曝光處理後,一併實施顯影處理,並且實施加熱處理(後烘烤),而形成含有所述無機填料及透明樹脂硬化物的防反射層以及含有所述遮光成分及樹脂硬化物且平均厚度為0.1 μm~30 μm的遮光層的步驟。Next, a method of manufacturing a substrate for a display device of the present invention will be described. The first method for manufacturing a substrate for a display device of the present invention is a method for manufacturing a substrate for a display device including a transparent substrate and a light-shielding film including an anti-reflection layer and a light-shielding layer disposed on the transparent substrate, and includes: On the transparent substrate, a resin for an anti-reflection layer containing an inorganic filler having a refractive index in a specific range and a light-curing transparent resin, an average thickness of 0.01 μm to 1 μm, and a surface roughness of 40 nm to 200 nm is formed Steps of the composition layer; On the resin composition layer for the anti-reflection layer, a resin for a light-shielding layer containing at least one light-shielding component selected from the group consisting of organic black pigments, inorganic black pigments, and mixed-color pseudo-black pigments and a photocurable resin is formed The steps of the composition layer; and After the resin composition layer for the anti-reflection layer and the resin composition layer for the light-shielding layer are subjected to exposure treatment together, they are also subjected to a development treatment and heat treatment (post-baking) is carried out to form a layer containing the inorganic The step of filling an anti-reflection layer of a filler and a transparent resin cured product, and a light shielding layer containing the light shielding component and the resin cured product and having an average thickness of 0.1 μm to 30 μm.

而且,本發明的第二種顯示裝置用基板的製造方法是包括透明基板以及配置於所述透明基板上的包括防反射層及遮光層的遮光膜的顯示裝置用基板的製造方法,並且包括: 在所述透明基板上,對含有折射率處於特定的範圍內的無機填料及熱硬化性透明樹脂與熱硬化性單體中的至少一種的防反射層用樹脂組成物實施加熱硬化處理,形成平均厚度為0.01 μm~1 μm且表面粗糙度為40 nm~200 nm的防反射層的步驟;以及 在所述防反射層上,對含有選自由有機黑色顏料、無機黑色顏料及混色偽黑色顏料所組成的群組中的至少一種遮光成分及光硬化性樹脂的遮光層用樹脂組成物實施曝光處理後,實施顯影處理,並且實施加熱處理(後烘烤),而形成平均厚度為0.1 μm~30 μm的遮光層的步驟。在此種第二種顯示裝置用基板的製造方法中,也可在形成所述遮光層(遮光層圖案)後,視需要,藉由蝕刻處理除去所述防反射層中的上部未形成遮光層的部分(在顯影處理中,上部的遮光層用樹脂組成物層被除去的部分)的防反射層,對防反射層也形成圖案。Furthermore, the second method for manufacturing a substrate for a display device of the present invention is a method for manufacturing a substrate for a display device including a transparent substrate and a light-shielding film including an anti-reflection layer and a light-shielding layer disposed on the transparent substrate, and includes: On the transparent substrate, a resin composition for an anti-reflection layer containing at least one of an inorganic filler having a refractive index in a specific range, a thermosetting transparent resin, and a thermosetting monomer is heat-cured to form an average The step of having an anti-reflection layer having a thickness of 0.01 μm to 1 μm and a surface roughness of 40 nm to 200 nm; and On the anti-reflection layer, a resin composition for a light-shielding layer containing at least one light-shielding component selected from the group consisting of organic black pigments, inorganic black pigments, and mixed-color pseudo-black pigments and a photocurable resin is subjected to exposure treatment After that, a development process is performed, and a heating process (post-baking) is performed to form a step of forming a light-shielding layer with an average thickness of 0.1 μm to 30 μm. In this second method of manufacturing a substrate for a display device, after forming the light-shielding layer (light-shielding layer pattern), if necessary, the upper part of the anti-reflection layer without a light-shielding layer may be removed by etching. The anti-reflection layer of the part (the part where the resin composition layer for the upper light-shielding layer is removed during the development process) is also patterned on the anti-reflection layer.

本發明的第一種及第二種顯示裝置用基板的製造方法中所使用的透明基板、折射率處於特定的範圍內的無機填料、及遮光成分為所述本發明的顯示裝置用基板的說明中記載的透明基板、無機填料及遮光成分。The transparent substrate, the inorganic filler having a refractive index in a specific range, and the light-shielding component used in the manufacturing methods of the first and second display device substrates of the present invention are the description of the display device substrate of the present invention The transparent substrate, inorganic filler, and light-shielding component described in.

本發明的第一種顯示裝置用基板的製造方法中所使用的防反射層用樹脂組成物(以下,稱為“第一種防反射層用樹脂組成物”)含有所述無機填料及光硬化性透明樹脂。作為所述光硬化性透明樹脂,只要為藉由光照射(例如,紫外線(ultraviolet,UV)照射)會硬化的透明樹脂,則並無特別限制,就顯影性優異的觀點而言,較佳為鹼可溶性的光硬化性透明樹脂,並且,就光硬化性、圖案化特性也優異的觀點而言,較佳為日本專利特開2017-72760號公報中記載的含有聚合性不飽和基的鹼可溶性樹脂,即,使具有2個以上環氧基的化合物(更佳為使雙酚類與表鹵醇反應而獲得的環氧化合物)與(甲基)丙烯酸(是指“丙烯酸和/或甲基丙烯酸”)的反應產物進一步與多元羧酸或其酸酐反應而獲得的環氧(甲基)丙烯酸酯酸加成物,尤佳為自雙酚茀化合物衍生的環氧丙烯酸酯酸加成物。The resin composition for the anti-reflection layer (hereinafter referred to as "the first resin composition for the anti-reflection layer") used in the method for manufacturing the first display device substrate of the present invention contains the inorganic filler and photocuring Transparent resin. The photocurable transparent resin is not particularly limited as long as it is a transparent resin that can be cured by light irradiation (for example, ultraviolet (UV) irradiation). In terms of excellent developability, it is preferably Alkali-soluble photocurable transparent resin, and from the viewpoint of excellent photocurability and patterning properties, it is preferably alkali-soluble polymerizable unsaturated group-containing alkali-soluble resin described in Japanese Patent Laid-Open No. 2017-72760 A resin, that is, a compound having two or more epoxy groups (more preferably an epoxy compound obtained by reacting bisphenols and epihalohydrin) with (meth)acrylic acid (refers to "acrylic acid and/or methyl The epoxy (meth)acrylate acid adduct obtained by further reacting the reaction product of acrylic acid) with a polycarboxylic acid or its anhydride is particularly preferably an epoxy acrylate acid adduct derived from a bisphenol compound.

此種第一種防反射層用樹脂組成物中,作為所述無機填料的含量,相對於第一種防反射層用樹脂組成物整體,較佳為5質量%~95質量%,更佳為15質量%~90質量%,尤佳為25質量%~85質量%。而且,作為所述光硬化性透明樹脂的含量,相對於第一種防反射層用樹脂組成物整體,較佳為1.54質量%~95質量%,更佳為3.46質量%~85質量%,尤佳為5.38質量%~75質量%。若所述無機填料的含量不足所述下限(或者,若所述光硬化性透明樹脂的含量超過所述上限),則存在所形成的防反射層與遮光層的界面處的所述防反射層的表面粗糙度不足規定的範圍的下限的傾向,另一方面,若所述無機填料的含量超過所述上限(或者,若所述光硬化性透明樹脂的含量不足所述下限),則存在所形成的防反射層與遮光層的界面處的所述防反射層的表面粗糙度超過規定的範圍的上限的傾向。In the first resin composition for anti-reflection layer, the content of the inorganic filler relative to the entire first resin composition for anti-reflection layer is preferably 5% to 95% by mass, and more preferably 15% by mass to 90% by mass, particularly preferably 25% by mass to 85% by mass. Furthermore, as the content of the photocurable transparent resin, relative to the entire resin composition for the first anti-reflection layer, it is preferably 1.54% by mass to 95% by mass, more preferably 3.46% by mass to 85% by mass, especially Preferably, it is 5.38% by mass to 75% by mass. If the content of the inorganic filler is less than the lower limit (or if the content of the photocurable transparent resin exceeds the upper limit), the anti-reflection layer at the interface between the formed anti-reflection layer and the light-shielding layer is present The surface roughness tends to be less than the lower limit of the prescribed range. On the other hand, if the content of the inorganic filler exceeds the upper limit (or if the content of the photocurable transparent resin is less than the lower limit), there is The surface roughness of the anti-reflection layer at the interface between the formed anti-reflection layer and the light-shielding layer tends to exceed the upper limit of the predetermined range.

而且,在此種第一種防反射層用樹脂組成物中也可包含光聚合性單體。由此,能夠將對防反射層進行光加工時的靈敏度合理化,或將所形成的防反射層的表面硬度等膜的機械物性合理化。作為此種光聚合性單體,並無特別限制,例如可列舉日本專利特開2017-72760號公報中記載的具有至少一個乙烯性不飽和鍵的光聚合性單體(例如,具有至少一個乙烯性不飽和鍵的(甲基)丙烯酸酯類)。作為此種光聚合性單體的含量,相對於所述光硬化性透明樹脂與光聚合性單體的合計量,較佳為0質量%~50質量%,更佳為0質量%~40質量%,尤佳為0質量%~30質量%。Furthermore, a photopolymerizable monomer may be contained in such a first resin composition for an anti-reflection layer. Thereby, it is possible to rationalize the sensitivity at the time of optical processing of the anti-reflection layer, or to rationalize the mechanical properties of the film such as the surface hardness of the formed anti-reflection layer. The photopolymerizable monomer is not particularly limited. For example, a photopolymerizable monomer having at least one ethylenically unsaturated bond described in Japanese Patent Laid-Open No. 2017-72760 (for example, having at least one ethylenic (Meth)acrylates with sexually unsaturated bonds). As the content of such a photopolymerizable monomer, relative to the total amount of the photocurable transparent resin and the photopolymerizable monomer, it is preferably 0% by mass to 50% by mass, more preferably 0% by mass to 40% by mass %, particularly preferably 0% to 30% by mass.

並且,較佳在所述第一種防反射層用樹脂組成物中包含光聚合引發劑。作為此種光聚合引發劑,並無特別限制,例如可列舉日本專利特開2017-72760號公報中所記載的光聚合引發劑,這些中尤佳為肟酯系聚合引發劑。此種光聚合引發劑的含量可根據所述第一種防反射層用樹脂組成物的光硬化性等適當設定,例如相對於光硬化性樹脂與光聚合性單體的合計量100質量份,較佳為0質量份~30質量份,更佳為0質量份~25質量份。In addition, it is preferable to include a photopolymerization initiator in the first resin composition for an anti-reflection layer. Such a photopolymerization initiator is not particularly limited, and examples thereof include photopolymerization initiators described in JP 2017-72760 A. Among these, oxime ester-based polymerization initiators are particularly preferred. The content of such a photopolymerization initiator can be appropriately set according to the photocurability of the first resin composition for an anti-reflection layer, and for example, relative to 100 parts by mass of the total amount of the photocurable resin and the photopolymerizable monomer, It is preferably 0 parts by mass to 30 parts by mass, more preferably 0 parts by mass to 25 parts by mass.

而且,在透明基板的耐熱性低,而在150℃以下之類的低溫下進行顯影後的加熱處理(後烘烤)的情況下,較佳在所述第一種防反射層用樹脂組成物中包含偶氮系聚合引發劑。由此,顯影後的加熱時(後烘烤時)的所述第一種防反射層用樹脂組成物的熱自由基聚合性提高。作為此種偶氮系聚合引發劑,並無特別限制,例如可列舉日本專利特開2017-181976號公報中所記載的偶氮系聚合引發劑。作為此種偶氮系聚合引發劑的含量,並無特別限制,可根據所述第一種防反射層用樹脂組成物的熱自由基聚合性等適當設定。Moreover, when the heat resistance of the transparent substrate is low, and the heat treatment (post-baking) after development is performed at a low temperature such as 150°C or lower, it is preferable to use the first resin composition for anti-reflection layer Contains an azo polymerization initiator. As a result, the thermal radical polymerizability of the first resin composition for an anti-reflection layer at the time of heating (at the time of post-baking) after development is improved. The azo polymerization initiator is not particularly limited, and examples thereof include azo polymerization initiators described in JP 2017-181976 A. The content of such an azo-based polymerization initiator is not particularly limited, and can be appropriately set according to the thermal radical polymerizability of the first resin composition for anti-reflection layer.

並且,在所述第一種防反射層用樹脂組成物中,視需要,可調配分散劑、所述光聚合引發劑及偶氮系聚合引發劑以外的聚合引發劑、鏈轉移劑、增感劑、非感光性樹脂、硬化劑、硬化促進劑、抗氧化劑、塑化劑、填充材、偶合劑、表面活性劑、染料等各種添加劑。In addition, in the first resin composition for an anti-reflection layer, if necessary, a dispersant, a polymerization initiator other than the photopolymerization initiator and an azo polymerization initiator, a chain transfer agent, and a sensitizer may be prepared. Various additives such as agents, non-photosensitive resins, hardeners, hardening accelerators, antioxidants, plasticizers, fillers, coupling agents, surfactants, dyes, etc.

而且,所述第一種防反射層用樹脂組成物較佳以溶液的狀態(即,以第一種防反射層用樹脂組成物溶液的形式)來使用。由此,可形成均勻的防反射層用樹脂組成物層。作為此種第一種防反射層用樹脂組成物溶液中所使用的有機溶媒,並無特別限制,例如可列舉日本專利特開2017-72760號公報中所記載的溶劑。關於此種有機溶媒,較佳以相對於所述第一種防反射層用樹脂組成物與有機溶媒的合計量,使有機溶媒量成為80質量%~99.9質量%的方式進行調配,更佳以使所述第一種防反射層用樹脂組成物溶液的溶液黏度(B型或E型黏度計)成為1 mPa·sec~4 mPa·sec的方式進行調配。此種溶液黏度的較佳範圍因塗佈的方法而異,因此所述有機溶媒量的較佳範圍也因塗佈的方法而異。例如,在為旋塗法的情況下,較佳為所述有機溶媒量的較佳範圍的下限值附近的80質量%~85質量%,在為狹縫塗佈法的情況下,較佳為所述有機溶媒量的較佳範圍的上限值附近的99.0質量%~99.9質量%。Furthermore, the first resin composition for an anti-reflection layer is preferably used in a solution state (that is, in the form of a solution of the first resin composition for an anti-reflection layer). Thereby, a uniform resin composition layer for an anti-reflection layer can be formed. The organic solvent used in such a first resin composition solution for an anti-reflection layer is not particularly limited, and examples thereof include solvents described in Japanese Patent Application Laid-Open No. 2017-72760. Regarding such an organic solvent, it is preferable to prepare the organic solvent so that the amount of the organic solvent becomes 80% to 99.9% by mass relative to the total amount of the first resin composition for antireflection layer and the organic solvent, and more preferably The solution viscosity (B-type or E-type viscometer) of the first resin composition solution for the anti-reflection layer is prepared so that it becomes 1 mPa·sec to 4 mPa·sec. The preferred range of the viscosity of this solution varies with the coating method, and therefore the preferred range of the amount of the organic solvent also varies with the coating method. For example, in the case of a spin coating method, it is preferably 80% by mass to 85% by mass near the lower limit of the preferable range of the amount of the organic solvent, and in the case of a slit coating method, it is more preferable It is 99.0% by mass to 99.9% by mass near the upper limit of the preferable range of the amount of the organic solvent.

作為本發明的第一種防反射層用樹脂組成物溶液而具有典型的調配組成的是含有光硬化性樹脂組成物及有機溶媒的樹脂組成物溶液,並且所述樹脂組成物溶液中, 所述光硬化性樹脂組成物含有:相對於樹脂組成物整體,為25質量%~85質量%的折射率為1.2~1.8、平均粒徑為30 nm~220 nm且能夠分散於所述有機溶劑中的二氧化矽粒子;以及相對於樹脂組成物整體,為15質量%~75質量%的環氧(甲基)丙烯酸酯酸加成物,並且 相對於所述光硬化性樹脂組成物與所述有機溶媒的合計量,所述有機溶媒的含量為80質量%~99.9質量%, 溶液黏度為1 mPa·sec~4 mPa·sec。在此種第一種防反射層用樹脂組成物溶液中,作為環氧(甲基)丙烯酸酯酸加成物,尤佳為自雙酚茀化合物衍生的環氧丙烯酸酯酸加成物。As the first resin composition solution for an anti-reflection layer of the present invention, a resin composition solution containing a photocurable resin composition and an organic solvent has a typical formulation composition, and in the resin composition solution, The photocurable resin composition contains: 25% to 85% by mass relative to the entire resin composition, a refractive index of 1.2 to 1.8, an average particle diameter of 30 nm to 220 nm, and can be dispersed in the organic solvent The silicon dioxide particles in the resin composition; and the epoxy (meth)acrylate acid adduct of 15% to 75% by mass relative to the entire resin composition, and The content of the organic solvent is 80% by mass to 99.9% by mass relative to the total amount of the photocurable resin composition and the organic solvent, The viscosity of the solution is 1 mPa·sec~4 mPa·sec. In such a first resin composition solution for an anti-reflection layer, the epoxy (meth)acrylate acid adduct is particularly preferably an epoxy acrylate acid adduct derived from a bisphenol compound.

另一方面,本發明的第二種顯示裝置用基板的製造方法中所使用的防反射層用樹脂組成物(以下,稱為“第二種防反射層用樹脂組成物”)含有所述無機填料及熱硬化性透明樹脂與熱硬化性單體中的至少一種。作為所述熱硬化性透明樹脂及熱硬化性單體,只要為藉由加熱處理會硬化的透明樹脂及單體,則並無特別限制,例如可列舉日本專利特開2016-161926號公報中所記載的具有乙烯性不飽和雙鍵或環狀反應性基的樹脂(環氧化合物、氧雜環丁烷化合物等)及具有乙烯性不飽和雙鍵或環狀反應性基的單體。On the other hand, the resin composition for the anti-reflection layer (hereinafter referred to as "the second resin composition for the anti-reflection layer") used in the method for manufacturing the second display device substrate of the present invention contains the inorganic At least one of filler, thermosetting transparent resin, and thermosetting monomer. The thermosetting transparent resin and the thermosetting monomer are not particularly limited as long as they are transparent resins and monomers that can be cured by heat treatment. For example, those described in Japanese Patent Laid-Open No. 2016-161926 may be mentioned. The described resins having ethylenically unsaturated double bonds or cyclic reactive groups (epoxy compounds, oxetane compounds, etc.) and monomers having ethylenically unsaturated double bonds or cyclic reactive groups.

此種第二種防反射層用樹脂組成物中,作為所述無機填料的含量,相對於第二種防反射層用樹脂組成物整體,較佳為5質量%~95質量%,更佳為15質量%~90質量%,尤佳為25質量%~85質量%。而且,作為所述熱硬化性透明樹脂與熱硬化性單體中的至少一種的含量,相對於第二種防反射層用樹脂組成物整體,較佳為3.2質量%~94.06質量%,更佳為7.2質量%~84.16質量%,尤佳為11.2質量%~74.26質量%。若所述無機填料的含量不足所述下限(或者,若所述熱硬化性透明樹脂的含量超過所述上限),則存在所形成的防反射層與遮光層的界面處的所述防反射層的表面粗糙度不足規定的範圍的下限的傾向,另一方面,若所述無機填料的含量超過所述上限(或者,若所述熱硬化性透明樹脂的含量不足所述下限),則存在所形成的防反射層與遮光層的界面處的所述防反射層的表面粗糙度超過規定的範圍的上限的傾向。In this second type of anti-reflection layer resin composition, the content of the inorganic filler relative to the entire second type of anti-reflection layer resin composition is preferably 5% to 95% by mass, more preferably 15% by mass to 90% by mass, particularly preferably 25% by mass to 85% by mass. Furthermore, the content of at least one of the thermosetting transparent resin and the thermosetting monomer is preferably 3.2% by mass to 94.06% by mass relative to the entire resin composition for the second antireflection layer, and more preferably It is 7.2% by mass to 84.16% by mass, particularly preferably 11.2% by mass to 74.26% by mass. If the content of the inorganic filler is less than the lower limit (or if the content of the thermosetting transparent resin exceeds the upper limit), the anti-reflection layer at the interface between the formed anti-reflection layer and the light-shielding layer is present The surface roughness tends to be less than the lower limit of the prescribed range. On the other hand, if the content of the inorganic filler exceeds the upper limit (or if the content of the thermosetting transparent resin is less than the lower limit), there is The surface roughness of the anti-reflection layer at the interface between the formed anti-reflection layer and the light-shielding layer tends to exceed the upper limit of the predetermined range.

而且,較佳在所述第二種防反射層用樹脂組成物中包含熱硬化劑。作為此種熱硬化劑,例如可列舉作為胺系化合物、多元羧酸系化合物、酚樹脂、胺基樹脂、二氰二胺、路易斯酸絡合化合物等環氧化合物的熱硬化劑來使用者,其中較佳為多元羧酸系化合物。作為此種多元羧酸系化合物,可列舉多元羧酸、多元羧酸的酐、及多元羧酸的熱分解性酯。多元羧酸是在1分子中具有兩個以上羧基的化合物,具體而言可列舉:琥珀酸、馬來酸、環己烷-1,2-二羧酸、環己烯-1,2-二羧酸、環己烯-4,5-二羧酸、降冰片烷-2,3-二羧酸、鄰苯二甲酸、3,6-二氫鄰苯二甲酸、1,2,3,6-四氫鄰苯二甲酸、甲基四氫鄰苯二甲酸、苯-1,2,4-三羧酸、環己烷-1,2,4-三羧酸、苯-1,2,4,5-四羧酸、環己烷-1,2,4,5-四羧酸、丁烷-1,2,3,4-四羧酸等。作為多元羧酸的酐,可列舉所述例示的多元羧酸的酐。作為此種多元羧酸的酐,可使用分子間酸酐,一般而言使用在分子內閉環的酸酐。作為多元羧酸的熱分解性酯,可列舉所述例示的多元羧酸的熱分解性酯(例如第三丁酯、1-(烷基氧基)乙基酯、1-(烷硫基)乙基酯等〔其中,所述烷基為碳數1~20的飽和或不飽和的烴基,此烴基可具有直鏈狀、分支狀、環狀中的任一結構,而且,也可具有任意的取代基)。而且,作為多元羧酸系化合物,也可使用具有兩個以上羧基的聚合物或共聚物,所述羧基也可形成酐基或熱分解性酯基。作為此種具有兩個以上羧基的聚合物或共聚物,並無特別限制,例如可列舉包含(甲基)丙烯酸作為構成成分的聚合物或共聚物、包含馬來酸酐作為構成成分的共聚物、使四羧酸二酐與二胺或二醇反應使酸酐開環而成的化合物等。這些多元羧酸系化合物中,較佳為鄰苯二甲酸、3,6-二氫鄰苯二甲酸、1,2,3,6-四氫鄰苯二甲酸、甲基四氫鄰苯二甲酸、苯-1,2,4-三羧酸的各多元羧酸的酐。此種熱硬化劑的含量可根據所述第二種防反射層用樹脂組成物的熱硬化性等適當設定,例如相對於熱硬化性透明樹脂與熱硬化性單體的合計量100質量份,較佳為1質量份~25質量份。Furthermore, it is preferable to include a thermosetting agent in the second resin composition for an anti-reflection layer. Examples of such thermosetting agents include those used as thermosetting agents for epoxy compounds such as amine compounds, polycarboxylic acid compounds, phenol resins, amino resins, dicyandiamine, and Lewis acid complex compounds. Among them, polycarboxylic acid-based compounds are preferred. Examples of such polyvalent carboxylic acid compounds include polyvalent carboxylic acids, anhydrides of polyvalent carboxylic acids, and thermally decomposable esters of polyvalent carboxylic acids. Polycarboxylic acid is a compound having two or more carboxyl groups in one molecule, specifically, succinic acid, maleic acid, cyclohexane-1,2-dicarboxylic acid, cyclohexene-1,2-di Carboxylic acid, cyclohexene-4,5-dicarboxylic acid, norbornane-2,3-dicarboxylic acid, phthalic acid, 3,6-dihydrophthalic acid, 1,2,3,6 -Tetrahydrophthalic acid, methyltetrahydrophthalic acid, benzene-1,2,4-tricarboxylic acid, cyclohexane-1,2,4-tricarboxylic acid, benzene-1,2,4 ,5-tetracarboxylic acid, cyclohexane-1,2,4,5-tetracarboxylic acid, butane-1,2,3,4-tetracarboxylic acid, etc. As an anhydride of a polyhydric carboxylic acid, the anhydride of the said exemplified polyhydric carboxylic acid is mentioned. As the anhydride of such a polyvalent carboxylic acid, an intermolecular acid anhydride can be used, and in general, an acid anhydride that is ring-closed in the molecule is used. Examples of the thermally decomposable esters of polycarboxylic acids include the exemplified thermally decomposable esters of polycarboxylic acids (for example, tertiary butyl ester, 1-(alkyloxy)ethyl ester, and 1-(alkylthio)). Ethyl ester, etc. [wherein, the alkyl group is a saturated or unsaturated hydrocarbon group with 1 to 20 carbons. This hydrocarbon group may have any structure of linear, branched, or cyclic, and may also have any Substituents). Furthermore, as the polycarboxylic acid-based compound, a polymer or copolymer having two or more carboxyl groups may also be used, and the carboxyl groups may also form an anhydride group or a thermally decomposable ester group. The polymer or copolymer having two or more carboxyl groups is not particularly limited, and examples thereof include polymers or copolymers containing (meth)acrylic acid as a constituent, copolymers containing maleic anhydride as a constituent, Compounds etc. obtained by reacting tetracarboxylic dianhydride with diamine or diol to open the ring of acid anhydride. Among these polycarboxylic acid compounds, phthalic acid, 3,6-dihydrophthalic acid, 1,2,3,6-tetrahydrophthalic acid, and methyltetrahydrophthalic acid are preferred. , Anhydrides of polycarboxylic acids of benzene-1,2,4-tricarboxylic acid. The content of such a thermosetting agent can be appropriately set according to the thermosetting properties of the second resin composition for an anti-reflection layer, and for example, relative to 100 parts by mass of the total amount of the thermosetting transparent resin and the thermosetting monomer, Preferably it is 1 part by mass to 25 parts by mass.

並且,在所述第二種防反射層用樹脂組成物中,視需要,可調配分散劑、非熱硬化性樹脂、硬化促進劑、抗氧化劑、塑化劑、填充材、偶合劑、表面活性劑、染料等各種添加劑。In addition, in the second resin composition for an anti-reflection layer, if necessary, a dispersant, a non-thermosetting resin, a curing accelerator, an antioxidant, a plasticizer, a filler, a coupling agent, and a surface active agent may be formulated. Various additives such as chemicals and dyes.

而且,所述第二種防反射層用樹脂組成物較佳以溶液的狀態(即,以第二種防反射層用樹脂組成物溶液的形式)來使用。由此,可形成均勻的防反射層用樹脂組成物層。作為此種第二種防反射層用樹脂組成物溶液中所使用的有機溶媒,並無特別限制,例如可列舉日本專利特開2016-161926號公報中所記載的溶劑。關於此種有機溶媒,較佳以相對於所述第二種防反射層用樹脂組成物與有機溶媒的合計量,使有機溶媒量成為80質量%~99.9質量%的方式進行調配,更佳以使所述第二種防反射層用樹脂組成物溶液的溶液黏度(B型或E型黏度計)成為1 mPa·sec~4 mPa·sec的方式進行調配。此種溶液黏度的較佳範圍因塗佈的方法而異,因此所述有機溶媒量的較佳範圍也因塗佈的方法而異。例如,在為旋塗法的情況下,較佳為所述有機溶媒量的較佳範圍的下限值附近的80質量%~85質量%,在為狹縫塗佈法的情況下,較佳為所述有機溶媒量的較佳範圍的上限值附近的99.0質量%~99.9質量%。Furthermore, the second resin composition for an anti-reflection layer is preferably used in a solution state (that is, in the form of a solution of the second resin composition for an anti-reflection layer). Thereby, a uniform resin composition layer for an anti-reflection layer can be formed. The organic solvent used in the second resin composition solution for an antireflection layer is not particularly limited, and examples thereof include solvents described in JP 2016-161926 A. Regarding such an organic solvent, it is preferable to prepare the organic solvent so that the amount of the organic solvent becomes 80% to 99.9% by mass relative to the total amount of the second resin composition for anti-reflection layer and the organic solvent, and more preferably The second resin composition solution for an anti-reflection layer is formulated so that the solution viscosity (B-type or E-type viscometer) becomes 1 mPa·sec to 4 mPa·sec. The preferred range of the viscosity of this solution varies with the coating method, and therefore the preferred range of the amount of the organic solvent also varies with the coating method. For example, in the case of a spin coating method, it is preferably 80% by mass to 85% by mass near the lower limit of the preferable range of the amount of the organic solvent, and in the case of a slit coating method, it is more preferable It is 99.0% by mass to 99.9% by mass near the upper limit of the preferable range of the amount of the organic solvent.

作為本發明的第二種防反射層用樹脂組成物溶液而具有典型的調配組成的是含有熱硬化性樹脂組成物及有機溶媒的樹脂組成物溶液,並且所述樹脂組成物溶液中, 所述熱硬化性樹脂組成物含有:相對於樹脂組成物整體,為25質量%~85質量%的折射率為1.2~1.8、平均粒徑為30 nm~220 nm且能夠分散於所述有機溶劑中的二氧化矽粒子;相對於樹脂組成物整體,為12質量%~74.26質量%的環氧化合物;以及相對於所述環氧化合物100質量份,為1質量份~25質量份的熱硬化劑,並且 相對於所述光硬化性樹脂組成物與所述有機溶媒的合計量,所述有機溶媒的含量為80質量%~99.9質量%, 溶液黏度為1 mPa·sec~4 mPa·sec。As the second resin composition solution for the anti-reflection layer of the present invention, a resin composition solution containing a thermosetting resin composition and an organic solvent is a resin composition solution containing a thermosetting resin composition and an organic solvent, and in the resin composition solution, The thermosetting resin composition contains: 25% to 85% by mass relative to the entire resin composition, a refractive index of 1.2 to 1.8, an average particle diameter of 30 nm to 220 nm, and can be dispersed in the organic solvent The silicon dioxide particles in the resin composition; the epoxy compound of 12% to 74.26% by mass relative to the entire resin composition; and the thermosetting of 1 to 25 parts by mass relative to 100 parts of the epoxy compound Agent, and The content of the organic solvent is 80% by mass to 99.9% by mass relative to the total amount of the photocurable resin composition and the organic solvent, The viscosity of the solution is 1 mPa·sec~4 mPa·sec.

本發明的第一種及第二種顯示裝置用基板的製造方法中所使用的遮光層用樹脂組成物含有所述遮光成分及光硬化性樹脂。作為所述光硬化性樹脂,只要為藉由光照射(例如,UV照射)會硬化的樹脂,則並無特別限制,就顯影性優異的觀點而言,較佳為鹼可溶性的光硬化性樹脂,並且,就光硬化性、圖案化特性也優異的觀點而言,較佳為日本專利特開2017-72760號公報中記載的含有聚合性不飽和基的鹼可溶性樹脂,即,使具有2個以上環氧基的化合物(更佳為使雙酚類與表鹵醇反應而獲得的環氧化合物)與(甲基)丙烯酸(是指“丙烯酸和/或甲基丙烯酸”)的反應產物進一步與多元羧酸或其酸酐反應而獲得的環氧(甲基)丙烯酸酯酸加成物,尤佳為自雙酚茀化合物衍生的環氧丙烯酸酯酸加成物。The resin composition for a light-shielding layer used in the manufacturing method of the 1st and 2nd display device board|substrates of this invention contains the said light-shielding component and a photocurable resin. The photocurable resin is not particularly limited as long as it is a resin that can be cured by light irradiation (for example, UV irradiation). From the viewpoint of excellent developability, an alkali-soluble photocurable resin is preferred Moreover, from the viewpoint of excellent photocurability and patterning properties, it is preferable to use the alkali-soluble resin containing polymerizable unsaturated groups described in Japanese Patent Laid-Open No. 2017-72760, that is, having two The reaction product of the above epoxy compound (more preferably an epoxy compound obtained by reacting bisphenols with epihalohydrin) and (meth)acrylic acid (referring to "acrylic acid and/or methacrylic acid") is further combined with The epoxy (meth)acrylate acid adduct obtained by reacting a polyvalent carboxylic acid or its anhydride is particularly preferably an epoxy acrylate acid adduct derived from a bisphenol compound.

此種遮光層用樹脂組成物中,作為所述遮光成分的含量,相對於遮光層用樹脂組成物整體,較佳為10質量%~90質量%,更佳為20質量%~80質量%,尤佳為30質量%~70質量%。而且,作為所述光硬化性樹脂的含量,相對於遮光層用樹脂組成物整體,較佳為5.54質量%~90質量%,更佳為11.7質量%~80質量%,尤佳為17.8質量%~70質量%。若所述遮光成分的含量不足所述下限(或者,所述光硬化性樹脂的含量超過所述上限),則存在所形成的遮光層的遮光性下降的傾向,另一方面,若所述遮光成分的含量超過所述上限(或者,所述光硬化性樹脂的含量不足所述下限),則存在所形成的遮光層的表面平滑性、所述遮光成分的分散穩定性下降的傾向。In such a resin composition for a light-shielding layer, the content of the light-shielding component relative to the entire resin composition for a light-shielding layer is preferably 10% by mass to 90% by mass, more preferably 20% by mass to 80% by mass, Particularly preferably, it is 30% by mass to 70% by mass. Moreover, as the content of the photocurable resin, relative to the entire resin composition for the light-shielding layer, it is preferably 5.54% by mass to 90% by mass, more preferably 11.7% by mass to 80% by mass, and particularly preferably 17.8% by mass. ~70% by mass. If the content of the light-shielding component is less than the lower limit (or the content of the photocurable resin exceeds the upper limit), the light-shielding layer formed tends to decrease. On the other hand, if the light-shielding If the content of the component exceeds the upper limit (or the content of the photocurable resin is less than the lower limit), the surface smoothness of the formed light-shielding layer and the dispersion stability of the light-shielding component tend to decrease.

而且,在此種遮光層用樹脂組成物中也可包含光聚合性單體。由此,能夠將對遮光層進行光加工時的靈敏度合理化,或將所形成的遮光層的表面硬度等膜的機械物性合理化。作為此種光聚合性單體,可列舉日本專利特開2017-72760號公報中記載的具有至少一個乙烯性不飽和鍵的光聚合性單體(例如,具有至少一個乙烯性不飽和鍵的(甲基)丙烯酸酯類)。作為此種光聚合性單體的含量,相對於所述光硬化性樹脂與光聚合性單體的合計量,較佳為1質量%~20質量%,更佳為2質量%~15質量%,尤佳為3質量%~10質量%。Furthermore, a photopolymerizable monomer may be contained in such a resin composition for light-shielding layers. Thereby, it is possible to rationalize the sensitivity at the time of light processing of the light-shielding layer, or rationalize the mechanical properties of the film such as the surface hardness of the light-shielding layer to be formed. As such a photopolymerizable monomer, a photopolymerizable monomer having at least one ethylenically unsaturated bond described in Japanese Patent Laid-Open No. 2017-72760 (for example, ( Meth)acrylates). The content of such a photopolymerizable monomer is preferably 1% by mass to 20% by mass, and more preferably 2% by mass to 15% by mass relative to the total amount of the photocurable resin and photopolymerizable monomer. , Particularly preferably 3% by mass to 10% by mass.

並且,較佳在所述遮光層用樹脂組成物中包含光聚合引發劑。作為此種光聚合引發劑,並無特別限制,例如可列舉日本專利特開2017-72760號公報中所記載的光聚合引發劑,這些中尤佳為肟酯系聚合引發劑。此種光聚合引發劑的含量可根據所述遮光層用樹脂組成物的光硬化性等適當設定,例如相對於光硬化性樹脂與光聚合性單體的合計量100質量份,較佳為0.3質量份~30質量份,更佳為1質量份~25質量份。Furthermore, it is preferable to include a photopolymerization initiator in the resin composition for the light-shielding layer. Such a photopolymerization initiator is not particularly limited, and examples thereof include photopolymerization initiators described in JP 2017-72760 A. Among these, oxime ester-based polymerization initiators are particularly preferred. The content of such a photopolymerization initiator can be appropriately set according to the photocurability of the resin composition for the light-shielding layer. For example, it is preferably 0.3 with respect to 100 parts by mass of the total amount of the photocurable resin and the photopolymerizable monomer. Parts by mass to 30 parts by mass, more preferably 1 part by mass to 25 parts by mass.

而且,在透明基板的耐熱性低,而在150℃以下之類的低溫下進行顯影後的加熱處理(後烘烤)的情況下,較佳在所述遮光層用樹脂組成物中包含偶氮系聚合引發劑。由此,顯影後的加熱時(後烘烤時)的所述遮光層用樹脂組成物的熱自由基聚合性提高。作為此種偶氮系聚合引發劑,並無特別限制,例如可列舉日本專利特開2017-181976號公報中所記載的偶氮系聚合引發劑。作為此種偶氮系聚合引發劑的含量,並無特別限制,可根據所述遮光層用樹脂組成物的熱自由基聚合性等適當設定。Furthermore, when the heat resistance of the transparent substrate is low and the heat treatment (post-baking) after development is performed at a low temperature such as 150°C or lower, it is preferable that the resin composition for the light-shielding layer contains azo Department of polymerization initiator. Thereby, the thermal radical polymerizability of the resin composition for light-shielding layers at the time of heating (at the time of post-baking) after development improves. The azo polymerization initiator is not particularly limited, and examples thereof include azo polymerization initiators described in JP 2017-181976 A. The content of such an azo polymerization initiator is not particularly limited, and can be appropriately set according to the thermal radical polymerizability of the resin composition for the light-shielding layer and the like.

並且,在所述遮光層用樹脂組成物中,視需要,可調配分散劑、所述光聚合引發劑及偶氮系聚合引發劑以外的聚合引發劑、鏈轉移劑、增感劑、非感光性樹脂、硬化劑、硬化促進劑、抗氧化劑、塑化劑、填充材、偶合劑、表面活性劑、色調整用顏料、染料等各種添加劑。In addition, in the resin composition for the light-shielding layer, if necessary, a dispersant, the photopolymerization initiator, and polymerization initiators other than the azo-based polymerization initiator, chain transfer agents, sensitizers, and non-photosensitive agents may be prepared. Various additives such as resins, hardeners, hardening accelerators, antioxidants, plasticizers, fillers, coupling agents, surfactants, color-adjusting pigments, and dyes.

而且,所述遮光層用樹脂組成物較佳以溶液的狀態(即,以遮光層用樹脂組成物溶液的形式)來使用。由此,可形成均勻的遮光層用樹脂組成物層。作為此種遮光層用樹脂組成物溶液中所使用的有機溶媒,並無特別限制,例如可列舉日本專利特開2017-72760號公報中所記載的溶劑。關於此種有機溶媒,較佳以相對於所述遮光層用樹脂組成物與有機溶媒的合計量,使有機溶媒量成為60質量%~90質量%的方式進行調配,更佳以使所述遮光層用樹脂組成物溶液的溶液黏度(B型或E型黏度計)成為1 mPa·sec~30 mPa·sec的方式進行調配。In addition, the resin composition for the light-shielding layer is preferably used in a solution state (that is, in the form of a solution of the resin composition for the light-shielding layer). Thereby, a uniform resin composition layer for a light-shielding layer can be formed. The organic solvent used in such a resin composition solution for a light-shielding layer is not particularly limited, and examples thereof include solvents described in JP 2017-72760 A. Regarding such an organic solvent, it is preferable to prepare the organic solvent so that the amount of the organic solvent becomes 60% to 90% by mass relative to the total amount of the resin composition for the light-shielding layer and the organic solvent, and it is more preferable to make the light-shielding The resin composition solution for a layer is prepared so that the solution viscosity (B-type or E-type viscometer) becomes 1 mPa·sec to 30 mPa·sec.

在本發明的第一種顯示裝置用基板的製造方法中,首先,在所述透明基板上形成包括所述第一種防反射層用樹脂組成物的層(以下,稱為“第一種防反射層用樹脂組成物層”)。In the first method of manufacturing a substrate for a display device of the present invention, first, a layer including the first resin composition for an anti-reflection layer (hereinafter referred to as "the first anti-reflection layer") is formed on the transparent substrate. Resin composition layer for reflective layer").

所述第一種防反射層用樹脂組成物層的平均厚度為0.01 μm~1 μm。若所述第一種防反射層用樹脂組成物層的平均厚度不足所述下限,則存在所述第一種防反射層用樹脂組成物層的表面粗糙度超過規定的範圍的上限的傾向,另一方面,若超過所述上限,則存在所述第一種防反射層用樹脂組成物層的表面粗糙度不足規定的範圍的下限的傾向。作為此種第一種防反射層用樹脂組成物層的平均厚度,就所述第一種防反射層用樹脂組成物層的表面粗糙度容易成為規定的範圍內的觀點而言,較佳為0.02 μm~0.5 μm,更佳為0.04 μm~0.3 μm。另外,第一種防反射層用樹脂組成物層的平均厚度可藉由使用觸針式階差形狀測定裝置測定第一種防反射層用樹脂組成物層表面與透明基板表面的階差,並將其平均而求出。The average thickness of the first resin composition layer for an anti-reflection layer is 0.01 μm to 1 μm. If the average thickness of the resin composition layer for the first anti-reflection layer is less than the lower limit, the surface roughness of the resin composition layer for the first anti-reflection layer tends to exceed the upper limit of the predetermined range. On the other hand, if the upper limit is exceeded, the surface roughness of the resin composition layer for the first anti-reflection layer tends to be less than the lower limit of the predetermined range. As the average thickness of the first resin composition layer for an anti-reflection layer, from the viewpoint that the surface roughness of the first resin composition layer for an anti-reflection layer easily falls within a predetermined range, it is preferably 0.02 μm to 0.5 μm, more preferably 0.04 μm to 0.3 μm. In addition, the average thickness of the resin composition layer for the first anti-reflection layer can be measured by using a stylus type step shape measuring device to measure the level difference between the surface of the first resin composition layer for the anti-reflection layer and the surface of the transparent substrate, and It is calculated by averaging them.

而且,所述第一種防反射層用樹脂組成物層的表面粗糙度為40 nm~200 nm。若所述第一種防反射層用樹脂組成物層的表面粗糙度不足所述下限,則無法充分降低所獲得的遮光膜的反射率,而無法充分防止光在遮光膜上的反射。另一方面,若所述第一種防反射層用樹脂組成物層的表面粗糙度超過所述上限,則難以使所獲得的遮光膜的平坦性成為期望的水平。作為此種第一防反射層用樹脂組成物層的表面粗糙度,就所獲得的遮光膜的反射率變低,光在遮光膜上的反射被抑制,而且,確保遮光膜的平坦性的觀點而言,較佳為50 nm~180 nm,更佳為80 nm~160 nm。另外,第一種防反射層用樹脂組成物層的表面粗糙度可如下求出,即:使用觸針式階差形狀測定裝置測定第一種防反射層用樹脂組成物層表面的凹凸形狀,求出粗糙度曲線,針對此粗糙度曲線中隨意抽出的0.1 mm的部分,求出粗糙度的算術平均值,將其作為第一種防反射層用樹脂組成物層的表面粗糙度。Furthermore, the surface roughness of the first resin composition layer for an anti-reflection layer is 40 nm to 200 nm. If the surface roughness of the first resin composition layer for an anti-reflection layer is less than the lower limit, the reflectance of the obtained light-shielding film cannot be sufficiently reduced, and the reflection of light on the light-shielding film cannot be sufficiently prevented. On the other hand, if the surface roughness of the first resin composition layer for an antireflection layer exceeds the upper limit, it is difficult to make the flatness of the obtained light shielding film to a desired level. As for the surface roughness of the resin composition layer for the first anti-reflection layer, the reflectance of the obtained light-shielding film becomes low, the reflection of light on the light-shielding film is suppressed, and the viewpoint of ensuring the flatness of the light-shielding film In particular, it is preferably 50 nm to 180 nm, and more preferably 80 nm to 160 nm. In addition, the surface roughness of the resin composition layer for the first anti-reflection layer can be determined by measuring the unevenness of the surface of the first resin composition layer for the anti-reflection layer using a stylus type step shape measuring device. The roughness curve was obtained, and the arithmetic average of the roughness was obtained for the 0.1 mm portion randomly extracted from the roughness curve, and this was used as the surface roughness of the first type of anti-reflection layer resin composition layer.

作為形成此種第一種防反射層用樹脂組成物層的方法,例如可列舉在所述透明基板上塗佈所述第一種防反射層用樹脂組成物溶液後,實施加熱處理(預烘烤),由此除去有機溶媒的方法。As a method of forming such a first resin composition layer for an anti-reflection layer, for example, after coating the first resin composition solution for an anti-reflection layer on the transparent substrate, heat treatment (pre-baking) Baking), thereby removing the organic solvent method.

其次,在如此形成的第一種防反射層用樹脂組成物層上形成包括所述遮光層用樹脂組成物的層(以下,稱為“遮光層用樹脂組成物層”)。作為形成此種遮光層用樹脂組成物層的方法,例如可列舉在所述第一種防反射層用樹脂組成物層上塗佈所述遮光層用樹脂組成物溶液後,實施加熱處理(預烘烤),由此除去有機溶媒的方法。Next, a layer including the resin composition for a light-shielding layer (hereinafter referred to as a "resin composition layer for a light-shielding layer") is formed on the first resin composition layer for an antireflection layer formed in this way. As a method of forming such a resin composition layer for a light-shielding layer, for example, after coating the resin composition solution for a light-shielding layer on the first resin composition layer for an anti-reflection layer, heat treatment (preliminary Baking), thereby removing the organic solvent.

作為塗佈第一種防反射層用樹脂組成物溶液的方法及塗佈遮光層用樹脂組成物溶液的方法,例如除了公知的溶液浸漬法、噴霧法以外,還可列舉使用輥塗機、面塗機、狹縫塗佈機、旋塗機等的方法。預烘烤中的加熱溫度及加熱時間可根據使用的有機溶媒的種類等適當設定,例如可將加熱溫度設定為60℃~110℃(設定為不超過所述透明基板的耐熱溫度),並將加熱時間設定為1分鐘~3分鐘。As the method of applying the first resin composition solution for the anti-reflection layer and the method of applying the resin composition solution for the light-shielding layer, for example, in addition to the known solution dipping method and spray method, the use of a roll coater, a surface Coater, slit coater, spin coater, etc. The heating temperature and heating time in the pre-baking can be appropriately set according to the type of organic solvent used. For example, the heating temperature can be set to 60°C to 110°C (set not to exceed the heat-resistant temperature of the transparent substrate), and The heating time is set to 1 minute to 3 minutes.

其次,對如此形成的所述第一種防反射層用樹脂組成物層及所述遮光層用樹脂組成物層,使用期望的遮光膜圖案形成用遮罩來一併實施曝光處理,使所述第一種防反射層用樹脂組成物層的感光部分(曝光部分)的光硬化性透明樹脂及所述遮光層用樹脂組成物層的感光部分(曝光部分)的光硬化性樹脂光硬化。曝光處理條件可根據使用的光硬化性樹脂或光聚合引發劑的種類等適當設定。Next, the first resin composition layer for the anti-reflection layer and the resin composition layer for the light-shielding layer formed in this way are exposed together using a mask for forming a desired light-shielding film pattern, so that the The photocurable transparent resin in the photosensitive part (exposure part) of the first resin composition layer for the antireflection layer and the photocurable resin in the photosensitive part (exposure part) of the resin composition layer for the light shielding layer are photocured. The exposure treatment conditions can be appropriately set according to the type of photocurable resin or photopolymerization initiator used, and the like.

其次,對曝光後的第一種防反射層用樹脂組成物層及遮光層用樹脂組成物層一併實施顯影處理,將所述第一種防反射層用樹脂組成物層及所述遮光層用樹脂組成物層的未曝光部分的樹脂組成物去除,由此同時形成含有所述無機填料及透明樹脂硬化物(所述第一種防反射層用樹脂組成物的硬化物)的防反射層與含有所述遮光成分及樹脂硬化物(所述遮光層用樹脂組成物的硬化物)的遮光層。並且,為了使所述防反射層及所述遮光層充分硬化,或充分除去顯影液而提高所述透明基板與所述防反射層的密著性,而對所述防反射層及所述遮光層實施加熱處理(後烘烤),由此可獲得在所述透明基板上具有包括所述防反射層及所述遮光層的遮光膜(遮光膜圖案)的本發明的顯示裝置用基板。Next, the first resin composition layer for the anti-reflection layer and the resin composition layer for the light-shielding layer after the exposure are collectively developed, and the first resin composition layer for the anti-reflection layer and the light-shielding layer are combined. By removing the resin composition of the unexposed part of the resin composition layer, an anti-reflection layer containing the inorganic filler and a transparent resin cured product (the first cured product of the resin composition for the anti-reflection layer) is simultaneously formed And a light-shielding layer containing the light-shielding component and a cured resin (cured material of the resin composition for the light-shielding layer). In addition, in order to sufficiently harden the anti-reflection layer and the light-shielding layer, or to sufficiently remove the developer to improve the adhesion between the transparent substrate and the anti-reflection layer, the anti-reflection layer and the light-shielding layer The layer is subjected to heat treatment (post-baking), whereby a substrate for a display device of the present invention having a light-shielding film (light-shielding film pattern) including the anti-reflection layer and the light-shielding layer on the transparent substrate can be obtained.

作為所述顯影處理方法,並無特別限制,可採用公知的顯影方法,顯影處理條件可根據使用的光硬化性透明樹脂及光硬化性樹脂的種類等適當設定。而且,在所述第一種防反射層用樹脂組成物層中的光硬化性透明樹脂及所述遮光層用樹脂組成物層中的光硬化性樹脂為鹼可溶性的情況下,較佳使用鹼顯影液來進行顯影處理(鹼顯影處理)。作為鹼顯影液,可使用鹼金屬或鹼土類金屬的碳酸鹽或氫氧化物的水溶液等公知的鹼顯影液。The development treatment method is not particularly limited, and a well-known development method can be adopted. The development treatment conditions can be appropriately set according to the types of the photocurable transparent resin and the photocurable resin used, and the like. Furthermore, when the photocurable transparent resin in the resin composition layer for the first antireflection layer and the photocurable resin in the resin composition layer for the light shielding layer are alkali-soluble, it is preferable to use an alkali The developing solution is used for development processing (alkali development processing). As the alkali developer, a known alkali developer such as an aqueous solution of carbonate or hydroxide of alkali metal or alkaline earth metal can be used.

而且,後烘烤中的加熱溫度及加熱時間可根據使用的透明基板或樹脂組成物的種類等適當設定,例如在使用玻璃基板等耐熱性充分者作為透明基板的情況下,可將加熱溫度設定為180℃~250℃,並將加熱時間設定為20分鐘~60分鐘。In addition, the heating temperature and heating time in post-baking can be appropriately set according to the type of transparent substrate or resin composition used. For example, in the case of using a glass substrate with sufficient heat resistance as a transparent substrate, the heating temperature can be set It is 180°C to 250°C, and the heating time is set to 20 minutes to 60 minutes.

如此形成的遮光層的平均厚度為0.1 μm~30 μm。若所述遮光層的平均厚度不足所述下限,則遮光性會下降,另一方面,若超過所述上限,則所述鹼顯影所需要的時間變長,生產性會下降。作為此種遮光層的平均厚度,就兼顧遮光性與生產性的觀點而言,較佳為0.5 μm~20 μm,更佳為1 μm~10 μm。另外,遮光層的平均厚度可藉由如下方式而求出,即:使用觸針式階差形狀測定裝置測定遮光層表面與透明基板表面的階差,將其平均而求出包括所述防反射層及所述遮光層的遮光膜的平均厚度,並自所述遮光膜的平均厚度中減去所述第一種防反射層用樹脂組成物層的平均厚度。The average thickness of the light shielding layer formed in this way is 0.1 μm to 30 μm. If the average thickness of the light-shielding layer is less than the lower limit, the light-shielding property will decrease. On the other hand, if it exceeds the upper limit, the time required for the alkali development will become longer and productivity will decrease. The average thickness of such a light-shielding layer is preferably 0.5 μm to 20 μm, and more preferably 1 μm to 10 μm from the viewpoint of both light-shielding properties and productivity. In addition, the average thickness of the light-shielding layer can be obtained by measuring the level difference between the surface of the light-shielding layer and the surface of the transparent substrate using a stylus-type level difference shape measuring device, and averaging them to obtain the value including the anti-reflection The average thickness of the layer and the light-shielding film of the light-shielding layer is subtracted from the average thickness of the light-shielding film and the average thickness of the resin composition layer for the first antireflection layer.

如此,在本發明的第一種顯示裝置用基板的製造方法中,在第一種防反射層用樹脂組成物及遮光層用樹脂組成物的任一者中均使用了光硬化性樹脂,因此可對第一種防反射層用樹脂組成物層及遮光層用樹脂組成物層一併進行曝光處理及顯影處理。Thus, in the first method of manufacturing a substrate for a display device of the present invention, a photocurable resin is used in either of the first resin composition for the anti-reflection layer and the resin composition for the light shielding layer. The first resin composition layer for the anti-reflection layer and the resin composition layer for the light-shielding layer can be exposed and developed together.

另一方面,在本發明的第二種顯示裝置用基板的製造方法中,首先,在所述透明基板上,對所述第二種防反射層用樹脂組成物實施加熱硬化處理,形成含有所述無機填料及透明樹脂硬化物(所述第二種防反射層用樹脂組成物的硬化物)的防反射層。On the other hand, in the second method of manufacturing a substrate for a display device of the present invention, first, on the transparent substrate, the second resin composition for an anti-reflection layer is heat-cured to form The anti-reflection layer of the inorganic filler and the transparent resin cured product (the cured product of the second resin composition for the anti-reflection layer).

所述防反射層的平均厚度為0.01 μm~1 μm。若所述防反射層的平均厚度不足所述下限,則存在所述防反射層的表面粗糙度超過規定的範圍的上限的傾向,另一方面,若超過所述上限,則存在所述防反射層的表面粗糙度不足規定的範圍的下限的傾向。作為此種防反射層的平均厚度,就所述防反射層的表面粗糙度容易成為規定的範圍內的觀點而言,較佳為0.02 μm~0.5 μm,更佳為0.04 μm~0.3 μm。另外,防反射層的平均厚度可藉由使用觸針式階差形狀測定裝置測定防反射層表面與透明基板表面的階差,並將其平均而求出。The average thickness of the anti-reflection layer is 0.01 μm to 1 μm. If the average thickness of the anti-reflection layer is less than the lower limit, the surface roughness of the anti-reflection layer tends to exceed the upper limit of the predetermined range. On the other hand, if it exceeds the upper limit, the anti-reflection layer is present. The surface roughness of the layer tends to be less than the lower limit of the predetermined range. The average thickness of such an anti-reflection layer is preferably from 0.02 μm to 0.5 μm, and more preferably from 0.04 μm to 0.3 μm from the viewpoint that the surface roughness of the anti-reflection layer is easily within a predetermined range. In addition, the average thickness of the anti-reflection layer can be obtained by measuring the step difference between the surface of the anti-reflection layer and the surface of the transparent substrate using a stylus type step shape measuring device, and averaging them.

而且,所述防反射層的表面粗糙度為40 nm~200 nm。若所述防反射層的表面粗糙度不足所述下限,則無法充分降低所獲得的遮光膜的反射率,而無法充分防止光在遮光膜上的反射。另一方面,若所述防反射層的表面粗糙度超過所述上限,則難以使所獲得的遮光膜的平坦性成為期望的水平。作為此種防反射層的表面粗糙度,就所獲得的遮光膜的反射率進一步變低,光在遮光膜上的反射進一步被抑制,而且,確保遮光膜的平坦性的觀點而言,較佳為50 nm~180 nm,更佳為80 nm~160 nm。另外,防反射層的表面粗糙度可如下求出,即:使用觸針式階差形狀測定裝置測定防反射層表面的凹凸形狀,求出粗糙度曲線,針對此粗糙度曲線中隨意抽出的0.1 mm的部分,求出粗糙度的算術平均值,將其作為防反射層的表面粗糙度。Moreover, the surface roughness of the anti-reflection layer is 40 nm to 200 nm. If the surface roughness of the anti-reflection layer is less than the lower limit, the reflectance of the obtained light-shielding film cannot be sufficiently reduced, and the reflection of light on the light-shielding film cannot be sufficiently prevented. On the other hand, if the surface roughness of the anti-reflection layer exceeds the upper limit, it is difficult to make the flatness of the obtained light shielding film to a desired level. As for the surface roughness of such an anti-reflection layer, the reflectance of the obtained light-shielding film is further lowered, the reflection of light on the light-shielding film is further suppressed, and from the viewpoint of ensuring the flatness of the light-shielding film, it is preferable It is 50 nm to 180 nm, more preferably 80 nm to 160 nm. In addition, the surface roughness of the anti-reflection layer can be determined as follows: use a stylus-type step shape measuring device to measure the unevenness of the surface of the anti-reflection layer to obtain a roughness curve, and the roughness curve is arbitrarily extracted from 0.1 In the part of mm, the arithmetic mean of the roughness was calculated, and this was used as the surface roughness of the anti-reflection layer.

作為形成此種防反射層的方法,例如可列舉在所述透明基板上塗佈所述第二種防反射層用樹脂組成物溶液後,對所述第二種防反射層用樹脂組成物實施加熱硬化處理的方法。As a method of forming such an anti-reflection layer, for example, after coating the second resin composition solution for the anti-reflection layer on the transparent substrate, applying the second resin composition for the anti-reflection layer The method of heat hardening treatment.

作為塗佈第二種防反射層用樹脂組成物溶液的方法,例如除了公知的溶液浸漬法、噴霧法以外,還可列舉使用輥塗機、面塗機、狹縫塗佈機、旋塗機等的方法。As a method of applying the second resin composition solution for the anti-reflection layer, for example, in addition to the well-known solution dipping method and spray method, the use of a roll coater, a top coater, a slit coater, and a spin coater can be used. And other methods.

而且,加熱硬化處理條件可根據使用的透明基板或第二種防反射層用樹脂組成物的種類等適當設定,例如在使用玻璃基板等耐熱性充分者作為透明基板的情況下,可將加熱溫度設定為180℃~250℃,並將加熱時間設定為20分鐘~60分鐘。In addition, the heat curing conditions can be appropriately set according to the type of transparent substrate used or the second type of resin composition for anti-reflection layer. For example, in the case of using a glass substrate or the like with sufficient heat resistance as a transparent substrate, the heating temperature can be set Set to 180°C to 250°C, and set the heating time to 20 minutes to 60 minutes.

其次,在如此形成的防反射層上形成包括所述遮光層用樹脂組成物的層(以下,稱為“遮光層用樹脂組成物層”)。作為形成此種遮光層用樹脂組成物層的方法,例如可列舉在所述第二種防反射層用樹脂組成物層上塗佈所述遮光層用樹脂組成物溶液後,實施加熱處理(預烘烤),由此除去有機溶媒的方法。Next, a layer including the resin composition for a light-shielding layer (hereinafter referred to as a “resin composition layer for a light-shielding layer”) is formed on the antireflection layer formed in this way. As a method of forming such a resin composition layer for a light-shielding layer, for example, after coating the resin composition solution for a light-shielding layer on the second resin composition layer for an anti-reflection layer, heat treatment (preliminary Baking), thereby removing the organic solvent.

作為塗佈遮光層用樹脂組成物溶液的方法,例如除了公知的溶液浸漬法、噴霧法以外,還可列舉使用輥塗機、面塗機、狹縫塗佈機、旋塗機等的方法。預烘烤中的加熱溫度及加熱時間可根據使用的有機溶媒的種類等適當設定,例如可將加熱溫度設定為60℃~110℃(設定為不超過所述透明基板的耐熱溫度),並將加熱時間設定為1分鐘~3分鐘。As a method of coating the resin composition solution for a light-shielding layer, in addition to a well-known solution dipping method, spray method, the method using a roll coater, a top coater, a slit coater, a spin coater, etc. can be mentioned, for example. The heating temperature and heating time in the pre-baking can be appropriately set according to the type of organic solvent used. For example, the heating temperature can be set to 60°C to 110°C (set not to exceed the heat-resistant temperature of the transparent substrate), and The heating time is set to 1 minute to 3 minutes.

其次,對如此形成的所述遮光層用樹脂組成物層,使用期望的遮光膜圖案形成用遮罩來實施曝光處理,使所述遮光層用樹脂組成物層的感光部分(曝光部分)的光硬化性樹脂光硬化。曝光處理條件可根據使用的光硬化性樹脂或光聚合引發劑的種類等適當設定。Next, the resin composition layer for the light-shielding layer formed in this way is subjected to exposure treatment using a mask for forming a desired light-shielding film pattern, so that the light-sensitive part (exposure part) of the resin composition layer for the light-shielding layer is exposed to light. The curable resin is light-cured. The exposure treatment conditions can be appropriately set according to the type of photocurable resin or photopolymerization initiator used, and the like.

其次,對曝光後的遮光層用樹脂組成物層實施顯影處理,將所述遮光層用樹脂組成物層的未曝光部分的樹脂組成物去除,由此形成含有所述遮光成分及樹脂硬化物(所述遮光層用樹脂組成物的硬化物)的遮光層。並且,為了使所述遮光層充分硬化,或充分除去顯影液,而對所述遮光層實施加熱處理(後烘烤),由此可獲得在所述透明基板上具有包括所述防反射層及所述遮光層的遮光膜(遮光膜圖案)的本發明的顯示裝置用基板。Next, the exposed resin composition layer for the light-shielding layer is subjected to development processing to remove the resin composition in the unexposed part of the resin composition layer for the light-shielding layer, thereby forming the light-shielding component and the cured resin ( The light-shielding layer is a cured product of the resin composition for the light-shielding layer. In addition, in order to fully harden the light-shielding layer or sufficiently remove the developer, heat treatment (post-baking) is performed on the light-shielding layer, thereby obtaining a transparent substrate including the anti-reflection layer and The light-shielding film (light-shielding film pattern) of the light-shielding layer is the substrate for a display device of the present invention.

作為所述顯影處理方法,並無特別限制,可採用公知的顯影方法,顯影處理條件可根據使用的光硬化性樹脂的種類等適當設定。而且,在所述遮光層用樹脂組成物層中的光硬化性樹脂為鹼可溶性的情況下,較佳使用鹼顯影液來進行顯影處理(鹼顯影處理)。作為鹼顯影液,可使用鹼金屬或鹼土類金屬的碳酸鹽或氫氧化物的水溶液等公知的鹼顯影液。The development treatment method is not particularly limited, and a known development method can be adopted, and the development treatment conditions can be appropriately set according to the kind of photocurable resin used and the like. Furthermore, when the photocurable resin in the resin composition layer for a light shielding layer is alkali-soluble, it is preferable to perform development processing (alkali development processing) using an alkali developer. As the alkali developer, a known alkali developer such as an aqueous solution of carbonate or hydroxide of alkali metal or alkaline earth metal can be used.

而且,後烘烤中的加熱溫度及加熱時間可根據使用的透明基板或樹脂組成物的種類等適當設定。In addition, the heating temperature and heating time in post-baking can be appropriately set according to the type of transparent substrate or resin composition used.

如此形成的遮光層的平均厚度為0.1 μm~30 μm。若所述遮光層的平均厚度不足所述下限,則遮光性會下降,另一方面,若超過所述上限,則所述鹼顯影所需要的時間變長,生產性會下降。作為此種遮光層的平均厚度,就兼顧遮光性與生產性的觀點而言,較佳為0.5 μm~20 μm,更佳為1 μm~10 μm。另外,遮光層的平均厚度可藉由如下方式而求出,即:使用觸針式階差形狀測定裝置測定遮光層表面與透明基板表面的階差,將其平均而求出包括所述防反射層及所述遮光層的遮光膜的平均厚度,並自所述遮光膜的平均厚度中減去所述防反射層的平均厚度。 [實施例]The average thickness of the light shielding layer formed in this way is 0.1 μm to 30 μm. If the average thickness of the light-shielding layer is less than the lower limit, the light-shielding property will decrease. On the other hand, if it exceeds the upper limit, the time required for the alkali development will become longer and productivity will decrease. The average thickness of such a light-shielding layer is preferably 0.5 μm to 20 μm, and more preferably 1 μm to 10 μm from the viewpoint of both light-shielding properties and productivity. In addition, the average thickness of the light-shielding layer can be obtained by measuring the level difference between the surface of the light-shielding layer and the surface of the transparent substrate using a stylus-type level difference shape measuring device, and averaging them to obtain the value including the anti-reflection Layer and the average thickness of the light-shielding film of the light-shielding layer, and subtract the average thickness of the anti-reflection layer from the average thickness of the light-shielding film. [Example]

以下,基於實施例及比較例對本發明進行更具體的說明,但本發明並不限定於以下的實施例。另外,實施例及比較例中使用的無機填料及遮光成分的平均粒徑、防反射層(或防反射層用樹脂組成物層)及遮光層的平均厚度、以及防反射層(或防反射層用樹脂組成物層)的表面粗糙度是藉由以下的方法進行測定。Hereinafter, the present invention will be described more specifically based on examples and comparative examples, but the present invention is not limited to the following examples. In addition, the average particle size of the inorganic filler and light-shielding component used in the examples and comparative examples, the average thickness of the anti-reflection layer (or the resin composition layer for the anti-reflection layer) and the light-shielding layer, and the anti-reflection layer (or anti-reflection layer) The surface roughness of the resin composition layer) is measured by the following method.

<無機填料及遮光成分的平均粒徑測定> 將無機填料或遮光成分的粒子以使粒子濃度成為0.1質量%~0.5質量%的方式分散於樹脂組成物溶液中使用的有機溶媒中。針對所獲得的分散液中的粒子的粒度分佈,使用粒度分佈計(大塚電子股份有限公司製造的“粒徑分析儀FPAR-1000”)藉由動態光散射法進行測定,並藉由累積量法解析所獲得的粒度分佈而求出平均粒徑(平均二次粒徑)。<Measurement of average particle size of inorganic fillers and light-shielding components> The particles of the inorganic filler or the light-shielding component are dispersed in the organic solvent used in the resin composition solution so that the particle concentration becomes 0.1% by mass to 0.5% by mass. The particle size distribution of the particles in the obtained dispersion was measured by the dynamic light scattering method using a particle size distribution meter ("particle size analyzer FPAR-1000" manufactured by Otsuka Electronics Co., Ltd.) and by the cumulant method The obtained particle size distribution is analyzed to find the average particle size (average secondary particle size).

<防反射層(或防反射層用樹脂組成物層)的平均厚度測定> 使用觸針式階差形狀測定裝置(科磊(KLA-Tencor)公司製造的“P-10”),在測定範圍500 μm、掃描速度50 μm/秒、取樣(sampling)速率20 Hz的條件下,測定玻璃基板表面與防反射層表面(或防反射層用樹脂組成物層表面)的階差,將其平均值作為防反射層(或防反射層用樹脂組成物層)的平均厚度。<Measurement of the average thickness of the anti-reflection layer (or the resin composition layer for the anti-reflection layer)> Using a stylus type step shape measuring device ("P-10" manufactured by KLA-Tencor), under the conditions of a measuring range of 500 μm, a scanning speed of 50 μm/sec, and a sampling rate of 20 Hz Measure the level difference between the surface of the glass substrate and the surface of the anti-reflection layer (or the surface of the resin composition layer for the anti-reflection layer), and use the average value as the average thickness of the anti-reflection layer (or the resin composition layer for the anti-reflection layer).

<遮光層的平均厚度測定> 使用觸針式階差形狀測定裝置(科磊(KLA-Tencor)公司製造的“P-10”),在測定範圍500 μm、掃描速度50 μm/秒、取樣速率20 Hz的條件下,測定玻璃基板表面與遮光層表面的階差,將其平均值作為包括防反射層及遮光層的遮光膜的平均厚度。自所述遮光膜的平均厚度中減去所述防反射層(或防反射層用樹脂組成物層)的平均厚度,由此求出遮光層的平均厚度(=遮光膜的平均厚度-防反射層(或防反射層用樹脂組成物層)的平均厚度)。<Measurement of the average thickness of the light-shielding layer> Using a stylus-type step shape measuring device ("P-10" manufactured by KLA-Tencor), the glass was measured under the conditions of a measuring range of 500 μm, a scanning speed of 50 μm/sec, and a sampling rate of 20 Hz. The average value of the level difference between the surface of the substrate and the surface of the light-shielding layer is taken as the average thickness of the light-shielding film including the anti-reflection layer and the light-shielding layer. The average thickness of the anti-reflection layer (or the resin composition layer for the anti-reflection layer) is subtracted from the average thickness of the light-shielding film to obtain the average thickness of the light-shielding layer (=average thickness of the light-shielding film-anti-reflection The average thickness of the layer (or the resin composition layer for the anti-reflection layer)).

<防反射層(或防反射層用樹脂組成物層)的表面粗糙度測定> 使用觸針式階差形狀測定裝置(科磊(KLA-Tencor)公司製造的“P-10”),在測定範圍500 μm、掃描速度10 μm/秒、取樣速率100 Hz的條件下,測定防反射層表面(或防反射層用樹脂組成物層表面)的凹凸形狀,求出粗糙度曲線,針對此粗糙度曲線中隨意抽出的長度0.1 mm的部分求出粗糙度的算術平均值,將其作為防反射層(或防反射層用樹脂組成物層)的表面粗糙度。將其結果示於表1中。<Measurement of surface roughness of anti-reflection layer (or resin composition layer for anti-reflection layer)> Using a stylus-type step shape measuring device (“P-10” manufactured by KLA-Tencor), the measurement range is 500 μm, scanning speed 10 μm/sec, and sampling rate 100 Hz. Calculate the roughness curve of the irregularities on the surface of the reflective layer (or the surface of the resin composition layer for the anti-reflection layer), and calculate the arithmetic average of the roughness for a portion of the roughness curve that is randomly extracted with a length of 0.1 mm. As the surface roughness of the anti-reflection layer (or the resin composition layer for the anti-reflection layer). The results are shown in Table 1.

而且,實施例及比較例中使用的鹼可溶性的光硬化性透明樹脂是藉由以下的方法進行合成。另外,以下示出合成例中使用的原料。 BPFE:雙酚茀型環氧化合物(9,9-雙(4-羥基苯基)茀與氯甲基氧雜環丙烷(Chloromethyloxirane)的反應產物(環氧當量:250 g/eq))。 AA:丙烯酸。 PGMEA:丙二醇單甲醚乙酸酯。 TEAB:溴化四乙基銨。 BPDA:3,3',4,4'-聯苯基四羧酸二酐。 THPA:四氫鄰苯二甲酸酐。 BzMA:甲基丙烯酸苄酯。 DCPMA:甲基丙烯酸二環戊酯。 GMA:甲基丙烯酸縮水甘油酯。 St:苯乙烯。 AIBN:偶氮雙異丁腈。 TDMAMP:三-二甲基胺基甲基苯酚。 HQ:對苯二酚。 TEA:三乙基胺。In addition, the alkali-soluble photocurable transparent resin used in Examples and Comparative Examples was synthesized by the following method. In addition, the raw materials used in the synthesis examples are shown below. BPFE: Bisphenol sulfide type epoxy compound (9,9-bis(4-hydroxyphenyl) sulfide and Chloromethyloxirane (Chloromethyloxirane) reaction product (epoxy equivalent: 250 g/eq)). AA: Acrylic. PGMEA: Propylene glycol monomethyl ether acetate. TEAB: Tetraethylammonium bromide. BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride. THPA: Tetrahydrophthalic anhydride. BzMA: Benzyl methacrylate. DCPMA: Dicyclopentyl methacrylate. GMA: Glycidyl methacrylate. St: Styrene. AIBN: Azobisisobutyronitrile. TDMAMP: Tris-dimethylaminomethylphenol. HQ: Hydroquinone. TEA: Triethylamine.

(合成例1) 在帶回流冷卻器的四口燒瓶(容量500 ml)中裝入BPFE(114.4 g(0.23莫耳))、AA(33.2 g(0.46莫耳))、PGMEA(157 g)及TEAB(0.48 g),以100℃~105℃攪拌20小時使其反應。繼而,向所述燒瓶內的反應生成物中添加BPDA(35.3 g(0.12莫耳))及THPA(18.3 g(0.12莫耳)),以120℃~125℃攪拌6小時而獲得含有光硬化性卡多樹脂(cardo resin)的樹脂溶液。此樹脂溶液的固體成分濃度為56.1質量%,酸值(固體成分換算)為103 mgKOH/g,GPC分析下的Mw為3600。(Synthesis example 1) BPFE (114.4 g (0.23 mol)), AA (33.2 g (0.46 mol)), PGMEA (157 g) and TEAB (0.48 g) were put into a four-necked flask with reflux cooler (capacity 500 ml) ), stirring at 100°C to 105°C for 20 hours to react. Then, BPDA (35.3 g (0.12 mol)) and THPA (18.3 g (0.12 mol)) were added to the reaction product in the flask, and stirred at 120°C to 125°C for 6 hours to obtain photocurable A resin solution of cardo resin. The solid content concentration of this resin solution was 56.1% by mass, the acid value (in terms of solid content) was 103 mgKOH/g, and the Mw in the GPC analysis was 3,600.

(合成例2) 向帶回流冷卻器的四口燒瓶(容量1 L)中放入PGMEA(300 g),將燒瓶內的氣相置換為氮,之後,升溫至120℃。自滴加漏斗花費2小時向所述燒瓶內滴加單體混合物(在BzMA(35.2 g(0.20莫耳))、DCPMA(77.1 g(0.35莫耳))、GMA(49.8 g(0.35莫耳))及St(10.4 g(0.10莫耳))的液狀混合物中溶解AIBN(10 g)而成的混合溶液),其後,在120℃下攪拌2小時而獲得共聚物溶液。(Synthesis example 2) PGMEA (300 g) was placed in a four-necked flask (volume 1 L) equipped with a reflux cooler, the gas phase in the flask was replaced with nitrogen, and then the temperature was raised to 120°C. It took 2 hours to drop the monomer mixture (in BzMA (35.2 g (0.20 mol)), DCPMA (77.1 g (0.35 mol)), GMA (49.8 g (0.35 mol)) into the flask from the dropping funnel for 2 hours. A mixed solution obtained by dissolving AIBN (10 g) in a liquid mixture of St (10.4 g (0.10 mol)) and St (10.4 g (0.10 mol)), followed by stirring at 120°C for 2 hours to obtain a copolymer solution.

繼而,將燒瓶系統內的氣相置換為空氣,之後,向此燒瓶內的所述共聚物溶液中添加AA(24.0 g(縮水甘油基的95%))、TDMAMP(0.8 g)及HQ(0.15 g),在120℃下攪拌6小時,而獲得含有聚合性不飽和基的共聚物溶液。Then, the gas phase in the flask system was replaced with air, and then AA (24.0 g (95% of glycidyl group)), TDMAMP (0.8 g) and HQ (0.15) were added to the copolymer solution in the flask. g) Stir at 120°C for 6 hours to obtain a copolymer solution containing a polymerizable unsaturated group.

並且,向此含有聚合性不飽和基的共聚物溶液中添加THPA(45.7 g(AA添加莫耳數的90%))、TEA(0.5 g),在120℃下反應4小時而獲得含有光硬化性丙烯酸樹脂的樹脂溶液。此樹脂溶液的固體成分濃度為46質量%,酸值(固體成分換算)為68 mgKOH/g,GPC分析下的Mw為7900。In addition, THPA (45.7 g (90% of the molar number of AA)) and TEA (0.5 g) were added to the copolymer solution containing polymerizable unsaturated groups, and reacted at 120°C for 4 hours to obtain a photocurable solution. Resin solution of acrylic resin. The solid content concentration of this resin solution was 46% by mass, the acid value (in terms of solid content) was 68 mgKOH/g, and the Mw in the GPC analysis was 7900.

並且,以下示出實施例及比較例中使用的其他各成分。 (熱硬化性透明樹脂) 環氧樹脂:2,2-雙(羥基甲基)-1-丁醇的1,2-環氧基-4-(2-氧雜環丙基)環己烷加成物(大賽璐有機合成股份有限公司(daicel corporation organic chemical products company)製造的“EHPE3150”)。 (光聚合性單體) DPHA:二季戊四醇六丙烯酸酯與二季戊四醇五丙烯酸酯的混合物(日本化藥股份有限公司製造的“DPHA”)。 (硬化劑) TMA:偏苯三甲酸。 (聚合引發劑) OXE02:乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-哢唑-3-基]-,1-(O-乙醯基肟)(巴斯夫(BASF)日本股份有限公司製造的“豔佳固(Irgacure)OXE02”)。 (無機填料) 二氧化矽A:氣相二氧化矽(日本艾羅西爾(Aerosil)股份有限公司製造的“艾羅西爾(Aerosil)”)、折射率:1.46、平均粒徑(分佈測定:動態光散射法、分佈解析:累積量法):170 nm。 二氧化矽B:有機二氧化矽溶膠(日產化學股份有限公司製造的“PMA-ST”)、折射率:1.46、平均粒徑(分佈測定:動態光散射法、分佈解析:累積量法):20 nm。 (遮光成分) 碳黑:碳黑(三菱化學股份有限公司製造的“MA14”)、平均粒徑(分佈測定:動態光散射法、分佈解析:累積量法):150 nm。 (有機溶媒) PGMEA:丙二醇單甲醚乙酸酯。In addition, the other components used in the examples and comparative examples are shown below. (Thermosetting transparent resin) Epoxy resin: 1,2-epoxy-4-(2-oxocyclopropyl) cyclohexane adduct of 2,2-bis(hydroxymethyl)-1-butanol (Daicel Organic Synthesis "EHPE3150" manufactured by daicel corporation organic chemical products company). (Photopolymerizable monomer) DPHA: A mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate ("DPHA" manufactured by Nippon Kayaku Co., Ltd.). (hardener) TMA: trimellitic acid. (Polymerization initiator) OXE02: ethyl ketone, 1-[9-ethyl-6-(2-methylbenzyl)-9H-oxazol-3-yl]-,1-(O-acetyloxime) (BASF ( BASF) "Irgacure OXE02" manufactured by Japan Co., Ltd.). (Inorganic filler) Silicon dioxide A: vapor phase silicon dioxide ("Aerosil" manufactured by Japan Aerosil Co., Ltd.), refractive index: 1.46, average particle size (distribution measurement: dynamic light scattering) Method, distribution analysis: cumulant method): 170 nm. Silica B: Organic silica sol ("PMA-ST" manufactured by Nissan Chemical Co., Ltd.), refractive index: 1.46, average particle size (distribution measurement: dynamic light scattering method, distribution analysis: cumulant method): 20 nm. (Shading component) Carbon black: carbon black ("MA14" manufactured by Mitsubishi Chemical Co., Ltd.), average particle size (distribution measurement: dynamic light scattering method, distribution analysis: cumulant method): 150 nm. (Organic solvent) PGMEA: Propylene glycol monomethyl ether acetate.

(實施例1) 首先,以使各成分成為表1中所示的含量的方式,混合合成例1中所獲得的含有光硬化性卡多樹脂的樹脂溶液、二氧化矽A及PGMEA而製備防反射層用樹脂組成物溶液。而且,以使各成分成為表1中所示的含量的方式,混合合成例1中所獲得的含有光硬化性卡多樹脂的樹脂溶液、DPHA、碳黑、OXE02及PGMEA而製備遮光層用樹脂組成物溶液。(Example 1) First, the resin solution containing the photocurable cardo resin obtained in Synthesis Example 1, silicon dioxide A, and PGMEA were mixed so that each component has the content shown in Table 1, to prepare a resin composition for an anti-reflection layer物solution. Furthermore, the resin solution containing the photocurable cardo resin obtained in Synthesis Example 1, DPHA, carbon black, OXE02, and PGMEA were mixed so that each component had the content shown in Table 1, to prepare a resin for a light-shielding layer Composition solution.

其次,在玻璃基板上,使用旋塗機塗佈防反射層用樹脂組成物溶液,使用加熱板在90℃下加熱(預烘烤)1分鐘,形成平均厚度為80 nm的防反射層用樹脂組成物層。此防反射層用樹脂組成物層的表面粗糙度為75 nm。Next, apply the resin composition solution for the anti-reflection layer on the glass substrate using a spin coater, and heat it at 90°C (pre-baked) for 1 minute using a hot plate to form the resin for the anti-reflection layer with an average thickness of 80 nm Composition layer. The surface roughness of the resin composition layer for the anti-reflection layer was 75 nm.

在所述防反射層用樹脂組成物層上,使用旋塗機塗佈遮光層用樹脂組成物溶液,使用加熱板在90℃下加熱(預烘烤)1分鐘,形成遮光層用樹脂組成物層。On the resin composition layer for the anti-reflection layer, the resin composition solution for the light-shielding layer was coated using a spin coater, and heated (pre-baked) at 90°C for 1 minute using a hot plate to form the resin composition for the light-shielding layer Floor.

在如此形成的包括防反射層用樹脂組成物層及遮光層用樹脂組成物層的層疊塗膜上,將曝光間隙調整為100 μm,覆蓋線寬(line)/間隔(space)=20 μm/20 μm的遮光膜圖案形成用遮罩,使用i射線強度30 mW/cm2 的超高壓水銀燈,照射50 mJ/cm2 的紫外線,一併進行曝光,使感光部分的樹脂光硬化。在曝光後的層疊塗膜上,使用0.04%氫氧化鉀水溶液,在24℃、1 kgf/cm2 壓力的條件下開始噴淋顯影,在開始出現圖案後,進一步繼續20秒鐘的噴淋顯影。其後,在5 kgf/cm2 壓力下進行噴霧水洗,將層疊塗膜的未曝光部分去除,將依次層疊有防反射層圖案與遮光層圖案的遮光膜圖案形成於玻璃基板上。其後,使用熱風乾燥機以230℃對此遮光膜圖案實施30分鐘的加熱處理(後烘烤)。另外,所述遮光層圖案的平均厚度為1.3 μm。On the thus formed laminated coating film including the resin composition layer for the anti-reflection layer and the resin composition layer for the light shielding layer, the exposure gap was adjusted to 100 μm, and the coverage line width (line)/space (space)=20 μm/ The mask for forming a pattern of a 20 μm light-shielding film uses an ultra-high pressure mercury lamp with an i-ray intensity of 30 mW/cm 2 to irradiate 50 mJ/cm 2 of ultraviolet rays and simultaneously expose to light-harden the resin in the photosensitive part. On the exposed laminated film, use 0.04% potassium hydroxide aqueous solution to start spray development under the conditions of 24°C and 1 kgf/cm 2 pressure. After the pattern begins to appear, continue spray development for another 20 seconds . Thereafter, spray water washing was performed under a pressure of 5 kgf/cm 2 to remove unexposed parts of the laminated coating film, and a light-shielding film pattern in which an anti-reflection layer pattern and a light-shielding layer pattern were sequentially laminated was formed on the glass substrate. After that, heat treatment (post-baking) was performed for this light-shielding film pattern at 230° C. for 30 minutes using a hot air dryer. In addition, the average thickness of the light shielding layer pattern was 1.3 μm.

(實施例2~實施例3) 在防反射層用樹脂組成物溶液中,以使各成分成為表1中所示的含量的方式,變更合成例1中所獲得的光硬化性卡多樹脂的樹脂溶液及二氧化矽A的調配量,除此以外,以與實施例1同樣的方式,將依次層疊有防反射層圖案與遮光層圖案的遮光膜圖案形成於玻璃基板上。另外,實施例2中所獲得的防反射層用樹脂組成物層的表面粗糙度為98 nm,實施例3中所獲得的防反射層用樹脂組成物層的表面粗糙度為142 nm。(Example 2 to Example 3) In the resin composition solution for the anti-reflective layer, the resin solution of the photocurable cardo resin obtained in Synthesis Example 1 and the blending of silicon dioxide A were changed so that each component had the content shown in Table 1. Except for the amount, in the same manner as in Example 1, a light-shielding film pattern in which an anti-reflection layer pattern and a light-shielding layer pattern were sequentially laminated was formed on a glass substrate. In addition, the surface roughness of the resin composition layer for the anti-reflection layer obtained in Example 2 was 98 nm, and the surface roughness of the resin composition layer for the anti-reflection layer obtained in Example 3 was 142 nm.

(實施例4) 除形成平均厚度為40 nm的防反射層用樹脂組成物層以外,以與實施例3同樣的方式,將依次層疊有防反射層圖案與遮光層圖案的遮光膜圖案形成於玻璃基板上。另外,實施例4中所獲得的防反射層用樹脂組成物層的表面粗糙度為150 nm。(Example 4) Except for forming a resin composition layer for an anti-reflection layer with an average thickness of 40 nm, in the same manner as in Example 3, a light-shielding film pattern in which an anti-reflection layer pattern and a light-shielding layer pattern were sequentially laminated was formed on a glass substrate. In addition, the surface roughness of the resin composition layer for an anti-reflection layer obtained in Example 4 was 150 nm.

(實施例5) 除形成平均厚度為200 nm的防反射層用樹脂組成物層以外,以與實施例3同樣的方式,將依次層疊有防反射層圖案與遮光層圖案的遮光膜圖案形成於玻璃基板上。另外,實施例5中所獲得的防反射層用樹脂組成物層的表面粗糙度為50 nm。(Example 5) Except for forming the resin composition layer for an anti-reflection layer with an average thickness of 200 nm, in the same manner as in Example 3, a light-shielding film pattern in which an anti-reflection layer pattern and a light-shielding layer pattern were sequentially laminated was formed on a glass substrate. In addition, the surface roughness of the resin composition layer for an anti-reflection layer obtained in Example 5 was 50 nm.

(實施例6) 在防反射層用樹脂組成物溶液中,使用合成例2中所獲得的光硬化性丙烯酸樹脂的樹脂溶液代替合成例1中所獲得的光硬化性卡多樹脂的樹脂溶液,除此以外,以與實施例3同樣的方式,將依次層疊有防反射層圖案與遮光層圖案的遮光膜圖案形成於玻璃基板上。另外,實施例6中所獲得的防反射層用樹脂組成物層的表面粗糙度為131 nm。(Example 6) In the resin composition solution for the anti-reflection layer, the resin solution of the photocurable acrylic resin obtained in Synthesis Example 2 was used instead of the resin solution of the photocurable cardo resin obtained in Synthesis Example 1. In addition, In the same manner as in Example 3, a light-shielding film pattern in which an anti-reflection layer pattern and a light-shielding layer pattern were sequentially laminated was formed on a glass substrate. In addition, the surface roughness of the resin composition layer for an anti-reflection layer obtained in Example 6 was 131 nm.

(實施例7) 首先,以使各成分成為表1中所示的含量的方式,混合合成例1中所獲得的光硬化性卡多樹脂的樹脂溶液、環氧樹脂、TMA、二氧化矽A及PGMEA而製備防反射層用樹脂組成物溶液。而且,以與實施例1同樣的方式製備遮光層用樹脂組成物溶液。(Example 7) First, the resin solution of photocurable cardo resin obtained in Synthesis Example 1, epoxy resin, TMA, silicon dioxide A, and PGMEA were mixed so that each component has the content shown in Table 1 to prepare a protective layer. Resin composition solution for reflective layer. Furthermore, in the same manner as in Example 1, a resin composition solution for a light-shielding layer was prepared.

其次,在玻璃基板上,使用旋塗機塗佈防反射層用樹脂組成物溶液,之後,使用熱風乾燥機以230℃實施30分鐘的加熱硬化處理,形成平均厚度為80 nm的防反射層。此防反射層的表面粗糙度為65 nm。Next, a spin coater was used to coat the resin composition solution for an anti-reflection layer on the glass substrate, and then a hot-air dryer was used to heat and cure at 230°C for 30 minutes to form an anti-reflection layer with an average thickness of 80 nm. The surface roughness of this anti-reflection layer was 65 nm.

在所述防反射層上,使用旋塗機塗佈遮光層用樹脂組成物溶液,使用加熱板在90℃下加熱(預烘烤)1分鐘,形成遮光層用樹脂組成物層。On the anti-reflection layer, the resin composition solution for the light-shielding layer was applied using a spin coater, and heated (pre-baked) at 90° C. for 1 minute using a hot plate to form a resin composition layer for the light-shielding layer.

在如此形成的遮光層用樹脂組成物層上,將曝光間隙調整為100 μm,覆蓋線寬/間隔=20 μm/20 μm的遮光膜圖案形成用遮罩,使用i射線強度30 mW/cm2 的超高壓水銀燈,照射50 mJ/cm2 的紫外線,進行曝光,使感光部分的樹脂光硬化。在曝光後的遮光層用樹脂組成物層上,使用0.04%氫氧化鉀水溶液,在24℃、1 kgf/cm2 壓力的條件下開始噴淋顯影,在開始出現圖案後,進一步繼續20秒鐘的噴淋顯影。其後,在5 kgf/cm2 壓力下進行噴霧水洗,將遮光層用樹脂組成物層的未曝光部分去除,將依次層疊有防反射層與遮光層圖案的遮光膜圖案形成於玻璃基板上。其後,使用熱風乾燥機以230℃對此遮光膜圖案實施30分鐘的加熱處理(後烘烤)。另外,所述遮光層圖案的平均厚度為1.3 μm。On the resin composition layer for the light-shielding layer formed in this way, the exposure gap was adjusted to 100 μm, and the mask for forming the light-shielding film pattern covering line width/space=20 μm/20 μm was used, and the i-ray intensity was 30 mW/cm 2 The ultra-high-pressure mercury lamp is irradiated with 50 mJ/cm 2 of ultraviolet rays and exposed to light harden the resin in the photosensitive part. On the resin composition layer for the light-shielding layer after exposure, use a 0.04% potassium hydroxide aqueous solution to start spray development under the conditions of 24°C and 1 kgf/cm 2 pressure. After the pattern begins to appear, continue for another 20 seconds The spray developing. Thereafter, spray water washing was performed under a pressure of 5 kgf/cm 2 to remove the unexposed part of the resin composition layer for the light-shielding layer, and the light-shielding film pattern in which the anti-reflection layer and the light-shielding layer pattern were sequentially laminated was formed on the glass substrate. After that, heat treatment (post-baking) was performed for this light-shielding film pattern at 230° C. for 30 minutes using a hot air dryer. In addition, the average thickness of the light shielding layer pattern was 1.3 μm.

(實施例8) 在防反射層用樹脂組成物溶液中,以使各成分成為表1中所示的含量的方式,混合環氧樹脂、TMA、二氧化矽A及PGMEA,除此以外,以與實施例7同樣的方式,將依次層疊有防反射層與遮光層圖案的遮光膜圖案形成於玻璃基板上。另外,實施例8中所獲得的防反射層的表面粗糙度為70 nm。(Example 8) In the resin composition solution for the anti-reflection layer, epoxy resin, TMA, silicon dioxide A, and PGMEA were mixed so that each component had the content shown in Table 1, and the same as in Example 7 except that In the method, a light-shielding film pattern in which an anti-reflection layer and a light-shielding layer pattern are sequentially laminated is formed on a glass substrate. In addition, the surface roughness of the anti-reflection layer obtained in Example 8 was 70 nm.

(比較例1) 除未形成防反射層以外,以與實施例1同樣的方式,將僅包括遮光層圖案的遮光膜圖案形成於玻璃基板上。(Comparative example 1) Except that the anti-reflection layer was not formed, in the same manner as in Example 1, a light-shielding film pattern including only the light-shielding layer pattern was formed on the glass substrate.

(比較例2) 在防反射層用樹脂組成物溶液中,以使各成分成為表1中所示的含量的方式,混合合成例1中所獲得的光硬化性卡多樹脂的樹脂溶液及PGMEA,除此以外,以與實施例1同樣的方式,將依次層疊有防反射層圖案與遮光層圖案的遮光膜圖案形成於玻璃基板上。另外,比較例2中所獲得的防反射層用樹脂組成物層的表面粗糙度為11 nm。(Comparative example 2) In the resin composition solution for the anti-reflection layer, the resin solution of the photocurable cardo resin obtained in Synthesis Example 1 and PGMEA were mixed so that the respective components have the contents shown in Table 1. Otherwise, In the same manner as in Example 1, a light-shielding film pattern in which an anti-reflection layer pattern and a light-shielding layer pattern were sequentially laminated was formed on a glass substrate. In addition, the surface roughness of the resin composition layer for an anti-reflection layer obtained in Comparative Example 2 was 11 nm.

(比較例3) 除使用平均粒徑為20 nm的二氧化矽B代替平均粒徑為170 nm的二氧化矽A以外,以與實施例3同樣的方式,將依次層疊有防反射層圖案與遮光層圖案的遮光膜圖案形成於玻璃基板上。另外,比較例3中所獲得的防反射層用樹脂組成物層的表面粗糙度為30 nm。(Comparative example 3) Except that silicon dioxide B with an average particle size of 20 nm was used instead of silicon dioxide A with an average particle size of 170 nm, in the same manner as in Example 3, a light-shielding layer in which an anti-reflection layer pattern and a light-shielding layer pattern were sequentially laminated The film pattern is formed on the glass substrate. In addition, the surface roughness of the resin composition layer for an anti-reflection layer obtained in Comparative Example 3 was 30 nm.

<遮光度(光密度(optical density,OD)值)測定> 針對所獲得的帶遮光膜圖案的玻璃基板,使用光學濃度計(阪田油墨工程股份有限公司(SAKATA INX ENG.CO.,LTD)製造的“X-Rite361T(V)”)測定光學濃度(OD值),將其用玻璃基板的光學濃度(OD值)進行修正,求出遮光膜的遮光度(OD值)。將其結果示於表1中。<Measurement of shading degree (optical density (OD) value)> For the obtained glass substrate with a light-shielding film pattern, the optical density (OD value) was measured using an optical densitometer ("X-Rite361T (V)" manufactured by SAKATA INX ENG.CO., LTD) ), which is corrected by the optical density (OD value) of the glass substrate to obtain the light-shielding degree (OD value) of the light-shielding film. The results are shown in Table 1.

<反射率測定> 自所獲得的帶遮光膜圖案的玻璃基板的未形成遮光膜圖案的一面側,使用分光測色計(日立高新技術(Hitachi High Tech Science)股份有限公司製造的“UH4150”),在C光源、2°視野的條件下測定反射率[%]。將其結果示於表1中。<Measurement of reflectance> From the obtained glass substrate with a light-shielding film pattern on the side where the light-shielding film pattern is not formed, a spectrophotometer ("UH4150" manufactured by Hitachi High Tech Science Co., Ltd.) was used in the C light source, The reflectance [%] was measured under the condition of a 2° field of view. The results are shown in Table 1.

[表1]       實施例 1 實施例 2 實施例 3 實施例 4 實施例 5 實施例 6 實施例 7 實施例 8 比較例 1 比較例 2 比較例 3 防反射層的組成 卡多樹脂 [質量份] 15 10 5 5 5 --- 2 --- --- 20 5 丙烯酸樹脂 [質量份] --- --- --- --- --- 5 --- --- --- --- --- 環氧樹脂 [質量份] --- --- --- --- --- --- 2 4 --- --- --- TMA [質量份] --- --- --- --- --- --- 1 2 --- --- --- 二氧化矽A [質量份] 5 10 15 15 15 15 15 15 --- --- --- 二氧化矽B [質量份] --- --- --- --- --- --- --- --- --- --- 15 PGMEA [質量份] 80 80 80 80 80 80 80 79 --- 80 80 合計 [質量份] 100 100 100 100 100 100 100 100 --- 100 100 遮光層的組成 卡多樹脂 [質量份] 5 5 5 5 5 5 5 5 5 5 5 DPHA [質量份] 2 2 2 2 2 2 2 2 2 2 2 碳黑 [質量份] 8 8 8 8 8 8 8 8 8 8 8 OXE02 [質量份] 1 1 1 1 1 1 1 1 1 1 1 PGMEA [質量份] 84 84 84 84 84 84 84 84 84 84 84 合計 [質量份] 100 100 100 100 100 100 100 100 100 100 100 曝光及顯影的一併處理 不可 不可 --- 無機填料 折射率 [-] 1.46 1.46 1.46 1.46 1.46 1.46 1.46 1.46 --- --- 1.46 平均粒徑 [nm] 170 170 170 170 170 170 170 170 --- --- 20 防反射層 平均厚度 [nm] 80 80 80 40 200 80 80 80 --- 80 80 表面粗糙度 [nm] 75 98 142 150 50 131 65 70 --- 11 30 遮光層 平均厚度 [μm] 1.3 1.3 1.3 1.3 1.3 1.3 1.3 1.3 1.3 1.3 1.3 遮光膜 遮光度(OD值) [/μm] 3.6 3.6 3.6 3.6 3.6 3.6 3.6 3.6 3.6 3.6 3.6 反射率 [%] 5.0 4.8 4.6 4.5 5.0 4.5 4.6 4.6 6.0 6.0 6.0 [Table 1] Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 Comparative example 1 Comparative example 2 Comparative example 3 Composition of anti-reflection layer Cardo resin [Mass parts] 15 10 5 5 5 --- 2 --- --- 20 5 Acrylic [Mass parts] --- --- --- --- --- 5 --- --- --- --- --- Epoxy resin [Mass parts] --- --- --- --- --- --- 2 4 --- --- --- TMA [Mass parts] --- --- --- --- --- --- 1 2 --- --- --- Silica A [Mass parts] 5 10 15 15 15 15 15 15 --- --- --- Silica B [Mass parts] --- --- --- --- --- --- --- --- --- --- 15 PGMEA [Mass parts] 80 80 80 80 80 80 80 79 --- 80 80 total [Mass parts] 100 100 100 100 100 100 100 100 --- 100 100 The composition of the light-shielding layer Cardo resin [Mass parts] 5 5 5 5 5 5 5 5 5 5 5 DPHA [Mass parts] 2 2 2 2 2 2 2 2 2 2 2 Carbon black [Mass parts] 8 8 8 8 8 8 8 8 8 8 8 OXE02 [Mass parts] 1 1 1 1 1 1 1 1 1 1 1 PGMEA [Mass parts] 84 84 84 84 84 84 84 84 84 84 84 total [Mass parts] 100 100 100 100 100 100 100 100 100 100 100 Simultaneous processing of exposure and development can can can can can can Can't Can't --- can can Inorganic filler Refractive index [-] 1.46 1.46 1.46 1.46 1.46 1.46 1.46 1.46 --- --- 1.46 The average particle size [nm] 170 170 170 170 170 170 170 170 --- --- 20 Anti-reflection layer The average thickness [nm] 80 80 80 40 200 80 80 80 --- 80 80 Surface roughness [nm] 75 98 142 150 50 131 65 70 --- 11 30 Shading layer The average thickness [μm] 1.3 1.3 1.3 1.3 1.3 1.3 1.3 1.3 1.3 1.3 1.3 Shading film Shading degree (OD value) [/μm] 3.6 3.6 3.6 3.6 3.6 3.6 3.6 3.6 3.6 3.6 3.6 Reflectivity [%] 5.0 4.8 4.6 4.5 5.0 4.5 4.6 4.6 6.0 6.0 6.0

如表1中所示,確認到:包括藉由使具有特定的表面粗糙度的防反射層用樹脂組成物層硬化而形成的防反射層的遮光膜圖案(實施例1~實施例6)及包括具有特定的表面粗糙度的防反射層的遮光膜圖案(實施例7~實施例8)與無防反射層的遮光膜圖案(比較例1)、防反射層中不包含無機填料的遮光膜圖案(比較例2)、及包括藉由使表面粗糙度小的防反射層用樹脂組成物層硬化而形成的防反射層的遮光膜圖案(比較例3)相比,反射率被降低。 [工業上的可利用性]As shown in Table 1, it was confirmed that the light-shielding film pattern (Example 1 to Example 6) including the anti-reflection layer formed by curing the resin composition layer for the anti-reflection layer having a specific surface roughness and A light-shielding film pattern including an anti-reflection layer with a specific surface roughness (Example 7 to Example 8) and a light-shielding film pattern without an anti-reflection layer (Comparative Example 1), and a light-shielding film that does not contain inorganic fillers in the anti-reflection layer Compared with the pattern (Comparative Example 2) and the light-shielding film pattern (Comparative Example 3) including the anti-reflection layer formed by curing the resin composition layer for the anti-reflection layer with a small surface roughness, the reflectance was lowered. [Industrial availability]

像以上所說明的那樣,根據本發明,能夠獲得一種光的反射得到了充分抑制的遮光膜。因此,本發明的顯示裝置用基板由於具有光的反射得到了充分抑制的遮光膜,因此作為液晶顯示器、觸控面板、有機電致發光(electro-luminescence)EL顯示器、量子點顯示器等顯示裝置中所使用的基板是有用的。As described above, according to the present invention, it is possible to obtain a light-shielding film in which the reflection of light is sufficiently suppressed. Therefore, since the substrate for a display device of the present invention has a light-shielding film in which light reflection is sufficiently suppressed, it is used in display devices such as liquid crystal displays, touch panels, organic electro-luminescence (electro-luminescence) EL displays, and quantum dot displays. The substrate used is useful.

no

no

Claims (9)

一種顯示裝置用基板,其特徵在於包括: 透明基板;以及 遮光膜,所述遮光膜包括:配置於所述透明基板上,含有折射率為1.2~1.8的無機填料及透明樹脂硬化物的平均厚度為0.01 μm~1 μm的防反射層;以及配置於所述防反射層上,含有選自由有機黑色顏料、無機黑色顏料及混色偽黑色顏料所組成的群組中的至少一種遮光成分及樹脂硬化物的平均厚度為0.1 μm~30 μm的遮光層,並且所述防反射層與所述遮光層的界面處的所述防反射層的表面粗糙度為40 nm~200 nm。A substrate for a display device, which is characterized by comprising: Transparent substrate; and A light-shielding film comprising: an anti-reflection layer arranged on the transparent substrate and containing an inorganic filler with a refractive index of 1.2 to 1.8 and a cured transparent resin with an average thickness of 0.01 μm to 1 μm; and an anti-reflection layer arranged on the transparent substrate; The anti-reflection layer contains at least one light-shielding component selected from the group consisting of organic black pigments, inorganic black pigments, and color-mixed pseudo-black pigments, and a light-shielding layer with an average thickness of a resin cured product of 0.1 μm-30 μm, and The surface roughness of the anti-reflection layer at the interface between the anti-reflection layer and the light shielding layer is 40 nm to 200 nm. 如申請專利範圍第1項所述的顯示裝置用基板,其中所述無機填料的平均粒徑為25 nm~300 nm。The substrate for a display device according to the first item of the scope of patent application, wherein the average particle diameter of the inorganic filler is 25 nm to 300 nm. 如申請專利範圍第1項或第2項所述的顯示裝置用基板,其中相對於所述防反射層整體,所述無機填料的含量為5質量%~95質量%。The substrate for a display device according to the scope of patent application 1 or 2, wherein the content of the inorganic filler is 5 mass% to 95 mass% with respect to the entire anti-reflection layer. 一種顯示裝置用基板的製造方法,所述顯示裝置用基板包括透明基板以及配置於所述透明基板上的包括防反射層及遮光層的遮光膜,所述顯示裝置用基板的製造方法的特徵在於,包括: 在所述透明基板上,形成含有折射率為1.2~1.8的無機填料及光硬化性透明樹脂、平均厚度為0.01 μm~1 μm且表面粗糙度為40 nm~200 nm的防反射層用樹脂組成物層的步驟; 在所述防反射層用樹脂組成物層上,形成含有選自由有機黑色顏料、無機黑色顏料及混色偽黑色顏料所組成的群組中的至少一種遮光成分及光硬化性樹脂的遮光層用樹脂組成物層的步驟;以及 對所述防反射層用樹脂組成物層及所述遮光層用樹脂組成物層一併實施曝光處理後,一併實施顯影處理,並且實施後烘烤,而形成含有所述無機填料及透明樹脂硬化物的防反射層以及含有所述遮光成分及樹脂硬化物且平均厚度為0.1 μm~30 μm的遮光層的步驟。A method for manufacturing a substrate for a display device. The substrate for a display device includes a transparent substrate and a light-shielding film including an anti-reflection layer and a light-shielding layer disposed on the transparent substrate. The method for manufacturing the substrate for a display device is characterized by ,include: On the transparent substrate, a resin composition for an anti-reflection layer containing an inorganic filler with a refractive index of 1.2 to 1.8 and a photocurable transparent resin, an average thickness of 0.01 μm to 1 μm, and a surface roughness of 40 nm to 200 nm is formed Physical layer steps; On the resin composition layer for the anti-reflection layer, a resin for a light-shielding layer containing at least one light-shielding component selected from the group consisting of organic black pigments, inorganic black pigments, and mixed-color pseudo-black pigments and a photocurable resin is formed The steps of the composition layer; and The resin composition layer for the anti-reflection layer and the resin composition layer for the light-shielding layer are exposed together, and then developed together and post-baked to form the inorganic filler and the transparent resin. A step of an anti-reflection layer of a cured product and a light-shielding layer containing the light-shielding component and the cured resin and having an average thickness of 0.1 μm to 30 μm. 如申請專利範圍第4項所述的顯示裝置用基板的製造方法,其中所述防反射層用樹脂組成物層中的光硬化性透明樹脂及所述遮光層用樹脂組成物層中的光硬化性樹脂均為鹼可溶性,所述顯影處理為鹼顯影處理。The method of manufacturing a substrate for a display device as described in claim 4, wherein the photocurable transparent resin in the resin composition layer for the anti-reflection layer and the photocurable resin in the resin composition layer for the light shielding layer All resins are alkali-soluble, and the development treatment is alkali development treatment. 一種顯示裝置用基板的製造方法,所述顯示裝置用基板包括透明基板以及配置於所述透明基板上的包括防反射層及遮光層的遮光膜,所述顯示裝置用基板的製造方法的特徵在於,包括: 在所述透明基板上,對含有折射率為1.2~1.8的無機填料及熱硬化性透明樹脂與熱硬化性單體中的至少一種的防反射層用樹脂組成物實施加熱硬化處理,形成平均厚度為0.01 μm~1 μm且表面粗糙度為40 nm~200 nm的防反射層的步驟;以及 在所述防反射層上,對含有選自由有機黑色顏料、無機黑色顏料及混色偽黑色顏料所組成的群組中的至少一種遮光成分及光硬化性樹脂的遮光層用樹脂組成物實施曝光處理後,實施顯影處理,並且實施後烘烤,而形成平均厚度為0.1 μm~30 μm的遮光層的步驟。A method for manufacturing a substrate for a display device. The substrate for a display device includes a transparent substrate and a light-shielding film including an anti-reflection layer and a light-shielding layer disposed on the transparent substrate. The method for manufacturing the substrate for a display device is characterized by ,include: On the transparent substrate, a resin composition for an anti-reflection layer containing at least one of an inorganic filler with a refractive index of 1.2 to 1.8, a thermosetting transparent resin, and a thermosetting monomer is heat-cured to form an average thickness The step of an anti-reflection layer with a surface roughness of from 0.01 μm to 1 μm and a surface roughness of from 40 nm to 200 nm; and On the anti-reflection layer, a resin composition for a light-shielding layer containing at least one light-shielding component selected from the group consisting of organic black pigments, inorganic black pigments, and mixed-color pseudo-black pigments and a photocurable resin is subjected to exposure treatment After that, a development process is performed and post-baking is performed to form a step of forming a light-shielding layer with an average thickness of 0.1 μm to 30 μm. 如申請專利範圍第6項所述的顯示裝置用基板的製造方法,其中所述遮光層用樹脂組成物層中的光硬化性樹脂為鹼可溶性,所述顯影處理為鹼顯影處理。The method for manufacturing a substrate for a display device as described in claim 6, wherein the photocurable resin in the resin composition layer for the light-shielding layer is alkali-soluble, and the development treatment is an alkali development treatment. 一種防反射層用樹脂組成物溶液,其為含有能夠形成平均厚度為0.01 μm~1 μm且表面粗糙度為40 nm~200 nm的防反射層用樹脂組成物層的光硬化性樹脂組成物及有機溶媒的樹脂組成物溶液,並且特徵在於, 所述光硬化性樹脂組成物含有:相對於樹脂組成物整體,為5質量%~95質量%的折射率為1.2~1.8、平均粒徑為25 nm~300 nm且能夠分散於所述有機溶媒中的無機填料;相對於樹脂組成物整體,為1.54質量%~95質量%的光硬化性透明樹脂;相對於所述光硬化性透明樹脂與所述光聚合性單體的合計量,為0質量%~50質量%的光聚合性單體;以及相對於所述光硬化性透明樹脂與所述光聚合性單體的合計量100質量份,為0質量份~30質量份的光聚合引發劑,並且 相對於所述光硬化性樹脂組成物與所述有機溶媒的合計量,所述有機溶媒的含量為80質量%~99.9質量%, 溶液黏度為1 mPa·sec~4 mPa·sec。A resin composition solution for an anti-reflection layer, which is a photocurable resin composition capable of forming a resin composition layer for an anti-reflection layer with an average thickness of 0.01 μm to 1 μm and a surface roughness of 40 nm to 200 nm, and A resin composition solution of an organic solvent, and is characterized in that: The photocurable resin composition contains: 5% to 95% by mass relative to the entire resin composition, a refractive index of 1.2 to 1.8, an average particle diameter of 25 nm to 300 nm, and can be dispersed in the organic solvent Inorganic filler; relative to the entire resin composition, 1.54% to 95% by mass of the photocurable transparent resin; relative to the total amount of the photocurable transparent resin and the photopolymerizable monomer, it is 0 Mass% to 50% by mass of the photopolymerizable monomer; and 0 to 30 parts by mass of photopolymerization initiation relative to 100 parts by mass of the total amount of the photocurable transparent resin and the photopolymerizable monomer Agent, and The content of the organic solvent is 80% by mass to 99.9% by mass relative to the total amount of the photocurable resin composition and the organic solvent, The viscosity of the solution is 1 mPa·sec~4 mPa·sec. 一種防反射層用樹脂組成物溶液,其為含有能夠形成平均厚度為0.01 μm~1 μm且表面粗糙度為40 nm~200 nm的防反射層的熱硬化性樹脂組成物及有機溶媒的樹脂組成物溶液,並且特徵在於, 所述熱硬化性樹脂組成物含有:相對於樹脂組成物整體,為5質量%~95質量%的折射率為1.2~1.8、平均粒徑為25 nm~300 nm且能夠分散於所述有機溶媒中的無機填料;相對於樹脂組成物整體,為3.2質量%~94.06質量%的熱硬化性透明樹脂與熱硬化性單體中的至少一種;以及相對於所述熱硬化性透明樹脂與所述熱硬化性單體的合計量100質量份,為1質量份~25質量份的熱硬化劑,並且 相對於所述防反射層用樹脂組成物與所述有機溶媒的合計量,所述有機溶媒的含量為80質量%~99.9質量%, 溶液黏度為1 mPa·sec~4 mPa·sec。A resin composition solution for an anti-reflection layer, which is a resin composition containing a thermosetting resin composition capable of forming an anti-reflection layer with an average thickness of 0.01 μm to 1 μm and a surface roughness of 40 nm to 200 nm and an organic solvent Substance solution, and is characterized by, The thermosetting resin composition contains: 5% to 95% by mass relative to the entire resin composition, a refractive index of 1.2 to 1.8, an average particle size of 25 nm to 300 nm, and can be dispersed in the organic solvent Inorganic filler in the resin composition; at least one of a thermosetting transparent resin and a thermosetting monomer of 3.2% to 94.06% by mass relative to the entire resin composition; and relative to the thermosetting transparent resin and the The total amount of the thermosetting monomer is 100 parts by mass, which is 1 part by mass to 25 parts by mass of the thermosetting agent, and The content of the organic solvent is 80% by mass to 99.9% by mass relative to the total amount of the resin composition for the antireflection layer and the organic solvent, The viscosity of the solution is 1 mPa·sec~4 mPa·sec.
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