TW202038391A - Package stack structure, manufacturing method and carrier module thereof - Google Patents
Package stack structure, manufacturing method and carrier module thereof Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 212
- 239000011368 organic material Substances 0.000 claims abstract description 135
- 239000010410 layer Substances 0.000 claims description 136
- 238000004806 packaging method and process Methods 0.000 claims description 10
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- 235000012431 wafers Nutrition 0.000 abstract 1
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- 229920001721 polyimide Polymers 0.000 description 8
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
- H01L2924/15172—Fan-out arrangement of the internal vias
- H01L2924/15174—Fan-out arrangement of the internal vias in different layers of the multilayer substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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Abstract
Description
本發明係關於一種封裝製程,特別是關於一種封裝堆疊結構及其製法與載板組件。 The present invention relates to a packaging process, in particular to a packaging stack structure and its manufacturing method and carrier assembly.
隨著近年來可攜式電子產品的蓬勃發展,各類相關產品亦逐漸朝向高密度、高性能以及輕、薄、短、小之趨勢發展。 With the vigorous development of portable electronic products in recent years, various related products have gradually developed toward the trend of high density, high performance, and light, thin, short, and small.
如第1圖所示,係為習知電子裝置1的剖視示意圖。該電子裝置1包括一如電路板之母板1b及安裝於該母板1b上之電子封裝件1a。該電子封裝件1a係包含一封裝基板11、利用複數導電凸塊100覆晶結合該封裝基板11之半導體晶片10、及固定該半導體晶片10且包覆該些導電凸塊100之底膠12。該電子封裝件1a之封裝基板11係以複數銲球13接置於該母板1b上。
As shown in FIG. 1, it is a schematic cross-sectional view of the conventional
於半導體技術的發展中,因覆晶封裝製程中之半導體晶片10(或該電子封裝件1a)之尺寸係有愈來愈大的趨勢,因而造成該半導體晶片10於封裝後會因應力集中而在各角落形成的晶片角落應力(Die Corner Stress)也愈來愈高,致使其與該底膠12之間會產生強大的應力,如第1圖所示之虛線圓圈處,導致該半導體晶片10會沿角落處發生破裂(Crack)。為解決此問題,業界一般使用超低(Ultra low)熱膨脹係數(Coefficient of Thermal Expansion,簡稱CTE)之絕
緣基材作為該封裝基板11之板體,如銅箔複合材(copper clad laminate,簡稱CCL)、ABF(Ajinomoto Build-up Film)、預浸材(Prepreg,簡稱PP)、防焊層(Solder Mask,簡稱SM)等之選材,以降低晶片角落應力(Die Corner Stress)。
In the development of semiconductor technology, the size of the semiconductor chip 10 (or the electronic package 1a) in the flip-chip packaging process tends to be larger and larger, which results in the
惟,習知電子裝置1中,該母板1b的板材的CTE並未配合該封裝基板11變小,造成該封裝基板11與該母板1b之間因CTE不匹配(mismatch)而相分離,進而存在該銲球13之連接可靠度(Reliability)之問題,造成該封裝基板11無法有效電性連接該母板1b(如斷路)或無法通過可靠度測試(如未完全接合),致使產品之良率不佳。
However, in the conventional
再者,因該封裝基板11之尺寸會依據晶片數量需求增加而愈來愈大,且其層數亦愈來愈高,故該封裝基板11之製程良率也隨之降低(即層數越多,誤差越大),因而造成該封裝基板11之製作成本遽增。例如,以十層線路層之封裝基板11為例,每一層之線路層之製作良率約為95%,則十層之線路層之封裝基板11之良率則為59.8%(即0.9510),故以現有製程難以完成該封裝基板11之製作,恐需重新規劃製程,因而大幅增加製程難度。
Furthermore, because the size of the
因此,如何克服上述習知技術的種種問題,實已成目前亟欲解決的課題。 Therefore, how to overcome the various problems of the above-mentioned conventional technology has become an urgent problem to be solved at present.
鑑於上述習知技術之缺失,本發明係提供一種封裝堆疊結構,係包括:至少一電子元件;以及一具有複數線路層之載板組件,係包含有一具有第一線路部之第一有機材基板以及至少一具有第二線路部之第二有機材基板,且該第一有機材基板藉由複數支撐體堆疊於該第二有機材基板上,其中,用以 電性連接該電子元件之該複數線路層之層數係分配於該第一線路部及該第二線路部中,且該電子元件接置於該第一有機材基板上並電性連接該複數線路層。 In view of the above-mentioned deficiencies in the prior art, the present invention provides a package stack structure, which includes: at least one electronic component; and a carrier assembly with a plurality of circuit layers, including a first organic substrate with a first circuit portion And at least one second organic material substrate with a second circuit portion, and the first organic material substrate is stacked on the second organic material substrate by a plurality of supports, wherein The number of layers of the plurality of circuit layers that are electrically connected to the electronic component is distributed among the first circuit portion and the second circuit portion, and the electronic component is connected to the first organic substrate and electrically connected to the plurality Line layer.
本發明復提供一種封裝堆疊結構之製法,係包括:提供一具有第一線路部之第一有機材基板及至少一具有第二線路部之第二有機材基板;接置至少一電子元件於該第一有機材基板上;以及將該第一有機材基板藉由複數支撐體堆疊於該第二有機材基板上,以構成具有複數線路層之載板組件,並令該電子元件電性連接該複數線路層,其中,用以電性連接該電子元件之該複數線路層之層數係分配於該第一線路部及該第二線路部中。 The present invention further provides a method for manufacturing a package stack structure, which includes: providing a first organic substrate with a first circuit portion and at least one second organic substrate with a second circuit portion; connecting at least one electronic component to the And stacking the first organic material substrate on the second organic material substrate through a plurality of supports to form a carrier assembly with a plurality of circuit layers, and the electronic component is electrically connected to the A plurality of circuit layers, wherein the number of layers of the plurality of circuit layers used to electrically connect the electronic component is allocated to the first circuit part and the second circuit part.
前述之封裝堆疊結構及其製法中,該第一線路部之線路層之層數係不同於該第二線路部之線路層之層數。 In the aforementioned package stack structure and its manufacturing method, the number of circuit layers of the first circuit portion is different from the number of circuit layers of the second circuit portion.
前述之封裝堆疊結構及其製法中,該第一線路部之線路層之層數係相同於該第二線路部之線路層之層數。 In the aforementioned package stack structure and its manufacturing method, the number of circuit layers of the first circuit portion is the same as the number of circuit layers of the second circuit portion.
前述之封裝堆疊結構及其製法中,復包括設置散熱件於該第一有機材基板上。 In the aforementioned package stack structure and its manufacturing method, it further includes disposing a heat sink on the first organic substrate.
前述之封裝堆疊結構及其製法中,該第一有機材基板係與複數該第二有機材基板相堆疊,且各該第二有機材基板之間係藉由複數支撐件相堆疊。 In the aforementioned package stack structure and its manufacturing method, the first organic material substrate is stacked with a plurality of the second organic material substrates, and each of the second organic material substrates is stacked by a plurality of supports.
前述之封裝堆疊結構及其製法中,該支撐體係電性連接該第一有機材基板與第二有機材基板。 In the aforementioned package stack structure and its manufacturing method, the support system is electrically connected to the first organic material substrate and the second organic material substrate.
前述之封裝堆疊結構及其製法中,復包括將該第二有機材基板藉由複數導電元件堆疊於一電路板上。例如,該導電元件係電性連接該電路板與該第二有機材基板,且該第二有機材基板之熱膨脹係數介於該電路板之熱膨脹係數與該第一有機材基板之熱膨脹係數之間。另外,該第二有機材基板之熱膨脹係數不同於該電路板之熱膨脹係數。 The aforementioned package stack structure and its manufacturing method further include stacking the second organic material substrate on a circuit board through a plurality of conductive elements. For example, the conductive element is electrically connected to the circuit board and the second organic substrate, and the thermal expansion coefficient of the second organic substrate is between the thermal expansion coefficient of the circuit board and the thermal expansion coefficient of the first organic substrate . In addition, the thermal expansion coefficient of the second organic substrate is different from the thermal expansion coefficient of the circuit board.
前述之封裝堆疊結構及其製法中,該第一有機材基板之熱膨脹係數不同於該第二有機材基板之熱膨脹係數。 In the aforementioned package stack structure and its manufacturing method, the thermal expansion coefficient of the first organic substrate is different from the thermal expansion coefficient of the second organic substrate.
本發明另提供一種載板組件,其配置有複數線路層,該載板組件係包括:第一有機材基板,係具有第一線路部;以及第二有機材基板,係具有第二線路部,且該第一有機材基板藉由複數支撐體堆疊於該第二有機材基板上,其中,該複數線路層之層數係分配於該第一線路部及該第二線路部中。 The present invention also provides a carrier board assembly configured with a plurality of circuit layers. The carrier board assembly includes: a first organic material substrate having a first circuit portion; and a second organic material substrate having a second circuit portion, And the first organic material substrate is stacked on the second organic material substrate by a plurality of supports, wherein the number of layers of the plurality of circuit layers is distributed among the first circuit part and the second circuit part.
前述之載板組件中,該第一線路部之線路層之層數係不同於該第二線路部之線路層之層數。 In the aforementioned carrier board assembly, the number of circuit layers of the first circuit portion is different from the number of circuit layers of the second circuit portion.
前述之載板組件中,該第一線路部之線路層之層數係相同於該第二線路部之線路層之層數。 In the aforementioned carrier board assembly, the number of circuit layers of the first circuit portion is the same as the number of circuit layers of the second circuit portion.
前述之載板組件中,該第一有機材基板係與複數該第二有機材基板相堆疊,且各該第二有機材基板之間係藉由複數支撐件相堆疊。進一步,復包括形成於各該第二有機材基板之間的包覆層,其包覆該複數支撐件。 In the aforementioned carrier assembly, the first organic material substrate is stacked with a plurality of the second organic material substrates, and each of the second organic material substrates is stacked by a plurality of supports. Further, the compound includes a coating layer formed between each of the second organic material substrates, which covers the plurality of support members.
前述之載板組件中,該支撐體係電性連接該第一有機材基板與第二有機材基板。 In the aforementioned carrier assembly, the support system is electrically connected to the first organic material substrate and the second organic material substrate.
前述之載板組件中,該第一有機材基板之熱膨脹係數不同於該第二有機材基板之熱膨脹係數。 In the aforementioned carrier assembly, the thermal expansion coefficient of the first organic material substrate is different from the thermal expansion coefficient of the second organic material substrate.
前述之載板組件中,復包括包覆該複數支撐體的包覆層。 The aforementioned carrier assembly includes a coating layer covering the plurality of supports.
由上可知,本發明之封裝堆疊結構及其製法與載板組件中,主要藉由將預計層數之線路層分別佈設於該第一與第二有機材基板中,故相較於習知技術,本發明可藉由該第二有機材基板分散熱應力,以避免該第一有機材基板與該電路板之間因CTE不匹配而相分離之問題,令該第二有機材基板能有效電性連接該電路板或能通過可靠度測試,進而提高產品之良率。 It can be seen from the above that, in the package stack structure and its manufacturing method and carrier assembly of the present invention, the expected number of circuit layers are respectively arranged in the first and second organic substrates, which is compared with the conventional technology. In the present invention, the second organic material substrate can disperse thermal stress to avoid the problem of phase separation between the first organic material substrate and the circuit board due to CTE mismatch, so that the second organic material substrate can effectively The circuit board may be able to pass the reliability test if it is connected to the circuit board, thereby increasing the yield of the product.
再者,即使線路層之層數愈來愈高,仍可藉由將預計層數之線路層分別佈設於該第一與第二有機材基板中,以提升製程良率,故能有效降低製作成本。 Furthermore, even if the number of circuit layers is getting higher and higher, the expected number of circuit layers can still be laid on the first and second organic substrates respectively to increase the process yield and effectively reduce the production cost.
又,藉由該第一與第二有機材基板之CTE不相同,以令該封裝堆疊結構之CTE逐步變化,而避免該封裝堆疊結構因熱應力變化過大而發生翹曲之問題。 In addition, the CTE of the first and second organic substrates is different, so that the CTE of the package stack structure is gradually changed, and the problem of warping of the package stack structure due to excessive thermal stress changes is avoided.
1‧‧‧電子裝置 1‧‧‧Electronic device
1a‧‧‧電子封裝件 1a‧‧‧Electronic package
1b‧‧‧母板 1b‧‧‧Motherboard
10‧‧‧半導體晶片 10‧‧‧Semiconductor chip
100‧‧‧導電凸塊 100‧‧‧Conductive bump
11‧‧‧封裝基板 11‧‧‧Packaging substrate
12,202‧‧‧底膠 12,202‧‧‧ Primer
13‧‧‧銲球 13‧‧‧Solder ball
2,3‧‧‧封裝堆疊結構 2,3‧‧‧Package stack structure
2a,3a,4a,4b‧‧‧載板組件 2a, 3a, 4a, 4b‧‧‧Carrier board assembly
20‧‧‧電子元件 20‧‧‧Electronic components
20a‧‧‧作用面 20a‧‧‧working surface
20b‧‧‧非作用面 20b‧‧‧Inactive surface
200‧‧‧電極墊 200‧‧‧electrode pad
201‧‧‧導電凸塊 201‧‧‧Conductive bump
21‧‧‧第一有機材基板 21‧‧‧The first organic substrate
21a‧‧‧第一表面 21a‧‧‧First surface
21b‧‧‧第二表面 21b‧‧‧Second surface
21’‧‧‧第一線路部 21’‧‧‧First Circuit Department
210‧‧‧第一絕緣層 210‧‧‧First insulation layer
211‧‧‧第一線路層 211‧‧‧First circuit layer
22‧‧‧第二有機材基板 22‧‧‧Second organic substrate
22a‧‧‧第一側 22a‧‧‧First side
22b‧‧‧第二側 22b‧‧‧Second side
22’‧‧‧第二線路部 22’‧‧‧Second Circuit Department
220‧‧‧第二絕緣層 220‧‧‧Second insulating layer
221‧‧‧第二線路層 221‧‧‧Second circuit layer
23‧‧‧散熱件 23‧‧‧Radiator
23a‧‧‧結合層 23a‧‧‧Combination layer
23b‧‧‧黏著層 23b‧‧‧Adhesive layer
230‧‧‧片體 230‧‧‧sheet
231‧‧‧腳部 231‧‧‧Foot
24‧‧‧支撐體 24‧‧‧Support
25‧‧‧導電元件 25‧‧‧Conductive element
26‧‧‧電路板 26‧‧‧Circuit board
30‧‧‧支撐件 30‧‧‧Support
40‧‧‧包覆層 40‧‧‧Coating
S‧‧‧空曠空間 S‧‧‧Empty Space
第1圖係為習知電子裝置之剖面示意圖。 Figure 1 is a schematic cross-sectional view of a conventional electronic device.
第2A至2E圖係為本發明之封裝堆疊結構之製法之剖面示意圖。 2A to 2E are schematic cross-sectional views of the manufacturing method of the package stack structure of the present invention.
第3圖係為本發明之封裝堆疊結構之另一實施例之剖面示意圖。 FIG. 3 is a schematic cross-sectional view of another embodiment of the package stack structure of the present invention.
第4A及4B圖係為本發明之載板組件之不同實施例之剖面示意圖。 4A and 4B are schematic cross-sectional views of different embodiments of the carrier assembly of the present invention.
以下藉由特定的具體實施例說明本發明之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點及功效。 The following specific examples illustrate the implementation of the present invention. Those familiar with the art can easily understand the other advantages and effects of the present invention from the contents disclosed in this specification.
須知,本說明書所附圖式所繪示之結構、比例、大小等,均僅用以配合說明書所揭示之內容,以供熟悉此技藝之人士之瞭解與閱讀,並非用以限定本發明可實施之限定條件,故不具技術上之實質意義,任何結構之修飾、比例關係之改變或大小之調整,在不影響本發明所能產生之功效及所能達成之目的下,均應仍落在本發明所揭示之技術內容得能涵蓋之範圍內。同時,本說明書中所引用之如“第一”、“第二”、及“一”等之用語,亦僅為便於敘述 之明瞭,而非用以限定本發明可實施之範圍,其相對關係之改變或調整,在無實質變更技術內容下,當亦視為本發明可實施之範疇。 It should be noted that the structures, proportions, sizes, etc. shown in the drawings in this manual are only used to match the contents disclosed in the manual for the understanding and reading of those familiar with the art, and are not intended to limit the implementation of the present invention Therefore, it does not have any technical significance. Any structural modification, proportional relationship change, or size adjustment should still fall within the scope of the present invention without affecting the effects and objectives that can be achieved. The technical content disclosed by the invention can be covered. At the same time, terms such as "first", "second", and "one" cited in this specification are only for ease of description It is clear that it is not used to limit the scope of implementation of the present invention, and the change or adjustment of the relative relationship shall be regarded as the scope of the implementation of the present invention without substantially changing the technical content.
第2A至2E圖係為本發明之封裝堆疊結構2之製法之剖面示意圖。
2A to 2E are schematic cross-sectional views of the manufacturing method of the
如第2A圖所示,提供一具有第一線路部21’之第一有機材基板21。
As shown in Fig. 2A, a first
於本實施例中,該第一有機材基板21係為具有核心層或無核心層(coreless)之線路結構,如封裝基板(substrate),其定義有相對之第一表面21a與第二表面21b,且該第一線路部21’係包含至少一第一絕緣層210與設於該第一絕緣層210上之第一線路層211。例如,以線路重佈層(redistribution layer,簡稱RDL)方式形成扇出(fan out)型第一線路層211,其材質係為銅,且形成該第一絕緣層210之材質係為如聚對二唑苯(Polybenzoxazole,簡稱PBO)、聚醯亞胺(Polyimide,簡稱PI)、預浸材(Prepreg,簡稱PP)等之介電材或如綠漆、石墨之防銲材。
In this embodiment, the first
如第2B圖所示,接置至少一電子元件20於該第一有機材基板21上,且令該電子元件20電性連接該第一線路部21’之第一線路層211。
As shown in FIG. 2B, at least one
於本實施例中,該電子元件20例如為封裝件、主動元件、被動元件或其三者組合等,其中,該封裝件係例如晶片級封裝(Chip Scale Package,簡稱CSP),該主動元件係例如半導體晶片,該被動元件係例如電阻、電容及電感。於本實施例中,該電子元件20係為主動元件,其具有相對之作用面20a與非作用面20b,該作用面20a具有複數電極墊200,使該些電極墊200藉由複數如銲錫材料之導電凸塊201以覆晶方式設於該第一有機材基板21之第一表面21a上且電性連接該第一線路層211,並以底膠202包覆該些導電凸塊201;或者,該電子元件20可以其非作用面20b設於該第一有機材基板21之第一表面21a上且該些電極墊200藉由複數銲線(圖略)以打線方式電性連接該第一線路層211;亦或,該電子元
件20可直接接觸該第一線路層211以電性連接該第一線路層211。然而,有關該電子元件20電性連接該第一有機材基板21之方式不限於上述。
In this embodiment, the
再者,有關該電子元件20之配置方式繁多,如設於該第一有機材基板21之第二表面21b,並無特別限制。
Furthermore, there are many ways of disposing the
如第2C圖所示,可選擇性設置一散熱件23於該第一有機材基板21之第一表面21a上。
As shown in FIG. 2C, a
於本實施例中,該散熱件23係為金屬構造並包含有片體230及腳部231,且以其片體230藉由結合層23a結合於該電子元件20之非作用面20b上,並使該散熱件23之腳部231藉由黏著層23b架設於該第一有機材基板21之第一表面21a(或第一線路層211)上。例如,該結合層23a係為導熱介面材(Thermal Interface Material,簡稱TIM)、導熱膠或其它適當材質,且該黏著層23b係為絕緣膠、導電膠或其它適當材質等。
In this embodiment, the
如第2D圖所示,將該第一有機材基板21藉由複數支撐體24堆疊於至少一具有第二線路部22’之第二有機材基板22上,且該第二有機材基板22未接置有晶片,並使該第一與第二有機材基板21,22之間呈現有空曠空間S。
As shown in FIG. 2D, the first
於本實施例中,該第二有機材基板22係為具有核心層或無核心層(coreless)之線路結構,如封裝基板(substrate),其定義有相對之第一側22a與第二側22b,以令該第一有機材基板21以其第二表面21b堆疊於該第二有機材基板22之第一側22a上,且該第二線路部22’係包含至少一第二絕緣層220與設於該第二絕緣層220上之第二線路層221。例如,以線路重佈層(redistribution layer,簡稱RDL)方式形成扇出(fan out)型第二線路層221,其材質係為銅,且形成該第二絕緣層220之材質係為如聚對二唑苯(Polybenzoxazole,簡稱PBO)、聚醯亞胺(Polyimide,簡稱PI)、預浸材(Prepreg,簡稱PP)等之介電材或如綠漆、石墨之防銲材。
In this embodiment, the second
再者,該第一有機材基板21之熱膨脹係數(Coefficient of Thermal Expansion,簡稱CTE)不同於(如小於)該第二有機材基板22之熱膨脹係數。例如,當該第一線路部21’之第一線路層211之層數相同於該第二線路部22’之第二線路層221之層數時,藉由形成該第一絕緣層210之材質不同於形成該第二絕緣層220之材質,以令該第一有機材基板21之熱膨脹係數不同於該第二有機材基板22之熱膨脹係數。
Furthermore, the coefficient of thermal expansion (CTE) of the first
或者,當形成該第一絕緣層210之材質相同於形成該第二絕緣層220之材質時,藉由該第一線路部21’之第一線路層211(或該第一絕緣層210)之層數不同於該第二線路部22’之第二線路層221(或該第二絕緣層220)之層數,以令該第一有機材基板21之熱膨脹係數不同於該第二有機材基板22之熱膨脹係數。
Alternatively, when the material for forming the first insulating
另外,該支撐體24係為銲球(solder ball)、銅核心球或如銅材或金材等之金屬件(如柱狀、塊狀或針狀)等,其電性連接該第一與第二有機材基板21,22。
In addition, the
如第2E圖所示,將該第二有機材基板22以其第二側22b藉由複數導電元件25接置於一電路板26上。
As shown in FIG. 2E, the second
於本實施例中,該電路板26之絕緣板體之材質係不同於該第一與第二絕緣層210,220之材質,且該第二有機材基板22之熱膨脹係數不同於(如小於)該電路板26之熱膨脹係數。
In this embodiment, the material of the insulating body of the
再者,該導電元件25係為銲球(solder ball)、銅核心球或如銅材或金材等之金屬件(如柱狀、塊狀或針狀)等,其電性連接該電路板26與該第二有機材基板22。
Furthermore, the
本發明之製法主要藉由將預計層數之線路層分別佈設於該第一有機材基板21與第二有機材基板22中,再將第一有機材基板21與第二有機材基
板22以組合方式(如堆疊)構成所需線路層數量之載板組件2a,且該第一有機材基板21與第二有機材基板22之CTE不相同,故相較於習知技術,本發明之製法於該電路板26之CTE維持不變之情況下,可藉由該第二有機材基板22緩衝該載板組件2a之整體熱膨脹變形量,以避免該載板組件2a與該電路板26之間因CTE不匹配而相分離之問題,即避免該導電元件25之連接可靠度之問題,因而該第二有機材基板22能有效電性連接該電路板26或該載板組件2a能通過可靠度測試,進而提高產品之良率。
The manufacturing method of the present invention is mainly by arranging the expected number of circuit layers on the first
再者,即使該載板組件2a之尺寸依據晶片數量需求增加而愈來愈大,致使其線路層之層數愈來愈高,仍可藉由將預計層數之線路層(第一與第二線路層211,221)分別佈設於該第一與第二有機材基板21,22中,以提升該載板組件2a之製程良率,故能有效降低該載板組件2a之製作成本。
Furthermore, even if the size of the
例如,以十層線路層之載板組件2a為例,可將七層之第一線路層211配置於該第一有機材基板21,而將三層之第二線路層221配置於該第二有機材基板22,若每一層之線路層之製作良率約為95%,則該第一有機材基板21之良率為68.8%(即0.957),而該第二有機材基板22之良率為85.7%(即0.953),故以現有製程即可完成該載板組件2a之製作,因而大幅降低製程成本。
For example, taking the
應可理解地,亦可將六層之第一線路層211配置於該第一有機材基板21,而將四層之第二線路層221配置於該第二有機材基板22;或者,可將五層之第一線路層211配置於該第一有機材基板21,而將五層之第二線路層221配置於該第二有機材基板22。因此,有關線路層之層數可依需求配置於該第一與第二有機材基板21,22中。
It should be understood that the six-layer
又,於該封裝堆疊結構2中,各板結構之排設可依CTE之大小依序,如由上而下依序為第一有機材基板21(CTE最小)、第二有機材基板22(CTE
介於第一有機材基板與電路板之間)及電路板26(CTE最大),以令CTE由上往下逐步變化,而避免因熱應力變化過大而發生翹曲之問題。
Moreover, in the
於另一實施例中,如第3圖所示之封裝堆疊結構3,亦可依良率需求,使該載板組件3a包含複數個第二有機材基板22,且各該第二有機材基板22之間係藉由複數支撐件30相堆疊。例如,各該第二有機材基板22之熱膨脹係數可相同或不相同,且該支撐件30係為銲球(solder ball)、銅核心球或如銅材或金材等之金屬件(如柱狀、塊狀或針狀)等,其電性連接該電路板26與各該第二有機材基板22。具體地,若各該第二有機材基板22之熱膨脹係數不相同時,各該第二有機材基板22之熱膨脹係數之數值可由第一有機材基板21之側朝向該電路板26之側依序增大。
In another embodiment, the package stack structure 3 as shown in FIG. 3 can also be configured such that the
因此,若以十層線路層之載板組件3a為例,可將兩層之第一線路層211配置於該第一有機材基板21,而將兩層之第二線路層221配置於四個第二有機材基板22,若每一層之線路層之製作良率約為95%,則該第一有機材基板21之良率為90.3%(即0.952),而各該第二有機材基板22之良率為90.3%(即0.952),故以現有製程即可完成該載板組件3a之製作,因而大幅降低製程成本。
Therefore, if the
本發明復提供一種封裝堆疊結構2,3,其包括:一第一有機材基板21、至少一電子元件20以及至少一第二有機材基板22。
The present invention further provides a
所述之第一有機材基板21係具有第一線路部21’。
The first
所述之電子元件20係接置於該第一有機材基板21上且電性連接該第一線路部21’。
The
所述之第二有機材基板22係具有第二線路部22’且供該第一有機材基板21藉由複數支撐體24堆疊於其上,其中,該第二有機材基板22未接置有晶片。
The second
於一實施例中,該第一線路部21’之線路層之層數係不同於該第二線路部22’之線路層之層數。 In one embodiment, the number of circuit layers of the first circuit portion 21' is different from the number of circuit layers of the second circuit portion 22'.
於一實施例中,該第一線路部21’之線路層之層數係相同於該第二線路部22’之線路層之層數。 In one embodiment, the number of circuit layers of the first circuit portion 21' is the same as the number of circuit layers of the second circuit portion 22'.
於一實施例中,該第一有機材基板21上係設有散熱件23。
In one embodiment, a
於一實施例中,該第一有機材基板21係與複數該第二有機材基板22相堆疊,且各該第二有機材基板22之間係藉由複數支撐件30相堆疊。
In one embodiment, the first
於一實施例中,該支撐體24係電性連接該第一與第二有機材基板21,22。
In one embodiment, the supporting
於一實施例中,所述之封裝堆疊結構2,3復包括一電路板26,係供該第二有機材基板22藉由複數導電元件25堆疊於其上。例如,該導電元件25係電性連接該電路板26與該第二有機材基板22。另外,該第二有機材基板22之熱膨脹係數不同於該電路板26之熱膨脹係數。
In one embodiment, the
於一實施例中,該第一有機材基板21之熱膨脹係數不同於該第二有機材基板22之熱膨脹係數。
In one embodiment, the thermal expansion coefficient of the first
請一併參見第4A及4B圖,本發明亦提供一種載板組件2a,3a,4a,4b,其配置有複數線路層,該載板組件2a,3a,4a,4b係包括:至少一第一有機材基板21以及至少一第二有機材基板22。
Please refer to Figures 4A and 4B together. The present invention also provides a
所述之第一有機材基板21係具有第一線路部21’。
The first
所述之第二有機材基板22係具有第二線路部22’,且該第一有機材基板21藉由複數支撐體24堆疊於該第二有機材基板22上,其中,該載板組件2a,3a,4a,4b之複數線路層之層數係分配於該第一線路部21’及該第二線路部22’中。
The second
於一實施例中,該第一線路部21’之線路層之層數係不同於該第二線路部22’之線路層之層數。 In one embodiment, the number of circuit layers of the first circuit portion 21' is different from the number of circuit layers of the second circuit portion 22'.
於一實施例中,該第一線路部21’之線路層之層數係相同於該第二線路部22’之線路層之層數。 In one embodiment, the number of circuit layers of the first circuit portion 21' is the same as the number of circuit layers of the second circuit portion 22'.
於一實施例中,該第一有機材基板21係與複數該第二有機材基板22相堆疊,且各該第二有機材基板22之間係藉由複數支撐件30相堆疊。進一步,所述之載板組件4b復包括形成於各該第二有機材基板22之間的包覆層40,其包覆該複數支撐件30。具體地,該包覆層40係為絕緣材,如聚醯亞胺(polyimide,簡稱PI)、乾膜(dry film)、環氧樹脂(epoxy)之封裝膠體或封裝材(molding compound)。
In one embodiment, the first
於一實施例中,該支撐體24係電性連接該第一有機材基板21與第二有機材基板22。
In one embodiment, the supporting
於一實施例中,該第一有機材基板21之熱膨脹係數不同於該第二有機材基板22之熱膨脹係數。
In one embodiment, the thermal expansion coefficient of the first
於一實施例中,所述之載板組件4b復包括包覆該複數支撐體24的包覆層40。具體地,該包覆層40係為絕緣材,如聚醯亞胺(PI)、乾膜、環氧樹脂之封裝膠體或封裝材。
In one embodiment, the
綜上所述,本發明之封裝堆疊結構及其製法與載板組件,係藉由將預計層數之線路層分別佈設於該第一與第二有機材基板中,且該第一與第二有機材基板之CTE不相同,故本發明能藉由該第二有機材基板分散熱應力,以避免該第一有機材基板與該電路板之間因CTE不匹配而相分離之問題,因而該第二有機材基板能有效電性連接該電路板或該第一及第二有機材基板能通過可靠度測試,進而提高產品之良率。 In summary, the package stack structure and its manufacturing method and carrier assembly of the present invention are achieved by arranging a predetermined number of circuit layers on the first and second organic substrates, and the first and second The CTE of the organic material substrate is different, so the present invention can use the second organic material substrate to disperse the thermal stress to avoid the problem of phase separation between the first organic material substrate and the circuit board due to CTE mismatch. The second organic material substrate can be effectively and electrically connected to the circuit board or the first and second organic material substrates can pass the reliability test, thereby improving the yield of the product.
再者,即使線路層之層數需求多,仍可藉由將預計層數之線路層分別佈設於多個第二有機材基板中,以提升各有機材基板之製程良率,故能有效降低各有機材基板之製作成本。 Furthermore, even if there is a large demand for the number of circuit layers, the expected number of circuit layers can still be arranged on multiple second organic substrates to increase the process yield of each organic substrate, which can effectively reduce The production cost of each organic substrate.
又,於該封裝堆疊結構中,有機材基板與電路板可依CTE之大小依序排設,以避免因熱應力變化過大而發生翹曲之問題。 In addition, in the package stack structure, the organic substrate and the circuit board can be arranged in sequence according to the size of the CTE to avoid the problem of warping due to excessive thermal stress changes.
上述實施例係用以例示性說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修改。因此本發明之權利保護範圍,應如後述之申請專利範圍所列。 The above-mentioned embodiments are used to exemplify the principles and effects of the present invention, but not to limit the present invention. Anyone who is familiar with the art can modify the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of patent application described later.
2‧‧‧封裝堆疊結構 2‧‧‧Package stack structure
2a‧‧‧載板組件 2a‧‧‧Carrier board assembly
20‧‧‧電子元件 20‧‧‧Electronic components
21‧‧‧第一有機材基板 21‧‧‧The first organic substrate
21’‧‧‧第一線路部 21’‧‧‧First Circuit Department
210‧‧‧第一絕緣層 210‧‧‧First insulation layer
211‧‧‧第一線路層 211‧‧‧First circuit layer
22‧‧‧第二有機材基板 22‧‧‧Second organic substrate
22b‧‧‧第二側 22b‧‧‧Second side
22’‧‧‧第二線路部 22’‧‧‧Second Circuit Department
220‧‧‧第二絕緣層 220‧‧‧Second insulating layer
221‧‧‧第二線路層 221‧‧‧Second circuit layer
23‧‧‧散熱件 23‧‧‧Radiator
25‧‧‧導電元件 25‧‧‧Conductive element
26‧‧‧電路板 26‧‧‧Circuit board
Claims (28)
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US16/538,286 US20200328142A1 (en) | 2019-04-09 | 2019-08-12 | Package stack structure, method for fabricating the same, and carrier component |
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